WO2023158265A1

WO2023158265A1 - Laser system using tilting mirror and control method therefor

Info

Publication number: WO2023158265A1
Application number: PCT/KR2023/002335
Authority: WO
Inventors: 안재성; 박웅규
Original assignee: 한국광기술원
Priority date: 2022-02-17
Filing date: 2023-02-17
Publication date: 2023-08-24

Abstract

A laser system of the present invention comprises: a laser generation unit for outputting a first laser having a first wavelength; a wavelength conversion unit for converting a portion of the first laser into a second laser having a second wavelength and outputting same; a laser separation unit including a first separation unit for outputting the first laser and the second layer to a first-first path and a second path, a second separation unit which is arranged on the first-first path, outputs the first laser to a first-second path, and blocks the second laser, and a third separation unit which is arranged on the second path, transmits the second laser, and blocks the first laser; a dye unit that receives the second laser as an input to output a third laser having a third wavelength; and a laser combination unit for combining the first laser output from the second separation unit and the third laser output from the dye unit to output same.

Description

Laser system using tilting mirror and its control method

The present invention relates to a laser device and a control method thereof, and more particularly, by adjusting the inclination of a tilting mirror, a laser can be more efficiently selected and output, and a plurality of wavelengths of light can be more stably crossed and output. It relates to a laser device and a control method thereof.

In a laser device that simultaneously outputs light of a plurality of wavelengths, a laser device using a solid dye has been studied. In the case of a laser using a solid dye, the laser system is easy to configure and the solid dye, which is a gain medium, is easy to replace. However, in a conventional laser device, there is a limitation in independently using the amplified laser beam pulse and the pumping laser beam pulse using a solid dye as a gain medium.

In a laser device using a solid dye, laser beams having a plurality of wavelengths are selectively outputted and combined according to wavelengths to selectively adjust various optical characteristics such as wavelength, energy, repetition rate, and phase, making the laser more efficient. Various studies are being conducted for selective oscillation.

An embodiment of the present invention is to provide a laser device capable of more efficiently selectively outputting lasers and more stably cross-outputting light of a plurality of wavelengths by adjusting the inclination of a tilting mirror and a control method thereof do.

A laser device according to an embodiment of the present invention includes a laser generator outputting a first laser of a first wavelength; a wavelength converter for converting a part of the first laser received from the laser generator into a second laser of a second wavelength and outputting the converted laser beam; The first and second lasers incident from the wavelength converter are alternately inclined at first and second angles to alternately output a 1-1 path and a second path different from the 1-1 path. a separator, a second separator disposed in the 1-1 path, outputting the first laser input from the first separator to a 1-2 path and blocking the second laser; and a laser separation unit disposed in a path and including a third separation unit that transmits the second laser input from the first separation unit and blocks the first laser; a dye unit including a solid dye to which the second laser output from the third separation unit is input, receiving the second laser and oscillating and outputting a third laser of a third wavelength; and a laser combining unit combining and outputting the first laser output from the second separation unit and the third laser output from the dye unit.

In some embodiments, when the first separator is disposed at a first angle, the first separator outputs the first and second lasers to the second separator, and the first separator is disposed at a second angle. In this case, the first separator may output the first and second lasers to the third separator.

In some embodiments, the second separator may include a dichroic mirror that outputs the first laser to the first-second path and transmits the second laser; and a blocking portion absorbing the second laser.

In some embodiments, the third separator may include a linear polarizer that blocks the first laser and transmits the second laser.

In some embodiments, the laser separation unit may alternately output the first laser output from the second separation unit and the second laser output from the third separation unit.

In some embodiments, the laser coupling unit may alternately output the first laser and the third laser.

In some embodiments, the repetition rate of the first laser output from the first separation unit to the second separation unit is 1/2 times the repetition rate of the first laser input to the first separation unit, and in the first separation unit A repetition rate of the second laser output to the second separator may be 1/2 times a repetition rate of the second laser input to the first separator.

In some embodiments, a repetition rate of the first laser output from the first separation unit to the third separation unit is 1/2 times the repetition rate of the first laser input to the first separation unit, and in the first separation unit A repetition rate of the second laser output to the third separator may be 1/2 times a repetition rate of the second laser input to the first separator.

In some embodiments, the laser generating unit may include an Ndiyag laser.

In some embodiments, the wavelength of the first laser may be in the range of 750 to 1,000,000 nm, the wavelength of the second laser may be in the range of 495 to 570 nm, and the wavelength of the third laser may be in the range of 630 to 750 nm. there is.

In some embodiments, a laser splitter disposed between the laser generator and the wavelength converter, wherein the laser splitter outputs a portion of the first laser to the trigger signal generator, and the trigger signal generator generates the trigger signal. A trigger signal may be generated based on a first repetition rate of a first laser and output to the first separator, and the first separator may be alternately inclined at first and second angles according to the trigger signal.

A laser device and a control method thereof according to an embodiment of the present invention can select and output lasers more efficiently and cross-output light of a plurality of wavelengths more stably by adjusting the inclination of a tilting mirror.

1 is a schematic block diagram of a laser device according to an embodiment of the present invention.

2 is a block diagram schematically showing the configuration of a laser device according to an embodiment of the present invention.

3 is a diagram schematically showing the configuration of a laser separation unit according to an embodiment of the present invention.

4 is a diagram showing a first optical path of a laser passing through a laser separation unit according to an embodiment of the present invention.

5 is a view showing a second optical path of a laser passing through a laser separation unit according to an embodiment of the present invention.

6 is a diagram showing a waveform diagram of a laser output from a laser combining unit according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. This invention may be embodied in many different forms and is not limited to the embodiments set forth herein.

It is advised that the drawings are schematic and not drawn to scale. Relative dimensions and proportions of parts in the drawings are shown exaggerated or reduced in size for clarity and convenience in the drawings, and any dimensions are illustrative only and not limiting. And like structures, elements or parts appearing in two or more drawings, like reference numerals are used to indicate like features.

In this specification, terms such as first, second, and third may be used to describe various components, but these components are not limited by the terms. The terms are used for the purpose of distinguishing one component from other components. For example, a first component may be termed a second or third component, etc., and similarly, a second or third component may be termed interchangeably, without departing from the scope of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used in a meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless specifically defined explicitly.

The embodiments of the present invention specifically represent exemplary embodiments of the present invention. As a result, various variations of the diagram are expected. Therefore, the embodiment is not limited to the specific shape of the illustrated area, and includes, for example, modification of the shape by manufacturing.

1 is a schematic block diagram of a laser device according to an embodiment of the present invention. 2 is a block diagram schematically showing the configuration of a laser device according to an embodiment of the present invention.

In one embodiment according to the present invention, the laser device may include a Nd:YAG (Nd:YAG) laser. However, the embodiments of the present invention are not limited thereto, and the laser device of the present invention is Nd:YVO ₄ , a fiber laser, etc. It can be applied to various solid-state laser devices as well as liquid or gas laser devices.

In addition, in one embodiment according to the present invention, the laser device may be a solid dye pulse laser device using a solid dye. However, embodiments of the present invention are not limited thereto, and the laser device of the present invention may be applied to a laser device including a liquid or gaseous dye unless it is contrary to the technical spirit of the present invention.

A laser device according to an embodiment of the present invention includes a laser generating unit 10, a laser dividing unit 20, a trigger signal generating unit 30, a laser conversion unit 50, a laser separating unit 60, a dye unit ( 80) and a laser coupling unit 90. According to an embodiment, the laser device may further include a plurality of

optical members

41, 42, 45, 47, 48 including mirrors, filters, or couplers that change optical paths or optical characteristics. can

In one embodiment, the laser generator 10 may include a Nd:YAG (Nd:YAG) laser. For example, the laser generating unit 10 receives the pumping light from the pumping source and regulates the first repetition rate (eg, pulse repetition rate or frequency) through an intermittent unit (not shown) to generate a first wavelength. It is possible to oscillate and output the first laser (L1) having. The first laser L1 may have a wavelength in the near infrared range. For example, the wavelength of the first laser L1 may be in the range of 750 to 1,000,000 nm. For example, the first laser L1 output from the laser generator 10 may have a first wavelength of about 1,064 nm, a pulse energy of about 500 mJ, and a first repetition rate of about 20 Hz. However, embodiments of the present invention are not limited thereto, and the wavelength of the first laser L1 may have other wavelengths, different pulse energies, and different repetition rates.

The laser splitter 20 may include a beam splitter (BS). For example, the laser dividing unit 20 may divide the first laser L1 incident from the laser generating unit 10 and output the divided paths through different paths. For example, the laser dividing unit 20 outputs a part of the first laser L1 to the trigger signal generator 30 and outputs another part of the first laser L1 to the laser conversion unit 50. can As the first laser L1 is divided by the laser dividing unit 20, the laser converting unit 50 ) may have a smaller pulse energy of the first laser L1 output. For example, the first laser L1 output from the laser splitting unit 20 to the laser converting unit 50 has a pulse energy of 500 mJ of the first laser L1 incident on the laser splitting unit 20. In contrast, it can have a pulse energy of 250 mJ by reducing by 1/2.

In one embodiment, the laser division unit 20 may output a portion of the first laser beam L1 to the trigger signal generator 30 . The trigger signal generation unit 30 may generate a trigger signal St based on the first repetition rate of the first laser L1 and output it to the laser separation unit 60 . For example, the trigger signal generating unit 30 may include a photo diode (PD) or the like. However, embodiments of the present invention are not limited thereto. In another example, the trigger signal generator 30 is disposed subsequent to the laser generator 10, senses the first repetition rate of the first laser L1 and converts the sensing signal to the trigger signal St into the laser separation unit. 60, and at this time, the laser dividing unit 20 may be omitted and all of the laser generated by the laser generating unit 10 may be output to the laser conversion unit 50.

The laser division unit 20 may output another part of the first laser beam L1 to the laser conversion unit 50 . A plurality of mirrors, for example, two

mirrors

41 and 42 are disposed between the laser dividing unit 20 and the laser converting unit 50 to change an optical path along which the first laser L1 travels.

In one embodiment, a polarization control unit 45 may be disposed between the laser division unit 20 and the laser conversion unit 50 . In one embodiment, the polarization control unit 45 may include a λ/2 polarizer. For example, the polarization control unit 45 may control the polarization direction and/or the polarization rate of the first laser L1 output from the laser division unit 20 and incident to the laser conversion unit 50 .

In one embodiment of the present invention, the laser conversion unit 50, the first lens 510 for receiving and outputting the first laser (L1) from the laser dividing unit 20, the input from the first lens 510 A wavelength converter 520 that converts a part of the first laser L1 into a second laser L2 of a second wavelength and outputs the second laser L2, and the other part and the second laser L1 in the wavelength converter 520 It may include a second lens 530 that receives and outputs two lasers L2.

In one embodiment, the first lens 510 may include, for example, various lenses such as a convex lens and a concave lens capable of adjusting the focus of the first laser 510 . The first lens 510 may receive the first laser L1 output from the laser dividing unit 20 , adjust energy distribution, and output the first laser L1 to the wavelength converter 520 .

In one embodiment, the wavelength converter 520 passes a portion of the first laser L1 incident from the laser splitting unit 20 through the first lens 510 as it is, outputs it to the second lens 530, and , another part of the first laser L1 may be converted into a second laser L2 having a second wavelength and output to the second lens 530 . For example, some of the first laser beam L1 incident to the wavelength converter 520 may be converted into a second laser beam L2 while passing through the wavelength converter 520 .

In one embodiment, the second laser (L2) may have a wavelength in the visible light range. For example, the second wavelength of the second laser L2 may be in the range of about 495 to 570 nm, for example about 532 nm. For example, the second laser L2 whose wavelength is converted by the wavelength converter 520 may be a green laser. For example, the first laser L1 incident from the second lens 530 to the laser separation unit 60 may have a wavelength of about 1,064 nm, a pulse energy of about 250 mJ, and a repetition rate of about 20 Hz, , The second laser L2 incident from the second lens 530 to the laser separation unit 60 may have a wavelength of about 532 nm, a pulse energy of about 250 mJ, and a repetition rate of about 20 Hz.

In one embodiment, the wavelength converter 520 may include a nonlinear optical material. For example, the wavelength converter 520 may include lithium triborate (LBO). However, embodiments of the present invention are not limited thereto, and the wavelength converter 520 may include any known nonlinear optical material commonly used, for example, LBO (lithium triborate), LiNbO ₃ (lithium niobate), beta barium borate (BBO), potassium titanyl phosphate (KTP), potassium gadolinium tungstate (KGW), and potassium dihydrogen phosphate (KDP).

In one embodiment, the second lens 530 may include various lenses such as a convex lens and a concave lens capable of adjusting the focus of a laser beam. For example, the second lens 530 receives the other part of the first laser L1 and the second laser L2 from the wavelength converter 520 and adjusts the energy distribution to the laser separation unit 60. can be printed out.

3 is a diagram schematically showing the configuration of a laser separation unit according to an embodiment of the present invention. 4 is a diagram showing a first optical path of a laser passing through a laser separation unit according to an embodiment of the present invention. 5 is a view showing a second optical path of a laser passing through a laser separation unit according to an embodiment of the present invention.

In one embodiment, the laser separation unit 60 may include a first separation unit 610 , a second separation unit 620 , and a third separation unit 630 . In one embodiment, the laser separation unit 60 may further include a blocking unit 640 disposed at a rear end (eg, downstream) of the second separation unit 620 . In one embodiment, the laser separation unit 60, the first and second lasers (L1, L2) input from the laser conversion unit 50 to the 1-1 path (P11) and the 1-1 path (P11) The first separator 610 alternately inclined at first and second angles (a, b) to alternately output to a second path (P2) different from ), disposed on the 1-1 path (P11), A second separation that outputs the first laser L11 input from the first separation unit 610 to the 1-2 path P12 and blocks the second laser L21 input from the first separation unit 610 It is disposed in the part 620 and the second path P2, transmits the second laser L22 input from the first separator 610, and transmits the first laser L12 input from the first separator 610. ) may include a third separation unit 630 blocking.

In one embodiment, the first separator 610 may include a tilting mirror disposed to tilt and tilt. In one embodiment, the first separator 610 is alternately tilted at a first angle (a) and a second angle (b) to direct the first laser beam L1 and the second laser beam L2 to different paths, For example, it may be output through the 1-1 path P11 and the second path P2. For example, when the first separator 610 is inclined at the first angle (a), the first separator 610 directs the first and second lasers L1 and L2 to the 1-1 path P11. ) through the second separation unit 620, and when the first separation unit 610 is inclined at the second angle b, the first separation unit 610 generates the first and second laser beams L1, L2) may be output to the third separator 630 through the second path P2. Here, the first and second angles (a, b) are the first separation unit ( 610) refers to an angle at which one side is inclined, and for example, as shown in FIGS. 4 and 5, it may refer to an angle in a counterclockwise direction from the incident direction. For example, the first angle (a) and the second angle (b) may be different from each other, and the first angle (a) may be smaller than the second angle (b), but the present invention is not limited thereto. One angle (a) may be greater than the second angle (b).

In one embodiment, the first separator 610 may be tilted and inclined according to the trigger signal St input from the trigger signal generator 30 . For example, as the tilting timing of the first separator 610 is controlled according to the trigger signal St, the first separator 610 directs the first and second lasers L1 and L2 to the second separator. 620 and the third separator 630 may be alternately output.

In one embodiment, as the first separation unit 60 alternately outputs the first and second lasers L1 and L2 to the second separation unit 620 and the third separation unit 630, the first separation unit 60 The repetition rate of the first lasers L11 and L12 output from the unit 610 to the second separator 620 or the third separator 630 is the first laser L1 input to the first separator 610. The repetition rate of the second lasers L21 and L22 output from the first separator 610 to the second separator 620 or the third separator 630 may be less than the repetition rate of the first separator 610. ) may be smaller than the repetition rate of the second laser (L2) input.

For example, the repetition rate of the first laser L11 output from the first separation unit 610 to the second separation unit 620 is the repetition rate of the first laser L1 input to the first separation unit 610. 1/2 times, and the repetition rate of the second laser L21 output from the first separator 610 to the second separator 620 is the repetition rate of the second laser L2 input to the first separator 610. It may be 1/2 times of For example, the repetition rate of the first laser L12 output from the first separator 610 to the third separator 630 is the repetition rate of the first laser L1 input to the first separator 610. 1/2 times, and the repetition rate of the second laser L22 output from the first separator 610 to the third separator 630 is the repetition rate of the second laser L2 input to the first separator 610. It may be 1/2 times of

For example, the first and second lasers L11 and L21 output from the first separator 610 to the second separator 620 may each have a repetition rate of about 10 Hz, and the first separator ( The first and second lasers L12 and L22 output from 610 to the third separator 630 may each have a repetition rate of about 10 Hz.

In one embodiment, the first separator 610 may alternately output the first laser L1 and the second laser L2 to the 1-1 light path P11 and the second light path P2. there is. For example, the first separator 610 may regularly alternately output the first laser beam L1 and the second laser beam L2. For example, the first and second lasers L11 and L21 output to the 1-1 optical path P11 and the first and second lasers L12 and L22 output to the second optical path P2 are They may be alternately output so as to have a phase difference of 90° from each other.

In one embodiment, the second separator 620 is disposed on the 1-1 path P11, and the first laser L11 incident from the first separator 610 to the 1-1 path P11 and the optical path of the second laser L21 may be selectively changed. For example, the second separator 620 may change the optical path of the first laser L11 incident on the 1-1 path P11 to the 1-2 path P12. Here, the 1-1 path P11 and the 1-2 path P12 are collectively referred to as a first optical path. In addition, the laser separation unit 60 may further include a blocking unit 640 disposed subsequent to (eg, downstream of) the second separation unit 620 in the 1-1 path P11 . For example, the blocking unit 640 may block the second laser L21 incident through the second separation unit 620 through the 1-1 path P11.

For example, the second separator 620 may include a dichroic mirror. For example, the dichroic mirror includes a plurality of layers having different refractive indices and can selectively output light having a plurality of wavelengths. For example, a dichroic mirror can reflect light of one wavelength and transmit light of another wavelength, and thus can selectively change optical paths of light including light of a plurality of wavelengths differently or equally. can However, the second separator 620 of the present invention is not limited thereto, and the second separator 620 may include other materials capable of performing the above functions. The blocking unit 640 according to an embodiment of the present invention is not particularly limited, and may include, for example, any known material capable of blocking or absorbing a laser in an appropriate wavelength range.

In one embodiment, the third separator 630 is disposed on the second path P2, and the first laser L12 and the second laser input from the first separator 610 to the second path P2. (L22) can be selectively output. For example, the third separator 630 may block the first laser beam L12 and transmit the second laser beam L22. For example, the third separator 630 may include a linear polarizer, but the present invention is not limited thereto. For example, the third separator 630 may block the first laser beam L12 in a vertical polarization state and transmit the second laser beam L22 in a horizontal polarization state.

In one embodiment, polarization directions of the first laser L11 and the second laser L22 output from the laser separation unit 60 may be different from each other. For example, the polarization directions of the first laser L11 output from the second separator 620 and the second laser L22 output from the third separator 630 are perpendicular to each other, for example, respectively. It may be a direction (↔) and a direction (⊙).

In one embodiment, the second separator 620 combines the first laser L11 incident on the first path P11 through the first-second path P12 and the mirror 47. It can be output to unit 90. In one embodiment, the third separation unit 630 may transmit the second laser beam L22 and output it to the dye unit 80 through the second optical path P2. In one embodiment, the laser separation unit 60, the first laser (L11) output from the second separation unit 620 to the laser coupling unit 90, and the third output from the separation unit 630 The two lasers L22 can be alternately output to the dye unit 80 .

In one embodiment, the first laser L11 incident from the second separation unit 620 to the laser coupling unit 90 has a wavelength of about 1,064 nm, a pulse energy of about 250 mJ, and a repetition rate of about 10 Hz. The second laser L22 incident from the third separation unit 630 to the dye unit 80 may have a wavelength of about 532 nm, a pulse energy of about 250 mJ, and a repetition rate of about 10 Hz.

In this way, the inclination of the first separator 610 is changed to selectively change the optical paths of the first and second lasers L1 and L2, and the second separator 620 and the third separator 630 , and as the first and second lasers L11 and L22 are selectively output using the blocking unit 640, the laser can be more efficiently selected and output according to the wavelength of the laser, and light of a plurality of wavelengths can be output. You can cross-output more reliably.

Hereinafter, the dye unit 80 into which the second laser L22 output from the laser separation unit 60 to the second path P2 is incident will be described. In one embodiment, the dye unit 80 includes a first optical member 810, a second optical member 830, a third optical member 840, and a first optical member 810 and a second optical member 830. ) It may include a solid dye unit 820 disposed between.

For example, the first optical member 810 is also called an end mirror or a rearview mirror, and transmits light from the solid dye unit 820 toward the first optical member 810 to the third optical member. It can be totally reflected in the (830) direction. For example, the second optical member 830 may include an output coupler, and transmits light from the solid dye unit 820 toward the second optical member 830 through the first optical member 810. It can partially reflect in a direction and also partially transmit.

In one embodiment, the second laser L22 transmitted through the third separation unit 630 may be incident to the solid dye unit 820 . For example, the second laser L22 may be incident to the solid dye unit 820 through the first optical member 810 . The solid dye unit 820 may receive the second laser (L22), oscillate and output a third laser (L3) of a third wavelength. In one embodiment, a portion of the second laser L22 output from the solid dye unit 820 by the first optical member 810 for total reflection of light and the second optical member 830 for partially reflecting light, and A portion of the third laser L3 passes through the second optical member 830 and is output to the third optical member 840 . For example, the second optical member 830 may output about 50 to 95% of the second laser beam L22 and the third laser beam L3 to the third optical member 840 .

In one embodiment, the solid dye unit 820 may include a solid dye. The solid dye unit 820 may include a solid dye that receives a second laser L22 having a second wavelength and oscillates a third laser L3 having a third wavelength. For example, the third laser L3 may have a wavelength in the visible light range. For example, the third laser L3 may have a third wavelength in the range of about 630 to 750 nm, for example about 650 nm. For example, the third laser L3 may be a red laser. For example, the solid dye unit 820 may include a conventionally known solid dye capable of receiving a green laser and oscillating a red laser. However, the dye according to the embodiment of the present invention is not particularly limited, and any dye capable of oscillating laser may be used.

In one embodiment, the second laser L22 and the third laser L3 output from the second optical member 830 are incident to the third optical member 840 . In one embodiment, the third optical member 840 may include a low pass filter (LPF). In one embodiment, the third optical member 840 filters and removes the second laser L22 incident from the second optical member 830, and transmits only the third laser L3 to the laser coupling unit 90. can be printed out. For example, the third laser L3 output from the third optical member 840 to the laser coupling unit 90 may have a wavelength of about 650 nm, a pulse energy of about 50 mJ, and a repetition rate of about 10 Hz. . In one embodiment, an optical path of the third laser L3 output from the third optical member 840 is changed through the mirror 48 and may be incident to the laser coupling unit 90 .

In one embodiment, referring to FIG. 6 , the laser combining unit 90 includes a first laser L11 output from the laser separating unit 60 to the first-second path P12 and reflected by the mirror 47. ) and the third laser L3 output from the dye unit 80 and reflected by the mirror 48 may be combined and output as an output laser Lout. For example, the laser coupling unit 90 alternately outputs the first laser L11 and the third laser L3 and can output them as the output laser Lout. For example, the laser coupling unit 90 may include a dichroic mirror and output the first laser L11 and the third laser L3 incident from different directions in the same direction. For example, the laser coupling unit 90 may regularly alternately output the first laser L11 and the third laser L3 to have a phase difference of 90°.

For example, the laser device includes a first laser L11 having a wavelength of about 1,064 nm, an energy of about 250 mJ and a repetition rate of about 10 Hz and a wavelength of about 650 nm, about A third laser L3 having an energy of 50 mJ and a repetition rate of about 10 Hz may be alternately output.

Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art to which the present invention pertains can understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential features. will be. Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting, and the scope of the present invention is indicated by the following detailed description of the claims, the meaning and scope of the claims, and All changes or modified forms derived from the equivalent concept should be construed as being included in the scope of the present invention.

Claims

a laser generator outputting a first laser of a first wavelength;

a wavelength converter for converting a part of the first laser received from the laser generator into a second laser of a second wavelength and outputting the converted laser beam;

The first and second lasers incident from the wavelength converter are alternately inclined at first and second angles to alternately output a 1-1 path and a second path different from the 1-1 path. a separator, a second separator disposed in the 1-1 path, outputting the first laser input from the first separator to a 1-2 path and blocking the second laser; and a laser separation unit disposed in a path and including a third separation unit that transmits the second laser input from the first separation unit and blocks the first laser;

a dye unit including a solid dye to which the second laser output from the third separation unit is input, receiving the second laser and oscillating and outputting a third laser of a third wavelength;

and a laser coupling unit configured to combine and output the first laser output from the second separation unit and the third laser output from the dye unit.
The method of claim 1 , wherein when the first separator is disposed at a first angle, the first separator outputs the first and second lasers to the second separator,

When the first separation unit is disposed at a second angle, the first separation unit outputs the first and second lasers to the third separation unit.
The method of claim 1, wherein the second separator,

a dichroic mirror that outputs the first laser to the first-second path and transmits the second laser; and

A laser device comprising a blocking portion absorbing the second laser.
According to claim 1,

The third separation unit includes a linear polarizer for blocking the first laser and transmitting the second laser.
According to claim 1,

The laser separation unit alternately outputs the first laser output from the second separation unit and the second laser output from the third separation unit.
According to claim 1,

The laser coupling unit, a laser device for outputting the first laser and the third laser alternately.
According to claim 1,

The repetition rate of the first laser output from the first separation unit to the second separation unit is 1/2 times the repetition rate of the first laser input to the first separation unit;

The repetition rate of the second laser output from the first separator to the second separator is 1/2 times the repetition rate of the second laser input to the first separator.
According to claim 1,

The repetition rate of the first laser output from the first separator to the third separator is 1/2 times the repetition rate of the first laser input to the first separator;

The repetition rate of the second laser output from the first separator to the third separator is 1/2 times the repetition rate of the second laser input to the first separator.
According to claim 1,

Wherein the laser generating unit includes an NdYAG laser.
According to claim 1,

The wavelength of the first laser is in the range of 750 to 1,000,000 nm,

In the range of 495 to 570 nm of the wavelength of the second laser,

The wavelength of the third laser is in the range of 630 to 750 nm laser device.
According to claim 1,

Further comprising a laser dividing unit disposed between the laser generating unit and the wavelength converting unit,

The laser dividing unit outputs a portion of the first laser to a trigger signal generating unit,

The trigger signal generation unit generates a trigger signal based on a first repetition rate of the first laser and outputs it to the first separator,

The first separating portion is alternately inclined at first and second angles according to the trigger signal.