KR20190125168A - Jig unit for identifying optical axis of laser and jig - Google Patents

Abstract

Provided are a jig unit for checking an optical axis of a laser, in which the position of the optical axis is precisely checked with a simple operation to increase efficiency in an optical axis adjustment process, and a jig thereof. According to the present invention, the jig unit for checking an optical axis of a laser comprises a jig mounting member (14) disposed on an optical path of a laser beam and a jig body (19) freely and detachably mounted on the jig mounting member (14). The jig body (19) includes a through-hole for inserting and penetrating the laser beam thereinto. A cross-shaped grid (21) forming a cross shape when viewed in an insertion and penetration direction of the laser beam is formed in the through-hole. The jig body (19) is set to be matched with the center of the optical axis of a laser beam path in which the center of the cross-shaped grid (21) is defined when the jig body (19) is mounted on the jig mounting member (14). In addition, a slit (22) for inserting a thermal printing paper blocking the laser beam is installed on the outer circumferential surface of the jig body (19). A shadow of the cross-shaped grid (21) is projected on the thermal printing paper inserted into the slit (22).

Description

Jig unit and jig for checking laser optical axis {JIG UNIT FOR IDENTIFYING OPTICAL AXIS OF LASER AND JIG}

The present invention relates to a jig unit for checking the laser optical axis of the laser processing apparatus. In particular, the present invention guides the laser light from a laser light source to a processing optical system (hereinafter referred to as a "laser irradiation nozzle") through a plurality of mirrors, and scribes a segment for brittle material substrates by a focused laser light from this laser irradiation nozzle. A jig unit and a jig for use in adjusting (moving to a prescribed position) an optical axis of a laser beam in a laser processing apparatus for processing a line.

In general, in a substrate processing apparatus that irradiates a laser beam to a brittle material substrate such as a glass substrate and processes a scribe line for dividing, a laser irradiation nozzle is disposed on a guide rail, and a table on which the substrate is fixed is perpendicular to the longitudinal direction of the guide rail. The laser beam is scanned by moving along the pitch, and the laser irradiation nozzle is pitch-shifted along the guide rail every one scan to move the irradiation position of the laser beam to a position for processing the next scribe line. In this case, the laser light from the laser light source fixed to the device in a positional relationship with various accessory devices or parts inserted into the device is refracted by a plurality of mirrors and guided to the laser irradiation nozzle. If the optical axis of the laser light path leading to the nozzle is shifted from the prescribed position, the processing performance by the laser irradiation nozzle is lowered and the scribe line cannot be formed cleanly. For example, if the optical axis of the laser beam is not parallel to the moving direction of the laser irradiation nozzle along the guide rail, when the laser irradiation nozzle is pitch-pitched along the guide rail, it is reflected from above the laser irradiation nozzle and is upward from the substrate at the laser irradiation nozzle. The irradiation state of the laser light irradiated from the laser beam (reflection angle above the laser irradiation nozzle, etc.) changes, and the next scribe line cannot be formed properly.

Therefore, the technique of patent document 1 and patent document 2 is known as a means for adjusting an optical axis, for example.

In patent document 1, the target holder which detachably supports the target plate called a cross hair for optical-axis adjustment is provided in front of the rear mirror and the front mirror of the two mirrors arrange | positioned in a laser optical path by a laser processing apparatus, respectively. In adjusting the optical axis, a target plate is inserted into each target holder, and the image projected by the two target plates is projected on the screen, and the tilt of the mirror is adjusted while viewing the image.

Moreover, in patent document 2, adjustment is performed by the optical-axis adjustment apparatus which consists of two separate mirrors provided in the laser optical path, and the actuator which drives to adjust an optical axis of a laser by tilting or moving these mirrors.

Japanese Patent Laid-Open No. 11-226767 Japanese Patent Application Laid-Open No. 2005-103598

However, in the apparatus of Patent Literature 1, the operation of attaching and detaching the two target plates to the front and rear target holders respectively, and the operation of installing the screens that illuminate the images of these target plates in the optical path are very cumbersome and the components are complicated, resulting in a complicated structure. .

In addition, the apparatus of Patent Document 2 requires an optical system including a plurality of separation mirrors and an actuator attached thereto, which causes the apparatus to be expensive and to secure a space for installing these members.

Therefore, an object of the present invention is to provide a jig unit and a jig at a low cost in a concise configuration which can solve such a conventional problem and can accurately confirm the position of the optical axis with a simple operation, thereby increasing the efficiency of the optical axis adjusting operation. do.

In order to achieve the above object, the present invention has taken the following technical means. That is, in the laser beam axis confirmation jig unit of the present invention, the laser beam from the laser light source is guided to the processing optical system through a plurality of mirrors, and the laser processing apparatus for processing the brittle material substrate by the focused laser light from the processing optical system. A jig unit for checking a laser optical axis to be used, comprising a jig mounting member disposed in an optical path of a laser light and a jig body detachably attached to the jig mounting member, the jig main body having a through hole for inserting a laser beam therethrough. And a cross grating having a cross shape in the through-hole as viewed in the insertion direction of the laser beam, and when the center of the optical axis of the laser light path is in a prescribed position, the center of the cross grating when the jig main body is installed in the jig mounting member. Is set to coincide with the optical axis center of the laser And, also, there is a slit for inserting the thermal paper to block the laser beam to the outer peripheral surface of the jig body mounting, and the configuration is formed so that the thermal paper is inserted into the slit in the shadow of the cross grid can be projected.

Since the present invention has the above structure, the position of the optical axis can be easily confirmed by simply setting the jig main body to the jig attachment member disposed in the optical path of the laser beam and inserting the thermal paper into the slit provided in the jig main body. The efficiency of adjustment work can be improved. In addition, since the configuration is simple, there is an effect that it is easy to assemble the laser processing apparatus and can be provided at a low cost.

In the above invention, the jig mounting member includes a seat plate having a hole for inserting a laser beam, and the jig main body may be mounted on the seat plate via a coupling recess and a coupling convex portion. Thereby, the jig main body can be easily attached to the position where the jig main body was positioned with respect to the jig attaching member.

In the above invention, the slit is formed to extend to the cross grating portion, it is preferable that the inserted thermal paper is sandwiched between the cross grating divided by the slit. As a result, the inserted thermal paper can be stably supported, so that the projected image of the cross grating can be cleanly printed.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows an example of the laser processing apparatus provided with the jig unit for optical axis confirmation of this invention.
2 is an explanatory diagram showing an arrangement of an optical path of a laser beam and a jig unit.
3 is a perspective view illustrating a jig main body and a jig mounting member of a jig unit.
It is a perspective view which shows the state which attached the jig main body to the jig | tool mounting member.
5 is an explanatory diagram showing a photosensitive image of a thermal paper.

Below, the detail of the laser optical axis confirmation jig unit of this invention is demonstrated.

BRIEF DESCRIPTION OF THE DRAWINGS The example in the case of implementing this invention to the laser processing apparatus which processes a scribe line for dividing on a brittle material board | substrate is shown.

This laser processing apparatus is provided with the horizontal beam (horizontal beam) 3 provided with the guide 2 along the X direction in the left and right struts 1 and the strut 1. According to the guide 2 of the beam 3, the scribe head 4 is provided to be movable in the X direction via a driving mechanism (not shown), and the laser irradiation nozzle 5 is provided on the scribe head 4. Supported. Moreover, the table 6 which mounts and supports the board | substrate W to be processed is supported on the weighing table 8 via the rotation mechanism 7 which makes the vertical axis the point, and the weighing table 8 is supported. ) Is formed to be movable in the Y direction (front and rear direction in FIG. 1) by a screw screw 9 driven by a servo motor. The laser irradiation nozzle 5 is a substrate (W) for adsorbing and supporting the laser light guided by the laser light source 10 through a plurality of mirrors (11, 12, 13) to be moved to the table (6). By irradiating with respect to the substrate W, a scribe line in the Y direction is processed. Thereafter, by moving the scribe head 4 in the X direction, the irradiation position of the laser beam is moved (pitch feed) to the next scribe line forming position.

The refraction light path of the laser light from the laser light source 10 to the laser irradiation nozzle 5 depends on the configuration of the laser processing apparatus, but in this embodiment, the laser light emitted from the laser light source 10 is the first mirror ( 11 is refracted in the upward Z direction, the second mirror 12 is refracted in the horizontal X direction, and the third mirror 13 is refracted in the downward Z direction to be guided to the laser irradiation nozzle 5 It is. Each mirror 11, 12, 13 is housed in the mirror boxes 11a, 12a, 13a so that direction and inclination can be adjusted, respectively, and the mirrors 11, 12, 13a of the third mirror 13 above the laser irradiation nozzle 5 The mirror box 13a is attached to the scribe head 4.

In addition, the optical path transmitted from the mirror 12 to the mirror 13 is set to be parallel to the moving direction of the scribe head 4 along the guide 2, and is transmitted from the mirror 13 to the laser irradiation nozzle 5. The optical path to be used is set to match the direction of the lifting shaft of the laser irradiation nozzle 5.

Moreover, the jig unit for confirming the position of an optical axis is arrange | positioned in the optical path of the laser beam which injects into the mirror 11, 12, 13 which refracts a laser beam, and the laser irradiation nozzle 5. As shown in FIG. This jig unit is comprised from the jig | tool attachment member 14 and the jig main body 19 used by being detachably attached to this jig | tool attachment member 14. As shown in FIG.

The jig | attachment member 14 is equipped with the seat plate 16 which has the hole 15 for laser beam insertion as shown in FIG. 2, and the jig main body 19 around this hole 15 on this seat plate 16. As shown in FIG. A plurality of engaging convex portions 17 for attaching and detaching freely are provided. The jig mounting member 14 is fixed to the apparatus frame 18 (see FIG. 1), the beam 3, and the scribe head 4.

3 and 4, the jig main body 19 is formed into a cylindrical body having a through hole 20 for inserting the laser beam, and has a cross shape in the through hole 20 as viewed from the laser beam insertion direction. A cruciform lattice 21 is formed. Moreover, the slit 22 for inserting the thermal paper M which interrupts a laser beam is provided in the outer peripheral side surface of the jig main body 19. As shown in FIG. The slit 22 is formed at a position where the shadow of the cross grating 21 can be projected onto the inserted thermal paper M. In this embodiment, the slit 22 is formed to extend to the cross grating 21 portion, and the inserted thermal paper M is sandwiched by the cross grating 21 segmented by the slit to form a stable shape. In addition, thermal paper refers to a paper in which a portion that receives heat becomes discolored.

Moreover, the engagement recessed part 23 which detachably attaches | couples to the engagement convex part 17 of the jig | attachment member 14 is provided in the bottom surface of the jig main body 19, These engagement recesses 23 and the engagement convex are provided. When the jig main body 19 is attached to the jig mounting member 14 via the part 17, the center of the cross grating 21 is made to coincide with the optical axis center of the prescribed laser beam path.

Next, the operation | movement at the time of confirming the position of the optical axis of the laser beam which injects into the mirror 11, 12, 13 and the laser irradiation nozzle 5 is demonstrated.

Here, the case where the optical axis of the laser beam refracted by the 1st mirror 11 is confirmed is demonstrated. First, the jig mounting member 14 disposed so that the center of the optical axis F of the laser beam at the normal position and the center of the cross grating 21 coincide with each other in the optical path between the first mirror 11 and the second mirror 12. The jig main body (19) is attached to it. Then, the thermal paper M is inserted into the slit 22 to be exposed to laser light. At this time, if the center of the optical axis F is at a normal position coinciding with the center of the cross grating 21 as shown in Fig. 5 (a), the shadow of the cross grating 21 is the optical axis as shown in Fig. 5 (b). It is confirmed that there is no misalignment in the optical axis F by drawing a clean cross shape at the center of the mark and printing it, taking out the thermal paper M and viewing this photosensitive image. However, if there is a deviation in the optical axis F, the shadow of the cross grid 21 may be printed at a position deviated from the center of the optical axis mark as shown in Figs. 5 (c) and (d), whereby the optical axis F is normalized. It can be confirmed that there is a deviation in the optical path, and the amount of deviation and the direction of the deviation can also be confirmed. Therefore, in this case, the optical axis F is corrected to the prescribed position by adjusting the inclination or direction of the first mirror 11 with reference to the printed image.

Moreover, when confirming the optical axis of the laser beam which injects into the 1st mirror 11, the 3rd mirror 13, and the laser irradiation nozzle 5, the 1st mirror 11, the 3rd mirror 13, and the laser irradiation nozzle (5) The above-described procedure may be performed by attaching the jig main body 19 to the jig attaching member 14 disposed in the previous optical path.

As described above, in the present invention, the jig main body 19 is set to the jig mounting member 14 disposed in the optical path of the laser beam, and the thermal paper M is simply inserted into the slit 22 to simply adjust the optical axis F. The position can be confirmed, thereby increasing the efficiency of the optical axis adjustment work.

As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified to the said embodiment. For example, in the above embodiment, the jig main body 19 is mounted to the jig mounting member 14 via the engaging recess 23 and the engaging convex 17, but the jig main body with respect to the jig mounting member 14. Any method may be used as long as the attachment / detachment can be freely attached to the positioned position. In addition, the external shape of the jig main body 19 is not limited to a circular shape, Of course, you may form in polygons, such as a rectangle and a pentagon. In addition, in the present invention, the object can be achieved, and appropriate modifications and changes can be made without departing from the scope of the claims.

The present invention guides the laser light from the laser light source to a laser irradiation nozzle (processing optical system) through a plurality of mirrors, thereby processing a scribe line for dividing the brittle material substrate by the focused laser light from the laser irradiation nozzle. It can use when adjusting the optical axis of a laser beam in a laser processing apparatus.

M thermal paper
W brittle material substrate
5 laser irradiation nozzle (optical system for processing)
10 laser light source
11 first mirror
12 second mirror
13 third mirror
14 Jig Mounting Member
15 holes
16 seat
17 mating convex
19 jig body
20 through hole
21 crosshairs
22 slits
23 mating recesses

Claims (4)

A laser beam axis jig unit for guiding a laser beam from a laser light source to a processing optical system through a plurality of mirrors and for processing a brittle material substrate by a focused laser light from the processing optical system,
A jig mounting member disposed in an optical path of a laser beam,
It consists of a jig main body which is detachably mounted to the jig mounting member,
The jig main body has a through hole for penetrating the laser light, and a cross grating is formed in the through hole to form a cross shape in the insertion direction of the laser light, and the jig main body when the optical axis center of the laser light path is in a prescribed position. Is mounted on the jig mounting member, the center of the cross grating is set to coincide with the center of the optical axis of the laser light path,
In addition, a slit for inserting the thermal paper for blocking the laser light is provided on the outer peripheral surface of the jig main body, the jig unit for laser beam axis confirmation jig unit is formed so that the shadow of the cross-shaped grid can be projected on the thermal paper inserted in the slit. The method of claim 1,
The jig mounting member includes a seat plate having a hole for inserting a laser beam, wherein the jig unit for mounting the jig main body is mounted to the seat plate via a coupling recess and a coupling convex portion. The method according to claim 1 or 2,
The slit extends to a portion of the cruciform lattice,
A jig unit for laser beam axis confirmation, wherein an inserted thermal paper is sandwiched between the cross gratings segmented by slits. As a jig for laser beam axis confirmation of a laser processing apparatus for guiding a laser beam from a laser light source to a processing optical system through a plurality of mirrors, and processing a brittle material substrate by a focused laser light from the processing optical system,
A jig main body disposed in the optical path of the laser beam,
The jig main body has a through hole for penetrating the laser light, and a cross grating is formed in the through hole to form a cross shape in the insertion direction of the laser light, and the jig main body when the optical axis center of the laser light path is in a prescribed position. When is placed in the optical path, the center of the cross grating is set to coincide with the optical axis center of the prescribed laser light path,
In addition, a slit for inserting the thermal paper for blocking the laser light is provided on the outer peripheral surface of the jig main body, jig for laser beam axis confirmation jig is formed so that the shadow of the cross-shaped grid can be projected on the thermal paper inserted in the slit.

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