KR20190121911A - Inline x-ray inspection device - Google Patents

Abstract

The present invention relates to an inline X-ray inspection device, which moves an X-ray tube up/down and along an arc around a target object and moves a detector up/down and back/forth to be capable of performing inspection at various angles as well as to be capable of ensuring various inspection magnifications, thereby enhancing precision and efficiency of inspection. The inline X-ray inspection device according to the present invention comprises: a case having an inlet and an outlet along an X-axis on a front surface and a rear surface respectively; a stage provided within the case and having a horizontal surface on which the target object inputted through the inlet is seated; an X-ray tube projecting an X-ray toward the target object seated on the stage from an upper part of the stage; a detector detecting, at a lower part of the detector, the X-ray projected by the X-ray tube to be passed through the target object; a tube driving unit including a tube guide rail supporting the X-ray tube to be able to move such that the X-ray tube can move along an arc around the target object on a vertical plane perpendicular to the horizontal surface of the stage, a tube moving unit moving the X-ray tube along the tube guide rail, and a tube lifting and lowering unit capable of lifting and lowering the X-ray tube in the X-axis direction; a detector driving unit including a detector moving unit capable of moving the detector in the X-axis direction and a detector lifting and lowering unit capable of lifting and lowering the detector in the Z-axis direction; and a control unit controlling operation of the tube driving unit and the detector driving unit.

Description

In-line X-ray Inspection Unit {INLINE X-RAY INSPECTION DEVICE}

The present invention relates to an in-line X-ray inspection apparatus, and more particularly, to move the X-ray tube in an arc around the lifting and target object, and to ensure a variety of inspection magnification by lifting and moving the detector back and forth of course of various angles The present invention relates to an inline X-ray inspection apparatus capable of inspecting to increase inspection precision and efficiency.

In general, after soldering such as reflow by mounting components in the manufacturing process of electric and electronic boards, the process of inspecting the soldering state of each component mounted on the board is performed to improve the reliability of the product. .

One such inspection method is visual inspection or solder visual inspection.

Apparatus for performing the solder appearance inspection is a good / bad according to the shape by processing the image signal by receiving the shape of the solder from the CCD camera as an image using an illumination device and a CCD camera to inspect the appearance of the parts having the lead Determine.

However, when mounting a BGA or Chip Scale Package (CSP) component, since the electrode is formed in the form of a lead ball on the lower surface of the component, it is impossible to inspect the soldering exterior inspection apparatus.

Thus, X-ray inspection equipment has emerged to make this possible.

There are two main ways to obtain X-ray tomography images using such equipment.

One is laminography, which acquires a single layer of tomography while synchronously rotating the X-ray generator and detector, and the other is a digital tomoxy synthsis, which receives multiple images while rotating the X-ray generator and obtains the average value of the images from a computer. (digital tomosythesis).

Rather than rely on the mechanical rotation of the detector, digital toxins numerically combine multiple X-ray images from different viewpoints to form cross-sectional images.

X-ray inspection apparatuses basically use the image formation by the transmission X-ray intensity, which is inversely proportional to the material permeation characteristics of the X-ray, that is, the thickness and density of the permeable material, and can easily inspect the defect state of the solder.

Such X-ray inspection equipment usually consists of an X-ray tube and a detector positioned between an object to be inspected.

In the X-ray inspection equipment, the X-ray tube rotates on a plane parallel to the plane direction of the object or emits the X-ray inclined.

The detector rotates synchronously to detect X-rays radiated from the X-ray tube and transmitted through the object.

However, in order to have such a configuration, there is a problem that the mechanical structure is complicated and costly.

In order to improve the problems of the prior art, the applicant of the present invention has proposed the "X-ray inspection apparatus and the inspection method using the same" disclosed in Patent Publication No. 10-0625641 (2006.09.20.).

The present invention has been made to solve and improve the problems of the prior art as described above, the object of the present invention is to ensure a variety of inspection magnification, of course, it is possible to increase the accuracy and efficiency of inspection by inspection of various angles An in-line X-ray inspection apparatus is provided.

Another object of the present invention is to provide an in-line X-ray inspection apparatus capable of inspecting a target article having a variety of specifications, and can effectively transport the target article in the equipment.

Inline X-ray inspection apparatus according to the present invention to achieve the above object, X-ray inspection apparatus for inspecting the object using the X-ray, the case having an inlet and outlet respectively on the front and rear on the X-axis; A stage provided in the case and having a horizontal surface on which an object inserted through the inlet is seated; An X-ray tube radiating X-rays from an upper portion of the stage toward an object mounted on the stage; A detector for detecting X-rays emitted from the X-ray tube from the bottom of the stage and passing through the object; A tube guide rail for movably supporting the X-ray tube so that the X-ray tube can be moved in an arc centered on the object on a vertical plane perpendicular to the horizontal plane of the stage, and the X-ray tube to the tube guide rail A tube driving unit including a tube moving unit for moving along the tube and a tube lifting unit capable of elevating the X-ray tube in the Z-axis direction; A detector driving unit including a detector moving means for moving the detector in the X-axis direction, and a detector lifting means for moving the detector in the Z-axis direction; A control unit controlling an operation of the tube driving unit and the detector driving unit; It is characterized by including.

In addition, the in-line X-ray inspection apparatus according to the present invention, the loading unit for loading the target object inserted into the case opening; An unloading unit which is sequentially disposed on the X-axis together with the loading unit and the stage, and which unloads the object transferred from the stage to the outlet of the case; A moving module configured to transfer the object loaded in the loading unit to the stage, and to transfer the inspected object to the unloading unit; Further comprising, The control unit, characterized in that for controlling the operation of the loading unit, the unloading unit and the moving module.

Here, the stage, the inspection conveyor with a clamp which can be transported by the moving module to fix the object placed on the horizontal plane, and the inspection conveyor to which the object is fixed on the horizontal plane in the X-axis direction and Y-axis direction And a stage rotating means capable of moving the stage horizontally, and a stage rotating means capable of rotating the inspection conveyor to which the object is fixed, in the center of rotation of the Z axis. The control unit includes the clamp and the stage horizontal movement. Means and controlling the operation of the stage rotating means.

Here, the target object is a plate-shaped object, the loading portion and the unloading portion, the loading support and the loading support is supported so as to be movable in the Y-axis direction and Z-axis direction between the left and right ends of the object The first and second loading lanes having a predetermined length in the X-axis direction and spaced apart from each other in the Y-axis direction so that the object is slidably supported in the X-axis direction, and the width between the first and second loading lanes can be adjusted. And a loading lane width adjusting means for moving the first and second loading lanes in the Y-axis direction, and a loading lane lifting means for lifting the first and second loading lanes in the Z-axis direction. The loading lane width adjusting means is controlled such that the first and second loading lanes are spaced apart from each other in the Y-axis direction so as to correspond to the width of the object, and the object is supported on the first and second loading lanes. When characterized in that for controlling the loading lane lifting means such that the first and second loading lane elevated in the Z-axis direction at a height corresponding to the horizontal surface of the stage.

Here, the moving module may include a pair of posts which are respectively erected in the front and rear ends of the case at one side of the inspection conveyor, a moving rail which interconnects the pair of posts in the X-axis direction, and the moving rail. The moving bracket is supported to be movable in the X-axis direction, and the moving object is supported by the moving bracket in a Z-axis direction, and when being lowered, the object is slidably supported in the loading part in the X-axis direction. And a conveying plate having a shape movable together in the X-axis direction, a conveying plate moving means for moving the moving bracket in the X-axis direction, and a conveying plate elevating means for elevating the conveying plate in the Z-axis direction, The control unit is characterized in that for controlling the operation of the conveying plate moving means and the conveying plate lifting means.

Here, the inspection conveyor, the conveyor support and the conveyor support is supported so as to be movable in the Y-axis direction and the left and right ends of the object to have a predetermined length in the X-axis direction and spaced apart from each other in the Y-axis direction And a conveyor lane width adjusting means for moving the first and second conveyor lanes in the Y-axis direction so as to allow width adjustment between the first and second conveyor lanes and the first and second conveyor lanes. The conveyor lane width adjusting means is controlled so that the first and second conveyor lanes are spaced apart from each other in the Y-axis direction so as to correspond to the width of the object.

By the above configuration, the in-line X-ray inspection apparatus according to the present invention can move the X-ray tube by lifting and arcing around the target object, and securing various inspection magnifications by lifting and moving the detector. It is possible to increase the precision and efficiency of inspection.

In addition, the in-line X-ray inspection apparatus according to the present invention is capable of adjusting the width of the lane that the object is supported between the inspection of the object having a variety of standards, as well as organic loading, moving module, stage, unloading unit By the coupling relationship, there is an advantage that can effectively transport the object in the equipment.

1 is a perspective view of an in-line X-ray inspection apparatus according to an embodiment of the present invention
Figure 2 is a front view of the main part of the in-line X-ray inspection apparatus according to an embodiment of the present invention
Figure 3 is a perspective view of the loading and unloading unit according to an embodiment of the present invention
4 is a perspective view of a moving module according to an embodiment of the present invention;
5 is a plan view showing a state of use of the moving module according to an embodiment of the present invention
Figure 6 is a perspective view of the inspection conveyor according to an embodiment of the present invention
Figure 7 is a perspective view of the X-axis stage horizontal movement means according to an embodiment of the present invention
Figure 8 is a perspective view of the Y-axis stage horizontal movement means according to an embodiment of the present invention
9 is a perspective view of the stage rotating means according to an embodiment of the present invention
10 is a front view of the X-ray tube and tube driver according to an embodiment of the present invention.
11 is a perspective view of a detector and a detector driver according to an embodiment of the present invention.
12 is a control block diagram of the in-line X-ray inspection apparatus according to an embodiment of the present invention

Hereinafter, an in-line X-ray inspection apparatus according to the present invention will be described in detail with reference to the embodiment shown in the drawings.

1 is a perspective view of an inline X-ray inspection apparatus according to an embodiment of the present invention, Figure 2 is a front view of the main portion of the inline X-ray inspection apparatus according to an embodiment of the present invention, Figure 3 is according to an embodiment of the present invention 4 is a perspective view of a moving module according to an embodiment of the present invention, and FIG. 5 is a plan view showing a using state of the moving module according to an embodiment of the present invention. Is a perspective view of the inspection conveyor according to an embodiment of the present invention, Figure 7 is a perspective view of the X-axis stage horizontal moving means according to an embodiment of the present invention, Figure 8 is a Y-axis stage according to an embodiment of the present invention 9 is a perspective view of a horizontal rotating means, Figure 9 is a perspective view of a stage rotating means according to an embodiment of the present invention, Figure 10 is a front view of the X-ray tube and tube driving unit according to an embodiment of the present invention, Figure 11 is the present invention of FIG. 12 is a perspective view of a detector and a detector driving unit, and FIG. 12 is a control block diagram of an inline X-ray inspection apparatus according to an exemplary embodiment.

1 to 12, an in-line X-ray inspection apparatus according to an embodiment of the present invention is an apparatus for inspecting an object A using X-rays, a case 10, a loading unit 20, and a moving module. 30, stage 40, X-ray tube 50, tube drive unit 60, detector 70, detector drive unit 60, unloading unit 90, control unit 100 It is configured to include.

The case 10 is configured to form an external shape of the in-line X-ray inspection apparatus according to an embodiment of the present invention. In one embodiment of the present invention, the case 10 is formed in a rectangular parallelepiped shape as shown in FIG. Inlet 11 and outlet 12 through which the target object (A) can be introduced and discharged in the rear is installed in the form of a door.

In one embodiment of the present invention, the object A is a plate-like object such as a PCB substrate.

In addition, in one embodiment of the present invention, the equipment covers the size of the target object (A) is at least 50 * 50mm, the maximum 460 * 360mm, the thickness of the target object (A) covers 0.4 ~ 7.0mm Configured to do so.

In addition, the bottom corners of the case 10 are provided with support legs 13, respectively, and a tower lamp 14 and an X-ray warning light 15 are installed on the upper surface.

In addition, the front of the case 10 is provided with a control unit 100 capable of controlling the equipment, which may be provided with a monitor, keyboard, mouse, etc. to enable the monitoring and operation of the equipment by the user, emergency switch , A reset switch, an X-ray on-off switch, and the like may be provided.

The loading unit 20 is a configuration capable of loading the target object (A) injected into the inlet of the case 10.

Meanwhile, the unloading unit 90 is sequentially disposed on the X axis together with the loading unit 20 and the stage 40, and the object A transferred from the stage 40 is stored in the case ( It is the structure which can be unloaded by the outlet 12 of 10).

Roles of the loading unit 20 and the unloading unit 90 are different from each other as described above, but since the components are the same, the following description will be made in detail with reference to the configuration of the loading unit 20.

In one embodiment of the present invention, the loading unit 20 and the unloading unit 90, as shown in Figure 3, the loading support 21, the first and second loading lanes 22, 23, and loading It comprises a lane width adjusting means 24, and the loading lane lifting means (25).

The first and second loading lanes 22 and 23 are supported by the loading support 21 so as to be movable in the Y-axis direction and the Z-axis direction, and the left and right ends of the object A are sandwiched therebetween. (A) has a predetermined length in the X-axis direction and is spaced apart from each other in the Y-axis direction so as to be slidably supported in the X axis direction.

The loading lane width adjusting means 24 is configured to move the first and second loading lanes 22 and 23 in the Y-axis direction so that the widths of the first and second loading lanes 22 and 23 can be mutually adjusted.

The loading lane width adjusting means 24 may be implemented by a combination of a step motor, a timing belt, an LM guide, and a ball screw in one embodiment.

The loading lane elevating means 25 is configured to elevate the first and second loading lanes 22 and 23 in the Z-axis direction.

The loading lane lifting means 25 may be implemented by a combination of a step motor, a flat belt in one embodiment, it may be configured to be lifted within the range of 200mm.

Here, the control unit 100 controls the loading lane width adjusting means 24 so that the first and second loading lanes 22 and 23 are spaced apart from each other in the Y-axis direction so as to correspond to the width of the object A. FIG. When the object A is supported by the first and second loading lanes 22 and 23, the stages 40 may have a height corresponding to a horizontal plane. The loading lane elevating means 25 is controlled to elevate in the Z-axis direction.

The moving module 30 transfers the target object A loaded in the loading unit 20 to the stage 40 as shown in FIG. 5 under the control of the controller 100, and the stage ( In 40), the inspection target object A is transferred to the unloading unit 90.

In an embodiment of the present invention, the moving module 30 includes a pair of posts 31 and 32, a moving rail 33, a moving bracket 34, and a transfer plate 35 as shown in FIG. 4. ), A conveying plate moving means 36, and a conveying plate elevating means 37.

The pair of posts 31 and 32 are respectively erected at the front and rear ends of the case 10 at one side of the inspection conveyor 41.

The moving rail 33 is configured to interconnect the pair of posts 31 and 32 in the X-axis direction.

The moving bracket 34 is configured to be supported by the moving rail 33 to be movable in the X-axis direction.

The transfer plate 35 is supported by the moving bracket 34 so as to be elevated in the Z-axis direction, and when lowered, the object plate A is supported by the loading unit 20 so as to be slidable in the X-axis direction. As shown in FIG. 5, it is configured to have a shape movable in the X-axis direction together with the object A. FIG.

The conveying plate moving means 36 is configured to move the moving bracket 34 in the X-axis direction.

The conveying plate moving means 36 may be implemented by a combination of a servo motor, an LM guide, and a timing belt in one embodiment.

The transfer plate elevating means 37 is configured to elevate the transfer plate 35 in the Z-axis direction.

In one embodiment of the transfer plate lifting means 37 may be implemented by a cylinder, it can be configured to be lifted within the 75mm range.

Here, the control unit 100 is configured to control the operation of the conveying plate moving means 36 and the conveying plate lifting means 37.

The stage 40 is provided in the case 10 and has a horizontal surface on which the target object A introduced through the inlet 11 is seated. In one embodiment of the present invention, the inspection conveyor 41 And stage horizontal moving means (42, 43) and stage rotating means (44).

The inspection conveyor 41 is an area for inspecting the object A, the clamp 411, the conveyor support 412, the first and second conveyor lanes 413 and 414, and the conveyor lane width adjusting means ( 415).

The clamp 411 is configured to fix the object A transferred by the moving module 30 and placed on a horizontal plane.

The clamp 411 may be implemented as a type for pressing and fixing the object (A) from the top in one embodiment.

The first and second conveyor lanes 413 and 414 are supported by the conveyor support 412 so as to be movable in the Y-axis direction, and have a predetermined length in the X-axis direction so that the left and right ends of the object A are supported. It is a configuration that is spaced apart from each other in the Y-axis direction

The conveyor lane width adjusting means 415 is configured to move the first and second conveyor lanes 413 and 414 in the Y-axis direction so that the width of each of the first and second conveyor lanes 413 and 414 can be adjusted.

The conveyor lane width adjusting means 415 may be implemented by a combination of a step motor, a timing belt, an LM steel and a ball screw in one embodiment.

Here, the control unit 100 controls the conveyor lane width adjusting means 415 so that the first and second conveyor lanes 413 and 414 are spaced apart from each other in the Y-axis direction so as to correspond to the width of the object A. FIG. Is configured to.

The stage horizontal movement means (42, 43) is controlled by the control unit 100 to move the inspection conveyor 41, the object (A) is fixed in the X-axis direction and Y-axis direction on a horizontal plane, respectively It can be a configuration.

As shown in FIG. 7, the X-axis stage horizontal moving means 42 capable of moving the inspection conveyor 41 on which the object A is fixed is moved in the X-axis direction on a horizontal plane. It can be implemented by a combination of screw and LM guide, and can be configured to achieve a maximum speed of 500mm / s in the 480mm range.

On the other hand, the Y-axis stage horizontal moving means 43 that can move the inspection conveyor 41 is fixed in the Y-axis direction on the horizontal plane is a servo motor as shown in FIG. It can be implemented by a combination of the ball screw and the LM guide, and can be configured to achieve a maximum speed of 500mm / s in the 380mm range.

The stage rotating means 44 is configured to rotate the Z axis of the inspection conveyor 41, the operation of which is controlled by the control unit 100 and the object A is fixed.

As shown in FIG. 9, the stage rotating means 44 may be implemented to rotate 360 ° by a combination of a servo motor, a cross roller ring, and a timing belt.

The X-ray tube 50 is configured to irradiate X-rays toward the object A seated on the stage 30 from the upper portion of the stage 30.

Since the X-ray tube 50 is a general configuration in the art, a detailed description thereof will be omitted.

The tube driving unit 60 is controlled by the control unit 100 and moves the X-ray tube 60. In one embodiment of the present invention, the tube guide rail 61 and And a tube moving means 62 and a tube elevating means 63.

The tube guide rail 61 allows the X-ray tube 50 to move in an arc centering on the object A on a vertical plane perpendicular to the horizontal plane of the stage 30. ) Is movable to support.

The tube moving means 62 is configured to move the X-ray tube 50 along the tube guide rail 61.

The tube moving means 62 may be implemented by a combination of a servo motor, an LM guide and a ball screw in one embodiment, and may be configured to move the X-ray tube 50 within an approximately 45 ° angle range. .

The tube elevating means 63 is configured to elevate the X-ray tube 50 in the Z-axis direction.

The tube lifting means 63 may be implemented by a combination of a servo motor, an LM guide, a ball screw and a timing belt in one embodiment, and the X-ray tube 50 may be configured to be elevated within a 150 mm range.

The detector 70 is configured to detect X-rays radiated from the X-ray tube 50 from the lower portion of the stage 30 and pass through the object A. FIG.

Since the detector 70 is a general configuration in the art, a detailed description thereof will be omitted.

The detector driving unit 80 is controlled to be controlled by the control unit 100 and moves the detector 70. In one embodiment of the present invention, the detector moving unit 81 is illustrated in FIG. 11. And a detector elevating means 82.

The detector moving means 81 is configured to move the detector 70 in the X-axis direction.

The detector moving means 81 may be implemented by a combination of a servo motor, an LM guide and a ball screw in one embodiment, and may be configured to move the detector 70 within a range of 220 mm.

The detector elevating means 82 is configured to elevate the detector 70 in the Z-axis direction.

The detector lifting means 82 may be implemented by a combination of a servo motor, an LM guide, a ball screw, and a timing belt in one embodiment, and may be configured to be lifted within a range of 100 mm.

As described above, by moving the X-ray tube 50 in an arc and moving around the object A, and elevating and moving the detector 70 forward and backward, various inspection magnifications can be secured. It is possible to increase the precision and efficiency of the inspection.

The inline X-ray inspection apparatus described above and illustrated in the drawings is only one embodiment for implementing the present invention, and should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is defined only by the matters set forth in the claims below, and the embodiments which have been improved and changed without departing from the gist of the present invention will be apparent to those skilled in the art. It will be said to belong to the protection scope of the present invention.

10 cases
11 Slot
12 outlet
20 loading section
21 Loading Support
22,23 1st, 2nd loading lane
24 Loading Lane Width Control
25 Loading Lanes
30 moving module
31,32 Pair of posts
33 moving rails
34 Moving Bracket
35 transfer plate
36 Moving plate moving means
37 Transfer plate lifting means
40 stages
41 Inspection Conveyor
411 clamp
412 conveyor support
413,414 1st, 2nd conveyor lane
415 conveyor lane width adjusting means
42 X axis stage horizontal moving means
43 Y-axis stage horizontal moving means
44 stage rotating means
50 x-ray tube
60 tube drive
61 Tube guide rail
62 Tube Vehicle
63 tube lifting means
70 detector
80 detector drive
81 Detector Vehicle
82 detector lift means
90 Unloading Section
100 control unit

Claims (6)

An X-ray inspection apparatus for inspecting an object using X-rays,
A case having an inlet and an outlet, respectively, on the front and rear surfaces on the X axis;
A stage provided inside the case and having a horizontal surface on which an object inserted through the inlet is seated;
An X-ray tube radiating X-rays from the upper portion of the stage toward an object mounted on the stage;
A detector for detecting X-rays radiated from the X-ray tube from the bottom of the stage and passing through the object;
A tube guide rail for movably supporting the X-ray tube so that the X-ray tube can be moved in an arc centered on the object on a vertical plane perpendicular to the horizontal plane of the stage, and the X-ray tube to the tube guide rail A tube driving unit including a tube moving unit for moving along the tube and a tube lifting unit capable of elevating the X-ray tube in the Z-axis direction;
A detector driving unit including a detector moving means for moving the detector in the X-axis direction, and a detector lifting means for moving the detector in the Z-axis direction;
A control unit controlling an operation of the tube driving unit and the detector driving unit; Inline X-ray inspection apparatus comprising a. The method of claim 1,
A loading unit capable of loading a target object introduced into the input hole of the case;
An unloading unit which is sequentially disposed on the X-axis together with the loading unit and the stage, and which unloads the object transferred from the stage to the outlet of the case;
A moving module configured to transfer the object loaded in the loading unit to the stage, and to transfer the inspected object to the unloading unit; Including more,
The control unit, the in-line X-ray inspection apparatus, characterized in that for controlling the operation of the loading unit, the unloading unit and the moving module. The method of claim 2,
The stage may include an inspection conveyor provided with a clamp capable of fixing an object placed on a horizontal surface by the moving module, and an inspection conveyor to which the object is fixed in the X and Y axis directions on a horizontal plane, respectively. And a stage rotating means capable of moving the stage horizontally and a stage rotating means capable of rotating the inspection conveyor to which the object is fixed, with the Z axis as the center of rotation.
The control unit, the in-line X-ray inspection apparatus, characterized in that for controlling the operation of the clamp, the stage horizontal movement means and the stage rotation means. The method of claim 2,
The object is a plate-like object,
The loading unit and the unloading unit are supported by a loading support and the loading support so as to be movable in the Y-axis direction and the Z-axis direction, and the left and right ends of the object are interposed therebetween so that the object can slide in the X-axis direction. The first and second loading lanes having a predetermined length in the X-axis direction and spaced apart from each other in the Y-axis direction so as to be supported, and the first and second loading lanes in the Y-axis so as to be able to adjust widths between the first and second loading lanes. A loading lane width adjusting means for moving in the direction and a loading lane lifting means for elevating the first and second loading lanes in the Z-axis direction,
The control unit controls the loading lane width adjusting means so that the first and second loading lanes are spaced apart from each other in the Y-axis direction corresponding to the width of the object, and the object is supported by the first and second loading lanes. And the loading lane elevating means controls the first and second loading lanes to move in the Z-axis direction at a height corresponding to the horizontal plane of the stage. The method of claim 4, wherein
The moving module may include a pair of posts each standing at the front and rear ends of the case at one side of the inspection conveyor, a moving rail interconnecting the pair of posts in the X-axis direction, and an X axis on the moving rail. And a moving bracket supported to be movable in a direction, and a moving object supported by the moving bracket in a Z axis direction while being lowered, and being supported by the loading unit so as to be slidably supported in the X axis direction and being X together with the object. And a conveying plate having a shape movable in the axial direction, a conveying plate moving means for moving the moving bracket in the X-axis direction, and a conveying plate elevating means for elevating the conveying plate in the Z-axis direction,
The control unit, the in-line X-ray inspection apparatus, characterized in that for controlling the operation of the conveying plate moving means and the conveying plate lifting means. The method of claim 3,
The object is a plate-like object,
The inspection conveyor may include a first support that is supported by the conveyor support and the conveyor support so as to be movable in the Y-axis direction and has a predetermined length in the X-axis direction and is spaced apart from each other in the Y-axis direction so as to support the left and right ends of the object. And a conveyor lane width adjusting means for moving the first and second conveyor lanes in the Y-axis direction so as to allow width adjustment between the two conveyor lanes and the first and second conveyor lanes.
And the control unit controls the conveyor lane width adjusting means such that the first and second conveyor lanes are spaced apart from each other in the Y-axis direction corresponding to the width of the object.

Images