KR20220049330A - Gas Supply Aparatus - Google Patents

Abstract

The purpose of the present invention is to provide a gas supply apparatus for stably maintaining an arrangement state of a connecting pipe by minimizing shaking of the connecting pipe and preventing poor combination with a valve connector. To this end, the gas supply apparatus according to one embodiment comprises: a connector fastening unit which includes a connecting pipe connector connected to a valve connector of a container, wherein the connecting pipe connector is connected to or disconnected from the valve connector according to driving of a driving means; a gas pipe including a connecting pipe connected to the connecting pipe connector and passing through a cavity inside the connector fastening unit, and a supply pipe having one side connected to the connecting pipe and the other side connected to a source of demand for gas; and at least one support member for supporting an outer circumference of at least a portion of the gas pipe to fix the relative position of the gas pipe with respect to the connector fastening unit and to maintain an arrangement state of the gas pipe.

Description

Gas Supply Aparatus

The following description relates to a gas supply device.

In general, when gas is supplied to a device that uses gas, in particular, a gas consuming place where precise work is performed such as semiconductor equipment, a type of gas suitable for each purpose is supplied at a certain concentration and pressure.

As described above, the supplied gas is separated by type and stored at a high pressure, and management to prevent gas leakage is essential. In particular, gases with harmful properties such as flammability, toxicity, and corrosiveness are strictly managed in a separate space where people are blocked.

A gas storage container for storing gas (hereinafter, abbreviated as 'container') is connected to a gas consumer through a gas supply device.

A gas supply device according to the prior art, one side is connected to the valve connector of the container and the other side is connected to a connector fastening part comprising a connecting pipe connector connected to a connecting pipe, one side is connected to the connecting pipe and the other side is connected to a gas consuming place It includes a supply pipe, a transport means for transporting the connector fastening part, and a rotation means for rotating the connecting pipe connector.

When the gas stored in the container is exhausted, the gas supply device drives the transfer means and the rotation means to separate the valve connector and the connecting pipe connector of the container, replace the container, and then transfer the gas again. By driving the means and the rotating means to couple the connecting pipe connector to the valve connector of the replaced container, the gas is supplied back to the gas consumer.

However, when the connector fastening part is transferred by the driving of the transfer means or the connecting pipe connector is rotated by the driving of the rotating means, the connecting pipe is shaken and the arrangement state is changed to correspond to the valve connector to be coupled Since the centering state is not maintained, misalignment between the connecting pipe connector and the valve connector may cause a problem in coupling.

In addition, since the connecting pipe is transferred together with the connector fastening part, and the position of the gas consumer is formed regardless of this, the position of at least a portion of the supply pipe is changed and shaking occurs, and the arrangement of the connecting pipe connected thereto The state may be changed, or an abnormality may occur in the connection state of the connecting pipe and the supply pipe.

In addition, when the connection part of the connection pipe and the supply pipe is made in a screw fastening method, at least a part of the connection part rotates due to shaking caused by the driving of the conveying means or the rotating means, the screw is loosened, and gas leakage may occur. could

Accordingly, a method for stably maintaining the arrangement state of the connection pipe and maintaining the connection state between the connection pipe and the supply pipe has been sought in spite of the driving of the transfer means and the rotation means.

As a prior art for a gas supply device for semiconductor equipment, Korean Patent Registration No. 10-20200095975 has been disclosed.

The embodiment has been devised to solve the above-described problems, and the purpose of the present invention is to provide a gas supply device for minimizing the shaking of the connecting pipe, stably maintaining the arrangement of the connecting pipe, and preventing a bad coupling with the valve connector. There is this.

Another object of the present invention is to provide a gas supply device capable of preventing gas leakage by stably maintaining a connection state between a connection pipe and a supply pipe.

A gas supply device according to an embodiment of the present invention for achieving the above object includes a connecting pipe connector connected to a valve connector of a container, and connecting the connecting pipe connector to the valve connector according to driving of a driving means or a connector fastening part configured to disconnect from the valve connector; and a connecting pipe connected to the connecting pipe connector and provided to pass through a cavity inside the connector fastening part, one end connected to the connecting pipe and the other end being gas A gas pipe including a supply pipe connected to the required place; and at least one support member for supporting the outer periphery of at least a portion of the gas pipe to fix the relative position of the gas pipe with respect to the connector fastening part and to maintain the arrangement state of the gas pipe. includes

In addition, the gas pipe may include: a connecting pipe connected to the connecting pipe connector and provided to pass through a cavity inside the connector fastening part; and a supply pipe having one side connected to the connection pipe and the other side connected to the gas consumer; may include

In addition, the support member may be configured to fill the space between the connecting pipe and the connector fastening part by enclosing the outer periphery of the connecting pipe inward and in contact with the inner surface of the connector fastening part to the outside.

In addition, at least one support member may be provided along the longitudinal direction of the connecting pipe.

In addition, the support member may be provided at the end of the connection pipe connector side of the connection pipe.

In addition, the driving means includes a rotation means for rotating the connection pipe connector, the rotation means is rotated with a rotation driving part providing a rotation driving force, and rotates in engagement with each other and transmits the rotation driving force generated from the rotation driving part to the connection pipe connector It includes at least one gear for transmitting, and the gear may include a main gear having the cavity through which the connecting pipe passes inside.

In addition, the support member may be provided to surround the outer periphery of the connecting pipe and to be in contact with the inner surface of the main gear to fill a space between the connecting pipe and the main gear.

In addition, the support member may be a bearing that is fastened to the outer periphery of the connection pipe inwardly and is in contact with the inner surface of the main gear to the outside.

In addition, the support member, in the connector fastening portion, may be made of a material having a lower strength than the material of the configuration in contact with the outer side of the support member.

In addition, the support member may include a peak material.

In addition, the support member, the pupil is provided to be inserted into the pupil from the outside through the boundary of the pupil connected to the outside, it may be made in a tapered shape that gradually narrows in the direction of insertion into the pupil.

In addition, the boundary of the pupil may be formed in a tapered shape conforming to the outer surface of the tapered support member.

In addition, the support member may be configured to support at least a portion of an outer periphery of a connecting member connecting the connecting pipe and the supply pipe to fix a relative position of the connector fastening part.

In addition, the support member may be formed in a shape fitted to at least a portion of the outer periphery of the connecting member to block rotation of the connecting member.

In addition, the connecting member may include a first connecting member connected to the connecting pipe and a second connecting member connected to the supply pipe, and the first connecting member and the second connecting member may be screwed together to engage each other. there is.

In addition, the support member may include a first fixing bracket provided to surround at least a portion of the outer periphery of the first connection member.

In addition, the support member may include a second fixing bracket provided to surround at least a portion of the outer periphery of the second connection member.

In addition, the support member includes a first fixing bracket provided to surround at least a portion of the outer circumference of the first connection member, and a second fixing bracket provided to surround at least a portion of the outer circumference of the second connection member. However, the first fixing bracket and the second fixing bracket may be formed to be coupled to each other.

In addition, the support member is provided with an arc-shaped long hole, and the screw is coupled to the other member through the arc-shaped long hole to thereby couple the other member and the support member, and the connection pipe and the supply pipe are connected to each other in a state in which the The coupling angle of the support member may be adjustable according to the phase of the connection member.

In addition, the position of the first fixing bracket is fixed, the second fixing bracket is coupled to the first fixing bracket, the second fixing bracket is provided with an arc-shaped long hole, and the screw is screwed into the first fixing bracket through the arc-shaped long hole. In combination with a fixing bracket, the first fixing bracket and the second fixing bracket are coupled, and the second fixing bracket is coupled according to the phase of the second connection member in a state in which the connection pipe and the supply pipe are interconnected. The angle may be adjustable.

In addition, the support member may be configured to support a portion of the supply pipe within a predetermined interval from the end of the side connected to the connection pipe to block the shaking of the supply pipe.

In addition, the driving means includes a transfer means for transferring the connector fastening part, and the support member is a part of the gas supply device that is transferred together with the connector fastening part by driving the connector fastening part or the transfer means. By being coupled to the transfer means may be made to be transferred together with the connector fastening portion when driving.

In addition, the connector fastening portion may include a housing for supporting the connecting pipe connector and the connecting pipe, and the support member may be coupled to the housing to be transported together with the connector fastening unit when the transport means is driven.

In addition, the supply pipe may be a pigtail pipe.

In addition, the connecting member may have an outer circumference of a polygonal nut shape.

In addition, the support member, a plurality of members surrounding the outer periphery of the gas pipe may be formed by coupling with each other.

According to the gas supply device according to the embodiment, by fixing the relative position of the connecting pipe to minimize shaking, it is possible to stably maintain the arrangement of the connecting pipe and to prevent a defective coupling with the valve connector.

In addition, by fixing the relative position of the connecting part of the connecting pipe and the supply pipe to minimize shaking, the arrangement state of the connecting pipe is maintained stably to prevent a bad coupling with the valve connector, and the connection state of the connecting pipe and the supply pipe can be kept stable and gas leakage can be prevented.

In addition, by fixing the relative position of the connecting end of the supply pipe to minimize shaking, the arrangement of the connecting pipe is maintained stably to prevent a bad coupling with the valve connector, and the connection state of the connecting pipe and the supply pipe is stably maintained. and prevent gas leakage.

1 is a perspective view showing a gas supply device according to an embodiment;
2 is a front perspective view of a fastening module including a connector fastening part according to an embodiment;
3 is a rear perspective view of a fastening module including a connector fastening part according to an embodiment;
4 is a front-rear vertical cross-sectional view of a connector fastening part provided with at least one support member;
4 is a front-rear vertical cross-sectional view of a connector fastening part provided with at least one support member;
5 is a vertical cross-sectional view in the front-rear direction of the connector fastening part, in which at least one support member is provided and a tapered connecting pipe support member is provided;
6 is a combined perspective view of a connection pipe and a supply pipe according to an embodiment;
7 is an exploded perspective view of a connection pipe and a supply pipe according to an embodiment;

Hereinafter, the embodiment will be described in detail with reference to the accompanying drawings.

Here, in referring to the direction, the X-axis shown in FIG. 1 is the front-back direction, the Y-axis is the left-right direction, and the Z-axis is the vertical direction. In addition, the horizontal direction includes the left-right direction and the front-rear direction formed by the XY plane. In addition, in distinguishing the front and rear directions, the side where the container 10 is located is referred to as a front side, and the side where the lower module 3 is located is referred to as a rear side. In addition, in distinguishing the left and right directions based on the cover separating part 320 and the connector fastening part 330 , the side where the cover separating part 320 is located is defined as the right side, and the side where the connector fastening part 330 is located is defined as the left. .

1 to 3 , the gas supply device 1 of the present invention includes a connector fastening part 330 including a connecting pipe connector 331 connected to gas pipes 370 and 500 leading to a gas demanding point, and the gas At least one support member ( 800,710,720,730).

The connector fastening part 330 connects the connecting pipe connector 331 to the valve connector 30 of the container 10 or from the valve connector 30 according to the driving of at least one driving means (not shown). It consists of a configuration that disconnects.

1 is an overall perspective view of the gas supply device 1 according to the embodiment, FIG. 2 is a front perspective view of the fastening module 300 including the connector fastening part 330 is shown, and FIG. 3 A rear perspective view of the fastening module 300 is shown.

The container 10 is configured to store and supply the process gas supplied to a gas demanding place such as a semiconductor device, and a valve part 11 is provided at the upper portion of the container 10 .

The valve part 11 includes a valve (not shown) for controlling the supply of gas, a valve connector 30 provided on one side of the valve and fastened to the connector fastening part 330 , and the valve connector ( 30) a cover (not shown), a valve shutter (not shown) for opening and closing the valve, and a handle 50 connected to the upper portion of the valve shutter to lift and lower the valve shutter as it rotates to open and close the valve is comprised of

The gas supply device 1 may include an upper module 2 and a lower module 3 .

The upper module 2 and the lower module 3 are configured such that the upper module 2 supports the upper side of the lower module 3, and at least one transfer means (not shown) is provided to provide the lower part. The module 3 may be configured to be transportable in a horizontal direction and a vertical direction with respect to the upper module 2 .

The upper module 2 may be provided with a valve opening/closing part 4 for opening and closing the valve of the gas storage container 10 by rotating the handle 50 .

The lower module 3 includes the connector fastening part 330 , a cover separating part 320 for separating the cover 31 , and moving the connector fastening part 330 and the cover separating part 320 . A driving means may be provided.

The driving means includes transfer means 340a and 340b for transferring the connector fastening part 330 and the cover separating part 320 , and rotating the connecting pipe connector 331 and the cover separating part 320 . It may be configured to include a rotating means for.

The connector fastening part 330 and the cover separating part 320 may constitute the fastening module 300 .

The fastening module 300 may include at least one housing H1 and H2 supporting the connector fastening part 330 and the cover separating part 320 .

The housings H1 and H2 include an inner housing H1 that receives and supports the cover separation unit 320 and the connector fastening unit 330, and an outer housing H2 that supports the inner housing H1. can be done by

The connector fastening part 330 is provided to support and rotate the connecting pipe connector 331 on the inside, and the connecting pipe connector 331 has a screw thread engaged with and fastened to the screw thread and the screw thread of the valve connector 30 . And nasagol may be formed.

The connecting pipe connector 331 rotates together as the connector fastening part 330 rotates in a clockwise or counterclockwise direction by driving the rotation means to be engaged with or separated from the valve connector 30 .

The cover separation unit 320 is configured to accommodate the cover 31 inside, and the inner surface of the cover separation unit 320 may have a polygonal shape matching the outer surface of the cover 31, It is provided to support the cover 31 accommodated inside and rotate together.

Accordingly, the cover 31 accommodated in the cover separating part 320 rotates together as the cover separating part 320 rotates clockwise or counterclockwise by the driving of the rotating means to rotate the valve connector ( 30) and is connected or separated.

The transport means is for transporting the cover separating part 320 and the connector fastening part 330, and includes a first transporting means 340a for transporting in the front-rear direction (X-axis direction), and in the left-right direction (Y-axis). direction) may be provided with a second transport means 340b for transport.

The first transfer means 340a may include a transfer guide for transferring in the front-rear direction and an air cylinder for applying a transfer force by supply of air. In addition, the second conveying means 340b may include a conveying guide for conveying in the left and right directions and an air cylinder for applying a conveying force by supply of air.

The transport means may be configured to simultaneously transport the cover separating part 320 and the connector fastening part 330 , and for example, may be provided in a manner that transports the housings H1 and H2 .

In this case, the transfer means may be provided such that the first transfer means 340a and the second transfer means 340b transfer the first housing H1 or the second housing H2, and the One of the first transfer means 340a and the second transfer means 340b may be provided to transfer the first housing H1 and the other to transfer the second housing H2.

In addition, the transfer means may be configured to independently transfer the cover separating part 320 and the connector fastening part 330 .

The rotating means is for rotating the cover separating part 320 and the connector fastening part 330, a rotation driving part and a speed reducer generating rotational driving force, and connecting the rotational driving force to the cover separating part 320 and the connection It includes a rotation transmission member for transmitting to the pipe connector (331).

A motor may be provided as the rotation driving unit, and the rotation transmission member may include at least one gear that rotates in engagement with each other.

For example, a main gear G connected to mesh with the connection pipe connector 331 may be provided, and at least one gear meshed between the main gear G and the rotation driving unit may be further provided.

The rotating means may have a configuration in which the cover separating part 320 and the connecting pipe connector 331 rotate at the same time by the driving of the rotating driving part, and the cover separating part 320 and the connecting pipe connector ( 331) may be configured to rotate independently of each other.

Accordingly, when the container 10 is replaced, the cover 31 is inserted into the groove of the cover separating part 320 by driving the transport means to transport the cover separating part 320 , and the rotating means is rotated. The cover 31 is separated from the valve connector 30 by driving and rotating the cover separating part 320 .

Then, by driving the transfer means to transfer the connector fastening part 330 so that the connecting pipe connector 331 faces and comes into contact with the valve connector 30 in the front-rear direction, the rotation means is driven to connect By rotating the pipe connector 331 , the connecting pipe connector 331 and the valve connector 30 are coupled.

Thereafter, by performing the above process in reverse, the connection pipe connector 331 is separated from the valve connector 30 , and the cover 31 separated and accommodated in the cover separation unit 320 is attached to the valve connector 30 . can be rejoined.

Hereinafter, a connection relationship between the connection pipe connector 331 and the gas pipe 370 and 500 and the configuration of the support member will be described with reference to FIGS. 4 to 7 .

4 and 5 are front and rear vertical cross-sectional views of the connector fastening part 330 in a state in which the connecting pipe connector 331 is connected to the valve connector 30 .

6 and 7 show a combined perspective view (FIG. 6) and an exploded perspective view (FIG. 7) of the gas pipes 370 and 500, respectively.

The gas pipe (370,500) is connected to the connecting pipe connector (331), a connecting pipe (370) provided to pass through a cavity inside the connector fastening part (330), and one side is connected to the connecting pipe (370) and the other side is configured to include a supply pipe 500 connected to the gas consumer.

When the valve is opened by rotating the handle 50 using the valve opening and closing part 4 while the connecting pipe connector 331 and the valve connector 30 are connected, the gas inside the container 10 is released from the valve. The gas flows sequentially to the connecting pipe 370 and the supply pipe 500 through the connector 30 and the connecting pipe connector 331 and is supplied to the gas demanding place.

The connecting pipe 370 may be a compressed gas association (CGA) pipe.

The supply pipe 500 is for supplying the gas flowing in through the connection pipe 370 to the gas consumer, and may be provided as a pipe made of a metal material having good flexibility and high space utilization. For example, it may be provided as a pigtail gas pipe.

The connecting pipe 370 and the supply pipe 500 are connected by connecting members 610 and 620 .

The connecting members 610 and 620 may include a first connecting member 610 connected to the connecting pipe 370 and a second connecting member 620 connected to the supply pipe 500 and coupled to each other.

The first connection member 610 and the second connection member 620 may be screwed to each other to be engaged with each other, and for example, may be a VCR fitting configuration.

The support members 800 , 710 , 720 , and 730 include a connection pipe support member 800 which surrounds the outer periphery of the connection pipe 370 on the inside and comes into contact with the inner surface of the connector fastening part 330 to the outside.

The connecting pipe support member 800 fills a space between the connecting pipe 370 and the inner surface of the connector fastening part 330 , and the relative position of the connecting pipe 370 with respect to the connector fastening part 330 . will be fixed

Accordingly, the connection pipe 370 and the connection pipe connector 331 connected to the connection pipe 370 are maintained in an appropriate arrangement state without being biased to either side, so that when coupled with the valve connector 30, there is no misalignment. can be combined with

In particular, the connecting pipe support member 800 is provided at the end of the connecting pipe connector 331 side of the connecting pipe 370 to support the centering state of the connecting pipe connector 331 to be more stably maintained. can be

At least one connection pipe support member 800 may be provided along the longitudinal direction of the connection pipe 370 , and a plurality of the connection pipe support members 800 are provided to support a plurality of positions of the connection pipe 370 so as not to be inclined to either side. It can be supported stably.

The pupil may be a cavity provided inside the main gear G, and the inner surface of the connector fastening part 330 may be an inner surface of the main gear G.

Accordingly, the connection pipe 370 is provided to pass through a cavity provided on the inside of the main gear G, and the connection pipe support member 800 surrounds the outer circumference of the connection pipe 370 and the main It may be provided to fill the space between the connection pipe 370 and the main gear G in contact with the inner surface of the gear G.

The connecting pipe support member 800 may be made of a bearing, so that the connecting pipe 370 is stably supported despite the rotation of the main gear G.

In addition, the connecting pipe support member 800 may be formed in size and shape to fit inside the outer periphery of the connecting pipe 370 and outwardly fit the inner surface of the main gear G.

For example, the inner surface of the main gear G may have a cylindrical shape, and the connecting pipe support member 800 may have a cylindrical shape in which a hollow to which the connecting pipe 370 is coupled is provided. (See FIGS. 4, 6, and 7)

Accordingly, the connecting pipe support member 800 is in close contact with the connecting pipe 370 and the main gear G, respectively, thereby filling the space between the connecting pipe 370 and the main gear G more densely. The connection pipe 370 may be stably supported.

At this time, the connection pipe support member 800 is a configuration in contact with the outside of the connection pipe support member 800 in the connector fastening part 330 , that is, a material of lower strength than the material of the main gear (G). may be included.

As an example, the connecting pipe support member 800 may be configured to include a resin material such as a peak material, and the whole may be made of the corresponding material, and correspond to the outer periphery in contact with the main gear (G). It may be constructed in such a way that the material is coated or applied.

In the above case, when friction with the main gear G occurs, damage occurs to the connecting pipe support member 800 instead of the main gear G, and the connecting pipe support member 800 can be replaced if the damage is accumulated. Since it can be provided as a consumable item, the efficiency of the gas supply device can be increased by minimizing damage to the main gear G.

In addition, the connecting pipe support member 800 may be provided at both ends of the pupil to be inserted into the pupil from the outside through the boundary of the pupil connected to the outside.

The connecting pipe support member 800 is formed in a tapered shape in which the width is gradually narrowed in the direction to be inserted into the cavity, and the boundary of the cavity is formed on the outer surface of the tapered connecting pipe supporting member 800. It may be formed in a tapered shape that merges (see FIG. 5 ).

In this case, it is easier to insert the connecting pipe support member 800 into the cavity from the outside compared to the case where the thickness is constant, such as a cylindrical shape, and the outer surface of the connecting pipe support member 800 is the main gear (G) can be more closely attached to the inner surface, the centering of the connecting pipe support member 800 and the connecting pipe connector 331 connected thereto can be made more appropriately.

In addition, the connecting pipe support member 800, as shown in Figs. 6 and 7, a plurality of members (800-1,800-2) form a pair to surround the circumference of the connecting pipe 370 and to combine with each other Although not shown in the drawings, it may be formed of one integral member and fitted around the connecting pipe 370 or molded together with the connecting pipe 370 .

The plurality of members 800-1 and 800-2 may be configured to be screwed to each other, and may be configured to be in close contact with the connection pipe 370 by adjusting the length of the screw coupling.

In addition, the support members 800, 710, 720 and 730 support at least a portion of the outer periphery of the connecting members 610 and 620 connecting the connecting pipe 370 and the supply pipe 500 to the connector fastening part 330. It further includes connecting portion support members (710, 720) configured to fix a relative position with respect to each other.

In addition, the support members 800 , 710 , 720 , 730 are a part of the supply pipe 500 , which is a portion within a predetermined interval from the end of the side connected to the connection pipe 370 . It further includes a supply pipe support member 730 configured to fix the relative position of the supply pipe connection end 510 with respect to the portion 330 .

The connecting part support members 710 and 720 and the supply pipe support member 730 are transported together with the connector fastening part 330 by the driving of the connector fastening part 330 or the transport means. ) and is provided to be transported together with the connector fastening part 330 when the transport means is driven.

Accordingly, the relative positions of the connecting members 610 and 620 and the supply pipe connecting end 510 with respect to the connector fastening part 330 are fixed regardless of the movement of the connector fastening part 330 .

Accordingly, by minimizing the shaking of the connection members 610 and 620 and the supply pipe connection end 510, the connection state of the connection pipe 370 and the supply pipe 500 can be stably maintained and gas leakage can be prevented. there is.

In addition, when the connecting pipe support member 800 is provided and the connecting part support members 710 and 720 or the supply pipe support member 730 are provided, one side and the other side of the connecting pipe 370 are fixed. The connecting pipe 370 may be stably supported without inclining to either side, and the centering state of the connecting pipe 370 and the connecting pipe connector 331 connected thereto may be stably maintained.

The connecting member support members 710 and 720 may support at least a portion of an outer periphery of the connecting members 610 and 620 to block rotation of the connecting members 610 and 620 .

The connecting member support members 710 and 720 may be shaped to fit at least a portion of the outer periphery of the connecting members 610 and 620, and by being fixed in a state fitted to the corresponding portion, rotation of the connecting members 610 and 620 may be blocked.

The connection part support members 710 and 720 are provided with a first fixing bracket 710 and a second fixing bracket to surround at least a portion of the outer periphery of the first connection member 610 and the second connection member 620, respectively. 720 may be included.

Each of the first fixing bracket 710 and the second fixing bracket 720 may be composed of a single member, and a plurality of members form a pair to form the first connecting member 610 and the second connecting member ( 620) may be configured to surround each of them.

In the drawings of this embodiment, the first fixing bracket 710 is composed of a pair of first fixing brackets 710-1.720-2 completely surrounding the outer circumference of the first connection member 610, and the second An embodiment in which the fixing bracket 720 is composed of one member surrounding the lower portion of the outer periphery of the second connection member 620 is shown. (See Fig. 6, Fig. 7)

The first fixing bracket 710 and the second fixing bracket 720 may be coupled to the housings H1 and H2 to be transported together with the connector fastening part 330 when the transport means is driven, In particular, it may be coupled to the inner housing H1.

At this time, the first fixing bracket 710 may be coupled to the inner housing H1 to be fixed in position, and the second fixing bracket 720 may be coupled to the first fixing bracket 710 .

A screw hole 711 for coupling an inner housing for coupling with the inner housing H1 is formed in the first fixing bracket 710 , and a screw is inserted into the screw hole 711 for coupling the inner housing to the inner housing The first fixing bracket 710 may be coupled to the inner housing H1 by coupling it to a screw hole (not shown) for coupling the first fixing bracket of (H1).

In addition, a screw hole 712 for coupling a second fixing bracket for coupling with the second fixing bracket 720 is formed in the first fixing bracket 710 , and the first fixing bracket 720 is formed in the second fixing bracket 720 . A screw hole 721 for coupling the first fixing bracket for coupling with the bracket 710 is formed, and is screwed into the screw hole 721 for coupling the first fixing bracket and the screw hole 712 for coupling the second fixing bracket. may be inserted to couple the second fixing bracket 720 to the first fixing bracket 710 .

In this case, a screw hole (not shown) for coupling the second fixing bracket is further provided in the inner housing H1, and the screw hole 721 for coupling the first fixing bracket and the screw hole for coupling the second fixing bracket ( 712) and sequentially inserting screws into the screw holes for coupling the second fixing bracket of the inner housing (H1) to attach the second fixing bracket 720 to the first fixing bracket 710 and the inner housing (H1). They can also be combined at the same time.

As shown in the drawing, the screw hole 721 for coupling the first fixing bracket may be provided in an arc-shaped long hole shape, and the screw hole 721 for coupling the second fixing bracket is corresponding to the arc-shaped long hole shape. It may be provided with a plurality of screw holes (721-1, 721-2, 721-3) provided at positions.

The arc-shaped long hole shape is for adjusting the phase of the second fixing bracket 720, that is, the coupling angle with respect to the first fixing bracket 710, and within the central angle range of the arc-shaped long hole, the second fixing bracket ( 720) to adjust the coupling angle.

At this time, the screw passing through the arc-shaped long hole is a screw hole that can be coupled through the arc-shaped long hole in a state in which the coupling angle of the second fixing bracket 720 is adjusted among the plurality of screw holes 721-1, 721-2, 721-3. is selectively bound to

For example, when the outer periphery of the first connecting member 610 and the second connecting member 620 is formed in a hexagonal nut shape, the connecting pipe 370 and the supply pipe 500 are interconnected to form the first In a state in which the first connecting member 610 and the second connecting member 620 are completely coupled, the outer hexagonal shape of the second connecting member 620 is 0' to 0' to the outer hexagonal shape of the first connecting member 610. A phase difference in the range of 60' may occur.

At this time, according to this embodiment, by coupling the second fixing bracket 720 to the first fixing bracket 710 in a form in which the second fixing bracket 720 is rotated by the corresponding phase difference through the screw hole 721 for coupling the first fixing bracket, The position of the second fixing bracket 720 can be fixed while closely supporting the outer periphery of the second connection member 620 in a state in which it is completely coupled to the first connection member 610, so that the connection pipe ( 370) and the supply pipe 500 may be firmly connected and stability may be increased.

In addition, although not shown in the drawings, the screw hole 711 for coupling the inner housing may also be formed in an arc-shaped long hole, and the coupling angle by rotating the first fixing bracket 710 within the central angle range of the arc-shaped long hole. can be adjusted, and the screw hole for coupling the first fixing bracket of the inner housing H1 may be provided with a plurality of screw holes provided at positions corresponding to the arc-shaped long hole shape.

Accordingly, the first fixing bracket 710 is fixed in a state of closely supporting the outer periphery of the first connection member 610 in a state in which it is completely coupled to the inner housing H1, whereby the connection pipe 370 is ) and the connection of the supply pipe 500 can be strengthened and stability can be increased.

The supply pipe support member 730 is coupled to the housings H1 and H2 and may be provided to be transported together with the connector fastening part 330 when the transport means is driven, and in particular, to the inner housing H1. can be combined.

A screw hole 731 for coupling the inner housing for coupling with the inner housing H1 is formed in the supply pipe support member 730, and the screw 830 is inserted into the screw hole 731 for coupling the inner housing. The line support member 730 may be coupled to the inner housing H1 by coupling it to a screw hole (not shown) for coupling the line support member of the inner housing H1.

In addition, the supply pipe support member 730 may be composed of a combination of a pair of supply pipe support members 730 - 1 and 730 - 2 surrounding one side and the other side in the circumferential direction of the supply pipe connection end 510 .

A pair of coupling screw holes 732 for mutual coupling are formed in the pair of line support members 730-1 and 730-2, and a screw 840 is inserted into the pair of coupling screw holes 732 for mutual coupling. By coupling the pair of supply pipe support members (730-1, 730-2) can be coupled to each other.

According to the pair of supply pipe support members 730-1 and 730-2, it is possible to effectively block the shaking of the supply pipe 500 by increasing the support strength for the supply pipe 500, and accordingly, the connection pipe ( 370) and the supply pipe 500 may improve the stability of the connection, and the arrangement state of the connection pipe 370 and the connection pipe connector 331 connected thereto may be stably maintained.

As described above, according to the gas supply device 1 according to the embodiment, by fixing the relative position of the connection pipe 370 to minimize shaking, the arrangement state of the connection pipe 370 is stably maintained and the valve connector ( 30) can be prevented.

In addition, by fixing the relative position of the connecting portion of the connecting pipe 370 and the supply pipe 500 to minimize shaking, the arrangement state of the connecting pipe 370 is stably maintained and coupling with the valve connector 30 is defective. In addition to preventing , it is possible to stably maintain the connection state of the connection pipe 370 and the supply pipe 500 and to prevent gas leakage.

In addition, by fixing the relative position of the supply pipe connection end 510 to minimize shaking, the arrangement state of the connection pipe 370 is stably maintained to prevent a bad coupling with the valve connector 30, and the It is possible to stably maintain a connection state between the connection pipe 370 and the supply pipe 500 and prevent gas leakage.

As described above, the present invention has been described in detail with reference to preferred embodiments, but the present invention is not limited to the above-described embodiments, and various modifications are made within the scope of the claims, the detailed description of the invention, and the accompanying drawings. It is possible to carry out and this also belongs to the present invention.

1: gas supply device
2: upper module
3: lower module
4: valve opening and closing part
10 : courage
30: valve connector
31 : cover
50 : handle
300: fastening module
320: cover separation unit
330: connector fastening part
331: connecting pipe connector
370: connecting pipe
500: supply pipe
510: supply pipe connection end
610: first connecting member, connecting member
620: second connecting member, connecting member
710, 710-1, 710-2: first fixing bracket, connecting part support member
720: second fixing bracket, connecting part support member
730, 730-1, 730-2: supply pipe support member
800,800-1,800-2: Connection pipe support member
H1 : inner housing
H2 : outer housing
G: gear

Claims (24)

a connector fastening part comprising a connecting pipe connector connected to the valve connector of the container, wherein the connecting pipe connector is connected to or disconnected from the valve connector according to the driving of the driving means; Wow,
a gas pipe including a connecting pipe connected to the connecting pipe connector and provided to pass through a cavity inside the connector fastening part, and a supply pipe having one side connected to the connecting pipe and the other side connected to a gas consumer; and,
at least one support member for supporting an outer periphery of at least a portion of the gas pipe to fix a relative position of the gas pipe with respect to the connector fastening part and to maintain an arrangement state of the gas pipe; A gas supply device comprising a. According to claim 1,
The support member is configured to fill the space between the connecting pipe and the connector fastening part by enclosing the outer periphery of the connecting pipe inward and in contact with the inner surface of the connector fastening part to the outside. 3. The method of claim 2,
The gas supply device, characterized in that at least one support member is provided along the longitudinal direction of the connection pipe. 3. The method of claim 2,
The support member is a gas supply device, characterized in that provided at the end of the connection pipe connector side of the connection pipe. 3. The method of claim 2,
the driving means includes a rotating means for rotating the connecting pipe connector;
the rotation means includes a rotation driving unit providing rotational driving force, and at least one gear that rotates in engagement with each other and transmits the rotational driving force generated from the rotational driving unit to the connecting pipe connector;
The gear includes a main gear provided with the cavity through which the connecting pipe passes inside;
The support member surrounds the outer periphery of the connecting pipe and is provided to be in contact with the inner surface of the main gear, and is configured to fill a space between the connecting pipe and the main gear. 6. The method of claim 5,
The support member is a gas supply device, characterized in that the bearing is fastened to the outer periphery of the connecting pipe inward and in contact with the inner surface of the main gear outward. 3. The method of claim 2,
The support member is a gas supply device, characterized in that it comprises a material having a lower strength than the material of the configuration in contact with the outer side of the support member in the connector fastening portion. 8. The method of claim 7,
The support member is a gas supply device, characterized in that it comprises a peak material. 3. The method of claim 2,
The support member is provided so that the pupil is inserted into the pupil from the outside through the boundary of the pupil connected to the outside, the gas supply, characterized in that made in a tapered shape that gradually narrows in the direction of insertion into the pupil Device. 3. The method of claim 2,
The boundary of the cavity is formed in a tapered shape to conform to the outer surface of the tapered support member. According to claim 1,
The support member is configured to support at least a portion of an outer periphery of a connection member connecting the connection pipe and the supply pipe to fix a position relative to the connector fastening part. 12. The method of claim 11,
The support member is configured to have a shape fitted to at least a part of an outer periphery of the connection member, and is configured to block rotation of the connection member. 12. The method of claim 11,
The connecting member includes a first connecting member connected to the connecting pipe and a second connecting member connected to the supply pipe, wherein the first connecting member and the second connecting member are screwed together to engage each other. gas supply device. 14. The method of claim 13,
The support member includes a first fixing bracket provided to surround at least a portion of an outer periphery of the first connection member. 14. The method of claim 13,
and the support member includes a second fixing bracket provided to surround at least a portion of an outer circumference of the second connection member. 14. The method of claim 13,
The support member is
a first fixing bracket provided to surround at least a portion of the outer periphery of the first connection member;
a second fixing bracket provided to surround at least a portion of the outer periphery of the second connection member;
The gas supply device according to claim 1, wherein the first fixing bracket and the second fixing bracket are coupled to each other. 13. The method of claim 12,
The support member is provided with an arc-shaped long hole,
The screw is coupled to the other member through the arc-shaped long hole, so that the coupling of the other member and the support member is made,
The gas supply device, characterized in that the coupling angle of the support member can be adjusted according to the phase of the connection member in a state in which the connection pipe and the supply pipe are interconnected. 17. The method of claim 16,
a position of the first fixing bracket is fixed, and the second fixing bracket is coupled to the first fixing bracket;
The second fixing bracket is provided with an arc-shaped long hole, and a screw is coupled to the first fixing bracket through the arc-shaped long hole, so that the first fixing bracket and the second fixing bracket are coupled,
The gas supply apparatus according to claim 1, wherein the coupling angle of the second fixing bracket can be adjusted according to the phase of the second connection member in a state in which the connection pipe and the supply pipe are interconnected. According to claim 1,
The support member is configured to support a part of the supply pipe within a predetermined interval from the end of the side connected to the connection pipe to block the shaking of the supply pipe. 20. The method according to any one of claims 11 to 19,
the driving means includes a transport means for transporting the connector fastening part;
The support member is coupled to a part of the gas supply device that is transferred together with the connector fastening part by the driving of the connector fastening part or the transport means, so that it is transferred together with the connector fastening part when the transporting means is driven. Gas supply device, characterized in that made. 21. The method of claim 20,
The connector fastening portion includes a housing for supporting the connecting pipe connector and the connecting pipe,
The support member is coupled to the housing and is configured to be transported together with the connector fastening part when the transport means is driven. According to claim 1,
The supply pipe is a gas supply device, characterized in that the pigtail pipe. 13. The method of claim 12,
The connecting member is a gas supply device, characterized in that the outer circumference is made of a polygonal nut shape. According to claim 1,
The support member is a gas supply device, characterized in that the plurality of members are coupled to each other surrounding the outer periphery of the gas pipe.

Images