DK151496B - EJECTOR PUMP FOR PRODUCING VACUUM - Google Patents
EJECTOR PUMP FOR PRODUCING VACUUM Download PDFInfo
- Publication number
- DK151496B DK151496B DK222281AA DK222281A DK151496B DK 151496 B DK151496 B DK 151496B DK 222281A A DK222281A A DK 222281AA DK 222281 A DK222281 A DK 222281A DK 151496 B DK151496 B DK 151496B
- Authority
- DK
- Denmark
- Prior art keywords
- nozzles
- ejector
- chamber
- chambers
- vacuum
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
- F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Disintegrating Or Milling (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Fluid-Pressure Circuits (AREA)
- Manipulator (AREA)
- Motorcycle And Bicycle Frame (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
Abstract
Description
151496151496
Den foreliggende opfindelse angir ejektorpumper til frembringelse af vakuum og nærmere betegnet såkaldte multiejektorpumper, hvori flere ejektordyser er anbragt, efter hinanden og i visse udførelsesformer også ved siden af hinanden.The present invention provides ejector pumps for generating vacuum and, more specifically, so-called multi-ejector pumps in which multiple ejector nozzles are arranged one after the other and in certain embodiments also side by side.
05 Ved hjælp af sådanne ejektorpumper har det været muligt ved p brug af et overtryk på ca. 4 kp/cm at nå ned på. undertryk til ca.05 With the help of such ejector pumps it has been possible to use an overpressure of approx. 4 kp / cm to reach. suppress to approx.
50% af det aktuelle lufttryk. Det har imidlertid været et ønske at nå ned på lavere undertryk i forbindelse med tilsvarende forhold.50% of the current air pressure. However, it has been a desire to reach down to lower suppression in connection with similar conditions.
I en vis udstrækning er dette også opnået ved at arrangere 10 ejektordyser på den i svensk patentansøgning nr. 7905309-6 beskrevne måde, og i forbindelse dermed er der opnået undertryk svarende til ca. 7% af det aktuelle lufttryk. Også dette gode resultat er imidlertid utilfredsstillende inden for mange anvendelsesområder, såsom i forbindelse med glødelampefremstilling, frysetørring af fødevarer 15 og lignende.To some extent this has also been achieved by arranging 10 ejector nozzles in the manner described in Swedish Patent Application No. 7905309-6, and in connection therewith suppression of approx. 7% of the current air pressure. However, this good result is also unsatisfactory in many applications, such as in the case of incandescent lamp manufacturing, freeze drying of foods 15 and the like.
I forbindelse med fremstillingsprocesser, der gør brug af undertryk, findes der problemer, som man ikke altid indser. At lede undertryk kræver generelt kraftigere ledninger end at lede overtryk. Konventionelle vakuumpumper er forholdsvis omfangsrige, og de kan 20 ikke anbringes i direkte forbindelse med det kammer eller den genstand, hvori undertrykket ønskes frembragt. Resultatet bliver, at der skal indrettes kraftige ledninger imellem pumpen og kammeret eller genstanden.In manufacturing processes that use suppression, there are problems that are not always realized. Conducting negative pressure generally requires more powerful leads than conducting negative pressure. Conventional vacuum pumps are relatively bulky, and they cannot be placed in direct contact with the chamber or article in which the vacuum is desired to be produced. The result is that strong wires must be arranged between the pump and the chamber or object.
Ejektorpumper af den type, som den foreliggende opfindelse 25 angår, er små lettte enheder, der kan anbringes i direkte tilslutning til anvendelsesstedet. På grund af, at de drives med overtryk, dvs. komprimeret luft, behøver de kun snævre tilførselsledninger for den komprimerede luft, og samtidigt er der ingen risiko for problemer på grund af elektriske fejl, hvilket kan være tilfældet i for-30 bindelse med konventionelle vakuumpumper. Endvidere er ejektorpum-perne en simpel og pålidelig konstruktion, hvilket giver anledning til en særdeles god driftssikkerhed. I sammenligning med konventionelle vakuumpumper har multiejektorpumper den fordel, at deres kapacitet er meget stor ved samme effektforbrug. Dette betyder, at 35 den første del af en evakuering sker meget hurtigt, naturligvis beroende på, at de ikke arbejder med et konventionelt slagvolumen.Ejector pumps of the type to which the present invention relates 25 are small, lightweight units that can be placed directly adjacent to the site of application. Because they are operated with overpressure, ie. compressed air, they only need narrow supply lines for the compressed air, and at the same time there is no risk of problems due to electrical faults, which may be the case with conventional vacuum pumps. Furthermore, the ejector pumps are a simple and reliable construction, which gives rise to a very good operational reliability. Compared to conventional vacuum pumps, multi-ejector pumps have the advantage that their capacity is very high at the same power consumption. This means that the first part of an evacuation happens very quickly, obviously because they do not work with a conventional impact volume.
JO større volumen, som skql evakueres, desto større økonomisk be- 151496 2 tydning fir denne effekt, idet evakueringstiden bliver væsentligt mindre end ved brug af konventionelle vakuumpumper.The greater the volume that is evacuated, the greater the economic significance of this effect, the evacuation time being substantially less than using conventional vacuum pumps.
Den foreliggende opfindelse har til formål at tilvejebringe en ejektorpumpe, der kan udpumpe til lavere tryk end det hidtil har 05 været muligt med ejektorpumper.The present invention has for its object to provide an ejector pump which can pump out to lower pressure than has hitherto been possible with ejector pumps.
Dette opnås med en ejektorpumpe bestående af et ejektorhus indeholdende et sæt af efter hinanden arrangerede kamre, af hvilke i det mindste nogle står i forbindelse med et vakuumopsamiingskam-mer igennem porte forsynet med tilbageslagsventiler, idet tilbage-10 slagsventilerne tillader strømning fra vakuum kammeret til kamrene samt i det mindste et første sæt af ejektordyser anbragt på linie efter hinanden I tilslutning til de nævnte kamre, som ifølge opfindelsen er ejendommelig ved, at der forskudt fra linien gennem det første sæt af dyser er anbragt i det mindste et yderligere sæt af dyser, 15 som evakuerer et kammer, der står i direkte forbindelse med vakuumopsamlingskammeret, og hvis udløb er arrangeret i tilslutning til det kammer, hvori der hersker det største undertryk ved virkningen af det førstnævnte sæt af ejektordyser.This is accomplished by an ejector pump consisting of an ejector housing containing a set of successively arranged chambers, at least some of which are connected to a vacuum collection chamber through gates with check valves, the check valves allowing flow from the vacuum chamber to the chambers. and at least one first set of ejector nozzles arranged in succession in connection with said chambers, which according to the invention is characterized in that at least one further set of nozzles is disposed from the line through the first set of nozzles. 15 which evacuates a chamber which is in direct communication with the vacuum collection chamber and the outlet of which is arranged adjacent to the chamber in which the greatest negative pressure prevails by the action of the first set of ejector nozzles.
Gennem det separate arrangement af det yderligere sæt dyser 20 kan disse dimensioneres og udformes med henblik på lavest muligt tryk under færre tvangsbindinger end lavtryksdyser, som indgår i hoveddy sesystemet vil være underlagt. Desuden arbejder det yderligere sæt dyser over en meget kraftig trykforskel. Multiejektorpum-per indrettet i overensstemmelse med opfindelsen har vist sig at kun-25 ne frembringe undertryk, som i det væsentlige svarer til mindre end 1% af det aktuelle lufttryk, hvilket vil sige, at man har opnået tryk af størrelsesordenen 5-10 millibar.Through the separate arrangement of the additional set of nozzles 20, these can be dimensioned and designed for the lowest possible pressure under fewer forced bonds than the low pressure nozzles which are included in the main jet system. Furthermore, the additional set of nozzles operates over a very strong pressure difference. Multi-ejector pumps arranged in accordance with the invention have been found to produce only underpressures substantially equal to less than 1% of the actual air pressure, i.e., pressures of the order of 5-10 millibars have been obtained.
Med den foreliggende opfindelse har ejektorpumperne dermed fået en sådan effektivitet, at de kan anvendes, hvor der er behov 30 for sådanne undertryk, som tidligere kun kunne opnås ved hjælp af vakuumpumper.Thus, with the present invention, the ejector pumps have gained such efficiency that they can be used where such pressures are needed that previously could only be obtained by vacuum pumps.
I det følgende skal opfindelsen beskrives nærmere i forbindelse med tegningen, som skematisk og i snit viser en udførelsesform for en multiejektorpumpe ifølge opfindelsen.In the following, the invention will be described in more detail in connection with the drawing, which schematically and in section shows an embodiment of a multi-ejector pump according to the invention.
35 I den viste udførelsesform indeholder multiejektoren 1 et hus 2 med i hovedsagen parallel-epipedisk form og med fem kamre 3-7 anbragt i. serie. Ejektordyser 12, 13, 14 er anbragt i væggene 8-11 151496 3 mellem kamrene, og en ejektordyse 15 er anbragt i ydervæggen.In the embodiment shown, the multi-ejector 1 contains a housing 2 of substantially parallel epipedic shape and having five chambers 3-7 arranged in series. Ejector nozzles 12, 13, 14 are disposed in the walls 8-11 between the chambers and an ejector nozzle 15 is disposed in the outer wall.
Disse dyser 12-15 er anbragt på en fælles akse.These nozzles 12-15 are arranged on a common axis.
Under bunden af huset 2 findes et lukket kammer 16, som gennem porte 17-20 star I forbindelse med kamrene 4, 5, 6 og 7, 05 respektivt. Portene 18, 19 og 20 kan lukkes ved hjælp af klapventiler 21, 22 og 23, respektivt.Below the bottom of the housing 2 is a closed chamber 16, which through gates 17-20 star In connection with chambers 4, 5, 6 and 7, 05 respectively. The ports 18, 19 and 20 can be closed by means of flap valves 21, 22 and 23, respectively.
Til det første kammer 3 fører et ikke vist indløb for trykluft, og den sidste dyse 15 i dyserækken fungerer som udløb for trykluften. Den første dyse 12 forløber fra det første kammer 3, gen-10 nem det andet kammer 4 og udmunder i det tredie kammer 5. Bortset fra dette arrangement er den resterende del af multiejektoren opbygget pi konventionel mide.The first chamber 3 leads to an inlet for compressed air, and the last nozzle 15 in the nozzle row acts as an outlet for the compressed air. The first nozzle 12 extends from the first chamber 3, through the second chamber 4 and opens into the third chamber 5. Apart from this arrangement, the remaining part of the multi-ejector is constructed in conventional mite.
I væggen 8 mellem det første kammer 3 og det andet kammer 4 findes der en ejektordyse 24, og i væggen 9 imellem det andet kam-15 mer 4 og det tredie kammer 5 findes en ejektordyse 25.In the wall 8 between the first chamber 3 and the second chamber 4 there is an ejector nozzle 24, and in the wall 9 between the second chamber 4 and the third chamber 5 there is an ejector nozzle 25.
Multiejektoren arbejder på følgende måde:The multi-ejector works as follows:
Trykluft tilføres til kammeret 3, og trykluften strømmer igennem dyserne 12, 13, 14 og 15. Der dannes dermed et undertryk i kamrene 5, 6 og 7, og følgelig åbnes klapventilerne 21, 22 og 23.Compressed air is supplied to the chamber 3 and the compressed air flows through the nozzles 12, 13, 14 and 15. Thus, a negative pressure is formed in the chambers 5, 6 and 7, and consequently the flap valves 21, 22 and 23 are opened.
20 Når undertrykket i kammeret 7 i det væsentlige er lig med undertrykket i kammeret 16, lukker klapventilen 23, og efterhånden som trykket i kammeret 16 falder, lukker ventilerne 22 og 21.20 When the negative pressure in the chamber 7 is substantially equal to the negative pressure in the chamber 16, the flap valve 23 closes and as the pressure in the chamber 16 decreases, the valves 22 and 21 close.
Når undertrykket i kammeret 5 i det væsentlige er lig med undertrykket i kammeret 16, har man opnået det undertryk, som den 25 konventionelle del af pumpen kan skabe, og dette undertryk foreligger også i kammeret 4, idet dette kammer står i direkte forbindelse med kammeret 16 igennem porten 17.When the negative pressure in the chamber 5 is substantially equal to the negative pressure in the chamber 16, the negative pressure that the conventional part of the pump can create is obtained, and this negative pressure is also present in the chamber 4, this chamber being in direct contact with the chamber. 16 through the gate 17.
I denne tilstand begynder dyserne 24 og 25 at arbejde, og trykforskel lem mellem kamrene 3 og 5 er af væsentlig størrelse, 20 hvilket bevirker, at ejektoreffekten også bliver betragtelig. Det undertryk, som er opnået i kammeret 4, og som opnås i kammeret 16 igennem porten 17, har vist sig at ligge mellem 1 og 0,01 % af det eksisterende atmosfæretryk, hvilket er et undertryk, som det tidligere ikke har været muligt at opnå ved hjælp af ejektorer.In this state, nozzles 24 and 25 begin to operate, and pressure differential limbs between chambers 3 and 5 are of considerable size, which causes the ejector power to be considerable as well. The negative pressure obtained in the chamber 4 obtained in the chamber 16 through the port 17 has been found to be between 1 and 0.01% of the existing atmospheric pressure, which is a negative pressure which it has not previously been possible to obtain by means of ejectors.
25 I den viste udførelsesform fødes det ekstra sæt af dyser 24, 25 fra den samme trykluftkilde som de resterende dyser. Dette ekstra dysesæt kunne imidlertid også fødes ved tilførsel af atmosfære-In the illustrated embodiment, the additional set of nozzles 24, 25 are fed from the same source of compressed air as the remaining nozzles. However, this additional nozzle set could also be fed by adding atmospheric
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8003819A SE427955B (en) | 1980-05-21 | 1980-05-21 | MULTIEJEKTOR |
SE8003819 | 1980-05-21 |
Publications (3)
Publication Number | Publication Date |
---|---|
DK222281A DK222281A (en) | 1981-11-22 |
DK151496B true DK151496B (en) | 1987-12-07 |
DK151496C DK151496C (en) | 1988-08-08 |
Family
ID=20341011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK222281A DK151496C (en) | 1980-05-21 | 1981-05-20 | EJECTOR PUMP FOR PRODUCING VACUUM |
Country Status (11)
Country | Link |
---|---|
US (1) | US4395202A (en) |
EP (1) | EP0041055B1 (en) |
JP (1) | JPS5752000A (en) |
AT (1) | ATE9112T1 (en) |
AU (1) | AU549446B2 (en) |
DE (2) | DE41055T1 (en) |
DK (1) | DK151496C (en) |
ES (1) | ES8204087A1 (en) |
FI (1) | FI811552L (en) |
NO (1) | NO155899C (en) |
SE (1) | SE427955B (en) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL70239A (en) * | 1983-11-15 | 1988-03-31 | Dan Greenberg | Multichamber ejector |
IL74282A0 (en) * | 1985-02-08 | 1985-05-31 | Dan Greenberg | Multishaft jet suction device |
US4790054A (en) * | 1985-07-12 | 1988-12-13 | Nichols William O | Multi-stage venturi ejector and method of manufacture thereof |
US4759691A (en) * | 1987-03-19 | 1988-07-26 | Kroupa Larry G | Compressed air driven vacuum pump assembly |
SE466561B (en) * | 1988-06-08 | 1992-03-02 | Peter Tell | MULTIEJEKTORANORDNING |
US4880358A (en) * | 1988-06-20 | 1989-11-14 | Air-Vac Engineering Company, Inc. | Ultra-high vacuum force, low air consumption pumps |
AU628595B2 (en) * | 1989-07-10 | 1992-09-17 | John Stanley Melbourne | Improved vacuum pump device |
US5228839A (en) * | 1991-05-24 | 1993-07-20 | Gast Manufacturing Corporation | Multistage ejector pump |
SE469291B (en) * | 1991-10-31 | 1993-06-14 | Piab Ab | EJECTOR ARRANGEMENTS INCLUDING AT LEAST TWO PRESSURIZED EJECTORS AND PROCEDURAL PROVIDES THAT WITH A MINIMUM TWO PRESSURE AIRED EJECTORS ACHIEVES A DIFFERENT PREVENTION OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY OF A MINIMUM DIFFICULTY. |
IL100168A0 (en) * | 1991-11-27 | 1992-08-18 | Dan Greenberg | High vacuum pump |
DE9210496U1 (en) * | 1992-08-06 | 1993-12-02 | Volkmann, Thilo, 59514 Welver | Multi-stage ejector |
US5683227A (en) * | 1993-03-31 | 1997-11-04 | Smc Corporation | Multistage ejector assembly |
SE511716E5 (en) * | 1998-03-20 | 2009-01-28 | Piab Ab | ejector |
IL125791A (en) * | 1998-08-13 | 2004-05-12 | Dan Greenberg | Vacuum pump |
SE0201335L (en) * | 2002-05-03 | 2003-03-25 | Piab Ab | Vacuum pump and ways to provide vacuum |
KR100629994B1 (en) * | 2005-12-30 | 2006-10-02 | 한국뉴매틱(주) | Vacuum ejector pumps |
DE102006046355A1 (en) * | 2006-09-28 | 2008-04-03 | Rheinmetall Landsysteme Gmbh | Vehicle with buoyancy body |
KR100730323B1 (en) * | 2007-03-15 | 2007-06-19 | 한국뉴매틱(주) | Vacuum system using a filter cartridge |
JPWO2009016827A1 (en) * | 2007-07-30 | 2010-10-14 | 東 保 | Air circulation circuit |
US8672644B2 (en) * | 2008-09-09 | 2014-03-18 | Dresser-Rand Company | Supersonic ejector package |
DE202009019074U1 (en) * | 2009-11-24 | 2016-05-23 | J. Schmalz Gmbh | Compressed air operated vacuum generator |
US8561972B2 (en) * | 2010-06-30 | 2013-10-22 | Kla Systems, Inc. | Low pressure gas transfer device |
GB2509183A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with tripped diverging exit flow nozzle |
WO2014094878A1 (en) * | 2012-12-21 | 2014-06-26 | Xerex Ab | Vacuum ejector with multi-nozzle drive stage |
GB2509184A (en) | 2012-12-21 | 2014-06-25 | Xerex Ab | Multi-stage vacuum ejector with moulded nozzle having integral valve elements |
WO2014094890A1 (en) | 2012-12-21 | 2014-06-26 | Xerex Ab | Vacuum ejector nozzle with elliptical diverging section |
GB2509182A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with multi-nozzle drive stage and booster |
US9297341B2 (en) | 2014-01-20 | 2016-03-29 | Ford Global Technologies, Llc | Multiple tap aspirator with leak passage |
KR101424959B1 (en) | 2014-04-08 | 2014-08-01 | 한국뉴매틱(주) | Vacuum pump |
CN106660537B (en) * | 2014-08-27 | 2020-01-07 | 戴科知识产权控股有限责任公司 | Low cost evacuator for an engine with a tuned venturi gap |
GB201418117D0 (en) | 2014-10-13 | 2014-11-26 | Xerex Ab | Handling device for foodstuff |
EP3163093B1 (en) | 2015-10-30 | 2020-06-17 | Piab Aktiebolag | High vacuum ejector |
KR101699721B1 (en) | 2016-09-01 | 2017-02-13 | (주)브이텍 | Vacuum pump array thereof |
KR101685998B1 (en) | 2016-09-21 | 2016-12-13 | (주)브이텍 | Vacuum pump using profile |
US10794402B2 (en) | 2017-10-31 | 2020-10-06 | General Electric Company | Ejector and a turbo-machine having an ejector |
PL426033A1 (en) | 2018-06-22 | 2020-01-02 | General Electric Company | Fluid steam jet pumps, as well as systems and methods of entraining fluid using fluid steam jet pumps |
KR102344214B1 (en) | 2021-05-18 | 2021-12-28 | (주)브이텍 | Vacuum ejector pump |
CN113374743B (en) * | 2021-07-13 | 2023-10-03 | 中国铁建重工集团股份有限公司 | Vacuum generator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE370765B (en) * | 1973-12-05 | 1974-10-28 | Piab Ab |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE310415C (en) * | ||||
FR361049A (en) * | 1905-11-27 | 1906-05-14 | Westinghouse Electric Corp | Advanced diffuser system for ejector |
US1122148A (en) * | 1913-07-09 | 1914-12-22 | Joaquin Moret Y Gonzales | Injector. |
DE321704C (en) * | 1916-06-10 | 1920-06-11 | British Westinghouse Electric | Jet apparatus for elastic equipment |
US1536180A (en) * | 1922-12-27 | 1925-05-05 | Electric Water Sterilizer & Oz | Eductor |
FR1202441A (en) * | 1958-07-17 | 1960-01-11 | Dubois Ets | Improvements to devices for introducing a product into a fluid flow |
-
1980
- 1980-05-21 SE SE8003819A patent/SE427955B/en not_active IP Right Cessation
-
1981
- 1981-05-15 DE DE198181850083T patent/DE41055T1/en active Pending
- 1981-05-15 EP EP81850083A patent/EP0041055B1/en not_active Expired
- 1981-05-15 AT AT81850083T patent/ATE9112T1/en not_active IP Right Cessation
- 1981-05-15 DE DE8181850083T patent/DE3165656D1/en not_active Expired
- 1981-05-18 US US06/264,941 patent/US4395202A/en not_active Expired - Lifetime
- 1981-05-20 FI FI811552A patent/FI811552L/en not_active Application Discontinuation
- 1981-05-20 NO NO811722A patent/NO155899C/en not_active IP Right Cessation
- 1981-05-20 DK DK222281A patent/DK151496C/en not_active IP Right Cessation
- 1981-05-20 AU AU70857/81A patent/AU549446B2/en not_active Expired
- 1981-05-21 ES ES502387A patent/ES8204087A1/en not_active Expired
- 1981-05-21 JP JP56075794A patent/JPS5752000A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE370765B (en) * | 1973-12-05 | 1974-10-28 | Piab Ab |
Also Published As
Publication number | Publication date |
---|---|
EP0041055A1 (en) | 1981-12-02 |
ATE9112T1 (en) | 1984-09-15 |
JPH024799B2 (en) | 1990-01-30 |
US4395202A (en) | 1983-07-26 |
NO155899C (en) | 1987-06-17 |
NO155899B (en) | 1987-03-09 |
DK151496C (en) | 1988-08-08 |
DK222281A (en) | 1981-11-22 |
NO811722L (en) | 1981-11-23 |
DE41055T1 (en) | 1984-03-15 |
AU7085781A (en) | 1981-11-26 |
FI811552L (en) | 1981-11-22 |
ES502387A0 (en) | 1982-04-01 |
DE3165656D1 (en) | 1984-09-27 |
ES8204087A1 (en) | 1982-04-01 |
SE8003819L (en) | 1981-11-22 |
AU549446B2 (en) | 1986-01-30 |
EP0041055B1 (en) | 1984-08-22 |
SE427955B (en) | 1983-05-24 |
JPS5752000A (en) | 1982-03-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK151496B (en) | EJECTOR PUMP FOR PRODUCING VACUUM | |
EP2956670B1 (en) | Pumping system | |
CA3019235A1 (en) | Vacuum pump having a silencer | |
KR100884115B1 (en) | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor | |
CN104806535A (en) | Complex radial flow pump, combined radial flow pump and air extraction system | |
US6171068B1 (en) | Vacuum pump | |
CN217077778U (en) | Vacuumizing unit for roll-to-roll coating system | |
JP5956754B2 (en) | Vacuum exhaust system | |
KR200211619Y1 (en) | Vacuum pump having suction means consist of arranging in a row connection | |
CN219549080U (en) | Positive and negative pressure multipath combined switching device | |
US1437819A (en) | Ejector | |
GB749637A (en) | Improvements in and relating to gas and vapour compressors | |
SU933601A1 (en) | Method of securing suction chambers of article surface | |
JP3027249U (en) | Vacuum pressure generator | |
US1081174A (en) | Combined vacuum-breaker and proportional unloader. | |
WO2024184458A1 (en) | Modular vacuum ejector system | |
CN112814957A (en) | Small valve pilot type sheet-mounted integrated large-flow vacuum generator | |
KR100203406B1 (en) | Pumping line of sputtering system | |
RU2099659C1 (en) | Vacuum system for processing installation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUP | Patent expired |