KR20190025793A - 3d integration optical measurement systems and 3d integration optical measurement method for non-contact type 3d meter - Google Patents

Abstract

The present invention relates to an integrated optical measurement system and a three-dimensional integrated optical measurement method which are for a non-contact three-dimensional measuring instrument and, more specifically, to a method for constructing, into an integrated system, an image measuring unit, a pointer laser measuring unit, a line laser measuring unit and a WSI measuring unit, and performing three-dimensional measurement therethrough. According to the present invention, heights can be measured in correspondence to various shapes and sizes, the height of a small photographed object can be precisely measured, and since the time required to obtain a height value with a small error range can be shortened, the time for obtaining three-dimensional measurement data from the photographed object can be significantly reduced.

Description

TECHNICAL FIELD [0001] The present invention relates to a three-dimensional integrated optical measuring system and a three-dimensional integrated optical measuring method for a non-contact three-dimensional measuring instrument,

The present invention relates to an integrated optical measuring system and a three-dimensional integrated optical measuring method for a non-contact three-dimensional measuring instrument. More particularly, the present invention relates to a method of constructing an image measuring unit, a pointer laser measuring unit, a line laser measuring unit, and a WSI (white light scanning interferometer) measuring unit as an integrated system and performing three-dimensional measurement.

There are two general methods for measuring the height in noncontact 3D measuring instruments. The first is a method of focusing an image using successive captured images and a method of measuring a height using a point laser. An image focusing method using continuous images is a method of focusing on the Z axis value by finding the sharpest image by storing the Z axis value at the time of acquiring the image. The limitation of this method is that it does not guarantee the correct Z-axis value. For example, when the Z-axis position and the image pickup position are different, the stage moves to the wrong focusing position. In the case of measuring the height using the point laser, it is difficult to input the correct position because the user uses the one point to measure the height. In the case of the object having the curvature, it is difficult to obtain accurate data due to the laser reflection. In addition, since the data is obtained as points, it takes a lot of time to obtain information of the surface.

Accordingly, the present invention solves the above problem and measures an accurate and rapid three-dimensional shape through four steps of an image measuring unit, a pointer laser measuring unit, a line laser measuring unit, and a WSI measuring unit

Korean Patent No. 10-0580961 (2006.05.10.)

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a method and apparatus for measuring a precise three-dimensional shape of a photographed object by integrally using four measurement units of an image measurement unit, a pointer laser measurement unit, a line laser measurement unit, Dimensional integrated optical measurement system that can be used in a wide range of applications.

Another object of the present invention is to provide a three-dimensional integrated optical measuring system capable of rapidly measuring a three-dimensional shape of a photographed object by performing the following measurement within an error region calculated from each measuring portion.

Another technical object of the present invention is to provide a three-dimensional integrated optical measurement system that can further improve measurement efficiency and reliability.

The technical objectives to be achieved by the present invention are not limited to the above-mentioned exemplary technical problems, and other technical subjects not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a method of measuring a height of a light source, the method comprising: measuring a first height value through an image measuring unit; correcting the first height value to a second height value through a pointer laser measuring unit; And a final height value is measured by correcting the third height value to a fourth height value through the WSI measurement unit.

According to the present invention, there is an effect that a photographed object can be measured more precisely and a fine pattern shape on the surface of the photographed object can be displayed.

In addition, in the four-step measurement, the error range of the previous step is set and the measurement within the error range is performed, whereby the unnecessary area is not measured and the shape of the taken object can be measured more quickly.

Further, by using all four measuring units, the respective disadvantages can be compensated, and the four measuring units can be controlled by a single software, thereby being integrated into one system.

Therefore, there is no need to use a new three-dimensional measuring device for each kind of photographing, and it is possible to measure shapes of various photographing objects more precisely and quickly through one measuring instrument.

Finally, maintenance of the three-dimensional measuring instrument is easy, and the cost for measuring the shape of the photographing object can be reduced.

1 is a diagram showing the configuration of a three-dimensional integrated optical measuring system according to an embodiment of the present invention.
2 is a diagram showing the measurement of the image measuring unit of one embodiment of the present invention.
Fig. 3 is a diagram showing the measurement of the pointer laser measuring unit of the embodiment of the present invention. Fig.
4 is a diagram showing the measurement of the line laser measuring unit of the embodiment of the present invention.
5 is a diagram showing a measurement of a WSI measurement unit of an embodiment of the present invention.
6 is a diagram illustrating a three-dimensional integrated optical measurement method according to an embodiment of the present invention.
7 is a perspective view showing a non-contact three-dimensional measuring instrument according to an embodiment of the present invention.
8 is a front view showing a non-contact three-dimensional measuring instrument according to an embodiment of the present invention.
9 is a view showing a linear turret according to an embodiment of the present invention.
10 is a diagram illustrating a lighting module of an embodiment of the present invention.
11 is a view showing a first illumination unit according to an embodiment of the present invention.
12 is a view showing a second illumination unit of an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Also, in order to clearly illustrate the present invention in the drawings, portions not related to the present invention are omitted, and the same or similar reference numerals denote the same or similar components.

The objects and effects of the present invention can be understood or clarified naturally by the following description, and the objects and effects of the present invention are not limited only by the following description.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a diagram showing the configuration of a three-dimensional integrated optical measuring system according to an embodiment of the present invention.

Referring to FIG. 1, the present invention relates to an integrated optical measuring system for a three-dimensional measuring machine for measuring a height of a photograph on a stage and obtaining a three-dimensional shape. The optical measuring system includes an image measuring unit 100, a pointer laser measuring unit 200, a line laser measurement unit 300, a WSI measurement unit 400, and a control unit 500.

The image measuring unit 100, the pointer laser measuring unit 200, the line laser measuring unit 300, and the WSI measuring unit 400 are provided so as to have the same working distance from the photographing object.

The control unit 500 receives the measured height value H from each of the image measuring unit 100, the pointer laser measuring unit 200, the line laser measuring unit 300 and the WSI measuring unit 400, A predetermined measurement area A is calculated by substituting the predetermined error value (-.alpha., + Alpha) previously stored in each step into the height value H. The calculated predetermined measurement area A may be transmitted to the measurement units 200, 300, and 400 of the next step to specify a measurement range.

In addition, the control unit 500 may separately store setting conditions and measurement procedures of each measurement unit in a recipe file, and may be able to perform measurement according to a recipe file recorded at the time of re-measurement of data. When a new user measures the data, it can simply re-measure it by loading the recipe file and then pressing the start measurement button. In addition, the data between the measuring units 100, 200, 300, and 400 can be compatible with each other, thereby reducing the time required for measuring a photographed object and enabling more accurate and precise measurement.

Here, according to one embodiment, accurate measurement may not be accurate when the WSI measurement unit 400 is to perform accurate measurement. Since the measurement area of the WSI measurement unit 400 is very small, the position can be specified while performing the measurement. However, the image measuring unit 100 can measure a large area, and the user can intuitively select a position. Accordingly, if the measurement position is selected through the image measurement unit 100 and then the measurement is performed through the WSI measurement unit 400 within the designated area, accurate measurement can be performed in a shorter time than the conventional measurement method. Accordingly, the present invention can be applied to any one of the measurement units 100, 200, 300, and 400 of the image measurement unit 100, the pointer laser measurement unit 200, the line laser measurement unit 300, and the WSI measurement unit 400 However, it is preferable to measure using at least two measurement units.

Hereinafter, each of the measuring units 100, 200, 300, and 400 according to an embodiment of the present invention will be described in detail with reference to FIGS.

2 is a diagram showing the measurement of the image measuring unit 100 of the embodiment of the present invention.

The image measuring unit 100 continuously photographs a photographing object while moving the camera with respect to a predetermined Z axis. The height of the photographed object can be measured by selecting the sharpest image among the images of the photographed photographed object. Also, moving to the Z-axis coordinate value corresponding to the sharpest image enables autofocusing to the reference height. The height measured through the image measuring unit 100 in the above-described manner is referred to as a first height value H1.

Thereafter, the controller 500 receives the first height value H1 measured through the image measuring unit 100 and calculates a first predetermined error value (-α1, -α2) stored in advance in the received first height value H1, + 1) to calculate the first predetermined measurement area A1. According to the calculation result, the first predetermined measurement area A1 may be a region between H1-? 1 and H1 +? 1. The calculated data of the first predetermined measurement area A1 is transmitted to the pointer laser measurement unit 200. [ When the measurement of the pointer laser measurement unit 200 is omitted, the first predetermined measurement area A1 can be directly transmitted to the line laser measurement unit 300, and the measurement of the line laser measurement unit 300 can be omitted It may be directly transmitted to the WSI measuring unit 400.

3 is a diagram showing the measurement of the pointer laser measuring unit 200 according to an embodiment of the present invention.

The pointer laser measuring unit 200 can measure the height of the photographed object by irradiating the photographed object with a point laser, receiving the reflected light reflected by the irradiated point laser with the photographed object, receiving the light by the pointer laser light receiving unit, and calculating the light receiving angle. Here, the pointer laser light receiving unit may be a CCD, a PSD, a CMOS sensor, or the like. The pointer laser measuring unit 200 sets and sets the laser value based on the focusing position of the lens to be photographed. When the laser value changes due to the photographing object, the pointer laser measuring unit 200 moves the Z axis to the laser value of the focusing position, Can be performed. The height measured through the pointer laser measuring unit 200 in the above manner is referred to as a second height value H2. Therefore, the first height value H1 measured by the image measuring unit 100 is corrected to the second height value H2, which is a more accurate value.

Here, the pointer laser measuring unit 200 performs measurement only within the range of the first predetermined measurement area A1 received through the controller 500. [ Therefore, the measurement time can be shortened. The control unit 500 receives the second height value H2 measured by the pointer laser measuring unit 200 and outputs the second predetermined error value -α2 + 2) to calculate the second predetermined measurement area A2. According to the calculation result, the second predetermined measurement area A2 may be a region between H2 -? 2 and H2 +? 2. It is preferable that the second predetermined measurement area A2 is designated as a range within the first predetermined measurement area A1. The calculated data of the second predetermined measurement area A2 is transmitted to the line laser measurement unit 300. [ If the measurement of the line laser measuring unit 300 is omitted, the data of the second predetermined measuring area A2 may be directly transmitted to the WSI measuring unit 400.

4 is a diagram showing the measurement of the line laser measuring unit 300 according to an embodiment of the present invention.

The line laser measuring unit 300 measures the height of the photographing object by irradiating the photographing object with a linear laser, receiving the reflected light reflected by the irradiated linear laser with the photographing object, receiving the light by the line laser light receiving unit, have. Here, the line laser light receiving unit may be a CCD, a PSD, a CMOS sensor, or the like. A method of measuring the height of a photographed object by calculating a light receiving angle at which the reflected light enters the line laser light receiving portion can be measured based on a triangulation method. The triangulation method is a method of determining the plane position by using a mathematical formula that can calculate the length of one side of a triangle and the length of the other side when knowing the angle of both sides. After generating a visible laser beam from the laser diode of the line laser measuring unit 300, the generated visible laser beam passes through the line generating lens and is irradiated with a linear laser. The irradiated linear laser impinges on the photographing object and is partially reflected back to the line laser light receiving part. The distance from the line laser light receiving portion to the object determines the angle at which the light travels to the line laser light receiving portion. The determined angle determines the position at which the received light enters the line laser light receiving portion. The position of the light in the line laser light receiving unit is processed by the signal adjusting circuit and the microprocessor of the controller 500, and the output value is calculated to measure the height. The height measured through the line laser measuring unit 300 in the above-described manner is referred to as a third height value (H3). Therefore, the second height value H2 measured by the pointer laser measuring unit 200 is corrected to the third height value H3 which is a more accurate value. If the measurement of the pointer laser measuring unit 200 is omitted, the first height value H1 measured by the image measuring unit 100 may be corrected to the third height value H3.

Here, the line laser measuring unit 300 performs measurement within a range of the second predetermined measurement area A2 received through the controller 500. Therefore, the measurement time can be shortened. The control unit 500 receives the third height value H3 measured through the line laser measuring unit 300 and outputs the third predetermined error value -α3 + 3) to calculate the third predetermined measurement area A3. According to the calculation result, the third predetermined measurement area A3 may be a region between H3 -? 3 and H3 +? 3. It is preferable that the third predetermined measurement area A3 is specified within the second predetermined measurement area A2. The line laser measuring unit 300 is suitable for quickly measuring a relatively large area.

The calculated data of the third predetermined measurement area A3 is transmitted to the WSI measuring unit 400 which is the next measuring device.

5 is a diagram showing a measurement of a WSI measurement unit of an embodiment of the present invention.

The WSI measuring unit 400 irradiates a light source to a light splitter, irradiates each light split by the light splitter to a photographing object and a reference mirror, and receives each reflected light. If the distance from the object to be photographed to the light receiving point is the same, the reflected light reflected from the object and the reference mirror generate an interference signal due to interference. Therefore, the WSI measuring unit 400 can measure the height by judging whether or not an interference signal is generated due to the interference phenomenon of the reflected light from the taken object and the reference mirror.

More specifically, after the WSI measurement unit 400 irradiates the white light, the irradiated white light is divided into two lights that hit the optical splitter and travel to the reference mirror and the photographing object. Each divided light is reflected after it hits the reference object and the reference mirror, and the distance between the object and the light receiving part can be known by the time difference between the reflected light and the WSI light receiving part. In detail, when each reflected light enters the WSI light receiving unit at the same time, the two reflected lights cause interference with each other, and the point where the interference phenomenon occurs is measured at the corresponding height. An interference signal generated by each reflection light caused by interference is formed on the camera image sensor of the WSI light receiving unit. The WSI measuring unit 400 generates light with a predetermined predetermined distance, and reflects light generated when the object is present at the distance. Therefore, when the scanner and the reference mirror reciprocate in the vertical direction, scanning is performed, the light is generated when the photographed object is detected. The generated light is reflected from the reference mirror and reflected from the reference light and WSI light- The light is mutually in contact with each other to cause an interference phenomenon to form an interference signal. Here, the height of the photographed object can be measured by measuring the point where the interference signal is generated.

The height measured through the WSI measuring unit 400 in the above-described manner is referred to as a fourth height value (H4). Therefore, the third height value H3 measured by the line laser measuring unit 300 is corrected to the fourth height value H4 which is a more accurate value. When the measurement of the line laser measuring unit 300 is omitted, the second height value H2 measured by the pointer laser measuring unit 200 can be corrected to the fourth height value H4, The first height value H1 measured by the image measuring unit 100 may be corrected to the fourth height value H4 when the measurement of the first height value 200 is omitted. According to one embodiment, measurement of each measurement unit 100, 200, 300, and 400 may be omitted. Since the measurement areas of the measurement units 100, 200, 300, and 400 measured in the subsequent steps are designated by the measurement units 100, 200, 300, and 400 measured in the previous step, , 200, 300, 400), the accurate value can be measured within a short period of time.

According to one embodiment, the WSI measurement unit 400 performs measurement only within the range of the third predetermined measurement area A3 received through the control unit 500. [ Therefore, the measurement time can be shortened. The control unit 500 receives the fourth height value H4 measured through the WSI measurement unit 400. [ The fourth height value H4 is finally the height value of the photographing object measured by the present invention.

The three-dimensional shape of the photograph can be measured by repeatedly performing each of the (X, Y) coordinates according to the area of the photographing object according to the above method and measuring the height value according to each coordinate. Although the WSI measuring unit 400 can measure a narrow area, it can measure up to a fine height of 1um or less. Therefore, there is an advantage that the shape of a fine pattern can be measured and displayed.

Hereinafter, a three-dimensional integrated optical measuring method according to an embodiment of the present invention will be described with reference to FIG. 6 is a diagram illustrating a three-dimensional integrated optical measurement method according to an embodiment of the present invention.

As described above, the three-dimensional integrated optical measurement according to the present invention includes an image measuring step S100 for measuring the first height value H1 to the image measuring unit 100, a first height value (S510) of calculating a first predetermined measurement area A1 by substituting a first predetermined error value (-α1, + α1) previously stored in the first predetermined measurement area A1 A pointer laser measuring step S200 of measuring the first height value H1 with the pointer laser measuring unit 200 to a second height value H2 and a second height value H2 using the controller 500, (S520) of calculating a second predetermined measurement area A2 by substituting a previously stored second predetermined error value (-α2, + α2), and calculating the calculated second predetermined measurement area A2 by the line laser measurement A line laser measurement step S300 for measuring the second height value H2 to a third height value H3 by measuring the third height value H3 by the controller 300, (Step S530) of calculating a third predetermined measurement area A3 by substituting the added third predetermined error value -α3 and + α3, and the calculated third predetermined measurement area A3 is measured by the WSI measurement part 400), and a WSI measurement step (S400) of correcting the third height value (H3) to the fourth height value (H4). The fourth height value H4 is finally the height value of the photographing object measured by the present invention.

By repeatedly performing the measurement of each of the measuring units 100, 200, 300, and 400 for each (X, Y) coordinate according to the area of the photographed object by the above method, the height value according to each coordinate is measured, The shape can be measured.

The conventional lens replacement method uses a manual (manual) method, a method of directly changing a lens of a magnification desired by a user according to a photographing object, or a variable lens capable of changing magnification. According to the manual method, the existing lens is disassembled and then the lens of the desired magnification is combined. In this case, since the lens is manually replaced by the person during the replacement operation, a slight error may occur, and a separate correction operation must be performed. Therefore, every time the magnification of the lens is changed, the operation of the non-contact three-dimensional measuring device is stopped, and the replacement operation must be performed. Thus, the measurement time of the photograph is relatively long. In addition, each lens must be separately stored, and a correction operation must be newly performed every time the lens is changed. Variable lenses that can vary the magnification are expensive to install and are not easy to maintain, maintain and manage. In addition, it is not suitable for continuous work because it is necessary to carry out the correction work after changing the magnification. Therefore, in the present invention, a method of replacing a lens having a plurality of different magnifications with a non-contact three-dimensional measuring instrument itself is proposed.

FIG. 7 is a perspective view showing a non-contact three-dimensional measuring device according to an embodiment of the present invention, and FIG. 8 is a front view showing a non-contact three-dimensional measuring device according to an embodiment of the present invention.

The non-contact three-dimensional measuring apparatus of the present invention includes a photographing unit 600 for collecting three-dimensional information by scanning a photographing object, a guide rail 700 positioned between the photographing unit 600 and the photographing object and formed in a horizontal direction, a guide rail 700 A linear turret 710 which is coupled to the linear turret 710 and linearly reciprocates in the horizontal direction along the guide rail 700 and a linear turret 710 which is arranged in sequence on a linear reciprocating motion line of the linear turret 710 at predetermined intervals A plurality of lenses 720 having different magnifications, and a linear motor for linearly reciprocating the linear turret 710 at predetermined intervals. The fixing unit 830 and the driving unit 840 adjust the height of the fixing unit 830 so that the lighting module 800 can be detached from the lens module 720, As shown in FIG. In addition, the illumination module 800 may be a first illumination portion 810 or a second illumination portion 820. The first illuminating unit 810 has a ring shape. The first illuminating unit 810 has a predetermined inclination such that the inner circumferential surface thereof faces downward. A plurality of first LEDs 811 are formed on the inner circumferential surface of the first illuminating unit 810. (811) are divided into four groups each of which can be separately controlled. A plurality of second LEDs 821 having different illumination angles are formed on the inner circumferential surface of the second illumination unit 820 at different heights, The two LEDs 821 are divided into four groups according to their heights in three stages and in the circumferential direction, and are grouped into twelve groups, and each group can be separately controlled.

Hereinafter, the lens 720, the linear turret 710, the linear motor, and the guide rail 700 will be described in detail with reference to FIG. 3 is a view showing a replacement structure of the lens 720 according to an embodiment of the present invention.

The guide rail 700 is positioned between the photographing unit 600 and the photographing object and formed in a horizontal direction. The guide rail 700 can be positioned on the same plane with respect to the bed on which the photographing object is located. The guide rail 700 is provided with a plurality of guide projections, and a guide groove formed in a linear turret 710 described later can be fastened.

The linear turret 710 is fastened to the guide rail 700 and moves along the guide rail 700. The linear turret 710 is coupled to a guide protrusion formed on the guide rail 700 and can be guided. The linear turret 710 is formed with guide grooves in the horizontal direction, and the guide grooves can be guided by being fastened to guide protrusions formed on the guide rails 700. The linear turret 710 moves along the guide rail 700, and can linearly reciprocate. The linear turret 710 is coupled with a plurality of lenses 720 described later.

The plurality of lenses 720 have different magnifications and are fixed to the linear turret 710 and move along the guide rail 700 together with the linear turret 710. The plurality of lenses 720 are sequentially arranged at predetermined intervals on a linear reciprocating line on which the linear turret 710 is moved. At this time, the linear turret 710 is moved by a predetermined distance so that the lens 720 can be positively positioned between the photographing unit 600 and the photographing object when the guide is moved. The plurality of lenses 720 may be a combination of a 2x magnification lens 720x, a 5x magnification lens 720x, a 10x magnification lens 720x, and a 20x magnification lens 720x.

The linear motor is provided between the linear turret 710 and the guide rail 700 to linearly reciprocate the linear turret 710. The linear motor is moved by a predetermined distance to stop the plurality of lenses 720 fixed to the linear turret 710 so as to be positively positioned between the photographing object and the photographing unit 600, and then stops. The linear motor is controlled by measurement software, and a lens 720 having an appropriate magnification can be applied by controlling the linear motor with a value measured by measurement software according to the height, material, thickness, and the like of the photograph. Therefore, when replacing the lens 720, it is not necessary to stop the operation of the non-contact three-dimensional measuring device, which shortens the measuring time and automatically adjusts the position of the lens 720, It is not necessary. In addition, since the plurality of lenses 720 are fixed to one linear turret 710, the lens 720 can be easily managed and maintained. Therefore, it is possible to measure relatively accurate and stable data and precise measurement is possible.

Hereinafter, the lighting module 800 will be described in detail with reference to FIGS. 10 to 12. FIG. 10 is a diagram illustrating an illumination module 800 of an embodiment of the present invention.

The lighting module 800 may be fixed to the fixing portion 830 and the fixing portion 830 may be coupled to the driving portion 840 so that the lighting module 800 can be moved by the driving portion 840.

The lighting module 800 is positioned between the lens 720 and the photographing object. In detail, the illumination module 800 may be positioned in a downward direction perpendicular to the central axis of the lens 720. [ The illumination module 800 may be replaced with the first illuminating unit 810 or the second illuminating unit 820 according to the size and shape of the photographing object.

Referring to FIG. 11, the first illumination unit 810 may be provided in a ring shape. The first illuminating unit 810 may be provided in a round shape having a predetermined thickness, and a predetermined inclination is formed so as to look at the photographing object whose inner circumferential surface is located in the downward direction. The inner circumferential surface of the first illumination unit 810 has a predetermined inclination and a plurality of first LEDs 811 are formed. The first LEDs 811 may be grouped into four by being divided by predetermined angles along the circumferential direction. In addition, each group of the first LEDs 811 can be controlled so as to irradiate the photographic object with different amounts of light depending on the situation.

Referring to FIG. 12, the second illuminating unit 820 may be provided such that the lower side thereof is opened in a hemispherical shape. At this time, the upper side in the center direction should be opened so that the photographing unit 600 can receive light. The second illuminating unit 820 is disposed at different heights, and a plurality of second LEDs 821 having different angles for illuminating the photographing object at each height are formed. The second LED 821 is divided into three stages according to the height, and each of the three stages is grouped into four groups along the circumferential direction. That is, the second LEDs 821 are divided into twelve groups, and each group can be controlled so as to irradiate the photographic object with different amounts of light depending on the situation.

The fixing unit 830 can be detachably attached to the first illumination unit 810 or the second illumination unit 820 as a configuration in which the illumination module 800 is fastened. The fixing unit 830 is connected to the photographing unit 600 together with the driving unit 840 to be described later and has a cross section of "c" so that the lighting module 800 can be positioned between the photographing unit 600 and the lens 720. [ .

The driving unit 840 can move the fixing unit 830 in the z-axis direction perpendicular to the paper surface. The driving unit 840 may include a ball screw shaft and a stepping motor, which are connected to the fixing unit 830 and have threads on the peripheral surface. The stepping motor rotates the ball screw shaft, and the fixing portion 830 is moved in the z-axis direction according to the rotational motion. The driving unit 840 may include a home sensor and a limit sensor capable of sensing the start point and the limit point of the fixing unit 830. The home sensor is a sensor that controls the illumination module 800 to move to the initial position when the noncontact 3D measuring instrument is first executed. The limit sensor is a sensor that controls the limit point so that when the illumination module 800 is moved, it can move within a certain range.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. An example may be possible. Therefore, the scope of the present invention should not be limited to the above embodiments.

100: Image measurement unit 200: Pointer laser measurement unit
300: line laser measuring unit 400: WSI measuring unit
500:
600: photographing unit 700: guide rail
710: Linear turret 720: Lens
800: illumination module 810: first illumination part
811: first LED 820: second illumination unit
821: second LED 830:
840:
A1: a first predetermined measurement area
A2: the second predetermined measuring area
A3: a third predetermined measuring area
H1: first height value H2: second height value
H3: third height value H4: fourth height value

Claims (5)

Dimensional integrated optical measuring system for obtaining a three-dimensional shape by measuring a height value of a photographing object positioned on an upper surface of a stage through a three-dimensional measuring instrument,
An image measuring unit repeatedly photographing the camera at different heights to measure a first height value;
A pointer laser measurement unit for measuring a first predetermined measurement area in which a first predetermined error value previously stored in the first height value is substituted and correcting the first height value to a second height value;
A line laser measurement unit for measuring a second predetermined measurement area in which a second predetermined error value previously stored in the second height value is substituted and correcting the second height value to a third height value;
A WSI measuring unit for measuring a third predetermined measurement area to which a third predetermined error value previously stored in the third height value is substituted and correcting the third height value to a fourth height value; And
And a control unit for calculating an area to be measured by the pointer laser measurement unit, the line laser measurement unit and the WSI measurement unit by substituting an error value previously stored in the measured height value.
The method according to claim 1,
Wherein the pointer laser measuring unit comprises:
Wherein a height of the object is measured by irradiating the point laser with a point laser to receive reflected light and calculating a light receiving angle.
The method according to claim 1,
Wherein the linear laser measuring unit comprises:
Wherein the height is measured by irradiating a linear laser to the photographing object to receive reflected light and calculating a light receiving angle.
The method according to claim 1,
The WSI-
A light source is irradiated to the light splitter, each of the light beams divided by the light splitter is irradiated to the object to be imaged and the reference mirror to receive the respective reflected light, and the height of each reflected light is determined by judging whether interference occurs Dimensional optical measuring system.
Measuring a first height value with the image measuring unit;
Calculating a first predetermined measurement area by substituting a first predetermined error value previously stored in the first height value through a control unit;
Measuring the first predetermined measurement area with the pointer laser measurement unit to correct the first height value to a second height value;
Calculating a second predetermined measurement area by substituting a second predetermined error value previously stored in the second height value through a control unit;
Measuring the second predetermined measurement area calculated by the line laser measurement unit, and correcting the second height value to a third height value;
Calculating a third predetermined measurement area by substituting a third predetermined error value previously stored in the third height value through a control unit;
Measuring the calculated third predetermined measurement area by the WSI measurement unit, and correcting the third height value to a fourth height value.

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