KR102346328B1 - Planar Heater for Thermal Process of Substrate - Google Patents

Abstract

The present invention provides an upper plate, a lower plate, and a straight part positioned between the upper plate and the lower plate, extending for a predetermined length in the first direction and spaced apart in the second direction, and the linear parts adjacent to each other on both sides of the straight part. A heat wire having a bent part and a support block positioned inside between the upper and lower plates, supporting the bent part on both sides of the hot wire to separate the hot wire from the upper and lower plates, characterized in that it comprises a flat plate for heat treatment. Start the heater.

Description

Planar Heater for Thermal Process of Substrate

The present invention relates to a flat panel heater device for heat treatment of a substrate for heating while stably supporting a large glass substrate in a manufacturing process of a flat panel display device.

A flat panel display device such as an OLED is manufactured using a large glass substrate. In recent years, as the size of the glass substrate is increased, the flat heater for heat treatment of the glass substrate is also increasing in size.

As the flat plate heater becomes larger, various parts of the flat heater may be thermally deformed or damaged at a high temperature due to a difference in thermal expansion coefficient in a series of heat treatment processes including temperature increase and cooling. For example, flat heaters are generally formed by arranging hot wires spaced apart in one direction, and the hot wires may be thermally deformed while heating and cooling are repeated. The hot wire may be short-circuited with an adjacent hot wire as thermal deformation becomes excessive. In addition, if the heating wire is excessively deformed, there may be a problem in uniformly heating the organic substrate seated thereon.

An object of the present invention is to provide a flat plate heater for heat treatment of a substrate that stably supports a heating wire and can be formed in a thin thickness.

Another object of the present invention is to provide a flat panel heater for heat treatment of a substrate capable of preventing deformation of a heating wire and a short circuit due to the deformation of a heating wire in the process of heat treatment of a glass substrate used for manufacturing a flat panel display device.

Another object of the present invention is to provide a flat plate heater for substrate heat treatment capable of uniformly heating a glass substrate by reducing the deformation of the heating wire.

A flat plate heater for heat treatment of a substrate according to an embodiment of the present invention includes an upper plate, a lower plate, a straight part positioned between the upper plate and the lower plate, extending a predetermined length in a first direction, and spaced apart in a second direction, and the straight part A support block positioned inside between the heating wire and the upper plate and the lower plate having bent parts alternately connecting the adjacent straight parts on both sides, and supporting the bent part on both sides of the heating wire to separate the heating wire from the upper plate and the lower plate. It is characterized in that it includes.

In addition, the flat heater may be divided into a plurality of control regions, and the heating wire may be independently controlled for each control region. In addition, the heating wire further includes a plurality of straight parts spaced apart in the second direction while extending in the first direction, and the bent part is coupled to the ends of the two adjacent straight parts and is positioned to be staggered from each other on both sides of the straight part. can

In addition, the support block includes a first end support groove in which the bent portion is supported and a first separation preventing means coupled to the first end support groove to support the bent portion, and a first support arranged in the second direction. It may contain blocks. In this case, the first support block further includes a first inner support groove positioned between the first end support grooves and a first hot wire trench extending in the second direction, the first end support groove and the first end support groove 1 inner support groove is located symmetrically on one side and the other side with respect to the first hot wire trench, and the first end support groove is located on the front side and rear side of the first support block, one side of the first support block or The other side and the front side or the rear side may be opened, and the first internal support groove may be formed to be opened to one side or the other side of the first support block.

In addition, the first separation preventing means includes a first separation preventing pillar extending upwardly from the bottom surface of the first end support groove, and extending from an upper portion of the first separation preventing pillar to the front or rear side of the first supporting block. It may include a first anti-separation bar. In addition, the first separation prevention pillar is formed to have a height smaller than the depth of the first end support groove and a height greater than the diameter of the hot wire, and the first departure prevention bar may extend to a length greater than the radius of the bent portion. have.

The support block is positioned in one corner region and the other corner region between the upper plate and the lower plate, a second end support groove in which the bent part is supported, and a second end support groove in which the bent part is supported and positioned between the second end support groove. Further comprising: an inner support groove; a second support block positioned in the second end support groove; The second end support groove, the second inner support groove, and the second separation preventing means may be formed only on one side or the other side with respect to the second tube trench.

In addition, the support block is located in the front edge region and the rear edge region between the upper plate and the lower plate, a third end support groove positioned on the front or rear side to support the bent portion, and a rear side of the third end support groove or A third internal support groove positioned on the front side, in which the bent part is supported, a third separation preventing means positioned in the third end support groove and supporting the bent part, and a third hot wire trench extending in the second direction, and and a third support block having a third tube trench extending in the first direction from a side opposite to the side on which the third end support groove is formed.

In addition, the flat plate heater for substrate heat treatment is positioned between the first support blocks between the control regions adjacent in the second direction, and an intermediate body plate positioned between the first separation preventing means in the first support block; , a lower extension groove that extends in the first direction from the lower surface of the intermediate body plate and is spaced apart in the second direction to receive a heating wire and penetrates from the front to the rear in a direction perpendicular to the extension direction of the lower extension groove It may further include an intermediate block having a lower extension bar having a lower through hole.

In addition, the flat plate heater for heat treatment of the substrate is formed in a rectangular parallelepiped shape, respectively positioned at four corners between the upper plate and the lower plate, and a corner block having tube fixing grooves formed inward from opposite sides of the upper and lower plates, and the upper and lower plates It may further include a support tube extending along each edge between the two ends are inserted into the tube fixing groove is coupled.

The flat panel heater for heat treatment of a substrate of the present invention includes a separation preventing means for fixing the bent portion of the hot wire to the end of the block supporting the bent portion of the hot wire, thereby reducing deformation of the hot wire and a short circuit.

In addition, the flat heater for substrate heat treatment of the present invention can reduce the deformation of the heating wire to uniformly heat the glass substrate.

In addition, since the edge portion of the flat heater for heat treatment of a substrate of the present invention is supported by the edge support means, deformation can be reduced even when formed to a thin thickness.

1 is a plan view of a flat plate heater for heat treatment of a substrate according to an embodiment of the present invention.
FIG. 2 is an enlarged view of “A” of FIG. 1 .
FIG. 3 is a vertical cross-sectional view taken along line BB of FIG. 2 .
FIG. 4A is a plan view of a first support block constituting the flat heater for substrate heat treatment of FIG. 1 .
Fig. 4b is a front view of the first support block of Fig. 4a;
4C is a perspective view illustrating a coupling relationship between a first support block and a heating wire.
5A is a plan view of a second support block constituting the flat plate heater for heat treatment of the substrate of FIG. 1 .
Fig. 5b is a front view of the second support block of Fig. 5a;
5C is a perspective view illustrating a coupling relationship between a second support block and a heating wire.
6A is a plan view of a third support block constituting the flat heater for substrate heat treatment of FIG. 1 .
Fig. 6b is a front view of the third support block of Fig. 6a;
7A is a front view of an intermediate block constituting a flat plate heater for substrate heat treatment according to an embodiment of the present invention.
FIG. 7B is a vertical cross-sectional view taken along CC of FIG. 7A .
8A is a plan view of a state in which a corner block constituting a flat heater for substrate heat treatment and a ceramic tube are combined according to an embodiment of the present invention.
FIG. 8B is a vertical cross-sectional view taken along DD of FIG. 8A .

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Hereinafter, a structure of a flat plate heater for heat treatment of a substrate according to an embodiment of the present invention will be described.

1 is a plan view of a flat plate heater for heat treatment of a substrate according to an embodiment of the present invention. FIG. 2 is an enlarged view of “A” of FIG. 1 . FIG. 3 is a vertical cross-sectional view taken along line B-B of FIG. 2 . FIG. 4A is a plan view of a first support block constituting the flat heater for substrate heat treatment of FIG. 1 . Fig. 4b is a front view of the first support block of Fig. 4a; 4C is a perspective view illustrating a coupling relationship between a first support block and a heating wire. 5A is a plan view of a second support block constituting the flat plate heater for heat treatment of the substrate of FIG. 1 . Fig. 5b is a front view of the second support block of Fig. 5a; 5C is a perspective view illustrating a coupling relationship between a second support block and a heating wire. 6A is a plan view of a third support block constituting the flat heater for substrate heat treatment of FIG. 1 . Fig. 6b is a front view of the third support block of Fig. 6a; 7A is a front view of an intermediate block constituting a flat plate heater for substrate heat treatment according to an embodiment of the present invention. 7B is a vertical cross-sectional view taken along line C-C of FIG. 7A. 8A is a plan view of a state in which a corner block constituting a flat heater for substrate heat treatment and a ceramic tube are combined according to an embodiment of the present invention. Fig. 8B is a vertical cross-sectional view taken along line D-D of Fig. 8A.

A flat heater 100 for heat treatment of a substrate according to the present invention, with reference to FIGS. 1 to 8B , an upper plate 110 , a lower plate 120 , a heating wire 130 , a first support block 140 , and a second support block 150 and a third support block 160 may be included. In addition, the flat heater 100 for heat treatment of the substrate may further include an intermediate block 170 , a corner block 180 , and a support tube 190 .

Hereinafter, when a configuration common to the first support block 140 , the second support block 150 , and the third support block 160 is described, they may be collectively referred to as a support block. In addition, the first direction refers to the x direction of FIG. 1 , and the second direction refers to the y direction perpendicular to the first direction. On the other hand, in FIGS. 1 and 2, the state without the upper plate 110 is shown based on the state without the upper plate 110 in order to clearly express the structure, and FIG. 3 is a vertical cross-sectional view taken along the BB of FIG. further shown.

The flat heater 100 for heat treatment of the substrate includes a heating wire 130, a first support block 140, a second support block 150, and a third support block 160 between the upper plate 110 and the lower plate 120. can be placed. In addition, in the flat plate heater 100 for heat treatment of the substrate, an intermediate block 170 , a corner block 180 , and a support tube 190 may be further disposed between the upper plate 110 and the lower plate 120 . The flat plate heater 100 for heat treatment of the substrate may heat a flat substrate, such as a glass substrate, seated on the upper plate 110 .

In the flat plate heater 100 for heat treatment of the substrate, a bent portion of the heating wire may be supported by a support block. In addition, the flat heater 100 for heat treatment of the substrate may prevent the heating wire from being separated from the support block by a separation preventing means provided in the support block. In particular, in the flat plate heater 100 for heat treatment of the substrate, the separation preventing means supports the upper portion of the bent portion of the heating wire to prevent the heating wire from being separated from the support block. Accordingly, the flat heater 100 for heat treatment of the substrate may reduce a short circuit caused by deformation or separation of the heating wire. In addition, the flat heater 100 for heat treatment of a substrate according to the present invention can uniformly heat the glass substrate by reducing the non-uniformity of the arrangement of the hot wires that may be caused by the separation of the hot wires.

Since the flat heater 100 for heat treatment of the substrate does not include a separate tube such as a quartz tube for protecting the heating wire, the overall thickness may be reduced. In addition, in the flat heater 100 for heat treatment of the substrate, generation of particles due to the breakage of the quartz tube is prevented. In addition, in the flat heater 100 for heat treatment of the substrate, maintenance time and costs such as repair and replacement according to the breakage of the existing quartz tube can be reduced. In addition, in the flat heater 100 for heat treatment of the substrate, the heating wire is shielded from the outside by the upper plate 110 and the lower plate 120 , the support blocks and the corner block 180 , so that between the upper plate 110 and the lower plate 120 . In the region of , particles due to friction between the heating wire and the support blocks do not flow into the process chamber.

The flat heater 100 for heat treatment of the substrate is divided into a plurality of control regions, for example, it may be divided into three control regions 100a, 100b, and 100c. Each of the control regions may be formed of separate hot wires. That is, each of the control regions may be formed of one hot wire. The control regions 100a, 100b, and 100c may be independently controlled. Accordingly, in the flat plate heater 100 for heat treatment of the substrate, the heating temperature and the temperature increase rate can be independently controlled in the three control regions 100a, 100b, and 100c, and thus various heat treatment profiles can be implemented. The control regions 100a, 100b, and 100c may be divided in various ways according to an area of the flat plate heater 100 for heat treatment of a substrate and an arrangement position in the heat treatment chamber.

The upper plate 110 is formed in a substantially flat plate shape, and may be formed to a predetermined thickness. The upper plate 110 is formed to have a larger area than that of the flat substrate to be heat treated. In addition, the upper plate 110 may be formed to a thickness that is not damaged by physical shock or thermal shock during the heat treatment process. The upper plate 110 may be formed of a ceramic material having a high thermal conductivity and a small thermal expansion coefficient. For example, the top plate 110 is glass, neo-ceramic (Neoceramic), alumina (Al ₂ O ₃ ), silicon carbide (SiC), zirconia (ZrO ₂ ), silicon oxide or quartz (quartz, Quartz) or these It can be formed as a mixture.

The lower plate 120 is formed in a substantially flat plate shape, and may be formed to a predetermined thickness. The lower plate 120 may be formed of a ceramic material having a high thermal conductivity and a small thermal expansion coefficient. In addition, the lower plate 120 may be formed of the same material as the upper plate 110 . The lower plate 120 may be formed in the same shape and area as the upper plate 110 . The lower plate 120 may be spaced apart from the lower part of the upper plate 110 .

The heating wire 130 may include a straight part 131 and a bent part 132 . In addition, the heating wire may further include an extension part 133 . The hot wire may be formed with a plurality of straight portions 131 and a plurality of bent portions 132 . The straight portion 131 may extend to a predetermined length in the first direction and may be spaced apart from each other in the second direction. The bent portions 132 may be formed in a shape to alternately connect the adjacent straight portions 131 on both sides of the straight portions 131 . Accordingly, the heating wire may be formed by being bent in a zigzag shape in the second direction while extending to a predetermined length in the first direction. The bent portion 132 may be formed in an arc shape having a predetermined radius and angle or a semicircular shape having a predetermined radius.

The extension part 133 may extend from the straight part 131 or the bent part 132 to extend outside the upper plate 110 and the lower plate 120 . The extension part 133 may be formed in various lengths and shapes depending on a position connected to the straight part 131 or the bent part 132 .

The number of the heating wires may be formed to correspond to the number of control regions of the flat heater. For example, when the substrate is divided into three control regions 100a, 100b, and 100c, three heating wires may be formed. The heating wire may be independently formed for each of the control regions 100a, 100b, and 100c. That is, the heating wire may be separately formed for each of the control regions 100a, 100b, and 100c. In addition, the heating wire may be formed as a single line by connecting both the bent part 132 and the straight part 131 for each control area. In each of the control regions 100a, 100b, and 100c of the heating wire, both the straight part 131 and the bent part 132 may be connected in series. In addition, the number of straight parts 131 and bent parts 132 may be different from each other according to the area and planar shape of each of the control regions 100a, 100b, and 100c. In addition, at least two of the heating wires may be located in one control area 100a, 100b, 100c. Preferably, the heating wire may be arranged in a horizontal direction between the upper plate 110 and the lower plate 120 to form a planar shape corresponding to the control area. The heating wire may be independently controlled for each control area 100a, 100b, 100c. In the heating wire, the heating temperature and the temperature increase rate may be independently controlled for each control region 100a, 100b, 100c.

The heating wire is a Fe-Cr-Al-based electrical resistance heating element, and can be used at the highest temperature among heat transfer resistance alloys. In addition, the heating wire may be formed of a NiCr alloy, titanium, tungsten alloy, stainless steel, MoSi ₂ or a mixture thereof.

The first support block 140 may include a first support groove 141 and a first separation preventing means 144 with reference to FIGS. 4A to 4C . The first support block 140 may further include a first hot wire trench 147 .

The first support block 140 may be formed in a block shape or a bar shape having a predetermined width, thickness, and length as a whole. The first support block 140 is formed in plurality, and may be located in an inner region between the upper plate 110 and the lower plate 120 . The first support block 140 is not located in the corner region of the upper plate 110 and the lower plate 120 . The first support block 140 supports the bent portions 132 of the hot wire positioned on both sides while being arranged between the bent portions 132 of the hot wire arranged in two rows along the second direction. The first support block 140 is disposed along the second direction to form a first support block line 140a. The first support block lines 140a may be formed in plurality while extending in the second direction and spaced apart from each other in the first direction. A hot wire arrangement line 140b on which a hot wire is disposed may be formed between the first support block lines 140a.

The first support block 140 may be formed of one selected from the group consisting of stainless steel, Inconel, Kovar alloy, tungsten, Hastelloy, and titanium, or a mixture thereof. Also, the first support block 140 may be formed of ceramic. The support block 140 is formed of glass, neo-ceramic (Neoceramic), alumina (Al ₂ O ₃ ), silicon carbide (SiC), zirconia (ZrO ₂ ), silicon oxide or quartz (quartz, Quartz) or a mixture thereof. can be The first support block 140 may be formed of the same material as the upper plate 110 and the lower plate 120 . When the first support block 140 is formed of the same material as the upper plate 110 and the lower plate 120 , there may be no difference in thermal expansion coefficient between them. Accordingly, the first support block 140 , the upper plate 110 , and the lower plate 120 do not undergo thermal deformation and damage at high temperatures due to the difference in thermal expansion coefficients, and the generation of foreign substances can be suppressed.

The first support groove 141 is formed to a predetermined depth in a downward direction from the top surface of the first support block 140 . The first support groove 141 may be formed to a depth greater than a diameter of the heating wire. The first support groove 141 may be formed in a shape required to receive and seat the bent portion 132 of the hot wire based on a planar shape. For example, the first support groove 141 may be formed in a substantially rectangular shape or an arc shape based on a planar shape. In addition, the first support groove 141 may be formed in a rectangular shape corresponding to the radius of the bent portion 132 or having a width greater than twice the radius. Also, the first support groove 141 may be formed in a semicircular shape or an arc shape having a radius corresponding to or greater than the radius of the bent portion 132 . Since the first support groove 141 accommodates and supports the bent portion 132 of the hot wire, it is possible to prevent the hot wire from being deformed and coming into contact with the adjacent hot wire.

The first support grooves 141 may be formed to be spaced apart from each other along the second direction of the first support block 140 . In addition, the first support groove 141 may be formed symmetrically on both sides along the first direction with respect to the center line of the second direction of the first support block 140 . The first support grooves 141 may be symmetrically positioned on both sides in the first direction and spaced apart from each other in the second direction. The first support groove 141 may be opened to one side or the other side of the first support block 140 . The first support groove 141 may be seated by introducing a hot wire into one side and the other side that are opened.

The first support groove 141 may be divided into a first end support groove 142 and a first internal support groove 143 . The first end support groove 142 is a groove positioned at the front and rear sides in the second direction among the first support grooves 141 , and the second inner support groove is located between the first end support grooves 142 . it is home The first end support groove 142 may be opened to one side or the other side of the first support block 140 , respectively, and may be formed to be opened to the front or rear side. In addition, the first end support groove 142 may be formed in a rectangular shape having a width corresponding to the radius of the bent portion 132 . The first end support groove 142 may have an area in which about half of the bent portion 132 is seated.

On the other hand, the first internal support groove 143 may be formed to be opened to only one side or the other side of the first support block 140 . The first internal support groove 143 may be formed in a rectangular shape having a width greater than twice the radius of the bent portion 132 . The first internal support groove 143 may be formed as an area in which the entire bent portion 132 is seated.

The first separation preventing means 144 may include a first separation preventing pillar 145 and a first separation preventing bar 146 . The first separation preventing means 144 may be formed on an upper surface of the first end support groove 142 formed at an end of the first support grooves 141 . The first separation preventing means 144 may be formed at a corner of the first end support groove 142 . The first separation preventing means 144 may be formed in both of the first end support grooves 142 positioned on the front and rear sides. The first separation preventing means 144 may support the bent portion 132 of the heating wire seated in the first end support groove 142 to prevent the heating wire from being separated from the first end support groove 142 .

The first separation preventing pillar 145 may be formed as a pillar having a predetermined height, and may be coupled to protrude upward from the bottom surface of the first end support groove 142 . The first separation preventing pillar 145 may be preferably located at a corner of the first end support groove 142 . The first separation preventing pillar 145 may be formed to have a height greater than a diameter or thickness of the heating wire. In addition, the first separation preventing pillar 145 may be formed to have a height smaller than the depth of the first end support groove 142 . The first separation preventing pillar 145 may support the central portion of the bent portion 132 to effectively support the bent portion 132 .

The first separation prevention bar 146 may be formed in a bar shape and may be coupled to an upper portion of the first separation prevention pillar 145 to extend forward or rearward. That is, the first separation preventing bar 146 may be coupled to extend in an outward direction opposite to the direction in which the first internal support groove 143 is positioned from the upper portion of the first separation preventing pillar 145 . The first separation prevention bar 146 may extend to a length greater than a radius of the bent portion 132 . The first separation prevention bar 146 may prevent the bent portion 132 of the heating wire coupled to the first separation prevention pillar 145 from being separated.

The first hot wire trench 147 may be formed to extend in the second direction from the upper surface of the first support block 140 . The first hot wire trench 147 may be formed to have a width and a depth greater than a diameter of the hot wire. The first hot wire trench 147 may provide a path through which the hot wire passes without protruding from the upper surface of the first support block 140 . The first hot wire trench 147 may provide a path through which the extension part 133 of the hot wire passes. Accordingly, the first support block 140 can stably support the upper plate 110 seated on the upper surface regardless of whether the extension part 133 of the heating wire is drawn out.

The second support block 150 may include a second support groove 151 and a second separation preventing means 154 with reference to FIGS. 5A to 5C . The second support block 150 may further include a second tube trench 157 .

The second support block 150 is formed in plurality, and may be arranged in the second direction in the area of one corner and the other corner between the upper plate 110 and the lower plate 120 . In this case, the second support block 150 may be positioned in a corner region between the upper plate 110 and the lower plate 120 such that the second support groove 151 faces inward. The second support block 150 may shield a corner area between the upper plate 110 and the lower plate 120 . In addition, since the second support block 150 comes into contact with the adjacent second tube trenches 157 , an empty space may not be formed between the second support blocks 150 . Accordingly, it is possible to prevent the heat or fine particles formed by the heating wire from leaking to the outside through between the second support blocks 150 . The second support block 150 is different from the first support block 140 in the position where the second support groove 151 and the second separation preventing means 154 are formed, and other configurations are the same. can be

The second support groove 151 is formed in the same shape as the first support groove 141 . In addition, the second support groove 151 may include a second end support groove 152 and a second inner support groove 153 . Also, the second end support groove 152 and the second inner support groove 153 may be formed in the same manner as the first end support groove 142 and the first inner support groove 143 , respectively. Also, the second tube trench 157 may be formed in the same manner as the first hot wire trench 147 . However, the second support groove 151 may be formed only on one side or the other side of the second support block 150 . That is, the second support groove 151 may be formed only on one side or the other side of the second tube trench 157 . When the second support block 150 is installed between the upper plate 110 and the lower plate 120 , the second support groove 151 may be formed on one side or the other side positioned toward the inner region.

The second separation preventing means 154 may be formed in the same shape as the first departure preventing means 144 . The second separation prevention means 154 may include a second separation prevention pillar 155 and a second separation prevention bar 156 . In addition, the second separation prevention pillar 155 and the second separation prevention bar 156 may be formed in the same manner as the first separation prevention pillar 145 and the first separation prevention bar 146 . However, the second separation preventing means 154 may be formed only on one side or the other side of the second support block 150 in the same way as the second support groove 151 .

The second tube trench 157 may be formed to have a predetermined width and depth on the upper surface of the second support block 150 , and may be formed to penetrate through the front and rear sides in the longitudinal direction. When the second support block 150 is seated between the upper plate 110 and the lower plate 120 , the second tube trenches 157 of the adjacent second support blocks 150 are formed to be connected to each other in the second direction. can be The second tube trench 157 may have the same shape as the first hot wire trench 147 . However, since the support tube 190 is located inside the second tube trench 157 , it may be formed to have a larger width than the first hot wire trench 147 . In addition, the second support block 150 may be formed so that the end of the second tube trench 157 and the second separation prevention bar 156 are positioned on the same line. Accordingly, when the second support block 150 extends in the second direction, the second tube trenches 157 may contact each other when the second separation prevention bars 156 adjacent to each other contact each other.

The second tube trench 157 may provide a path through which the support tube 190 is inserted and supported. The second tube trench 157 may accommodate the support tube 190 without protruding from the upper surface of the second support block 150 .

The third support block 160 may include a third support groove 161 and a third separation preventing means 164 with reference to FIGS. 6A to 6B . The third support block 160 may further include a third hot wire trench 167 , a third tube trench 168 , and a third through hole 169 .

The third support block 160 may be arranged in contact with the front and rear sides of the first support block 140 arranged in the second direction in the area of the front edge and the rear edge between the upper plate 110 and the lower plate 120 . . That is, the third support block 160 may be arranged in contact with the first support block 140 positioned at the frontmost and rearmost side among the first support blocks 140 arranged adjacent to each other in the second direction. can

A plurality of the third support blocks 160 may be positioned to be spaced apart from each other in the first direction in a corner region between the upper plate 110 and the lower plate 120 . Also, the third support block 160 may be positioned such that the third hot ray trench 167 faces the inner region in the second direction. Accordingly, the third hot wire trench 167 of the third support block 160 may be connected to the first hot wire trench 147 of the first support block 140 . Also, the third end support groove of the third support block 160 may be adjacent to the first end support groove 142 of the first support block 140 . In addition, the third support block 160 may be positioned such that a plurality of third tube trenches 168 are arranged in the first direction at the front edge and the rear edge. The third support block 160 may provide a path through which the hot wire drawn out while supporting the hot wire in the front and rear edge areas between the upper plate 110 and the lower plate 120 . In addition, the third support block 160 may support the support tube 190 passing through the front edge and the rear edge.

The third support groove 161 may include a third end support groove 162 and a third internal support groove 163 . The third support groove 161 may support the bent portion 132 of the hot wire. The third end support groove 162 and the third inner support groove 163 may have the same shape as the first end support groove 142 and the first inner support groove 143 , respectively. However, the third end support groove 162 may be formed only on the front or rear side of the third support block 160 . That is, when the third support block 160 is installed between the upper plate 110 and the lower plate 120 , the third end support groove 162 may be formed on the front or rear side facing the inner region.

The third separation preventing means 164 may be formed in the same manner as the first departure preventing means 144 . That is, the third separation prevention means 164 may include a third separation prevention pillar 165 and a third separation prevention bar 166 . In addition, the third separation prevention pillar 165 and the third separation prevention bar 166 may be formed to be the same as or similar to the first separation prevention pillar 145 and the first separation prevention bar 146 . However, the third separation preventing means 164 may be formed only in the third end support groove 162 . The third separation preventing means 164 may be formed only on the front or rear side of the third support block 160 , like the third end support groove 162 .

The third hot wire trench 167 may be formed to have a predetermined width and depth on the upper surface of the third support block 160 , and may be formed to open forward or backward in the longitudinal direction. When the second support block 150 is seated between the upper plate 110 and the lower plate 120 , it may be formed so as to penetrate into the inner region and not open to the outer region. The third hot wire trench 167 may be formed to be connected to the first tube trench of the adjacent first support blocks 140 in the second direction. The third hot wire trench 167 may provide a path through which a hot wire extending from the first tube trench passes. The third hot wire trench 167 may provide a path through which the hot wire passes without protruding from the upper surface of the third support block 160 .

The third tube trench 168 may be formed to extend in the width direction from the side opposite to the side where the third end support groove 162 is formed. That is, when the third support block 160 is seated between the upper plate 110 and the lower plate 120 , the third tube trench 168 may be formed to open in the first direction. The third tube trench 168 may be formed to be opened to one side and the other side of the third support block 160 . The third tube trench 168 provides a path through which the support tube 190 positioned at the front edge and the rear edge of the flat plate heater is inserted. The third tube trench 168 may pass through the third hot wire trench 167 . That is, the third tube trench 168 extends in the first direction from the front or rear side of the third support block 160 , and the third hot wire trench 167 extends in the second direction and has a front end or a rear end. It may penetrate with the third tube trench 168 .

The third through hole 169 may be formed through the third tube trench 168 toward the front side of the third support block 160 . The third through hole 169 may provide a path through which the hot wire passing through the third hot wire trench 167 passes in the front direction. The hot wire passing through the third through hole 169 may extend from a region between the upper plate 110 and the lower plate 120 to an external region.

7A to 7B , the intermediate block 170 may include an intermediate body plate 171 , a lower extension bar 172 , and an upper extension bar 175 . The intermediate block 170 may be positioned between the first support blocks 140 between the control regions 100a, 100b, and 100c adjacent in the second direction. For example, the intermediate block 170 may be located between the first control area 100a and the third control area 100c and between the second area 100b and the third area 100c. The intermediate block 170 may stably support a hot wire drawn out from one control area to an adjacent control area or a hot wire connecting an adjacent hot wire arrangement line 140b in one control area. A hot wire bent in a 90 degree direction between the control areas may be supported. Also, in the intermediate block 170 , the hot wire connecting between the adjacent hot wire arrangement lines 140b may be in contact with the upper plate 110 or the lower plate 120 while flowing up and down at a portion bent by 90 degrees. In addition, the hot wire connecting the hot wire arrangement line 140b has a relatively longer length than the hot wire positioned on the hot wire arrangement line 140b so that it may flow up and down and come into contact with the upper plate 110 or the lower plate 120 . The intermediate block 170 may stably support the heating wire to reduce the contact of the heating wire with the upper plate 110 or the lower plate 120 during the heating process.

The intermediate body plate 171 may be formed in a plate shape having a predetermined width and length. The intermediate body plate 171 may have a width corresponding to the distance between the first support block 140 and the first separation preventing means 144 . The intermediate body plate 171 may be positioned between the first separation preventing means 144 between the first support blocks 140 positioned between the control regions. That is, the intermediate body plate 171 may be positioned such that the four vertices are in contact with the first separation preventing means 144 , respectively.

The lower extension bar 172 may be formed to be spaced apart in the second direction while extending in the first direction from the lower surface of the intermediate body plate 171 . At least two lower extension bars 172 may be formed to form a lower extension groove 173 therebetween. The lower extension bar 172 may be formed to have a height greater than a diameter of the heating wire. Accordingly, the lower extension groove 173 may be supported while receiving the heating wire.

The lower extension bar 172 may include a lower through hole 174 . The lower through-hole 174 may include a lower through-hole 174 penetrating from the front to the rear in a direction perpendicular to the extending direction of the lower extension groove 173 . The lower extension bar 172 may be formed in an arc or square shape having a diameter or a width wider than that of the hot wire. The lower through-holes 174 may be formed in all of the lower extension bars 172 spaced apart from each other to be connected to each other. The lower through-hole 174 may provide a path through which the heating wire extending into the lower extension groove 173 is accommodated and extended when the heating wire is bent in a 90 degree direction.

The upper extension bar 175 may be formed in a bar shape extending in the first direction from the upper surface of the intermediate body plate 171 . The upper extension bar 175 may be located adjacent to the front side of the intermediate body plate 171 .

The upper extension bar 175 may further include an upper through hole 176 . The upper through-hole 176 may be formed in the shape of a hole penetrating from the front to the rear of the upper extension bar 175 . The upper through-hole 176 may be formed to have a width and a height greater than a diameter of the hot wire. The upper through-hole 176 may provide a path through which the heating wire extending into the lower extension groove 173 is accommodated and extended when the heating wire is bent in a 90 degree direction.

The corner block 180 may include a tube fixing groove 181 with reference to FIGS. 8A to 8B . The corner block 180 may be formed in a rectangular parallelepiped shape. The corner block 180 may further include a bolt coupling hole 182 . The corner block 180 may be positioned at four corners between the upper plate 110 and the lower plate 120 . The corner block 180 may support both ends of the four support tubes 190 positioned at the four corners. In addition, the corner block 180 may support the corners of the upper plate 110 and the lower plate 120 . The corner block 180 may be formed of a ceramic material.

The tube fixing groove 181 may be located on two sides of the corner block 180 at a 90 degree angle from the four sides. The tube fixing grooves 181 may be formed on side surfaces opposite to each other when the corner blocks 180 are positioned at the four corners. Accordingly, the tube fixing groove 181 may be coupled to the end of the support tube 190 positioned along the edge. The tube fixing groove 181 may be formed to a predetermined depth in an inward direction from the side. In addition, the tube fixing groove 181 may be formed to penetrate through the lower surface. The tube fixing groove 181 may support an end of the inserted support tube 190 .

The bolt coupling hole 182 may be formed to penetrate from the upper surface to the lower surface of the corner block 180 . The bolt coupling hole 182 may be formed in a region where the tube fixing groove 181 is not formed. The bolt coupling hole 182 may provide a path through which a bolt coupling the corner block 180 with the upper plate 110 or the lower plate 120 passes.

The support tube 190 is formed in a tube shape, and may be positioned to extend to four corner areas between the upper plate 110 and the lower plate 120 . Both ends of the support tube 190 may be supported by being inserted into the tube fixing grooves 181 of the corner block 180 . The support tube 190 may be formed of a ceramic material. The support tube 190 may reinforce the strength by supporting the edge of the flat heater. In addition, the support tube 190 blocks the space between the upper plate 110 and the lower plate 120 at the corners to prevent particles that may be generated due to friction between the hot wire and the support block from coming out.

What has been described above is only one embodiment for implementing the flat plate heater for substrate heat treatment according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the claims below, the gist of the present invention Without departing from, it will be said that the technical spirit of the present invention exists to the extent that various modifications can be made by anyone with ordinary knowledge in the field to which the invention pertains.

100: flat plate heater for substrate heat treatment
110: upper plate 120: lower plate
130: heater module 140: first support block
140a: first support block line 140b: hot wire arrangement line
141: first support groove 142: first end support groove
143: first internal support groove 144: first separation preventing means
145: first departure prevention column 146: first departure prevention bar
147: first hot wire trench 150: second support block
151: second support groove 152: second end support groove
153: second inner support groove 154: second separation preventing means
155: second departure prevention pillar 156: second departure prevention bar
157: second tube trench 160: third support block
161: third support groove 162: third end support groove
163: third inner support groove 164: third separation preventing means
165: a third anti-separation column 166: a third anti-separation bar
167: third hot wire trench 168: third tube trench
169: hot wire through hole 170: middle block
171: middle body plate 172: lower extension bar
173: lower extension groove 174: lower through hole
175: upper extension bar 176: upper through hole
180: corner block 181: tube fixing groove
182: bolted hole 190: support tube

Claims (11)

plate and
bottom plate,
A hot wire positioned between the upper plate and the lower plate and having a straight part spaced apart in a second direction while extending for a predetermined length in a first direction and a bent part alternately connecting the linear parts adjacent to each other on both sides of the straight part; and
and a support block located inside between the upper and lower plates, and supporting the bent portions on both sides of the hot wires to space the hot wires from the upper and lower plates,
The support block includes a first end support groove in which the bent portion is supported, and a first separation preventing means coupled to the first end support groove to support the bent portion, and a first support block arranged in the second direction. includes,
The first separation preventing means includes a first separation preventing pillar extending upwardly from the bottom surface of the first end supporting groove and a direction opposite to a direction in which the first end supporting groove is located on the first separation preventing pillar A flat plate heater for heat treatment of a substrate, characterized in that it includes a first separation prevention bar extending in an outward direction. The method of claim 1,
The flat plate heater is divided into a plurality of control regions, and the heating wire is independently controlled for each control region. 3. The method of claim 2,
The heating wire further includes a plurality of straight parts extending in the first direction and spaced apart from each other in the second direction, wherein the bent parts are coupled to the ends of the two adjacent straight parts and are positioned to be staggered from each other on both sides of the straight part A flat plate heater for substrate heat treatment. delete 3. The method of claim 2,
The first support block further includes a first inner support groove positioned between the first end support grooves and a first hot wire trench extending in the second direction,
The first end support groove and the first inner support groove are symmetrically positioned on one side and the other side with respect to the first hot wire trench,
The first end support groove is positioned on the front and rear sides of the first support block, and one or the other side and the front or rear side of the first support block are opened and formed,
The first internal support groove is a flat plate heater for heat treatment of a substrate, characterized in that it is formed to be opened to one side or the other side of the first support block. delete 3. The method of claim 2,
The first separation prevention pillar is formed with a height smaller than the depth of the first end support groove and a height greater than the diameter of the heating wire,
The first separation preventing bar is a flat heater for substrate heat treatment, characterized in that the extended length greater than the radius of the bent portion. 3. The method of claim 2,
The support block is
A second end support groove positioned in one corner region and the other corner region between the upper plate and the lower plate in which the bent part is supported, and a second internal support groove positioned between the second end support groove and in which the bent part is supported; , Located in the second end support groove, and further comprising a second support block having a second separation preventing means for supporting the bent portion and a second tube trench extending in the second direction,
The second end support groove, the second inner support groove, and the second separation preventing means are formed only on one side or the other side with respect to the second tube trench. Flat plate heater for substrate heat treatment. The method of claim 1,
The support block is
It is located in the front edge region and the rear edge region between the upper plate and the lower plate, the third end support groove is located on the front or the rear side to support the bent part, and the third end support groove is located on the rear or front side, A third internal support groove in which the bent part is supported, a third separation preventing means positioned in the third end support groove and supporting the bent part, and a third hot wire trench and a third end support groove extending in the second direction are provided. A flat plate heater for substrate heat treatment, comprising a third support block having a third tube trench extending in the first direction from the side opposite to the formed side. 3. The method of claim 2,
located between the first support blocks between control regions adjacent in the second direction;
An intermediate body plate positioned between the first separation preventing means in the first support block, and a lower extension extending in the first direction from a lower surface of the intermediate body plate and spaced apart in the second direction to accommodate the heating wire A flat plate heater for substrate heat treatment, further comprising: a middle block having a groove and a lower extension bar having a lower through hole penetrating from the front to the rear in a direction perpendicular to the extending direction of the lower extension groove. 3. The method of claim 2,
A corner block formed in a rectangular parallelepiped shape and positioned at each of the four corners between the upper plate and the lower plate, the corner block having a tube fixing groove formed inward from opposite sides; and
and a support tube extending along each edge between the upper plate and the lower plate and having both ends inserted into the tube fixing groove and coupled thereto.

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