KR20210102948A - 구리 및 루테늄을 함유하는 기판의 화학적 기계적 폴리싱 - Google Patents

구리 및 루테늄을 함유하는 기판의 화학적 기계적 폴리싱 Download PDF

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Publication number
KR20210102948A
KR20210102948A KR1020217021707A KR20217021707A KR20210102948A KR 20210102948 A KR20210102948 A KR 20210102948A KR 1020217021707 A KR1020217021707 A KR 1020217021707A KR 20217021707 A KR20217021707 A KR 20217021707A KR 20210102948 A KR20210102948 A KR 20210102948A
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KR
South Korea
Prior art keywords
acid
chemical mechanical
mechanical polishing
cmp
composition
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KR1020217021707A
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English (en)
Korean (ko)
Inventor
하지 오스만 귀벤즈
미하엘 라우터
터 위 웨이
웨이 란 츄
레자 엠 골자리안
율리안 프뢸쓰
레오나르뒤스 뢰니선
Original Assignee
바스프 에스이
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Application filed by 바스프 에스이 filed Critical 바스프 에스이
Publication of KR20210102948A publication Critical patent/KR20210102948A/ko

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
KR1020217021707A 2018-12-12 2019-12-12 구리 및 루테늄을 함유하는 기판의 화학적 기계적 폴리싱 KR20210102948A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18212027.9 2018-12-12
EP18212027 2018-12-12
PCT/EP2019/084771 WO2020120641A1 (en) 2018-12-12 2019-12-12 Chemical mechanical polishing of substrates containing copper and ruthenium

Publications (1)

Publication Number Publication Date
KR20210102948A true KR20210102948A (ko) 2021-08-20

Family

ID=64665164

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217021707A KR20210102948A (ko) 2018-12-12 2019-12-12 구리 및 루테늄을 함유하는 기판의 화학적 기계적 폴리싱

Country Status (8)

Country Link
US (1) US20220049125A1 (ja)
EP (1) EP3894496A1 (ja)
JP (1) JP7504886B2 (ja)
KR (1) KR20210102948A (ja)
CN (1) CN113242890A (ja)
IL (1) IL283791A (ja)
TW (1) TW202028413A (ja)
WO (1) WO2020120641A1 (ja)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5230833A (en) 1989-06-09 1993-07-27 Nalco Chemical Company Low sodium, low metals silica polishing slurries
JP2001144039A (ja) 1999-11-15 2001-05-25 Hitachi Chem Co Ltd 研磨方法
JP3440419B2 (ja) 2001-02-02 2003-08-25 株式会社フジミインコーポレーテッド 研磨用組成物およびそれを用いた研磨方法
US6821897B2 (en) * 2001-12-05 2004-11-23 Cabot Microelectronics Corporation Method for copper CMP using polymeric complexing agents
US6936543B2 (en) * 2002-06-07 2005-08-30 Cabot Microelectronics Corporation CMP method utilizing amphiphilic nonionic surfactants
US6869336B1 (en) 2003-09-18 2005-03-22 Novellus Systems, Inc. Methods and compositions for chemical mechanical planarization of ruthenium
US7265055B2 (en) 2005-10-26 2007-09-04 Cabot Microelectronics Corporation CMP of copper/ruthenium substrates
US20080105652A1 (en) 2006-11-02 2008-05-08 Cabot Microelectronics Corporation CMP of copper/ruthenium/tantalum substrates
JP5333744B2 (ja) 2008-02-18 2013-11-06 Ｊｓｒ株式会社 化学機械研磨用水系分散体、化学機械研磨方法および化学機械研磨用水系分散体の製造方法
EP2539411B1 (en) 2010-02-22 2020-08-05 Basf Se Chemical-mechanical planarization of substrates containing copper, ruthenium, and tantalum layers
JP5141792B2 (ja) * 2010-06-29 2013-02-13 日立化成工業株式会社 Ｃｍｐ研磨液及び研磨方法
US8435896B2 (en) * 2011-03-03 2013-05-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Stable, concentratable chemical mechanical polishing composition and methods relating thereto
US8980750B2 (en) * 2012-07-06 2015-03-17 Basf Se Chemical mechanical polishing (CMP) composition comprising a non-ionic surfactant and a carbonate salt
EP2682440A1 (en) 2012-07-06 2014-01-08 Basf Se A chemical mechanical polishing (cmp) composition comprising a non-ionic surfactant and a carbonate salt
EP3019569B1 (en) * 2013-07-11 2018-05-30 Basf Se Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors
US9299585B2 (en) 2014-07-28 2016-03-29 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method for chemical mechanical polishing substrates containing ruthenium and copper
SG11201804636YA (en) * 2015-12-22 2018-07-30 Basf Se Composition for post chemical-mechanical-polishing cleaning
KR102169835B1 (ko) 2016-06-22 2020-10-26 후지필름 가부시키가이샤 연마액, 화학적 기계적 연마 방법
US10253216B2 (en) 2016-07-01 2019-04-09 Versum Materials Us, Llc Additives for barrier chemical mechanical planarization

Also Published As

Publication number Publication date
JP7504886B2 (ja) 2024-06-24
CN113242890A (zh) 2021-08-10
JP2022512431A (ja) 2022-02-03
TW202028413A (zh) 2020-08-01
IL283791A (en) 2021-07-29
US20220049125A1 (en) 2022-02-17
EP3894496A1 (en) 2021-10-20
WO2020120641A1 (en) 2020-06-18

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