KR20180129598A - Concentration management system for chemical solution, calculation method for concentration management charge and concentration management charge calculation system, and chemical solution regeneration system, calculation method for chemical solution regeneration processing charge and regeneration processing charge calculation system - Google Patents

Abstract

The present invention relates to a concentration control device used to control the concentration of a chemical solution provided for manufacturing semiconductors and liquid crystal display boards, a chemical solution recycling device for processing and recycling the chemical solution, a method for calculating charges in accordance with the provided service by using the devices, and a system for the same. The concentration control device (1) includes integrated flow meters (51 to 53) arranged on the pipes for supplying a replenishing solution. The chemical solution recycling device has an integrated flow meter (54) arranged on pipes for supplying the recycled chemical solution. The charges for the chemical solution concentration management and recycling processes can be calculated based on integrated flow measured by integrated flow meters within a predetermined period. Integrated flow meters (221 to 225) have a communication function to be connected to a network (201). The integrated flow is received and stored in a server system (202) through the network. The server system (202) includes a computation unit (205) for computing the charges based on the integrated flow of each of the integrated flow meters within the predetermined period.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a concentration control apparatus, a concentration control fee calculating method, a concentration control fee calculating system, a chemical liquid regeneration apparatus, a calculation method of a chemical fluid regeneration treatment charge, CONCENTRATION MANAGEMENT CHARGE AND CONCENTRATION MANAGEMENT CHARGE CALCULATION SYSTEM, AND CHEMICAL SOLUTION REGENERATION SYSTEM, CALCULATION METHOD FOR CHEMICAL SOLUTION REGENERATION PROCESSING CHARGE AND REGENERATION PROCESSING CHARGE CALCULATION SYSTEM}

The present invention relates to a concentration control apparatus for a chemical liquid which controls the concentration of various chemical liquids (chemical liquids) which are repeatedly used in a semiconductor or liquid crystal display substrate manufacturing process, and a service for managing the concentration of a chemical liquid provided using the concentration control apparatus The present invention relates to a method for calculating a concentration control charge of a chemical solution and a concentration management charge calculation system. The present invention relates to a chemical liquid regeneration apparatus for regenerating various chemical liquids used in a semiconductor or liquid crystal display substrate manufacturing process, a method for calculating a regeneration treatment charge of a chemical liquid in regeneration of a chemical liquid provided using a chemical liquid regeneration apparatus, And a processing fee calculation system.

In the manufacturing process of a semiconductor or a liquid crystal display substrate, various chemical solutions such as a developing solution, an etching solution, a peeling solution, an antistatic agent, a cleaning solution (hereinafter, these chemical solutions are collectively referred to as " ) Are used. The chemical liquid is used and maintained at a predetermined concentration as necessary so that its performance can be maximized. In addition, the used chemical liquid may be used by being regenerated reusably.

Conventionally, a person who uses a chemical liquid (hereinafter sometimes referred to as a " chemical liquid user ") has purchased and used a chemical liquid concentration control device to maintain the chemical liquid concentration. In addition, the user of the medicament liquid has purchased and used a medicinal liquid regeneration processing apparatus in order to regenerate the used medicinal liquid in a reusable manner.

For example, the following patent document is disclosed as a concentration control apparatus for a chemical liquid. Patent Document 1 discloses a developer concentration management apparatus for managing the alkali concentration and the dissolved resin concentration of a developer. Patent Document 2 discloses an etchant management apparatus for managing the acid concentration and the dissolved indium concentration. As a regeneration treatment apparatus for a chemical solution, Patent Document 3 discloses a regeneration treatment apparatus for a regeneration solution for regenerating a development waste solution (microfluid) by microfiltration.

Japanese Patent No. 2561578 Japanese Patent No. 2747647 Japanese Patent Application Laid-Open No. 2005-175118

However, in the case where a concentration control apparatus or a chemical liquid regeneration apparatus is purchased and used as in the prior art, it has been necessary for a chemical liquid user to purchase a concentration control apparatus and a chemical liquid regeneration apparatus, and to operate and maintain them. Further, in the conventional mode, there is no opportunity to obtain a price of these apparatuses only at the point of sale of the apparatus, even in the case of a person who manufactures and sells the concentration control apparatus or the chemical liquid regeneration apparatus (hereinafter, also referred to as "apparatus seller").

For this reason, the drug user has to pay a large amount of cost for temporarily purchasing the concentration control device and the drug solution regeneration device, and a lot of troubles and burdens due to the operation and maintenance after purchase. In addition, the device seller has not posed the problem that it is difficult to raise a sufficient profit unless a user of a drug solution desired to purchase the device is searched for and the device is sold in a limited market.

The present invention has been made in view of the above problems. The inventor has proposed to provide a function of managing the concentration of the chemical liquid by using the concentration control apparatus and a function of regenerating the chemical liquid after use by using the chemical liquid regeneration apparatus. That is, the present invention provides a method for managing the concentration of a chemical solution used in a new business model of the proposal, in which a drug user can use a drug solution without imposing the burden as described above, And an object of the present invention is to provide a device and a medicinal liquid regeneration device, and a fee calculation method and a fee calculation system for calculating a fee for providing a service for concentration control or regeneration treatment of a chemical liquid.

In order to achieve the above object, the chemical concentration control apparatus of the present invention is a chemical concentration control apparatus which is connected to piping to a facility for repeatedly using a chemical solution, supplies a chemical solution to the chemical solution used in the facility, As a concentration control apparatus, a pipeline is provided with a cumulative flow meter.

In order to achieve the above object, a liquid medicament regeneration apparatus of the present invention is a medicament regeneration apparatus for regenerating a used liquid medicament reusably and supplying the regenerated medicament liquid to a facility using the regeneration liquid, And a totalizer flowmeter.

According to the concentration management apparatus or the chemical liquid recovery apparatus of the present invention, since the accumulation flowmeter is provided in the pipe for supplying the replenishing liquid or the piping for supplying the regeneration liquid, the facility of the chemical liquid user for every predetermined period (for example, one week or one month) The amount of the replenishing liquid or the regenerating liquid supplied to the developing device can be grasped. Therefore, for example, an amount obtained by multiplying the supply amount of the replenishing liquid or the regenerated chemical in the predetermined period by the charge per unit amount, and adding the basic charge based on the other expenses, etc. to the supply charge, It can be calculated as the charge of the management or the charge of the regeneration processing of the chemical liquid. Then, it is possible to charge the calculated fee to the drug user.

In order to achieve the above object, in the concentration control apparatus or the chemical liquid regeneration apparatus of the present invention, the accumulation flow meter has a communication function.

According to the concentration control device or the chemical liquid recovery device of the present invention, the concentration meter of the chemical liquid used in the factory of each chemical liquid user or the accumulation flowmeter of the chemical liquid regeneration device has a communication function and can be connected to the network . Therefore, various measurement data such as the replenishing liquid measured by the integrated flow meter and the accumulated flow rate of the regenerated chemical can be monitored remotely by the server system connected to the network. There is no need to visit the user's factory to meter the meters of the integrated flowmeter.

In order to achieve the above object, a method for calculating a concentration control charge of a chemical solution of the present invention is a method for calculating a concentration control charge of a chemical solution by supplying a chemical solution repeatedly used in a facility using a chemical solution with a concentration control device for supplying the chemical solution through a pipe provided with a cumulative flow meter And calculating the charge of the concentration control of the chemical liquid based on the accumulated flow rate of the replenishing liquid measured by the cumulative flowmeter for a predetermined period of time.

In order to achieve the above object, a method for calculating a regeneration treatment charge of a drug solution of the present invention is a method for calculating a regeneration treatment charge of a drug solution by regenerating a regenerated drug solution regenerated by a drug solution regeneration device, And measuring the rate of regeneration treatment of the chemical liquid on the basis of the cumulative flow rate of the regenerated chemical liquid measured by the cumulative flowmeter for a predetermined period of time.

According to the method of calculating the concentration control charge or the regeneration treatment charge of the chemical liquid of the present invention, it is possible to provide a concentration control apparatus or a regeneration treatment apparatus (hereinafter referred to as " The treatment device is placed in the factory of the user of the chemical solution and is connected to the facility using the chemical solution to perform the concentration control and the regeneration process so that the chemical solution user does not need to purchase the concentration control device or the chemical solution regeneration device. Since the device is installed as a property of the service provider, the drug user does not bear the burden of maintaining it. The user of the drug solution does nothing and the concentration of the drug solution repeatedly used will be controlled to a predetermined concentration and the drug solution can be supplied. The service provider can reasonably calculate the charge due to the management of the concentration of the chemical liquid or the provision of the regeneration treatment on the basis of the accumulated flow rate measured by the integrated flowmeter.

In order to achieve the above object, a method for calculating a concentration control charge of a chemical solution of the present invention is a method for calculating a concentration control charge of a chemical solution, which comprises a communication function provided in a pipe for supplying a replenishing liquid of a concentration control apparatus for supplying a replenishing liquid to a chemical solution repeatedly used in a chemical solution A method for calculating a charge of concentration control of a chemical liquid using a cumulative flow meter having a server system and a network to which a server system is connected includes the steps of the server system acquiring the cumulative flow rate measured by each cumulative flowmeter through a network, A step of storing a history of the accumulated flow rate acquired by the system through the network for each of the integrated flow meters; and a step of calculating a charge of the concentration control of the chemical solution in each predetermined period of time based on the history of the server system.

In order to achieve the above object, a concentration control charge calculating system of a chemical liquid is provided with a cumulative flowmeter having a communication function provided in a pipe for supplying a replenishing liquid of a concentration control apparatus for supplying a replenishing liquid to a chemical liquid repeatedly used in a chemical- And a server system connected to the integrated flow meter through a network, wherein the server system comprises: a receiving unit for receiving the integrated flow rate measured by the integrated flow meter through the network; and a memory for storing the accumulated flow rate received by the receiving unit for each integrated flow meter And a calculating unit for calculating a charge of concentration control of the chemical liquid in each predetermined period on the basis of the history stored in the storage unit.

In order to achieve the above object, a method of calculating a regeneration treatment charge of a drug solution of the present invention is a method of calculating a regeneration treatment charge of a drug solution by regenerating a regenerated drug solution regenerated by a drug solution regeneration device, A method for calculating a charge for regenerating a chemical liquid by using a network to which a server system is connected, the method comprising the steps of: calculating a cumulative flow rate measured by each cumulative flowmeter through a network A step of storing the history of the accumulated flow rate acquired by the server system for each of the integrated flow meters; and a step of calculating the fee for the regeneration processing of the chemical liquid in the predetermined period for each facility based on the history of the server system .

In order to achieve the above object, a regeneration treatment charge calculating system of a chemical agent is a system for regenerating regeneration drug solution regenerated by a drug solution regeneration apparatus for reusably regenerating a used drug solution, And a server system connected to the accumulation flow meter through a network, wherein the server system comprises: a receiving unit for receiving the integrated flow rate measured by the integrated flow meter through a network; and a control unit for calculating a history of the integrated flow rate received by the receiving unit And a calculation unit for calculating a rate of chemical liquid recovery processing for each facility in a predetermined period based on the history stored in the storage unit.

According to the method of calculating the concentration control charge of the chemical liquid of the present invention or the calculation method of the recovery rate of the chemical liquid or the calculation system of the concentration control charge of the chemical liquid or the calculation system of the recovery rate of the chemical liquid, (Hereinafter sometimes referred to as a "service provider") can monitor the integrated flowmeter used in the factory of each chemical liquid user remotely and unilaterally by a server system connected to the network. There is no need to visit the user's factory to meter the meters of the integrated flowmeter. It is possible to calculate a rational provision fee of the service for managing the concentration of the chemical liquid or the service for regenerating the chemical liquid depending on the accumulated flow rate of the replacement liquid or the regenerated chemical liquid supplied to the facility of the chemical liquid user, Quot ;. < / RTI >

According to the present invention, it is possible to realize a new business method that has never been available in the industry, which provides a function of managing the concentration of a chemical liquid by means of the chemical liquid concentration managing apparatus having the integrated flowmeter. According to the present invention, it is possible to realize a new business method that has never been available in the industry, which provides a function of regenerating the chemical liquid by the chemical liquid regeneration apparatus having the integrated flowmeter. Therefore, according to the present invention, the service provider can secure a stable and steady profit without searching for a device purchaser in a limited market in comparison with the conventional case in which the device is sold.

According to the present invention, the user of the medicament liquid does not need to purchase, operate or maintain the medicinal liquid concentration control apparatus, and provides the service of the concentration control of the medicinal liquid based on the accumulated flow rate of the replenishment liquid dispensed for the concentration control of the chemical liquid It is possible to use a chemical liquid which is always maintained at a predetermined concentration. According to the present invention, the user of the medicament does not need to purchase, operate or maintain the medicinal-fluid regeneration device, and only needs to pay the fee for providing the regeneration treatment of the medicament based on the accumulated flow rate of the regenerated medicament supplied , A regenerating chemical solution can be obtained and used.

According to the present invention, the service provider can remotely and unilaterally monitor the concentration meter of each concentration control device used in a factory (site) of a plurality of drug users and the cumulative flow meter of each drug solution regeneration device.

1 is a schematic diagram of a chemical liquid concentration control device.
2 is a schematic diagram of a chemical liquid recovery apparatus.
3 is a flowchart of a method for calculating a concentration control charge of a chemical liquid.
4 is a flowchart of a method of calculating a regeneration treatment charge of a chemical liquid;
5 is a schematic diagram showing the configuration of a concentration control fee calculation system or a regeneration processing fee calculation system for a chemical liquid;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings as appropriate. However, the shape, size, dimensional ratio, relative arrangement, and the like of the apparatuses described in these embodiments are not limited to those shown in the scope of the present invention unless otherwise specified. As a simple explanation example, it is only schematically shown.

In the following description, specific examples of the chemical liquid used in the semiconductor or liquid crystal display manufacturing process include 2.38 wt% (hereinafter simply referred to as wt%) of tetramethylammonium Aqueous solution of tetraethylammonium hydroxide (hereinafter, referred to as tetramethylammonium hydroxide) is appropriately used.

However, the chemical solution to which the present invention is applied is not limited thereto. Examples of other chemical solutions to which the present invention can be applied include an etching solution, a peeling solution, an antistatic agent, or a cleaning solution in addition to a developer.

These chemical solutions each have a chemical solution of a different kind or composition. Examples of the developing solution include aqueous solutions of inorganic compounds such as potassium hydroxide, sodium hydroxide, sodium phosphate and sodium silicate, and aqueous solutions of organic compounds such as trimethylmonoethanol ammonium hydroxide (choline). Examples of the etching solution include oxalic acid aqueous solution, mixed aqueous solution of sulfuric acid and hydrogen peroxide, copper sulfate solution, mixed aqueous solution of phosphoric acid and acetic acid and nitric acid, hot phosphoric acid, aqueous solution of ceric ammonium nitrate, ferric chloride solution and the like. For example, as the exfoliation liquid, a water-based resist stripping solution such as a dimethylsulfoxide-based stock solution and a pure water solution, a N-methylpyrrolidone stock solution and a pure water solution, an alkanolamine and a glycol ether and a pure water solution, And a non-aqueous resist stripping solution such as a mixed solution of amine and butyl diglycol and an additive.

Conventionally, a user of a chemical solution of various chemical solutions has purchased a device from a company that manufactures and sells a concentration control device or a chemical liquid recovery device, connects the device to a facility using a chemical solution such as a developing facility or an etching facility, The concentration of the chemical solution and the regeneration treatment were performed. For this reason, the user of the medicament liquid is required to temporarily charge a large amount of money when purchasing the concentration control apparatus or the medicinal liquid regeneration apparatus, the burden of supplying the replenishment liquid at the time of operation of the apparatus or necessary materials, I had to pay a lot of effort and burden.

In addition, from the viewpoint of the vendor of the device, in the business of selling the conventional device, there is no chance of collecting the cost of the device outside the point of sale of the device, and it is difficult to gain sufficient profit unless the device is purchased and the device is sold.

The present inventor has devised a novel business method in consideration of all these points. That is, this is a business that provides a service of managing the concentration of the chemical solution repeatedly used by the user of the chemical solution to a predetermined concentration by using the chemical concentration managing device. Is a business that provides a service for reusing and regenerating a chemical solution used by a chemical solution user using a chemical solution regeneration device. This new business method will be described.

First, a business that provides services for managing the concentration of a chemical liquid will be described.

The service provider of the concentration management manages the chemical solution repeatedly used by the chemical user by using the concentration management device at a predetermined concentration or a predetermined concentration range desired by the chemical solution user. Concentration control is performed by supplying a replenishing liquid to the drug solution which is repeatedly used. The concentration control device constantly monitors the concentration of the chemical solution repeatedly used and controls the control valve provided in the piping to replenish the replenishing liquid so that a proper amount of replenishing liquid is replenished. The replenishing liquid is replenished while the accumulated flow rate is measured by a cumulative flow meter provided in a pipe for replenishing the replenishing liquid. The service provider monitors the accumulated flow rate of the replenished replenisher to calculate the charge based on the service provision of the concentration control based on the accumulated flow rate every predetermined period (for example, every week or every month) And charges the drug user every predetermined period. This is an outline of a business that provides services for managing the concentration of a chemical liquid.

The concentration control device used for the management of the concentration of the chemical liquid is the property of the service provider, the service provider performs the operation and maintenance and uses it for the concentration control. Therefore, the user of the drug solution need not purchase the concentration control device, and does not need to perform the operation or maintenance. Only the concentration of the drug solution is managed by the service provider.

The service provider puts his or her own concentration control device at the factory of the user of the chemical solution and connects to the facility (hereinafter also referred to as "chemical solution facility") using the chemical solution operated by the user of the chemical solution. Here, a facility using a chemical solution means a developing apparatus if the chemical solution is a developing solution, an etching apparatus if it is an etching solution, and a peeling apparatus if it is a peeling solution.

The concentration control is realized by measuring the concentration of the chemical liquid and replenishing the replenishing liquid based on the concentration of the measured chemical liquid. However, the present invention is not limited to this. For example, the concentration may be controlled by combining the regeneration treatment of the used chemical liquid.

For example, when a TMAH aqueous solution commonly used in a development processing step is controlled to a concentration of 2.38%, the following concentration control is performed as disclosed in Patent Document 1. That is, the developer managing apparatus repeatedly measures the alkaline component concentration and the dissolved resin concentration to monitor the alkaline component concentration and the dissolved resin concentration so that the concentration of the alkaline component is approximately 2.38%, and the replenishing liquid is replenished so that the dissolved resin concentration does not exceed the predetermined set concentration .

In this case, as the replenishment liquid, a stock solution of developer, a fresh solution of developer, pure water and the like are replenished. The developer solution is a developer with a high concentration, for example, a TMAH aqueous solution of about 20% to 25%. The fresh solution of the developer is a fresh developer which does not contain an unused developer, that is, an unnecessary matter such as a dissolving resin. For example, it is an unused aqueous solution of 2.38% TMAH. A regenerated solution of the developer from which unnecessary matter such as a dissolution resin has been removed from the used developer may be used as the replenisher.

The concentration measurement is performed in the measurement section of the concentration control apparatus by sampling the developer which is repeatedly used in the development facility. The alkali component concentration is determined by measuring the conductivity of the developer, and the dissolved resin concentration is measured by measuring the absorbance at a specific wavelength of the developer. It is known that there is a good correlation between the concentration of these components and the property value of the corresponding developing solution (see Patent Document 1). Using this correlation, the alkali component concentration is derived from the measured conductivity value, and the dissolved resin concentration is derived from the measured absorbance value.

As a result of the concentration measurement, when the concentration of the alkali component is lower than 2.38%, the concentration control apparatus replenishes the developer solution as the replenishment liquid. Conversely, when the concentration is higher than 2.38%, the concentration control apparatus replenishes the fresh liquid of pure water or developer as the replenishment liquid. Likewise, when the dissolved resin concentration exceeds a predetermined set concentration, the concentration managing apparatus replenishes the developer of the developer as the replenishment liquid.

The replenishing liquid is sent to the liquid chemical using facility of the chemical liquid user from the equipment for supplying the storage container or replenishing liquid storing the replenishing liquid through the piping. The piping to which the replenishing liquid is replenished is provided with a control valve controlled by the concentration control apparatus and a cumulative flowmeter. If the flow rate per unit time is set in advance for each control valve when the control valve is opened, the concentration control device can supply an appropriate amount of the replenishing liquid by opening the control valve provided in the pipe through which the replenishing liquid to be replenished flows for a predetermined time. When the replenishing liquid is replenished, the cumulative flowmeter measures the cumulative flow rate of the replenishing liquid. This is the supply amount of the replenishing liquid supplied to the chemical solution using facility.

The service provider calculates the concentration management charge of the chemical liquid based on the accumulated flow rate (supply amount) of the replenishment liquid measured by the integrated flowmeter at predetermined intervals such as every month, for example. The service provider charges the user of the medicines with the calculated concentration control fee as a compensation for the provision of the service for managing the concentration of the medicinal solution.

The user of the medicament liquid can continue to use the concentration-controlled medicinal liquid without paying for the purchase, operation and maintenance of the concentration control apparatus by paying the concentration control charge of the chemical liquid for each predetermined period. On the other hand, the service provider can continue to make stable profits, compared to when the device was being sold.

Here, as the concentration control charge of the chemical liquid, there may be various kinds of states. Hereinafter, some specific examples of the concentration control charge of the chemical liquid are exemplified. However, the method of calculating the concentration control charge of the chemical liquid is not limited to these. The method for calculating the concentration control charge of the chemical liquid of the present invention includes various charge calculating methods based on the accumulated flow rate (supply amount) of the replenishing liquid.

First, as the concentration control charge of the chemical liquid, the charge is calculated on the basis of the supply charge of the replenishment liquid supplied in a predetermined period. This is due to the way in which the supplements are sold.

For example, the predetermined period is set every month. Since the accumulated flow rate of the replenishing liquid is measured in the integrated flowmeter, the supply flow rate of the replenishing liquid supplied this month is obtained by subtracting the accumulated flow rate at the time of the previous month reading from the accumulated flow rate at the time of reading the current month. Let this be Q (L / month). The supply unit price of the replenishing liquid is A (W / L). Then, the supply rate of the replenishing liquid for the current month is obtained as Q x A (yuan / month). When there are a plurality of replenishment liquids, for each of the plurality of replenishment liquids, the supply amounts Q ₁ , Q ₂ , Q ₃ , ... (L / month), the supply unit price is A ₁ , A ₂ , A ₃ , ... (Yuan / L), and the supply rate of the replenishing liquid is obtained by? Q _i x A _i (i = 1, 2, 3, ...) (won / L). We charge this as the concentration control charge of medicine this month, drug user.

In this modification, the charge obtained by adding various charges to the supply rate of the replenishing liquid calculated as described above may be used as the concentration control charge of the chemical liquid of each month. There is a basic charge, which is representative of various charges to add. At the time of contract for the provision of the concentration management service, a monthly basic charge is set, and this charge is included in the concentration control charge of the chemical liquid regardless of whether the supplement liquid is supplied or not. Of course, regardless of the name of the basic charge, the maintenance fee, the labor cost of the device driver, the raw material procurement cost, and other expenses can be included in the charge for addition. Assuming that the charged rate (for example, the base rate) is Z (yuan / month), the concentration control rate of the chemical liquid per month becomes Q x A + Z (yuan / month). When there are plural replenishment liquids and the added charge is the sum of various charges Z = ΣZ _j , the concentration management charge of the chemical liquid of each month is expressed as ΣQ _i × A _{i +} ΣZ _j (i, j = 1, 2, 3, Won / month).

In another modification, the amount obtained by multiplying the supply rate of the replenishing liquid by the premium rate B may be used as the concentration control rate of the chemical liquid of each month. For example, it is reasonable to grasp that all expenses involved in procuring the raw material of the replenishing liquid, the maintenance cost of the apparatus, etc. are linked to the supply amount of the replenishing liquid (this also relates to the operation time of the apparatus). In this case, the charge rate Q of the replenishment liquid is multiplied by the supply rate Q A (won / month) of the replenishing liquid, and the concentration control charge of the chemical liquid of each month is obtained as Q x A x B (yuan / month). The addition rate B may be included in the supply unit price A (won / L) of the replenishing liquid. In addition, when the basic charge, etc. is added, the concentration control charge of the chemical liquid per month becomes Q x A x B + Z (yuan / month). More generally, the concentration management fee of the chemical liquid of each month is obtained by (ΣQ _i × A _i ) × B + ΣZ _j (i, j = 1, 2, 3, ...) (won / month).

Second, as the concentration control charge of the chemical liquid, the amount of money obtained by multiplying the economic profit brought to the chemical liquid user by the predetermined ratio by the service of the concentration management of the chemical liquid provided in the predetermined period is charged to the drug user. This is in accordance with the way of thinking of sharing the economic benefits generated by users of drug users by the provision of concentration management services to users of drug users and service providers. This is suitably applied to, for example, a case where a chemical solution user who has not performed concentration control of a chemical solution is provided with a function of concentration control of a chemical solution.

When the concentration of the chemical liquid is not controlled, the user of the chemical liquid is discarded the entire amount of the chemical liquid a predetermined number of times and replaced with a new chemical liquid. For this reason, the liquid performance of the chemical liquid largely fluctuated every time liquid was exchanged. On the other hand, when the concentration control of the chemical liquid is carried out, the chemical liquid user can enjoy various effects as follows. That is, the amount of the chemical solution to be used is greatly reduced. The amount of the waste liquid of the chemical solution is greatly reduced. Further, since the liquid performance of the chemical liquid is constantly constant, the production quality of the semiconductor or the liquid crystal substrate is stabilized and the production yield is improved. It is not necessary to stop the manufacturing apparatus for liquid exchange, the operating rate of the manufacturing apparatus is improved, and the amount of semiconductor or liquid crystal substrate produced increases.

As a specific example of the calculation of the concentration control charge of the chemical solution in such a case, the concentration control fee for the chemical solution for a predetermined period is set to be several times as much as the amount of the reduction in the chemical solution cost due to the reduction in the chemical solution use amount.

For example, the predetermined period is set every month. The amount of the chemical solution purchased per month by the user of the chemical solution is R (L / month) before the chemical user has received the service of the concentration control of the chemical solution according to the present invention, , And the purchase price is C (won / L). When the fluctuation of the chemical liquid purchase amount R is large, the average value of the chemical liquid purchase amount in the past appropriate period is R.

The supply amount of the replenishing liquid supplied by the provision of the concentration control of the chemical solution according to the present invention is obtained from Q (L / month) from the cumulative flow rate measured by the cumulative flow meter. The supply rate of the replenishment liquid is multiplied by the supply unit price A (won / L), and the supply rate of the replenishment liquid of each month is obtained as Q x A (yuan / month).

Then, the amount of the reduction in the cost of the medicament solution that can be obtained by the user of the medicament solution obtained by the administration of the concentration control of the medicinal solution according to the present invention is R x C-Q x A (yuan / month). The concentration management charge of the chemical liquid of each month is obtained by (R x C - Q x A) x D (yuan / month) with the ratio as D. Of course, basic charges and the like may be added to this. The ratio D is, for example, 0.1, 0.2, 0.3, or the like.

As a modified example, the concentration management fee of the chemical solution for a predetermined period may be as much as several percentages of the reduction amount of the waste solution treatment cost due to the reduction in the amount of the chemical solution.

(Monthly / month) of the chemical liquid before the concentration control is set to S (yuan / month) and the waste liquid treatment cost per month after the concentration control is set to T (yuan / The reduction amount of the waste liquid treatment cost is ST (yuan / month). The user of the drug solution pays the supply rate of the replenishing solution of Q x A (yuan / month) every month by the concentration control, so the amount of the economic benefit related to the drug solution user's waste solution amount reduction is (ST) -Q x A (Won / month). The concentration control rate of the chemical liquid of each month is obtained by multiplying this by the ratio D and is obtained by ((S-T) -Q x A) x D (yuan / month). The basic charge or the like may be added to this.

As another modification, the amount of profit of the user of the drug user caused by the improvement of the yield, the improvement of the product quality, the improvement of the operation rate of the device, etc., instead of the amount of the reduction of the cost of the drug cost or the cost of the waste solution, May be used. Also, the amount obtained by subtracting the supply amount Q × A (yen / month) of the replenishment amount from the sum of the amount of reduction in the amount of the chemical solution cost, the amount of the waste solution processing cost, The amount of economic benefit to be reported, and the monthly concentration control fee may be calculated. In this case, the concentration management fee is (U-Q × A) × D (won / month) when the amount obtained by collecting the increase in profit, etc. is U (won / month). The basic charge or the like may be added to this.

As another modified example, it is possible to generate various economic benefits to the user of the drug solution by providing the drug solution user who has already performed the concentration control of the drug solution, with the task of managing the concentration of the drug solution according to the present invention. Similarly, they are calculated as the concentration control charge of the chemical liquid each month, and the chemical liquid user is charged.

Many drug users still purchase the concentration control device, operate it, maintain it, and manage the concentration of the drug solution, even if the concentration control of the drug solution has already been performed. Therefore, the user of the drug solution charges the expenses such as the expenses of the procurement of the raw material and the material and the labor cost of the driver of the device in the concentration control of the drug solution. In many cases, a concentration control apparatus based on a concentration measurement principle is used which is still using an old concentration control apparatus or is not sufficiently optimized for each chemical liquid.

In this case, by replacing the conventional concentration control with the management of the concentration of the chemical solution according to the present invention, it is possible to provide the chemical solution user with a reduction in the cost of the chemical solution or waste solution, an improvement in the yield, an improvement and stabilization of the product quality, Which may lead to an economic benefit accompanied by an increase in the production quantity. In this case as well, it is possible to calculate as many as a few percent of the amount of the economic benefit obtained based on the accumulated flow rate of the replenishing liquid as the concentration control charge of the chemical liquid, and to charge the drug user.

Next, a business providing reusable recovery processing of the used chemical liquid will be described.

The provider of the regeneration treatment of the chemical liquid can remove unnecessary components accumulated in the chemical solution used in the chemical solution using facility by using the chemical liquid regeneration device, adjust the chemical solution user to a desired concentration or a predetermined concentration range, Playback. The regeneration treatment is carried out by removing the accumulated unneeded components by using techniques such as filtration, electrodeposition, crystallization, and membrane separation (the regeneration treatment method is not limited to these Depending on the chemical liquid to be removed or the component to be removed, a suitable technique is appropriately selected and applied). The chemical liquid regeneration apparatus supplies the regeneration chemical liquid to the chemical liquid using facility by opening the control valve provided in the pipe for supplying the regenerated chemical liquid. The regenerated drug solution is supplied while the accumulated flow rate is measured by an integrating flow meter provided in a pipe for supplying the regenerated drug solution. The service provider monitors the cumulative flow rate of the supplied regeneration liquid so as to calculate the rate for providing the service for the regeneration processing of the liquid medicament on the basis of the accumulated flow rate every predetermined period (for example, every week or every month) And charges the drug user every predetermined period. This is an outline of a business that provides services for regenerating used chemical fluids.

The chemical liquid regeneration apparatus used for the regeneration processing of the used chemical liquid is an item owned by the service provider, and the service provider carries out the operation and maintenance and is used for regeneration processing of the chemical liquid. Therefore, the user of the medicament does not need to purchase the medicament liquid regeneration device, and does not need to perform the driving and maintenance. However, the medicines are only regenerated by the service provider.

The service provider puts his or her own chemical liquid recovery device at the factory of the chemical liquid user and connects to the chemical liquid using facility operated by the chemical liquid user. Here, the chemical solution using equipment is a developing device if the chemical solution is a developing solution, an etching device if it is an etching solution, and a peeling device if it is a peeling solution.

The regeneration process is realized by removing unnecessary substances accumulated in the chemical liquid by the use of the chemical liquid in the chemical liquid by using separation and removal techniques such as filtration, electrolytic filtration, crystallization, and membrane separation. The components of the chemical liquid may be appropriately controlled by replenishing the replenishing liquid or the like. However, the separation technique used in the regeneration process is not limited to these. The unnecessary matter accumulated in the chemical solution is, for example, a resist component eluted from the substrate by development processing in the case of a developing solution.

The regenerated chemical liquid is sent to the chemical solution using facility of the chemical liquid user through the piping. A control valve and a cumulative flowmeter are installed in the piping to which the regenerant solution is introduced. When the flow rate per unit time is set in advance when the control valve is opened, the control valve is kept open for a predetermined time, so that an appropriate amount of the regeneration liquid can be supplied. At the time of supplying the regenerant solution, the integrated flowmeter measures the cumulative flow rate of the regenerant solution. This is the supply amount of the regenerated chemical solution supplied to the chemical solution facility.

The service provider calculates the regeneration processing fee for the chemical liquid on the basis of the accumulated flow rate (supply amount) of the regeneration chemical liquid measured by the integrated flowmeter for every predetermined period, such as every month. The service provider charges the user of the medicament liquid for the regeneration treatment fee of the calculated medicinal liquid as a consideration of the provision of service for regenerating the medicinal liquid.

The drug user can obtain and use the regenerated drug solution without having to purchase, operate and maintain the drug solution regeneration device by paying the regeneration treatment fee for the drug solution every predetermined period. On the other hand, the service provider can continue to make stable profits, compared to when the device was being sold.

Here, as the charge for regenerating the chemical liquid, there may be a variety of modes. Hereinafter, some specific examples of the charge for regenerating the chemical liquid will be exemplified. However, the method of calculating the regeneration treatment charge of the chemical liquid is not limited to these. The method of calculating the regeneration treatment charge of the chemical solution of the present invention includes various charge calculation methods based on the accumulated flow rate (supply amount) of the regeneration drug solution.

First, as a charge for regenerating the chemical liquid, a charge may be calculated on the basis of a supply charge of the regenerant liquid supplied in a predetermined period. It is based on the idea of selling regenerative medicine.

For example, the predetermined period is set every month. Since the accumulated flow rate of the regeneration liquid is measured in the cumulative flow meter, the supply flow rate of the regenerated chemical liquid supplied this month is obtained by subtracting the cumulative flow rate at the time of the previous month reading from the cumulative flow rate at the time of reading the current month. Let it be K (L / month). The supply unit price of the regeneration liquid is defined as E (W / L). Then, the supply rate of the regeneration liquid for the current month is obtained as K x E (yuan / month). This is charged to the user of the drug solution as a regeneration treatment fee of the drug solution for the current month.

In this modified example, the charge obtained by adding various charges to the supply charge of the regenerated chemical liquid calculated as described above may be used as the chemical liquid treatment charge for each month. There is a basic charge, which is representative of various charges to add. A basic monthly charge is determined at the time of contract for providing the service for the regeneration treatment of the chemical liquid, and the charge is included in the chemical liquid regeneration treatment charge regardless of the supply of the regeneration chemical liquid. Of course, regardless of the name of the basic charge, the maintenance fee, the labor cost of the device driver, the raw material procurement cost, and other expenses can be included in the charge for addition. If the added charge (for example, the basic charge) is Z (yuan / month), the regeneration processing fee of the chemical agent per month becomes K x E + Z (yuan / month). When the added charge is the sum of various charges Z =? Zj, the regeneration processing fee of the chemical solution per month becomes KxE +? Zj (j = 1, 2, 3, ...) (won / month).

As another modification, the amount obtained by multiplying the supply rate of the regeneration liquid by the premium rate B may be used as the regeneration treatment rate of the chemical liquid of each month. For example, it is reasonable to grasp that the expenses of procuring the material or raw material of the regeneration liquid and the maintenance cost of the apparatus are linked to the supply amount of the regeneration liquid (which is also related to the operation time of the apparatus). In this case, the charge rate K × E (won / month) of the regeneration drug is multiplied by the premium F, and the regeneration treatment fee per month is obtained as K × E × F (won / month). The addition rate F may be included in the supply unit price E (yuan / L) of the regeneration reagent. Further, when the basic charge or the like is added, the regeneration processing fee of the chemical liquid per month becomes K x E x F + Z (yuan / month). More generally, the chemical liquid treatment fee of the chemical liquid of each month is obtained by (K × E) × F + ΣZ _j (j = 1, 2, 3, ...) (won / month).

Second, as the fee for regenerating the chemical liquid, the amount of money obtained by multiplying the economic profit brought to the chemical liquid user by a predetermined ratio by the service of regenerating the chemical liquid provided in a predetermined period is charged to the user of the chemical liquid. This is in accordance with the way of thinking of sharing the economic benefits generated by the users of the medicament solution by the users of the medicament solution and the service provider by the provision of the regeneration processing of the medicament solution. This is suitably applied to, for example, a case where a chemical solution user who has not performed the chemical solution regeneration treatment is provided with a function of regeneration treatment of the chemical solution.

When the regeneration treatment of the chemical solution is not carried out, the chemical solution user discards the entire amount of the chemical solution a predetermined number of times, and replaces it with a new chemical solution. Because of this, the amount of waste liquid of the chemical liquid is very large, and a large amount of new chemical liquid has to be procured. On the other hand, when the chemical solution is regenerated and reused, the chemical solution user can enjoy various effects as follows. That is, the amount of new chemical solution to be used is greatly reduced. The amount of the waste liquid of the chemical solution is greatly reduced.

As a concrete example of the calculation of the regeneration treatment charge for the chemical solution in such a case, the regeneration treatment charge of the chemical solution for a predetermined period may be as much as several percentages of the drug solution cost reduction by the drug solution usage reduction.

For example, the predetermined period is set every month. The amount of the chemical solution purchased per month by the user of the chemical solution is M (L / month) before the chemical agent user is provided with the service of regenerating the chemical agent according to the present invention, , And the purchase price is G (Yuan / L). When the fluctuation of the chemical liquid purchase amount M is large, the average value of the chemical liquid purchase amount in the past appropriate period is set as M.

The supply amount of the regenerant solution supplied by the provision of the regeneration treatment of the chemical solution according to the present invention is obtained from K (L / month) from the cumulative flow rate measured by the cumulative flow meter. The supply rate of the regeneration liquid is multiplied by the supply unit price E (yuan / L) of the replenishment liquid, and the supply rate of the regeneration drug per month is calculated by K x E (yuan / month).

Then, the amount of the reduction in the cost of the medicament solution that can be obtained by the user of the medicament solution obtained by the provision of the regeneration treatment of the medicament according to the present invention is M x G-K x E (yuan / month). The monthly fee for the regeneration treatment of the chemical liquid is calculated as (M x G-K x E) x F (yuan / month) with the ratio as F. Of course, basic charges and the like may be added to this. The ratio F is, for example, 0.1, 0.2, 0.3, or the like.

As a modified example, the amount of the waste liquid treatment cost due to the reduction of the waste liquid amount of the chemical liquid may be as much as several percentages of the recovery liquid treatment fee of the predetermined period.

(Monthly / month) of the chemical liquid before the regeneration processing is performed and the waste liquid processing cost of each month after the regeneration processing is performed is P (yuan / month) , The reduction amount of the waste liquid treatment cost reduced by the above is NP (yuan / month). The amount of the economic benefit related to the reduction of the amount of the waste solution of the chemical user is (NP) - K x E (yuan / month). The monthly fee for the regeneration treatment of the chemical liquid is obtained by multiplying this by the ratio F to ((N-P) -K x E) x F (yuan / month). The basic charge or the like may be added to this.

As another modification, the amount of the economic benefits of the chemical user may be the sum of the amount of the reduction of the cost of the chemical solution or the reduction of the cost of the waste solution processing. The sum of the sum of the amount of reduction in the cost of the chemical solution or the reduction in the amount of the waste liquid treatment is subtracted from the supply amount K × E (yen / month) of the supplement amount to the amount of the comprehensive economic benefit Report, and calculate the monthly chemical liquid treatment charge. In this case, when the amount of the sum of the amount of reduction in the cost of the chemical solution or the amount of reduction in the cost of the waste liquid treatment is V (yuan / month), the rate of regeneration processing of the chemical liquid is (VKxE) x F (yuan / month). The basic charge or the like may be added to this.

As another modification, it is possible to generate a variety of economic benefits to the user of the drug solution by providing the drug solution user who has already been subjected to the drug solution regeneration treatment to the regeneration treatment of the drug solution according to the present invention. Similarly, they are calculated as a monthly regeneration treatment fee of the medicament, and the drug user is charged.

Many drug users still purchase a drug solution regeneration device, operate them, maintain and manage the drug solution regeneration treatment, even if they are already regenerating the drug solution. Therefore, the user of the medicament liquid charges the expenses such as the expenses of procuring the raw material and the material and the labor cost of the operator of the apparatus in the regeneration treatment of the chemical liquid. In addition, there are many cases where an old reproduction processing apparatus is still used.

In this case, by replacing the conventional regeneration process with the regeneration process of the chemical solution according to the present invention, it is possible to economically benefit the drug user due to the reduction of the drug solution cost and the waste solution cost. In this case as well, as in the above, it is possible to calculate as many as a few percent of the amount of the economic benefit obtained based on the accumulated flow rate of the replenishing liquid, as the recycling treatment charge of the chemical liquid, and charge the drug user.

Next, a concentration control apparatus for a chemical solution according to the present invention will be described. In order to realize the business of providing the concentration control of the chemical liquid of the present invention, it is indispensable to provide a concentration control apparatus equipped with an accumulation flow meter in the supply pipe for the replenishing liquid, which can measure the supply amount of the replenishing liquid required for the concentration control. Hereinafter, a concentration control apparatus provided with such an integrated flowmeter will be described with reference to the drawings.

[Apparatus for controlling concentration of chemical solution]

1 is a schematic diagram for explaining a chemical liquid concentration managing apparatus of the present embodiment. In the description of this embodiment, a 20% TMAH aqueous solution (developer solution), an unused 2.38% aqueous solution of TMAH (new developer solution) and pure water are supplied as a replenisher, using a TMAH aqueous solution A concentration control apparatus for a chemical liquid for performing concentration management will be described.

1, the concentration control apparatus 1 for a developer (chemical liquid) is shown as being connected to a development process facility (chemical solution using facility) 100 for convenience of explanation. In addition, the concentration control device 1 for the developer (chemical liquid) is also connected to the reservoir containers 91 and 92 and the like.

First, the development process facility (chemical solution facility) 100 will be briefly described. 1 is an example of a development process facility (chemical solution facility), but is not limited thereto. The development process facility (chemical solution facility) to which the concentration management device of the developer (chemical solution) of the present invention is connected may include various aspects different from those of FIG.

The development processing facility 100 mainly includes a developer storage tank 161, an overflow tank 162, a development chamber hood 164, a roller conveyor 165, a developer shower nozzle 167, and the like. In the developer storage tank 161, a developer (chemical solution) used repeatedly in the developing process is stored. The developer storage tank 161 is provided with a level gauge 163 and an overflow tank 162, and manages the increase of the liquid amount due to the replenishment of the replenishment liquid. The developer storage tank 161 and the developer shower nozzle 167 are connected to each other by a developer pipe 180. The developer stored in the developer storage tank 161 is sent to the developer shower nozzle 167 through the filter 173 by the circulation pump 172 provided in the developer pipe 180. The roller conveyor 165 is provided above the developer storage tank 161 and carries a substrate 166 on which a film of a photoresist film has been formed. The developing solution is dropped from the developer nozzle 167. The substrate 166, which is conveyed by the roller conveyor 165, is moistened with the developing solution by passing through the developer to be dropped. Thereafter, the developer is collected in the developer reservoir 161 and stored again. The developer stored in the developer storage tank 161 is withdrawn by the circulation pump 174 and returned to the developer storage tank 161 through the circulation line 185 provided with the filter 175. By the circulation of the developer through the circulation duct 185, the developer in the developer storage tank 161 is always stirred. Further, the deteriorated developer is discharged (drained) by operating the waste liquid pump 171.

Next, the concentration managing apparatus 1 of the present embodiment will be described.

The concentration managing apparatus 1 of the present embodiment mainly includes control valves 41, 42 provided in the measuring unit 10, the calculating unit 20, the control unit 30, and the replenishing liquid supply pipes 81, 42, and 43, and integrated flow meters 51, 52, and 53, respectively.

The measuring section 10 is connected to the developer reservoir 161 by a sampling pipe 15 and a return pipe 16. The measuring section 10 is connected to the calculating section 20 by signal lines 17 and 18 for measurement data. The measuring section 10 is provided with a sampling pump 14 and measuring means 11 and 12. The measuring means 11 and 12 are, for example, a conductivity meter for measuring the concentration of the alkaline component of the developer, or a photometric photometer for measuring the concentration of the dissolved resin of the developer. The measuring means 11, 12 are connected in series behind the sampling pump 14. The sampling pipe 15 is connected to the sampling pump 14 and the return pipe 16 is connected to the pipe at the end of the measuring means.

The measuring section 10 preferably includes temperature adjusting means (not shown) for stabilizing the sampled developer at a predetermined temperature in order to increase the measurement accuracy. At this time, it is preferable that the temperature adjusting means is provided immediately before the measuring means.

The calculation unit 20 includes a calculation block 21 for calculating a component concentration (for example, an alkali component concentration, a dissolved resin concentration, and the like) of the developer from the measurement data measured by the measurement unit 10. In the calculation block 21, the component concentration of the developer is calculated from the measurement data measured by the measuring section 10. [

The operation unit 20 is connected to the control unit 30 by a signal line 22. [ The operation unit and the control unit may be integrally constituted by, for example, a computer.

The control unit (30) includes a control block (31). The control unit 30 is connected to the control signal lines 32, 33, and 34 and the control valves 41, 42, and 43 provided in the replenishing liquid supply pipes 81, 82, The control block 31 determines how much of the replenishing liquid to replenish in accordance with the concentration of the developer calculated by the arithmetic unit 20 and controls the opening and closing of the control valve provided in the pipe for feeding the replenishing liquid.

The replenishing liquid supply pipes 81, 82 and 83 are also provided with integrating flow meters 51, 52 and 53 for measuring the cumulative flow rate of the supplied replenishing liquid, respectively. In some cases, the replenishment liquid flowmeter may not be provided in the replenishing liquid supply pipe 83 for pure water.

The operation of the concentration managing apparatus 1 for the developer (chemical liquid) is as follows.

First, the developing solution repeatedly used in the developing process facility 100 is sampled by the sampling pump 14, and the conditions for measuring the temperature, etc. are appropriately adjusted. Then, the measuring means 11 and 12 measure the conductivity and the absorbance . The conductivity value and the absorbance value of the measured developing liquid are sent to the arithmetic unit 20 through the signal line for measurement data 17 and 18.

The calculating unit 20 calculates the concentration of the component of the corresponding developer based on the conductivity values of the developer measured by the measuring units 11 and 12 of the measuring unit 10 and the characteristic values such as the absorbance. The calculated component concentration of the developing solution is sent to the control unit 30 through the signal line 22.

The control unit 30 compares the component concentration of the developer calculated by the calculation unit 20 with the management target value of the previously stored component concentration. The control unit 30 calculates the amount of time required to open the control valve provided in the pipe for feeding the replenishing liquid or selecting the replenishing liquid necessary for replenishment in order to maintain the component concentration at the management target value. The control unit 30 controls the control valves 41, 42, 43 provided in the replenishing liquid supply lines 81, 82, 83 via the control signal lines 32, 33, Lt; / RTI >

The control valve, which has received the control signal, opens the flow path for a predetermined time based on the control signal. In the control valve, the flow rate at the time of opening is set in advance. Therefore, by opening the flow path for a predetermined time, a predetermined amount of replenishing liquid is supplied.

For example, control for controlling the alkali component concentration of the TMAH aqueous solution (developer) to 2.38% is as follows. Here, an example will be described in which a stock solution (20% TMAH aqueous solution) of the developer is stored in the storage container 91 and a fresh solution (unused 2.38% TMAH aqueous solution) is stored in the storage container 92. When the concentration of the alkali component measured and calculated by the measuring unit 10 and the calculating unit 20 is lower than 2.38%, the control valve 41 provided in the replenishing liquid supply pipe (developer stock solution supply pipe) 81 is opened for a predetermined time (20% TMAH aqueous solution) prepared in the storage container (developer stock solution reservoir) 91 is supplied. When the concentration of the alkali component is higher than 2.38%, the control valve 43 provided in the replenishing liquid supply pipe (pure water supply pipe) 83 is opened for a predetermined time and pure water is supplied.

Similarly, the control for managing the dissolved resin concentration at a predetermined management concentration or less is as follows. When the concentration of the molten resin measured and calculated by the measuring unit 10 and the calculating unit 20 is higher than a predetermined control value, the control valve 42 provided in the replenishing liquid supply pipe (developer fresh liquid supply pipe) Open the time, and replenish a fresh solution (unused 2.38% TMAH aqueous solution) of the developer prepared in the storage container (developer new liquid storage container) 92.

The storage container 91 and the storage container 92 are pressurized with nitrogen gas introduced through a pipe 85 for nitrogen gas. The replenishment liquids in the storage containers 91 and 92 are pressure-fed by the control valves 41 and 42 being opened. A control valve 47 is connected to the nitrogen gas pipe 85 for introducing the nitrogen gas into the storage container 91 and a control valve 46 is connected to the nitrogen gas pipe 85 for guiding the nitrogen gas to the storage container 92. [ Respectively. The control valves 46 and 47 are appropriately opened and closed in accordance with the reduced state of the liquid in each of the storage containers 91 and 92 so that the inner pressure of each of the storage containers 91 and 92 is maintained. Valves 44 and 45 are provided on the storage container 91 side of the replenishing liquid supply pipe 81 and on the storage container 92 side of the replenishing liquid supply pipe 82. When the storage containers 91 and 92 are empty, the valves 44 and 45 are normally closed and replaced with new storage containers 91 and 92 filled with the replenishment liquids do.

Thus, the alkali component concentration of the aqueous TMAH solution is 2.38%, and the concentration of the dissolved resin is controlled to be below a predetermined control value. The concentration control is performed, for example, by PID control (Proportional-Integral-Differential Control) or the like.

The replenishing liquid supply pipes 81, 82 and 83 are provided with integrating flow meters 51, 52 and 53, respectively. The integrated flow meters 51, 52 and 53 measure the accumulated flow rate of the replenishing liquid supplied through the replenishing liquid supply pipes 81, 82 and 83. The replenishment liquid supplied from the concentration management apparatus 1 is merged at the confluent pipeline 84 after passing through the integrating flow meters 51, 52 and 53 and is supplied to the developer reservoir 161 through the circulation pipeline 185 do. The integrated flow meters 51, 52 and 53 preferably have a communication function. If the communication function is provided, the integrated flowmeter can be connected to the network. The measured value of the accumulated flow rate can be grasped through the network.

The integrated flow meters 51, 52 and 53 are not limited to being connected directly to the network, but may be indirectly connected to the network. For example, the integrated flow meters 51, 52, and 53 are connected to a computer in the concentration management apparatus 1 that performs functions of computation and control of the concentration management apparatus 1, 1) are connected to each other, it may be indirectly connected to the network.

The network to which the integrated flowmeter is connected may be a local area network in the factory, or may be a wide area network such as the Internet.

As described above, the concentration control of the chemical liquid is realized by the chemical liquid concentration managing apparatus of the present invention, and the accumulated flow rate of the supplied replenishing liquid is measured.

The concentration managing apparatus 1 of the present embodiment shown in Fig. 1 is only an example. The concentration control apparatus for the chemical solution of the present invention is not limited to this embodiment. Although the concentration managing apparatus 1 shown in Fig. 1 shows an apparatus in which the constituent elements are integrally formed, the measuring unit 10, the replenishing liquid supply pipes 81, 82, 83, and the like may be provided separately. The internal structure and the like of the measuring unit 10 are not limited to those shown in Fig. 1, and various kinds of views can be taken depending on the kind of the chemical liquid and the like.

The concentration control apparatus of the present invention is characterized in that a piping for replenishing a replenishing liquid in a concentration control apparatus capable of replenishing a replenishing liquid to a repeatedly used liquid and managing the concentration of the liquid is provided with an accumulation flowmeter It is characterized by. Further, the integrated flowmeter is provided with a communication function.

As an integrated flowmeter having a communication function, for example, a Coriolis digital flow sensor FD-S series manufactured by KEYENCE Co., Ltd. is known. By attaching the communication unit, it is possible to communicate various data such as measured integrated flow rate data with a personal computer or the like. Therefore, the accumulated flow rate can be remotely monitored.

[Chemical solution regeneration device]

Fig. 2 is a schematic diagram for explaining the chemical liquidsreproducing device of the present embodiment. Fig. In the description of the present embodiment, a chemical liquid regeneration apparatus for regenerating a developer by removing a resist component accumulated in the developer by a filter will be described. However, the configuration of the chemical liquid recovery device is not limited to this. As the chemical liquid regenerating apparatus, various kinds of chemical liquid regeneration apparatuses may be used in addition to removing the filter, for example, by removing unnecessary components by techniques such as electrochemical polishing, crystallization and membrane separation, depending on the type of chemical liquid, .

2, the chemical liquid regeneration apparatus (developer regeneration apparatus) 2 is shown as being connected to a development process facility (chemical liquid utilization facility) 100 for convenience of explanation. The development process facility (chemical solution utilization facility) 100 is the same as that of FIG. 1, and a description thereof will be omitted.

The chemical liquidsreproducing apparatus (developer regenerating apparatus) 2 of the present embodiment mainly includes filters 61, 62 and 63, a regenerant liquid reservoir (regenerated developer reservoir) 93, a liquid delivery pump 70, (54), a control unit (35), and the like.

The used developing liquid discharged from the developing process facility 100 is led to the filters 61, 62 and 63 of the chemical liquid regenerator 2 through the waste liquid collecting pipe 86. In the filters 61, 62, and 63, resist components and the like in the used developing solution are removed by filtration. As shown in Fig. 2, it is preferable that a plurality of filters of the chemical solution regeneration device 2 are connected in parallel. This is because the ability to regenerate the developing solution is increased and the maintenance property when the filter is clogged is excellent.

The regenerated developer recovered by removing the unnecessary materials from the filters 61, 62, and 63 is stored in the regenerated drug solution storage container 93. The regeneration developer stored in the regeneration agent reservoir 93 is returned to the developing process facility 100 by the liquid feeding pump 70 through the regeneration liquid supply pipe (regeneration liquid supply pipe) 87.

The regeneration liquid supply pipe 87 is provided with a control valve 48 and a cumulative flow meter 54 in addition to the liquid delivery pump 70. The control valve 48 and the liquid delivery pump 70 are both connected to the control block 36 included in the control unit 35 via the control signal lines 37 and 38. The control block 36 controls the operation of the liquid feed pump 70 and the control valve 48 in order to feed the regeneration developer to the developing process facility 100. The liquid developer is sent to the regeneration liquid as the liquid-delivery pump 70 is driven by the control signal of the control block 36 and the control valve 48 is opened.

The cumulative flow rate of the regeneration developer supplied through the regeneration liquid supply pipe 87 is measured by the cumulative flow meter 54 provided in the regeneration liquid supply pipe 87 at the time of feeding the regeneration liquid.

The integrated flow meter 54 preferably has a communication function. If the communication function is provided, the integrated flowmeter can be connected to the network. The measured value of the accumulated flow rate can be grasped through the network.

The integrated flow meter 54 is not limited to the case of directly connecting to the network, but may be indirectly connected to the network. For example, the integrated liquid flow meter 54 may indirectly be connected to the network by connecting the developer (chemical liquid) regeneration device 2 to the network.

The network to which the integrated flowmeter is connected may be a local area network in the factory, or may be a wide area network such as the Internet.

As described above, the regeneration treatment of the chemical liquid is realized by the chemical liquid regeneration apparatus of the present invention, and the cumulative flow rate of the supplied regeneration chemical liquid is measured.

The chemical liquidsreproducing device 2 of the present embodiment shown in Fig. 2 is merely an example. The chemical liquid recovery apparatus of the present invention is not limited to this embodiment. The chemical liquid recovery apparatus 2 of Fig. 2 shows an apparatus in which the respective constituent elements are integrally formed, but the control unit 35, the regenerant liquid reservoir 93, the filters 61, 62 and 63, . When the regeneration liquid is supplied as one of the replenishment liquids in the concentration control of the chemical liquid, the chemical liquid regeneration device does not have to be provided with the control section 35, Or the liquid feed pump 70 may be controlled.

The chemical liquid recovery apparatus of the present invention is characterized in that a piping for supplying a regeneration chemical liquid in the chemical liquid recovery apparatus capable of reusably reusing the used chemical liquid is provided with an accumulation flowmeter. Further, the integrated flowmeter is provided with a communication function.

As an integrated flowmeter having a communication function, for example, a Coriolis digital flow sensor FD-S series manufactured by KEYENCE Co., Ltd. is known. By attaching the communication unit, it is possible to communicate various data such as measured integrated flow rate data with a personal computer or the like. Therefore, the accumulated flow rate can be remotely monitored.

[Calculation method of concentration management charge of chemical solution]

Next, a calculation method of the concentration control charge of the chemical solution of the present embodiment will be described. 3 is a flowchart for explaining a method of calculating the concentration control charge of the chemical liquid of the present embodiment.

In describing the method for calculating the concentration control charge of the chemical liquid of the present embodiment, it is assumed that the concentration control apparatus is connected to the chemical liquid using facility as shown in Fig. That is, the concentration management apparatus is connected to the chemical solution storage tank and the sampling pipe of the chemical solution use facility so that the concentration of the chemical solution stored in the chemical solution storage tank of the chemical solution use facility in the concentration management apparatus can be measured. At the same time, It is assumed that the concentration control apparatus is connected by piping provided with a chemical solution using facility and an accumulation flow meter so that the replenisher can be replenished.

As shown in Fig. 3, the method for calculating the concentration control charge of the chemical solution according to the present embodiment includes a concentration measurement step S1 for measuring the concentration of the chemical solution repeatedly used in the chemical solution facility, A second replenishing liquid supply step S3 for controlling the concentration of the chemical liquid by supplying the replenishing liquid to the chemical-solution using facility, and a second replenishing liquid supply step of controlling the cumulative flow rate of the replenishing liquid A measurement step S4, a predetermined period elapsing step S5 for judging whether or not a period during which the concentration management has been performed has elapsed, a concentration management charge calculating step S6 for calculating the concentration management charge of the chemical liquid from the cumulative flow rate measured in the cumulative flow amount measuring step S4 .

Among them, the concentration measuring step S1, the replenishing liquid replenishing necessity determining step S2, and the replenishing liquid supplying step S3 are, in many cases, the steps usually carried out by the chemical agent concentration managing method. The method for calculating the concentration control charge of the chemical solution of the present invention is characterized by having the integrated flow measurement step S4, the predetermined period elapsing determination step S5, and the concentration management charge calculation step S6.

Hereinafter, the steps S1 to S6 will be described in detail.

The concentration measuring step S1 is a step of measuring the concentration of the chemical solution repeatedly used in the chemical solution using facility by the concentration managing device. The concentration control apparatus samples the chemical liquid from the chemical liquid storage tank and measures the concentration of the chemical liquid. The concentration of the component to be measured is the concentration of the component of the chemical liquid to be subjected to the concentration control.

The concentration managing apparatus judges whether or not it is necessary to replenish the chemical liquid on the basis of the measured chemical liquid concentration. When it is necessary to replenish the replenishing liquid, the concentration control unit also judges to what extent the replenishing liquid should be replenished. This is a step S2 for judging whether or not the replenishment solution needs to be replenished.

The concentration measuring step S1 and the replenishing liquid replenishment necessity determining step S2 form a loop repeated at all times. That is, it is repeated that the concentration is measured and it is judged whether or not it is necessary to replenish the replenishing liquid. By this loop, the concentration of the chemical liquid is constantly monitored.

If it is determined in step S2 that replenishment of the replenishing liquid is " necessary ", appropriate replenishing liquid is replenished in an appropriate amount. This is the replenishing liquid supply step S3. If it is determined in step S2 that the replenishment of the replenishing liquid is " unnecessary ", the replenishing liquid is not replenished. By appropriately supplying an appropriate amount of the replenishment liquid, the concentration of the chemical liquid is controlled to a desired concentration.

For example, when the concentration of TMAH aqueous solution as a developing solution is controlled to 2.38%, if the concentration measured in the concentration measuring step S1 is lower than 2.38%, the stock solution of the developing solution is replenished as a replenishing solution. Pure water (or new liquid of developer) is supplied. In this way, the developer is always maintained at 2.38% and managed.

When the replenishing liquid is replenished to the chemical liquid in the replenishing liquid supplying step S3, the cumulative flow rate of the supplied replenishing liquid is measured by a cumulative flowmeter provided in the piping for feeding the replenishing liquid. This is the integrated flow rate measuring step S4. The replenishment liquid supply step S3 and the cumulative flow rate measurement step S4 are normally executed at the same time. That is, while the replenishing liquid is being supplied, the integrated flow rate is measured.

In a predetermined period elapsing judgment step S5, it is judged whether or not a predetermined period has elapsed. When the predetermined period has not elapsed, the steps S1 to S4 are repeated to manage the concentration of the chemical solution repeatedly used in the chemical solution facility and to measure the accumulated flow rate of the replenishing liquid. When the predetermined period has elapsed, the flow proceeds to the next concentration management fee calculation step S6.

In the concentration management charge calculation step S6, the concentration management charge of the chemical liquid in the predetermined period is calculated on the basis of the accumulated flow rate of the replacement liquid measured in the integrated flow measurement step S4. The supply amount of the replenishing liquid at the current period is obtained by taking the difference between the cumulative flow rate at the time of the current inspection and the cumulative flow rate at the previous inspection. The concentration control charge of the chemical liquid is calculated, for example, by multiplying the accumulated flow rate of the replenishing liquid for the predetermined period thus calculated by the supply unit price of the replenishing liquid. Concrete calculation formula of the concentration control charge of the chemical liquid can take various kinds of sun. Since some calculation examples are as described above, a detailed description thereof will be omitted. If there is no instruction, the concentration control step S1 is started to calculate the concentration control charge of the chemical liquid within the next predetermined period after calculation of the concentration control charge of the current chemical liquid is performed.

[Calculation method of regeneration charge of chemical solution]

Next, a calculation method of the regeneration treatment charge of the chemical liquid of the present embodiment will be described. Fig. 4 is a flowchart for explaining a calculation method of the regeneration treatment charge of the chemical liquid of the present embodiment.

In describing the method for calculating the regeneration treatment charge of the chemical liquid of the present embodiment, it is assumed that the chemical liquid regeneration apparatus is connected to the chemical liquid use facility as shown in Fig. That is, the chemical liquid recovery apparatus is connected to the liquid discharge pipe of the chemical liquid storage tank of the chemical liquid using facility so that the chemical liquid recovery apparatus can regenerate the chemical liquid stored in the chemical liquid storage tank of the chemical liquid facility, It is assumed that the chemical liquid regeneration device is connected by piping provided with the chemical liquid utilization facility and the accumulation flowmeter so that the regeneration liquid can be supplied to the chemical liquid storage tank of the facility.

The method for calculating the regeneration treatment charge of the chemical solution of the present embodiment includes a chemical solution regeneration step S11 for reusably regenerating the chemical solution used in the chemical solution facility, a regenerant chemical solution supply step S12 for supplying the regenerant chemical solution to the chemical solution facility, A cumulative flow rate measuring step S13 for measuring the cumulative flow rate of the regenerated chemical liquid; a predetermined period of time elapsing judging step S14 for judging whether a period of time for regenerating the chemical liquid and supplying the regenerated chemical has elapsed, And a regeneration treatment charge calculation step S15 for calculating the regeneration treatment charge of the chemical liquid from the measured cumulative flow rate.

Among them, the chemical liquid regeneration step S11 and the regenerant chemical liquid supply step S12 are, in many cases, the steps usually carried out by the chemical liquid regeneration processing method. The method for calculating the regeneration treatment charge of the present invention is characterized by having a cumulative flow rate measuring step S13, a predetermined period elapsing determination step S14, and a regeneration treatment charge calculating step S15.

Hereinafter, the steps S11 to S15 will be described in detail.

The chemical liquid regeneration step S11 is a step in which the chemical liquid regeneration apparatus regenerates the chemical liquid used in the chemical liquid using facility in a reusable manner. The chemical liquid regeneration device recycles the used chemical liquid by receiving the spent chemical liquid from the chemical liquid storage tank and separating and removing the unnecessary components contained therein. For example, a step of precisely filtering a resist component from a used developer in the form of a filter.

The regenerated chemical liquid is supplied to the chemical liquid facility as a regenerant chemical liquid. This is the regeneration liquid supply step S12. The feeding of the regenerant solution is carried out through a piping provided with a cumulative flowmeter.

The regenerant solution is supplied to the chemical solution facility and the integrated flowmeter provided in the pipe measures the integrated flow rate according to the supply. That is, while the regenerant solution is being supplied, the integrated flow rate is measured. This is the integrated flow rate measuring step S13. Thereby, the supply amount of the regeneration chemical solution is grasped.

In a predetermined period elapsing judgment step S14, it is judged whether or not a predetermined period has elapsed. In this embodiment, when the predetermined period has not elapsed, the chemical solution regeneration step S11, the regeneration chemical solution supply step S12, and the cumulative flow rate measurement step S13 are repeated to regenerate the chemical solution stored in the chemical solution storage tank of the chemical solution using facility . Further, the regenerated chemical liquid is supplied to the chemical liquid storage tank. When the predetermined period has elapsed, the flow proceeds to the next reproduction processing fee calculation step S15.

In the regeneration process fee calculation step S15, the regeneration process fee of the chemical solution in the predetermined period is calculated on the basis of the cumulative flow rate of the regeneration drug solution measured in the cumulative flow rate measurement step S13. When the difference between the accumulated flow rate at the time of the current time measurement and the accumulated flow rate at the previous time reading is taken, the supply amount of the regeneration liquid at the period is obtained. The regeneration treatment charge for the chemical liquid is calculated, for example, by multiplying the cumulative flow rate of the regenerated chemical liquid for a predetermined period thus calculated by the supply unit cost of the regeneration chemical liquid. A specific calculation formula of the rate of regeneration treatment of the chemical liquid can take various forms. Since some calculation examples are as described above, they are omitted here. If there is no instruction, the medicinal liquid regeneration step S11 is started to calculate the regeneration treatment charge for the chemical liquid within the next predetermined period after the calculation of the regeneration treatment charge for the current drug liquid.

Several modifications are conceivable for the supply of the regenerant solution. For example, there is a case in which a regeneration drug solution is supplied only when there is a request for supplying the regeneration drug solution from the chemical solution use facility. For example, a concentration control apparatus and a chemical liquid regeneration apparatus are used together to supply a regeneration liquid as one of the liquids for concentration control.

In any modification, in the method of calculating the regeneration treatment charge of the chemical liquid of the present invention, the regenerated drug solution is supplied while measuring the cumulative flow rate of the regenerated drug solution supplied by the integrated flow meter provided in the piping for supplying the regenerated drug solution And calculating the rate of regeneration processing of the chemical liquid based on the accumulated flow rate of the measured period.

[Calculation method and calculation system of concentration control charge of chemical solution using network]

Next, a method for calculating the concentration control charge of the chemical solution using the integrated flow meter having the communication function and the computer to which the computer is connected, and the concentration control charge calculating system for the chemical solution will be described. 5 is a schematic diagram of a concentration control charge calculating system for a chemical liquid containing a charge accumulating flowmeter of a chemical user's plant and a server system of a service provider of concentration control of a chemical liquid to be connected via a network.

The system 200 for calculating the concentration of the chemical solution of this embodiment shown in Fig. 5 includes a server system 202 owned by a service provider of the service for managing the concentration of the chemical solution, 222, 223, 224, and 225 having communication functions installed in each of the factories 211, 212, 213, 214, and 215 of the chemical liquid users Flow meter).

The number of integrated flow meters and server systems constituting the calculation system 200 for the concentration control charge of the chemical solution is not limited to the number shown in FIG. The concentration control system for a chemical solution of the present invention may be provided with at least one integrated flow meter connected via a network and one server system.

Although not shown in detail in Fig. 5, in each factory, a concentration control device for the chemical liquid is connected to a chemical solution facility. By this concentration control apparatus, the replenishing liquid is supplied to the chemical liquid repeatedly used in the chemical liquid facility, and the concentration of the chemical liquid is managed. Integrated pipelines 221, 222, 223, 224, and 225 having communication functions are installed in the piping for supplying the replenishing liquid to the chemical solution using facility by the concentration management apparatus. The integrated flow meters 221, 222, 223, 224, and 225 measure the supply amount of the replenishing liquid supplied to the chemical solution using equipment as the cumulative flow rate.

As the integrated flow meter having a communication function, a Coriolis digital flow sensor FD-S series manufactured by KEYENCE Co., Ltd. or the like can be used. The measurement data such as the accumulated flow rate can be acquired remotely via a network such as the Internet.

The server system 202 includes a receiving unit 203, a storage unit 204, and a calculating unit 205. In addition, the server system 202 includes a display 206. The server system 202 transmits the measurement data of the accumulated flow rate to each of the integrated flow meters 221, 222, 223, 224, and 225 connected to the network 201, Signal. The integrated flow meters 221, 222, 223, 224, and 225 transmit measured flow rate measurement data to the server system 202 in response to the transmission request signal.

In this way, the receiving unit 203 of the server system 202 acquires measurement data of the accumulated flow rate from the respective integrated flow meters 221, 222, 223, 224, and 225. At this time, the individual identification number (so-called device ID) and the measurement date and time (that is, the date and time of measurement) of the integrated flow meter are obtained together with the measurement data of the integrated flow rate. It may be the communication time, not the measurement date and time.

The server system 202 calculates the measured value of the accumulated flow rate for each of the integrated flow meters 221, 222, 223, 224, and 225 based on the individual identification numbers of the integrated flow meters 221, 222, 223, And the measurement date and time to the storage unit 204 constituted by a memory, a hard disk, or the like.

The step of acquiring the measurement data from the integrated flow meter is successively repeated at a predetermined time interval (for example, at intervals of one minute or one hour) to store the change in the supply amount of the replenishing liquid (that is, the history of the accumulated flow rate) .

Since the history of the accumulated flow rate is stored in each of the integrated flow meters 221, 222, 223, 224, and 225 in the storage unit 204 of the server system 202, the history of the accumulated flow rate is stored for every predetermined period The supply amount of the replenishing liquid can be grasped. For example, when the supply amount of the replenishing liquid is gauged every month, the supply amount of the replenishing liquid for the current month can be obtained by subtracting the accumulation flow rate of the meter reading date and time of the previous month from the accumulated flow rate of the meter reading date of this month.

The server system 202 also calculates the concentration management charge of the chemical liquid for the predetermined period from the supply amount of the replenishing liquid in the predetermined period. For example, when it is necessary to calculate the concentration control charge of the chemical liquid every month, the concentration of the chemical liquid, for example, by multiplying the accumulated flow rate obtained as described above by the charge (unit price) per unit liquid amount of the replenishing liquid, Calculate the management fee. The calculation formula of the concentration management charge and the constants necessary for the calculation may be programmed into the calculation unit 205 of the server system 202. [

In this way, the service provider of the concentration management can charge the drug user for the concentration management fee of the drug solution reasonably calculated on the basis of the accumulated flow rate of the replenishing solution every predetermined period. If the server system 202 is connected to the computer of the user of the liquid chemical for payment of the chemical liquid concentration control fee, the charge of the chemical liquid concentration management charge may be automatically performed electronically by the server system 202. [ In this case, the server system 202 may be programmed so as to electronically and automatically create a bill requesting the calculated concentration management charge of the chemical liquid, and automatically transmit the bill to the chemical liquid user every predetermined period.

The user of the drug solution pays the concentration control charge of the drug solution, thereby completing the task of managing the concentration of the drug solution for each predetermined period. In this way, it is possible to remotely monitor the supply amount of the replenishing liquid required for the concentration control of the chemical liquid at each position, and to calculate the concentration control charge according to the concentration control of the chemical liquid, Is realized. Through the network, it is possible to remotely and monotonically monitor the accumulated flow rate of the replenishment solution supplied for the concentration control of the chemical solution at each site, and to provide a function of managing the concentration of the chemical solution.

The network 201 of the present embodiment is not limited to the one constituted by the integrated flowmeter installed in each factory. For example, there may be a relatively small-scale local network connecting a plurality of manufacturing lines to a large-scale plant and an integrated flow meter installed in each of the manufacturing lines. For example, a certain integrated flow meter is installed in a factory in China, a certain integrated flow meter is installed in a factory in Taiwan, a certain integrated flow meter is installed in a Korean factory, and a certain integrated flow meter is installed in a factory in Japan , Or a world-wide network (for example, the Internet) in which integrated flow meters installed in factories in various countries in the world are connected.

[Calculation Method and Calculation System of Regeneration Treatment Fee of Chemical Solution Using Network]

Next, a method of calculating the regeneration treatment charge of the chemical solution using the integrated flow meter having the communication function and the network to which the computer is connected, and a regeneration treatment charge calculating system of the chemical solution will be described. The regeneration treatment charge calculating system of the chemical agent of this embodiment is substantially the same as that shown in Fig. 5 for the sake of explanation, and will be described with reference to Fig. In this embodiment, Fig. 5 is a schematic diagram of a system for calculating the regeneration processing rate of a chemical liquid, which is provided with a server system of a cumulative flowmeter of a chemical user's plant and a service provider of regeneration processing of a chemical liquid to be connected via a network.

The system 200 for calculating the regeneration processing fee of the chemical liquid according to the present embodiment shown in Fig. 5 includes a server system 202 owned by the service provider of the service for regenerating the chemical liquid, The integrated flow meters 221, 222, 223, 224, and 225 having communication functions installed in the respective chemical factories 211, 212, 213, 214 and 215 .

The number of integrated flow meters and server systems constituting the calculation system 200 for regeneration processing fee of the chemical liquid is not limited to the number shown in FIG. The regeneration treatment charge calculating system of the present invention need only include at least one integrated flow meter connected through a network and one server system.

Although not shown in detail in Fig. 5, in each factory, a chemical liquid recovery device is connected to a chemical liquid facility. By this chemical liquid regeneration device, the chemical liquid used in the chemical liquid facility is reusably regenerated, and the regenerant chemical liquid is supplied to the chemical liquid facility. Accumulated flow meters 221, 222, 223, 224, and 225 having communication functions are installed in the piping for supplying the regeneration liquid to the chemical solution using facility by the liquid medicament recovery device. The integrated flow meters 221, 222, 223, 224, and 225 measure the supply amount of the regenerant solution supplied to the chemical solution facility as a cumulative flow rate.

As the integrated flow meter having a communication function, a Coriolis digital flow sensor FD-S series manufactured by KEYENCE Co., Ltd. or the like can be used. The measurement data such as the accumulated flow rate can be acquired remotely via a network such as the Internet.

The server system 202 includes a receiving unit 203, a storage unit 204, and a calculating unit 205. In addition, the server system 202 includes a display 206. The server system 202 transmits the measurement data of the accumulated flow rate to each of the integrated flow meters 221, 222, 223, 224, and 225 connected to the network 201, Signal. The integrated flow meters 221, 222, 223, 224, and 225 transmit measured flow rate measurement data to the server system 202 in response to the transmission request signal.

In this way, the receiving unit 203 of the server system 202 acquires measurement data of the accumulated flow rate from the respective integrated flow meters 221, 222, 223, 224, and 225. At this time, the individual identification number (so-called device ID) and the measurement date and time (that is, the date and time of measurement) of the integrated flow meter are obtained together with the measurement data of the integrated flow rate. It may be the communication time, not the measurement date and time.

The server system 202 calculates the measured value of the accumulated flow rate for each of the integrated flow meters 221, 222, 223, 224, and 225 based on the individual identification numbers of the integrated flow meters 221, 222, 223, And the measurement date and time to the storage unit 204 constituted by a memory, a hard disk, or the like.

The step of obtaining the measurement data from the integrated flow meter is continuously repeated at a predetermined time interval (for example, at intervals of one minute or one hour), whereby the change in the supply amount of the regeneration chemical solution do.

Since the history of the accumulated flow rate is stored in each of the integrated flow meters 221, 222, 223, 224, and 225 in the storage unit 204 of the server system 202, the history of the accumulated flow rate is stored for every predetermined period The supply amount of the regeneration liquid can be grasped. For example, when the supply amount of the regeneration liquid is gauged every month, the supply amount of the regeneration liquid can be obtained by subtracting the integrated flow rate of the meter reading date and time of the previous month from the accumulated flow rate of the meter reading date of this month.

The server system 202 also calculates the regeneration processing fee of the chemical liquid for the predetermined period from the supply amount of the regeneration chemical liquid in the predetermined period. For example, when it is necessary to calculate the regeneration treatment charge of the chemical solution every month, the charge amount (unit price) per unit supply amount of the regeneration drug solution is multiplied by the cumulative flow rate obtained as described above, And the reproduction processing fee is calculated. The calculation formula of the reproduction processing fee and the constants necessary for the calculation may be programmed into the calculation unit 205 of the server system 202. [

In this way, the service provider of the regeneration treatment of the chemical liquid can charge the regeneration treatment fee of the chemical liquid reasonably calculated on the basis of the accumulated flow rate of the regeneration chemical liquid to the chemical liquid user every predetermined period. If the server system 202 is connected to the computer of the user of the medicament for payment of the regeneration processing fee of the medicament, the request for the regeneration processing fee of the medicament may be automatically and electronically performed by the server system 202. [ In this case, the server system 202 may be programmed so as to electronically and automatically create a bill for requesting the calculated processing fee for regenerating the chemical liquid, and automatically send the bill to the chemical liquid user every predetermined period.

The user of the drug solution pays the regeneration treatment fee of the drug solution, and the provision of the service of regenerating the drug solution every predetermined period is completed. In this manner, a regeneration treatment fee for the chemical solution regeneration process is calculated while remotely monitoring the supply amount of the regeneration drug solution by the regeneration process of each drug solution by using the network, . It is possible to remotely monitor the cumulative flow rate of the regenerated chemical liquid that can be reused by the regeneration treatment of the chemical liquid at each site through the network to provide a function of regenerating the used chemical liquid.

The network 201 of the present embodiment is not limited to the one constituted by the integrated flowmeter installed in each factory. For example, there may be a relatively small-scale local network connecting a plurality of manufacturing lines to a large-scale plant and an integrated flow meter installed in each of the manufacturing lines. For example, a certain integrated flow meter is installed in a factory in China, a certain integrated flow meter is installed in a factory in Taiwan, a certain integrated flow meter is installed in a Korean factory, and a certain integrated flow meter is installed in a factory in Japan , Or a world-wide network (for example, the Internet) in which integrated flow meters installed in factories in various countries in the world are connected.

The contents of the embodiments described above with reference to the drawings can be similarly applied to various chemical fluids used in the semiconductor or liquid crystal display substrate manufacturing process.

According to the present invention, the user of the medicament does not need to purchase, operate, or maintain the concentration control device or the medicinal-fluid regeneration device, and only needs to pay the concentration control fee or the regeneration treatment fee, And a regenerated drug solution can be obtained and used. Therefore, the user of the medicament liquid can use various kinds of medicines for various purposes such as reduction of cost due to purchase and maintenance of the apparatus, cost reduction due to chemical solution or waste liquid treatment, improvement of the operation rate and yield of the production line, Economic benefits can be enjoyed.

According to the present invention, the service provider can consistently obtain a stable profit as compared with the case where the device is sold by the business method that can be realized by the present invention. Further, according to the present invention, it is possible to provide a chemical liquid concentration management apparatus and a chemical liquid regeneration apparatus, which are indispensable for realizing this new business method. According to the present invention, the integrated flow meter used in each user's factory can be monitored remotely and unilaterally by the server system connected to the network.

One… Concentration control device, 2 ... A chemical liquid recovery device, 10 ... Measuring section, 11, 12 ... Measuring means, 14 ... Sampling pump, 15 ... Sampling piping, 16 ... Return piping, 17, 18 ... Signal line for measurement data, 20 ... 21, Operation block, 22 ... Signal lines, 30, 35 ... The control unit 31, 36 ... Control block, 32, 33, 34, 37, 38 ... Control signal lines, 41, 42, 43, 46, 47, 48 ... Control valve, 44, 45 ... Valves 51, 52, 53, 54, 221, 222, 223, 224, 225, Integrated flowmeter, 61, 62, 63 ... Filter, 70 ... Pumping pump, 81, 82, 83 ... Replenisher supply piping, 84 ... Joining piping, 85 ... Nitrogen gas piping, 86 ... Waste liquid recovery piping, 87 ... Regeneration liquid supply piping, 91, 92 ... Storage container, 93 ... Regeneration solution reservoir, 100 ... Development process facility (chemical solution facility), 161 ... Developer reservoir, 162 ... Overflow group, 163 ... Level gauge, 164 ... Development room hood, 165 ... Roller conveyor, 166 ... Substrate, 167 ... Developer nozzle, 171 ... Waste liquid pump, 172, 174 ... Circulation pump, 173, 175 ... Filter, 180 ... The development pipe, 185 ... Circulation duct, 200 ... Output system, 201 ... Network, 202 ... Server system, 203 ... Receiver, 204 ... The storage unit 205 ... The calculation unit 206 ... Display, 211, 212, 213, 214, 215 ... Factory, S1 ... Density measuring step, S2 ... The step of judging whether or not the replenishing liquid is required, S3 ... Replenishing liquid supply step, S4 ... Integrated flow rate measuring step, S5 ... A predetermined period elapsing judgment step, S6 ... Concentration management fee calculation step, S11 ... Chemical liquid regeneration step, S12 ... Regeneration liquid supply step, S13 ... Integrated flow rate measuring step, S14 ... A predetermined period elapsing judgment step, S15 ... The reproduction process fee calculation step

Claims (10)

There is provided a concentration control apparatus for a chemical liquid which is connected to a facility for repeatedly using a chemical liquid and is supplied with the chemical liquid through the pipe to the chemical liquid used in the facility to manage the concentration of the chemical liquid,
And an accumulation flowmeter in the piping. The method according to claim 1,
Wherein the integrated flow meter has a communication function. The cumulative flow rate of the replenishing liquid supplied by the concentration control apparatus for supplying the replenishing liquid through the piping provided with the cumulative flowmeter is measured by the cumulative flowmeter in the chemical liquid repeatedly used in the facility using the chemical liquid,
Calculating the charge of the concentration control of the chemical liquid on the basis of the accumulated flow rate of the replenishing liquid in the predetermined period measured by the integrating flowmeter
Of the concentration of the chemical solution. An accumulation flow meter having a communication function provided in a piping for supplying the replenishing liquid of the concentration control apparatus for supplying the replenishing liquid to the chemical liquid repeatedly used in the facility using the chemical liquid and a network connected to the server system, A method for calculating a charge for concentration management,
A step in which the server system acquires an integrated flow rate measured by each of the integrating flow meters through the network;
A step of storing a history of the accumulated flow rate acquired by the server system through the network for each of the integrated flow meters;
Wherein the server system calculates a charge for concentration management of the chemical liquid in a predetermined period for each of the facilities based on the history
Of the concentration of the chemical solution. An accumulation flow meter having a communication function provided in a pipe for supplying the replenishing liquid of the concentration control device for supplying the replenishing liquid to the chemical liquid repeatedly used in the facility using the chemical liquid,
And a server system connected to the integrating flow meter through a network,
The server system comprises:
A receiving unit for receiving the integrated flow rate measured by the integrated flow meter through the network;
A storage unit for storing a history of the accumulated flow rate received by the receiving unit for each of the integrated flow meters;
And a calculation unit for calculating a charge for concentration management of the chemical liquid in a predetermined period for each of the facilities based on the history stored in the storage unit,
The concentration control fee calculation system comprising: There is provided a chemical liquid regeneration apparatus for reusably regenerating a used chemical liquid and supplying the regenerated chemical liquid to a facility using the regenerated chemical liquid,
And an accumulation flow meter is provided in a pipe for supplying the regeneration drug solution to the facility. The method according to claim 6,
Wherein the integrated flowmeter has a communication function. The regenerated chemical liquid regenerated by the chemical liquid regenerating apparatus for reusably regenerating the used chemical liquid in the facility using the chemical liquid is supplied through the piping provided with the integrated flowmeter while measuring the accumulated flow rate by the aforementioned integrated flowmeter ,
Calculating a rate of regeneration processing of the chemical liquid on the basis of the cumulative flow rate of the regenerant chemical liquid for a predetermined period measured by the integrating flowmeter
And calculating the rate of regeneration treatment of the chemical liquid. An accumulation flow meter having a communication function provided in a pipe for supplying regenerated drug solution regenerated by a drug solution regeneration device for regenerating a drug solution that has been completely reused so that the medicament solution can be reused; Thus, in the method for calculating the rate of the regeneration treatment of the chemical liquid,
A step in which the server system acquires an integrated flow rate measured by each of the integrating flow meters through the network;
A step of storing a history of the accumulated flow rate acquired by the server system for each of the integrated flow meters;
Wherein the server system calculates a charge for regenerating the chemical liquid in a predetermined period for each of the facilities based on the history
And calculating the rate of regeneration treatment of the chemical liquid. An accumulation flow meter having a communication function and provided in a pipe for supplying regenerated drug solution regenerated by a drug solution regeneration device for regenerating the drug solution that has been completely reused so as to be reusable,
And a server system connected to the integrating flow meter through a network,
The server system comprises:
A receiving unit for receiving the integrated flow rate measured by the integrated flow meter through the network;
A storage unit for storing a history of the accumulated flow rate received by the receiving unit for each of the integrated flow meters;
And a calculation unit for calculating a rate of the chemical liquid recovery process in a predetermined period for each of the facilities based on the history stored in the storage unit,
And calculating a regeneration treatment charge of the chemical liquid.

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