KR20220039837A - Printing system - Google Patents

Abstract

A gas bearing system, a print gap control system, and a print gap control method are provided. The gas bearing system can accommodate one or more print module packages. The systems and methods may be used for inkjet and/or thermal printing applications, such as fabricating organic light emitting devices (OLEDs). For oxygen sensitive applications, an inert gas such as nitrogen gas may be used as the pressurized gas. The fluid channels and micropores of the gas bearing system may vary with respect to their size and position relative to each other. Fluid channels and micropores form a group and may be associated with one or more manifolds, consequently a pressurized gas and/or vacuum source.

Description

printing system {PRINTING SYSTEM}

Note on related applications

This application claims priority to U.S. Regular Patent Application No. 13/570,154, and the regular patent application claims priority to U.S. Preliminary Application No. 61/521,604, filed on August 9, 2011.

The present invention relates to a thin-film printing apparatus and method.

In various circumstances, it may be advantageous for a print head to maintain a tight, controlled spacing between the delivery surface or ejection nozzle of the print head and the substrate surface on which the print head is to print material. This control is particularly important when printing using a thermal printing printhead configured to apply dry ink without contacting the surface to which the dry ink is to be deposited. If the print head is too far from the substrate surface, the printing may diffuse too much. If the print head is too close to the substrate surface, the printing may be too granular. When too close, the print head may even come into contact with the substrate, damaging both the substrate and the print head. Gap control is also important when inkjet printing between the inkjet print head and the substrate.

Therefore, in both thermal printing and inkjet printing systems, it is desirable to control the print spacing between the substrate and the print head to optimize the printing result and the printing process.

According to various embodiments, the present invention relates to a gas bearing system that can be used to hold a print head and a print module package and maintain a tightly controlled spacing between a substrate onto which material is to be printed and a transfer surface of the print head. will be. The gas bearing system includes a housing, the housing including a sidewall including an exterior surface and an interior surface. The sidewall defines an interior cavity configured to receive a print module package. The inner surface may terminate at an opening to the inner cavity. The sidewall may further include an end surface between the outer surface and the inner surface, wherein the end surface may include a plurality of first micropores and a plurality of second micropores. A plurality of first fluid channels may be included in the sidewall and extend from the plurality of first micropores into the sidewall and may be in fluid communication with a first manifold. The first manifold may be located internal to the sidewall, external, or both. A plurality of second fluid channels may be included in the sidewall and may extend from the plurality of second micropores into the sidewall and be in fluid communication with a second manifold. The second manifold may be located internal to the sidewall, external, or both. The first manifold may be in fluid communication with a peripheral exterior of the housing, for example by way of a first port. The second manifold may be in fluid communication with the peripheral exterior of the housing, for example by way of a second port.

According to various embodiments, a print spacing control system is provided that includes a substrate including a gas bearing system and a first planar surface as described herein. an end surface of the gas bearing is arranged in a first plane, at least one transfer surface of at least one inkjet print head or a thermal printing print head is arranged in a second plane, and a first planar surface of the substrate is arranged in a third plane The system is configured to be arranged. The first, second and third planes may be substantially parallel to each other. A gas bearing gap may be formed by a distance between the first plane and the third plane. A print gap may be formed by the gap between the second and third planes. At least one of the end surface, the transfer surface and the first planar substrate surface of the substrate may be adjusted to control the size of the print gap, the size of the gas bearing gap, or both. In some embodiments the print spacing may be controlled by controlling the gas bearing spacing.

According to various embodiments of the present invention, a method is provided comprising positioning a print module package relative to a substrate and printing a material onto the substrate using the print module package. Said positioning step can be formed using, for example, a gas bearing system comprising a housing, said housing comprising sidewalls defining an interior cavity. The sidewall may have an outer surface and an inner surface, and the print module package may be accommodated in the inner cavity. The inner surface may terminate at an opening to the inner cavity. The method may include mounting a print module package within the interior cavity. The sidewall may also further include an end surface between the outer surface and the inner surface, wherein the end surface may include a plurality of first micropores and a plurality of second micropores. The sidewall may further include a plurality of first fluid channels extending from the plurality of first micropores into the sidewall and in fluid communication with a first manifold, the method comprising: connecting a pressurized gas source to the first manifold; supplying to a manifold and supplying from the first manifold to a plurality of first fluid channels. Further, the sidewall may include a plurality of second fluid channels extending from the plurality of second micropores into the sidewall and in fluid communication with a second manifold, the method comprising: forming a vacuum with the source and forming a vacuum from the plurality of second fluid channels to the second manifold. The first manifold may be in fluid communication with a peripheral exterior of the housing, eg, by a first port, and the second manifold may be in fluid communication with a peripheral exterior of the housing, eg, by a second port. there is. The method may include using a combination of pressurized gas and vacuum from and providing the plurality of first and second micropores to the micropores to control the print spacing.

According to various embodiments of the present invention, a gas bearing system includes a housing having a sidewall, the sidewall including an exterior surface and an interior surface. The sidewall defines an interior cavity configured to receive a print module package. The construction of the inner surface ends at the top, the bottom or both, and forms an opening to the interior cavity. The interior cavity may form a through hole through the housing or may have only one opening at one end. The sidewall may also have an end surface between an outer surface and an inner surface of the sidewall, the end surface may include a plurality of first micropores and a plurality of second micropores. A first plurality of fluid channels may be included in the sidewall and extend from the first micropores into the sidewall and may be in fluid communication with a first manifold. A plurality of second fluid channels may be included in the sidewall and may extend from the second micropores into the sidewall and be in fluid communication with a second manifold. Each of the first and second manifolds may independently be located internal to the sidewall, external to the sidewall, or both. The first manifold may be in fluid communication with the peripheral exterior of the housing, for example through a first port. The second manifold may be in fluid communication with the peripheral exterior of the housing, for example via a second port. Conduits, such as tubing, are in fluid communication with the respective manifolds and may further be connected to a pressurized gas source or a vacuum source or both. The plurality of first and second micropores may be arranged to surround the opening with respect to the inner cavity. The interior cavity may have a cross-sectional shape having a square, rectangular, circular or any other shape. The micropores may surround the opening to the interior cavity on two sides, three sides, four sides or at least five sides.

In embodiments the end surface of the sidewall may further include a plurality of third fluid channels extending into the sidewall and in exchange with a third manifold different from the first and second manifolds. The third manifold may be in fluid communication with the peripheral exterior of the housing, for example, through a third port. The third manifold may be in fluid communication with a pressurized gas source, a vacuum source, or both. The third manifold may be in fluid communication with the first manifold or the same source of pressurized gas in fluid communication with another source of pressurized gas. The individual micropores of the plurality of first and second micropores have an average distance from adjacent micropores of about 0.5 mm to about 20 mm, for example, about 1.0 mm to about 10 mm, about 2.0 mm to about 8.0 mm, or an average distance of about 3.0 mm to about 6.0 mm apart. The individual micropores of the plurality of first and second micropores have an average diameter of from about 0.001 inches to about 0.1 inches, for example, from about 0.003 inches to about 0.075 inches, from about 0.005 inches to about 0.05 inches, or from about 0.01 inches to about 0.01 inches. may have an average diameter of about 0.04 inches. In some embodiments, the first plurality of micropores may have an average diameter of about 0.005 inches to about 0.025 inches and the second plurality of micropores may have an average diameter of about 0.030 inches to about 0.090 inches.

According to various embodiments, the first plurality of fluid channels may be in fluid communication with a source of pressurized gas, and the plurality of second fluid channels may be in fluid communication with the source of vacuum. The pressurized gas source may include, for example, a pressurized inert gas source such as a nitrogen gas source, an inert gas source, or a combination thereof.

In an embodiment, the housing may include a plurality of components, for example, a base plate, a manifold compartment mounted to the base plate, and a face plate mounted to the manifold. In an exemplary configuration, the face plate includes an end face. The base plate may include first and second ports, and the manifold compartment may include first and second manifolds. In some embodiments the base plate comprises a third port and the manifold compartment comprises a third manifold. In some embodiments the base plate may include first, second and third ports, and the manifold compartment may include first, second and third manifolds. In some embodiments the manifold compartment or one or more manifolds may include one or more ports. A connecting flange may be connected to the base plate and configured to be connected to the at least one support and the actuator. One or more components may form or partially form a sidewall, and stacked components including, for example, face plates may form sidewalls, interior cavities, or both with each other.

In some embodiments, the housing may provide a second opening to the interior cavity. The second opening may be positioned opposite the first opening so that the interior cavity may include a through hole extending through the entire housing. The at least one print module package may include at least one thermal printing print head or at least one inkjet print head having at least one transfer surface and at least one heater in heat exchange with the at least one transfer surface. In some embodiments, the second opening allows the effluent to vent from the interior cavity. The second opening allows the print module package to be loaded from the top of the system, the bottom of the system, or both. It should be understood that the orientation of the gas bearing system may vary and the indications of upper and lower are relative terms and not absolute terms. In some embodiments, the features are reversed so that the print module package can be loaded from the bottom of the system by the second opening.

According to various embodiments, a print spacing control system having a substrate comprising a gas bearing system and a first planar surface described herein is provided. The system may be configured such that the end surface is arranged in a first plane, the at least one delivery surface is arranged in a second plane, and the first planar substrate surface is arranged in a third plane. The first, second and third planes may be arranged substantially parallel to each other, ie parallel to each other or skewed by less than 10° or less than 5° relative to each other. A gas bearing gap may be formed by a distance between the first plane and the third plane. A print gap may be formed by the distance between the second and third planes. At least one of the end surface, the inkjet print head or transfer surface and the first planar substrate surface may be adjusted to control the size of the print gap, the size of the gas bearing gap, or both. The print spacing can be controlled independently by controlling and/or controlling the size of the gas bearing spacing. A gas bearing system may be arranged above, below or above and below the substrate. The gas bearing system may include or be operatively coupled to one or more actuators to adjust the position of the gas bearing system relative to the substrate and/or one or more inkjet print heads.

A second gas bearing system is provided facing the first gas bearing system so that a substrate is arranged between the first gas bearing system and the second gas bearing system. The second gas bearing system may also include a plurality of pressurized gas channels and optionally a plurality of vacuum channels. The pressurized gas channels and vacuum channels can be arranged in any desired configuration. In some embodiments, all other or optional fluid channels include pressurized gas channels and vacuum channels. A second gas bearing, which may be mounted into the chuck, may provide temperature control for the substrate. That is, in addition to providing a load to the substrate, the second gas bearing may perform heat transfer to and/or from the substrate for heating and/or cooling the substrate. The thermal control may be advantageous over direct contact with a heating element, for example a heated chuck. The heating channel and the cooling channel may be arranged in a desired structure. In some embodiments all other fluid channels may include heating channels or cooling channels. In some embodiments, optional fluid channels may include heating channels, cooling channels, heating and cooling channels, and the like. The thermal control may be used to control the size of the substrate as heat tends to expand the substrate and cooling tends to contract the substrate. It is advantageous to maintain a constant size. Thermal size change is particularly important for relatively large substrates, for example, for 8G sized glass (2.2 m X 2.5 m). Uncontrolled changes in the size of the substrate can adversely affect product quality by shifting the ink application horizontally and/or vertically on the substrate. In some embodiments the print spacing may have a tolerance of about +/- 10 μm, +/- 7 μm, or +/- 5 μm.

According to various embodiments of the present invention, a method is provided comprising positioning a print module package relative to a substrate and printing a material onto the substrate using the print module package. The positioning step may be formed by a gas bearing system described herein, for example a gas bearing system comprising a housing, the housing defining an interior cavity. The sidewall may have an exterior surface and an interior surface, and the print module package may be received within the interior cavity. The interior surface ends at an opening to the interior cavity, and the method may include mounting a print module package within the interior cavity. The sidewall may further have an end surface between the outer surface and the inner surface, and the end surface may include a plurality of first micropores and a plurality of second micropores. The method may include supplying a pressurized gas to the plurality of first micropores and forming a vacuum through the plurality of second micropores. The sidewall may further include a plurality of first fluid channels extending from the plurality of first micropores into the sidewall and in exchange with a first manifold. In addition, the sidewall may include a plurality of second fluid channels extending from the plurality of second micropores into the sidewall and in exchange with a second manifold. The method may include supplying pressurized gas to the first manifold and creating a vacuum through the second manifold. The first manifold may be in fluid communication with a peripheral exterior of the housing, for example via a first port, and the second manifold may be in fluid communication with a peripheral exterior of the housing, eg, via a second port. there is. A tube arrangement, pipe arrangement or other conduit may connect the first and second manifolds with pressurized gas and vacuum sources, respectively. In some embodiments, the plurality of first micropores and the plurality of second micropores enclose an opening to the interior cavity.

In some embodiments, printing may include thermal printing, including thermal printing, eg, inkjet printing prior to solid transfer printing by sublimation or evaporation of a solid using a print module package. Examples of print module packages and thermal printing that can be used in accordance with the present invention are described, for example, in US Patent Application Publication Nos. US 2008/0308307A1, US 2008/0311307A1, US 2008/0311307A1, which are incorporated herein by reference in their entirety. US 2008/0311289 Al, and US 2006/0115585 Al. The print module package may include a print head delivery surface and/or an inkjet nozzle orifice, the substrate may include a first surface and a print head delivery surface, and/or the inkjet nozzle orifice facing the substrate first surface They may be arranged apart from each other by the print spacing. The print head transfer surface may receive ink applied by inkjet printing, for example from an inkjet printing subsystem. In some embodiments one or more print head transfer surfaces are rotated to receive ink and/or rotated toward a substrate to be printed. In some embodiments one or more inkjet print heads are rotated to deliver ink to one or more print head transfer surfaces. The gas bearing system and/or print head delivery surface may be arranged on top, bottom or top and bottom of the substrate during the printing process. In some embodiments, the printing may include inkjet printing directly onto the substrate. In the above embodiments, the print module package may include an inkjet print head. For example, the print module package may include a SAMBA print head module (FUJIFILM Dimatix, Inc., Santa Clara, California). The gas bearing system and/or inkjet print head may be arranged above, below or above and below the substrate during the printing process.

Positioning the gas bearing system relative to the substrate may include controlling the flow of fluid through at least one of the first and second manifolds to control the size of the print gap. In some embodiments, the positioning maintains positive fluid flow from the first manifold through the plurality of first fluid channels and the second into the plurality of second fluid channels. maintaining negative fluid flow through the manifold. The positioning may include adjusting the flow of pressurized gas, vacuum, or both to control the size of the print spacing, gas bearing spacing, or both. A control unit for controlling pressurized gas, vacuum or both may be used.

In some embodiments the print spacing may be defined as a distance from about 5 μm to about 100 μm, such as from about 20 μm to about 30 μm, or about 25 μm. The method may include, for example, introducing an inert gas through the plurality of first fluid channels at a pressure of about 10 psig to about 200 psig, about 30 psig to about 90 psig, about 50 psig to about 70 psig, or about 60 psig. It can be flowed to maintain or provide print spacing. The positioning further comprises forming a vacuum through the plurality of second fluid channels at a negative pressure of about -3.0 psig to about -13 psig, about -5.0 psig to about -10 psig, or about -7.5 psig. can do. In some cases, the printing comprises printing onto a first surface of a substrate, wherein the substrate has a second surface opposite the first surface, the method proximate the second surface of the substrate and the second surface of the substrate and positioning a second gas bearing system opposite the first gas bearing system. The second gas bearing system may be configured to position the first surface of the substrate and maintain a desired print spacing. The second gas bearing system may be used in place of or in addition to the first gas bearing system.

Various embodiments of the present invention are directed to methods and apparatus for controlling the environment surrounding the ink application printing process and using air bearings to maintain and control print spacing. For example, ink application may be performed in a non-oxidizing environment. In some embodiments, the print head is mounted within a gas bearing housing, so that the set spacing is fixed at some distance that may actually approach zero. The set distance corresponds to the distance between the delivery surface of the print head and the end surface of the gas bearing housing. The gas bearing spacing is the distance between the end surface and the substrate. Whether the substrate moves under the print head or the print head moves over the substrate, there is relative motion between the print head and the substrate. Upon pressurizing the fluid passageway of the gas bearing housing, the gas exits the opening in the housing and maintains a gas bearing gap between the housing end surface and the substrate. By this means, the printing interval is the sum of the gas bearing interval and the set interval, so that the printing interval is controlled by the other two intervals. For example, minute changes in micron size can be created in the print gap by changing the gas pressure inside the gas bearing housing. The flow of gas from the gas bearing housing to the exhaust creates an environment filled with the bearing gas. If the ink is sensitive to oxygen gas, a non-oxygen gas and/or an inert gas such as, for example, nitrogen gas may be used to provide a non-oxidizing environment. Solvent vapors may be generated by a process that evaporates liquid ink in or on the print head. The effluent opening allows the removal of the nitrogen gas injected by the gas bearing system and the removal of solvent vapors formed during the evaporation of the liquid ink.

In some embodiments, pressure and vacuum sources may be used to form the desired print gap. In some embodiments, a vacuum source and a nitrogen gas pressure source are provided. Said sources are arranged for fluid communication with the respective channel inside the gas bearing housing and for example arranged around the print head so that a gas bearing gap can be formed. The print spacing can be varied for bearing housings. The gas bearing housing and print head may be arranged proximate to a substrate, for example glass. The print head is capable of applying a film material such as, for example, an ink comprising a film forming material dissolved or suspended in a carrier fluid on a substrate. In some embodiments, the substrate is supported by a chuck with a gas lift or gas bearing system. In some embodiments, the substrate is supported by a vacuum chuck in contact with the substrate.

As noted above, the gas bearing system of the present invention may be used alone or in combination with one or more additional gas bearing systems. Additional gas bearing systems can use any gas or gas mixture. Additional gas bearing systems may utilize the same or different gases or mixtures of gases confined within a gas containing system, such as, for example, a system involving a thermal printing operation. In some embodiments, the air bearing utilizes, for example, an inert gas such as nitrogen gas, one or more inert gases, or a combination thereof. In addition to the associated methods and systems that may be used, gas bearing systems may be purchased from New Way Machine Components, Inc. of Aston, PA. The gas bearing systems may be used alone or in combination with the gas bearing systems described herein. Apparatus, systems, methods and applications used in connection with gas bearing systems and including, for example, those described in US Pat. No. 7,908,885 B2, which is incorporated herein by reference in its entirety, in connection with the present invention. can be used In addition to related methods and systems, gas bearing systems available from Coreflow Scientific Solutions LTD. of Yoqneam, Israel include the gas bearing systems described herein and It may be used in combination or may be used alone. Apparatus, systems, methods and applications relating to gas bearing systems that may be used in connection with the present invention are described, for example, in US Pat. , US 7,603,028 B2 and US 7,530,778 B2.

Features of the present invention are described in, for example, US Patent Application Publication Nos. US 2008/0311307 Al, US 2008/0311289 Al, US 2006/0115585 Al, US 2010/0188457 Al, US 2011/0008541 Al, US 2010/0171780 Al, US 2010/0201749 Al, and US Patent Application Publication No. 61 entitled "Face-Down Thermal-Jet Printing Apparatus and Methods" May be implemented with /521,631.

In order to better understand the features and advantages of the present invention, the present invention is described with reference to the accompanying drawings, which are used to explain the present invention and do not limit the present invention.
1 is a cross-sectional side view of a gas bearing system, a print module package arranged within the gas bearing system, a substrate to be printed, and a substrate support in accordance with various embodiments of the present invention;
2 is a cross-sectional side view illustrating a gas bearing system, a print module package arranged within the gas bearing system, a substrate and a substrate positioning system in accordance with various embodiments of the present invention;
3 is a bottom exploded perspective view illustrating a gas bearing system according to various embodiments of the present invention;
Fig. 4 is a lower left perspective view of the gas bearing system of Fig. 3 in an assembled state and a print module package adjustablely mounted within the gas bearing system;
FIG. 5 is a perspective view of the gas bearing system of FIG. 3 and the print module package adjustablely mounted or secured within the gas bearing system of FIG. 3 in an upside down arrangement and assembled condition; FIG.
6 is a lower right perspective view illustrating the gas bearing system and the print module package shown in FIG. 5;
Fig. 7 is a perspective view of the print module package and the gas bearing system shown in Figs. 5 and 6 arranged to perform a thermal printing operation and secured to a rotating actuator;

1 is a cross-sectional view of a gas bearing system 20 in accordance with various embodiments of the present invention. The gas bearing system 20 includes a housing 22 including a sidewall 24 . The sidewall 24 includes an outer surface 26 and an inner surface 28 . The interior surface 28 defines an interior cavity 30 configured to receive a print module package 32 . The inner surface 28 terminates at the cavity opening 34 of the inner cavity 30 . An end surface 36 is arranged between the inner surface 28 and the outer surface 26 . The opposing end surface 36 is a circular end portion 38 comprising a second cavity opening 40 . The second cavity opening 40 may include a through hole 42 . A first aperture 44 and a second aperture 46 may be arranged in the end surface 36 . A first fluid channel 48 extending into the sidewall 24 of the housing 22 may extend from the first aperture 44 . A second fluid channel 50 may extend from the second aperture 46 into the sidewall 24 of the housing 22 .

As can be seen in FIG. 1 , the print module package 32 may include a transfer surface 52 from which material is transferred onto a substrate 56 and more specifically to form an application material 54 . may be transferred onto the substrate surface 57 . The print spacing 58 is defined as the distance between the transfer surface 52 and the substrate surface 57 . The gas bearing spacing 60 is defined as the distance between the end surface 36 and the substrate surface 57 . A set spacing 62 is defined as the difference between the gas bearing system spacing 60 and the print spacing 58 and is equal to the distance between the transfer surface 52 and the end surface 36 .

2 is a schematic cross-sectional view of a gas bearing system 120 in accordance with various embodiments of the present invention. The gas bearing system 120 includes a housing 122 , which in turn includes a sidewall 124 . The sidewall 124 includes an exterior surface 126 and an interior surface 128 defining an interior cavity 130 . The interior cavity 130 is configured to receive the print module package 132 through the cavity opening 134 . An end surface 136 is positioned between the outer surface 126 and the inner surface 128 . The second cavity opening 138 may be positioned to face the cavity opening 134 . The end surface 136 may include a first aperture 140 and a second aperture 142 . The first fluid channel 144 may extend from the first micropore 140 into the sidewall 124 of the housing 122 . A second fluid channel 146 may extend from the second micropore 142 into the sidewall 124 of the housing 122 .

2 , the first fluid channel 144 and the second fluid channel 146 may be in fluid communication with a first manifold 148 . The end surface 136 may further include a third micropore 150 , a fourth micropore 152 , a fifth micropore 154 , and a sixth micropore 156 . The third fluid channel 158 , the fourth fluid channel 160 , the fifth fluid channel 162 , and the sixth fluid channel 164 respectively include a third micropore 150 , a fourth micropore 152 , It may extend into the side wall 124 of the housing 122 from the fifth and sixth micro-holes 154 and 156 . The third fluid channel 158 , the fourth fluid channel 160 , the fifth fluid channel 162 , and the sixth fluid channel 164 may be in fluid communication with the second manifold 166 . In some embodiments, a pressurized gas source 168 is in fluid communication with the first manifold 148 . In some embodiments, a vacuum source 170 is in fluid communication with the second manifold 166 . The transfer surface 172 of the print module package 132 may be configured to apply a material, such as, for example, a film forming material, onto a substrate. An application material 174 may be positioned on a substrate 176 , and more specifically on a substrate surface 178 . The print gap 180 may be defined as the distance between the transfer surface 172 and the substrate surface 178 . The gas bearing system spacing 182 may be defined as the distance between the end surface 136 and the substrate surface 178 . The set gap may be defined as the distance between the end surface 136 and the transfer surface 172 . In some embodiments, a second gas bearing system 186 is provided. The second gas bearing system 186 may include a plurality of micropores 188 in fluid communication with a plurality of fluid channels (not shown). The micropores 188 may face the second substrate surface 190 of the substrate 176 .

3 is an exploded view illustrating a gas bearing system 220 in accordance with various embodiments of the present invention. The gas bearing system 220 includes a plurality of fixtures 222 to secure the manifold assembly cover 226 , the manifold assembly base 228 and the base plate 230 together with a face plate 224 . ) may be included. The fixtures 222 may include a first fixture 232 , a second fixture 234 , a third fixture 236 , and a fourth fixture 238 . Face plate 224 may include an end surface 240 . The end surface 240 may receive a fixture 222 . A first fixture hole portion 242 , a second fixture hole portion 244 , a third fixture hole portion 246 and a fourth fixture hole portion extending from the end surface 240 into the face plate 224 . A portion 248 may be provided. Face plate 224 may include an outer surface 250 and an inner surface 252 . The interior surface 252 may define a first interior cavity opening 255 and an interior cavity portion 254 . A plurality of fluid channel portions 256 may be arranged in face plate 224 between inner surface 252 and outer surface 250 . Each fluid channel portion 256 may terminate in a respective hole in the end surface of the face plate 224 (not shown in the figure).

The manifold assembly cover 226 may include a first fixture aperture portion 258 , a second fixture aperture portion 260 , a third fixture aperture portion 262 , and a fourth fixture aperture portion 264 . can The fixture aperture portions may be arranged between the inner surface 268 and the outer surface 266 of the manifold assembly cover 226 . The interior surface 268 may form an interior cavity portion 270 . A plurality of fluid channel portions contained within a complementary manifold portion 274 may be arranged between the inner surface 268 and the outer surface 266 .

The manifold assembly base 228 may include a first body aperture portion 276 , a second body aperture portion 278 , a third body aperture portion 280 , and a fourth body aperture portion 282 . can The fixture aperture portions of the manifold assembly base 228 may be arranged between the outer surface 284 and the inner surface 286 of the manifold assembly base 228 . The interior surface 286 may define an interior cavity portion 288 . The outer surface 284 and the inner surface 286 may also define a plurality of fluid channel portions within the manifold portion 292 mating therebetween. Port receiving micropores 294 may extend from outer surface 284 .

The base plate 230 may include a first port 296 , a second port 298 , and a third port 230 . A first fluid line 302 can be connected to a first port 296 . A second fluid line 304 may be connected to the second port 298 . The third fluid line 306 may be connected to the third port 300 . Face plate 230 may include a major base plate portion 308 . The major base plate portion 308 may include an interior cavity portion 310 and a second interior cavity opening 312 . The inner base surface 314 may face the manifold assembly base 228 . The outer base surface 316 of the base plate 230 may face the same but oppositely outwardly as the end surface 240 of the face plate 224. A plurality of print module package adjustment screw receiving holes are provided in the outer base surface 316. The holes may include a first print module package adjusting screw receiving hole 318 and a second print module package adjusting screw receiving hole 320. Other adjusting screw receiving holes may include, for example, a print A hole may be provided for each adjustment screw on the module package. The base plate 230 may further include a flange 326. The flange 326 may be, for example, an actuator, a robotic arm. arm), a rotary actuator, a support part, etc. The flange 326 includes a first flange fixture accommodating hole 328 , a second flange fixture accommodating hole 330 , and a third flange fixture accommodating hole. It may include a (332) and a fourth flange fixture receiving hole (334).

4 is a lower left perspective view showing the gas bearing system 220 assembled and proximate to the print module package 336 . The first fixture 232 , the second fixture 234 , the third fixture 236 and the fourth fixture 238 are arranged through the end surface 240 and are manifold together with the face plate 224 . The fold assembly cover 226 , the manifold assembly base 228 , and the base plate 230 are secured. The print module package 336 includes a print head 338 as an apex. The print head 338 may include one or more transfer surfaces 340 . The print module package 336 may include one or more print module package adjusters, such as linear adjustment screws. 4 shows a first print module package adjustment screw 342 , a second print module package adjustment screw 344 , and a third print module package adjustment screw 346 . Any number of adjustment screws may be used, for example three or four. The linear adjustment screws adjust theta x and y rotation of the print head 338 and/or align the transfer surface 340 of the print head 338 with the end surface 240 of the gas bearing system 220 . It can be used to make it flush, recessed, parallel and/or slightly elongated. The first print module package adjustment screw 342 and the second print module package adjustment screw 344 may be fixedly, mounted and/or adjustable in the first print module package base flange 350 . A third print module package adjustment screw 346 and one or more other print module package adjustment screws may be fixedly arranged, mounted and/or adjusted to the second print module base flange 352 .

The print module package 336 may be secured to the gas bearing system 220 using any of a variety of fixtures. In FIG. 3 , two magnets 322 and 324 are shown mounted on the lower side of the base plate 230 . Magnets 332, 324 are aligned with corresponding magnets (not shown) on print module package 336 or of print module package 336, such as, for example, bottom flanges 350, 352 shown in FIG. It forms a part and can be aligned with a magnetically susceptible metallic material.

The interior cavity 354 is a portion of the gas bearing system 220 including an interior cavity portion 254 , an interior cavity opening 255 , an interior cavity portion 288 ( FIG. 3 ), and an interior cavity portion 310 ( FIG. 3 ). It may be formed from an assembly. A plurality of micropores 360 are arranged in the end surface 240 between the outer surface 250 and the inner surface 252 . A plurality of manifolds 362 are contained within the manifold assembly cover 226 and the manifold assembly base 228 .

5 is a perspective view illustrating the gas bearing system 220 in which the print module package 336 is assembled with the top and bottom arranged in reverse. The print module package 336 is arranged into the interior cavity 354 , and a first print module package adjustment screw 342 for adjusting the relative position between the print module package 336 and the gas bearing system 220 . , the second print module package adjusting screw 344 and the third print module package adjusting screw 346 are used. The structure presses the first print module package base flange 350 and the second print module base flange 352 against the outer base surface 316 of the base plate 230 .

6 is a lower right perspective view showing the gas bearing system 220 and the print module package 336 arranged in an assembled configuration. The print head 338 and transfer surface 340 are visible through the first interior cavity opening 255 and are surrounded by a plurality of micro-holes 360 arranged in the end surface 240 .

7 is a perspective view illustrating a gas bearing system 220 connected to an actuator 364 via a flange 326 . The actuator 364 may include an actuator motor 366 and a rotatable actuator face plate 368 . Flange 326 may be secured to actuator face plate 368 .

Load-lock features that may be used in accordance with various embodiments of the present invention and methods of using them are described, for example, in US Patent Application Publication No. US 2010/0201749, which is incorporated herein by reference in its entirety. features and methods described in

All publications, patents, and patent applications described herein are herein incorporated by reference to the same extent as if each individual publication, patent, or patent application was specifically and individually indicated to be incorporated by reference.

While embodiments of the present disclosure have been shown and described herein, it will be understood by those skilled in the art that the above embodiments are provided by way of example only. Numerous variations, modifications and substitutions will occur to those skilled in the art without departing from the above disclosure. Numerous alternative embodiments of the disclosure described herein may be utilized in practicing the disclosure. The following claims define the scope of the disclosure, and methods and configurations and equivalent embodiments falling within the scope of the claims are within the scope of the claims.

20.....Gas bearing system,
24.....Sidewall,
22.....Housing,
26.....outer surface,
28.....Inner surface,
32.....Print module package,
34....Cavity openings;
36.....End surface,
40..... a second cavity opening;
38....the end part,
48..... a first fluid channel;
50.....Second fluid channel.

Claims (20)

a housing comprising a manifold compartment;
a gas bearing support comprising a plurality of thermal control features and pressurized gas channels; and
a printing device arranged in the housing and comprising a print module facing the gas bearing support; A printing system comprising a. 2. The printing system of claim 1, wherein the housing has an outlet. 3. The printing system of claim 2, wherein the print module has a transfer surface. 3. The printing system of claim 2, further comprising a print spacing control system, wherein the print spacing control system includes the gas bearing support. 2. The method of claim 1, wherein the print module has a transfer surface and the gas bearing support supports a substrate;
and a print spacing control system that controls the distance between the substrate and the transfer surface. 6. The printing system of claim 5, wherein the print spacing control system adjusts the gas bearing support. The printing system of claim 1, wherein the gas bearing support further comprises a plurality of vacuum channels. 8. The printing system of claim 7, wherein the thermal control features include a plurality of cooling channels. 9. The printing system of claim 8, wherein the thermal control features further comprise a plurality of heating channels. 5. The method of claim 1, further comprising a print spacing control system, wherein the housing has an outlet, the print spacing control system regulates the gas bearing support, and wherein the thermal control features include a plurality of cooling channels. Characterized printing system. a housing comprising a manifold compartment;
a gas bearing support comprising a plurality of pressurized gas channels and thermal control channels for supporting the substrate without directly contacting the substrate; and
a printing device including a print module disposed to face the gas bearing support; A printing system comprising a. 12. The printing system of claim 11, wherein the thermal control channels comprise a plurality of cooling channels. 13. The printing system of claim 12, wherein the gas bearing support further comprises a plurality of vacuum channels. 14. The printing system of claim 13, further comprising a print spacing control system for adjusting the gas bearing support. 12. The printing system of claim 11, wherein the housing has an outlet fluidly coupled to the gas bearing support. 15. The printing system of claim 14, wherein the print spacing control system controls the distance between the substrate and the transfer surface of the print module. 12. The printing system of claim 11, wherein the pressurized gas channels and the thermal control channels are disposed within a gas bearing surface of the gas bearing support. a housing comprising a manifold compartment;
chuck; class,
a gas bearing mounted to the chuck for supporting the substrate over a gas bearing surface without directly contacting the substrate, the gas bearing comprising a plurality of pressurized gas channels; A gas bearing support comprising a;
a print module having a transfer surface facing the gas bearing surface, the print module being disposed within the housing and facing the gas bearing support; and
a print spacing control system for controlling a distance between the gas bearing and a substrate disposed on the transfer surface; A printing system comprising a. 19. The printing system of claim 18, wherein the print spacing control system adjusts the gas bearing. 20. The printing system of claim 19, wherein the housing has an outlet fluidly coupled to the gas bearing support.

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