KR20200113543A - Gate valve assembly and water processing system having the same - Google Patents

Abstract

Provided is a gate valve which can prevent inner contamination of a valve chamber. The gate valve comprises: a valve chamber having an inner space and having openings on a first side surface and a second side surface facing each other; a seal plate installed in the inner space of the valve chamber; a valve driving unit moving the seal plate to a closed position of the opening or an open position of the opening; and a passage forming member providing an arbitrary passage connecting the opening of the first side surface and the opening of the second side surface when the seal plate is moved to the open position.

Description

Gate valve and substrate processing system having the same {GATE VALVE ASSEMBLY AND WATER PROCESSING SYSTEM HAVING THE SAME}

The present invention relates to a gate valve and a substrate processing system using the same, and more particularly, to a gate valve disposed between two chambers to open and close an opening formed in two chambers, and a substrate processing system using the same.

In general, semiconductor manufacturing processes for manufacturing semiconductor devices require high precision, so high cleanliness and special manufacturing techniques are required.

For this reason, the semiconductor device is manufactured in a state in which the contact of foreign substances contained in the air is completely blocked, that is, in a vacuum state, thereby enabling the production of products with high product reliability and high degree of completion.

On the other hand, the process of manufacturing a semiconductor device is performed in a process chamber provided with a space sealed with the outside or maintaining a specific pressure according to the characteristics of the manufacturing process. Since wafers must move countless times between the process chamber and the transfer chamber during the manufacturing process, it is very important to open and close the space between the spaces in order to maintain the characteristics of each space. To achieve this purpose, the process chamber and the transfer chamber A gate valve is installed in the transfer path of

By using the gate valve as described above, a process of sucking a fluid containing foreign substances in the process chamber in which the semiconductor device is integrated according to the process process can be performed, and sometimes a process of creating a vacuum state in the process chamber can be performed. Make it possible.

The gate valve that serves this role is being implemented through various embodiments, and as an example of the embodiment, the “substrate processing apparatus with a ground line on the gate valve (Korean Patent Publication 10-2012-0104842)” of the following patent document Has been posted.

However, the conventional gate valve is exposed to the environment in the chamber connected to the gate valve as the inner space of the valve housing is opened when the valve plate is opened, and the valve plate, valve driving unit, etc. located in the space inside the valve housing remain in the chamber. There is a problem of being contaminated or corroded by the fluid.

The present invention is to provide a gate valve capable of preventing fluid from flowing into an inner space of a valve housing, and a substrate processing system having the same.

The present invention is to provide a gate valve through which fluid can pass smoothly through a valve housing, and a substrate processing system having the same.

The problem to be solved by the present invention is not limited thereto, and other problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, a valve chamber having an inner space and having openings on a first side and a second side facing each other; A seal plate installed in the inner space of the valve chamber; A valve driving part for moving the seal plate to a closed position of the opening or an open position of the opening; And a passage forming member providing an arbitrary passage connecting the opening of the first side and the opening of the second side when the seal plate is moved to the open position.

In addition, the passage forming member may include a passage plate; And a plate driving unit for moving the passage plate from the passage position to the standby position so that interference with the passage plate does not occur when the seal plate moves from the open position to the closed position.

Further, the passage plate may include a top plate positioned at an upper portion when the opening is viewed from the front, first and second side plates positioned at left and right, and a bottom plate positioned at a lower portion.

In addition, when the top plate, the first and second side plates, and the bottom plate plate are moved to the passage position, an arbitrary passage connecting the opening of the first side and the opening of the second side may be provided.

In addition, the bottom plate is mounted on the seal plate, and when the seal plate is moved to an open position, the bottom plate may be automatically positioned at a passage position.

In addition, the first side plate and the second side plate are moved by the plate driving unit, and the top plate may be moved in association with movement of the first side plate and the second side plate.

In addition, the first side plate further includes a first roller provided at one end adjacent to the top plate; The second side plate further includes a second roller provided at one end adjacent to the top plate; The top plate further includes fixed links provided at both ends to be inclined downwardly to be connected to the first roller and the second roller; When the first side plate and the second side plate are moved to the blocking position, the plate may be automatically moved to the blocking position while the fixed link is moved by the first roller and the second roller.

In addition, the passage plate may be detachable for maintenance.

In addition, the opening may be formed in a rectangular shape.

According to an embodiment of the present invention, when the seal plate is moved to the open position, the passage forming member provides an arbitrary passage connecting the opening on the first side and the opening on the second side, thereby smoothing the flow of airflow through the valve chamber. It has a special effect of preventing not only damage but also internal contamination of the valve chamber.

The effects of the present invention are not limited to the above-described effects, and effects that are not mentioned will be clearly understood by those of ordinary skill in the art from the present specification and the accompanying drawings.

1 is a schematic diagram schematically showing the configuration of a substrate processing system according to the present invention.
2 and 3 are schematic diagrams schematically showing the configuration of a gate valve assembly according to an embodiment of the present invention.
4 and 5 are schematic diagrams for schematically explaining the configuration and operation of the passage forming member.
6 to 8 are views showing a configuration and operation process according to the first embodiment of the gate valve assembly of the present invention.
9 to 11 are views showing an operation process of the gate valve assembly shown in FIG. 6 from the side.

In the present invention, various transformations may be applied and various embodiments may be provided, and specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to a specific embodiment, it is to be understood to include all conversions, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the present invention, when it is determined that a detailed description of a related known technology may obscure the subject matter of the present invention, a detailed description thereof will be omitted.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. These terms are used only for the purpose of distinguishing one component from another component.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings, and in the description with reference to the accompanying drawings, identical or corresponding components are assigned the same reference numerals and overlapped with them. Description will be omitted.

1 is a schematic diagram schematically showing the configuration of a substrate processing system according to the present invention.

Referring to FIG. 1, a substrate processing system 1 according to an embodiment of the present invention includes first, second and third process chambers 80a, 80b, and 80c, and a transfer chamber 90 disposed therebetween. do.

In the first process chamber 80a, the second process chamber 80b, the third process chamber 80c, and the transfer chamber 90, a first substrate outlet 82 and a second substrate outlet in the form of openings for entering and leaving a substrate, respectively. (92) is provided. A load lock chamber 70 may be provided in front of the transfer chamber 90, and an index 72 on which a plurality of carriers C is mounted may be installed in front of the load lock chamber 70.

The index 72 is also referred to as an equipment front end module (EFEM) and can sometimes be referred to as a load lock chamber. Although not shown, the substrate processing system may include a cooling processing chamber for cooling a substrate or a preheating processing chamber for preheating a substrate, if necessary.

A gate valve assembly 100 may be provided between each of the process chambers 80a, 80b, and 80c and the transfer chamber 90 to open and close the substrate outlets 82 and 92 for input and output of the substrate.

2 and 3 are schematic diagrams schematically showing the configuration of a gate valve assembly according to an embodiment of the present invention.

2 and 3, the gate valve assembly 100 is provided in the valve chamber 110 and the valve chamber 110 provided between the first substrate outlet 82 and the second substrate outlet 92. The seal plate 120 opens and closes the openings 112a and 113a connected to the first substrate outlet 82 and the second substrate outlet 92, and a valve that moves the seal plate 120 to the closed position of the opening or the open position of the opening. The driving unit 130 and the passage forming member 140 may be included.

2 is a view showing a state in which the seal plate has been moved to the closed position. In the gate valve assembly 100, the seal plate 120 is moved by the valve driver 130 while the substrate is processed in the process chamber 100. It rises upward and closes the opening (closed position).

3 is a view showing a state in which the seal plate has been moved to an open position. In the gate valve assembly 100, when a substrate enters or exits between the transfer chamber 200 and the process chamber 100, the seal plate 120 is The lowered state (open position) in the chamber 110 is maintained.

Meanwhile, the passage forming member 140 is installed in the inner space of the valve chamber 110. The passage forming member 140 connects the opening 112a of the first side 112 of the valve chamber 110 and the opening 113a of the second side 113 when the seal plate 120 is moved to the open position. Provide an arbitrary passage (P). Therefore, when the gate valve assembly 100 is opened, it is possible to prevent the pollutants in the process chamber 100 from flowing into the inner space of the valve chamber in advance, and the first side surface ( Gas movement between the opening 112a of 112 and the opening 113a of the second side 113 may be made more smoothly.

4 and 5 are schematic diagrams for schematically explaining the configuration and operation of the passage forming member.

4 and 5, the passage forming member 140 may include a passage plate 150 and a plate driving part 160.

The passage plate 150 may be moved to a passage position (see FIG. 5) and a standby position (see FIG. 4) by each plate driving unit 160. The passage plate 150 includes a top plate 151 positioned at the top, first and second side plates 152 and 153 positioned at the left and right, and a bottom plate 154 positioned at the bottom when viewing the opening 112a from the front. Can include.

For example, the passage plate 150 is moved from the passage position to the standby position so that interference with the seal plate 120 does not occur when the seal plate 120 moves from the open position to the closed position, and the seal plate 120 is in the open position. When moved to, it moves from the standby position to the aisle position. When the passage plates 150 are moved to the passage position, the ends of the adjacent passage plates 150 come into contact with each other, so that the opening 112a of the first side surface 112 and the opening 113a of the second side surface 113 are formed. An arbitrary passage (P) to connect is made.

Meanwhile, in the present embodiment, the seal plate is illustrated and described in a manner in which all two openings are closed, but the present invention is not limited thereto, and a passage forming member may be applied to a method in which only one of the two openings is opened and closed.

6 to 8 are views showing a configuration and operation process according to the first embodiment of the gate valve assembly of the present invention.

6 to 8, the gate valve assembly 100 may include a valve chamber 110, a seal plate 120, a valve driving unit 130, and a passage forming member 140.

The valve chamber 110 may be provided in a substantially rectangular box shape. Openings 112a and 113a are formed on both side surfaces 112 and 113 of the valve chamber 110 to face each other.

The seal plate 120 is located in the inner space of the valve chamber 110. The seal plate 120 opens and closes the openings 112a and 113a of the valve chamber 110 while moving upward or downward by the operation of the valve driving unit 130. For reference, FIG. 6 shows a state in which the seal plate 120 closes the openings 112a and 113a of the valve chamber 110, and FIG. 7 shows the seal plate 120 opens the opening of the valve chamber 110 Show a state. When the seal plate 120 is moved to the closed position, the top plate 151 and the first and second side plates 152 and 153 wait at the standby position so that indirection with the seal plate does not occur.

The passage plate 150 includes a top plate 151, first and second side plates 152 and 153, and a bottom plate 154, and the bottom plate 154 may be mounted on the seal plate 120. When the seal plate 120 is moved to the open position, the bottom plate 154 is automatically positioned to the passage position.

The plate driver 160 is connected to the first and second side plates 152 and 153, respectively. The first and second side plates 152 and 153 may be moved to the passage position and the standby position by the operation of the plate driving unit 160. In this embodiment, the plate driving unit 160 may be an air cylinder. However, the plate driving unit is not limited thereto, and of course, various linear driving devices may be applied.

Meanwhile, the top plate 151 may be moved to a passage position or a standby position in association with movement of the first side plate 152 and the second side plate 153.

According to the present embodiment, the first side plate 152 and the second side plate 153 each include a pair of rollers 172 provided at one end adjacent to the top plate 151. Further, the top plate 151 includes fixing links 174 connected to rollers 172 at both ends, respectively. The fixed ring 1740 may be formed to be inclined downward, and is connected while being inserted between the pair of rollers 172. When the first side plate 152 and the second side plate 153 are in the standby position, The rollers 172 are located at the bottom of the fixed link 174, and when the first side plate 152 and the second side plate 153 are in the passage position, the rollers 172 are at the top of the fixed link 174 Will be located in

According to the configuration as described above, when the first side plate 152 and the second side plate 153 are moved forward to the passage position, the fixed link 174 moves downward in association with the forward movement of the rollers 172, and the top plate 151 can be automatically moved to the aisle position. A guide rail 119 for guiding the movement of the top plate 151 may be provided in the valve chamber 110.

As described above, the passage forming member of the present invention can reduce cost and minimize an installation area by applying a minimum driving unit to move four plates (passage plates) from the standby position to the passage position.

9 to 11 are views showing an operation process of the gate valve assembly shown in FIG. 6 from the side.

9 shows a state in which the openings 112a and 113a are closed, and FIGS. 10 and 11 show a state in which the openings 112a and 113a are open.

When the openings 112a and 113a are opened as the seal plate 120 moves downward, the first side plate 152, the second side plate 153, and the top plate 151 move from the standby position to the passage position. An arbitrary passage P connecting the opening 112a of the first side 112 and the opening 113a of the second side 113 is made by the four plates. For reference, the first side surface 112 of the valve chamber 110 is connected to the first chamber, and the second side surface 113 is connected to the second chamber.

Meanwhile, a cover plate 155 made of the same material as the passage plate may be installed in the openings 112a and 113a, and the passage plate 150 and the cover plate 155 can be detached (replaced) when maintenance is required. Can be provided to

The above description is merely illustrative of the technical idea of the present invention, and those of ordinary skill in the art to which the present invention pertains will be able to make various modifications and variations without departing from the essential characteristics of the present invention. Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but to explain the technical idea, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be interpreted as being included in the scope of the present invention.

100: gate valve assembly 110: valve chamber
120: seal plate 130: valve drive unit
140: passage forming member 150: passage plate
160: plate driving part

Claims (10)

A valve chamber having an inner space and having openings on a first side and a second side opposite to each other;
A seal plate installed in the inner space of the valve chamber;
A valve driving part for moving the seal plate to a closed position of the opening or an open position of the opening; And
And a passage forming member providing an arbitrary passage connecting the opening of the first side and the opening of the second side when the seal plate is moved to the open position. The method of claim 1,
The passage forming member
Passage plate; And
A gate valve comprising a plate driving unit for moving the passage plate from the passage position to the standby position so that interference with the passage plate does not occur when the seal plate moves from an open position to a closed position. The method of claim 2,
The passage plate
A gate valve including a top plate positioned at an upper portion when the opening is viewed from the front, first and second side plates positioned at left and right, and a bottom plate positioned at a lower portion. The method of claim 3,
When the top plate, the first and second side plates, and the bottom plate plate are moved to the passage position, an arbitrary passage connecting the opening of the first side and the opening of the second side is provided. The method of claim 3,
The bottom plate is mounted on the seal plate,
When the seal plate is moved to the open position, the bottom plate is automatically positioned at the passage position. The method of claim 3,
The first side plate and the second side plate
Is moved by the plate driving unit,
The top plate is a gate valve that is moved in association with movement of the first side plate and the second side plate. The method of claim 3,
The first side plate further includes a first roller provided at one end adjacent to the top plate;
The second side plate further includes a second roller provided at one end adjacent to the top plate;
The top plate is
Further comprising a fixed link provided at both ends to be inclined downwardly so as to be connected to the first roller and the second roller;
When the first side plate and the second side plate are moved to the blocking position, the fixed link is moved by the first roller and the second roller, and the plate is automatically moved to the blocking position. The method of claim 1,
The passage plate is a gate valve that is detachable for maintenance. The method of claim 1,
The opening is a gate valve formed in a rectangular shape. In the substrate processing system:
A first chamber having a first opening;
A second chamber having a second opening in communication with the first opening; And
A substrate processing comprising the gate valve according to any one of claims 1 to 9 disposed between the first chamber and the second chamber and opening and closing any one of the first opening and the second opening. system.

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