KR20180073961A - Material Supplying Device and Vacuum Evaporation Coating Apparatus Having The Device - Google Patents

Abstract

The present invention provides a material supply device and a vacuum deposition apparatus having the same. The material supply device includes a material feed pipe connected to a crucible in which the raw material is supplied and heated so that the raw material vapor is generated while the molten raw material is stored, and a material supply source connected to the material feed pipe. The material feed pipe is immersed in the molten raw material melt in the crucible so as to separate at least a material feed zone and a steam evaporation zone. According to the present invention, an improved effect is obtained in which continuous supply of raw materials is possible during vacuum deposition of a target to be coated, such as a substrate or continuous strip, and in particular, the contamination of the evaporated vapor is reduced and the vapor deposition property is enhanced.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a material supplying apparatus and a vacuum deposition apparatus including the same,

The present invention relates to a vacuum deposition apparatus, and more particularly, to a raw material supply apparatus capable of continuously supplying a raw material during vacuum deposition of a coating object such as a substrate or a continuous steel sheet, To a vacuum deposition apparatus.

A coating material such as metal vapor can be coated on the surface of the steel sheet through various known methods for depositing a substrate or a continuously progressing steel sheet under a vacuum atmosphere. Such vacuum deposition is a method of heating or evaporating a solid or liquid coating material (metal or coating material) by a variety of methods under a vacuum atmosphere to convert it into vapor (gas), and forming a thin film on the steel sheet.

For example, known vacuum deposition methods include thermal evaporation, electron beam evaporation, and electro-magnetic levitation evaporation.

For example, the thermal evaporation method is a method in which a raw material is charged into a crucible, evaporated by heating to vaporize the vapor and then coated on a substrate or a continuous steel plate. In the electron beam evaporation method, raw materials are charged into a water- And in the electromagnetic floating deposition method, the coating material is surrounded by the electromagnetic coil, and the high frequency alternating current is applied to the electromagnetic coil and the coating material is heated to float so as to generate metal vapor in the crucible above, And to vapor-coat a large amount of metal vapor on the substrate or continuous steel sheet while reducing the loss.

Such vacuum vapor deposition methods are methods for heating and evaporating the raw materials and coating them on the substrate. Since the coating materials are consumed by evaporation regardless of the presence of the crucibles, the raw materials necessary for the coating in the large- It is important to supply it.

Such continuous supply of metals is typically known as wire feeding, but it is limited by difficulties in high-speed supply, lowering of purity due to the oxide layer of the wire surface, and limitation of raw materials that can be produced by wire.

On the other hand, in the case of injecting a solid raw material into a crucible bath surface in which a molten metal is stored during vacuum vapor deposition using an existing crucible, the molten metal is scattered and the bath surface fluctuation is increased, There is a problem that the crucible evaporated steam is contaminated and in the worst case, the raw material supply pipe is clogged.

For example, in the case of the deposition apparatus of Japanese Laid-Open Patent Application No. 2005-336558 A (2005.12.08), the raw material supply pipe is separated from the crucible rinse surface and the raw material falls on the bath surface, and the evaporated vapor vaporizes or blocks the raw material supply pipe There was a problem.

JP Publication No. 2005-336558 A (2005.12.08)

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide an apparatus and a method for continuously supplying raw materials during vacuum deposition of a coating object such as a substrate or a continuous steel plate, And a vacuum deposition apparatus including the same.

According to one aspect of the present invention, there is provided a furnace for a furnace, comprising: a raw material supply pipe connected to a crucible in which a raw material is supplied and heated to store a molten raw material to generate a raw material vapor; And a raw material supply unit connected to the raw material supply pipe, wherein the raw material supply pipe is immersed in a molten raw material melt surface of the crucible so as to separate at least a raw material input zone and a steam evaporation zone.

Preferably, the apparatus may further include gas injection means connected to the raw material supply pipe.

More preferably, the raw material supply pipe is provided with at least a double pipe or branch structure for discharging the vapor inside the raw material supply pipe.

According to another aspect of the present invention, there is provided a vacuum chamber comprising: a vacuum chamber provided with a substrate or a continuous steel plate through which a raw material is supplied and heated; a molten raw material is stored, ; And a raw material supply device for supplying a raw material to the crucible.

Preferably, the raw material supply pipe provided in the raw material supply device is provided with a double pipe structure.

At this time, the raw material supply pipe of the double pipe structure is constituted of a first pipe for supplying the raw material to the crucible and a second pipe for separating at least the raw material input region and the raw material evaporation region, which is immersed in the molten raw material melt surface of the crucible while surrounding at least a part of the first pipe Two tubes.

Preferably, the second tube extends from the outer periphery of the first tube toward the substrate or the continuous steel sheet and includes a raw material vapor outlet.

More preferably, the lower portion of the second tube, which is an immersion portion of the molten raw material melt surface, is extended beyond the first tube.

More preferably, the lower end portion of the second tube, which is an immersion portion of the molten raw material melt surface, corresponds to the diameter of the first tube.

Alternatively, the raw material supply pipe provided in the raw material supply device may be provided with a branch pipe structure.

Preferably, the raw material supply pipe for the branch pipe structure includes a third pipe for supplying the raw material to the crucible, and a fourth pipe extending from the third pipe toward the substrate or the continuous steel plate and having a raw material vapor outlet .

More preferably, the lower end portions of the third tube and the fourth tube are integrally joined to each other to be dipped in the molten raw material melt surface to separate at least the raw material input region and the raw material evaporation region.

According to the present invention, when the raw material is continuously supplied, the raw material supply pipe is immersed in the crucible bath surface to separate the raw material input area and the steam evaporation area, thereby preventing the spillage of the hot water surface, And to provide an effect to prevent the problem.

Therefore, the present invention also provides other effects that can enhance the vacuum deposition effect and, in addition, provide various types of feedstock structure, further enhancing the vacuum deposition capability.

Finally, the efficiency of the vacuum deposition increases, thereby providing an economical advantage such as reduction of raw materials, and further reduction of contamination by evaporative steam, thereby ultimately facilitating facility maintenance.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a vacuum vapor deposition apparatus for a substrate including a raw material supply apparatus according to the present invention; FIG.
2 is a view showing a vacuum vapor deposition apparatus for a continuous steel sheet including a raw material supply apparatus according to the present invention
FIG. 3 is a state diagram for explaining a problem that occurs when the crucible side of the existing raw material supply pipe is separated
4 is a state diagram for explaining the effect of the raw material supply pipe immersed in the crucible bath surface in the present invention
5 is a schematic view showing a vacuum vapor deposition apparatus including a raw material supply apparatus of the present invention having gas injection means
6 to 9 are views showing a vacuum deposition apparatus according to various embodiments of the present invention

BRIEF DESCRIPTION OF THE DRAWINGS FIG. It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

However, for the sake of understanding, in the following embodiments, the raw material is denoted by M, the molten raw material which is melted in the crucible is denoted by C, the raw material vapor from which the molten raw material is evaporated is denoted by V, The raw material supply apparatus is denoted by 100 units, and the vacuum deposition apparatus including the raw material supplying apparatus of the present invention is described with reference numerals of 200 units.

1 and 2 show a vacuum deposition apparatus 200 including a raw material supply apparatus 100 according to the present invention. For example, FIG. 1 illustrates a vacuum deposition of a substrate S1 disposed inside a vacuum chamber 210, and FIG. 2 illustrates a vacuum deposition process in which a vacuum chamber is continuously passed through a vacuum chamber through a transfer roll 214 on both sides of a vacuum chamber 210 And shows the vacuum deposition of the steel sheet S2.

Next, as shown in Figs. 1 and 2, a raw material supplying apparatus 100 according to the present invention is basically provided with a liquid or solid raw material M, which will be described in detail below, A raw material supply pipe 110 connected to the crucible 220 where the raw material vapor V is generated while being stored and a raw material supply unit 120 connected to the raw material supply pipe.

In particular, as shown in FIG. 4, the raw material supply pipe 100 of the present invention is formed by melting (melting) the crucible so as to separate the raw material input area A1 and the vapor evaporation area A2 from the molten raw material melt surface C 'of the crucible 220 And is immersed in the raw material melt surface C '.

The reason why at least the lower end portion 110a is immersed in the crucible bath surface C 'of the raw material supply pipe 110 of the present invention will be described in detail with reference to FIG. 3 and FIG.

That is, FIG. 3 shows a conventional raw material supply pipe 110 'in which the existing raw material supply pipe 110' is separated from the melt surface C 'of the molten raw material C of the crucible, M moves on the raw material supply pipe and is introduced into the molten raw material C of the crucible.

In this case, the raw material vapor (V) that evaporates from the molten raw material melt surface flows into the raw material supply pipe 110 ', and the raw material supply pipe 110' , The supply of the raw material M becomes difficult or the contamination of the equipment or the stuck steam interferes with the cleanliness of the crucible molten raw material. Also, in the case of a solid raw material, a problem of scattering of the molten raw material may occur while falling on the bath surface.

On the other hand. 4, in the case of the raw material supply apparatus 100 of the present invention, since the lower end portion of the raw material supply pipe 110 is partially immersed below the melt surface C 'of the crucible molten raw material C, The raw material feed zone A1 and the steam evaporation zone A2 are separated from each other by the raw material feed pipe.

Therefore, in the present invention, only the steam generated in the material feed zone A1, which is very limited as compared with the conventional steam feeder of FIG. 3, flows into the feed pipe of the raw material vapor V evaporated from the molten feed melt surface C1 of the crucible , The problem of sticking or accumulating steam hardly occurs, and the contamination of the raw material supply system is not greatly reduced or caused.

When the bottom of the raw material feed pipe 110 is immersed in the molten raw material C, the inside of the raw material feed pipe is substantially sealed, which reduces the trapping phenomenon due to pressure shielding that increases the internal pressure of the pipe, The pollution is remarkably reduced.

3, the raw material supply apparatus 100 of the present invention shown in FIGS. 1, 2, and 4 has the same advantages as the conventional raw material supply apparatus 100 shown in FIG. 3 except that the raw material supply pipe 110, Can be almost completely blocked.

As shown in FIG. 1, the raw material of the present invention can be supplied as a crucible by feeding a raw material M of a solid phase of an ingot form into the raw material supply pipe 110 through the raw material supply unit 120.

For example, as shown in FIG. 1, the raw material supply unit 120 of the present invention can be supplied to the raw material supply pipe 110 by the turntable system 120a and the conveyor system 120b, When the solid raw material M supplied to the conveyor 124 is stacked on the turn table 122, it can be supplied from the bottommost layer through the inlet (not shown) of the raw material supply pipe 110 to the cylinder 126 or the like, Or continuously in a conveyor manner.

5, the raw material supply apparatus 100 of the present invention may further include a gas injection means 125 associated with the raw material supply pipe 110. [ Thus, the gas G injected into the material supply pipe 110 through the gas injection means 125 can smoothly supply the crucible of the material M.

Particularly, the gas G injected into the raw material supply pipe 110 increases the internal pressure of the raw material supply pipe 110 so that the internal vaporization of the raw material vapor V in the molten raw material C on the melt surface C ' To more effectively block contamination.

1 and 2, the vacuum deposition apparatus 200 of the present invention having the material supply apparatus 100 of the present invention will be described in more detail. The vacuum deposition apparatus 200 includes a vacuum chamber (vacuum chamber) And a crucible 220 is provided inside the vacuum chamber 210. [

Such a crucible 220 may be provided with a structure of a refractory 222 and a refractory brick 224 which are heated and disposed with an external heating coil 226 as shown in FIGS. 1 and 2. However, In an environment of induction heating, the crucible may be provided in a different structure. Therefore, when the solid raw material M is charged into the crucible 220 through the raw material supply pipe 110, the molten raw material C is heated and melted. When the molten raw material C is continuously heated, the raw material vapor V is evaporated, The substrate S1 placed in the inner space 210 and the continuous steel sheet S2 passing continuously are subjected to vacuum evaporation.

Therefore, the vacuum vapor deposition apparatus 200 of the present invention is capable of suppressing the contamination of the raw material supply system by using the raw material supply apparatus 100 to improve the vacuum deposition effect of the substrate or the steel sheet while maintaining the cleanliness of the raw material .

Of course, the vacuum vapor deposition apparatus 200 of the present invention is capable of supplying a liquid raw material, and in this case, a liquid raw material is supplied to the crucible 220 through the raw material supply pipe 110 .

1 and 2, the raw material vapor (V) is vaporized in the entire bath surface of the crucible and is vacuum-deposited. However, a slit structure for spraying the vapor provided on the crucible or a nozzle structure And the raw material supply pipe may be provided by immersing at least the lower end of the molten raw material C through the vacuum chamber 210 and the nozzle structure.

In this case also, it is natural that the contamination of the raw material supply pipe 110 described above is suppressed.

6 to 9 show a raw material supply apparatus 100 according to another embodiment of the present invention. Basically, they are provided with a raw material supply pipe 130 having a double pipe structure with at least a part of the raw material supply pipe being a double pipe. And the steam in the inner region of the tube is discharged toward the substrate S1 and the continuous steel plate S2 to further improve the vapor deposition effect.

6 and 7, the raw material supply pipe 130 of the double pipe structure of the present invention is connected to the raw material supply unit 120 of FIGS. 1 and 2, The first pipe 140 for supplying the molten metal to the crucible 220 of the first furnace 200 and the second pipe 140 for separating at least a part of the first pipe from each other and separating the material feed area A1 and the vapor evaporation area A2, And a second pipe 150 in which the lower end portions (raw material discharge ports) 154 and 156 are immersed in the molten raw material melt surface C 'of the crucible.

More preferably, the second pipe 150 is provided in a structure extending from the outer periphery of the first pipe 140 toward the substrate S1 or the continuous steel plate S2 and including the material vapor outlet 152 .

Therefore, in the raw material supply pipe 130 of the double pipe structure of the present invention shown in FIGS. 7 and 8, the raw material M input through the first pipe 140 is supplied to the lower end portion (154) 156, and the raw material vapor (V) which is evaporated on the bath surface in the region inside the pipe is evaporated through the second pipe and vacuum deposited on the substrate or the continuous steel plate.

7, the lower end portion 154 of the second tube 150 may extend beyond the first tube 140, and as shown in FIG. 8, the second tube 150 150 may be provided correspondingly to the diameter of the first pipe 140. The lower end portion 156

In the case of FIG. 6, the lower portion of the second tube is expanded to increase the amount of vaporized material vapor in the tube inner region than that of the single raw material supply tube of FIG. 4, The bottom portion 156 of the first pipe 140 becomes narrower like the inner diameter of the first pipe 140 so that the evaporation material vapor V in the pipe inner region becomes the same as the single material feed pipe 110, I will do less.

6 and 7, the second pipe 150 of the raw material supply pipe 130 having the double pipe structure is directed to the substrate or the steel plate, and the steam evaporated from the hot water surface is discharged from the steam outlet 152 The second tube 150 may be continuously surrounded by the first tube 140 and the steam outlet 152 may be disposed outside the vacuum chamber 210 so that the evaporation steam Since the gas is smoothly discharged to the outside of the first pipe through which the gas is supplied through the second pipe, the steam contamination will be reduced more than the single raw material supply pipe 110.

Here, in FIGS. 6 and 7, the steam outlet of the second tube 150 is disposed outside the vacuum chamber, and if the suction is enabled, the processing of the evaporated steam will be made more smooth.

Next, FIGS. 8 and 9 show a double pipe structure as in FIGS. 6 and 7, and a third pipe 160 and a fourth pipe 170, which are different from those provided in the raw material supply pipe 130 ' There is. '

8, the raw material M is introduced through the third pipe 160 of the raw material supply pipe 130 'of the branch pipe structure, and the lower end portion 180 of the raw material M is immersed in the molten raw material bath surface , And the raw material vapor (V) is discharged from the third discharge port (172) through a fourth pipe (170) branched from the third pipe toward the substrate or the continuous steel plate in a communication structure.

Next, in the case of FIG. 9, the fourth tube of FIG. 8 is diverged from the third tube by the multiple tubes 170a and 170b, and the vapor of the raw material is discharged from the respective vapor outlets 172a and 172b .

The raw material supply pipe 130 'of the branch pipe structure shown in FIGS. 8 and 9 has a structure in which the lower end portion 180, which is immersed in the molten raw material melt surface of the third pipe 160 and the fourth pipe 170, .

Therefore, the raw material supply pipe 130 'of the branch pipe structure differs in structure from the raw material supply pipe 130 of the double pipe structure of FIGS. 6 and 7, but the raw material vapor V is guided toward the substrate or the continuous steel plate Evaporation, and the same effect of increasing the vacuum deposition effect can be obtained.

In particular, the raw material supply pipe 130 of the double pipe structure or the raw material supply pipe 130 'of the branch pipe structure of the present invention shown in FIGS. 6 to 9 are all formed of the same material as the single raw material supply pipe 110 of FIGS. The bottom portions 154, 156 and 180 are immersed in the molten raw material melt surface and the raw material input region A1 and the vapor evaporation region A2 are separated from each other, Do.

In this case, as described above, when the raw material supply pipe 130 'of the branch pipe structure of FIGS. 8 and 9 is also disposed at the outer periphery of the vacuum chamber 210 without passing the fourth pipes toward the substrate or the steel plate, The steam will be smoothly discharged through the fourth pipe, making it possible to more effectively block the contamination of the supply line. Needless to say, such a fourth pipe may be connected to the suction pipe as in the second pipe.

Accordingly, the raw material supply apparatus 100 of the present invention described so far can make it possible to reduce the contamination of at least the raw material supply pipe by the existing steam through the various raw material supply pipes 110, 130 and 130 '.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present specification and drawings are intended to illustrate rather than limit the technical spirit of the present invention, and the scope of technical spirit of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100 .... raw material supply device 110 .... raw material supply device
120 .... raw material supply part 125 .... gas injection means
130 .... Raw material supply pipe of double pipe structure 130 '.... Raw material supply pipe of branch pipe structure
140 .... 1st tube 150 .... 2nd tube
160 .... The third tube 170 .... The fourth tube
200 .... vacuum deposition apparatus 210 .... vacuum chamber
220 .... crucible
A1 .... Raw material input area of molten raw material bath surface
A2 .... Steam evaporation area of molten raw material bath surface
C .... molten raw material M .... raw material
S1 .... substrate S2 .... continuous steel plate

Claims (12)

A raw material supply pipe connected to the crucible where the raw material is supplied and heated and the molten raw material is stored and the raw material steam is generated; And
A raw material supply unit connected to the raw material supply pipe;
≪ / RTI >
Wherein the raw material feed pipe is immersed in a molten raw material melt surface of the crucible so as to separate at least the raw material feed zone and the steam evaporation zone.
The method according to claim 1,
And a gas injection means connected to the raw material supply pipe.
3. The method according to claim 1 or 2,
Wherein the raw material supply pipe is provided with at least a dual pipe or branch structure for discharging the steam inside the raw material supply pipe.
A vacuum chamber in which a substrate is embedded or a continuous steel sheet passes;
A crucible provided in the vacuum chamber and supplied with a raw material to generate molten raw material and generate raw material vapor toward the substrate or the steel plate; And
The raw material supply device according to any one of claims 1 to 3, which supplies the raw material to the crucible;
.
5. The method of claim 4,
Wherein the raw material supply pipe provided in the raw material supply device is provided with a double pipe structure.
6. The method of claim 5,
The raw material supply pipe of the double pipe structure has a first pipe for supplying the raw material to the crucible and a second pipe for separating at least the raw material input region and the raw material evaporating region, which is immersed in the molten raw material melt surface of the crucible while surrounding at least a part of the first pipe. .
The method according to claim 6,
Wherein the second pipe extends from the outer periphery of the first pipe toward the substrate or the continuous steel plate and includes a material vapor outlet.
The method according to claim 6,
And the lower end portion of the second tube, which is an immersion portion of the molten raw material melt surface, is extended from the first tube.
The method according to claim 6,
And the lower end portion of the second tube, which is an immersed portion of the molten raw material melt surface, corresponds to the diameter of the first tube.
5. The method of claim 4,
Wherein the raw material supply pipe provided in the raw material supply device is provided as a branch pipe structure.
11. The method of claim 10,
Wherein the raw material supply pipe for the branch pipe structure includes a third pipe for supplying the raw material to the crucible and a fourth pipe extending from the third pipe toward at least the substrate or the continuous steel plate and having a raw material vapor outlet, .
12. The method of claim 11,
And the lower end portions of the third tube and the fourth tube are integrally formed and immersed in the molten raw material melt surface to separate at least the raw material input region and the raw material evaporation region.

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