KR20200028601A - Laser system and method for maintaining laser path - Google Patents

Abstract

The present invention relates to a laser system and a laser path maintenance method and, more specifically, to a laser system and a laser path maintenance method for maintaining an incident position and an incident angle of a laser beam incident onto a beam conversion optical system. According to an embodiment of the present invention, the laser system comprises: a laser oscillation unit which oscillates a laser beam; a beam conversion optical system to which the laser beam is transmitted along a path of the laser beam from the laser oscillation unit and onto which the laser beam is incident; first and second driving mirrors which are provided on the path of the laser beam between the laser oscillation unit and the beam conversion optical system, and reflect the laser beam through each reflective surface to transmit the laser beam to the beam conversion optical system; and a control unit which controls the first and second driving mirrors to maintain the incident position and the incident angle of the laser beam incident onto the beam conversion optical system. The first driving mirror adjusts the angle of reflection of the laser beam incident from the laser oscillation unit to cause the laser beam to be incident onto a predetermined position among the reflective surfaces of the second driving mirror. The second driving mirror adjusts the angle of reflection of the laser beam incident from the first driving mirror to cause the laser beam to be incident at a predetermined angle onto a selected position among the incident surfaces of the beam conversion optical system.

Description

Laser system and method for maintaining laser path}

The present invention relates to a laser system and a laser path maintenance method, and more particularly, to a laser system and a laser path maintenance method that maintains an incident position and an incident angle of a laser beam incident on a beam conversion optical system.

Lasers are used for various purposes in various industries. In recent years, a technique for processing an object using a laser has been widely used, and as the stability and output of an excimer laser beam are improved, the range of use has been expanded to a process for processing semiconductor materials.

In recent years, processing using a laser requires precision down to a sub-micro, and such precision processing continues to be the same as a laser spot or a laser beam directly processing an object. It needs to be maintained, and the properties such as the position, shape, and energy distribution of the laser spot or laser beam having energy must be kept the same in the processing surface of the subject.

In particular, precision equipment containing various optical systems such as diffractive optical elements (DOE), refractive optical elements (ROE), and imaging optics that require high precision rather than a simple focusing lens The small path change of the laser entering the optical system that maintains a high-precision specification also affects the characteristics of the laser spot or laser beam, thereby changing the characteristics of the laser beam or laser spot. That is, in equipment that requires precise position processing, shape of a spot beam, and energy distribution, such a beam change causes performance degradation.

In addition, the configuration of the processing equipment using a laser is composed of a laser, a delivery mirror, and an optical system. The laser has a beam pointing stability, so that several tens of micro radians (μ-radian) to There is a change in the path of the beam of several millimeters of radians (m-radian), and changes in the environment (e.g., temperature, humidity) of the equipment cause deformation of the transmission mirror and the instrument. Since the path is changed, there is a need for a device that continuously maintains the path of the laser entering the optical system.

Korean Registered Patent Publication No. 10-0736689

The present invention provides a laser system and a laser path maintenance method that maintains an incident position and an incident angle of a laser beam incident on a beam conversion optical system through adjustment of a first driving mirror and a second driving mirror.

A laser system according to an embodiment of the present invention includes a laser oscillation unit that oscillates a laser beam; A beam conversion optical system in which a laser beam is transmitted and incident along a path of a laser beam from the laser oscillation unit; First and second driving mirrors provided on a path of the laser beam between the laser oscillation unit and the beam conversion optical system and reflecting the laser beam through respective reflective surfaces and transmitting the beam to the beam conversion optical system; And a control unit controlling the first and second driving mirrors to maintain an incident position and an incident angle of a laser beam incident on the beam conversion optical system, wherein the first driving mirror includes a laser beam incident from the laser oscillation unit. By adjusting a reflection angle, a laser beam is incident at a predetermined position on a reflective surface of the second driving mirror, and the second driving mirror is adjusted by adjusting a reflection angle of a laser beam incident from the first driving mirror to convert the beam conversion optical system. The laser beam may be incident at a predetermined angle on a selected position among the incident surfaces of the.

A first image sensor unit configured to detect an arrival position of a first separation light separated from the laser beam reflected from the first driving mirror; And a second image sensor unit configured to detect an arrival position of the second separation light separated from the laser beam reflected from the second driving mirror. The control unit may further include: based on the detected arrival position of the first separation light. The first driving mirror may be controlled, and the second driving mirror may be controlled based on the detected arrival position of the second separation light.

It is provided on the path of the laser beam between the first driving mirror and the second driving mirror, and splits the laser beam reflected from the first driving mirror to transmit the first separation light to the first image sensor unit A first optical splitter; And provided on a path of the laser beam between the second driving mirror and the beam-converting optical system, dividing the laser beam reflected from the second driving mirror and transmitting the second separated light to the second image sensor unit. It may further include; a second light splitter.

The distance between the second driving mirror and the first optical splitter may be the same as the distance between the first optical splitter and the first image sensor unit.

A first optical splitter provided on a path of the laser beam between the second driving mirror and the beam conversion optical system, and dividing the laser beam; A focus lens to which the first separation light separated from the laser beam is incident; And dividing the first separation light passing through the focus lens, transmitting the second separation light separated from the first separation light to the second image sensor unit, and the first separation light being separated. It may further include; a second light splitter for transmitting the separated light to the first image sensor unit.

The optical path length from the focus lens to the first image sensor unit and from the focus lens to the second image sensor unit may be determined by a focal length of the focus lens.

The optical path length from the focus lens to the second image sensor unit may be the same as the focal length of the focus lens.

The control unit may include: a reference position setting unit for setting a first reference position in the first image sensor unit and a second reference position in the second image sensor unit, respectively; Comparing the first reference position and the arrival position of the first separation light, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position are calculated, and the second reference position and the second separation A position information calculator configured to compare the arrival position of the light and calculate a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position; And a first control signal for controlling the rotation direction and rotation angle of the first driving mirror based on the calculated separation distance and the separation distance of the arrival position of the first separation light, and the calculated arrival position of the second separation light. It may include a control signal generating unit for generating a second control signal for controlling the rotation direction and rotation angle of the second driving mirror based on the separation direction and the separation distance of.

The reference position setting unit sets the arrival position of the first separation light in the state where the laser beam is incident on a predetermined position among the reflective surfaces of the second driving mirror as the first reference position, and the beam conversion optical system enters The arrival position of the second separation light in the state where the laser beam is incident at the predetermined angle on the selected position among the surfaces may be set as the second reference position.

The control unit first controls the first driving mirror so that the laser beam is incident on a predetermined position among the reflective surfaces of the second driving mirror, and the laser beam is located at a predetermined position among the reflective surfaces of the second driving mirror. The second driving mirror may be sequentially controlled such that the laser beam is incident at the predetermined angle at a selected position among the incident surfaces of the beam conversion optical system in an incident state.

A laser path maintenance method according to another embodiment of the present invention includes a process of oscillating a laser beam using a laser oscillation unit; Adjusting the angle of the reflective surface of the first driving mirror such that the laser beam incident upon the first driving mirror from the laser oscillation unit and reflected is incident on a predetermined position among the reflective surfaces of the second driving mirror; And adjusting a reflection surface angle of the second driving mirror such that a laser beam incident upon and reflected from the first driving mirror is incident at a predetermined angle on a selected position among the incident surfaces of the beam conversion optical system. Including, it is possible to maintain the incident position and the incident angle of the laser beam incident on the beam conversion optical system.

Detecting an arrival position of a first separation light separated from a laser beam reflected from the first driving mirror using a first image sensor unit; And detecting the arrival position of the second separation light separated from the laser beam reflected from the second driving mirror by using a second image sensor unit. Further comprising, adjusting the angle of the reflection surface of the first driving mirror Is a process of controlling the first driving mirror based on the detected arrival position of the first separation light, and the process of adjusting the angle of the reflection surface of the second driving mirror determines the arrival position of the detected second separation light. It may include a process of controlling the second driving mirror based.

Setting a first reference position in the first image sensor unit and a second reference position in the second image sensor unit, respectively; Comparing the first reference position and the arrival position of the first separation light, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position are calculated, and the calculated first arrival position of the separation light Generating a first control signal for controlling the rotation direction and rotation angle of the first driving mirror based on the separation direction and the separation distance; And comparing the second reference position and the arrival position of the second separation light to calculate a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position, and calculating the arrival position of the second separation light. Generating a second control signal for controlling the rotational direction and rotational angle of the second driving mirror based on the separation direction and the separation distance; further comprising, adjusting the angle of the reflection surface of the first driving mirror Is performed by controlling the rotation direction and rotation angle of the first driving mirror according to the first control signal, and the process of adjusting the angle of the reflection surface of the second driving mirror is driven by the second control signal. It can be performed by controlling the rotation direction and rotation angle of the mirror.

The setting of the first reference position in the first image sensor unit and the second reference position in the second image sensor unit may include: pre-oscillation of a laser beam using the laser oscillation unit; Adjusting the laser beam to a predetermined energy distribution and shape by controlling the rotation direction and rotation angle of the first drive mirror and the rotation direction and rotation angle of the second drive mirror; Obtaining an arrival position of the first separation light and an arrival position of the second separation light, respectively, while the laser beam is adjusted to the predetermined energy distribution and shape; And setting the first arrival position of the first separation light and the second arrival position of the second separation light as the first reference position and the second reference position, respectively.

The process of adjusting the angle of the reflective surface of the first driving mirror is performed prior to the process of adjusting the angle of the reflective surface of the second driving mirror, and the laser beam incident on the first driving mirror and reflected is reflected in the second driving mirror. The process of adjusting the angle of the reflective surface of the second driving mirror may be sequentially performed while being incident at a predetermined position among the reflective surfaces of.

The laser system according to an embodiment of the present invention adjusts the angle of reflection of the laser beam incident from the laser oscillation unit through the control of the first driving mirror to incident the laser beam at a predetermined position on the reflective surface of the second driving mirror, and 2 By controlling the reflection angle of the laser beam incident from the first driving mirror through control of the driving mirror, the laser beam is incident on the beam conversion optical system by entering the laser beam at a predetermined angle among the incident surfaces of the beam conversion optical system. It is possible to keep the incident position and the incidence angle of the constant, and accordingly, it is possible to prevent the characteristic change of the laser beam according to the change in the incident position and / or the incident angle of the laser beam, and the deterioration in performance caused by the characteristic change of the laser beam Can also be prevented.

In addition, the first driving mirror is controlled so that the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, and the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror. By controlling the second driving mirror such that the laser beam is incident at a predetermined angle at a selected position among the incident surfaces, simply and quickly deviating from a predetermined position among the reflective surfaces of the second driving mirror or at a selected position among the incident surfaces of the beam conversion optical system The incident position and / or the incident angle of the laser beam incident on the beam conversion optical system may be maintained by adjusting the incident position and / or the incident angle of the laser beam in which the incident angle deviates from a preset angle.

Then, by detecting the arrival positions of the first separated light and the second separated light separated from the path of the laser beam by using the first image sensor unit and the second image sensor unit, the laser beam incident on the second driving mirror is simply incident. The position and the incident position of the laser beam incident on the beam conversion optical system may be confirmed, and the first image sensor unit and the second image sensor unit may not interfere with the path of the laser beam, and a process using an effective laser beam may be performed. have.

In addition, although the first and second image sensors may not interfere with the path of the laser beam through the proper arrangement of the first and second optical splitters and the first and second image sensor units, the first and second image splitters may be directly controlled. 2 As the position of the laser beam incident on the driving mirror and the position of the laser beam incident on the beam converting optical system are detected, the position of the laser beam incident on the correct second driving mirror and the laser beam incident on the beam converting optical system It is possible to obtain the incidence position.

On the other hand, through the control of the first driving mirror and the second driving mirror, the laser beam is adjusted to a predetermined energy distribution and shape to obtain the arrival positions of the first separation light and the second separation light, respectively, and the obtained first By setting the arrival positions of the separation light and the second separation light to the first reference position and the second reference position, respectively, the arrival position of the first separation light is positioned at the first reference position and the arrival position of the second separation light is set at the second reference position. Just by positioning, the incident position and the incident angle of the laser beam incident on the beam conversion optical system can be maintained.

1 is a schematic diagram showing a laser system according to an embodiment of the present invention.
2 is a conceptual diagram for explaining the arrival position of the first separation light in the first image sensor unit and the arrival position of the second separation light in the second image sensor unit according to an embodiment of the present invention.
Figure 3 is a schematic diagram showing a modification of the laser system according to an embodiment of the present invention.
Figure 4 is a conceptual diagram for explaining the optical path length from the focus lens to the first image sensor unit and the focus lens to the second image sensor unit in a modified example of the laser system according to an embodiment of the present invention.
5 is a flow chart showing a laser path maintenance method according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various different forms, and only the present embodiments allow the disclosure of the present invention to be complete, and the scope of the invention to those skilled in the art is completely It is provided to inform you. In the description, the same reference numerals are assigned to the same components, and the drawings may be exaggerated in size in order to accurately describe embodiments of the present invention, and the same reference numerals in the drawings refer to the same elements.

1 is a schematic diagram showing a laser system according to an embodiment of the present invention.

Referring to Figure 1, the laser system 100 according to an embodiment of the present invention includes a laser oscillation unit 110 for oscillating the laser beam 10; A beam conversion optical system 120 transmitted and incident along the path of the laser beam 10 from the laser oscillation unit 110; Provided on a path of the laser beam 10 between the laser oscillation unit 110 and the beam conversion optical system 120, the beam conversion optical system 120 is reflected by reflecting the laser beam 10 through each reflective surface. ) First and second driving mirrors (131,132); And a control unit (not shown) that controls the first and second driving mirrors 131 and 132 to maintain an incident position and an incident angle of the laser beam 10 incident on the beam conversion optical system 120.

The laser system 100 may irradiate the laser beam 10 with an object, such as a substrate, to process the object. The laser system 100 is not limited to this and uses various lasers such as a laser crystallization device, a laser lift-off device for removing a film on a substrate, a laser annealing device such as heat treatment, a laser processing device, and a substrate processing device. The laser beam 10 can be applied where required.

The laser oscillation unit 110 may oscillate the laser beam 10 and may include a laser oscillator. The laser beam 10 oscillated by the laser oscillation unit 110 is reflected by the first and second driving mirrors 131 and 132 and transmitted to the beam conversion optical system 120, so that it can be processed into a desired shape and irradiated to the irradiated object Can be.

Here, the laser oscillation unit 110 may be a known configuration that generates a laser beam, depending on the wavelength of the laser beam to be used, excimer lasers such as KrF excimer lasers, ArF excimer lasers, diode pumping solids (Diode Pumping) Various types of solid-state (DPSS) lasers may be employed.

The beam conversion optical system 120 may be incident by transmitting the laser beam 10 along the path of the laser beam 10 from the laser oscillation unit 110, and among the shape, size, and energy distribution of the incident laser beam 10 The laser beam 10 can be processed into a desired shape by converting at least one. The beam conversion optical system 120 may be disposed on the traveling path (output direction) of the laser beam 10 reflected from the second driving mirror 132, and the path of the laser beam 10 transmitted to the irradiated object may be Can form. At this time, the beam conversion optical system 120 includes a beam expander that processes the shape of the laser beam 10, a beam homogenizer that uniformizes the energy distribution of the processed laser beam 10, and a laser beam. It may include a projection lens for adjusting the focus of (10), a mask for masking the edge of the laser beam 10 cross-section through the beam uniformer, a field lens, and the like.

For example, the beam conversion optical system 120 may process the Gaussian type laser beam 10 into a square beam type laser beam 10 such as a flat top, and the flat top laser beam 10. ), The energy distribution difference between the center and the outside may be relatively uniform, and accordingly, the flat top laser beam 10 can rapidly irradiate uniform energy to a relatively large area.

The first and second driving mirrors 131 and 132 may be provided on a path of the laser beam 10 between the laser oscillation unit 110 and the beam converting optical system 120, and the laser beam 10 through each reflective surface It can be reflected and transmitted to the beam conversion optical system 120. The first and second driving mirrors 131 and 132 are rotated using a traveling path (or exit direction) of the laser beam 10 as a rotation axis, or at least one of three directions including the x-axis, y-axis, and z-axis. It can also be rotated with a rotating shaft.

The control unit (not shown) may control the first and second driving mirrors 131 and 132 to maintain the incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120. When the incident position and angle of incidence of the laser beam 10 incident on the beam conversion optical system 120 are changed, the characteristics of the laser beam 10 are affected to change the shape and / or energy distribution of the laser beam 10. And, such a change in the laser beam 10 may cause a decrease in process performance such as processing, and may cause process errors and product defects in the process using a laser. Accordingly, the first and second driving mirrors 131 and 132 may be controlled through a control unit (not shown) to maintain the incident position and incident angle of the laser beam 10 incident on the beam conversion optical system 120.

Conventionally, the angle of the mirror is adjusted by checking only the position of the laser beam 10 in the irradiated object regardless of the incident position and the incident angle of the laser beam 10 incident on the optical system such as the beam conversion optical system 120. Through it, only the irradiation position (or arrival position) of the laser beam 10 in the object to be irradiated was changed. In this case, since only the irradiation position of the final laser is changed regardless of the incident position and the incident angle of the laser beam 10 incident on the optical system, the incident position and the incident angle of the laser beam 10 cannot be maintained, and the laser beam 10 ) And / or energy distribution.

However, the laser system 100 according to the present invention controls the first and second driving mirrors 131 and 132 to maintain the incidence position and angle of incidence of the laser beam 10 incident on the beam converting optical system 120, thereby allowing the laser beam Changes in the position, shape and / or energy distribution of (10) can be suppressed or prevented. Accordingly, it is possible to suppress or prevent a decrease in process performance such as processing, and reduce process errors and product defects in a process using a laser.

In addition, the beam conversion optical system 120 may be an optical system that emits (or converts) the laser beam 10 in the form of a plane having a shape of a certain area, rather than one focused spot. , It may be an optical system that distributes the laser beam 10 symmetrically with respect to the optical axis, and the beam uniformity that makes the energy distribution of the laser beam 10 uniform over a certain area (for example, the area where the laser beam is irradiated). It may include an optical system (Beam uniformity optic) and an imaging optic that converts the size of the laser beam 10 to a size of a predetermined magnification. The beam uniform optical system can uniformize the energy distribution of the laser beam 10 in a certain area, and includes a diffractive optical element (DOE), a refractive optical element (ROE), an imaging optic, and a beam. It may include at least one or a combination of two or more selected from a shaper, array lens, axicon prism, and powell lens. In the beam uniform optical system, the energy distribution of the uniform laser beam 10 is important. If the incident position and the incident angle of the incident laser beam 10 are not maintained, a change in the energy distribution of the laser beam 10 occurs and the laser beam is generated. The energy distribution in (10) is not uniform.

The imaging optical system may convert the size of the laser beam 10 to a size of a predetermined magnification, and may include a general imaging optical system and a re-image optic. Here, the re-imaging optical system may be an optical system that creates a desired quality by re-imaging by performing masking or the like in the middle of focusing or imaging once. The change in the incident position and the incident angle of the laser beam 10 incident from the imaging optical system causes symmetry with respect to the optical axis to collapse, resulting in performance variations such as energy distribution for each optical axis reference position.

Meanwhile, the beam uniform optical system and / or the imaging optical system may be used to separate beams instead of a single focused point, and in this case, the equality of the spacing and shape between the respective beams (or dots) Importantly, when the incident position and the incident angle of the laser beam 10 incident on the optical system (ie, the beam conversion optical system) are changed, distortion occurs at each position of a plurality of spots (multi spots), and thus the spacing and shape of each position The back changes. In addition, in the re-imaging optical system (ie, re-imaging optical system using a mask) that makes a desired quality by performing masking or the like through a mask or the like once focused or imaged, the incident position of the laser beam 10 When and and the incident angle change, the relationship between the focused or imaged beam and the mask is distorted, and the re-imaged beam or dot is deformed.

As such, it is more important to keep the incident position and the incident angle of the laser beam 10 constant in the beam uniform optical system and / or the optical system including the imaging optical system (ie, the beam conversion optical system).

The first driving mirror 131 adjusts the reflection angle of the laser beam 10 incident from the laser oscillation unit 110 to cause the laser beam 10 to be incident at a predetermined position among the reflective surfaces of the second driving mirror 132. The second driving mirror 132 may adjust the reflection angle of the laser beam 10 incident from the first driving mirror 131 to laser at a predetermined angle at a selected position among the incident surfaces of the beam conversion optical system 120. The beam 10 can be incident. The first driving mirror 131 adjusts the reflection angle of the laser beam 10 incident from the laser oscillation unit 110 to cause the laser beam 10 to be incident at a predetermined position among the reflective surfaces of the second driving mirror 132. When the laser beam 10 is incident at a predetermined position among the reflective surfaces of the second driving mirror 132, the beam is adjusted by adjusting the reflection angle of the laser beam 10 incident from the first driving mirror 131. When the angle of incidence of the laser beam 10 incident on the conversion optical system 120 is set to a preset angle, the laser beam 10 may be incident at a selected position among the incident surfaces of the beam conversion optical system 120.

That is, a predetermined position among the reflective surfaces of the second driving mirror 132 extends toward the reflective surface of the second driving mirror 132 at a predetermined angle from a selected position among the incident surfaces of the beam conversion optical system 120. The line (or virtual line) may be a position (point) where the reflection surface of the second driving mirror 132 meets, and thus a predetermined position among the reflective surfaces of the second driving mirror 132 is determined to determine the laser beam ( When 10) is incident, the laser beam 10 that can be incident on the incident surface of the beam conversion optical system 120 in parallel with the predetermined angle is different from the selected position among the incident surfaces of the beam conversion optical system 120 The laser beam 10 incident at a position (or a position different from a selected position among the incident surfaces of the beam conversion optical system) may be excluded (or excluded), and the incident surface of the beam conversion optical system 120 may be excluded at the predetermined angle. The incident laser beam 10 is above It can be prevented from being incident on a position other than the selected position among the incident surfaces of the base beam conversion optical system 120.

Accordingly, the second driving mirror 132 adjusts the reflection angle of the laser beam 10 incident from the first driving mirror 131 to adjust the angle of incidence and incident angle of the laser beam 10 incident on the beam conversion optical system 120. When one of the incident surfaces of the beam conversion optical system 120 corresponding to any one is matched to a selected position or the preset angle, the other one can be naturally matched, and through this, the beam conversion optical system 120 can be simply adjusted. The laser beam 10 may be incident on the selected position among the incident surfaces at the predetermined angle, and the incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120 may be maintained.

The second driving mirror 132 adjusts the reflection angle of the laser beam 10 incident from the first driving mirror 131 to adjust the reflection angle of the laser beam 10 at a predetermined angle to a selected position among the incident surfaces of the beam conversion optical system 120. ) Can be incident, and the beam conversion optical system 120 is adjusted by adjusting the reflection angle of the laser beam 10 incident at a predetermined position among the reflective surfaces of the second driving mirror 132 from the first driving mirror 131. By incident the laser beam 10 at a predetermined angle on the selected position of the incident surface of the, it is possible to simply maintain the incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120.

In addition, the control unit (not shown) may first control the first driving mirror 131 such that the laser beam 10 is incident at a predetermined position among the reflective surfaces of the second driving mirror 132, and the laser beam 10 ) Is sequentially incident so that the laser beam 10 is incident at the predetermined angle at a selected position among the incident surfaces of the beam conversion optical system 120 in a state where it is incident at a predetermined position among the reflective surfaces of the second driving mirror 132. The second driving mirror 132 can be controlled. The control unit (not shown) may first control the first driving mirror 131 to allow the laser beam 10 to be incident at a predetermined position among the reflective surfaces of the second driving mirror 132, and sequentially second By controlling the driving mirror 132, the laser beam 10 is pre-selected at a selected position among the incident surfaces of the beam conversion optical system 120 while being incident at a predetermined position among the reflective surfaces of the second driving mirror 132. The laser beam 10 may be incident at a set angle.

In this case, regardless of the angle of incidence incident on the reflective surface of the second driving mirror 132, the first driving mirror 131 is controlled so that the laser beam 10 is previously selected among the reflective surfaces of the second driving mirror 132. After allowing it to be incident at a predetermined position, the second driving mirror 132 is controlled to apply to the beam conversion optical system 120 corresponding to only one of the predetermined position and the predetermined angle among the incident surfaces of the beam conversion optical system 120. By adjusting the incident position or angle of incidence of the laser beam 10 to be incident, the laser beam 10 can be incident at a predetermined angle to a selected position among the incident surfaces of the beam conversion optical system 120 simply and quickly. The incident position and the incident angle of the laser beam 10 incident on the conversion optical system 120 may be maintained.

On the other hand, if the laser beam 10 is not adjusted to be incident at a predetermined position among the reflective surfaces of the second driving mirror 132 by controlling the first driving mirror 131, the laser beam incident on the beam conversion optical system 120 The angle of incidence is determined for each incident position of the beam 10, and the control (or adjustment) of the second driving mirror 132 is used to control the second driving mirror 132 from the position other than the predetermined position among the reflective surfaces of the second driving mirror 132. The laser beam 10 cannot be incident on the selected position among the incident surfaces of the beam conversion optical system 120 at a set angle, and the incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120 are maintained. It cannot be.

And the laser system 100 of the present invention may further include a transmission mirror (133,134) for transmitting the laser beam 10 oscillated from the laser oscillation unit 110 to the first driving mirror 131; 133 and 134 are the distance between the laser oscillation unit 110 and the first driving mirror 131 or the reflective surface of the first driving mirror 131 in the oscillation direction of the laser beam 10 due to the structure of the laser system 100. When it cannot be located, the laser beam 10 oscillated by the laser oscillation unit 110 is applied to the first driving mirror 131 so that the laser beam 10 can be effectively incident on the reflective surface of the first driving mirror 131. Can deliver.

FIG. 2 is a conceptual diagram for explaining an arrival position of a first separation light in a first image sensor unit and an arrival position of a second separation light in a second image sensor unit, according to an embodiment of the present invention. Denotes an arrival position of the first separation light in the first image sensor unit, and FIG. 2 (b) denotes an arrival position of the second separation light in the second image sensor unit.

Referring to FIG. 2, the laser system 100 according to the present invention is a first image for detecting the arrival position of the first separation light 11 separated from the laser beam 10 reflected from the first driving mirror 131 Sensor unit 141; And a second image sensor unit 142 that detects an arrival position of the second separation light 12 separated from the laser beam 10 reflected from the second driving mirror 132. The first image sensor unit 141 may detect the arrival position of the first separation light 11 separated from the laser beam 10 reflected from the first driving mirror 131, and the first separation light 11 The separated laser beam 10 is incident on the second driving mirror 132 at a predetermined angle, and the first separation light 11 separated from the laser beam 10 reflected from the first driving mirror 131 is The first image sensor unit 141 at an angle related to the incident angle of the laser beam 10 incident on the second driving mirror 132 (eg, equal to the incident angle of the laser beam incident on the second driving mirror) 141 ), The arrival position of the first separation light 11 may be related to the incident position of the laser beam 10 incident on the second driving mirror 132. Accordingly, the first driving mirror 131 is controlled by acquiring (or calculating) the incident position of the laser beam 10 incident on the second driving mirror 132 through the arrival position of the first separation light 11. can do. Here, the laser beam 10 reflected from the first driving mirror 131 may include the laser beam 10 reflected from the second driving mirror 132 after being reflected from the first driving mirror 131, It may be reflected directly from the first driving mirror 131 and directly divided, or may be divided after being reflected back to the second driving mirror 132.

The second image sensor unit 142 may detect the arrival position of the second separation light 12 separated from the laser beam 10 reflected from the second driving mirror 132, and the second separation light 12 The separated laser beam 10 is incident on the beam conversion optical system 120 at a predetermined angle, and the second separated light 12 separated from the laser beam 10 reflected from the second driving mirror 132 is a beam The second image sensor unit 142 is reached at an angle related to the incident angle of the laser beam 10 incident on the conversion optical system 120 (eg, the same as the incident angle of the laser beam incident on the beam conversion optical system) Therefore, the arrival position of the second separation light 12 may be related to the incident position of the laser beam 10 incident on the beam conversion optical system 120. Accordingly, it is possible to control the second driving mirror 132 by obtaining the incident position of the laser beam 10 incident on the beam conversion optical system 120 through the arrival position of the second separation light 12. Here, the second separation light 12 separated from the laser beam 10 may be directly separated from the laser beam 10, or sequentially (or from the first separation light 11 separated from the laser beam 10). Indirectly).

In addition, the control unit (not shown) may control the first driving mirror 131 based on the detected arrival position of the first separated light 11, and based on the detected arrival position of the second separated light 12 The second driving mirror 132 can be controlled. Since the arrival position of the first separation light 11 is related to the incident position of the laser beam 10 incident on the second driving mirror 132, the control unit (not shown) detects the detected first separation light 11 ), It is possible to obtain the incident position of the laser beam 10 incident on the second driving mirror 132 based on the arrival position, while confirming (or detecting) the arrival position of the first separation light 11 The first driving mirror 131 may be controlled to position the incident position of the laser beam 10 incident on the second driving mirror 132 at a predetermined position among the reflective surfaces of the second driving mirror 132. have.

Since the arrival position of the second separation light 12 is related to the incident position of the laser beam 10 incident on the beam conversion optical system 120, the control unit (not shown) detects the second separation light 12 The incident position of the laser beam 10 incident on the beam conversion optical system 120 may be obtained based on the arrival position of the beam conversion optical system 120 while confirming the arrival position of the second separation light 12 ), The second driving mirror 132 may be controlled to position the incident position of the laser beam 10 incident on the selected position among the incident surfaces of the beam conversion optical system 120.

And by detecting the arrival position of the first separation light 11 and the second separation light 12 separated from the laser beam 10, and the incident position of the laser beam 10 incident on the second driving mirror 132 By obtaining the incident position of the laser beam 10 incident on the beam conversion optical system 120 and controlling the first driving mirror 131 and the second driving mirror 132, the first image sensor unit 141 and the 2 The image sensor unit 142 may not interfere with the path of the laser beam 10, and accordingly, a process using the effective laser beam 10 may be performed.

The laser system 100 according to the present invention is provided on the path of the laser beam 10 between the first driving mirror 131 and the second driving mirror 132, and the laser reflected from the first driving mirror 131 A first optical splitter 151 for dividing the beam 10 and transmitting the first separated light 11 to the first image sensor unit 141; And provided on the path of the laser beam 10 between the second driving mirror 132 and the beam conversion optical system 120, the second separation by dividing the laser beam 10 reflected from the second driving mirror 132 It may further include; a second optical splitter 152 for transmitting the light 12 to the second image sensor unit 142. The first optical splitter 151 may be provided on the path of the laser beam 10 between the first driving mirror 131 and the second driving mirror 132, and the laser reflected from the first driving mirror 131 The beam 10 may be divided to transmit the first split light 11 to the first image sensor unit 141. The first optical splitter 151 may be a beam splitter that reflects a portion of the laser beam 10 and transmits the remaining portion of the laser beam 10, and is reflected by the first driving mirror 131. A part of the laser beam 10 is reflected and separated into a first separation light 11 and the remaining laser beam 10 among the laser beams 10 reflected by the first driving mirror 131 (ie, the first The separated light may be transmitted through the separated laser beam to enter the second driving mirror 132. In this case, in order to minimize the loss of the laser beam 10 transmitted to the beam conversion optical system 120, the remaining laser beam through which the light amount (or light energy) of the first separation light 11 passes through the first light splitter 151 It may be smaller than (10), the light amount of the first separation light 11 is 0.1% or less (or greater than 0% and equal to 0.1%) of the light amount of the laser beam 10 reflected from the first driving mirror 131 Or less than 0.1%).

In addition, the first optical splitter 151 may separate the first separated light 11 from the laser beam 10 reflected from the first driving mirror 131 and transmit it to the first image sensor unit 141. According to the incident angle of the laser beam 10 incident on the first optical splitter 151, reflected from the first optical splitter 151, the first separated light 11 is transmitted to the first image sensor unit 141 (or Since the angle of incidence) and the incident angle of the remaining laser beam 10 entering the second driving mirror 132 by passing through the first optical splitter 151 are determined, the laser incident on the first optical splitter 151 The relationship between the angle of incidence of the beam 10 and the angle at which the first separated light 11 is transmitted to the first image sensor unit 141 and the incident of the laser beam 10 incident on the first optical splitter 151 Through the relationship between the angle and the incident angle of the remaining laser beam 10 incident on the second driving mirror 132, the angle at which the first separated light 11 is transmitted to the first image sensor unit 141 and the second 2 The relationship between the incident angles of the remaining laser beams 10 incident on the driving mirror 132 can be seen, and the first separated light 11 is the first image sensor Based on the relationship between the angle transmitted to (141) and the incident angle of the remaining laser beam 10 incident on the second driving mirror 132, the second based on the arrival position of the first separation light 11 The incident position of the laser beam 10 incident on the driving mirror 132 may be obtained.

The second optical splitter 152 may be provided on a path of the laser beam 10 between the second driving mirror 132 and the beam conversion optical system 120, and the laser beam reflected from the second driving mirror 132 By dividing (10), the second separated light 12 may be transmitted to the second image sensor unit 142. The second optical splitter 152 may also be a beam splitter, and reflects a part of the laser beam 10 reflected from the second driving mirror 132 (ie, a part of the laser beam from which the first separated light is separated). And separate the second laser beam 10 among the laser beams 10 reflected from the second driving mirror 132 (that is, the first separation light is separated and the second separation) Light may be transmitted through the separated laser beam) to enter the beam conversion optical system 120. At this time, in order to minimize the loss of the laser beam 10 transmitted to the beam conversion optical system 120, the light amount of the second separated light 12 is smaller than the remaining laser beam 10 passing through the second light splitter 152. In addition, the light amount of the second separation light 12 may be preferably 0.1% or less of the light amount of the laser beam 10 reflected from the second driving mirror 132.

In addition, the second optical splitter 152 may separate the second separated light 12 from the laser beam 10 reflected from the second driving mirror 132 and transmit it to the second image sensor unit 142. The angle at which the second separated light 12 is transmitted to the second image sensor unit 142 by being reflected by the second optical splitter 152 according to the incident angle of the laser beam 10 incident on the second optical splitter 152 Since the incident angle of the remaining laser beam 10 incident on the beam conversion optical system 120 by passing through and the second optical splitter 152 is determined, the laser beam 10 incident on the second optical splitter 152 is determined. Relation between the angle of incidence and the angle at which the second split light 12 is transmitted to the second image sensor unit 142 and the angle of incidence and beam conversion of the laser beam 10 incident on the second optical splitter 152 Through the relational expression of the incident angle of the remaining laser beam 10 incident on the optical system 120, the angle at which the second separated light 12 is transmitted to the second image sensor unit 142 and the beam conversion optical system 120 The relationship between the incident angles of the remaining laser beams 10 being incident can be seen, and the second separated light 12 is the second image sensor unit 142 The beam conversion optical system 120 based on the arrival position of the second separation light 12 based on the relationship between the angle transmitted to the beam conversion optical system 120 and the incident angle of the remaining laser beam 10 incident on the beam conversion optical system 120 The incident position of the laser beam 10 incident on the can be obtained.

The distance between the second driving mirror 132 and the first optical splitter 151 may be the same as the distance between the first optical splitter 151 and the first image sensor unit 141. At this time, the direction from the first optical splitter 151 toward the second driving mirror 132 and the direction from the first optical splitter 151 toward the first image sensor unit 141 may form a right angle, and the laser beam ( 10) The incident surface (or the reflective surface) of the first light splitter 151 to which it is incident may be inclined at an angle of 45 ° with respect to the arrival surface (or incident surface) of the first image sensor unit 141. In this case, the first image sensor unit 141 at the same angle as the incident angle of the laser beam 10 incident on the first optical splitter 151 with respect to the direction (axis) toward the second driving mirror 132 The first separation light is transmitted through the first light splitter 151 in the direction (axis) toward the second driving mirror 132 and reflected by the first light splitter 151 in the direction (axis) toward the (11) the angle transmitted to the first image sensor unit 141 and the incident angle of the remaining laser beam 10 incident on the second driving mirror 132 may be the same, and the second driving mirror 132 And the distance between the first optical splitter 151 and the first optical splitter 151 and the first image sensor unit 141 are the same, so that the laser beam 10 incident on the second driving mirror 132 is incident. The first separation light 11 may reach the same point (or position) on the position and the plane (or screen). Accordingly, it is possible to confirm (or grasp) the incident position of the laser beam 10 incident on the second driving mirror 132 through the reaching position of the first separation light 11, and directly to the second driving mirror. As the incident position of the laser beam 10 incident on the 132 is detected, an accurate incident position of the laser beam 10 incident on the second driving mirror 132 may be obtained.

3 is a schematic diagram showing a modification of the laser system according to an embodiment of the present invention. Here, a may be the object distance, b may be the image distance of the object, f may be the focal length of the lens, and b ′ is the focal length of the lens as the focal length of light indicating the position where the light reaches ( f).

3, the laser system 100 according to the present invention is provided on the path of the laser beam 10 between the second driving mirror 132 and the beam conversion optical system 120, the laser beam 10 A first optical splitter 151 for dividing; A focus lens 153 into which the first separation light 11 separated from the laser beam 10 is incident; And dividing the first separation light 11 that has passed through the focus lens 153, and transmitting the second separation light 12 separated from the first separation light 11 to the second image sensor unit 142, It may further include; a second optical splitter 152 that transmits the first separated light 11 from which the second separated light 12 is separated to the first image sensor unit 141. The first optical splitter 151 may be provided on a path of the laser beam 10 between the second driving mirror 132 and the beam conversion optical system 120, and may divide the laser beam 10. The first optical splitter 151 may be a beam splitter, and reflects a part of the laser beam 10 reflected from the first driving mirror 131 and reflected from the second driving mirror 132, so that the first split light ( 11) and converts the remaining laser beam 10 among the laser beams 10 reflected from the second driving mirror 132 (ie, the laser beam from which the first separated light is separated) to transmit the beam conversion optical system ( 120).

The focus lens 153 may be incident with the first separation light 11 separated from the laser beam 10, and the first separation light 11 between the first light splitter 151 and the second light splitter 152 ). The focal lens 153 may allow an imaging location of an object to be formed and a position at which light transmitted through the focal lens 153 reaches depending on a focal length, through which a laser beam is applied to the first image sensor unit 141. The laser beam reflected from the second driving mirror 132 to the second image sensor unit 142 may be formed such that the image of (10) or the second driving mirror 132 in which the laser beam 10 is incident is formed. A portion separated from the beam 10 (ie, the second separated light) may be allowed to reach.

The second light splitter 152 may split the first split light 11 that has passed through the focus lens 153, and the second split light 12 separated from the first split light 11 may be a second image. The sensor unit 142 may transmit the first separation light 11 from which the second separation light 12 is separated to the first image sensor unit 141. The second optical splitter 152 may also be a beam splitter, reflects a portion of the first split light 11, separates it into the second split light 12, and transmits it to the second image sensor unit 142. 1 The remaining part of the separated light 11 (ie, the first separated light from which the second separated light is separated) may be transmitted to the first image sensor unit 141. Through this, the first separation light 11 from which the second separation light 12 is separated may reach the first image sensor unit 141, and the second separation light 12 may be transmitted to the second image sensor unit 142. ).

FIG. 4 is a conceptual diagram for explaining optical path lengths from a focus lens to a first image sensor unit and from a focus lens to a second image sensor unit in a modification of the laser system according to an embodiment of the present invention. a) shows the imaging position according to the incidence angle, and FIG. 4 (b) shows the object distance from the lens and the image distance from the lens according to the focal length of the lens.

Referring to FIG. 4, the optical path length from the focus lens 153 to the first image sensor unit 141 and the focus lens 153 to the second image sensor unit 142 is the focal length of the focus lens 153 (f). The focal length f of each focal lens 153 may be determined for each lens, and the distance a between the object and the focal lens 153 according to the formula (1 / a + 1 / b = 1 / f) of the lens, The distance (b) between the focus lens 153 and the imaging position of the image of the object and the distance between the focus lens 153 and the position where light transmitted through the focus lens 153 reaches (b ′ = f) may be determined. Through this, the optical path length between the second driving mirror 132 and the focus lens 153, the optical path length between the focus lens 153 and the first image sensor unit 141, and the focus lens 153 and the second image sensor unit By adjusting the optical path length between 142, the image of the laser beam 10 or the laser beam to the first image sensor unit 141 through the arrival of the first separation light 11 from which the second separation light 12 is separated. The image of the second driving mirror 132 to which (10) is incident may be formed, and the second driving mirror 132 may be connected to the second image sensor unit 142 through the arrival of the second separation light 12. A portion separated from the reflected laser beam 10 may be allowed to reach. At this time, the optical path length between the second driving mirror 132 and the focus lens 153 may be set to a, and the optical path length between the focus lens 153 and the first image sensor unit 141 may be set to b, , The optical path length between the focus lens 153 and the second image sensor unit 142 may be adjusted to a focal length f of the focus lens 153.

The optical path length from the focus lens 153 to the second image sensor unit 142 may be the same as the focal length f of the focus lens 153. At this time, the direction from the first optical splitter 151 toward the beam converting optical system 120 and the direction from the first optical splitter 151 toward the focus lens 153 may form a right angle, and the first optical splitter 151 In the incident surface of the first light splitter 151 to which the laser beam 10 is incident may be inclined at an angle of 45 ° with respect to the incident surface of the beam conversion optical system 120, and the focal point of the second light splitter 152 The direction toward the lens 153 and the direction toward the second image sensor unit 142 from the second light splitter 152 may form a right angle, and the laser beam 10 is incident on the second light splitter 152. The incident surface of the second optical splitter 152 may be inclined at an angle of 45 ° with respect to the arrival surface of the second image sensor unit 142. In this case, the first optical splitter 151 focuses at the same angle as the incident angle of the laser beam 10 incident on the first optical splitter 151 with respect to the direction (axis) toward the beam conversion optical system 120 The first optical splitter 151 is reflected from the first optical splitter 151 with respect to the direction (axis) toward the lens 153 and transmitted through the first optical splitter 151 with respect to the direction (axis) toward the beam conversion optical system 120, so that the first 1 The angle at which the separated light 11 is transmitted to the focal lens 153 and the incident angle of the remaining laser beam 10 incident on the beam conversion optical system 120 may be the same. In addition, the second optical splitter 152 in the same direction as the angle of incidence of the first separation light 11 incident on the second optical splitter 152 with respect to the direction (axis) toward the focus lens 153 2 The direction from the second optical splitter 152 to the focus lens 153 reflected from the second optical splitter 152 with respect to the direction (axis) from the optical splitter 152 toward the second image sensor unit 142 Through the second optical splitter 152 with respect to (axis), the angle at which the second separated light 12 is transmitted to the second image sensor unit 142 and the remainder incident on the first image sensor unit 141 The incident angle of the first separation light 11 may be the same.

Accordingly, the angle at which the second separated light 12 is transmitted to the second image sensor unit 142 is changed at the same angle as the incident angle of the remaining laser beam 10 incident on the beam conversion optical system 120. , The incident position of the remaining laser beam 10 incident on the beam conversion optical system 120 and the position where the second separated light 12 is transmitted to the second image sensor unit 142 are from the first optical splitter 151. Depending on the difference in the optical path length, it only has a certain ratio and has a certain directionality. In this case, when the optical path length between the first optical splitter 151 and the beam conversion optical system 120 and the optical path length between the first optical splitter 151 and the second image sensor unit 142 are the same, the beam conversion optical system ( The second separation light 12 may reach the same point on the plane as the incident position of the laser beam 10 incident on the 120). Accordingly, the incident position of the laser beam 10 incident on the beam conversion optical system 120 may be confirmed (or calculated) through the arrival position of the second separation light 12, and the beam conversion optical system 120 may be directly ), The position of the laser beam 10 incident on the beam converting optical system 120 can be obtained, such as detecting the position of the laser beam 10 incident on the beam.

In addition, through the image of the laser beam 10 formed on the first image sensor unit 141 or the image of the second driving mirror 132 into which the laser beam 10 is incident, it is directly incident on the second driving mirror 132. As the incident position of the laser beam 10 is detected, an accurate incident position of the laser beam 10 incident on the second driving mirror 132 may be obtained.

Meanwhile, the first separation light is not separated from the laser beam 10 transmitted to the beam conversion optical system 120 and the second separation light 12 is separated from the laser beam 10 again. Since the second separation light 12 is separated from the (11), the first separation light 11 can be separated only once from the laser beam 10 transmitted to the beam conversion optical system 120, and thus the beam conversion optical system 120 It is possible to minimize the loss of the laser beam 10 transmitted to.

The control unit (not shown) is a reference position setting unit that sets the first reference position 21 in the first image sensor unit 141 and the second reference position 22 in the second image sensor unit 142, respectively. (Not shown); Comparing the first reference position 21 and the arrival position of the first separation light 11, the separation direction and the separation distance of the arrival position of the first separation light 11 with respect to the first reference position 21 are calculated. And comparing the arrival position of the second reference position 22 and the second separation light 12, the separation direction and the separation distance of the arrival position of the second separation light 12 with respect to the second reference position 22 A location information calculating unit (not shown) for calculating a; And generating a first control signal to control the rotation direction and rotation angle of the first driving mirror 131 based on the calculated separation distance and separation distance of the arrival position of the first separation light 11. A control signal generator (not shown) for generating a second control signal for controlling the rotation direction and rotation angle of the second driving mirror 132 based on the separation direction and the separation distance of the arrival position of the second separation light 12 It may include. The reference position setting unit (not shown) may set the first reference position 21 in the first image sensor unit 141 and the second reference position 22 in the second image sensor unit 142, respectively. The first reference position 21 may be a target position (or reference position) for adjusting the arrival position of the first separation light 11, and the second reference position 22 is the second separation light 12 It may be a target position for adjusting the arrival position of. When the arrival position of the first separation light 11 is located at the first reference position 21 and the arrival position of the second separation light 12 is located at the second reference position 22, the beam conversion optical system ( The laser beam 10 may be incident on the selected position among the incident surfaces of 120) at the predetermined angle, and the arrival position of the first separation light 11 and the arrival position of the second separation light 12 may be controlled. By maintaining the first reference position 21 and the second reference position 22, the incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120 can be maintained.

When the arrival position of the first separation light 11 is different from the first reference position 21, the first driving position 131 is controlled to control the arrival position of the first separation light 11 to the first reference position ( 21), the second separation light 12 reaches the second separation light 12 by controlling the second driving mirror 132 when the arrival position of the second separation light 12 is different from the second reference position 22 The position can be adjusted to the second reference position 22. When the arrival position of the first separation light 11 is different from the first reference position 21 while detecting the arrival position of the first separation light 11, the first driving mirror 131 is controlled to control the first The arrival position of the separation light 11 can be adjusted to the first reference position 21 so that the arrival position of the first separation light 11 is maintained at the first reference position 21, and the second separation light If the arrival position of the second separation light 12 is different from the second reference position 22 while detecting the arrival position of (12), the second driving light 132 is controlled to control the second separation light 12 The arrival position of the second reference position 22 may be adjusted to maintain the arrival position of the second separation light 12 at the second reference position 22.

The position information calculating unit (not shown) compares the first reference position 21 and the arrival position of the first separation light 11 to reach the first separation light 11 with respect to the first reference position 21 The second separation light relative to the second reference position 22 can be calculated by comparing the arrival direction of the second reference position 22 and the second separation light 12 and calculating the separation direction of the position and the separation distance ( The separation direction and the separation distance of the reach position of 12) can be calculated. The location information calculating unit (not shown) compares the first reference position 21 and the arrival position of the first separation light 11 to reach the first reference position 21 and the first separation light 11 The first separation light 11 for the first reference position 21 is calculated according to the position difference between the calculated first reference position 21 and the arrival position of the first separation light 11. It is possible to calculate the separation direction and the separation distance of the arrival position. And the location information calculation unit (not shown) compares the second reference position 22 and the arrival position of the second separation light 12 to reach the second reference position 22 and the second separation light 12 The second separation light 12 for the second reference position 22 is calculated according to the position difference between the calculated second reference position 22 and the arrival position of the second separation light 12. ), The separation direction and the separation distance of the arrival position can be calculated.

The control signal generating unit (not shown) is the first control for controlling the rotation direction and rotation angle of the first driving mirror 131 based on the separation distance and the separation distance of the calculated arrival position of the first separation light 11 A second control signal capable of generating a signal and controlling the rotation direction and rotation angle of the second driving mirror 132 based on the separation distance and the separation distance of the calculated arrival position of the second separation light 12 Can be created. The control signal generation unit (not shown) has a first reference position 21 for the arrival position of the first separation light 11 based on the calculated separation distance and separation distance of the arrival position of the first separation light 11. The first control signal to control the rotation direction and the rotation angle of the first driving mirror 131 may be generated to be located at the first driving mirror 131 receiving the first control signal and receiving the first control signal. By adjusting, it is possible to make the arrival position of the first separation light 11 to be located at the first reference position 21. In addition, the control signal generation unit (not shown) has the second separation light 12 reaching the second reference position 22 based on the calculated separation direction and the separation distance of the reaching position of the second separation light 12. ) To generate the second control signal to control the rotation direction and rotation angle of the second driving mirror 132, the second driving mirror 132 receives the second control signal to the reflection surface By adjusting the angle, the arrival position of the second separation light 12 can be positioned at the second reference position 22.

The reference position setting unit (not shown) controls the arrival position of the first separation light 11 when the laser beam 10 is incident on a predetermined position among the reflective surfaces of the second driving mirror 132. 1 can be set to the reference position 21, the second separation light 12 in the state where the laser beam 10 is incident at the predetermined angle to the selected position of the incident surface of the beam conversion optical system 120 The arrival position can be set as the second reference position 22. That is, the incident position and the incident angle of the laser beam 10 incident on the preset (or desired) beam conversion optical system 120 (or the laser beam at the preset angle at a selected position among the incident surfaces of the beam conversion optical system) In the incident state), the arrival position of the first separation light 11 and the arrival position of the second separation light 12 are checked, and the identified arrival position of the first separation light 11 and the second The first reference position 21 and the second reference position 22 may be set as the arrival position of the separation light 12. Through this, simply by placing the arrival position of the first separation light 11 at the first reference position 21 and placing the arrival position of the second separation light 12 at the second reference position 22, it is simple. The incident position and the incident angle of the laser beam 10 incident on the beam conversion optical system 120 may be maintained.

5 is a flowchart illustrating a method of maintaining a laser path according to another embodiment of the present invention.

A method of maintaining a laser path according to another embodiment of the present invention will be described in more detail with reference to FIG. 5, and overlaps with the above-described part in relation to the laser system according to an embodiment of the present invention will be omitted.

A laser path maintenance method according to another embodiment of the present invention includes a process of oscillating a laser beam using a laser oscillation unit (S100); Adjusting the angle of the reflection surface of the first driving mirror such that the laser beam incident upon the first driving mirror from the laser oscillation unit and reflected is incident at a predetermined position among the reflective surfaces of the second driving mirror (S200); And adjusting the angle of the reflection surface of the second driving mirror such that the laser beam incident on the second driving mirror and reflected from the first driving mirror is incident at a predetermined angle among the incident surfaces of the beam conversion optical system ( S300); may include.

The laser path maintenance method according to the present invention may use a laser system including a laser oscillation unit, a beam conversion optical system, and first and second driving mirrors provided on a path of a laser beam between the laser oscillation unit and the beam conversion optical system. .

First, a laser beam is oscillated using a laser oscillation unit (S100). By oscillating the laser beam and reflecting the first and second driving mirrors, the laser beam can be transmitted to the beam conversion optical system, and the laser beam can be processed into a desired shape through the beam conversion optical system and irradiated to an irradiated object.

Next, the angle of the reflective surface of the first driving mirror is adjusted so that the laser beam incident on the first driving mirror from the laser oscillation unit and reflected is incident on a predetermined position among the reflective surfaces of the second driving mirror (S200). When the angle of the reflective surface of the first driving mirror can be adjusted so that the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, and when the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror Therein, by adjusting the angle of the reflection surface of the second driving mirror and setting the incident angle of the laser beam incident on the beam conversion optical system to a preset angle, the laser beam may be incident at a selected position among the incident surfaces of the beam conversion optical system.

Then, the angle of the reflection surface of the second driving mirror is adjusted so that the laser beam incident on the second driving mirror and reflected from the first driving mirror is incident at a predetermined angle among the incident surfaces of the beam conversion optical system ( S300). The angle of the reflection surface of the second driving mirror may be adjusted such that the laser beam is incident at a predetermined angle among the incident surfaces of the beam conversion optical system, and the second driving from the first driving mirror through the second driving mirror By simply adjusting the reflection angle of the laser beam incident at a predetermined position on the reflective surface of the mirror, the laser beam is incident on the selected beam conversion optical system at a predetermined angle, thereby simply entering the beam conversion optical system. It is possible to maintain the incident position and the incident angle of the beam.

The laser path maintenance method according to the present invention may maintain an incident position and an incident angle of the laser beam incident on the beam conversion optical system. Through this, it is possible to suppress or prevent changes in the position, shape, and / or energy distribution of the laser beam, thereby suppressing or preventing deterioration of process performance such as processing, and processing error in a process using a laser. Product defects can be reduced.

The method of maintaining a laser path according to the present invention includes a process of detecting an arrival position of a first separation light separated from a laser beam reflected from the first driving mirror using a first image sensor (S150); And detecting an arrival position of the second separation light separated from the laser beam reflected from the second driving mirror using a second image sensor (S250).

The arrival position of the first separation light separated from the laser beam reflected from the first driving mirror may be detected using the first image sensor unit (S150). The laser beam from which the first separation light is separated is incident on the second driving mirror at a certain angle, and the first separation light separated from the laser beam reflected from the first driving mirror is incident on the second driving mirror. Since the first image sensor unit is reached at an angle related to the incident angle of the beam, the arrival position of the first separation light may be related to the incident position of the laser beam incident on the second driving mirror. Accordingly, the incident position of the laser beam incident on the second driving mirror may be obtained (or calculated) through the arrival position of the first separation light.

In addition, the arrival position of the second separation light separated from the laser beam reflected from the second driving mirror may be detected using the second image sensor unit (S250). The laser beam from which the second separation light is separated is incident to the beam conversion optical system at a predetermined angle, and the second separation light separated from the laser beam reflected from the second driving mirror is a laser beam incident to the beam conversion optical system. Since the second image sensor unit is reached at an angle related to the incident angle, the arrival position of the second separation light may be related to the incident position of the laser beam incident on the beam conversion optical system. Accordingly, the incident position of the laser beam incident on the beam conversion optical system may be obtained through the arrival position of the second separation light.

Adjusting the angle of the reflection surface of the first driving mirror (S200) may include controlling the first driving mirror based on the detected arrival position of the first separation light (S210).

The first driving mirror may be controlled based on the detected arrival position of the first separation light (S210). The incident position of the laser beam incident on the second driving mirror may be obtained based on the detected arrival position of the first separation light, and based on the incident position of the laser beam incident on the obtained second driving mirror. The first driving mirror can be controlled. Since the arrival position of the first separation light is related to the incident position of the laser beam incident on the second driving mirror, the incident position of the laser beam incident on the second driving mirror based on the detected arrival position of the first separation light The first driving mirror may be obtained so that the incident position of the laser beam incident on the second driving mirror is located at a predetermined position among the reflective surfaces of the second driving mirror while confirming the arrival position of the first separation light. By controlling, the incident position of the laser beam incident on the second driving mirror may be adjusted.

In addition, the process of adjusting the angle of the reflection surface of the second driving mirror (S300) may include controlling the second driving mirror based on the detected arrival position of the second separation light (S310).

The second driving mirror may be controlled based on the detected arrival position of the second separation light (S310). The incident position of the laser beam incident on the beam conversion optical system may be obtained based on the detected arrival position of the second separated light, and the second position may be obtained based on the incident position of the laser beam incident on the obtained beam conversion optical system. The driving mirror can be controlled. Since the arrival position of the second separation light is related to the incident position of the laser beam incident on the beam conversion optical system, an incident position of the laser beam incident on the beam conversion optical system is obtained based on the detected arrival position of the second separation light The beam may be controlled by controlling the second driving mirror so that the incident position of the laser beam incident on the beam conversion optical system is located at a selected position among the incident surfaces of the beam conversion optical system while confirming the arrival position of the second separation light. The incident position of the laser beam incident on the conversion optical system can be adjusted.

The method of maintaining a laser path according to the present invention includes setting a first reference position in the first image sensor unit and a second reference position in the second image sensor unit (S50); Comparing the first reference position and the arrival position of the first separation light, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position are calculated, and the calculated first arrival position of the separation light Generating a first control signal for controlling the rotation direction and rotation angle of the first driving mirror based on the separation direction and the separation distance (S160); And comparing the second reference position and the arrival position of the second separation light to calculate a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position, and calculating the arrival position of the second separation light. The process of generating a second control signal for controlling the rotation direction and rotation angle of the second driving mirror based on the separation direction and the separation distance (S260); may further include a.

A first reference position in the first image sensor unit and a second reference position in the second image sensor unit may be respectively set (S50). Here, the first reference position may be a target position (or reference position) for adjusting the arrival position of the first separation light, and the second reference position may be a target position for adjusting the arrival position of the second separation light. . When the arrival position of the first separation light is located at the first reference position and the arrival position of the second separation light is located at the second reference position, the laser is set at the preset angle at a selected position among the incident surfaces of the beam conversion optical system. A beam can be incident, and the arrival position of the first separation light and the arrival position of the second separation light are maintained at the first reference position and the second reference position, and the incident position of the laser beam incident on the beam conversion optical system The angle of incidence can be maintained.

Then, the distance between the first reference position and the arrival position of the first separation light is compared to calculate a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position, and the calculated arrival position of the first separation light A first control signal for controlling the rotational direction and rotational angle of the first driving mirror may be generated based on the separation direction and the separation distance (S160). The position difference between the first reference position and the arrival position of the first separation light may be calculated by comparing the first reference position and the arrival position of the first separation light, and the calculated first reference position and the first separation light Depending on the position difference between the arrival positions, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position may be calculated. And a control unit for controlling the rotation direction and rotation angle of the first driving mirror such that the arrival position of the first separation light is located at the first reference position based on the calculated separation distance and separation distance of the arrival position of the first separation light. 1 A control signal can be generated.

Further, by comparing the second reference position and the arrival position of the second separation light, the separation direction and the separation distance of the arrival position of the second separation light with respect to the second reference position are calculated, and the calculated arrival of the second separation light A second control signal for controlling the rotation direction and rotation angle of the second driving mirror may be generated based on the separation direction and the separation distance of the position (S260). A position difference between the second reference position and the arrival position of the second separation light may be calculated by comparing the second reference position and the arrival position of the second separation light, and the calculated second reference position and the second separation light Depending on the position difference between the arrival positions, a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position may be calculated. And controlling the rotation direction and rotation angle of the second driving mirror such that the arrival position of the second separation light is located at the second reference position based on the calculated separation distance and separation distance of the arrival position of the second separation light. A second control signal can be generated.

The process of adjusting the angle of the reflection surface of the first driving mirror (S200) may be performed by controlling the rotation direction and rotation angle of the first driving mirror according to the first control signal, and half of the second driving mirror The process of adjusting the slope angle (S300) may be performed by controlling the rotation direction and rotation angle of the second driving mirror according to the second control signal. By receiving the first control signal and adjusting the angle of the reflection surface of the first driving mirror according to the first control signal, the arrival position of the first separation light can be positioned at the first reference position, and the first 2 By receiving the control signal and adjusting the angle of the reflection surface of the second driving mirror according to the second control signal, the arrival position of the second separation light may be positioned at the second reference position. Through this, simply by positioning the arrival position of the first separation light at the first reference position and placing the arrival position of the second separation light at the second reference position, the incident position of the laser beam incident on the beam conversion optical system is simple. And the angle of incidence can be maintained.

The process of setting the first reference position in the first image sensor unit and the second reference position in the second image sensor unit (S50) is a process of pre-oscillating a laser beam using the laser oscillation unit (S51). ; Adjusting the laser beam with a predetermined energy distribution and shape by adjusting the rotation direction and rotation angle of the first drive mirror and the rotation direction and rotation angle of the second drive mirror (S52); A step of acquiring an arrival position of the first separation light and an arrival position of the second separation light, respectively, in a state where the laser beam is adjusted to the predetermined energy distribution and shape (S53); And setting each of the acquired arrival position of the first separated light and the reached position of the second separated light to be the first reference position and the second reference position, respectively (S54).

The laser beam may be pre-oscillated using the laser oscillation unit (S51). The first reference position and the second reference position at which a laser beam is incident at a predetermined position among the reflection surfaces of the second driving mirror and a laser beam is incident at a predetermined angle among the incident surfaces of the beam conversion optical system. To set, the laser beam may be pre-oscillated using the laser oscillation unit.

In addition, the laser beam may be adjusted to a predetermined energy distribution and shape by adjusting the first driving mirror and the second driving mirror (S52). The laser beam can be adjusted to an optimal (or desired) energy distribution and shape by adjusting the first driving mirror and the second driving mirror while preliminarily oscillating the laser beam.

Then, an arrival position of the first separation light and an arrival position of the second separation light may be respectively obtained while the laser beam is adjusted to the predetermined energy distribution and shape (S53). When the laser beam is adjusted to an optimal energy distribution and shape, an arrival position of the first separation light and an arrival position of the second separation light may be respectively obtained, and used as the first reference position and the second reference position You can.

In addition, the first arrival position of the first separation light and the second arrival position of the second separation light may be respectively set as the first reference position and the second reference position (S54). By setting the arrival position of the first separation light and the arrival position of the second separation light to the first reference position and the second reference position, respectively, obtained by adjusting the laser beam with the optimal energy distribution and shape, the first 1 The laser beam having the optimal energy distribution and shape can be formed simply by positioning the arrival position of the separated light at the first reference position and positioning the arrival position of the second separated light at the second reference position, In order to maintain the optimal energy distribution and shape, it is possible to maintain the incident position and the incident angle of the laser beam incident on the beam conversion optical system.

The method of maintaining the laser path of the present invention comprises the steps of dividing the first separation light from the laser beam reflected from the first driving mirror and transmitting it to the first image sensor unit (S140); And dividing the second separated light from the laser beam reflected from the second driving mirror and transferring the second separated light to the second image sensor unit (S240).

The first separation light may be split from the laser beam reflected from the first driving mirror and transmitted to the first image sensor unit (S140). The first split light may be split from the laser beam reflected from the first driving mirror through a beam splitter or the like, and a portion of the laser beam reflected from the first driving mirror may be reflected to reflect the first It can be separated into separated light and transmitted to the second driving mirror by transmitting the remaining laser beam (ie, the laser beam from which the first separated light is separated) among the laser beams reflected by the first driving mirror. In addition, the first separation light separated from the laser beam reflected from the first driving mirror may be transmitted to the first image sensor unit, and the laser incident on the second driving mirror may be transmitted based on the arrival position of the first separation light. The incident position of the beam can be obtained.

In addition, the second separated light may be split from the laser beam reflected from the second driving mirror and transmitted to the second image sensor unit (S240). The second split light may be split from the laser beam reflected from the second drive mirror through a beam splitter, etc., and a part of the laser beam reflected from the second drive mirror may be reflected and separated into the second split light. The laser beam reflected from the second driving mirror may transmit the remaining laser beam (ie, the laser beam from which the second separated light is separated) and enter the beam conversion optical system. In addition, the second separated light separated from the laser beam reflected from the second driving mirror may be transmitted to the second image sensor unit, and the laser beam incident on the beam conversion optical system based on the arrival position of the second separated light It is possible to obtain the incidence position.

The process of adjusting the angle of the reflective surface of the first driving mirror (S200) may be performed prior to the process of controlling the angle of the reflective surface of the second driving mirror (S300), and is reflected by being incident on the first driving mirror. In a state in which the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, the process of adjusting the angle of the reflective surface of the second driving mirror (S300) may be sequentially performed.

The incident position of the laser beam incident on the beam converting optical system by controlling the second driving mirror while the incident position of the laser beam incident on the second driving mirror is located at a predetermined position among the reflective surfaces of the second driving mirror Can be adjusted. In this case, the first driving mirror is controlled regardless of the angle of incidence incident on the reflective surface of the second driving mirror so that the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, and then the first 2 By controlling the driving mirror to adjust the incident position or incident angle of the laser beam incident on the beam conversion optical system corresponding to only one of the preset position and the selected position among the incident surfaces of the beam conversion optical system, simply and quickly The laser beam may be incident at the predetermined angle on a selected position among the incident surfaces of the beam conversion optical system, and the incident position and the incident angle of the laser beam incident on the beam conversion optical system may be maintained.

As described above, in the present invention, the laser beam is incident at a predetermined position on the reflective surface of the second driving mirror by adjusting the reflection angle of the laser beam incident from the laser oscillation unit through the control of the first driving mirror, and controlling the second driving mirror By adjusting the angle of reflection of the laser beam incident from the first driving mirror through to incident the laser beam at a predetermined angle on the selected position of the incident surface of the beam conversion optical system, the incident position and the incident angle of the laser beam incident on the beam conversion optical system It can be kept constant, and accordingly, it is possible to prevent a change in the characteristics of the laser beam according to the change in the incident position and / or the angle of incidence of the laser beam, and also to prevent the performance degradation caused by the change in the characteristics of the laser beam. . In addition, the first driving mirror is controlled so that the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, and the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror. By controlling the second driving mirror such that the laser beam is incident at a predetermined angle at a selected position among the incident surfaces, simply and quickly deviating from a predetermined position among the reflective surfaces of the second driving mirror or at a selected position among the incident surfaces of the beam conversion optical system The incident position and / or the incident angle of the laser beam incident on the beam conversion optical system may be maintained by adjusting the incident position and / or the incident angle of the laser beam in which the incident angle deviates from a preset angle. Then, by detecting the arrival positions of the first separated light and the second separated light separated from the path of the laser beam by using the first image sensor unit and the second image sensor unit, the laser beam incident on the second driving mirror is simply incident. The position and the incident position of the laser beam incident on the beam conversion optical system may be confirmed, and the first image sensor unit and the second image sensor unit may not interfere with the path of the laser beam, and a process using an effective laser beam may be performed. have. In addition, although the first and second image sensors may not interfere with the path of the laser beam through the proper arrangement of the first and second optical splitters and the first and second image sensor units, the first and second image splitters may be directly controlled. 2 As the position of the laser beam incident on the driving mirror and the position of the laser beam incident on the beam converting optical system are detected, the position of the laser beam incident on the correct second driving mirror and the laser beam incident on the beam converting optical system It is possible to obtain the incidence position. On the other hand, through the control of the first driving mirror and the second driving mirror, the laser beam is adjusted to a predetermined energy distribution and shape to obtain the arrival positions of the first separation light and the second separation light, respectively, and the obtained first By setting the arrival positions of the separation light and the second separation light to the first reference position and the second reference position, respectively, the arrival position of the first separation light is positioned at the first reference position and the arrival position of the second separation light is set at the second reference position. Just by positioning, the incident position and the incident angle of the laser beam incident on the beam conversion optical system can be maintained.

Although the preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the above-described embodiments, and the general knowledge in the field to which the present invention pertains without departing from the gist of the present invention claimed in the claims Anyone who has a will understand that various modifications and other equivalent embodiments are possible. Therefore, the technical protection scope of the present invention should be defined by the following claims.

10: laser beam 11: first separation light
12: second separation light 21: first reference position
22: second reference position 100: laser system
110: laser oscillation unit 120: beam conversion optical system
131: first driving mirror 132: second driving mirror
133,134: transmission mirror 141: first image sensor unit
142: second image sensor unit 151: first optical splitter
152: second optical splitter 153: focus lens

Claims (15)

A laser oscillation unit that oscillates a laser beam;
A beam conversion optical system in which a laser beam is transmitted and incident along a path of a laser beam from the laser oscillation unit;
First and second driving mirrors provided on a path of the laser beam between the laser oscillation unit and the beam conversion optical system, and reflecting the laser beam through respective reflection surfaces and transmitting the beam to the beam conversion optical system; And
Includes a control unit for controlling the first and second driving mirrors to maintain an incident position and an incident angle of the laser beam incident on the beam conversion optical system.
The first driving mirror adjusts the angle of reflection of the laser beam incident from the laser oscillation unit to incident the laser beam at a predetermined position on the reflective surface of the second driving mirror,
The second driving mirror is a laser system that adjusts the angle of reflection of the laser beam incident from the first driving mirror to incident the laser beam at a predetermined angle on a selected position among the incident surfaces of the beam conversion optical system. The method according to claim 1,
A first image sensor unit configured to detect an arrival position of a first separation light separated from the laser beam reflected from the first driving mirror; And
Further comprising; a second image sensor unit for detecting the arrival position of the second separation light separated from the laser beam reflected from the second driving mirror;
The control unit,
The first driving mirror is controlled based on the detected arrival position of the first separation light,
A laser system that controls the second driving mirror based on the detected arrival position of the second separation light. The method according to claim 2,
It is provided on the path of the laser beam between the first driving mirror and the second driving mirror, and splits the laser beam reflected from the first driving mirror to transmit the first separation light to the first image sensor unit A first optical splitter; And
Provided on a path of the laser beam between the second driving mirror and the beam conversion optical system, the laser beam reflected from the second driving mirror is divided to transmit the second separated light to the second image sensor unit And a second optical splitter. The method according to claim 3,
The distance between the second driving mirror and the first optical splitter is the same as that of the first optical splitter and the first image sensor unit. The method according to claim 2,
A first optical splitter provided on a path of the laser beam between the second driving mirror and the beam conversion optical system, and dividing the laser beam;
A focus lens to which the first separation light separated from the laser beam is incident; And
The first separation light passing through the focus lens is divided to transmit the second separation light separated from the first separation light to the second image sensor unit, and the first separation from which the second separation light is separated. And a second optical splitter that transmits light to the first image sensor unit. The method according to claim 5,
A laser system in which the optical path length from the focus lens to the first image sensor unit and from the focus lens to the second image sensor unit is determined by a focal length of the focus lens. The method according to claim 6,
The optical path length from the focal lens to the second image sensor unit is the same as the focal length of the focal lens. The method according to claim 2,
The control unit,
A reference position setting unit that sets a first reference position in the first image sensor unit and a second reference position in the second image sensor unit, respectively;
Comparing the first reference position and the arrival position of the first separation light, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position are calculated, and the second reference position and the second separation A position information calculator configured to compare the arrival position of the light and calculate a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position; And
A first control signal for controlling a rotation direction and an angle of rotation of the first driving mirror is generated based on a separation distance and a separation distance of the calculated arrival position of the first separation light, and the calculated arrival position of the second separation light A laser system including a control signal generator for generating a second control signal for controlling the rotation direction and rotation angle of the second driving mirror based on the separation direction and the separation distance. The method according to claim 8,
The reference position setting unit,
The arrival position of the first separation light in the state where the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror is set as the first reference position,
A laser system for setting the arrival position of the second separation light in the state where the laser beam is incident at the predetermined angle at a selected position among the incident surfaces of the beam conversion optical system as the second reference position. The method according to claim 1,
The control unit,
The first driving mirror is first controlled so that the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror,
In the state in which the laser beam is incident at a predetermined position among the reflective surfaces of the second driving mirror, the second driving mirror is sequentially applied such that the laser beam is incident at the predetermined angle at a selected position among the incident surfaces of the beam conversion optical system. Laser system to control them. Oscillating a laser beam using a laser oscillation unit;
Adjusting the angle of the reflective surface of the first driving mirror such that the laser beam incident upon the first driving mirror from the laser oscillation unit and reflected is incident on a predetermined position among the reflective surfaces of the second driving mirror; And
Adjusting the angle of the reflection surface of the second driving mirror so that the laser beam incident on the second driving mirror and reflected from the first driving mirror is incident at a predetermined angle on a selected position among the incident surfaces of the beam conversion optical system; Including,
A method of maintaining a laser path for maintaining an incident position and an incident angle of a laser beam incident on the beam conversion optical system. The method according to claim 11,
Detecting an arrival position of a first separation light separated from a laser beam reflected from the first driving mirror using a first image sensor unit; And
Further comprising the step of detecting the arrival position of the second separation light separated from the laser beam reflected from the second driving mirror using a second image sensor unit;
Adjusting the angle of the reflection surface of the first driving mirror includes controlling the first driving mirror based on the detected arrival position of the first separation light,
The method of adjusting the angle of the reflection surface of the second driving mirror includes controlling the second driving mirror based on the detected arrival position of the second separation light. The method according to claim 12,
Setting a first reference position in the first image sensor unit and a second reference position in the second image sensor unit, respectively;
Comparing the first reference position and the arrival position of the first separation light, a separation direction and a separation distance of the arrival position of the first separation light with respect to the first reference position are calculated, and the calculated first arrival position of the separation light Generating a first control signal for controlling the rotation direction and rotation angle of the first driving mirror based on the separation direction and the separation distance; And
Comparing the second reference position and the arrival position of the second separation light, a separation direction and a separation distance of the arrival position of the second separation light with respect to the second reference position are calculated, and the calculated arrival position of the second separation light Further comprising the step of generating a second control signal for controlling the rotational direction and rotational angle of the second driving mirror based on the separation direction and the separation distance;
The process of adjusting the angle of the reflection surface of the first driving mirror is performed by controlling the rotation direction and the rotation angle of the first driving mirror according to the first control signal,
The process of adjusting the angle of the reflection surface of the second driving mirror is performed by controlling a rotation direction and an angle of rotation of the second driving mirror according to the second control signal. The method according to claim 13,
The process of setting the first reference position in the first image sensor unit and the second reference position in the second image sensor unit, respectively,
Pre-oscillation of the laser beam using the laser oscillation unit;
Adjusting the laser beam to a predetermined energy distribution and shape by controlling the rotation direction and rotation angle of the first drive mirror and the rotation direction and rotation angle of the second drive mirror;
Obtaining an arrival position of the first separation light and an arrival position of the second separation light, respectively, while the laser beam is adjusted to the predetermined energy distribution and shape; And
And setting the arrival position of the first separated light and the arrival position of the second separated light as the first reference position and the second reference position, respectively. The method according to claim 11,
The process of adjusting the angle of the reflective surface of the first driving mirror is performed prior to the process of adjusting the angle of the reflective surface of the second driving mirror,
A laser path sequentially performing a process of adjusting the angle of the reflective surface of the second driving mirror while the laser beam incident on the first driving mirror is reflected at a predetermined position among the reflective surfaces of the second driving mirror. How to maintain.

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