CN108960882A - The concentration management device of medical fluid, regenerating unit, expense calculation method and system - Google Patents

The concentration management device of medical fluid, regenerating unit, expense calculation method and system Download PDF

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CN108960882A
CN108960882A CN201711232617.6A CN201711232617A CN108960882A CN 108960882 A CN108960882 A CN 108960882A CN 201711232617 A CN201711232617 A CN 201711232617A CN 108960882 A CN108960882 A CN 108960882A
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chemical solution
chemical
cost
liquid
concentration
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中川俊元
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Hirama Rika Kenkyusho Ltd
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Hirama Rika Kenkyusho Ltd
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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    • G06Q30/02—Marketing; Price estimation or determination; Fundraising
    • G06Q30/0283—Price estimation or determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/07—Integration to give total flow, e.g. using mechanically-operated integrating mechanism
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

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  • Microelectronics & Electronic Packaging (AREA)
  • Fluid Mechanics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • General Factory Administration (AREA)
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Abstract

Present invention offer concentration management device used in providing the service that the liquor strength for manufacturing semiconductor, liquid crystal display substrate is managed and the medical fluid regenerating unit used in the service offer to medical fluid progress regeneration treatment and the service provided using these devices provide the calculation method and system of related expense.Concentration management device (1) is feeding the piping of replenisher equipped with flow quantity recorder (51~53).Medical fluid regenerating unit (2) is supplying the piping of regrowth liquid medicine equipped with flow quantity recorder (54).The concentration management of medical fluid or the expense of regeneration treatment are calculated based on the integrated flow in the specified time limit measured by flow quantity recorder.Flow quantity recorder (221~225) has communication function and connect with network (201).Integrated flow is received and stored via network by server system (202).Server system (202) have according to each flow quantity recorder and the integrated flow based on specified time limit and calculate the calculation part (205) of expense.

Description

Chemical solution concentration management device, regeneration device, and cost calculation method and system
Technical Field
The present invention relates to a chemical solution concentration management device for managing the concentration of various chemical solutions repeatedly used in a manufacturing process of a semiconductor or a liquid crystal display substrate, a method for calculating a chemical solution concentration management fee in a service for managing the concentration of a chemical solution to be supplied by using the concentration management device, and a system for calculating the concentration management fee. The present invention relates to a chemical solution regeneration device for regenerating various chemical solutions used in a manufacturing process of a semiconductor or a liquid crystal display substrate, a method for calculating a chemical solution regeneration cost in a service for regenerating a chemical solution provided by using the chemical solution regeneration device, and a regeneration cost calculation system.
Background
In a process for manufacturing a semiconductor or a liquid crystal display substrate, various chemical solutions such as a developing solution, an etching solution, a stripping solution, an antistatic agent, and a cleaning solution are used (hereinafter, these chemical solutions are collectively referred to as "chemical solutions" unless they are specifically distinguished from each other). The chemical solution is maintained and managed to be used at a predetermined concentration as needed so as to maximize the performance thereof. In addition, the used chemical solution may be regenerated so as to be reusable.
Conventionally, a person who uses a chemical (hereinafter, sometimes referred to as a "chemical user") purchases and uses a concentration management apparatus for the chemical in order to maintain and manage the concentration of the chemical. In addition, a chemical solution user purchases and uses a chemical solution regeneration processing device in order to regenerate the used chemical solution to be reusable.
For example, the following patent documents are disclosed as a concentration management device for a chemical solution. Patent document 1 discloses a developer concentration management device that manages the alkali concentration and the dissolved resin concentration of a developer. Patent document 2 discloses an etching solution management apparatus for managing the acid concentration and the dissolved indium concentration. As a chemical solution regeneration treatment apparatus, patent document 3 discloses a development waste liquid regeneration treatment apparatus for regenerating a development waste liquid by microfiltration.
Prior art documents
Patent document 1: japanese patent No. 2561578
Patent document 2: japanese patent No. 2747647
Patent document 3: japanese patent laid-open publication No. 2005-175118
However, in the conventional method of purchasing and using the concentration management device and the chemical solution regeneration device, the chemical solution user needs to purchase the concentration management device and the chemical solution regeneration device and operate and maintain and manage these devices. In addition, in the conventional system, a person who manufactures and sells the concentration management device or the chemical solution regeneration device (hereinafter, sometimes referred to as a "device seller") has a chance to receive a return from these devices only at the time of sale of the devices.
Therefore, the chemical solution user must bear a temporary and large cost burden for purchasing the concentration management device and the chemical solution regeneration device, and various efforts and burdens involved in the operation and maintenance management after purchase. In addition, there are also problems as follows: it is difficult for a device seller to earn sufficient benefits without selling a device by frequently searching for a liquid medicine user who wishes to purchase the device in a limited market.
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made in view of the above problems. The inventors have proposed a service for managing the concentration of a chemical solution using a concentration management device and a service for performing a regeneration process on the used chemical solution using a chemical solution regeneration device. That is, an object of the present invention is to provide a concentration management apparatus and a chemical regeneration apparatus for a chemical used in the above-mentioned new business model, which can use a chemical without burdening a chemical user as described above and can make an apparatus seller continuously earn a profit, and a cost calculation method and a cost calculation system for calculating a cost for providing a service related to concentration management or regeneration processing of a chemical.
In order to achieve the above object, a chemical solution concentration management apparatus according to the present invention is connected to a device that repeatedly uses a chemical solution by a pipe, and supplies a replenishment solution to the chemical solution used in the device via the pipe to manage a concentration of the chemical solution, wherein an integrating flowmeter is provided in the pipe.
In order to achieve the above object, a chemical solution regeneration apparatus according to the present invention regenerates a used chemical solution so as to be reusable, and supplies the regenerated chemical solution to a device using the regenerated chemical solution, wherein an integrated flow meter is provided in a pipe for supplying the regenerated chemical solution to the device.
According to the concentration management apparatus or the chemical solution regeneration apparatus of the present invention, since the pipe for supplying the replenishment liquid or the pipe for supplying the regenerated chemical solution is provided with the integrated flow meter, the amount of the replenishment liquid or the regenerated chemical solution to be supplied to the chemical solution user can be grasped for a predetermined period of time (for example, one week or one month). Therefore, for example, the amount of money obtained by adding a basic charge based on other expenses or the like to the supply charge obtained by multiplying the supply amount of the replenishment liquid or the regenerated chemical liquid for the predetermined period by the charge per unit amount of the replenishment liquid or the regenerated chemical liquid can be calculated as the charge for the concentration management of the chemical liquid or the charge for the regeneration process of the chemical liquid. The calculated cost can then be requested to the chemical solution user.
In order to achieve the above object, an integrated flow meter in a chemical solution concentration management device or a chemical solution regeneration device according to the present invention has a communication function.
According to the concentration management device or the chemical solution regeneration device of the present invention, the concentration management device or the cumulative flow meter of the chemical solution regeneration device used in the factory of each chemical solution user can be connected to the network because of the communication function. Therefore, various measurement data such as the accumulated flow rate of the replenishment liquid and the regeneration chemical liquid measured by the accumulated flow meter can be remotely monitored by the server system connected to the network. It is not necessary to go to the factory of the chemical liquid user in order to look up the meter of the integrating flowmeter.
In order to achieve the above object, a method for calculating a concentration management cost of a chemical solution according to the present invention includes: measuring an integrated flow rate of a replenishment liquid supplied from a concentration management apparatus that supplies a replenishment liquid to a chemical solution repeatedly used in a device using a chemical solution via a pipe provided with an integrated flow meter; the cost for concentration management of the chemical solution is calculated based on the integrated flow rate of the replenishment solution for a predetermined period measured by the integrated flow meter.
In order to achieve the above object, a method for calculating a cost for regeneration treatment of a chemical solution according to the present invention includes: measuring an accumulated flow rate by an accumulated flowmeter while supplying a regenerative chemical solution, which is a chemical solution regenerated by a chemical solution regenerating device that regenerates a used chemical solution to a reusable chemical solution, to a device that uses a chemical solution through a pipe equipped with the accumulated flowmeter; the cost of the regeneration treatment of the chemical liquid is calculated based on the integrated flow rate of the regenerated chemical liquid in the predetermined period measured by the integrated flow meter.
According to the method of calculating the chemical solution concentration management cost or the regeneration processing cost of the present invention, since a person who provides a service for the chemical solution concentration management or the regeneration processing (hereinafter, sometimes referred to as a "service provider") places the concentration management apparatus or the regeneration processing apparatus in a factory of a chemical solution user and connects the apparatus using the chemical solution to perform the concentration management or the regeneration processing, the chemical solution user does not need to purchase the concentration management apparatus or the chemical solution regeneration apparatus. Since the devices are installed as the entire contents of the service provider, the chemical solution user does not need to bear the burden of maintaining and managing the concentration management device or the chemical solution regeneration device. The chemical solution user can manage the concentration of the chemical solution repeatedly used to a predetermined concentration without labor, and can receive the supply of the regenerated chemical solution. The service provider can reasonably calculate the cost for the concentration management of the chemical solution or the service provision of the regeneration process based on the integrated flow rate measured by the integrated flow meter.
In order to achieve the above object, a method for calculating a cost for managing concentration of a chemical solution according to the present invention calculates a cost for managing concentration of a chemical solution using a network connecting a server system and an integrated flow meter which is provided in a pipe for supplying a replenishment solution of a concentration management device for supplying a replenishment solution to a chemical solution repeatedly used in a chemical solution using facility and has a communication function, wherein the method for calculating the cost for managing concentration of the chemical solution includes the steps of: the server system obtains the accumulated flow measured by each accumulated flowmeter through a network; a server system that stores, for each cumulative flow meter, history information of cumulative flow rates acquired via a network; and the server system calculates a cost for concentration management of the chemical solution for a predetermined period for each device based on the history information.
To achieve the above object, a system for calculating a concentration management cost of a chemical solution includes: an integrated flowmeter which is provided in a pipe for supplying a replenishment liquid of a concentration management device for supplying the replenishment liquid to a chemical solution repeatedly used in a chemical solution using apparatus, and which has a communication function; and a server system connected to the integrated flowmeter via a network, the server system including: a receiving unit that receives the accumulated flow rate measured by the accumulated flow meter via a network; a storage unit that stores history information of the cumulative flow rate received by the reception unit for each cumulative flow meter; and a calculation unit that calculates a cost for concentration management of the chemical solution for a predetermined period for each device based on the history information stored in the storage unit.
In order to achieve the above object, a method for calculating a chemical solution regeneration cost according to the present invention calculates a chemical solution regeneration cost using a network connecting an integrated flow meter, which is provided in a pipe for supplying a regeneration chemical solution to a device using a chemical solution and has a communication function, to a server system, the regeneration chemical solution being regenerated by a chemical solution regeneration device that regenerates a used chemical solution into a reusable chemical solution, the method for calculating the chemical solution regeneration cost including the steps of: the server system obtains the accumulated flow measured by each accumulated flowmeter through a network; the server system stores history information of the acquired cumulative flow rate for each cumulative flow meter; and the server system calculates a cost for the regeneration process of the chemical solution for a predetermined period for each device based on the history information.
To achieve the above object, a chemical solution regeneration cost calculation system includes: an integrated flowmeter which is provided in a pipe for supplying a regenerative chemical to a device using a chemical and has a communication function, the regenerative chemical being a chemical regenerated by a chemical regenerating device that regenerates a used chemical to a reusable chemical; and a server system connected to the integrated flowmeter via a network, the server system including: a receiving unit that receives the accumulated flow rate measured by the accumulated flow meter via a network; a storage unit that stores history information of the cumulative flow rate received by the reception unit for each cumulative flow meter; and a calculation unit that calculates a cost for the regeneration process of the chemical solution for each device in a predetermined period based on the history information stored in the storage unit.
According to the method for calculating the concentration management cost of the chemical solution or the method for calculating the regeneration processing cost of the chemical solution, or the system for calculating the concentration management cost of the chemical solution or the system for calculating the regeneration processing cost of the chemical solution of the present invention, a person who provides a service for the concentration management or the regeneration processing of the chemical solution (hereinafter, sometimes referred to as a "service provider") can monitor the cumulative flow meter used in the factory of each chemical solution user remotely and collectively by using a server system connected to a network. It is not necessary to go to the factory of the chemical liquid user in order to look up the meter of the integrating flowmeter. The reasonable supply cost of the service for managing the chemical solution concentration or the service for performing the regeneration process of the chemical solution according to the accumulated flow rate of the replenishment solution or the regeneration chemical solution supplied to the chemical solution user during the predetermined period can be calculated, and the cost can be requested to the chemical solution user.
Effects of the invention
According to the present invention, it is possible to realize a new business method which has not been available in the art, such as providing a service of managing the concentration of a chemical solution by using a concentration management device for a chemical solution having an integrated flow meter. According to the present invention, it is possible to realize a new business method which has not been available in the art, such as providing a service for performing a chemical regeneration process using a chemical regeneration device provided with an integrated flow meter. Therefore, according to the present invention, the service provider can continuously secure a stable profit without frequently searching for a person who desires to purchase the device in a limited market as compared with the case of selling the device in the related art.
According to the present invention, a chemical solution user can use a chemical solution that is always managed at a predetermined concentration by paying only a fee for providing a service of managing the concentration of the chemical solution based on the accumulated flow rate of a replenishment solution replenished for managing the concentration of the chemical solution without burdening the concentration management apparatus that purchases the chemical solution, operating the concentration management apparatus for the chemical solution, or maintaining the concentration management apparatus that manages the chemical solution. According to the present invention, the chemical solution user can obtain the regenerative chemical solution and use it without burdening the purchase of the chemical solution regeneration apparatus, the operation of the chemical solution regeneration apparatus, or the maintenance and management of the chemical solution regeneration apparatus, and by paying only the cost for providing the service of the regeneration process of the chemical solution, which is spent on receiving the accumulated flow rate of the supplied regenerative chemical solution.
According to the present invention, the service provider can remotely monitor the concentration management devices and the cumulative flow meters of the chemical solution regeneration devices used in the factories (sites) of a plurality of chemical solution users in a unified manner.
Drawings
FIG. 1 is a schematic view of a chemical solution concentration management apparatus.
Fig. 2 is a schematic view of the chemical solution regenerating apparatus.
FIG. 3 is a flowchart of a method for calculating the concentration management cost of the chemical solution.
FIG. 4 is a flowchart of a method for calculating the cost of the chemical solution regeneration treatment.
Fig. 5 is a schematic diagram showing the configuration of the chemical solution concentration management cost calculation system or the regeneration processing cost calculation system.
Description of reference numerals:
1 … concentration management device; 2 … liquid medicine regenerating unit; 10 … a measuring part; 11. 12 … measuring mechanism; 14 … sampling pump; 15 … sampling piping; 16 … return piping; 17. 18 … signal line for measuring data; 20 … arithmetic unit; 21 … operation module; 22 … signal lines; 30. 35 … control unit; 31. 36 … control module; 32. 33, 34, 37, and 38 … control signal lines; 41. 42, 43, 46, 47, 48 … control valves; 44. a 45 … valve; 51. 52, 53, 54, 221, 222, 223, 224, 225 … cumulative flow meter; 61. 62, 63 … filters; 70 … transfer pump; 81. 82, 83 … replenishment liquid supply piping; 84 … confluence piping; 85 … nitrogen gas piping; 86 … waste liquid recovery piping; 87 … a regenerative chemical supply pipe; 91. 92 … storage container; 93 … regenerative medicine liquid storage container; 100 … developing process equipment (chemical solution using equipment); 161 … developer solution storage tank; 162 … overflow trough; 163 … level gauge; 164 … developing chamber shield; 165 … roller conveyor; 166 … a substrate; 167 … developer solution spray nozzle; 171 … waste liquid pump; 172. 174 … circulating pump; 173. 175 … filter; 180 … developer line; 185 … circulation line; 200 … computing system; 201 … network; 202 … server system; 203 … a receiving part; 204 … storage section; 205 … calculation section; a 206 … display; 211. 212, 213, 214, 215 … plants; s1 … concentration measuring step; s2 … judging whether replenishment of replenishing liquid is required; a step of supplying a replenishment liquid (S3 …); s4 … cumulative flow rate measuring step; s5 … determining the lapse of a predetermined period; s6 … calculating the concentration management cost; s11 … regeneration of liquid medicine; s12 … a regeneration chemical liquid supply step; s13 … cumulative flow rate measuring step; s14 … determining the lapse of a predetermined period; and S15 … regeneration processing cost calculation step.
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings as appropriate. The shapes, sizes, dimensional ratios, relative arrangements, and the like of the devices and the like described in the embodiments are not limited to the examples shown in the drawings, unless otherwise specifically stated. These examples are merely schematically illustrated as illustrative examples.
In the following description, as a specific example of the chemical used in the manufacturing process of the semiconductor or the liquid crystal display, a 2.38 wt% (hereinafter, wt% is simply referred to as%) aqueous tetramethylammonium hydroxide solution (hereinafter, tetramethylammonium hydroxide is referred to as TMAH) mainly used as a developing solution in the developing process is suitably used.
The chemical solution used in the present invention is not limited to this. Examples of other chemical solutions to which the present invention can be applied include an etching solution, a stripping solution, an antistatic agent, and a cleaning solution in addition to a developing solution.
There are more various kinds or compositions of these chemical solutions. For example, the developer may be an aqueous solution of an inorganic compound such as potassium hydroxide, sodium phosphate, or sodium silicate, or an aqueous solution of an organic compound such as trimethylmonoethanolammonium hydroxide (choline). Examples of the etching solution include an aqueous oxalic acid solution, a mixed aqueous solution of sulfuric acid and hydrogen peroxide, a copper sulfate solution, a mixed aqueous solution of phosphoric acid, acetic acid, and nitric acid, hot phosphoric acid, a cerium ammonium nitrate aqueous solution, and an iron chloride solution. Examples of the stripping liquid include aqueous resist stripping liquids such as solutions of a dimethyl sulfoxide-based stock solution and pure water, solutions of an N-methylpyrrolidone-based stock solution and pure water, solutions of an alkanolamine, a glycol ether, and pure water, and non-aqueous resist stripping liquids such as mixed solutions of monoethanolamine, butyl diglycol, and an additive.
Conventionally, a chemical solution user of the above-described various chemical solutions purchases a chemical solution from a company or the like that manufactures and sells a concentration management apparatus or a chemical solution regeneration apparatus, connects the apparatus to a chemical solution-using device such as a developing device or an etching device, and operates the apparatus to perform concentration management or regeneration processing of the chemical solution. Therefore, the chemical solution user must bear a temporary and large cost burden when purchasing the concentration management apparatus or the chemical solution regeneration apparatus, a burden of preparing a replenishment solution or a necessary material during operation of the apparatus, and other various efforts and burdens related to operation or maintenance management of the apparatus.
Further, in the conventional business of selling apparatuses, there is a chance that the return of the apparatus is obtained only when the apparatus is sold, and it is difficult for the apparatus seller to obtain a sufficient benefit unless the apparatus is sold by searching for a person who wishes to purchase the apparatus.
The present inventors have proposed a new business method in view of these points. That is, the business provides the following services: the concentration of the chemical solution repeatedly used by a chemical solution user is controlled to a predetermined concentration by using a chemical solution concentration control device. And the used chemical solution of the chemical solution user is regenerated and reused by using the chemical solution regenerating device. The new business method is explained.
First, a business providing a service for managing the concentration of a chemical solution will be described.
The concentration management service provider uses the concentration management device to manage the chemical solution repeatedly used by the chemical solution user to a predetermined concentration or a predetermined concentration range desired by the chemical solution user. Concentration control is performed by supplying a replenishment liquid to a chemical solution which is repeatedly used. The concentration management device repeatedly measures and constantly monitors the concentration of the chemical solution repeatedly used, and controls a control valve provided in a pipe for supplying a required amount of an appropriate replenishment solution. The replenishment liquid is replenished while the accumulated flow rate is measured by an accumulated flow meter provided in the pipe for replenishing the replenishment liquid. The service provider monitors the accumulated flow rate of the replenishment liquid to calculate a fee for providing the concentration-controlled service based on the accumulated flow rate for a predetermined period (for example, for one week or one month), and requests the fee to the chemical liquid user for the predetermined period. This is a commercial overview that provides a service of managing the concentration of a drug solution.
The concentration management device used for the service of managing the concentration of the chemical solution is operated and maintained by the service provider as a belonging to the service provider and is used for concentration management. Therefore, the user of the chemical solution does not need to purchase the concentration management device and perform the operation and maintenance management of the concentration management device. Only the concentration of the administration solution is obtained from the service provider.
The service provider places its own concentration management device in a factory of the chemical solution user, and connects the concentration management device to a chemical solution using device (hereinafter referred to as "chemical solution using device") operated by the chemical solution user. Here, the device using the chemical solution means a developing device if the chemical solution is a developing solution, an etching device if the chemical solution is an etching solution, a stripping device if the chemical solution is a stripping solution, and the like.
The concentration management is realized by measuring the concentration of the chemical solution and replenishing the replenishment solution based on the measured concentration of the chemical solution. However, it is not limited thereto. For example, concentration management may be performed in combination with a regeneration treatment of the chemical solution after use.
For example, when the concentration of the aqueous TMAH solution, which is used in a large amount in the developing process, is controlled to be 2.38%, the following concentration control is performed as in patent document 1. That is, the developer management apparatus repeatedly measures and constantly monitors the alkali component concentration and the dissolved resin concentration, and supplies the replenishment liquid so that the alkali component concentration becomes a concentration of about 2.38% and the dissolved resin concentration does not exceed a predetermined set concentration, thereby performing concentration management.
In this case, the original liquid of the developing solution, the fresh liquid of the developing solution, the pure water, and the like are replenished as the replenishment liquid. The stock solution of the developer is a developer having a high concentration, and for example, a TMAH aqueous solution having a concentration of about 20% to 25%. The new liquid of the developer is an unused developer, in other words, a fresh developer containing no unnecessary substances such as dissolved resin. For example, an unused 2.38% aqueous solution of TMAH. A regenerated liquid of the developer obtained by removing unnecessary substances such as dissolved resins from the used developer may be used as the replenishment liquid.
In the concentration measurement, the developer repeatedly used in the developing device is sampled and measured by a measuring section of the concentration management apparatus. The alkali component concentration is measured by measuring the conductivity of the developer, and the dissolved resin concentration is measured by measuring the absorbance of the developer at a specific wavelength. It is known that there is a good correlation between the concentrations of these components and the corresponding physical properties of the developer (see patent document 1). By using such a correlation, the alkali component concentration can be derived from the measured conductivity value, and the dissolved resin concentration can be derived from the measured absorbance value.
When the concentration of the alkali component is less than 2.38% as a result of the concentration measurement, the concentration control device supplies the original solution of the developing solution as a replenishment solution. On the other hand, when the alkali component concentration is higher than 2.38%, the concentration management device supplies pure water or a new liquid of the developing solution as a replenishment liquid. Similarly, when the dissolved resin concentration exceeds a predetermined set concentration, the concentration management device supplies a new solution of the developing solution as a replenishment solution.
The replenishment liquid is supplied from a storage tank for storing the replenishment liquid or a device for supplying the replenishment liquid to the chemical liquid using device of the chemical liquid user via a pipe. The pipe for supplying the replenishment liquid is provided with a control valve and an integrating flowmeter controlled by a concentration management device. When the flow rate flowing per unit time when the control valve is opened is set in advance for each control valve, the concentration management device can supply an appropriate amount of replenishment liquid by opening the control valve provided in the pipe through which the replenishment liquid to be supplied flows for a predetermined time. When the replenishment liquid is supplied, the cumulative flowmeter measures the cumulative flow rate of the replenishment liquid. This is the supply amount of the replenishment liquid to the chemical liquid using apparatus.
The service provider calculates the concentration management cost of the chemical solution based on the integrated flow rate (supply amount) of the replenishment solution measured by the integrated flow meter for a predetermined period of time, for example, one month. The service provider requests the calculated concentration management fee from the chemical solution user in return for providing a service for managing the concentration of the chemical solution.
The chemical solution user can continuously use the chemical solution after concentration management without purchasing, operating, and maintaining the concentration management device by paying the concentration management fee of the chemical solution for a predetermined period. On the other hand, the service provider can continue to earn stable profit compared to when the device is sold.
Here, various methods can be adopted as the concentration management cost of the chemical solution. Hereinafter, some specific examples of the concentration management cost of the chemical solution will be described. However, the method of calculating the concentration management cost of the chemical solution is not limited to these. The method of calculating the concentration management cost of the chemical solution according to the present invention includes various cost calculation methods that calculate the cost based on the cumulative flow rate (supply amount) of the replenishment solution.
First, as the concentration management cost of the chemical solution, the cost may be calculated based on the supply cost of the replenishment solution supplied for a predetermined period. This is based on a thought method of selling a supplement liquid.
For example, the predetermined period is set to one month. Since the cumulative flow rate of the replenishment liquid is measured by the cumulative flowmeter, the supply amount of the replenishment liquid supplied in the present month is obtained by subtracting the cumulative flow rate in the previous month from the cumulative flow rate in the present month. The supply amount of the replenishment liquid supplied in this month is Q (L/month). The supply unit price of the replenishment liquid is A (unit/L). Then, the supply cost of the replenishment liquid in this month is obtained as Q × a (yuan/month). When the replenishment liquid is plural, the supply amount is Q for each of the plural replenishment liquids1、Q2、Q3And (L/month), the supply unit price is A1、A2、A3And [ Yu/L ], the supply cost of the replenishment liquid is found as Sigma Qi×Ai(i ═ 1, 2, 3, · (m/L)). The request is made to the chemical solution user as the concentration management fee of the chemical solution in this month.
As a modification, the cost obtained by adding various costs to the supply cost of the replenishment liquid calculated as described above may be used as the concentration management cost of the chemical liquid per month. As representative fees of the various fees to be added, there are basic fees. When a contract for providing a concentration management service is made, a basic charge per month is determined, and the basic charge is included in the concentration management charge of the chemical liquid and requested regardless of whether or not the replenishment liquid is supplied. Of course, the equipment maintenance management cost, the labor cost of the apparatus operator, the raw material allocation cost, and other various expenses may be included in the added cost regardless of the name of the basic cost. If the added cost (for example, the basic cost) is Z (yuan/month), the concentration management cost of the liquid chemical per month is Q × a + Z (yuan/month). When the supplementary liquid is multiple and the added cost is the sum of the various costs Z ═ ZjThe monthly concentration management cost of the chemical solution is ∑ Qi×Ai+∑Zj(i, j ═ 1, 2, 3, · (m/month)).
In addition, as another modification, the amount of money obtained by multiplying the supply fee of the replenishment liquid by the replenishment rate B may be set as the concentration management of the chemical liquid per monthAnd (4) the cost. For example, it is reasonable to consider that the costs for each item of allocation of the raw material of the replenishment liquid, the maintenance and management costs of the apparatus, and the like are related to the supply amount of the replenishment liquid (which also relates to the operation time of the apparatus). In this case, the replenishment rate B is multiplied by the supply rate Q × a (yuan/month) of the replenishment liquid, and the concentration management rate of the chemical liquid per month is obtained as Q × a × B (yuan/month). The replenishment rate B may be included in the supply unit price A (meta/L) of the replenishment liquid. In addition, when the basic charge is added, the concentration management charge of the chemical solution per month is Q × a × B + Z (yuan/month). More generally, the concentration management cost of the chemical solution per month is determined as (Σ Q)i×Ai)×B+∑Zj(i, j ═ 1, 2, 3, · (m/month)).
Second, as the concentration management cost of the drug solution, the drug solution user is requested an amount obtained by multiplying the economic benefit of the drug solution user by a predetermined ratio by the service of the concentration management of the drug solution provided in a predetermined period. This is based on a thinking approach of distributing the economic benefit of the drug solution user to the drug solution user and the service provider due to the provision of the concentration-controlled service. This is preferably applied to, for example, a case where a medical fluid user who does not perform concentration management of a medical fluid is provided with a medical fluid concentration management service.
When the concentration of the chemical liquid is not managed, the chemical liquid user discards all of the chemical liquid after using the chemical liquid a predetermined number of times and replaces the chemical liquid with a new chemical liquid. Therefore, the liquid properties of the drug solution vary greatly every time the liquid is replaced. On the other hand, when the concentration of the chemical solution is managed, the chemical solution user can enjoy various effects as follows. That is, the amount of the chemical solution used is significantly reduced. The amount of waste liquid of the chemical solution is also greatly reduced. In addition, since the liquid performance of the chemical solution is always constant, the manufacturing quality of the semiconductor and the liquid crystal substrate is stable, and the manufacturing yield is improved. The operation rate of the manufacturing apparatus is improved without stopping the manufacturing apparatus due to liquid replacement, and the manufacturing amount of semiconductors and liquid crystal substrates is increased.
As a specific example of calculation of the concentration management fee of the chemical solution in such a case, there is a case where the number of reduction amounts of the chemical solution cost due to reduction of the amount of use of the chemical solution is made the concentration management fee of the chemical solution for a predetermined period.
For example, the predetermined period is set to one month. The purchase amount of the chemical solution per month purchased by the chemical solution user before the chemical solution user receives the service for managing the concentration of the chemical solution according to the present invention, that is, when the concentration management of the chemical solution is not performed, is set to R (L/month), and the purchase price thereof is set to C (meta/L). When the variation of the chemical solution purchase amount R is large, R is an average value of the chemical solution purchase amount in a past appropriate period.
The supply amount of the replenishment liquid supplied by the service provision of the concentration management of the chemical solution according to the present invention is determined as Q (L/month) from the integrated flow rate measured by the integrated flow meter. The supply unit price A (yuan/L) of the replenishment liquid is multiplied, and the supply cost of the replenishment liquid per month is obtained as Q.times.A (yuan/month).
Then, the amount of reduction in the cost of the chemical solution that can be obtained by the chemical solution user by receiving the service provision for the concentration management of the chemical solution according to the present invention is R × C-Q × a (yuan/month). The concentration management cost of the chemical solution per month is determined as (R.times.C-Q.times.A). times.D (yuan/month) in proportion to D. Of course, a basic cost or the like may be added. The ratio D is, for example, one (0.1), two (0.2), three (0.3), or the like.
As a modification, the amount of reduction in the cost of waste liquid treatment due to the reduction in the amount of waste liquid of the chemical solution may be made the concentration management cost of the chemical solution for a predetermined period.
When the liquid waste treatment cost per month of the chemical solution before the concentration management is performed is S (Yuan/month) and the liquid waste treatment cost per month after the concentration management is performed is T (Yuan/month) (where S > T), the reduction amount of the liquid waste treatment cost reduced by the concentration management is S-T (Yuan/month). Since the chemical solution user pays the charge of supplying the replenishment liquid of qxa (yuan/month) per month by the concentration management, the amount of economic benefit involved in reducing the amount of waste liquid of the chemical solution user becomes (S-T) -qxa (yuan/month). The concentration management cost of the chemical solution per month is multiplied by the ratio D and is determined as ((S-T) -Q × a) × D (m/month). Basic costs and the like may also be added.
As another modification, in place of the amount of economic benefit of the chemical solution user, the amount of gain increase on the chemical solution user side due to improvement in yield, improvement in product quality, improvement in device operation rate, and the like may be used instead of the amount of reduction in chemical solution cost or the amount of reduction in waste liquid disposal cost. Further, the monthly concentration management fee may be calculated by taking the amount obtained by subtracting the supply fee qxa (yuan/month) of the replenishment liquid from the total amount such as the reduction amount of the chemical liquid cost, the reduction amount of the waste liquid disposal fee, and the profit increase amount of the chemical liquid user as the amount of the total economic benefit of the chemical liquid user due to the concentration management. In this case, if the amount of money obtained by adding the profit growth amount and the like is U (yuan/month), the density management fee becomes (U-Q × a) × D (yuan/month). Basic costs and the like may also be added.
As another modification, the medical fluid user who has already performed the concentration management of the medical fluid can be given various economic benefits by providing the medical fluid user with the service of the concentration management of the medical fluid according to the present invention. These economic benefits are also calculated as the concentration management cost of the chemical solution per month and requested to the chemical solution user.
Even when concentration management of chemical liquid is already performed, many chemical liquid users purchase the concentration management apparatus and operate and maintain the concentration management apparatus by themselves, thereby performing concentration management of the chemical liquid. Therefore, the chemical solution user is charged with costs such as various expenses for the preparation of the raw material or the material, labor costs of the apparatus operator, and the like in the concentration management of the chemical solution. Further, there are many cases where an old concentration management device is used or a concentration management device that manages based on a concentration measurement principle that is not sufficiently optimized for each chemical liquid is used.
In such a case, by replacing the conventional concentration management with the service of the concentration management of the chemical solution according to the present invention, it is possible to provide the chemical solution user with economic benefits associated with reduction in chemical solution cost or waste liquid cost, improvement in yield, improvement and stabilization of product quality, improvement in equipment operation rate, improvement in product manufacturing quantity, and the like. In this case, as described above, the amount of the economic benefit obtained based on the accumulated flow rate of the replenishment liquid can be calculated as the concentration management fee of the chemical liquid, and the request can be made to the chemical liquid user.
Next, a business that provides a service for rendering the used chemical solution regeneration treatment reusable will be described.
The service provider of the chemical solution regeneration process removes unnecessary components accumulated in the chemical solution used by the chemical solution using equipment using the chemical solution regeneration device, adjusts the concentration to a predetermined concentration or a predetermined concentration range desired by a chemical solution user, and regenerates the chemical solution to be reusable. The regeneration treatment is performed by removing the accumulated unnecessary components by using a technique such as filtration, electroanalysis, crystallization, or membrane separation (the method of regeneration treatment is not limited to these. The chemical solution regeneration device supplies the regenerated chemical solution to the chemical solution using device by opening a control valve provided in a pipe for supplying the regenerated chemical solution. The regenerative chemical liquid is supplied while an integrated flow rate is measured by an integrated flow meter provided in a pipe for supplying the regenerative chemical liquid. The service provider monitors the accumulated flow rate of the supplied regenerative chemical, calculates a cost for providing the service of the regeneration process of the chemical based on the accumulated flow rate for a predetermined period (for example, one week or one month), and requests the cost to the chemical user for the predetermined period. This is a commercial overview of a service for providing a regeneration process for a used chemical solution.
The chemical solution regeneration device used for a service for performing a regeneration process on a used chemical solution is operated and maintained by a service provider as a belonging to the service provider and is used for the regeneration process of the chemical solution. Therefore, the chemical solution user does not need to purchase the chemical solution regeneration device and to perform operation and maintenance management of the chemical solution regeneration device. The regeneration of the chemical liquid is performed only by the service provider.
The service provider places the chemical solution regeneration apparatus itself in a factory of the chemical solution user, and connects the chemical solution regeneration apparatus to a chemical solution using device operated by the chemical solution user. Here, the chemical solution using device means a developing device if the chemical solution is a developing solution, an etching device if the chemical solution is an etching solution, a stripping device if the chemical solution is a stripping solution, and the like.
The regeneration treatment is realized by removing unnecessary substances accumulated in the chemical solution due to the use of the chemical solution from the chemical solution by a separation and removal technique such as filtration, electroprecipitation, crystallization, or membrane separation. The respective components of the liquid medicine may be adjusted by appropriately supplying a replenishment liquid or the like. However, the separation technique used for the regeneration treatment is not limited to these. The unnecessary substance accumulated in the chemical solution refers to, for example, a resist component eluted from the substrate by the development treatment in the case of a developer.
The regenerated chemical solution is sent to a chemical solution user through a pipe. The piping for supplying the regeneration chemical liquid is provided with a control valve and an integrating flowmeter. When the flow rate per unit time is set in advance when the control valve is opened, an appropriate amount of the regenerative chemical can be supplied by opening the control valve for a predetermined time. When the regenerative chemical liquid is supplied, the integrated flow meter measures the integrated flow rate of the regenerative chemical liquid. This is the supply amount of the regenerative chemical liquid to the chemical liquid using apparatus.
The service provider calculates the regeneration processing cost of the chemical liquid based on the integrated flow rate (supply amount) of the regenerated chemical liquid measured by the integrated flow meter for a predetermined period of time, for example, one month. The service provider requests the calculated chemical solution regeneration cost from the chemical solution user in return for providing a service for performing the chemical solution regeneration.
The chemical solution user can obtain and use the chemical solution after the regeneration treatment without purchasing, operating, and maintaining the chemical solution regeneration apparatus by paying the regeneration treatment cost of the chemical solution for a predetermined period. On the other hand, the service provider can continue to earn stable profit compared to when the device is sold.
Here, various methods can be adopted as the cost of the regeneration treatment of the chemical solution. Specific examples of the cost of the chemical regeneration treatment are shown below. However, the method of calculating the cost of the regeneration treatment of the chemical solution is not limited to these. The method of calculating the chemical solution regeneration processing cost according to the present invention includes various cost calculation methods that calculate based on the cumulative flow rate (supply amount) of the regenerated chemical solution.
First, as the chemical solution regeneration processing cost, the cost may be calculated based on the supply cost of the regenerated chemical solution supplied for a predetermined period. This is based on a thought method of selling regenerative medicine liquid.
For example, the predetermined period is set to one month. Since the cumulative flow rate of the regenerative chemical liquid is measured by the cumulative flowmeter, the supply amount of the regenerative chemical liquid supplied in the present month is obtained by subtracting the cumulative flow rate in the previous month from the cumulative flow rate in the present month. The supply amount of the regenerative chemical liquid supplied in this month is K (L/month). The supply unit price of the regeneration chemical liquid is E (m/L). Then, the supply cost of the regenerative chemical in this month is determined to be K × E (yuan/month). The cost is requested to the chemical solution user as the cost for the regeneration treatment of the chemical solution in this month.
As a modification, the cost obtained by adding various costs to the supply cost of the regenerative chemical solution calculated as described above may be set as the monthly regeneration processing cost of the chemical solution. As representative fees of the various fees to be added, there are basic fees. When a contract for providing a service for the regeneration of a chemical solution is made, a monthly basic charge is determined, and the request is made to include the basic charge in the regeneration cost of the chemical solution regardless of whether the regeneration chemical solution is supplied. Of course, the device maintenance management fee may be maintained regardless of the name of the basic feeOr the labor cost of the apparatus operator, the raw material allocation cost, other various expenses, and the like are included in the added costs. If the added cost (for example, the basic cost) is Z (yuan/month), the regeneration processing cost of the chemical solution per month becomes K × E + Z (yuan/month). The sum of the costs Z ═ Sigma ZjThe monthly regeneration cost of the chemical solution becomes K × E + ∑ Zj(j. 1, 2, 3, · · ·) (yuan/month).
As another modification, the amount obtained by multiplying the supply rate of the regenerative chemical by the replenishment rate F may be set as the regeneration processing rate of the chemical per month. For example, it is reasonable to consider that the supply amount of the regenerative chemical (which is also related to the operation time of the apparatus) is related to the costs of the materials of the regenerative chemical, the distribution of the raw materials, the maintenance and management costs of the apparatus, and the like. In this case, the replenishment rate F is multiplied by the supply cost K × E (yuan/month) of the regenerative chemical, and the regeneration processing cost of the chemical per month is determined as K × E × F (yuan/month). The replenishment rate F may be included in the supply unit price E (meta/L) of the regeneration chemical. In addition, when the basic cost is added, the regeneration cost of the chemical solution per month becomes K × E × F + Z (yuan/month). More generally, the chemical solution treatment cost per month is determined as (K × E) × F + ∑ Zj(j. 1, 2, 3, · · ·) (yuan/month).
Second, as the chemical solution regeneration cost, the chemical solution user is requested to add a predetermined ratio to the economic benefit of the chemical solution user due to the service of the chemical solution regeneration provided during a predetermined period of time. This is based on a thought system of distributing the economic benefit of the chemical solution user to the chemical solution user and the service provider due to the provision of the service for the regeneration process of the chemical solution. This is preferably applied to, for example, a case where a service for the chemical solution regeneration process is provided to a chemical solution user who does not perform the chemical solution regeneration process.
When the chemical solution regeneration process is not performed, the chemical solution user uses the chemical solution a predetermined number of times, and then discards all of the chemical solution and replaces the chemical solution with a new chemical solution. Therefore, the amount of waste liquid of the chemical solution is very large, and a large amount of new chemical solution must be prepared. On the other hand, when the chemical solution is reused by performing the regeneration treatment, the chemical solution user can enjoy various effects as follows. That is, the amount of the new chemical solution used is significantly reduced. The amount of waste liquid of the chemical solution is also greatly reduced.
As a specific example of calculation of the chemical solution regeneration processing cost in such a case, there is a case where the number of reduction amounts of the chemical solution cost due to reduction of the amount of the chemical solution used is made to be the chemical solution regeneration processing cost for a predetermined period.
For example, the predetermined period is set to one month. The purchase amount of the chemical solution per month purchased by the chemical solution user before the chemical solution user receives the service provision of the regeneration treatment of the chemical solution according to the present invention, that is, when the regeneration treatment of the chemical solution is not performed, is set to M (L/month), and the purchase price thereof is set to G (M/L). When the variation of the chemical solution purchase amount M is large, the average value of the chemical solution purchase amounts in the past appropriate period is set to M.
The supply amount of the regenerative chemical liquid supplied by the service provision of the regenerative process of the chemical liquid according to the present invention is determined as K (L/month) from the integrated flow rate measured by the integrated flow meter. The supply cost of the regenerative chemical liquid per month is obtained as K × E (yuan/month) by multiplying the supply unit price E (yuan/L) of the replenishment liquid.
Then, the amount of reduction in the cost of the chemical solution that can be obtained by the chemical solution user by receiving the service provision of the chemical solution regeneration process according to the present invention is M × G-K × E (yuan/month). The regeneration cost of the chemical solution per month is determined as (M × G-K × E) × F (yuan/month) in proportion to F. Of course, a basic cost or the like may be added. The ratio F is, for example, one (0.1), two (0.2), three (0.3), or the like.
As a modification, the amount of reduction in the waste liquid treatment cost due to the reduction in the amount of waste liquid of the chemical solution may be made the regeneration treatment cost of the chemical solution for a predetermined period.
When the monthly waste liquid disposal cost of the chemical liquid before the regeneration treatment is performed is N (Yuan/month) and the monthly waste liquid disposal cost after the regeneration treatment is P (Yuan/month) (wherein N > P), the reduction amount of the waste liquid disposal cost reduced by the regeneration treatment of the chemical liquid is N-P (Yuan/month). Since the chemical solution user pays the cost of supplying the regenerative chemical solution at K × E (yuan/month) per month due to the regeneration process of the chemical solution, the amount of economic benefit involved in reducing the amount of waste liquid of the chemical solution user becomes (N-P) -K × E (yuan/month). The regeneration cost of the chemical solution per month is multiplied by the ratio F to obtain ((N-P) -K × E) × F (yuan/month). Basic costs and the like may also be added.
As another modification, the amount of economic benefit of the chemical solution user may be a total amount of the reduction amount of the chemical solution cost, the reduction amount of the waste liquid disposal cost, and the like. The chemical solution treatment cost per month may be calculated by subtracting the supply cost K × E (yuan/month) of the replenishment solution from the total amount of the chemical solution cost reduction amount, the waste liquid treatment cost reduction amount, and the like as the amount of the total economic benefit of the chemical solution user due to the chemical solution regeneration treatment. In this case, if the total amount of the chemical solution cost reduction amount, the waste liquid treatment cost reduction amount, and the like is set to V (yuan/month), the chemical solution regeneration treatment cost becomes (V-K × E) × F (yuan/month). Basic costs and the like may also be added.
As another modification, it is possible to provide various economic benefits to a chemical solution user who has performed a chemical solution regeneration process with the service of the chemical solution regeneration process according to the present invention. These economic benefits are also calculated as the monthly regeneration treatment cost of the chemical solution and requested to the chemical solution user.
Even when the chemical regeneration process is performed, many chemical users purchase the chemical regeneration apparatus and operate and maintain and manage the chemical regeneration apparatus by themselves to perform the chemical regeneration process. Therefore, the chemical solution user is charged with costs such as various expenses for blending raw materials or materials, labor costs for the device operator, and the like in the chemical solution regeneration process. In addition, an old regeneration processing apparatus is often used.
In such a case, replacing the conventional regeneration treatment with the service of the regeneration treatment of the chemical solution according to the present invention can provide the chemical solution user with economic benefits associated with reduction of chemical solution cost, waste liquid cost, and the like. In this case, as described above, the amount of the economic benefit obtained based on the accumulated flow rate of the replenishment liquid can be calculated as the regeneration processing cost of the chemical liquid, and the request can be made to the chemical liquid user.
Next, a concentration management device for a chemical solution according to the present invention will be described. For a business that realizes a service for providing concentration management of a chemical solution according to the present invention, a concentration management apparatus is indispensable that can measure the supply amount of a replenishment solution required for concentration management and that includes an integrated flow meter in a supply pipe of the replenishment solution. Hereinafter, a concentration management device including such an integrated flowmeter will be described with reference to the drawings.
[ concentration control device for chemical solution ]
Fig. 1 is a schematic diagram for explaining a chemical solution concentration management device according to the present embodiment. In the description of the present embodiment, the following density management apparatus will be described: taking a TMAH aqueous solution (developer) having a concentration of 2.38% as a chemical solution as an example, a 20% TMAH aqueous solution (original solution of the developer), an unused 2.38% TMAH aqueous solution (new solution of the developer), and pure water are supplied to the chemical solution to control the concentration.
In fig. 1, for convenience of explanation, a concentration management apparatus 1 for a developer (chemical) is shown connected to a developing process facility (chemical use facility) 100. The concentration management device 1 for the developer (chemical) is also connected to the storage containers 91, 92 for the replenishment liquid, and the like.
First, the developing process apparatus (chemical solution using apparatus) 100 will be briefly described. The developing process apparatus (chemical solution using apparatus) 100 shown in fig. 1 is an example of a developing process apparatus (chemical solution using apparatus), but is not limited thereto. The developing process equipment (chemical solution using equipment) to which the concentration management apparatus for a developing solution (chemical solution) of the present invention is connected can include various modes different from those shown in fig. 1.
The developing process apparatus 100 is mainly composed of a developer storage tank 161, an overflow tank 162, a developing chamber hood 164, a roller conveyor 165, a developer shower nozzle 167, and the like. The developer storage tank 161 stores a developer (chemical solution) which is repeatedly used in the developing process. The developer storage tank 161 includes a level gauge 163 and an overflow tank 162, and manages an increase in liquid amount due to replenishment of the replenishment liquid. The developer storage tank 161 and the developer spray nozzle 167 are connected by a developer pipe 180. The developer stored in the developer storage tank 161 is sent to the developer spray nozzle 167 through a filter 173 by a circulation pump 172 provided in a developer pipe 180. A roller conveyor 165 is disposed above the developer storage tank 161 and transports the substrate 166 on which the photoresist film is formed. The developer is dropped from the developer spray nozzle 167. The substrate 166 conveyed by the roller conveyor 165 is immersed in the dropped developer by passing through the developer. Then, the developer is collected by the developer storage tank 161 and stored again. The developer stored in the developer storage tank 161 is taken out by the circulation pump 174 and returned to the developer storage tank 161 again through the circulation line 185 having the filter 175. The developer in the developer storage tank 161 is constantly stirred by the circulation of the developer through the circulation line 185. The deteriorated developer is discarded (discharged) by operating the waste liquid pump 171.
Next, the concentration management device 1 of the present embodiment will be explained.
The concentration management device 1 of the present embodiment mainly includes a measurement unit 10, a calculation unit 20, a control unit 30, control valves 41, 42, and 43 provided in replenishment liquid supply pipes 81, 82, and 83, and integrated flow meters 51, 52, and 53.
The measurement unit 10 is connected to the developer storage tank 161 via a sampling pipe 15 and a return pipe 16. The measurement unit 10 is connected to the calculation unit 20 via measurement data signal lines 17 and 18. The measurement unit 10 includes a sampling pump 14 and measurement mechanisms 11 and 12. The measurement means 11 and 12 are, for example, a conductivity meter for measuring the concentration of an alkali component of the developer, an absorption spectrometer for measuring the concentration of a dissolved resin in the developer, or the like. The measuring devices 11, 12 are connected in series after the sampling pump 14. The sampling pump 14 is connected to the sampling pipe 15, and the return pipe 16 is connected to a pipe at the end of the measurement mechanism.
The measurement unit 10 preferably further includes a temperature adjustment mechanism (not shown) for stabilizing the sampled developer at a predetermined temperature, so as to improve the measurement accuracy. In this case, the temperature adjustment mechanism is preferably disposed immediately before the measurement mechanism.
The calculation unit 20 includes a calculation module 21 for calculating the component concentration (for example, alkali component concentration or dissolved resin concentration) of the developer based on the measurement data measured by the measurement unit 10. The calculation module 21 calculates the component concentration of the developer based on the measurement data measured by the measurement unit 10.
The arithmetic unit 20 is connected to the control unit 30 via a signal line 22. The arithmetic unit and the control unit may be integrated with each other through a computer, for example.
The control section 30 includes a control module 31. The control unit 30 is connected to the control valves 41, 42, and 43 provided in the replenishment liquid supply pipes 81, 82, and 83 via control signal lines 32, 33, and 34. The control module 31 determines which replenishment liquid is to be replenished to which extent based on the concentration of the developer calculated by the calculation unit 20, and controls opening and closing of a control valve provided in a pipe for transporting the replenishment liquid.
The replenishment liquid supply pipes 81, 82, 83 are also provided with integrated flowmeters 51, 52, 53, respectively, which measure the integrated flow rate of the supplied replenishment liquid. The replenishment liquid supply pipe 83 for deionized water may not be provided with an integrating flowmeter.
The operation of the concentration management apparatus 1 for the developer (chemical) is as follows.
First, the developer repeatedly used in the developing process equipment 100 is sampled by the sampling pump 14, and after measurement conditions such as temperature adjustment are appropriately adjusted, the conductivity and absorbance of the developer are measured by the measurement means 11 and 12, for example. The measured conductivity value and absorbance value of the developer are sent to the calculation unit 20 via the measurement data signal lines 17 and 18.
The calculation unit 20 calculates the component concentration of the corresponding developer based on the characteristic values of the developer, such as the conductivity and the absorbance, measured by the measurement mechanisms 11 and 12 of the measurement unit 10. The calculated concentration of the component of the developer is sent to the control unit 30 via the signal line 22.
The control unit 30 compares the component concentration of the developer calculated by the calculation unit 20 with a previously stored control target value of the component concentration. The control unit 30 selects a replenishment liquid to be replenished in order to maintain the component concentration at the control target value, calculates the supply amount of the replenishment liquid, or calculates the time during which a control valve provided in a pipe for transporting the replenishment liquid should be opened. The control unit 30 sends a signal for opening/closing control to any appropriate one of the control valves 41, 42, and 43 provided in the replenishment liquid supply pipes 81, 82, and 83 via the control signal lines 32, 33, and 34.
The control valve that receives the control signal opens the flow path for a predetermined time based on the control signal. The control valve is preset with a flow rate when opened. Therefore, a predetermined amount of the replenishment liquid is supplied by opening the flow path for a predetermined time.
For example, the alkali component concentration of the TMAH aqueous solution (developer) is controlled to 2.38% as follows. Here, an example will be described in which a stock solution of the developer (20% TMAH aqueous solution) is stored in the storage container 91, and a fresh solution of the developer (unused 2.38% TMAH aqueous solution) is stored in the storage container 92. When the concentration of the alkali component measured and calculated by the measurement unit 10 and the calculation unit 20 is less than 2.38%, the control valve 41 provided in the replenishment liquid supply pipe (the raw developer liquid supply pipe) 81 is opened for a predetermined time to replenish the raw developer (20% TMAH aqueous solution) prepared in advance in the storage container (raw developer liquid storage container) 91. When the concentration of the alkali component is higher than 2.38%, the deionized water is replenished by opening the control valve 43 provided in the replenishment liquid supply pipe (deionized water supply pipe) 83 for a predetermined time.
Similarly, the dissolved resin concentration is controlled to be equal to or lower than a predetermined control concentration as follows. When the concentration of the dissolved resin measured and calculated by the measurement unit 10 and the calculation unit 20 is higher than a predetermined control value, the control valve 42 provided in the replenishment liquid supply pipe (fresh developing solution supply pipe) 82 is opened for a predetermined time to replenish a fresh solution (unused 2.38% TMAH aqueous solution) of the developing solution prepared in advance in the storage container (fresh developing solution storage container) 92.
The storage containers 91 and 92 are pressurized by nitrogen gas introduced through the nitrogen gas pipe 85. The control valves 41 and 42 are opened to pressure-feed the replenishment liquid in the storage tanks 91 and 92. The control valve 47 is provided in the nitrogen gas pipe 85 for introducing nitrogen gas into the storage tank 91, and the control valve 46 is provided in the nitrogen gas pipe 85 for introducing nitrogen gas into the storage tank 92. The control valves 46 and 47 are appropriately opened and closed in response to the decrease in the liquid in the storage containers 91 and 92, and maintain the internal pressures of the storage containers 91 and 92. The valves 44 and 45 are provided on the reservoir 91 side of the replenishment liquid supply pipe 81 and the reservoir 92 side of the replenishment liquid supply pipe 82. The valves 44 and 45 are normally opened all the time, but when the storage containers 91 and 92 become empty, the valves 44 and 45 are closed and replaced with new storage containers 91 and 92 filled with the replenishment liquid.
Thus, the alkali concentration of the TMAH aqueous solution was controlled to 2.38% and the dissolved resin concentration was controlled to a predetermined control value or less. The concentration management is performed by, for example, PID Control (Proportional-Integral-Differential Control).
The replenishment liquid supply pipes 81, 82, 83 are provided with integrated flow meters 51, 52, 53. The integrated flow meters 51, 52, and 53 measure the integrated flow rate of the replenishment liquid supplied through the replenishment liquid supply pipes 81, 82, and 83. The replenishment liquid supplied from the concentration management apparatus 1 passes through the integrating flowmeters 51, 52, and 53, then merges at the merging line 84, and is replenished to the developer storage tank 161 via the circulation line 185. The integrating flowmeters 51, 52, 53 preferably have a communication function. If the communication function is provided, the integrated flowmeter can be connected to a network. The measurement value of the measured cumulative flow rate can be grasped via the network.
The integrating flowmeters 51, 52, and 53 are not limited to being directly connected to the network, and may be indirectly connected to the network. For example, the integrating flowmeters 51, 52, and 53 may be connected to a computer that performs the functions of calculation and control of the concentration management apparatus 1 in the concentration management apparatus 1, and may be indirectly connected to a network so that the concentration management apparatus 1 is connected to the network.
The network to which the integrated flowmeter is connected may be a local area network in a factory or a wide area network such as the internet.
As described above, according to the concentration management device for chemical liquid of the present invention, it is possible to realize concentration management of chemical liquid and measure the cumulative flow rate of the replenishment liquid to be supplied.
The concentration management device 1 of the present embodiment shown in fig. 1 is merely an example. The concentration control device for chemical solutions according to the present invention is not limited to this embodiment. In the concentration management device 1 of fig. 1, the device in which the respective components are integrally configured is illustrated, but the measurement unit 10, the replenishment liquid supply pipes 81, 82, 83, and the like may be separately formed. The internal structure and the like of the measurement unit 10 are not limited to those shown in fig. 1, and various methods can be adopted depending on the type of the liquid medicine and the like.
In summary, the concentration management device for chemical solution according to the present invention is characterized in that an integrated flowmeter is provided in a pipe for replenishment solution of the concentration management device capable of replenishing replenishment solution to chemical solution that is repeatedly used to manage the concentration of the chemical solution. Further, the integrating flowmeter has a communication function.
As an integrating flowmeter having a communication function, for example, a coriolis type digital flow rate sensor FD-S series manufactured by KEYENCE corporation is known. By installing the communication means, various data such as the measured accumulated flow rate data can be communicated with a personal computer or the like. Thus, the accumulated flow can be remotely monitored.
[ medicinal liquid regenerating device ]
Fig. 2 is a schematic diagram for explaining the chemical regeneration device according to the present embodiment. In the description of the present embodiment, a chemical solution regenerating apparatus that regenerates a developer by removing a resist component accumulated in the developer with a filter will be described. However, the structure of the chemical solution regeneration device is not limited to this. As the chemical solution regeneration apparatus, various methods may be used, such as removing unnecessary components by techniques such as electrodeposition, crystallization, and membrane separation, depending on the type of chemical solution, the nature of unnecessary components in the chemical solution, and the like, in addition to the filter removal.
In fig. 2, for convenience of explanation, a chemical solution regenerating apparatus (developer regenerating apparatus) 2 is shown as being connected to a developing process facility (chemical solution using facility) 100. The developing process apparatus (chemical solution using apparatus) 100 is the same as that shown in fig. 1, and therefore, the description thereof is omitted.
The chemical solution regeneration device (developer regeneration device) 2 of the present embodiment mainly includes filters 61, 62, and 63, a regenerated chemical solution storage container (regenerated developer storage container) 93, a transfer pump 70, an integrating flowmeter 54, a controller 35, and the like.
The used developer discarded (discharged) from the developing process equipment 100 is introduced into the filters 61, 62, and 63 of the chemical solution regenerating device 2 via the waste liquid recovery pipe 86. The filters 61, 62, and 63 filter and remove resist components and the like in the used developer. As shown in fig. 2, a plurality of filters of the chemical solution regeneration device 2 are preferably connected in parallel. This is to improve the regeneration processing capability of the developer and to improve the maintainability when the filter is clogged.
The regenerated developer regenerated by removing the unnecessary substances by the filters 61, 62, 63 is stored in the regenerated chemical storage container 93. The regenerated developer stored in the regenerated chemical storage container 93 is returned to the developing process apparatus 100 via a regenerated chemical supply pipe (regenerated developer supply pipe) 87 by the transfer pump 70.
The regeneration chemical liquid supply pipe 87 includes the control valve 48 and the integrating flowmeter 54 in addition to the transfer pump 70. The control valve 48 and the feed pump 70 are connected to a control module 36 included in the control unit 35 via control signal lines 37 and 38. The control module 36 controls the operation of the transfer pump 70 and the control valve 48 to transfer the regenerated developing solution to the developing process apparatus 100. The transfer pump 70 is driven by a control signal of the control module 36 and the control valve 48 is opened, thereby transferring the regenerated developing solution.
When the regenerated developer is transported, the cumulative flow rate of the regenerated developer supplied through the regenerated chemical supply pipe 87 is measured by the cumulative flow meter 54 provided in the regenerated chemical supply pipe 87.
The integrating flow meter 54 preferably has a communication function. If the communication function is provided, the integrated flowmeter can be connected to a network. The measurement value of the measured cumulative flow rate can be grasped via the network.
The integrating flow meter 54 is not limited to being directly connected to the network, and may be indirectly connected to the network. For example, the integrating flowmeter 54 may be indirectly connected to the network by connecting the developer (chemical) regenerating apparatus 2 to the network.
The network to which the integrated flowmeter is connected may be a local area network in a factory or a wide area network such as the internet.
As described above, according to the chemical regeneration device of the present invention, the regeneration process of the chemical can be realized, and the cumulative flow rate of the supplied regenerative chemical can be measured.
The chemical regeneration device 2 of the present embodiment shown in fig. 2 is merely an example. The chemical solution regeneration device of the present invention is not limited to this embodiment. In the chemical solution regeneration device 2 of fig. 2, the device in which the respective components are integrally configured is illustrated, but the control unit 35, the regeneration chemical solution storage tank 93, the filters 61, 62, 63, and the like may be separately configured. In the case where the regeneration chemical liquid is replenished as one of the replenishment liquids in the concentration management of the chemical liquid, the chemical liquid regeneration apparatus does not need to include the control unit 35, and the control valve 48 and the transfer pump 70 may be controlled by the concentration management apparatus 1.
In summary, the chemical solution regeneration device according to the present invention is characterized in that an integrated flow meter is provided in a pipe for supplying a regenerated chemical solution, the pipe being capable of regenerating a used chemical solution to a reusable chemical solution regeneration device. Further, the integrating flowmeter has a communication function.
As an integrating flowmeter having a communication function, for example, a coriolis type digital flow rate sensor FD-S series manufactured by KEYENCE corporation is known. By installing the communication means, various data such as the measured accumulated flow rate data can be communicated with a personal computer or the like. Thus, the accumulated flow can be remotely monitored.
[ method of calculating the solution concentration management cost ]
Next, a method of calculating the concentration management cost of the chemical solution according to the present embodiment will be described. Fig. 3 is a flowchart for explaining a method of calculating the concentration management cost of the chemical solution according to the present embodiment.
In describing the method of calculating the concentration management cost of the chemical solution according to the present embodiment, the concentration management apparatus is connected to the chemical solution using device as shown in fig. 1. That is, the concentration management device is connected to the chemical liquid storage tank of the chemical liquid usage device via a sampling pipe so that the concentration management device can measure the concentration of the chemical liquid stored in the chemical liquid storage tank of the chemical liquid usage device, and the concentration management device is connected to the chemical liquid usage device via a pipe provided with an integrated flow meter so that the chemical liquid can be replenished to the chemical liquid storage tank of the chemical liquid usage device.
As shown in fig. 3, the method for calculating the concentration management cost of the chemical solution according to the present embodiment includes: a concentration measuring step S1 of measuring the concentration of the chemical solution repeatedly used in the chemical solution using device; a replenishment liquid supply necessity determining step S2 of determining whether or not to supply the replenishment liquid based on the concentration measured in the concentration measuring step S1; a replenishment liquid supply step S3 for supplying a replenishment liquid to the chemical liquid using apparatus and controlling the concentration of the chemical liquid; an accumulated flow rate measuring step S4 of measuring an accumulated flow rate of the replenishment liquid to be replenished; a predetermined period elapsed determination step S5 of determining whether or not the period in which the density management is performed has elapsed the predetermined period; and a concentration management cost calculation step S6 of calculating a concentration management cost of the chemical solution based on the integrated flow rate measured in the integrated flow rate measurement step S4.
The concentration measuring step S1, the replenishment liquid supply necessity determining step S2, and the replenishment liquid supplying step S3 are steps which are usually provided in the method for managing the concentration of a chemical liquid in many cases. The method for calculating the concentration management cost of a chemical solution according to the present invention includes an integrated flow rate measuring step S4, a predetermined period elapsed determination step S5, and a concentration management cost calculating step S6.
The following specifically describes the steps from S1 to S6.
The concentration measurement step S1 is a step in which the concentration management device measures the concentration of the chemical solution repeatedly used in the chemical solution using apparatus. The concentration management device samples the chemical solution from the chemical solution storage tank and measures the component concentration. The measured component concentration is the component concentration of the chemical solution to be subjected to concentration management.
The concentration management device determines whether or not a replenishment liquid needs to be supplied to the chemical liquid based on the measured concentration of the chemical liquid. When replenishment of a replenishment liquid is required, the concentration management apparatus also makes a determination as to which replenishment liquid should be replenished in a small amount. This is the replenishment liquid supply necessity determining step S2.
The concentration measuring step S1 and the replenishment liquid supply necessity determining step S2 are repeated. In other words, the cycle of measuring the concentration and determining whether or not replenishment of the replenishment liquid is necessary is repeated. The concentration of the chemical solution is constantly monitored according to the circulation.
In the replenishment liquid supply necessity determining step S2, when it is determined that replenishment of the replenishment liquid is necessary, an appropriate amount of the replenishment liquid is supplied. This is the replenishment liquid supply step S3. When it is determined in the replenishment liquid supply necessity determining step S2 that replenishment liquid is not necessary, replenishment liquid is not supplied. By supplying an appropriate amount of replenishment liquid, the concentration of the chemical liquid is controlled to a desired concentration.
For example, when the concentration of the TMAH aqueous solution as the developer is controlled to 2.38%, the original liquid of the developer is supplied as the replenishment liquid when the concentration measured in the concentration measurement step S1 is lower than 2.38%, whereas the pure water (or the fresh liquid of the developer) is supplied as the replenishment liquid when the concentration is higher than 2.38%. Thus, the developer is always maintained and managed at 2.38%.
When the replenishment liquid is supplied to the chemical liquid in the replenishment liquid supply step S3, the cumulative flow rate of the replenishment liquid to be supplied is measured by a cumulative flowmeter provided in the pipe for transporting the replenishment liquid. This is the cumulative flow rate measuring step S4. The replenishment liquid supply step S3 and the integrated flow rate measurement step S4 are normally executed simultaneously. In other words, the measurement of the integrated flow rate is performed while supplying the replenishment liquid.
In the predetermined period elapsed determination step S5, it is determined whether or not the predetermined period has elapsed. When the predetermined period of time has not elapsed, the concentration of the chemical solution repeatedly used in the chemical solution using apparatus is managed and the cumulative flow rate of the replenishment solution is measured by repeating steps S1 to S4. When the predetermined period has elapsed, the process proceeds to the next concentration management fee calculation step S6.
In the concentration management charge calculation step S6, the concentration management charge for the chemical solution for a predetermined period is calculated based on the integrated flow rate of the replenishment solution measured in the integrated flow rate measurement step S4. When the difference between the current accumulated flow rate and the previous accumulated flow rate is obtained, the supply amount of the replenishment liquid in the current period is obtained. The concentration management cost of the chemical solution is calculated by multiplying the cumulative flow rate of the replenishment solution for the predetermined period calculated in this way by the supply unit price of the replenishment solution. The specific calculation formula of the concentration management cost of the chemical solution can be variously modified. Since several calculations are described above, a detailed description thereof will be omitted here. When no particular instruction is given, the concentration measurement step S1 is started to calculate the concentration management cost of the chemical solution in the next predetermined period after the present calculation of the concentration management cost of the chemical solution is performed.
[ method of calculating regeneration cost of chemical solution ]
Next, a method of calculating the chemical solution regeneration processing cost according to the present embodiment will be described. Fig. 4 is a flowchart for explaining a method of calculating the chemical solution regeneration processing cost according to the present embodiment.
In describing the method of calculating the chemical solution regeneration cost according to the present embodiment, the chemical solution regeneration apparatus is connected to the chemical solution using device as shown in fig. 2. That is, the chemical solution regeneration device is connected to the liquid discharge pipe of the chemical solution storage tank of the chemical solution utilization equipment so that the chemical solution regeneration device can regenerate the chemical solution stored in the chemical solution storage tank of the chemical solution utilization equipment, and the chemical solution regeneration device is connected to the chemical solution utilization equipment through a pipe having an integrated flow meter so that the regenerated chemical solution can be supplied to the chemical solution storage tank of the chemical solution utilization equipment.
The method for calculating the cost for the regeneration treatment of the chemical solution according to the present embodiment includes: a chemical solution regeneration step S11 of regenerating the chemical solution used in the chemical solution using apparatus to a reusable state; a regeneration chemical liquid supply step S12 of supplying the regeneration chemical liquid to the chemical liquid using device; an integrated flow rate measuring step S13 for measuring the integrated flow rate of the supplied regenerative chemical liquid; a determination step S14 of whether or not a predetermined period of time has elapsed since the period in which the regeneration chemical liquid is regenerated and the regenerative chemical liquid is supplied; a regeneration process cost calculation step S15 of calculating the regeneration process cost of the chemical solution based on the integrated flow rate measured in the integrated flow rate measurement step S13.
The chemical solution regeneration step S11 and the regenerated chemical solution supply step S12 are steps that are usually provided in a chemical solution regeneration processing method in many cases. The method for calculating the cost for the regeneration treatment of the chemical solution according to the present invention is characterized by comprising an integrated flow rate measuring step S13, a predetermined period elapsed judging step S14, and a regeneration treatment cost calculating step S15.
The following specifically describes the steps from S11 to S15.
The chemical solution regeneration step S11 is a step in which the chemical solution regeneration device regenerates the chemical solution used in the chemical solution using device so that the chemical solution can be reused. The chemical solution regeneration device receives the used chemical solution discarded from the chemical solution storage tank and separates and removes unnecessary components contained therein, thereby regenerating the used chemical solution to be reusable. For example, the process includes a step of finely filtering a resist component from a used developer by a filter.
The chemical solution after the regeneration treatment is supplied to the chemical solution using device as a regeneration chemical solution. This is the regeneration liquid medicine supply step S12. The regenerative chemical liquid is transported through a pipe provided with an integrated flow meter.
While supplying the regenerated chemical to the chemical-using device, an integrated flow meter provided in the pipe measures an integrated flow rate for the supply. In other words, the cumulative flow rate is measured while supplying the regeneration chemical liquid. This is the cumulative flow rate measuring step S13. This makes it possible to determine the supply amount of the regenerative chemical liquid.
In the predetermined period elapsed determination step S14, it is determined whether or not the predetermined period has elapsed. In the present embodiment, when the predetermined period of time has not elapsed, the chemical liquid stored in the chemical liquid storage tank of the chemical liquid using device is regenerated by repeating the chemical liquid regenerating step S11, the regenerated chemical liquid supplying step S12, and the integrated flow rate measuring step S13. The regenerated chemical solution after regeneration is supplied to the chemical solution storage tank. When the predetermined period has elapsed, the process proceeds to the next regeneration processing cost calculation step S15.
In the regeneration processing cost calculation step S15, the regeneration processing cost of the chemical liquid for a predetermined period is calculated based on the integrated flow rate of the regeneration chemical liquid measured in the integrated flow rate measurement step S13. When the difference between the current accumulated flow rate and the previous accumulated flow rate is obtained, the supply amount of the regenerative chemical liquid at the current stage is obtained. The integrated flow rate of the regenerative chemical liquid for the predetermined period thus calculated is multiplied by the supply unit price of the regenerative chemical liquid, and the regeneration processing cost of the chemical liquid is calculated. The specific calculation formula of the chemical solution regeneration cost can be variously modified. Several calculations are as described above and are omitted here. When no particular instruction is given, the chemical regeneration step S11 is started to calculate the chemical regeneration cost for the next predetermined period after the calculation of the chemical regeneration cost for the present time.
There are several variations of the supply of the regeneration chemical liquid. For example, the regenerative chemical may be supplied only when a supply request for the regenerative chemical is issued from the chemical using apparatus. For example, a concentration management apparatus and a chemical solution regeneration apparatus are used together, and a regenerated chemical solution may be supplied as one of replenishment solutions for concentration management.
In any of the modifications, the method for calculating the chemical solution regeneration processing cost according to the present invention is characterized in that the regenerative chemical solution is supplied while measuring the cumulative flow rate of the supplied regenerative chemical solution by using a cumulative flowmeter provided in a pipe for supplying the regenerative chemical solution, and the chemical solution regeneration processing cost is calculated based on the measured cumulative flow rate for a predetermined period.
[ method and System for calculating the solution concentration management cost using the network ]
Next, a method of calculating the concentration management cost of a chemical solution and a system for calculating the concentration management cost of a chemical solution using a network in which an integrated flow meter having a communication function is connected to a computer will be described. Fig. 5 is a schematic diagram of a chemical solution concentration management charge calculation system of a server system of a service provider that manages concentration of a chemical solution, which is provided with an integrated flow meter of a chemical solution user's factory and is connected via a network.
The calculation system 200 for the concentration management cost of the chemical solution according to the present embodiment shown in fig. 5 includes: 1 server system 202 provided by a service provider who manages a chemical solution concentration; integrated flowmeters 221, 222, 223, 224, and 225 having a communication function, which are connected via a network 201 and installed in chemical solution user factories 211, 212, 213, 214, and 215, respectively (that is, 5 integrated flowmeters installed in 5 factories, respectively).
The number of the cumulative flow meters and the server systems constituting the calculation system 200 for managing the concentration of the chemical solution is not limited to the number shown in fig. 5. The concentration management system of a chemical solution of the present invention may include at least 1 cumulative flowmeter and 1 server system connected via a network.
Although not shown in detail in fig. 5, a concentration management device for the chemical liquid is connected to the chemical liquid using device in each plant. The concentration management device manages the concentration of the chemical solution by supplying the replenishment solution to the chemical solution repeatedly used in the chemical solution using apparatus. The pipes for supplying the replenishment liquid from the concentration management apparatus to the chemical liquid using device are provided with integrated flow meters 221, 222, 223, 224, 225 having a communication function. The integrated flow meters 221, 222, 223, 224, and 225 measure the supply amount of the replenishment liquid supplied to the chemical liquid using apparatus as an integrated flow rate.
As the integrating flowmeter having a communication function, a coriolis type digital flow rate sensor FD-S series manufactured by KEYENCE corporation or the like can be used. Measurement data such as cumulative flow rate can be acquired remotely via a network such as the internet.
The server system 202 includes a receiving unit 203, a storage unit 204, and a calculation unit 205. In addition, the server system 202 is provided with a display 206. The server system 202 sequentially transmits measurement data transmission request signals to the integrated flowmeters 221, 222, 223, 224, and 225 connected to the network 201, so that the integrated flowmeters 221, 222, 223, 224, and 225 transmit the measurement data of the integrated flow rate. The integrated flow meters 221, 222, 223, 224, and 225 transmit measurement data of the integrated flow rate to the server system 202 in response to the transmission request signal.
In this way, the receiving unit 203 of the server system 202 acquires measurement data of the integrated flow rate from each of the integrated flow meters 221, 222, 223, 224, and 225. At this time, in accordance with measurement data of the integrated flow rate, an individual identification number (so-called device ID) of the integrated flow meter and a measurement date (that is, a measured date and time) are acquired in advance. Instead of measuring the time of day, the time of day may be communicated.
The server system 202 adds and stores the acquired measurement values of the integrated flow rates and the measurement times and days to the storage unit 204, which is configured by a memory, a hard disk, or the like, for each of the integrated flow meters 221, 222, 223, 224, and 225, based on the individual identification numbers of the integrated flow meters 221, 222, 223, 224, and 225.
The process of obtaining measurement data from the integrated flow meter is continuously repeated at predetermined time intervals (for example, at one minute or one hour intervals), and the transition of the supply amount of the replenishment liquid (i.e., history information of the integrated flow rate) is stored.
Since the storage unit 204 of the server system 202 stores history information of the cumulative flow rates of the cumulative flow meters 221, 222, 223, 224, and 225, the supply amount of the replenishment liquid in each predetermined period (for example, one week or one month) can be grasped. For example, when the supply amount of the replenishment liquid is determined for one month, the supply amount of the replenishment liquid in the present month can be obtained by subtracting the accumulated flow rate at the lookup date of the previous month from the accumulated flow rate at the lookup date of the present month.
The server system 202 also calculates the concentration management cost of the chemical solution for a predetermined period based on the supply amount of the replenishment solution for the predetermined period. For example, when it is necessary to calculate the concentration management cost of the chemical solution for one month, the concentration management cost of the chemical solution is calculated by multiplying the cumulative flow rate obtained as described above by, for example, the cost per unit liquid amount of the replenishment solution (unit price). The calculation formula of the concentration management cost, the constant required for the calculation, and the like may be programmed in advance in the calculation unit 205 of the server system 202.
In this way, the service provider of concentration management can request the chemical solution user for a predetermined period of time for the concentration management cost of the chemical solution that is reasonably calculated based on the cumulative flow rate of the replenishment solution. When the server system 202 is connected to a computer of a chemical solution user who is a payment source of the concentration management fee of the chemical solution through a network, the request of the concentration management fee of the chemical solution may be automatically and electronically made by the server system 202. In this case, the server system 202 may be programmed to automatically create a bill for requesting the calculated concentration management cost of the chemical solution electronically, and automatically transmit the bill to the chemical solution user electronically for a predetermined period.
The chemical solution user has completed the service provision of managing the chemical solution concentration for a predetermined period by paying the concentration management fee of the chemical solution. Thus, a method of calculating the concentration management cost of the chemical solution is realized, in which the supply amount of the replenishment solution necessary for the concentration management of the chemical solution at each location is remotely monitored at a single time via a network, and the concentration management cost involved in the concentration management of the chemical solution is calculated. It is possible to provide a service of remotely and collectively monitoring the cumulative flow rate of the replenishment liquid supplied to each location for the purpose of managing the concentration of the chemical liquid via a network and managing the concentration of the chemical liquid.
The network 201 of the present embodiment is not limited to the integrated flow meter installed in each plant. For example, a large-scale plant may have a plurality of manufacturing lines, or may be a relatively small-scale local area network in which integrated flow meters provided in the respective manufacturing lines are connected. The network may be a world-scale network (for example, the internet) in which the integrated flowmeters installed in the factories of the countries and regions of the world are connected, and for example, one integrated flowmeter may be installed in a factory in continental china, one integrated flowmeter may be installed in a factory in taiwan china, one integrated flowmeter may be installed in a factory in korea, and one integrated flowmeter may be installed in a factory in japan.
[ method and System for calculating regeneration processing cost of chemical solution Using network ]
Next, a method of calculating a chemical solution regeneration processing cost and a chemical solution regeneration processing cost calculation system using a network in which an integrated flow meter having a communication function is connected to a computer will be described. Since the schematic diagram for explanation is basically the same as fig. 5, the system for calculating the chemical solution regeneration processing cost according to the present embodiment will be explained with reference to fig. 5. In the present embodiment, fig. 5 is a schematic diagram of a chemical solution regeneration processing cost calculation system of a server system of a service provider that performs a chemical solution regeneration process including an integrated flow meter of a chemical solution user's factory and a chemical solution connected via a network.
The system 200 for calculating the chemical solution regeneration processing cost according to the present embodiment shown in fig. 5 includes: 1 server system 202 provided by a service provider of a service for regenerating a chemical solution; integrated flowmeters 221, 222, 223, 224, and 225 having a communication function, which are connected via a network 201 and installed in chemical solution user factories 211, 212, 213, 214, and 215, respectively (that is, 5 integrated flowmeters installed in 5 factories, respectively).
The number of the cumulative flow meters of the calculation system 200 and the number of the server systems constituting the chemical solution regeneration processing cost are not limited to those shown in fig. 5. The chemical solution regeneration processing cost calculation system of the present invention may include at least 1 cumulative flow meter and 1 server system connected via a network.
Although not shown in detail in fig. 5, a chemical solution regenerating apparatus is connected to the chemical solution using device in each plant. The chemical solution regeneration apparatus regenerates the chemical solution used in the chemical solution using device so as to be reusable, and supplies the regenerated chemical solution to the chemical solution using device. The pipes for supplying the regenerated chemical solution from the chemical solution regenerating apparatus to the chemical solution consuming device are provided with integrated flow meters 221, 222, 223, 224, 225 having a communication function. The integrated flow meters 221, 222, 223, 224, and 225 measure the supply amount of the regenerative chemical liquid to the chemical liquid using device as an integrated flow rate.
As the integrating flowmeter having a communication function, a coriolis type digital flow rate sensor FD-S series manufactured by KEYENCE corporation or the like can be used. Measurement data such as cumulative flow rate can be acquired remotely via a network such as the internet.
The server system 202 includes a receiving unit 203, a storage unit 204, and a calculation unit 205. In addition, the server system 202 is provided with a display 206. The server system 202 sequentially transmits measurement data transmission request signals to the integrated flowmeters 221, 222, 223, 224, and 225 connected to the network 201, so that the integrated flowmeters 221, 222, 223, 224, and 225 transmit the measurement data of the integrated flow rate. The integrated flow meters 221, 222, 223, 224, and 225 transmit measurement data of the integrated flow rate to the server system 202 in response to the transmission request signal.
In this way, the receiving unit 203 of the server system 202 acquires measurement data of the integrated flow rate from each of the integrated flow meters 221, 222, 223, 224, and 225. At this time, in accordance with measurement data of the integrated flow rate, an individual identification number (so-called device ID) of the integrated flow meter and a measurement date (that is, a measured date and time) are acquired in advance. Instead of measuring the time of day, the time of day may be communicated.
The server system 202 adds and stores the acquired measurement values of the integrated flow rates and the measurement times and days to the storage unit 204, which is configured by a memory, a hard disk, or the like, for each of the integrated flow meters 221, 222, 223, 224, and 225, based on the individual identification numbers of the integrated flow meters 221, 222, 223, 224, and 225.
The procedure of obtaining the measurement data from the integrated flow meter is continuously repeated at predetermined time intervals (for example, at intervals of one minute or one hour), and thereby the transition of the supply amount of the regenerative chemical liquid (i.e., history information of the integrated flow rate) is stored.
Since the storage unit 204 of the server system 202 stores history information of the cumulative flow rates of the cumulative flow meters 221, 222, 223, 224, and 225, the supply amount of the regenerative chemical liquid in each predetermined period (for example, one week or one month) can be grasped. For example, when the supply amount of the regenerative chemical liquid is determined for one month, the supply amount of the regenerative chemical liquid in the present month can be obtained by subtracting the cumulative flow rate at the lookup date of the previous month from the cumulative flow rate at the lookup date of the present month.
The server system 202 also calculates the cost for the regeneration process of the chemical solution for a predetermined period based on the supply amount of the regenerated chemical solution for the predetermined period. For example, when the chemical solution regeneration cost needs to be calculated for one month, the chemical solution regeneration cost is calculated by multiplying the cumulative flow rate obtained as described above by, for example, the cost per unit supply amount of the regenerated chemical solution (unit price). The calculation formula of the regeneration processing cost, the constant required for the calculation, and the like may be programmed in advance in the calculation unit 205 of the server system 202.
In this way, the service provider of the chemical liquid regeneration process can request the chemical liquid user for a predetermined period of time for the chemical liquid regeneration process cost that is reasonably calculated based on the cumulative flow rate of the regenerated chemical liquid. When the server system 202 is connected to a computer of a chemical solution user who is a payment party of the chemical solution regeneration processing fee through a network, the request of the chemical solution regeneration processing fee may be automatically and electronically performed by the server system 202. In this case, the server system 202 may be programmed to automatically create a bill for requesting the calculated regeneration processing cost of the chemical solution electronically, and to automatically send the bill to the chemical solution user electronically for a predetermined period.
The chemical solution user pays the chemical solution regeneration cost, and thus, service provision such as regeneration of the chemical solution for a predetermined period is completed. In this way, a method of calculating the chemical solution regeneration processing cost is realized, in which the supply amount of the regeneration chemical solution for the chemical solution regeneration processing is monitored at each location in a centralized manner and the regeneration processing cost for the chemical solution regeneration processing is calculated. The integrated flow rate of the regenerated chemical solution that is regenerated to be reusable by the regeneration process of the chemical solution at each location can be remotely and collectively monitored via a network, and the used chemical solution can be regenerated.
The network 201 of the present embodiment is not limited to the integrated flow meter installed in each plant. For example, a large-scale plant may have a plurality of manufacturing lines, or may be a relatively small-scale local area network in which integrated flow meters provided in the respective manufacturing lines are connected. The network may be a world-scale network (for example, the internet) in which the integrated flowmeters installed in the factories of the countries and regions of the world are connected, and for example, one integrated flowmeter may be installed in a factory in continental china, one integrated flowmeter may be installed in a factory in taiwan china, one integrated flowmeter may be installed in a factory in korea, and one integrated flowmeter may be installed in a factory in japan.
The contents described above with reference to the drawings in the embodiments can be similarly applied to various chemical solutions used in the manufacturing process of semiconductor and liquid crystal display substrates.
According to the present invention, the chemical solution user can use the chemical solution managed to the desired concentration by paying only the concentration management cost and the regeneration processing cost without having to bear the burden of purchasing the concentration management apparatus or the chemical solution regeneration apparatus, or operating or maintaining and managing them, and can obtain and use the regenerated chemical solution. Therefore, the chemical solution user can enjoy various economic advantages associated with cost reduction for purchase or maintenance management of the apparatus, cost reduction for chemical solution preparation or waste liquid treatment, improvement in the operating rate or yield of the production line, improvement in the quality of the manufactured substrate, and the like.
According to the present invention, the service provider can obtain a continuous and stable profit compared to the case of selling the device by the business method that can be realized by the present invention. Further, according to the present invention, it is possible to provide a chemical solution concentration management apparatus and a chemical solution regeneration apparatus which are essential for realizing the new business method. According to the present invention, it is also possible to monitor the cumulative flow meters used in the factories of the respective users remotely and collectively by a server system connected to a network.

Claims (10)

1. A concentration management device for a chemical solution, which is connected to a device that uses a chemical solution repeatedly by a pipe, and which manages the concentration of the chemical solution by supplying a replenishment solution to the chemical solution used in the device via the pipe,
wherein,
the piping is provided with an integrated flowmeter.
2. The chemical solution concentration management apparatus according to claim 1,
the cumulative flowmeter has a communication function.
3. A method for calculating the concentration management fee of liquid medicine,
the method for calculating the concentration management cost of the liquid medicine comprises the following steps:
measuring an integrated flow rate of a replenishment liquid supplied from a concentration management apparatus that supplies a replenishment liquid to a chemical solution that is repeatedly used in a device that uses the chemical solution, via a pipe provided with the integrated flow meter;
and calculating a cost for concentration management of the chemical solution based on the integrated flow rate of the replenishment solution measured by the integrated flow meter for a predetermined period.
4. A method for calculating the cost for managing the concentration of a chemical solution, wherein the cost for managing the concentration of the chemical solution is calculated by using a network connecting a server system and an integrated flow meter which is provided in a pipe for supplying a replenishment solution to a concentration management device for supplying the replenishment solution to the chemical solution repeatedly used in a chemical solution using facility and has a communication function,
wherein,
the method for calculating the concentration management cost of the liquid medicine comprises the following steps:
the server system obtains the accumulated flow rate measured by each accumulated flow meter through the network;
the server system stores, for each of the cumulative flowmeters, history information of the cumulative flowmeters acquired via the network; and
the server system calculates a cost for concentration management of the chemical solution for a predetermined period for each of the devices based on the history information.
5. A system for calculating the concentration management fee of a liquid medicine,
the system for calculating the concentration management cost of the chemical solution comprises:
an integrated flowmeter which is provided in a pipe for supplying a replenishment liquid to a concentration management device that supplies the replenishment liquid to the chemical liquid that is repeatedly used in a chemical liquid using apparatus, and which has a communication function; and
a server system connected to the cumulative flow meter via a network,
the server system includes:
a receiving unit that receives an accumulated flow rate measured by the accumulated flow meter via the network;
a storage unit that stores history information of the cumulative flow rate received by the receiving unit for each of the cumulative flow meters; and
and a calculation unit that calculates a cost for concentration management of the chemical solution for each of the devices in a predetermined period based on the history information stored in the storage unit.
6. A chemical solution regeneration device which regenerates a used chemical solution to a reusable state and supplies the regenerated chemical solution to a device using the regenerated chemical solution,
wherein,
an integrated flow meter is provided in a pipe for supplying the regeneration chemical liquid to the device.
7. The medical fluid regenerating device according to claim 6,
the cumulative flowmeter has a communication function.
8. A method for calculating the cost of regenerating the medical liquid,
the method for calculating the regeneration treatment cost of the liquid medicine comprises the following steps:
measuring an accumulated flow rate by an accumulated flowmeter while supplying a regenerative chemical solution, which is regenerated by a chemical solution regeneration device that regenerates the used chemical solution to a reusable chemical solution, to a device that uses the chemical solution via a pipe equipped with the accumulated flowmeter;
the cost of the chemical solution regeneration process is calculated based on the cumulative flow rate of the regenerated chemical solution for a predetermined period measured by the cumulative flow meter.
9. A method for calculating the cost of a chemical solution regeneration process, which calculates the cost of the chemical solution regeneration process using a network connecting a server system and an integrated flow meter which is provided in a pipe for supplying a regenerated chemical solution to a device using the chemical solution and has a communication function, the regenerated chemical solution being a chemical solution regenerated by a chemical solution regeneration device which regenerates the used chemical solution to a reusable chemical solution,
wherein,
the method for calculating the regeneration treatment cost of the liquid medicine comprises the following steps:
the server system obtains the accumulated flow rate measured by each accumulated flow meter through the network;
the server system stores history information of the acquired cumulative flow rate for each of the cumulative flow meters; and
the server system calculates a cost for the regeneration process of the chemical solution for a predetermined period for each of the devices based on the history information.
10. A system for calculating the regeneration cost of a liquid medicine,
the system for calculating the cost for the regeneration treatment of the chemical solution comprises:
an integrated flowmeter which is provided in a pipe for supplying a regenerative chemical to a device using the chemical and has a communication function, the regenerative chemical being a chemical regenerated by a chemical regenerating device that regenerates the used chemical to a reusable chemical; and
a server system connected to the cumulative flow meter via a network,
the server system includes:
a receiving unit that receives an accumulated flow rate measured by the accumulated flow meter via the network;
a storage unit that stores history information of the cumulative flow rate received by the receiving unit for each of the cumulative flow meters; and
and a calculation unit that calculates a cost of the chemical solution regeneration process for each of the devices for a predetermined period based on the history information stored in the storage unit.
CN201711232617.6A 2017-05-26 2017-11-29 The concentration management device of medical fluid, regenerating unit, expense calculation method and system Pending CN108960882A (en)

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