KR20210110179A - Apparatus for supplying gas - Google Patents

Abstract

Provided is a gas supply apparatus allowing a gas container to be automatically connected thereto. The gas supply apparatus in accordance with an embodiment of the present invention includes a mount part installed in a cabinet, a gas supply part installed to be raised and lowered on the mount part, and a gas container fixing part for fixing a gas container to the gas supply part. The gas supply part includes a CGA fastening module installed in the mount unit and coupled to the gas container. The CGA fastening module includes a case, an end cap housing installed in the case to be rotatable, a CGA connector housing installed in the case to be disposed adjacent to the end cap housing, a gasket detection sensor installed on a sensor mounting table of the case to be disposed in a lower portion of the CGA connector housing, and a power transmission part disposed away from the end cap housing and connected to the end cap housing and the CGA connector housing.

Description

Gas supply device {Apparatus for supplying gas}

The present invention relates to a gas supply device.

In general, gas used in a semiconductor manufacturing process is supplied from a gas container in which the gas is stored to a manufacturing facility through a gas pipe. When gas is exhausted and the gas container is replaced, a series of replacement operations consisting of the connection/disconnection of the gas container and the gas pipe, the gasket replacement of the gas pipe connection part, and the opening and closing of the valve provided in the gas container (hereinafter referred to as the gas container replacement operation) occur. In the above operation, since the process gas has properties such as flammability, corrosiveness and toxicity, it can cause great damage to workers and the environment when gas leaks or comes in contact with residue, so considerable caution and safety measures are required during operation.

One of the technical problems to be achieved by the technical idea of the present invention is to provide a gas supply device to which a gas container can be automatically connected.

A gas supply device according to an exemplary embodiment includes a mount unit installed in a cabinet, a gas supply unit installed to be elevated on the mount unit, and a gas vessel fixing unit for fixing the gas vessel to the gas supply unit, wherein the gas The supply unit includes a CGA fastening module installed in the mount unit and coupled to the gas container,

The CGA fastening module includes a case, an end cap housing rotatably installed in the case, a CGA connector housing installed in the case so as to be disposed adjacent to the end cap housing, and a sensor mounting table installed in the CGA case. The gasket detection sensor disposed under the connector housing and a power transmission unit spaced apart from the end cap housing and connected to the end cap housing and the CGA connector housing may be provided.

It is possible to provide a gas supply device to which the gas container can be connected automatically.

The various and beneficial advantages and effects of the present invention are not limited to the above, and will be more easily understood in the course of describing specific embodiments of the present invention.

1 is a perspective view showing a mount unit according to an exemplary embodiment.
Fig. 2 is a bottom perspective view showing a mount unit according to an exemplary embodiment.
3 is a perspective view showing a gas container fixing unit according to an exemplary embodiment.
4 is a perspective view illustrating a CGA fastening module according to an exemplary embodiment.
Fig. 5 is a rear perspective view showing a CGA fastening module according to an exemplary embodiment.
6 is a perspective view illustrating a driving unit for a CGA fastening module according to an exemplary embodiment.
7 is a perspective view showing a CGA pipe fixing module according to an exemplary embodiment.
8 is a perspective view illustrating a CGA pipe according to an exemplary embodiment.
Fig. 9 is a schematic perspective view showing a valve rotation driving module of a gas container according to an exemplary embodiment.
10 is a configuration diagram illustrating a clutch gear and a vertical movement module of a valve rotation driving module of a gas container according to an exemplary embodiment.
11 is a perspective view illustrating a valve opening/closing detection module of a gas container according to an exemplary embodiment.
12 is a configuration diagram illustrating a valve opening/closing detection module of a gas container according to an exemplary embodiment.
Fig. 13 is a schematic perspective view showing a gasket replacement module according to an exemplary embodiment;
14 is a perspective view illustrating an installation state of a gasket detection sensor for a CGA fastening module according to an exemplary embodiment.
15 is a perspective view illustrating an installation position of a gasket detection sensor for a CGA fastening module according to an exemplary embodiment.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

mount part

Fig. 1 is a perspective view showing a mount unit according to an exemplary embodiment, and Fig. 2 is a bottom perspective view showing a mount unit according to an exemplary embodiment.

Referring to FIG. 1 , the mount unit 100 may include a frame 110 , a spring 120 , a pulley 130 , a wire 140 , and a magnet 150 .

As an example, the mount unit 100 may be fixedly installed in a cabinet (not shown) in which a gas container (not shown) is accommodated. In addition, a gas supply unit for automatically connecting a gas container and a pipe (not shown) may be connected to the mount unit 100 . The gas supply unit may be connected to the wire 140 to be spaced apart from the mount unit 100 or may be fixed in contact with the mount unit 100 .

The frame 110 may have a substantially rectangular plate shape. In addition, installation holes 112 in which the spring 120 is installed may be provided at both ends of the bottom surface of the frame 110 . Meanwhile, the installation hole 112 has a size that can accommodate at least one spring 120 , and as an example, four installation holes 112 may be provided at both ends of the frame 110 . In addition, the frame 110 may be provided with a plurality of mounting holes 114 in which the magnet 150 is installed. In addition, the frame 110 may be provided with a mounting hole 116 for installation of the pulley 130 .

The spring 120 is installed in the installation hole 112 of the frame 110 , and one end of the wire 140 is connected to the spring 120 . Accordingly, when the wire 140 is drawn out, the spring 120 is contracted. Thereafter, when the tensile force applied to the wire 140 is removed, the wire 140 may be drawn in by the restoring force of the spring 120 . As an example, the spring 120 may be a coil spring, and the spring 120 may be a static load spring. And, as an example, the spring 120 may be arranged to form a pair of two in one installation hole 112 of the frame 110 .

A plurality of pulleys 130 are rotatably installed in the frame 110 so as to be disposed adjacent to the central portion of the frame 110 and the installation hole 112 of the frame 110 . That is, the pulley 130 is rotatably installed in the mounting hole 116 of the frame 110 . As an example, the number of pulleys 130 corresponding to the number of wires 140 may be installed in the frame 110 . And, the pulley 130 serves to guide the wire 140 and serves to change the direction of the wire 140 at the same time. To this end, a plurality of pulleys 130 may be installed in one mounting hole 116 .

The wire 140 has one end connected to the spring 120 and the other end connected to a gas supply unit (not shown). And, the wire 140 may be drawn out while being guided by the pulley 130 . As an example, eight wires 140 may be provided as an example.

The magnet 150 may be installed in the mounting hole 114 of the frame 110 . As an example, eight magnets 150 may be installed in the frame 110 . On the other hand, the magnet 150 serves to fix the gas supply part by attaching the gas supply part by magnetic force when the gas supply part rises. And, since the gas supply unit is fixed to the magnet 150 by magnetic force, the operator can easily separate the gas supply unit from the mount unit 100 .

As described above, since the wire 140 is connected to the spring 120 , the spring 120 may compensate for the weight of the gas supply unit. And, since the wire 140 is guided by the pulley 130 , the operator can safely raise and lower the gas supply unit. In addition, since the magnet 150 is installed in the frame 110 , when the gas supply unit rises, it is possible to fix the gas supply unit by magnetic force.

Gas container fixing part

3 is a perspective view showing a gas container fixing unit according to an exemplary embodiment.

*

Referring to FIG. 3 , the gas container fixing unit 200 includes, as an example, a main plate 210 , a positioning pin 220 , a stud bolt 230 , a door 240 , and a clamp unit 250 . can be

Meanwhile, when the gas container fixing unit 200 is fixed to the gas container 10 , the gas valve 12 of the gas container 10 is disposed on the upper portion of the main plate 210 . In addition, the gas container fixing part 200 is fixed to the gas supply part and serves to prevent the gas container 10 from being distorted or moved. That is, after the gas container fixing part 200 is installed in the gas container 10 , the operator lowers the gas supply part so that the gas container fixing part 200 and the gas supply part are fixedly coupled.

The main plate 210 is provided with an opening 212 through which the upper end of the gas container 10 enters and exits. That is, the operator rotates the door 240 so that the upper end of the gas container 10 is drawn into the opening 212 while the opening 212 is opened. Thereafter, the door 240 is rotated to close the opening 212 so that the gas container 10 is fixed. On the other hand, a mounting table 214 on which the clamp unit 250 is installed may be provided on one side of the lower surface of the main plate 210 . Meanwhile, a hinge 216 may be installed on the main plate 210 so that the door 240 can be rotatably installed.

A plurality of positioning pins 220 may be provided on the upper surface of the main plate 210 . The positioning pin 220 may have a tapered upper end. That is, when the gas supply unit descends, the upper end of the positioning pin 220 is tapered so that the positioning pin 220 can be easily coupled to the gas supply unit.

The stud bolts 230 are fixedly installed on the upper surface of the main plate 210 and may be provided in plurality. When the gas container fixing part 200 is coupled to the gas supply part, the stud bolt 230 is connected to the pneumatic actuator of the gas supply part, and serves to fix the main plate 210 to the gas supply part.

The door 240 is rotatably installed on the main plate 210 to open and close the opening 212 . To this end, the door 240 may have a shape corresponding to one end of the opening 212 . Meanwhile, a locking part (not shown) coupled to the clamp unit 250 may be provided at one side of the door 240 . That is, in a state in which the door 240 closes the opening 212 , the locking part is caught by the clamp unit 250 , so that the door 240 is not rotated and the closed state of the opening 212 may be maintained.

The clamp unit 250 may be provided on the mounting table 214 of the main plate 210 . As an example, the clamp unit 250 may include a handle 252 , a connection part 254 connected to the handle 252 , and a hook 256 provided at an end of the connection part 254 . The handle 252 is rotatably installed on the main plate 210 . In addition, the connection part 254 connected to the central side of the handle 252 may be moved according to the rotation of the handle 252 . Also, as the hook 256 moves in association with the connection part 254 , it may be caught or released from the locking part of the door 240 .

As described above, the upper end of the gas container 10 is fixed through the door 240 rotatably installed on the main plate 210, and the stud bolt 230 is connected to a pneumatic actuator (not shown) of the gas supply unit. do. Accordingly, when the gas container fixing part 200 is installed in the gas supply part, it is possible to prevent the gas container from being rotated or moved during operation of the gas supply part.

CGA fastening module

Fig. 4 is a perspective view showing a CGA fastening module according to an exemplary embodiment, and Fig. 5 is a rear perspective view showing a CGA fastening module according to an exemplary embodiment.

4 and 5 , the CGA fastening module 300 is, as an example, a case 310 , an end cap housing 320 , a CGA connector housing 330 , a gasket detection sensor 340 , and a power transmission unit 350 . ) may be included.

The case 310 has an internal space, and the end cap housing 320 and the CGA connector housing 330 are rotatably installed on one surface. Meanwhile, a power transmission member (not shown) for transmitting power received from the power transmission unit 350 to the end cap housing 320 and the CGA connector housing 330 may be provided in the inner space of the case 310 . . In addition, the CGA connector 360 connected to the gas container (not shown) may be installed in the case 310 to pass therethrough. Meanwhile, one end of the CGA connector 360 may be disposed to protrude from the CGA connector housing 330 .

The end cap housing 320 is rotatably installed on one surface of the case 310 . Meanwhile, the end cap housing 320 rotates to remove or install the end cap (not shown) of the gas container (not shown). To this end, an entry/exit hole 321 through which the end cap enters and exits may be formed on the front surface of the end cap housing 320 . The entry/exit hole 321 may have a shape corresponding to the shape of the end cap. Meanwhile, the end cap housing 320 may be connected to the power transmission unit 350 and rotated.

In addition, the end cap housing 320 may be provided with a first flexible coupling 322 . The first flexible coupling 322 is an end even when the valve shaft of the gas container and the end cap housing 320 are misaligned, that is, when the valve shaft and the end cap housing 320 of the gas container are eccentric or disposed at an angle to each other. The end cap may be tilted so that the end cap can be easily entered and exited through the entry/exit hole 321 of the cap housing 320 . Accordingly, when the end cap is coupled to the end cap housing 320 , it is possible to prevent a phenomenon in which the screw thread is not properly fastened and thus not separated.

The CGA connector housing 330 is rotatably installed on one surface of the case 310 to be disposed adjacent to the end cap housing 320 . Meanwhile, the CGA connector housing 330 rotates to couple the CGA connector 360 to the gas container. Also, the CGA connector housing 330 may be connected to the power transmission unit 350 and rotated.

In addition, a second flexible coupling 332 may be provided in the CGA connector housing 330 . The second flexible coupling 332 is CGA even when the valve shaft of the gas container and the CGA connector housing 330 are misaligned, that is, the valve shaft of the gas container and the CGA connector housing 330 are eccentric or disposed at an angle to each other. The connector 360 may be tilted to accurately couple to the gas container. Accordingly, when the CGA connector 360 is coupled to the gas container, it is possible to prevent a phenomenon in which the screw threads are not properly fastened and thus not separated.

Meanwhile, a gasket (not shown) may be installed at the end of the CGA connector 360 before being coupled to the gas container. That is, a gasket for preventing gas from leaking from the gas container while the CGA connector 360 is connected to the gas container may be provided at the end of the CGA connector 360 .

The gasket detection sensor 340 is installed on the sensor mounting table 312 provided in the case 310 . In addition, the sensor mount 312 is provided on one surface of the case 310 so as to be disposed under the CGA connector housing 330 . In addition, the gasket detection sensor 340 is installed at the end of the sensor mounting table 312 to detect whether a gasket (not shown) is present at the end of the CGA connector 360 disposed to pass through the CGA connector housing 330 . do.

The power transmission unit 350 may be installed in the case 310 to be disposed adjacent to the end cap housing 320 . Meanwhile, the power transmission unit 350 is connected to a power transmission member (not shown) disposed inside the case 310 to transmit power to the end cap housing 320 and the CGA connector housing 330 . In addition, a gear 352 connected to a power transmission shaft (not shown) may be formed on the inner surface of the power transmission unit 350 .

As described above, since the first and second flexible couplings 322 and 332 are provided in the end cap housing 320 and the CGA connector housing 330, eccentricity and declination that may occur depending on the skill level and assembly level of the operator are compensated. The end cap can be easily detached from the gas container and the CGA connector 360 can be accurately fastened to the gas container.

In addition, by detecting whether a gasket is provided in the CGA connector 360 through the gasket monitoring sensor 340, it is possible to prevent gas leakage due to the gasket not being inserted.

CGA Drive part for fastening module

6 is a perspective view illustrating a driving unit for a CGA fastening module according to an exemplary embodiment.

Referring to FIG. 6 , the driving unit 400 for the CGA fastening module is, as an example, a body 410, a pneumatic actuator 420, a power transmission unit 430, a torque limiter 440, a belt 450, and a fiber sensor ( 460) may be included.

In the main body 410, the CGA fastening module 300 (see FIGS. 4 and 5) is installed, the CGA fastening module fastening part 412, the CGA fastening module fastening part 412 is formed to extend upwardly and an extension having an internal space. 414 and a driving unit installation unit 416 may be provided. Meanwhile, the CGA fastening module fastening part 412 may include a power transmission shaft 412a coupled to the power transmitting part 350 (refer to FIG. 5 ) of the CGA fastening module 300 . A pneumatic actuator 420 may be connected to the power transmission shaft 412a. A plurality of power transmission members (not shown) may be installed in the extension portion 414 , and the power transmission shaft 412a may be rotated by transmitting power to the power transmission shaft 412a through the power transmission member. Meanwhile, a pneumatic actuator 420 , a power transmission unit 430 , and a torque limiter 440 may be installed in the driving unit installation unit 416 .

The pneumatic actuator 420 is installed on one surface of the driving unit installation unit 416 . As an example, the pneumatic actuator 420 may generate a rotational force. On the other hand, the reason for using the pneumatic actuator 420 as a driving source is that when an electric actuator such as a servo motor and a step motor is used for a gas container having flammable characteristics, there is a risk of fire and explosion.

The power transmission unit 430 is connected to the pneumatic actuator 420 and is rotated by the pneumatic actuator 420 . In addition, the power transmission unit 430 may be provided with a belt 450 that transmits the rotational force transmitted from the pneumatic actuator 420 to the torque limiter 440 . To this end, the power transmission unit 430 may be provided with a belt installation groove 432 .

The torque limiter 440 is connected to the power transmission unit 430 through the belt 450 , and may be rotatably installed in the driving unit installation unit 416 . On the other hand, the torque limiter 440 releases the power transmission through a mechanical change when the torque greater than the reference torque is received. On the other hand, the torque limiter 440 may be provided with a deformation part (not shown) in which a mechanical change is made when the torque greater than the reference torque is transmitted.

The belt 450 connects the power transmission unit 430 and the torque limiter 440 . However, in the present embodiment, the case of connecting the power transmission unit 430 and the torque limiter 440 through the belt 450 has been described as an example, but the present invention is not limited thereto and the power transmission unit 430 and the torque limiter 440 are not limited thereto. ) may be connected by a chain or the like.

The fiber sensor 460 is installed on the driving unit installation unit 416 to detect deformation of the deformable portion of the torque limiter 440 . In addition, when the deformation of the deformable portion of the torque limiter 440 is detected by the fiber sensor 460 , the operation of the pneumatic actuator 420 may be stopped by a signal from the fiber sensor 460 . Accordingly, when a torque greater than or equal to the reference torque is provided, the pneumatic actuator 420 may be stopped and no more torque may be transmitted.

As described above, when a torque greater than or equal to the reference torque is provided through the torque limiter 440 , the pneumatic actuator operates within a limited torque range by releasing power transmission, so that the CGA fastening module 300 can operate smoothly. Accordingly, it is possible to supply the gas stably while ensuring the safety of the operator.

CGA Pipe fixing module

7 is a perspective view showing a CGA pipe fixing module according to an exemplary embodiment.

Referring to FIG. 7 , the CGA pipe fixing module 500 may include a fixing part housing 510 , an LM guide 520 , and an elastic body 530 .

The fixed housing 510 is movably installed on the LM guide 520 . Meanwhile, the fixing part housing 510 may be provided with a through hole 512 through which the CGA connector 360 passes. The through hole 512 may have a larger diameter than the CGA pipe 502 . As an example, the fixing unit housing 510 may include a main body 514 and an extension 516 extending from the main body 514 . The extension 516 may be slidably installed on the LM guide 520 . And, the main body 514 has a larger size than the LM guide 520 , and accordingly, the main body 514 of the fixing unit housing 510 may be restricted in movement by the LM guide 520 .

The LM guide 520 serves to guide the fixing part housing 510 . That is, the fixing unit housing 510 moves along the LM guide 520 . On the other hand, when the fixing part housing 510 has to move forward in order to install a gasket (not shown) on the CGA connector 360 , the fixing part housing 510 moves along the LM guide 520 . Thereafter, when the CGA connector 360 is fastened to the gas container, the fixing unit housing 510 moves along the LM guide 520 to retract.

The elastic body 530 is fixedly installed in the through hole 512 of the fixing unit housing 510 . Meanwhile, the CGA pipe 502 may pass through the elastic body 530 . That is, the CGA pipe 502 is fixedly installed to the elastic body 530 . In this way, since the CGA pipe 502 is fixedly installed to the elastic body 530 , the degree of freedom of the CGA pipe 502 can be secured. Through this, deformation of the CGA pipe 502 due to a stroke generated when the CGA connector 360 is fastened to the gas container may be offset by the restoring force of the elastic body 530 .

As described above, it is possible to prevent the CGA pipe 502 from being deformed through the elastic body 530 .

CGA pipe

8 is a perspective view illustrating a CGA pipe according to an exemplary embodiment.

Referring to FIG. 8 , the CGA pipe 600 includes a first CGA pipe 610 , a coil part 620 , a spiral part 630 , and a second CGA pipe 640 .

One end of the first CGA pipe 610 is connected to the coil unit 620 . As an example, the first CGA pipe 610 may have a curved shape. That is, the first CGA pipe 610 has a shape bent from the Z-axis direction to the Y-axis direction.

The coil unit 620 may be disposed in the Z-axis direction. In addition, one end of the coil unit 620 may be connected to the first CGA pipe 610 disposed in the Y-axis direction. In addition, the other end of the coil unit 620 may be connected to the spiral unit 630 . As such, since the coil unit 620 is disposed in the Z-axis direction, it is possible to prevent the coil unit 620 from being permanently deformed while the coil unit 620 is compressed or expanded even when the gas supply unit (not shown) moves up and down. Meanwhile, in the present embodiment, the case where the coil unit 620 has a circular coil shape is described as an example, but it is not limited thereto, and the shape of the coil unit 620 can be variously changed, such as a polygonal coil shape, an elliptical coil shape, etc. do.

The spiral portion 630 may be disposed in the XY plane and may have a rectangular spiral shape. Meanwhile, the spiral part 630 may have one end connected to the coil unit 620 and the other end connected to the second CGA pipe 640 . On the other hand, a portion of the spiral portion 630 may be fixed to the bracket 602 . The bracket 602 may be fixedly installed in the gas supply unit. In this way, since the spiral portion 630 is fixed to the bracket 602, it is possible to prevent the CGA pipe 600 from being deformed by its own weight.

On the other hand, since the spiral portion 630 has a rectangular spiral shape, when the CGA connector 360 connected to the second CGA pipe 640 is fastened to the gas container, the spiral portion ( 630) can be prevented from being permanently deformed. Meanwhile, in the present embodiment, the case where the spiral portion 630 has a rectangular spiral shape is described as an example, but the present invention is not limited thereto, and the spiral portion 630 has a polygonal spiral shape, a circular spiral shape, It can be changed in various ways, such as an elliptical spiral shape.

The second CGA pipe 640 has one end connected to the spiral part 630 and may be disposed in the X-axis direction.

As described above, it is possible to prevent the CGA pipe 600 from being permanently deformed in the Z-axis direction and the X-axis direction through the coil part 620 and the spiral part 630 .

Valve rotation drive module for gas vessel

9 is a schematic perspective view showing a valve rotation driving module of a gas container according to an exemplary embodiment, and FIG. 10 is a configuration diagram showing a clutch gear and a vertical movement module of a valve rotation driving module of a gas container according to an exemplary embodiment .

9 and 10, the valve rotation driving module 700 of the gas container includes an actuator 710, a main gear shaft 720, a main power transmission gear 730, a clutch gear 740, and a vertical movement unit ( 750 ), a plurality of driven gears 760 , may be configured to include a spring unit 770 and a valve handle 780 .

The actuator 710 generates a driving force and is connected to the main power transmission gear 730 . Actuator 710 may be a pneumatic actuator. Meanwhile, the actuator 710 may be fixedly installed on the main frame 702 .

A main power transmission gear 730 , a clutch gear 740 , and a vertical movement unit 750 are installed on the main gear shaft 720 , and the clutch gear 740 and the vertical movement unit 750 are the main gear shaft 720 . It can be installed to be liftable on the That is, the main gear shaft 720 may serve to provide a lift path for the clutch gear 740 and the vertical movement unit 750 when the clutch gear 740 is lifted.

The main power transmission gear 730 is installed on the main gear shaft 720 , and may be connected to the actuator 710 . That is, the main power transmission gear 730 is connected to the actuator 710 so that the main power transmission gear 730 is rotated around the main gear shaft 720 when the actuator 710 is operated.

As described above, the clutch gear 740 is installed on the main gear shaft 720 to be able to move up and down. Meanwhile, when the clutch gear 740 rises and is coupled to the main power transmission gear 730 , it is connected to one of the plurality of driven gears 760 . In this case, the driving force transmitted from the main power transmission gear 730 may be transmitted to the plurality of driven gears 760 via the clutch gear 740 . In addition, when the clutch gear 740 descends and is separated from the main power transmission gear 730 , the clutch gear 740 is separated from the driven gear 760 and the power transmitted from the main power transmission gear 730 is separated from the plurality of driven gears. It may not be transmitted to the gear 760 .

The vertical movement unit 750 is installed to be liftable on the main gear shaft 720 and serves to lift the clutch gear 740 . As an example, the vertical movement unit 750 may include a ring member 752 having a coupling pin 752a and a connection member 754 connected to the ring member 752 . On the other hand, the ring member 752 and the connecting member 754 may be installed to be liftable on the main gear shaft 720 .

Meanwhile, the coupling pin 752a of the ring member 752 is coupled to the clutch gear 740 to connect the clutch gear 740 to the main power transmission gear 730 when the clutch gear 740 rises.

In addition, the connecting member 754 is connected to a driving source (not shown) and serves to transmit a driving force for elevating the connecting member 754 to the clutch gear 740 .

The driven gear 760 serves to transmit the driving force to the valve handle 780 . A plurality of driven gears 760 are provided, and any one of the plurality of driven gears 760 is connected to the clutch gear 740 or spaced apart from the clutch gear 740 .

The spring unit 770 is connected to the valve handle 780, and when the valve handle 780 is rotated to open the gas container by the valve handle 780, as an example, a spring (not shown) made of a rib is compressed. to keep Thereafter, when the connection between the clutch gear 740 and the driven gear 760 is released, the valve handle 780 closes the gas container by the spring restoring force of the spring unit 770 .

The valve handle 780 is connected to one of the spring unit 770 and the plurality of driven gears 760 to rotate the valve of the gas container.

As described above, when the valve of the gas container is opened through the clutch gear 740, the power from the actuator 710 is transmitted to the valve handle, and when the valve of the gas container is closed, the power from the actuator 710 is cut off and The restoring force of the spring of the spring unit 770 is used. This makes it possible to close the valve of the gas container even when the power is cut off in an emergency.

Furthermore, in the prior art, the power of the actuator cannot be cut off, so that power loss occurs due to the load of the actuator, thereby increasing the size of the valve rotation driving module of the gas container. However, since the load of the actuator 710 can be removed through the clutch gear 740, power loss can be reduced.

Valve open/close detection module for gas container

11 is a perspective view illustrating a valve opening/closing detection module of a gas container according to an exemplary embodiment, and FIG. 12 is a configuration diagram illustrating a valve opening/closing detection module of a gas container according to an exemplary embodiment.

11 and 12, the valve opening/closing detection module 800 of the gas container is installed in the main frame 702 (refer to FIG. 9) so as to be connected to the valve rotation driving module 700 (refer to FIG. 9) of the gas container. can be

The valve opening/closing detection module 800 of the gas container may include a bracket 810 , a rotating member 820 , a first fiber sensor 830 , and a second fiber sensor 840 .

The bracket 810 has an internal space and is fixedly installed on the bottom surface of the main frame 702 . As an example, the bracket 810 may have a cylindrical shape with one side open. That is, the rotating member 820 and the first and second fiber sensors 830 and 840 may be disposed in the inner space of the bracket 810 .

The rotating member 820 is connected to any one of a plurality of driven gears 760 (refer to FIG. 9 ) of the valve rotation driving module 700 of the gas container and rotates. That is, the rotating member 820 is coupled to a shaft (not shown) installed on any one of the plurality of driven gears 760 and rotates together with the shaft. To this end, a shaft connection part 821 may be provided on the upper surface of the rotating member 820 .

In addition, a plurality of rotation angle sensing holes 822 may be disposed on the bottom surface of the rotating member 820 to be spaced apart from each other. The rotation angle detection hole 822 may be disposed on the edge of the bottom surface of the rotation member 820 .

On the other hand, the lower surface of the rotating member 820 is provided with an approximately ring-shaped rotation speed detection hole 824 disposed inside the rotation angle detection hole 822 . The rotation speed detection hole 824 is not connected by the support 825 of the rotation member 820 and does not have a complete ring shape.

The first fiber sensor 830 is installed on the bracket 810 to detect the rotation speed detection hole 824 . That is, the first fiber sensor 830 is installed on the bracket 810 to face the rotation speed detection hole 824 . In addition, the first fiber sensor 830 detects the number of rotations of the rotating member 820 by detecting the support 825 of the rotating member 820 . That is, the number of rotations of the rotating member 820 can be sensed according to the number of times the first fiber sensor 830 senses the support 825 .

The second fiber sensor 840 is installed on the bracket 810 to detect the rotation angle detection hole 822 . In other words, the second fiber sensor 840 is installed on the bracket 810 to face the rotation angle detection hole 822 . In addition, the second fiber sensor 840 detects the rotation angle of the rotation member 820 by sensing the rotation angle detection holes 822 arranged to be spaced apart from each other. That is, the second fiber sensor 840 can sense the rotation angle of the rotation member 820 according to the number of detections of the plurality of rotation angle detection holes 822 arranged to have the same spacing.

Meanwhile, the first and second fiber sensors 830 and 840 sense the number of rotations and rotation angles through changes in the amount of light received. However, the present invention is not limited thereto, and the type of the sensor may be changed.

As described above, the rotation angle and number of rotations of the valve handle 780 (refer to FIG. 9 ) may be detected through the first and second fiber sensors 830 and 840 . That is, the rotation angle and number of rotations of the rotating member 820 may be sensed through the first and second fiber sensors 830 and 840 to detect the rotation angle and number of rotations of the valve handle 780 .

gasket replacement module

Fig. 13 is a schematic perspective view showing a gasket replacement module according to an exemplary embodiment;

Referring to FIG. 13 , the gasket replacement module 900 includes, as an example, a body 910 , a forward/backward actuator 920 , a gasket replacement unit 930 , a gasket magazine 940 , and a gasket removal box 950 . can be configured.

The main body 910 forms the outer shape of the gasket replacement module 900 , and may include a top plate 912 having a plate shape and a side plate 914 extending from one end of the top plate 912 . On the other hand, the forward/backward actuator 920 is installed on the upper surface of the upper plate 912 , and the gasket replacement unit 930 is movably installed on the lower surface of the upper plate 912 . In addition, a gasket magazine 940 is installed on one surface of the side plate 914 to be disposed opposite to the gasket replacement unit 930 , and a gasket removal box 950 is disposed on the lower side of the gasket magazine 940 , the side plate 914 . ) is installed in

The forward/backward actuator 920 is fixedly installed on the upper surface of the upper plate 912 of the main body 910 . In addition, the forward/backward actuator 920 is connected to the gasket replacement unit 930 so that the gasket replacement unit 930 moves forward and backward. That is, when the gasket replacement unit 930 tries to pick up a gasket (not shown) from the gasket magazine 940 , the gasket replacement unit 930 moves forward by the forward/backward actuator 920 . Thereafter, after the gasket is picked up by the gasket replacement unit 930 , the gasket replacement unit 930 moves backward by the forward/backward actuator 920 . As an example, the forward/backward actuator 920 may be formed of a cylinder, and a rod of the forward/backward actuator 920 may be connected to the gasket replacement unit 930 .

The gasket replacement unit 930 is movably installed on the lower surface of the upper plate 912 of the main body 910 . As an example, the gasket replacement unit 930 may include a case 931 , a gasket gripper 932 , a CGA plug 933 , and a phase change actuator 934 .

The case 931 may be installed in the body 910 to be connected to the forward/backward actuator 920 . Meanwhile, the case 931 may have a rectangular box shape having an inner space, and various components for driving the gasket gripper 932 and the CGA plug 933 may be disposed in the inner space of the case 931 .

The gasket gripper 932 is installed on the case 931 to be disposed on the front surface of the case 931 . On the other hand, the gasket gripper 932 is installed in the case 931 so that the position change with the CGA plug 933 is possible. Then, when the case 931 advances and enters the gasket magazine 940 , the gasket gripper 932 picks up the gasket and takes out the gasket. Thereafter, the case 931 moves backward to take out the gasket gripper 932 from the gasket magazine 940 , and then rotates 180 degrees to change the position with the CGA plug 933 . To this end, a gasket gripper 932 is connected to a phase change actuator 934 . As an example, the gasket gripper 932 is installed on a mounting plate (not shown) provided in the case 931 , and the mounting plate is connected to the phase change actuator 934 to be rotated.

The CGA plug 933 is installed in the case 931 to be disposed adjacent to the gasket gripper 932 . Meanwhile, the CGA plug 933 is also connected to the phase change actuator 934 . As an example, the CGA plug 933 is also installed on a mounting plate (not shown) provided in the case 931 , and the mounting plate is connected to the phase change actuator 934 and rotates to change the position with the gasket gripper 932 . have. In addition, the CGA plug 933 is installed in the CGA pipe to prevent the gas remaining in the CGA pipe (not shown) from leaking when the CGA pipe (not shown) is separated from the gas container (not shown).

The gasket magazine 940 is installed on the side plate 914 of the body 910 so as to face the gasket gripper 932 . Meanwhile, a plurality of gaskets may be stored in the gasket magazine 940 .

The gasket removal box 950 is installed on the side plate 914 of the main body 910 to be disposed under the gasket magazine 940 . The gasket gripper 932 stores the used gasket in the gasket removal box 950 .

As described above, the gasket replacement unit 930 is moved forward and backward through the forward/backward actuator 920, and the gasket gripper 932 and the CGA plug 933 are installed in the case 931 so that the mutual position change is possible. Even within one space, the gasket gripper 932 and the CGA plug 933 may smoothly operate.

CGA For fastening modules gasket detection sensor

14 is a perspective view illustrating an installation state of a gasket detection sensor for a CGA fastening module according to an exemplary embodiment, and FIG. 15 is a perspective view illustrating an installation position of a gasket detecting sensor for a CGA fastening module according to an exemplary embodiment.

14 and 15 , the gasket detection sensor 1000 for the CGA fastening module is installed in the case 310 of the CGA fastening module 300 . As an example, the gasket detection sensor 1000 for the CGA fastening module is installed on the sensor mounting table 312 provided in the case 310 . In addition, the gasket detection sensor 1000 for the CGA fastening module serves to detect a gasket installed at the end of the CGA connector 360 disposed through the CGA connector housing 330 . Meanwhile, the gasket is installed on the gland nose 362 protruding from the center of the CGA connector 360 .

However, since the gland nose 362 has a curved surface, when sensing with the gasket detecting sensor 1000 for the CGA fastening module, the amount of light received by the gasket detecting sensor 1000 for the CGA fastening module is high. Accordingly, when the gasket detection sensor 1000 for the CGA fastening module is located at the center of the CGA connector 360 and senses the gland nose 362, it is difficult to distinguish the presence or absence of the gasket. To solve this, the gasket detection sensor 1000 for the CGA fastening module is disposed so as to be eccentric from the center of the CGA connector 360 . Therefore, since the gasket detection sensor 1000 for the CGA fastening module does not sense the gland nose 362, a difference in the amount of light received depending on the presence or absence of the gasket is large, so that the presence or absence of the gasket can be accurately detected.

Additionally, there may be a case where the gasket detection sensor 1000 for the CGA fastening module has difficulty in detecting the gasket due to the tolerance of the gasket. In this case, after adjusting the position of the gasket by rotating the CGA connector 360 through the pneumatic actuator 420 of the driving unit 400 for the CGA fastening module (see FIG. 6 ), the gasket detecting sensor 1000 for the CGA fastening module tightens the gasket. can be detected.

Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and variations are possible within the scope without departing from the technical spirit of the present invention described in the claims. It will be apparent to those of ordinary skill in the art.

100: mount unit
200: gas container fixing part
300: CGA fastening module
400: driving part for CGA fastening module
500: CGA pipe fixing module
600: CGA piping
700: valve rotation driving module of the gas container
800: gas container valve open/close detection module
900: gasket replacement module
1000: Gasket detection sensor for CGA fastening module

Claims (10)

a mount unit installed in the cabinet;
a gas supply unit installed so as to be liftable from the mount unit; and
a gas container fixing part for fixing the gas container to the gas supply part;
includes,
The gas supply unit includes a CGA fastening module installed in the mount unit and detachable from the gas container,
The CGA fastening module is
case;
an end cap housing rotatably installed in the case;
a CGA connector housing installed in the case to be disposed adjacent to the end cap housing;
the gasket detection sensor installed on the sensor mounting stand of the case and disposed under the CGA connector housing; and
a power transmission unit spaced apart from the end cap housing and connected to the end cap housing and the CGA connector housing;
A gas supply device comprising a.
According to claim 1,
A gas supply device provided with an input/exit hole disposed on the front surface of the end cap housing through which the end cap of the gas container enters and exits, and a first flexible coupling for tilting the front end.
According to claim 1,
A gas supply device having a CGA connector installed through the CGA connector housing, and a second flexible coupling for tilting at the front end.
4. The method of claim 3,
The gasket detection sensor is a gas supply device for detecting whether a gasket is present at the end of the CGA connector.
According to claim 1,
The gas supply unit further includes a valve rotation driving module of the gas container disposed adjacent to the CGA fastening module,
The valve rotation driving module of the gas container is
an actuator for generating a driving force;
a main gear shaft connected to the actuator;
a main power transmission gear installed on the main gear shaft;
a clutch gear coupled to or separated from the main power transmission gear;
a vertical movement unit installed on the main gear shaft to elevate the clutch gear; and
a plurality of driven gears connected to the main power transmission gear;
a spring unit connected to any one of the plurality of driven gears; and
a valve handle connected to the spring unit and configured to rotate a valve of the gas container;
A gas supply device comprising a.

6. The method of claim 5,
The vertical movement unit includes a ring member having a coupling pin, and a connecting member connected to the ring member,
The connection member is connected to a driving source and is installed to be liftable on the main power shaft.
According to claim 1,
The gas supply unit further includes the gasket replacement module,
The gasket replacement module is
a body having an upper plate having a plate shape and a side plate extending from one end of the upper plate;
a forward/backward actuator fixedly installed on the upper surface of the upper plate;
a gasket replacement unit connected to the forward/backward actuator to move forward and backward;
a gasket magazine installed on the side plate to face the gasket replacement unit; and
a gasket removal box installed on the side plate so as to be disposed under the gasket magazine;
A gas supply device comprising a.
The method of claim 7, wherein the gasket replacement unit is
a case installed on the lower surface of the upper plate;
a gasket gripper installed on the case so as to be disposed on the front side of the case;
a CGA plug installed in the case to be disposed adjacent to the gasket gripper; and
a phase change actuator coupled to the gasket gripper and the CGA plug;
A gas supply device comprising a.
According to claim 1, wherein the mount portion
a frame having a plate shape and provided with a plurality of mounting holes;
a spring installed in an installation port provided on the frame;
a plurality of pulleys rotatably installed on the frame so as to be disposed adjacent to the installation hole;
a wire having one end connected to the spring and the other end connected to the gas supply unit; and
a magnet installed in a mounting hole in the frame;
A gas supply device comprising a.

10. The method of claim 9,
A gas supply device in which a plurality of pulleys are provided in the mounting hole to change the direction of the wire and guide the wire.

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