KR20110072932A - Recycled chemical supply system using continuous mixing device - Google Patents

Abstract

PURPOSE: A supplying apparatus for the regenerative liquid source using the continuous mixing device is provided to reduce a drug solution stock, to use drug solutions efficiently and to deal with mixing ratio changes based on processes immediately by being able to producing and reusing drug solutions on a real time basis after recycling drug solutions (waste water) already used at a semiconductor or a display manufacturing process. CONSTITUTION: The supplying apparatus for the regenerative liquid source using the continuous mixing device includes a recycling plant(100) recycling and treating an already used drug solution (waste water) and creating as a regenerative drug solution; a transferring pump of the regenerative drug solution at a fixed quantity(110), which is connected to the recycling plant, and transfers the regenerative drug solution based on a decided supply quantity; a composition detector of the regenerative drug solution(120) analyzing components of the regenerative drug solution flown out of the recycling plant; at least one supplementary drug solution tank, which separately accepts the drug solutions supplemented in the regenerative drug solution; a transferring pump of the supplementary drug solution at a fixed quantity(30), which is connected to the supplementary drug solution tank, and individually transfers the supplementary drug solutions based on determined quantities; a continuous mixing device, which is consecutively flown in by the transferring pump of the regenerative drug solution at a fixed quantity and the transferring pump of the supplementary drug solution at a fixed quantity, mixes in the flow, and discharges chemical composition containing uniformly mixed drug solution; a composition slurry composition detector(40) analyzing components of the chemical composition flown out of the continuous mixing device; a controller(50) controlling a supply quantity of the transferring pump at a fixed quantity on the basis of the composition slurry composition detector and the composition detected from the composition slurry composition detector; and a feeder(60) supplying the chemical composition manufactured in the continuous mixing device to outside.

Description

Regeneration solution supply device using continuous mixing device {RECYCLED CHEMICAL SUPPLY SYSTEM USING CONTINUOUS MIXING DEVICE}

The present invention relates to a regeneration chemical supply device using a continuous mixing device, and used in the case of regenerating and using a mixed composition such as a stripper or thinner used in a display manufacturing process such as a conventional semiconductor or LCD (waste solution) ) Can be commercialized and reused in real time immediately after the waste is recycled, thus reducing the stock of chemicals, enabling efficient use, and regeneration chemicals using a continuous mixing device that can respond immediately to changes in the mixing ratio according to the process. It relates to a supply device.

In general, a variety of chemical compositions are used for each process in a semiconductor manufacturing process, an LCD manufacturing process, etc. In such a composition, a chemical composition of various components is often mixed to produce a required composition.

In addition, when such a composition is used and discarded once, the manufacturing cost increases and causes environmental pollution. Therefore, the composition is often used by regenerating it. Can be mentioned.

After using the above-mentioned mixed chemicals such as strippers and thinners, reusing them is necessary to reuse them, and in such a regenerating process, unnecessary impurities or suspended matters contained in the chemicals are removed, and the composition changed according to the process is used. This includes re-adjusting the ingredient ratio, which is generally collected and transferred to a recycling company equipped with a recycling facility, and after a separate recycling process, it is transferred from the recycling company and reused. It is necessary to provide a separate collection space to collect the waste liquid, and there is a problem in that a space and a work for storing the regenerating liquid again are required.

In addition, in the manufacturing process may change the concentration and composition of the medicinal solution from time to time as needed, there is a problem in that it is difficult to respond to this in real time.

Therefore, it is possible to respond in real time according to the process change, easy to install even in a narrow space, and installed adjacent to the manufacturing facility does not cause a separate transportation problem, the development of a chemical regeneration supply device with a low installation cost burden is urgently needed.

In addition, in the case of such a real-time supply device, the problem is that since the mixing of the chemical liquid in real time, and the mixed chemical liquid is supplied immediately, the mixing of the chemical liquid is made in a fast time, uniform in the section to confirm the composition ratio In this case, the mixing should be completed, and the change in the ratio of each chemical composition in the chemical liquid thus mixed is small so that real time supply is possible. In the case of the conventional chemical liquid mixing manifold as shown in FIG. As the chemical liquid flowing through the manifold (solid arrow) hits the wall of the mixing chamber, a back pressure (dashed arrow) is generated to prevent the incoming chemical liquid from entering the mixing chamber. Therefore, due to such a back pressure, there is a problem that the concentration changes such as hunting (hunting) of the real-time concentration due to the inflow is not even.

Therefore, there is an urgent need for the development of a chemical mixing manifold capable of high mixing efficiency and minimizing the occurrence of back pressure.

In order to solve the above problems, the present invention, when using a mixed composition such as a stripper or thinner used in a conventional display manufacturing process, such as a semiconductor or LCD, the previously used chemicals (waste solution) in the waste solution regeneration equipment It is possible to provide a regeneration chemical supply device using a continuous mixing device that can be used in real time immediately after regeneration, to reduce the chemical inventory, efficient use, and immediately respond to changes in the mixing ratio according to the process. The purpose.

In order to achieve the above object, the present invention

A regeneration facility for generating regenerated chemicals by regenerating used chemicals;

A regeneration chemical metering pump connected to the regeneration facility to transfer the regeneration chemical according to a predetermined supply amount;

A regeneration chemical composition detector for analyzing a component of the regeneration chemical flowing out from the regeneration facility;

At least one refill chemical tank for individually receiving replenishment chemicals replenished with the regenerated chemical;

A supplemental medicament metering pump connected to the supplemental medicament tank to separately transport each supplemental medicament according to a predetermined supply amount;

A continuous mixing device which is continuously introduced by the regenerative chemical metering pump and the supplemental chemical metering pump, and mixed in a stream, and outflows a chemical composition in which the chemical solutions are uniformly mixed;

A mixed chemical composition detector for analyzing a component of the chemical composition flowing out of the continuous mixing apparatus;

A controller for controlling the supply amount of the metered feed pump according to the composition detected from the regeneration chemical composition detector and the mixed chemical composition detector; And,

It provides a regeneration chemical supply device using a continuous mixing device, characterized in that it comprises a feeder for supplying the chemical composition produced in the continuous mixing device to the outside.

According to the regeneration chemical supply device using the continuous mixing device of the present invention, in the case of regenerating and using a mixed composition such as a stripper or thinner used in a display manufacturing process such as a conventional semiconductor or LCD, the previously used chemical liquid (waste liquid) Can be recycled in real time immediately after being recycled to waste liquid regeneration equipment, which can reduce transportation costs and time due to chemical regeneration, reduce chemical inventory, enable efficient use, and promptly change the mixing ratio according to the process. Can achieve the corresponding effect.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a regeneration chemical supply device using a continuous mixing device is connected to the regeneration equipment 100, the regeneration equipment 100 to generate a regeneration chemical by using the regeneration treatment of the previously used chemical liquid (waste liquid), the regeneration Regeneration liquid metering transfer pump 110 for transferring the chemical liquid according to a predetermined supply amount, regeneration chemical composition detector 120 for analyzing the composition of the regeneration chemicals flowing out of the regeneration facility 100, the replenishment chemicals replenished in the regeneration liquid Supplemental chemical solution tanks 20a and 20b for individually receiving them, and are connected to the supplemental medicine solution tanks 20a and 20b, respectively, to supplement each of the supplemental medicine solutions according to a defined supply amount, and a supplemental medicine solution transfer pump 30 Continuously introduced by the regenerative chemical metering pump 110 and the supplemental chemical metering pump 30 and mixed in a flow, the chemicals are uniformly mixed Continuous mixing device 10 'out of composition, mixed chemical composition detector 40, the regeneration liquid composition detector 120 and the mixture to analyze the components of the chemical composition flowing out of the continuous mixing device 10' Supplying the controller 50 for controlling the supply amount of the metering pump (110, 30) according to the composition detected from the chemical liquid composition detector 40, and the chemical composition produced in the continuous mixing device (10 ') to the outside It has a configuration including a feeder (60).

That is, as shown in the specific example of Figure 1, the present invention is a composition ratio of the chemical liquid regenerated by the regeneration equipment (mainly equipment for removing impurities or suspended matter, means the regeneration without final composition ratio adjustment). Is added in real time, and additional components are added in order to eliminate the difference between the identified composition ratio and the composition ratio required for the user's use. By re-checking and controlling the feedback, impurities and suspended matters are removed, and a regeneration chemical supply device for directly supplying a chemical composition having a composition ratio required for use by the user whose composition ratio adjustment is completed.

The regeneration facility refers to a facility for regenerating a normal waste liquid, and means a facility for regeneration without undergoing final composition ratio adjustment to be carried out later. As a specific example, in the case of a stripper or thinner, it is possible to remove impurities or suspended matter contained in the chemical liquid through a filtering process.

The regenerated chemical liquid, thus recycled waste liquid, must be supplied in a state of knowing a constant supply amount, and thus is supplied to the continuous mixing device through the regeneration chemical metering pump. The metering pump may be applied to the pump for feeding a conventional metering, it is preferable to prevent the pulsation of the chemical liquid, while the pulsation constant flow pump for supplying the chemical liquid in a constant amount according to a set value control the correct amount It is good to be advantageous. In addition, it may further include a regeneration chemical tank 130 for storing the regeneration chemical at the rear end of the regeneration facility in order to stabilize the regeneration chemical and to secure a buffering space. Specific examples thereof are as shown in FIG. 2, which may be configured to a much smaller size than the conventional storage tank, and the regenerative chemical tank may correspond to a conventional chemical storage tank. .

Next, since the composition ratio of the regenerative chemical solution should be checked during the supply process, a regenerative chemical detector capable of detecting the composition of the regenerative chemical solution is placed therebetween. Therefore, the regeneration liquid detector may be located anywhere between the outlet end of the regeneration facility and the front end of the inlet of the continuous mixing device. When the regeneration solution tank 130 is further provided, the regeneration solution composition detector may include i) I) to analyze the regeneration chemicals flowing out of the regeneration equipment or ii) the regeneration chemicals of the regeneration chemicals tank or iii) the regeneration chemicals flowing out of the regeneration chemicals tank, i) after the outlet of the regeneration equipments or ii) the regeneration chemicals Tank or iii) an outlet of the regeneration chemical tank. The composition detector may be applied to a conventional composition detector that can analyze the components of the regeneration solution to determine how much difference with the desired composition ratio, preferably using a near infrared (NIR) spectrometer high reliability and excellent real-time It is good because it can secure response characteristics and it is easy to install and change.

Next, an additional chemical solution is added to the regeneration solution to adjust the composition of the regeneration solution to the composition of the original solution or the composition desired by the user. To this end, a replenishment solution tank accommodating the replenishment solutions supplemented with the regeneration solution It is provided. The replenishment liquid tank may be provided in one to a plurality depending on the type of chemical liquid to be replenished. The supplement chemical tank may be a conventional chemical storage tank.

As shown in the specific examples of FIGS. 1 to 2 for the quantitative supply of such a supplemental medicine solution, the supplementary medicine solution tank is connected to the supplementary medicine solution delivery pump. The supplemental drug solution metering pump may also be applied to a conventional pump for supplying a fixed amount. Preferably, the pump is a pulsation-free constant flow pump that supplies a constant amount of the drug solution according to a predetermined value while preventing pulsation of the drug solution. It is good to control quantity.

Thus, each chemical liquid supplied by each metering pump is mixed through the continuous mixing apparatus described above. Preferably, the continuous mixing device may further include a chemical liquid mixing manifold that substantially performs chemical liquid mixing so that the composition ratio is less varied and the mixing is efficiently performed in a short time, and the chemical liquid mixing manifold is At least two injection ports 2 into which the chemical liquids are respectively injected, the injection holes 2 are combined to inject the chemical liquids, and a mixing chamber 4 having a circumferential surface and mixing from the mixing chamber 4 to the outside. And a discharge port 6 for discharging the chemical liquid, and the injection hole 2 is coupled to the mixing chamber 4 in contact with the circumferential surface to have an injection direction in contact with the circumferential surface of the mixing chamber 4, and Each inlet 2 is preferably configured to be spaced apart from each other in the vertical direction of the mixing chamber (4).

That is, as shown in the specific example in Figure 4, the mixing chamber 4 has a circumferential side, the inlet 2 is in contact with the circumferential side by combining the chemical liquid introduced as shown by the dotted arrow It flows along the circumferential side of the mixing chamber, reducing the fluid resistance compared to the existing manifold as shown in Figure 3, increasing the distance to flow without the back pressure, thereby minimizing the back pressure caused by the inflow of the chemical liquid It is possible to increase the mixing characteristics so that uniform mixing between the chemical liquids can be achieved according to the rotational movement in the mixing chamber of the flow.

However, simply combining the inlet in the tangential direction does not minimize the interference between the incoming chemicals, so that the inlet in contact with the tangential direction is spaced apart from each other in the vertical direction of the mixing chamber to minimize the interference between them. It is necessary to be. The separation distance can be adjusted in various ranges, and as a specific example of this, as shown in FIG. 4, the distance between the centers of each injection hole constitutes about half of the diameter of the injection hole, and the configuration substantially overlaps the injection hole to some extent. As shown in FIG. 5, the distance between the centers of the respective injection holes may be larger than the diameter of the injection holes, and may have a configuration that does not substantially overlap between the injection holes. That is, in the case of FIG. 4, when the rotational direction in the mixing chamber flows in a counterclockwise direction, all in a constant rotational direction, based on one inlet, the flow of another layer adjacent thereto is applicable. It may also act as a form to help the inflow of the drug solution, it may be configured in this way, if you want to reduce the interference between each inlet as shown in Figure 5, it is possible to maintain a sufficient separation distance, In this case, it is not necessary for each inlet to be combined so that interference is essentially the same rotational direction for each layer, and if it is required to achieve the mixing in a short time as necessary, the inflow directions of the chemical liquids in each layer are mutually different. It can also be configured to be reversed.

The rotation of each layer is independent through the vertical spaced apart to minimize the interference as shown in FIGS. 5 to 6. For convenience, the inlet is not shown and is indicated by a thick solid arrow (shown with a dotted line when located behind the mixing chamber), and the flow of the injected chemical liquid is as shown by a thin dotted line arrow, and the inlet is to be manufactured. It may be disposed according to the number of chemical liquids required for the mixed composition, and may be further provided with a preliminary inlet if necessary. In addition, the inflowing chemical liquid may form the required chemical composition while the material is maintained even after mixing, or may react with other incoming chemical liquid to form a third substance after mixing to form the required chemical composition. have. In addition, the chemical liquid includes both liquid and colloidal forms, including liquid and powder.

Preferably, the inlet 2 is coupled to the mixing chamber 4 in contact with the circumferential surface and at the same time inclined at an acute angle with respect to the horizontal plane. Specific examples thereof are as shown in FIGS. 7 and 8 (b). Through this, the rotational distance of the flow can be further increased, so that the back pressure can be further improved, and the mixing efficiency can be further increased by generating the shangdong of the flow. Further, in this case, the vertical space of each of the injection ports 2 is a rotation section R in the mixing chamber 4 of the chemical solution injected from each injection port 2 (the ellipse of the rotation section is ideal for the chemical solution flowing from the injection port). The dashed line shows the rotation, and the dotted line means the section that rotates close to the back side of the mixing chamber, and the solid line means the section that rotates near the front side of the mixing chamber.), So that the mixing chamber of the chemical liquid injected from each inlet 2 does not overlap each other. It is preferable that the rotation section R in (4) is spaced apart from each other. Through this, interference between the inflowing chemicals can be minimized, and an example thereof is shown in FIG. 7.

In addition, as shown in the specific examples in FIGS. 4 and 5 (b), the injection holes 2 are preferably the circumference of the mixing chamber 4 when viewed from the top of the mixing chamber 4. Spaced apart at regular intervals along the direction is good to improve the mixing efficiency.

As described above, the mixing chamber has a circumferential side surface in order to place the inlet in contact with the surface and smoothly mix the introduced chemical liquid, and has an outlet for providing a composition mixed in the mixing chamber on one side. Have

Preferably, the outlet 6 of the mixing chamber 4 is located above the mixing chamber 4. This is because the mixed composition is discharged in the form of being pushed up by the pressure, the flow is stabilized, it is good because it is possible to obtain the effect that the mixing is completed and discharged. In addition, more preferably, as shown in Figure 6, each of the injection port (2) it is preferable that the injection port (2) of the chemical liquid having a lower specific gravity among the injected chemical liquid is further located below the vertical direction. In other words, the chemicals having the lowest specific gravity are injected into the uppermost portion at the lowermost portion in the order of the inlets arranged from the bottom to the uppermost portion so that the mixing is more evenly performed in the mixed composition discharged to the upper portion. This is more useful in the case where the viscosity of the incoming chemical liquid is high, or reactive, such as when a third material is formed through the reaction between the incoming chemical liquid.

In addition, when high mixing performance is required as described above, a line mixer coupled to the outlet of the mixing chamber may be further included as necessary. Specific examples thereof are as shown in FIGS. 1, 2, and 4. The line mixer may be a conventional line mixer (line mixer or in-line mixer or line static mixer). In the line mixer, as illustrated in FIGS. 1 and 2, a plurality of turbulence forming members 8a are provided in the piping in left and right directions (directions that prevent a straight flow of fluid). The fluid flowing inside the pipe collides with the turbulence forming member 8a to change the flow direction of the fluid, thereby converting the laminar flow into a turbulent fluid, thereby allowing the fluids to be uniformly mixed. The turbulence forming member 8a serves as a stirrer in the static pipe and is also called a mixing element. 1 to 2, the turbulence forming member 8a is a helical type having an oblique inclined surface so as to induce an oblique flow of raw material components with respect to the long axis of the pipe through which the fluid flows. The mixing element of can be used. The turbulence forming member 8a is preferably made of a corrosive and durable material such as stainless steel.

Also preferably, in the inner surface of the mixing chamber 4, a plurality of protrusions 9 or a plurality disposed in parallel to the direction perpendicular to the injection direction of the injection hole 2 may be provided on the inner surface of the mixing chamber 4 in contact with the outlet of the injection hole 2. It is preferable that the riblet 9 'is formed. A specific example thereof is as shown in FIG. 8. FIG. 8A illustrates a case where a plurality of protrusions are disposed, and in addition to the case where a plurality of protrusions are disposed, beads having a diameter of several micrometers to several millimeters may be applied to the inner surface to generate a minute protrusion shape on the inner surface. In this way, it is possible to form a fine turbulence in the interior without disturbing the flow of the flow itself, so that the mixing can be made well. In addition, by forming a riblet as shown in (b) of FIG. 8, an effect similar to the protrusion may be obtained.

In the case of applying the above-mentioned chemical mixture manifold, the occurrence of back pressure is remarkably reduced as compared with the case in which the manifold shown in FIG. 3 is generally applied, and the pressure fluctuation rate is measured as a result of measuring the pressure in the pipe over time. Compared with the conventional case, it was possible to obtain an effect of decreasing to 1/5.

Next, a mixed chemical composition detector connected to the rear end of the continuous mixing device to analyze the components of the mixed chemical composition in order to check whether the composition ratio adjustment of the mixed chemical composition is well made. The mixed chemical composition detector 40 may be applied to a conventional composition detector that can determine whether the desired composition ratio is obtained by analyzing the components of the mixed chemical composition, preferably using a near infrared (NIR) spectrometer It is good because it can secure high reliability and excellent real-time response, and is easy to install and change.

The composition ratio detected from the regenerative chemical composition detector and the mixed chemical liquid composition detector is input to the controller 50 so that the controller 50 appropriately adjusts each metering pump (regeneration chemical metering pump and supplemental chemical metering pump). To adjust. The dotted line connection between the blocks shown in Figs. 1 and 2 means signal transmission, and the solid line connection means fluid flow.

The chemical composition prepared through the control of such a controller is finally provided through the feeder 60, and this may be a case in which a container, a tank lorry, and the like are directly connected to a filling machine or a process line of a manufacturing process.

In addition, when the composition ratio of the chemical composition flowing out to the filler is out of the desired composition range due to external shock or sudden power disturbance, the chemical composition is usually discarded, but in the case of the present invention can be adjusted again. Therefore, it can be preferably sent back to the regeneration facility, more preferably it can be re-adjusted by adding the supplemental medicine once again, if it is not satisfied here also can be sent back to the regeneration facility. That is, as shown in the specific example of FIG. 9, the second continuous mixing device 10 ″ connected to the rear end of the continuous mixing device and the supplementary chemical liquid tanks 20a and 20b are separately connected to each other. A second replenishment liquid metering pump (30 '), the continuous mixing device (10') and the second continuous mixing, respectively for supplying the replenishing chemical liquids to the second continuous mixing device (10 ") according to a predetermined supply amount. A switching valve 140 connected between the devices 10 "to divert the outflow direction of the chemical composition flowing out of the continuous mixing device 10 'to the feeder 60 or the second continuous mixing device 10". ), A second mixed chemical composition detector 40 ′, the regenerated chemical composition detector 120, and a mixed chemical composition detector 40 analyzing the components of the chemical composition flowing out of the second continuous mixing device 10 ″. And the regeneration chemical metering pump 110 and the supplement according to the composition detected from The supply amount of the liquid metering pump 30 is controlled, and if the detection value of the mixed chemical liquid composition detector 40 is appropriate, the switching valve 140 is switched to the supply device 60, and if not, the second continuous mixing is performed. Switching to the apparatus 10 ", the supply amount of the said 2nd supplement chemical liquid metering delivery pump 30 'is controlled according to the composition detected from the said mixed chemical liquid composition detector 40 and the 2nd mixed chemical liquid composition detector 40'. It may be configured to further include a controller.

This can reduce the amount of chemicals that have to be disposed of and reprocessed, thereby increasing the efficiency and productivity of the equipment.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various modifications of those skilled in the art without departing from the spirit and scope of the present invention described in the claims below. And modifications are also included within the scope of the invention.

1 is a schematic system diagram of an embodiment of a regeneration chemical supply device using a continuous mixing device of the present invention.

2 is a schematic system diagram of another embodiment of a regeneration chemical supply device using the continuous mixing device of the present invention.

3 is a perspective view schematically showing a manifold shape for general chemical liquid mixing.

FIG. 4 is a perspective view schematically showing an embodiment of a medicament mixing manifold applied to a regeneration chemical supply device using a continuous mixing device of the present invention, in which a line mixer is combined. to be.

Figure 5 is another embodiment for explaining the operation example of the chemical liquid mixing manifold applied to the regeneration chemical liquid supply apparatus using the continuous mixing device of the present invention, it is a view schematically showing a perspective view and a plan view thereof.

6 is a perspective view and a front view schematically showing a flow of another embodiment for explaining the operation of the chemical liquid mixing manifold applied to the regeneration chemical liquid supply device using the continuous mixing device of the present invention shown in FIG. Figure is shown.

FIG. 7 is a front view schematically showing another embodiment of a medicament mixing manifold applied to a regeneration chemical supply device using a continuous mixing device of the present invention.

8 is a partial cross-sectional view schematically showing other embodiments of the inside of the mixing chamber applied to the chemical liquid mixing manifold applied to the regenerative liquid supplying device using the continuous mixing device of the present invention.

9 is a schematic system diagram of another embodiment of a regeneration chemical supply device using the continuous mixing device of the present invention.

Explanation of symbols on the main parts of the drawings

2: inlet port 4: mixing chamber

6: outlet 8: line mixer

8a: turbulence forming member 9: projection

9 ': riblet 10: manifold for chemical mixing

10 ': continuous mixer 10 ": second continuous mixer

20a, 20b: supplement liquid tank 30: supplement liquid metering pump

30 ': second supplement liquid metering pump 40: mixed chemical liquid composition detector

40 ': second mixed chemical composition detector 50: controller

60: feeder (filler) 100: regeneration equipment

110: regeneration liquid metering pump 120: regeneration liquid composition detector

130: regeneration chemical tank 140: switching valve

Claims (15)

A regeneration facility for generating regenerated chemicals by regenerating used chemicals; A regeneration chemical metering pump connected to the regeneration facility to transfer the regeneration chemical according to a predetermined supply amount; A regeneration chemical composition detector for analyzing a component of the regeneration chemical flowing out from the regeneration facility; At least one refill chemical tank for individually receiving replenishment chemicals replenished with the regenerated chemical; A supplemental medicament metering pump connected to the supplemental medicament tank to separately transport each supplemental medicament according to a predetermined supply amount; A continuous mixing device which is continuously introduced by the regenerative medicine metering pump and the supplemental drug metering pump, and is mixed in a flow, and outflows a chemical composition in which the chemical solutions are uniformly mixed; A mixed chemical composition detector for analyzing a component of the chemical composition flowing out of the continuous mixing apparatus; A controller for controlling the supply amount of the metered feed pump according to the composition detected from the regeneration chemical composition detector and the mixed chemical composition detector; And, Regeneration chemical supply device using a continuous mixing device, characterized in that it comprises a feeder for supplying the chemical composition produced in the continuous mixing device to the outside. The method of claim 1, Further comprising a regeneration chemical tank for storing the regeneration chemical at the rear end of the regeneration facility, The regeneration chemical composition detector is continuous mixing characterized in that the analysis of the components of i) the regeneration chemicals flowing out of the regeneration equipment or ii) the regeneration chemicals of the regeneration chemical tank or iii) the regeneration chemicals flowing out of the regeneration chemical tank Regeneration liquid supply device using the device. The method of claim 1, The continuous mixing device further comprises a chemical liquid mixing manifold for mixing and supplying the chemical liquids, The chemical mixture manifold At least two injection holes into which the chemical solutions are respectively injected; A mixing chamber in which the injection holes are coupled to inject the chemical liquids and have a side surface of a circumferential surface thereof; And, A discharge port for discharging the chemical liquid mixed to the outside from the mixing chamber, The inlet is in contact with the circumferential surface in contact with the circumferential surface to have an injection direction in contact with the circumferential surface of the mixing chamber, each inlet is continuous mixing, characterized in that spaced apart from each other in the vertical direction of the mixing chamber Regeneration liquid supply device using the device. The method of claim 3, wherein The inlet of the chemical mixing manifold is in contact with the circumferential surface is coupled to the mixing chamber and at the same time inclined at an acute angle with respect to the horizontal plane to supply the regeneration chemical using a continuous mixing device, characterized in that Device. 5. The method of claim 4, The vertical spaces of the injection holes of the chemical liquid mixing manifold are spaced apart from each other so as to deviate from the rotation sections in the mixing chamber of the chemical liquid injected from each injection port so that the rotation sections in the mixing chamber of the chemical liquid injected from the respective injection ports do not overlap each other. Regeneration chemical supply device using a continuous mixing device, characterized in that. The method of claim 5, Each injection hole of the chemical liquid mixing manifold, when viewed from the top of the mixing chamber, the regeneration chemical supply device using a continuous mixing device, characterized in that spaced apart at regular intervals along the circumferential direction of the mixing chamber. The method of claim 3, wherein The discharge port of the mixing chamber of the chemical liquid mixing manifold is located in the upper portion of the mixing chamber regeneration chemical supply device using a continuous mixing device. The method of claim 7, wherein Each injection port of the chemical liquid mixing manifold is a regeneration chemical supply device using a continuous mixing device, characterized in that the injection port of the lower chemical weight of the injected chemical liquid is further located in the lower direction based on the vertical direction. The method according to claim 3 or 7, And a line mixer coupled to the outlet of the mixing chamber of the chemical liquid mixing manifold. The method of claim 3, wherein Among the inner surface of the mixing chamber of the chemical mixing manifold, a plurality of ribs are formed on the inner surface in contact with the outlet of the injection port or arranged in parallel in the direction perpendicular to the injection direction of the injection hole. Regeneration chemical supply device using a continuous mixing device characterized in that. The method of claim 1, The metering pump is a pulsation-free constant flow pump for supplying a chemical liquid in a predetermined amount according to a predetermined value while preventing the pulsation of the chemical liquid regeneration chemical supply device using a continuous mixing device. The method of claim 1, The medicinal liquid mixing manifold of the continuous mixing device further comprises a line mixer coupled to the outlet of the mixing chamber. The method of claim 1, The line mixer is characterized in that a plurality of turbulence forming members are installed in the pipe in the left and right directions, so that the fluid flowing inside the pipe collides with the turbulence forming member to change the flow direction of the fluid, thereby uniformly mixing the fluids. Regeneration liquid supply device using a continuous mixing device. The method of claim 1, The composition detector is a regeneration chemical supply device using a continuous mixing device, characterized in that the NIR (near infrared) spectrometer. The method of claim 1, A second continuous mixing device connected to a rear end of the continuous mixing device; A second supplement chemical liquid metering pump connected to the supplement chemical tank separately and separately transferring the supplement chemicals to the second continuous mixing device according to a predetermined supply amount; A switching valve connected between the continuous mixing device and the second continuous mixing device to switch the outflow direction of the chemical composition flowing out of the continuous mixing device to the feeder or the second continuous mixing device; A second mixed chemical composition detector for analyzing a component of the chemical composition flowing out of the second continuous mixing device; The supply amount of the regenerative liquid metering pump and the supplemental chemical metering pump is controlled according to the composition detected from the regeneration chemical composition detector and the mixed chemical composition detector, and the switching valve is supplied when the detected value of the mixed chemical composition detector is appropriate. A controller for controlling the supply amount of the second replenishment liquid metering feed pump according to the composition detected from the mixed chemical liquid composition detector and the second mixed chemical liquid composition detector if not, Regeneration chemical supply device using a continuous mixing device characterized in that it further comprises.

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