KR102231245B1 - Vacuum separator - Google Patents

Abstract

The present invention relates to a vacuum separator, and more particularly, to a vacuum separator for discharging a gas by removing a liquid from a gas containing a liquid.
The present invention is a separation housing provided with an inlet portion 750 in which liquid and gas are mixed in the upper side, and an outlet portion 760 through which liquid is removed from the gas introduced through the inlet portion 750 and discharged. (710) and; Disclosed is a vacuum separator including a liquid discharge part 740 installed at the bottom of the separating housing 710 and discharging the liquid removed from the gas introduced through the inlet part 750 to the outside.

Description

Vacuum separator {Vacuum separator}

The present invention relates to a vacuum separator, and more particularly, to a vacuum separator for discharging a gas by removing a liquid from a gas containing a liquid.

Vacuum can be defined as a state in a space filled with low-pressure gas at atmospheric pressure, and there are ejectors such as Patent Documents 1 and 2 as a means for forming such a vacuum.

Ejector is also called a vacuum generator by forming a vacuum using compressed air, and consists of a simple structure of a nozzle and a diffuser.

The nozzle is responsible for accelerating the flow of compressed air, and the diffuser can reduce the flow rate and draw in the surrounding air to form a vacuum. Air combined with compressed air and ambient air may be discharged from the diffuser through a silencer.

The ejector does not have a separate moving part, has a long life, and because it uses compressed air, the control valve can be common and the degree of vacuum is proportional to the supply pressure of the compressed air, so it has the advantage of enabling fine control.

However, in the conventional ejector, since the check valve is installed at the inlet through which ambient air flows into the nozzle and the diffuser, there is a problem in that the size of the check valve is limited, the vacuum density is low, and durability is low.

(Patent Document 1) KR10-1472503 B

(Patent Document 2) KR10-0629994 B

Meanwhile, a vacuum pump such as an ejector is a vacuum chuck that fixes an object by forming a negative pressure on the surface, a transfer tool that picks up and transports the object using negative pressure, a transfer tool that sucks and fixes the object, and a liquid from a gas containing liquid. It can be used in various fields such as devices and systems that require negative pressure formation, such as a gas-liquid separation device that removes and discharges gas.

However, there is a problem in that the vacuum pump is damaged or vacuum pressure loss occurs when the vacuum pump is introduced into the vacuum pump in a state in which particles, liquids, etc. are contained in the process of suctioning external air due to the formation of negative pressure, thereby reducing the efficiency of the vacuum pump.

In particular, when machining using friction, such as milling, grinding, drilling, etc., machining is performed by spraying the polishing liquid, and only when the liquid is removed along with foreign substances (chips) generated during the machining process can be performed smoothly.

At this time, when the object to be processed is fixed using a vacuum chuck, liquid may flow into the vacuum pump along with foreign substances (chips) generated during the machining process.

Accordingly, in order to prevent smooth operation and failure of the vacuum pump, it is necessary to prevent foreign substances such as liquid from flowing into the vacuum pump when negative pressure is formed.

It is an object of the present invention to recognize the above problems and necessities, and to prevent liquid from flowing into the vacuum pump by removing liquid from the gas that is coupled to the vacuum pump, so that the operation of the vacuum pump coupled thereto is smooth. It is to provide a vacuum separator that can prevent failure.

The present invention was created to achieve the object of the present invention as described above, and the inlet portion 750 introduced in a state in which a liquid and gas are mixed on the upper side, and a liquid among gases introduced through the inlet portion 750 A separation housing 710 provided with a discharge unit 760 that is removed and discharged; Disclosed is a vacuum separator including a liquid discharge part 740 installed at the bottom of the separating housing 710 and discharging the liquid removed from the gas introduced through the inlet part 750 to the outside.

The liquid discharge part 740 is connected to a check valve 741 installed through the bottom of the separating housing 710 and opened and closed by control, and the check valve 741 is connected to the check valve 741. It may include a discharge pipe 742 for discharging the liquid removed from the gas introduced through the inlet 750 through the opening operation to the outside.

The separating housing 710 comprises an upper plate 720 in which the inlet portion 750 and the outlet portion 760 are installed, and the bottom portion of the separating housing 710 in which the liquid outlet portion 740 is installed, and the It may include a lower plate 730 in which the liquid discharge part 740 is installed, and a cylinder member 770 that is combined with the upper plate 720 and the lower plate 730 to form an inner space isolated from the outside. .

In the vacuum separator according to the present invention, the liquid accumulated in the separating housing 710 is transferred to the liquid while the liquid and gas are continuously introduced through the inlet unit 750 and the gas is discharged through the discharge unit 760. It may further include a secondary vacuum separator 200 that receives the liquid discharged from the liquid discharge part 740 and discharges it to the outside so that the liquid discharged from the liquid discharge part 740 can be discharged through the discharge part 740.

The secondary vacuum separator 200 includes a discharge housing 210 that forms an isolation space to contain the liquid discharged from the liquid discharge part 740, and is installed at the bottom of the discharge housing 210 to contain the discharge housing. A secondary discharge unit 240 for discharging the liquid contained in 210 to the outside; It may further include an air inlet 260 provided in the discharge housing 210 to introduce external air into the isolation space so that liquid can be discharged through the secondary discharge part 240.

The discharge part 760 may be connected to the vacuum pump 800 so that a negative pressure is formed in the inner space of the separation housing 710.

The discharge part 760 may be connected to the vacuum pump 800 so that a negative pressure is formed in the inner space of the separation housing 710.

The vacuum pump 800 may be a gas transfer type vacuum pump or a gas trapping type vacuum pump.

More specifically, as the vacuum pump 800, a dynamic vacuum pump including a displacement type vacuum pump or an ejector vacuum pump may be used.

The vacuum separator according to the present invention is coupled to the vacuum pump to prevent liquid from flowing into the vacuum pump by removing liquid from the gas containing the liquid, thereby making the operation of the coupled vacuum pump smooth and preventing failure. There is this.

In particular, the vacuum separator according to the present invention includes a liquid discharge unit having a check valve at the bottom of the separating housing where the liquid accumulates after the gas containing the liquid is introduced, thereby effectively removing the liquid from the gas by the operation of the check valve to the outside. As it can be discharged, there is an advantage that the liquid can be efficiently removed from the gas.

Furthermore, the vacuum separator according to the present invention is checked by additionally providing a secondary vacuum separator including a secondary discharge unit provided with a check valve at the bottom of the discharge housing that is coupled to the separation housing and holds the liquid discharged from the liquid discharge unit. It is removed from the gas by the operation of the valve, but there is an advantage in that the liquid can be efficiently discharged to the outside, so that the liquid can be efficiently removed from the gas.

In particular, the vacuum separator according to the present invention discharges the liquid accumulated in the separating housing through the liquid discharge part while the inflow of liquid and gas through the inlet and discharge of the gas through the discharge part are continuously made by the additional installation of the secondary vacuum separator. It can be removed from the gas, but the liquid can be efficiently discharged to the outside, so there is an advantage in that the liquid can be efficiently removed from the gas.

That is, conventionally, when the liquid contained in the vacuum tank is discharged, the pressure inside the vacuum tank can be converted to atmospheric pressure and then the liquid can be discharged, so that the operation of the device is inefficient. However, the vacuum separator according to the present invention is a vacuum tank, that is, a separation housing. The liquid can be discharged to the outside while maintaining the internal pressure in a vacuum, which can greatly improve the operating efficiency of the device.

1A and 1B are perspective and front views showing a vacuum pump according to an embodiment of the present invention.
FIG. 2A is a view showing a cross section in the AA direction of FIG. 1.
FIG. 2B is a diagram illustrating a cross section in the BB direction of FIG. 1.
2C is a diagram showing a modification example of FIG. 2B.
3 is an exploded perspective view showing a part of the configuration of the vacuum pump of FIG. 1.
4A is a perspective view showing a part of the configuration of the vacuum pump of FIG. 1.
4B is an exploded perspective view of FIG. 4A.
Fig. 4C is a cross-sectional view in the CC direction of Fig. 4A.
5 is a cross-sectional view of the vacuum pump of FIG. 3 in the DD direction.
6 is a plan view showing a part of the configuration of the vacuum pump of FIG. 3.
7 is a cross-sectional view in the EE direction of FIG. 1.
8 is a perspective view showing a state in which the vacuum separator according to the present invention is coupled to the vacuum pump of FIG. 1.
9 is a cross-sectional view in the direction I-I in FIG. 8.
10A is a perspective view showing a modified example of the vacuum separator of FIG. 8.
10B is a conceptual diagram showing a flow path including the vacuum separator of FIG. 10A.
Fig. 11 is a cross-sectional view in the direction II-II in Fig. 10A.
12 is a cross-sectional view in the direction III-III in FIG. 10A.
FIG. 13 is a perspective view showing a link assembly connecting two modules in a state in which fluid communication is possible while being coupled to the vacuum pump of FIG. 1 and isolated from the outside.
14 is a perspective view showing the link assembly and the coupling block of FIG. 13.
15 is a cross-sectional view in the direction IV-IV in FIG. 13.
16 is an exploded perspective view of the link assembly shown in FIG. 13.
17A and 17B are plan and side views illustrating a main body block of the link assembly of FIG. 16.
18A and 18B are plan and side views showing a coupling block among the link assembly of FIG. 16.

Hereinafter, a vacuum pump and a vacuum separator according to the present invention will be described with reference to the accompanying drawings.

The vacuum pump 800 according to the present invention has an air inlet 305 at one end and an air outlet 306 at the other end, as shown in FIGS. One or more hollow nozzle units 300 in which the through holes 312 are formed; It includes a chamber 400 in which the nozzle unit 300 is installed.

The nozzle part 300 is one or more hollow members in which an air inlet 305 is formed at one end, an air outlet 306 is formed at the other end, and a plurality of through holes 312 are formed along the longitudinal direction on the side surface. Various configurations are possible.

The air introduced through the air inlet 305 at one end of the nozzle unit 300 flows along the air flow path formed by the hollow inside the nozzle unit 300 and then is discharged to the outside through the air outlet 306 at the other end. I can.

The plurality of through holes 312 are formed along a longitudinal direction (air flow direction through the nozzle part 300) on a side surface of the nozzle part 300 and may communicate with an air passage inside the nozzle part 300, Accordingly, the air around the nozzle unit 300 may be introduced into the nozzle unit 300 through the through hole 312 and then discharged through the air outlet 306 together with the air introduced through the air inlet 305. .

The cross-sectional area of the air flow path may increase from the air inlet 305 to the air outlet 306. In this case, the cross-sectional area of the air flow path may be varied by varying the diameter DA of the air flow path.

The nozzle part 300 has a cross-sectional area of the internal air flow path larger as it goes from the air inlet 305 to the air outlet 306, and a plurality of through holes 312 communicating with the air flow path on the side are lengthened at the side of the nozzle part 300. If it is formed in a direction, various shapes and structures are possible.

For example, the nozzle part 300 includes a plurality of through-hole forming members 310 having one or more through-holes 312 formed on the side surfaces, and at least a part of the through-hole forming member 310 is inserted into the through-hole forming member 310 to form the air passage A plurality of flow path forming members 320 may be included.

The through-hole forming member 310 is a hollow pillar, and each through-hole forming member 310 is preferably formed to have the same outer diameter and inner diameter along the length direction.

In addition, each of the plurality of through hole forming members 310 may be configured to have the same shape and size in order to improve manufacturability.

For example, each of the through-hole forming members 310 may have two through-holes 312 formed along the circumferential direction on the side surfaces of the through-hole forming members 310.

At least a part of the flow path forming member 320 is inserted into one end of the through-hole forming member 310 to form a part of the air flow path of the nozzle unit 300, and various configurations are possible.

In this case, the through hole forming member 310 may be installed between adjacent flow path forming members 320.

The neighboring flow path forming members 320 may face each other at a position corresponding to the through hole 312 of the through hole forming member 310 coupled therebetween while being spaced apart from each other.

As an example, the nozzle unit 300 may include three through-hole forming members 310 and four passage-forming members 320, as shown in FIGS. 4A to 4C, and each channel-forming member ( 320) and the through hole forming member 310 may be alternately formed in a multi-layered structure along the longitudinal direction.

Through this, the flow path forming member 320 and the through hole forming member 310 are alternately positioned so that a plurality of through holes 312 can be located along the length direction of the nozzle unit 300, and the through hole 312 and the flow path Air flow passages formed by the forming member 320 may communicate with each other.

An end of the flow path forming member 320 positioned at one end of the nozzle part 300 among the plurality of flow path forming members 320 may correspond to the air inlet 305 described above, and the plurality of flow path forming members ( An end of the flow path forming member 320 located at the other end of the nozzle part 300 among 320 may correspond to the air outlet 306 described above.

A coupling portion coupled to the chamber 400 to be described later may be formed on the outer surface of the flow path forming member 320.

One or more O-ring members 302 may be installed in the coupling portion for close coupling with the chamber 400 to be described later.

Meanwhile, the above-described through-hole forming member 310 and the flow path forming member 320 may be fixedly coupled in various ways such as mutual assembly and adhesion, and may be made of various materials, but are preferably made of metal for durability and longevity. Can be done.

In addition, the nozzle unit 300 having the configuration as described above may be disposed in plural along the circumferential direction around the first through hole 612.

At this time, the capacity of the vacuum pump 800 is determined by the number of installations of the nozzle unit 300.

The chamber 400 has a configuration in which the nozzle unit 300 is installed therein, and various configurations are possible.

For example, the chamber 400 includes a first insertion hole 412 through which one end of the nozzle unit 300 is inserted and fixed, and a second insertion hole 414 through which the other end of the nozzle unit 300 is inserted and fixed. ) Is formed and the first chamber 410 that forms an inner space (IS) surrounding the side surface of the nozzle unit 300, and the first side wall of the first chamber 410 in which the first insertion hole 412 is formed. The second chamber 420 is combined to form a vacuum space (VS) in which a vacuum atmosphere is created according to the air inflow passage communicated with the air inlet 305 of the nozzle unit 300 and the air flow through the nozzle unit 300 And, a third chamber 430 that is coupled to a second sidewall of the first chamber 410 in which the second insertion hole 414 is formed to form an air outlet passage communicating with the air outlet 306 of the nozzle unit 300 It may include.

The first chamber 410 includes a first insertion hole 412 through which one end of the nozzle part 300 is inserted and fixed, and a second insertion hole 414 through which the other end of the nozzle part 300 is inserted and fixed. This is formed and various configurations are possible as a configuration to form an internal space (IS) surrounding the side surface of the nozzle unit 300.

The first insertion hole 412 is inserted through one end of the nozzle unit 300 (air inlet 305 side), more specifically, a flow path forming member 320 positioned at one end of the nozzle unit 300 Various configurations are possible with a fixture that is fixed and fixed.

As shown in FIG. 6, a plurality of first insertion holes 412 for installing a plurality of nozzle units 300 may be formed in the first chamber 410.

The second insertion hole 414 is inserted through the other end of the nozzle unit 300 (air outlet 306 side), more specifically, the flow path forming member 320 located at the other end of the nozzle unit 300 Various configurations are possible with a fixed fixture.

2A to 2B, a plurality of second insertion holes 414 for installing a plurality of nozzle units 300 may be formed in the first chamber 410.

That is, the flow path forming member 320 of the nozzle part 300 may be supported by the first insertion hole 412 and the second insertion hole 414 of the corresponding first chamber 410.

In this case, the first chamber 410 may form an inner space IS surrounding the nozzle unit 300 fixed to the first insertion hole 412 and the second insertion hole 414.

The second chamber 420 is coupled to the first side wall of the first chamber 410 in which the first insertion hole 412 is formed and communicates with the air inlet 305 of the nozzle unit 300 and a nozzle Various configurations are possible as a configuration to form a vacuum space (VS) in which a vacuum atmosphere is created according to the air flow through the unit 300.

The second chamber 420 is coupled to the first side wall of the first chamber 410 on which the first insertion hole 412 is formed, and thus the air inlet of the nozzle unit 300 through the first insertion hole 412 ( An air inflow space communicating with 305 and a vacuum space VS that is separated from the air inflow space may be formed.

The air inlet space is a space in which an air inlet passage communicating with the air inlet 305 of the nozzle unit 300 is formed, and various shapes and structures are possible.

As an example, the second chamber 420, as shown in FIG. 5, communicates the first insertion hole 412 and the air inflow space to the coupling surface that is coupled with the first side wall of the first chamber 410. Communication port 426 may be formed. The communication port 426 may be formed in various shapes and sizes according to the arrangement and size of the air inflow space.

At this time, one or more air supply ports 424 coupled with an air supply unit for supplying external air (compressed air) through the air inflow space may be formed on one side of the second chamber 420.

The vacuum space VS is a space in which a vacuum atmosphere is created according to the air flow through the nozzle unit 300 and can be configured in various ways.

For example, the second chamber 420, as shown in Fig. 5, the inner space (IS) and vacuum of the first chamber 410 on the coupling surface that is coupled to the first side wall of the first chamber 410 A communication port 425 for communicating the space VS may be formed. The communication port 425 may have various shapes and sizes according to the arrangement and size of the vacuum space VS.

At this time, a component requiring vacuum formation on one side of the second chamber 420 (e.g., a component requiring vacuum formation for a vacuum formed in the vacuum space VS by being coupled to the vacuum separator 700 (e.g., One or more vacuum transmission ports 427 for delivery to the vacuum separator 700 may be formed.

The third chamber 430 is coupled to a second sidewall of the first chamber 410 in which a second insertion hole is formed to form an air outlet passage communicating with the air outlet 306 of the nozzle unit 300. Configurable.

As an example, the third chamber 430 has an opening 436 formed on the coupling surface with the first chamber 410 to communicate with the air outlet 306 of the nozzle part 300 inserted into the second insertion hole. In addition, a discharge port 434 through which air discharged through the air outlet 306 is discharged to the outside may be formed on the other side.

In this case, the vacuum pump 800 may further include a silencer 232 installed in the air outlet passage among the third chamber 430 and through which air flowing through the air outlet passage is discharged to the outside.

The silencer 232 may have various configurations as a configuration for reducing noise caused by discharged air, and may be installed in the above-described discharge port 434 as an example.

On the other hand, in the vacuum pump 800 including the above-described configuration, the air flow from the inner space IS on the first side wall to the vacuum space VS of the second chamber 420 is A first check valve 610 may be installed to allow air flow from the vacuum space VS to the internal space IS while blocking.

The first check valve 610 is formed on the first side wall and connects the inner space IS of the first chamber 410 and the vacuum space VS of the second chamber 420. ), and a first check valve member 614 covering the first through hole 612 from the inner space IS side.

The first through hole 612 may be formed in various shapes and sizes, and may be formed in a plurality.

For example, as shown in FIG. 6, the first through holes 612 may be formed in a fan shape and may be formed in plural along the circumferential direction around the center of the first chamber 410.

The inner space IS of the first chamber 410 and the vacuum space VS of the second chamber 420 may be communicated with each other through the first through hole 612.

In the central portion of the first chamber 410, a coupling region 615 coupled to the first check valve member 614 to be described later may be formed.

The first check valve member 614 includes a plurality of first through holes 612 formed along the circumferential direction by being coupled with the first chamber 410 in the coupling region of the center of the first side wall of the first chamber 410. A check valve member that allows air flow from the vacuum space (VS) to the internal space (IS) while blocking the air flow from the internal space (IS) to the vacuum space (VS), and various shapes and materials are possible. Do.

For example, the first valve member 614 may be a valve plate made of a rubber material.

Meanwhile, the first chamber 410 of the vacuum chamber 10 described above is, as shown in FIGS. 1A to 3 and 7, in the longitudinal direction of the nozzle unit 300 (air flow through the nozzle unit 300). Direction) between the plurality of through holes 312 formed along the inner space (IS) of the first chamber 410 into a plurality of sub-spaces (SS). I can.

In this case, a third insertion hole 416 through which the nozzle part 300 is inserted may be formed in the partition wall part 212.

The partition wall part 212 is located between adjacent through holes 312 in the longitudinal direction, and the coupling part of the flow path forming member 320 of the nozzle part 300 is supported by the third insertion hole 416 Can be.

In this case, the O-ring member 302 may be installed along the outer circumference of the flow path forming member 320 for airtightness between the subspaces SS partitioned by the partition wall part 212.

A second check valve 620 may be installed in the partition 212 to block air flow in one direction between neighboring subspaces SS, as shown in FIGS. 1A to 3 and 7. .

The second check valve 620 includes a second through hole 622 formed in the partition wall portion 212 to communicate with neighboring sub-spaces SS, and a sub-space adjacent to the second through hole 622 ( Among the SS), a second check valve member 624 may be included that covers the air inlet 305 and the subspace SS side farther from the air inlet 305.

The second through hole 622 may be formed in various shapes and sizes, and may be formed in a plurality.

For example, as shown in FIG. 6, the second through hole 622 may be formed in a fan shape and may be formed in plural along the circumferential direction around the central portion of the partition wall portion 212.

Neighboring subspaces SS may communicate with each other through the second through hole 622.

A coupling region 625 coupled to a second check valve member 624 to be described later may be formed in a central portion of the partition wall portion 212.

The second check valve member 624 covers the second through hole 622 from the side of the sub-space SS far from the air inlet 305 among the sub-spaces SS adjacent to the second through-hole 622, and the air inlet 305 The air inlet 305 and the sub-space SS near the air inlet 305 and the sub-space close to the sub-space SS on the far side are blocked while blocking the air flow from the sub-space SS on the near side to the sub-space SS. As a check valve member that enables air flow to the space SS, various shapes and materials are possible.

For example, the second valve member 624 may be a valve plate made of a rubber material.

In one embodiment, the first chamber 410, as shown in FIGS. 1A to 3 and 7, a first insertion hole 412 is formed and a first check valve 610 is installed. It may include a subchamber 410a, one or more second subchambers 410b including the partition wall portion 212, and a third subchamber 410c in which a second insertion hole is formed.

In this case, the first subchamber 410a, the second subchamber 410b, and the third subchamber 410c may be sequentially stacked and combined along the length direction of the nozzle unit 300.

For example, in the case of FIGS. 1A to 3 and 7, two second subchambers 410b are sequentially coupled between a first subchamber 410a and a third subchamber 410c. will be.

Through this, the inner space IS of the first chamber 410 may be divided into three sub-spaces SS disposed in the longitudinal direction of the nozzle part 300.

In this case, a first check valve 610 and a second check valve 620 may be installed in the first subchamber 410a and the second subchamber 410b, respectively.

The first check valve 610 and the second check valve 620 may be sequentially opened and closed according to a vacuum level formed according to the air flow by the nozzle unit 300.

Hereinafter, a vacuum forming process performed in the vacuum pump 800 including the above-described configuration will be described in detail with reference to FIG. 7.

First, compressed air is introduced into the air inlet passage through the communication port of the second chamber 420, and the introduced compressed air flows through the air passage in the nozzle unit 300 through the air inlet port 305 of the nozzle unit 300. Flows along.

As the compressed air flows along the air passage inside the nozzle unit 300, the pressure inside the nozzle unit 300 decreases, and accordingly, the air in the subspace SS of the first chamber 410 corresponds to the nozzle unit It may be introduced into the air flow path of the nozzle unit 300 through the through hole 312 of (300).

Through this, the pressure of the sub-space SS may be gradually lowered.

Referring to FIG. 7, when the vacuum pump 800 additionally includes two second check valves 620 in addition to one first check valve 610, the first check valve 610 and the first check valve 610 according to the degree of vacuum. The opening and closing operation of the 2 check valve 620 is as follows.

When compressed air is supplied through the second chamber 420, the first check valve 610 and the two second checks are performed as air in the sub-space (SS) flows into the nozzle unit 300 through the through hole 312. All of the valves 620 are open.

A second subchamber that forms a sub-space (SS) farthest from the air inlet 305 of the nozzle unit 300 when a certain amount of air remains in the sub-space (SS) according to the supply of compressed air. The second check valve 620 installed at 410b is first closed.

When the compressed air is further introduced and the air in the sub-space (SS) becomes leaner than the low-vacuum state, the second sub-chamber (410b) is installed to form a sub-space (SS) close to the air inlet (305). The second check valve 620 is then closed.

When the sub-space SS becomes a high vacuum state by further introducing compressed air in the medium vacuum state, the vacuum space VS of the second chamber 420 may be closed up to the first check valve 610 to become a high vacuum state.

The compressed air introduced through the second chamber 420 and the air introduced into the nozzle unit 300 through the through hole 312 are combined and then discharged to the outside through the silencer 232 through the outlet of the third chamber 430 Can be.

The vacuum step formed by the vacuum pump 800 may be further subdivided by increasing the number of second subchambers 410b constituting the first chamber 410. In this case, the nozzle unit 300 installed in the first chamber 410 may also include corresponding through-hole forming members 310 as many as the number of sub-spaces SS partitioned in the second sub-chamber 410b.

In addition, FIGS. 1A to 3 and 7 illustrate the four nozzle portions 300 by forming four first insertion holes 412, second insertion holes, and third insertion holes 416 in the chamber 400, respectively. ) Is shown as the maximum capacity, but the embodiment of the present invention is not limited thereto.

An embodiment in which two, four, eight, etc. nozzle units 300 are installed is also possible, and at least some of the nozzle units 300 are removed, and the corresponding first insertion holes 412, second insertion holes, And an embodiment in which the capacity of the vacuum pump 800 is varied by closing the third insertion hole 416 is also possible.

More specifically, the vacuum pump 800 is the remaining first insertion in which the nozzle part 300 is not inserted through the plurality of first insertion holes 412 and the plurality of second insertion holes in order to change the capacity. One end and the other end are respectively inserted through the hole 412 and the second insertion hole, and may further include a closing member 400 for closing the first insertion hole 412 and the second insertion hole.

The closing member 400, the remaining first insertion hole 412 and the second insertion hole 414, in which the nozzle part 300 is not inserted through, (when the third insertion hole 416 is formed, the third insertion hole (416) included), and various formations and materials are possible.

For example, the closing member 400 is a stick member having the same external shape as the nozzle unit 300 without forming an air flow passage and a through hole 312 therein, and may function as a dummy nozzle unit.

That is, the closing member 400 may be formed in the same shape as the nozzle unit 300 except for the air flow path and the through hole 312, as shown in FIG. 2C.

Accordingly, when the maximum N number of nozzle units 300 can be installed in the chamber 200 (N first insertion holes 412 and N second insertion holes 414 are formed), the chamber 200 ), the number of nozzle units 300 can be adjusted from 1 to N-1 (N is a natural number of 2 or more), and the remaining first insertion holes 412 and where the nozzle unit 300 is not installed By installing the closing member 400 in the second insertion hole 414 (including the third insertion hole 416 when the third insertion hole 416 is formed), the capacity of the vacuum pump can be easily changed. In the case of FIG. 2C, three nozzle units 300 and one closing member 400 are installed in the chamber 200, and in this case, the maximum capacity of the illustrated chamber 200 (four nozzle units ( 300) can be used as a vacuum pump with a smaller capacity than the installed capacity).

At this time, since the closing member 400 is also coupled to and supported by the chamber 400, the O-ring member 302 installed on the outer surface of the nozzle unit 300 described above will be equally installed on the outer surface of the closing member 400. Of course you can.

Meanwhile, the vacuum pump 800 having the above configuration includes a vacuum chuck that fixes an object by forming a negative pressure on the surface, a transfer tool that picks up and transports the object using negative pressure, and thus a transfer tool that adsorbs and fixes the object, and the liquid is It can be used in various fields such as devices and systems that require negative pressure formation, such as a gas-liquid separation device that removes liquid from the contained gas and discharges the gas.

Meanwhile, the vacuum pump 800 described above may be used in various ways by being coupled to a component requiring vacuum formation.

As an example, the vacuum pump 800 is a vacuum separator for removing foreign substances, a milling machine, a drilling machine, a grinding machine, a welding machine, etc., in a state in which the object 2 is adsorbed and fixed by vacuum pressure. It can be used in a vacuum chuck module.

However, when the vacuum pump 800 is introduced into the vacuum pump in a state in which particles, liquids, etc. are contained in the process of suctioning external air due to the formation of negative pressure, the vacuum pump is damaged or a vacuum pressure loss occurs. There is a problem of lowering the efficiency.

Accordingly, as the vacuum separator 700 according to the present invention, in the present invention, liquid from the gas introduced through the inlet unit 750 and the inlet unit 750 is removed in a state in which a liquid and gas are mixed at the upper side. A separation housing 710 provided with a discharge unit 760 to be discharged; A vacuum separator 700 including a liquid discharge part 740 installed at the bottom of the separating housing 710 and discharging the liquid removed from the gas introduced through the inlet part 750 to the outside is presented.

The inlet unit 750 is installed on the upper side of the separating housing 710 and introduced into the upper side in a state in which a liquid and a gas are mixed, and various configurations are possible according to a fluid inlet structure.

As an example, it is preferable that the inlet part 750 is formed of a pipe extending downward through an upper plate 720 to be described later for efficient separation of liquid after gas including liquid flows into the separation housing 710. Do.

When the inlet portion 750 is configured as a pipe extending downwardly through the upper plate 720, the liquid contained in the gas can be effectively removed by being discharged into the liquid contained in the separation housing 710.

Meanwhile, the inlet unit 750 has a structure in which gas is sucked by negative pressure formed in the internal space of the separation housing 710, a vacuum chuck module that adsorbs and fixes an object by negative pressure, and a transfer tool that adsorbs and fixes the object at the end. , It can be connected to a suction nozzle that sucks and removes foreign substances.

In addition, in the case of the vacuum separator according to the present invention, since it is effective for liquid separation, an auxiliary vacuum separator 701 capable of removing solid foreign substances in front of the inlet unit 750 based on the fluid flow may be additionally installed.

The auxiliary vacuum separator 701 is installed on the front side of the inlet unit 750 to remove foreign substances contained in the gas being sucked, and various configurations are possible according to the principle and method of removing foreign substances.

The discharge unit 760 is a configuration in which a liquid from gas introduced through the inlet unit 750 is removed and discharged, and various configurations are possible.

For example, the discharge part 760 may be formed of a through hole 761 formed to penetrate the upper plate 720.

In addition, the discharge unit 760 may be coupled to a vacuum pump 800 to form a negative pressure, that is, a vacuum pressure in the inner space of the separation housing 710.

The vacuum pump 800 has been described by referring to the ejector vacuum pump described with reference to FIGS. 1 to 7 in the case of the embodiment of the present invention, but a gas transfer type vacuum pump, a gas trapping type vacuum pump, and more specifically, a volumetric transfer type vacuum A dynamic vacuum pump including a pump, an ejector vacuum pump, and the like may be used.

On the other hand, the discharge unit 760, when a negative pressure, that is, vacuum pressure is formed in the internal space when the liquid is discharged from the liquid discharge unit 740 to be described later, the liquid is not smoothly discharged. It is preferable that a check valve 762 for blocking the vacuum pressure is additionally installed.

When the liquid discharge part 740 discharges the liquid, the check valve 762 does not discharge the liquid smoothly when a negative pressure, that is, a vacuum pressure, is formed in the internal space. Various configurations are possible as a configuration for blocking.

On the other hand, together with and or in place of the installation of the check valve 762, a filter may be installed to block foreign substances in the separation housing 710 from flowing into the vacuum pump 800.

The filter is installed in conjunction with or in place of the installation of the check valve 762, and is configured to block foreign substances in the separation housing 710 from flowing into the vacuum pump 800, and various configurations are possible.

Meanwhile, a switching valve for connecting or releasing a flow path with the component may be installed between the vacuum pressure connector (not shown) and the inlet unit 750 connected to a component requiring vacuum formation such as the vacuum chuck module.

The switching valve may connect a flow path through which the vacuum pressure of the vacuum pump 800 described above is connected to a vacuum pressure connection pipe, and cut off the vacuum pressure to the vacuum pressure connection pipe.

In addition, when the vacuum pressure is cut off to the vacuum pressure connection pipe during operation of the switching valve, the switching valve may operate to transmit atmospheric pressure to the inlet unit 750.

In addition, the separation housing 710, in particular, the upper plate 720, a negative pressure release check valve 763 so that the negative pressure in the internal space of the separation housing 710 can be released when liquid is discharged from the liquid discharge unit 740. Can be installed.

The negative pressure release check valve 763, the separation housing 710, in particular, is installed on the upper plate 720, when the liquid is discharged from the liquid discharge unit 740, external air flows into the inner space of the separation housing 710 As a valve that opens as much as possible, various configurations are possible.

On the other hand, the separating housing 710 includes an inlet 750 in which a liquid and gas are mixed in the upper side, and an outlet 760 in which liquid is removed from the gas introduced through the inlet 750 and discharged. A variety of configurations are possible as a configuration provided with.

That is, the separating housing 710 has an inlet unit 750 and an outlet port 760 to form an internal space in which liquid among gases introduced through the inlet unit 750 is stored, and FIGS. As shown in Fig. 12, the liquid discharge part 740 forms the bottom of the upper plate 720 in which the inlet part 750 and the discharge part 760 are installed, and the separating housing 710 in which the liquid discharge part 740 is installed. It may include a lower plate 730 is installed, and a cylinder member 770 that is combined with the upper plate 720 and the lower plate 730 to form an inner space isolated from the outside.

The upper plate 720 is a configuration in which the inlet portion 750 and the outlet portion 760 are installed, and various configurations are possible according to a coupling structure with other members.

The lower plate 730 forms the bottom of the separating housing 710 in which the liquid discharge part 740 is installed, and the liquid discharge part 740 is installed, and various configurations are possible according to the coupling structure with other members.

The cylinder member 770 is combined with the upper plate 720 and the lower plate 730 to form an inner space isolated from the outside, and various configurations are possible.

For example, the cylinder member 770 is preferably a member made of a transparent material so that the amount of liquid contained therein can be checked.

The liquid discharge part 740 is installed at the bottom of the separating housing 710 and discharges the liquid removed from the gas introduced through the inlet part 750 to the outside, and various configurations are possible.

For example, the liquid discharge part 740 is connected to a check valve 741 and a check valve 741 installed through the bottom of the separating housing 710 and opened and closed by control, and the check valve 741 is It may include a discharge pipe 742 for discharging the liquid removed from the gas introduced through the inlet 750 by the opening operation to the outside.

According to the above configuration, when more than a predetermined amount of liquid is contained in the internal space of the separation housing 710, the check valve 741 of the liquid discharge unit 740 is operated to separate the gas from the separation housing 710. Liquid can be discharged to the outside.

At this time, the separation housing 710 may have at least a part of a transparent material so as to measure the amount of liquid contained therein, and a scale may be displayed in the vertical direction.

Furthermore, the separation housing 710 may additionally be installed with a sensor for measuring the amount of liquid contained therein, such as a water level sensor, so as to automatically discharge the liquid contained in the internal space.

Meanwhile, when the discharge unit 760 is connected to the vacuum pump 800, it may not be smoothly discharged to the outside due to a negative pressure, that is, a vacuum pressure in the internal space of the separation housing 710.

Accordingly, the discharge unit 760 is additionally installed with a check valve 762 for blocking the vacuum pressure transmitted from the vacuum pump 800, and the check valve 762 is a liquid of the liquid discharge unit 740 During discharge, the vacuum pressure transmitted from the vacuum pump 800 may be blocked.

In addition, the separation housing 710, in particular, the upper plate 720, a negative pressure release check valve 763 so that the negative pressure in the internal space of the separation housing 710 can be released when liquid is discharged from the liquid discharge unit 740. Is additionally installed, and the negative pressure release check valve 763 is also operated together with the operation of the check valve 762 to smoothly discharge the liquid through the liquid discharge unit 740.

On the other hand, in the case of the vacuum separator 700 as shown in FIGS. 8 and 9, when the liquid is discharged into the internal space of the separating housing 710, the check valve 762 is operated to cut off the vacuum pressure. There is a problem that the operation of the device to which 700) is coupled is not smooth.

Accordingly, in the vacuum separator 700 according to the invention, as shown in FIGS. 10A and 12, the inflow of liquid and gas through the inlet 750 and the discharge of gas through the outlet 760 are made continuously. It further includes a secondary vacuum separator 200 that receives the liquid discharged from the liquid discharge part 740 and discharges it to the outside so that the liquid accumulated in the separating housing 710 can be discharged through the liquid discharge part 740 can do.

The secondary vacuum separator 200 is configured to receive and discharge the liquid discharged from the liquid discharge part 740 to the outside so that the liquid accumulated in the separation housing 710 can be discharged through the liquid discharge part 740. Various configurations are possible.

For example, the secondary vacuum separator 200 includes a discharge housing 210 that is coupled to the separation housing 710 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, and the discharge housing 210 ) A secondary discharge part 240 installed at the bottom of the discharge housing 210 to discharge the liquid contained in the discharge housing 210 to the outside; It may include an air inlet 260 provided in the discharge housing 210 to introduce external air into the isolation space so that the liquid can be discharged through the secondary discharge unit 240.

The regular discharge housing 210 is coupled to the separation housing 710 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, and various configurations are possible.

As an example, the regular discharge housing 210 includes a separation housing 710, that is, a secondary lower plate 230 installed at an interval from the lower plate 730 of the separation housing 710, the lower plate 730, and It may include a secondary cylinder member 270 that is combined with the secondary lower plate 230 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740.

The secondary lower plate 230 is a configuration that is installed at a distance from the lower plate 730 of the separating housing 710 and may have a configuration similar to the lower plate 730 of the separating housing 710 described above. .

The secondary cylinder member 270 is a configuration that is combined with the lower plate 730 and the secondary lower plate 230 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, the liquid discharge unit The 740 is configured to be positioned to correspond to the inside of the isolation space, and may have a configuration similar to the cylinder member 770 of the separation housing 710 described above.

The secondary discharge unit 240 is installed at the bottom of the discharge housing 210 to discharge the liquid contained in the discharge housing 210 to the outside, and various configurations are possible, and the liquid discharge unit 740 and the above-described liquid discharge unit 740 and It can have a similar configuration.

Specifically, the secondary discharge part 240 is provided through the bottom of the discharge housing 210, that is, the secondary lower plate 230 to open and close by control, a check valve 241, and a check valve 241. It is connected to and may include a discharge pipe 742 for discharging the liquid contained in the discharge housing 210 to the outside by the check valve 241 is opened.

The air inlet 260 is provided in the discharge housing 210 and allows external air to be introduced into the isolation space so that liquid can be discharged through the secondary discharge unit 240, and various configurations are possible.

For example, the air inlet 260 is combined with the discharge housing 210, for example, a lower check valve 261 installed on the secondary lower plate 230, and the lower check valve 261 to provide external air. It may include an air inlet pipe 263 installed extending upward so as to be discharged to the upper side of the discharge housing 210.

The lower check valve 261 is a configuration for injecting external air into the discharge housing 210 so that liquid discharge can be smoothly discharged when the liquid is discharged by the secondary discharge unit 240, and various configurations are possible.

Here, when the lower check valve 261 is operated and external air flows into the discharge housing 210, the check valve 741 of the liquid discharge part 740 installed in the separation housing 710 is blocked, and the separation housing 710 ), it is possible to prevent the negative pressure formed in the inner space, that is, from affecting the vacuum pressure.

The air inlet pipe 263 is coupled to the lower check valve 261 and extends upward so that external air can be discharged to the upper side of the discharge housing 210, and various configurations are possible.

On the other hand, the air inlet 260 is, as another example, as shown in FIGS. 10A and 10B, on the front side of the inlet 750 during the flow of the flow path, instead of installing the lower check valve 261 It may be configured to be connected to the installed switching valve 980 to receive external atmospheric pressure or vacuum pressure of the vacuum pump 800.

Specifically, when the switching valve 980 is installed on the front side of the flow path of the inlet unit 750 to discharge the liquid contained in the inner space of the discharge housing 210 to the outside, it communicates with the atmospheric pressure communication member to discharge atmospheric pressure. When the liquid contained in the inner space of the discharge housing 210 is completely discharged, the vacuum pressure of the vacuum pump 800 is transferred to the inner space of the discharge housing 210.

Here, the vacuum pressure transmitted by the switching valve 980 is equal to the pressure between the inner space of the discharge housing 210 and the inner space of the separation housing 710.

In addition, the check valve 741 of the liquid discharge part 740 is configured to open when the pressure of the inner space of the discharge housing 210 is equal to or lower than the pressure of the inner space of the separation housing 710. When the pressure of the inner space of the discharge housing 210 without a control device is equal to or lower than the pressure of the inner space of the separation housing 710, the liquid contained in the separation housing 710 may be automatically discharged to the discharge housing 210.

The operation of the vacuum separator using the secondary vacuum separator as described above is as follows.

When a liquid greater than a predetermined amount is contained in the internal space of the separation housing 710, the liquid separated from the gas is discharged from the separation housing 710 by operating the check valve 741 of the liquid discharge unit 740. ) Can be discharged to the containment space.

At this time, when the liquid discharge part 740 is opened by the operation of the check valve 741, the lower check valve 261 and the check valve 241 installed in the discharge housing 210 are blocked and the separation housing 710 It is possible to prevent the negative pressure, that is, the vacuum pressure formed in the internal space of the unit from affecting.

Meanwhile, when the liquid discharge by the liquid discharge part 740 is completed, the communication between the separation housing 710 and the discharge housing 210 is released by the operation of the check valve 741 of the liquid discharge part 740.

On the other hand, as another example, the check valve 741 of the liquid discharge part 740 is the separation housing 710 when the pressure of the internal space of the discharge housing 210 is equal to or lower than the pressure of the internal space of the separation housing 710 It may be configured to automatically discharge the liquid contained in the discharge housing 210.

In this case, when the pressure in the inner space of the discharge housing 210 is maintained at the same pressure in the inner space of the separation housing 710, the check valve 741 of the liquid discharge unit 740 is automatically When the pressure of the internal space of the discharge housing 210 is equal to or lower than the pressure of the internal space of the separation housing 710, the liquid contained in the separation housing 710 may be automatically discharged to the discharge housing 210.

On the other hand, when liquid more than a preset amount is contained in the isolation space of the discharge housing 210, the liquid can be discharged from the discharge housing 210 to the outside by operating the check valve 241 of the secondary discharge unit 240. .

At this time, the lower check valve 261 is operated and opened, so that when the liquid is discharged by the secondary discharge unit 240, external air is injected into the discharge housing 210 so that the liquid is discharged smoothly.

Meanwhile, when liquid discharge from the discharge housing 210 is completed, the check valve 241 and the lower check valve 261 of the secondary discharge unit 240 are operated and blocked.

At this time, the discharge housing 210 may have at least a part of a transparent material so as to measure the amount of liquid contained therein, and a scale may be displayed in the vertical direction.

Furthermore, the discharge housing 210 may additionally be installed with a sensor for measuring the amount of liquid contained therein, such as a water level sensor, so as to automatically discharge the liquid contained in the internal space.

Meanwhile, when the air inlet 260 is connected to the switching valve 980 as shown in FIGS. 10A and 10B, the liquid contained in the discharge housing 210 may be discharged as follows.

First, when liquid of a predetermined amount or more is contained in the isolation space of the discharge housing 210, the liquid can be discharged from the discharge housing 210 to the outside by operating the check valve 241 of the secondary discharge unit 240. .

At this time, the lower check valve 261 is operated and opened, so that when the liquid is discharged by the secondary discharge unit 240, the switching valve 980 is operated so that the liquid is discharged smoothly, and external air is injected into the discharge housing 210, That is, atmospheric pressure is formed in the isolation space of the discharge housing 210.

And when atmospheric pressure is formed in the isolation space of the discharge housing 210, that is, when the pressure rises, the isolation space of the discharge housing 210 and the interior of the separation housing 710 by the check valve 741 of the liquid discharge part 740 Spaces are isolated from each other.

Meanwhile, when the liquid discharge by the secondary discharge part 240 is completed, the switching valve 980 is operated to form a vacuum pressure in the isolation space of the discharge housing 210, thereby stopping the liquid discharge to the second discharge part 240. do. Here, the check valve 241 of the secondary discharge unit 240 may be automatically operated by a pressure difference.

And when the pressure in the isolation space of the discharge housing 210 is lower than or equal to the pressure in the internal space of the separation housing 710, the check valve 741 of the liquid discharge part 740 is opened to open the separation housing 710. The liquid contained in the inner space of) is delivered to the isolation space of the discharge housing 210.

In the case of the vacuum separator 700 having the above configuration, when it is difficult to separate the liquid contained in the gas to be sucked at once, the vacuum separator 700 shown in FIGS. 8 to 12 is serial or parallel based on the flow of the fluid. The liquid contained in the inhaled gas can be effectively separated by being arranged in plural with the same.

Meanwhile, the two modules, such as the vacuum pump 800 and the vacuum separator 700 described above, need to be coupled to enable fluid communication while being isolated from the outside.

However, when two or more modules are combined, depending on the coupling structure, it is necessary to easily configure the operation during manufacturing, assembling or separating for maintenance.

Accordingly, as another aspect of the present invention, a link assembly 900 for connecting two modules, such as a vacuum pump 800 and a vacuum separator 700, in a state isolated from the outside to enable fluid communication is provided.

The link assembly 900 is a configuration in which two modules, such as a vacuum pump 800 and a vacuum separator 700, are connected to each other in a state that is isolated from the outside so that fluid communication is possible, and various configurations are possible.

As an example, the link assembly 900, as shown in Figs. 13 to 18B, the main block 910 and the main block 910 formed through the first communication hole 911 in the center, respectively A pair of coupling blocks 920 fixedly coupled with the first module and the second module and having a second communication hole 921 communicating with the first communication hole 911, and the main block 910 are combined with the main block It may include a fixed block 930 for fixedly coupling the 910 and the pair of coupling blocks 920.

The main block 910 is a block having a rectangular parallelepiped shape and having a first communication hole 911 in the center, and is preferably formed of a solid material.

In addition, the main block 910 is a female threaded portion 915 in which a coupling screw is screwed so that the fixing block 930 is fixedly coupled to the main block 910 by penetrating the fixing block 930 to be described later on all four sides. Is formed.

In addition, the main block 910 has a groove 912 into which the coupling key 931 formed on the inner circumferential surface of the fixed block 930 is inserted so as to maintain a solid coupling state with the fixed block 930. It is formed in a position corresponding to.

The pair of coupling blocks 920 are fixedly coupled with the first module and the second module, respectively, with the main block 910 in the center, and a second communication hole 921 communicating with the first communication hole 911 As the formed configuration, various configurations are possible.

As an example, the pair of coupling blocks 920 is formed with a screw hole 927 through which a coupling screw passes so as to be fixedly coupled to a first module and a second module, respectively.

And the pair of coupling blocks 920, the planar shape has a rectangular shape, and four sides have a concave groove 922 into which the coupling key 931 formed on the inner circumferential surface of the fixed block 930 is inserted, the coupling key 931 It is formed in a position corresponding to.

Meanwhile, the pair of coupling blocks 920 is the main block 910 so that the main block 910 and the pair of coupling blocks 920 are fixedly coupled when the fixed block 930 is coupled to the main block 910. A tapered surface 925 is formed at the edge of the opposite surface of the surface opposite to.

The tapered surface 925 is pressed by a pressing protrusion 932 protruding from the edge of the fixing block 930 when the fixing block 930 is coupled to the main block 910, thereby forming a main block 910 and a pair of The coupling block 920 is fixedly coupled.

Meanwhile, O-rings 902 and 903 are installed on the surfaces of the main block 910 and the pair of coupling blocks 920 facing each other to block the inflow of external air.

At this time, in order to stably install the O-rings 902 and 903, an O-ring installation groove 913 is formed on a surface of the main block 910 and the pair of coupling blocks 920 facing each other.

In addition, the pair of coupling blocks 920 is provided with O-rings 901 and 904 in order to block the inflow of external air on a surface coupled to the first module or the second module, and the O-rings 901 and 904 are stable. For installation, an O-ring installation groove 926 is formed on a surface that is coupled to the first module or the second module.

The fixed block 930 is a configuration that is coupled to the main block 910 and fixedly couples the main block 910 and the pair of coupling blocks 920 to at least one of the four sides of the main block 910. Combined, it is possible to fix the main block 910 and a pair of coupling blocks 920.

For example, the fixing block 930 is formed with a pair of pressing protrusions 932 to press the tapered surface 925 formed on the coupling block 920 at the edge, and the coupling screw penetrates through the main block 910. A screw hole 931 through which the coupling screw passes is formed so as to be screwed.

The tapered surface 925 is formed to decrease in thickness as it goes from the second communication hole 921 of the coupling block 920 to the edge, and correspondingly, the pressing protrusion 932 is also a surface corresponding to the tapered surface 925 In addition, a tapered surface 935 may be formed.

The main block 910 and the pair of coupling blocks 920 are firmly fixed by pressing the tapered surface 925 of the coupling block 920 and the tapered surface 935 of the fixing block 930 as described above. Are combined.

Meanwhile, the fixing block 930 may have a coupling key 931 inserted into the groove 912 formed in the body block 910 so as to maintain a solid coupling state with the fixing block 930.

The link assembly 900 described above may implement various coupling structures of the first module and the second module.

For example, as shown in FIG. 15, various coupling structures such as coupling the link assembly 900 at an angle of 90° around the auxiliary block 990 are possible.

Here, the auxiliary block 990 is a configuration that enables fluid communication with the link assembly 900, has a rectangular parallelepiped shape, and communication holes 993, 994, 995 are formed on at least two or more of the six surfaces. It is formed and the link assembly 900 is coupled to two or more of the communication holes 993, 994, and 995, thereby implementing various fluid communication structures.

Meanwhile, in the auxiliary block 990, a communication hole 993 to which the link assembly 900 is not coupled may be hermetically coupled by a sealing member 902.

In addition, as described above, the auxiliary block 990 may be variously utilized, such as a separate valve member such as a switching valve 980 being combined.

Since the above is only described with respect to some of the preferred embodiments that can be implemented by the present invention, as well known, the scope of the present invention should not be limited to the above embodiments and should not be interpreted. It will be said that both the technical idea and the technical idea together with the fundamental are included in the scope of the present invention.

300: nozzle part 400: chamber
610: first check valve 620: second check valve
700: vacuum separator 800: vacuum pump

Claims (7)

Separation housing 710 provided with an inlet unit 750 in which liquid and gas are mixed on the upper side, and an outlet unit 760 through which liquid is removed and discharged from the gas introduced through the inlet unit 750 and;
And a liquid discharge part 740 installed at the bottom of the separating housing 710 to discharge the liquid removed from the gas introduced through the inlet part 750 to the outside,
The separation housing 710,
The inlet portion 750 and the discharge portion 760, the upper plate 720 is installed, and the liquid discharge portion 740 is installed forming the bottom of the separating housing 710, the liquid discharge portion 740 is installed. It includes a lower plate 730, and a cylinder member 770 that is combined with the upper plate 720 and the lower plate 730 to form an inner space isolated from the outside,
The liquid accumulated in the separating housing 710 is discharged through the liquid discharge unit 740 while the liquid and gas are continuously introduced through the inlet unit 750 and the gas is discharged through the discharge unit 760 It further includes a secondary vacuum separator 200 for receiving and discharging the liquid discharged from the liquid discharge unit 740 to the outside,
The secondary vacuum separator 200,
A discharge housing 210 coupled to the separation housing 710 to form an isolation space to contain the liquid discharged from the liquid discharge unit 740, and the discharge housing 210 installed at the bottom of the discharge housing 210 A secondary discharge unit 240 for discharging the liquid contained in 210 to the outside; Further comprising an air inlet 260 provided in the discharge housing 210 to introduce external air into the isolation space so that liquid can be discharged through the secondary discharge unit 240,
The inlet portion 750 is a pipe extending downwardly through the upper plate 720,
The air inlet 260 is coupled to a lower check valve 261 installed under the discharge housing 210 and the lower check valve 261 so that external air is separated from the discharge housing 210 A vacuum separator including an air inlet pipe 263 extending upward and installed so as to be discharged upward. The method according to claim 1,
The liquid discharge part 740,
A check valve 741 installed through the bottom of the separating housing 710 to open and close by control,
Characterized in that it comprises a discharge pipe 742 which is connected to the check valve 741 and discharges the liquid removed from the gas introduced through the inlet 750 through the opening operation of the check valve 741 to the outside. Vacuum separator. delete delete delete delete The method according to any one of claims 1 to 2,
The discharge unit 760 is a vacuum separator, characterized in that connected to the vacuum pump 800 to form a negative pressure in the inner space of the separation housing (710).

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