KR20170106720A - Leak sensor for side detection - Google Patents

Leak sensor for side detection Download PDF

Info

Publication number
KR20170106720A
KR20170106720A KR1020160030162A KR20160030162A KR20170106720A KR 20170106720 A KR20170106720 A KR 20170106720A KR 1020160030162 A KR1020160030162 A KR 1020160030162A KR 20160030162 A KR20160030162 A KR 20160030162A KR 20170106720 A KR20170106720 A KR 20170106720A
Authority
KR
South Korea
Prior art keywords
sensor
base layer
sensor sheet
pattern portion
pattern
Prior art date
Application number
KR1020160030162A
Other languages
Korean (ko)
Inventor
이재희
Original Assignee
플로우닉스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 플로우닉스 주식회사 filed Critical 플로우닉스 주식회사
Priority to KR1020160030162A priority Critical patent/KR20170106720A/en
Publication of KR20170106720A publication Critical patent/KR20170106720A/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/40—Investigating fluid-tightness of structures by using electric means, e.g. by observing electric discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/307—Disposable laminated or multilayered electrodes

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The present invention includes a sensor sheet including a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material on the upper and side surfaces of the base layer according to a predetermined pattern, Wherein the first sensor sheet comprises a first pattern portion of positive polarity arranged on the upper surface of the base layer according to a predetermined pattern, And the second sensor sheet includes a third pattern portion of positive polarity arranged on a bottom surface and a side surface of the base layer according to a predetermined pattern, Wherein the base layer of the first sensor sheet and the base layer of the second sensor sheet are formed to have different sizes so that a step is formed at a rim portion. Relate to.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a side-

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a leak detection sensor for detecting fluid leakage.

In general, many chemicals are used in the semiconductor manufacturing process. For example, a cleaning liquid used in a cleaning process after cutting and polishing the wafer, a photosensitive liquid used in the photosensitive process of the wafer, a developing solution used in the developing process of the wafer, an etching solution used in the wafer etching process, .

These chemicals are transported to the position where each process is carried out through the transfer pipe. The failure of the transfer pipe and the deterioration may cause the chemical substance to leak out of the transfer pipe. Leaked chemicals have an adverse effect on people and other devices and parts of the semiconductor manufacturing site, so it is necessary to detect leakage of the transfer pipe and take quick action.

Leak detection of a transfer pipe is generally performed by placing positive (+) and minus (-) wires of a wire side by side, placing an absorbent between these wires, and then measuring the resistance change caused by the leaked chemical substance . The sensor using this method is called a normal line type leak detection sensor.

Here, the leakage detection method of a line-type leak detection sensor includes arranging a positive (+) wire and a negative (-) wire (or conductor) in a drain extended from a transfer pipe So that leakage is measured. An example of such a line-type leakage detection sensor is disclosed in Korean Patent Laid-Open Publication No. 10-2007-0005234.

On the other hand, there is an area type leak detection sensor in which the area subject to leak detection is wider than the line type leak detection sensor. In the area type sensing sensor, a plurality of (+) conductor lines and a pair of (-) conductor lines are arranged in a zigzag form, or a pair of (+) conductor lines and a (-) conductor line are arranged in a predetermined sensing area . One example of such an area leak detection sensor is disclosed in Japanese Utility Model Laid-Open Publication No. Hei 01-171340.

Here, the area type leakage detection sensor is a method of detecting leakage by contact with a leakage fluid dropping from top to bottom. However, in such a sensing system, there is a problem that the leakage sensor should be disposed directly under the portion where leakage is expected, and leakage can not be detected when the leaked fluid does not fall on the upper portion of the leakage sensor. That is, in the conventional area type leak detection sensor, unless the sensor is located just below the leakage position of the fluid, unless the amount of fluid flowing through the floor is equal to the height of the sensor, There was a problem that it could not be detected.

In order to compensate for the disadvantages of such a conventional leak detection sensor, Japanese Patent No. 10-1538507 discloses a side detection type leak detection sensor capable of sensing fluid flowing sideways. However, since the two sensor layers exposed in the lateral direction are very adjacent to each other, the sensor of the side-detection type disclosed in this prior art document can not be used because the sensor and other foreign substances such as solid materials simultaneously contact the two sensor layers, There is a fear that malfunction such as short-circuiting may occur.

It is an object of the present invention to provide a side detection type leak detection sensor capable of preventing a foreign object other than a leakage fluid from being detected and preventing a malfunction such as a short.

In order to achieve the above object, the present invention provides a sensor sheet including a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material on the upper and side surfaces of the base layer according to a predetermined pattern, Wherein the sensor sheet comprises a first sensor sheet and a second sensor sheet which are coupled such that the base layers face each other and wherein the first sensor sheet has a positive polarity And a second pattern portion of negative polarity arranged on a side of the base layer, wherein the second sensor sheet has a (+) polarity arranged on a bottom surface and a side surface of the base layer in accordance with a predetermined pattern, Wherein the base layer of the first sensor sheet and the base layer of the second sensor sheet are formed to have different sizes so that a step is formed at the rim portion, The.

Preferably, the first pattern portion of the first sensor sheet and the third pattern portion of the second sensor set are electrically connected to each other.

Here, the base layer of the first sensor sheet and the base layer of the second sensor sheet may have a common terminal hole penetrating in the vertical direction to electrically connect the first pattern portion and the third pattern portion, The hole is characterized by being filled with a conductive material.

Alternatively, a fourth pattern extending downward from the first pattern portion along an upper surface and a side surface of the base layer of the first sensor sheet and a side surface of the base layer of the second sensor sheet, And the like.

The side detection type leakage sensor according to the present invention is characterized in that a foreign matter other than the leakage fluid, for example, a solid material, simultaneously contacts the second pattern portion and the third pattern portion due to the difference in level between the first sensor sheet and the second sensor sheet It is not short-circuited by foreign substances other than the leakage fluid and does not malfunction.

1 is an exploded perspective view schematically showing a side-detection-type leakage detection sensor according to a first embodiment of the present invention,
FIG. 2 is a perspective view schematically showing a side detection type leakage detection according to a first embodiment of the present invention, FIG.
FIG. 3 is a side cross-sectional view schematically showing a side-detection-type leak detecting sensor according to the first embodiment of the present invention,
4 is a perspective view schematically showing a side detection type leak detection sensor according to a second embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a side detection type leak detection sensor according to the present invention will be described with reference to the accompanying drawings. In the following description of the present invention, it is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the technical scope of the present invention. Will be.

1 to 3, the side detection type leakage sensor according to the first embodiment of the present invention is a leakage detection sensor capable of detecting a leakage fluid not only from the upper surface but also from the side surface. The leakage detection sensor includes a base layer 110 or 210, And a sensor sheet 100 or 200 made of a first sensor sheet 120 or a second sensor sheet 220. The sensor sheet 100 includes a first sensor sheet 100 and a second sensor sheet 200 which are symmetrically joined to each other.

The base layer 110 or 210 is formed of a non-conductive material and the sensor layer 120 or 220 is formed by applying or printing a conductive material to the base layer 110 or 210 on the upper and side surfaces according to a predetermined pattern. The first sensor sheet 100 and the first sensor sheet 200 are combined so that the base layer 110 of the first sensor sheet 100 and the base layer 210 of the second sensor sheet 200 face each other. Thereby constituting a leak detection sensor.

The first sensor sheet 100 includes a first pattern portion 121 having a (+) polarity arranged on the upper surface of the base layer 110 according to a predetermined pattern, an upper surface and an upper surface edge of the base layer 110 And a second pattern portion 122 of (-) polarity arranged on the side surface. The first pattern portion 121 and the second pattern portion 122 together form a sensor layer 120. The first pattern units 121 are arranged to extend along the center line of the base layer 110 and on both sides from the center line to have a predetermined area on the upper surface of the base layer 110. The second pattern portion 122 extends to be spaced apart from the first pattern portion 121 along the top edge or side surface of the base layer 110 from the edge of the base layer 110 toward the center line, 110) having a predetermined area.

The second sensor sheet 200 includes a third pattern portion 221 of positive polarity arranged on a lower surface and a side surface of the base layer 210 according to a predetermined pattern. The third pattern portion 221 forms the sensor layer 220. Here, the second pattern portion 122 and the third pattern portion 221 are spaced apart from each other in the vertical direction and exposed to the side of the sensor, and the third pattern portion 221 is exposed to the first pattern of the first sensor sheet 100 (121).

Accordingly, when the first pattern portion 121 and the second pattern portion 122 are brought into contact with the leakage fluid on the upper surface of the first sensor sheet 100, the sensor is turned on to sense the leakage fluid. When the leakage fluid contacts the side surfaces of the first sensor sheet 100 and the second sensor sheet 200 and the second pattern portion 122 and the third pattern portion 221 are energized, the sensor is turned on Leakage fluid can be detected.

Here, the base layer 110 of the first sensor sheet 100 and the base layer 210 of the second sensor sheet 200 are formed to have different sizes so that a step is formed at the rim portion. That is, the first sensor sheet 100 is formed to have a larger area than the second sensor sheet 200. Since the side surface of the first sensor sheet 100 and the side surface of the second sensor sheet 200 are not arranged side by side due to the difference in area between the first sensor sheet 100 and the second sensor sheet 200, It is difficult for the foreign matter to simultaneously contact the second pattern portion 122 and the third pattern portion 221 when foreign matter other than the leakage fluid, for example, a solid material, comes into contact with the side surface of the sensor. Therefore, the second pattern portion 122 and the third pattern portion 221 are not energized by the contact of foreign matter. Therefore, the side-detection-type leakage sensor according to the present invention does not malfunction due to short circuit due to foreign matter other than the leakage fluid.

Preferably, the base layer 110 of the first sensor sheet 100 and the base layer 210 of the second sensor sheet 200 are vertically penetrated, and the first pattern portion 121 and the third pattern portion 210, And a common terminal A for electrically connecting the terminals 221 to each other. The common terminal A is electrically connected to the through hole 10 penetrating from the upper surface of the first sensor sheet 100 through the base layer 210 of the second sensor sheet 200 in the vertical direction from the sensor layer 220, And filling the material (20).

The first pattern portion 121 and the third pattern portion 221 are electrically connected to each other by the common terminal A and the fluid is laterally contacted with the leakage detection sensor according to the present invention, When the pattern unit 122 and the third pattern unit 221 are grounded, the leakage fluid can be sensed laterally.

Referring to FIG. 4, the side detection type leakage sensor according to the second embodiment of the present invention includes a first pattern portion (not shown) of the first sensor sheet 100 instead of the common terminal A described in the first embodiment 121 and the third pattern portion 221 of the second sensor sheet 200. The fourth pattern portion 123 electrically connects the third pattern portion 221 of the second sensor sheet 200 and the third pattern portion 221 of the second sensor sheet 200. [

The fourth pattern portion 123 is formed on the upper surface and the side surface of the base layer 110 of the first sensor sheet 100 from the first pattern portion 121 of the first sensor sheet 100, 200 extending downward along the side surface of the base layer 210 and is grounded to the third pattern portion 221 of the second sensor sheet 200. At this time, the second pattern portion 122 of the first sensor sheet 100 needs to be partially opened, not in the closed form surrounding the edge of the base layer 110. The second pattern portion 122 may be formed in a part of the edge of the base layer 110 so as not to be grounded to the fourth pattern portion 123 and to have an opening 122a .

The first pattern portion 121 of the first sensor sheet 100 and the third pattern portion 221 of the second sensor sheet 200 are grounded by the fourth pattern portion 122, The side detection type leak detection sensor according to the second embodiment need not have the common terminal A of the first embodiment described above. However, in the step of forming the conductive pattern on the sensor, the operation of forming the fourth pattern portion 123 on the side of the sensor sheet having a considerably thin thickness takes a relatively long time. Therefore, in the first embodiment, It is preferable that the first pattern portion 121 and the third pattern portion 221 are grounded using the common terminal A as shown in FIG.

The embodiments of the present invention described above are merely illustrative of the technical idea of the present invention, and the scope of protection of the present invention should be interpreted according to the claims. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined by the appended claims. It should be interpreted that it is included in the scope of right.

Claims (4)

And a sensor layer including a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material on the upper and side surfaces of the base layer according to a predetermined pattern,
Wherein the sensor sheet includes a first sensor sheet and a second sensor sheet that are coupled such that the base layers face each other,
The first sensor sheet includes a first pattern portion of positive polarity arranged on the upper surface of the base layer according to a predetermined pattern and a second pattern portion of negative polarity arranged on a side of the base layer,
The second sensor sheet includes a third pattern portion of positive polarity arranged on a bottom surface and a side surface of the base layer according to a predetermined pattern,
Wherein the base layer of the first sensor sheet and the base layer of the second sensor sheet are formed to have different sizes so that a step is formed at a rim portion.
The method according to claim 1,
Wherein the first pattern portion of the first sensor sheet and the third pattern portion of the second sensor set are electrically connected to each other.
The method according to claim 1,
Wherein the base layer of the first sensor sheet and the base layer of the second sensor sheet have a common terminal hole penetrating in the vertical direction to electrically connect the first pattern portion and the third pattern portion, Wherein the conductive material is filled with a conductive material.
The method according to claim 1,
And a fourth pattern portion extending downward from the first pattern portion along an upper surface and a side surface of the base layer of the first sensor sheet and a side surface of the base layer of the second sensor sheet and being in contact with the third pattern portion Features a side detection type leak detection sensor.
KR1020160030162A 2016-03-14 2016-03-14 Leak sensor for side detection KR20170106720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160030162A KR20170106720A (en) 2016-03-14 2016-03-14 Leak sensor for side detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160030162A KR20170106720A (en) 2016-03-14 2016-03-14 Leak sensor for side detection

Publications (1)

Publication Number Publication Date
KR20170106720A true KR20170106720A (en) 2017-09-22

Family

ID=60035011

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160030162A KR20170106720A (en) 2016-03-14 2016-03-14 Leak sensor for side detection

Country Status (1)

Country Link
KR (1) KR20170106720A (en)

Similar Documents

Publication Publication Date Title
KR101538507B1 (en) Leak sensor for side detection
CN104732902B (en) Display base plate, display panel and display device
US20160047857A1 (en) Semiconductor device, method of manufacturing a semiconductor device and apparatus for testing a semiconductor device
US8884288B1 (en) Semiconductor structure with means for testing metal-insulator-metal capacitors
KR101693761B1 (en) Leak sensor for top and lateral face detection
CN107632441A (en) The manufacture method and display panel of display panel
CN109283410A (en) Capacity measurement device and forming method thereof
KR20170106720A (en) Leak sensor for side detection
US9927380B2 (en) Detection device
KR101842541B1 (en) Leak sensor for detecting of non-conducting liquid
CN103545294A (en) Semiconductor detection structure and method
KR101952340B1 (en) Area division type leak sensor
KR101538504B1 (en) Leak sensor for distance detection
KR20130066945A (en) Test pattern for semiconductor device, method for manufacturing the pattern, and method for testing the device using the test pattern
KR101799834B1 (en) Multiple leak detection sensor
US20080252306A1 (en) Displacement detection pattern for detecting displacement between wiring and via plug, displacement detection method, and semiconductor device
CN206076226U (en) The WAT test structures of alignment skew in monitoring AR techniques
KR101742558B1 (en) Amplifier integrated leakage sensor
KR102064606B1 (en) Leak detector for less conductive liquid
JP2023535416A (en) Leak detection system and method
KR101695863B1 (en) Fluid level sensor
KR101431747B1 (en) Apparatus for detecting fluid leakage
JP3741086B2 (en) Semiconductor substrate for evaluation and insulation failure evaluation method for isolated semiconductor device
US20150084659A1 (en) Contact arrangements and methods for detecting incorrect mechanical contacting of contact structures
KR101937437B1 (en) Multiple leak detection sensor