JP3750800B2

JP3750800B2 - Air purifier

Info

Publication number: JP3750800B2
Application number: JP2002024289A
Authority: JP
Inventors: 功寺田; 智美濃部; 稔久岡部
Original assignee: Nichias Corp
Current assignee: Nichias Corp
Priority date: 2002-01-31
Filing date: 2002-01-31
Publication date: 2006-03-01
Anticipated expiration: 2022-01-31
Also published as: JP2003222355A

Description

【０００１】
【発明の属する技術分野】
本発明は、空気中の化学汚染物質を水で洗浄して清浄にする空気清浄装置に関するものである。さらに詳しくは、半導体や液晶デバイスの製造工場、製薬工場やライフサイエンス関連設備等のクリーンルームに供給する空気の空気清浄装置に関するものである。
【０００２】
【従来の技術】
半導体や液晶デバイスの製造工場、製薬工場やライフサイエンス関連設備等では、製品歩留りを向上し、或いは品質確保するために、従来の微粒子状の汚染物質に加え、ガス状化学汚染物質をも除去することが望まれている。このような化学汚染物質としては、例えば、ナトリウム、カリウム、カルシウム、ホウ素等の無機質の金属元素、フッ素イオン、塩化物イオン、硝酸イオン、亜硝酸イオン、硫酸イオン、亜硫酸イオン等のアニオン類や、アンモニウムイオン等のカチオン類等が挙げられる。従来の微粒子状の汚染物質はＵＬＰＡフィルター等の集塵フィルターで除去できるが、これらの化学汚染物質はＵＬＰＡフィルター等では除去できない。
【０００３】
このため、空気中の化学汚染物質は、従来より、いわゆる水シャワーと呼ばれる水滴のシャワーを用いる装置や、化学成分を吸着除去できるケミカルフィルターを用いる装置により除去されている。ここで、前者の水シャワーを用いる装置は、空気を加湿する加湿手段と空気中の水分を凝縮除去する凝縮手段とを有し、化学汚染物質を含む空気を水滴等の噴霧等の加湿手段により加湿すると共に、過剰な水分を除去し、次いで、この加湿された空気を冷却器等の凝縮手段により加湿手段で除去しきれずに、空気中に残存する化学汚染物質を凝縮水と共に除去する装置である。
【０００４】
【発明が解決しようとする課題】
しかしながら、前者の水シャワーを用いた装置は、被処理空気と水との接触効率が悪いために化学汚染物質の除去効率が低い。このため、水シャワーを用いた装置全体の奥行きは数ｍ程度も必要になり、広大な設置スペースを要すると共に、圧力損失も大きくなるという問題があった。また、水シャワーの処理水としては、通常高価な脱イオン水（ＤＩＷ）が用いられているが、処理水量も多く必要となるためコストが高くなるという問題があった。さらに、低コスト化のためにＤＩＷは通常、循環使用されているが、一旦吸収した化学汚染物質の再気散が生じ易いという問題があった。一方、後者のケミカルフィルターを用いた装置は、ケミカルフィルター自体が高価であり、しかも吸着能力に寿命があるため、コストが高くなるという問題があった。
【０００５】
従って、本発明の目的は、空気中の化学汚染物質の除去効率が高く、処理装置がコンパクトで、圧力損失が小さく、低コストな空気処理装置を提供することにある。
【０００６】
かかる実情において、本発明者らは鋭意検討を行った結果、加湿手段又は凝縮手段の一方又は両方に、金属製斜行ハニカムを用い、該金属製斜行ハニカムの前面開口部から空気を導入すると共に、上面開口部から水を供給すれば、金属製斜行ハニカムに導入される空気と供給される水とが効率よく接触して、加湿手段においては効率よく空気中の湿度を上昇させ、且つ、化学汚染物質を効率よく除去することができる。また、凝縮手段においては、加湿手段から排出された空気中に残存する化学汚染物質が凝縮水中に効率よく取り込まれて除去されることを見出し、本発明を完成するに至った。
【０００７】
【課題を解決するための手段】
本発明の請求項１記載の発明は、空気導入口と、水供給手段と、前後両面と上下両面とが開口した金属製斜行ハニカムとを有しており、前記金属製斜行ハニカムは、一方向に向かって伝播する波形形状を有する厚さ１０〜２００μｍの金属製波形シートが複数積層されてハニカム形状を呈し、積層される金属製波形シートは、波の伝播方向が一枚おきに斜めに交差するように積層され、且つ、二層おきのシートの波の伝播方向がそれぞれ略同一方向になるように配置され、また、金属製波形シートに平行な面に対して垂直な４面で切断して直方体を形成し、該切断面が金属製波形シートの波の伝播方向と平行でなく、且つ、垂直でもない厚さ１００〜１０００ｍｍの金属製斜行ハニカムであって、その前面が空気導入口を向き、且つ、導入された空気が内部を通過するように前記金属製斜行ハニカムを配置し、前記水供給手段が該金属製斜行ハニカムの上方に配置されたことを特徴としている。
【０００８】
本発明の請求項２記載の発明は、空気導入口と、水供給手段と、前後両面と上下両面とが開口した金属製斜行ハニカムとを有しており、前記金属製斜行ハニカムは、一方向に向かって伝播する波形形状を有する厚さ１０〜２００μｍの金属製波形シートが複数積層されてハニカム形状を呈し、積層される金属製波形シートは、波の伝播方向が一枚おきに斜めに交差するように積層され、且つ、二層おきのシートの波の伝播方向がそれぞれ略同一方向になるように配置され、また、金属製波形シートに平行な面に対して垂直な４面で切断して直方体を形成し、該切断面が金属製波形シートの波の伝播方向と平行でなく、且つ、垂直でもない厚さ１００〜１０００ｍｍの金属製斜行ハニカムであって、その前面が空気導入口を向き、且つ、導入された空気が内部を通過するように前記金属製斜行ハニカムを配置し、該金属製斜行ハニカムの上方には前記水供給手段が配置され、該水供給手段で供給された水により前記金属製斜行ハニカム内で前記空気を加湿すると共に、得られる過剰な水分に化学汚染物質の少なくとも一部を取り込むことで、空気中から化学汚染物質を除去することを特徴としている。
【０００９】
本発明の請求項３記載の発明は、空気導入口と、水供給手段と、前後両面と上下両面とが開口した金属製斜行ハニカムとを有しており、前記金属製斜行ハニカムは、一方向に向かって伝播する波形形状を有する厚さ１０〜２００μｍの金属製波形シートが複数積層されてハニカム形状を呈し、積層される金属製波形シートは、波の伝播方向が一枚おきに斜めに交差するように積層され、且つ、二層おきのシートの波の伝播方向がそれぞれ略同一方向になるように配置され、また、金属製波形シートに平行な面に対して垂直な４面で切断して直方体を形成し、該切断面が金属製波形シートの波の伝播方向と平行でなく、且つ、垂直でもない厚さ１００〜１０００ｍｍの金属製斜行ハニカムであって、その前面が空気導入口を向き、且つ、導入された空気が内部を通過するように前記金属製斜行ハニカムを配置し、該金属製斜行ハニカムの上方には前記水供給手段が配置され、該水供給手段で供給された水により前記金属製斜行ハニカム内で前記空気を除湿すると共に、得られる凝縮水に化学汚染物質の少なくとも一部を取り込むことで、空気中から化学汚染物質を除去することを特徴としている。
【００１０】
本発明の請求項４記載の発明は、加湿部と凝縮部とを有する空気清浄装置であって、加湿部と凝縮部の各々が、空気導入口と、水供給手段と、前後両面と上下両面とが開口した金属製斜行ハニカムとを有しており、前記金属製斜行ハニカムは、一方向に向かって伝播する波形形状を有する厚さ１０〜２００μｍの金属製波形シートが複数積層されてハニカム形状を呈し、積層される金属製波形シートは、波の伝播方向が一枚おきに斜めに交差するように積層され、且つ、二層おきのシートの波の伝播方向がそれぞれ略同一方向になるように配置され、また、金属製波形シートに平行な面に対して垂直な４面で切断して直方体を形成し、該切断面が金属製波形シートの波の伝播方向と平行でなく、且つ、垂直でもない厚さ１００〜１０００ｍｍの金属製斜行ハニカムであって、その前面が空気導入口を向き、且つ、導入された空気が内部を通過するように前記金属製斜行ハニカムを配置し、該金属製斜行ハニカムの上方には前記水供給手段が配置され、前記加湿部では水供給手段で供給された水により前記金属製斜行ハニカム内で前記空気を加湿すると共に、得られる過剰な水分に化学汚染物質の少なくとも一部を取り込むことで、空気中から化学汚染物質を除去し、前記凝縮部では水供給手段で供給された水により前記金属製斜行ハニカム内で空気を除湿すると共に、得られる凝縮水に化学汚染物質の少なくとも一部を取り込むことで、空気中から化学汚染物質を除去することを特徴としている。
【００１１】
【発明の実施の形態】
本発明に係る空気清浄装置は、加湿部と凝縮部とを有するものであり、加湿部中の加湿手段又は凝縮部中の凝縮手段の一方又は両方に金属製斜行ハニカムが用いられるものである。本発明に係る空気清浄装置の実施形態は、金属製斜行ハニカムの用い方により大きく４つに分類される。具体的には、金属製斜行ハニカムが加湿手段及び凝縮手段の両方に用いられる第１の実施形態、金属製斜行ハニカムが加湿手段のみに用いられる第２の実施形態、金属製斜行ハニカムが凝縮手段のみに用いられる第３の実施形態及び１台の金属製斜行ハニカムで加湿と凝縮とを共に行う第４の実施形態が挙げられる。
【００１２】
まず、第１の実施形態について図１を参照して説明する。図１は、第１の実施形態に係る空気清浄装置の概要を模式的に示す図であり、１は金属製斜行ハニカム、５はブロアー、１０は加湿部、１１は第１空気導入口、１２は第１水供給手段、１３は加湿手段、１４は第１空気排出口、１５は第１水排出手段、１６は第１循環ポンプ、２０は凝縮部、２１は第２空気導入口、２２は第２水供給手段、２３は凝縮手段、２４は第２空気排出口、２５は第２水排出手段、２６は第２循環ポンプ、３０は温度及び湿度の調整手段、３１はＵＬＰＡフィルター、３２は加湿手段循環水溜め部、３３は凝縮手段循環水溜め部、４０は空気清浄装置を示す。
【００１３】
本発明において、加湿部１０は、第１空気導入口１１、第１水供給手段１２、第１空気導入口１１から導入された空気を第１水供給手段１２で供給された水により加湿する加湿手段１３、加湿された空気を排出する第１空気排出口１４及び加湿手段循環水溜め部３２に溜まった系内の水を系外に排出する第１水排出手段１５を備えるものである。
【００１４】
加湿部１０では、被処理空気が第１空気導入口１１から導入されると共に、第１空気排出口１４から排出され、一方、水は第１水供給手段１２で加湿手段１３に供給されると共に第１水排出手段１５から排出される。この際、加湿部１０中の加湿手段１３において、被処理空気と水が接触するようになっており、これにより加湿部１０系内の被処理空気の湿度が高くなるようになっている。加湿部１０は、このように横成されることにより、被処理空気を加湿すると共に、被処理空気中に含まれる化学汚染物質の一部を該余分な水分中に取り込んで除去する作用を示す。
【００１５】
本発明において、凝縮部２０は、第１空気排出口１１に連設される第２空気導入口２１、第２水供給手段２２、第２空気導入口２１より導入された空気中の水分を第２水供給手段２２で供給された水により凝縮する凝縮手段２３、該凝縮後の空気を排出する第２空気排出口２４及び凝縮手段循環水溜め部３３に溜まった系内の水を系外に排出する第２水排出手段２５を備えるものである。
【００１６】
凝縮部２０では、被処理空気が第２空気導入口２１から導入されると共に、第２空気排出口２４から排出され、一方、水は第２水供給手段２２で凝縮手段２３に供給されると共に、第２水排出手段２５から排出される。この際、凝縮部２０中の凝縮手段２３において、被処理空気と水が接触するようになっており、これにより凝縮部２０系内の被処理空気の湿度が低くなるようになっている。凝縮部２０は、このように構成されることにより、被処理空気を所定の湿度まで除湿して除湿の際に生じた凝縮水を排出すると共に、加湿部１０で除去されずに被処理空気中に残存する化学汚染物質を凝縮水に可能な限り取り込んで除去する。
【００１７】
本発明において、化学汚染物質とは、高性能（ＵＬＰＡ）フィルターの編み目を通過するような微細な化学物質を意味し、例えば、ナトリウム、カリウム、カルシウム、ホウ素等の無機質の金属元素、フッ素イオン、塩化物イオン、硝酸イオン、亜硝酸イオン、硫酸イオン、亜硫酸イオン等のアニオン類や、アンモニウムイオン等のカチオン類等である。
【００１８】
第１の実施形態は、加湿手段１３及び凝縮手段２３として金属製斜行ハニカム１が用いられる。当該金属製斜行ハニカム１を図２を参照して説明する。金属製斜行ハニカム１は、一方向に向かって伝播する波形形状を有する波形シート２，３（以下、「コルゲート状シート」ともいう。）が複数積層されてハニカム形状を呈するものであって、積層されるコルゲート状シート２，３は、波の伝播方向が一枚おきに斜めに交差するように積層され、且つ、二層おきのシートの波の伝播方向がそれぞれ略同一方向になるように配置されたハニカム状体である。
【００１９】
金属製斜行ハニカム１は、コルゲート状シート２，３に平行な面に対して垂直な４面１０１〜１０４で切断して直方体を形成し、該切断面がコルゲート状シート２，３の波の伝播方向と平行でなく、且つ、垂直でもないようにした場合、該直方体を切断面の１つ１０４を下面にし、且つ、コルゲート状シート２，３の最外層１０５，１０６をそれぞれ左右面にして載置すると、切断面である前後両面１０２，１０３及び上下両面１０１，１０４の４面は全てハニカムセルが開口し、左右面１０５，１０６はコルゲート状シート２，３で閉じられた構造を有する。すなわち、金属製斜行ハニカム１は、前後両面１０２，１０３と、上下両面１０１，１０４とが開口する構造を有するものである。また、該切断面の、例えば前後両面１０２，１０３は、斜め上方向に延設されるセルと斜め下方向に延設されるセルとが一層おきに形成される。斜め方向に延設されるセルの前後両面からみた場合の空気の流入、流出方向（水平方向）に対する斜め角度（図中、符号Ｘ）は、通常１５〜４５度、好ましくは２５〜３５度の範囲内にする。上記斜め角度が該範囲内にあると、流下速度が適度の範囲となり接触効率が向上するため好ましい。
【００２０】
上記金属製斜行ハニカム１において、積層されたコルゲート状シート２，３の一層おきや波の伝播方向が互いに交差する角度（図中、符号Ｙ）は、通常３０〜９０度、好ましくは５０〜７０度である。このようにコルゲート状シート２，３を上記角度範囲内で交差するように積層すると、上記のように斜め角度（Ｘ）を上記の１５〜４５度とした場合に、被処理空気及び水がハニカムセルと実質的に接触する面積が大きくなるため、被処理空気と水との接触、すなわち、加湿手段においては被処理空気の加湿の効率、また、凝縮手段においては被処理空気中の水分の凝縮による除湿の効率が高くなるため好ましい。後述するように、本発明において、被処理空気は金属製斜行ハニカム１の前面開口部１０３から導入され、また、水面開口部１０１から第１水供給手段１２、例えば、給水ダクト４により供給され金属製斜行ハニカム１のコルゲート状シート２，３に浸透し、且つ、該コルゲート状シート２，３の極く表面をゆっくりと下方に流下するため、被処理空気の通気方向と浸透壁面の水の流下方向とが適度の角度を保持し、接触効率が高くなる。
【００２１】
本発明で用いられ金属製斜行ハニカム１のセルの高さ、すなわち、波形の山と谷間の寸法を示すセルの山高寸法は、通常２〜８ｍｍ、好ましくは３〜５ｍｍである。セルの山高寸法が２ｍｍ未満であると製造が困難であり、圧力損失が大きくなるため好ましくない。また、セルの山高寸法が８ｍｍを越えると、化学汚染物質の除去効率が低下するため好ましくない。
【００２２】
金属製斜行ハニカムのコルゲート状シートの状態におけるセルの幅、すなわち、セルピッチは、通常２．５〜１２．０ｍｍ、好ましくは５〜１０．０ｍｍである。また、金属製斜行ハニカムの前面開口部と後面開口部との間の寸法、すなわち、金属製斜行ハニカム１の厚さ（ｔ）は、通常１００〜１０００ｍｍ、好ましくは２００〜８００ｍｍである。該厚さが１００ｍｍ未満であると、ＮＯ₂ ^-等の除去効率が低下するため好ましくなく、該厚さが１０００ｍｍを越えると化学汚染物質の除去効率がこれ以上向上せず、圧力損失が大きくなるため好ましくない。梅雨時のように湿度が高い時期に、１台のハニカムで化学汚染物質の除去と除湿を行う場合には、除湿を十分に行うために８００ｍｍ程度の厚いものを使用した方がよい。なお、本発明において、金属製斜行ハニカムの厚さは、斜行ハニカムを複数枚使用する場合には、この合計の厚さが上記範囲内のものであればよい。例えば、厚さが３００ｍｍの金属製斜行ハニカムを用いる場合には、厚さが１００ｍｍの金属製斜行ハニカムを３枚厚さ方向に重ねて合計の厚さを３００ｍｍとしてもよい。また、従来加湿手段として用いられていた水シャワーは、装置の奥行きが数ｍ必要であるが、加湿手段として金属製斜行ハニカムを用いると、金属製斜行ハニカム自体の厚さはせいぜい４００ｍｍ程度であるため、装置の設置スペースを大幅に小さくすることができる。このような大幅な省スペース化は半導体製造工場等の合理化の要求を満足する。さらに、水を循環するポンプの能力は、従来の水シャワーのものと比較すると格段に少なくて済み、大幅な省エネルギー化をも図ることができる。
【００２３】
本発明で使用される金属製斜行ハニカムの材質は、強度、化学的安定性等が金属ハニカム担体に要求される条件を満たすものでものであればよく、特に限定されないが、例えば、ステンレス、アルミニウム、銅等が挙げられる。
厚さは１０〜２００μｍで、１０μｍより薄いと、強度や加工性が悪く、２００μｍを超えると重く、しかも圧力損失が大きいという問題がある。好ましい厚さは３０〜１００μｍである。
【００２４】
本発明で用いられるコルゲート状シートは、平板状金属箔をコルゲート加工してなるものであり、金属箔の面内の一方向に波が進行するように凹凸が形成されたものである。ここでコルゲート加工とは、平板状物を波形状物に加工することを意味する。
【００２５】
上記無機繊維基材をコルゲート状シートに成形する方法としては、径方向に振幅する波形の凹凸が表面に形成された複数の歯車間に平板状シートを通すような公知のコルゲーターを用いる方法が挙げられる。得られたコルゲート状シートから上記金属製斜行ハニカムを成形する方法としては、例えば、まず、上記コルゲート状シートを縦１００ｍｍ（成形後の厚み寸法）×横３０００ｍｍ程度の矩形の裁断型に対し、波の伝播方向が矩形型の一辺に対して１５〜４５度になるように配置して裁断して矩形のコルゲート状シートを作製し、次いで、得られた矩形のコルゲート状シートを１枚おきの波の伝播方向が斜交するように配置し、これらを積層する方法が挙げられる。なお、このようにして製造した場合、上記裁断型の長さが金属製斜行ハニカム１枚の厚さとなる。このため、例えば、加湿手段や凝縮手段に必要な金属製斜行ハニカムの厚さ、すなわち、金属製斜行ハニカムの前面開口部と後面開口部との間の寸法を３００ｍｍとする場合には、縦１００ｍｍの裁断型で作製した厚さ１００ｍｍの金属製斜行ハニカムを長さ方向に３枚重ねて使用すればよい。
【００２６】
第１の実施形態では、加湿手段１３及び凝縮手段２３に、前後両面と上下両面とが開口す金属製斜行ハニカム１が、該金属製斜行ハニカム１の前面をそれぞれ第１空気導入口１１側及び第２空気導入口２１側に向けて、且つ、導入された空気が金属製斜行ハニカム１の内部を通過するように配置され、さらに、該金属製斜行ハニカム１の上面にそれぞれ第１水供給手段１２及び第２水供給手段２２が設けられる。第１空気排出口１４と第２空気導入口２１間はダクト等で連結される。
【００２７】
第１水供給手段１２は、加湿部１０に加湿手段１３として配置された金属製斜行ハニカム１の上面開口部１０１に上面から水を供給する手段であり、また、第２水供給手段２２は、凝縮部２０に凝縮手段２３として配置された金属製斜行ハニカム１の上面開口部１０１に上面から水を供給する手段である。該第１水供給手段１２又は第２水供給手段２２としては、例えば、図２に示すような給水ダクト４が挙げられる。加湿部１０に供給された水は、加湿手段１３として配置された金属製斜行ハニカム１を通過した後、第１水排出手段１５から加湿部１０系外に排出され、また、凝縮部２０に供給された水は、凝縮手段２３として配置された金属製斜行ハニカム１を通過した後、第２水排出手段２５から凝縮部２０系外に排出される。
【００２８】
第１の実施形態では、金属製斜行ハニカム１をこのように配置することにより、第１空気導入口１１又は第２空気導入口２１から導入される被処理空気の通気方向と、第１水供給手段１２又は第２水供給手段２２により供給される水３０１又は４０１の流下方向とが、すなわち、被処理空気と水との接触方向が所定の角度で交わるようになる。このため、加湿手段及び凝縮手段とし金属製斜行ハニカムを用いると、被処理空気と水との接触効率が従来の水シャワーを用いた加湿手段や冷却器を用いた凝縮手段に比べて高くなり、被処理空気中に含まれる化学汚染物質を効率よく除去することができ、装置の加湿手段及び凝縮手段の部分の奥行きを大幅に小さくすることができる。
【００２９】
第１の実施形態においては、第１水排出手段１５による水の排出は配管１５ｂを通り、第１循環ポンプ１６により加湿手段１３へ循環供給されるものと、加湿手段循環水溜め部３２の堰部１５ａから放流（ｏｖｅｒｆｌｏｗ）されるものがある。配管１５ｂと第１水供給手段１２とを第１循環ポンプ１６で接続し、加湿部１０中で発生した余剰水３０２を第１水供給手段１２に供給する水３０１として再利用すると、省資源、低コスト、化学汚染物質の除去効率の管理等の点から好ましい。また、加湿手段循環水溜め部３２の容量を適宜に設定し、連続又は間欠的に水３０２を系外へ放流し、且つ、清浄な補給水を加えて希釈したりすることにより、加湿手段１３に供給される循環水中の汚染物質の濃度を所定値以下に制御することができる。第２水排出手段２５による水の排出は配管２５ｂを通り、第２循環ポンプ２６により凝縮手段２３へ循環供給されるものと、凝縮手段循環水溜め部３３の堰部２５ａから放流（ｏｖｅｒｆｌｏｗ）されるものがある点は、前記加湿部と同様である。すなわち、凝縮部２０においても、配管２５ｂと第２水供給手段２２とを第２循環ポンプ２６で接続し、凝縮部２０中で発生した凝縮水４０２を第２水供給手段２２に供給する水４０１として再利用することが好ましく、凝縮手段循環水溜め部３３の水４０１を放流したり、清浄水を補給したりする点は、前記と同様である。なお、加湿部１０や凝縮部２０に供給された水は循環使用することなく、１パスで放流する使用形態であってもよい。
【００３０】
加湿部１０と凝縮部２０とは、これらの間の被処理空気の導通が可能な範囲内で適宜仕切り５０を設けること等により、加湿部１０と凝縮部２０のそれぞれに循環する水が混合せずに、独立した系のものとすることが好ましい。このように水系を独立したものとすることにより、例えば、加湿部１０と凝縮部２０のそれぞれに同質の水を供給した場合でも排水中の化学汚染物質の汚染の度合いが異なることがあるから、汚染の度合いの高い系の水が他の系の水を汚染することがないため好ましい。また、このように水系を独立したものとすることにより、加湿部１０と凝縮部２０とに供給する水として異質のものを用いても、排水を循環利用することが可能になるため好ましい。
【００３１】
加湿部１０に第１水供給手段１２により供給される水３０１としては、例えば、脱イオン水、市水、工業用水等が挙げられる。このうち、化学汚染物質の除去効率の点からは不純物をなるべく含まない水である脱イオン水が好ましく、また、コストの点からは市水や工業用水が好ましい。なお、第１の実施形態では加湿部１０で処理された空気が凝縮部２０でも処理されるため、コストの点から第１水供給手段１２に供給される水３０１を市水又は工業用水とすることが好ましい。凝縮部２０に第２水供給手段２２により供給される水４０１としては、化学汚染物質を十分に除去する必要があるため、不純物をなるべく含まない水、例えば、脱イオン水が挙げられる。脱イオン水は特に制限されず、市水又は工業用水を前処理した後、イオン交換樹脂で処理した処理水を用いることができる。
【００３２】
すなわち、第１水供給手段１２及び第２水供給手段２２が脱イオン水供給手段であると、化学汚染物質の除去効率の点から好ましい。また、第１水供給手段１２が市水供給手段又は工業用水供給手段であり、前記第２水供給手段２２が脱イオン水供給手段であると、コストの点から好ましい。第１水供給手段１２又は第２水供給手段２２に供給される水３０１，４０１の温度や水の供給量は、被処理空気の通気量等に鑑みつつ、加湿部１０及び凝縮部２０における温度、湿度が所望のものとなるよう適宜設定する。ただし、絶対湿度は、加湿部１０内の方が凝縮部２０よりも常に高いものとなるため、第１水供給手段１２に供給される水３０１の水温は、第２水供給手段２２に供給される水４０１よりも高くなる。
【００３３】
第１の実施形態では、図１に示すように、必要により上記第２空気排出口２４の後にさらに温度及び湿度の調整手段３０やＵＬＰＡフィルター５を備えることができる。このように温度及び湿度の調整手段３０を設け、該手段３０で処理された空気の排出部をクリーンルーム等に接続することにより、例えば、クリーンルームに必要とされる温度、湿度とすることできる。該温度及び湿度の調整手段３０としては、例えば、ヒータや温水等が挙げられる。ヒータを用いる場合は、空気の温度を上げるため処理により相対湿度は低下する。また、温水を用いる場合は、温水を処理後空気に間接的又は直接的に接触させればよい。例えば、温水を間接的に接触させるには、熱交換器６０等に温水を供給すればよい。温水を間接的に接触させる場合は、処理後の空気の相対湿度は低下するが、直接的に接触させる場合は条件の設定いかんで、処理後の空気の相対湿度は低下の、上昇のいずれにもすることができる。
【００３４】
次に、第１の実施形態における作用を説明する。まず、被処理空気は、ダクトを通してブロアー５等により加湿部１０に導入される。加湿部１０では、被処理空気は加湿手段１３である金属製斜行ハニカム１の上部から水３０１が供給され、金属製斜行ハニカム１をゆっくりと流下してセル全体が水膜壁構造になっているセルの表面と接触して、所定の温度に加温される。この際、被処理空気は表面から蒸発する水分により加湿されると共に、一方では被処理空気中の化学汚染物質の一部が水膜の水中に吸収される。この際、被処理空気から化学汚染物質がある程度除去される。浸透水は金属製斜行ハニカム１から流下したところで余剰水３０２となり、第１水排出手段１５により加湿部１０の系内から排出される。
【００３５】
加湿部１０を経て加湿された被処理空気は凝縮部２０に導入される。凝縮部２０では、被処理空気は第２水供給手段２２により供給され、且つ、熱交換器６０等により加湿部１０内よりも低温にされた水からなると共に、金属製斜行ハニカム１のセルの表面に形成された水膜により冷却される。この際に空気中の水分が凝縮し、空気中に加湿部１０内で除去されずに残存する化学汚染物質が、略凝縮水４０２に取り込まれて供給水と共に回収され、この結果、被処理空気中から化学汚染物質が略除去される。上記の加湿部１０内における水の温度、及び凝縮部２０内における水の温度は、前者が後者よりも高いものであればよく、所望の湿度又は温度の空気が得られるように、適宜調整すればよい。凝縮部２０による凝縮工程終了後は、そのまま又は温度及び湿度の調整手段３０で適宜湿度や温度を調整してクリーンルーム等に用いられる清浄空気として使用される。
【００３６】
なお、クリーンルーム内は、通常、温度が２３℃前後、相対湿度が４０〜５０％軽度に調節されるため、クリーンルーム用の清浄空気を調製する場合、加湿工程及び凝縮工程の条件は、上記凝縮工程後に得られる清浄空気は２３℃前後に適宜加熱された際に、上記範囲内の相対湿度になるように設定される。このようにして得られた２３℃前後、且つ、相対湿度が４０〜５０％程度の清浄空気クリーンルーム用空気として用いられる。
【００３７】
本発明の第１の実施形態によれば、金属製斜行ハニカムを構成する波形状の金属板表面を流下する水で加湿又は凝縮するために、循環使用等により化学汚染物質を含むようになった循環水を用いる場合でも、該循環水から化学汚染物質が再気散することがほとんどない。すなわち、従来の方法では、汚染物質を含む水をシャワー状で噴霧するため、ミストが空気に取り込まれて化学汚染物質の再飛散を引き起こしていた。これに対して、本発明の方法では、表面積の大きなハニカム表面の水のみが蒸発し、一度水に取り込まれた化学汚染物質は、水側に残るので、汚染物質の再飛散は起こりにくいと考えられる。このため、金属製斜行ハニカムを加湿手段に用いる場合には、上記のように脱イオン水のみならず市水や工業用水を用いることができる。また、化学汚染物質の除去効率が高いため、従来公知の水シャワー等では１〜２程度必要であった液ガス比を０．１程度することができる。また、加湿手段や凝縮手段に供給される水を循環使用する場合に使用する水量が少なくて済み、この結果、ポンプ容量等が小さくて済む。第１の実施形態は、第２の実施形態又は第３の実施形態のいずれよりも化学汚染物質の除去効率や省スペース性に優れ、最も好ましい形態である。
【００３８】
第２の実施形態について説明する。第２の実施形態は、第１の実施形態において金属製斜行ハニカムを加湿手段のみに用いるものであり、凝縮手段として特に限定しないものである。該金属製斜行ハニカムを用いると水と被処理空気との接触効率が高く、空気中の化学汚染物質の除去効率が高いため、凝縮手段として通常の冷却器等を用いたとしても、従来よりも化学汚染物質の除去効率が高いと共に、加湿手段の分だけスペース効率を向上させることができる。従来の水シャワーに比べ、金属製斜行ハニカムの厚さは１００〜４００ｍｍ程度で済むため、加湿部の厚さを従来の数分の１〜数十分の１程度にすることができる。
【００３９】
第２の実施形態においては、第１の実施形態の加湿部１０と同様に、第１水排出手段１５と第１水供給手段１２とを第１循環ポンプ１６で接続し、第１水排出手段１５からの排水を第１水供給手段１２に供給する水として再利用すると、第１の実施形態の加湿部１０と同様の点から好ましい。また、第１の実施形態の加湿部１０と同様の点から、加湿部１０と凝縮部２０とは、これらの間の被処理空気の導通が可能な範囲内で適宜仕切りを設けることが好ましい。
【００４０】
さらに、第１の実施形態の加湿部１０と同様の点から、加湿部１０に第１水供給手段１２により供給される水としては、例えば、脱イオン水、市水、工業用水等が挙げられる。このうち、第１の実施形態の加湿部１０と同様の点から、脱イオン水、市水や工業用水がそれぞれ好ましい。なお、第２の実施形態で化学汚染物質の除去効率をなるべく高くするためには、脱イオン水を用いることが好ましい。すなわち、第２の実施形態においては、第１水供給手段１２が脱イオン水供給手段であると、化学汚染物質の除去効率の点から好ましい。また、第２の実施形態においては、第１の実施形態と同様に、必要により第２空気排出口２５の後にさらに温度及び湿度の調整手段３０を備えることができる。凝縮手段を設けない場合は、第１空気排出口１４の後に、温度及び湿度の調整手段３０を設けてもよい。第２の実施形態は、従来公知の水シャワー等を用いる加湿手段に比べて、第１の実施形態において、加湿手段に金属製斜行ハニカムを用いた効果と同様の効果を奏することができる。本例は、冬場の乾燥空気を被処理空気とする場合に好適である。
【００４１】
第３の実施形態について説明する。第３の実施形態は、第１の実施形態において金属製斜行ハニカムを凝縮手段のみに用いるものであり、加湿手段として特に限定しないものである。該金属製斜行ハニカムを用いると水と被処理空気との接触効率が高く、空気中の化学汚染物質の除去効率が高いため、加湿手段として通常の水シャワー等を用いたとしても、従来よりも化学汚染物質の除去効率が高いと共に、凝縮手段の分だけスペース効率を向上させることができる。従来の熱交換器等の冷却機に比べ、金属製斜行ハニカムの厚さは１００〜４００ｍｍ程度で済むため、凝縮部の厚さを従来の数分の１〜数十分の１程度にすることができる。
【００４２】
第３の実施形態では、第１の実施形態の凝縮部２０と同様に、第２水排出手段２５と第２水供給手段２２とを第２循環ポンプ２６で接続し、第２水排出手段２５からの排水を第２水供給手段２２に供給する水として再利用すると、第１の実施形態の凝縮部２０と同様の点から好ましい。また、第１の実施形態の凝縮部２０と同様の点から、加湿部１０と凝縮部２０とは、これらの間の被処理空気の導通が可能な範囲内で適宜仕切りを設けることが好ましい。
【００４３】
また、第１の実施形態の凝縮部２０と同様の点から、凝縮部２０に第２水供給手段２２により供給される水としては、化学汚染物質を十分に除去する必要があるため、不純物をなるべく含まない水、例えば、脱イオン水が挙げられる。すなわち、第３の実施形態においては、第２水供給手段が脱イオン水供給手段であると、化学汚染物質の除去効率の点から好ましい。
【００４４】
第３の実施形態においては、凝縮手段として金属製斜行ハニカムを用いる凝縮部での化学汚染物質の除去効率が高いため、被処理空気の絶対湿度が高い場合や被処理空気中の化学汚染物質の濃度が低い場合、さらに、処理後空気の化学汚染物質の許容濃度が高い場合には、特に加湿手段を設けなくてもよい。特に梅雨時から夏場にかけては空気が高温高湿であり、そのまま被処理空気として供給できるため、本実施の形態は特に有効である。この場合は低コスト化や省スペース性の点から好ましいものとなる。また、第３の実施形態においては、第１の実施形態と同様に、必要により第２空気排出口２４の後にさらに温度及び湿度の調整手段３０を備えることができる。このため、第３の実施形態は、従来公知の冷却器等を用いる凝縮手段に比べて、第１の実施形態において凝縮手段に金属製斜行ハニカムを用いた効果と同様の効果を奏することができる。
【００４５】
第４の実施の形態においては、前記第１空気排出口１４と前記第２空気導入口２１とは一体的に連接され、前記加湿及び前記凝縮を共に１台の金属製斜行ハニカム１で順次行うものである。すなわち、被処理空気は、給水ダクト４を通してブロアー５等により金属製斜行ハニカム１の前面の第１空気導入口１１に供給される。該金属製斜行ハニカム１の前段側は加湿領域となり、被処理空気は所定の湿度まで加湿され、該金属製斜行ハニカム１内で飽和状態まで除湿されることとなる。このため、前記加湿ゾーンで該空気中の化学汚染物質の一部が過剰な水分に取り込まれると共に、前記除湿ゾーンにより、前記加湿ゾーンで除去されずに残存する化学汚染物質が凝縮水に取り込まれて除去される。
【００４６】
第４の実施形態では、一つの水排出手段と一つの水供給手段とを循環ポンプで接続し、水排出手段からの排水を水供給手段に供給する水として再利用すると、第１の実施形態の凝縮部２０などと同様の点から好ましい。また、加湿ゾーンや凝縮ゾーンに供給手段により供給される水としては、化学汚染物質を十分に除去する必要があるため、不純物をなるべく含まない水、例えば、脱イオン水が挙げられる。すなわち、第４の実施形態においては、水供給手段が脱イオン水供給手段であると、化学汚染物質の除去効率の点から好ましい。
【００４７】
上記本発明に係る空気清浄装置は、例えば、半導体や液晶デバイスの製造工場、製薬工場やライフサイエンス関連設備等のクリーンルームに供給する空気の空気清浄装置として用いることができる。また、特に、半導体や液晶デバイスの製造工場において、当該装置に使用される金属製斜行ハニカムの大きさは、例えば、縦１０００〜５０００ｍｍ、横１０００〜５０００ｍｍ、厚さ１００〜４００ｍｍのものが使用できる。
【００４８】
【実施例】
次に、実施例を挙げて本発明をさらに具体的に説明するが、本発明はこれに限定されるものではない。
【００４９】
（実施例１〜１０、比較例１〜３）
表１〜３に示す仕様の加湿手段及び凝縮手段を有する空気清浄装置を作製し、これらをそれぞれ表４〜６に示す条件で処理した結果、それぞれ表７〜９に示す結果が得られた。また、得られた清浄空気を表１０〜１２に示す条件で加熱してクリーンルーム用の清浄空気を得た。結果を表１０〜１２に示す。なお、実施例５〜９は、加湿ゾーンを設けずに被処理空気を直接に凝縮ゾーンに供給するものである。また、金属製斜行ハニカムは、表１〜３に記載のＳＵＳ製コルゲート状のシートが、１層おきに交差し、且つ、セルの斜め角度が空気の流入方向に対して３０度であるものを用いた。また、加湿手段で用いられる水と凝縮手段で用いられる水とはそれぞれ独立した系とし、実施例４と比較例２については、それぞれの水は循環使用し、実施例１〜３，５〜１０及び比較例１，３については１パスとした。また、補給水は、循環水中の汚染物質が所定濃度以下になるように供給した。例えば、循環水中のアンモニアイオン濃度は、実施例３では１００ｐｐｂ、実施例４では５００ｐｐｂである。水中のアンモニアイオン濃度が５００ｐｐｂを越えると、従来の水シャワーではアンモニアの気散が起こり、その吸収除去率は著しく低下する（比較例２）。「エアオッシャー」は水シャワーのことである。
【００５０】
【表１】

【００５１】
【表２】

【００５２】
【表３】

【００５３】
【表４】

【００５４】
【表５】

【００５５】
【表６】

【００５６】
【表７】

【００５７】
【表８】

【００５８】
【表９】

【００５９】
【表１０】

【００６０】
【表１１】

【００６１】
【表１２】

【００６２】
【発明の効果】
本発明に係る空気清浄装置は、以下のような効果を奏する。
（１）ガス状化学汚染物質の除去効率が高い。
（２）安価な金属製斜行ハニカムの使用により、空気清浄装置全体がコンパクトになるため、省資源であると共に、処理コストを大幅に低減できる。
（３）使用する脱イオン水の量が少なくて済むため、脱イオン水の製造コストやポンプ搬送能力を削減できる。
（４）処理する空気が空気清浄装置を通過する際の圧力損失が小さいため、送風動力を低減できる。
（５）金属製斜行ハニカムを構成する波形状の金属板の上を流下する水と被処理空気とを接触させるため、表面積の大きなハニカム表面の水だけが蒸発し、一度水に取り込まれてしまった化学汚染物質は水側に残るので、化学汚染物質の再飛散は起こり難い。このため、被処理空気を再汚染する恐れが少ない。
（６）金属製斜行ハニカムが金属製であるため壁の強度を強くできるので、該斜行ハニカムの壁を薄くできる。
（７）金属製斜行ハニカムの壁を薄くできるので、圧力損失を小さくできる。
（８）耐水性や流水による耐磨耗性を含めた耐久性に優れる。
（９）空気と水の接触を金属製斜行ハニカムを介して行うため、使用する金属板からのパーティクルが空気に混入することがないので、クリーンルームへ送る空気の清浄化に好適である。
（１０）空気と水の接触を金属製斜行ハニカムを介して行うため、使用する金属板からのアウトガスが空気に混入することがないので、クリーンルームへ送る空気の清浄化に好適である。
（１１）空気と水の接触を金属製斜行ハニカムを介して行うため、かび、藻類の発生がない。
【図面の簡単な説明】
【図１】本発明の第１の実施形態に係る空気清浄装置の概要を模式的に示す図である。
【図２】本発明の空気清浄装置で使用する金属製斜行ハニカムを説明する図である。
【符号の説明】
１金属製斜行ハニカム１０加湿部
１１第１空気導入口１２第１水供給手段
１３加湿手段１４第１空気排出口
２０凝縮部２１第２空気導入口
２２第２水供給手段２３凝縮手段
４０空気清浄装置[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air cleaning apparatus that cleans chemical contaminants in the air by washing with water. More specifically, the present invention relates to an air purifier for air supplied to clean rooms such as semiconductor and liquid crystal device manufacturing factories, pharmaceutical factories and life science related facilities.
[0002]
[Prior art]
Semiconductor and liquid crystal device manufacturing factories, pharmaceutical factories, life science-related facilities, etc. remove gaseous chemical pollutants in addition to conventional particulate pollutants in order to improve product yield and ensure quality. It is hoped that. Examples of such chemical pollutants include inorganic metal elements such as sodium, potassium, calcium, and boron, anions such as fluorine ion, chloride ion, nitrate ion, nitrite ion, sulfate ion, and sulfite ion, And cations such as ammonium ions. Conventional particulate contaminants can be removed with a dust collection filter such as an ULPA filter, but these chemical contaminants cannot be removed with an ULPA filter or the like.
[0003]
For this reason, chemical pollutants in the air are conventionally removed by a device using a so-called water shower called a water shower or a device using a chemical filter capable of adsorbing and removing chemical components. Here, the former apparatus using a water shower has a humidifying means for humidifying air and a condensing means for condensing and removing moisture in the air, and the air containing chemical pollutants is added by a humidifying means such as a spray of water droplets. In addition to humidifying and removing excess water, the humidified air cannot be completely removed by the humidifying means by the condensing means such as a cooler, and chemical contaminants remaining in the air are removed together with the condensed water. is there.
[0004]
[Problems to be solved by the invention]
However, the former apparatus using the water shower has low contact efficiency between the air to be treated and water, and therefore has low chemical contaminant removal efficiency. For this reason, the depth of the entire apparatus using a water shower is required to be about several meters, which requires a large installation space and a large pressure loss. Moreover, although expensive deionized water (DIW) is usually used as the treated water for the water shower, there is a problem that the cost increases because a large amount of treated water is required. Furthermore, although DIW is usually circulated for cost reduction, there is a problem that chemical contaminants once absorbed are likely to be diffused again. On the other hand, the latter apparatus using the chemical filter has a problem that the chemical filter itself is expensive and the adsorption capacity has a long life, so that the cost is increased.
[0005]
Accordingly, an object of the present invention is to provide an air treatment device that has high efficiency in removing chemical contaminants in the air, a compact treatment device, low pressure loss, and low cost.
[0006]
Under such circumstances, as a result of intensive studies, the present inventors have used a metal skewed honeycomb as one or both of the humidifying means and the condensing means, and introduced air from the front opening of the metal skewed honeycomb. At the same time, if water is supplied from the upper surface opening, the air introduced into the metal skew honeycomb and the supplied water are in efficient contact with each other, and the humidifying means efficiently increases the humidity in the air, and Chemical contaminants can be removed efficiently. Further, in the condensing means, it has been found that chemical contaminants remaining in the air discharged from the humidifying means are efficiently taken in and removed from the condensed water, and the present invention has been completed.
[0007]
[Means for Solving the Problems]
  The invention described in claim 1 of the present invention has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened,The metal skew honeycomb has a honeycomb shape by laminating a plurality of metal corrugated sheets having a corrugated shape propagating in one direction and having a thickness of 10 to 200 μm. Laminated so that every other sheet crosses at an angle, and the wave propagation directions of every two layers are arranged in substantially the same direction, and the plane parallel to the metal corrugated sheet A rectangular parallelepiped having a thickness of 100 to 1000 mm that is not parallel to the wave propagation direction of the metal corrugated sheet and is not perpendicular to the metal corrugated sheet BecauseThe metal skewed honeycomb is disposed such that the front surface faces the air introduction port and the introduced air passes through the inside, and the water supply means is disposed above the metal skewed honeycomb. It is a feature.
[0008]
  The invention according to claim 2 of the present invention has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened,The metal skew honeycomb has a honeycomb shape by laminating a plurality of metal corrugated sheets having a corrugated shape propagating in one direction and having a thickness of 10 to 200 μm. Laminated so that every other sheet crosses at an angle, and the wave propagation directions of every two layers are arranged in substantially the same direction, and the plane parallel to the metal corrugated sheet A rectangular parallelepiped having a thickness of 100 to 1000 mm that is not parallel to the wave propagation direction of the metal corrugated sheet and is not perpendicular to the metal corrugated sheet BecauseThe metal skewed honeycomb is disposed such that the front surface faces the air introduction port and the introduced air passes through the inside, and the water supply means is disposed above the metal skewed honeycomb, By the water supplied by the water supply meansIn the metal skew honeycombThe air is humidified, and at least a part of the chemical pollutant is taken into the obtained excess moisture to remove the chemical pollutant from the air.
[0009]
  The invention according to claim 3 of the present invention isIt has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened,The metal skew honeycomb has a honeycomb shape by laminating a plurality of metal corrugated sheets having a corrugated shape propagating in one direction and having a thickness of 10 to 200 μm. Laminated so that every other sheet crosses at an angle, and the wave propagation directions of every two layers are arranged in substantially the same direction, and the plane parallel to the metal corrugated sheet A rectangular parallelepiped having a thickness of 100 to 1000 mm that is not parallel to the wave propagation direction of the metal corrugated sheet and is not perpendicular to the metal corrugated sheet BecauseThe metal skew honeycomb is arranged so that the front surface faces the air introduction port and the introduced air passes through the inside, and above the metal skew honeycomb,SaidA water supply means is arranged, and the water supplied by the water supply meansIn the metal skew honeycombThe air is dehumidified, and at least a part of the chemical pollutant is taken into the condensed water obtained to remove the chemical pollutant from the air.
[0010]
  The invention according to claim 4 of the present invention isAn air cleaning device having a humidifying unit and a condensing unit, wherein each of the humidifying unit and the condensing unit includes an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened. HaveThe metal skew honeycomb has a honeycomb shape by laminating a plurality of metal corrugated sheets having a corrugated shape propagating in one direction and having a thickness of 10 to 200 μm. Laminated so that every other sheet crosses at an angle, and the wave propagation directions of every two layers are arranged in substantially the same direction, and the plane parallel to the metal corrugated sheet A rectangular parallelepiped having a thickness of 100 to 1000 mm that is not parallel to the wave propagation direction of the metal corrugated sheet and is not perpendicular to the metal corrugated sheet BecauseThe metal skewed honeycomb is disposed such that the front surface faces the air inlet and the introduced air passes through the inside, and the water supply means is disposed above the metal skewed honeycomb, In the humidifier, the water supplied by the water supply meansIn the metal skew honeycombThe air is humidified and at least a part of the chemical pollutant is taken into the obtained excess water to remove the chemical pollutant from the air. In the condensing unit, the water is supplied by the water supply means.In the metal skew honeycombIn addition to dehumidifying the air, the chemical contaminant is removed from the air by incorporating at least a part of the chemical contaminant into the condensed water obtained.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
The air purifier according to the present invention has a humidifying part and a condensing part, and a metal skew honeycomb is used for one or both of the humidifying means in the humidifying part and the condensing means in the condensing part. . Embodiments of the air purifier according to the present invention are roughly classified into four types depending on how the metal skew honeycomb is used. Specifically, the first embodiment in which the metal skew honeycomb is used for both the humidifying means and the condensation means, the second embodiment in which the metal skew honeycomb is used only for the humidifying means, and the metal skew honeycomb And a fourth embodiment in which humidification and condensation are performed together with one metal skew honeycomb.
[0012]
First, a first embodiment will be described with reference to FIG. FIG. 1 is a diagram schematically showing an outline of the air purifying apparatus according to the first embodiment, in which 1 is a metal skew honeycomb, 5 is a blower, 10 is a humidifying unit, 11 is a first air inlet, 12 is a first water supply means, 13 is a humidifying means, 14 is a first air outlet, 15 is a first water outlet, 16 is a first circulation pump, 20 is a condensing part, 21 is a second air inlet, 22 Is a second water supply means, 23 is a condensing means, 24 is a second air discharge port, 25 is a second water discharge means, 26 is a second circulation pump, 30 is a temperature and humidity adjusting means, 31 is a ULPA filter, 32 Is a humidifying means circulating water reservoir, 33 is a condensing means circulating water reservoir, and 40 is an air purifier.
[0013]
In the present invention, the humidifying unit 10 humidifies the air introduced from the first air introduction port 11, the first water supply unit 12, and the first air introduction port 11 with the water supplied by the first water supply unit 12. Means 13, a first air discharge port 14 for discharging humidified air, and a first water discharge means 15 for discharging the water in the system accumulated in the humidifying means circulating water reservoir 32 to the outside of the system.
[0014]
In the humidification unit 10, air to be treated is introduced from the first air introduction port 11 and discharged from the first air discharge port 14, while water is supplied to the humidification unit 13 by the first water supply unit 12. It is discharged from the first water discharge means 15. At this time, in the humidifying means 13 in the humidifying unit 10, the air to be treated and water come into contact with each other, whereby the humidity of the air to be treated in the humidifying unit 10 system is increased. The humidifying unit 10 has the effect of humidifying the air to be treated and taking in some of the chemical contaminants contained in the air to be treated by removing it in the excess moisture by being laid in this way. .
[0015]
In the present invention, the condensing unit 20 removes moisture in the air introduced from the second air introduction port 21, the second water supply means 22, and the second air introduction port 21 connected to the first air discharge port 11. (2) Condensing means 23 for condensing with water supplied by the water supply means 22, second air outlet 24 for discharging the condensed air, and water in the system accumulated in the condensing means circulating water reservoir 33 to the outside of the system A second water discharge means 25 for discharging is provided.
[0016]
In the condensing unit 20, air to be treated is introduced from the second air introduction port 21 and discharged from the second air discharge port 24, while water is supplied to the condensation unit 23 by the second water supply unit 22. The water is discharged from the second water discharge means 25. At this time, in the condensing means 23 in the condensing unit 20, the air to be treated and water come into contact with each other, so that the humidity of the air to be treated in the condensing unit 20 system is lowered. Condensing part 20 is constituted in this way, and it dehumidifies to-be-processed air to predetermined humidity, and discharges the condensed water produced in the case of dehumidification, and is not removed in humidification part 10, but in to-be-processed air As much chemical contaminants as possible remain in the condensed water.
[0017]
In the present invention, the chemical pollutant means a fine chemical substance that passes through the stitch of a high performance (ULPA) filter, for example, an inorganic metal element such as sodium, potassium, calcium, boron, fluorine ion, Anions such as chloride ion, nitrate ion, nitrite ion, sulfate ion and sulfite ion, and cations such as ammonium ion.
[0018]
In the first embodiment, the metal skew honeycomb 1 is used as the humidifying means 13 and the condensing means 23. The metal skew honeycomb 1 will be described with reference to FIG. The metal skew honeycomb 1 has a honeycomb shape in which a plurality of corrugated sheets 2 and 3 (hereinafter also referred to as “corrugated sheets”) having a corrugated shape propagating in one direction are laminated, The

corrugated sheets

2 and 3 to be laminated are laminated so that the wave propagation directions are obliquely intersected with each other, and the wave propagation directions of every other layer are substantially the same direction. It is an arranged honeycomb body.
[0019]
The metal skew honeycomb 1 is cut by four planes 101 to 104 perpendicular to the plane parallel to the

corrugated sheets

2 and 3 to form a rectangular parallelepiped, and the cut plane is a wave of the

corrugated sheets

2 and 3. If the rectangular parallelepiped is not parallel to the propagation direction nor perpendicular, the rectangular parallelepiped has one of the cut surfaces 104 as the lower surface and the

outermost layers

105 and 106 of the

corrugated sheets

2 and 3 as the left and right surfaces, respectively. When mounted, the honeycomb cells are open on all four surfaces of the front and

rear surfaces

102 and 103 and the upper and

lower surfaces

101 and 104 which are cut surfaces, and the left and

right surfaces

105 and 106 are closed by

corrugated sheets

2 and 3. That is, the metal skew honeycomb 1 has a structure in which the front and

rear surfaces

102 and 103 and the upper and

lower surfaces

101 and 104 are opened. In addition, for example, the front and

rear surfaces

102 and 103 of the cut surface are formed with cells extending obliquely upward and cells extending obliquely downward. The oblique angle (symbol X in the figure) with respect to the inflow and outflow direction (horizontal direction) of air when viewed from the front and rear surfaces of the cell extending in the oblique direction is usually 15 to 45 degrees, preferably 25 to 35 degrees. Within range. It is preferable that the oblique angle is within this range because the flow velocity is in an appropriate range and the contact efficiency is improved.
[0020]
In the metal skew honeycomb 1, the angle of the laminated

corrugated sheets

2 and 3 and the wave propagation directions intersect each other (in the figure, Y) is usually 30 to 90 degrees, preferably 50 to 70 degrees. When the

corrugated sheets

2 and 3 are laminated so as to intersect within the above angle range, when the oblique angle (X) is set to 15 to 45 degrees as described above, the air to be treated and the water are mixed with the honeycomb. Since the area that substantially contacts the cell increases, the contact between the air to be treated and water, that is, the humidifying efficiency of humidifying the air to be treated, and the condensation means condensing moisture in the air to be treated. This is preferable because the efficiency of dehumidification due to is increased. As will be described later, in the present invention, air to be treated is introduced from the front opening 103 of the metal skew honeycomb 1 and supplied from the water surface opening 101 by the first water supply means 12, for example, the water supply duct 4. In order to permeate the

corrugated sheets

2 and 3 of the metal skew honeycomb 1 and slowly flow down on the very surfaces of the

corrugated sheets

2 and 3, the direction of air to be treated and the water on the permeated wall surface An appropriate angle is maintained with respect to the flow direction, and the contact efficiency is increased.
[0021]
The cell height of the metal skewed honeycomb 1 used in the present invention, that is, the cell height indicating the dimension between the corrugated peaks and valleys is usually 2 to 8 mm, preferably 3 to 5 mm. If the height of the cell is less than 2 mm, the production is difficult and the pressure loss increases, which is not preferable. Further, if the height of the cell exceeds 8 mm, the removal efficiency of chemical contaminants is not preferable.
[0022]
The cell width in the state of the corrugated sheet of the metal skew honeycomb, that is, the cell pitch is usually 2.5 to 12.0 mm, preferably 5 to 10.0 mm. Further, the dimension between the front opening and the rear opening of the metal skew honeycomb, that is, the thickness (t) of the metal skew honeycomb 1 is usually 100 to 1000 mm, preferably 200 to 800 mm. If the thickness is less than 100 mm, NO₂ ^-This is not preferable because the removal efficiency is reduced, and if the thickness exceeds 1000 mm, the removal efficiency of chemical contaminants is not improved any more, and the pressure loss increases, which is not preferable. When chemical contaminants are removed and dehumidified with a single honeycomb during periods of high humidity such as during the rainy season, it is better to use a thick one with a thickness of about 800 mm in order to perform sufficient dehumidification. In the present invention, the thickness of the metal skew honeycomb may be a thickness within the above range when a plurality of skew honeycombs are used. For example, when a metal skew honeycomb having a thickness of 300 mm is used, three metal skew honeycombs having a thickness of 100 mm may be stacked in the thickness direction so that the total thickness is 300 mm. Further, the water shower conventionally used as the humidifying means requires a depth of several meters, but when a metal skewed honeycomb is used as the humidifying means, the thickness of the metal skewed honeycomb itself is about 400 mm at most. Therefore, the installation space for the apparatus can be greatly reduced. Such a large space saving satisfies the demand for rationalization of semiconductor manufacturing factories and the like. Furthermore, the capacity of the pump that circulates water is much smaller than that of the conventional water shower, and a significant energy saving can be achieved.
[0023]
The material of the metal skew honeycomb used in the present invention is not particularly limited as long as it satisfies the requirements required for the metal honeycomb carrier in terms of strength, chemical stability, and the like. For example, stainless steel, aluminum , Copper and the like.
The thickness is 10 to 200 μm, and if it is thinner than 10 μm, the strength and workability are poor, and if it exceeds 200 μm, there is a problem that it is heavy and the pressure loss is large. A preferable thickness is 30 to 100 μm.
[0024]
The corrugated sheet used in the present invention is obtained by corrugating a flat metal foil, and is formed with irregularities so that waves travel in one direction within the surface of the metal foil. Here, corrugating means that a flat plate is processed into a corrugated object.
[0025]
Examples of a method for forming the inorganic fiber base material into a corrugated sheet include a method using a known corrugator in which a flat sheet is passed between a plurality of gears having corrugated irregularities that oscillate in the radial direction. It is done. As a method of forming the metal skew honeycomb from the obtained corrugated sheet, for example, first, the corrugated sheet is formed into a rectangular cutting mold having a length of about 100 mm (thickness dimension after forming) × width of about 3000 mm. The wave propagation direction is 15 to 45 degrees with respect to one side of the rectangular shape and cut to produce a rectangular corrugated sheet, and then every other sheet of rectangular corrugated sheet obtained is obtained. There is a method in which the wave propagation directions are arranged obliquely and these are laminated. In addition, when manufactured in this way, the length of the cutting mold is the thickness of one metal skew honeycomb. Therefore, for example, when the thickness of the metal skew honeycomb required for the humidifying means and the condensation means, that is, when the dimension between the front opening and the rear opening of the metal skew honeycomb is 300 mm, What is necessary is just to use three 100 mm-thick metal skew honeycombs produced by the cutting type of length 100mm in the length direction.
[0026]
In the first embodiment, the metal skew honeycomb 1 having both front and rear surfaces and upper and lower surfaces opened to the humidifying means 13 and the condensing means 23, and the front surface of the metal skew honeycomb 1 is the first air inlet 11. Toward the second air introduction port 21 and the second air introduction port 21 side, and is arranged so that the introduced air passes through the inside of the metal skewed honeycomb 1. 1 water supply means 12 and 2nd water supply means 22 are provided. The first air discharge port 14 and the second air introduction port 21 are connected by a duct or the like.
[0027]
The first water supply means 12 is a means for supplying water from the upper surface to the upper surface opening 101 of the metal skewed honeycomb 1 arranged as the humidifying means 13 in the humidifying section 10, and the second water supply means 22 is In this case, water is supplied from the upper surface to the upper surface opening 101 of the metal skew honeycomb 1 disposed as the condensing unit 23 in the condensing unit 20. Examples of the first water supply means 12 or the second water supply means 22 include a water supply duct 4 as shown in FIG. The water supplied to the humidifying unit 10 passes through the metal skewed honeycomb 1 arranged as the humidifying unit 13, and then is discharged from the first water discharging unit 15 to the outside of the humidifying unit 10 system. The supplied water passes through the metal skew honeycomb 1 arranged as the condensing means 23 and is then discharged from the second water discharge means 25 to the outside of the condensing unit 20 system.
[0028]
In the first embodiment, by disposing the metal skew honeycomb 1 in this way, the direction of air to be treated introduced from the first air introduction port 11 or the second air introduction port 21 and the first water The flow direction of the

water

301 or 401 supplied by the supply means 12 or the second water supply means 22, that is, the contact direction between the air to be treated and the water intersects at a predetermined angle. For this reason, when a metal skew honeycomb is used as the humidifying means and the condensing means, the contact efficiency between the air to be treated and the water becomes higher than the humidifying means using a conventional water shower or the condensing means using a cooler. The chemical contaminants contained in the air to be treated can be efficiently removed, and the depth of the humidifying means and the condensing means of the apparatus can be greatly reduced.
[0029]
In the first embodiment, the water discharged by the first water discharging means 15 passes through the pipe 15 b and is circulated and supplied to the humidifying means 13 by the first circulation pump 16, and the weir of the humidifying means circulating water reservoir 32. Some are discharged from the part 15a. When the pipe 15b and the first water supply means 12 are connected by the first circulation pump 16, and the surplus water 302 generated in the humidifying unit 10 is reused as the water 301 supplied to the first water supply means 12, resource saving, This is preferable from the viewpoint of low cost and management of the removal efficiency of chemical contaminants. Further, the capacity of the humidifying means circulating water reservoir 32 is appropriately set, the water 302 is continuously or intermittently discharged to the outside of the system, and the cleansing water is added to dilute the humidifying means 13. It is possible to control the concentration of the pollutant in the circulating water supplied to the water to a predetermined value or less. The water discharged by the second water discharging means 25 passes through the pipe 25b and is circulated and supplied to the condensing means 23 by the second circulation pump 26, and is discharged from the weir 25a of the condensing means circulating water reservoir 33 (over flow). The point which has what is done is the same as that of the said humidification part. That is, also in the condensing unit 20, the pipe 25 b and the second water supply unit 22 are connected by the second circulation pump 26, and the water 401 that supplies the condensed water 402 generated in the condensing unit 20 to the second water supply unit 22. It is preferable to reuse as the above, and the water 401 in the condensing means circulating water reservoir 33 is discharged or the clean water is replenished as described above. Note that the water supplied to the humidifying unit 10 and the condensing unit 20 may be used in a single pass without being circulated.
[0030]
The humidifying unit 10 and the condensing unit 20 mix the water circulating in each of the humidifying unit 10 and the condensing unit 20 by appropriately providing a partition 50 within a range in which the air to be treated can be conducted between them. It is preferable to use an independent system. By making the water system independent in this way, for example, even when the same quality of water is supplied to each of the humidifying unit 10 and the condensing unit 20, the degree of contamination of chemical pollutants in the waste water may be different. Highly contaminated water is preferable because it does not contaminate other water. In addition, it is preferable to make the water system independent as described above, because the waste water can be circulated and used even if different water is supplied to the humidifying unit 10 and the condensing unit 20.
[0031]
Examples of the water 301 supplied to the humidifying unit 10 by the first water supply unit 12 include deionized water, city water, and industrial water. Among these, deionized water which is water containing as little impurities as possible is preferable from the viewpoint of the removal efficiency of chemical pollutants, and city water and industrial water are preferable from the viewpoint of cost. In the first embodiment, since the air processed by the humidifying unit 10 is also processed by the condensing unit 20, the water 301 supplied to the first water supply unit 12 is city water or industrial water from the viewpoint of cost. It is preferable. As the water 401 supplied to the condensing part 20 by the 2nd water supply means 22, since it is necessary to remove a chemical pollutant fully, the water which does not contain an impurity as much as possible, for example, deionized water, is mentioned. Deionized water is not particularly limited, and treated water treated with an ion exchange resin can be used after pretreatment of city water or industrial water.
[0032]
That is, the first water supply means 12 and the second water supply means 22 are preferably deionized water supply means from the viewpoint of the removal efficiency of chemical contaminants. Moreover, it is preferable from the point of cost that the 1st water supply means 12 is a city water supply means or an industrial water supply means, and the said 2nd water supply means 22 is a deionized water supply means. The temperature of the

water

301 and 401 supplied to the first water supply unit 12 or the second water supply unit 22 and the supply amount of water are the temperatures in the humidifying unit 10 and the condensing unit 20 in consideration of the ventilation amount of the air to be treated. The humidity is appropriately set so as to be a desired one. However, since the absolute humidity is always higher in the humidifying unit 10 than in the condensing unit 20, the water temperature of the water 301 supplied to the first water supply unit 12 is supplied to the second water supply unit 22. Higher than the water 401.
[0033]
In the first embodiment, as shown in FIG. 1, a temperature and humidity adjusting means 30 and a ULPA filter 5 can be further provided after the second air discharge port 24 as necessary. Thus, by providing the temperature and humidity adjusting means 30 and connecting the air discharge portion processed by the means 30 to a clean room or the like, for example, the temperature and humidity required for the clean room can be obtained. Examples of the temperature and humidity adjusting means 30 include a heater and hot water. In the case of using a heater, the relative humidity is lowered by the treatment in order to increase the temperature of the air. Moreover, when using warm water, what is necessary is just to make warm water contact the air after processing indirectly or directly. For example, in order to make warm water contact indirectly, hot water should just be supplied to the heat exchanger 60 grade | etc.,. When hot water is contacted indirectly, the relative humidity of the air after treatment decreases, but when contacted directly, depending on the setting of conditions, the relative humidity of the air after treatment decreases or rises. You can also
[0034]
Next, the operation in the first embodiment will be described. First, the air to be treated is introduced into the humidifying unit 10 through the duct by the blower 5 or the like. In the humidifying unit 10, water 301 is supplied from the upper portion of the metal skewed honeycomb 1 serving as the humidifying means 13 in the humidifying unit 10, and slowly flows down the metal skewed honeycomb 1 so that the entire cell has a water film wall structure. The cell is heated to a predetermined temperature in contact with the surface of the cell. At this time, the air to be treated is humidified by moisture evaporated from the surface, and on the other hand, some of the chemical contaminants in the air to be treated are absorbed into the water film. At this time, chemical contaminants are removed to some extent from the air to be treated. The permeated water becomes surplus water 302 when it flows down from the metal skew honeycomb 1 and is discharged from the system of the humidifying unit 10 by the first water discharge means 15.
[0035]
The air to be treated that has been humidified through the humidifying unit 10 is introduced into the condensing unit 20. In the condensing unit 20, the air to be treated is supplied by the second water supply means 22 and is made of water whose temperature is lower than that in the humidifying unit 10 by the heat exchanger 60 or the like. It is cooled by a water film formed on the surface. At this time, moisture in the air condenses, and chemical contaminants remaining in the air without being removed in the humidifying unit 10 are substantially taken into the condensed water 402 and collected together with the supply water. As a result, the air to be treated Chemical contaminants are almost removed from the inside. The temperature of the water in the humidifying unit 10 and the temperature of the water in the condensing unit 20 only need to be adjusted so that the former can be higher than the latter and air having a desired humidity or temperature can be obtained. That's fine. After the condensing step by the condensing unit 20 is completed, the air is used as clean air used in a clean room or the like as it is or by adjusting the humidity and temperature appropriately by the temperature and humidity adjusting means 30.
[0036]
In a clean room, the temperature is usually adjusted to around 23 ° C. and the relative humidity is adjusted to 40 to 50%. Therefore, when preparing clean air for a clean room, the conditions for the humidification step and the condensation step are the above condensation step. The clean air obtained later is set to have a relative humidity within the above range when appropriately heated to around 23 ° C. The air thus obtained is used as clean room air having a temperature of about 23 ° C. and a relative humidity of about 40 to 50%.
[0037]
According to the first embodiment of the present invention, in order to humidify or condense with water flowing down the surface of the corrugated metal plate constituting the metal skew honeycomb, chemical contaminants are contained by circulation use or the like. Even when the circulating water is used, chemical pollutants are hardly re-aired from the circulating water. That is, in the conventional method, since water containing a pollutant is sprayed in the form of a shower, the mist is taken into the air and causes chemical contaminants to re-scatter. On the other hand, in the method of the present invention, only the water on the honeycomb surface having a large surface area evaporates, and the chemical pollutant once taken into the water remains on the water side. It is done. For this reason, when using a metal skew honeycomb for a humidification means, not only deionized water but city water and industrial water can be used as mentioned above. In addition, since the removal efficiency of chemical contaminants is high, the liquid gas ratio that is required for about 1 to 2 in a conventionally known water shower or the like can be about 0.1. In addition, when the water supplied to the humidifying means and the condensing means is used in a circulating manner, the amount of water used is small, and as a result, the pump capacity and the like are small. The first embodiment is the most preferable mode because it is superior in chemical pollutant removal efficiency and space-saving properties to either the second embodiment or the third embodiment.
[0038]
A second embodiment will be described. The second embodiment uses the metal skew honeycomb in the first embodiment only for the humidifying means, and is not particularly limited as the condensing means. When the metal skew honeycomb is used, the contact efficiency between water and the air to be treated is high, and the removal efficiency of chemical contaminants in the air is high. In addition, the removal efficiency of chemical contaminants is high, and the space efficiency can be improved by the humidifying means. Compared with a conventional water shower, the thickness of the metal skew honeycomb is about 100 to 400 mm, so that the thickness of the humidifying part can be reduced to about 1 / several 1 to several tens of minutes.
[0039]
In the second embodiment, similarly to the humidifying unit 10 of the first embodiment, the first water discharge means 15 and the first water supply means 12 are connected by the first circulation pump 16, and the first water discharge means If the waste water from 15 is reused as water to be supplied to the first water supply means 12, it is preferable from the same point as the humidifying unit 10 of the first embodiment. In addition, from the same point as the humidifying unit 10 of the first embodiment, it is preferable that the humidifying unit 10 and the condensing unit 20 are appropriately provided with a partition as long as the air to be treated can be conducted between them.
[0040]
Furthermore, from the same point as the humidification unit 10 of the first embodiment, examples of water supplied to the humidification unit 10 by the first water supply unit 12 include deionized water, city water, and industrial water. . Among these, deionized water, city water, and industrial water are each preferable from the same point as the humidifying unit 10 of the first embodiment. In order to increase the removal efficiency of chemical contaminants as much as possible in the second embodiment, it is preferable to use deionized water. That is, in 2nd Embodiment, it is preferable from the point of the removal efficiency of a chemical contaminant that the 1st water supply means 12 is a deionized water supply means. Further, in the second embodiment, as in the first embodiment, if necessary, temperature and humidity adjusting means 30 can be further provided after the second air outlet 25. When the condensing means is not provided, the temperature and humidity adjusting means 30 may be provided after the first air discharge port 14. The second embodiment can achieve the same effect as the effect obtained by using the metal skew honeycomb as the humidifying means in the first embodiment, as compared with the humidifying means using a conventionally known water shower or the like. This example is suitable when dry air in winter is treated air.
[0041]
A third embodiment will be described. In the third embodiment, the metal skew honeycomb is used only for the condensing means in the first embodiment, and the humidifying means is not particularly limited. When the metal skew honeycomb is used, the contact efficiency between water and the air to be treated is high, and the removal efficiency of chemical pollutants in the air is high. In addition, the removal efficiency of chemical contaminants is high, and the space efficiency can be improved by the amount of the condensing means. Compared to a conventional cooler such as a heat exchanger, the thickness of the metal skew honeycomb is about 100 to 400 mm, so the thickness of the condensing part is about 1/10 of the conventional fraction. be able to.
[0042]
In the third embodiment, similarly to the condensing unit 20 of the first embodiment, the second water discharge unit 25 and the second water supply unit 22 are connected by the second circulation pump 26, and the second water discharge unit 25 is connected. It is preferable to reuse the waste water from the water as water to be supplied to the second water supply means 22 from the same point as the condensing unit 20 of the first embodiment. In addition, from the same point as the condensing unit 20 of the first embodiment, it is preferable that the humidifying unit 10 and the condensing unit 20 are appropriately provided with a partition as long as the air to be treated can be conducted between them.
[0043]
In addition, from the same point as the condensing unit 20 of the first embodiment, as the water supplied to the condensing unit 20 by the second water supply means 22, it is necessary to sufficiently remove chemical contaminants. Water which is not contained as much as possible, for example, deionized water, can be mentioned. That is, in the third embodiment, the second water supply means is preferably deionized water supply means from the viewpoint of the removal efficiency of chemical contaminants.
[0044]
In the third embodiment, since the removal efficiency of chemical pollutants in the condensing part using a metal skew honeycomb as the condensing means is high, the case where the absolute humidity of the air to be treated is high or the chemical pollutants in the air to be treated In the case where the concentration of the chemical pollutant is low, and further, in the case where the allowable concentration of chemical contaminants in the treated air is high, it is not necessary to provide the humidifying means. In particular, this embodiment is particularly effective since the air is hot and humid from the rainy season to the summer and can be supplied as it is. In this case, it is preferable from the viewpoint of cost reduction and space saving. Further, in the third embodiment, as in the first embodiment, if necessary, temperature and humidity adjusting means 30 can be further provided after the second air discharge port 24. For this reason, the third embodiment has the same effect as the effect of using the metal skew honeycomb for the condensing means in the first embodiment, compared to the condensing means using a conventionally known cooler or the like. it can.
[0045]
In the fourth embodiment, the first air discharge port 14 and the second air introduction port 21 are integrally connected, and both the humidification and the condensation are sequentially performed by one metal skew honeycomb 1. Is what you do. That is, the air to be treated is supplied to the first air introduction port 11 on the front surface of the metal skew honeycomb 1 through the water supply duct 4 by the blower 5 or the like. The upstream side of the metal skew honeycomb 1 is a humidified region, and the air to be treated is humidified to a predetermined humidity and dehumidified to a saturated state in the metal skew honeycomb 1. For this reason, a part of the chemical pollutants in the air is taken in excessive moisture in the humidification zone, and the chemical pollutants remaining without being removed in the humidification zone are taken in condensed water by the dehumidification zone. Removed.
[0046]
In the fourth embodiment, when one water discharge means and one water supply means are connected by a circulation pump and the waste water from the water discharge means is reused as water to be supplied to the water supply means, the first embodiment It is preferable from the same point as the condensing unit 20. The water supplied to the humidification zone and the condensation zone by the supply means includes water that does not contain impurities as much as possible because it is necessary to sufficiently remove chemical contaminants, for example, deionized water. That is, in the fourth embodiment, the water supply means is preferably deionized water supply means from the viewpoint of the removal efficiency of chemical contaminants.
[0047]
The air purifying apparatus according to the present invention can be used as an air purifying apparatus for supplying air to clean rooms such as semiconductor and liquid crystal device manufacturing factories, pharmaceutical factories and life science related facilities. In particular, in a semiconductor or liquid crystal device manufacturing factory, the size of the metal skew honeycomb used in the apparatus is, for example, 1000 to 5000 mm in length, 1000 to 5000 mm in width, and 100 to 400 mm in thickness. it can.
[0048]
【Example】
Next, the present invention will be described more specifically with reference to examples, but the present invention is not limited thereto.
[0049]
(Examples 1-10, Comparative Examples 1-3)
As a result of producing air purifiers having humidifying means and condensing means having the specifications shown in Tables 1 to 3 and treating them under the conditions shown in Tables 4 to 6, the results shown in Tables 7 to 9 were obtained, respectively. Moreover, the obtained clean air was heated on the conditions shown to Tables 10-12, and the clean air for clean rooms was obtained. The results are shown in Tables 10-12. In Examples 5 to 9, the air to be treated is directly supplied to the condensation zone without providing the humidification zone. Further, the metal skew honeycomb is one in which the SUS corrugated sheets described in Tables 1 to 3 intersect every other layer, and the oblique angle of the cells is 30 degrees with respect to the air inflow direction. Was used. Further, the water used in the humidifying means and the water used in the condensing means are independent systems, and for Example 4 and Comparative Example 2, each water is circulated and used in Examples 1-3, 5-10. For Comparative Examples 1 and 3, one pass was used. The makeup water was supplied so that the pollutants in the circulating water had a predetermined concentration or less. For example, the ammonia ion concentration in the circulating water is 100 ppb in Example 3 and 500 ppb in Example 4. When the ammonia ion concentration in water exceeds 500 ppb, ammonia is diffused in the conventional water shower, and the absorption and removal rate thereof is significantly reduced (Comparative Example 2). “Air Osher” is a water shower.
[0050]
[Table 1]

[0051]
[Table 2]

[0052]
[Table 3]

[0053]
[Table 4]

[0054]
[Table 5]

[0055]
[Table 6]

[0056]
[Table 7]

[0057]
[Table 8]

[0058]
[Table 9]

[0059]
[Table 10]

[0060]
[Table 11]

[0061]
[Table 12]

[0062]
【The invention's effect】
The air cleaning device according to the present invention has the following effects.
(1) The removal efficiency of gaseous chemical pollutants is high.
(2) The use of an inexpensive metal skew honeycomb makes the entire air purifier compact, which saves resources and significantly reduces the processing cost.
(3) Since the amount of deionized water to be used is small, the production cost of deionized water and the pump conveyance capacity can be reduced.
(4) Since the pressure loss when the air to be processed passes through the air cleaning device is small, the blowing power can be reduced.
(5) Since water flowing down on the corrugated metal plate constituting the metal skew honeycomb is brought into contact with the air to be treated, only the water on the honeycomb surface having a large surface area is evaporated and once taken into the water. Since the chemical pollutant that remains is left on the water side, it is difficult for the chemical pollutant to re-scatter. For this reason, there is little possibility of recontaminating to-be-processed air.
(6) Since the metal skew honeycomb is made of metal, the strength of the wall can be increased, so that the wall of the skew honeycomb can be thinned.
(7) Since the wall of the metal skew honeycomb can be thinned, the pressure loss can be reduced.
(8) Excellent durability including water resistance and wear resistance due to running water.
(9) Since contact between air and water is performed through the metal skew honeycomb, particles from the metal plate to be used are not mixed into the air, which is suitable for cleaning air to be sent to a clean room.
(10) Since the contact between air and water is performed through the metal skew honeycomb, the outgas from the metal plate to be used is not mixed with the air, which is suitable for cleaning the air sent to the clean room.
(11) Since the contact of air and water is performed through the metal skew honeycomb, there is no generation of mold and algae.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing an outline of an air cleaning device according to a first embodiment of the present invention.
FIG. 2 is a diagram illustrating a metal skew honeycomb used in the air cleaning device of the present invention.
[Explanation of symbols]
1 Metal skew honeycomb 10 Humidification part
11 First air inlet 12 First water supply means
13 Humidification means 14 First air outlet
20 Condensing part 21 2nd air inlet
22 Second water supply means 23 Condensing means
40 Air Cleaner

Claims

It has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened, and the metal skew honeycomb has a corrugated shape that propagates in one direction. A plurality of corrugated sheets of metal having a thickness of 10 to 200 μm are laminated to form a honeycomb shape, and the corrugated sheets of metal to be laminated are laminated so that the wave propagation directions cross each other diagonally, and two The wave propagation directions of the layered sheets are arranged in substantially the same direction, and a rectangular parallelepiped is formed by cutting along four planes perpendicular to the plane parallel to the metal corrugated sheet. Is a metal skew honeycomb having a thickness of 100 to 1000 mm that is neither parallel nor perpendicular to the wave propagation direction of the metal corrugated sheet, the front surface of which faces the air inlet, and the introduced air To pass through the interior The serial metallic oblique honeycomb arranged, the air cleaning apparatus, characterized in that said water supply means is positioned above said metallic oblique honeycomb.

It has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened, and the metal skew honeycomb has a corrugated shape that propagates in one direction. A plurality of corrugated sheets of metal having a thickness of 10 to 200 μm are laminated to form a honeycomb shape, and the corrugated sheets of metal to be laminated are laminated so that the wave propagation directions cross each other diagonally, and two The wave propagation directions of the layered sheets are arranged in substantially the same direction, and a rectangular parallelepiped is formed by cutting along four planes perpendicular to the plane parallel to the metal corrugated sheet. Is a metal skew honeycomb having a thickness of 100 to 1000 mm that is neither parallel nor perpendicular to the wave propagation direction of the metal corrugated sheet, the front surface of which faces the air inlet, and the introduced air To pass through the interior The serial metallic oblique honeycomb arranged, above the said metallic oblique honeycomb is disposed said water supply means, humidifying the air in the metallic oblique in honeycomb by water supplied by the water supply means In addition, an air cleaning apparatus is characterized in that chemical contaminants are removed from the air by taking at least part of the chemical contaminants into the excess moisture obtained.

It has an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened, and the metal skew honeycomb has a corrugated shape that propagates in one direction. A plurality of corrugated sheets of metal having a thickness of 10 to 200 μm are laminated to form a honeycomb shape, and the corrugated sheets of metal to be laminated are laminated so that the wave propagation directions cross each other diagonally, and two The wave propagation directions of the layered sheets are arranged in substantially the same direction, and a rectangular parallelepiped is formed by cutting along four planes perpendicular to the plane parallel to the metal corrugated sheet. Is a metal skew honeycomb having a thickness of 100 to 1000 mm that is neither parallel nor perpendicular to the wave propagation direction of the metal corrugated sheet, the front surface of which faces the air inlet, and the introduced air To pass through the interior The serial metallic oblique honeycomb arranged, above the said metallic oblique honeycomb is disposed said water supply means, dehumidify the air in the metallic oblique in honeycomb by water supplied by the water supply means In addition, an air cleaning apparatus is characterized in that chemical pollutants are removed from the air by taking at least part of the chemical pollutants into the resulting condensed water.

An air cleaning device having a humidifying unit and a condensing unit, wherein each of the humidifying unit and the condensing unit includes an air inlet, water supply means, and a metal skew honeycomb having both front and rear surfaces and upper and lower surfaces opened. The metal skew honeycomb has a corrugated shape propagating in one direction, and a plurality of corrugated metal sheets having a thickness of 10 to 200 μm are laminated to form a honeycomb shape, and the corrugated metal honeycomb is laminated. Sheets are laminated so that the wave propagation directions are obliquely intersected with each other, and the wave propagation directions of every two layers are arranged in substantially the same direction. A rectangular parallelepiped is formed by cutting along four planes perpendicular to the plane parallel to the sheet, and the cut plane is not parallel to the wave propagation direction of the metal corrugated sheet and is not perpendicular but has a thickness of 100 to 1000 mm. A metal skew honeycomb, Front faces the air inlet, and, the metal oblique honeycomb arranged such that air introduced passes through the interior, said water supply means is disposed above the metallic oblique honeycomb, In the humidification section, the air is humidified in the metal skew honeycomb by the water supplied by the water supply means, and at least a part of the chemical pollutant is taken into the excess moisture to obtain a chemical from the air. Removing contaminants, dehumidifying the air in the metal skew honeycomb with the water supplied by the water supply means in the condensing unit, and taking in at least a part of the chemical contaminants into the condensed water obtained, An air cleaning apparatus characterized by removing chemical pollutants from the air.