KR20170090569A

KR20170090569A - An Improved Pressing Device and Method for Pumping Chemical Liquids, and A Feeding Device and Method of Chemical Liquids Having the Same

Info

Publication number: KR20170090569A
Application number: KR1020160011021A
Authority: KR
Inventors: 성달제; 김정기
Original assignee: 주식회사 나래나노텍
Priority date: 2016-01-28
Filing date: 2016-01-28
Publication date: 2017-08-08
Also published as: KR101837001B1

Abstract

The present invention discloses an improved pressurizing apparatus and method for pumping chemical fluids, and a chemical liquid supplying apparatus and method having the same.
A pressurizing apparatus for pumping a chemical liquid according to the present invention includes: a second housing having an indirect liquid chamber in which an indirect liquid is accommodated; A piston provided in the second housing for pressurizing the indirect fluid; A cup member mounted in close contact with the outside of the piston; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod, wherein an end of the cup member is fixedly mounted inside the second housing, and the cup member has elasticity in the axial direction of the piston An outer elastic member which is elastically deformable so that the piston can be elastically deformed in the circumferential direction of the piston and an inner reinforcing member which is attached to the outer elastic member inside the outer elastic member.

Description

TECHNICAL FIELD The present invention relates to an improved pressurizing apparatus and method for pumping a chemical liquid, and a chemical liquid supplying apparatus and method including the same.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improved pressurizing device and method for pumping chemical fluids, and an apparatus and a method for supplying a chemical liquid containing the same.

More particularly, the present invention relates to a method of manufacturing a chemical liquid pumping device, which uses a separate pressurizing device for pumping a chemical liquid having a cup member which is free from elastic deformation in the axial direction and which can elastically deform in the circumferential direction, The present invention also relates to an apparatus and a method for supplying a chemical liquid having the chemical liquid pumping apparatus and method, and more particularly, to an improved chemical liquid pumping apparatus and method capable of precisely controlling a supply amount of a chemical liquid by elastically deforming a tube in the chemical liquid pumping apparatus.

Generally, in order to manufacture a semiconductor wafer, a magnetic disk, a multilayer wiring board, a PDP, an LCD, or an OLED, a photoresist solution, a spinion glass solution, a polyimide solution ), Pure water, developer, etching solution, organic solvent, and coating liquids (hereinafter referred to as "chemical liquid"). Various chemical liquid supply devices for supplying such chemical liquids are used.

One of the above-described prior art chemical liquid pumping apparatus and chemical liquid supply apparatus having the same has been filed in Korean Patent Application No. 10-2001-0078429 under the title of "chemical liquid supply apparatus" on Dec. 12, 2001 Korean Patent Laid-Open No. 10-2003-0048515 (hereinafter referred to as " Open Patent 515 ") published on June 25,

1 is a cross-sectional view of a chemical liquid supply apparatus of the prior art 1 disclosed in the aforementioned Patent Laid-Open No. 515. FIG.

Referring to FIG. 1, the chemical liquid supply apparatus 100 of the prior art 1 includes a drive pump 11 and a pump drive unit 12. The drive pump 11 includes a flexible tube 13 formed by an elastic member and capable of elastic expansion and contraction in the radial direction and a flexible tube 13 disposed outside the flexible tube 13 and formed by an elastic member, And a bellows 14 that can be deformed. Adapters 15 and 16 are attached to both ends of the flexible tube 13 and a supply passage 17 is connected to the one adapter portion 15. The supply passage 17 is connected to a chemical liquid tank (Not shown). A discharge passage 19 is connected to the other adapter section 16 and the discharge passage 19 is connected to a nozzle device 20 for discharging and applying a chemical liquid. The supply passage 17 is provided with a supply side opening and closing valve 21 for opening and closing the supply passage 17 and a discharge side opening and closing valve 22 for opening and closing the discharge passage 19 is provided in the discharge passage 19 . As each of the opening and closing valves 21 and 22, a solenoid valve operated by an electric signal, an air operated valve operated by air pressure or check valves may be used.

On the other hand, the bellows 14 includes a small bellows portion 24 integrally formed with the operation disk portion 23 and the operation disk portion 23 at the axially central portion and having the first effective diameter d, And a second effective diameter D of an inner diameter larger than an effective diameter d of the small bellows portion 24 and formed integrally with the small bellows portion 24 through the second bellows portion 23 do. That is, the large bellows portion 25 has a larger cross-sectional area than the small bellows portion 24. The first and second effective diameters d and D mean the average inner diameters of the respective bellows 24 and 25 when the small bellows portion 24 and the large bellows portion 25 are expanded and contracted. The space between the flexible tube 13 and the bellows 14 constitutes a pump chamber 42. The pump chamber 42 is filled with an indirect liquid 43 which is an incompressible medium such as liquid. Therefore, when the bellows 14 is elastically deformed in the axial direction in the operating disc portion 23 at the center portion, the entire length of the bellows 14 does not change and the inner diameter of the small bellows portion 24 and the large bellows portion 25 The volume changes. In this way, the flexible tube 13 expands or contracts in the radial direction through the indirect liquid 43, causing the flexible tube 13 to perform the pump operation.

However, it is difficult to precisely control the amount of change in the volume of the flexible tube 13 due to a change in pressure, which makes it difficult to precisely apply a chemical liquid to a predetermined amount, and 2) (14) requires a long installation time in order to precisely adjust left and right flatness, (3) the structure is complicated, (4) the flow rate of the chemical liquid in the flexible tube (13) Undesirable ripples and thus bubbles are likely to occur, and 5) maintenance of the chemical liquid supply device 100 is complicated and takes a long time. 6) short life span.

One of the measures for solving the above-mentioned problems was filed in Korean Patent Application No. 10-2011-0036605 under the title of "invention of chemical liquid supply device" on Apr. 20, 2011, Is disclosed in detail in Japanese Patent No. 10-2011-0117023 (hereinafter referred to as "Open Patent 023").

2A is a cross-sectional view of the liquid supply apparatus according to the first embodiment of the prior art 2 disclosed in Patent Publication No. 023, Fig. 2B is a partially enlarged cross-sectional view of the liquid supply apparatus shown in Fig. 2A, Is a cross-sectional view of the AA line of the liquid supply apparatus shown in Fig. 2B.

Referring to FIGS. 2A to 2C, the liquid supply apparatus 10a according to the first embodiment of the prior art 2 includes one drive pump 11 and one chemical pump 12. The drive pump 11 has a drive housing 13a and the chemical liquid pump 12 has a chemical liquid housing 13b. The two housings 13a and 13b are integrated to form the housing member 13 and the housing member 13 is attached to the driving unit 14. [ A cylindrical receiving hole 15 is formed inside the driving housing 13a and an end portion of the driving housing 13a is provided with a blockage end closed by a blockage wall 16. [ And the opening 17 is formed at the other end of the drive housing 13a. The driving rod 18 is provided so as to reciprocate linearly inside the driving housing 13a and reciprocates by a driving device (not shown) provided in the driving unit 14. [

What is installed in the drive housing 13a is a bellows 21 which is a pump member. In the bellows 21, when the drive rod 18 reciprocates in the axial direction, the end plate portion 23 is moved in the axial direction together with the drive rod 18, and the accordion- . A communication chamber 25 is formed between the bellows 21 and the inner peripheral surface of the receiving hole 15 of the drive housing 13a. The interior of the bellows 21 communicates with the outside through an escape hole (not shown) formed in the drive unit 14 and an ambient air is introduced into the bellows 21 in accordance with the reciprocating motion of the drive rod 18. [ At the same time, the air inside the bellows 21 is discharged to the outside. Between the end plate portion 23 of the bellows 21 and the closing wall 16 serves as the pump chamber 26 of the drive pump 11 and the inflow and outflow of the indirect liquid is provided between the pump chamber 26 and the communication chamber 26. [ (25). When the driving rod 18 is moved forward, the pump chamber 26 contracts, and the indirect liquid inside the pump chamber 26 is discharged to the outside of the drive housing 13a. On the other hand, when the drive rod 18 is retracted, the pump chamber 26 expands, and the indirect liquid is sucked into the pump chamber 26 from the outside.

2B, a valve holding portion 42 protruding toward the closing wall 16 is formed in the distal end plate portion 23 of the bellows 21, and an annular orifice member 43 is formed in the valve holding portion 42). The outer diameter of the orifice member (43) is set to be slightly smaller than the inner diameter of the receiving hole (15). The communication gap 44 for allowing the pump chamber 26 and the communication chamber 25 to communicate with each other is formed between the inner circumferential surface of the receiving hole 15, that is, between the inner circumferential surface of the driving housing 13a and the outer circumferential surface of the orifice member 43 . The pump chamber 26 and the communication chamber 25 communicate with each other when the driving rod 18 performs the driving operation and the return operation.

As shown in Figs. 2B and 2C, the orifice member 43 is formed with a plurality of circumferentially spaced through holes 51. As shown in Fig. The valve member 53 made of one annular plate material is disposed near the orifice member 43 and the valve member 53 is axially movable relative to the guide portion 52 of the valve guide 45. [ The through hole 51 is closed by the valve member 53 when the valve member 53 contacts the valve receiving face 56a of the orifice member 43. [ On the other hand, when the valve member 53 is detached from the orifice member 43, the through hole 51 is opened so that the communication chamber 52 and the pump chamber 26 communicate with each other through the through hole 51. The valve member 53 closes the through hole 51 formed in the orifice member 43 when the drive rod 18 is moved forward and opens the through hole 51 when the drive rod 18 is moved backward . The pressure in the pump chamber 26 is increased even if a heavy load is applied to the tube 37 because only the communication chamber 25 communicates with the pump chamber 26 through the communication gap 44. However, Is suppressed. As a result, radial deformation of the bellows 21 is prevented even if a heavy discharge load is applied to the pump chamber 26.

On the other hand, when the drive rod 18 is retracted and the indirect liquid is sucked from the drive chamber 39 to the pump chamber 26 by the bellows 21, the through hole 51 is opened by the valve member 53 . However, the suction load is not large and the pressure difference between the communicating chamber 25 in the negative pressure state and the inside of the bellows 21 at atmospheric pressure is small, so that the radial deformation of the bellows 21 is prevented. The auxiliary gap 54a communicates the communication chamber 25 and the pump chamber 26 through the through hole 51 when the valve member 53 is separated from the orifice member 43.

The indirect liquid is indirectly supplied into the chemical liquid pump 12 by the drive pump 11 to pressurize and depressurize the tube 37 so that the chemical liquid The chemical liquid in the supply container 33 is discharged through the tube 37 to the nozzle device 34. [

On the other hand, FIG. 2D is a partial cross-sectional view of the liquid supply apparatus according to the second embodiment of the prior art 2.

Referring to Fig. 2D with Figs. 2A to 2C, the liquid supply device 10b according to the second embodiment of the prior art 2, which is used as the pump member of the drive pump 11, And a second diaphragm 62 instead of the bellows 21. The second diaphragm 62 is deformed in the axial direction in accordance with the axial movement of the driving rod 18. [ Further, the chemical liquid pump 12 uses the first diaphragm 61 as a partitioning member. In this liquid supply device 10b, the first and second diaphragms 61 and 62 are coupled to the receiving hole 15 formed in the drive housing 13a. Therefore, the pump chamber 26 and the drive chamber 39 are integrated, and the overall size including the drive pump 11 and the chemical pump 12 can be miniaturized.

However, in the liquid supply apparatuses 10a and 10b according to the first and second embodiments of the prior art 2 described above, the bellows 21, the communication chamber 25, the drive chamber 26, A highly complicated structure including an orifice member 43 in which a plurality of through holes 51 are formed, a valve member 53 and a valve guide 45 must be used and the opening and closing operation of the through hole 51 And so on.

In the liquid supply apparatuses 10a and 10b according to the first and second embodiments of the prior art 2, since the bellows 21 is used, stick slip (perturbation) phenomenon occurs when the indirect liquid is supplied, It is difficult to discharge and quantitatively discharge.

In the liquid supply apparatuses 10a and 10b according to the first and second embodiments of the prior art 2, the communication chamber 25 and the drive chamber 26 are separated from each other so that when the bellows 21 is moved forward and backward The indirect liquid moves through the plurality of through holes 51 formed in the orifice member 43 and the fine communication gap 44 that allows the pump chamber 26 and the communication chamber 25 to communicate with each other, And a positive quantitative / constant velocity deviation in which the indirect liquid is supplied into the drive chamber 37 is generated, and it is difficult to obtain a quick pressure response characteristic.

In the liquid supply apparatuses 10a and 10b according to the first and second embodiments of the prior art 2, the bellows 21 is used, and the discharge pressure of the chemical liquid obtained by using the bellows 21 is relatively high Which is a problem in that it is difficult or impossible to use especially for discharging a high viscosity chemical liquid.

Further, in the liquid supply apparatuses 10a, 10b according to the first and second embodiments of the prior art 2, since a very complicated structure is used as described above, maintenance is difficult, troubles frequently occur, A problem arises.

Therefore, a new method for solving the above-mentioned problems is required.

1. Korean Patent Publication No. 10-2003-0048515 2. Korean Patent Publication No. 10-2011-0117023

Disclosure of Invention Technical Problem [8] The present invention has been made to solve the above problems of the prior art, and it is an object of the present invention to provide a pressurizing device for pumping a chemical liquid having a cup member, Provided is an improved pressurizing device and method for pumping a chemical liquid by supplying an indirect liquid into a chemical liquid pumping device and elastically deforming a tube in the chemical liquid pumping device to precisely control the supply amount of the chemical liquid, and a chemical liquid supply device and method .

According to a first aspect of the present invention, there is provided a pressurizing apparatus for pumping a chemical liquid, comprising: a second housing having an indirect liquid chamber in which an indirect liquid is received; A piston provided in the second housing for pressurizing the indirect fluid; A cup member mounted in close contact with the outside of the piston; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod, wherein an end of the cup member is fixedly mounted inside the second housing, and the cup member has elasticity in the axial direction of the piston An outer elastic member which is elastically deformable so that the piston can be elastically deformed in the circumferential direction of the piston and an inner reinforcing member which is attached to the outer elastic member inside the outer elastic member.

A liquid medicament supply device according to a second aspect of the present invention includes a liquid medicament pumping device, and a medicament pumping device connected to the medicament pumping device, wherein the medicament pumping device includes: a first housing having a pressure chamber therein; A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid; A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution; A second housing provided in the pressurizing chamber of the first housing and including a tube to which the chemical liquid is supplied, the pressurizing device for pumping chemical liquid includes a indirect liquid chamber in which the indirect liquid is received; A connecting member for communicating the pressure chamber and the indirect liquid chamber; A piston provided in the second housing for pressurizing the indirect fluid; A cup member mounted in close contact with the outside of the piston; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod, wherein an end of the cup member is fixedly mounted inside the second housing, and the cup member has elasticity in the axial direction of the piston An outer elastic member which is elastically deformable so that the piston can be elastically deformed in the circumferential direction of the piston and an inner reinforcing member which is attached to the outer elastic member inside the outer elastic member.

A third aspect of the present invention is a method for pressurizing a chemical liquid, comprising the steps of: a) advancing a piston having a cup member mounted in close contact with the outside in a second housing to generate an indirect liquid in an indirect liquid chamber ; And b) releasing the pressure of the indirect liquid in the indirect liquid chamber by moving the piston back in the second housing, wherein an end of the cup member is fixedly mounted inside the second housing, The cup member is embodied as an outer elastic member which is elastically deformable and an inner reinforcing member which is attached to the outer elastic member from the inside of the outer elastic member so that there is no elastic deformation in the axial direction of the piston, Elastic deformation is possible, so that a constant amount and a constant speed deviation do not occur when the indirect liquid is pressurized.

A liquid pumping method according to a fourth aspect of the present invention comprises the steps of: a) introducing a liquid medicine contained in a chemical liquid tank connected to one side of a first housing into a tube provided in the first housing through a chemical liquid inlet; b) a piston having a cup member mounted in close contact with the outside is moved forward in the second housing to pressurize the indirect liquid in the indirect liquid chamber provided in the second housing to transfer the indirect liquid from the indirect liquid chamber 1 into a pressurization chamber formed outside the tube within the housing; c) a volume of the tube is reduced by the indirect liquid supplied into the pressurizing chamber, so that the chemical liquid is discharged from the tube through a chemical liquid discharge port to a nozzle device connected to the other side of the first housing; And d) moving the piston back in the second housing to cause the indirect liquid to flow out of the pressure chamber into the indirect liquid chamber, wherein an end of the cup member is fixedly mounted in the interior of the second housing And the cup member is embodied as an outer elastic member which is elastically deformable and an inner reinforcing member which is attached to the outer elastic member from the inside of the outer elastic member so that there is no elastic deformation in the axial direction of the piston, Elastic deformation is possible, and a constant amount and a constant speed deviation do not occur when the indirect liquid is pressurized.

INDUSTRIAL APPLICABILITY By using the improved pressurizing device and method for pumping chemical fluids according to the present invention and the chemical liquid supply device and method having the same, the following advantages are achieved.

1. The configuration of the pressurizing device for pumping chemical fluids is very simple.

2. Stick slip (sticking) and quantitative / constant deviation do not occur during the supply of indirect liquid, so it is possible to fine discharge, quantitatively discharge and rapidly form a chemical liquid on a substrate such as a glass.

3. It is very easy to cope with the outer diameter of the piston and the inner diameter change of the housing in which the piston is mounted.

4. Especially, it is possible to form a high pressure of 3,000kPa (kilo pascal) by the chemical liquid discharge pressure, and it is possible to dispense a high viscosity liquid medicine in a fixed quantity.

5. Maintenance is very easy and the possibility of failure is remarkably low, thereby prolonging the service life remarkably.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1 is a cross-sectional view of a chemical liquid supply apparatus of the prior art 1;
2A is a cross-sectional view of a liquid supply apparatus according to the prior art 2. Fig.
2B is a partially enlarged sectional view of the liquid supply apparatus shown in FIG. 2A.
2C is a cross-sectional view of the AA line of the liquid supply apparatus shown in FIG. 2B.
2D is a partial cross-sectional view of the liquid supply apparatus according to the second embodiment of the prior art 2. Fig.
FIG. 3A is a view illustrating an improved pressurizing device for pumping chemical liquids and a chemical liquid supply device having the same according to an embodiment of the present invention.
FIG. 3B is a detailed view of an improved pressurizing device for pumping chemical fluids according to an embodiment of the present invention shown in FIG. 3A.
FIGS. 3C and 3D are schematic cross-sectional views for explaining the operation of the pressurizing device for improved chemical fluid pumping according to an embodiment of the present invention shown in FIG. 3B.
FIG. 3E is an enlarged cross-sectional view of a portion (S portion) of the improved pressurizing device for pumping chemical fluids according to an embodiment of the present invention shown in FIG. 3D.
FIG. 3F is a view showing a cup member used in an improved pressurizing device for pumping chemical fluids according to an embodiment of the present invention.
FIG. 4A is a flowchart showing a pressurization method for pumping a chemical liquid according to an embodiment of the present invention. FIG.
4B is a flowchart showing a method of supplying a chemical solution according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments and drawings of the present invention.

FIG. 3A is a view showing an improved pressurizing device for pumping a chemical liquid according to an embodiment of the present invention and a chemical liquid supply device having the same, and FIG. 3B is a cross- FIGS. 3C and 3D are schematic cross-sectional views for explaining the operation of the pressurizing apparatus for pumping an improved chemical solution according to an embodiment of the present invention shown in FIG. 3B, and FIG. 3E is a cross- Sectional view of a portion (S portion) of the improved pressurizing device for pumping chemical fluids according to an embodiment of the present invention shown in Fig.

3A to 3D, a pressurizing device 330 for pumping a drug solution according to an embodiment of the present invention includes a drug solution pumping device 301 and a drug solution pumping device 301 connected to the drug solution pumping device 301 330), the chemical pumping device (301) comprising: a first housing (304) having a pressure chamber (305) therein; A chemical liquid inlet 310 provided at one side of the first housing 304 and connected to a chemical liquid tank 318 for containing a chemical liquid; A chemical solution discharge port (319) provided on the other side of the first housing (304) and connected to a nozzle device (320) for discharging and applying the chemical solution; The chemical liquid pumping device 330 is provided in the pressurizing chamber 305 of the first housing 304 and includes a tube 306 to which the chemical liquid is supplied, A second housing 335 having a liquid chamber 333; A connecting member 332 for communicating the pressurizing chamber 305 and the indirect liquid chamber 333; A piston (336) provided in the second housing (335) for pressing the indirect liquid (331); A cup member 334 mounted in close contact with the outside of the piston 336; A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338. The end of the cup member 334 is fixed to the inside of the second housing 335 And the cup member 334 is elastically deformable in the axial direction of the piston 336 and elastically deformable in the circumferential direction of the piston 336. The outer elastic member 334a, And an inner reinforcing member 334b attached to the outer elastic member 334a on the inner side of the outer elastic member 334a. Here, the cup member 334 may be made of a resin material that is elastically deformable in the axial direction of the piston 336 and elastically deformable in the circumferential direction of the piston 336. [

The pressurizing device 330 for pumping a drug solution according to an embodiment of the present invention includes a frame 342 to which the second housing 335 is fixedly mounted; And a guide member 344 provided on the frame 342 and guiding the linear movement of the piston rod 338. [

The chemical liquid supply device 300 according to an embodiment of the present invention includes a chemical liquid pumping device 301 and a chemical liquid pumping device 330 connected to the chemical liquid pumping device 301, The apparatus 301 includes a first housing 304 having a pressure chamber 305 therein; A chemical liquid inlet 310 provided at one side of the first housing 304 and connected to a chemical liquid tank 318 for containing a chemical liquid; A chemical solution discharge port (319) provided on the other side of the first housing (304) and connected to a nozzle device (320) for discharging and applying the chemical solution; The chemical liquid pumping device 330 is provided in the pressurizing chamber 305 of the first housing 304 and includes a tube 306 to which the chemical liquid is supplied, A second housing 335 having a liquid chamber 333; A connecting member 332 for communicating the pressurizing chamber 305 and the indirect liquid chamber 333; A piston (336) provided in the second housing (335) for pressing the indirect liquid (331); A cup member 334 fixedly mounted inside the second housing 335 and closely attached to the outside of the piston 336; A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338. The cup member 334 is elastically deformed in the axial direction of the piston 336 And is elastically deformable in a circumferential direction of the piston (336). Here, the cup member 334 may be made of a resin material that is elastically deformable in the axial direction of the piston 336 and elastically deformable in the circumferential direction of the piston 336. [

Hereinafter, specific configurations and operations of the pressurizing device 330 for pumping a chemical liquid and the chemical liquid supply device 300 having the pressurizing device 330 will be described in detail.

3A to 3D, a chemical liquid supply apparatus 300 according to an embodiment of the present invention includes a chemical liquid pumping apparatus 301 and a chemical liquid pumping apparatus 330 connected to the chemical liquid pumping apparatus 301 ). In this case, the chemical liquid pumping device 301 and the chemical liquid pumping device 330 may be detachable from each other or may be integrally connected to each other.

First, the chemical liquid pumping device 301 has a first housing 304 having a pressurizing chamber 305 therein. A chemical solution inlet 310 is provided at one side of the first housing 304, and a chemical solution discharge port 319 is provided at the other side. The chemical liquid inlet port 310 is connected to a chemical liquid tank 318 for containing a chemical liquid and a first opening and closing valve 321 for opening and closing the chemical liquid inlet port 310 is provided between the chemical liquid inlet port 310 and the chemical liquid tank 318 / RTI > The chemical liquid discharge port 319 is connected to the nozzle device 320 for discharging and applying the chemical liquid and is provided between the chemical liquid discharge port 319 and the nozzle device 320. The second open / (322) are provided.

The above-described first and second open / close valves 321 and 322 are not necessarily used as options. The first and second open / close valves 321 and 322 may be implemented as a solenoid valve operated by an electrical signal, an air operated valve operated by air pressure, or check valves.

In addition, the chemical liquid pumping device 301 has a tube 306 provided in the pressurizing chamber 305 of the first housing 304. The tube 306 can be resiliently deformed by a pressurizing and depressurizing operation of the indirect liquid 331 by the pressurizing device 330 for pumping the chemical liquid as described later with the passage through which the chemical liquid is supplied.

On the other hand, the pressurizing device 330 for pumping the chemical liquid includes a second housing 335 having an indirect liquid chamber 333 in which the indirect liquid 331 is accommodated. The second housing 335 and the indirect liquid chamber 333 may be provided separately and combined or may be embodied as one body. The pressurizing chamber 305 and the indirect liquid chamber 333 are connected by a connecting member 332 so as to be in fluid communication with each other.

In addition, the piston 336 provided in the second housing 335 can pressurize the indirect liquid 331. A cup member 334 is closely attached to the outside of the piston 336 (that is, the cup member 334 overlaps the outside of the piston 336). The end of the cup member 334 is fixedly mounted inside the second housing 335. Further, a piston rod 338 is connected to the piston 336 to move the piston 336 in the axial direction (advancing direction and reverse direction). The piston rod 338 is connected to the driving member 340 and the piston rod 338 is driven by the driving member 340.

In addition, the second housing 335 of the pressurizing device 330 for pumping a chemical liquid according to an embodiment of the present invention can be fixedly mounted to the frame 342. [ A guide member 344 is provided on the frame 342 to guide the linear movement of the piston rod 338. [

In an embodiment of the present invention described above, the cup member 334 has no elastic deformation in the axial direction of the piston 336 and is elastically deformable in the circumferential direction of the piston 336. [ As a result, when the piston 336 moves along the axial direction in the second housing 335, the cup member 334 contacts the entirety of the cylindrical portion of the piston 336 with the whole adhesion state (WAS) State (i.e., some partial adhesion state (PAS)).

More specifically, FIG. 3F is a view showing a cup member used in an improved pressurizing device for pumping chemical fluids according to an embodiment of the present invention.

Referring to FIG. 3F, the cup member 334 used in the improved pressurizing device 330 for pumping chemical solution according to an embodiment of the present invention includes an elastically deformable outer elastic member 334a, And an inner reinforcing member 334b attached to the outer elastic member 334a on the inner side of the outer elastic member 334a. Here, the outside refers to the portion in contact with the indirect liquid 331, and the inside refers to the portion in contact with the piston 336. [ As the outer elastic member 334a, for example, a resin material or a rubber material (specifically, EPDM (ethylene propylene diene monomer)) may be used. As the inner reinforcing member 334b, for example, material can be used. This cloth material prevents elastic deformation of the outer elastic member 334a in the axial direction of the piston 336 due to the grain direction of the cloth but enables elastic deformation in the circumferential direction of the piston 336. [

As described above, since the cup member 334 used in the advanced chemical liquid pumping device 330 according to the embodiment of the present invention is not elastically deformed in the axial direction and the pressure loss is minimized, the pressure of the indirect liquid 331 The reactivity is greatly improved. The cup member 334 has an end fixedly mounted inside the second housing 335 and elastically deformable in the circumferential direction of the piston 336 so that the piston 336 can be elastically deformed in the second housing 335 A tensile force is generated along the circumferential direction of the piston 336 to relieve the stress on the folded portion FP of the cup member 334. [ The lifetime of the cup member 334 and thus the service life of the pressurizing device 330 for pumping the chemical liquid and the life of the chemical liquid supply device 300 are remarkably increased.

When the piston 336 advances along the second housing 335 (the state shown in FIG. 3C), the indirect liquid 331 is pressurized so that the indirect liquid 331 in the indirect liquid chamber 333 flows into the connecting member 332, Into the pressurizing chamber 305 in the chemical liquid application device 301. [ The indirect liquid 331 pressurizes the tube 304 to decrease the volume of the tube 306 and the chemical liquid is discharged from the tube 306 to the nozzle device 320. [ Thereafter, when the piston 336 moves backward along the second housing 335 (the state shown in FIG. 3D), the indirect liquid 331 flows from the pressurizing chamber 305 through the connecting member 332 to the indirect liquid chamber 333, Lt; / RTI > As a result, the pressurized state of the tube 304 is released (that is, the pressure is reduced), the volume of the tube 306 is increased, and the chemical liquid flows into the tube 306 from the chemical liquid tank 318. By repeating this operation, the chemical liquid can be continuously discharged from the chemical liquid tank 318 through the tube 306 to the nozzle device 320 by the indirect liquid 331. [

As described above, in the embodiment of the present invention, the cup member 334 is closely attached to the outside of the piston 336, so that when the piston 336 is moved forward or backward, the stick slip phenomenon So that the microbial discharge and the fixed discharge can be performed because no vibration occurs in the chemical liquid discharge.

In addition, since the cup member 334 does not contract or expand along the axial direction of the piston 336 during the forward movement and backward movement of the piston 336, the pressure reactivity of the indirect liquid 331 is remarkably improved , The constant amount and constant speed deviation due to the pressurization of the indirect liquid 331 do not occur, and a rapid pressure forming effect can be obtained.

Since the cup member 334 does not elastically deform in the axial direction of the piston 336 and elastically deforms in the circumferential direction, the outer diameter of the piston 336 and the correspondence to the inner diameter change of the second housing 335 This is possible.

In addition, compared with the case of using the bellows of the prior art, it is possible to form a chemical liquid discharge pressure of up to 3,000 kPa, whereby a high-viscosity chemical liquid can be dispensed at a fixed rate.

As described above, the life of the cup member 334 and the lifetime of the pressurizing device 330 for pumping the chemical liquid and the life of the chemical liquid supply device 300 can be shortened, Lt; / RTI >

FIG. 4A is a flowchart showing a pressurization method for pumping a chemical liquid according to an embodiment of the present invention. FIG.

Referring to FIG. 4A, with reference to FIGS. 3A through 3F, a pressurizing method 400 for pumping a chemical liquid according to an embodiment of the present invention includes a) a piston 336 having a cup member 334 mounted in close contact with the outside, (410) moving the second housing (335) in the second housing (335) so as to pressurize the indirect liquid (331) in the indirect liquid chamber (333) provided in the second housing (335); And b) relieving the piston (336) in the second housing (335) to relieve pressure of the indirect fluid (331) in the indirect fluid chamber (333), wherein the cup An outer elastic member 334a which is fixed to the inside of the second housing 335 and has an end portion of the member 334 fixed to the inside of the second elastic member 334 and the cup member 334 is elastically deformable, The piston 336 is elastically deformed in the circumferential direction of the piston 336 without being elastically deformed in the axial direction of the piston 336 by being implemented as an internal reinforcement member 334b attached to the outer elastic member 334a, The constant amount and the constant speed deviation do not occur when the liquid 331 is pressurized.

The method 400 for pressurizing the pumping fluid according to an embodiment of the present invention may further include repeating the steps a) and b).

4B is a flowchart showing a method of supplying a chemical solution according to an embodiment of the present invention.

Referring to FIG. 4B, with reference to FIGS. 3A through 3F, a chemical solution supply method 400 according to an embodiment of the present invention includes: a) supplying a chemical solution contained in a chemical solution tank 318 connected to one side of the first housing 304 (411) into the tube (306) provided in the first housing (304) through the chemical liquid inlet (310); b) a piston 336 having a cup member 334 mounted in close contact with the outside is moved forward in the second housing 335 so that the indirect liquid chamber 333 provided in the second housing 335, Pressurizing the liquid 331 to supply the indirect liquid 331 from the indirect liquid chamber 333 into the pressurizing chamber 305 formed outside the tube 306 in the first housing 304 421); the volume of the tube 306 is reduced by the indirect liquid 331 supplied into the pressurizing chamber 305 so that the chemical liquid is discharged from the tube 306 through the chemical liquid discharge port 320 to the first housing 304 to the nozzle device 320 connected to the other side of the nozzle device 320; D) moving the piston 336 backward in the second housing 335 to cause the indirect liquid 331 to flow out of the pressure chamber 305 into the indirect liquid chamber 333 Wherein an end portion of the cup member 334 is fixedly mounted in the second housing 335 and the cup member 334 is elastically deformable between an outer elastic member 334a and an outer elastic member 334a And an inner reinforcement member 334b attached to the outer elastic member 334a on the inner side of the piston 336. The piston 336 is elastically deformed in the axial direction and elastically deformed in the circumferential direction of the piston 336 Therefore, the constant amount and the constant speed deviation do not occur when the indirect liquid 331 is pressurized.

The chemical liquid supply method 401 according to the embodiment of the present invention may further include repeating the steps a) to d) until the chemical liquid is discharged through the nozzle device 320 and exhausted .

Also, in the chemical liquid supply method 401 according to the embodiment of the present invention, the maximum discharge pressure of the chemical liquid may be 3,000 kPa.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

10a, 10b, 100, 300: liquid supply device 11: drive pump
12: pump drive / chemical pump 13: flexible tube / housing
14: bellows / driving unit 15: adapter part / receiving hole 16: adapter part / closing wall
17: supply passage / opening portion 18: chemical tank / driving rod 19:
20,330: nozzle device 21: opening / closing valve / bellows 22: opening / closing valve /
23: operation disc portion / end plate portion 24: small bellows portion
25: large bellows part / communication chamber 26: pump chamber 37,306: tube
42: pump chamber / valve holding part 43: indirect liquid / orifice member 44:
45: valve guide 51: through hole 52: guide portion 53: valve member
54a: auxiliary clearance 56a: valve receiving surface 61, 62: diaphragm
301: chemical liquid pumping device 305: pressure chamber 304: first housing
310: chemical liquid inlet 318: chemical liquid tank 319: chemical liquid outlet
321, 322: opening / closing valve 330: pressurizing device for pumping chemical liquid 331:
332: connecting member 333: indirect liquid chamber 334: cup member
334a: outer elastic member 334b: inner reinforcing member 335: second housing
336: piston 338: piston rod 340: drive member
342: frame 344: guide member

Claims

A pressurizing device for pumping a chemical liquid,
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A piston provided in the second housing for pressurizing the indirect fluid;
A cup member mounted in close contact with the outside of the piston;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
/ RTI >
An end of the cup member is fixedly mounted inside the second housing,
Wherein the cup member includes an outer elastic member which is elastically deformable so as to be elastically deformable in the circumferential direction of the piston without elastic deformation in the axial direction of the piston, and an outer elastic member which is attached to the outer elastic member from the inside of the outer elastic member And is implemented as an internal reinforcing member
Pressurizing device for chemical liquid pumping.

The method according to claim 1,
The chemical liquid pumping pressure device
A frame to which the second housing is fixedly mounted; And
A guide member provided on the frame and guiding a linear movement of the piston rod,
Further comprising a pressure sensor for pumping the chemical liquid.

The method according to claim 1,
Wherein the second housing and the indirect liquid chamber are separately provided and combined or integrally embodied.

The method according to claim 1,
Wherein the outer elastic member is made of EPDM (ethylene propylene diene monomer), and the inner reinforcing member is a cloth material.

In the chemical liquid supply device,
A chemical liquid pumping device, and a chemical liquid pumping device connected to the chemical liquid pumping device,
The chemical liquid pumping device
A first housing having a pressurizing chamber therein;
A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid;
A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution;
A first housing provided in the pressure chamber of the first housing,
Lt; / RTI >
The chemical liquid pumping pressure device
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A connecting member for communicating the pressure chamber and the indirect liquid chamber;
A piston provided in the second housing for pressurizing the indirect fluid;
A cup member mounted in close contact with the outside of the piston;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
/ RTI >
An end of the cup member is fixedly mounted inside the second housing,
Wherein the cup member includes an outer elastic member which is elastically deformable so as to be elastically deformable in the circumferential direction of the piston without elastic deformation in the axial direction of the piston, and an outer elastic member which is attached to the outer elastic member from the inside of the outer elastic member And is implemented as an internal reinforcing member
A chemical liquid supply device.

6. The method of claim 5,
Wherein the chemical liquid pumping device and the chemical liquid pumping pressure device are detachably or integrally connected to each other.

6. The method of claim 5,
The chemical liquid pumping pressure device
A frame to which the second housing is fixedly mounted; And
A guide member provided on the frame and guiding a linear movement of the piston rod,
Further comprising:

6. The method of claim 5,
Wherein the second housing and the indirect liquid chamber are separately provided and combined or integrally embodied.

6. The method of claim 5,
Wherein the chemical liquid inlet has a first open / close valve, and the chemical liquid discharge port has a second open / close valve.

6. The method of claim 5,
Wherein the outer elastic member is made of EPDM (ethylene propylene diene monomer), and the inner reinforcing member is made of cloth material.

A pressurization method for pumping a chemical liquid,
a) advancing a piston having a cup member mounted in close contact with an outside in a second housing to pressurize an indirect liquid in an indirect liquid chamber provided in the second housing; And
b) moving the piston back in the second housing to relieve pressure of the indirect fluid in the indirect fluid chamber
, &Lt; / RTI &
An end of the cup member is fixedly mounted inside the second housing,
The cup member is embodied as an outer elastic member which is elastically deformable and an inner reinforcing member which is attached to the outer elastic member from the inside of the outer elastic member so that there is no elastic deformation in the axial direction of the piston, Elastic deformation is possible, and a constant amount and a constant speed deviation do not occur at the time of pressurization of the indirect liquid
Pressurization method for chemical liquid pumping.

In the chemical liquid supply method,
a) introducing a chemical liquid contained in a chemical liquid tank connected to one side of the first housing into a tube provided in the first housing through a chemical liquid inlet;
b) a piston having a cup member mounted in close contact with the outside is moved forward in the second housing to pressurize the indirect liquid in the indirect liquid chamber provided in the second housing to transfer the indirect liquid from the indirect liquid chamber 1 into a pressurization chamber formed outside the tube within the housing;
c) a volume of the tube is reduced by the indirect liquid supplied into the pressurizing chamber, so that the chemical liquid is discharged from the tube through a chemical liquid discharge port to a nozzle device connected to the other side of the first housing; And
d) retracting said piston in said second housing to cause said indirect fluid to flow out of said pressure chamber into said indirect fluid chamber
, &Lt; / RTI &
An end of the cup member is fixedly mounted inside the second housing,
The cup member is embodied as an outer elastic member which is elastically deformable and an inner reinforcing member which is attached to the outer elastic member from the inside of the outer elastic member so that there is no elastic deformation in the axial direction of the piston, Elastic deformation is possible, and a constant amount and a constant speed deviation do not occur at the time of pressurization of the indirect liquid
A method for supplying a chemical solution.

13. The method of claim 12,
Wherein the chemical liquid supply method further comprises repeating the steps a) to d) until the chemical liquid is discharged through the nozzle apparatus and exhausted.