CN114270286A - Stage position control device and stage position control method - Google Patents
Stage position control device and stage position control method Download PDFInfo
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Abstract
Motion of a stage in a yaw direction in a gantry mechanism is suppressed. A stage position control device (1) for controlling the position of a stage in a gantry mechanism (100) is provided with: a Y-axis gravity center thrust command output unit (30) for outputting a first Y-axis gravity center thrust command for instructing the gravity center thrust of the Y1-axis drive system and the Y2-axis drive system; a Y-axis differential thrust command output unit (20) for outputting a first Y-axis differential thrust command indicating the differential thrust of the Y1-axis drive system and the Y2-axis drive system; a feedforward unit (11) that feedforward an X-axis position command (X) indicating an X-axis position and a Y-axis center-of-gravity position command (Y1) indicating a center-of-gravity position between a Y1 axis position and a Y2 axis position to the first Y-axis differential thrust command (F2) and outputs a second Y-axis differential thrust command (F2'); and a thrust conversion unit (50) that controls the position of the stage using the first Y-axis gravity center thrust command and the second Y-axis differential thrust command.
Description
Technical Field
The present invention relates to a stage position control device and a stage position control method for controlling the position of a stage.
Background
Conventionally, a gantry mechanism that moves a stage in a plane defined by two axes orthogonal to each other is known.
For example, patent document 1 discloses a stage position control method for suppressing a motion of a stage in a yaw direction (yaw direction) in a gantry mechanism.
The stage position control method disclosed in patent document 1 is a control method as follows: the position of the stage is detected, and information on the detected position of the stage is fed back to a command for moving the stage. Therefore, in this control method, the position of the stage can be controlled so that the motion of the stage in the yaw direction that occurs is suppressed. However, at a time point when the motion of the stage in the yaw direction does not occur, it is difficult to suppress the occurrence itself of the motion of the stage in the yaw direction.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open No. 2001-22448
Disclosure of Invention
Accordingly, an object of the present disclosure is to provide a stage position control device and a stage position control method that can suppress the motion of the stage in the yaw direction in the frame mechanism more than ever before.
A stage position control device according to an aspect of the present disclosure is a stage position control device for controlling a position of a stage in a rack mechanism, the rack mechanism including: a Y1 axis and a Y2 axis parallel to each other; an X axis perpendicular to the Y1 axis and the Y2 axis; and a stage whose position is determined based on a Y1 axis position which is a driving position in a Y1 axis driving system on a Y1 axis, a Y2 axis position which is a driving position in a Y2 axis driving system on a Y2 axis, and an X axis position which is a driving position in an X axis driving system on an X axis, the stage position control device including: a Y-axis center-of-gravity thrust command output unit that outputs a first Y-axis center-of-gravity thrust command indicating the center-of-gravity thrust of the Y1-axis drive system and the Y2-axis drive system; a Y-axis differential thrust command output unit that outputs a first Y-axis differential thrust command indicating differential thrust of the Y1-axis drive system and the Y2-axis drive system; a feedforward unit that feedforward an X-axis position command indicating an X-axis position and a Y-axis center position command indicating a center position of the Y1 axis position and the Y2 axis position to the first Y-axis differential thrust command and outputs a second Y-axis differential thrust command; and a thrust conversion unit that controls the position of the stage using the first Y-axis gravity thrust command and the second Y-axis differential thrust command.
A stage position control method according to an aspect of the present disclosure is a method for controlling a position of a stage in a gantry mechanism, the gantry mechanism including: a Y1 axis and a Y2 axis parallel to each other; an X axis perpendicular to the Y1 axis and the Y2 axis; and a stage whose position is determined based on a driving position in the Y1 axis driving system on the Y1 axis, that is, a Y1 axis position, a driving position in the Y2 axis driving system on the Y2 axis, that is, a Y2 axis position, and a driving position in the X axis driving system on the X axis, that is, an X axis position, in the stage position control method, a first Y-axis gravity center thrust command indicating gravity center thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, a first Y-axis differential thrust command indicating differential thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, an X-axis position command indicating an X-axis position and a Y-axis gravity center position command indicating a gravity center position of a Y1-axis position and a Y2-axis position are fed forward to the first Y-axis differential thrust command to calculate a second Y-axis differential thrust command, and the position of the stage is controlled using the first Y-axis gravity center thrust command and the second Y-axis differential thrust command.
According to the stage position control device and the stage position control method according to one aspect of the present disclosure, the movement of the stage in the yaw direction in the frame mechanism can be suppressed compared to the conventional art.
Drawings
Fig. 1 is a schematic diagram showing a configuration of a frame mechanism according to embodiment 1.
Fig. 2 is a block diagram showing the configuration of the stage position control device according to embodiment 1.
Fig. 3 is a schematic diagram showing an example of the inertia function calculated by the inertia function calculating unit according to embodiment 1.
Fig. 4 is a flowchart of the inertial function calculation process according to embodiment 1.
Fig. 5 is a flowchart of stage position control processing according to embodiment 1.
Fig. 6 is a block diagram showing the configuration of the stage position control device according to embodiment 2.
Detailed Description
(pass through to obtain one mode of the present disclosure)
As described above, in the stage position control method disclosed in patent document 1, it is difficult to suppress the occurrence of the motion of the stage in the yaw direction itself at a time point when the motion of the stage in the yaw direction is not generated in the frame mechanism.
Therefore, the inventors have conducted extensive studies and experiments to suppress the occurrence of the motion of the stage in the yaw direction itself at a time point when the motion of the stage in the yaw direction does not occur in the frame mechanism. The inventors have come to the following insights: the position command for instructing the position of the stage is fed forward to the thrust command for moving the stage, and the component for generating the motion of the stage in the yaw direction is reduced from the thrust command in advance, whereby the generation of the motion of the stage in the yaw direction can be suppressed at a time point when the motion of the stage in the yaw direction is not generated.
The present inventors have further conducted extensive studies and experiments based on this finding, and have conceived a stage position detection device and a stage position detection method according to one embodiment of the present disclosure described below.
A stage position control device according to an aspect of the present disclosure controls a position of a stage in a rack mechanism, the rack mechanism including: a Y1 axis and a Y2 axis parallel to each other; an X axis perpendicular to the Y1 axis and the Y2 axis; and a stage whose position is determined based on a Y1 axis position which is a driving position in a Y1 axis driving system on a Y1 axis, a Y2 axis position which is a driving position in a Y2 axis driving system on a Y2 axis, and an X axis position which is a driving position in an X axis driving system on an X axis, the stage position control device including: a Y-axis center-of-gravity thrust command output unit that outputs a first Y-axis center-of-gravity thrust command indicating the center-of-gravity thrust of the Y1-axis drive system and the Y2-axis drive system; a Y-axis differential thrust command output unit that outputs a first Y-axis differential thrust command indicating differential thrust of the Y1-axis drive system and the Y2-axis drive system; a feedforward unit that feedforward an X-axis position command indicating an X-axis position and a Y-axis center position command indicating a center position of the Y1 axis position and the Y2 axis position to the first Y-axis differential thrust command and outputs a second Y-axis differential thrust command; and a thrust conversion unit that controls the position of the stage using the first Y-axis gravity thrust command and the second Y-axis differential thrust command.
According to the stage position control device configured as described above, the X-axis position command and the Y-axis gravity center position command for instructing the position of the stage can be fed forward to the first Y-axis differential thrust command that may include a component for causing the motion of the stage in the yaw direction, and the second Y-axis differential thrust command in which the component for causing the motion of the stage in the yaw direction is reduced can be generated. The position of the stage is controlled using the generated second Y-axis differential thrust command. Therefore, according to the stage position control device having the above configuration, the movement of the stage in the yaw direction in the frame mechanism can be suppressed more than in the conventional art.
Further, the feedforward unit may store an inertia function indicating a relationship between an inertia difference, which is a difference between the inertia of the Y1-axis drive system and the inertia of the Y2-axis drive system, and the X-axis position, and calculate the inertia difference from the inertia function and the X-axis position indicated by the X-axis position command, and calculate the feedforward value to be fed forward to the first Y-axis difference thrust command from the Y-axis center-of-gravity position command and the calculated inertia difference.
Further, the Y-axis gravity center thrust command output unit may output the first Y-axis gravity center thrust command based on the Y-axis gravity center position command.
Further, the present invention may further include: a Y1 axis position detecting unit for detecting the Y1 axis position; and a Y2 shaft position detecting unit that detects a Y2 shaft position, the Y-axis gravity center command output unit outputs a first Y-axis gravity center command by receiving the Y-axis gravity center position as a feedback value, the Y-axis gravity center position indicating a gravity center position of the Y1 shaft position detected by the Y1 shaft position detecting unit and the Y2 shaft position detected by the Y2 shaft position detecting unit, the first Y-axis difference thrust command output unit outputs a first Y-axis difference thrust command by receiving a Y-axis difference position as a feedback value, the Y-axis difference position indicating a difference position between the Y1 shaft position detected by the Y1 shaft position detecting unit and the Y2 shaft position detected by the Y2 shaft position detecting unit.
Further, the thrust converting unit may calculate a Y1-axis drive system thrust command indicating a thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating a thrust of the Y2-axis drive system based on the first Y-axis gravity center thrust command and the second Y-axis differential thrust command, drive the Y1-axis drive system using the Y1-axis drive system thrust command, and drive the Y2-axis drive system using the Y2-axis drive system thrust command, thereby controlling the position of the stage.
Further, the present invention may further include: an X-axis position detection unit that detects an X-axis position; and a feedback unit that feeds back the difference position and the X-axis position detected by the X-axis position detection unit to the first Y-axis gravity center thrust command and outputs a second Y-axis gravity center thrust command, wherein the thrust conversion unit controls the position of the stage by using the second Y-axis gravity center thrust command.
The feedback unit may store an inertia function, calculate an inertia difference from the inertia function and the X-axis position detected by the X-axis position detecting unit, and calculate a feedback value to be fed back to the first Y-axis gravity center thrust command from the difference position and the calculated inertia difference.
Further, the thrust converting unit may calculate a Y1-axis drive system thrust command indicating a thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating a thrust of the Y2-axis drive system based on the second Y-axis gravity center thrust command and the second Y-axis differential thrust command, drive the Y1-axis drive system using the Y1-axis drive system thrust command, and drive the Y2-axis drive system using the Y2-axis drive system thrust command, thereby controlling the position of the stage.
Further, the present invention may further include: a Y1 axis position detecting unit for detecting the Y1 axis position; a Y2 axis position detecting unit for detecting the Y2 axis position; and an inertia function calculation section that outputs a Y1-axis drive system thrust command indicating thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating thrust of the Y2-axis drive system, based on (a) a Y1-axis drive system thrust command and a Y2-axis drive system thrust command that are output when the position of the stage is determined in accordance with the first X-axis position, (b) a Y1-axis position detected by the Y1-axis position detection section and a Y2-axis position detected by the Y2-axis position detection section when the position of the stage is determined in accordance with the first X-axis position, (c) a Y1-axis drive system thrust command and a Y2-axis drive system thrust command that are output when the position of the stage is determined in accordance with the second X-axis position, and (d) a Y1-axis position detected by the Y1-axis position detection section and a Y2-axis position detection section 2 detected when the position of the stage is determined in accordance with the second X-axis position, to calculate the inertial function.
A stage position control method according to an aspect of the present disclosure is a method for controlling a position of a stage in a gantry mechanism, the gantry mechanism including: a Y1 axis and a Y2 axis parallel to each other; an X axis perpendicular to the Y1 axis and the Y2 axis; and a stage whose position is determined based on a driving position in the Y1 axis driving system on the Y1 axis, that is, a Y1 axis position, a driving position in the Y2 axis driving system on the Y2 axis, that is, a Y2 axis position, and a driving position in the X axis driving system on the X axis, that is, an X axis position, in the stage position control method, a first Y-axis gravity center thrust command indicating gravity center thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, a first Y-axis differential thrust command indicating differential thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, an X-axis position command indicating an X-axis position and a Y-axis gravity center position command indicating a gravity center position of a Y1-axis position and a Y2-axis position are fed forward to the first Y-axis differential thrust command to calculate a second Y-axis differential thrust command, and the position of the stage is controlled using the first Y-axis gravity center thrust command and the second Y-axis differential thrust command.
According to the stage position control method configured as described above, the X-axis position command and the Y-axis gravity center position command for instructing the position of the stage can be fed forward to the first Y-axis differential thrust command that may include a component for causing the motion of the stage in the yaw direction, and the second Y-axis differential thrust command in which the component for causing the motion of the stage in the yaw direction is reduced can be generated. The position of the stage is controlled using the generated second Y-axis differential thrust command. Therefore, according to the stage position control method configured as described above, the movement of the stage in the yaw direction in the frame mechanism can be suppressed more than in the conventional art.
Next, a specific example of a stage position control device according to an embodiment of the present disclosure will be described with reference to the drawings. The embodiments described below are all illustrative or specific examples. The numerical values, shapes, materials, constituent elements, arrangement positions of constituent elements, connection modes, and the like shown in the following embodiments are examples, and the present disclosure is not limited thereto. Further, among the components of the following embodiments, components not described in the independent claims representing the uppermost concept will be described as arbitrary components.
The drawings are schematic and not necessarily strictly illustrated. In the drawings, substantially the same components are denoted by the same reference numerals, and redundant description may be omitted or simplified.
In the drawings used in the following description of the embodiments, a coordinate system may be shown. The z-direction in the coordinate system is the direction perpendicular to the drawing sheet. The x-direction and the y-direction are directions orthogonal to each other in a plane perpendicular to the z-direction.
(embodiment mode 1)
Next, a stage position control device according to embodiment 1 will be described with reference to the drawings. The stage position control device is a device for controlling the position of the stage of the gantry mechanism.
Fig. 1 is a schematic diagram showing the configuration of a rack mechanism 100 according to embodiment 1. The rack mechanism 100 has a stage whose position is controlled by a stage position control device.
As shown in fig. 1, the gantry mechanism 100 includes a Y1 axis 110, a Y2 axis 120, an X axis 130, a stage 140, a first X axis support 135, a second X axis support 136, a Y1 axis drive system 111, a Y2 axis drive system 121, and an X axis drive system 131.
The Y1 axis 110 and the Y2 axis 120 are axes extending in the Y direction shown in fig. 1, respectively. That is, the Y1 axis 110 and the Y2 axis 120 are axes parallel to each other. The Y1 axis 110 and the Y2 axis 120 are implemented by, for example, a quadrangular prism made of metal extending in the Y direction shown in fig. 1.
The X-axis 130 is an axis extending in the X-direction shown in fig. 1. That is, the X axis 130 is perpendicular to the Y1 axis 110 and the Y2 axis 120. The X axis 130 is implemented by, for example, a metal quadrangular prism extending in the X direction shown in fig. 1.
The first X-axis support 135 is a support member that supports the X-axis 130 at one end of the X-axis 130. The first X-axis support 135 is implemented by, for example, metal.
The second X-axis support 136 is a support member that supports the X-axis 130 at the other end of the X-axis 130. The second X-axis support 136 is implemented by metal, for example.
The Y1-axis drive system 111 is disposed on the Y1 axis 110, and is a drive system that drives the first X-axis support unit 135 so as to be able to move straight in the Y direction shown in fig. 1. The Y1 axis drive system 111 is implemented, for example, by a linear motor capable of moving in the Y direction shown in fig. 1. Alternatively, the Y1 axis drive system 111 is implemented by, for example, a rotary motor and a ball screw extending in the Y direction shown in fig. 1.
The Y2-axis drive system 121 is disposed on the Y2 axis 120, and is a drive system that drives the second X-axis support 136 to be able to move straight in the Y direction shown in fig. 1. The Y2 axis drive system 121 is implemented, for example, by a linear motor capable of moving in the Y direction shown in fig. 1. Alternatively, the Y2 axis drive system 121 is implemented by, for example, a rotary motor and a ball screw extending in the Y direction shown in fig. 1.
The stage 140 is a flat plate. The stage 140 is realized by a metal plate, for example.
The X-axis drive system 131 is disposed on the X-axis 130, and is a drive system that drives the stage 140 so as to be able to move straight in the X-direction shown in fig. 1. The X drive system 131 is realized by, for example, a linear motor capable of moving in the X direction shown in fig. 1. Alternatively, the X-axis drive system 131 is implemented by, for example, a rotary motor and a ball screw extending in the X-direction shown in fig. 1.
The Y1-axis drive system 111 and the Y2-axis drive system 121 translationally drive the first X-axis support 135 and the second X-axis support 136, thereby driving the X-axis 130 to be slidable in the Y direction shown in fig. 1. In addition, as described above, the X-axis drive system 131 drives the stage to be able to move straight in the X direction shown in fig. 1. Thereby, the carriage mechanism 100 can move the stage 140 within a plane defined by the X direction and the Y direction shown in fig. 1 to a position determined according to the driving position in the Y1-axis driving system 111, i.e., the Y1-axis position, the driving position in the Y2-axis driving system 121, i.e., the Y2-axis position, and the driving position in the X-axis driving system 131, i.e., the X-axis position.
In the gantry mechanism 100, the inertia of the Y1-axis drive system 111 and the inertia of the Y2-axis drive system 121 vary depending on the position of the stage 140 on the X-axis 130. Therefore, when the position of the stage 140 on the X axis 130 is the first X axis position and when the position of the stage 140 on the X axis 130 is the second X axis position, even if the same thrust is applied to the Y1 axis drive system 111, the drive speeds of the first X axis support 135 driven by the Y1 axis drive system 111 differ from each other. Similarly, when the position of the stage 140 on the X axis 130 is the first X axis position and when the position of the stage 140 on the X axis 130 is the second X axis position, even if the same thrust is applied to the Y2 axis drive system 121, the drive speeds of the second X axis support 136 driven by the Y2 axis drive system 121 are different from each other.
In the gantry mechanism 100, when the driving speed of the first X-axis support 135 driven by the Y1 axis drive system 111 and the driving speed of the second X-axis support 136 driven by the Y2 axis drive system 121 are different from each other, the stage 140 moves in the yaw direction, which is the rotational direction in the z direction shown in fig. 1. In order to suppress this yaw-directional motion, it is necessary to suppress the difference between the drive speed of the first X-axis support section 135 driven by the Y1-axis drive system 111 and the drive speed of the second X-axis support section 136 driven by the Y2-axis drive system 121.
Fig. 2 is a block diagram showing the configuration of the stage position control device 1 according to embodiment 1. However, fig. 2 does not show all the components of the stage position control device 1. Fig. 2 illustrates components for outputting a Y1-axis drive system thrust command for instructing the thrust for driving the Y1-axis drive system 111 and components for outputting a Y2-axis drive system thrust command for instructing the thrust for driving the Y2-axis drive system 121, among the components of the stage position control apparatus 1. On the other hand, not shown in fig. 2 are components for outputting an X-axis drive system thrust command for instructing a thrust for driving the X-axis drive system 131 among the components of the stage position control device 1. However, the stage position control device 1 includes components, not shown in fig. 2, for outputting an X-axis drive system thrust command for instructing a thrust for driving the X-axis drive system 131.
As shown in fig. 2, the stage position control device 1 includes a feedforward section 10, a Y-axis differential thrust command output section 20, a Y-axis gravity thrust command output section 30, a Y1 axis position detection section 41, a Y2 axis position detection section 42, an X-axis position detection section 43, a thrust conversion section 50, an inertia function calculation section 60, a position conversion section 70, an X-axis position command acquisition section 81, a Y-axis gravity position command acquisition section 82, and a phase delay compensation section 83.
The Y1 axis position detecting unit 41 detects the Y1 axis position, which is the driving position in the Y1 axis driving system 111. The Y1 shaft position detecting unit 41 is implemented by an encoder provided in a linear motor or a rotary motor of the Y1 shaft drive system 111, for example. Hereinafter, the Y1 axis position is referred to as Y1. The first differential of the time of the Y1 axis position is called
[ numerical formula 1]
The second order differential of the time of the Y1 axis position is called
[ numerical formula 2]
The Y2 axis position detecting unit 42 detects a Y2 axis position which is a driving position in the Y2 axis driving system 121. The Y2 shaft position detecting unit 42 is implemented by an encoder provided in a linear motor or a rotary motor of the Y2 shaft drive system 121, for example. Hereinafter, the Y2 axis position is referred to as Y2. The first differential of the time of the Y2 axis position is called
[ numerical formula 3]
The second order differential of the time of the Y2 axis position is called
[ numerical formula 4]
The X-axis position detection unit 43 detects an X-axis position that is a driving position in the X-axis drive system 131. The X-axis position detection unit 43 is implemented by, for example, an encoder provided in a linear motor or a rotary motor of the X-axis drive system 131. Hereinafter, the X-axis position is referred to as X.
The X-axis position command acquiring unit 81 acquires an X-axis position command for instructing an X-axis position. The X-axis position command may be, for example, a function representing a relationship between the designated X-axis position and time, or a correspondence table in which the designated X-axis position and time are associated with each other.
The Y-axis center-of-gravity position command acquisition unit 82 acquires a Y-axis center-of-gravity position command indicating the center-of-gravity position of the Y1 axis position and the Y2 axis position. In this specification, the sum of the Y1 axis position and the Y2 axis position is referred to as a Y-axis barycentric position. Hereinafter, the Y-axis gravity center position is referred to as Y1. The relationship between Y1 and Y1 and Y2 is represented by the formula Y1 ═ Y1+ Y2. The Y-axis center of gravity position command may be, for example, a function indicating a relationship between the designated Y-axis center of gravity position and time, or a correspondence table in which the designated Y-axis center of gravity position and time are associated with each other.
The position conversion unit 70 calculates a Y-axis gravity center position indicating the sum of the Y1 axis position and the Y2 axis position and a Y-axis difference position indicating the difference between the Y1 axis position and the Y2 axis position, based on the Y1 axis position detected by the Y1 axis position detection unit 41 and the Y2 axis position detected by the Y2 axis position detection unit 42. In this specification, the difference between the Y1 axis position and the Y2 axis position is referred to as a Y axis difference position. Hereinafter, the Y axis difference position is referred to as Y2. The relationship between Y2 and Y1 and Y2 is represented by the formula Y2 ═ Y1-Y2.
The phase delay compensation unit 83 compensates for a phase difference between the Y-axis gravity center position indicated by the Y-axis gravity center position command acquisition unit 82 and the Y-axis gravity center position calculated by the position conversion unit 70 when the Y-axis gravity center position calculated by the position conversion unit 70 described later is fed back to the Y-axis gravity center thrust command output unit 30 described later.
The Y-axis gravity center thrust command output unit 30 calculates and outputs a first Y-axis gravity center thrust command F1 indicating the gravity center thrust of the Y1 axis drive system 111 and the Y2 axis drive system 121. In the present specification, the sum of the thrust of the Y1-axis drive system and the thrust of the Y2-axis drive system is referred to as a Y-axis gravity center thrust. Hereinafter, the Y-axis gravity center thrust command is referred to as F1. The Y1-axis drive system thrust command indicating the thrust of the Y1-axis drive system 111 is referred to as f 1. The Y2-axis drive system thrust command indicating the thrust of the Y2-axis drive system 121 is referred to as f 2.
The Y-axis gravity center thrust command output unit 30 performs feedback processing on the Y-axis gravity center position command, the phase difference of which has been compensated by the phase delay compensation unit 83, by receiving the Y-axis gravity center position calculated by the position conversion unit 70 as a feedback value, and outputs a first Y-axis gravity center thrust command F1.
Next, the output of the first Y-axis gravity center thrust command F1 by the Y-axis gravity center thrust command output unit 30 will be described in more detail.
As shown in fig. 2, the Y-axis gravity center thrust command output unit 30 includes a position feedback unit 31 and a speed feedback unit 32.
The position feedback unit 31 feeds back the Y-axis barycentric position calculated by the position conversion unit with respect to the Y-axis barycentric position command in which the phase difference is compensated by the phase delay compensation unit 83, performs PID (Proportional Integral derivative) processing on the Y-axis barycentric position, and outputs a Y-axis barycentric speed command indicating the barycentric speeds of the Y1 axis drive system 111 and the Y2 axis drive system 121. In this specification, the sum of the Y1 axis drive system speed and the Y2 axis drive system speed is referred to as the Y axis center of gravity speed. Hereinafter, the Y-axis gravity center speed command is referred to as V1.
The speed feedback unit 32 feeds back the time first differential of the Y-axis barycentric position calculated by the position conversion unit to the Y-axis barycentric speed command V1 output by the position feedback unit 31
[ numerical formula 5]
To perform PID processing to output the first Y-axis gravity thrust command F1.
The Y-axis differential thrust command output section 20 calculates and outputs a first Y-axis differential thrust command indicating the differential thrust of the Y1-axis drive system 111 and the Y2-axis drive system 121. In the present specification, the difference between the Y1-axis drive system thrust f1 and the Y2-axis drive system thrust f2 is referred to as a Y-axis differential thrust. Hereinafter, the first Y-axis differential thrust command is referred to as F2.
As described above, in the gantry mechanism 100, the Y1-axis drive system 111 and the Y2-axis drive system 121 drive the X axis 130 to be slidable in the Y direction shown in fig. 1 by driving the first X-axis support 135 and the second X-axis support 136 in a translational manner. Therefore, the Y-axis difference position command indicating the difference position of the Y1 axis position and the Y2 axis position is 0 at any time. Therefore, the Y-axis differential thrust command output unit 20 performs feedback processing on the Y-axis differential position command, which is 0 at any time, by receiving the Y-axis differential position calculated by the position conversion unit 70 as a feedback value, to output the second Y-axis differential thrust command F2.
Next, the output of the second Y-axis differential thrust command F2 by the Y-axis differential thrust command output unit 20 will be described in more detail.
As shown in fig. 2, the Y-axis differential thrust command output unit 20 includes a position feedback unit 21 and a speed feedback unit 22.
The position feedback unit 21 feeds back the Y-axis difference position calculated by the position conversion unit to a Y-axis difference position command that is 0 at any time, and performs PID processing to output a Y-axis differential speed command indicating the differential speed between the Y1-axis drive system 111 and the Y2-axis drive system 121. In this specification, the difference between the Y1 axis drive system speed and the Y2 axis drive system speed is referred to as a Y axis differential speed. Hereinafter, the Y-axis differential speed command is referred to as V2.
The speed feedback unit 22 feeds back the time first differential command V2 of the Y-axis differential position calculated by the position conversion unit to the Y-axis differential command V2 output by the position feedback unit 21
[ numerical formula 6]
To perform PID processing to output the first Y-axis differential thrust command F2.
The inertia function calculation unit 60 calculates an inertia function indicating a relationship between an inertia difference, which is a difference between the inertia of the Y1 axis drive system 111 and the inertia of the Y2 axis drive system 121, and the X axis position. Hereinafter, the inertia of the Y1 axis drive system 111 is referred to as m 1. The inertia of the Y2 axis drive system 121 is referred to as m 2.
Fig. 3 is a schematic diagram showing an example of the inertia function calculated by the inertia function calculation unit 60 according to embodiment 1.
As shown in FIG. 3, the inertial function is a function representing the relationship between the inertial difference m1-m2 and the X-axis position X. Here, as shown in fig. 3, the inertia function is a function in which the inertia difference m1-m2 is expressed by a linear expression of the X-axis position X. However, the inertial function is not necessarily limited to a function in which the inertial difference m1-m2 is expressed by a linear expression of the X-axis position X, as long as the function represents the relationship between the inertial difference m1-m2 and the X-axis position X. For example, the inertia difference m1-m2 may be expressed by an equation other than the linear equation of the X-axis position X.
The inertia function calculation section 60 outputs a Y1 axis drive system thrust command f1 indicating the thrust force of the Y1 axis drive system 111, a Y2 axis drive system thrust command f2 indicating the thrust force of the Y2 axis drive system 121, and an X axis thrust command fx indicating the thrust force of the X axis drive system 131. The inertial function calculation unit 60 acquires the Y1 axis position Y1 detected by the Y1 axis position detection unit 41, the Y2 axis position Y2 detected by the Y2 axis position detection unit 42, and the X axis position X detected by the X axis position detection unit 43. The inertial function calculation unit 60 calculates an inertial function based on the output Y1-axis drive system thrust command f1, the output Y2-axis drive system thrust command f2, the acquired Y1-axis position Y1, the acquired Y2-axis position Y2, and the acquired X-axis position X.
The calculation of the inertia function by the inertia function calculation unit 60 will be described in more detail below.
Fig. 4 is a flowchart of the inertial function calculation process according to embodiment 1. The inertia function calculation process is an example of a process performed by the inertia function calculation unit 60 to calculate an inertia function.
When the inertial function calculation process is started, the inertial function calculation unit 60 outputs the X-axis thrust command fx to the gantry mechanism 100 to move the stage 140 to the first X-axis position (step S100). At this time, the inertia function calculation unit 60 moves the stage 140 to the first X-axis position while acquiring the X-axis position X from the X-axis position detection unit 43 and confirming the X-axis position of the stage 140.
When the stage 140 is moved to the first X-axis position, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command f2 synchronized with each other to the gantry mechanism 100, and excites the Y1-axis drive system 111 and the Y2-axis drive system 121 (step S110).
When the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited, the inertia function calculation unit 60 acquires the Y-axis position Y1 and the Y-axis position Y2 from the Y1-axis position detection unit 41 and the Y2-axis position detection unit 42, respectively (step S120).
When the Y1 shaft position Y1 and the Y2 shaft position Y2 are acquired, the inertia function calculation section 60 calculates the inertia m1 of the Y1 shaft drive system 111 and the inertia m2 of the Y2 shaft drive system 121 from the output Y1 shaft drive system thrust commands f1 and Y2 shaft drive system thrust command f2 and the acquired Y1 shaft position Y1 and Y2 shaft position Y2. That is, the inertia function calculation unit 60 calculates the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 is at the first X axis position (step S130).
Next, the inertia function calculation unit 60 outputs the X-axis thrust command fx to the gantry mechanism 100 to move the stage 140 to the second X-axis position (step S140). At this time, the inertia function calculation unit 60 moves the stage 140 to the second X-axis position while acquiring the X-axis position X from the X-axis position detection unit 43 and confirming the X-axis position of the stage 140.
When the stage 140 is moved to the second X-axis position, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command f2 synchronized with each other to the gantry mechanism 100, and excites the Y1-axis drive system 111 and the Y2-axis drive system 121 (step S150).
When the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited, the inertia function calculation unit 60 acquires the Y-axis position Y1 and the Y-axis position Y2 from the Y1-axis position detection unit 41 and the Y2-axis position detection unit 42, respectively (step S160).
When the Y1 shaft position Y1 and the Y2 shaft position Y2 are acquired, the inertia function calculation section 60 calculates the inertia m1 of the Y1 shaft drive system 111 and the inertia m2 of the Y2 shaft drive system 121 from the output Y1 shaft drive system thrust commands f1 and Y2 shaft drive system thrust command f2 and the acquired Y1 shaft position Y1 and Y2 shaft position Y2. That is, the inertia function calculation unit 60 calculates the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 is at the second X axis position (step S170).
Next, the inertia function calculation unit 60 calculates the inertia function 180 based on the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 calculated in the process of step S130 is at the first X axis position, and the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 calculated in the process of step S170 is at the second X axis position (step S180).
When the process of step S180 ends, the inertia function calculation unit 60 ends the inertia function calculation process.
As described above, the inertia function calculation unit 60 outputs the Y1 axis drive system thrust command indicating the thrust of the Y1 axis drive system 111 and the Y2 axis drive system thrust command indicating the thrust of the Y2 axis drive system 121, and calculates the inertia function based on the following (a) to (d). (a) A Y1-axis drive system thrust command and a Y2-axis drive system thrust command that are output in a case where the position of the stage 140 is determined according to the first X-axis position. (b) A Y1 axis position detected by the Y1 axis position detecting section 41 and a Y2 axis position detected by the Y2 axis position detecting section 42 in a case where the position of the stage 140 is determined according to the first X axis position. (c) A Y1-axis drive system thrust command and a Y2-axis drive system thrust command that are output in a case where the position of the stage 140 is determined according to the second X-axis position. (d) A Y1 axis position detected by the Y1 axis position detecting section 41 and a Y2 axis position detected by the Y2 axis position detecting section 42 in a case where the position of the stage 140 is determined according to the second X axis position.
The feed-forward unit 10 feeds forward the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis gravity center position command acquired by the Y-axis gravity center position command acquisition unit 82 to the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20, and outputs a second Y-axis differential thrust command. Hereinafter, the second Y-axis differential thrust command is referred to as F2'.
Next, the output of the second Y-axis differential thrust command F2' by the feedforward section 10 will be described in more detail.
As shown in fig. 2, the feedforward section 10 includes an inertia function storage section 11 and a calculation section 12.
The inertia function storage unit 11 stores the inertia function calculated by the inertia function calculation unit 60.
The calculation unit 12 calculates an inertia difference from the X-axis position indicated by the X-axis position command acquired by the X-axis position command acquisition unit 81 and the inertia function stored in the inertia function storage unit 11. The calculation unit 12 calculates a feed-forward value to be fed forward to the first Y-axis difference thrust command output by the Y-axis difference thrust command output unit 20, based on the calculated inertia difference and the Y-axis center-of-gravity position command acquired by the Y-axis center-of-gravity position command acquisition unit 82. More specifically, the calculation unit 12 substitutes the X-axis position X indicated by the X-axis position command into the inertia function to calculate the inertia difference m1-m 2. The calculation unit 12 multiplies the calculated inertial difference m1-m2 by the second order differential of the time of the Y-axis center-of-gravity position command
[ number formula 7]
To calculate a feed forward value
[ number formula 8]
The feedforward unit 10 subtracts the calculated feedforward value from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20
[ numerical formula 9]
To calculate a second Y-axis differential thrust command F2', and output the second Y-axis differential thrust command F2'.
The thrust conversion unit 50 controls the position of the stage 140 using the first Y-axis gravity thrust command F1 and the second Y-axis differential thrust command F2'. More specifically, the thrust converting unit 50 calculates a Y1-axis drive system thrust command F1 indicating the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command F2 indicating the thrust of the Y2-axis drive system 121, based on the second Y-axis differential thrust command F2' output by the feedforward unit 10 and the first Y-axis gravity thrust command F1 output by the Y-axis gravity thrust command output unit. The thrust conversion unit 50 outputs the calculated Y1-axis drive system thrust command f1 and the calculated Y2-axis drive system thrust command f2 to the frame mechanism 100. The thrust converter 50 drives the Y1 axis drive system 111 using the Y1 axis drive system thrust command f1, and drives the Y2 axis drive system 121 using the Y2 axis drive system thrust command f2, thereby controlling the position of the stage 140.
The stage position control device 1 having the above-described configuration controls the position of the stage 140 in the gantry mechanism 100.
Next, the control of the position of the stage 140 by the stage position control device 1 will be described with reference to the drawings.
Fig. 5 is a flowchart of stage position control processing according to embodiment 1. The stage position control process is an example of a process performed by the stage position control device 1 to control the position of the stage 140.
When the stage position control processing is started, the Y1 axis position detecting unit 41 detects the Y1 axis position which is the driving position in the Y1 axis driving system 111, and the Y2 axis position detecting unit 42 detects the Y2 axis position which is the driving position in the Y2 axis driving system 121 (step S200).
When the Y1 axis position and the Y2 axis position are detected, the position conversion section 70 calculates the Y-axis barycentric position and the Y-axis difference position from the Y1 axis position and the Y2 axis position (step S210).
When the Y-axis barycentric position and the Y-axis difference position are calculated, the Y-axis barycentric thrust command output unit 30 feeds back the Y-axis barycentric position to output the first Y-axis barycentric thrust command (step S220). The Y-axis differential thrust command output unit 20 feeds back the Y-axis differential position to output the first Y-axis differential thrust command (step S230).
When the first Y-axis differential thrust command is output, the feedforward section 10 feedforward the X-axis position command acquired by the X-axis position command acquisition section 81 and the Y-axis gravity center position command acquired by the Y-axis gravity center position command acquisition section 82 to the first Y-axis differential thrust command to output a second Y-axis differential thrust command (step S240).
When the second Y-axis differential thrust command is output, the thrust converting section 50 calculates a Y1-axis drive system thrust command indicating the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command indicating the thrust of the Y2-axis drive system 121, based on the second Y-axis differential thrust command and the first Y-axis gravity center thrust command (step S250). The calculated Y1-axis drive system thrust command and the Y2-axis drive system thrust command are output to the frame mechanism 100 (step S260), and the position of the stage 140 is controlled.
When the process of step S260 ends, the stage position control device 1 proceeds to the process of step S200 again. In this way, the loop processing including the processing of step S200 to the processing of step S260 is repeated.
Next, the position control of the stage 140 by the stage position control device 1 will be considered.
If the transformation matrix J is set to
[ numerical formula 10]
A conversion expression of the first order differential of the time of the Y axis gravity center position Y1, i.e., the first order differential of the Y axis gravity center speed, the time of the Y axis difference position Y2, i.e., the first order differential of the Y axis difference speed with the time of the Y1 axis position Y1, i.e., the first order differential of the time of the Y1 axis speed, and the time of the Y2 axis position Y2, i.e., the Y2 axis speed is expressed as (expression 1) below.
[ numerical formula 11]
The conversion expressions of the first Y-axis gravity center thrust command F1 and the first Y-axis differential thrust command F2, and the Y1-axis drive system thrust command F1 and the Y2-axis drive system thrust command F2 are expressed by the following (expression 2).
[ numerical formula 12]
The equations of motion of the Y1-axis drive system 111 and the Y2-axis drive system 121 are expressed by the following (equation 3).
[ numerical formula 13]
When the motion equation is coordinate-transformed using the transformation matrix J, the coordinate-transformed motion equation is represented by the following (equation 4).
[ numerical formula 14]
The expansion 1 and expansion 2 obtained by expanding the transformed motion equation are expressed by the following equations (equation 5) and (equation 6), respectively.
[ numerical formula 15]
In the case where m1 and m2 are different from each other in expansion 1 and expansion 2, interference item 1
[ number formula 16]
[ number formula 17]
Is not removed but remains.
When the disturbance term 1 is not removed from the expansion 1 and when the disturbance term 2 is not removed from the expansion 2, the difference between the driving speed of the first X-axis support 135 driven by the Y1-axis driving system 111 and the driving speed of the second X-axis support 136 driven by the Y2-axis driving system 121 cannot be suppressed. That is, the stage 140 moves in the yaw direction.
When the interference term 2 is removed from the expansion 2, the interference term 1 naturally converges to 0. Therefore, by removing the disturbance term 2 from the expansion 2, the movement of the stage 140 in the yaw direction can be suppressed.
In the stage position control device 1, the feedforward section 10 calculates the disturbance term 2 based on the X-axis position command acquired by the X-axis position command acquisition section 81 and the Y-axis gravity center position command acquired by the Y-axis gravity center position command acquisition section 82
[ numerical formula 18]
The disturbance term 2 is taken as a feedforward value. The feedforward section 10 subtracts the disturbance term 2, which is the calculated feedforward value, from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output section 20 to calculate a second Y-axis differential thrust command F2', and outputs a second Y-axis differential thrust command F2'. Therefore, the component of the disturbance term 2 is removed from the second Y-axis differential thrust command F2'.
The thrust converting section 50 calculates a Y1-axis drive system thrust command F1 indicating the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command F2 indicating the thrust of the Y2-axis drive system 121 based on the first Y-axis gravity center thrust command F1 and the second Y-axis difference thrust command F2' from which the component of the disturbance term 2 is removed, and outputs a Y1-axis drive system thrust command F1 and a Y2-axis drive system thrust command F2 to the gantry mechanism 100.
Therefore, the stage position control device 1 can suppress the occurrence of the motion itself of the stage 140 in the yaw direction at a time point when the motion of the stage 140 in the yaw direction does not occur.
(embodiment 2).
Next, a stage position control device according to embodiment 2, which is configured by modifying a part of the stage position control device 1 according to embodiment 1, will be described.
The stage position control device actively removes the component of the disturbance term 1 from the first Y-axis gravity thrust command F1 in addition to the component of the disturbance term 2 from the first Y-axis differential thrust command F2.
Fig. 6 is a block diagram showing the configuration of the stage position control device 1a according to embodiment 2. However, in fig. 6, as in the case of fig. 1, not all the components of the stage position control device 1a are illustrated. Hereinafter, the same constituent elements of the stage position control device 1a as those of the stage position control device 1 according to embodiment 1 are denoted by the same reference numerals, and detailed description thereof will be omitted, and differences from the stage position control device 1 will be mainly described.
As shown in fig. 6, the stage position control device 1a is configured by adding a feedback unit 90 to the stage position control device 1 according to embodiment 1 and changing the thrust converting unit 50 to a thrust converting unit 50 a.
The feedback unit 90 feeds back the X-axis position detected by the X-axis position detection unit 43 and the Y-axis difference position calculated by the position conversion unit 70 to the first Y-axis gravity thrust command output from the Y-axis gravity thrust command output unit 30, and outputs a second Y-axis gravity thrust command. Hereinafter, the second Y-axis gravity center thrust command is referred to as F1'.
Next, the output of the second Y-axis gravity center thrust command F1' by the feedback unit 90 will be described in more detail.
As shown in fig. 6, the feedback unit 90 includes an inertia function storage unit 11 and a calculation unit 92.
The calculation unit 92 calculates an inertia difference from the X-axis position detected by the X-axis position detection unit 43 and the inertia function stored in the inertia function storage unit 11. The calculation unit 92 calculates a feedback value to be fed back to the first Y-axis gravity center thrust command output by the Y-axis gravity center thrust command output unit 30, based on the calculated inertia difference and the Y-axis difference position calculated by the position conversion unit 70. More specifically, the calculation unit 92 calculates the inertial difference m1-m2 by substituting the X-axis position X detected by the X-axis position detection unit into an inertial function, and multiplies the calculated inertial difference m1-m2 by the second order differential of the time of the Y-axis difference position
[ number formula 19]
To calculate a feedback value
[ number formula 20]
The feedback unit 90 subtracts the calculated feedback value from the first Y-axis gravity/thrust command F1 output from the Y-axis gravity/thrust command output unit 30
[ numerical formula 21]
To calculate a second Y-axis center of gravity thrust command F1 'and output a second Y-axis center of gravity thrust command F1'.
The thrust converting unit 50a calculates a Y1-axis drive system thrust command F1 indicating the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command F2 indicating the thrust of the Y2-axis drive system 121, based on the second Y-axis difference thrust command F2 'output by the feedforward unit 10 and the second Y-axis gravity center thrust command F1' output by the feedback unit 90. The thrust converting unit 50a outputs the calculated Y1 axis drive system thrust command f1 and Y2 axis drive system thrust command f2 to the frame mechanism 100, drives the Y1 axis drive system 111 using the Y1 axis drive system thrust command f1, and drives the Y2 axis drive system 121 using the Y2 axis drive system thrust command f2, thereby controlling the position of the stage 140.
Next, the position control of the stage 140 by the stage position control device 1a having the above-described configuration will be considered.
In the stage position control device 1a, the feedback unit 90 calculates the disturbance term 1 from the X-axis position detected by the X-axis position detection unit 43 and the Y-axis difference position calculated by the position conversion unit 70
[ numerical formula 22]
The interference term 1 is taken as a feedback value. The feedback unit 90 subtracts the disturbance term 1, which is the calculated feedback value, from the first Y-axis gravity center thrust command F1 output from the Y-axis gravity center thrust command output unit 30 to calculate a second Y-axis gravity center thrust command F1', and outputs a second Y-axis gravity center thrust command F1'. Therefore, the component of the disturbance term 2 is removed from the second Y-axis gravity center thrust command F1'.
The thrust converting unit 50a calculates a Y1-axis drive system thrust command F1 indicating the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command F2 indicating the thrust of the Y2-axis drive system 121 based on the second Y-axis differential thrust command F2 'from which the component of the disturbance term 2 is removed and the second Y-axis gravity center thrust command F1' from which the component of the disturbance term 1 is removed, and outputs a Y1-axis drive system thrust command F1 and a Y2-axis drive system thrust command F2 to the gantry mechanism 100.
Therefore, the stage position control device 1a can suppress the occurrence of the motion itself of the stage 140 in the yaw direction at the time point when the motion of the stage 140 in the yaw direction does not occur.
(supplement)
As described above, embodiment 1 and embodiment 2 have been described as an example of the technique of the present disclosure. However, the technique of the present disclosure is not limited to these embodiments, and can be applied to embodiments and modifications obtained by appropriately performing changes, substitutions, additions, omissions, and the like, without departing from the spirit of the present disclosure.
For example, in embodiment 1, the stage position control device 1 has been described as having the following configuration: the stage position control device 1 includes an inertia function calculation unit 60 that calculates an inertia function, and the inertia function storage unit 11 stores the inertia function calculated by the inertia function calculation unit. However, the stage position control device 1 may use the inertia function, and does not necessarily need to calculate the inertia function. The stage position control device 1 may have the following configuration, for example: the inertia function storage unit 11 is not provided with the inertia function calculation unit 60, and acquires and stores the inertia function calculated by the external device from the external device.
Industrial applicability
The photodetector according to the present disclosure can be widely used for a device for controlling the position of a stage, and the like.
Description of the reference numerals
1. 1 a: a stage position control device; 10: a feedforward section; 11: an inertia function storage unit; 12. 92: a calculation section; 20: a Y-axis differential thrust command output unit; 21. 31: a position feedback section; 22. 32: a speed feedback section; 30: a Y-axis gravity center thrust command output unit; 41: a Y1 axis position detection unit; 42: a Y2 axis position detection unit; 43: an X-axis position detection unit; 50. 50 a: a thrust conversion unit; 60: an inertia function calculation unit; 70: a position changing unit; 81: an X-axis position command acquisition unit; 82: a Y-axis gravity center position instruction acquisition unit; 83: a phase delay compensation unit; 90: a feedback section; 100: a frame mechanism; 110: a Y1 axis; 111: a Y1 axle drive system; 120: a Y2 axis; 121: a Y2 axle drive system; 130: an X axis; 131: an X-axis drive system; 135: a first X-axis support; 136: a second X-axis support; 140: an object stage.
Claims (10)
1. A stage position control device for controlling the position of a stage in a gantry mechanism, the gantry mechanism having:
a Y1 axis and a Y2 axis parallel to each other;
an X-axis perpendicular to the Y1 axis and the Y2 axis; and
the stage whose position is determined based on a driving position in a Y1 axis driving system on the Y1 axis, that is, a Y1 axis position, a driving position in a Y2 axis driving system on the Y2 axis, that is, a Y2 axis position, and a driving position in an X axis driving system on the X axis, that is, an X axis position,
the stage position control device includes:
a Y-axis center-of-gravity thrust command output unit that outputs a first Y-axis center-of-gravity thrust command indicating a center-of-gravity thrust of the Y1-axis drive system and the Y2-axis drive system;
a Y-axis differential thrust command output unit that outputs a first Y-axis differential thrust command indicating differential thrust of the Y1-axis drive system and the Y2-axis drive system;
a feedforward unit that feedforward, to the first Y-axis differential thrust command, an X-axis position command indicating the X-axis position and a Y-axis center position command indicating a center of gravity position between the Y1 axis position and the Y2 axis position to output a second Y-axis differential thrust command; and
a thrust conversion unit that controls a position of the stage using the first Y-axis gravity center thrust command and the second Y-axis differential thrust command.
2. The stage position control device according to claim 1,
the feed-forward section stores an inertia function representing a relationship between an inertia difference, which is a difference between the inertia of the Y1-axis drive system and the inertia of the Y2-axis drive system, and the X-axis position,
the feedforward unit calculates the inertia difference from the inertia function and an X-axis position indicated by the X-axis position command, and calculates a feedforward value to be fed forward to the first Y-axis difference thrust command from the Y-axis center-of-gravity position command and the calculated inertia difference.
3. The stage position control device according to claim 2,
the Y-axis gravity center thrust command output unit outputs the first Y-axis gravity center thrust command based on the Y-axis gravity center position command.
4. The stage position control device according to claim 3, further comprising:
a Y1 axis position detecting unit for detecting the Y1 axis position; and
a Y2 axis position detecting unit for detecting the Y2 axis position,
the Y-axis gravity center thrust command output unit outputs the first Y-axis gravity center thrust command by receiving, as a feedback value, a Y-axis gravity center position indicating a gravity center position of the Y1 axis position detected by the Y1 axis position detection unit and the Y2 axis position detected by the Y2 axis position detection unit,
the first Y-axis differential thrust command output unit outputs the first Y-axis differential thrust command by receiving, as a feedback value, a Y-axis differential position indicating a differential position between the Y1 axis position detected by the Y1 axis position detection unit and the Y2 axis position detected by the Y2 axis position detection unit.
5. The stage position control device according to any one of claims 1 to 4,
the thrust converting section calculates a Y1-axis drive system thrust command indicating a thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating a thrust of the Y2-axis drive system based on the first Y-axis gravity center thrust command and the second Y-axis differential thrust command, and drives the Y1-axis drive system using the Y1-axis drive system thrust command and drives the Y2-axis drive system using the Y2-axis drive system thrust command, thereby controlling the position of the stage.
6. The stage position control device according to claim 4, further comprising:
an X-axis position detection unit that detects the X-axis position; and
a feedback unit that feeds back the difference position and the X-axis position detected by the X-axis position detection unit to the first Y-axis gravity center thrust command and outputs a second Y-axis gravity center thrust command,
the thrust conversion unit controls the position of the stage by using the second Y-axis gravity thrust command.
7. The stage position control device according to claim 6,
the feedback unit stores the inertia function, calculates the inertia difference from the inertia function and the X-axis position detected by the X-axis position detection unit, and calculates a feedback value to be fed back to the first Y-axis gravity center thrust command from the difference position and the calculated inertia difference.
8. The stage position control device according to claim 7,
the thrust converting section calculates a Y1-axis drive system thrust command indicating a thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating a thrust of the Y2-axis drive system based on the second Y-axis gravity center thrust command and the second Y-axis differential thrust command, and drives the Y1-axis drive system using the Y1-axis drive system thrust command and drives the Y2-axis drive system using the Y2-axis drive system thrust command, thereby controlling the position of the stage.
9. The stage position control device according to claim 2, further comprising:
a Y1 axis position detecting unit for detecting the Y1 axis position;
a Y2 axis position detecting unit for detecting the Y2 axis position; and
an inertial function calculation section that outputs a Y1-axis drive system thrust command indicating thrust of the Y1-axis drive system and a Y2-axis drive system thrust command indicating thrust of the Y2-axis drive system, based on (a) the Y1-axis drive system thrust command and the Y2-axis drive system thrust command that are output when the position of the stage is determined in accordance with a first X-axis position, (b) a Y1-axis position detected by the Y1-axis position detection section and a Y2-axis position detected by the Y2-axis position detection section when the position of the stage is determined in accordance with the first X-axis position, (c) the Y1-axis drive system thrust command and the Y2-axis drive system thrust command that are output when the position of the stage is determined in accordance with a second X-axis position, and (d) the Y1-axis position detection section detects thrust command that is detected when the position of the stage is determined in accordance with the second X-axis position And the Y2 axis position detected by the Y2 axis position detecting unit, to calculate an inertia function.
10. A stage position control method for controlling a position of a stage in a gantry mechanism, the gantry mechanism having:
a Y1 axis and a Y2 axis parallel to each other;
an X-axis perpendicular to the Y1 axis and the Y2 axis; and
the stage whose position is determined based on a driving position in a Y1 axis driving system on the Y1 axis, that is, a Y1 axis position, a driving position in a Y2 axis driving system on the Y2 axis, that is, a Y2 axis position, and a driving position in an X axis driving system on the X axis, that is, an X axis position,
in the stage position control method according to the present invention,
calculating a first Y-axis center of gravity thrust command indicative of center of gravity thrust of the Y1-axis drive system and the Y2-axis drive system,
calculating a first Y-axis differential thrust command indicative of differential thrust of the Y1-axis drive system and the Y2-axis drive system,
feeding forward an X-axis position command indicating the X-axis position and a Y-axis center of gravity position command indicating a center of gravity position of the Y1 axis position and the Y2 axis position to the first Y-axis differential thrust command to calculate a second Y-axis differential thrust command,
controlling a position of the stage using the first Y-axis gravity thrust command and the second Y-axis differential thrust command.
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| JPWO2021044710A1 (en) | 2021-03-11 |
| KR20220054588A (en) | 2022-05-03 |
| CN114270286B (en) | 2024-03-26 |
| WO2021044710A1 (en) | 2021-03-11 |
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