KR20180066935A - Dispenser having funtion for inspecting paste - Google Patents

Abstract

According to an embodiment of the present invention, a dispenser comprises: a frame; a stage which has a mother substrate arranged on the upper surface thereof and is installed on the upper part of a frame; a rail which is arranged on the upper part of the frame and is arranged to be extended in the Y-axis direction on both sides of the stage; a first support which is installed to be able to move in the Y-axis direction along the rail; a dispensing head unit which is installed on one surface of the first support to be movable in the X-axis direction perpendicular to the Y-axis direction and discharges a coating liquid drop onto the mother substrate; a first sensor which is installed on the other surface of the first support to be movable in the X-axis direction and measures the shape of the coating liquid drop discharged onto the mother substrate; a second support which is installed to be movable in the Y-axis direction along the rail and is arranged on the opposite side of the first support; and a second sensor which is installed on the second support to be able to move in the X-axis direction and measures the height of the upper surface of the coating liquid drop discharged onto the mother substrate. The dispenser has a coating solution inspection function.

Description

DISPENSER HAVING FUNCTION FOR INSPECTING PASTE [0002]

The present invention relates to a dispenser equipped with a coating liquid inspection function. More specifically, the present invention can detect a defective coating liquid by measuring the shape of a coating liquid ejected by a dispensing head unit through a 2D camera and performing a simple determination of the coating liquid, The present invention relates to a dispenser capable of improving a production amount and preventing waste of a coating liquid by measuring the volume of a coating liquid droplet ejected by a fencing head unit and deriving a coating liquid ejection amount of the dispensing head unit based on the volume.

In general, a flat panel display (LCD) is thinner and lighter than a television or a monitor using a cathode ray tube. As a flat panel display, a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display, and an organic light emitting diode have been developed and used.

In the manufacturing process of such display devices, a process of discharging a coating liquid such as resin or liquid crystal is applied through a dispenser. Due to various factors during discharge operation of the dispenser, a coating liquid having a defective shape is discharged, Or more.

In order to solve such a problem, conventionally, in a shop inspection (for example, when the number of substrates to be discharged is determined and a discharge amount of a predetermined number of substrates is completed, a balance (a substance in which a plurality of coating liquid droplets are overlapped and dropped) The amount of the coating liquid discharged from the dispenser was checked to determine whether the discharge amount of the coating liquid was doubled).

However, in this case, there is a problem that the productivity may be deteriorated due to the delay of the work by the time for forming the balance, and the economical efficiency may deteriorate in that the tested balance is discarded.

In addition, in the case of inspecting only whether the coating liquid discharge amount is positive or not, and when the case where the coating liquid shape is defective is not inspected, the defective shape coating liquid causes defective bonding or coating liquid flows out of the substrate A problem such as overflow may occur, resulting in display device failure.

In order to solve the above problems, the present invention measures the shape of a coating liquid droplet through a first sensor, i.e., a 2D camera, and corrects the dispensing method (i.e., discharge parameter) And it is an object of the present invention to provide a dispenser capable of preventing defects.

Further, it is necessary to separately form a balance for the discharge amount inspection by measuring the volume of the coating liquid droplets discharged by the dispensing head unit through the second sensor, i.e., the chromatic aberration confocal sensor, And it is an object of the present invention to provide a dispenser capable of improving productivity and preventing waste of a coating liquid.

According to an aspect of the present invention, there is provided a dispenser comprising: a frame; a mother substrate disposed on an upper surface of the stage; a stage provided on an upper portion of the frame; A first support which is movable in the Y axis direction along the rail, a second support which is movable in the X axis direction orthogonal to the Y axis direction on one surface of the first support, A first sensor provided on the other surface of the first support so as to be movable in the X axis direction and measuring the shape of the coating liquid droplets discharged onto the mother substrate, A second support base and a second support base movably installed in the axial direction and disposed on the opposite side of the first support base and movable in the X axis direction, A second sensor for measuring the height of the upper surface of the coating liquid droplets.

According to another aspect of the present invention, there is provided a dispenser comprising: a frame; a mother substrate disposed on an upper surface of the stage; a stage provided on an upper portion of the frame; A first support which is arranged to be movable in the Y axis direction along the rail, a second support which is movable in the X axis direction orthogonal to the Y axis direction on the first support, A dispenser head unit for dispensing droplets of coating liquid, a second support member which is provided so as to be movable in the Y-axis direction along the rails and which is disposed on the opposite side of the first support member, A first sensor for measuring the shape of the coating liquid droplets discharged onto the mother substrate and a second sensor for detecting the shape of the coating liquid droplets discharged onto the mother substrate, A second sensor for measuring the height of the upper surface of the bowl.

According to another aspect of the present invention, there is provided a dispenser comprising: a frame; a mother substrate disposed on an upper surface of the stage; a stage provided on an upper portion of the frame; A first support which is movable in the Y-axis direction along the rails, a second support which is movable in the X-axis direction orthogonal to the Y-axis direction on one surface of the first support, A first sensor installed on the other surface of the first support so as to be movable in the X axis direction, a second sensor installed on the other surface of the first support so as to be movable in the Y axis direction along the rail, A second support table disposed on the opposite side of the first support table, a second support table provided on one side of the second support table so as to be movable in the X axis direction, And a second sensor mounted on the other surface of the second support so as to be movable in the X-axis direction, wherein the first sensor measures the shape of the coating liquid droplet ejected onto the mother substrate, and the second sensor measures The height of the top surface of the discharged coating liquid droplet is measured.

The dispenser according to the present invention can measure the shape of the coating liquid droplet through the 2D camera and correct the dispensing method (i.e., discharge parameter) of the dispensing head unit based on the shape of the dispensing liquid droplet. Therefore, it is possible to prevent a problem that may occur due to the defective shape of the coating liquid (for example, problems such as poor bonding or overflow of the coating liquid over the substrate during the bonding process between the substrates) can do.

The dispenser according to the present invention does not need to separately form a balance every time the discharge amount is inspected by measuring the volume of the coating liquid droplet discharged by the dispensing head unit through the chromatic aberration confocal sensor and deducing the discharge amount based on the volume. Therefore, it is possible to improve the productivity as compared with the prior art by preventing the work from being delayed due to the formation of the balance and deteriorating the productivity, and it is possible to improve the economical efficiency by preventing the problem that the coating liquid is wasted due to disposal after the formation of the balance.

1 is a perspective view illustrating a dispenser according to an embodiment of the present invention.
2 is a plan view of Fig.
3 is a block diagram illustrating the control flow of the dispenser of Fig.
FIG. 4 is a schematic view showing a state in which the first sensor of FIG. 1 measures the shape of a coating liquid droplet.
Fig. 5 is a schematic view for explaining a method for determining whether or not the ball is positive based on the shape data measured by the first sensor of Fig. 1; Fig.
Figs. 6 to 9 are schematic views for explaining a method of measuring the height of the upper surface of the droplets of the coating liquid by the second sensor of Fig. 1. Fig.
FIG. 10 is a schematic view illustrating a 3D model of a coating liquid droplet by calculating the volume of the coating liquid droplet based on the height data of the coating liquid droplet measured by the second sensor of FIG.
Fig. 11 is a schematic view for explaining the profile of the top surface of the droplets of the coating liquid repeatedly measured by the second sensor of Fig. 1; Fig.
12 is a plan view illustrating a dispenser according to another embodiment of the present invention.
13 is a plan view illustrating a dispenser according to another embodiment of the present invention.
14 is a block diagram illustrating the control flow of the dispenser of Fig.

Certain terms are hereby defined for convenience in order to facilitate a better understanding of the present invention. Unless otherwise defined herein, scientific and technical terms used in the present invention shall have the meanings commonly understood by one of ordinary skill in the art. Also, unless the context clearly indicates otherwise, the singular form of the term also includes plural forms thereof, and plural forms of the term should be understood as including its singular form.

Hereinafter, a dispenser according to an embodiment of the present invention will be described with reference to FIGS. 1 to 11. FIG.

1 is a perspective view illustrating a dispenser according to an embodiment of the present invention. 2 is a plan view of Fig. 3 is a block diagram illustrating the control flow of the dispenser of Fig. FIG. 4 is a schematic view showing a state in which the first sensor of FIG. 1 measures the shape of a coating liquid droplet. Fig. 5 is a schematic view for explaining a method for determining whether or not the ball is positive based on the shape data measured by the first sensor of Fig. 1; Fig. Figs. 6 to 9 are schematic views for explaining a method of measuring the height of the upper surface of the droplets of the coating liquid by the second sensor of Fig. 1. Fig. FIG. 10 is a schematic view illustrating a 3D model of a coating liquid droplet by calculating the volume of the coating liquid droplet based on the height data of the coating liquid droplet measured by the second sensor of FIG. Fig. 11 is a schematic view for explaining the profile of the top surface of the droplets of the coating liquid repeatedly measured by the second sensor of Fig. 1; Fig.

1 and 2, a dispenser 1 according to an embodiment of the present invention includes a frame 100, a stage 150, a rail 200, a first support 250, The second sensor 300, the second support 350, the first sensor 320, and the second sensor 400.

The frame 100 is a part where the components of the dispenser 1 are mounted and the stage 150 and the rail 200 are mounted on the frame 100.

The stage 150 may be disposed on the upper portion of the frame 100, and the mother substrate M may be disposed on the upper surface.

Specifically, the mother substrate M can be loaded and unloaded onto the upper surface of the stage 150, and the dispensing liquid can be ejected onto the mother substrate M by the dispensing head unit 300 .

Here, the coating liquid may contain, for example, resin (i.e., resin), liquid crystal, or the like.

The rail 200 is provided on the upper portion of the frame 100 and may be disposed on both sides of the stage 150 so as to extend in the Y-axis direction Y.

More specifically, the rail 200 includes a first guide rail 200a disposed on one side of the stage 150 and a second guide rail 200b disposed on the other side. The first support arm 350 and the first support arm 250 are movable in the Y-axis direction (Y).

The first support platform 250 may be installed to be movable along the rail 200 in the Y-axis direction Y. As shown in FIG.

Specifically, the first support platform 250 is movably installed on the rail 200 and is reciprocally movable in the Y-axis direction Y.

Accordingly, the dispensing head unit 300 installed on one side of the first support platform 250 can discharge the coating liquid on the mother substrate M in the Y-axis direction Y, The first sensor 320 installed on the other surface can measure the shape of the coating liquid droplet discharged onto the mother substrate M by moving in the Y axis direction Y. [ The first support rail 250 is provided with a first auxiliary rail 260 extending in the X axis direction X. The dispensing head unit 300 and the first sensor 320 are connected to the first auxiliary rail 260 Axis direction X along the X-axis direction.

Here, the X-axis direction X means a direction orthogonal to the Y-axis direction (Y).

The dispensing head unit 300 is installed on one side of the first support 250 so as to be movable in the X-axis direction X and can discharge droplets of the coating liquid onto the mother substrate M. [

For reference, the dispensing liquid droplet means a single droplet discharged at one time by the dispensing head unit 300.

The dispensing head unit 300 is installed on one surface of a first support 250 facing the mother substrate M and the first sensor 320 is mounted on the other surface of the first support 250 But the present invention is not limited thereto. That is, the positions of the dispensing head unit 300 and the first sensor 320 may be reversed. The dispensing head unit 300 is installed on one side of the first support 250 facing the mother substrate M and the first sensor 320 is disposed on one side of the first support 250, Will be described on the other side of the first support platform 250 as an example.

Specifically, the dispensing head unit 300 is reciprocatable in the X-axis direction X along the first auxiliary rail 260 provided on the first support 250, Can be discharged.

Accordingly, the dispensing head unit 300 can be moved in the X-axis direction X along the first auxiliary rail 260 while moving in the Y-axis direction Y by the first support 250, The application liquid can be easily discharged onto the mother substrate M. [

Also, a plurality of dispensing head units 300 may be installed. Of course, only one dispensing head unit 300 may be installed, but for convenience of description, the present invention will be described by way of example in which a plurality of dispensing head units 300 are installed.

The dispensing head unit 300 can be moved in the X-axis direction X and the Y-axis direction Y as described above, and the dispensing liquid can be discharged onto the mother substrate M in various patterns or schemes .

The first sensor 320 is installed on the other surface of the first support 250 so as to be movable in the X axis direction X and can measure the shape of the coating liquid droplets discharged onto the mother substrate M. [

Specifically, the first sensor 320 is reciprocally movable in the X-axis direction X along the first auxiliary rail 260 provided on the first support 250, The shape of the droplet can be scanned and measured.

Accordingly, the first sensor 320 can be moved in the X-axis direction X along the first auxiliary rail 260 while moving in the Y-axis direction Y by the first support 250, It is possible to measure the shape of the coating liquid droplets discharged at various positions on the substrate M. [

Also, as shown in the figure, a plurality of first sensors 320 may be installed. Of course, only one first sensor 320 may be installed, but for convenience of description, a plurality of first sensors 320 are provided in the present invention.

The first sensor 320 can move in the X-axis direction X and the Y-axis direction Y as described above and can measure the shape of the coating liquid droplets discharged at various positions on the mother substrate M have.

Here, the shape of the coating liquid droplet measured by the first sensor 320 is the same as the shape of the coating liquid droplet when viewed from above (that is, when viewed from a position apart from the coating liquid droplet in the Z-axis direction Z) Sectional shape (i.e., 2D (two dimensions) shape).

Also, the first sensor 320 may include, for example, a 2D camera.

The second support platform 350 is installed to be movable along the rail 200 in the Y-axis direction Y and may be disposed on the opposite side of the first support platform 250.

Specifically, the second support table 350 is movably installed on the rail 200 and is reciprocatable in the Y-axis direction Y.

Therefore, the second sensor 400 installed on the second support 350 can move in the Y-axis direction Y to measure the height of the upper surface of the coating liquid droplets discharged onto the mother substrate M. The second support rail 350 is installed on the second support rail 350 so as to extend in the X axis direction X. The second sensor support 360 supports the second support rail 360 along the X axis direction X The height of the upper surface of the droplet of the coating liquid can be measured.

The second sensor 400 is installed on the second support 350 so as to be movable in the X-axis direction X, and can measure the height of the upper surface of the discharged coating liquid droplet.

Specifically, the second sensor 400 is reciprocally movable in the X-axis direction X along the second auxiliary rail 360 provided on the second support 350, The height of the upper surface of the droplet can be measured.

Accordingly, the second sensor 400 can be moved in the X-axis direction X along the second auxiliary rail 360 while moving in the Y-axis direction Y by the second support 350, It is possible to measure the height of the top surface of the droplets of the coating liquid discharged at various positions on the substrate M. [

Also, as shown in the figure, a plurality of second sensors 400 may be installed. Of course, only one second sensor 400 may be installed, but for convenience of description, a plurality of second sensors 400 are provided in the present invention.

As described above, the second sensor 400 can be moved in the X-axis direction X and the Y-axis direction Y, and measures the height of the upper surface of the droplets of the coating liquid discharged at various positions on the mother substrate M can do.

For example, the height of the upper surface of the droplet of the coating liquid measured by the second sensor 400 may be, for example, the height of the upper surface of the droplet of the coating liquid with respect to the mother substrate M, And the upper surface of the droplet of the coating liquid).

The second sensor 400 may also include a chromatic confocal sensor, for example.

For reference, the dispensing head unit 300, the first sensor 320, and the second sensor 400 are driven in the Z-axis direction Z, which is orthogonal to the X-axis and the Y-axis, And can also be moved in the axial direction (Z).

Specifically, the first Z-axis driving unit (not shown) may be installed on one surface of the first supporting table 250 to move the dispensing head unit 300 up and down in the Z-axis direction Z.

Accordingly, the height of the dispensing head unit 300 can be adjusted by moving up and down in the Z-axis direction Z through a first Z-axis driving unit (not shown) as needed, Liquid defective problems and the like can be prevented.

The second Z-axis driving unit 330 may be installed on the other surface of the first support 250 to move the first sensor 320 up and down in the Z-axis direction Z.

Accordingly, the height of the first sensor 320 can be adjusted by moving up and down in the Z-axis direction Z through the second Z-axis driving unit 330 as needed, thereby improving the measuring accuracy of the coating liquid shape .

The third Z-axis driver 370 may be installed on the second support 350 to move the second sensor 400 up and down in the Z-axis direction Z.

Accordingly, the height of the second sensor 400 can be adjusted by moving up and down in the Z-axis direction Z through the third Z-axis driving unit 370 as needed, and the height measurement accuracy of the upper surface of the droplets of the coating liquid Can be improved.

Next, referring to Fig. 3, the control flow of the dispenser 1 is shown.

The dispenser 1 may further include a memory 500, a first calculation unit 540, a second calculation unit 550, a first control unit 610 and a second control unit 600, and the memory 500 The first calculation unit 540, the second calculation unit 550, the first control unit 610 and the second control unit 600 may be installed inside or outside the dispenser 1, Omit it.

The first calculation unit 540, the second calculation unit 550, the first control unit 610, and the second control unit 600 may be integrated or may exist separately as shown in the figure. Of course, the first calculation unit 540 and the second calculation unit 550 may be integrated into one, and the first control unit 610 and the second control unit 600 may be integrated into one. However, for convenience of description, it is assumed that the first calculation unit 540, the second calculation unit 550, the first control unit 610, and the second control unit 600 are separately provided in the present invention do.

First, the control flow related to the first sensor 320 will be described as follows.

Specifically, the first sensor 320 can measure the shape of the droplet of the coating liquid and can provide the shape data of the measured droplet of the droplet to the memory 500 in the manner described above.

The first sensor 320 may scan and measure the shape of the entire coating liquid droplets discharged to the mother substrate M and provide the memory 500 with shape data of the measured coating liquid droplets.

The memory 500 receives and stores the shape data of the coating liquid droplet from the first sensor 320 and the height data of the coating liquid droplet from the second sensor 400 and stores the data.

The first calculation unit 540 can calculate the length of the coating liquid droplet in the X axis direction X and the length of the Y axis direction Y based on the shape data of the coating liquid droplet stored in the memory 500, To the first control unit 610.

The first controller 610 compares the length of the coating liquid droplet measured by the first calculating unit 540 with the length of the X axis direction X and the length of the Y axis direction Y respectively with a predefined reference length, It is possible to carry out a positive judgment on the shape of the wafer W.

Here, referring to FIG. 4, it can be seen that the first sensor 320 measures the shape of the coating liquid droplet.

That is, the first sensor 320 measures the shape of the coating liquid droplet PA at a position spaced apart from the coating liquid droplet PA in the Z-axis direction Z, And the shape of the coating liquid droplet PA to be measured are set so that the sectional shape of the coating liquid droplet PA when viewed from above (that is, when viewed from a position apart from the coating liquid droplet in the Z axis direction Z) That is, 2D (two dimensions) shape).

Next, referring to Figs. 3 and 5, there is shown a method of judging whether or not the ball is positive based on the shape data measured by the first sensor 320. Fig.

For reference, various forms of coating liquid droplets can be ejected onto the mother substrate M. [ Of course, the coating liquid droplets are basically ejected at the same height and the same ejection amount, so that the coating liquid droplets of the same and similar shapes are ejected. However, various environmental factors (for example, mechanical shaking, clogging of the dispensing head unit nozzles, Or the like), the defective coating liquid droplets can be ejected.

Accordingly, the first sensor 320 scans and measures the shape of all the coating liquid droplets discharged onto the mother substrate M to detect the coating liquid droplets of the defective shape, and stores the measured shape data in the memory 500).

At this time, the first arithmetic unit 540 calculates the length of the coating liquid droplet in the X-axis direction X and the length of the Y-axis direction Y on the basis of the shape data of the coating liquid droplets stored in the memory 500, And provides the result to the first control unit 610.

The first controller 610 compares the length of the coating liquid droplet measured by the first calculating unit 540 with the length of the X axis direction X and the length of the Y axis direction Y respectively with a predefined reference length, Where the predefined reference length may include a reference length range RX in the X-axis direction and a reference length range RY in the Y-axis direction.

Specifically, the length of the coating liquid droplet measured by the first calculating unit 540 in the X-axis direction X is compared with the reference length range RX in the X-axis direction, and the length of the coating liquid droplet in the Y- The length is compared with the reference length range RY in the Y-axis direction.

The first control unit 610 determines whether the length of the coating liquid droplet measured in the first calculation unit 540 in the X axis direction X and the Y axis direction Y is within the reference length range in the X axis direction and the Y axis direction RX, RY), the ejection method of the dispensing head unit 300 can be maintained.

5, in the case of the normal coating liquid drop (NPA), both the lengths of the X-axis direction X and the lengths of the Y-axis direction X are the reference length range RX in the X- And the reference length range RY in the Y-axis direction.

When the normal coating liquid droplet is sensed, the first controller 610 maintains the dispensing method of the dispensing head unit 300.

The first control unit 610 determines whether the length of the coating liquid droplet measured in the first calculation unit 540 in the X axis direction X is within the reference length range RX in the X axis direction or in the Y axis direction Y, The ejection method of the dispensing head unit 300 can be corrected when the length of the ejection head unit 300 is not within the reference length range RY in the Y-axis direction.

For example, in the case of the first defective coating liquid droplet DPA1 shown in Fig. 5, the length PX1 in the X-axis direction is included in the reference length range RX in the X-axis direction, but the length in the Y- PY1 are not included in the reference length range RY in the Y-axis direction.

In the case of the second defective coating liquid droplet DPA2, both the length PX2 in the X-axis direction and the length PY2 in the Y-axis direction are the reference length range RX in the X-axis direction and the reference length range RY).

If such a defective coating liquid droplet is sensed, the first control unit 610 can correct the dispensing method of the dispensing head unit 300.

Specifically, the first controller 610 controls the moving speed of the dispensing head unit 300 in the X-axis or Y-axis direction, the dispensing liquid dispensing height (in the Z-axis direction) It is possible to correct at least one of the coating liquid discharge amount.

For reference, FIG. 5 shows that there is only the upper limit of the reference length range RX in the X-axis direction and the reference length range RY in the Y-axis direction, and there is no lower limit, but it is not limited thereto. That is, each of the reference length range RX in the X-axis direction and the reference length range RY in the Y-axis direction may have both the upper limit and the lower limit. However, for convenience of explanation, FIG. 5 illustrates a case where the reference length range RX in the X-axis direction and the reference length range RY in the Y-axis direction have only an upper limit.

The control flow related to the second sensor 400 will be described with reference to FIG. 3 again.

The second sensor 400 can measure the height of the upper surface of the droplets of the coating liquid and provide the measured data of the height of the droplets of the coating liquid to the memory 500 in the manner described above.

For reference, the second sensor 400 can measure only the height of the upper surface of a part or a specific coating liquid droplet that is not the entire coating liquid droplet discharged onto the mother substrate M, and provides the measured height data to the memory 500 have. Therefore, the measurement operation of the second sensor 400 does not significantly affect the overall tack time.

The second calculation unit 550 can calculate the volume of the coating liquid droplet based on the height data of the top surface of the coating liquid droplet stored in the memory 500 and calculate the weight of the coating liquid droplet based on the calculated volume of the coating liquid droplet .

The second sensor 400 may measure the height of the upper surface of the droplets of the coating liquid repeatedly a plurality of times, and the calculating unit 550 may use the average value of the volume values derived based on the repeated height data The measurement error can be reduced by separately checking whether the repeat precision value for the volume values is less than a predetermined reference value.

The second control unit 600 may compare the calculated weight of the coating liquid droplet with a predefined reference weight to perform a positive determination on the coating liquid discharge amount of the dispensing head unit 300. [

Specifically, the second controller 600 receives the weight data of the coating liquid droplet from the second calculator 550, and when the weight of the applied coating liquid droplet is equal to or less than a predefined reference weight, If it is determined that there is a difference, it can be determined that the dispensed amount of the coating liquid of the dispensing head unit 300 is good. In this case, the second control unit 600 can maintain the dispensed amount of the dispensed liquid of the dispensing head unit 300.

On the other hand, if it is determined that the dispensed droplet weight is different from the predetermined reference weight by more than the error range, the second controller 600 determines that the dispensed droplet dispensed amount of the dispensing head unit 300 is poor It can be judged. In this case, the second control unit 600 can correct the coating liquid discharge amount of the dispensing head unit 300.

That is, the second controller 600 may increase or decrease the dispensed amount of the coating liquid of the dispensing head unit 300.

Here, referring to Figs. 6 to 9, a method of measuring the height of the upper surface of the droplets of the coating liquid is shown by the second sensor 400. Fig.

Referring to FIG. 6, the method of measuring the height of the top surface of the droplets of the coating liquid of the second sensor 400, that is, the chromatic aberration confocal sensor can be confirmed.

Specifically, the chromatic aberration confocal sensor uses a white LED light source (L) unlike a laser confocal sensor. In the case of the white LED light source L, light having a wavelength of 400 to 700 nm is irradiated and includes visible light. Light emitted from the white LED light source L passes through the first pinhole PH1, (CL) and is irradiated onto the surface of the object PA (that is, the upper surface of the droplet of the coating liquid).

)별 초점거리가 달라져서 대상체(PA)에 도달하게 된다. 즉, 청색의 단파장 영역은 짧은 거리에 초점이 맺히고, 적색의 장파장 영역은 먼 거리에 초점이 맺히게 된다. Here, when the light passes through the chromatic aberration lens CL, the wavelength (for example,

) Is different from that of the target object (PA). That is, the blue short wavelength region is focused at a short distance, and the red long wavelength region is focused at a long distance.

For reference, the error can be reduced by limiting the measurement range (MR) of the chromatic aberration confocal sensor.

The light reflected from the object PA passes through the chromatic aberration lens CL again and passes through the second pinhole PH2 by a beam splitter BS to be incident on a spectrometer SM . Of course, the unfocused wavelength of the light reflected from the object PA can not pass through the second pinhole PH2 even if it is reflected by the beam splitter BS.

The spectrometer (SM) can measure the distance of the target object (PA), that is, the height of the surface of the target object (PA) by analyzing the wavelength of the received light.

For reference, the vertical axis of the graph shown in Fig. 6 is the intensity, and the horizontal axis is the wavelength?.

Next, referring to FIGS. 7 to 9, a method of measuring the height of the upper surface of the application liquid drop PA is illustrated in detail.

Referring to FIG. 7, the second sensor 400 can measure the height of the upper surface of the coating liquid droplet PA through the method described with reference to FIG. At this time, the second sensor 400 moves in the Y-axis direction Y through the second support 350 of FIG. 1 described above, and can measure the height of the entire upper surface of the coating liquid drop PA.

For reference, as the second sensor 400 moves slowly in the Y-axis direction Y, the resolution increases.

8, the second sensor 400 directly measures the coating liquid droplet PA '(that is, the coating liquid droplet that has not been deformed) discharged by the dispensing head unit 300 But when the shape change is completed after a predetermined time has elapsed from the dispensed droplet PA ', the deformed droplet PA (droplets of the applied droplets deformed in a shape that hardens and spreads sideways) can be measured .

This is because, when the second sensor 400 directly measures the coating liquid droplet PA 'that has not been deformed, the shape of the coating liquid droplet PA' continuously changes even during the measurement, to be.

For reference, even in the case of the first sensor (320 in Fig. 1), the shape of the coating liquid droplet that has been deformed can be measured.

Referring to FIG. 9, the manner in which the second sensor 400 measures the height of the upper surface of the coating liquid drop PA is shown in detail.

Specifically, the second sensor 400 includes a plurality of point groups (for example, a first point group PG1, a second point group PG2, and a third point group PG3) spaced from each other in the Y-axis direction Y on the upper surface of the application liquid drop PA. (PG2) in the Y-axis direction (Y).

Here, each of the point groups (for example, the first point group PG1 and the second point group PG2) included in the plurality of point groups is moved in the Y axis direction Y of the second sensor 400 And the distance in the Y-axis direction (Y) can be changed.

Further, the point groups (for example, the first point group PG1 and the second point group PG2) may include a plurality of points P and P 'arranged in a line in the X-axis direction X, respectively have.

For example, a plurality of points P included in the first point group PG1 are divided into approximately 180 points (P) . ≪ / RTI >

Here, the points P and P 'do not actually exist on the upper surface of the coating liquid droplet, but mean one point on the upper surface of the coating liquid droplet PA measured by the second sensor 400.

In other words, the second sensor 400 moves in the Y-axis direction Y through the second support 350 to form a plurality of point groups (for example, a first point group PG1 and a second point group PG2) ) Can be measured sequentially.

In other words, the second sensor 400 measures the height of the points on the same line in the X-axis direction X with one point on the upper surface of the application liquid drop PA, It is possible to measure the heights of other points spaced from the one point in the Y-axis direction (Y) and points in the same line in the X-axis direction (X) with respect to the other points.

By repeating this movement and measurement operation, the second sensor 400 can measure the height of the entire upper surface of the coating liquid drop PA.

Here, referring to Figs. 3, 10 and 11, the profile of the droplets of the coating liquid measured by the second sensor 400 is shown.

For reference, the scale units in FIGS. 10 and 11 may be, for example, in units of micrometers (um).

Specifically, FIG. 10 shows a model of a coating liquid droplet obtained by calculating the volume of the coating liquid droplet based on the height data of the coating liquid droplet measured by the second sensor 400, in 3D. Of course, the model of such a 3D dispensing droplet is exemplary.

Such a 3D model can be implemented and confirmed by a user through a separate device or software.

11 also shows the profile of the top surface of the droplets of the coating liquid repetitively measured by the second sensor 400. In Fig.

That is, the second sensor 400 can repeatedly measure the height of the upper surface of the droplets of the coating liquid a plurality of times, and the second calculation unit 550 uses the average value of the volume values derived based on the repeated height data Or whether the repeat precision value for the volume values falls below a predefined reference value, thereby reducing the measurement error.

As described above, the dispenser 1 according to the embodiment of the present invention measures the shape of the droplets of the coating liquid through the first sensor 320, that is, the 2D camera, It is possible to correct the discharge method (i.e., the discharge parameter). Therefore, it is possible to prevent a problem that may occur due to the defective shape of the coating liquid (for example, problems such as poor bonding or overflow of the coating liquid over the substrate during the bonding process between the substrates) can do.

The dispenser 1 according to an embodiment of the present invention measures the volume of the coating liquid droplet discharged by the dispensing head unit 300 through the second sensor 400, that is, the chromatic aberration confocal sensor, It is not necessary to form a separate balance each time the discharge amount is inspected by deducing the discharge amount on the basis of the discharge amount. Therefore, it is possible to improve the productivity as compared with the prior art by preventing the work from being delayed due to the formation of the balance and deteriorating the productivity, and it is possible to improve the economical efficiency by preventing the problem that the coating liquid is wasted due to disposal after the formation of the balance.

For reference, the dispenser 1 according to the embodiment of the present invention can perform the coating liquid discharge amount inspection for each substrate (i.e., the mother substrate M). That is, the dispenser 1 can perform the coating liquid discharge amount inspecting operation on the mother substrate M in real time upon completion of the dispensing liquid dispensing operation on the mother substrate M.

Of course, volume and weight are not calculated for all coating liquid droplets on the mother substrate M when inspecting the coating liquid discharge amount. That is, the dispenser 1 performs volume and weight calculation only on a part or a specific coating liquid droplet on the mother substrate M, and inspects whether the coating liquid is discharged on the mother substrate M in an appropriate amount .

Therefore, the coating liquid discharge amount checking operation according to the present invention does not affect the tack time and does not deteriorate the productivity.

However, it is possible to form the balance once initially to define the reference weight. That is, a balance is formed at one time in the initial setting to preliminarily define the reference weight, and the coating liquid discharge amount to be discharged onto each mother substrate (M) based on the initial discharge amount is checked (i.e., appropriate).

Hereinafter, a dispenser according to another embodiment of the present invention will be described with reference to FIG.

12 is a plan view illustrating a dispenser according to another embodiment of the present invention.

For reference, the dispenser 2 according to another embodiment of the present invention is similar to the dispenser 1 according to the embodiment of the present invention except for some components and effects, and focuses on differences.

12, the dispenser 2 according to another embodiment of the present invention differs from the dispenser 1 of FIG. 1 in that the first sensor 320 is not a first support 250 but a second support 350, Respectively.

Also, as the position of the first sensor 320 is changed, the position of the second Z-axis driver 330 for moving the first sensor 320 up and down in the Z-axis direction Z is also changed.

That is, the second Z-axis driving unit 330 may be installed on one side of the second supporting unit 350 to move the first sensor 320 up and down in the Z-axis direction Z, The second sensor 400 can be mounted on the other surface of the second support table 350 to move the second sensor 400 up and down in the Z-axis direction Z.

Here, one surface of the second support table 350 refers to a surface not facing the mother substrate M, and the other surface of the second support table 350 refers to a surface facing the mother substrate M.

In this way, the first sensor 320 and the second sensor 400 are installed in the same support, that is, the second support 350, so that the first support 250 integrally supports the operation of the dispensing head unit 300 And the second support table 350 can be driven only for the application liquid inspection operation.

Therefore, the working efficiency of the dispensing 2 can be improved.

Hereinafter, a dispenser according to another embodiment of the present invention will be described with reference to FIGS. 13 and 14. FIG.

13 is a plan view illustrating a dispenser according to another embodiment of the present invention. 14 is a block diagram illustrating the control flow of the dispenser of Fig.

For reference, the dispenser 3 according to another embodiment of the present invention is similar to the dispenser 1 according to the embodiment of the present invention except for some components and effects, and focuses on differences.

Referring to Fig. 13, the dispenser 3 according to another embodiment of the present invention differs from the dispenser 1 of Fig. 1 in that there are a plurality of dispensing head units.

The dispenser 3 includes a first dispensing head unit 300a which is installed on one surface of the first support table 250 so as to be movable in the X axis direction X and discharges droplets of the coating liquid onto the mother substrate M, A first sensor 320 mounted on the other surface of the first support 250 so as to be movable in the X axis direction X and a second sensor 320 which is movable in the X axis direction X on one surface of the second support 350, A second dispensing head unit 300b for dispensing droplets of the coating liquid onto the mother substrate M and a second dispensing head unit 300b mounted on the other surface of the second support 350 in such a manner as to be movable in the X- 2 < / RTI >

That is, in the case of the dispenser 3 according to another embodiment of the present invention, the first support base 250 is provided with the first dispensing head unit 300a and the first sensor 320, and the second support base 350 The second dispensing head unit 300b and the second sensor 400 are installed.

1, the second dispensing head unit 300b is added, and the second dispensing head unit 300b is moved to Z (see Fig. 1) A fourth Z-axis driving unit (not shown) for moving the second sensor 400 up and down in the Z-axis direction Z is added to the second Z- Is changed.

That is, the third Z-axis driver 370 may be installed on the other surface of the second support 350 to move the second sensor 400 up and down in the Z-axis direction Z, and the fourth Z- The second dispensing head unit 300b can be installed on one side of the support table 350 to move up and down in the Z-axis direction Z.

One side of the first support platform 250 refers to the side facing the mother substrate M and the other side of the first support platform 250 means the side not facing the mother substrate M. [ One surface of the second support table 350 corresponds to a surface facing the mother substrate M and the other surface of the second support table 350 refers to a surface not facing the mother substrate M. [

The first dispensing head unit 300a and the second dispensing head unit 300b may alternatively discharge the coating liquid on the mother substrate M or may discharge the liquid on the mother substrate M in half The coating liquid may be discharged for each of the areas. Of course, any one of the first dispensing head unit 300a and the second dispensing head unit 300b mainly discharges the coating liquid, and the other one is the auxiliary path (for example, when the main dispensing head unit fails The coating liquid may be discharged.

The first dispensing head unit 300a and the first sensor 320 and the second dispensing head unit 300b and the second sensor 400 are connected to the first support 250 and the second support 350, ), And can be operated in various ways, so that the tack time of the coating liquid discharging operation and the coating liquid inspection operation can be shortened and the efficiency can be improved.

14, the control flow of the dispenser 3 of Fig. 13 is shown.

The difference from the control flow of the dispenser 1 of FIG. 3 will be described below.

First, in FIG. 14, the first controller 610 compares the lengths of the coating liquid droplets measured in the first calculating unit 540 with the reference lengths in the X-axis and Y-axis directions, respectively, If it is determined that the shape of the coating liquid droplet is good, the dispensing method of the dispensing head unit discharging the coating liquid droplets from the first and second dispensing head units 300a and 300b is maintained , It is possible to correct the dispensing method of the dispensing head unit that dispensed the coating liquid droplets from the first and second dispensing head units 300a and 300b when it is determined that the shape of the dispensing liquid droplet is defective.

That is, when the droplets of the coating liquid measured by the first sensor 320 are ejected by the first dispensing head unit 300a, the first control unit 610 controls the first dispensing head unit 300a And when the droplet of the coating liquid measured by the first sensor 320 is ejected by the second dispensing head unit 300b, control may be performed on the second dispensing head unit 300b.

14, the second controller 600 compares the weight of the droplets of the coating liquid calculated by the second calculator 550 with a predefined reference weight to determine the weight of the first and second dispensing head units 300a and 300b It is possible to carry out a simple determination with respect to the coating liquid discharge amount of the dispensing head unit that has discharged the coating liquid droplets. If it is determined that the calculated dispensed droplet weight is the same as the reference weight or within a predetermined error range, the second controller 600 controls the first and second dispensing head units 300a and 300b Of the dispensing head unit, and when it is determined that the calculated dispensed droplet weight is different from the reference weight by an error range or more, the first and second dispensing head units It is possible to correct the discharge amount of the dispensing head unit from which the coating liquid droplets are discharged from the discharge heads 300a and 300b.

That is, when the droplets of the coating liquid measured by the second sensor 400 are ejected by the first dispensing head unit 300a, the second control unit 600 controls the first dispensing head unit 300a And when the droplet of the coating liquid measured by the second sensor 400 is ejected by the second dispensing head unit 300b, control may be performed on the second dispensing head unit 300b.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It will be understood that various changes and modifications may be made without departing from the spirit and scope of the invention.

1: dispenser 100: frame
150: stage 200: rail
250: first support frame 260: first auxiliary rail
300: dispensing head unit 320: first sensor
330: second Z-axis driving part 350: second supporting part
360: second auxiliary rail 370: third Z-axis driving part
400: second sensor

Claims (19)

frame;
A stage disposed on an upper surface of the frame, and a mother substrate disposed on the upper surface;
A rail disposed on the frame and extending on both sides of the stage in the Y axis direction;
A first support member movably installed in the Y-axis direction along the rail;
A dispensing head unit installed on one surface of the first support so as to be movable in the X axis direction perpendicular to the Y axis direction and discharging a coating liquid droplet on the mother substrate;
A first sensor installed on the other surface of the first support so as to be movable in the X axis direction and measuring a shape of a coating liquid droplet ejected on the mother substrate;
A second support disposed movably in the Y-axis direction along the rail, and disposed on the opposite side of the first support; And
A second sensor installed on the second support so as to be movable in the X-axis direction and measuring a height of an upper surface of the coating liquid droplets discharged on the mother substrate;
Containing
dispenser.
The method according to claim 1,
A memory for storing shape data of a coating liquid droplet measured by the first sensor and height data of an upper surface of the coating liquid droplet measured by the second sensor;
A first calculator for calculating a length of the droplets of the coating liquid in the X-axis and Y-axis directions based on the shape data of the coating liquid droplets stored in the memory; And
And calculating a volume of the coating liquid droplet based on the height data of the coating liquid droplet stored in the memory and calculating the weight of the coating liquid droplet based on the calculated volume of the coating liquid droplet doing
dispenser.
3. The method of claim 2,
The second sensor measures the height of the first point group and the second point group which are spaced apart from each other in the Y axis direction on the upper surface of the discharged coating liquid droplets,
Wherein the first point group and the second point group include a plurality of points arranged in a line in the X-axis direction
dispenser.
The method of claim 3,
The second sensor sequentially measures the heights of the first point group and the second point group while moving in the Y-axis direction through the second support, and then provides the measured height data to the memory
dispenser.
3. The method of claim 2,
A first controller for comparing the lengths of the coating liquid droplets measured by the first calculating unit with the lengths in the X and Y axis directions respectively with a predetermined reference length to perform a positive determination on the shape of the coating liquid droplets; And
And a second control unit for comparing the weight of the coating liquid droplet calculated in the second calculating unit with a predefined reference weight to perform a positive determination on the coating liquid discharge amount of the dispensing head unit
dispenser.
6. The method of claim 5,
Wherein the predefined reference length includes a reference length range in the X-axis direction and a reference length range in the Y-axis direction,
The length of the coating liquid droplet measured in the first calculation unit in the X axis direction is compared with the reference length range in the X axis direction,
The length of the coating liquid droplet measured in the first calculation unit in the Y-axis direction is compared with the reference length range in the Y-axis direction
dispenser.
The method according to claim 6,
Wherein the first control unit includes:
Wherein when the lengths of the droplets of the coating liquid measured by the first calculation unit in the X and Y axis directions are within the reference length ranges of the X axis and Y axis directions,
When the length of the coating liquid droplet measured by the first calculating unit is within the reference length range in the X axis direction or the length in the Y axis direction is not within the reference length range in the Y axis direction, The discharge method of the dispensing head unit is corrected
dispenser.
6. The method of claim 5,
Wherein the second control unit comprises:
Wherein when the calculated dispensed droplet weight is determined to be the same as the reference weight or within a predetermined error range, the discharge amount of the dispensing head unit is maintained,
When it is determined that the calculated weight of the droplet of coating liquid differs by more than the reference weight and the error range, a discharge amount of the dispensing head unit is corrected
dispenser.
The method according to claim 1,
A first Z-axis driving unit installed on one surface of the first support for moving the dispensing head unit up and down in a Z-axis direction orthogonal to the X-axis and the Y-axis;
A second Z-axis driver installed on the other surface of the first support to move the first sensor up and down in the Z-axis direction; And
And a third Z-axis driver installed on the second support and moving the second sensor up and down in the Z-axis direction
dispenser.
The method according to claim 1,
Wherein the first sensor comprises a 2D camera,
Wherein the second sensor comprises a chromatic confocal sensor
dispenser.
frame;
A stage disposed on an upper surface of the frame, and a mother substrate disposed on the upper surface;
A rail disposed on the frame and extending on both sides of the stage in the Y axis direction;
A first support member movably installed in the Y-axis direction along the rail;
A dispensing head unit provided on the first support so as to be movable in the X axis direction orthogonal to the Y axis direction and discharging a coating liquid droplet on the mother substrate;
A second support disposed movably in the Y-axis direction along the rail, and disposed on the opposite side of the first support;
A first sensor installed on one side of the second support so as to be movable in the X axis direction and measuring a shape of a coating liquid droplet ejected on the mother substrate; And
A second sensor installed on the other surface of the second support so as to be movable in the X axis direction and measuring the height of the upper surface of the dispensed droplet of the applied solution;
Containing
dispenser.
12. The method of claim 11,
A memory for storing shape data of a coating liquid droplet measured by the first sensor and height data of an upper surface of the coating liquid droplet measured by the second sensor;
A first calculator for calculating a length of the droplets of the coating liquid in the X-axis and Y-axis directions based on the shape data of the coating liquid droplets stored in the memory;
A second calculation unit for calculating the volume of the coating liquid droplet based on the height data of the top surface of the coating liquid droplet stored in the memory and calculating the weight of the coating liquid droplet based on the calculated volume of the coating liquid droplet;
A first controller for comparing the lengths of the coating liquid droplets measured by the first calculating unit with the lengths in the X and Y axis directions respectively with a predetermined reference length to perform a positive determination on the shape of the coating liquid droplets; And
And a second control unit for comparing the weight of the coating liquid droplet calculated in the second calculating unit with a predefined reference weight to perform a positive determination on the coating liquid discharge amount of the dispensing head unit
dispenser.
12. The method of claim 11,
A first Z-axis driving unit installed on the first support and moving the dispensing head unit up and down in a Z-axis direction orthogonal to the X-axis and the Y-axis;
A second Z-axis driver installed on one side of the second support to move the first sensor up and down in the Z-axis direction; And
And a third Z-axis driving unit installed on the other surface of the second support and moving the second sensor up and down in the Z-axis direction
dispenser.
frame;
A stage disposed on an upper surface of the frame, and a mother substrate disposed on the upper surface;
A rail disposed on the frame and extending on both sides of the stage in the Y axis direction;
A first support member movably installed in the Y-axis direction along the rail;
A first dispensing head unit provided on one surface of the first support so as to be movable in an X axis direction perpendicular to the Y axis direction and discharging a coating liquid droplet on the mother substrate;
A first sensor mounted on the other surface of the first support so as to be movable in the X-axis direction;
A second support disposed movably in the Y-axis direction along the rail, and disposed on the opposite side of the first support;
A second dispensing head unit installed on one side of the second support so as to be movable in the X axis direction and discharging a coating liquid droplet on the mother substrate; And
A second sensor mounted on the other surface of the second support so as to be movable in the X-axis direction;
, ≪ / RTI &
Wherein the first sensor measures a shape of a coating liquid droplet discharged onto the mother substrate,
And the second sensor measures the height of the upper surface of the coating liquid droplets discharged onto the mother substrate
dispenser.
15. The method of claim 14,
A memory for storing shape data of a coating liquid droplet measured by the first sensor and height data of an upper surface of the coating liquid droplet measured by the second sensor;
A first calculator for calculating a length of the droplets of the coating liquid in the X-axis and Y-axis directions based on the shape data of the coating liquid droplets stored in the memory;
A second calculation unit for calculating the volume of the coating liquid droplet based on the height data of the top surface of the coating liquid droplet stored in the memory and calculating the weight of the coating liquid droplet based on the calculated volume of the coating liquid droplet;
A first controller for comparing the lengths of the coating liquid droplets measured by the first calculating unit with the lengths in the X and Y axis directions respectively with a predetermined reference length to perform a positive determination on the shape of the coating liquid droplets; And
And a controller for comparing the weight of the coating liquid droplet calculated by the second calculating unit with a predefined reference weight to calculate a coating liquid discharge amount of the dispensing head unit that has discharged the coating liquid droplets of the first and second dispensing head units Further comprising a second controller
dispenser.
16. The method of claim 15,
Wherein the first control unit includes:
Wherein when the shape of the coating liquid droplet is judged to be good, the discharging method of the dispensing head unit discharging the coating liquid droplets of the first and second dispensing head units is maintained,
And correcting the dispensing method of the dispensing head unit that dispensed the coating liquid droplets from among the first and second dispensing head units when it is determined that the shape of the dispensing liquid droplet is defective,
dispenser.
17. The method of claim 16,
Wherein the first control unit includes:
At least one of the moving speed of the first or second dispensing head unit in the X-axis or Y-axis direction, the dispensing liquid dispensing height, and the dispensed liquid dispensing amount at the time of correcting the dispensing method of the first or second dispensing head unit Calibrate
dispenser.
16. The method of claim 15,
Wherein the second control unit comprises:
Wherein when it is determined that the calculated weight of the droplets of the coating liquid is the same as the reference weight or within a predetermined error range, the droplet of the applied droplets of the first and second dispensing head units, The discharge amount of the head unit is maintained,
When the calculated weight of the coating liquid droplet is judged to be different from the reference weight and the error range, the discharge amount of the dispensing head unit from which the coating liquid droplet has been discharged out of the first and second dispensing head units To correct
dispenser.
15. The method of claim 14,
A first Z-axis driver installed on one surface of the first support for moving the first dispensing head unit up and down in a Z-axis direction orthogonal to the X-axis and the Y-axis;
A second Z-axis driver installed on the other surface of the first support to move the first sensor up and down in the Z-axis direction;
A third Z-axis driver installed on the other surface of the second support to move the second sensor up and down in the Z-axis direction; And
A fourth Z-axis driving unit installed on one surface of the second support and moving up and down the second dispensing head unit in the Z-axis direction;
Further comprising
dispenser.

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