KR20210132770A - Furnace using nitrogen as atmospheric gas - Google Patents

Abstract

The present invention relates to a furnace using nitrogen atmospheric gas. The furnace using nitrogen atmospheric gas according to an embodiment of the present invention comprises: a heat treating furnace main body which has an interior space sealed from the outside; an insulation member which is prepared inside the heat treating furnace main body and is formed to cover the interior space; a heater which is installed inside the interior space while penetrating the heat treating furnace main body and the insulation member and is heated to a set temperature; and a graphite muffle structure which is located inside the insulation member, forms a sealed space of nitrogen gas atmosphere by assembling a plurality of graphite units divided by sections, and has a conveyor for transferring a heat treating target object inside the sealed space. The furnace significantly reduces oxygen concentration inside the furnace by applying the graphite muffle structure.

Description

Furnace using nitrogen atmosphere gas

Embodiments of the present invention relate to a furnace using nitrogen atmosphere gas, and more particularly, to a furnace using nitrogen atmosphere gas in which oxygen concentration inside the furnace is significantly reduced by applying a graphite muffle structure.

Oxygen in the atmosphere is converted into CO gas by combining with carbon inside the furnace. And the amount of carbon emitted from the carbon structure is extremely small and may not be involved in the durability of the structure.

If the carbon structure is applied to the structure inside the furnace, the oxygen concentration in the furnace may be very low, which is advantageous for optimizing the atmosphere furnace.

Republic of Korea Patent Publication No. 10-2000-0023444 (April 25, 2000, published)

An object of the present invention is to solve the above problems, and to provide a nitrogen atmosphere gas furnace in which oxygen concentration inside the furnace is significantly reduced by applying a graphite muffle structure.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention not mentioned may be understood by the following description, and will be more clearly understood by the examples of the present invention. Moreover, it will be readily apparent that the objects and advantages of the present invention may be realized by the means and combinations thereof indicated in the claims.

A nitrogen atmosphere gas use furnace (furnace) according to an embodiment of the present invention is a heat treatment furnace body having a sealed inner space; a heat insulating member provided inside the body of the heat treatment furnace and formed to surround the inner space; a heater installed inside the inner space through the heat treatment furnace body and the heat insulating member and heated to a set temperature; and a graphite muffle structure that is located inside the heat insulating member, forms a closed space in a nitrogen gas atmosphere by assembling a plurality of graphite units divided for each zone, and is provided with a conveyor to which a heat treatment object is transported inside the closed space includes ;

The heat insulating member may be made of a rectangular ceramic fiber material surrounding the outside of the inner space.

The heat treatment furnace body, the upper body is coupled in close contact with the upper surface of the heat insulating member; a plurality of side wall bodies coupled in close contact with both sides of the heat insulating member; and a support for supporting the heat insulating member at a set height in close contact with the lower surface of the heat insulating member.

The heater may include: a plurality of first heaters protruding through the plurality of sidewall bodies and the heat insulating member and extending in a horizontal direction to a central position of an inner width of the inner space; and a plurality of second heaters positioned side by side under the plurality of first heaters and protruding through the plurality of sidewall bodies and the heat insulating member to extend in a horizontal direction to a central position of the inner width of the inner space; and include

a first heater support member in contact with a lower portion of the first heater from the inside of the heat insulating member to support the first heater; and a second heater support member in contact with a lower portion of the second heater to support the second heater from the inside of the heat insulating member, wherein the first and second heater support members may be made of a graphite material.

The graphite muffle structure may include: a first graphite muffle installed to be located in the center of the inner space provided inside the heat insulating member, and providing a closed space of a nitrogen gas atmosphere; and a second graphite muffle disposed in close contact along the inner wall surface of the heat insulating member and enclosing and sealing the inner space in which the first graphite muffle is installed.

The first graphite muffle may include: a first upper graphite unit horizontally disposed on an upper portion of the sealed space; a first lower graphite unit that is horizontally disposed in the lower portion of the closed space and is installed to face the first upper graphite unit with a length corresponding to that of the first upper graphite unit; and a first side graphite unit assembled in a direction crossing both ends of the first upper graphite unit and the first lower graphite unit.

It further includes; a support member made of a graphite material for reinforcing and supporting the assembly structure of the first graphite muffle, wherein the support member includes: a horizontal coupling part coupled to cover the upper portion of the first upper graphite unit from the outside; and a bent extension part bent downward from both ends of the horizontal coupling part to wrap and fix a part of the first side graphite unit, wherein the support member is positioned at a predetermined height above the lower part of the first lower graphite unit It further includes;

The second graphite muffle may include: a second upper graphite unit closely coupled to the heat insulating member at a predetermined interval from the first upper graphite unit; a second lower graphite unit closely coupled to the heat insulating member at a predetermined distance from the second upper graphite unit; and a second side graphite unit assembled in a direction crossing both ends of the second upper graphite unit and the second lower graphite unit.

The first upper graphite unit and the second upper graphite unit respectively pass through the center of the width vertically and communicate from the outside to the inside of the closed space, and a sampling gas suction nozzle connected to the sampling gas inlet; further comprising , the sampling gas suction nozzle may be made of a graphite material.

A plurality of are respectively formed at positions symmetrical on both sides with respect to the sampling gas suction nozzle, and are formed in communication with the inside of the second graphite muffle by penetrating the second upper graphite unit up and down, and connected to the nitrogen gas inlet. It further includes a nitrogen gas input nozzle, and each of the plurality of nitrogen gas input nozzles may be made of a graphite material. In this way, by providing the composition of the nitrogen gas input nozzle, the sampling gas suction nozzle, the support member, and the heater support member entirely of graphite material, the concentration of the oxygen atmosphere inside the furnace can be further reduced and airtightness can be improved.

According to the present invention, the oxygen concentration inside the furnace can be significantly reduced by applying the graphite muffle structure, and thus the furnace can be optimized using nitrogen atmosphere gas.

As a specific example, in the case of the nitrogen atmosphere gas furnace according to the first embodiment of the present invention, the double graphite muffle type has the advantage of maintaining an optimal internal atmosphere of the furnace with a minimum amount of nitrogen gas.

In particular, the graphite muffle structure combines with oxygen in the atmosphere to generate CO, thereby lowering the oxygen atmosphere inside the furnace to at least 20 ppm or less. have.

Therefore, according to the first embodiment of the present invention, the double graphite muffle type is applied, and the composition of the heater support, nitrogen gas nozzle, sampling gas nozzle, and muffle support is entirely made of graphite material to significantly lower the oxygen atmosphere concentration inside the furnace. However, it has the advantage of improving the confidentiality.

In particular, since the first graphite muffle is manufactured in a prefabricated manner, there is an advantage that it can be partially replaced in case of damage. However, in the case of this prefabricated structure, there is a disadvantage in that the airtightness is low compared to the conventional metal material integrated muffle, but the airtightness can be sufficiently improved by additionally configuring the second graphite muffle surrounding the outer periphery together with the first graphite muffle. Furthermore, since the second graphite muffle is also manufactured in a prefabricated manner, it is possible to partially replace it in case of damage, thereby simplifying maintenance work and reducing costs.

In addition, in order to structurally reinforce the first graphite muffle of the prefabricated structure, a support member is further installed for each assembly section, and the material of the horizontal coupling part, the bending extension part, and the standing part constituting the support member is also composed of graphite and oxygen It has the advantage of lowering the concentration and enabling semi-permanent use.

In addition, the second graphite muffle has the advantage of blocking oxygen to the outside and fundamentally blocking the nitrogen gas flowing to the outside of the first graphite muffle, thereby optimizing the nitrogen atmosphere gas furnace. In particular, according to the application of the first and second graphite muffle structures, the nitrogen gas inside the first graphite muffle cannot come out, and conversely, a small amount of nitrogen gas can be introduced from the outside of the first graphite muffle to the inside. It has the advantage of saving usage. As the second graphite muffle is installed outside the first graphite muffle, there is an advantage in that the oxygen concentration can be maintained below a set level (eg, 20 ppm, etc.).

In addition, there is an advantage in that the oxygen atmosphere inside the furnace can be significantly lowered by providing the components exposed to nitrogen gas with graphite material for optimization of the inside of the furnace. Specifically, as the material of the nitrogen gas input nozzle, the sampling gas suction nozzle, and the heater support member is made of graphite, there is an advantage in that the interior of the furnace can be optimized.

In addition to the above-described effects, the specific effects of the present invention will be described together while describing specific details for carrying out the invention below.

1 is a diagram schematically illustrating a nitrogen atmosphere gas furnace according to an embodiment of the present invention.
2 to 6 are conceptual views illustrating the detailed configuration of a nitrogen atmosphere gas furnace according to an embodiment of the present invention.

Hereinafter, with reference to the drawings, embodiments of the present invention will be described in detail so that those of ordinary skill in the art to which the present invention pertains can easily implement them. The present invention may be embodied in many different forms and is not limited to the embodiments described herein.

In order to clearly explain the present invention, parts irrelevant to the description are omitted, and the same reference numerals are given to the same or similar elements throughout the specification. Further, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to components of each drawing, the same components may have the same reference numerals as much as possible even though they are indicated in different drawings. In addition, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description may be omitted.

In describing the components of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the elements from other elements, and the nature, order, order, or number of the elements are not limited by the terms. When it is described that a component is “connected”, “coupled” or “connected” to another component, the component may be directly connected or connected to the other component, but other components may be interposed between each component. It will be understood that each component may be “interposed” or “connected”, “coupled” or “connected” through another component.

In addition, in implementing the present invention, components may be subdivided for convenience of description, but these components may be implemented in one device or module, or one component may include a plurality of devices or modules. It may be implemented by being divided into .

1 is a view briefly showing a nitrogen atmosphere gas using a furnace according to an embodiment of the present invention, Figures 2 to 6 are shown to explain the detailed configuration of the nitrogen atmosphere gas using the furnace according to an embodiment of the present invention It is a conceptual diagram.

As shown, the nitrogen atmosphere gas furnace 100 according to an embodiment of the present invention includes a heat treatment furnace body 110 , a heat insulating member 120 , heaters 130 and 140 , and a graphite muffle structure 200 . include

The heat treatment furnace body 110 has a sealed inner space 113 . Specifically, the heat treatment furnace body 110 includes an upper body 111 , a plurality of side wall bodies 112 , and a support 115 as shown.

In this case, the upper body 111 refers to an upper plate member that is closely coupled to the upper surface of the heat insulating member 120 . And the plurality of side wall body 112 refers to a side plate member that is coupled in close contact with both sides of the heat insulating member (120). In addition, the support 115 refers to a member that is in close contact with the lower surface of the heat insulating member 120 and serves to support the heat insulating member 120 to a set height.

The heat insulating member 120 is provided inside the heat treatment furnace body 110, and may be formed to surround the inner space.

As a specific example, the heat insulating member 120 has a rectangular cross-sectional shape surrounding the outside of the inner space 113, preferably made of a ceramic fiber material. The heat insulating member 120 serves to insulate the inner space 113 from the outside.

The heaters 130 and 140 are installed inside the inner space through the heat treatment furnace body 110 and the heat insulating member 120 and refer to a heating device heated to a set temperature.

As a specific example, the heaters 130 and 140 according to the embodiment of the present invention include a plurality of first heaters 130 and a plurality of second heaters 140 .

The plurality of first heaters 130 may protrude through the plurality of sidewall bodies 112 and the heat insulating member 120 to extend in a horizontal direction to a central position of the inner width of the inner space 113 .

The plurality of second heaters 140 are positioned side by side under the plurality of first heaters 130 . Specifically, the plurality of second heaters 140 may protrude through the plurality of side wall bodies 112 and the heat insulating member 120 to extend in the horizontal direction to the central position of the inner width of the inner space 113 . have.

In other words, the plurality of first heaters 130 are located at a predetermined height above the sealed inner space provided inside the heat insulating member 120 , and each of the plurality of first heaters 130 has left and right side wall bodies ( 112) and the heat insulating member 120 in the horizontal direction and has a structure that protrudes to face to the central position of the inner width of the inner space (113).

In addition, the plurality of second heaters 140 are positioned parallel to the lower side of the plurality of first heaters 130 , and each of the plurality of second heaters 140 includes a left and right side wall body 112 and a heat insulating member ( 120) in the horizontal direction and has a structure that protrudes so as to face the central position of the inner width of the inner space 113.

And a first graphite muffle 210 to be described later is positioned through a predetermined space provided between the plurality of first heaters 130 and the plurality of second heaters 140, and the temperature of the nitrogen gas atmosphere forming space is set to the set temperature. can be heated.

For example, the plurality of first and second heaters 130 and 140 may use a silicon carbide (SiC) heater. However, the present invention is not limited thereto, and various heater devices obvious to those skilled in the art may be used.

The graphite muffle structure 200 may be located inside the heat insulating member 120 .

The graphite muffle structure 200 forms a closed space 215 of a nitrogen gas atmosphere by assembling a plurality of graphite units divided for each zone, and has a structure for maintaining the interior of the furnace optimally.

In addition, the graphite muffle structure 200 is provided with a conveyor (not shown) for transferring the heat treatment object in the enclosed space (215). The conveyor is configured to be transported through the closed space 215 of the graphite muffle structure 200, and may have various shapes apparent to those skilled in the art.

Specifically, the graphite muffle structure 200 according to the embodiment of the present invention includes a first graphite muffle 210 and a second graphite muffle 220 .

The first graphite muffle 210 is installed to be located in the center of the inner space 113 provided inside the heat insulating member 120 , and provides a closed space 215 in a nitrogen gas atmosphere. That is, the first graphite muffle 210 has the advantage of lowering the oxygen concentration inside the sealed space 215 and securing a nitrogen atmosphere.

The second graphite muffle 220 has a structure arranged in close contact along the inner wall surface of the heat insulating member 120 . Accordingly, the second graphite muffle 220 is sealed in a structure surrounding the inner space 113 in which the first graphite muffle 210 is installed.

As such, the graphite muffle structure 200 according to the embodiment of the present invention has the advantage of being able to reduce the oxygen atmosphere inside the furnace to at least 20 ppm or less by combining with oxygen in the atmosphere to generate CO. According to the prefabricated form, there were concerns about the disadvantage of low airtightness compared to the existing one-piece metal muffle structure.

Therefore, in the present invention, the airtightness can be sufficiently improved by simultaneously adopting the second graphite muffle together with the first graphite muffle 210 .

On the other hand, since the first graphite muffle 210 and the second graphite muffle 220 are both made of a prefabricated coupling structure, there is an advantage that partial replacement is possible in case of damage.

As a specific example, the first graphite muffle 210 includes a first upper graphite unit 211 , a first lower graphite unit 212 , and a first side graphite unit 213 .

Here, the first upper graphite unit 211 is horizontally disposed on the upper portion of the closed space 215 . In addition, the first lower graphite unit 212 may be horizontally disposed in the lower portion of the closed space 215 and installed to face the first upper graphite unit 211 with a length corresponding to the first upper graphite unit 211 . In addition, the first side graphite unit 213 may be assembled in a direction crossing both ends of the first upper graphite unit 211 and the first lower graphite unit 212 .

The second graphite muffle 220 includes a second upper graphite unit 221 , a second lower graphite unit 222 , and a second side graphite unit 223 .

Here, the second upper graphite unit 221 refers to an assembly part made of a graphite material that is closely coupled to the heat insulating member 120 at a predetermined distance from the first upper graphite unit 211 . In addition, the second lower graphite unit 222 refers to an assembly part made of graphite that is closely coupled to the heat insulating member 120 at a predetermined interval from the second upper graphite unit 221 . And the second side graphite unit 223 refers to an assembly part made of graphite material that is assembled in a direction crossing both ends of the second upper graphite unit 221 and the second lower graphite unit 222 .

Next, the overall configuration of the nitrogen atmosphere gas furnace 100 according to an embodiment of the present invention, a coupling relationship between each configuration, and each function will be described.

Referring to FIG. 2 , the arrangement position and shape of the first graphite muffle 210 can be confirmed.

The first graphite muffle 210 is configured to have a graphite material as a whole as described above, and has a prefabricated structure that can be partially replaced when damaged, so that maintenance costs are significantly reduced.

For example, the first upper graphite unit 211 is connected to the first side graphite unit 213 through assembly, and the first step 2111 and the first protrusion 2113 are the second step 2131 . and the second protrusion 2133 and the stepwise combination in the shape of a, it is possible to secure the airtightness at the assembly site.

Referring to FIG. 3 , a support member 230 may be further included to reinforce the prefabricated structure of the first graphite muffle 210 .

The support member 230 reinforces and supports the assembly structure of the first graphite muffle 210 and is made of a graphite material.

Specifically, the support member 230 includes a horizontal coupling part 231 coupled to cover the upper portion of the first upper graphite unit 211 from the outside, and the first side surface bent downward from both ends of the horizontal coupling part 231 . It includes a bent extension part 233 that is fixed by wrapping a part of the graphite unit 213 .

And the support member 230 further includes a standing portion 235 to position and support the lower portion of the first lower graphite unit 212 on a predetermined height.

At this time, the horizontal coupling portion 231 , the bent extension portion 233 , and the standing portion 235 are all made of a graphite material and have the advantage of significantly lowering the oxygen concentration.

Referring to FIG. 4 , the arrangement position and shape of the second graphite muffle 220 can be confirmed.

The second graphite muffle 220 is configured to have a graphite material as a whole as described above, and has a prefabricated structure that can be partially replaced when damaged, thereby significantly reducing maintenance costs.

In addition, the second graphite muffle 220 blocks the inflow of oxygen from the outside, and fundamentally blocks the nitrogen gas flowing into the outside.

In particular, the nitrogen gas inside the sealed space 215 is prevented from coming out of the first graphite muffle 210, and a small amount of nitrogen gas is introduced into the sealed space 215 from the outside of the first graphite muffle 210. This has the advantage of reducing the amount of nitrogen gas used.

Referring to FIG. 5 , according to the present invention, the furnace 100 using nitrogen atmosphere gas further includes a first heater support member 241 and a second heater support member 243 .

The first heater supporting member 241 is a member supporting the first heater 130 by being in contact with the lower portion of the first heater 130 inside the heat insulating member 120 , and it is not necessarily limited to the illustrated shape. .

For example, the first heater support member 241 is interposed between the upper surface of the first upper graphite unit 211 and the lower surface of the first heater 130 to structurally stably support the first heater 130 . plays a supporting role. And the first heater support member 241 may be made of a graphite material to provide a function of lowering the oxygen concentration.

The second heater support member 243 is a member in the shape of a pedestal for supporting the second heater 140 by being in contact with the lower portion of the second heater 140 inside the heat insulating member 120 . For example, the second heater support member 243 may be positioned between the structure protruding upward from the top of the support 115 and the second heater 140 as shown in FIG. 5 , the first heater support member As in (241), it is made of a graphite material and can contribute to lowering the oxygen concentration.

In addition, referring to FIG. 5 , the furnace 100 using nitrogen atmosphere gas according to an embodiment of the present invention further includes a sampling gas suction nozzle 250 .

The sampling gas suction nozzle 250 vertically penetrates the width centers of the first upper graphite unit 211 and the second upper graphite unit 221 to communicate from the outside into the sealed space 215 . In this way, the sampling gas suction nozzle 250 may be connected to the sampling gas suction port 151 . In addition, the sampling gas suction nozzle 250 according to the embodiment of the present invention is made of a graphite material to reduce the oxygen concentration and optimize the nitrogen atmosphere gas.

In addition, referring to FIG. 5 , the nitrogen atmosphere gas using furnace 100 according to an embodiment of the present invention includes a plurality of nitrogen gas input nozzles 260 .

The plurality of nitrogen gas input nozzles 260 are respectively formed at positions symmetrical to both sides with respect to the sampling gas suction nozzle 250 . And the plurality of nitrogen gas input nozzles 260 are formed in communication with the inside of the second graphite muffle 220 by penetrating the second upper graphite unit 221 up and down, and may be connected to the nitrogen gas inlet 161 . At this time, each of the plurality of nitrogen gas input nozzles 260 may be made of a graphite material. In this way, by providing the composition of the nitrogen gas input nozzle 260, the sampling gas suction nozzle, the support member 230, and the heater support member 240 entirely of graphite material, the oxygen atmosphere concentration inside the furnace can be further reduced. Confidentiality can be improved.

6 is a view showing a side assembly shape of a graphite muffle structure included in a nitrogen atmosphere gas using furnace according to an embodiment of the present invention.

As shown, the graphite muffle structure 200 includes a first graphite muffle 210 and a second graphite muffle 220 . The first graphite muffle 210 and the second graphite muffle 220 have an advantage that they can be partially replaced in case of damage due to external factors such as impact because they are all assembled structures. Accordingly, there is an advantageous effect that the maintenance cost is reduced compared to the conventional one-piece structure.

In addition, since the first graphite muffle 210 and the second graphite muffle 220 have a double structure, the atmosphere in the furnace is extremely excellent, and there is an advantageous effect of reducing the amount of nitrogen gas used. Even, the support member 230, the heater support member 240, the sampling gas suction nozzle (250, see FIG. 5), and the nitrogen gas input nozzle (260, see FIG. 5) are all made of graphite, which greatly increases the oxygen concentration. It has the advantage of lowering and reducing the amount of nitrogen gas used.

As described above, according to the configuration and operation of the present invention, it is possible to significantly lower the oxygen concentration in the furnace by applying the graphite muffle structure, and thus there is an advantage that the nitrogen atmosphere gas furnace can be optimized.

As a specific example, in the case of the nitrogen atmosphere gas furnace according to the first embodiment of the present invention, it is possible to maintain an optimal internal atmosphere of the furnace with a minimum amount of nitrogen gas as a double graphite muffle type.

In particular, the graphite muffle structure combines with oxygen in the atmosphere to generate CO, thereby lowering the oxygen atmosphere inside the furnace to at least 20 ppm or less. have.

Accordingly, according to the present invention, the first and second graphite muffle structures are applied, and the configuration of the heater support, nitrogen gas input nozzle, sampling gas suction nozzle, support member, and heater support member is made of graphite material to significantly increase the oxygen atmosphere concentration. It is possible to improve the airtightness while lowering it.

For example, the first graphite muffle is manufactured in a prefabricated manner, and can be partially replaced when damaged. However, in the case of this prefabricated structure, there is a disadvantage in that the airtightness is low compared to the conventional metal material integrated muffle, but the airtightness can be sufficiently improved by additionally configuring the second graphite muffle surrounding the outer periphery together with the first graphite muffle.

The second graphite muffle is also manufactured in a prefabricated manner, so that it can be partially replaced in case of damage, making maintenance work simple and cost reduction possible.

And in order to structurally reinforce the first graphite muffle of the prefabricated structure, a support member is further installed for each assembly section, and the material of the horizontal coupling part, the bending extension part, and the standing part constituting the support member is also composed of graphite and oxygen concentration can be lowered and semi-permanent use is possible.

The second graphite muffle may serve to block oxygen to the outside and fundamentally block nitrogen gas flowing to the outside of the first graphite muffle, thereby optimizing the nitrogen atmosphere gas furnace.

As such, according to the application of the first and second graphite muffle structures, the nitrogen gas inside the first graphite muffle cannot come out, and conversely, a small amount of nitrogen gas can be introduced from the outside of the first graphite muffle to the inside. consumption can be saved. As the second graphite muffle is installed outside the first graphite muffle, the oxygen concentration can be maintained below a set level (eg, 20 ppm, etc.).

And by providing the components exposed to nitrogen gas in graphite material for optimization of the inside of the furnace, it is possible to significantly lower the oxygen atmosphere inside the furnace.

Specifically, as the material of the nitrogen gas input nozzle, the sampling gas suction nozzle, and the heater support member is made of graphite, optimization of the inside of the furnace can be realized.

As described above, the present invention has been described with reference to the illustrated drawings, but the present invention is not limited by the embodiments and drawings disclosed in the present specification. It is obvious that variations can be made. In addition, even if the effect of the configuration of the present invention is not explicitly described and described while describing the embodiment of the present invention, it is natural that the effect predictable by the configuration should also be recognized.

100: furnace using nitrogen atmosphere gas
110: heat treatment furnace body
111: upper body
112: side wall body
113: inner space
115: support
120: insulation member
130: first heater
140: second heater
151: sampling gas inlet
161: nitrogen gas inlet
200: graphite muffle structure
210: first graphite muffle
211: first upper graphite unit
2111: first step part
2113: first protrusion
2131: second step portion
2133: second protrusion
212: first lower graphite unit
213: first side graphite unit
215: inner space
220: second graphite muffle
221: second upper graphite unit
222: second lower graphite unit
223: second side graphite unit
230: support member
231: horizontal coupling part
233: bend extension
235: standing tongue
240: heater support member
241: first heater support member
243: second heater support member
250: sampling gas suction nozzle
260: nitrogen gas input nozzle

Claims (10)

a heat treatment furnace body having an internal space sealed from the outside;
a heat insulating member provided inside the body of the heat treatment furnace and formed to surround the inner space;
a heater installed inside the inner space through the heat treatment furnace body and the heat insulating member and heated to a set temperature; and
a graphite muffle structure located inside the heat insulating member, forming a closed space in a nitrogen gas atmosphere by assembling a plurality of graphite units divided for each zone, and having a conveyor to which a heat treatment object is transferred inside the closed space;
A nitrogen atmosphere gas furnace comprising a.
According to claim 1,
The heat insulating member, characterized in that made of a rectangular ceramic fiber material surrounding the outside of the inner space
Furnace using nitrogen atmosphere gas.
3. The method of claim 2,
The heat treatment furnace body,
an upper body coupled to the upper surface of the insulating member in close contact;
a plurality of side wall bodies coupled in close contact with both sides of the heat insulating member; and
a support in close contact with the lower surface of the heat insulating member to support the heat insulating member at a set height;
A nitrogen atmosphere gas furnace comprising a.
4. The method of claim 3,
The heater is
a plurality of first heaters protruding through the plurality of sidewall bodies and the heat insulating member and extending in a horizontal direction to a central position of an inner width of the inner space;
a first heater support member supporting the first heater and made of a graphite material;
a plurality of second heaters positioned side by side under the plurality of first heaters and protruding through the plurality of sidewall bodies and the heat insulating member to extend in a horizontal direction to a central position of an inner width of the inner space; and
a second heater support member supporting the second heater and made of a graphite material;
A nitrogen atmosphere gas furnace comprising a.
According to claim 1,
The graphite muffle structure is
a first graphite muffle installed to be located in the center of the inner space provided inside the heat insulating member and providing a closed space of a nitrogen gas atmosphere; and
a second graphite muffle disposed in close contact along the inner wall surface of the heat insulating member and enclosing and sealing the inner space in which the first graphite muffle is installed;
A nitrogen atmosphere gas furnace comprising a.
6. The method of claim 5,
The first graphite muffle,
a first upper graphite unit horizontally disposed on an upper portion of the closed space;
a first lower graphite unit that is horizontally disposed in the lower portion of the closed space and is installed to face the first upper graphite unit with a length corresponding to that of the first upper graphite unit; and
a first side graphite unit assembled in a direction crossing both ends of the first upper graphite unit and the first lower graphite unit;
A nitrogen atmosphere gas furnace comprising a.
7. The method of claim 6,
a support member for reinforcing and supporting the assembly structure of the first graphite muffle and made of a graphite material;
A nitrogen atmosphere gas furnace further comprising a.
7. The method of claim 6,
The second graphite muffle,
a second upper graphite unit closely coupled to the heat insulating member at a predetermined distance from the first upper graphite unit;
a second lower graphite unit closely coupled to the heat insulating member at a predetermined distance from the second upper graphite unit;
a second side graphite unit assembled in a direction crossing both ends of the second upper graphite unit and the second lower graphite unit;
A nitrogen atmosphere gas furnace comprising a.
9. The method of claim 8,
a sampling gas suction nozzle connected to a sampling gas suction port, which is formed to communicate with the inside of the sealed space from the outside through vertical centers of widths of the first upper graphite unit and the second upper graphite unit;
Using nitrogen atmosphere gas further comprising a furnace.
10. The method of claim 9,
It is formed at positions symmetrical on both sides with respect to the sampling gas suction nozzle, and is formed in communication with the inside of the second graphite muffle by penetrating the second upper graphite unit up and down, and connected to the nitrogen gas inlet. nitrogen gas injection nozzle;
Using nitrogen atmosphere gas further comprising a furnace.

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