KR101745797B1

KR101745797B1 - Optical micorscopy device

Info

Publication number: KR101745797B1
Application number: KR1020150162062A
Authority: KR
Inventors: 권대갑; 이동령; 도덕호; 유홍기; 류지흔; 정형준
Original assignee: 한국과학기술원; 한양대학교 산학협력단
Priority date: 2015-11-18
Filing date: 2015-11-18
Publication date: 2017-06-09
Also published as: KR20170058179A

Abstract

An optical microscope apparatus according to an embodiment includes a laser light source for emitting light, a micro-reflective indicator formed on one side of the laser light source to reflect the light, an objective lens for scanning the specimen with light reflected from the micro- And a photodetector for detecting light reflected from the specimen. Here, the micro-reflective indicator includes a plurality of micro-mirrors provided in the scanning area, and the optical microscope apparatus can measure the two-dimensional image of the sample by moving the scanning area with time by some micro-mirrors.

Description

[0001] OPTICAL MICORSCOPY DEVICE [0002]

The following embodiments relate to an optical microscope apparatus.

The optical microscope was a point-scanning scanning method, and it was possible to obtain several pieces of two-dimensional intercepted images for three-dimensional scanning. Therefore, the resolution is high while the measurement speed is low.

Nipko disc optical microscope capable of multiple pinhole scanning is complicated in optical system structure, pinhole size and interval are fixed, and optical efficiency is low.

In addition, there is an optical microscope that uses a digital micro-reflector to quickly and easily change the size and spacing of pinholes programmatically. However, high-speed two-dimensional scanning is possible, but this technique can also be achieved by obtaining a plurality of two-dimensional images for three-dimensional image restoration.

Differential confocal microscopy and chromatic confocal microscopy can be used to calculate three-dimensional height information without axial scanning. This method obtains two-dimensional images by two-dimensional scanning, and height information is obtained by calculating the height conversion table inherent to each system. Therefore, the three-dimensional image can be restored by two-dimensional scanning. However, the two-dimensional scanning speed is slower than the multi-pinhole scanning method, and the structure is complicated.

Korean Laid-Open Patent Application No. 2009-0071499 (published on July 01, 2009) discloses a confocal microscope.

An object according to an exemplary embodiment is to freely change the size and spacing of pinholes through a program by using a micro-reflective indicator as a multi-point light source and a multi-pin hole.

Also, an object according to an exemplary embodiment is to measure a two-dimensional image of the same area of a specimen using an optical microscope apparatus with various axial resolutions. Thus, two dimensional images with different axial resolutions are obtained for the same area of the specimen, and the three-dimensional height information of the specimen is calculated through this to quickly recover the three-dimensional image of the specimen.

A micro-reflective indicator used in an optical microscope according to one embodiment includes a plurality of micro-mirrors provided in a scanning area. Wherein a first group of micro mirrors composed of some of the plurality of micro mirrors is directed to a specimen and a second group of micro mirrors composed of remaining micro mirrors is oriented in a different direction from the first group of micro mirrors, The mirror group can move the scanning area according to time.

In addition, the micro-reflective indicator can change the axial resolution by adjusting the size of the first micro-mirror group by changing the number of micro-mirrors constituting the first micro-mirror group.

The scanning area of the micro-reflector may be divided into a plurality of areas.

An optical microscope apparatus according to an embodiment includes a laser light source for emitting light, a micro-reflective indicator formed on one side of the laser light source to reflect the light, an objective lens for scanning the specimen with light reflected from the micro- And a photodetector for detecting light reflected from the specimen.

Here, the micro-reflective indicator includes a plurality of micro-mirrors provided in the scanning area, and the optical microscope apparatus can measure the two-dimensional image of the sample by moving the scanning area with time by some micro-mirrors.

The first micro-mirror group consisting of the partial micro-mirrors of the scanning area is directed to the specimen, and the second micro-mirror group composed of the remaining micro-mirrors is oriented differently from the first micro-mirror group.

Further, the optical microscope apparatus measures the two-dimensional image of the same area of the specimen by changing the axial resolution by adjusting the size of the first micro mirror group by changing the number of micro mirrors constituting the first micro mirror group can do.

The optical microscope apparatus is characterized in that the first micro-mirror group before the change in size measures the first two-dimensional image of the specimen by moving the scanning region, and the first micro-mirror group after the change in size moves the scanning region, Dimensional image of the specimen can be reconstructed by measuring a second two-dimensional image of an axial resolution different from the image and calculating height information through the first two-dimensional image and the second two-dimensional image.

The optical microscope apparatus may further include a blocking member positioned below the micro-reflective display and blocking light reflected from the second micro-mirror group, wherein light reflected from the first micro- Lt; / RTI >

The optical microscope apparatus may further include a beam splitter positioned between the laser light source and the micro-reflection display and transmitting the light emitted from the laser light source.

The beam splitter can deflect the light reflected from the specimen and directed back to the photodetector.

The optical microscope apparatus further includes a beam expander positioned between the laser light source and the beam splitter and capable of passing the light emitted from the laser light source and enlarging the size of the light so as to emit the entire area of the micro- .

The optical microscope apparatus includes a first tube lens positioned between the micro-reflective display and the objective lens and capable of deforming the light reflected from the first micro-mirror group in parallel, and a second tube lens positioned between the beam- And a second tube lens capable of parallelly deforming the light reflected from the beam splitter.

The optical microscope apparatus may further include an imaging lens positioned between the second tube lens and the photodetector and focusing the light passing through the second tube lens to the photodetector.

The micro-reflector according to one embodiment is used as a multi-point light source and a multi-pin hole, so that the size and spacing of the pin holes can be freely changed through the program.

In addition, the optical microscope apparatus according to one embodiment can measure two-dimensional images of the same region of the specimen in various axial resolutions. Thus, two-dimensional images with different axial resolutions for the same area of the specimen can be acquired, and the three-dimensional height information of the specimen can be calculated to quickly recover the three-dimensional image of the specimen.

1 shows an optical microscope apparatus including a micro-reflective indicator.
2 shows a micro-reflective indicator.
3 shows the principle of scanning a two-dimensional image using a micro-reflective indicator.
Figure 4 shows the principle that the size of the first micro-mirror group of the micro-reflector can be changed.
FIG. 5 shows a principle of scanning the same area of a specimen into two kinds of first micro-mirror groups of different sizes and a method of calculating the time required to acquire a three-dimensional image.
6 is a flowchart of a process of acquiring a three-dimensional image of a specimen.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The following description is one of many aspects of the embodiments and the following description forms part of a detailed description of the embodiments.

In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.

In addition, terms and words used in the present specification and claims should not be construed in a conventional or dictionary sense, and the inventor can properly define the concept of a term to describe its invention in the best way possible It should be construed as meaning and concept consistent with the technical idea of the optical microscope apparatus according to one embodiment.

Therefore, the embodiments described in this specification and the configurations shown in the drawings are only the most preferred embodiments of the optical microscope apparatus according to one embodiment, and not all of the technical ideas of the optical microscope apparatus according to one embodiment , It is to be understood that various equivalents and modifications may be substituted for those at the time of the present application.

Fig. 1 shows an optical microscope apparatus including a micro-reflection indicator, and Fig. 2 shows a micro-reflection indicator. FIG. 3 shows a principle of scanning a two-dimensional image using a micro-reflection indicator, and FIG. 4 shows a principle of changing the size of a first micro-mirror group of a micro-reflection indicator. 5 shows the principle of scanning the same area of the specimen W into two types of first micro-mirror groups of different sizes, and a method of calculating the time required to acquire a three-dimensional image. 6 is a flowchart of a process of acquiring a three-dimensional image of the specimen W. FIG.

1, an optical microscope 10 according to an exemplary embodiment includes a laser light source 100 that emits light, a micro-reflective indicator 200 that is formed on one side of the laser light source 100 and reflects light, An objective lens 300 for scanning the specimen W with light reflected from the micro-reflective indicator 200 and a photodetector 400 for detecting the light reflected from the specimen W

Wherein the micro-reflective indicator (200) comprises a plurality of micro-mirrors provided in the scanning area (A). The first micro mirror group 210 composed of some of the plurality of micro mirror mirrors is directed to the specimen W and the second micro mirror group 220 composed of the remaining micro mirrors is disposed in the first micro mirror group 210, And the first micro mirror group 210 can move the scanning area A with time.

In addition, the scanning area A of the micro-reflective display 200 may be divided into a plurality of areas.

In addition, the micro-reflective indicator 200 can change the axial resolution by adjusting the size of the first micro-mirror group 220 by changing the number of micro-mirrors constituting the first micro-mirror group 210. Thereby, the optical microscope apparatus 10 can measure the two-dimensional image of the same area of the specimen W while changing the axial resolution.

The optical microscope apparatus 10 measures the first two-dimensional image of the specimen W while the first small mirror group 210 before the size change moves in the scanning region A and detects the first two- Can measure the second two-dimensional image of the axial resolution different from the first two-dimensional image while moving in the scanning area A. The height information can be calculated through the first two-dimensional image and the second two-dimensional image, and the three-dimensional image of the specimen W can be restored.

The optical microscope apparatus 10 may further include a blocking member 500 positioned below the micro-reflective indicator 200 to block light reflected from the second micro-mirror group 220, The light reflected by the objective lens 210 may be directed to the objective lens 300.

The optical microscope 10 further includes a beam splitter 600 positioned between the laser light source 100 and the micro-reflective indicator 200 and transmitting the light emitted from the laser light source 100 .

The beam splitter 600 can deflect the returning light of the specimen W toward the photodetector 400.

The optical microscope apparatus 10 is disposed between the laser light source 100 and the beam splitter 600 and allows the light emitted from the laser light source 100 to pass therethrough so that the entire area of the micro- And a beam expander 700 capable of enlarging the size.

The optical microscope apparatus 10 includes a first tube lens 810 positioned between the micro-reflective indicator 200 and the objective lens 300 and capable of deforming parallel light reflected from the first micro-mirror group 210, And a second tube lens 820 positioned between the beam splitter 600 and the photodetector 400 and capable of deforming the light reflected by the beam splitter 600 in parallel.

The optical microscope 10 further includes an imaging lens 900 positioned between the second tube lens 820 and the photodetector 400 to condense the light passing through the second tube lens 820 onto the photodetector 400. [ ).

Hereinafter, the operation principle of the optical microscope 10 will be described. A laser light source 100 is used as a light source. The light emitted from the laser light source 100 passes through the beam expander 700 and is enlarged to a size that can be projected to the entire area of the micro-reflective display 200. The enlarged light passes through the beam splitter 600 to illuminate the micro-reflective indicator 200. The micro-reflective indicator 200 includes a plurality of micro-mirrors and includes a first micro-mirror group 210 in which reflected light is tilted toward the sample W among a plurality of micro-micro-mirrors, and a second micro- There is a mirror group 220. The light reflected on the first micro mirror group 210 is very small as reflected light, so that it spreads like light emitted from a point light source. This light becomes parallel light by the first tube lens 810. This parallel light is condensed on the specimen W by the objective lens 300. The light reflected from the specimen W passes through an opposite path and only the light reflected on the first micro mirror group 210 serving as a pinhole is directed to the beam splitter 600 and the light is reflected by the beam splitter 600 To the photodetector (400). The light reflected by the beam splitter 600 is collimated by the second tube lens 820 and is condensed by the imaging lens 900 onto the optical detector 400. The light reflected from the second micro mirror group 820 is directed to the blocking member 500 and is blocked by the blocking member 500.

That is, the optical microscope apparatus 10 according to the embodiment uses the point scanning method to measure the surface shape of the three-dimensional specimen W with high resolution, quickly scans the two-dimensional image at high speed, The plane image and the height information of the image can be reconstructed into a three-dimensional image.

Hereinafter, the principle of the micro-reflective indicator 200 acting as a multiple pinhole will be described with reference to FIG. 2, so that the optical microscope apparatus 10 including the micro- Image and height information and reconstructs it as a three-dimensional image.

The optical microscope apparatus 10 has various axial resolutions depending on the size of the pinhole. To utilize this characteristic, the micro-reflective indicator 200 according to an embodiment includes a plurality of micro-mirrors, The light reflected from the first micro-mirror group 210 and the second micro-mirror group 220 of the two states having different inclined angles has a different path. Most of the micro-mirrors are included in the second micro-mirror group 220, and the light reflected from the second micro-mirror group 220 is not directed to the specimen W. [ On the other hand, the first micro-mirror group 210 composed of some micro-mirrors is spaced apart from several predetermined units. The light reflected on the first micro mirror group 210 is condensed on the specimen W toward the specimen W and the light is reflected and detected by the photodetector 400. Thus, such first micro-mirror group 210 can serve as multiple pin holes

According to the above-described principle, the micro-reflective indicator 200 can be used as a multi-point light source and a multi-pin hole. A pinhole of various sizes can be realized by changing the size of the first micro-mirror group of the micro-reflector 200 through the program. Accordingly, the multiple pinholes implemented by the micro-reflective indicator 200 can be programmed into a variety of sizes that are quick, easy, and easy to change. In addition, since scanning is performed at several points at the same time, the two-dimensional scanning speed is very fast. By changing the size of the first micro mirror group 210 by a program without changing the optical system or moving the specimen W, An effect of obtaining an image of the same area can be obtained.

Thus, by using two first micro-mirror groups 210 of different sizes, a two-dimensional image of the specimen W, such as two pinholes of different sizes, can be obtained very quickly and sequentially. The two acquired images have different axial resolutions. Two types of axial resolution are observed with different light intensities for height off the focal plane. Using this property, the height information of the specimen (W) can be represented as a look-up table. Therefore, the two-dimensional information is obtained by the intensity of the light obtained by the two-dimensional scanning, and the remaining height information is obtained by calculating the look-up table of the height information. Thus, a three-dimensional image of the specimen W can be obtained.

The light reflected from the first micro mirror group 210 can be detected by the photodetector 400. The intensity of the light detected by the photodetector 400 may be determined based on the size of the first micro-mirror group 210. For example, the larger the size of the first micro mirror group 210, the greater the intensity of light detected by the photodetector 400.

The photodetector 400 can detect the intensity of light. The photodetector 400 may detect the intensity of light reflected from the specimen and arriving via the first micro-mirror group 210. The intensity of the light detected by the photodetector 400 may vary depending on the position where the light is generated. The position at which the reflected light is generated may be a position on the surface of the specimen W irradiated with the light emitted from the laser light source 100 as the position of the surface of the specimen W.

For example, the intensity of light detected by the photodetector 400 may be strongest when the position at which the reflected light is generated is at a position on the focal plane on which the focus of the objective lens 300 exists. The photodetector 400 can detect intensities of the different reflected light from the specimen W as the specimen W and / or the objective lens 300 move in the vertical direction of the focal plane. The optical microscope apparatus 10 includes a light source (not shown)

Information of the heights of the specimen W can be detected based on the intensities of the reflected light which are different from each other.

The intensities of the reflected light from different positions on the surface of the specimen 160 may be different from each other. That is to say, by substituting the intensity of the reflected light from different positions on the surface of the specimen W detected from the photodetector 400 into the response curve, the focal point of the objective lens 300 and the position where the reflected light is generated The distance can be detected. The distance between the focal point of the detected objective lens 300 and the position at which the reflected light is generated may be the height information about the position on the surface of the specimen W. [ The optical microscope apparatus 10 can detect intensities of reflected light from all positions on the surface of the specimen W by scanning all positions on the surface of the specimen W. [ The optical microscope apparatus 10 can detect the information of the heights of all the positions on the surface of the specimen W by substituting the intensity of the obtained reflected light into the response curve and obtain the three- Can be generated.

Referring to Fig. 3, the principle of the two-dimensional image scanning by the micro-reflective indicator 200 will be described. The scanning area A of the micro-reflective indicator 200 may be one, or may be divided into a plurality of areas. The first group of micro mirrors 210 serving as pinholes are arranged apart at regular intervals and the second group of micro mirrors 220 is disposed therebetween to form a single group of first micro mirrors 210, A plurality of regions made up of two micro mirror groups 220 can be partitioned.

From the plurality of micro-mirrors constituting the second micro-mirror group 220, the micro-mirrors adjacent to the former first micro-mirror group 210 are inclined so that their angles are sequentially directed toward the specimen W, (210). At the same time, the previous first micro-mirror group 210 is inclined to fall into the second micro-mirror group 220 such that it does not face the specimen W such as the second micro-mirror group 220. Through such a principle, it is possible to make the effect that the pinhole moves in the two-dimensional plane by moving the scanning area A by the first micro-mirror group 210. Thus, the first micro mirror group 210 can scan all the areas to obtain a two-dimensional image.

Referring to Fig. 4, the principle of changing the size of the first micro mirror group 210 of the micro mirror indicator 200 will be described. The size of the first micro mirror group 210 can be adjusted by changing the number of micro mirrors constituting the first micro mirror group 210 through the program.

In other words, by setting the tilted angles of the m and n micro mirrors constituting the first micro mirror group 210 and the remaining micro mirrors constituting the second micro mirror group 220 differently, mxn) x (one micro mirror size). Accordingly, the size of the pinhole can be easily changed by adjusting the number of micro mirrors constituting the first micro mirror group 210. [

Referring to FIG. 5, a principle of scanning the same area of the specimen W into two kinds of first micro-mirror groups having different sizes and a method of calculating the time required for obtaining a three-dimensional image will be described.

As shown in FIG. 5 (a), a first pinhole group 210 composed of a small number of minute mirrors may be formed to realize a small pinhole. The first two-dimensional image of the specimen W can be obtained by scanning the scanning area A for t1 seconds through the small first micro-mirror group 210 as described above.

Thereafter, a large first micro-mirror group 210 composed of a larger number of micro-mirrors than the first small micro-mirror group 210 formed to obtain the first two-dimensional image may be formed to realize a large pin-hole. Through the large first micro-mirror group 210, the scanning area A can be scanned for t 2 seconds to obtain a second two-dimensional image having an axial resolution different from the first two-dimensional image obtained previously. Thus, the height information of the surface of the specimen W can be calculated using the two two-dimensional images, and the three-dimensional image of the specimen W can be restored through the two-dimensional images.

Therefore, the time taken to obtain the three-dimensional image of the specimen W becomes t1 + t2. By repeating this process repeatedly, three-dimensional images of several specimens (W) can be obtained repeatedly.

A process of acquiring a three-dimensional image of the specimen W will be described with reference to FIG. And obtains a first two-dimensional image having a high axial resolution of the specimen W through the scanning of the small pinhole implemented with the small first micro-mirror group 210. Thereafter, through the scanning of the large pinholes embodied in the large second micro-mirror group 210, a second two-dimensional image with low axial resolution of the specimen W is obtained. Dimensional image of the specimen W with the two two-dimensional images. Then, the high-speed three-dimensional image of the specimen W can be successively obtained by repeating this process.

A two-dimensional image of the specimen W can be obtained quickly through the optical microscope apparatus 10 including the micro-reflective indicator 200 described above. Also, by controlling the size and the interval of the first group of micro mirrors through the program, pinholes having various sizes and intervals can be realized. This makes it possible to measure the size and area of the various measurement areas without changing the system. The three-dimensional shape of the specimen W can be imaged very quickly by introducing the technique of obtaining the height information of the surface of the specimen W with two two-dimensional images of the same area of the specimen W.

Although the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. The present invention is not limited to the above-described embodiments, and various modifications and changes may be made thereto by those skilled in the art to which the present invention belongs. Therefore, the spirit of the present invention should not be construed as being limited to the above-described embodiments, and all of the equivalents or equivalents of the claims, as well as the following claims, are included in the scope of the present invention.

10: Optical microscope device
100: laser light source
200: Smile reflection indicator
210: 1st smile mirror group
220: 2nd Smile Mirror Group
300: objective lens
400: photodetector
500: blocking member
600: Beam splitter
700: beam expander
810: first tube lens
820: second tube lens
900: imaging lens
A: Scanning area
W: The Psalms

Claims

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A laser light source emitting light;
A micro-reflective display formed on one side of the laser light source and reflecting the light;
An objective lens for scanning the specimen with light reflected from the micro-reflective display;
A photodetector for detecting light reflected from the specimen;
Lt; / RTI >
Wherein the micro-reflective indicator comprises a plurality of micro-mirrors provided in the scanning area,
Wherein a first group of small mirrors made up of some of the small mirrors of the scanning area is directed to the specimen and a second group of small mirrors composed of the remaining small mirrors is oriented in a direction different from the direction of the first group of small mirrors,
Dimensional image of the same area of the specimen by changing the axial resolution by adjusting the size of the first micro mirror group by changing the number of micro mirrors constituting the first micro mirror group,
The first micro-mirror group before the size change moves the scanning area with time to measure the first two-dimensional image of the specimen,
The first micro-mirror group after the size change moves the scanning area with time to measure a second two-dimensional image of the axial resolution different from the first two-dimensional image,
Wherein the height information is calculated through the first two-dimensional image and the second two-dimensional image to restore a three-dimensional image of the specimen.

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5. The method of claim 4,
A blocking member positioned below the micro-reflective indicator and blocking light reflected from the second micro-mirror group;
Further comprising:
Wherein the light reflected from the first micro mirror group is directed to the objective lens.

5. The method of claim 4,
A beam splitter positioned between the laser light source and the micro-reflective indicator for transmitting light emitted from the laser light source;
Further comprising:
Wherein the beam splitter is capable of deflecting the returning light of the specimen back to the photodetector.

9. The method of claim 8,
A beam expander positioned between the laser light source and the beam splitter and capable of passing light emitted from the laser light source and enlarging the size of the light so as to illuminate the entire area of the micro-reflective display;
Further comprising an optical microscope.

9. The method of claim 8,
A first tube lens positioned between the micro-reflective display and the objective lens, the first tube lens capable of deforming parallel light reflected from the first micro-mirror group; And
A second tube lens positioned between the beam splitter and the photodetector and capable of deforming the light reflected by the beam splitter in parallel;
Further comprising an optical microscope.

11. The method of claim 10,
An imaging lens positioned between the second tube lens and the photodetector and focusing the light passing through the second tube lens to the photodetector;
Further comprising an optical microscope.