KR20200086069A - Vacuum Pump - Google Patents

Abstract

The present invention relates to a vacuum pump, which forms a vacuum by ejecting a fluid through a nozzle. The vacuum pump (800) of the present invention comprises: at least one hollow nozzle unit (300) having an air inlet (305) formed at one end and an air outlet (306) formed at the other end, and having a plurality of through holes (312) formed in a longitudinal direction on a side surface thereof; and a chamber (400) having the nozzle unit (300) installed therein. The chamber (400) includes: a first chamber (410) having a first insertion hole (412) through which one end of the nozzle unit (300) is inserted and fixed and a second insertion hole through which the other end of the nozzle unit 300 is inserted and fixed, and forming an inner space (IS) surrounding the side surface of the nozzle unit (300); a second chamber (420) coupled to a first sidewall in which the first insertion hole (412) is formed in the first chamber (410) to form an air inflow passage communicating with the air inlet (305) of the nozzle unit (300), and a vacuum space (VS) for creating a vacuum atmosphere in accordance with air flow through the nozzle unit (300); and a third chamber (430) coupled to a second sidewall in which the second insertion hole is formed in the first chamber (410) to form an air outflow passage communicating with the air outlet (306) of the nozzle unit (300). According to the present invention, the capacity of the vacuum pump can be easily varied.

Description

Vacuum Pump {Vacuum Pump}

The present invention relates to a vacuum pump, and more particularly, to a vacuum pump for ejecting a fluid through a nozzle to form a vacuum.

Vacuum may be defined as a state in a space filled with a low pressure gas at atmospheric pressure, and there are ejectors such as Patent Documents 1 and 2 as means for forming such a vacuum.

The ejector forms a vacuum using compressed air, also called a vacuum generator, and consists of a simple structure of a nozzle and a diffuser.

The nozzle serves to accelerate the flow of compressed air, and the compressed air flows through the nozzle. The diffuser slows the flow rate and draws in the surrounding air to form a vacuum. Air from the diffuser combined with compressed air and ambient air can be discharged through the silencer.

The ejector has no moving parts and has a long life, and since it uses compressed air, the control valve can be common and the degree of vacuum is proportional to the supply pressure of compressed air.

However, the conventional ejector has a problem in that the check valve is installed at the inlet where ambient air flows into the nozzle and the diffuser, thereby limiting the size of the check valve, decreasing the vacuum density, and deteriorating durability.

(Patent Document 1) KR10-1472503 B

(Patent Document 2) KR10-0629994 B

The object of the present invention is to recognize the problems as described above, by forming a nozzle unit and a chamber in which the nozzle unit is installed in a multi-stage structure, and installing a check valve for forming a vacuum in the chamber, forming vacuum in stages such as low vacuum, medium vacuum, and high vacuum. It is possible to provide a vacuum pump that can improve the vacuum tightness and durability by increasing the area of the check valve.

It is also an object of the present invention to provide a vacuum pump that can easily vary the capacity of the vacuum pump by adjusting the number of nozzles installed in the chamber.

The present invention was created to achieve the object of the present invention as described above, the air inlet 305 is formed at one end and the air outlet 306 is formed at the other end, and a plurality of through holes 312 along the longitudinal direction on the side surface. ) Are formed one or more hollow nozzle unit 300; Disclosed is a vacuum pump 800 including a chamber 400 in which the nozzle unit 300 is installed.

In the chamber 400, a first insertion hole 412 through which one end of the nozzle unit 300 is inserted and fixed is fixed, and a second insertion hole through which the other end of the nozzle unit 300 is fixed through insertion, and is formed. The first chamber 410 forming an inner space IS surrounding the side surface of the nozzle part 300 and the first side wall in which the first insertion hole 412 is formed in the first chamber 410 are coupled A second chamber 420 forming an air inflow passage communicating with the air inlet 305 of the nozzle part 300 and a vacuum space VS in which a vacuum atmosphere is formed according to air flow through the nozzle part 300 And, a third chamber 430 of the first chamber 410 is coupled to the second side wall on which the second insertion hole is formed to form an air outflow passage communicating with the air outlet 306 of the nozzle part 300. It can contain.

The first chamber 410 blocks air flow from the inner space IS to the vacuum space VS on the first side wall while air from the vacuum space VS to the inner space IS. A first check valve 610 to enable flow may be installed.

The first chamber 410 divides the inner space IS into a plurality of sub-spaces SS between a plurality of through-holes 312 formed along the longitudinal direction, and the nozzle unit 300 The third insertion hole 416 through-inserted may further include one or more partition walls 212 formed thereon.

A second check valve 620 may be installed at the partition 212 to block air flow in one direction between neighboring sub-spaces SS.

The first chamber 410, the first insertion hole 412 is formed and the first check valve 610 is installed a first sub-chamber (410a) and one that includes the partition 212 The second sub-chamber 410b and the third sub-chamber 410c in which the second insertion hole is formed may be included.

In this case, the first sub-chamber 410a, the second sub-chamber 410b, and the third sub-chamber 410c may be sequentially stacked and combined along the longitudinal direction of the nozzle unit 300. .

The first check valve 610 and the second check valve 620 may be sequentially opened and closed according to the vacuum level formed according to the air flow by the nozzle unit 300.

The cross-sectional area of the air passage formed in the nozzle part 300 and communicating with the through hole 312 may be increased toward the air outlet 306 from the air inlet 305.

The nozzle part 300 includes a plurality of through-hole forming members 310 in which at least one through-hole 312 is formed on a side surface, and at least a part of the through-hole forming member 310 is inserted into the through-hole forming the air passage. A plurality of flow path forming members 320 may be included.

The through hole forming member 310 may be installed between the flow channel forming member 320.

The flow path forming member 320 may be supported by the first insertion hole 412, the second insertion hole 414, and the third insertion hole 416.

A plurality of the first insertion hole 412 and the second insertion hole 414 may be formed.

The vacuum pump 800, the remaining first insertion hole 412 of the plurality of first insertion holes 412 and the plurality of second insertion holes 414, the nozzle portion 300 is not inserted through ) And the second insertion hole 414 may include a closing member 400 through which one end and the other end are respectively inserted through and close the remaining first insertion hole 412 and the second insertion hole 414.

The vacuum pump 800 may further include a silencer 232 installed in the air outflow passage among the third chambers 430 and through which air flowing through the air outflow passage is discharged to the outside.

The first check valve 610 is formed on the first side wall, the first through hole 612 to communicate the inner space (IS) and the vacuum space (VS), and the first through hole 612 And a first check valve member 614 that is opened and closed by the pressure difference between the inner space IS and the vacuum space VS.

The second check valve 620 is formed in the partition wall portion 212 to communicate with neighboring sub-spaces (SS), the second through hole 622, and the second through hole 622 to the neighboring Among the sub-spaces SS, a second check valve member 624 that is retracted from the air inlet 305 and a distant sub-space SS may be included.

In another aspect, the present invention, as a vacuum separator 700 for separating liquid and gas, the main body is formed with an inlet through which the mixture of the liquid and gas is introduced and an accommodation space through which the mixture introduced through the inlet is accommodated Disclosed is a vacuum separator 700 comprising a portion, a vacuum pump 800 installed on the upper side of the main body so that the receiving space and the vacuum space VS communicate with each other.

The vacuum pump according to the present invention is capable of forming vacuums in stages such as low vacuum, medium vacuum, and high vacuum by forming a nozzle unit and a chamber in which the nozzle unit is installed in a multi-stage structure and installing a check valve for vacuum formation in the chamber. It has the advantage of improving the airtightness and durability by increasing the area of.

In addition, the vacuum pump according to the present invention, there is an advantage that can easily vary the capacity of the vacuum pump by adjusting the number of nozzles installed in the chamber.

1A and 1B are perspective and front views showing a vacuum pump according to an embodiment of the present invention.
FIG. 2A is a view showing a cross section along AA in FIG. 1.
FIG. 2B is a view showing a cross section in the BB direction of FIG. 1.
2C is a view showing a modification of FIG. 2B.
3 is an exploded perspective view showing a part of the configuration of the vacuum pump of FIG. 1.
4A is a perspective view showing a part of the configuration of the vacuum pump of FIG. 1.
4B is an exploded perspective view of FIG. 4A.
4C is a cross-sectional view along the CC direction in FIG. 4A.
5 is a cross-sectional view along the DD direction of the vacuum pump of FIG. 3.
6 is a plan view showing a part of the configuration of the vacuum pump of FIG. 3.
7 is a cross-sectional view taken along line EE in FIG. 1.
8 is a perspective view showing a state in which the vacuum separator according to the present invention is coupled to the vacuum pump of FIG. 1.
9 is a cross-sectional view taken along the line I-I in FIG. 8.
10A is a perspective view showing a modification of the vacuum separator of FIG. 8.
10B is a conceptual view showing a flow path including the vacuum separator of FIG. 10A.
11 is a cross-sectional view taken along the line II-II in FIG. 10A.
Fig. 12 is a sectional view taken along the line III-III in Fig. 10A.
13 is a perspective view showing a link assembly that connects two modules in a state in which fluid communication is possible while being isolated from the outside by being coupled to the vacuum pump of FIG. 1.
14 is a perspective view showing the link assembly and the coupling block of FIG. 13.
15 is a cross-sectional view taken along the line IV-IV in FIG. 13.
16 is an exploded perspective view of the link assembly shown in FIG. 13.
17A and 17B are plan and side views showing a main body block in the link assembly of FIG. 16.
18A and 18B are plan and side views showing a coupling block in the link assembly of FIG. 16.

Hereinafter, a vacuum pump and a vacuum separator according to the present invention will be described with reference to the accompanying drawings.

Vacuum pump 800 according to the present invention, as shown in Figures 1 to 8, the air inlet 305 is formed at one end and the air outlet 306 is formed at the other end, a plurality along the longitudinal direction on the side One or more hollow nozzle portion 300 is formed through the hole 312 of the; The nozzle unit 300 includes a chamber 400 installed therein.

The nozzle unit 300, as one or more hollow members are formed with an air inlet 305 at one end, an air outlet 306 at the other end, a plurality of through holes 312 are formed along the longitudinal direction on the side Various configurations are possible.

The air flowing through the air inlet 305 of one end of the nozzle part 300 flows along the air flow path formed by the hollow inside the nozzle part 300 and then discharged to the outside through the air outlet 306 of the other end. Can be.

The plurality of through holes 312 are formed along the longitudinal direction (air flow direction through the nozzle unit 300) on the side surface of the nozzle unit 300 and can communicate with the air passage inside the nozzle unit 300, Accordingly, air around the nozzle unit 300 may be discharged through the air outlet 306 together with air introduced through the air inlet 305 after flowing into the nozzle unit 300 through the through hole 312. .

The cross-sectional area of the air passage may be increased from the air inlet 305 to the air outlet 306. At this time, the cross-sectional area of the air flow path can be varied by varying the diameter DA of the air flow path.

The nozzle part 300 has a larger cross-sectional area of the internal air passage from the air inlet 305 to the air outlet 306, and a plurality of through holes 312 communicating with the air passage on the side length on the side of the nozzle part 300 Various shapes and structures are possible if formed in the direction.

For example, the nozzle unit 300, a plurality of through-hole forming members 310, one or more through-holes 312 are formed on the side, and at least a portion is inserted into the through-hole forming member 310 to form the air passage It may include a plurality of flow path forming member 320.

The through-hole forming member 310 is a hollow column, and each through-hole forming member 310 is preferably formed to have the same outer diameter and inner diameter along the longitudinal direction.

In addition, each of the plurality of through-hole forming members 310 may be configured to have the same shape and size to improve manufacturability.

For example, each through hole forming member 310 may be formed with two through holes 312 along the circumferential direction on the side surface.

The flow path forming member 320 is at least partially inserted into one end of the through hole forming member 310 to form a part of the air flow path of the nozzle unit 300, and various configurations are possible.

At this time, the through-hole forming member 310 may be installed between neighboring flow path forming members 320.

The neighboring flow path forming members 320 may face each other at a distance from each other at a position corresponding to the through hole 312 of the through forming member 310 coupled therebetween.

For example, the nozzle unit 300 may include three through-hole forming members 310 and four through-hole forming members 320, as illustrated in FIGS. 4A through 4C, and each of the channel forming members ( 320) and the through-hole forming member 310 may be alternately formed in a multi-layered structure along the longitudinal direction.

Through this, the flow path forming member 320 and the through hole forming member 310 are alternately positioned so that a plurality of through holes 312 can be positioned along the longitudinal direction of the nozzle unit 300 and through holes 312 and flow passages. The air passages formed by the forming member 320 may communicate with each other.

Among the plurality of flow path forming members 320, one end of the flow path forming member 320 positioned at one end of the nozzle unit 300 may correspond to the air inlet 305 described above, and the plurality of flow path forming members ( Among the 320), the end of the flow path forming member 320 positioned at the other end of the nozzle unit 300 may correspond to the air outlet 306 described above.

A coupling portion coupled to the chamber 400 to be described later may be formed on the outer surface of the flow path forming member 320.

One or more O-ring members 302 may be installed in the coupling portion for close coupling with the chamber 400 described below.

On the other hand, the above-described hole forming member 310 and the channel forming member 320 may be fixedly coupled in various ways such as mutual assembly and adhesion, but may be made of various materials, but preferably made of a metal material for durability and longevity. It can be done.

In addition, a plurality of nozzle units 300 having the above-described configuration may be disposed along the circumferential direction around the first through hole 612.

At this time, the capacity of the vacuum pump 800 is determined by the installation number of the nozzle unit 300.

The chamber 400 is a configuration in which the nozzle unit 300 is installed inside, and various configurations are possible.

For example, the chamber 400 includes a first insertion hole 412 through which one end of the nozzle unit 300 is inserted and fixed, and a second insertion hole 414 through which the other end of the nozzle unit 300 is fixed through insertion. ) Is formed and the first side wall 410 forming the inner space IS surrounding the side surface of the nozzle part 300 and the first side wall of the first chamber 410 having the first insertion hole 412 formed thereon A second chamber 420 which is combined to form an air inlet passage communicating with the air inlet 305 of the nozzle part 300 and a vacuum space VS in which a vacuum atmosphere is formed according to air flow through the nozzle part 300 And, a third chamber 430 coupled to a second side wall in which the second insertion hole 414 of the first chamber 410 is formed to form an air outflow passage communicating with the air outlet 306 of the nozzle unit 300 It may include.

The first chamber 410 has a first insertion hole 412 through which one end of the nozzle unit 300 is inserted and fixed, and a second insertion hole 414 through which the other end of the nozzle unit 300 is inserted through and fixed. This is formed, and a variety of configurations are possible as a configuration for forming an inner space IS surrounding the side surface of the nozzle unit 300.

The first insertion hole 412, one end (air inlet 305 side) of the nozzle unit 300, more specifically, the flow path forming member 320 positioned at one end of the nozzle unit 300 is inserted through As it is a fixed fixture, various configurations are possible.

As shown in FIG. 6, a plurality of first insertion holes 412 for installing a plurality of nozzle units 300 may be formed in the first chamber 410.

The second insertion hole 414, the other end of the nozzle unit 300 (air outlet 306 side), more specifically, the flow path forming member 320 positioned at the other end of the nozzle unit 300 is inserted through Various configurations are possible with fixed fixtures.

2A to 2B, a plurality of second insertion holes 414 for installing a plurality of nozzle units 300 may be formed in the first chamber 410.

That is, the flow path forming member 320 of the nozzle part 300 may be supported by the first insertion hole 412 and the second insertion hole 414 of the corresponding first chamber 410.

At this time, the first chamber 410 may form an internal space IS surrounding the nozzle unit 300 fixed to the first insertion hole 412 and the second insertion hole 414.

The second chamber 420 is coupled to the first side wall in which the first insertion hole 412 of the first chamber 410 is formed, and an air inflow passage and nozzle communicating with the air inlet 305 of the nozzle unit 300 Various configurations are possible with the configuration of forming a vacuum space (VS) in which a vacuum atmosphere is formed according to the air flow through the unit 300.

The second chamber 420 is coupled to the first side wall in which the first insertion hole 412 of the first chamber 410 is formed, so that the air inlet of the nozzle part 300 through the first insertion hole 412 ( 305) and an air inlet space communicating with the air inlet space to form a vacuum space (VS).

The air inlet space is a space in which an air inlet flow path communicating with the air inlet 305 of the nozzle unit 300 is formed, and various shapes and structures are possible.

For example, the second chamber 420, as shown in Figure 5, the first insertion hole 412 and the air inlet space to communicate with the engaging surface coupled to the first side wall of the first chamber 410 A communication hole 426 may be formed. The communication port 426 may be formed in various shapes and sizes according to the arrangement and size of the air inlet space.

At this time, one or more air supply ports 424 coupled to an air supply unit for supplying external air (compressed air) through an air inlet space may be formed on one side of the second chamber 420.

The vacuum space VS is a space in which a vacuum atmosphere is formed according to air flow through the nozzle unit 300, and various configurations are possible.

For example, the second chamber 420, as shown in Figure 5, the inner space (IS) and the vacuum of the first chamber 410 on the engaging surface coupled to the first side wall of the first chamber 410 A communication port 425 communicating the space VS may be formed. The communication port 425 may be formed in various shapes and sizes according to the arrangement and size of the vacuum space VS.

At this time, on one side of the second chamber 420, a component that requires vacuum formation (eg, a component that is coupled to the vacuum separator 700 and needs to form a vacuum formed in the vacuum space VS) (for example, One or more vacuum transmission holes 427 may be formed for delivery to the vacuum separator 700.

The third chamber 430 is coupled to a second side wall in which the second insertion hole is formed in the first chamber 410 to form an air outflow passage communicating with the air outlet 306 of the nozzle unit 300. Configuration is possible.

As an example, the third chamber 430 has an opening 436 formed on a coupling surface with the first chamber 410 to communicate with the air outlet 306 of the nozzle unit 300 inserted into the second insertion hole. On the other side, an outlet 434 through which air discharged through the air outlet 306 is discharged to the outside may be formed.

In this case, the vacuum pump 800 may further include a silencer 232 installed in an air outflow passage of the third chamber 430 and through which air flowing through the air outflow passage is discharged to the outside.

The silencer 232 is configured to reduce noise caused by the discharged air, and various configurations are possible. For example, the silencer 232 may be installed in the above-described outlet 434.

On the other hand, in the vacuum pump 800 including the above-described configuration, the first chamber 410 is the air flow from the inner space (IS) to the vacuum space (VS) of the second chamber 420 on the first side wall. A first check valve 610 may be installed to block air flow from the vacuum space VS to the interior space IS while blocking.

The first check valve 610 is formed on the first side wall to communicate the inner space IS of the first chamber 410 and the vacuum space VS of the second chamber 420. ), and a first check valve member 614 for covering the first through hole 612 on the inner space IS side.

The first through hole 612 may be formed in various shapes and sizes, and may be formed in plural.

For example, as shown in FIG. 6, the first through hole 612 may be formed in a fan shape and may be formed in a plurality in the circumferential direction around the center of the first chamber 410.

The inner space IS of the first chamber 410 and the vacuum space VS of the second chamber 420 may communicate with each other through the first through hole 612.

In the central portion of the first chamber 410, a coupling region 615 coupled with a first check valve member 614, which will be described later, may be formed.

The first check valve member 614 is coupled to the first chamber 410 in the coupling region of the first side wall center portion of the first chamber 410 to form a plurality of first through holes 612 formed along the circumferential direction. It is a check valve member that allows air flow from the vacuum space (VS) to the internal space (IS) while blocking the air flow from the internal space (IS) to the vacuum space (VS). Do.

For example, the first valve member 614 may be a valve plate made of rubber.

On the other hand, the first chamber 410 of the above-described vacuum chamber 10, as shown in Figures 1a to 3 and 7, the longitudinal direction of the nozzle unit 300 (air flow through the nozzle unit 300) A plurality of through-holes 312 formed along the direction) may further include at least one partition 212 that divides the inner space IS of the first chamber 410 into a plurality of sub-spaces SS. Can.

At this time, a third insertion hole 416 through which the nozzle portion 300 is inserted may be formed in the partition wall portion 212.

The partition portion 212 is positioned between neighboring through holes 312 based on the longitudinal direction, and the coupling portion of the flow path forming member 320 of the nozzle portion 300 is supported by the third insertion hole 416. Can be.

At this time, the O-ring member 302 may be installed along the circumference of the outer surface of the flow path forming member 320 for airtightness between the subspaces SS partitioned by the partition 212.

As illustrated in FIGS. 1A to 3 and 7, a second check valve 620 that blocks one-way air flow between neighboring sub-spaces SS may be installed at the partition 212. .

The second check valve 620 is formed in the partition 212, the second through-hole 622 for communicating the adjacent sub-space (SS), and the second through-hole 622 adjacent to the sub-space ( Among the SS) may include a second check valve member 624 that is retracted from the air inlet 305 and the distant subspace SS.

The second through hole 622 may be formed in various shapes and sizes, and may be formed in plural.

For example, as shown in FIG. 6, the second through hole 622 may be formed in a fan shape, and may be formed in a plurality in the circumferential direction around the center of the partition 212.

Neighboring sub-spaces SS may communicate through the second through hole 622.

In the central portion of the partition portion 212, a coupling region 625 coupled with a second check valve member 624, which will be described later, may be formed.

The second check valve member 624, the second through-hole 622 of the neighboring sub-space (SS) of the air inlet 305 and the distant sub-space (SS) side to reopen, the air inlet 305 While blocking the air flow from the sub-space (SS) on the side close to and the sub-space (SS) on the far side, the air inlet (305) and the sub-side (SS) on the far side close to the air inlet (305) Various shapes and materials are possible as a check valve member that enables air flow to the space (SS).

For example, the second valve member 624 may be a valve plate made of rubber.

In one embodiment, the first chamber 410, as shown in Figures 1a to 3 and 7, the first insertion hole 412 is formed and the first check valve 610 is installed first The sub-chamber 410a, one or more second sub-chambers 410b including the partition 212, and a third sub-chamber 410c in which the second insertion hole is formed may be included.

In this case, the first sub-chamber 410a, the second sub-chamber 410b, and the third sub-chamber 410c may be sequentially stacked and combined along the longitudinal direction of the nozzle unit 300.

For example, in the case of FIGS. 1A to 3 and 7, an exemplary embodiment in which two second sub-chambers 410b are sequentially coupled between the first sub-chamber 410a and the third sub-chamber 410c is shown. will be.

Through this, the inner space IS of the first chamber 410 may be divided into three sub-spaces SS arranged in the longitudinal direction of the nozzle unit 300.

In this case, a first check valve 610 and a second check valve 620 may be installed in the first sub-chamber 410a and the second sub-chamber 410b, respectively.

The first check valve 610 and the second check valve 620 may be sequentially opened and closed according to a vacuum level formed according to air flow by the nozzle unit 300.

Hereinafter, a vacuum forming process performed in the vacuum pump 800 including the above-described configuration will be described in detail with reference to FIG. 7.

First, the compressed air is introduced into the air inlet passage through the communication port of the second chamber 420 and the compressed air introduced is introduced into the air passage inside the nozzle part 300 through the air inlet 305 of the nozzle part 300. Flows along.

As the compressed air flows along the air flow path inside the nozzle unit 300, the pressure inside the nozzle unit 300 decreases, and accordingly, the nozzle unit corresponding to the air in the subspace SS of the first chamber 410 It may be introduced into the air passage of the nozzle unit 300 through the through hole 312 of (300).

Through this, the pressure of the subspace SS may be gradually lowered.

Based on FIG. 7, when the vacuum pump 800 additionally includes two second check valves 620 in addition to one first check valve 610, the first check valve 610 and the first according to the vacuum degree The opening and closing operation of the 2 check valve 620 is as follows.

When compressed air is supplied through the second chamber 420, the first check valve 610 and the two second checks as air in the subspace SS flows through the through hole 312 into the nozzle unit 300 The valves 620 are all open.

A second subchamber forming the subspace SS farthest from the air inlet 305 of the nozzle unit 300 when a certain amount of air remains in the subspace SS according to the supply of compressed air. The second check valve 620 installed at 410b is closed first.

When the air in the sub-space SS is lean than the low-vacuum state by introducing more compressed air, the second sub-chamber 410b is formed in the sub-space SS closer to the air inlet 305. The second check valve 620 is then closed.

When compressed air is further introduced in the medium vacuum state, and the sub-space SS becomes a high-vacuum state, the vacuum space VS of the second chamber 420 may be closed by closing the first check valve 610.

Compressed air introduced through the second chamber 420 and air introduced into the nozzle unit 300 through the through hole 312 are combined and then discharged to the outside through the silencer 232 through the outlet of the third chamber 430. Can be.

The vacuum step formed by the vacuum pump 800 may be further subdivided by increasing the number of second subchambers 410b constituting the first chamber 410. In this case, the nozzle unit 300 installed in the first chamber 410 may also include corresponding through hole forming members 310 corresponding to the number of sub-spaces SS divided in the second sub-chamber 410b.

In addition, FIGS. 1A to 3 and 7 show four nozzle parts 300 by forming four first insertion holes 412, second insertion holes, and third insertion holes 416 in the chamber 400, respectively. ) Is illustrated as the maximum capacity, but the embodiment of the present invention is not limited thereto.

An embodiment in which two, four, eight nozzle units 300 are installed is also possible, and at least some of the nozzle units 300 are removed, and corresponding first insertion holes 412, second insertion holes, And an embodiment in which the capacity of the vacuum pump 800 is varied by closing the third insertion hole 416.

More specifically, the vacuum pump 800, for the variable capacity, the first insertion of the plurality of first insertion holes 412 and the plurality of second insertion holes, the nozzle portion 300 is not inserted through One end and the other end of the ball 412 and the second insertion hole may be further inserted, and may further include a closing member 400 closing the first insertion hole 412 and the second insertion hole.

The closing member 400, the third insertion hole when the nozzle portion 300 is formed through the remaining first insertion hole 412 and second insertion hole 414 (third insertion hole 416) (Including 416), various configurations and materials are possible.

For example, the closing member 400 is a stick member having the same external shape as the nozzle part 300 without an air passage inside and a through hole 312 formed on the side surface, and may function as a dummy nozzle part.

That is, the closing member 400, as shown in Figure 2c, may be made of the same shape as the nozzle unit 300 except for the air passage and through hole 312.

Accordingly, when the nozzle portion 300 can be installed up to N in the chamber 200 (where N first insertion holes 412 and N second insertion holes 414 are formed), the chamber 200 ) Can be adjusted between the number of nozzles 300 installed from 1 to N-1 (N is a natural number of 2 or more), the remaining first insertion hole 412 where the nozzle unit 300 is not installed, and By installing the closing member 400 in the second insertion hole 414 (including the third insertion hole 416 when the third insertion hole 416 is formed), the capacity of the vacuum pump can be easily varied. In the case of Figure 2c, it shows a case where three nozzles 300 and one closing member 400 are installed in the chamber 200, and in this case, the maximum capacity of the chamber 200 shown (four nozzles ( 300) can be used as a vacuum pump with a capacity smaller than the capacity).

At this time, since the closing member 400 is also supported by being coupled to the chamber 400, the O-ring member 302 installed on the outer surface of the nozzle unit 300 described above is also installed on the outer surface of the closing member 400. Of course it can.

On the other hand, the vacuum pump 800 having the configuration as described above, a vacuum chuck that forms an underpressure on the surface to fix an object, a transport tool for picking up and transporting the object using the negative pressure, and a transport tool for adsorbing and fixing an object, and a liquid It can be used in a variety of fields, such as devices and systems that require the formation of a negative pressure, such as a gas-liquid separation device that discharges gas by removing the liquid from the gas included.

Meanwhile, the above-described vacuum pump 800 may be used in various ways by being coupled to components that require vacuum formation.

For example, the vacuum pump 800, vacuum separator for removing foreign matter, in the state of adsorbing and fixing the object to be processed (2) by vacuum pressure, milling machine, drilling machine, grinding machine, welding machine to perform machining It can be used for vacuum chuck modules.

However, when the vacuum pump 800 is introduced into the vacuum pump in a state in which particles, liquids, etc. are contained in the process of inhaling external air due to the formation of negative pressure, the vacuum pump is damaged or a vacuum pressure loss occurs to generate a vacuum pump. There is a problem of lowering efficiency.

Accordingly, as the vacuum separator 700 according to the present invention, the present invention, the liquid is removed from the gas introduced through the inlet portion 750 and the inlet portion 750 flowing into the mixed state of the liquid and gas on the upper side A separation housing 710 equipped with a discharge unit 760 to be discharged; A vacuum separator 700 is installed at the bottom of the separation housing 710 and includes a liquid discharge unit 740 for discharging the liquid removed from the gas introduced through the inlet portion 750 to the outside.

The inlet portion 750 is installed on the upper side of the separating housing 710 and has a configuration in which liquid and gas are mixed in the upper side, and various configurations are possible depending on the fluid inflow structure.

For example, the inlet portion 750 is preferably composed of a pipe extending downward through the upper plate 720, which will be described later, for efficient separation of the liquid after the gas containing the liquid flows into the separation housing 710. Do.

When the inlet portion 750 is composed of a pipe extending downward through the upper plate 720, the liquid contained in the gas can be effectively removed by being discharged into the liquid contained in the separation housing 710.

On the other hand, the inlet portion 750 is a structure in which gas is sucked by the negative pressure formed in the inner space of the separating housing 710, a vacuum chuck module for adsorbing and fixing the object by the negative pressure, and a transport tool for adsorbing and fixing the object at the end , It may be connected to a suction nozzle or the like to remove and remove foreign substances.

In addition, in the case of the vacuum separator according to the present invention, an auxiliary vacuum separator 701 capable of removing a foreign substance in a solid state may be additionally installed in front of the inlet portion 750 based on the flow of fluid, which is effective for liquid separation.

The auxiliary vacuum separator 701 is installed on the front side of the inlet portion 750 to remove foreign substances contained in the inhaled gas, and various configurations are possible according to the foreign substance removal principle and method.

The discharge portion 760 is a configuration in which liquid is removed from the gas introduced through the inlet portion 750 and discharged, and various configurations are possible.

For example, the discharge part 760 may be configured with a through hole 761 formed to penetrate the upper plate 720.

And the discharge unit 760, the vacuum pump 800 for the formation of a negative pressure, that is, vacuum pressure in the inner space of the separation housing 710 may be coupled.

The vacuum pump 800 has been described with reference to the ejector vacuum pump described with reference to FIGS. 1 to 7 in the embodiment of the present invention. A pump, a dynamic vacuum pump including an ejector vacuum pump, or the like can be used.

On the other hand, the discharge unit 760, when the liquid discharge of the liquid discharge unit 740, which will be described later, when the negative pressure, that is, vacuum pressure is formed in the inner space, the discharge of the liquid is not smooth, which is transferred from the vacuum pump 800 It is preferable that a check valve 762 for blocking vacuum pressure is additionally installed.

The check valve 762, when the liquid is discharged from the liquid discharge unit 740, the negative pressure, that is, the discharge of the liquid is not smooth when vacuum pressure is formed in the internal space, and the vacuum pressure transmitted from the vacuum pump 800 is applied. Various configurations are possible as a configuration for blocking.

On the other hand, with and/or in place of the installation of the check valve 762, a filter may be installed to block foreign substances inside the separation housing 710 from entering the vacuum pump 800.

The filter is installed with and/or in place of the installation of the check valve 762, and various configurations are possible as a configuration for blocking foreign substances inside the separation housing 710 from flowing into the vacuum pump 800.

Meanwhile, a switching valve for connecting or releasing a flow path with a component may be installed between a vacuum pressure connecting pipe (not shown) and an inlet portion 750 connected to components requiring vacuum formation, such as the vacuum chuck module.

The switching valve may perform a flow path connection in which the vacuum pressure of the vacuum pump 800 described above is connected to the vacuum pressure connection pipe, and cut off the vacuum pressure to the vacuum pressure connection pipe.

In addition, when the vacuum pressure is cut off to the vacuum pressure connecting pipe during the operation of the switching valve, the switching valve may operate to transmit atmospheric pressure to the inlet portion 750.

And the separation housing 710, in particular, the upper plate 720, the negative pressure release check valve 763 to release the negative pressure in the internal space of the separation housing 710 when the liquid discharged from the liquid discharge unit 740 Can be installed.

The negative pressure release check valve 763, the separation housing 710, is particularly installed on the upper plate 720, when the liquid discharge unit 740 discharges the liquid, the outside air flows into the interior space of the separation housing 710 Various configurations are possible as a valve to open as much as possible.

On the other hand, the separation housing 710, the inlet portion 750 flowing in a state in which liquid and gas are mixed in the upper side, and an outlet portion 760 in which liquid is removed and discharged from the gas introduced through the inlet portion 750 Various configurations are possible as the configuration is provided.

That is, the separation housing 710 is provided with an inlet portion 750 and an outlet 760 to form an internal space in which liquid is stored in the gas introduced through the inlet portion 750, FIGS. 8 to 8 As shown in 12, the inlet portion 750 and the outlet plate 760, the upper plate 720 is installed, and the liquid discharge portion 740 is provided with the bottom of the separation housing 710, the liquid discharge portion 740 The lower plate 730 is installed, the upper plate 720 and the lower plate 730 may be combined with the cylinder member 770 to form an inner space isolated from the outside.

The upper plate 720 is a configuration in which the inlet portion 750 and the outlet portion 760 are installed, and various configurations are possible according to a coupling structure with other members.

The lower plate 730 constitutes the bottom of the separation housing 710 in which the liquid discharge unit 740 is installed, and the liquid discharge unit 740 is installed, and various configurations are possible depending on a coupling structure with other members.

The cylinder member 770 is combined with the upper plate 720 and the lower plate 730 to form an internal space isolated from the outside, and various configurations are possible.

For example, the cylinder member 770, it is preferable that a member of a transparent material is used so as to check the amount of liquid contained therein.

The liquid discharge unit 740 is installed at the bottom of the separating housing 710 and discharges the liquid removed from the gas introduced through the inlet portion 750 to the outside, and various configurations are possible.

For example, the liquid discharge part 740 is installed through the bottom of the separation housing 710 and is connected to a check valve 741 that is opened and closed by control, and a check valve 741, and a check valve 741 is provided. It may include a discharge pipe 742 for discharging the liquid removed from the gas introduced through the inlet portion 750 by the open operation to the outside.

By the above configuration, when a predetermined amount of liquid is contained in the inner space of the separation housing 710, the check valve 741 of the liquid discharge unit 740 is operated to separate the gas from the separation housing 710. Liquid can be discharged outside.

At this time, the separation housing 710 may have at least a part of a transparent material so as to measure the amount of liquid contained therein, and the scale may be displayed in the vertical direction.

Further, the separation housing 710, a sensor for measuring the amount of liquid contained in the interior, such as a water level sensor to automatically perform the discharge of the liquid contained in the interior space may be additionally installed.

Meanwhile, in this case, when the vacuum pump 800 is connected to the discharge part 760, it may not be smooth to discharge liquid to the outside due to negative pressure, that is, vacuum pressure, in the inner space of the separation housing 710.

Thus, the discharge unit 760, a check valve 762 for blocking the vacuum pressure transmitted from the vacuum pump 800 is additionally installed, the check valve 762, the liquid of the liquid discharge unit 740 When discharged, the vacuum pressure transmitted from the vacuum pump 800 may be blocked.

And the separation housing 710, in particular, the upper plate 720, the negative pressure release check valve 763 to release the negative pressure in the internal space of the separation housing 710 when the liquid discharged from the liquid discharge unit 740 Is additionally installed and the negative pressure release check valve 763 is also operated together with the operation of the check valve 762 to smoothly discharge the liquid through the liquid discharge unit 740.

Meanwhile, in the case of the vacuum separator 700 as shown in FIGS. 8 and 9, when the liquid is discharged into the inner space of the separation housing 710, the vacuum pressure is blocked by the operation of the check valve 762, thereby preventing the vacuum separator ( 700) there is a problem that the operation of the combined device is not smooth.

Thus, in the vacuum separator 700 according to the invention, as shown in FIGS. 10A and 12, the inflow of liquid and gas through the inlet 750 and the exhaust of gas through the outlet 760 are continuously made. In addition, a secondary vacuum separator 200 for receiving the liquid discharged from the liquid discharge unit 740 and discharging it to the outside is additionally included so that the liquid accumulated in the separation housing 710 can be discharged through the liquid discharge unit 740. can do.

The secondary vacuum separator 200 is configured to receive and discharge the liquid discharged from the liquid discharge unit 740 so that liquid accumulated in the separation housing 710 can be discharged through the liquid discharge unit 740. Various configurations are possible.

For example, the secondary vacuum separator 200 is coupled to the separation housing 710, the discharge housing 210 and the discharge housing 210 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, discharge housing 210 ) Is installed at the bottom of the secondary discharge unit 240 for discharging the liquid contained in the discharge housing 210 to the outside; It may be provided in the discharge housing 210 may include an air inlet 260 for introducing the external air into the isolation space to allow the discharge of the liquid through the secondary discharge unit 240.

The regular discharge housing 210 is coupled to the separation housing 710 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, and various configurations are possible.

For example, the always-discharge housing 210, the separation housing 710, that is, the secondary lower plate 230 and the lower plate 730 is installed at a distance from the lower plate 730 of the separation housing 710, and the lower plate 730 and It may include a secondary cylinder member 270 coupled to the secondary lower plate 230 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740.

The secondary lower plate 230 is configured to be spaced apart from the lower plate 730 of the separation housing 710, and may have a configuration similar to the lower plate 730 of the separation housing 710 described above. .

The secondary cylinder member 270 is combined with the lower plate 730 and the secondary lower plate 230 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, the liquid discharge unit The 740 is configured to be positioned corresponding to the inside of the isolation space, and may have a configuration similar to the cylinder member 770 of the separation housing 710 described above.

The secondary discharge unit 240 is installed at the bottom of the discharge housing 210 to discharge the liquid contained in the discharge housing 210 to the outside, and various configurations are possible, and the liquid discharge unit 740 described above It may have a similar configuration.

Specifically, the secondary discharge unit 240 is installed at the bottom of the discharge housing 210, that is, through the secondary lower plate 230, a check valve 241 and a check valve 241 that are opened and closed by control. It is connected to the check valve 241 may include a discharge pipe 742 for discharging the liquid contained in the discharge housing 210 by the opening operation to the outside.

The air inlet unit 260 is provided in the discharge housing 210 and is configured to inject external air into the isolation space so that liquid can be discharged through the secondary outlet unit 240, and various configurations are possible.

For example, the air inlet 260 is combined with the lower check valve 261 and the lower check valve 261 installed on the discharge housing 210, for example, the secondary lower plate 230, and external air. It may include an air inlet pipe 263 is installed extending to the upper side to be discharged to the upper side of the discharge housing (210).

The lower check valve 261 is configured to inject external air into the discharge housing 210 so that liquid discharge is smooth when the liquid is discharged by the secondary discharge unit 240, and various configurations are possible.

Here, when the lower check valve 261 is operated and external air flows into the discharge housing 210, the check valve 741 of the liquid discharge unit 740 installed in the separation housing 710 is blocked to separate the separation housing 710 ) Can be prevented from affecting the negative pressure formed in the inner space, that is, the vacuum pressure.

The air inlet pipe 263 is coupled to the lower check valve 261 and extends upward so that external air can be discharged to the upper side of the discharge housing 210, and various configurations are possible.

On the other hand, the air inlet 260, as another example, as shown in Figures 10a and 10b, instead of installing the lower check valve 261, in the flow of the flow path to the front side of the flow path of the inlet portion 750 It is connected to the installed switching valve 980 and may be configured to receive external atmospheric pressure or vacuum pressure of the vacuum pump 800.

Specifically, the switching valve 980 is installed on the front side of the flow path of the inlet portion 750 to discharge the liquid contained in the interior space of the discharge housing 210 to the outside by communicating with the atmospheric pressure communication member to release atmospheric pressure It is to be transferred to the interior space of the housing 210, and when the discharge of the liquid contained in the interior space of the discharge housing 210 is completed, the vacuum pressure of the vacuum pump 800 is transferred to the interior space of the discharge housing 210.

Here, the vacuum pressure transmitted by the switching valve 980 is equal in pressure between the inner space of the discharge housing 210 and the inner space of the separation housing 710.

In addition, the check valve 741 of the liquid discharge unit 740 is configured to operate open when the pressure in the inner space of the discharge housing 210 is equal to or lower than the pressure in the inner space of the separation housing 710. If the pressure in the inner space of the discharge housing 210 without the control equipment is equal to or lower than the pressure in the inner space of the separation housing 710, the liquid contained in the separation housing 710 may be automatically discharged to the discharge housing 210.

The operation of the vacuum separator for the secondary vacuum separator as described above is as follows.

When a predetermined amount or more of liquid is contained in the interior space of the separation housing 710, the liquid separated from the gas is discharged from the separation housing 710 by operating the check valve 741 of the liquid discharge unit 740. ).

At this time, when opened by the operation of the check valve 741 of the liquid discharge part 740, the check valve 241 installed in the lower check valve 261 and the discharge housing 210 described above is cut off to separate the housing 710. It can be prevented from affecting the negative pressure, that is, the vacuum pressure formed in the internal space of the.

Meanwhile, when the liquid discharge by the liquid discharge unit 740 is completed, communication between the separation housing 710 and the discharge housing 210 is released by the operation of the check valve 741 of the liquid discharge unit 740.

On the other hand, as another example, the check valve 741 of the liquid discharge unit 740, when the pressure in the inner space of the discharge housing 210 is equal to or lower than the pressure in the inner space of the separation housing 710, the separation housing 710 It may be configured to automatically discharge the liquid contained in the discharge housing 210.

In this case, when the pressure in the inner space of the discharge housing 210 is maintained at the same pressure in the inner space of the separating housing 710, the check valve 741 of the liquid discharge unit 740 is automatically operated without additional control equipment. When the pressure in the inner space of the discharge housing 210 is equal to or lower than the pressure in the inner space of the separation housing 710, the liquid contained in the separation housing 710 can be automatically discharged to the discharge housing 210.

Meanwhile, when a predetermined amount of liquid is contained in the isolation space of the discharge housing 210, the check valve 241 of the secondary discharge unit 240 is operated to discharge the liquid from the discharge housing 210 to the outside. .

At this time, when the lower check valve 261 is operated and opened, external air is injected into the discharge housing 210 so that liquid discharge is smooth when the liquid is discharged by the secondary discharge unit 240.

On the other hand, when the liquid discharge from the discharge housing 210 is completed, the check valve 241 and the lower check valve 261 of the secondary discharge part 240 are operated and blocked.

At this time, the discharge housing 210, at least a portion may have a transparent material so as to measure the amount of liquid contained therein, the scale may be displayed in the vertical direction.

Further, the discharge housing 210, a sensor for measuring the amount of liquid contained in the water level sensor or the like to automatically perform the discharge of the liquid contained in the interior space may be additionally installed.

Meanwhile, as illustrated in FIGS. 10A and 10B, the air inlet unit 260 may discharge liquid contained in the discharge housing 210 when connected to the switching valve 980 as follows.

First, when a predetermined amount of liquid is contained in the isolation space of the discharge housing 210, the check valve 241 of the secondary discharge unit 240 is operated to discharge liquid from the discharge housing 210 to the outside. .

At this time, when the lower check valve 261 is operated and opened, when the liquid is discharged by the secondary discharge part 240, the switching valve 980 is operated so that liquid discharge is smooth, and external air is injected into the discharge housing 210, That is, atmospheric pressure is formed in the isolation space of the discharge housing 210.

Then, when atmospheric pressure is formed in the isolation space of the discharge housing 210, that is, when the pressure rises, the isolation space of the discharge housing 210 and the interior of the separation housing 710 by the check valve 741 of the liquid discharge unit 740 Spaces are isolated from each other.

On the other hand, when the liquid discharge by the secondary discharge portion 240 is completed, the switching valve 980 is operated to form a vacuum pressure in the isolation space of the discharge housing 210, thereby stopping the liquid discharge to the secondary discharge portion 240. do. Here, the check valve 241 of the secondary discharge part 240 may be automatically operated by a pressure difference.

Then, when the pressure of the separation housing 710 is equal to or lower than the pressure of the interior space of the separation housing 710, the check valve 741 of the liquid discharge unit 740 is opened to separate the housing 710. ) The liquid contained in the interior space is transferred to the isolation space of the discharge housing 210.

The vacuum separator 700 having the above-described configuration, when it is difficult to separate the liquid contained in the inhaled gas at once, the vacuum separator 700 shown in FIGS. 8 to 12 is serial or parallel based on the flow of the fluid. It is possible to effectively separate the liquid contained in the inhaled gas by being disposed in plural by a back.

On the other hand, two modules, such as the vacuum pump 800 and the vacuum separator 700 described above, need to be coupled to enable fluid communication in an isolated state from the outside.

However, when combining two or more modules, depending on the coupling structure, it is necessary to easily construct the work during assembly or separation for maintenance.

Accordingly, as another aspect of the present invention, a link assembly 900 is provided for connecting two modules, such as a vacuum pump 800 and a vacuum separator 700, to enable fluid communication in an isolated state from the outside.

The link assembly 900 is configured to connect two modules, such as a vacuum pump 800 and a vacuum separator 700, to allow fluid communication in an isolated state from the outside, and various configurations are possible.

As an example, the link assembly 900, as shown in Figures 13 to 18b, the first communication hole 911 in the center through the main block 910 and the main block 910, respectively, with the center in the center The first module and the second module are fixedly coupled and a pair of coupling blocks 920 formed with a second communication hole 921 in communication with the first communication hole 911 and the main block 910 are coupled to the main block 910 and a fixed block 930 for fixedly coupling the pair of coupling blocks 920.

The main block 910 is a block having a rectangular parallelepiped shape and a first communication hole 911 formed in the center, and is preferably formed of a solid material.

In addition, the main block 910 is a female screw portion 915 through which the coupling screws are screwed so that the fixing blocks 930 are fixedly coupled to the main blocks 910 through the fixing blocks 930 to be described later on all four sides. Is formed.

In addition, the main block 910 has a concave groove 912 into which the coupling key 931 formed on the inner circumferential surface of the fixing block 930 is inserted so as to maintain a solid coupling state with the fixing block 930. It is formed in a position corresponding to.

The pair of coupling blocks 920, with the main block 910 in the center, is fixedly coupled to the first module and the second module, respectively, and the second communication hole 921 is in communication with the first communication hole 911. Various configurations are possible as the formed configuration.

For example, the pair of coupling blocks 920 are formed with threaded holes 927 through which coupling screws are inserted to be fixedly coupled to the first module and the second module, respectively.

In addition, the pair of coupling blocks 920, the flat shape has a rectangular shape, the grooves 922 on which the coupling keys 931 formed on the inner circumferential surface of the fixed block 930 are inserted on four sides are combined keys 931. It is formed in a position corresponding to.

On the other hand, the pair of coupling blocks 920, the main block 910 so that the main block 910 and the pair of coupling blocks 920 are fixedly coupled when the fixed block 930 with respect to the main block 910 is coupled. A tapered surface 925 is formed at an edge of the opposite surface of the surface opposite to the surface.

The tapered surface 925 is pressurized by a pressing protrusion 932 protruding from the edge of the fixing block 930 when the fixing block 930 is coupled to the main block 910, and the main block 910 and a pair The coupling block 920 is fixedly coupled.

Meanwhile, O-rings 902 and 903 are installed on the surfaces of the main block 910 and the pair of coupling blocks 920 facing each other to block the inflow of external air.

At this time, in order to stably install the O-rings 902 and 903, O-ring installation grooves 913 are formed on surfaces where the main block 910 and the pair of coupling blocks 920 face each other.

In addition, the pair of coupling blocks 920, O-rings (901, 904) are installed to block the inflow of external air on the surface coupled to the first module or the second module, the O-ring (901, 904) is stable For installation, an O-ring installation groove 926 is formed on a surface coupled with the first module or the second module.

The fixed block 930 is configured to be fixedly coupled to the main block 910 and a pair of coupling blocks 920 by being coupled to the main block 910, to at least one of the four sides of the main block 910. Combined, the main block 910 and a pair of coupling blocks 920 may be fixed.

For example, the fixed block 930, a pair of pressing projections 932 are formed to press the tapered surface 925 formed on the coupling block 920 at the edge, and the coupling screw penetrates to the main block 910. A screw hole 931 through which the coupling screw penetrates is formed to be screwed.

The tapered surface 925 is formed to decrease in thickness as it goes from the second communication hole 921 of the coupling block 920 to the edge, and correspondingly, the pressure protrusion 932 also corresponds to the tapered surface 925. In addition, the tapered surface 935 can be achieved.

The main block 910 and the pair of mating blocks 920 are firmly fixed by pressing the face-to-face surfaces of the taper surface 925 of the coupling block 920 and the taper surface 935 of the fixing block 930 as described above. Combined.

Meanwhile, the fixing block 930 may be formed with a coupling key 931 inserted into a groove 912 formed in the main body block 910 so as to maintain a solid coupling state with the fixing block 930.

The above-described link assembly 900 may implement various coupling structures of the first module and the second module.

For example, as shown in FIG. 15, various coupling structures such as coupling the link assembly 900 at an angle of 90° around the auxiliary block 990 are possible.

Here, the auxiliary block 990 is configured to enable fluid communication with the link assembly 900, and has a shape of a rectangular parallelepiped, and communication holes 993, 994, and 995 are provided on at least two or more of the six surfaces. It is formed, it is possible to implement a variety of fluid communication structure by coupling the link assembly 900 to two or more of the communication holes (993, 994, 995).

Meanwhile, in the auxiliary block 990, a communication hole 993 to which the link assembly 900 is not coupled may be hermetically coupled by the sealing member 902.

In addition, as described above, the auxiliary block 990 may be utilized in various ways, such as a separate valve member such as a switching valve 980, or the like.

The above is merely a description of some of the preferred embodiments that can be implemented by the present invention, so, as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the present invention described above. It will be said that the technical idea and the technical idea together with the fundamental are all included in the scope of the present invention.

300: nozzle 400: chamber
610: first check valve 620: second check valve
700: vacuum separator 800: vacuum pump

Claims (12)

One or more hollow nozzle unit 300 is formed with an air inlet 305 at one end, an air outlet 306 at the other end, and a plurality of through holes 312 formed along the longitudinal direction on the side surface;
The nozzle unit 300 includes a chamber 400 installed therein,
The chamber 400,
A first insertion hole 412 through which one end of the nozzle unit 300 is fixed by being inserted and a second insertion hole through which the other end of the nozzle unit 300 is fixed through is formed, and side surfaces of the nozzle unit 300 The first chamber 410 to form an inner space (IS) surrounding the, and coupled to the first side wall of the first insertion hole 412 of the first chamber 410 is formed of the nozzle unit 300 The second chamber 420 and the first chamber (420) forming a vacuum space (VS) in which a vacuum atmosphere is formed according to an air inflow path communicating with the air inlet 305 and an air flow through the nozzle unit 300 410) includes a third chamber 430 coupled to a second side wall on which the second insertion hole is formed to form an air outflow passage communicating with the air outlet 306 of the nozzle part 300,
The first chamber 410 blocks air flow from the inner space IS to the vacuum space VS on the first side wall while air from the vacuum space VS to the inner space IS. Vacuum pump 800, characterized in that the first check valve 610 to enable the flow is installed. The method according to claim 1,
The first chamber 410 divides the inner space IS into a plurality of sub-spaces SS between a plurality of through-holes 312 formed along the longitudinal direction, and the nozzle unit 300 A third insertion hole 416 is inserted through the additionally includes at least one partition 212 is formed,
A vacuum pump 800, characterized in that the partition wall portion 212 is provided with a second check valve 620 that blocks one-way air flow between neighboring sub-spaces SS. The method according to claim 2,
The first chamber 410,
The first insertion hole 412 is formed and the first check valve 610 is installed a first sub-chamber (410a), and at least one second sub-chamber (410b) including the partition portion 212 and , A third sub-chamber (410c) in which the second insertion hole is formed,
The first sub-chamber (410a), the second sub-chamber (410b), and the third sub-chamber (410c), characterized in that sequentially stacked and coupled along the longitudinal direction of the nozzle unit 300 Vacuum pump 800. The method according to claim 3,
The first check valve 610 and the second check valve 620, the vacuum pump 800, characterized in that sequentially opened and closed according to the vacuum level formed according to the air flow by the nozzle unit 300 . The method according to claim 3,
The vacuum pump 800, characterized in that the cross-sectional area of the air passage formed inside the nozzle part 300 and communicating with the through hole 312 increases from the air inlet 305 to the air outlet 306. The method according to claim 5,
The nozzle part 300 includes a plurality of through-hole forming members 310 in which at least one through-hole 312 is formed on a side surface, and at least a part of the through-hole forming member 310 is inserted into the through-hole forming the air passage. It includes a plurality of flow path forming members 320,
The through hole forming member 310, the vacuum pump 800, characterized in that installed between the flow path forming member 320. The method according to claim 6,
The flow path forming member 320, a vacuum pump 800, characterized in that supported by the first insertion hole 412, the second insertion hole 414, and the third insertion hole 416. The method according to claim 1,
A vacuum pump 800, characterized in that a plurality of the first insertion hole 412 and the second insertion hole 414 are formed. The method according to claim 8,
The vacuum pump 800,
Of the plurality of first insertion holes 412 and the plurality of second insertion holes 414, the remaining first insertion hole 412 and the second insertion hole 414 in which the nozzle part 300 is not inserted through Vacuum pump 800, characterized in that it includes a closing member 400 for closing the first insertion hole 412 and the second insertion hole 414, the one end and the other end are respectively inserted through. The method according to claim 1,
The vacuum pump 800, the third chamber 430 of the air is installed in the air outlet passage, the air flowing through the air outlet passage further comprises a silencer 232 to be discharged to the outside vacuum Pump 800. The method according to claim 2,
The first check valve 610 is formed on the first side wall, the first through hole 612 to communicate the inner space (IS) and the vacuum space (VS), and the first through hole 612 And a first check valve member 614 that is opened and closed by the pressure difference between the inner space IS and the vacuum space VS.
The second check valve 620 is formed in the partition wall portion 212 to communicate with neighboring sub-spaces (SS), the second through hole 622, and the second through hole 622 to the neighboring Vacuum pump 800, characterized in that it comprises a second check valve member 624 that is retracted from the air inlet 305 and the sub space (SS) side of the sub-space (SS). As a vacuum separator 700 for separating liquid and gas,
A main body portion in which an inlet through which a mixture of a liquid and a gas is introduced and an accommodation space in which a mixture introduced through the inlet is accommodated are formed, and an upper portion of the main body portion to communicate with the accommodation space and the vacuum space VS A vacuum separator (700) characterized in that it comprises a vacuum pump (800) according to any one of claims 1 to 11.

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