KR20200059779A - Package unloading apparatus - Google Patents

Abstract

Disclosed is a package unloading device, which comprises: a ring loading unit for accommodating at least one ring to which a plurality of packages are attached; a ring gripper enabling the ring to be drawn out of or into the ring loading unit; a first ring picker for gripping and transporting the ring drawn out of the ring loading unit; an expander on which the ring transported by the first ring picker is seated; a brush device including a flat brush structure and a roll brush structure, and brushing the packages picked up from the ring seated on the expander in at least one of the flat brush structure and the roll brush structure; a tray unit for preparing a tray on which the completely inspected packages are loaded; and a package picker module for picking up the packages from the ring seated on the expander, and sequentially moving the brush device and the tray of the tray unit. Each of the flat brush structure and the roll brush structure is vibrated for a predetermined time when the packages are in contact therewith. According to the present invention, the packages attached to the ring can be automatically loaded.

Description

Package unloading device {PACKAGE UNLOADING APPARATUS}

The present application relates to an unloading device of an EMI shielded semiconductor package.

Packages used in electronic products are EMI shielded to block electromagnetic waves on the human body or to minimize electrical and electronic interference between adjacent electronic components.

The EMI shielding process should be performed on the top and side surfaces (for example, 4 side surfaces) except the bottom surface provided with terminals such as solder balls of the package. Therefore, the EMI shielding process is not performed while the package is mounted on the tray in which the package is densely packed, and a plurality of packages are spaced apart to facilitate the EMI shield treatment on the side of the package and attached to the film attached to the ring-shaped frame. It can be performed in one state. Accordingly, when the EMI shield processing process is completed, the package needs to be separated from the ring (film attached to the ring) and loaded on a tray, and an automatic device is required to perform this automatically.

The background technology of the present application is disclosed in Korean Patent Publication No. 10-2017-0043997.

An object of the present invention is to solve the problems of the prior art described above, and an object of the present invention is to provide a package unloading device that automatically loads a package attached to a ring into a tray.

However, the technical problems to be achieved by the embodiments of the present application are not limited to the technical problems as described above, and other technical problems may exist.

As a technical means for achieving the above technical problem, the package unloading apparatus according to an embodiment of the present application, a ring stacking unit for receiving at least one ring to which a plurality of packages are attached; A ring gripper that draws a ring from the ring loading portion or draws a ring into the ring loading portion; A first ring picker for gripping and transporting the ring drawn from the ring loading part; An expander on which the ring conveyed by the first ring picker is seated; A brush device including a flat brush structure and a roll brush structure, and brushing a package picked up from a ring seated on the expander in at least one of the flat brush structure and the roll brush structure; A tray portion in which a tray on which the inspected package is loaded is prepared; And a package picker module that picks up the package from the ring seated on the expander and sequentially moves it to the tray of the brush device and the tray, and each of the flat brush structure and the roll brush structure vibrates for a predetermined time when the package is contacted. can do.

According to an embodiment of the present application, the flat brush structure, the base portion; And a plurality of brush units protruding upward from the base portion and disposed along the length direction and width direction of the base portion, and the first gripping portion can make the gripped package contact the brush unit.

According to one embodiment of the present application, the flat brush structure is capable of vibrating in the longitudinal direction, vibrating in the width direction, and vibrating according to movement in the circumferential direction of the axis in the vertical direction.

According to one embodiment of the present application, when the flat gripping structure vibrates in the longitudinal direction, the first gripping portion is rotated in the widthwise direction so that the gripped package in contact with the flatbrushing structure vibrates in the widthwise direction. When vibrating, and when the flat brush structure vibrates in the width direction, the gripped package vibrates in the longitudinal direction so as to vibrate in the longitudinal direction, and when the flat brush structure vibrates according to the movement in the circumferential direction, gripping One package may vibrate to rotate in the reverse direction of the direction of movement of the flat brush structure.

According to an embodiment of the present application, the brush portion, a first linear drive unit for moving the base portion in the longitudinal direction; A second linear drive unit moving the base portion in the width direction; And it may further include a rotating unit for rotating the base portion in the circumferential direction.

According to one embodiment of the present application, the roll brush structure includes: a shaft portion in which a longitudinal direction is parallel to the longitudinal direction of the base portion; And a brush unit extending in a spiral shape along the circumference of the shaft portion, and may be provided at the rear of the flat brush structure.

According to one embodiment of the present application, the flat brush structure and the roll brush structure further comprises an alignment unit on which a package in which a contact has been completed is loaded, wherein the alignment unit is recessed downwardly from its upper surface, so that the agent 1 The gripping portion may include a depression in which the packages gripped individually are loaded.

According to one embodiment of the present application, the inner surface of the depression may include an inclined inclined surface so that a package placed into the depression is shifted to the bottom, shifting from the bottom of the depression.

According to the exemplary embodiment of the present application, the second gripping unit may further include a gripping package individually loaded in the alignment unit and transferring the package to the vision inspection unit.

According to one embodiment of the present application, it may be further provided on the lower side of the flat brush structure and the roll brush structure to further include a dust collector for sucking the falling foreign matter.

The above-described problem solving means are merely exemplary and should not be construed as limiting the present application. In addition to the exemplary embodiments described above, additional embodiments may exist in the drawings and detailed description of the invention.

According to the above-described problem solving means of the present application, the ring loaded on the ring loading part is drawn out by the ring gripper and seated on the expander by the first ring picker, and the ring mounted on the expander is a picker of the package picker module By being picked up from the ring, it can be loaded onto a tray via a brush device. Accordingly, a package unloading device that automatically picks up a package from a ring and places it on a tray can be implemented.

Further, according to the problem solving means of the present application described above, the picker can be rotated when the package is picked up from the ring of the picker of the package picker module, so that the package can be easily separated from the film.

In addition, according to the above-mentioned problem solving means of the present application, the first package picker package is moved from the ring in the package providing state to the brush device and the first operation is performed, and the brush picked up is packaged so that the packaged brush is made. The second operation and the third operation of moving the brushed package from the brush device to the presizer and placing it on the presizer and the first operation, the second operation, and the third package picker unit in contact with the device. Since the operations can be performed sequentially by staggering each other, the first to third operations can be performed by the two package picker units, so that the package can be picked up from the ring and brushed and moved to the presizer faster than in the prior art. have. In addition, the fourth operation of photographing and inspecting the top surface of the package placed on the presizer of the third package picker unit, and the fifth operation of picking up the package from the presizer and maintaining the pickup so that the bottom surface of the package is photographed. The sixth operation of holding the pickup so that the side of the photographed package is photographed, and the seventh operation of placing the packaged photographed side on the tray and the fourth to seventh operations of the fourth package picker unit are staggered to be sequentially performed. Since the fourth to seventh operations can be performed by the two package picker units, the upper, lower and side surfaces of the package can be inspected more quickly than the prior art, and can be divided into good and bad and loaded on the tray. Accordingly, the operation of removing the package from the film and removing the foreign material to perform a defect inspection and loading the tray can be performed efficiently and quickly.

In addition, according to the above-described problem solving means of the present application, a tray in which a good product package that is quickly loaded and completed in a large amount compared to a defective package is provided in each of the two tray portions, the tray portion of one of the two tray portions is a tray. When loading of the good package for the product is completed and the tray must be recovered, even when the tray of one tray part is collected, the good package can be loaded in the tray of the other tray part. Package loading can be continued without stopping.

1 is a schematic plan view of a package unloading device according to an embodiment of the present application.
2 is a schematic perspective view of a package unloading device according to an embodiment of the present application.
3 is a schematic perspective view of a ring loading part of a package unloading device according to an embodiment of the present application.
Figure 4a is a schematic perspective view of the gripping portion is moved to one side in the X-axis direction to grip the ring of the package unloading device according to an embodiment of the present application.
4B is a schematic perspective view of a package unloading device according to an embodiment of the present application in which the ring is moved to a preset position.
5A is an enlarged view of the gripping portion of FIG. 4A.
5B is an enlarged view of a gripper of a gripper of a package unloading device according to an embodiment of the present application in a state in which the ring is gripped.
6 is a schematic perspective view of an expander of a package unloading device according to an embodiment of the present application.
7 is a schematic perspective view of a plunger unit of a package unloading device according to an embodiment of the present application.
8 is a perspective view of a package unloading device according to an embodiment of the present disclosure, in which some configurations of the brush device are omitted so that the inside of the brush device is shown.
9 is a perspective view of a brush device of a package unloading device according to an embodiment of the present disclosure, in which some configurations of the brush device are omitted so that the inside of the brush device is shown.
10 is a side view of the brush device of the package unloading device according to the exemplary embodiment of the present disclosure, in which some components of the brush device are omitted so that the inside of the brush device is shown;
11 is a schematic cross-sectional view of each picker of the first and second package picker portions of the package unloading apparatus according to the exemplary embodiment of the present application according to an exemplary embodiment of the present application in which the position of the gripped semiconductor package is in a fixed position.
12 is a schematic cross-sectional view of each picker of the first and second package picker portions of the package unloading apparatus according to an exemplary embodiment of the present disclosure, in which the position of the gripped semiconductor package is out of position.
13 is a schematic cross-sectional view of a presizer of a package unloading device according to an embodiment of the present application in which a semiconductor package is placed.
14A is a schematic perspective view of a package picker module of a package unloading device according to an embodiment of the present application.
14B is a schematic perspective view of a picker in a state in which a cover of a package picker module of a package unloading device according to an embodiment of the present disclosure is removed.
15 is a schematic perspective view of a presizer of a package unloading device according to an embodiment of the present application.
16 is a schematic cross-sectional view of a picker of a first package picker unit of a package unloading device according to an embodiment of the present application.
FIG. 17 is an enlarged view of A of FIG. 16.
18 is an enlarged view of B in FIG. 16.
19 is a schematic cross-sectional view for explaining that the eject pin of the picker portion of the first package picker portion of the package unloading device according to an embodiment of the present application is moved upward.
20 is a perspective view of a vacuum generating unit of a first package picker unit of a package unloading device according to an embodiment of the present application.
21 is a schematic cross-sectional view of a vacuum generating unit of a first package picker unit of a package unloading device according to an embodiment of the present application.
22 is a schematic perspective view of a vacuum nozzle unit of a vacuum generating unit of a first package picker unit of a package unloading device according to an embodiment of the present application.
23 is an enlarged view of A of FIG. 21.
25 is a schematic perspective view of a tray moving part provided with a tray part of a package unloading device according to an embodiment of the present application.
26 is a schematic perspective view of a tray stacker of a package unloading device according to an embodiment of the present application.
27 is a schematic perspective view of a tray picker, a first ring picker, and a second ring picker of a package unloading device according to an embodiment of the present application.
28 is a schematic perspective view of a side vision unit of a package unloading device according to an embodiment of the present application.

Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present application pertains may easily practice. However, the present application may be implemented in various different forms and is not limited to the embodiments described herein. In addition, in order to clearly describe the present application in the drawings, parts irrelevant to the description are omitted, and like reference numerals are assigned to similar parts throughout the specification.

Throughout this specification, when a part is "connected" to another part, this includes not only "directly connected" but also "electrically connected" with another element in between. do.

Throughout the present specification, when a member is positioned on another member “on”, “on the top”, “top”, “bottom”, “bottom”, “bottom”, this means that one member is attached to another member. This includes cases where there is another member between the two members as well as when in contact.

Throughout the present specification, when a part “includes” a certain component, it means that the component may further include other components, not to exclude other components, unless specifically stated to the contrary.

The present application relates to a package unloading device.

Hereinafter, a package unloading device (hereinafter referred to as a 'this package unloading device') according to an embodiment of the present application will be described.

The package unloading device may be applied to separate the package from the film to which the package is attached and remove foreign substances such as burrs remaining in the package, and then to be loaded onto a tray after the inspection of the package state is completed. For example, in the process of manufacturing a semiconductor package, the semiconductor package may be EMI shielded while attached to a film attached to the outer circumferential surface of the ring-shaped frame, and after EMI shielding, separation from the film (removal, separation) The burrs can be removed and loaded on trays, and the package unloading device can be applied to these processes. For reference, hereinafter, the ring may mean a ring-shaped frame to which a film is attached.

1 and 2, the present package unloading device includes a ring stacking unit 1 for receiving at least one ring 0 to which a plurality of packages are attached. Specifically, a ring (0) to which a film (film to which a plurality of packages are attached) is attached and a ring (0) to which a package is detached from the package may be accommodated in the ring loading part 1. In addition, the ring stacking unit 1 may be stacked with a plurality of rings 0 separated by a plurality of layers. For example, referring to FIG. 3, the ring loading part 1 may include a housing 11 having two wall frames 111 spaced apart from each other. In addition, grooves recessed in the outer direction may be formed on surfaces (inner surfaces) of the wall frame 111 facing each other, each of a plurality of grooves of the wall frame 111, each of a plurality of grooves of the other wall frame 111 And may be formed to a height corresponding to each other. The plurality of rings (0) is separated into a plurality of layers on the ring loading part (1) in the form that at least a portion of each rim is mounted in the groove of one wall frame (111) and the groove of the other wall frame (111). Can be.

In addition, referring to FIGS. 1 and 2, the package unloading device is a ring gripper 2 for drawing the ring 0 from the ring loading part 1 or for introducing the ring 0 into the ring loading part 1. It includes. Exemplarily, referring to FIGS. 1 and 3, the ring loading part 1 may include an opening formed in the X-axis direction so that the ring 0 enters and exits. Referring to FIG. 4A, the ring gripper (2) may include a gripping portion 21 capable of gripping the ring 0 and a moving portion 22 for moving the gripping portion 21 in the X-axis direction. Referring to FIGS. 4A and 4B together, The holding part 21 is moved to one side in the X-axis direction and grips the ring 0 loaded in the ring loading part 1, and is moved to the other side in the X-axis direction, so that the ring 0 is outside the ring loading part 1 Can be withdrawn. For reference, the moving part 22 may include a rail 221 that guides the movement of the gripping part 21 and a power source (such as a motor) 222 that moves the gripping part 21. In addition, referring to FIG. 5A, the gripping portion 21 may include an upper grip unit 211 and a lower grip unit 212 in which mutual spacing is adjusted in the vertical direction, and the ring of the gripping portion 21 ( 0) When gripping, the upper grip unit 211 is in contact with the ring (0) or the upper surface of the film attached to the ring (0), and the lower grip unit 212 is the ring (0) or the film attached to the ring (0) Can be contacted on the lower surface. That is, referring to FIG. 5B, at least a portion of the ring 0 is interposed between the upper grip unit 211 and the lower grip unit 212, so that the gripping portion 21 can grip the ring 0.

Also, the gripping portion 21 can be moved in the vertical direction (Z-axis direction). Accordingly, the gripping portion 21 may have a height corresponding to the height of each of the rings 0 stacked in each layer on the ring loading portion 1 to approach the inside of the layer to grip the ring 0.

5A and 5B, the ring gripper 2 may include a sensor unit 24 that irradiates the sensor light 24r in the moving direction of the gripping unit 21. The presence or absence of the ring 0 in the layer being approached can be detected by irradiation of the sensor light before the gripping portion 21 approaches within a predetermined range into each layer of the ring loading portion 1. Accordingly, it is possible to prevent the gripping portion 21 from being drawn into the layer where the ring 0 is not loaded. It is determined whether a ring exists between the upper grip unit 211 and the lower grip unit 212 by irradiating the sensor light to the upper surface of the ring in the direction in which the upper grip unit 211 and the lower grip unit 212 face each other. In order to reach the ring loading position of each layer of the ring loading part 1 (up to the point where the ring is located between the upper grip unit 211 and the lower grip unit 212), the ring gripper 2 had to enter each other. . However, in contrast, the ring gripper 2 of the package processing apparatus of the present application determines whether the ring is present by irradiating the sensor light 24r toward the direction of the gripping portion 21, that is, the side surface of the ring. Ring loading even if the ring gripper 2 does not enter to the ring loading position of each layer of the ring loading portion 1 (to the point where the ring is positioned between the upper grip unit 211 and the lower grip unit 212). It is possible to quickly determine the presence or absence of the ring 0 loaded in each layer in the unit 1.

In addition, referring to FIGS. 4A and 4B, the gripping portion 21 can grasp the ring 0 and move (withdraw) it to a predetermined position outside the ring loading portion 1, wherein the ring gripper 2 is It is provided at a preset position, and may include a mounting portion 23 on which at least a portion of the ring 0 is mounted when the ring 0 is positioned at a preset position. That is, the gripping portion 21 may move the ring 0 onto the mounting portion 23 provided at a preset position. The mounting portion 23 may include one side member 231 supporting one side of the frame of the ring 0 and another side member 232 supporting the other side of the frame of the ring 0.

In addition, referring to FIGS. 1 and 2, the package unloading device includes a first ring picker 63 that adsorbs and holds the ring 0 drawn from the ring loading unit 1 to transfer it. The first ring picker 63 can vacuum the upper surface of the ring 0 drawn to a predetermined position and grasp it, and transfer it to the expander 4. According to one embodiment of the present application, the first ring picker 64 may have a shape corresponding to a left half (semi-circle) shape based on the plane of the ring 0. In addition, the second ring picker 64 to be described later may have a shape corresponding to a right half (semicircle) shape with respect to the plane of the ring 0. Therefore, the first ring picker 64 and the second ring picker 64 approach the expander 4 to place the ring 0 and adsorb it, thereby minimizing the moving distance of each ring picker. Interference with each other can be minimized.

1 and 2, the package unloading apparatus includes an expander 4 on which the ring 0 conveyed by the first ring picker 63 is seated. Referring to FIG. 6, the expander 4 may include a stage 41 on which the ring 0 is loaded. Illustratively, the stage 41 is provided in a through hole in which the ring 0 is disposed so as to expose the lower surface of the film attached to the ring 0 to the lower side, and in a portion surrounding the through hole, a ring disposed in relation to the through hole It may include a clamp for gripping at least a portion of 0), a ring detection sensor for detecting the presence or absence of the ring 0 with respect to the through hole.

In addition, referring to FIGS. 1 and 6 together, the stage 41 is movable in the Y-axis direction. For example, referring to FIG. 6, the expander 4 may include a rail 43 that guides the movement of the stage 41 in the Y-axis direction, and a motor that moves the stage 41. In addition, referring to FIGS. 1 and 6 together, the other side of the rail 43 of the expander 4 in the Y-axis direction seats the ring 0 with respect to the stage 41 and the ring 0 from the stage 41. A ring loading and collection area in which the collection is performed may be formed, and a first package picker portion 72 and a product to be described later from the ring 0 seated on the stage 41 may be formed on one side in the Y-axis direction of the ring loading and collection area. 2 A package pick-up area where each picker 721 of the package picker unit 74 picks up a package may be formed. For reference, the package pick-up area may be formed to allow access to the respective pickers of the first package picker portion 27 and the second package picker portion 74. In addition, the stage 41 is moved along the rail 43 and may be located in the ring loading and collecting area and the package pickup area. Accordingly, the stage 41 receives the ring 0 drawn from the ring loading part 1 in the ring loading and collecting area, and is moved to one side in the Y-axis direction along the rail 42 to be the first in the package pickup area. The package can be separated by the respective pickers 721 of the package picker unit 72 and the second package picker unit 74, and the package by the first package picker unit 72 and the second package picker unit 74 When separation is complete, it can be moved to the ring loading and collection area. In addition, when the stage 41 is moved to the ring loading and collecting area, the ring 0 where the package separation (removal) is completed is collected, and the ring 0 before the package separation is removed by the first ring picker 63 41). At this time, the collection of the ring 0 may be made by the second ring picker 64 to be described later, and the seating of the ring 0 may be made by the first ring picker 63. This will be described later.

In addition, the stage 41 may include a rotating structure for rotating the ring 0 on the lower side of the clamp. The ring 0 that is seated on the stage 41 is not arranged in a fixed position, and a plurality of packages may be arranged at a predetermined angle with respect to the fixed position. In addition, whether the ring 0 is properly positioned may be determined by the first vision unit 725, which will be described later. Each picker 721 of the first package picker unit 72 and the second package picker unit 74 When the ring (0) is displaced at a predetermined angle at a position where) can adsorb each package, the rotating stage (41) rotates the ring (0) to seat the ring (0) seated on the stage (41). ) Can have a fixed position. Accordingly, the ring 0 may have a package providing state in which the package can be picked up by the picker 721. That is, the ring 0 in a package providing state may mean a ring 0 in a state where it is disposed in the expander 4 with a fixed position. In addition, for example, the stage 41 can rotate the ring 0 by rotating the clamp holding the ring 0 relative to the through hole.

Also, referring to FIGS. 6 and 7, the expander 4 is picked up by the pickers 721 and 741 of the package on the ring 0 loaded on the stage 41, from the lower side of the package to the upper side of the package. It may include a plunger unit 42 for applying an external force. For example, the plunger unit 42 is driven in the X-axis, Y-axis and up-down direction (Z-axis direction) and arranged on the ring 0 loaded on the stage 41 by movement in the X-axis and Y-axis. Among the plurality of packages, the picker 721 may move to the lower side of the package to be picked up, and when the corresponding package is picked up from the ring 0 loaded on the stage 41, it is picked up by driving from the lower side of the package to the upper side. An external force in the upward direction can be applied to the package. Accordingly, the package attached to the film can be more easily separated from the film. For reference, the portion in contact with the package of the plunger unit 42 may be made of rubber or metal.

In addition, referring to FIG. 1, the package unloading device includes a brush device 5 for brushing a package picked up from a ring 0 seated on the expander 4. The brush device 5 may remove foreign substances such as burrs by brushing the package separated from the film by the package picker module 7 and transferred to the brush device 5. For example, referring to FIG. 8, the brush device 5 may include a flat brush structure 511 and a roll brush structure 512, and first and second package picker modules 72 and 74 to be described later. Each picker 721 may contact the package picked up from the film of the ring 0 to one or more of the flat brush structure 511 and the roll brush structure 512, and the flat brush structure 511 and the roll brush structure Each of the 512 may vibrate for a predetermined time when the package is contacted to remove foreign substances from the package.

Hereinafter, the brush device 5 will be described in more detail.

For reference, in the description of the brush device 5 of the package unloading device, terms related to direction or position (upper, lower, front, rear, etc.) are set based on the arrangement state of each component shown in the drawings. . For example, when looking at FIG. 8, the 12 o'clock direction may be the upper side, the 6 o'clock direction is the lower side, the 4 o'clock direction is generally the front, and the 10 o'clock direction is the rear, and the like.

8 is a perspective view of a brush device according to an embodiment of the present application in which some parts of the brush part are omitted so that the inside of the brush part is shown, and FIG. 9 is a view of some parts of the brush part so that the inside of the brush part is shown It is a perspective view of a brush portion of a brush device according to an embodiment, and FIG. 10 is a side view of the brush portion of the brush device according to an embodiment of the present application in which an illustration of a part of the brush portion is omitted so that the inside of the brush portion is shown. , FIG. 11 is a schematic cross-sectional view of a gripping portion of a brush device according to an embodiment of the present application in which the position of the gripped semiconductor package is in a fixed position, and FIG. 12 is a view of the present application in which the position of the gripped semiconductor package is out of a fixed position. Is a schematic cross-sectional view of a gripping portion of a brush device according to an embodiment, and FIG. 13 is a schematic cross-sectional view of a presizer of a brush device according to an embodiment of the present application in which a semiconductor package is placed.

Referring to FIG. 8, the brush device 5 includes a brush portion 51. The brush portion 51 includes a flat brush structure 511 and a roll brush structure 512. 9 and 10, the flat brush structure 511 protrudes upward from the base portion 5112 and the base portion 5112, and a plurality of brushes are disposed along the length direction and width direction of the base portion 5112 Unit 5111 may be included. As will be described later, the brush unit 5111 of the flat brush structure 511 may contact the package and brush the package. Therefore, the brush unit 5111 of the flat brush structure 511 may be a material that does not damage the package when brushing the package.

In addition, referring to FIG. 10, the roll brush structure 512 may be provided at the rear of the flat brush structure 511, and the shaft portion 5121 is disposed such that the longitudinal direction is parallel to the longitudinal direction of the base portion 5112 and It may include a brush unit 5202 provided in a spiral form along the circumference of the shaft portion 5121. The brush unit 5202 of the roll brush structure 512 may brush the package while rotating about the shaft portion 5121. Accordingly, the brush unit 5202 of the roll brush structure 512 may be a material that does not damage the package when brushing the package.

Also, referring to FIG. 11, the brush device 5 includes a first gripping portion 53. The first gripping portion 53 grips the package. The first gripping portion 53 is a device that grips a plurality of dried packages from a predetermined table provided in the semiconductor package cutting device and moves them to the upper portion of the brush device 5. The first gripping portion 53 may grasp and transport the package, and release the grip to be loaded. For example, the first gripping portion 53 may grasp the package by vacuum adsorption. In addition, the first gripping portion 53 can release the gripping by releasing the vacuum adsorption to the package. Also, the first gripping unit 53 may individually grip and transport a plurality of packages (for example, eight) to release or grip them.

In addition, the first gripping portion 53 may grip the package that has been dried. As described above, the brush device 5 can be used so that the package is brushed between the drying process and the inspection process. Therefore, the package gripped by the first gripping part 53 may be a package that is transferred to an inspection device for an inspection process after the drying process.

In addition, the first gripping portion 53 makes the gripped package (the portion containing at least a portion of the lower surface of the package) contact one or more of the flat brush structure 511 and the roll brush structure 512. In other words, the first gripping portion 53 grips (adsorbs) the dried package and then moves to the top of the flat brush structure 511 and the roll brush structure 512 to flat brush structure 511 and roll brush structure One or more of 512 may be contacted for a period of time. For reference, the contact of the package held by the first gripping part 53 to the flat brush structure 511 may mean contact between the package and the brush unit 5111 of the flat brush structure 511. Also, the contact of the package held by the first gripping part 53 to the roll brush structure 512 may mean contact between the package and the brush unit 5202 of the roll brush structure 512.

In addition, the first gripping part 53 may grasp the package and contact the brush unit 5111 of the flat brush structure 511 for a predetermined time, and then move it to the presizer 8 to be described later. Alternatively, the first gripping portion 53 may grasp the package and contact the brush unit 5202 of the roll brush structure 512 for a predetermined time, and then move it to the presizer 8 to be described later. Alternatively, the first gripping portion 53 grips the package and makes contact with the brush unit 5111 of the flat brush structure 511 for a certain time, and then contacts the brush unit 5202 of the roll brush structure 512 for a certain time ( Alternatively, after contacting the brush unit 5102 of the roll brush structure 512 for a predetermined time, contacting the brush unit 5111 of the flat brush structure 511 for a predetermined time) may be moved to the presizer 8 to be described later. .

Each of the flat brush structure 511 and the roll brush structure 512 vibrates for a predetermined time when the package contacts the peninsula. Each of the flat brush structure 511 and the roll brush structure 512 may vibrate in contact with the package, thereby removing foreign matter such as burrs on the package surface. Accordingly, the term “predetermined time” may mean a time set by the user so that foreign matters on the package surface can be removed by the flat brush structure 511 and the roll brush structure 512, respectively. Since each of the flat brush structure 511 and the roll brush structure 512 may vibrate for a predetermined time when the package is in contact, the predetermined time may be set to a predetermined time or less for the first gripping part 53 to contact the package with the brush part. Can be.

For example, the flat brush structure 511 may vibrate in the longitudinal direction (the longitudinal direction of the base portion 5112). Referring to FIG. 10, the brush portion 51 may include a first linear drive unit 5113 that vibrates the base portion 5112 in the longitudinal direction. The first linear drive unit 5113 is a first linear drive guide 51132 connected to the base portion 5112, a first linear drive guide 51132 is made to move in the longitudinal direction of the base portion 5112 1 may include a guide rail (51131). The first guide rail 51131 may be provided to extend in a direction parallel to the longitudinal direction of the base portion 5112, and the first linear drive guide 51132 may reciprocate on the first guide rail 51131. Accordingly, the base portion 5112 may reciprocate in its longitudinal direction and vibrate in its longitudinal direction, and the brush unit 5111 may reciprocate and vibrate in the longitudinal direction of the base portion 5112. As such, when the package is in contact, the flat brush structure 511 vibrates in the longitudinal direction of the base portion 5112, so that foreign matters on the bottom or side surfaces of the package gripped on the upper side of the brush unit 5111 may be removed. have.

For reference, referring to FIG. 10, the first linear driving guide 51132 may be connected to the base portion 5112 by an auxiliary plate 51133. In other words, the lower portion of the base portion 5112 and the auxiliary plate 51133 are connected, and the lower portion of the auxiliary plate 51133 is connected to the first linear driving guide 51132, the first linear driving guide 51132 May be connected to the base portion 5112. Alternatively, as another example, the first linear driving guide 51132 may be directly connected to the base portion 5112. In addition, the first linear drive guide 51132 and the first guide rail 51131 may be paired. Referring to FIG. 10, a plurality of such pairs may be provided in the longitudinal direction of the base portion 5112. For example, two pairs of the first linear driving guide 51132 and the first guide rail 51131 may be provided at intervals.

In addition, in the first gripping portion 53, when the flat brush structure 511 vibrates in the longitudinal direction as described above, the gripped package in contact with the flat brush structure 511 in the width direction (base portion ( 5112) in the width direction. In other words, the package may vibrate in the width direction perpendicular to the longitudinal direction when the flat brush structure 511 vibrates in the longitudinal direction while in contact with the flat brush structure 511. As described above, in a situation in which foreign matters on the surface of the package are removed according to the vibration in the longitudinal direction of the flat brush structure 511, the package also has a flat brush structure in the width direction perpendicular to the longitudinal direction by the first gripping portion 53 ( 511), the effect of removing foreign substances on the package surface can be improved.

In addition, the flat brush structure 511 may vibrate in the width direction (width direction of the base portion 5112). Referring to FIG. 10, the brush part 51 may include a second linear drive unit 5114 that vibrates the base part 5112 in the width direction of the base part 5112. The second linear drive unit 5114 includes a second linear drive guide 51142 and a second linear drive guide 51142 connected to the base portion 5112 to be movable in the width direction of the base portion 5112. It may include a guide rail (51141). The second guide rail 51141 may be provided to extend in a direction parallel to the width direction of the base portion 5112, and the second linear drive guide 51142 may reciprocate on the second guide rail 51141. Accordingly, the base portion 5112 may reciprocate in its longitudinal direction and vibrate in the width direction thereof, and the brush unit 5111 may reciprocate and vibrate in the width direction of the base portion 5112. As such, when the package is in contact, the flat brush structure 511 vibrates in the width direction of the base portion 5112, so that foreign matters on the package can be removed.

For reference, the second linear drive unit 5114 may be provided below the first linear drive unit 5113. For example, the second linear drive guide 51142 of the second linear drive unit 5114 may be connected to a lower portion of the plate 51143 provided with the first guide rail 51131. According to this, as described above, the first linear drive unit 5113 is connected to the base portion 5112 through the auxiliary plate 51133, and the second linear drive unit 5114 is the first through the plate 51143. In the form connected to the linear drive unit 5113, the second linear drive guide 51142 may be connected to the base portion 5112. In this case, when the second linear drive guide 51142 moves on the second guide rail 51141, the first linear drive unit 5113 and the first linear drive unit 5113 connected through the second linear drive guide 51142 and the plate 51143 The base portion 5112 connected to the 1 linear drive unit 5113 can be moved together, and accordingly, the first linear drive unit 5113 and the flat brush structure during reciprocation in the width direction by the second linear drive unit 5114 511 may be moved together in the width direction.

In addition, referring to FIG. 10, the second linear driving guide 51142 and the second guide rail 51141 may be paired, and a plurality of such pairs may be provided in the longitudinal direction of the base portion 5112. For example, two pairs of the second linear driving guide 51142 and the second guide rail 51141 may be provided at intervals.

In addition, although not shown in detail in the drawings, the first linear drive unit 5113 may include a motor that provides power for linear movement of the first linear drive guide 51132. Also, the second linear drive unit 5114 may include a motor that provides power for linear movement of the second linear drive guide 51142. Further, according to another embodiment, a motor that commonly provides movement power to the first linear driving unit 5113 and the second linear driving unit 5114 may be included. As such, each of the first linear driving guide 51132 and the second linear driving guide 51142 may be linearly moved by receiving power from a motor.

Further, in the first gripping portion 53, when the flat brush structure 511 vibrates in the width direction as described above, the gripped package in contact with the flat brush structure 511 is longitudinal (base portion ( 5112) in the longitudinal direction. In other words, the package can vibrate in the longitudinal direction perpendicular to the width direction when the flat brush structure 511 vibrates in the width direction while in contact with the flat brush structure 511. As described above, in a situation in which foreign matters on the surface of the package are removed in response to vibration in the width direction of the flat brush structure 511, the package also has a flat brush structure in the longitudinal direction perpendicular to the width direction by the first gripping portion 53 ( 511), the effect of removing foreign substances on the package surface can be improved.

In addition, the flat brush structure 511 can rotate in the circumferential direction of the axis in the vertical direction. Referring to FIG. 10, the brush portion 51 may include a rotating unit 5115 that rotates the base portion 5112 in the circumferential direction of the axis in the vertical direction.

For example, the rotating unit 5115 is a rotating unit 51153 receiving rotational force from a motor, and an auxiliary rotating shaft extending upward from the rotating unit 51153 (the auxiliary rotating shaft in FIG. 10 may be accommodated inside the housing 51151) And a main rotation axis 51152 extending upwardly from the auxiliary rotation axis and connected to the base portion 5112. The main axis of rotation 51152 may be provided so that its center is eccentric with respect to the center of the auxiliary axis of rotation. Accordingly, when the auxiliary rotation axis is rotated, the main rotation axis 51152 may move in the circumferential direction of the auxiliary rotation axis. Accordingly, the main rotation axis 51152 can move in a circle along the circumferential direction of the axis in the vertical direction, and the flat brush structure 511 in which the base portion 5112 is connected to the main rotation axis 51152 can move in a circle. have. As such, the flat brush structure 511 may vibrate by moving in a circular motion. For example, the main rotation axis 51152 may move in a circle having a length of 4π mm. Accordingly, the flat brush structure 511 can move in a circle with a length of 4π mm. For reference, referring to FIG. 10, when the brush part 51 includes the first linear drive unit 5113, the second linear drive unit 5114, and the rotation unit 5115, the rotation part 51153 and the auxiliary rotation shaft May be located below the first and second linear drive units 5113 and 114, and the main rotational shaft 51152 may be provided with first and second linear drive units 5113 and 114 so as to secure a movement path that draws its circle. Passing through may be connected to the lower side of the base portion (5112).

In addition, in the first gripping portion 53, when the flat brush structure 511 vibrates according to the rotational movement in the circumferential direction as described above, the gripped package in contact with the flat brush structure 511 is flat. The brush structure 511 may vibrate to rotate in the reverse direction of the moving direction. For example, the flat brush structure 511 may move while drawing a circle as described above. In this process, a circle may be drawn while moving by setting a clockwise or counterclockwise direction of the drawing circle as the moving direction. The first gripping portion 53 may be rotated so that the package rotates in the reverse direction (counterclockwise or clockwise) in the moving direction (clockwise or counterclockwise) of the flat brush structure 511 as described above. Alternatively, as another example, the first gripping portion 53 is the first gripping portion 53 in the reverse direction (counterclockwise or clockwise) in the movement direction (clockwise or counterclockwise) of the flat brush structure 511 It can vibrate by driving the central axis of and the package he grips to move in a circular motion.

In addition, according to one embodiment of the present application, the flat brush structure 511 may vibrate in the vertical direction. In this case, the flat brush structure 511 may include a vertical drive unit that moves the base portion 5112 up and down (up and down reciprocation).

In addition, referring to FIG. 10, the brush portion 51 may include a rotational force transmission structure 5123 that transmits rotational force to the shaft portion 5121 so that the roll brush structure 512 is rotated. The rotational force transmitting structure 5123 may include an external force receiving unit 51232 receiving external force from a motor and a belt structure 51231 that converts the rotational force of the external force receiving unit 51232 to the rotational force of the shaft portion 5121. The axis of rotation of the external force receiving unit 51232 may be parallel to the shaft portion 5121.

In addition, referring to FIG. 10, the external force accommodating unit 51232 of the roll brush structure 512 can share the external force of the motor that rotates the rotating portion 51153 of the flat brush structure 511. For example, referring to FIG. 10, the brush portion 51 is an auxiliary external force receiving unit 51234 that transmits the external force of the belt 51239 extending from the motor to rotate the rotating portion 51153 to the external force receiving unit 51232. It may include. The auxiliary external force receiving unit 51243 may have its rotation axis parallel to the rotation axis of the rotating part 51153, and the belt 51239 extending from the motor rotates through the rotating part 51153 and the auxiliary external force receiving unit 51234, and the rotating part ( 51153) and the auxiliary external force receiving unit 51234. The rotational force of the auxiliary external force receiving unit 51234 can be transmitted to the external force receiving unit 51232 through a gear 51233 provided in the external force receiving unit 51234 and engaged with the auxiliary external force receiving unit 51234, and accordingly , The external force of the motor transmitted by the belt 51239 extending from the motor may be transmitted to the external force receiving unit 51232 via the auxiliary external force receiving unit 51234 and the gear 51233, and to the external force receiving unit 51232 The transmitted external force may rotate the shaft portion 5121.

In addition, referring to FIG. 10, the brush device 5 may include a dust collector 513 provided on the lower side of the flat brush structure 511 and the roll brush structure 512 to intake falling foreign matter. The dust collector 513 may include a receiving portion 5131 in which a foreign substance falls, and a suction portion 5132 inhaling a foreign substance falling in the receiving portion. The receiving part 5131 may be formed with a hole connected to the suction part 5132 so that foreign matter can be sucked by the suction part 5132. For example, a hole may be formed in the bottom surface of the receiving portion 5131.

In addition, the package unloading device may include a presizer (8). The presizer 8 may be loaded with a package in which contact to the brush portion 51 is completed, that is, contact to one or more of the flat brush structure 511 and the roll brush structure 512 is completed.

As described above, the first gripping portion 53 may grip the package through adsorption. Referring to FIG. 11 and FIG. 12, the package is brushed before brushing by the brush portion 51. It may have moved outward (see FIG. 12) shifted from the exact position (initial position) (see FIG. 11). However, as described above, when the package is moved to the vision inspection apparatus in a gripped state from the initial position, the efficiency and accuracy of the inspection process may be deteriorated due to the misaligned position of the package. To prevent this, the brush device 5 frees a package in which contact with the brush part 51 is completed so that a state in which a package that is moved to the upper portion of the vision inspection device after brushing is aligned with the gripping part can be aligned. The package can be arranged by loading it on the sizer 8.

For example, referring to FIG. 13, the presizer 8 is recessed downwardly from its upper surface, and includes a recessed portion 81 in which the packages held by the first gripping portion 53 are individually loaded. Can be. In other words, the first gripping part 53 can individually release the gripping of the package so that each of the plurality of packages held by the gripper is seated inside each of the plurality of recesses 81 of the presizer 8. As described above, the first gripping portion 53 may transport a plurality of packages, and the number of depressions 81 may be equal to or exceed the number of packages transferred by the first gripping portion 53. have.

In addition, referring to FIG. 13, the inner surface of the recessed portion 81 may include an inclined inclined surface so that the package placed into the recessed portion 81 is shifted to the bottom surface, being deviated from the bottom surface of the recessed portion 81. For example, the package in a state gripped by the first gripping portion 53 shifted from the initial position described above may be placed at a position displaced from the bottom surface of the depression 81 when placed in the depression portion 81. By the way, according to the brush device 5, since the inner surface of the recessed portion 81 may include an oblique inclined surface, even if the package is placed at a position deviated from the bottom surface of the recessed portion 81, it moves along the inclined surface (eg For example, it may be moved on a slide to be seated on the bottom surface of the depression 81.

In addition, a vacuum passage 82 for applying or releasing vacuum pressure may be formed on a part of the bottom surface of the recessed portion 81 (for example, the center of the bottom surface of the recessed portion 81). Therefore, when the package in the state gripped by the gripping portion 53 is placed in the depression portion 81, the package is quickly placed in the correct position of the depression portion 81 by the vacuum pressure applied from the bottom surface of the depression portion 81. Can be.

In addition, the packages stacked individually and aligned in the presizer 8 may be gripped and transported by the respective pickers 721 of the third package picker unit 75 and the fourth package picker unit 76. . Accordingly, the shape and area of the bottom surface of the recessed portion 81 is such that when the second gripping portion grips the package placed on the bottom surface of the recessed portion 81, the package is in position (for example, a location where the package can be vision inspected). Alternatively, the third and fourth package picker portions 75 and 76 may be gripped by the picker 721 of the third and fourth package picker portions 75 and 76, respectively. It can be formed so that it can be gripped. In addition, each of the third and fourth package picker units 75 and 76 may pick up a plurality of packages, for example, eight packages.

As described above, according to the brush device 5 of the package unloading device, the package separated from the ring 0 is gripped by the picker 721 of the first and second package picker parts 72 and 74 (pickup). It can be brushed in the brush portion 51, and accordingly, foreign substances in the package can be removed. However, during the brushing process, the gripping positions of the pickers 721 of the first and second package picker parts 72 and 74 may be shifted, and accordingly, the accuracy of vision inspection due to a position recognition error of the package of the vision inspection device May degrade. Therefore, the package unloading device does not perform vision inspection immediately after the brushing process, and arranges and arranges a plurality of packages, which have been brushed, in the presizer 8 to align the gripping position of the gripping part. Afterwards, a vision inspection may be performed.

In addition, referring to FIG. 8, in the brush device 5, the brush portion 51 is movable. To this end, the brush device 5 may include a rail portion 55 that guides the movement of the brush portion 51.

In addition, referring to FIG. 2, the brush device 5 may include a brush cleaner 57. The brush cleaner 57 may contact each of the flat brush structure 571 and the roll brush structure 572 to brush each. 1 and 2, the brush cleaner 57 is movable along the Y axis. In addition, the brush cleaner 57 can contact one of the flat brush structure 511 and the roll brush structure 512. For example, in a state in contact with the brush cleaner 57 and the flat brush structure 511, the brush cleaner 57 reciprocates in one side and the other in the Y-axis direction, and the flat brush structure 511 vibrates in its longitudinal direction. , And one or more of its lateral vibration and its rotational vibration. Accordingly, the flat brush structure 511 can be cleaned. Further, in a state where the brush cleaner 57 and the roll brush structure 512 are in contact, the brush cleaner 57 reciprocates in one side and the other in the Y-axis direction, and the roll brush structure 512 moves its shaft portion 5121. It can rotate around the center. Accordingly, the roll brush structure 512 can be cleaned.

1 and 2, the package unloading device picks up the package from the ring 0 seated on the expander 4 and moves it to the tray of the tray part 6 described later (7). ). In addition, the package picker module 7 can pick up the package from the ring 0 seated on the expander 4 and sequentially move it to the trays of the brush device 5 and the tray part 6.

For example, referring to FIGS. 1 and 14A, the package picker module 7 may include a first X-axis rail 71 extending in the X-axis direction. Also, the package picker module 7 may include a first package picker unit 72. 1 and 2, the first package picker portion 72 is movable along the first X-axis rail at least at one side in the X-axis direction of the first X-axis rail.

In addition, referring to FIG. 1, the first package picker unit 72 performs a first operation of picking up a package from a ring 0 in a package providing state and moving it to the brush device 5, and a brush for the picked-up package is made. The second operation of holding the pick-up package in contact with the brush device and holding the pick-up and the third operation of moving the brushed package from the brush device 5 to the presizer 8 and placing it on the presizer 8 It can be done sequentially. For example, the first package picker unit 72 is disposed in a fixed position on the expander 4 to pick up the package from the ring 0, which is in a package providing state, and move it to the brush device 5 to perform the first operation. A second operation may be performed to remove foreign substances on the package by contacting the picked-up package with one or more of the flat brush structure 511 and the roll brush structure 512 of the brush device 5 to keep the pickup. In addition, the third operation may be performed by placing the brushed package on the presizer 8.

For reference, as described above, referring to FIGS. 13 and 15 together, a recess 81 is formed in the presizer 8, so that packages transferred from the brush device 5 can be aligned. In addition, the package unloading device may include a bottom vision 31. Referring to FIG. 15, the bottom vision 31 may be provided adjacent to the presizer 8. The bottom vision 31 will be described later.

In addition, referring to FIG. 14B, the first package picker unit 72 includes a picker 721 for picking up a package and a vacuum generator 722 for acting on or releasing the vacuum pressure to the picker 721 can do.

The picker 721 will be described below. For reference, in the description of the picker 721 of the package unloading device, terms related to the direction or position (upper, upper, upper, lower, lower, lower, etc.) are based on the arrangement state of each component shown in the drawings. It is set. For example, when looking at FIG. 16, the part toward the 12 o'clock direction is generally upper, the part toward the 12 o'clock direction is generally upper, the surface facing the 12 o'clock direction is generally upper, the 6 o'clock position is lower, and the overall is 6 When the portion facing the o'clock direction is lower, and the surface facing the 6 o'clock overall, it may be the back.

The picker 721 can pick up an object and place it at a specific location. For example, the object may be a package of electronic devices, such as a semiconductor package, or a package of electronic devices. However, the object picked up and placed by the picker 721 is not limited to the above, and the picker 721 may be used to pick up and place various objects.

16 is a schematic cross-sectional view of a picker according to an embodiment of the present application, FIG. 17 is an enlarged view of A of FIG. 16, FIG. 18 is an enlarged view of B of FIG. 16, and FIG. 19 is an embodiment of the present application It is a schematic sectional view for explaining that the eject pin of the picker is moved upward, and FIG. 20 is a perspective view of the eject pin of the picker according to an embodiment of the present application.

16 to 18, the picker 721 includes a lower body 7221. Referring to FIG. 18, a guide tube 72111 is formed in the lower body 7221 in the longitudinal direction. In addition, the lower body 7221 may include a stepped 721111 that protrudes inwardly from the inner surface of the middle portion of the guide tube 72111.

Also, referring to FIGS. 16 and 17, the picker 721 includes an intermediate body 7222. The intermediate body 7222 may be disposed above the lower body 7221. In addition, the intermediate body 7222 and the lower body 7221 may be connected to each other. Accordingly, when the middle body 7222 moves up and down with respect to the body body 7216, the lower body 7121 may be moved up and down in conjunction with the middle body 7222.

In addition, referring to FIG. 17, a vacuum line 7221 is formed in the intermediate body 7222. 16 and 17, the vacuum line 7221 may be in communication with the vacuum pump 8. In addition, the vacuum line (72121) has a lower end communicating with the upper end of the guide tube (72111) and communicating the guide tube (72111) and the vacuum pump (8). Accordingly, when the vacuum pump 8 acts under vacuum pressure (which may be a suction force formed in the guide tube 72111 and the vacuum line 7221 as gas is sucked toward the vacuum pump 8), the guide tube 72111 The vacuum pressure can be applied to. In addition, when the vacuum pump 8 acts on the blow pressure (which may be the gas pressure formed in the guide tube 72111 and the vacuum line 7221 as gas is discharged from the vacuum pump 8), the guide tube 72111 A blow pressure may be applied to the.

In addition, referring to FIGS. 17 and 18, the intermediate body 7222 includes a support jaw 72122 formed along the lower circumference of the vacuum line 7221. At least a portion of the support jaw 72122 faces the upper edge 72131 of the eject pin 7213, which will be described later.

Further, referring to FIGS. 16 to 18, the picker 721 includes an eject pin 7213. The eject pin 7213 is provided to be movable in the vertical direction in the guide tube (72111). Referring to FIG. 18, when in a standby state (for example, a state in which vacuum pressure is not applied), the eject pin 7213 protrudes downward from the lower end of the guide tube 72111 and the upper end is a support jaw 72122 It is provided in the guide tube (72111) having an initial position spaced from.

In addition, referring to FIGS. 17 and 18, the middle portion 72133 of the eject pin 7213 may protrude outward from the lower portion of the eject pin 7213 and extend in an upward direction. In addition, the lower end of the middle portion 72133 may be a support jaw 721331 supported on the stepped 721111 at the initial position of the eject pin 7213. The eject pin 7213 may move up and down between a position where the upper edge 72131 contacts the support jaw 72122 and a position where the support jaw 721331 is supported on the step jaw 721111.

In addition, referring to FIG. 18, the picker 721 includes a plurality of vacuum holes 7214. The plurality of vacuum holes 7214 are formed on the lower surface of the lower body 7221. For example, referring to FIG. 18, a plurality of vacuum holes 7214 may be formed along the circumference of the guide tube 72111 at the lower surface of the lower body 7221. For example, as shown in FIG. 18, the vacuum hole 7214 may have a shape that is open downward from the lower body 7221, including a stepped jaw. Further, for example, four vacuum holes 7214 may be formed. Further, although not shown in detail in the drawings, each of the plurality of vacuum holes 7214 is connected to the vacuum pump 8. Accordingly, the vacuum hole 7214 can receive a vacuum pressure and a blow pressure applied by the vacuum pump 8 and act on the lower side (outside) thereof. Accordingly, when the vacuum pressure is applied by the vacuum pump 8, the package may be adsorbed to the picker 721 by the vacuum pressure of the vacuum hole 7214. In addition, when the blow pressure is applied by the vacuum pump 8, the package may be detached (placed) from the picker 721 by the blow pressure of the vacuum hole 7214. Specifically, when the vacuum pump 8 applies a vacuum pressure, a vacuum pressure is applied to the vacuum hole 7214 so that a package located under the vacuum hole 7214 can be adsorbed. For example, the package is supported on the lower surface of the package seating portion 7121 to be described later and can be adsorbed to the picker 721. In addition, when the vacuum pump 8 acts on the blow pressure, a blow pressure is applied to the vacuum hole 7214 so that an air flow (blow pressure) from the inside to the outside is applied to the vacuum hole 7214. Accordingly, the adsorbed package can be separated from the picker 721.

In addition, for example, referring to FIG. 18, the vacuum hole 7214 penetrates the lower portion of the lower body 7221 and extends upwardly to be connected to the guide tube 72111, thereby acting through the guide tube 72111 It can act on its lower side by receiving the vacuum pressure and blow pressure. In this case, referring to FIG. 18, a portion of the vacuum hole 7214 extending upward from the lower surface of the lower body 7221 may be formed along a circumference of the lower tube 721116 of the guide tube 72111 Can be. However, the connection form of the vacuum hole 7214 with the vacuum pump 8 is not limited to this, and as another example, the vacuum hole 7214 has a vacuum pump 8 through a separate gas passage from the vacuum line 7221 By being connected to), it is possible to receive the vacuum pressure and blow pressure applied by the vacuum pump 8 and act on the lower side thereof.

In addition, referring to FIGS. 16 to 18, the picker 721 may include a package seating portion 72191 coupled to a lower portion of the lower body 7221. A vacuum passage and a blow pressure applied from the vacuum hole 7214 pass through the package seating portion 7121, and an action passage 72111, in which a lower end protruding from the guide tube 72111 of the eject pin 7213 is located, is formed. Can be. 16 to 18, the cross-sectional area of the action passage 72111 may be larger than the cross-sectional area of the vacuum hole 7214. As such an action passage 7221 is formed below the vacuum hole 7214, the gas pressure acting on the vacuum hole 7214 directly acts on the package through the action passage 72111 rather than directly acting on the package. Gas pressure can be relieved. If the gas pressure is strongly applied to the package, the package may be instantly absorbed by the picker 721 and the package may hit the picker 721. On the other hand, according to the picker 721, since the package is adsorbed to the picker 721 through the action passage 7211 having a relatively large cross-sectional area, the external force action on the package can be reduced and stably adsorbed. Referring to FIG. 18, the lower end of the eject pin 7213 in the initial position may protrude from the lower end of the action passage 72111.

In addition, when the vacuum pressure is applied from the vacuum hole 7214, the package may be adsorbed to the picker 721 by the vacuum pressure. At this time, the package may be supported on the lower surface of the package seating portion 7121.

In addition, referring to FIG. 19, when a vacuum pressure is applied by the vacuum pump 8, the picker 721 can adsorb the package, and the eject pin 7213 is an external force in the upward direction by the package to be adsorbed, and It may be moved upward by one or more of vacuum pressure.

For example, referring to FIG. 19, when the vacuum pressure is applied by the vacuum pump 8, the vacuum hole 7214 can be sucked, and the eject pin 7213 is driven by the vacuum pressure in the guide tube 72111. It can be moved upward. In this process, an external force in the upward direction by the package 7214 adsorbed by suction of the vacuum hole 7214 may act on the eject pin 7213. Accordingly, when the vacuum pressure is applied, adsorption of the package by the vacuum hole 7214 can be achieved, and the eject pin 7213 is among the external force and vacuum pressure that pushes the eject pin 7213 upward while the package is adsorbed. It may be moved upward by one or more.

In addition, referring to FIG. 18, when the vacuum pressure of the vacuum pump 7218 is released, and when the blow pressure is applied by the vacuum pump 7218, the eject pin 7213 is moved downward by the blow pressure, and thus an initial position. It can have an external force in the downward direction on the package. In addition, when the blow pressure is applied by the vacuum pump, the blow pressure may be discharged downward from the vacuum hole 7214. Accordingly, the package may be placed by one or more of blow pressure and external force in the downward direction by the eject pin 7213. Thus, the package can be placed faster than the package is only placed by blow pressure.

In addition, referring to FIGS. 18 and 20, a recess portion 7232 recessed in a lower direction than the upper edge 72131 of the eject pin 7213 is formed in a portion of the upper portion of the eject pin 7213 facing the vacuum line. Can be. Accordingly, during the action of the blow pressure, the blow pressure may be concentrated and act on the recessed portion 72322 of the upper surface of the eject pin 7213, and the blow pressure may be concentrated and act on a portion of the upper surface of the eject pin 7213. Accordingly, when the blow pressure is applied, the eject pin 7213 can be moved in a downward direction more quickly.

For example, referring to FIGS. 18 and 20, the diameter of the lower portion 721321 of the recessed portion 72132 may be reduced toward the lower end. Referring to FIG. 18, in addition, the diameter of the upper portion 721323 of the recessed portion 72132 may decrease as it goes toward the lower end, and the middle portion 721322 of the recessed portion 72131 maintains its diameter, and the recessed portion 72132 It may extend from the upper portion (721323) to the lower portion (721321).

In addition, referring to FIG. 20, at least a portion of the upper edge 72131 of the eject pin 7213 may have a lower edge recessed area 721311 recessed than the other parts. Referring to FIG. 20, a plurality of edge depression areas 721311 may be spaced apart along the circumference of the top edge 72131.

In addition, referring to FIG. 18, an upper portion of the eject pin 7213 may include a flow path area adjusting portion 72134 protruding outwardly than the diameter of the upper end of the middle portion 7233 and extending upwardly.

Specifically, a gas flow path moving in the vertical direction may be formed between the outer surface of the eject pin 7213 and the inner surface of the guide tube 72111. The gas flow path may be a flow path of gas moving upward or downward when the vacuum pump 8 sucks or discharges (that is, a flow path of gas moving upward or downward depending on vacuum pressure and blow pressure).

Referring to FIG. 18, the guide tube 72111 includes an upper tube 721112 where an upper portion 721341 of a flow path area adjusting part 72134 of an eject pin 7213 having an initial position is located and an eject pin having an initial position ( It may include an intermediate tube (721113) is located the lower portion (721342) of the flow path area adjustment portion (72134) of 7213. In addition, referring to FIG. 18, the upper tube 721112 may be formed to have a larger diameter than the diameter of the intermediate tube 721113. In addition, the intermediate pipe 721113 is formed so that the inner surface of the (middle pipe 721113) and the outer surface of the flow path area adjusting portion 72134 are spaced at a minimum distance in a range that allows vertical movement of the flow path area adjusting portion 72134. Can be.

The flow path area of the gas flow path may be adjusted by the flow path area adjusting unit 72134, the upper pipe 721112, and the middle pipe 721113. First, the flow path area of the gas flow path may be determined by a portion having a small area of the gas flow path. This is because the amount of gas passing through the flow path can be determined according to the amount of gas passing through the portion having the smallest area.

Accordingly, referring to FIG. 19, when the vacuum pressure is applied and the eject pin 7213 is moved upward, the flow path area of the gas flow path is the area or ejection between the flow path area adjustment unit 72134 and the upper tube 721112. It may be an area between the middle portion 72133 of the pin 7213 and the middle tube 721113. This is, when the eject pin 7213 is moved upward, between the area between the flow path area adjustment part 72134 and the upper tube 721112 and between the middle part 72133 and the intermediate tube 721113 of the eject pin 7213. This is because the areas are equal to each other and have the smallest area among the gaps between the eject pin 7213 and the guide tube 72111.

However, referring to FIG. 18, when the vacuum pressure is released and the blow pressure is applied to move the eject pin 7213 downward, the flow path area of the gas flow path is between the flow path area adjustment unit 72134 and the intermediate pipe 721113. It may be an area of. This means that when the eject pin 7213 is moved downward, the area between the flow path area adjustment unit 72134 and the intermediate tube 721113 is the smallest area among the areas between the eject pin 7313 and the guide tube 7221. Because it has. In addition, when comparing FIGS. 18 and 19, the flow path area (see FIG. 18, flow path area adjusting unit 72134) and the intermediate pipe when the blow pin is applied and the eject pin 7213 is moved downward (initial position) The area between (721113) may be reduced compared to the area of the flow path when the eject pin 7213 is moved upward (see FIG. 19, the area between the flow path area adjustment unit 72134 and the upper tube 721112). As described above, as the eject pin 7213 is moved downward, when the flow path area adjusting unit 72134 enters the intermediate tube 721113, the amount of gas passing between the eject pin 7213 and the guide tube 72111 is minimized. Can be reduced.

Accordingly, as described above, as the blow pin acts and the eject pin 7213 becomes downward, when the flow path area adjusting part 72134 enters the intermediate tube 721113, the gas flow path in the gas flow path depends on the blow pressure. The amount of gas moving in the downward direction is reduced (the amount of gas passing between the flow path area adjustment part 72134 and the intermediate tube 721113 is minimized), and accordingly, the guide is guided by the blow pressure provided from the vacuum pump 8 The gas flowing into the tube 72111 may be concentrated on the top of the eject pin 7213. Accordingly, the gas pressure in the downward direction with respect to the eject pin 7213 can be exerted more, and the eject pin 7313 can be moved to the lower side more quickly to leave the package and play. In addition, since the blow pressure may be directly applied to the eject pin 7213, external force in the downward direction may be effectively applied to the eject pin 7213 even with less blow pressure than when the flow path area is not adjusted.

In addition, referring to FIG. 18, an inclined surface 72135 may be formed on an outer surface between the middle portion 72133 of the eject pin 7213 and the flow path area adjusting portion 72134. In addition, an inclined surface 721114 may be formed on the inner surface between the upper tube 721112 and the intermediate tube 721113. Accordingly, when the eject pin 7213 moves up and down, the flow path area adjusting part 72134 of the eject pin 7313 enters the middle tube 721113 having a smaller cross-sectional area than the upper tube 721112, and the upper tube 721112 It is possible to easily enter the intermediate tube 721113 without being caught by a stepped jaw that may be caused by a difference in diameter between the and intermediate tube 721113.

If, according to the picker 721, the upper tube 721112 and the middle tube 721113 are formed with a diameter difference from each other to adjust the flow path area, and the flow path area adjusting part 72134 and the middle part of the eject pin 7213 (72133) may have a diameter difference. Due to the difference in diameter, a stepped jaw may be formed between the upper tube 721112 and the intermediate tube 721113, and a stepped jaw may also be formed between the flow path area adjusting portion 72134 and the middle portion 72133. , When entering the middle pipe 721113 of the flow path area adjusting unit 72134, the stepped and stepped jams may occur, so that the entry may not be made smoothly. However, according to the picker 721, since the inclined surfaces 72135 and 114 are formed, it is possible to easily and smoothly enter the flow path area adjusting part 72134 into the middle part 72133.

Also, for reference, referring to FIG. 19, with respect to the length of the eject pin 7213, the eject pin 7313 is when its upper rim contacts the support jaw 72122, that is, when the package is adsorbed The bottom may have a length that contacts the package. Accordingly, when the package starts, when the blow pressure starts to be applied, the eject pin 7213 can simultaneously apply an external force in the downward direction to the package to further improve the packaging speed of the package. However, the length of the eject pin 7213 is not limited to this, and as another example, the eject pin 7213 may have its lower edge when its upper rim contacts the support jaw 72122, that is, when the package is adsorbed. It may have a length set to be located in the action passage.

In addition, referring to FIGS. 16 and 17, the picker 721 may include a protrusion 7215 formed to protrude upward from an upper portion of the intermediate body 7222.

In addition, referring to FIGS. 16 and 17, the picker 721 may include a body body 7216. A passage 72161 may be formed in the body 7222. In the passage 72161, an intermediate body 7222 and a protrusion 7215 may be inserted from the lower side.

In addition, referring to FIG. 16, the picker 721 may include an elastic member 7217 that is provided on a part of the passage 72161 while extending in an upward direction while enclosing the outer surface of the protrusion 7215. The elastic member 7217 can mitigate the impact of the picker 721 on the package when the intermediate body 7222 and the lower body 7221 move downward (down). The elastic member 7217 may be of a spring type.

The picker 721 may be provided with respect to the protrusion 7215 so that the elastic member 7217 is positioned above the vacuum pump 8. Accordingly, the effect of the vacuum pressure and blow pressure of the vacuum pump 8 on the elastic member 7217 can be reduced compared to the elastic member 7217 located below the vacuum pump 7218. Therefore, an elastic member having high elasticity may be provided as an elastic member 7217, so that a shock absorbing effect of the picker 721 with respect to the package may be large, and damage, separation, and abrasion of the elastic member 7217 may be prevented. By doing so, the durability of the picker can be improved.

Hereinafter, the vacuum generation unit 722 will be described.

21 is a perspective view of a picker device according to an embodiment of the present application, FIG. 22 is a schematic cross-sectional view of a picker structure according to an embodiment of the present application, and FIG. 23 is a vacuum nozzle unit of the picker structure according to an embodiment of the present application And FIG. 24 is an enlarged view of A of FIG. 22.

21 and 22, the vacuum generation unit 722 includes an adsorption unit 7221 including a main gas line 7221. In addition, the adsorption unit 7221 may include a contact unit (not shown in the figure) to which the semiconductor package is adsorbed when adsorbing the semiconductor package. When the negative pressure is formed in the main gas line 72111, the semiconductor package is adsorbed and the semiconductor package is picked up (holding) by being brought into contact with the contact unit. The pickup of is released and unloading of the semiconductor package may be performed.

Also, referring to FIGS. 21 and 22, the vacuum generator 722 includes a first gas valve structure 7222. The first gas valve structure 7222 includes a first gas line 72221 in communication with the main gas line 72111, and a second gas line 72222 in communication with the first gas line 72221 in a first state. , And a third gas line (72223) that selectively communicates with the first gas line (72221) in the second state and supplies destruction gas to the first gas line (72221) in communication with the first gas line (72221). ).

For example, when the negative pressure (vacuum) is to be formed in the main gas line 7221 of the adsorption part 7221, the first state may be obtained. In the first state, the first gas line 72221 and the second gas line 72222 may be in communication, and accordingly, in the first state, the main gas line 72111 is the first gas line 72221 Through it may be in communication with the second gas line (72222). For reference, when the adsorption unit 7221 needs to grip (adsorption) the semiconductor package, a negative pressure may be formed in the main gas line 72111. The first state may mean a state in which a semiconductor package is to be adsorbed or to be adsorbed.

In addition, a second state may be obtained when the destruction gas is to be supplied to the main gas line 7221 of the adsorption part 7221. In the second state, the first gas line 72221 and the third gas line 72223 may be in communication, and accordingly, in the second state, the main gas line 72111 is the first gas line 72221 Through it may be in communication with the third gas line (72223). For reference, when it is necessary to discharge the waste gas to the outside in order to place the semiconductor package adsorbed by the adsorption unit 7221, the waste gas may be supplied to the main gas line 7211. In addition, referring to FIG. 21, the third gas line 72223 may be supplied with the destruction gas from the destruction gas supply unit 7227. The second state may mean a state in which the semiconductor package is intended to be detached from or removed from the adsorption unit 7221.

The first gas valve structure 7222 may include a first solenoid valve 7242. The first solenoid valve 72242 allows the first gas line 7221 to selectively communicate with the second gas line 7222 (at this time, the first gas line 7221 and the third gas line) according to energization and power failure. The communication of (72223) is disconnected, so that the first gas line (72221) selectively communicates with the third gas line (72223), wherein the communication of the first gas line (72221) and the second gas line (72222) is Break). This will be described later in detail.

Also, referring to FIG. 22, the vacuum generator 722 includes a vacuum nozzle structure 7223. The vacuum nozzle structure 7223 forms a negative pressure and exerts negative pressure on the main gas line 7221 during communication between the first gas line 7221 and the second gas line 7222. Specifically, the vacuum nozzle structure 7223 may form negative pressure in the second gas line 7222. In addition, when a negative pressure is formed in the second gas line 72222 by the vacuum nozzle structure 7223, if the first gas line 72221 and the second gas line 72222 are in communication, the negative pressure may reduce the pressure. A negative pressure may be formed in the main gas line 72111 in communication with the first gas line 7221 and the first gas line 7221.

When the high pressure gas is supplied to the vacuum nozzle structure 7223, negative pressure may be formed therein. Specifically, referring to FIG. 22, the vacuum nozzle structure 7223 includes a negative pressure forming unit 7231. The negative pressure forming unit 72231 includes an inlet 722311 through which high pressure gas flows, a passage 722312 extending from the inlet 722311, and an outlet 722313 extending from the passage 722312 and communicating with the outside. can do. The negative pressure forming portion 72221 may be formed to extend from the passage line 72242 to be described later. In addition, the passage portion 722312 of the negative pressure forming portion 72121 may mean a portion in which the vacuum nozzle unit 72232, which will be described later, is disposed. In addition, the negative pressure forming unit 72231 may communicate with the second gas line 72222 to provide the formed negative pressure to the second gas line 72222.

In addition, referring to FIGS. 22 and 23, the vacuum nozzle structure 7223 may include a vacuum nozzle unit 72232 in which a through hole 722321 is formed in the longitudinal direction. A circumferential surface of the vacuum nozzle unit 72232 may be formed with at least one hole 722322 communicating the inside and outside of the through-hole 722321 (the passage portion 722312 of the negative pressure forming portion 72231). The vacuum nozzle unit 72232 may be disposed to be inserted into the passage portion 722312 so that at least a portion of the high pressure gas flowing from the inlet 722311 passes through the through hole 722321 and is discharged to the outlet 722313.

Accordingly, when the high pressure gas flows into the inlet 722311, at least a portion of the high pressure gas may pass through the vacuum nozzle unit 72232 (through hole 722321) and discharge the outlet 722313 to the outside. (High-pressure gas moves rapidly), the gas between the inner surface of the negative pressure forming portion 72231 and the outer surface of the vacuum nozzle unit 72232 (that is, the passage portion 722312 of the negative pressure forming portion 72231) has at least one hole. It can be sucked into the inside (through hole 722321) of the vacuum nozzle unit 72232 through (722322), and discharged to the outlet 722313, in this process, the inner surface of the negative pressure forming unit 72231 and the vacuum nozzle unit ( The amount of gas between the outer surfaces of the 72232 is reduced, and due to the convection phenomenon occurring inside the passage part 722312 and the vacuum nozzle unit 72232, the inner surface of the negative pressure forming part 72231 and the outer surface of the vacuum nozzle unit 72232 A vacuum (negative pressure) may be formed therebetween. Accordingly, a negative pressure is formed in the second gas line 72222 communicating with the passage portion 72232, and when the second gas line 72222 communicates with the first gas line 72221, the first gas line 72221 And a negative pressure may be formed in the main gas line (72211). For reference, the vacuum nozzle unit 72232 discharges most of the high-pressure gas flowing into the inlet 722311 to the outlet 722313, so that the negative pressure in the negative pressure forming portion 72231 is easily formed. It can be arranged as much as possible. For reference, the high pressure gas may mean a gas having one or more of pressure, speed, flow rate, etc. capable of forming a negative pressure in the negative pressure forming unit 72231 through the above-described process.

For example, high pressure gas may mean a gas having a pressure of 0.5 MPa to 0.8 MPa. In addition, in the present application, the negative pressure may mean a pressure that allows gas outside the adsorption unit 7221 to be sucked into the main gas line 7221 through the adsorption unit 7221, specifically, below atmospheric pressure. Can mean pressure. In addition, the destruction gas may mean a gas having a relatively low pressure compared to the high pressure gas. For example, the destruction gas may mean a gas having a pressure of less than 0.5 MPa, preferably 0.2 Mpa.

Also, referring to FIGS. 21 and 22, the vacuum generator 722 includes a second gas valve structure 7224. The second gas valve structure 7224 provides high pressure gas to the vacuum nozzle structure 7223 so that a negative pressure is formed in the vacuum nozzle structure 7223.

Specifically, referring to FIG. 22, the second gas valve structure 7224 is selectively communicated with a passage line 72242 and a passage line 72242 communicating with the vacuum nozzle structure 7223 and a passage line 72242. It includes a supply line (72241) for supplying a high-pressure gas to the passage line (72242) during communication. 21 and 22, the supply line 72241 may receive high pressure gas from the high pressure gas supply unit 7225. Further, when the supply line 72241 communicates with the pass line 72242, the high pressure gas supplied by the supply line 72241 may flow into the vacuum nozzle structure 7223 through the pass line 72242.

In addition, the second gas valve structure 7224 may include a second solenoid valve 72244. The second solenoid valve 72244 may cause the passage line 72242 and the supply line 72241 to be selectively communicated or disconnected according to energization and power failure. Illustratively, the second gas valve structure 7224 may further include an auxiliary line 72243. In this case, the second solenoid valve 72244 is in a state in which the passage line 72242 and the supply line 72241 are in communication (at this time, the communication in the passage line 72242 and the auxiliary line 72243) is cut off according to energization and power failure. ), It is possible to make the passage line 72242 and the auxiliary line 72243 communicate (at this time, the communication between the supply line 72241 and the passage line 72242 or the auxiliary line 72243 is disconnected). This will be described later in detail.

According to the above, when the vacuum generating unit 722 should be in the first state to adsorb the semiconductor package, the first gas line 7221 and the second gas line 7222 communicate with each other (at this time, the first gas) The communication between the line 7221 and the third gas line 7222 may be disconnected), and the supply line 72241 and the passage line 72242 may communicate. The communication of the lines of each gas valve structure can be individually and selectively controlled according to electric signals (conduction and power failure) applied to the solenoid valves 72242 and 144 included in each gas valve structure. According to this, a high-pressure gas from the supply line 72241 can be supplied to the negative pressure forming portion 72231 of the vacuum nozzle structure 7223 through the passing line 72242, and the inlet 722311 of the negative pressure forming portion 72231 can be supplied. The high-pressure gas flowing through may be discharged to the outlet 722313 through the vacuum nozzle unit 72232, wherein the gas between the inner surface of the negative pressure forming unit 72231 and the outer surface of the vacuum nozzle unit 72232 is a vacuum nozzle unit A hole 722322 of 72232 may be introduced into the interior of the vacuum nozzle unit 72232. Accordingly, the amount of gas is reduced between the inner surface of the negative pressure forming unit 72231 and the outer surface of the vacuum nozzle unit 72232, and negative pressure can be formed, and the gas of the second gas line 72222 communicating with the negative pressure forming unit 72231 Is moved to the negative pressure forming unit 72221 and negative pressure may be formed in the second gas line 72222. At this time, as described above, since the first gas line 72221 and the second gas line 72222 are in communication, the first gas line 72221 and the first gas line communicating with the second gas line 72222 The gas in the main gas line 72111 in communication with 72221 is moved to the side of the second gas line 7222 or the negative pressure forming part 72131, and negative pressure is formed in the first gas line 7221 and the main gas line 7221 And the semiconductor package can be adsorbed.

In addition, when the semiconductor package that the vacuum generating unit 722 has adsorbed has to be in the second state to separate it from the adsorption unit (when it is necessary to discharge destruction air), the first gas line 72221 and the third gas line ( 72223) may be in communication (at this time, the communication between the first gas line 72221 and the second gas line 72222 is disconnected). Also, the auxiliary line 72243 and the passing line 72242 may communicate. The communication of the lines of each gas valve structure can be individually and selectively controlled according to electric signals (conduction and power failure) applied to the solenoid valves 72242 and 144 included in each gas valve structure. According to this, the inflow of the high pressure gas into the negative pressure forming part 7231 is blocked, the communication between the first gas line 72221 and the second gas line 7222 is cut off, and the first gas line 7221 is the third gas line Since it can be communicated with (72223), the negative pressure formed in the first gas line (72221) and the main gas line (72211) is released by the vacuum nozzle structure (7223), and the destruction air is released to the third gas line (72223). It can be introduced through the first gas line (72221) through the main gas line (72211) can be discharged to the outside of the adsorption portion (7221). By this destruction air, the semiconductor package that has been adsorbed can be released more quickly by the destruction air and spaced apart from the adsorption unit 7221.

For reference, referring to FIG. 22, the negative pressure forming unit 72231 may be implemented in the form of a passage formed in the block 72233. Specifically, the vacuum generating unit 722 may include a block 72233, and at block 72233, at least a portion of the first gas line 72221, at least a portion of the second gas line 72222, the third gas At least one of at least a portion of the line 7223, at least a portion of the gas supply 7272, at least a portion of the supply line 72221, at least a portion of the pass line 72222, and at least a portion of the gas supply 7225 are blocks 72233. ) May be formed in the form of a through hole passing through at least a portion, and the negative pressure forming portion 72231 may be formed to extend from a passage line 72242 formed in the block 72233 to pass through at least a portion of the block 72233. It may be formed in a spherical shape, the vacuum nozzle unit (72232) may be disposed in a form that is inserted into the negative pressure forming unit (72231).

Meanwhile, according to an embodiment of the present application, the first solenoid valve 7242 included in the first gas valve structure 7222 may be a normal open type solenoid valve. Specifically, the first solenoid valve 72242 communicates the first gas line 72221 and the second gas line 72222 during power failure, and the first gas line 72221 and the third gas line 72223 during energization. Can communicate.

Also, the second solenoid valve 72242 included in the second gas valve structure 7224 may be a normal close type solenoid valve. Specifically, the second solenoid valve 72244 may communicate the passage line 72242 and the supply line 72241 during power failure, and release the communication between the passage line 72242 and the supply line 72241 when energized. At this time, when the second gas valve structure 7224 includes an auxiliary line 72243, the second solenoid valve 72244 cuts the communication between the passage line 72242 and the auxiliary line 72243 during a power failure, and the passage line The 72242 and the supply line 72241 may be communicated, and when the energization is performed, the passage line 72242 and the auxiliary line 72243 may be communicated, and the communication between the supply line 72241 and the passage line 72242 may be disconnected. The first solenoid valve 72242 and the second solenoid valve 72722 include a coil and an electromagnet therein, and the movement and position of the electromagnet are selectively determined by a magnetic field induced according to whether an electric signal is applied, and the electromagnet By selectively determining the communication between the communication outlets in the solenoid valves 72242 and 144 and a part of the plurality of lines according to the movement of each of the above-described lines, communication of each line can be controlled.

According to one embodiment of the present application, in the first state, the first gas valve structure 7222 may be cut off, and the second gas valve structure 7224 may be cut off. Accordingly, as described above, when the vacuum generating unit 722 should be in the first state to adsorb the semiconductor package, the first gas line 7221 and the second gas line 7222 communicate with each other, and the supply line (72241) and the passage line (72242) may be in communication, the high pressure gas from the supply line (72241) can be supplied to the negative pressure forming portion (72231) of the vacuum nozzle structure (7223) through the passage line (72242), The high-pressure gas flowing through the inlet 722311 of the negative pressure forming unit 72231 may be discharged to the outlet 722313 through the vacuum nozzle unit 72232, wherein the inner surface of the negative pressure forming unit 72231 and the vacuum nozzle unit Gas between the outer surfaces of the 72232 may be introduced into the inside of the vacuum nozzle unit 72232 through the hole 722322 of the vacuum nozzle unit 72232, and accordingly, the negative pressure forming unit 72231 inner surface and the vacuum nozzle unit A negative pressure may be formed between the outer surfaces of the 72232, a negative pressure may be formed in the second gas line 7222, the first gas line 7221 and the main gas line 7221 and the semiconductor package may be adsorbed.

Also, in the second state, the first gas valve structure 7222 may be energized, and the second gas valve structure 7224 may be energized. Accordingly, as described above, in the second state for separating the semiconductor package adsorbed by the vacuum generating unit 722 from the adsorbing unit, communication between the first gas line 72221 and the second gas line 72222 is established. The first gas line 7221 may be disconnected and communicate with the third gas line 7223, and the negative pressure formed in the first gas line 7221 and the main gas line 7221 by the vacuum nozzle structure 7223 may be disconnected. It is released, and the destruction air may be introduced through the third gas line 72223 and discharged through the first gas line 72221 to the outside of the adsorption part 7221 through the main gas line 7221. The semiconductor package that has been adsorbed by the destruction air may be released more quickly by the destruction air and spaced apart from the adsorption unit 7221.

Also, the vacuum generator 722 may have a third state after the second state. The third state may mean a state in which the semiconductor package is not picked up and no destruction gas is emitted (ie, a picker waiting state). In the third state, the first gas valve structure 7222 is cut off, and the second gas valve structure 7224 can be energized. Accordingly, in the third state, the first gas line 7221 and the second gas line 7222 are communicated, but the communication between the passage line 72222 and the supply line 72221 can be released (disconnected), so that the adsorption The portion 7221 may have a state that does not discharge the destruction air and does not hold the semiconductor package.

On the other hand, according to one embodiment of the present application, the holding time in the second state is relatively shorter than the holding time in the first state, for example, it is maintained only for a few ms to tens of ms, and is instantaneously destroyed for a very short time. Allow air to escape. In addition, in the usual atmospheric state (third state) in which the semiconductor package does not need to be adsorbed or destroyed, not only negative pressure is not formed, but also destruction air is not discharged. Therefore, it is possible to prevent a phenomenon such as a product being damaged due to the continuous discharge of unnecessary destruction air or forcibly leaving the product to an unnecessary position by the destruction air.

In addition, in another embodiment, the first solenoid valve 72242 may be a normally closed type solenoid valve. For example, the first solenoid valve 72242 communicates the first gas line 72221 and the second gas line 72222 during energization, and the first gas line 72221 and third gas line 72223 during power failure. Can communicate. Further, the second solenoid valve 72242 may be a normally open type solenoid valve. For example, the second solenoid valve 72244 may communicate the passage line 72242 and the supply line 72241 when energized, and release the communication of the passage line 72242 and the supply line 72241 when the power is cut. In this case, in the first state, the first gas valve structure 7222 may be energized, and the second gas valve structure 7224 may be energized. Further, in the second state, the first gas valve structure 7222 may be cut off, and the second gas valve structure 7224 may be cut off. Also, in the third state, the first gas valve structure 7222 may be energized, and the second gas valve structure 7224 may be cut off. In addition, in the vacuum generation unit 722, the first gas valve structure 7222 and the second gas valve structure 7224 may be composed of various combinations of a normally closed type solenoid valve and a normally open type solenoid valve. , Accordingly, driving in the first state and the second state may also be implemented in various combinations of energization and power failure.

In addition, in the vacuum generation unit 722, the first gas valve structure 7222 and the second gas valve structure 7224 can be driven separately. For example, as described above, the first gas valve structure 7222 and the second gas valve structure 7224 can be driven according to whether energization or power failure is applied to each of the first gas valve structure 7222, The drive and drive of the second gas valve structure 7224 and the connection of each line can have various combinations.

In addition, referring to FIG. 22, the vacuum generating unit 722 may include a sensor 7228 measuring a degree of sound pressure formed in the negative pressure forming unit 72231. Negative pressure is formed in the negative pressure forming part 7221, the second gas line 72222, the first gas line 72221, and the main gas line 72111. When the semiconductor package is adsorbed to the adsorption part 7221, the negative pressure is generated. Since the inflow of gas that has been introduced through the adsorption unit 7221 may be blocked, only the discharge of gas to the outlet 722313 can be made without additional inflow of gas into the negative pressure formation unit 72231. 72231), the second gas line (72222), the first gas line (72221) and the main gas line (72211) the degree of sound pressure can be increased. On the other hand, according to the vacuum generating unit 722, the degree of sound pressure in the negative pressure forming unit 7231 measured by the sensor is measured because the degree of sound pressure (exponent) in the negative pressure forming unit 72231 is sensed by the sensor 7228. When it exceeds a preset sound pressure, the degree of sound pressure that is formed in the sound pressure forming unit 72231 may be adjusted. For example, the degree of sound pressure can be adjusted by adjusting one or more of the amount of passage of the high pressure gas and the pressure level of the high pressure gas supplied to the vacuum nozzle structure 7223 based on the sensing result of the sensor 7228.

In addition, referring to FIG. 22, the vacuum generation unit 722 may include a flow rate adjustment unit 7260 for adjusting the supply amount of the destruction gas supplied from the destruction gas supply unit 7227 to the third gas line 72223. . Specifically, referring to FIGS. 22 and 24 together, the destruction gas supply unit 7227 and the third gas line 72223 may be communicated by an auxiliary connector 72271, which is connected to its agent 3 The area of the portion facing the gas line 72223 is recessed in the radially outward direction of the auxiliary connection pipe 72271 such that the area of the portion facing the auxiliary connection pipe 72271 of the third gas line 72223 is larger than It can be formed with steps. In addition, the flow control unit 7260 includes a wedge-shaped area control unit 72261 in which the area decreases, and the area control unit 72261 is provided between the auxiliary connecting pipe 72271 and the third gas line 72223. It can be arranged to be located. The third gas line from the destruction gas supply part 7227 through the passage channel 722231 formed between the inner surface of the portion facing the auxiliary connection pipe 72271 of the third gas line 72223 and the outer surface of the area adjustment unit 72261 A destruction gas may be supplied to (72223). The passage passage 722231 formed between the inner surface of the portion facing the auxiliary connection pipe 72271 of the third gas line 7223 and the outer surface of the area adjustment unit 72261 is the third gas line of the area adjustment unit 72261 ( 72223) can be adjusted according to the amount of inflow into, and accordingly, the amount of the area adjustment unit 72261 into the third gas line 72223 from the auxiliary connector 72271 into the third gas line 72223 The supply amount (flow rate) of the incoming destruction gas can be adjusted. For example, referring to FIG. 24, as the intake amount of the area adjustment unit 72261 increases, the area of the passage passage 722231 may decrease and the supply amount of the destruction gas may decrease, and as the intake amount decreases, the passage passage 722231 And the supply of destruction gas may be increased. The flow rate adjusting unit 7260 is screwable with the auxiliary connection pipe 72271, and the amount of inflow into the third gas line 7223 of the area adjustment unit 72261 can be determined by adjusting the screw.

In addition, the vacuum generator 722 may include a regulator that controls the supply pressure of the destruction gas. Accordingly, if necessary, the supply pressure of the destruction gas can be adjusted.

As described above, according to the present invention, the adsorption and the adsorption release of the semiconductor package can be more easily controlled by separately controlling the formation and supply of negative pressure for gripping the package and the supply of the destruction air for faster release of the adsorption of the semiconductor package. In addition, the pressure and flow rate of the destruction air of the semiconductor package that needs to be finely adjusted can be more accurately controlled.

Also, one or more vacuum generating units 722 may be included. For example, the first package picker unit 72 may include eight vacuum generating units 722. In this case, the maximum number of semiconductor packages that can be gripped by the first package picker unit 72 may be eight. At this time, the high pressure gas supply unit 7225 and the destruction gas supply unit 7227 may be connected to the third gas line and the supply line of each picker structure.

Also, in the first package picker unit 72, the plurality of vacuum generating units 722 may be individually driven. For example, when one of the plurality of vacuum generating units 7220 is gripped, other vacuum generating units 722 that are neighboring or non-neighboring may be in a holding release state, and another vacuum generating unit 722 may be gripping and It may be in a state that is not in a gripping release state.

In addition, in the first package picker unit 72, the gas valve structure of the first picker structure and the gas valve structure of the second picker structure may be driven separately from each other. Accordingly, the driving of the first package picker unit 72 is variously implemented in different state combinations of the first gas valve structure 7222 and the second gas valve structure 7224 of each of the plurality of vacuum generating units 722. Can be.

In addition, the package picker module 7 includes a picker that rotates when picking up the package from the ring 0 seated on the expander 4. For example, referring to FIG. 16, the picker 721 of the first package picker unit 72 may be rotated. Specifically, the first package picker unit 72 may include a motor that rotates the picker 721. Accordingly, the picker 721 of the first package picker unit 72 can vacuum rotate the package from the ring 0 in a package providing state and rotate. When the package is picked up from the ring 0, since the package is stuck with the film, an instantaneous strong external force may be required to separate the film from the package 0. On the other hand, the package unloading device facilitates the package from the ring 0 by rotating the picker 721 when the package is picked up from the ring 0 and then rotating the package away from the film after picking up the package. Can be separated.

In addition, referring to FIGS. 1 and 14A, the package picker module 7 may include a second X-axis rail 73 that extends in the X-axis direction and is disposed on one side in the Y-axis direction of the first X-axis rail. have. In addition, the package picker module 7 is moved along the second X-axis rail 73 on at least one side of the second X-axis rail in the X-axis direction, and sequentially performs the first operation, the second operation, and the third operation. It may include a second package picker portion (74).

For reference, the second package picker unit 74 may include a picker 721 that picks up the package and a vacuum generator 722 that acts or releases vacuum pressure to the picker 721. In addition, as described above, the package picker module 7 includes a picker that rotates when picking up the package from the ring 0 seated on the expander 4, and the second package picker unit 74 uses the picker 721. It may include a rotating motor. Accordingly, the picker 721 of the first package picker unit 72 can vacuum rotate the package from the ring 0 in a package providing state and rotate. Since the picker 721 and the vacuum generating unit 722 of the first package picker unit 74 are the same or correspond to each other, detailed descriptions are omitted.

Also, the first package picker unit 72 and the second package picker unit 74 may perform different operations among the first operation, the second operation, and the third operation. For example, when the first package picker unit 72 performs the second operation, the second package picker unit 74 may perform the first operation, and the first package picker unit 72 may perform the third operation. When performing the operation, the second package picker unit 74 may perform the second operation, and when the first operation of the first package picker unit 72 is performed, the second package picker unit 74 performs the third operation. In this manner, the first package picker unit 72 and the second package picker unit 74 may sequentially perform the first to third operations so that the operations of each other do not overlap.

For reference, with respect to the third operation of each of the first and second package picker portions 72 and 74, referring to FIG. 1, each of the first and second package picker portions 72 and 74 moves in the X axis When possible, in the third operation of the first package picker portion 72, the first package picker portion 72 may be moved along the first X-axis rail 71 to be moved to the presizer 8 side, The presizer 8 may be moved in the Y-axis direction to a position where the package can be placed from the first package picker unit 72. In addition, in the third operation of the second package picker portion 74, the second package picker portion 74 may be moved along the second X-axis rail 73 to be moved to the presizer 8 side, and free The sizer 8 may be moved in the Y-axis direction to be moved to a position where the package can be placed from the second package picker unit 74.

Accordingly, considering that the operations of each of the first and second package picker portions 72 and 74 are alternately performed, package playing for the presizer 8 of the first package picker portion 72 (first After the third operation), since the package positioning (third operation) is performed on the presizer 8 of the second package picker portion 74, the presizer 8 of the first package picker portion 72 is made. After the package for the third place (the third operation), the presizer 8 is moved to the other side in the Y-axis direction to receive the package from the second package picker unit 74 (the third operation), and this second After the third operation of the package picker unit 74, for the third operation of the first package picker unit 72, it may be moved to one side in the Y-axis direction. Considering that the presizer 8 is moved in the Y-axis direction, referring to FIG. 15, a rail (not illustrated) and a power source for guiding the Y-axis movement of the presizer 8 may be provided. .

In addition, referring to FIGS. 1 and 14A, a first vision unit 725 may be included in the first package picker unit 72. The first vision unit 725 may photograph the ring 0 on the stage 41 to determine whether the ring 0 on the stage 41 is in the correct position. That is, when the ring 41 on which the package separation has not started is seated on the stage 41 and the stage 41 is transferred to the package pickup area, the ring 0 is photographed by the first vision unit 725. The first package picker unit 72 may be moved near the stage 41, that is, to the package pickup area, and then the first vision unit 725 may take a picture of the ring 0, after shooting When it is determined whether the ring 0 on the stage 41 is in the correct position and the ring 0 is positioned with the correct position, and the package is provided, the first package picker unit 72 picks up the package from the ring 0 The first operation may be performed, and then the second operation may be performed. When the second operation of the first package picker unit 72 is performed, the second package picker unit 74 is moved to the package pick-up area. One operation may be performed, and the first to third operations of the first package picker portion 72 and the second package picker portion 74 may be alternately performed.

In addition, for reference, when the ring 0 is photographed by the first vision unit 725 and the ring 0 is determined to be displaced with respect to the fixed position at a predetermined rotation angle, the stage 41 The ring (0) can be rotated to place the ring (0) in the correct position to make the package provided, and when the ring (0) is provided with the package, the first package picker unit (72) A package can be picked up from (0) and a first operation can be performed, and then a second operation can be performed. When the second operation of the first package picker portion 72 is performed, the second package picker portion 74 is performed. The first operation may be performed by being moved to the package pickup area, and the first to third operations of the first package picker unit 72 and the second package picker unit 74 may be alternately performed. Also, the first vision unit 725 may take a picture to determine whether or not the control unit has completed setting.

In addition, referring to FIGS. 1 and 14A, a second vision unit 745 may be provided in the second package picker unit 74. The second vision unit 745 may take a picture to determine whether or not the control unit has completed setting.

In addition, referring to FIGS. 1 and 14A, the package picker module 7 is a third package pick that is movable along the first X-axis rail 71 in at least the other side of the X-axis rail 71 in the X-axis direction. A cover portion 75 may be included. A third vision unit 755 may be provided in the third package picker unit 75. The third vision unit 755 may photograph the top surface of the package placed on the presizer 8.

Specifically, the third package picker unit 75 photographs and inspects the top surface of the package placed on the presizer 8, picks up the package from the presizer 8, and the bottom surface of the package A third package that sequentially performs a fifth operation of holding the pickup to be photographed, a sixth operation of holding the pickup so that the side of the package on which the lower surface is photographed, and a seventh operation of placing the package on the side in a tray. It may include a picker portion (75). The third vision unit 755 may photograph the top surface of the package placed on the presizer 8 during the fourth operation performance display of the third package picker unit 75.

In summary, referring to FIGS. 1 and 13 together, the third package picker unit 75 places the upper surface of the package aligned with the recessed portion 81 of the presizer 8 into a third vision unit 755 ) (4th operation). Subsequently, the third package picker unit 75 may pick up the package with the picker 721, and move the picked-up package onto the bottom vision 31 so that the lower surface of the package being picked up is photographed and can maintain the pickup. Yes (the fifth action). Thereafter, the third package pickup unit 75 may move the picked-up package to the side vision unit 32 to maintain the pickup so that the side of the package being picked up is photographed (sixth operation). Thereafter, the third package picker unit 75 may place the package being picked up on the tray (operation 7).

In addition, referring to FIGS. 1 and 14A, the package picker module 7 is movable along the second X-axis rail 73 at at least the other side of the second X-axis rail 73 in the X-axis direction. A fourth package picker unit 76 sequentially performing the operation, the fifth operation, the sixth operation, and the seventh operation may be included. A fourth vision unit 765 may be provided in the fourth package picker unit 76. The fourth vision unit 765 may photograph the top surface of the package placed on the presizer 8. In addition, the fourth vision unit 765 may photograph the top surface of the package placed on the presizer 8 during the fourth operation performance display of the fourth package picker unit 76. In other words, referring to FIGS. 1 and 13 together, the fourth package picker portion 76 is placed on the recessed portion 81 of the presizer 8 to align the top surface of the package with the fourth vision portion 765 ) (4th operation). Subsequently, the fourth package picker unit 76 may pick up the package with the picker 721, and move the picked-up package onto the bottom vision 31 so that the lower surface of the package being picked up is photographed and can maintain the pickup. Yes (the fifth action). Thereafter, the fourth package pickup unit 76 may move the picked-up package to the side vision unit 32 to maintain the pickup so that the side of the package being picked up is photographed (sixth operation). Thereafter, the fourth package picker unit 76 may place the package being picked up on the tray (operation 7).

In addition, the third package picker unit 75 and the fourth package picker unit 76 may perform different operations among the fourth to seventh operations. For example, when the third package picker unit 75 performs the fifth operation, the fourth package picker unit 76 may perform the fourth operation, and the third package picker unit 74 may perform the sixth operation. When performing the operation, the fourth package picker unit 76 may perform the fifth operation, and when the seventh operation of the third package picker unit 75 is performed, the fourth package picker unit 76 performs the sixth operation. When performing the first operation of the third package picker unit 75, the fourth package picker unit 76 may perform the seventh operation, and in this way, the third package picker unit 75 and the third The 4 package picker unit 76 may sequentially perform the fourth to seventh operations so that the operations of each other do not overlap.

In addition, for reference, each of the third vision unit 755 and the fourth vision unit 765 may be photographed so that the control unit determines whether the setting is completed.

In addition, referring to FIG. 1, the first to fourth vision units 725, 745, 755, and 765 may be positioned to face each other, specifically, the first vision unit 725 may include a first package picker unit ( 72) may be provided in a portion facing one side of the Y-axis and the other side of the X-axis, and the second vision portion 745 is provided in a portion facing the other side of the Y-axis of the second package picker portion 74 and facing the other side of the X-axis The third vision unit 755 may be provided at a portion facing the Y-axis side of the third package picker portion 75 and toward the X-axis side, and the fourth vision unit 765 may be a fourth package pick It may be provided in the portion facing the other side of the Y-axis of the Kerr 76 and one side of the X-axis. Accordingly, the movement of the first to fourth package picker portions 725, 745, 755, and 765 provided with the first to fourth vision portions 725, 745, 755, and 765 in the Y-axis direction is not performed. Even if the first to fourth vision units 725, 745, 755, and 765 can be photographed, the rails for Y-axis movement of the first to fourth package picker units 725, 745, 755, 765 Since the structure does not need to be provided, the present package unloading device can be implemented more simply.

In addition, referring to FIG. 1, the package unloading apparatus includes tray portions 6a, 6b, and 6c in which a tray on which an inspected package is loaded is prepared. Specifically, the tray portions 6a, 6b, and 6c may be provided in plural so that each of the plurality of trays is stacked. For example, the plurality of tray portions 6a, 6b, and 6c may include a first tray portion 6a, a second tray portion 6b, and a third tray portion 6c. In addition, two of the first to third tray portions 6a, 6b, and 6c may have a tray in which a package judged to be good quality is placed, and a tray in which a package in which a defect is judged is placed may be placed in the other. . For example, a package determined to be good may be placed on a tray disposed in the first tray portion 6a, and a package determined to be good may be placed on a tray disposed on the second tray portion 6b, A package determined to be defective may be placed on the tray disposed in the third tray portion 6c.

In addition, referring to FIGS. 1 and 25 together, the package unloading device may include a tray moving unit 9 for moving the tray units 6a, 6b, and 6c in the Y-axis direction.

For example, referring to FIG. 25, the tray moving part 9 is disposed to extend in the Y-axis direction and may include a first Y-axis rail 91 that guides the movement of the first tray part 6a. . In addition, the tray moving part 9 is disposed in the Y-axis direction, but is disposed on the other side of the first Y-axis rail 91 in the X-axis direction to guide the movement of the second Y-axis rail 6b ( 92) and a third Y-axis rail 93 that extends in the Y-axis direction and is disposed on the other side of the second Y-axis rail 92 in the X-axis direction to guide the movement of the third tray part 6c. have.

In addition, referring to FIGS. 1 and 25 together, the first to third tray portions 6a, 6b, and 6c are respectively provided on one side of the Y-axis direction of the first to third Y-axis rails 91, 92, and 93, respectively. A loading waiting area in which a package is placed for a tray seated is formed, and the first to third tray portions 6a are provided at the other side of each of the first to third Y axis rails 91, 92 and 93 in the Y axis direction. , 6b, 6c) Exchange waiting areas may be formed where supply and collection of trays for each are performed. For example, a new tray may be supplied (seated) to the first tray part 6a when the exchange waiting area of the first tray part 6a is located, and the first tray part 6a receiving the new tray may be loaded. The package moved to the waiting area may be delivered to the package determined by the third package picker unit 75 and the fourth package picker unit 76, respectively. In addition, when the package placement for the tray of the first tray part 6a is finally completed (if the tray placed in the first tray part 6a is full by the package, the first tray part 6a is the waiting area for exchange) It can be moved to, the tray on the first tray portion 6a can be recovered, a new tray can be supplied to the first tray portion 6a The driving of the second tray portion 6b is the first tray Since it is similar to the driving of the part 6a, a detailed description will be omitted, and in the case of the third tray part 6c, a new tray is placed in the third tray part 6c when the area to be replaced is replaced by the third tray part 6c. The third tray picker unit 75 and the fourth package picker unit 76 may be supplied (seated), and the third tray unit 6c supplied with the new tray may be moved to the loading waiting area to determine the defective package. In addition, when the package placement for the tray of the third tray part 6c is finally completed, the third tray part 6c can be moved to the exchange waiting area, and the third tray The tray on the part 6c can be recovered, and a new tray can be supplied to the third tray part 6c For reference, the loading waiting area is the third and fourth package picker parts 75 and 76, respectively. Packages for each of the first to third tray portions 6a, 6b, and 6c may be formed at a position capable of being placed.

In addition, according to the package unloading apparatus, before the placement of the tray of the package is started, the first to third tray portions 6a, 6b, and 6b are moved from the exchange waiting area to the loading waiting area in an empty state. , It can be located in the waiting area for loading. In addition, when the placement of the tray of the package is started, the package determined as a good product may be placed in one of the first and second tray portions 6a and 6b, and the defectively determined package may be placed in the third tray portion 6c. ), The package determined to be good quality can be loaded only into the tray of the one tray portion until the loading of the tray of one of the first and second tray portions 6a, 6b is completed, When the loading of the tray of one tray part is completed, the package judged to be good may start to be loaded into the tray of the other tray part, and the tray of one tray part where the loading is completed is moved to the waiting area for exchange and recovered, and one tray part The tray may be supplied and moved to the waiting area for loading. For example, when the placement of the tray of the package is started, the package determined as a good product may be loaded in the tray of the first tray part 6a, wherein the tray of the first tray part 6a is full. Until the state is reached, packaging of the package may be performed on the tray of the first tray part 6a (at this time, the tray of the second tray part 6b is in a standby state). Thereafter, when the tray of the first tray portion 6a is in the full state, the first tray portion 6a is moved to the exchange waiting area and the packaging of the package to the tray of the second tray portion 6b can be started. The tray of the first tray part 6a is moved to the loading standby area when the tray in the full state he was loading in the exchange waiting area is retrieved and a new tray is supplied, so that the tray of the second tray part 6b is full. When the tray of the second tray part 6b becomes full, the second tray part 6b can be moved to the exchange waiting area, and a new tray of the first tray part 6a The package playing for can be started.

As described above, in relation to the placement of a good product package that is quickly loaded in a large quantity compared to a bad package, loading of the good product package to the tray of the tray part, which is one of the two tray parts 6a, 6b, is completed, and the tray must be recovered. At this time, even in the process of recovering the tray of one tray part, the package of the good product may be loaded in the tray of the other tray part, so that the package can be continuously loaded without stopping when the tray is recovered and the new tray is supplied.

1 and 2, the package unloading apparatus is provided on the other side of the Y-axis direction of the first to third Y-axis rails 91, 92, and 93, and the tray portions 6a, 6b, 6c. It may include a plurality of tray stacker (61a, 61b, 61c) is loaded on the tray is recovered from the tray and the tray portion (6a, 6b, 6c) supplied to the. For example, referring to FIG. 26, the plurality of tray stackers 61a, 61b, and 61c include: a first tray stacker 61a on which a plurality of new trays are stacked, and a tray on which a package judged for good quality is placed It may include a second tray stacker (61b) is loaded, and a third tray stacker (61c) is loaded on the tray is placed the package is determined to be defective. Accordingly, the trays recovered from the first and second tray portions 6a and 6b moved to the exchange waiting area can be recovered by the second tray stacker 61b, and the third tray portion 6c is judged to be defective. The tray in which the package is placed may be recovered by the third tray stacker 61c, and the trays of the first tray stacker 61a may be supplied to the first to third tray parts 6a, 6b, and 6c.

Each of the second tray stacker 61b on which the tray on which the quality-determined package is placed is loaded and the third tray stacker 61c on which the defective-determined package placed tray is loaded may move the loaded tray downward. . For example, each of the second tray stacker 61b and the third tray stacker 61c has two a-shaped support members extending in the Y-axis direction spaced apart in the X-axis direction, and the tray is provided on the support member. It may include a base portion that is reciprocated in the vertical direction between the receiving portion and the receiving portion to be seated. Specifically, in the initial stage (before loading the tray), the base portion may have an initial state located below the supporting member, and the tray picker portion 62 may pick up the tray and seat it on the supporting member, and then the base portion is upper side. By moving to and contacting at least a portion of the lower surface of the tray seated on the support member, the tray can be moved upwards higher than the support member, and thereafter, the two support members are spaced apart from each other, and the distance between the two support members is seen. It can be widened so that the tray can be moved to a lower height than the base member. At this time, the base portion may be positioned so that the upper surface of the tray seated thereon and the lower surface of the supporting member have a predetermined height difference (to be located as close as possible within a non-contacting range). After the tray moves in the downward direction, the two supporting members may be close to each other to have an initial state interval. Thereafter, the tray picker unit 62 may pick up other trays and mount different trays on the two support members having an initial state interval, and then, the base unit moves upward, and among the trays seated on the base unit When the upper surface of the uppermost tray and the lower surface of the other tray on the supporting member are brought into contact, the other tray can be moved to a higher upper side than the supporting member, and then, when the two supporting members are spaced apart from each other and a wide gap is secured, the base portion The upper surface of the other tray positioned on the uppermost side of the tray moved to the lower side and seated thereon may have a predetermined height difference, but may be moved downwardly so that the other tray is located below the supporting member. Subsequently, the supporting members may be close to each other again to have an initial interval. According to this process, each of the second tray stacker 61b and the third tray stacker 61c may receive a stacker stacked thereon. In addition, for reference, in the above process, the two supporting members are not spaced apart from each other, and the tray on the base may pass between the two supporting members and move upwards even with an interval of an initial state. Incision (groove) of may be formed.

For reference, referring to FIG. 26, the tray stackers 61a, 61b, and 61c may include a sensor capable of detecting a tray seated on two supporting members. The sensor can sense the presence or absence of the tray and the position of the tray, which are seated on the two support members, by transmitting and receiving the sensor light 61r crossing the two support members.

In addition, the supply and recovery of the trays to the first to third tray portions 6a, 6b, and 6c may be performed by the tray picker portion 62. This will be described in detail below.

The package unloading device may include a tray picker portion 62. The tray picker portion 62 grips a new tray from the first tray stacker 61a to seat the first to third tray portions 6a, 6b, and 6c, or the first to third tray portions 6a , 6b, 6c), the package, which has been judged as a good product, grips the placed tray and seats it on the second tray stacker 61b, or is judged defective from the first to third tray portions 6a, 6b, 6c The tray on which the package is placed can be gripped and placed on the third tray stacker 61c.

1 and 27, the tray picker part 62 crosses the other side of the Y-axis direction of the first to third Y-axis rails 91, 92, and 93, and an X-axis rail unit extending in the X-axis direction (621), the X-axis rail unit 621 is provided to be movable along the X-axis rail unit 621 from the other side of the X-axis direction, the Y-axis rail unit 622 and Y-axis is disposed extending in the Y-axis direction A tray picker unit 623 that is movable along the rail unit 622 and capable of gripping the tray may be included. Exactly, the x-axis rail unit 621 is the other side of the Y-axis direction of the first to third Y-axis rails 91, 92, 93 from the upper side of the first to third Y-axis rails 91, 92, 93 You can cross.

In addition, the package unloading device includes a second ring picker 64. The above-described first ring picker 63 is provided to be movable along the X-axis rail unit 621 on one side of the X-axis rail unit 621 in the X-axis direction, so that the ring 0 is removed from the ring loading unit 1. It can be picked up and placed on the expander 4. In addition, the second ring picker 64 is provided in a portion facing the X-axis direction side of the tray picker unit 623 to pick up the ring 0 from the expander 4 and place it on the ring loading part 1 have. That is, the first ring picker 63 can hold the ring (0) in the state before the separation of the ring package from the ring loading part (1) and transfer it to the expander (4), and the second ring picker (64) is the ring package After separation, the ring 0 in the state can be gripped from the expander 4 and transferred to the ring loading part 1. The tray picker unit 623 and the second picker 64 share the X-axis rail unit 621 to reduce the overall size of the equipment and increase system efficiency.

In addition, referring to FIGS. 1, 2 and 27, each of the first ring picker 63 and the second ring picker 64 may have a shape in contact with at least a portion of half of the ring 0. For example, referring to FIG. 27, the ring 0 (the ring 0 with the film attached) may have an approximately circular shape, wherein each of the first ring picker 63 and the second ring picker 64 is Although having a hemispherical shape, having a perforated portion, it may have a shape in contact with at least a portion of half of the ring 0 to grip the ring 0. This takes into account that it is not necessary to make contact with the entire ring 0 in order to grip the ring 0, so that the copper wires of the first ring picker 63 and the second ring picker 64 do not overlap. Accordingly, a more compact package unloading device can be implemented.

In addition, as described above, referring to FIG. 28, the side vision unit 32 may photograph a side surface of the package in a pickup state by the picker 721 from the side vision unit 32 by the sixth operation. . For example, the side vision unit 32 may include a photographing light source unit that irradiates photographing light toward the package from the lower side and a reflector that reflects photographing light irradiated from the lower side toward the side of the package. In addition, the side vision unit 32 may include a receiving unit receiving a reflecting mirror facing the side of the package and a re-reflecting unit reflecting the reflecting mirror facing the side of the package to the receiving unit. The side vision unit 32 may photograph the side surface of the package by the photographing light unit, the photographing light, the re-reflection unit, and the reception unit. In addition, the control unit of the package unloading device may include a top surface photograph of a package photographed by the third and fourth vision units 755 and 765, a bottom photograph of a package photographed by the bottom vision unit 31, and a side vision unit ( It is possible to determine whether the package is a good product or a bad product through the side photographed product of the package photographed by 32, and according to the determination result, as described above, the package determined as a good product is provided with first to third tray portions 6a, 6b, 6c) (for example, the first and second tray portions 6a, 6b) may be placed in a tray, and the defective package may be determined by the first to third tray portions 6a, 6b, 6c. ) May be placed in a tray of another (eg, the third tray portion 6c). The package processing apparatus of the present application described above may include a control unit (not shown) for controlling driving of each component, module, and part of the package processing apparatus.

The foregoing description of the present application is for illustration, and a person having ordinary knowledge in the technical field to which the present application belongs will understand that it is possible to easily change to other specific forms without changing the technical spirit or essential characteristics of the present application. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present application is indicated by the claims, which will be described later, rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be interpreted to be included in the scope of the present application.

1: Ring loading section
2: Ring gripper
31: Bottom Vision Division
32: side vision department
4: Expander
5: Brush device
6: Tray section
61a, 61b, 61c: tray stacker
62: tray picker section
63: first ring picker
64: second ring picker
7: Package Picker Module
8: Presizer
9: Tray moving part

Claims (11)

In the package unloading device,
A ring loading part accommodating at least one ring to which a plurality of packages are attached;
A ring gripper that draws a ring from the ring loading portion or draws a ring into the ring loading portion;
A first ring picker for gripping and transporting the ring drawn from the ring loading part;
An expander on which the ring conveyed by the first ring picker is seated;
A brush device comprising a flat brush structure and a roll brush structure, and brushing a package picked up from a ring seated on the expander in at least one of the flat brush structure and the roll brush structure;
A tray portion in which a tray on which the inspected package is loaded is prepared; And
A package picker module that picks up a package from a ring seated on the expander and sequentially moves it to the tray of the brush device and the tray,
Including,
Each of the flat brush structure and the roll brush structure will vibrate for a predetermined time when the package is in contact, the package unloading device. According to claim 1,
The flat brush structure,
Base portion; And
It includes a plurality of brush units protruding upward from the base portion, disposed in the longitudinal direction and the width direction of the base portion,
The first gripping portion is a package unloading device, which will contact the gripped semiconductor package with the brush unit. According to claim 2,
The flat brush structure, the vibration in the longitudinal direction, the vibration in the width direction and the vibration in accordance with the movement in the circumferential direction of the axis in the vertical direction, the package unloading device. According to claim 3,
The first gripping portion,
When the flat brush structure vibrates in the longitudinal direction, the gripped semiconductor package in contact with the flat brush structure vibrates in the width direction so as to vibrate in the width direction,
When the flat brush structure vibrates in the width direction, the gripped semiconductor package vibrates in the longitudinal direction so as to vibrate in the longitudinal direction,
When the planar brush structure vibrates according to the movement in the circumferential direction, the package unloading device that vibrates so that the gripped semiconductor package is rotated in the reverse direction of the movement direction of the flat brush structure. According to claim 3,
The brush portion,
A first linear drive unit for moving the base portion in the longitudinal direction;
A second linear drive unit moving the base portion in the width direction; And
Further comprising a rotating unit for rotating the base portion in the circumferential direction, the package unloading device. According to claim 1,
The roll brush structure,
An axial portion arranged so that the longitudinal direction is parallel to the longitudinal direction of the base portion; And
It includes a brush unit is provided extending in a spiral shape along the circumference of the shaft portion,
It is provided on the rear of the flat brush structure, the package unloading device. According to claim 1,
The flat brush structure and the roll brush structure further comprises an alignment portion on which the semiconductor package in contact with at least one is loaded,
The alignment unit is recessed downward from the upper surface thereof, the package unloading device, which includes a recess in which the semiconductor package gripped by the first gripping unit is individually stacked. The method of claim 7,
The inner surface of the depression portion, the package unloading device, which includes an inclined inclined surface so that the semiconductor package placed into the depression is shifted to the bottom surface to be shifted from the bottom surface of the depression portion. The method of claim 7,
The package unloading device further comprises a second gripping part for gripping and transferring the semiconductor package individually loaded to the alignment part to the vision inspection part. According to claim 1,
A package unloading device further comprising a dust collector provided on the lower surface of the flat brush structure and the roll brush structure to suck falling foreign matter. According to claim 1,
And a brush cleaner contacting each of the flat brush structure and the roll brush structure to brush each.

Images