KR20200041181A - Vacuum pump housing for preventing overpressure and vacuum pump having the same - Google Patents

Abstract

The present invention provides a vacuum pump housing which comprises: a suction port for sucking fluid and a discharge port discharging the sucked fluid; a plurality of pump chambers provided between the suction port and the discharge port to compress the fluid; and a plurality of partition walls for partitioning each pump chamber. Each of the partition walls comprises: an inlet and an outlet for introducing and discharging the compressed fluid; a shaft accommodating part in which a shaft is accommodated; and a discharge hole provided to discharge a part of the compressed fluid to the shaft accommodating part or the rear end pump chamber adjacent thereto in the process of making the compressed fluid flow from the inlet to the outlet.

Description

Vacuum pump housing for preventing overpressure and vacuum pump having the same

The present invention relates to a vacuum pump housing and a vacuum pump including the same to prevent the occurrence of compression in the vacuum pump housing.

In general, a vacuum pump is a device that increases the degree of vacuum in a container by sucking and compressing a low pressure gas below the atmospheric pressure in the container and discharging it into the atmosphere.

The vacuum pump includes a housing having a fluid inlet and an fluid outlet to pump fluid, and a pair of rotors provided in the housing.

The vacuum pump configured as described above is compressed by the fluid introduced into the housing as the pair of rotors provided in the housing rotates by a driving means such as a motor, and is discharged through the outlet.

For example, in order to create a vacuum environment in a process chamber such as semiconductor manufacturing equipment, a vacuum pump under atmospheric pressure conditions compresses a fluid (process gas) from the process chamber and exhausts it to the atmosphere.

In particular, when evacuating the fluid using a multi-stage vacuum pump (Multi-stage vacuum pump), as the fluid is transferred through the continuous pump chamber of the vacuum pump, the fluid in the vacuum pump is pressurized step by step and the pressure in the pump chamber Will increase.

Therefore, there is a problem that over compression occurs inside the vacuum pump housing, and accordingly, the number of revolutions of the rotor decreases, and it takes a lot of time to exhaust the fluid in the process chamber.

In order to solve this problem, conventionally, a compressed fluid is formed into a bypass flow path, such as an auxiliary exhaust pipe, rather than an exhaust port, and exhausted to the atmosphere to prevent overcompression.

However, the above-mentioned pump has a difficulty in forming an additional component part for preventing over-compression on the outside, and there is a problem in that the performance of the entire vacuum pump is deteriorated as deformation of the additional component part occurs over a certain period of time.

Therefore, there is a need for a technology capable of overcoming the above problems.

KR Registration 10-1695319 (December 21, 2011)

An object of the present invention is to provide a vacuum pump capable of improving the exhaust speed by minimizing reduction in the number of revolutions of the rotor due to overcompression by preventing overcompression of the vacuum pump, and maintaining high exhaust performance in the atmospheric pressure region. .

In order to achieve the above object, according to an aspect of the present invention, a suction port through which the fluid is sucked and a discharge port through which the sucked fluid is discharged; A plurality of pump chambers provided to compress the fluid between the inlet and outlet; And a plurality of partition walls for partitioning each pump chamber. Each of the partition walls includes an inlet and an outlet through which compressed fluid flows in and out; A shaft accommodating portion in which the shaft is accommodated; And in the process of the compressed fluid flows from the inlet to the outlet, the discharge hole provided to discharge a portion of the compressed fluid to the shaft receiving portion side or the adjacent rear pump chamber side; It provides a vacuum pump housing comprising a.

Further, each pump chamber volume includes one that is gradually reduced toward the discharge port side.

In addition, the flow rate Q1 of the compressed fluid discharged to the discharge hole includes a flow rate ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the discharge port.

Further, the pressure P1 of the compressed fluid discharged to the discharge hole includes a pressure ratio of 0.7 to 1 of the pressure P2 of the compressed fluid discharged to the discharge port.

In addition, the number of discharge holes of the adjacent rear end partition wall of the one partition wall based on the one partition wall includes the same or less than one partition wall.

In addition, if the number of discharge holes of any one of the partition walls is n (n is an integer), n or n−1 (n is an integer) is provided in adjacent rear partition walls.

In addition, the area of the discharge hole of any one of the partition walls includes that formed larger than the area of the discharge hole of the adjacent rear partition wall.

In addition, each partition wall has a first surface facing the inlet side and a second surface opposite to the first surface, and the discharge hole is provided in at least a portion of the second surface, provided in the region between the inlet and the outlet. It includes being.

In addition, the discharge hole includes one provided in at least a part of the shaft accommodating portion.

In addition, each partition wall includes a hollow formed inside so that the compressed fluid can move.

In addition, according to another aspect of the present invention, a pair of rotating bodies each including a plurality of rotors provided on a shaft and a shaft outer circumference; And a housing having a pair of rotating bodies and a suction port through which the fluid is sucked and a discharge port through which the sucked fluid is discharged; Included, the housing, a plurality of pump chambers are respectively accommodated rotor for compressing a fluid; A plurality of partition walls which partition each pump chamber and have a shaft accommodating portion in which the shaft is accommodated; Each partition wall includes an inlet and an outlet through which compressed fluid flows in and out; In the process of the compressed fluid flowing from the inlet to the outlet, a discharge hole provided to discharge a portion of the compressed fluid to the shaft receiving portion side or the adjacent rear end pump chamber side; It provides a vacuum pump comprising a.

Moreover, the rotor includes what is a Roots rotor.

In addition, each rotor accommodated in different pump rooms includes that the diameter of the rotor, the number of lobes, and the profile are the same or provided differently.

According to the present invention, by forming a discharge hole inside the housing, it is possible to prevent over-compression that may occur inside the housing, thereby minimizing the reduction in the number of revolutions of the rotor and improving the exhaust speed.

In addition, by preventing over-compression during exhaust at atmospheric pressure, there is an effect that can limit the power consumption.

In addition, there is an effect that can prevent heat accumulation inside the vacuum pump due to over compression.

1 is a front view of a vacuum pump housing according to an embodiment of the present invention.
2 is a rear view of the partition wall according to the first and second embodiments of the present invention.
3 is a front side perspective view of a vacuum pump housing according to a first embodiment of the present invention.
4 is a rear side perspective view of the vacuum pump housing according to the first embodiment of the present invention.
5 is a rear side perspective view of a vacuum pump housing according to a second embodiment of the present invention.
6 is a view illustrating a flow of fluid in a vacuum pump housing according to an embodiment of the present invention.
7 is a front view of a vacuum pump according to a third embodiment of the present invention.
8 is a perspective view showing a pair of rotating bodies according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to ordinary or lexical meanings, and the inventor appropriately explains the concept of terms to explain his or her invention in the best way. Based on the principle that it can be defined, it should be interpreted as meanings and concepts consistent with the technical spirit of the present invention.

In addition, the same or corresponding components are assigned the same or similar reference numbers regardless of the reference numerals, and duplicate descriptions thereof will be omitted, and the size and shape of each component shown for exaggeration is exaggerated or reduced. Can be.

Therefore, the embodiments shown in the embodiments and the drawings described in this specification are only the most preferred embodiments of the present invention and do not represent all of the technical spirit of the present invention, and at the time of this application, various alternatives are possible. It should be understood that there may be equivalents and variations.

The present invention relates to a vacuum pump housing (10 or 20) and a vacuum pump (30) comprising the same, by forming a discharge hole in the housing, it is possible to prevent over-compression that may occur inside the housing, and accordingly the rotor It relates to a vacuum pump housing and a vacuum pump including the same to minimize the reduction in the number of revolutions and improve the exhaust rate.

First, the vacuum pump housing 10 or 20 described in the present specification may include an upper housing 11 and a lower housing 12.

In particular, the plurality of pump chambers 200 and the plurality of partition walls 300 provided inside the upper and lower housings 11 and 12 may be symmetrically formed with each other.

Therefore, hereinafter, a vacuum pump housing 10 or 20 and a vacuum pump 30 including the same will be described in detail with reference to the drawings showing the lower housing 12, and the same is applied to the upper housing 11 unless otherwise specified. It should be understood that components may be included.

In addition, hereinafter, for example, a vacuum pump housing 10 provided with, for example, four pump chambers, that is, first to fourth pump chambers 201 to 204 and three partition walls, that is, first to third partition walls 301 to 303, is provided. Or 20) and the vacuum pump 30 including the same, but the plurality of pump chambers 200 may be provided in various numbers depending on the exhaust capacity of the vacuum pump, etc. 300) may be provided.

1 is a front view of a vacuum pump housing according to a first embodiment of the present invention, FIG. 2 is a rear view of a partition wall according to the first embodiment of the present invention, and FIG. 3 is a vacuum pump according to the first embodiment of the present invention The front side perspective view of the housing, FIG. 4 is a rear side perspective view of the vacuum pump housing according to the first embodiment of the present invention, and FIG. 5 is a rear side perspective view of the vacuum pump housing according to the second embodiment of the present invention.

Hereinafter, a vacuum pump housing 10 or 20 according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 5.

The vacuum pump housing 10 or 20 according to the first and second embodiments of the present invention includes a suction port 100, a discharge port 101, a pump chamber 200 and a partition wall 300.

More specifically, the inlet 100 through which the fluid is sucked may be connected to a process chamber such as semiconductor manufacturing equipment to suck fluid (process gas) from the process chamber.

Therefore, it is possible to form a vacuum environment in the process chamber.

As described above, the fluid sucked through the suction port 100 is compressed while passing through a plurality of pump chambers 200 provided to compress the fluid between the suction port 100 and the discharge port 101, and the compressed fluid is a discharge port through which the fluid is discharged. It may be discharged to the atmosphere through (101).

That is, the discharge port 101 may be opened toward the atmosphere, but is not limited thereto.

Here, as an example, the suction port 100 and the discharge port 101 may be provided in the upper housing 11 and the lower housing 12, respectively, but is not limited thereto.

In particular, the suction port 100 may be provided on the first pump chamber 201 side, and the discharge port 101 may be provided on the rear end of the fourth pump chamber 204.

In addition, the plurality of pump chambers 200 include a plurality of partition walls 300 for partitioning each pump chamber 201 to 204.

The plurality of pump chambers 200 may be provided in various numbers according to the exhaust capacity of the vacuum pump, for example, the pump chamber 200 may include at least two or more, but is not limited thereto. A plurality of partition walls 300 may be provided in a number.

More specifically, as an example, the plurality of pump chambers 200 include first to fourth pump chambers 201 to 204, and the plurality of partition walls 300 include first to fourth partition walls 301-304. do.

The first and second pump chambers 201 and 202 are partitioned by the first partition wall 301, the second and third pump chambers 202 and 203 are partitioned by the second partition wall 302, and the third and fourth pump chambers ( 203 and 204 may be partitioned by the third partition 303.

Here, the fourth partition wall 304 can partition the discharge end, which will be described later, and the fourth pump chamber 204.

In addition, each of the partition walls 301 to 304 includes an inlet 310 and an outlet 311 through which compressed fluid flows in and out.

In particular, the inlet 310 of the first partition wall 301 is fluidly connected to the inlet 100 so that the fluid sucked from the inlet 100 is compressed in the first pump chamber 201 and flows into the inlet 310. You can.

Therefore, the fluid passing through the suction port 100 and the first pump chamber 201 in turn flows into the lower end side of the first partition wall 301 and is discharged to the outlet 311 provided at the upper end side, that is, the pump chamber in the rear stage, that is, the second pump chamber ( 202).

In addition, each of the partition walls 301 to 304 includes a first surface 300a facing the intake port 100 side and a second surface 300b opposite to the first surface 300a.

Here, the second surface 300b may face the discharge port 101 side.

More specifically, each of the partition walls 301 to 304 has a predetermined thickness T, and fluid compressed in each pump chamber 201 to 204 flows through the inlet 310 to move the fluid to the outlet 311 The inside can be formed to be hollow to be possible.

At this time, the inlet 310 may be provided on the bottom side of each partition wall, and the outlet 311 may be provided on the upper side.

That is, the inlet 310 may be provided on the partition wall of the lower housing, and the outlet 311 may be provided on the partition wall of the upper housing.

Meanwhile, the vacuum pump housing 10 or 20 of the present invention further includes a bearing plate (not shown) provided with the discharge port 101.

More specifically, the bearing plate may be connected to the second surface 304b side of the fourth partition wall 304 forming one surface of the fourth partition wall 304 to form a discharge end (not shown).

That is, the discharge port 101 may be provided at the rear end of the fourth pump chamber 204.

In addition, the discharge end means a space formed by the second surface 304b of the fourth partition wall 304 and a bearing plate, and the discharge end may be provided in a structure having the same shape as each pump chamber.

That is, one surface facing the second surface 304b of the fourth partition wall 304 of the bearing plate (not shown) may be provided in a structure having the same shape as each pump chamber.

Therefore, the discharge port 101 may be fluidly connected to the discharge end, which is a space formed by the second surface of the fourth partition wall and the bearing plate.

After the fluid compressed in the fourth pump chamber 204 flows into the inlet of the fourth pump chamber, it passes through the hollow portion and flows to the discharge end side through the discharge hole and the outlet, respectively, and passes through the discharge port to be discharged to the atmosphere.

Further, each of the partition walls 301 to 304 includes a shaft accommodating portion 320 in which the shaft is accommodated.

In addition, each of the partition walls 301 to 304 is compressed in the process of flowing the compressed fluid from the inlet 310 to the outlet 311, the shaft receiving portion 320 side or the adjacent rear end pump chamber 302 or 303 side. It includes a discharge hole 330 provided to discharge a portion of the fluid.

In addition to this, the volume of each pump chamber 201 to 204 may be provided to gradually decrease toward the discharge port 101 side.

More specifically, the width d1 of the first pump chamber 201 is larger than the width d2 of the second pump chamber 202 based on the length direction (axial direction of the shaft) of the housing, and the second pump chamber ( The width d2 of 202 is formed larger than the width d3 of the third pump chamber 203, and the width d3 of the third pump chamber 203 is formed larger than the width d4 of the fourth pump chamber 204. Can be.

That is, the width of each pump chamber from the first pump chamber 201 toward the fourth pump chamber 204 may be gradually reduced.

Accordingly, the volume of each pump chamber 201 to 204 is gradually reduced toward the discharge port 101 side.

On the other hand, the flow rate Q1 of the compressed fluid discharged to the discharge hole 330 may have a flow rate ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the discharge port.

More specifically, the flow rate Q1 of the compressed fluid flowing into the inlet 310 of any one of the partition walls 300 and discharged to the discharge hole 330 is 0.3 to 0.3 of the flow rate Q2 of the compressed fluid discharged to the outlet 311. 0.7, preferably from 0.4 to 0.6 of Q2, more preferably 0.5 of Q2.

That is, Q1 / Q2 = 0.3 to 0.7 or Q1 / Q2 = 0.4 to 0.6 or Q1 / Q2 = 0.5.

For example, the flow rate of the fluid compressed in the first pump chamber 201 to the inlet 310 of the first partition wall 301 is Qtot, and the flow rate of the compressed fluid discharged to the discharge hole 330 is Q1. , When the flow rate of the compressed fluid discharged to the outlet 311 is Q2,

Q1 = Qtot / 2.

In addition, the pressure P1 of the compressed fluid discharged to the discharge hole 330 may have a pressure ratio of 0.7 to 1 or 0.9 to 1 of the pressure P2 of the compressed fluid discharged to the discharge hole 311.

As described above, the present invention is formed inside the housing, that is, in each pump chamber 200 by forming a discharge hole 330, in addition to the outlet 311 in which the fluid compressed in each partition 300 is discharged to the pump chamber in the rear stage. It is possible to prevent overcompression that may occur, thereby minimizing the reduction in the number of revolutions of the rotor and improving the exhaust speed.

In addition, by preventing over-compression during exhaust at atmospheric pressure, there is an effect that can limit the power consumption.

In addition to this, there is an effect of preventing heat accumulation inside the vacuum pump due to overcompression.

Particularly, as an example, in the case of the load lock process, the chamber in the atmospheric pressure state is exhausted. At this time, since the overcompression phenomenon is prevented by the discharge hole, it is possible to maintain a high exhaust speed, thereby reducing the process chamber exhaust time in the load lock process. It can be shortened.

Meanwhile, the discharge hole 330 having the function as described above may be formed as follows.

More specifically, each of the partition walls 300 has a first surface 300a facing the intake port 100 side and a second surface 300b opposite to the first surface 300a, the discharge hole 330 Silver, but is provided in at least a portion of the second surface (300b), may be provided in the region between the inlet 310 and the outlet 311.

In addition, the discharge hole 330 may be provided in at least a portion of the shaft receiving portion 320.

2 (a) and 4, the discharge hole 330 of the vacuum pump housing 10 according to the first embodiment of the present invention is the upper housing 11 on the second surface (300b) of each partition wall And regions in which the lower housings 12 face each other and are coupled.

That is, the discharge hole 330 may be formed in a central portion of the housing.

More specifically, a first groove 331 recessed inward by a predetermined length L is provided on the second surface 300b of each partition wall, and symmetrical to both sides with respect to the shaft receiving parts 320 and 320 ', respectively. Can be formed.

2 (b) and 5, the discharge hole 330 of the vacuum pump housing 20 according to the second embodiment of the present invention is the upper housing 11 on the second surface (300b) of each partition wall And the lower housing 12 may be formed symmetrically in each of the areas to be coupled to face each other,

More specifically, based on the shaft accommodating parts 320 and 320 'on the second surface 300b of each partition wall, the agent is recessed inward by a predetermined length L between the respective shaft accommodating parts 320 and 320'. 2 can be formed by providing a groove (332).

By forming the discharge hole 330 as described above, before the fluid compressed by the discharge hole 311 is discharged, a portion of the entire fluid is discharged through the discharge hole 330 into the pump chamber at the rear stage to prevent over-compression. do.

In particular, the upper housing 11 and the lower housing 12 are formed symmetrically in regions where they face each other and are coupled, thereby making it easier to manufacture the discharge holes in the vacuum pump housing.

In addition to this, the number of discharge holes 330 of any one of the partition walls 300 may be formed to be the same as or more than the number of discharge holes 330 of adjacent rear partition walls.

In other words, the number of discharge holes of the adjacent rear partition walls of the one partition wall, based on one partition wall, may be formed equal to or less than one partition wall.

Particularly, if the number of discharge holes of one of the partition walls is n (n is an integer), n or n-1 (n is an integer) may be provided in adjacent rear partition walls.

For example, when the number of discharge holes of the first partition wall 301 is four, the number of discharge holes of the second partition wall 302, which is a partition wall of an adjacent rear end, may be four or three.

In addition, the area of the discharge hole of any one of the partition walls may be formed larger than the area of the discharge hole of the adjacent rear partition wall.

As described above, by making the number of discharge holes of one of the partition walls, for example, the first partition wall 301 larger than the discharge holes of the rear partition walls, or by forming a larger area, for example, the pump chamber of the front end having the largest compression ratio, for example However, it is possible to minimize overcompression in the first pump chamber.

6 is a view illustrating a flow of fluid in a vacuum pump housing according to an embodiment of the present invention.

Referring to Figure 6, the flow of the compressed fluid by the discharge hole 330 is described, when the fluid is sucked through the suction port and compressed in each pump chamber to move to the pump chamber of the rear stage, generally shown in the figure 1 Although flows along the arrow No. 1, the present invention forms a discharge hole, and then part of the fluid moves to the pump chamber at the rear end along the arrow 2, and then the remaining fluid moves to the pump chamber at the rear end along the arrow 1 and is compressed. It is possible to prevent overcompression by distributing and moving the fluid through the discharge hole to the pump chamber in the rear stage.

On the other hand, the present invention provides a vacuum pump 30 including a vacuum pump housing 10 or 20 according to the first and second embodiments.

For example, the vacuum pump 30 relates to a vacuum pump 30 including the above-described vacuum pump housing 10 or 20.

Therefore, the details of the vacuum pump housing, which will be described later, may be the same as described in the vacuum pump housing.

6 is a front view of the vacuum pump 30 according to the third embodiment of the present invention, Figure 7 is a perspective view showing a pair of rotating bodies according to an embodiment of the present invention.

6 and 7, the vacuum pump 30, the shaft (501, 501 ') and a plurality of rotors (502, 502') provided on the outer periphery of the pair of rotating bodies (500, respectively) 500 ').

In addition, a pair of rotating bodies (500,500 ') is accommodated, and includes a housing (10 or 20) having a suction port 100 through which fluid is sucked and a discharge port (101) through which fluid is sucked.

In addition to this, the housing 10 or 20 includes a plurality of pump chambers 200 each receiving a rotor 502 for compressing a fluid, partitioning each pump chamber 201 to 204, and shaft 501 ) Includes a plurality of partition walls 300 having a shaft accommodating portion 320.

In addition, each of the partition walls 301 to 304 includes an inlet 310 and an outlet 311 through which compressed fluid flows in and out, and the compressed fluid flows from the inlet 310 to the outlet 311 In the process, it includes a discharge hole 330 provided to discharge a portion of the fluid compressed to the shaft receiving portion 320 side or the adjacent rear end pump chamber (202 or 203 or 204) side.

Here, the rotors 502 and 502 'may be Roots rotors.

Therefore, the vacuum pump 30 may be a Roots pump.

Further, each rotor accommodated in different pump rooms may have the same diameter, number of lobes, and profiles, or different rotors.

10, 20: vacuum pump housing
30: vacuum pump

Claims (13)

A suction port through which the fluid is sucked and a discharge port through which the sucked fluid is discharged;
A plurality of pump chambers provided to compress the fluid between the inlet and outlet; And
A plurality of partition walls for partitioning each pump chamber; It includes,
Each partition wall includes an inlet and an outlet through which compressed fluid flows in and out;
A shaft accommodating portion in which the shaft is accommodated; And
In the process of the compressed fluid flowing from the inlet to the outlet, a discharge hole provided to discharge a portion of the compressed fluid to the shaft receiving portion side or the adjacent rear end pump chamber side; Vacuum pump housing comprising a. According to claim 1,
Each pump chamber volume is provided with a vacuum pump housing that is gradually reduced toward the outlet side. The method according to claim 1 or 2,
The vacuum pump housing having a flow rate ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the discharge port, the flow rate Q1 of the compressed fluid discharged to the discharge hole. The method according to claim 1 or 2,
The vacuum pump housing having a pressure ratio of 0.7 to 1 of the pressure P2 of the compressed fluid discharged to the discharge hole, the pressure P1 of the compressed fluid discharged to the discharge hole. According to claim 2,
A vacuum pump housing in which the number of discharge holes of adjacent rear partitions of one partition wall is equal to or less than that of one partition wall based on one partition wall. The method of claim 5,
If the number of discharge holes in one partition wall is n (n is an integer),
A vacuum pump housing in which n or n-1 pieces (n is an integer) are provided at adjacent rear bulkheads. According to claim 2,
The area of the discharge hole of any one of the partition walls is formed larger than the area of the discharge hole of the adjacent rear partition wall. According to claim 1,
Each partition wall has a first surface facing the inlet side and a second surface opposite to the first surface,
The discharge hole is provided in at least a portion of the second surface, the vacuum pump housing provided in the region between the inlet and outlet. According to claim 1,
The discharge hole is a vacuum pump housing provided in at least a portion of the shaft receiving portion. According to claim 1,
Each partition wall has a vacuum pump housing formed inside a hollow so that the compressed fluid can move. A pair of rotating bodies each including a plurality of rotors provided on the shaft and the outer circumference of the shaft; And
A housing in which a pair of rotating bodies are accommodated and having a suction port through which fluid is sucked in and a discharge port through which sucked fluid is discharged; It includes,
The housing,
A plurality of pump chambers, each containing a rotor for compressing a fluid;
A plurality of partition walls which partition each pump chamber and have a shaft accommodating portion in which the shaft is accommodated; And
Each partition wall includes an inlet and an outlet through which compressed fluid flows in and out;
In the process of the compressed fluid flowing from the inlet to the outlet, a discharge hole provided to discharge a portion of the compressed fluid to the shaft receiving portion side or the adjacent rear end pump chamber side; Vacuum pump comprising a. The method of claim 11,
The rotor is a Roots rotor vacuum pump. The method of claim 12,
Each rotor accommodated in different pump chambers is a vacuum pump provided with the same diameter or different rotor diameters, lobes, and profiles.

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