CN112461141A - Structured light 3D height measuring device and height measuring method - Google Patents
Structured light 3D height measuring device and height measuring method Download PDFInfo
- Publication number
- CN112461141A CN112461141A CN202110148048.7A CN202110148048A CN112461141A CN 112461141 A CN112461141 A CN 112461141A CN 202110148048 A CN202110148048 A CN 202110148048A CN 112461141 A CN112461141 A CN 112461141A
- Authority
- CN
- China
- Prior art keywords
- structured light
- grating
- primary mirror
- light path
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Abstract
The invention relates to the technical field of precision optical instrument measuring systems, and discloses a structured light 3D height measuring device which comprises a structured light path and a primary mirror light path, wherein an included angle is formed between the structured light path and the primary mirror light path, the intersection point position of the structured light path and the primary mirror light path is the position of an object to be measured, the structured light path comprises a light source, a grating and a structured light lens which are sequentially arranged, the grating and the structured light path form a certain angle, the primary mirror light path comprises a primary mirror and a CMOS camera, the structured light lens is a double telecentric lens with a small view field, and the surface of the object to be measured, the main surface of the structured light lens and the surface of the grating meet the Sammy's law; the grating can move along the inclination direction of the grating, and the primary mirror is a large NA telecentric lens, so that the object to be measured and the CMOS camera are in a conjugate relation. The invention also discloses a corresponding height measuring method. The invention realizes larger detection range, higher detection precision and higher detection speed.
Description
Technical Field
The invention relates to the technical field of precision optical instrument measuring systems, in particular to a structured light 3D height measuring device and a height measuring method.
Background
Referring to fig. 1, the height measurement of the structured light adopts a triangulation height measurement principle, a laser device emits laser light, the laser light is incident on a measured object through a condensing lens, a reflected light beam is incident on a receiver CCD through an imaging lens, the measured object is moved, and height information of the surface of the measured object is calculated through a calculation formula h = x'. multidot.cos α/β (where β is the magnification of the imaging lens).
The Chinese patent 'shape measuring device and shape measuring method' (application number: CN 201910318789.8) measures an object by using the principle, and the device mainly comprises an object stage, a light projecting part, a light receiving part and a control part. The light source in the light projection part emits light beams to reach the surface of a sample, reflected light rays reach the detector through the light receiving part to finish data acquisition of one view field, and the objective table is moved to the next view field to acquire data until the detection of the whole sample is finished. The device detects the precision and is 1um, and the detection area is 20 x 10 x 5cm, is applicable to the required height of precision, the small determinand of volume.
However, this reflects the problem that the measurement speed is slow because the main mirror NA is small due to low structural brightness, which results in long exposure time for single scan during measurement, affecting the measurement speed. Meanwhile, the moving speed of the objective table is low, and the objective table is only suitable for laboratory measurement.
Disclosure of Invention
The invention aims to solve the problems and provides a structured light 3D height measuring device and a height measuring method, which realize a larger detection range, higher detection precision and higher detection speed.
The technical scheme adopted by the invention is as follows:
a structured light 3D height measuring device is characterized by comprising a structured light path and a primary mirror light path, wherein an included angle is formed between the structured light path and the primary mirror light path, the intersection position of the structured light path and the primary mirror light path is the position of an object to be measured, the structured light path comprises light sources, a grating and a structured light lens which are sequentially arranged, the grating and the structured light lens form a certain angle with the structured light path, the primary mirror light path comprises a primary mirror and a CMOS camera, the structured light lens is a double telecentric lens with a small view field, and the surface of the object to be measured, the primary face of the structured light lens and the surface of the grating meet the Sanm's law; the grating can move along the inclination direction of the grating, and the primary mirror is a large NA telecentric lens, so that the object to be measured and the CMOS camera are in a conjugate relation.
Further, the moving speed of the grating is matched with the frame rate of the CMOS, and the total moving displacement is the interval of two stripes of the grating.
Further, the light source is an LED light source, and a collimating lens is arranged between the LED light source and the grating.
Further, the length, width and interval of the line stripes on the grating are variable.
Furthermore, the structured light path is two paths and is arranged on two sides of the primary mirror light path.
Further, the primary mirror light path is arranged above the surface of the object to be measured and is vertical to the surface of the object to be measured, and the two structured light paths are arranged symmetrically to the primary mirror light path.
Further, the structured light 3D height measuring device is connected to the controller and the processor, the controller controls focusing of the light path and displacement of the grating, and the processor detects data collected by the CMOS camera to obtain three-dimensional information of the object to be measured.
A structured light 3D height measurement method is characterized by comprising the following steps:
(1) configuring a mounting structure light 3D height measuring device;
(2) the CMOS camera collects data once when the primary mirror moves along the direction of the optical axis of the primary mirror, the data are input into the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the controller controls the primary mirror to move to a corresponding position to complete automatic focusing of the primary mirror;
(3) the structured light lens moves along the direction of an optical axis, the CMOS camera collects data once every time the structured light lens moves, the data are input to the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the controller controls the structured light lens to move to a corresponding position to complete structured light automatic focusing;
(4) after the automatic focusing is finished, the COMS camera collects primary data and inputs the primary data to the processor;
(5) the controller controls the movable grating, the CMOS camera collects data and inputs the data to the processor, and the processor obtains three-dimensional information of the object to be measured according to an algorithm.
Further, in the step (4), the grating is moved for a plurality of times, and the CMOS camera acquires data for a plurality of times and inputs the data to the processor.
Further, for the object with the size larger than the view field, the method also comprises the following steps:
(6) and (5) moving the structured light 3D height measuring device, repeating the step (4), and measuring the height of the other part of the object to be measured until all parts are measured.
The invention has the beneficial effects that:
(1) the method has the advantages that a larger detection range and higher detection precision are realized;
(2) through the telecentric lens, more light reflected by the surface of the object to be detected can enter the main mirror and is imaged in the CMOS, so that the exposure time can be reduced, and the detection speed is improved;
(3) the object to be detected does not need to be displaced, scanning can be completed by moving the grating and the integral device, and the flexibility is strong;
(4) the device can be integrated into detection equipment according to requirements, and is more friendly to industrial 3D detection;
(5) the detection precision is up to 3um, and the detection speed is finished at the fastest speed of 20 ms.
Drawings
FIG. 1 is a schematic diagram of a principle structure of triangulation height measurement;
FIG. 2 is a schematic structural diagram of the height measuring device of the present invention;
FIG. 3 is a schematic flow chart of the height measuring method of the present invention.
The reference numbers in the drawings are respectively:
an LED light source; 2, a collimating lens;
3. a grating; 4, a structured light lens;
5, LED light source; 6, a collimating lens;
7. a grating; a structured light lens;
9. an object to be tested; 10, a primary mirror;
a CMOS camera.
Detailed Description
The following describes in detail a specific embodiment of the structured light 3D height measurement device and the height measurement method according to the present invention with reference to the drawings.
Referring to the attached figure 2, the structured light 3D height measuring device comprises a structured light path and a primary mirror light path, an included angle is formed between the structured light path and the primary mirror light path, and the intersection point position of the structured light path and the primary mirror light path is the position of an object to be measured.
In order to avoid the influence of the structured light shadow in the detection process, a structured light path is also arranged on the other side of the primary mirror light path, the primary mirror light path is arranged above the surface of the object to be detected and is vertical to the surface of the object to be detected, and the two structured light paths are arranged symmetrically to the primary mirror light path.
Structured light path is grating 3 and structured light camera lens 4 that is certain angle including LED light source 1, collimating lens 2, and the structured light path of arranging in proper order, and the primary mirror light path includes primary mirror 10 and CMOS camera 11, and structured light camera lens 4 is the two telecentric mirror lenses of little visual field, and the surperficial of determinand 9, the principal plane of structured light camera lens 4 and grating 3's surface, three satisfy the schem's law. The grating 3 is provided with line stripes with different numbers and different widths, the grating 3 can move along the inclined direction, the moving speed of the grating 3 is matched with the frame rate of the CMOS camera 11, and the total moving displacement is the interval of two stripes of the grating 3. The primary mirror 10 is a large NA telecentric lens, so that the object to be measured 9 and the CMOS camera 6 are in a conjugate relation.
The structured light 3D height measuring device is connected to the controller and the processor, the controller controls light path focusing and grating displacement, and the processor detects data collected by the CMOS camera to obtain three-dimensional information of the object to be measured 9.
The method comprises the following specific steps: the LED light sources 1 and 5 are light sources of the whole system, can emit white light beams and have a certain divergence angle; and the collimating lenses 2 and 6 are used for correcting the divergence angle of the LED light source, and the LED light sources 1 and 5 are positioned at the focal positions of the collimating lenses 2 and 6. The gratings 3 and 7 are used for generating line stripes with different quantities and different widths according to requirements, and meanwhile, the line stripes can move upwards in a stepping mode along the inclination direction of the gratings, so that the line stripes can move.
The structured light lenses 4 and 8 are used for imaging line beams emitted from the grating to the surface of an object to be measured, and are double telecentric lenses, so that the magnification of line stripes at the imaging end is unchanged when the grating is inclined. The object to be detected 9 is an object to be detected, and the surface of the object to be detected, the main surfaces of the structured light lenses 4 and 8 and the surfaces of the gratings 3 and 7 meet the Schlemm's law.
The primary mirror 10 is used for imaging the stripes on the surface of the object 9 to be detected onto the detector, and is a large-NA telecentric lens. The CMOS camera 11 is a system detection device, and its position is in conjugate relation with the object 9 to be measured.
When the device works, light beams emitted by the LED light sources 1 and 5 reach the surfaces of the collimating lenses 2 and 6, the light beams reach the surfaces of the gratings 3 and 7 after being collimated by the lenses, the light beams are reflected by the gratings 3 and 7 to be divided into a plurality of linear light beams, then the linear light beams irradiate an object to be detected 9 through the structured light lenses 4 and 8, bright linear stripes are formed on the surface of the object to be detected, then the light beams reflected by the object to be detected reach the CMOS camera 11 of the detection device through the main mirror 10, the gratings 3 and 7 are moved upwards along the direction of the surface of the gratings, the moving speed is matched with the frame rate of the CMOS camera, and the total moving displacement is. And finally, analyzing the position change of the stripes of the characteristics on the surface of the object to be detected according to the imaging result of the CMOS camera, thereby obtaining the three-dimensional information of the surface.
One of the main parts of the height measuring device is a structured light lens, and in the process of Schlemm imaging of a general lens, due to the fact that the object side intercept and the image side intercept are changed, the magnification ratio is changed, the stripe width magnification ratio of an imaging end is different, and certain interference is caused to imaging precision detection. The structured light lens of the device is a double telecentric lens, so that the width and the length of the stripe are unchanged in the process of structured light stripe imaging, and the device is very friendly to image detection. Meanwhile, the device is provided with two structured light modules which are symmetrically distributed on two sides of the primary mirror, so that the influence of structured light shadows in the detection process is avoided, all three-dimensional detection information of a detected object can be obtained, and the characteristic requirements of the detected object can be more comprehensively detected and analyzed.
Referring to FIG. 3, different detection methods are used according to different analytes. The common part of the system is automatic focusing of the primary mirror and automatic focusing of the structural optical module, and then different detections are carried out on different objects to be detected. Three examples of different analytes are given below.
Example one:
aiming at an object to be measured with the size smaller than a view field, the object to be measured is placed in the middle position under a main lens, light beams emitted by LED light sources 1 and 5 reach the surfaces of collimating lenses 2 and 6, the light beams reach the surfaces of gratings 3 and 7 after being collimated by the collimating lenses, the light beams are reflected by the gratings 3 and 7 to be divided into a plurality of linear light beams, the linear light beams are irradiated onto an object to be measured 9 through structured light lenses 4 and 8, bright linear stripes are formed on the surface of the object to be measured, the light beams reflected by the object to be measured reach a detection device CMOS camera 11 through a main mirror 10, the main mirror moves up and down, data are collected once when the main mirror moves, the data are input into a processor, and the processor outputs signals to a controller according to an automatic focusing algorithm and moves to the corresponding. The structured light lens moves along the direction of the optical axis, data are collected once when the structured light lens moves, the data are input into the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the structured light lens moves to a corresponding position to complete automatic focusing of the structured light module. And then, acquiring data of the object to be detected, moving the grating, acquiring the data, moving for 3 times, acquiring the data for 4 times in total, inputting the data into the processor, and obtaining the detected three-dimensional information according to an algorithm.
Example two:
aiming at a higher object to be measured, the object to be measured is placed in the middle position right below a main lens, light beams emitted by LED light sources 1 and 5 reach the surfaces of collimating lenses 2 and 6, the light beams reach the surfaces of gratings 3 and 7 after being collimated by the lenses, the light beams are reflected by the gratings 3 and 7 to be divided into a plurality of beams of linear light, the linear light irradiates an object to be measured 9 through structured light lenses 4 and 8, bright linear stripes are formed on the surface of the object to be measured, the light reflected by the object to be measured reaches a detection device CMOS camera 11 through a main mirror 10, the main mirror moves up and down, data is collected once when the main mirror moves, the data is input into a processor, the processor outputs signals to a controller according to an automatic focusing algorithm, the processor moves to the corresponding position, and the automatic focusing of the main. The structured light lens moves along the direction of the optical axis, data are collected once when the structured light lens moves, the data are input into the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the structured light lens moves to a corresponding position to complete automatic focusing of the structured light module. And then data acquisition of the object to be detected is carried out, the grating is moved, data acquisition is carried out for 3 times, data are acquired for 4 times in total, data acquisition of the bottom is completed, the data are input into the processor, the processor outputs signals to the controller, the whole detection device moves upwards integrally, data acquisition of the second height position is carried out, the grating is moved, data acquisition is carried out for 3 times in total, data acquisition of the second height position is completed, the processes are repeated, data acquisition of other height positions is completed, and the processor obtains detected three-dimensional information according to an algorithm.
Example three:
aiming at a longer object to be measured, the left end of the object is placed in the middle position right below a main lens, light beams emitted by LED light sources 1 and 5 reach the surfaces of collimating lenses 2 and 6, the light beams reach the surfaces of gratings 3 and 7 after being collimated by the lenses, the light beams are reflected by the gratings 3 and 7 to be divided into a plurality of beams of linear light, the linear light irradiates an object to be measured 9 through structured light lenses 4 and 8, bright linear stripes are formed on the surface of the object to be measured, the light reflected by the object to be measured reaches a detection device CMOS camera 11 through a main mirror 10, the main mirror moves up and down, data are collected once when the main mirror moves, the data are input into a processor, the processor outputs signals to a controller according to an automatic focusing algorithm, the signal is moved to the corresponding position, and the. The structured light lens moves along the direction of the optical axis, data are collected once when the structured light lens moves, the data are input into the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the structured light lens moves to a corresponding position to complete automatic focusing of the structured light module. And then, data acquisition of the object to be detected is carried out, the grating is moved, data is acquired, the data is moved for 3 times, data is acquired for 4 times in total, the data is input into a processor, data acquisition of a first view field is completed, the data is input into the processor, the processor outputs a signal to a controller, the whole detection device moves rightwards, data acquisition of a second view field is carried out, the grating is moved, data is acquired for 3 times, data is acquired for 4 times in total, data acquisition of the second view field is completed, the above processes are repeated, data acquisition of other view fields is completed, and the processor obtains detected three-dimensional information according to an algorithm.
The number of grating movements and data acquisitions in the three examples may be modified according to the detection requirements.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A structured light 3D height finding device, its characterized in that: the structured light path and the primary mirror light path form an included angle, the intersection point position of the structured light path and the primary mirror light path is the position of an object to be detected, the structured light path comprises light sources, a grating and a structured light lens which are sequentially arranged and form a certain angle with the structured light path, the primary mirror light path comprises a primary mirror and a CMOS camera, the structured light lens is a double telecentric lens with a small view field, and the surface of the object to be detected, the main surface of the structured light lens and the surface of the grating meet the Samm's law; the grating can move along the inclination direction of the grating, and the primary mirror is a large NA telecentric lens, so that the object to be measured and the CMOS camera are in a conjugate relation.
2. The structured light 3D altimeter of claim 1, wherein: the moving speed of the grating is matched with the frame rate of the CMOS, and the total moving displacement is the interval of two stripes of the grating.
3. The structured light 3D altimeter of claim 1, wherein: the light source is an LED light source, and a collimating lens is arranged between the LED light source and the grating.
4. The structured light 3D altimeter of claim 1, wherein: the length, width and interval of the line stripes on the grating are variable.
5. The structured light 3D altimeter of any one of claims 1 to 4, wherein: the structured light path is divided into two paths and is arranged on two sides of the primary mirror light path.
6. The structured light 3D altimeter of claim 5, wherein: the primary mirror light path is arranged above the surface of the object to be detected and is vertical to the surface of the object to be detected, and the two structured light paths are arranged symmetrically to the primary mirror light path.
7. The structured light 3D altimeter of any one of claims 1 to 4, wherein: the structured light 3D height measuring device is connected to the controller and the processor, the controller controls light path focusing and grating displacement, and the processor detects data collected by the CMOS camera to obtain three-dimensional information of an object to be measured.
8. A structured light 3D height measurement method using the structured light 3D height measurement device according to any one of claims 1 to 7, wherein: the method comprises the following steps:
(1) configuring a mounting structure light 3D height measuring device;
(2) the CMOS camera collects data once when the primary mirror moves along the direction of the optical axis of the primary mirror, the data are input into the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the controller controls the primary mirror to move to a corresponding position to complete automatic focusing of the primary mirror;
(3) the structured light lens moves along the direction of an optical axis, the CMOS camera collects data once every time the structured light lens moves, the data are input to the processor, the processor outputs signals to the controller according to an automatic focusing algorithm, and the controller controls the structured light lens to move to a corresponding position to complete structured light automatic focusing;
(4) after the automatic focusing is finished, the COMS camera collects primary data and inputs the primary data to the processor;
(5) the controller controls the movable grating, the CMOS camera collects data and inputs the data to the processor, and the processor obtains three-dimensional information of the object to be measured according to an algorithm.
9. The structured light 3D altimetry method of claim 8, wherein: in the step (5), the grating is moved for multiple times, and the CMOS camera collects data for multiple times and inputs the data to the processor.
10. The structured light 3D altimetry method of claim 8, wherein: for the object with the size larger than the view field, the method also comprises the following steps:
(6) and (5) moving the structured light 3D height measuring device, repeating the step (5), and measuring the height of the other part of the object to be measured until all parts are measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110148048.7A CN112461141A (en) | 2021-02-03 | 2021-02-03 | Structured light 3D height measuring device and height measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110148048.7A CN112461141A (en) | 2021-02-03 | 2021-02-03 | Structured light 3D height measuring device and height measuring method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112461141A true CN112461141A (en) | 2021-03-09 |
Family
ID=74802394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110148048.7A Pending CN112461141A (en) | 2021-02-03 | 2021-02-03 | Structured light 3D height measuring device and height measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112461141A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113483692A (en) * | 2021-06-23 | 2021-10-08 | 苏州中科全象智能科技有限公司 | Hole detection optical system |
| CN114543706A (en) * | 2022-02-28 | 2022-05-27 | 徐亦新 | Differential light line-cutting and profile-scanning technique based on incoherent light source multi-angle projection |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090190139A1 (en) * | 2008-01-25 | 2009-07-30 | Fisher Lance K | Multi-source sensor for three-dimensional imaging using phased structured light |
| CN101592476A (en) * | 2006-01-26 | 2009-12-02 | 株式会社高永科技 | Method for measuring three-dimensional shape |
| CN102200431A (en) * | 2010-03-26 | 2011-09-28 | 德律科技股份有限公司 | System for measuring stereo object |
| CN202126246U (en) * | 2011-05-17 | 2012-01-25 | 东莞市神州视觉科技有限公司 | Fast three-dimensional measuring system for patch printing solder pastes |
| CN202256888U (en) * | 2011-10-19 | 2012-05-30 | 沈阳同联集团高新技术有限公司 | Light projection device of microcosmic fringe structure |
| CN103047944A (en) * | 2013-01-22 | 2013-04-17 | 廖怀宝 | Three-dimensional object measuring method and device |
| CN103376071A (en) * | 2012-04-20 | 2013-10-30 | 德律科技股份有限公司 | Three-dimensional measuring system and method |
-
2021
- 2021-02-03 CN CN202110148048.7A patent/CN112461141A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101592476A (en) * | 2006-01-26 | 2009-12-02 | 株式会社高永科技 | Method for measuring three-dimensional shape |
| US20090190139A1 (en) * | 2008-01-25 | 2009-07-30 | Fisher Lance K | Multi-source sensor for three-dimensional imaging using phased structured light |
| CN102200431A (en) * | 2010-03-26 | 2011-09-28 | 德律科技股份有限公司 | System for measuring stereo object |
| CN202126246U (en) * | 2011-05-17 | 2012-01-25 | 东莞市神州视觉科技有限公司 | Fast three-dimensional measuring system for patch printing solder pastes |
| CN202256888U (en) * | 2011-10-19 | 2012-05-30 | 沈阳同联集团高新技术有限公司 | Light projection device of microcosmic fringe structure |
| CN103376071A (en) * | 2012-04-20 | 2013-10-30 | 德律科技股份有限公司 | Three-dimensional measuring system and method |
| CN103047944A (en) * | 2013-01-22 | 2013-04-17 | 廖怀宝 | Three-dimensional object measuring method and device |
Non-Patent Citations (2)
| Title |
|---|
| 史耀群 等: "一种基于结构光条纹投影的微小物体测量系统", 《应用光学》 * |
| 韦晓孝 等: "基于三维缺陷检测的双光路双远心光学系统设计", 《光学技术》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113483692A (en) * | 2021-06-23 | 2021-10-08 | 苏州中科全象智能科技有限公司 | Hole detection optical system |
| CN113483692B (en) * | 2021-06-23 | 2023-08-29 | 苏州中科全象智能科技有限公司 | Hole detection optical system |
| CN114543706A (en) * | 2022-02-28 | 2022-05-27 | 徐亦新 | Differential light line-cutting and profile-scanning technique based on incoherent light source multi-angle projection |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7488924B2 (en) | Method for determining the focal position during imaging of a sample using an inclined position receiving device | |
| US9774765B2 (en) | Chromatic aberration correction in imaging system including variable focal length lens | |
| JP6469368B2 (en) | Machine vision inspection system and method for performing high speed focused height measurement operation | |
| KR101283858B1 (en) | Shape measuring device, observation device, and image processing method | |
| CN104126114A (en) | High speed autofocus system | |
| CN112461141A (en) | Structured light 3D height measuring device and height measuring method | |
| CN104515469A (en) | Light microscope and microscopy method for examining a microscopic specimen | |
| US10254526B2 (en) | Microscope | |
| JPH11211439A (en) | Surface form measuring device | |
| CN106933071A (en) | Focusing leveling device and method | |
| US10731971B1 (en) | Method of measuring 3D profile | |
| KR101875467B1 (en) | 3-dimensional shape measurment apparatus and method thereof | |
| CN110057839A (en) | Focusing control apparatus and method in a kind of Optical silicon wafer detection system | |
| CN117368105A (en) | Defect detection device and method | |
| JP2001074422A (en) | Solid shape detector, solder containing inspection device and method therefor | |
| KR101745797B1 (en) | Optical micorscopy device | |
| US11175129B2 (en) | Sample shape measuring method and sample shape measuring apparatus | |
| KR100950590B1 (en) | Moire measurement method using concentrate light | |
| US10007193B2 (en) | Projection exposure apparatus and method for controlling a projection exposure apparatus | |
| Van Wolputte et al. | Embedded line scan image sensors: The low cost alternative for high speed imaging | |
| JP2015197445A (en) | Measurement mark system for calibration of machine | |
| CN210346907U (en) | Light beam measuring device | |
| CN115128762B (en) | Automatic focusing measurement method based on light intensity gradient number | |
| TWI783228B (en) | Measurement Systems and Methods | |
| JP2001280925A (en) | Instrument for measuring three-dimensional shape |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210309 |