KR20180129325A - Apparatus for heating liquid - Google Patents

Abstract

According to an embodiment of the present invention, a liquid heating apparatus comprises: a dielectric heating unit having at least two electrodes and heating a liquid located in a dielectric area formed between the two electrodes to produce gas; a particle removing unit removing a particle of the gas; and a control unit controlling a driving voltage applied to the dielectric heating unit and the particle removing unit. At least one of the two electrodes has an opening unit on the upper surface thereof, and has a shape in which a side surface and a lower surface are closed, and the produced gas can be accommodated inside the side surface and the lower surface.

Description

[0001] APPARATUS FOR HEATING LIQUID [0002]

The present invention relates to a liquid heating apparatus, and more particularly, to a liquid heating apparatus for removing particles through a particle removing unit.

Generally, semiconductor wafers and substrates of screen display devices are manufactured through various processes, and organic contaminants such as fine particles, inorganic substances containing various metals, and polymer compounds are generated in each process. This contaminant causes a problem that greatly affects the quality of the substrate. Also, as the industry develops, the miniaturization trend of the substrate becomes gradually from 90 → 65 → 45 nm, and as a result, miniaturization, high density, high integration and wiring multi-layering are progressed, . In addition, the area of the chip is increased and the diameter of the wafer is increased from 200 mm to 300 mm to reduce micro-contaminants such as particles (foreign particles), metal impurities, surface adsorption chemicals, and the like, A cleaning process is required for the heating device.

The problem that arises during the cleaning process is that the fine contaminants degrade the distortion of the structural shape and the electrical characteristics of the substrate, thereby causing problems such as poor performance, reliability, and yield of the substrate. To solve this problem, Thereby cleaning the substrate.

However, pure water is produced by reducing the hardness of water and removing ions by removing calcium and magnesium so that it can be used in the cleaning process. In this pure water, a cation classified as a metal ion and a negative ion classified as a non- There is a problem that high purity steam for cleaning the substrate during the cleaning process can not be provided.

At this time, cations and anions remaining in pure water in a very small amount cause contamination of the substrate, and these ions have respective effects on the process.

For example, fine contaminants of the calcium component remaining on the substrate may cause defective in the dielectric strength of the insulating film of the substrate.

Another problem that arises during the cleaning process is that an induction heating method is employed in which a large capacity pure water is heated for a short time in order to clean a substrate to be cured in a large amount to generate a large amount of steam.

However, the induction heating method used for heating a large amount of pure water generates a magnetic field by a current flowing through a plurality of heating coils, thereby generating an overcurrent in the heated member. Accordingly, in the induction heating system using a plurality of heating coils, when the frequencies of the respective load currents coincide with each other and the phases of the respective heating coil currents are not kept constant, there is a problem that it is difficult to control the heating temperature with high accuracy.

As a result, the cleaning process, which accounts for more than 30% of the entire process, is repeatedly used between substrate fabrication. As the substrate becomes finer, more stringent contamination control and productivity management that shortens the heating time of large- It is required to develop various technologies for designing process equipment for cleaning and optimization of process conditions.

It is an object of the present invention to provide a liquid heating apparatus for removing particulate matter such as suspended substances and particles and the like in trace amounts remaining in a gas.

Another object of the present invention is to provide a liquid heating apparatus which removes particles containing a very small amount of positive ions and negative ions remaining in a gas upon transition to a gas state to provide a high purity gas.

It is still another object of the present invention to provide a liquid heating apparatus for applying an AC voltage to a plurality of electrodes to heat a liquid present in a dielectric region.

It is still another object of the present invention to provide a liquid heating apparatus in which liquid present in a dielectric region is heated without deviation to improve heat transfer efficiency.

According to an aspect of the present invention, there is provided a liquid heating apparatus comprising: at least two electrodes, each of which is provided with at least two electrodes, And a control unit for controlling a driving voltage applied to the dielectric heating unit and the particle removing unit, wherein at least one electrode of the at least two electrodes has an opening in the upper surface thereof, The side surface and the bottom surface including a closed shape, and the generated gas can be accommodated in the side surface and the bottom surface.

In an embodiment, the liquid comprises pure water, and the gas may comprise steam.

In an embodiment, the particle removing unit may receive the DC voltage and remove the particles from the gas through an electrical attraction force.

In an embodiment, the dielectric heating portion may receive an alternating voltage and heat the liquid located in the dielectric region to produce the gas.

In an exemplary embodiment, the apparatus may further include at least one insulating portion forming an electrically discontinuous region between the dielectric heating portion and the particle removing portion.

In an exemplary embodiment, the first electrode, the second electrode, and the third electrode may include three or more electrodes.

In an embodiment, the first electrode may store the generated gas.

In an embodiment, the second electrode may include at least one inflow hole adjacent to the first electrode to form a dielectric region and to introduce the liquid into the dielectric region.

In an embodiment, the third electrode forms a dielectric region adjacent to the second electrode, and the first electrode, the second electrode, and the particle removing portion are housed in the side surface and the bottom surface, So that the gas can be transmitted to the outside.

In an embodiment, the third electrode may include at least one of a water level sensor for sensing a level of the liquid and a pressure sensor for sensing a pressure of the gas, and the water level and the pressure may be transmitted to the control unit .

In an embodiment, the third electrode may include a supply hole for supplying the liquid to the inside and an exhaust hole for transferring the gas to the outside.

In an embodiment, the at least two electrodes may include a cylindrical shape having a center having the same cross section.

In an embodiment, the at least two electrodes may include a cylindrical shape having a closed bottom surface or a closed planar shape, and having the same center in cross section.

In an exemplary embodiment, the first electrode and the third electrode of the first electrode, the second electrode, and the third electrode are formed in a single shape, and the second electrode is at least two or more even, Each may include one semicircular shape spaced apart from a virtual centerline and another semicircular shape facing the one semicircular shape

In an exemplary embodiment, the apparatus may further include a three-phase inverter for applying an AC voltage to the first electrode, the second electrode, and the third electrode through the control unit.

In an embodiment, the apparatus may further include a DC power source unit for applying the DC voltage to the particle removing unit.

In an embodiment, the controller may apply the driving voltage to the dielectric heating unit and the particle removing unit at the same time, or may apply the driving voltage to only one of the dielectric heating unit and the particle removing unit.

The effect of the liquid heating apparatus of the present invention will be described as follows.

According to at least one of the embodiments of the present invention, it is possible to remove particles such as suspended particles and particles remaining in the gas in trace amounts.

According to at least one of the embodiments of the present invention, it is possible to provide a high-purity gas by removing particles containing a very small amount of positive ions and anions remaining in the gas upon liquid-to-gas conversion.

According to at least one of the embodiments of the present invention, an AC voltage may be applied to the plurality of electrodes to heat the liquid present in the dielectric region.

According to at least one of the embodiments of the present invention, the liquid present in the dielectric region can be heated without deviation to improve the heat transfer efficiency.

1 is a configuration diagram showing a liquid heating apparatus according to an embodiment of the present invention.
2 is a view showing a liquid heating apparatus according to another embodiment of the present invention.
3 is a perspective view illustrating a first electrode, a second electrode, and a third electrode of a liquid heating apparatus according to another embodiment of the present invention.
4 is a perspective view illustrating a first electrode, a second electrode, and a third electrode of a liquid heating apparatus according to another embodiment of the present invention.
5 is a view showing a liquid heating apparatus according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

However, in the following description of the characteristic functions according to the present invention, only the required components are shown, and various other components are included in the liquid heating apparatus It will be apparent to those skilled in the art that the present invention can be carried out without departing from the spirit and scope of the invention.

1 is a configuration diagram showing a liquid heating apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the liquid heating apparatus 100 may include a container 110, a dielectric heating unit 120, a particle removing unit 130, an insulating unit 140, and a control unit 150.

First, the container 110 may include a supply hole 111 for supplying a liquid into the container 110 and a discharge hole 112 for discharging gas to the outside of the container.

Where the liquid can be pure, and the gas can be steam.

The supply hole 111 is connected to an external supply unit (not shown) and a supply line (not shown) to allow liquid to flow into the container 110.

At this time, the discharge hole 112 can discharge the gas generated inside the container 110 to the outside of the container 110.

The dielectric heating unit 120 may include at least two electrodes to generate a gas by heating the liquid located between at least two electrodes.

1, the dielectric heating unit 120 includes a first electrode 121, a second electrode 122, a dielectric region 124, a heated body, an AC power supply 125, and a gas storage portion 126 ).

Here, the alternating current generator 125 may be included in the present invention in a separate configuration located outside the dielectric heating portion.

At this time, when an AC voltage is applied to the first electrode 121 and the second electrode 122 through the AC power supply 125, the dipole located in the dielectric region 124 changes its direction according to the alternating electric field, Resulting in the same vibration as the frequency. At this time, frictional heat is generated in the dipoles inside the dielectric region 124 by the generated vibration, so that the dielectric region 124 is heated. This dielectric heating increases the frequency of the AC voltage and the applied voltage so that the vibration of the dipole is accelerated to increase the heating effect of the dielectric region 124 (heating target) formed between the first electrode 121 and the second electrode 122 .

As a result, the dielectric heating portion 120 can generate gas by heating the liquid located in the dielectric region 124 through the alternating current power supply 125.

Specifically, the dielectric region 124 is a region determined by the width between the electrodes, and may be formed between the adjacent first and second electrodes 121 and 122.

In addition, the dielectric region 124 may be a hollow region, and when a liquid exists in the hollow region, the dielectric region 113 may be a heating region for heating the liquid to convert the liquid into a gas.

The AC power supply 125 may be connected to the first electrode 121 and the second electrode 122 respectively and the first electrode 121 and the second electrode 122 may control the driving voltage controlled through the controller 150 The liquid located in the dielectric region 124 may be heated to generate gas.

The gas storage unit 126 may store the gas generated in the dielectric heating unit 110.

The particle removing unit 130 receives the DC voltage and can remove the particles of the gas generated from the dielectric heating unit 120 through the electrical attraction.

The particles removed by the particle removing unit 130 may be discharged to the outside of the liquid heating apparatus 100 or may be stored in a separate gas storage unit (not shown) provided in the liquid heating apparatus 100 .

At this time, there may be at least one insulating part 140 between the dielectric heating part 120 and the particle removing part 130 to form an electric discontinuity area.

The insulating part 140 prevents the problems caused by different driving voltages applied to the dielectric heating part 120 and the particle removing part 130, It is possible to apply gas to the rejection 130 to simultaneously generate gas and remove particles.

The control unit 150 may control the driving voltage applied to the dielectric heating unit 120 and the particle removing unit 130 so that the gas generated by the dielectric heating unit 120 is uniformly generated and maintained, The particles contained in the gas generated from the dielectric heating unit 120 may be controlled to be removed through the removal unit 130.

At this time, the control unit 150 may control the operation of allowing the liquid to flow into the dielectric heating unit 120, and may simultaneously apply a driving voltage to the dielectric heating unit 120 and the particle removing unit 130, 120, and the particle removing unit 130. [0054]

In the following description, examples in which the liquid includes pure water and the gas includes steam will be specifically described. However, this is only one example for convenience of explanation, and it will be apparent to those skilled in the art that the liquid and gas according to the present invention are not limited to pure water and steam.

2 is a view showing a liquid heating apparatus according to another embodiment of the present invention.

2, the liquid heating apparatus 200 may include a container 210, a dielectric heating unit 220, a particle removing unit 230, an insulating unit 240, and a control unit 250.

2, the container 210, the dielectric heating unit 220, the particle removing unit 230, the insulating unit 240, and the control unit 250 are formed by the container 110, The particle removing unit 130, the insulating unit 140, and the control unit 150, and thus the description thereof will be omitted.

2, the dielectric heating unit 220 may include a first electrode 221, a second electrode 222, and a third electrode 223.

The first electrode 221 may include a gas storage part 226 for collecting steam.

The first electrode 221 and the second electrode 222 may have openings on the upper surface and may have a closed shape on a side surface and a lower surface. The first electrode 221 may include a first electrode 221, The steam generated in the dielectric region 224 formed between the side walls 222 can be accommodated in the side surface and the bottom surface.

The second electrode 222 may include at least one inflow hole 222-1 adjacent to the first electrode 221 to form a dielectric region 224-1 and to introduce pure water into the dielectric region. have.

 The third electrode 223 is adjacent to the second electrode 222 to form a dielectric region 224-2 and the first electrode 221, And the steam can be delivered to the outside through the opening.

That is, the third electrode 223 may be a chamber for supplying pure water to generate steam to generate steam, and deliver the steam to the outside.

The third electrode 223 is formed as a part of the chamber or the container 210, and the insulator 213 may be provided on the outer surface of the third electrode 223.

The AC power supply 225 may be a three-phase power source connected to the first electrode 221, the second electrode 222 and the third electrode 223. The AC power supply 225 may be a three- A voltage can be supplied to the first electrode 221, the second electrode 222, and the third electrode 223.

The third electrode 223 provided in the container 210 may include a supply hole 211 for supplying liquid to the inside and a discharge hole 212 for discharging steam. At this time, the third electrode 223 constituted by the container 210 may include at least one of a water level sensor 252 for sensing the level of pure water and a pressure sensor 253 for sensing the pressure, And the control unit 250 controls the flow of the water.

The particle removing unit 230 is disposed in a path through which the steam generated in the dielectric regions 224-1 and 224-2 is discharged to the discharge hole 212 and discharged through the electric attraction generated by the DC voltage Particles are removed, allowing high purity steam to be discharged to the outside.

To this end, the liquid heating apparatus according to the present invention may include a DC power supply unit 231 for supplying a DC voltage, which is a driving voltage, to the particle removing unit 230 by a control unit 250.

3 is a perspective view illustrating a first electrode, a second electrode, and a third electrode of a liquid heating apparatus according to another embodiment of the present invention.

Referring to FIG. 3, each of the first electrode 321, the second electrode 322, and the third electrode 323 of the liquid heating device may be formed into a cylindrical shape having the same center.

The upper portion of each of the first electrode 321, the second electrode 322 and the third electrode 323 formed in a cylindrical shape is opened and has a first electrode 321 and a second electrode 322 And the third electrode 323 may include a bottom surface for closing the bottom, and the bottom surface may be a flat surface.

Each of the second electrode 322 and the third electrode 323 provided in a cylindrical shape can introduce pure water into at least one of the dielectric regions 324-1 and 324-2.

In this case, the second electrode 322 may include a plurality of inflow holes 322-1. When the third electrode 323 is included in the container, the third electrode 223 may include at least And may include a supply hole 311 for supplying into at least one of the dielectric regions 324-1 and 324-2.

Here, the plurality of inflow holes 322-1 may be regions where ions existing in the liquid collide. More specifically, ions move according to the three-phase power source, and each of the plurality of inflow holes 322-1 is a region where ions collide due to the influence of different electrodes, causing collision between ions and generating heat.

As a result, the heating rate of the liquid can be increased by the heat generated by the collision between the ions in the region where the ions impinge.

4 is a perspective view illustrating a first electrode, a second electrode, and a third electrode of a liquid heating apparatus according to another embodiment of the present invention.

4, the first electrode 421 and the third electrode 423 of the liquid heating device are provided in a single shape, the second electrode 421 is at least two or more even numbered, and the second electrode 421, The pair may include one semicircular shape spaced apart from the imaginary centerline and another semicircular shape facing one semicircular shape.

As a result, the spacing between the first electrode 421 and the third electrode 423 adjacent to the second electrode 422 can be adjusted so that the dielectric regions 424-1 and 424-2 can be widely formed. As a result, as the dielectric regions 424-1 and 424-2 are increased, a large amount of pure water is quickly and uniformly heated to shorten the heating time in which the state is converted into steam, and as a result, the amount of steam generated can be increased.

5 is a view showing a liquid heating apparatus according to another embodiment of the present invention.

5, the liquid heating apparatus 500 may include a container 510, a dielectric heating unit 520, a particle removing unit 530, an insulating unit 540, and a control unit 550.

5, the container 510, the dielectric heating unit 220, the particle removing unit 230, the insulating unit 240, and the control unit 250 may be formed of the container 210 of FIG. 2, The particle removing unit 230, the insulating unit 240, and the control unit 250, the detailed description thereof will be omitted.

The lower portion of each of the first electrode 521, the second electrode 522, and the third electrode 523 shown in FIG. 5 may include a bottom surface that closes the lower portion, and the bottom surface may include a curved surface Shape (or a U-shape).

As a result, as compared with the liquid heating apparatus of FIG. 2, in the liquid heating apparatus of FIG. 5, the lower portions of the first electrode 521, the second electrode 522, and the third electrode 523 are formed into curved shapes So that the amount of steam to be heated can be increased by increasing the area or volume of pure water contained in at least one of the dielectric regions 524-1 and 524-2.

As a result, the liquid heating apparatus according to the present invention is capable of removing particulate matters such as suspended substances and particles remaining in the gas, and removing particles containing a very small amount of positive ions and anions remaining in the gas when the liquid is converted into a gas state Thereby providing a gas of high purity.

Further, the liquid present in the dielectric region can be heated by applying the alternating voltage to the plurality of electrodes, and the liquid present in the dielectric region can be heated without deviation to improve the heat transfer efficiency.

It will be apparent to those skilled in the art that various modifications and equivalent arrangements may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

Accordingly, the foregoing detailed description should not be construed in any way as limiting and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

Claims (17)

A dielectric heating unit having at least two electrodes and heating a liquid located in a dielectric region formed between at least two electrodes to generate a gas;
A particle removing unit for removing particles of the gas; And
And a control unit for controlling a driving voltage applied to the dielectric heating unit and the particle removing unit,
Wherein at least one of the at least two electrodes comprises:
The liquid heating apparatus including an opening on an upper surface, the side surface and the lower surface including a closed shape, and accommodating the generated gas on the side surface and the lower surface. The method according to claim 1,
The liquid,
Including pure water,
The gas,
A liquid heating apparatus comprising steam. The method according to claim 1,
The particle removing unit includes:
A liquid heating apparatus which receives a DC voltage and removes the particles from the gas through an electrical attraction. The method according to claim 1,
The oil-
And applies an alternating voltage to heat the liquid located in the dielectric region to generate the gas. The method according to claim 1,
Further comprising at least one insulating portion forming an electrically discontinuous region between the dielectric heating portion and the particle removing portion. The method according to claim 1,
When the at least two electrodes are three electrodes,
A second electrode, and a third electrode. The method according to claim 6,
Wherein the first electrode comprises:
And the generated gas is stored. The method according to claim 6,
Wherein the second electrode comprises:
And at least one inflow hole adjacent to the first electrode to form a dielectric region and to introduce the liquid into the dielectric region. The method according to claim 6,
Wherein the third electrode comprises:
A second electrode, a second electrode, and a particle eliminating portion, the second electrode and the particle eliminating portion being disposed adjacent to the second electrode, the first electrode, the second electrode, and the particle removing portion being housed in the side surface and the bottom surface, Device. 10. The method of claim 9,
Wherein the third electrode comprises:
A level sensor for sensing a level of the liquid; And
And a pressure sensor for sensing the pressure of the gas,
The water level and the pressure may be,
And is transmitted to the control unit. 10. The method of claim 9,
Wherein the third electrode comprises:
A supply hole for supplying the liquid to the inside; And
And a discharge hole for transferring the gas to the outside. The method according to claim 1,
Wherein the at least two electrodes comprise:
A liquid heating apparatus comprising a cylindrical shape having a center having the same cross section. The method according to claim 1,
Wherein the at least two electrodes comprise:
Wherein the lower surface comprises a cylindrical shape having a closed curved or closed planar shape and having a center with the same cross section. The method according to claim 6,
The first electrode and the third electrode of the first electrode, the second electrode,
And is provided in a single shape,
Wherein the second electrode comprises:
At least two or more even numbers,
Wherein each of the pair of second electrodes comprises:
And one semicircular shape spaced apart from a virtual centerline and another semicircular shape facing the one semicircular shape. The method according to claim 6,
And a three-phase inverter for applying an AC voltage to each of the first electrode, the second electrode and the third electrode through the control unit. The method of claim 3,
And a DC power supply unit for applying the DC voltage to the particle removing unit. The method according to claim 1,
Wherein,
Wherein the driving voltage is simultaneously applied to the dielectric heating unit and the particle removing unit, or the driving voltage is applied to only one of the dielectric heating unit and the particle removing unit.

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