KR20220049211A - Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same - Google Patents

Abstract

The present invention relates to a gas-liquid contact means unit (MU) constituting a gas-liquid contact means complex (HBF) having a plurality of functions mounted on a wet scrubber removing waste gas discharged from a semiconductor manufacturing process, wherein the gas-liquid contact means unit has a complex gas-liquid contact function while reducing the volume in forming one gas-liquid contact means unit by alternately arranging a plurality of thin plate-shaped contact elements (UI to U4) with different gas-liquid contact functions. In addition, the gas-liquid contact means unit (MU) according to the present invention is made of a synthetic resin containing lava, and the gas-liquid contact means complex (HBF), which combines a plurality of gas-liquid contacting means units (MUs) by through-holes formed on left and right sides, allows fluids (waste gas and cleaning liquid) to flow in and diffuse throughout the interior, so that purification of the waste gas is further improved due to anions generated from gas-liquid contact means due to purification of the waste gas and impact of washing water.

Description

Prefabricated gas-liquid contact means unit for waste gas treatment scrubber and waste gas treatment scrubber using the same {Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same}

The present invention relates to a prefabricated gas-liquid contacting unit unit for a waste gas treatment scrubber and a waste gas treatment scrubber using the same, and more specifically, to a prefabricated gas-liquid contacting means complex having multiple functions suitable for treating toxic exhaust gas emitted from a semiconductor manufacturing process. It relates to a gas-liquid contact unit unit, and to a waste gas treatment scrubber using the same.

Dry method and wet method are known as exhaust gas purification methods. The wet method is a waste gas treatment scrubber that cleans and removes harmful gases contained in exhaust gas by spraying a cleaning agent on the exhaust gas. Such a wet waste gas treatment scrubber has a packed layer, A gas-liquid contact means such as an absorption layer is provided.

And in general, the exhaust gas discharged from the process such as forming a thin film on the wafer or etching in the semiconductor manufacturing process includes hydrogen fluoride, sulfur oxide, nitrogen oxide, hydrogen sulfide, sulfur dioxide gas depending on the conditions of the manufacturing process, operating time, and production product. Various types of toxic gases such as ammonia are contained and are emitted as perfluorocarbon (PFC) exhaust gas, acid exhaust gas, alkaline exhaust gas, and combustible exhaust gas. These toxic gases are harmful to the human body and cause environmental pollution. should be purified

As a prior art related to the wet waste gas treatment scrubber, for example, Patent Document 1 discloses a multi-scrubber in which a gas flow path device, a gas-liquid reaction device and a dehumidifying device are installed in a housing, and Patent Document 2 discloses a porous filter body. Although a gas-liquid contacting device is disclosed, the above-mentioned prior art is equipped with a gas-liquid contact means having a simple function of gas-liquid contact inside the scrubber (absorption tower). The efficiency is low in purifying the exhaust gas emitted from the semiconductor manufacturing process containing toxic gas.

In order to solve the above problems, the domestic patent documents 3 to 6, which were applied and registered by the applicant of the present invention, are equipped with a gas-liquid contacting means complex of multiple functions in which a gas-liquid contacting means unit is combined with a waste gas treatment scrubber in the semiconductor manufacturing process. Disclosed is a horizontal waste gas treatment scrubber equipped with a gas-liquid contact means combined with a gas-liquid contact means suitable for the purification of exhaust gas containing various types of toxic gases according to process conditions, operating hours, and production products. .

However, the above-mentioned applicant's patent of the present invention is designed to be suitable for the purification of exhaust gas emitted from a semiconductor manufacturing process, but for the configuration of a gas-liquid contacting means complex, a plurality of gas-liquid contacting means units and gas-liquid contacting means intermediates are combined. The volume of the functional gas-liquid contact complex increases, and structurally, there is a problem that the waste gas and the cleaning liquid do not diffuse throughout the gas-liquid contact complex, so the applicant of the present invention has improved the above problems with Patent Application No. 10-2019-0044310.

The inventor of the present application has completed the present invention by improving the cleaning power of the cleaning liquid by further improving the material of the gas-liquid contact unit unit in the aforementioned Patent Application No. 10-2019-0044310.

KR 10-0816822 B KR 10-1320638 B KR 10-1478973 B KR 10-1564579 B KR 10-1564580 B KR 10-1564581 B

The problem to be solved by the present invention is to reduce the volume of the gas-liquid contact means unit constituting the gas-liquid contact means complex having a plurality of gas-liquid contact functions mounted on a wet scrubber for purifying waste gas while reducing the volume of the gas-liquid contacting assembly type to facilitate assembly and separation. An object of the present invention is to provide a means unit and to provide a waste gas treatment scrubber using the same.

In particular, by improving the material of the prefabricated gas-liquid contact means for the waste gas treatment scrubber disclosed in the prior patent application No. 10-2019-0044310 applied by the applicant of the present invention, the cleaning power of the cleaning solution is improved to improve the purification action of the waste gas An object of the present invention is to provide an improved prefabricated gas-liquid contact unit unit and a waste gas treatment scrubber using the same.

As a means of solving the problem in the present invention, the prefabricated gas-liquid contact unit unit (MU) for the waste gas treatment scrubber is a mesh front (A1), a mesh back (A2), left side (B1), right side (B2), a hexahedral shape having an upper surface (C1) and a lower surface (C2), an outer case (H) having a space formed therein, and a contact element (U1) inside the outer case (H); In the gas-liquid contact unit unit MU, wherein the contact element U2, the contact element U3, and the contact element U4 are alternately combined with each other and a plurality of contact elements are mounted, the left side surface B1 ) is a plurality of through-holes (a) in the central area formed side by side at regular intervals, and a plurality of long through-holes are formed at regular intervals in the vertical direction. A plurality of coupling recesses (P) and coupling protrusions (R) are formed so as to correspond to each other in each center of the upper surface (C1) and the lower surface (C2), and a plurality of pieces are formed long at regular intervals in the vertical direction while being formed side by side. is formed and the coupling recesses (P1. P2) of the left side (B1) and the coupling protrusions (R1, R2) of the right side (B2) are long formed to correspond to each other, and the upper surface (C1) is the outer case (H) and The gas-liquid contact unit unit (MU) is formed to be detachably formed, and the outer case (H), the contact element (U1), the contact element (U2), the contact element (U3), and the contact element (U4) are exiled. It is made of a synthetic resin containing stone.

In one embodiment of the present invention, the gas-liquid contact unit unit (MU) is made of a synthetic resin containing guiyang stone, and a plurality of prefabricated gas-liquid contact unit units (MU) each have an upper surface (C1) and a lower surface (C2) The coupling recesses (P) and the coupling protrusions (R) formed in the slide are fastened to each other in a sliding manner, and the coupling recesses (P1. P2) and coupling protrusions (R1, R2) formed on each of the left side (B1) and the right side (B2) are It consists of a hybrid filter body (HBF), which is a gas-liquid contact means complex that is separably coupled in the up, down, left, and rear directions by being fastened to each other in a slide manner.

The synthetic resin is polyvinyl chloride resin (PVC) or FM standard approved PVC, where the FM standard approved PVC is a synthetic resin that satisfies the standard set by the mutual insurance organization 'Mutual System'.

The present invention consists of the above synthetic resin containing guiyang stone, specifically, polyvinyl chloride resin (PVC) containing guiyang stone or FM standard approved PVC containing guiyang stone.

The FM standard recognized PVC of the present invention refers to a synthetic resin that satisfies the standards set by the mutual insurance organization 'Mutual System', and is defined as 'FM standard recognized PVC' below.

Another embodiment of the present invention is provided with an inlet (IP) of the waste gas (G) on one side and a purification gas outlet (OP) on the other side, and a cleaning liquid and exhaust between the waste gas inlet (IP) and the purification gas outlet (OP) In the wet type waste gas treatment scrubber (SB) equipped with a gas-liquid contact means for gas contact, the gas-liquid contact means is a prefabricated gas-liquid contacting unit unit (MU) according to the present invention in up, down, left, and rearward directions. It consists of a waste gas treatment scrubber (SB) equipped with a detachably coupled hybrid filter body (HBF).

Gas-liquid contact means according to the present invention is made of synthetic resin containing guiyang-seok, and the cleaning power of the cleaning liquid is improved by the generation of negative ions of guiyang-seok, so that the purification action of waste gas is further improved, and gas-liquid contact function to be suitable for various types of toxic waste gas treatment When a plurality of different contact elements are combined to form a gas-liquid contact unit unit having a plurality of gas-liquid contact functions, there is an effect of reducing the volume of the gas-liquid contact unit unit.

In addition, the hybrid filter body (HBF), which is a gas-liquid contacting means complex in which a plurality of prefabricated gas-liquid contacting means units of the present invention are combined, is through holes formed on the left side (B1) and right side (B2) of the gas-liquid contacting means unit body (MU). There is an effect that the cleaning liquid and the waste gas are distributed and diffused throughout the hybrid filter body (HBF), which further improves the gas-liquid contact efficiency of the cleaning liquid and the waste gas.

1 is an overall perspective view showing a prefabricated gas-liquid contact unit unit (MU) of the present invention;
2 is an overall perspective view showing the prefabricated gas-liquid contact unit unit (MU) of the present invention in left and right directions;
3 is an exploded perspective view showing the coupling relationship between the outer case (H) and the contact elements (U1) to (U4) according to the prefabricated gas-liquid contact means unit body (MU) of the present invention;
4 is a view showing a state in which the contact elements (U1) to (U3) are alternately inserted into the inside of the outer case (H);
5 and 6 are views showing the left and right sides of the outer case (H) according to the prefabricated gas-liquid contact unit unit (MU) of the present invention;
7 is a view showing a transverse section of the prefabricated gas-liquid contact unit unit (MU) according to the present invention;
8 to 12 are views showing the structure of the contact element (UI) to the contact element (U4) of the present invention.
13 and 14 are views showing a hybrid filter body (HBF), which is a gas-liquid contacting means complex in which a plurality of gas-liquid contacting unit units (MU) of the John invention are assembled.
15 is a view schematically showing a wet scrub with a hybrid filter body (HBF) manufactured using the gas-liquid contact unit unit (MU) of the present invention.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings, but the present invention is not limited thereto.

1 is an overall perspective view showing a prefabricated gas-liquid contacting unit unit body (MU) of the present invention, and FIG. 2 is an overall perspective view showing left and right directions of a prefabricated gas-liquid contacting unit unit body (MU) of the present invention, FIGS. 1 and 2 When the prefabricated gas-liquid contact unit unit (MU) according to the present invention is described with reference to

1 and 2, the prefabricated gas-liquid contact unit unit (MU) according to the present invention is a mesh front surface (A1), a mesh back surface (A2), and a left side surface (B1). ), a right side (B2), an upper surface (C1) and a lower surface (C2) having a hexahedral shape, and consists of an outer case (H) with a space formed therein, and the upper surface (C1) is an outer case (H) and which are separably joined together.

In each of the front surface (A1) of the mesh and the rear surface (A2) of the mesh (網狀), a rectangular through hole is divided into quarters by the partition wall (w), and the partition wall (w) is spaced from the center at regular intervals. The through hole ha of the structure is made of a network formed continuously in all directions (refer to the contact element U3 in Fig. 10).

The network structure formed on the front surface (A1) of the mesh and the rear surface (A2) of the mesh is introduced while rapidly dispersing the waste gas and cleaning liquid flowing into the gas-liquid contact unit unit (MU) into the contact means. It has the function to

The upper surface (C1) is formed to be detachably coupled with the coupling protrusions formed in the corners of the front and rear surfaces (A1, A2) and the coupling recesses are formed in the corners meeting the front and rear surfaces (A1, A2), and A coupling protrusion (R) is formed in the central portion of the upper surface (C1), and a coupling recess (P) corresponding to the coupling protrusion (R) is formed on the lower surface (C2) to be detachably coupled in a slide manner. .

Figure 3 is an exploded perspective view showing the coupling relationship between the outer case (H) and the contact elements (U1) to (U4) according to the prefabricated gas-liquid contact means unit body (MU) of the present invention, Figure 4 is the outer case (H) It is a view showing a state in which the contact elements (U1) to (U3) are alternately inserted therein.

As shown in FIG. 3, the contact elements U1 to U4 are alternately inserted into the outer case H, and the upper surface C1 is detachably coupled to the outer case H, FIG. 4 As shown in , the contact elements U1 to U3 are the contact element U3, the contact element U2, the contact element U1, the contact element U2, and the contact element U3 in that order. are alternately combined with each other, and the contact element U4 is installed on both sides of the outer side.

The hexahedral outer case (H) and the contact element (U1) to the contact element (U4) of the prefabricated gas-liquid contact means unit body (MU) according to the present invention are made of a synthetic resin containing guiyang stone, and the synthetic resin is polar It is vinyl chloride resin (PVC) or FM standard certified PVC, and FM standard certified PVC is more preferable.

The FM standard recognized PVC has excellent durability that meets the standards set by the mutual insurance organization 'Mutual System' and has excellent incombustibility, and is a known synthetic resin disclosed in Korean Patent Publication No. 10-1901679. .

Specifically, the FM standard recognized PVC is based on 100 parts by weight of a bisphenol-type vinyl ester resin having an unsaturated polyester group at the end of the epoxy resin, 10 to 30 parts by weight of a chlorinated polyvinyl chloride resin, and a kraft polyvinyl chloride copolymer coupling agent 5 for maleic anhydride. ~ 10 parts by weight, surface-etched diameter 5 ~ 14㎛, length 0.1 ~ 5mm aramid fiber 1 ~ 5 parts by weight, expanded graphite 12 ~ 20 parts by weight, flame retardant 10 ~ 30 parts by weight, composite flame retardant 10 ~ 20 It is composed of 1 to 1.5 parts by weight of the curing agent, and 0.5 to 1 part by weight of the accelerator.

The synthetic resin containing the earyangseok according to the present invention preferably contains 10 to 20% by weight of the earyangseok based on the total weight of the polyvinyl chloride resin (PVC) or the FM standard recognized PVC resin.

As a well-known mineral that emits negative ions and far-infrared rays, it has the property of generating negative ions when vibrating by an external force, and the degree of anion generation is about 9000 / cc in weak vibration and 24000 / cc in strong vibration. .

The prefabricated gas-liquid contact unit unit (MU) made of synthetic resin containing earyangseok according to the present invention generates negative ions by the impact of the cleaning liquid when in contact with the cleaning liquid, thereby increasing the purification action of waste gas by negative ions. Since the prefabricated gas-liquid contact unit unit (MU) containing gwiyangseok according to the present invention is manufactured by a well-known synthetic resin molding technology, it can be easily manufactured by those skilled in the technical sale to which the present invention belongs, so the description of the molding technology is omitted.

5 and 6 are views showing the left and right sides (B1, B2) of the outer case (H) according to the prefabricated gas-liquid contact unit unit (MU) of the present invention, and with reference to FIGS. 5 and 6, the left and right sides ( When describing the through hole (a) formed in B1, B2),

5 and 6, a plurality of through holes (a) formed in the left side surface (B1) are formed side by side at predetermined intervals in the central region of the left side surface (B1) in the horizontal direction at predetermined intervals in the vertical direction. A plurality of through holes (a) formed in the right side (B2) are formed side by side at a predetermined interval in the horizontal direction over the whole of the right side (B2), and a plurality of holes (a) are formed at regular intervals in the vertical direction. It is made up of long ones.

The through holes (a) formed in the left and right sides (B1, B2) serve to flow out and diffuse the waste gas and the washing liquid flowing into the gas-liquid contact unit unit (MU) in the left and right directions, and the function of the through hole (a) To explain more specifically,

The hybrid filter body (HBF), which is a gas-liquid contact means complex produced by combining a plurality of gas-liquid contact unit units (MU) according to the present invention, flows into the hybrid filter body (HBF) when the waste gas and the cleaning liquid are used as contact means. As the waste gas and the cleaning solution flow out and diffuse in the left and right directions through the through holes (a) formed on the left and right sides B1 and B2, the waste gas and the cleaning solution flow throughout the interior of the hybrid filter body (HBF) and As it diffuses, the gas-liquid contact between the waste gas and the cleaning liquid is improved.

7 is a view showing a transverse cross-section of the prefabricated gas-liquid contact unit unit (MU) according to the present invention. Referring to FIG.

7, on the left side (B1), a plurality of coupling protrusions (R1, R2) are formed in the longitudinal direction at equal intervals from one edge to the other edge, and on the right side (B2) there is a coupling recess ( P1, P2) is formed long in the vertical direction, each of the coupling protrusions (R1, R2) formed on the left side (B1) and the coupling recesses (P1, P2) formed on the right side (B2) is a plurality of outer cases coupled It consists of a coupling recessed portion and a coupling protrusion corresponding to each other when being separably coupled in a sliding manner.

8 to 12 are views showing the structure of the contact element (UI) - the contact element (U4) of the present invention, and with reference to FIGS. 8 - 12, the contact element (UI) - the contact element according to the present invention (U4) is described in detail,

In the contact element U1 shown in Fig. 8, a plurality of circular rods d of a certain diameter are installed at regular intervals in parallel in the vertical direction inside the thin rectangular frame f, and at the center of the horizontal side to the partition wall w. It is installed to be divided into two parts by a Elevation shows action.

The contact element U2 shown in FIG. 9 is made of a thin plate-like network body with rectangular through-holes h of a certain size formed continuously in all directions inside a thin rectangular frame f, and the contact element U2 is It shows the effect of uniformly dispersing the waste gas and the cleaning liquid by the mesh-shaped rectangular through hole (h).

The contact element U3 shown in FIG. 10 has a structure in which the rectangular through hole is divided into quarters by the partition wall w inside the thin rectangular frame f, and the partition wall w is uniformly spaced apart from the center of the through hole. (ha) is made of a thin plate-like network formed continuously in all directions, and the contact element U3 exhibits the effect of rapidly introducing and diffusing waste gas and cleaning solution through the mesh-shaped through-holes (ha).

The contact element U4 shown in FIGS. 11 and 12 is an approximately square in which upper and lower surfaces 1 and 2 are coupled to each other with a predetermined thickness t by a protrusion 3 with a network having an approximately '目' shape. A plurality of pillar-shaped supports (T) are arranged at regular intervals, and the thin mesh sheet (S) is bent between the mesh support (T) and the mesh support (T) and is arranged in a substantially wavy shape. The support body T of the contact element U4 may be formed in a structure that can be disassembled and assembled by forming the protrusion 3 in a separable coupling structure as shown in FIG. 11 .

The contact element U4 has a function of inducing foaming of the cleaning liquid to filter and absorb polluting particulate matter contained in the waste gas by the foam, particulate matter generated during gas-liquid contact, mist, and the like.

The contact elements U1 to U3 having different gas-liquid contact functions according to the present invention described above are formed in a thin plate shape, whereby the contact elements U1 to U3 having different gas-liquid contact functions are alternately formed. Even when combined with a single gas-liquid contact unit unit (MU), there is an advantage in that the volume is reduced while exhibiting a plurality of gas-liquid contact functions. That is, the passage section of the waste gas and the cleaning liquid is shortened, thereby reducing the flow resistance of the waste gas and the cleaning liquid, thereby improving the operation rate of the wet scrubber.

In addition, in the gas-liquid contact unit unit MU according to the present invention, waste gas and cleaning liquid are discharged to the left and right sides of the gas-liquid contact unit unit MU by a plurality of through holes (a) formed in the left and right sides B1 and B2 thereof. Since it is diffused, the waste gas and the cleaning liquid are diffused throughout the interior of the hybrid filter body (HBF), which is a gas-liquid contacting means complex combined with a plurality of gas-liquid contacting unit units (MU), thereby improving the efficiency of gas-liquid contacting.

13 and 14 are views showing a hybrid filter body (HBF), which is a gas-liquid contacting means complex in which a plurality of gas-liquid contacting unit units (MU) of the present invention are assembled in up, down, left, and right directions, see FIGS. 13 and 14 To explain the assembly relationship of the gas-liquid contact unit unit (MU) of the present invention,

The gas-liquid contact means unit body (MU) has four coupling protrusions (R1, R2) formed on the left side surface (B1) of the other gas-liquid contact means unit body (MU) on the right side surface (B2) of the four coupling recesses (P1, P2) is coupled while connecting in a slide manner, and this coupling is repeated to combine a plurality of gas-liquid contact unit units (MU) in the left and right directions, and a coupling protrusion (C1) formed on the upper surface (C1) of the gas-liquid contact unit unit body (MU) R) and the coupling recess (P) formed on the lower surface (C2) of the other gas-liquid contacting unit unit (MU) are coupled while being connected in a slide manner, and this coupling is repeated to a plurality of gas-liquid contacting unit units in the up and down directions ( MU) is combined to form a hybrid filter body (HBF), which is a gas-liquid contact means complex.

15 is a view schematically showing a wet scrubber for treating waste gas (G) according to an embodiment according to the present invention. With reference to FIG. 15, a waste gas treatment wet scrubber using a gas-liquid contact unit unit (MU) according to the present invention To explain,

As shown in Figure 15, the scrubber (SB) is a horizontally arranged housing having an inlet (IP) and a purge gas outlet (OP) of the waste gas (G) to the inside of the inlet (IP) and the outlet (OP) a certain interval between the outlet (OP) A plurality of hybrid filter bodies (HBF) are mounted in parallel, and cleaning liquid injection nozzles (N) are installed on the front and rear sides of each of the hybrid filter bodies (HBF). Demister (TH) is installed, and a cleaning liquid storage tank for introducing and recovering cleaning agent is installed on the lower side of the outside of the housing. As shown in FIG. 14, (HBF) is a combination of a plurality of gas-liquid contact unit units (MU) in the up, down, left, and right directions.

MU: gas-liquid contact unit, H; Outer case, A1, A2, B1, B2, C1, C2; Front, rear, left, right side and top, bottom, U1, U2, U3, U4: contact element, P, P1, P2; bonding unit. R, R1, R2: binding protrusion, a, h, ha: through hole, w; bulkhead, S: mesh sheet, T: support,
SB; Scrubber, HBF: Hybrid filter

Claims (5)

It is a hexahedral shape having a mesh front surface (A1), a mesh back surface (A2), a left surface (B1), a right surface (B2), an upper surface (C1), and a lower surface (C2). The outer case H having a space formed therein, and the contact element U1, the contact element U2, the contact element U3 and the contact element U4 inside the outer case H are each other In the gas-liquid contact unit unit (MU) which is alternately combined and a plurality of contact elements are mounted,
In the left side (B1), a plurality of through holes (a) are formed side by side at regular intervals in the left and right directions in the central region, and a plurality of them are formed elongated at regular intervals in the up and down directions, and the right side (B2) is formed on both sides of the periphery. In the region, a plurality of through holes (a) are formed side by side at regular intervals in the left and right directions, and a plurality of holes (a) are formed long at regular intervals in the upper and lower directions,
A plurality of coupling recesses (P) and coupling protrusions (R) are formed in the horizontal direction at regular intervals in the center portion so as to correspond to each other on the upper surface (C1) and the lower surface (C2), and the left side surface (B1) A plurality of coupling protrusions (R1, R2) are formed in the longitudinal direction at equal intervals from one edge to the other edge, and the coupling recesses (P1. P2) are also formed on the right side (B2) at a position corresponding to the left side (B1). and the upper surface (C1) is formed detachably from the outer case (H),
The outer case (H), the contact element (U1), the contact element (U2), the contact element (U3), and the contact element (U4) of the gas-liquid contact unit unit (MU) are made of synthetic resin containing agaric stone. A prefabricated gas-liquid contact unit unit for a waste gas treatment scrubber, characterized in that it is made. The prefabricated gas-liquid contact means for a waste gas treatment scrubber according to claim 1, wherein the synthetic resin containing earyangseok contains 10 to 20% by weight of earyangseok based on the total weight of polyvinyl chloride resin or FM standard recognized PVC resin. monomer. The method according to claim 2, The contact element (U1), the contact element (U2), the contact element (U3), and the contact element (U4) are the contact element (U4), the contact element inside the outer case (H) (U3), the contact element (U2), the contact element (U1), the contact element (U2), the contact element (U3), the contact element (U4) are installed alternately in the order,
In each of the front surface (A1) of the mesh and the rear surface (A2) of the mesh (網狀), the partition wall (w) is uniformly divided into quarters by a partition wall (w) inside to form a through hole in the center A through hole (ha) consisting of a spaced structure is formed continuously in all directions,
In the contact element U1, a plurality of circular rods d of a certain diameter are installed at regular intervals in parallel in the vertical direction inside the thin square frame f, It is installed to be divided into two parts and formed into a thin plate-like structure,
The contact element (U2) is formed in a thin plate-shaped network structure by continuously forming a rectangular through hole (h) of a predetermined size inside a thin rectangular frame (f) in all directions,
The contact element U3 has a through hole ha of a structure in which the rectangular through hole is divided into quarters by the partition wall w in the inside of the thin rectangular frame f, and the partition wall w is uniformly spaced from the center. It is formed in a thin plate-like network structure formed continuously in all directions,
The contact element (U4) is a support body (T) made of a rectangular prism in which the upper and lower surfaces (1,2) are coupled to each other with a certain thickness (t) by the protrusion (3) of a '目'-shaped network, respectively. A prefabricated gas-liquid contact means unit body for a waste gas treatment scrubber, characterized in that a plurality of are arranged at regular intervals, and the thin mesh sheet (S) is bent between the mesh support (T) and the mesh support (T) in a wavy shape. . In the formation of a hybrid filter body (HBF), which is a gas-liquid contacting means complex, by combining a plurality of gas-liquid contacting unit units (MU) according to any one of claims 1 to 3
The four coupling protrusions (R1, R2) formed on the left side (B1) of the gas-liquid contacting means unit (MU) are formed on the right side (B2) of the other gas-liquid contacting means unit (MU) Four coupling recesses (P1, P2) is coupled while connecting in a slide manner, and this coupling is repeated to combine a plurality of gas-liquid contact unit units (MU) in the left and right directions, and a coupling formed on the upper surface (C1) of the gas-liquid contact unit unit body (MU) The protrusion (R) and the coupling recess (P) formed on the lower surface (C2) of the unit body (MU) of the other gas-liquid contact means are coupled while being connected in a slide manner, and this coupling is repeated to form a plurality of gas-liquid contact means in the up and down directions. A hybrid filter body, characterized in that the unit (MU) is combined. A waste gas treatment scrubber, characterized in that the hybrid filter body (HBF) according to claim 4 is installed as a contact means for waste gas and cleaning liquid.

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