KR20170126465A - A device for turning a mirror element having two degrees of freedom of turning and a sensor for analyzing the turning - Google Patents

Abstract

The present invention 2 relates to a displacement device (31) for pivoting a mirror element 20 having two pivot degree of freedom, the actuator electrode (37 _i, 42) of which comprises an electrode structural body, said actuator electrode (37 _i, 42 are comb-shaped electrodes, all of the actuator electrodes 37 _i are located in a single plane, and the actuator electrodes 37 _i , 42 form a direct drive for pivoting the mirror element 20.

Description

A device for turning a mirror element having two degrees of freedom of turning and a sensor for analyzing the turning

This patent application claims priority from German Patent Application DE 10 2015 204 874.8, the contents of which are incorporated herein by reference.

The present invention relates to a sensor device for capturing a pivotal position of a mirror element. Furthermore, the present invention relates to a device for pivoting a mirror element with two pivoting degrees of freedom. Moreover, the invention relates to an optical element and a mirror array comprising a plurality of such optical elements. Furthermore, the present invention relates to an illumination optical unit and an illumination system for a projection exposure apparatus, and a projection exposure apparatus. Finally, the invention relates to a method for producing microstructured or nanostructured components, and to components made according to this method.

As an example, a mirror array comprising a plurality of displaceable individual mirrors is known from WO 2010/049076 A2. The characteristics of the actuators which function to position the individual mirrors play a decisive role, in particular, for the optical function and quality of these mirror arrays. An actuator device for displacing individual mirrors of a mirror array for a projection exposure apparatus is known from DE 10 2013 206 529 A1 and DE 10 2013 206 531 A1.

It is an object of the present invention to improve a sensor device for capturing a pivotal position of a mirror element.

This object is achieved by a sensor device comprising a transmitter electrode having a comb structure, a receiver electrode having a comb-like structure, and a sensor unit comprising a voltage source for applying an AC voltage to the transmitter electrode.

In particular, the sensor device facilitates direct acquisition of the pivot position of the mirror element that can be pivoted by the assistance of the displacement device according to the previous description. The sensor device may form part of such a displacement device. As described above, each sensor of the sensor device measures the displacement position of each mirror element directly relative to the reference plane. First, it simplifies the measurement itself and, secondly, it facilitates the precision of relatively high measurements since it is not necessary to consider the extension along the axis, as would be required in the case of serial kinematics.

The sensor device includes a plurality of different sensor pairs. In particular, the sensor device includes two differential sensor pairs whose measurement axes are arranged orthogonally to each other.

Each sensor pair defines a measurement axis, and the pivot position of the mirror element along the measurement axis is captured. By combining the measured values from all sensor pairs, the inclined position of the mirror element relative to the base plate is completely captured.

Here, it is understood that the differential sensor pair means an arrangement of two sensors that determine the tilt angle from the measurement of two vertical movements. For example, the common mode movement caused by the vertical movement of the mirror caused by thermal expansion does not contribute to the measurement signal of the measured mirror inclination angle due to the difference being formed. Thus, the differential sensor arrangement is advantageous in that the position of the mirror is directly and completely captured via the sensor pair. In particular, as a first guess, it does not depend on the stability of the mechanical turning point, i.e. the effective pivot point.

The longitudinal capacitive comb-type transducer, by which the relative position between the movable armature and the fixed stator can be determined via capacitance measurement, is preferably a differential sensor. The capacitance measurement of such a sensor can be performed in two different ways: the capacitance is measured between the comb-shaped fingers of the movable armature and the comb-shaped fingers of the stationary stator. In this case, the measured capacitance depends linearly on the longitudinal overlap of the comb-like fingers. Alternatively, the capacitance can also be measured between adjacent stator comb-like fingers, wherein the fingers of the movable armature comb act as variable position dependent shields. This alternative is also referred to as a shielded mode (shielded mode). In this measurement mode, the measured capacitance also depends linearly on the longitudinal overlap of the comb-shaped electrodes.

The shielding mode has the advantage of being less sensitive with respect to parasitic movements of the comb, for example lateral movement and / or tilting, with respect to each other.

The first measurement mode facilitates higher sensitivity.

Both measurement modes are possible. The first measurement mode is advantageous, especially in view of sensor noise, because of its greater sensitivity in the measurement direction. The second measurement mode is advantageous in terms of linearity and drift stability due to the lower sensitivity in terms of parasitic motion. The second mode also allows for larger manufacturing tolerances.

One of the two measurement modes can be implemented on demand. It is also possible to combine both measurement modes.

In a second alternative, the components of the sensor device mechanically connected to the mirror body form a shielding unit. In particular, the shielding unit has a comb-like structure. The shielding unit is arranged for the transmitter electrode and the receiver electrode of the sensor electrode structure in such a manner that shielding from both electrodes is carried out by immersing the shielding unit between the combing structures of these electrodes. In particular, such shielding is insensitive to the inclination and / or lateral movement of the shielding unit.

The comb-like structures of the transmitter and / or receiver electrodes include comb-like fingers arranged radially in relation to the pivot point of the mirror element.

Preferably, the two sensor units are each interconnected in a differential manner. These sensor units form a sensor pair in each case. Because the common error is canceled when the difference is formed, it can suppress the influence of common longitudinal movement along the comb-like fingers caused by parasitic vertical movement, for example, thermal drift of the mirror or vertical oscillation mode . Furthermore, the differential capacitance measurement is advantageous in suppressing the common disturbance effects and parasitic effects in the supply line.

According to an aspect of the present invention, the transmitter and receiver electrodes are in each case fixedly arranged, in particular fixedly relative to one another. In particular, these electrodes may be arranged on a support structure. In particular, the sensor device does not include any moving signal lines and / or power lines. The arrangement on the support structure facilitates direct acquisition of the pivot position of the mirror element, especially with respect to the support structure.

According to another aspect of the invention, the transmitter electrode forms a shielding element, particularly with respect to the actuator electrode of the displacement device. In particular, the transmitter electrode has a circumferentially closed zone. In particular, it has an embodiment completely surrounding the receiver electrode in a plane parallel to the comb-like plane. As a result, it is possible to reduce, particularly minimize, and in particular to prevent, the interaction between the sensor device and the actuator device.

In particular, the sensor device is integrated and embodied within the displacement device. In particular, the sensor device may form a component of the displacement device. Particularly, it is possible to replace a part of the actuator electrode with an electrode from the sensor unit or to use a part of the actuator electrode as the sensor electrode.

In particular, the sensor unit forms a capacitive sensor.

In particular, the sensor device forms a radial differential capacitive comb-type sensor based on the principle of shielding, in particular by embedding a shielding unit between the transmitter electrode and the receiver electrode. An advantage of such a sensor device is that it is substantially impervious to the thermal expansion of the electrode and / or the shielding unit. Moreover, the sensor device is substantially insensitive to parasitic mirror motion.

The sensor device is embodied and arranged in this manner to measure directly between the base plate and the mirror element, such that the actuator electrode forms the direct drive of the mirror element. In particular, the displacement position of the mirror element is measured directly with respect to the base plate. For example, drift that may be caused by mechanical transfer from the mirror element to the sensor electrode is reliably avoided. This leads to increased drift stability, which represents a great advantage, especially in the case of thermally loaded systems.

Another object of the present invention is to improve a device for pivoting a mirror element.

This object is achieved by a device for pivoting a mirror element with two pivoting degrees of freedom, the device comprising an electrode structure comprising an actuator electrode embodied as a comb-like electrode, all active actuator electrodes arranged in a single plane And the actuator forms a direct drive for pivoting the mirror element. Here, the actuator electrode has a range in a direction perpendicular to this plane.

Here, the direct drive unit is understood to mean a drive unit in which an actuator can directly apply a force on a mirror to be displaced. In particular, no force transfer mechanism is required. In other words, the drive does not have a force transmission mechanism.

Displacement of the mirror element can be improved via this design. Hereinafter, it should be understood that the displacement generally refers to a displacement in view of a certain degree of freedom. In particular, the displacement can also be a pivot, also referred to as a slope. In principle, the displacement may also include linear displacement and / or rotation of the mirror element in the mirror plane.

Particularly, the actuator characteristics are improved. In particular, the actuator characteristics are linearized over a large range of motion. In particular, it is possible to simplify the support of the mirror element. Furthermore, the actuator device has improved dynamic characteristics.

According to the invention, it is advantageous to precisely set the inclination angle of the mirror element over a large range of inclination if the actuator for displacing the mirror element operates over a large range of inclination angles and exhibits a linear or at least nearly linear and definite behavior in the process Was recognized.

So far, it has been assumed that the comb-like electrode is only suitable for pivoting the mirror element with respect to a single pivot axis, especially with only one pivoting degree of freedom. In order to facilitate pivoting of mirror elements with two pivoting degrees of freedom, it has been necessary to arrange a plurality of comb-like electrodes on top of each other. The actuator device has a stacked design, i. E. Serial kinematics.

This design has been recognized as requiring a complex guide mechanism.

Moreover, the disadvantage of this design is that the wiring from the stationary base plate to the actuator part needs to be pulled, i.e. there is a moving wire or feed line, and that the sensor is moving directly from the moving mirror to the base plate , But merely the fact that they measure only the degrees of freedom operated within their respective planes.

In accordance with the present invention, it has been recognized that it is possible to embody an electrode structure having an actuator electrode embodied as a comb-like electrode in this manner in which all of the active actuator electrodes are arranged in a single plane. Here, the active electrode is understood to mean a variable, in particular a controllable, especially an electrode to which an adjustable actuator voltage is applied to displace the mirror element. An electrode to which a fixed, i.e., constant, voltage is applied is also referred to as a passive electrode. In particular, the passive electrode may be grounded or held at a voltage of 0V.

The plane in which the active actuator electrodes are arranged is also referred to as an actuator plane or a comb-like plane. In particular, this plane is perpendicular to the surface normal on the center point of the reflective surface of the mirror element to be displaced to the non-pivoting state. In particular, the plane is parallel to the pivot axis defined by the arrangement of the actuator electrodes, and is pivotable about the pivot axis with the mirror element un-pivoted. The pivot axis is not necessarily predetermined by the mechanical design of the actuator device. In particular, it is possible to obtain a substantially alignable effective pivot axis as desired by combining the two pivot portions and the linearly independent pivot axis.

The pivot axis corresponds to one of the pivoting degrees of freedom in each case.

According to an aspect of the invention, the two pivot shafts are predetermined to pivot the mirror element via its mechanical support. In particular, the mirror element is mounted by a bend. In particular, the mirror element is mounted by a cardan joint. The two mechanical pivot axes are predetermined by the joint to support the mirror element. The two mechanical pivot shafts previously determined by the joint are aligned, in particular parallel to the actuator plane. The two pivot axes intersect at a central point, also referred to as the pivot point of the mirror element. In particular, the pivot point lies on the surface normal through the center point of the mirror element in the non-pivot state.

In particular, the mirror element is mounted by a centrally arranged bend.

The joints in particular have rotational symmetry, in particular double rotational symmetry.

The mechanical properties of the displacement device are improved, in particular, by supporting the mirror element using a curved portion, in particular a Cardan-type flexure. The advantage of the cascaded support is that it facilitates high stiffness and low stiffness of the actuated degrees of freedom in the non-actuated degrees of freedom, so that the actuator is well guided and large mode separation occurs between the actuated and non- do.

The two pivot shafts are defined by joints and the pivot shafts have a common intersection with the surface normal through the center of the reflective surface of each mirror element. The remaining degrees of freedom are constrained by high rigidity.

In particular, the joint may be a curved bend realized from bending and / or torsion elements. The joint is advantageously ductile at an operatively tilted degree of freedom and is particularly stiff, at least ten times, in particular at least 100 times, in particular at least 1000 times more rigid, than in the degrees of freedom operated at all other degrees of freedom of restraint.

The joint may include one or more leaf springs. Advantageously, the leaf spring is designed for the best possible thermal conductivity. In this case, it was possible to show that the embodiment of the joint as a bending joint is advantageous.

The electrode structure in particular comprises at least two, in particular at least three, in particular at least four comb-like electrodes. In particular, the electrode structure includes at least two comb-like electrodes for each degree of freedom. As a result, a range of symmetry about the zero position can be achieved for each degree of freedom.

The comb-shaped electrode further includes a plurality of electrode fingers, which are also referred to as comb-shaped fingers. The number of comb-like fingers per comb-like electrode is in particular in the range of 3 to 100, in particular in the range of 5 to 50, in particular in the range of 10 to 40, in particular in the range of 20 to 30. Preferably, each comb-like electrode comprises the same number of comb-like fingers.

Adjacent comb-shaped fingers each have a spacing in the range of 1 탆 to 10 탆, particularly in the range of 3 탆 to 7 탆, particularly about 5 탆. Here, the gap is a distance from the nearest comb-shaped finger (the comb-shaped finger is also referred to as a stator comb-shaped finger) mechanically connected to the base plate to a comb-like finger mechanically connected to the mirror body, Quot; type finger "). The required spacing is substantially predetermined by the parasitic lateral movement of the comb-like fingers. This parasitic lateral movement then depends on the tilt angle range, the comb-like overlap, and the maximum radial dimension of the comb.

The specified spacing is related to a mirror having a dimension of approximately 1 mm · 1 mm. For mirrors having alternative dimensions and / or alternate arrangements of comb-like fingers, provision is made accordingly for scaling the gaps.

In particular, the actuator device comprises two comb-like electrodes per pivoting freedom in each case. These two comb-like electrodes are preferably operated in a differential manner.

As a result of the dedicated actuator pair for each pivoting degree of freedom, it is possible to decouple the operation in terms of two degrees of freedom. This makes it possible to optimize the actuator pair and their operation for each degree of freedom.

According to an aspect of the invention, the actuator device has parallel kinematics. This is therefore different from an actuator device having a serial kinematic concept in which individual actuator structures are provided for each pivoting degree of freedom, and the individual actuator structures are arranged on top of each other or continuously. In the case of an actuator device comprising parallel kinematics, the actuator electrodes for both pivoting degrees of freedom have mutually equivalent embodiments. In particular, these actuator electrodes are equivalently arranged relative to each other and to the base plate with respect to the mirror element to be pivoted.

In contrast to the serial kinematics in which the shafts provided for displacement of the elements in a plurality of degrees of freedom are arranged continuously, i. E. In series, and each shaft is driven independently by itself and selectively controlled via sensors and controllers, All operating degrees of freedom are directly driven by the actuator in the parallel kinematics according to the invention, which connects the driving element, i. E. The mirror element, directly to the reference plane, i. Thus, the actuators are arranged in parallel within the meaning of the operating path.

The same applies to sensors. In the parallel kinematics according to the invention, each sensor measures directly from the displaceable mirror element directly to the reference plane, whereas only the first axis is directly related to the reference plane in the case of the series kinematics and all the other axes extend along it.

All non-driving degrees of freedom of the mirror element are interrupted by a guide and / or joint.

The actuator electrodes do not induce a collision between the comb teeth of the actuator electrodes in this case, and these electrodes are arranged in such a way that they allow the inclination of the mirror elements with two degrees of freedom of tilt. Embodiments and arrangements of actuator electrodes according to the present invention make it possible to obtain predominantly linear actuator behavior over a wide operating range. Up to now, the tilting mirror drive for two degrees of freedom of the tilt operating with comb-like electrodes has been realized by means of series kinematics and / or by a speed-change mechanism. Generally, it has been recognized that it is very complicated to manufacture such a mechanism. Moreover, these mechanisms are associated with a number of design compromises. These disadvantages are avoided by the embodiment and arrangement of the actuator electrodes according to the invention.

The device for pivoting a mirror element according to the invention comprises in particular a comb-like electrode-based electrostatic direct drive of a mirror element at two degrees of freedom. The parasitic resonance can be avoided by the direct drive. It is possible to obtain the ideal coupling stiffness from the actuator to the base plate and to the mirror.

The same applies to sensor devices.

An advantage arising from this is that the natural frequency spectrum of the mirror element seen by the controller is only determined by the support of the mirror element, not by the mechanical coupling of the actuator and the sensor to the mirror element. From the point of view of control theory, this facilitates convenient actuator sensor colocation where the poles of the resonance are separated by zero and the phase is not rotated more than 180 degrees.

Preferably, all of the actuator electrodes have the same embodiment except for their arrangement for the mirror element.

According to another aspect of the present invention, the electrode structure has radial symmetry. In particular, it has at least three, in particular at least four, radial symmetries. The radial symmetry of the electrode structure may in particular be of the order of n, where n precisely defines the number of comb-like fingers of all active actuator electrodes.

In particular, from the standpoint of group theory, the symmetry of the arrangement can be explained by the D4 group. As long as the electrode structure has a circular outer contour, the arrangement of comb-like fingers may also be described by a Dn group, where n designates the number of comb-like fingers.

In particular, the comb-like fingers are respectively arranged in the radial direction with respect to the effective pivot point of the mirror element, or in the radial direction with respect to the surface normal of the mirror element in the non-pivotal state. Therefore, the electrode structure is also referred to as a radial comb structure. In principle, the advantages according to the invention can also be obtained by an alternative arrangement of comb-like fingers, for example a tangential arrangement of comb-like fingers.

The individual comb-shaped electrodes are each arranged in a circular ring segmented area. The symmetry properties of the electrodes facilitate the symmetry of the joints, particularly the asymmetric mirror geometry and symmetry, in particular the asymmetric embodiment. As a result, it is possible to obtain the same or at least a similar mode spectrum in two oblique directions. In particular, it is possible to embody the mirror element in such a manner that the moment of inertia and spring constant are symmetrical with respect to two oblique directions. Then, the eigenmodes may have the same symmetric property. The symmetry characteristics of the electrodes thus facilitate a mechanically particularly advantageous embodiment of the mirror element, especially in view of the spectra of the eigenmodes.

According to another aspect of the present invention, all active components of all active actuator electrodes, particularly actuator devices, are arranged in a fixed manner on the support structure. The support structure may in particular be a base plate.

In addition to the active actuator electrode, the active component may also additionally include a sensor electrode for capturing the pivot position of the mirror element. Generally, these sensor electrodes may form components of a displacement device.

According to another aspect of the present invention, the electrode structure of the displacement device includes a sensor electrode. In particular, the sensor electrode is arranged in the same plane as the active actuator electrode. In particular, these sensor electrodes are arranged on the substrate structure in a fixed manner.

Preferably, the sensor electrode has substantially the same embodiment as the actuator electrode. Preferably, these sensor electrodes are arranged on the support structure in substantially the same manner as the actuator electrodes.

In particular, the sensor electrode is embodied as a comb-shaped electrode. In particular, the comb may have a radial arrangement.

The sensor electrode may be integrated into the electrode structure with the actuator electrode as part of the displacement device.

According to an aspect of the present invention, provision is made to simultaneously use at least a subset of actuator electrodes as sensor electrodes. It is also possible to use all of the active actuator electrodes as sensor electrodes. To this end, provision may be made for reading the tilt angle dependent actuator capacities at frequencies considerably higher than the operating frequency, in particular at least 10 times higher.

In particular, the sensor electrode can be manufactured by the same process steps as the actuator electrode. In particular, it is possible to manufacture sensor electrodes and actuator electrodes in a single method step. The manufacturing of the displacement device is thus simplified as a result.

A fixed arrangement of active actuator electrodes, in particular all active components, makes it possible to avoid moving lines, in particular actuator devices with moving signal and / or power lines. As a result, the mechanical characteristics of the actuator device are further improved. Moreover, the reliability of the actuator device is improved. Finally, it also simplifies the manufacture of an actuator device, in particular an optical component comprising such an actuator device.

According to another aspect of the present invention, the components of the actuator device are designed for manufacturing methods that use only MEMS method steps. In particular, the individual components of the actuator device, in particular the comb-like fingers of the actuator electrode, comprise only a horizontal layer and a vertical structure. In particular, the actuators are fully manufacturable by the MEMS method steps. This simplifies the manufacturing process.

Another object of the invention consists in improving an optical component comprising at least one micromirror with two pivoting degrees of freedom.

This object is achieved by an optical component comprising a micromirror and an actuator device according to the above description. The advantages are evident from those of the actuator device.

According to the present invention, at least one micromirror is mounted by a joint with at least two degrees of freedom of inclination. Joints are particularly bent parts, especially bending joints. In particular, the joint may be a cardan joint. With reference to the further details of the joints, reference is made to the above description.

According to an aspect of the invention, the micromirror has a center of gravity whose position coincides with that of the effective turning point defined by the joint for all intents and purposes.

This improves the mechanical properties of the optical component. In particular, this allows the parasitic displacement of the micromirror to be reduced, in particular prevented. Here, the micromirror is understood to mean the entirety of its displaceably mounted components, in particular the mirror body and other components of the optical component directly mechanically connected thereto. Other components may include a counterweight that is embodied and / or arranged in a suitable manner for adjusting the position of the center of gravity, especially for all intents and purposes. The center of gravity is the mechanical center of gravity of the micromirror. By adjusting the center of gravity of the displaceable mechanical system in such a way as to coincide with the effective turning point of the system, it is possible to improve the stability of positioning of the micromirror. What is achievable is that the lateral acceleration, which may be generated, for example, by mechanical vibrations, is not converted into a torque acting on the mirror due to the center of mass being offset relative to the effective turning point.

The effective pivot point defined by the joint is the intersection of the two pivot axes defined by the joint.

Another object of the present invention is to improve the mirror array.

This object is achieved by a mirror array having a plurality of optical components according to the above description. The advantages are evident from those of the optical components.

Another object of the present invention is to improve an illumination optical unit for a transparent exposure apparatus, an illumination system for a projection exposure apparatus, and a projection exposure apparatus.

These objects are achieved by an illumination optical unit, an illumination system and a projection exposure apparatus comprising at least one mirror array according to the above description. The advantages are clear from those of the mirror array.

The advantage arises particularly when the radiation source is an EUV radiation source, i.e. a radiation source emitting illumination radiation in the EUV wavelength range of 5 nm to 30 nm.

It is another object of the present invention to provide a method for manufacturing microstructured or nanostructured components, and a correspondingly improved component.

These objects are achieved by the provision of a projection exposure apparatus comprising at least one mirror array according to the above description. The advantages are clear from the foregoing again.

Further advantages, details and details of the present invention are apparent from the description of exemplary embodiments with reference to the drawings. In the drawings,
Fig. 1 shows a schematic representation of a projection exposure apparatus and its constituent parts.
Figure 2 shows a schematic representation of an optical component with an actuator device and a sensor device.
Fig. 3 shows an alternative representation of the optical component according to Fig. 2, in which the counter electrode or the mirror body on which the shielding element is arranged is folded sideways.
Figure 4 schematically shows a top view of section IV of Figure 3 with a schematic representation of the electrical interconnections of the parts of the sensor device.
Fig. 5 shows a view according to Fig. 4, in which the comb-like fingers connected to the mirror body are not shown.
Figures 6-8 illustrate a schematic representation of a section of a sensor device to illustrate the sensitivity (Figure 6) and insensitivity (Figures 7 and 8) of the sensor device.
Fig. 9 shows a variant of a joint for supporting an individual mirror, which is realized by a torsion spring.
Figure 10 shows a variant of a joint for supporting an individual mirror, which is realized by a torsion spring.
Figure 11 shows a schematic cross-sectional view of the optical component according to Figure 2 for clarifying other aspects of the actuator device and the sensor device.
Figure 12 shows a schematic representation of another variant of an optical component, including a counterweight for placing the center of gravity of the moving mirror into the rotational point of the joint.

First, a general configuration of the projection exposure apparatus 1 and its constituent units will be described. Reference is made to WO 2010/049076 A2, which is hereby incorporated by reference in its entirety as a part of this application. The description of the general structure of the projection exposure apparatus 1 should be understood as illustrative only. Which serve to illustrate possible uses of the subject matter of the present invention. The subject matter of the present invention may also be used in alternative optical systems, in particular alternative variations of projection exposure apparatus.

Figure 1 schematically shows a microlithographic projection exposure apparatus 1 in a meridional section. The illumination system 2 of the projection exposure apparatus 1 has an illumination optical unit 4 for exposure of the objective field 5 in the object plane 6, in addition to the radiation source 3. The object field 5 may be shaped in a rectangular or arcuate manner, for example, with an x / y aspect ratio of 13/1. In this case, a reflective reticle (not shown in FIG. 1) arranged in the object field 5 is exposed and the reticle is projected by a projection exposure apparatus 1 for a microstructured or nano structured semiconductor component It contains the structure to be. The projection optical unit 7 functions to image the object field 5 in the image field 8 in the image plane 9. [ The structure on the reticle is imaged onto the photosensitive layer of the wafer which is not shown in the figure but arranged in the region of the image field 8 in the image plane 9. [

The reticle held by the reticle holder (not shown), and the wafer held by the wafer holder (not shown) are synchronously scanned in the y direction during the operation of the projection exposure apparatus 1. [ According to the imaging scale of the projection optical unit 7, it is also possible to cause the reticle to be scanned in the opposite direction with respect to the wafer.

The radiation source (3) is an EUV radiation source having emitted radiation in the range of 5 nm to 30 nm. This may be a plasma source, for example a GDPP (Gas Discharge Produced Plasma) source or a LPP (Laser Produced Plasma) source. Other EUV radiation sources are also possible, such as those based on, for example, synchrotron or free electron lasers (FEL).

The EUV radiation 10 emanating from the radiation source 3 is focused by the collector 11. Corresponding collectors are known, for example, from EP 1 225 481 A2. On the downstream side of the collector 11 the EUV radiation 10 propagates through the intermediate focal plane 12 before it is incident on the field facet mirror 13. The field 13 is arranged in the plane of the illumination optical unit 4 which is optically conjugate with respect to the object plane 6. [ The mirror 13 may be arranged at a predetermined distance from the plane conjugate to the object plane 6. In this case, this is generally referred to as a first parasitic mirror.

The EUV radiation 10 is also referred to as the radiation, illumination radiation or imaging light used hereinafter.

On the downstream side of the mirror 13, the EUV radiation 10 is reflected by the pupil facet mirror 14. The pupil facet mirror 14 lies within or about the entrance pupil plane of the projection optical unit 7 within the optically conjugate plane. The pupil facet mirror may also be arranged at a predetermined distance from such a plane.

Field triangulation mirror 13 and pupil facet mirror 14 are constructed from a number of individual mirrors, which will be described in greater detail below. In this case, the refinement of the field 13 into the individual mirrors can be such that each field facet illuminating the entire object field 5 itself is represented by exactly one of the individual mirrors. Alternatively, it is possible to construct at least some or all of the field facets using a plurality of such individual mirrors. The same applies correspondingly to the configuration of the pupil facets of the pupil facet mirror 14, which pupil facets are each assigned to a field facet plane, and in each case by a single individual mirror or a plurality of such individual mirrors As shown in FIG.

The EUV radiation 10 impinges on the mirrors 13 and 14 at both incident angles at a prescribed angle of incidence. In particular, the two parasitic mirrors collide with the EUV radiation 10 within a range associated with the collecting incident operation, i.e. with an angle of incidence of 25 ° or less with respect to the mirror normal. Collisions with grazing incidence are also possible. The pupil facet mirror 14 is arranged in the plane of the illumination optical unit 4 which constitutes the pupil plane of the projection optical unit 7 or which is optically conjugate with respect to the pupil plane of the projection optical unit 7. [ By the aid of the imaging optics assembly in the form of a transmission optical unit 15 having a pupil facet mirror 14 and mirrors 16, 17, 18 designated in the order of beam paths for EUV radiation 10, The field facets of the mirror 13 are imaged in the object field 5 in a manner overlapping each other. The final mirror 18 of the transmission optical unit 15 is a mirror for a sag angle incidence ("sag angle incidence mirror"). The transfer optical unit 15 is also referred to as a sequential optical unit for transferring the EUV radiation 10 from the field facet mirror 13 to the objective field 5 together with the pupil facet mirror 14. The illumination light 10 is guided from the radiation source 3 through the plurality of illumination channels toward the object field 5. [ Each of these illumination channels is assigned to a field facet of the field facet mirror 13 and a pupil facet face of the pupil facet mirror 14 and the pupil facet face is disposed downstream of the field facet. The field mirrors 13 and the individual mirrors of the pupil facet mirror 14 may be tiltable by the actuator system so that changes in the allocation of the pupil facets to the field facets and the altered configuration of the corresponding illumination channels . This results in a different illumination setting in which the distribution of illumination angles of the illumination light 10 on the object field 5 is different.

In order to facilitate the description of the positional relationship, in particular the global Cartesian xyz-coordinate system is used below. The x-axis extends perpendicularly to the plane of the drawing towards the observer of Fig. The y-axis extends toward the right side of Fig. The z-axis extends upward in Fig.

Different illumination systems can be achieved by corresponding changes in the allocation of the individual mirrors of the field parasitic mirror 13 to the individual mirrors of the field parasitic mirror 13 and of the individual mirror of the pupil facet mirror 14 have. According to the tilting of the individual mirrors of the mirror 13, the individual mirrors of the pupil facet mirror 14, which are newly allocated to the individual mirrors, enter the field field 5 of the field parasitic mirror 13 into the object field 5, It is tracked by a slope so that imaging of the three sides is re-assured.

Other aspects of the illumination optical unit 4 will be described below.

One field facet mirror 13 in the form of a multi- or micro-mirror array (MMA) forms an example of an optical assembly for guiding the radiation 10, i.e. the EUV radiation beam used. When the field is mirrored, the mirror 13 is formed as a micro electro mechanical system (MEMS). It has a plurality of individual mirrors 20 arranged in a matrix fashion with rows and columns in mirror array 19. [ The mirror array 19 is embodied in a modular manner. These mirror arrays may be arranged on a support structure embodied as a base plate. Here, it is possible to arrange an essentially arbitrary number of mirror arrays 19 next to each other. Therefore, the entire reflecting surface formed by all of the mirror arrays 19, particularly the individual mirrors 20 thereof, is expandable as desired. In particular, the mirror arrays are embodied in such a way that they facilitate substantially planar, gap-free tessellation. The ratio of the sum of the reflecting surfaces 26 of the individual mirrors 20 to the entire area covered by the mirror array 19 is also referred to as the integrated density. In particular, this integration density is at least 0.5, in particular at least 0.6, in particular at least 0.7, in particular at least 0.8, in particular at least 0.9.

The mirror array 19 is fixed on the base plate by a stationary element 29. For details, see, for example, WO 2012/130768 A2.

The individual mirrors 20 are designed to be tiltable by an actuator system, as described below. As a whole, the field parasitic mirror 13 has approximately 100,000 individual mirrors 20. The mirror 13 may also have a different number of individual mirrors 20 depending on the size of the individual mirrors 20. [ In particular, the number of individual mirrors 20 of the mirror 13 is at least 1000, in particular at least 5000, in particular at least 10,000. It can be up to 100,000, in particular up to 300,000, in particular up to 500,000, in particular up to 1,000,000.

The special filter can be arranged on the upstream side of the mirror 13 in the field facet and separates the used radiation 10 from other wavelength components of the radiation source 3's unavailable for projection exposure. Special filters are not represented.

The field 13 is collided by the used radiation 10 having a power of, for example, 840 W and a power density of 6.5 kW / m ² .

The entire individual mirror array of the mirror 13 has a diameter of, for example, 500 mm, and is designed in such a manner that it is closely packed with the individual mirrors 20. As long as the field facets are realized by exactly one individual mirror in each case, the individual mirrors 20 represent the shape of the object field 5, in addition to the scaling factor. The facet mirror 13 may be formed from 500 individual mirrors 20, each representing a field facet and having dimensions of approximately 5 mm in the y-direction and 100 mm in the x-direction. As an alternative to the realization of each field facet by exactly one individual mirror 20, each field facet can be approximated by a group of smaller individual mirrors 20. A field facet having a dimension of 5 mm in the y-direction and 100 mm in the x-direction may be, for example, a 1 x 20 array of individual mirrors 20 having a dimension of 5 mm x 5 mm, Gt; 200 < / RTI > array of individual mirrors 20 having a dimension of < RTI ID = 0.0 >

The inclination angle of the individual mirror 20 is adjusted to change the illumination setting. In particular, the tilt angle has a displacement range of ± 50 mrad, in particular ± 100 mrad. An accuracy better than 0.2 mrad, especially better than 0.1 mrad, is achieved when setting the tilt position of the individual mirror 20.

The field mirrors 13 and the individual mirrors 20 of the pupil facet mirrors 14 in the embodiment of the illumination optical unit 4 according to Figure 1 optimize their reflectivity at the wavelength of the radiation 10 used Lt; / RTI > coating. The temperature of the multilayer coating should not exceed 425 K during the operation of the projection exposure apparatus (1). This is accomplished by a suitable structure of the individual mirrors 20. For further details, reference is made to DE 10 2013 206 529 A1, which is hereby incorporated by reference in its entirety.

The individual mirrors 20 of the illumination optical unit 4 are accommodated in the vacuum evacuable chamber 21 whose boundary wall 22 is indicated in Figures 2 and 6. The chamber 21 communicates with the vacuum pump 25 via the fluid line 23 in which the shut-off valve 24 is housed. Operating pressure in the vacuum exhaust chamber can 21 is the number Pascal, especially 3 Pa to 5 Pa (partial pressure of H _2). All other partial pressures are considerably lower than 1 x 10 ^-7 mbar.

With the vacuum evacuable chamber 21, a mirror with a plurality of individual mirrors 20 forms an optical assembly for guiding bundles of EUV radiation 10.

Each individual mirror 20 may have a reflecting surface 26 having dimensions of 0.1 mm x 0.1 mm, 0.5 mm x 0.5 mm, 0.6 mm x 0.6 mm, or at most 5 mm x 5 mm or more. The reflective surface 26 may also have a smaller dimension. In particular, the reflective surface has a side length in the micrometer range or a small mm range. The individual mirrors 20 are thus also referred to as micromirrors. The reflecting surface 26 is a part of the mirror main body 27 of the individual mirror 20. The mirror body 27 has a multilayer coating.

With the aid of the projection exposure apparatus 1, at least one portion of the reticle is exposed to the light of the photosensitive layer on the wafer for the lithographic production of micro- or nano-structured components, in particular semiconductor components, Section. Depending on the embodiment of the projection exposure apparatus 1 as a scanner or as a stepper, the reticle and wafer are moved in a sequential y-direction in a synchronized manner or stepwise in a stepper operation in a scanning operation.

Additional details and aspects of the mirror array 19, and in particular the optical components including the individual mirrors 20, are described below.

First, a first variant of the optical component 30 comprising the individual mirrors 20 and, in particular, the displacement device 31 for displacing the individual mirrors 20, in particular for pivoting, is shown in Figures 2 to 5 .

The representation according to Fig. 3 corresponds to that according to Fig. 2, and the mirror main body 27 of the individual mirror 20 is folded away from the side of Fig. As a result, the structure of the displacement device 31 and the sensor device is better visualized.

4 shows a cross-sectional view of a section parallel to the actuator plane 40 of the section IV of the optical component 30 according to Fig.

The optical component comprises an individual mirror 20 which is embodied as a micro mirror. The individual mirror 20 includes the above-described mirror main body 27 in which a reflecting surface 26 is formed on the front side thereof. In particular, the reflecting surface 26 is formed by a multilayer structure. In particular, this reflecting surface has a radiation reflection characteristic for the illumination radiation 10, in particular for EUV radiation.

According to a variant represented in the figure, the reflective surface 26 has a square embodiment, but is represented in a partial cut-away fashion to further illustrate the actuator system. The reflecting surface generally has a rectangular embodiment. The reflective surface may also have triangular or hexagonal embodiments. In particular, the reflective surface has this tile-like embodiment capable of plane-free clearance tessellation via the individual mirrors 20. The individual mirrors 20 are also mounted by a joint 32 which will be described in more detail below. In particular, the individual mirrors are mounted in this manner with two tilt degrees of freedom. In particular, the joint 32 facilitates the inclination of the individual mirrors 20 around the two tilt axes 33, 34. The inclined shafts 33, 34 are perpendicular to each other. These inclined axes intersect at a central intersection point called the effective pivot point 35. [

As long as the individual mirror 20 is in the non-pivoted neutral position, the effective pivot point 35 lies on the surface normal 36 extending through the center point, especially the geometric center of gravity of the reflective surface 26.

Unless otherwise specified, it is always understood that the direction of the surface normal 36 in the following text means the same direction at the non-oblique neutral position of the individual mirror 20.

First, the displacement device 31 is described in more detail below.

The displacement device 31 includes an electrode structure including an actuator transducer stator electrode 37 _i and an actuator transducer mirror electrode 42. According to a variant shown in Figures 2 to 5, the electrode structure includes four actuator transducer stator electrodes 37 ₁ , 37 ₂ , 37 ₃ , 37 ₄ . In general, the number of actuator transducer stator electrodes 37 _i is at least two. This may be three, four or more.

All of the actuator transducer electrodes 37 _i , 42 are embodied as comb-like electrodes comprising a plurality of comb-shaped fingers 38. The respective complementary comb-shaped fingers of the mirror and the stator engage each other in this case. In each case, the comb teeth of the individual actuator electrodes 37 _i include 30 actuator transducer stator comb teeth 38, also referred to hereinafter as stator comb teeth or simply comb tooth fingers. Each different number is equally possible. The number of interdigitated fingers 38 of the actuator transducer stator electrodes 37 _i is in particular at least 2, in particular at least 3, in particular at least 5, in particular at least 10. It can be up to 50, in particular up to 100. The comb tooth of the actuator transducer mirror electrode 42 thus includes an actuator transducer mirror comb finger 43, also referred to hereinafter as a mirror comb finger or merely a comb finger. The number of mirror comb teeth-like fingers 43 corresponds to the number of stator comb teeth fingers. It may also deviate by one from the number of stator comb teeth in each case.

The comb-shaped fingers 38 are arranged in such a way that they extend radially in relation to the surface normal 36 or the effective pivot point 35. According to a variant not shown in the figures, the comb fingers 38, 43 may also be arranged tangentially to a circle around the effective pivot point 35. These comb-like fingers may also have embodiments corresponding to the section of the concentric cylinder side surface around the surface normal 36.

All of the actuator transducer stator electrodes 37 _i are arranged on a support structure in the form of a substrate 39. In particular, these stator electrodes are arranged on the substrate 39 in a fixed manner. In particular, these stator electrodes are arranged in a single plane formed by the front side of the substrate 39. This plane is also referred to as an actuator plane 40 or a comb-like plane.

In particular, the wafer functions as the substrate 39. The substrate 39 is also referred to as a base plate.

The actuator transducer stator electrodes 37 _i are each arranged in a zone on the substrate 39, which firstly has a square outer contour and secondly has a circular inner contour. Alternatively, the actuator transducer stator electrodes 37 _i may also be arranged in a circular ring-shaped zone on the substrate 39. Here, the outer contour also has a circular embodiment. In particular, the individual actuator transducer stator electrode (37 _i) are respectively arranged in a circular ring segment-shaped section. The entire electrode structure, i. E., All actuator transducer stator electrodes 37 _i , are arranged in a region having contours corresponding to those of the individual mirrors 20 for all intents and purposes. It may also be arranged in slightly smaller areas, especially in areas as small as approximately 5% to 25%.

The electrode structure has radial symmetry. In particular, it has quadruple radial symmetry. The electrode structure may also have different radial symmetries. In particular, it may have triple radial symmetry. In particular, it gatneunde the radial symmetry of k, where k designates the number of actuators transducer stator electrode (37 _i). In addition to the different actuators transducer stator electrode (37 _i) sections of the electrode structure of the electrode structure is gatneunde the radial symmetry of n, where n is all of the actuator the transducer stator electrode (37 _i) comb-like finger 38 of the Corresponds to the total number exactly.

In addition to these different arrangements, the individual actuator transducer stator electrode (37 _i) on the substrate 39 has the same embodiment. This is not absolutely essential. These stator electrodes may also have different embodiments. In particular, these stator electrodes may be embodied according to the mechanical properties of the joint 32.

The comb-like fingers 38 are arranged in the radial direction with respect to the effective pivot point 35 or with respect to the alignment of the surface normal 36 in the non-pivoted neutral state of the individual mirrors 20.

In the case of the individual mirror 20 whose mirror body 27 has a dimension of 1 mm · 1 mm, the comb-shaped fingers 38 have a thickness d of maximum 5 μm at their outer end in the radial direction. Generally, the maximum thickness d of the comb-like fingers 38 at its outer end in the radial direction is in the range of 1 占 퐉 to 20 占 퐉, particularly 3 占 퐉 to 10 占 퐉.

The comb fingers 38 have a height h in the range of 10 m to 100 m, in particular in the range of 20 m to 50 m, i.e. in the direction of the surface normal 36. Other values can be considered as well. The height h is constant in the radial direction. The height may also decrease in the radial direction. This can facilitate a larger inclination angle without inducing the comb-like fingers of the actuator mirror electrode 42 to collide on the base plate.

The adjacent comb fingers 38 and 43 of the actuator electrode 37 _{i on} the one hand and the actuator mirror electrode 42 on the other hand are arranged in a non-pivoting state of the individual mirror 20 in the range of 1 m to 10 m , In particular in the range of 3 [mu] m to 7 [mu] m, in particular about 5 [mu] m. These values can be scaled appropriately for the individual mirrors 20 with smaller or larger dimensions.

This minimum spacing m is the minimum distance between the adjacent mirror comb finger and stator comb finger, measured in the neutral non-pivot state of the individual mirror 20. The comb-like fingers may approach each other when the individual mirrors 20 are inclined. The minimum spacing m is selected in this manner, even in the case of the maximum slope of the individual mirrors 20, that there is no collision between the adjacent mirror comb finger and the stator comb finger. Here, manufacturing tolerances are also considered. Such a manufacturing tolerance is several micrometers, in particular up to 3 micrometers, in particular up to 2 micrometers, in particular up to 1 micrometer.

The maximum possible approach of the adjacent comb-shaped fingers 38, 43 can be readily determined from its geometrical details and arrangement, and the maximum possible slope of the individual mirrors 20. [ In this embodiment, the maximum approach of the adjacent comb fingers 38, 43 is approximately 2 [mu] m in the case of the slope of the individual mirrors 20 by 100 mrad. In particular, the maximum approach is less than 10 μm, in particular less than 7 μm, in particular less than 5 μm, in particular less than 3 μm.

The actuator stator electrode transducer (37 _i) are each interacting with the actuator mirror electrode 42. The actuator mirror electrode 42 is connected to the mirror main body 27. In particular, the actuator mirror electrode 42 is connected in a mechanically fixed manner to the mirror body 27. Actuator mirror transducer electrode (42) forms a counter electrode to the actuator the transducer stator electrode (37 _i). Therefore, these electrodes are also simply referred to as counter electrodes.

The actuator mirror electrode 42 forms a passive electrode structure. It should be understood that this means that the actuator mirror electrode 42 has a fixed constant voltage applied thereto.

Actuator mirror electrode 42 has a complementary embodiment of the actuator the transducer stator electrode (37 _i). In particular, this electrode forms a ring with an actuator transducer mirror comb fingers 43, hereinafter also referred to as mirror comb fingers or merely comb fingers 43, for the sake of simplicity. Mirror comb-fingers (43) in terms of their geometry, the actuator mirror electrode 42 substantially corresponding to the stator comb-fingers 38 of the actuator stator electrode transducer (37 _i).

All of the comb-like fingers 38, 43 may have the same dimensions, that is, the same dimension in the direction of the surface normal 36. This simplifies the manufacturing process.

In the direction of the surface normal 36 the mirror comb finger 43 of the actuator mirror electrode 42 may also have a different height than that of the stator comb finger 38 of the active actuator transducer stator electrode 37i .

The comb-like fingers 38, 43 may have a decreasing height h in the radial direction. It is also possible to specify the comb-like fingers 38, 43 in the area of the corner of the optical component 30 to be shorter than the remaining comb-shaped fingers 38, 43. This can facilitate a greater inclination angle of the individual mirror 20.

In particular, the actuator mirror electrode 42, between two of the in each case the comb-fingers 38 of one of the comb-like fingers 43 of the actuator mirror electrode 42, the actuator transducer stator electrode (37 _i) As shown in Fig.

The actuator mirror electrode 42 is connected to the mirror body 27 in an electrically conductive manner. Thus, these comb-like fingers 43 are equipotential. The mirror body 27 has a low resistance connection to the base plate via an electrically conductive joint spring. In principle, the mirror substrate 27, the actuator mirror electrode 42 and the sensor mirror electrode 45 are electrically connected to each other via an individual supply line via the bent portion 32, It is also possible to place them at different potentials or to decouple them in terms of failure and / or crosstalk. The base plate may be grounded, but this is not necessary. Alternatively, the mirror is connected to the voltage source at a different potential via the conductive joint spring, but can be electrically isolated from the mirror plate. As a result, it is possible to apply a fixed or variable bias voltage to the mirror.

The actuator voltage U _A may be applied to the actuator transducer stator electrodes 37 _i to pivot the individual mirrors 20. Therefore, the actuator transducer stator electrode (37 _i) is also an active actuator transducer referred to as a stator electrode (37 _i). A voltage source not shown in the figure is provided to apply the actuator voltage U _A to the actuator transducer stator electrode 37 _i . The actuator voltage U _A is up to 200 volts, in particular up to 100 volts. By appropriately applying the actuator voltage U _A to the selection of the actuator transducer stator electrodes 37 _{i the} individual mirror 20 can be tilted up to 50 mrad, in particular up to 100 mrad, in particular up to 150 mrad, have. Alternatively, the actuator may also be operated by a charge source (current source).

The different actuator voltages U _Ai may be applied to the various actuator transducer stator electrodes 37 _i to pivot the individual mirrors 20. A control device not shown in the figure is provided for controlling the actuator voltage U _Ai .

To tilt one of the individual mirrors 20, an actuator voltage U _A is applied to one of the actuator transducer stator electrodes 37 _i . At the same time, the actuator voltage (U _A2 ≠ U _A1 ) deviating therefrom is applied to the actuator transducer stator electrode 37 _j , which is placed against it in relation to the surface normal 36. Here, U _A2 may be 0 volts. In particular, it is possible to apply the actuator voltage U _A1 to only one of the actuator transducer stator electrodes 37 _i , while all other actuator transducer stator electrodes 37 _j are maintained at a voltage of zero volts.

When the individual mirror 20 is tilted, in particular in the region of this actuator transducer stator electrode 37 _i , to which the actuator voltage U _A is applied, the comb finger of the actuator mirror electrode 47, And is embedded deeper between the comb-like fingers 38 of the transducer stator electrodes 37 _i . On the opposite side of the tilt axis 33, the actuator mirror electrode 42 is embedded less deeply into the actuator transducer stator electrode 37 _j . The actuator mirror electrode 42 may even come out of the actuator transducer stator electrode 37 _j , even at least in the area.

The embedding depth of the actuator mirror electrode 42 between the comb-shaped overlapping portions, that is, the actuator transducer stator electrodes 37 _i , is 30 μm at the neutral position of the individual mirror 20 in the case of mirror dimensions of approximately 0.5 mm × 0.5 mm to be.

Between the comb finger 38 of the actuator transducer stator electrode 37 _i of 1.1 μm and the comb finger 43 of the actuator mirror electrode 42 in the case of the inclination of the mirror 20 by 100 mrad in the neutral position Lt; RTI ID = 0.0 > of < / RTI > Thus, the comb-like finger 38 of the interdigital fingers 43 and the actuator transducer stator electrode (37 _i) of the actuator mirror electrode 42 are separated from each other in every pivot position of mirror 20, in particular without contact have. In particular, the embedding depth, i. E. The comb-like overlap, is selected in this manner, which ensures this.

According to an alternative example, the comb-like fingers 38, 43 are slightly shorter in the outer zone and thus have a relatively small overlap, i. By way of example, the depth of embedding in the outermost zone may be as deep as approximately half the depth of embedding in the inner zone. These specifications also relate to the neutral position of the mirror 20.

It is also possible to influence the characteristics of the operation, in particular the linearity, via the dependency of the buried depth of the comb-like fingers 38, 43 at its radial position. Since all of the actuator stator electrode transducer (37 _i) are to be arranged in a single plane, that plane actuator 40, it is possible to omit the complicated series kinematics. The displacement device 31 is distinguished by parallel kinematics. In particular, the displacement device 31 does not have any moveably arranged active components. All of the actuator transducer stator electrodes 37 _{i to} which the actuator voltage U _A is applied are arranged in a non-movable fixed manner on the substrate 39. A sensor device is provided for capturing the pivot position of the individual mirrors (20). The sensor device may form a component of the displacement device 31.

The sensor device comprises a sensor transducer mirror electrode 45 and the sensor stator transducer electrode (44 _i).

The sensor unit includes four sensor transducer stator electrodes 44 ₁ to 44 ₄ . The simplicity purposes, sensor transducer stator electrode (44 _i) is also simply referred to as a sensor electrode. For operation, it is advantageous if the number of sensor transducer stator electrodes 44 _i corresponds exactly to the number of actuator transducer stator electrodes 37 _i . However, the number of sensor transducers stator electrode (44 _i) may also deviate from the number of stator electrodes actuator transducer (37 _i).

The sensor transducer stator electrodes 44 ₁ to 44 ₄ are each arranged along the diagonal line of the substrate 39 in the variant according to Figs. 2 to 5, the sensor transducer stator electrodes 44 ₁ to 44 ₄ are arranged offset by 45 ° with respect to the inclined axes 33 and 34 of the joint 32.

The actuator stator electrode transducer (37 _i) are each arranged in a quadrant (54 ₁ to 54 ₄₎ on the substrate (39). Sensor transducers stator electrode (44 _i) are respectively arranged in the same quadrant (54 ₁ to 54 ₄₎ as a respective one of the transducer actuator stator electrode (37 _i). Arrangement and embodiment of the actuator device 31, in particular the actuator transducer stator electrode (37 _i) has a reflecting surface 26 that is substantially the same as the symmetry property of the individual mirrors (20). The sensor device, in particular the sensor transducer stator electrode 44 _i , has substantially the same symmetrical property as the reflecting surface 26 of the individual mirror 20.

Each of the two sensor transducer stator electrodes 44 _i opposed to each other with respect to the effective pivot point 35 are interconnected in a different manner. However, such interconnection is not essential. In general, it is advantageous if the two sensor electrodes 44 _i placed opposite each other with respect to the effective pivot point 35 are embodied and arranged in this manner so that they can be read out in different ways.

The sensor transducer stator electrode 44 _i is embodied as a comb-like electrode. In particular, there sensor transducer stator electrode (44 _i) can be embodied in a manner corresponding to the stator electrodes actuator transducer (37 _i), shall refer to that described herein. A sensor transducer stator electrode (44 _i) also comprises a sensor transducer stator transmitter electrode 47, and the sensor also to be abbreviated as a receiver electrode below the transducer stator receiver electrode 48 is abbreviated as transmitter electrode below each . Both the sensor transducer stator transmitter electrode 47 and the sensor transducer stator receiver electrode 48 have a comb-like structure. In particular, these electrodes comprise a plurality of comb-like fingers. In particular, the comb-shaped fingers of the sensor transducer stator transmitter electrode 47 are alternately arranged with the comb-shaped fingers of the sensor transducer stator receiver electrode 48.

The sensor device comprises a sensor transducer mirror electrode 45 for each of the sensor transducer stator electrode (44 _i). According to an advantageous embodiment, the sensor transducer mirror electrode 45 is formed a shield unit of the sensor transducer stator electrode (44 _i), respectively. The sensor transducer mirror electrode 45 comprises a comb-like element having a plurality of comb-like fingers 46 in each case. Sensor transducer mirror electrode 45 is embodied in accordance with the counter electrode is fitted to the sensor transducer stator electrode (44 _i). In particular, the sensor transducer mirror electrode 45 may be embodied in a manner corresponding to the actuator transducer mirror electrode 42, the description of which is incorporated herein by reference.

The sensor transducer mirror electrodes 45 are each fixedly connected to the mirror body 27. These electrodes are arranged in the region of the diagonal of the mirror body 27. When the individual mirror 20 is tilted, the sensor transducer mirror electrode 45 is positioned between the comb-shaped fingers of the sensor transducer stator electrode 44 _i , and in particular between the transmitter electrode 47 and the receiver electrode 48 Respectively. As a result, there is variable shielding of adjacent comb-shaped fingers, particularly variable shielding of the receiver electrode 48 from the transmitter electrode 47. This results in a change in capacitance between the adjacent comb-shaped fingers of the individual mirror sensor transducer stator electrode (44 _i) When 20 to pivot. This change in capacitance can be measured. To this end, the input of the measuring instrument is alternately connected with the comb-shaped fingers of the sensor transducer stator electrode 44 _i , as schematically shown in Fig.

The embedding depth of the sensor transducer mirror electrode 45 between the sensor transducer stator electrodes 44 _i , in particular between the transmitter electrode 47 and the receiver electrode 48, is 30 μm. This means that the comb-like fingers 46 still have a residual buried depth at all locations between the transmitter electrode 47 and the receiver electrode 48, even at the maximum inclined pivot position, i.e., that these comb- To be guaranteed. This ensures differential sensor operation over the entire ramp range. On the other hand, the embedding depth of the sensor transducer mirror electrode 45 is selected in such a manner that there is no collision between the substrate 39 and this electrode, even at the maximum inclined pivot position of the individual mirror 20.

The electric voltage, in particular the sensor voltage U _S , is applied to the transmitter electrode 47 to measure the capacitance between the transmitter electrode 47 and the receiver electrode 48 of the sensor transducer stator electrode 44 _i . In particular, the AC voltage functions as the sensor voltage U _S.

The sensor device is sensitive in terms of the depth of burrowing of the comb-like fingers 46 between adjacent comb-shaped fingers of the sensor transducer stator electrodes 44 _i (Fig. 6).

The sensor device is insensitive in relation to the net pivot of the comb finger 46 with respect to the transmitter electrode 47 and the receiver electrode 48 (FIG. 7).

The sensor device alters the distance of the shielding element from the transmitter electrode 47 and from the receiver electrode 48 but leaves the depth of the comb fingers 46 between the adjacent transmitter and receiver electrodes 47 and 48 unchanged And is insensitive to the lateral displacement of the shielding element (Fig. 8).

Other details of the sensor device are described more closely below.

Sensor transducers stator electrode (44 _i) are arranged in a ring on the actuator the transducer stator electrode (37 _i). In this region, the absolute movement of the comb-like fingers 46 in a direction parallel to the surface normal line 36 is less than the outside of the ring of actuator transducer stator electrodes 37 _i . The absolute category of movement is related to the distance from the effective pivot point (35).

In an example shown in the figure, the sensor transducer stator electrode (44 _i) is inwardly projected in a radial direction beyond the inner contour of the stator electrode actuator transducer (37 _i). Sensor transducers stator electrodes it is also possible to incorporate the actuator transducer stator in this way does not project beyond the inner contour of the electrode (37 _i) sensor transducer stator electrode (44 _i).

The sensor transducer stator electrodes 44 _i are specified for the effective pivot point 35 and arranged in the radial direction. In particular, these electrodes have comb-like fingers extending in the radial direction. This reduces the sensitivity in relation to the possible thermal expansion of the individual mirrors 20.

As described above, because of its structure, the sensor device can be moved at a maximum in terms of parasitic movement of the individual mirrors 20, particularly in terms of displacement normal to the surface normal 36 and / Should have minimum sensitivity. Because of the shielding principle of the sensor device, the sensor device also has a minimum sensitivity in terms of possible thermal expansion of the individual mirrors 20 at best. Moreover, the sensor principle has a minimum sensitivity in terms of thermal bending of the mirror.

Each of the two sensor units facing each other with respect to the effective pivot point 35, each having a transmitter electrode 47 and a receiver electrode 48, are interconnected in a different way or are readable in at least different ways. This makes it possible to eliminate errors in the measurement of the position of the mirror 20, especially due to the eigenmode of the individual mirror 20.

The active components of the sensor device are arranged on a substrate 39. This makes it possible to measure the tilt angle of the individual mirrors 20 directly with respect to the substrate 39. Moreover, the length of the signal line 56 and / or the supply line 57 can be reduced, especially because of the arrangement of the transmitter electrode 47 and the receiver electrode 48 on the substrate 39. This reduces possible interference effects. This ensures a certain operating condition.

The transmitter electrode 47 is specified for the receiver electrode 48, as an active shield, in particular as a shield ring, respectively. This reduces the capacitive cross-talk between transducer actuator stator electrode (37 _i) and the sensor device, in particular to minimize, in particular, prevented.

An AC voltage is applied from the voltage source 48 to the transmitter electrode 47, as schematically indicated in Fig. The voltage source 58 has a low impedance. In particular, the voltage source 58 in the region of the excitation frequency, and has an output impedance less than 1 part in a thousand coupling capacitance to the actuator the transducer transmitter electrodes 47 from the stator electrode (37 _i). The output impedance of the voltage source is less than one part of the thousands capacitance between the transmitter electrode 47 and the sensor transducer mirror electrode 45 or receiver electrode 48. This ensures that the AC voltage applied to the transmitter electrode 47 is unaffected or at least substantially unaffected by the variable actuator voltage U _A or by the variable sensor capacitance.

Generally, a network analyzer can be used to read the sensor transducer. With this, it is possible to determine the impedance of the sensor transducer and determine the displacement position of the individual mirror 20 from the conversion factor therefrom. Such a network analyzer typically comprises an excitation source, for example a voltage source 58 described above, and a measurement of the response, for example a measurement of the current measured or conveyed during the signal period. The network impedance and thus the sensor capacitance can be determined from the quotient of excitation voltage and current.

Two variants of the joint 32 are described in more detail below with reference to Figs. 9 and 10. Fig.

The joint 32 is embodied as a curved bend.

According to a variant shown in Fig. 9, the joint 32 is embodied as a torsion spring element structure. In particular, it comprises two torsion springs 50, 51. The two torsion springs 50, 51 have an integral embodiment. In particular, these torsion springs are vertically aligned with each other and form a cruciform structure 49.

Torsion springs 50 and 51 have a length of approximately 100 microns, a width of approximately 60 microns, and a thickness of approximately 1 microns to 5 microns. These torsion springs 50, 51 are suitable as individual mirrors 20 having a dimension of 0.6 mm 0.6 mm. The dimensions of the torsion springs (50, 51) depend on the dimensions of the individual mirrors (20). Generally, larger mirrors require larger, especially stiffer, torsion springs 50, 51.

The torsion spring 50 extends in the direction of the tilt axis 33. The torsion spring 50 is mechanically connected to the substrate 39. The connection block 52 serves to connect the torsion spring 50 to the substrate 39. [ The connection block 52 has a cube embodiment in each case. These connecting blocks also have cylindrical, in particular circular-cylindrical embodiments. Other geometric shapes are equally possible.

The connecting blocks 52 are each arranged in the end region of the torsion spring 50.

In addition to the connection of the joint 32 to the substrate 39, the connecting block 52 also functions as a spacer between the torsion spring 50 and the substrate 39.

The torsion spring 51 is mechanically connected to the mirror body 27 of the individual mirror 20 in a manner corresponding to the connection of the torsion spring 50 to the substrate 39, . The connection block 53 is provided for this purpose. In view of these embodiments, the connecting block 53 corresponds to the connecting block 52. The connecting blocks 53 are arranged in the end regions of the torsion springs 51, respectively.

In the direction of the surface normal 36, the connecting block 53 and the connecting block 52 are arranged on opposite sides of the cruciform structure 49.

The torsion springs 50 and 51 of the joint 32 have a T-shaped profile in the region of the limb of the cruciform structure 49 adjacent the central zone. As a result of this, the torsion springs 50, 51 are strengthened in relation to the deflection, especially in the direction of the surface normal 36. The achievement of this enhancement is that the natural frequency of the mirror 20 in the vertical direction is shifted to a high frequency and thus a mode separation of the regulated tilt mode and parasitic vertical oscillation mode in the frequency space above 10 is obtained, . Moreover, the thermal conductivity of the joint 32 can be increased via the cross reinforcing element 55.

In principle, it is likewise possible to arrange the corresponding reinforcing element 55 on the opposite side of the cruciform structure 49. In this case, the branches of the torsion springs 50 and 51 have a cross-section.

The mechanical and / or thermal properties of the joint may be influenced in a targeted manner via the targeted design of the reinforcing element 55. The profile, in particular the reinforcing element 55, serves to increase the stiffness in the actuator plane. In particular, these reinforcing elements have the function of realizing the binding rigidity of the individual mirrors 20 with respect to the base plate 39 in the horizontal degree of freedom, that is, the horizontal displacement and the rotation about the vertical axis. As a result, the natural frequency of the parasitic mode of the individual mirror 20 is increased. This obtains the mode interval of the operated tilted and parasitic modes advantageous from the control theory standpoint. In particular, the natural frequency of the parasitic mode is preferably set to be at least 10 more than the activated tilt mode.

Moreover, the forces acting between the mirror 20 and the actuator transducer stator comb fingers 38 and the resulting electrostatic softening (negative stiffening) are absorbed by the high horizontal stiffness. In particular, it is possible to ensure that there is no lateral pull-in from the perspective of the comb-like fingers 38.

The reinforcing element 55, which is also referred to as a reinforced ribbra, particularly a vertical reinforced ribbee, also has the function of shifting the biasing stiffness and thus shifting the natural frequency of the vibration in the direction of the vertical vibration, do.

The joint 32 is rigid in terms of rotation about the surface normal 36. The joint 32 is rigid in view of the linear displacement in the direction of the surface normal 36. [ In this context, the stiffness lies beyond the mode in which the eigenfrequency of the vibration in the direction of the natural frequency and surface normal of the rotational vibration to the surface normal 36 is operated by a frequency in excess of ten. The actuated tilting mode of the individual mirrors is particularly placed at a frequency of less than 1 kHz, in particular less than 600 Hz. The natural frequency of the rotational oscillation with respect to the surface normal 36 lies above 10 kHz, in particular above 30 kHz.

The joint 32 has a known flexibility in terms of pivoting about the two tilt axes 33, 34. The rigidity of the joint 32 in terms of the pivot about the tilt axes 33, 34 can be influenced by the targeted embodiment of the torsion springs 50, 51.

The joint 32, in particular the connecting blocks 52 and 53 and the torsion springs 50 and 51 serve to dissipate heat from the mirror body 27. The components of the joint 32 form a heat conduction section.

The joint 32 including the connecting blocks 52 and 53 has a plurality of functions. Firstly binding the non-operating degrees of freedom, secondly transferring heat from the mirror 20 to the base plate 39, and thirdly electrical connection between the mirror 20 and the base plate 39. The use of blocks 52 and 53 is mainly to create a space for vertical movement of the joint elements. It is self-evident that the blocks 52, 53 should then also promote the mechanical, thermal and electrical functions of the springs 50, 51.

The torsion springs 50 and 51 are made of a material having a thermal conductivity coefficient of at least 50 W / (mK), in particular at least 100 W / (mK), in particular at least 140 W / (mK).

The torsion springs 50 and 51 may be made of silicon or a silicon compound. The joint 32 is preferably made from heavily doped monocrystalline silicon. This opens up the process compatibility of established MEMS manufacturing processes and manufacturing processes. Moreover, it advantageously leads to high thermal conductivity and good electrical conductivity.

In the case of an absorbed power density of 10 kW / (m ² ) and a mirror dimension of 600 μm × 600 μm, the thickness of the torsion springs 50 and 51, in particular 4 μm, The temperature difference of 11 K appears between the substrate 39 and the mirror main body 27 having the thermal conductivities of the first and second substrates 51 and 51.

The torsion springs 50, 51 may also have a lower thickness. If the torsion springs 50 and 51 have a thickness of 2.4 μm, a temperature difference of 37 K appears between the mirror body 27 and the substrate 39 - otherwise the same parameter values.

In particular, the thermal conductivity of the torsion spring is in the range of 0.5 K / kW / m ² to 10 K / kW / m ² , and the heat output density relates to the average heat output absorbed by the mirror. What can be achieved by this torsion spring is that the temperature difference between the mirror body 27 and the substrate 39 is less than 50 K, in particular less than 40 K, in particular less than 30 K, in particular less than 20 K.

10, two pairs of bending springs 69 and 70 are provided in place of the torsion springs 50 and 51. In the embodiment shown in Fig. The joint 32 also has great rigidity in the horizontal degrees of freedom in this variant. In this regard, reference is made to the description of the alternative example shown in Fig. In terms of horizontal stiffness and in terms of mode separation of the parasitic eigenmodes, the design aspects likewise correspond to those described above.

A variation of the joint 32 shown in Fig. 10 is a curved bend having orthogonally arranged horizontal bending springs 69, 70 embodied as leaf springs. Each of the two bending springs 69, 70 is connected to each other by a plate-like structure 67, also referred to as an intermediate platen.

Horizontal leaf springs are advantageous from a process perspective. In particular, these leaf springs simplify the manufacture of the joint 32.

In a variant according to Fig. 10, the connecting blocks 52, 53 each have a three-roll bar-shaped embodiment. These connecting blocks extend substantially over the entire extent of the joint 32 in the direction of the tile shafts 33, 34.

A separation slot 68 is provided between the two connection blocks 52, 53 in each case. Thus, the joint 32 has a two-part embodiment.

The joint 32 preferably has axial symmetry with respect to the surface normal 36. [ Thus, the joint has double rotational symmetry. The bending springs 69 and 70 have mirror symmetrical embodiments, respectively, in particular in relation to the surface normal 36. [

In a variant according to FIG. 10, the reinforcing element 55 is embodied in the form of two plate-like structures 67. In particular, the plate-like structure 67 is arranged parallel to the plane formed by the pivot shafts 33, 34. The plate-like structure 67 connects the pivot shafts 33, 34 realized by the bending springs 69, 70. In particular, the pivot shafts 33, 34 are arranged orthogonal to each other.

In this alternative, the joint 32 includes a notch 66 in the central region. The notch 66 allows for the arrangement of additional components, e. G., Counterweight, on the mirror body 27, in the central region of the individual mirror 20, and in particular in the region of the surface normal 36, And does not induce collision with the joint 32. Corresponding notch 66 can also be provided in a variant according to Fig.

The two plate-like structures 67 can also be connected to one another in a central zone. As a result, even higher rigidity of the joint 32 can be obtained in the vertical direction, i.e. in the direction of the surface normal 36. [

Other aspects, particularly thermal aspects, of the optical component 30 are described below.

The transmitter electrode 47 and the receiver electrode 48 have thermal contact with the substrate 39. The substrate 39 functions as a heat sink. Thus, both the transmitter electrode 47 and the receiver electrode 48 are at the same temperature as the substrate 39, or at least substantially the same temperature. The active actuator transducer stator electrode 37 _i also has a thermal contact with the substrate 39. These electrodes preferably also have substantially the same temperature as the substrate 39 during operation of the displacement device 31. [ Accordingly, the temperature of the sensor transducer stator electrode (44 _i) is substantially constant during the operation of the optical component (30). In particular, this temperature is independent of the temperature of the individual mirrors 20. The potential deviation of the temperature of the substrate 39 can be compensated. In particular, these deviations can be compensated substantially more easily than the temperature deviations of the individual mirrors 20.

The optical component 30 lying within the region of the surface normal 36 has a thermal center 59. The heat flow extends radially outward substantially.

The sensor transducer stator electrodes 44 _i are arranged radially symmetrically with respect to the heat center 59. The thermal expansion of the individual mirrors 20 induces only radial displacement of the comb-like fingers 46. In contrast, the sensor device is substantially insensitive.

Hereinafter, the actuator of the transducer stator electrode (37 _i) and a further aspect, the embodiment and arrangement of the sensor transducer stator electrode (44 _i) are described with reference to FIG.

In each case, two actuator transducer stator electrodes 37 _i lying opposite one another in relation to the effective pivot point 35 form an electrode pair 60 ₁ , 60 ₂ . The electrode pairs 60 ₁ and 60 ₂ are operated in a differential manner. The electrode pairs 60 ₁ and 60 ₂ can be operated in a differential manner over the entire range of movement of the individual mirrors 20. As an alternative, it is also possible in principle to have a superposition in the center. These are the ability to incline the individual mirror 20 about the actuator shaft (61 _1, 61 _2), the actuator shaft (61 _1, 61 ₂₎ are along the diagonal of the optical component 30, in particular the individual mirrors (20 Of the mirror main body 27. The mirror main body 27 has a mirror surface. The actuator shafts 61 ₁ and 61 ₂ are formed by the actuator transducer electrodes 37 _i and 42 respectively arranged in quadrants 54 ₁ , 54 ₃ , 54 ₂ and 54 ₄ . The actuator shafts 61 ₁ and 61 ₂ are arranged in a twisted manner by 45 ° with respect to the inclined shafts 33 and 34 formed by the joint 32, respectively.

The sensor transducer stator electrodes 44 _i are arranged along the diagonal of the substrate 39. In each case, two sensor transducer stator electrodes 44 _i lying opposite one another in relation to the effective pivot point 35 form an electrode pair 62 ₁ , 62 ₂ . Electrode pairs (62 _1, 62 ₂₎ sensor transducer stator electrode (44 _i) of are interconnected by a differential manner. These electrodes function to determine the tilt or pivot position with respect to the actuator shafts 61 ₁ and 61 ₂ . Each one of the electrode pairs 62 ₁ , 62 ₂ of the sensor device is assigned to one of the electrode pairs 60 ₁ , 60 ₂ of the actuator transducer stator electrode 37 _i and is thus aligned with this electrode.

All transducer electrode _{(37 i, 42 i, 44} i, 45) is embodied as a comb-shaped electrode having a plurality of comb-fingers, in which each complementary comb-fingers of the mirror and the stator are bonded to each other, and therefore the capacitance Form a capacitor that depends primarily on the depth of buried.

All the comb-fingers, in particular an actuator of the displacement device 31, the transducer and sensor transducer mirror electrodes (45 of the stator electrode (37 _i) of the actuator mirror electrode 42, and a sensor transducer stator electrode (44 _i) ) Have the same dimensions in the direction of the surface normal 36. [0050] In particular, this simplifies the manufacture of comb-like fingers. In particular, it is possible to manufacture the entire electrode structure arranged on the substrate 39 and / or the whole electrode structure connected to the mirror body 27 using one and the same sequence of process steps.

All active actuator transducer stator electrodes 37 _i have thermal contact with the substrate 39. Thus, during operation of the displacement device 31, these temperatures substantially correspond to the temperature of the substrate 39. This leads to improved substantially constant operating conditions.

The mirror main body 27 is electrically grounded. The electrically conductive contacts required for this are set by the joint 32. Alternatively, a specified bias voltage may be applied to the mirror body 27 via the joint 32 to set a different operating voltage operating point or zone for the actuator and the sensor.

An emergence circle 63 is plotted in FIG. 11 for purposes of illustration. The appearance source 63 can detect the appearance of the actuator mirror electrode 42 from the actuator transducer stator electrode 37 _i or the appearance of the sensor mirror stator electrode 44 _i from the sensor transducer stator electrode 44 _i , (46). ≪ / RTI > The actuator mirror electrode 42 may exit the origin circle 63 from the actuator transducer stator electrode 37 _j .

Preferably, all of the comb-shaped fingers 46 of the sensor device are arranged in the source circle 63. Thus, the comb-like fingers 46 do not exit from the sensor transducer stator electrodes 44 _i at any possible angled position of the individual mirrors 20. In particular, these comb-like finger does not come out completely from the absolute sensor transducer stator electrode (44 _i). This ensures that the angled position of the individual mirrors 20 can always be reliably identified by the assistance of the sensor device.

Preferably, the emergent circle 63 has a diameter substantially corresponding to a lateral length of the reflective surface 26 of the individual mirror 20. [ This may also be slightly larger. Appearance source 63 is to all intents and purposes, the appearance of the individual mirrors 20 of the reflecting surface 26 has the corresponding diameter of the diagonal, the actuator transducer stator actuator mirror electrode 42 from the electrode (37 _i) of the Is completely avoided. This may be beneficial, but it is not necessary.

The radius of the appearance circle 63 depends on the required maximum inclination angle range and the comb-shaped overlapping portion of the comb-like fingers.

The maximum possible tilting position of the individual mirrors 20 can be limited by mechanical elements, in particular by means of contact elements. These matching elements may be arranged on the substrate 39. These mating elements are preferably arranged at the edge, i.e. outside the electrode structure of the displacement device 31.

Another modification of the optical component 30 is described below with reference to FIG. An optical component 30 according to a variant shown schematically in Fig. 12 corresponds to one of the variants described above, here referring to this variant.

12, provision is made for arranging the compensating weight 64 on the side of the mirror body 27 which lies opposite the joint 32 in the direction of the surface normal 36 . The compensating weight 64 is firmly connected to the mirror body 27. In particular, it has a direct connection to the mirror body 27.

The compensating weight 64 is positioned such that the mass center 65 of the mechanical system including all the components of the optical component 30 moving with the mirror body 27 of the individual mirror 20 is in the effective pivot point Lt; RTI ID = 0.0 > 35 < / RTI > The center of mass 65 may be displaced in a targeted manner by the targeted embodiment and arrangement of the compensating weight 64. By displacing the center of mass 65 in such a way that its position coincides with that of the effective pivot point 35, it is possible to substantially reduce the sensitivity of the individual mirrors with respect to external disturbances. Moreover, the parasitic eigenmodes remain in the high-frequency range sufficiently far away from the frequency spectrum that occurs during the displacement of the individual mirrors 20 by the actuator device.

What can be accomplished by the compensating weight 64 is that the center of mass 65 of the mechanical system, which may in principle be shifted out of the effective pivot point 35 of the joint 32, It is pressed.

In the direction of the surface normal 36, the compensating weight 64 may have a length of up to 500 [mu] m.

Preferably, the compensating weight 64 has a rotational symmetry with respect to the surface normal 36. [ These compensating weights can in particular be cylindrical, in particular circular-cylindrical embodiments. In addition to the connecting piece thereby mechanically connected to the compensating additional mirror body 27, the compensating weight may also have a substantially spherical embodiment.

In particular, the compensating weight 64 has a rotational symmetry corresponding to the rotational symmetry of the joint 32.

The compensating weight 64 may have an arcuate recess. Moreover, the compensating weight may have a central cavity extending in the direction of the surface normal 36. This cavity facilitates access to the material under the joint 32. If necessary, this material can be removed as a sacrificial material.

The achievement of arranging the compensating weight 64 by displacing the center of mass 65 of the mechanical system in this manner, in particular in such a manner as to correspond to the effective pivot point 35, is achieved, for example, by mechanical vibrations The acceleration in the horizontal direction is not converted into a tilting moment having an interference effect on the setting mirror position. As a result of the compensating weight 64, the individual mirrors 20 can become less sensitive with respect to vibration excitation. In particular, the inclination angle stability is improved in a predetermined vibration spectrum. In other words, the arrangement of the compensating weights 64 forms a means for reducing the mirror sensitivity in relation to the disturbance.

In a particularly advantageous variant, the compensating weight 64 can simultaneously form an engagement element, in particular a so-called end stop, by which the maximum possible inclination of the individual mirrors 20 is delimited. As a result, the individual mirror 20 can be protected from mechanical damage and / or electrical short circuit. By embodying the compensating weight 64 as a matching element, it can simultaneously be used as a mechanical reference for mirror inclination. In particular, it is possible to inspect and / or recalibrate the sensor device in relation to the drift possible by the end mating gate. This makes it possible to omit the external measurement system. This substantially simplifies monitoring and / or calibrating the sensor device.

On the other hand, the compensating weight 64 is embodied and arranged in this manner without contact with the substrate 39 and the components of the displacement device 31 within the possible displacement range of the individual mirrors 20. A specific recess in the substrate 39 may be provided for the compensating weight 64. [ In particular, the recess for the compensating weight 64 is arranged inside the ring-shaped electrode structure.

Different variations of the displacement device 31, of the sensor device, of the joint 32 and of the remaining components of the optical component 30 can be combined substantially freely with each other.

According to another variant, the actuator may also be used as a sensor at the same time. To this end, provision is made for reading the tilt angle dependent actuator capacitance at a frequency considerably higher than the operating frequency (control bandwidth), in particular at least 10 times higher. An individual sensor device may be omitted in this case. In particular, according to the above description, it is also possible to provide a dedicated dedicated sensor device.

The displacement device 31 is preferably manufacturable by the MEMS method. In particular, the displacement device has a design designed for fabrication using the MEMS method steps. In particular, the displacement device has mainly a horizontal layer which may be structured in the vertical direction, especially only a horizontal layer.

In particular, the electrode _{(37 i, 42, 44 i} , 45) can be produced by MEMS method steps. The joint 32 is preferably also manufacturable by the MEMS method step.

Claims (23)

A sensor device for directly capturing the pivot position of a mirror element (20) having two pivoting degrees of freedom,
1.1. At least one sensor electrode structure,
1.1.1. A transmitter electrode 47 having a comb-like structure, and
1.1.2. At least one sensor electrode structure having a receiver electrode (48) having a comb-like structure,
1.2. A voltage source 58 for applying an AC voltage to the transmitter electrode 47,
1.3. And a shielding unit (45) for variable shielding of the receiver electrode (48) from the transmitter electrode (47)
1.4. Wherein all transmitter electrodes (47) and all receiver electrodes (48) are arranged in a common plane. 2. A method according to claim 1, characterized in that the sensor device comprises a plurality of different sensor pairs, each sensor pair defining a measurement axis and a pivot position of the mirror element (20) Sensor device. 3. A sensor device according to claim 2, characterized in that the longitudinal capacitive comb-type transducer functions as a differential sensor. 4. A device according to any one of claims 1 to 3, characterized in that the shielding unit (45) is formed by a component of the sensor device mechanically connected to the mirror body (27) of the mirror element , Sensor device. 5. A sensor device according to any one of claims 1 to 4, wherein the transmitter electrode (47) and the receiver electrode (48) are arranged in a fixed manner. 6. A sensor device according to any one of claims 1 to 5, characterized in that the transmitter electrode (47) forms a shielding element. 7. A sensor device according to any one of claims 1 to 6, characterized in that the transmitter electrode (47) is circumferentially closed and has a zone completely surrounding the receiver electrode (48) in a plane. A displacement device (31) for pivoting a mirror element (20) having two pivoting degrees of freedom,
8.1. And an electrode structure including an actuator electrode (37 _i , 42)
8.2. The actuator electrodes 37 _i , 42 are embodied as comb-like electrodes,
8.3. All of the active actuator electrodes 37 _i are arranged in a single plane,
8.4. It said actuator electrode (37 _i, 42), the displacement device 31 to form a direct drive for pivoting the mirror element (20). 9. Displacement device (31) according to claim 8, characterized in that the mirror element (20) is mounted by a curved bend (32). Claim 8 according to any one of claims 9, wherein said actuator electrode (37 _i, 42), the displacement device (31), characterized in that arranged in the radial direction. 11. A displacement device (31) according to any one of claims 8 to 10, characterized in that the electrode structure has radial symmetry. Article according to any one of claims 11, wherein all the active actuator electrode (37 _i) is incident on the patterning device being arranged in a fixed manner on the (39), characterized in, the displacement device (31). 10. The method of claim 8 according to any one of claim 12, wherein the electrode structure, the displacement device comprises a sensor electrode (47, 48) which are arranged in the same plane as the active actuator element (37 _i) (31). The method of claim 8 to claim 13 any one of claims, wherein at least a subset of the active actuator electrode (37 _i), the displacement device (31) characterized in that at the same time functions as a sensor electrode (47, 48). Optical component 30,
15.1. At least one micro mirror (20) having two pivoting degrees of freedom,
15.2. A displacement device (31) according to any one of claims 8 to 14 for displacing at least one micro mirror (20) and / or a sensor device according to any one of claims 1 to 7 (30). ≪ / RTI > 16. Optical component (30) according to claim 15, characterized in that said at least one micromirror (20) is mounted by a joint (32) having at least two tilting degrees of freedom. 17. A method according to claim 16, characterized in that the micromirror (20) has a center of gravity and the position of the center of gravity coincides with the effective turning point defined by the joint (32) for all intents and purposes. Optical component (30). A mirror array (19) comprising a plurality of optical components (30) according to any one of claims 15 to 17. An illumination optical unit (4) for projection exposure apparatus (1) for guiding illumination radiation (10) to a target field (5), said illumination optical unit (4) comprising at least one mirror array (19) (4). An illumination system (2) for a projection exposure apparatus (1)
20.1. An illumination optical unit (4) according to claim 19,
20.2. An illumination system (2) comprising a radiation source (3). 1. A microlithographic projection exposure apparatus (1) comprising:
21.1. An illumination optical unit (4) according to claim 19,
21.2. And a projection optical unit (7) for projecting a reticle arranged in the object field (5) into the image field (8). A method for making a microstructured or nanostructured component,
22.1. Providing a projection exposure apparatus (1) according to claim 21,
22.2. Providing a substrate on which a layer of a photosensitive material is at least partially applied,
22.3. Providing a reticle comprising a structure to be imaged,
22.4. Projecting at least a portion of the reticle onto a zone of the photosensitive layer by the projection exposure apparatus (1)
22.5. And developing the exposed photosensitive layer. 22. A component made according to the method of claim 22.

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