KR101763121B1 - An Improved Device for Pressing Chemical Liquids, and A Feeding Apparatus of Chemical Liquids Having the Same - Google Patents

An Improved Device for Pressing Chemical Liquids, and A Feeding Apparatus of Chemical Liquids Having the Same Download PDF

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Publication number
KR101763121B1
KR101763121B1 KR1020160024661A KR20160024661A KR101763121B1 KR 101763121 B1 KR101763121 B1 KR 101763121B1 KR 1020160024661 A KR1020160024661 A KR 1020160024661A KR 20160024661 A KR20160024661 A KR 20160024661A KR 101763121 B1 KR101763121 B1 KR 101763121B1
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KR
South Korea
Prior art keywords
indirect
piston
housing
indirect liquid
pressure
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Application number
KR1020160024661A
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Korean (ko)
Inventor
이기철
변성근
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주식회사 나래나노텍
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1026—Valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Abstract

The present invention provides an improved chemical pressing device and a chemical supplying device comprising the same. The chemical pressing device according to the present invention comprises: a second housing for having an indirect solution chamber which accommodates an indirect solution; a piston which is provided in the second housing and presses the indirect solution; a bellows which is connected to an outer side of a lower part in the piston and to the second housing, and is capable of elastically transforming in the axial direction of the piston; an inner housing which is provided between an outer lateral surface of the piston and an inner lateral surface of the second housing in order to form a second indirect solution chamber between the outer lateral surface of the piston and the second housing; an indirect solution flowing path which is provided between an outer lateral surface of the inner housing and the inner lateral surface of the second housing, and is formed to flow the indirect solution between the indirect solution chamber and the second indirect solution chamber; a first indirect solution flowing control device which is provided in the inside of the indirect solution flowing path, and controls movements of the indirect solution through the indirect solution flowing path; a piston rod which is connected to the piston and moves the piston to the axial direction; and a driving member which is connected to the piston rod and drives the piston rod.

Description

TECHNICAL FIELD [0001] The present invention relates to an improved chemical liquid pressurizing apparatus and a chemical liquid supplying apparatus having the same,

The present invention relates to an improved chemical liquid pressurizing apparatus and a chemical liquid supply apparatus having the same.

More specifically, the present invention relates to a method of controlling a pressure of an indirect fluid by a piston and a bellows, reducing the volume of the tube by increasing the pressure of the indirect fluid at the time of advancing the piston, The pressure and speed of the indirect fluid inside the bellows can be controlled by using the indirect fluid flow regulator to prevent the compression of the bellows and the pressure rise by moving the indirect fluid inside the bellows to the indirect fluid chamber when the piston moves back through the fluid flow control device. To an improved chemical liquid pressure device capable of ultimately improving the responsiveness of a chemical liquid supply device, and a chemical liquid supply device having the same.

Generally, in order to manufacture a semiconductor wafer, a magnetic disk, a multilayer wiring board, a PDP, an LCD, or an OLED, a photoresist solution, a spinion glass solution, a polyimide solution ), Pure water, developer, etchant, organic solvent, and coating liquids (hereinafter referred to as "chemical liquid"). Various chemical liquid supply devices for supplying such chemical liquids are used.

One of the chemical liquid pumping apparatus and the chemical liquid supply apparatus having the chemical liquid pumping apparatus described above was filed in Korean Patent Application No. 10-2001-0078429 under the name of invention as a chemical liquid supply apparatus as of December 12, Korean Patent Laid-Open No. 10-2003-0048515 (hereinafter referred to as " Prior Art 1 "), which is published on May 25,

1 is a cross-sectional view of a chemical liquid supply apparatus of the prior art 1;

Referring to FIG. 1, the chemical liquid supply apparatus 100 of the prior art 1 includes a drive pump 11 and a pump drive unit 12. The drive pump 11 includes a flexible tube 13 formed by an elastic member and capable of elastic expansion and contraction in the radial direction and a flexible tube 13 disposed outside the flexible tube 13 and formed by an elastic member, And a bellows 14 that can be deformed. Adapters 15 and 16 are attached to both ends of the flexible tube 13 and a supply passage 17 is connected to the one adapter portion 15. The supply passage 17 is connected to a chemical liquid tank (Not shown). A discharge passage 19 is connected to the other adapter section 16 and the discharge passage 19 is connected to a nozzle device 20 for discharging and applying a chemical liquid. The supply passage 17 is provided with a supply side opening and closing valve 21 for opening and closing the supply passage 17 and a discharge side opening and closing valve 22 for opening and closing the discharge passage 19 is provided in the discharge passage 19 . As each of the opening and closing valves 21 and 22, a solenoid valve operated by an electric signal, an air operated valve operated by air pressure or check valves may be used.

On the other hand, the bellows 14 includes a small bellows portion 24 integrally formed with the operation disk portion 23 and the operation disk portion 23 at the axially central portion and having the first effective diameter d, And a second effective diameter D of an inner diameter larger than an effective diameter d of the small bellows portion 24 and formed integrally with the small bellows portion 24 through the second bellows portion 23 do. That is, the large bellows portion 25 has a larger cross-sectional area than the small bellows portion 24. The first and second effective diameters d and D mean the average inner diameters of the respective bellows 24 and 25 when the small bellows portion 24 and the large bellows portion 25 are expanded and contracted. The space between the flexible tube 13 and the bellows 14 constitutes a pump chamber 42. The pump chamber 42 is filled with an indirect liquid 43 which is an incompressible medium such as liquid. Therefore, when the bellows 14 is elastically deformed in the axial direction in the operating disc portion 23 at the center portion, the entire length of the bellows 14 does not change and the inner diameter of the small bellows portion 24 and the large bellows portion 25 The volume changes. In this way, the flexible tube 13 expands or contracts in the radial direction through the indirect liquid 43, causing the flexible tube 13 to perform the pump operation.

However, it is difficult to precisely control the amount of change in the volume of the flexible tube 13 due to a change in pressure, which makes it difficult to precisely apply a chemical liquid to a predetermined amount, and 2) (14) requires a long installation time in order to precisely adjust left and right flatness, (3) the structure is complicated, (4) the flow rate of the chemical liquid in the flexible tube (13) (5) the maintenance of the chemical liquid supply device (100) is complicated and takes a long time, (6) the life span is short, and the like .

One of the measures for solving the above-mentioned problems was filed as Korean Patent Application No. 10-2011-0036605 under the name of invention as a chemical liquid supply device on Apr. 20, 2011, 10-2011-0117023 (hereinafter referred to as " Prior art 2 ").

2 is a cross-sectional view of the chemical liquid supply apparatus according to the prior art 2. As shown in Fig.

Referring to FIG. 2, the chemical liquid supply apparatus 10a according to the prior art 2 includes one drive pump 11 and one chemical liquid pump 12. The drive pump 11 has a drive housing 13a and the chemical liquid pump 12 has a chemical liquid housing 13b. The two housings 13a and 13b are integrated to form the housing member 13 and the housing member 13 is attached to the driving unit 14. [ A cylindrical receiving hole 15 is formed inside the driving housing 13a and an end portion of the driving housing 13a is provided with a blockage end closed by a blockage wall 16. [ And the opening 17 is formed at the other end of the drive housing 13a. The driving rod 18 is provided so as to reciprocate linearly inside the driving housing 13a and reciprocates by a driving device (not shown) provided in the driving unit 14. [

What is installed in the drive housing 13a is a bellows 21 which is a pump member. In the bellows 21, when the drive rod 18 reciprocates in the axial direction, the end plate portion 23 is moved in the axial direction together with the drive rod 18, and the accordion- . A communication chamber 25 is formed between the bellows 21 and the inner peripheral surface of the receiving hole 15 of the drive housing 13a. The interior of the bellows 21 communicates with the outside through an escape hole (not shown) formed in the drive unit 14 and an ambient air is introduced into the bellows 21 in accordance with the reciprocating motion of the drive rod 18. [ At the same time, the air inside the bellows 21 is discharged to the outside. Between the end plate portion 23 of the bellows 21 and the closing wall 16 serves as the pump chamber 26 of the drive pump 11 and the inflow and outflow of the indirect liquid is provided between the pump chamber 26 and the communication chamber 26. [ (25). When the driving rod 18 is moved forward, the pump chamber 26 contracts, and the indirect liquid inside the pump chamber 26 is discharged to the outside of the drive housing 13a. On the other hand, when the drive rod 18 is retracted, the pump chamber 26 expands, and the indirect liquid is sucked into the pump chamber 26 from the outside.

However, in the above-described prior art 2, 1) a very complicated structure has to be used, 2) a stick slip (perturbation) phenomenon occurs when an indirect liquid is supplied, and it is difficult to discharge and quantitatively discharge the indirect liquid; and 3) A constant amount / constant deviation of the supply amount occurs, and it is difficult to obtain a quick pressure response characteristic, and (4) the life is short.

Therefore, there is a need for a new method for solving the problems of the above-described conventional techniques.

1. Korean Patent Publication No. 10-2003-0048515 2. Korean Patent Publication No. 10-2011-0117023

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art described above, and it is an object of the present invention to provide a method and an apparatus for reducing the volume of a tube by increasing the pressure of an indirect fluid during a piston advance, Through the indirect fluid flow regulator provided separately between the bellows, the indirect fluid inside the bellows is moved to the indirect fluid chamber when the piston is moved backward to prevent the compression of the bellows and the pressure rise. Also, by using the indirect fluid flow control device, To provide an improved chemical liquid pressure device capable of ultimately improving the responsiveness of the chemical liquid supply device by controlling the pressure and speed of the indirect liquid of the chemical liquid supply device .

A chemical liquid pressurizing apparatus according to a first aspect of the present invention includes: a second housing having an indirect liquid chamber in which an indirect liquid is accommodated; A piston provided in the second housing for pressurizing the indirect fluid; A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston; An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing; An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber; A first indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod.

A chemical liquid pressurizing apparatus according to a second aspect of the present invention includes: a second housing having an indirect liquid chamber in which an indirect liquid is accommodated; A piston provided in the second housing for pressurizing the indirect fluid; A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston; An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing; An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber; A second indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod.

According to a third aspect of the present invention, there is provided a chemical liquid supply apparatus including: a first housing having a pressurizing chamber therein; A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid; A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution; A tube provided in the pressurizing chamber and supplied with the chemical liquid; A second housing having an indirect liquid chamber in which the indirect liquid is accommodated; A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston; An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing; An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber; A first indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod.

According to a fourth aspect of the present invention, there is provided a chemical liquid supply apparatus comprising: a first housing having a pressurizing chamber therein; A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid; A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution; A tube provided in the pressurizing chamber and supplied with the chemical liquid; A second housing having an indirect liquid chamber in which the indirect liquid is accommodated; A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston; An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing; An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber; A second indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage; A piston rod connected to the piston and axially moving the piston; And a driving member connected to the piston rod and driving the piston rod.

INDUSTRIAL APPLICABILITY The following advantages are achieved by using the improved chemical liquid pressure device and the chemical liquid supply device having the same according to the present invention.

1. The compression of the bellows and the pressure rise are prevented by the use of the indirect fluid flow control device.

2. It is possible to adjust the pressure and speed of the indirect fluid inside the bellows, thus preventing overpressure.

3. It is possible to prevent deterioration of the service life of parts constituting the chemical liquid supply device.

4. The response of the chemical liquid supply device is greatly improved.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1 is a cross-sectional view of a chemical liquid supply apparatus of the prior art 1;
2 is a cross-sectional view of the chemical liquid supply device according to the prior art 2. Fig.
FIG. 3A is a schematic cross-sectional view of a pressurizing device for pumping a drug solution and a drug solution supply device having the pressurizing device according to an embodiment of the present invention.
FIG. 3B is a schematic view of a chemical liquid pressurizing apparatus according to an embodiment of the present invention shown in FIG. 3A, and a chemical liquid supply apparatus having the chemical liquid pressurizing apparatus according to the present invention, Sectional view of the pressurizing device and a partial detail view of the case where the first indirect liquid flow regulating device is closed.
FIG. 3c is a schematic diagram of a chemical liquid pressurizing apparatus according to an embodiment of the present invention shown in FIG. 3a, and a chemical liquid supply apparatus having the chemical liquid pressurizing apparatus according to the present invention, Sectional view of the pressurizing device and a partial detail view when the first indirect liquid flow regulating device is opened.
FIG. 3D is a graph showing the pressure distribution depending on the presence or absence of the first indirect liquid flow control device in the chemical liquid pressurizing device and the chemical liquid feeder having the chemical liquid pressurizing device according to the embodiment of the present invention shown in FIG. 3A to FIG. 3C.
FIG. 3E is a schematic view of a chemical liquid pressurizing apparatus according to an embodiment of the present invention shown in FIG. 3A, and a chemical liquid supply apparatus having the chemical liquid pressurizing apparatus according to the present invention, A cross-sectional view of the pressurizing device, and a partial detail view when the second indirect liquid flow regulating device is closed.
FIG. 3F is a schematic diagram of a chemical liquid pressurizing apparatus according to an embodiment of the present invention shown in FIG. 3A, and a chemical liquid supply apparatus having the chemical liquid pressurizing apparatus according to the second embodiment of the present invention, Sectional view of the pressurizing device and a partial detail view of the second indirect liquid flow regulating device when the second indirect liquid flow regulating device is opened.
FIGS. 3G and 3H are views showing a method of adjusting the origin position of the piston according to the pressure difference occurring in the chemical liquid pressure applying device provided with the second indirect liquid flow adjusting device according to the second embodiment of the present invention shown in FIGS. 3E and 3F Fig.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments and drawings of the present invention.

FIG. 3A is a schematic cross-sectional view of a pressurizing device for pumping a chemical liquid according to an embodiment of the present invention and a chemical liquid supply device having the pressurizing device, and FIG. 3B is a cross-sectional view of the chemical liquid pressurizing device according to an embodiment of the present invention shown in FIG. Sectional view of a chemical liquid pressure device having a first indirect liquid flow control device according to a first embodiment of the present invention which can be applied to a chemical liquid supply device provided therein and a partial detail drawing when the first indirect liquid flow control device is closed And FIG. 3C is a schematic diagram illustrating a first indirect fluid flow control device according to a first embodiment of the present invention, which can be applied to the chemical fluid pressure device and the chemical liquid supply device having the chemical fluid pressure device according to the embodiment of the present invention shown in FIG. 3A FIG. 3B is a cross-sectional view of the chemical liquid pressure applying device according to the embodiment of the present invention shown in FIGS. 3A to 3C, and FIG. 3D is a partial detail view when the first indirect liquid flow adjusting device is opened. Pressure apparatus and is a graph showing the pressure distribution in the liquid supply device according to claim 1 comprising the presence of an indirect fluid flow control device having the same.

Referring to FIGS. 3A to 3D, a chemical liquid pressurizing apparatus 301 according to a first embodiment of the present invention includes a second housing 335 having an indirect liquid chamber 333 in which indirect liquid is accommodated; A piston (336) provided in the second housing (335) for pressurizing the indirect fluid; A bellows 334 connected to the outer side of the lower end of the piston 336 and to the second housing 335 and elastically deformable in the axial direction of the piston 336; Between the outer surface of the piston 336 and the inner surface of the second housing 335 so as to form a second indirect liquid chamber 333a between the outer surface of the piston 336 and the second housing 335, An inner housing 335a provided; Is provided between the outer surface of the inner housing 335a and the inner surface of the second housing 335 so that the indirect liquid moves between the indirect liquid chamber 333 and the second indirect liquid chamber 333a An indirect liquid flow passage 333b formed therein; A first indirect liquid flow control device (350) provided in the indirect liquid flow passage (333b) for controlling the movement of the indirect liquid through the indirect liquid flow passage (333b); A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338.

In addition, the chemical liquid supply apparatus 300 according to an embodiment of the present invention includes a first housing 304 having a pressurizing chamber 305 therein; A chemical liquid inlet 310 provided at one side of the first housing 304 and connected to a chemical liquid tank (not shown) for containing the chemical liquid; A chemical solution discharge port (319) provided on the other side of the first housing (304) and connected to a nozzle device (not shown) for discharging and applying the chemical solution; A tube (306) provided in the pressurization chamber (305) and supplied with the chemical liquid; A second housing (335) having an indirect liquid chamber (333) in which indirect liquid is accommodated; A piston (336) provided in the second housing (335) for pressurizing the indirect fluid; A bellows 334 connected to the outer side of the lower end of the piston 336 and to the second housing 335 and elastically deformable in the axial direction of the piston 336; Between the outer surface of the piston 336 and the inner surface of the second housing 335 so as to form a second indirect liquid chamber 333a between the outer surface of the piston 336 and the second housing 335, An inner housing 335a provided; Is provided between the outer surface of the inner housing 335a and the inner surface of the second housing 335 so that the indirect liquid moves between the indirect liquid chamber 333 and the second indirect liquid chamber 333a An indirect liquid flow passage 333b formed therein; A first indirect liquid flow control device (350) provided in the indirect liquid flow passage (333b) for controlling the movement of the indirect liquid through the indirect liquid flow passage (333b); A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338.

Hereinafter, specific configurations and operations of the pressurizing device 301 for pumping a chemical liquid and the chemical liquid supply device 300 having the pressurizing device 301 will be described in detail.

Referring again to FIGS. 3A to 3D, the chemical liquid supply apparatus 300 according to the first embodiment of the present invention includes a first housing 304 having a pressurizing chamber 305 therein. A chemical solution inlet 310 is provided at one side of the first housing 304, and a chemical solution discharge port 319 is provided at the other side. The chemical liquid inlet port 310 is connected to a chemical liquid tank (not shown) for containing the chemical liquid and a first open / close valve 321 for opening and closing the chemical liquid inlet port 310 is provided between the chemical liquid inlet port 310 and the chemical liquid tank . The chemical liquid discharge port 319 is connected to a nozzle device (not shown) for discharging and applying the chemical liquid. A second open / close valve 322 for opening and closing the chemical liquid discharge port 319 is provided between the chemical liquid discharge port 319 and the nozzle device Is provided. The above-described first and second open / close valves 321 and 322 are not necessarily used as options. The first and second open / close valves 321 and 322 may be implemented as a solenoid valve operated by an electrical signal, an air operated valve operated by air pressure, or check valves.

The chemical liquid supply apparatus 300 according to the first embodiment of the present invention also includes a tube 306 provided in the pressurizing chamber 305 of the first housing 304. [ The tube 306 can be elastically deformed by a pressurizing and depressurizing operation of the indirect liquid by the chemical fluid pressure device 301 as described later with the passage through which the chemical liquid is supplied.

Further, the chemical liquid supply device 300 according to the first embodiment of the present invention includes a chemical liquid pressure device 301. [ The chemical liquid application device 301 includes a second housing 335 having an indirect liquid chamber 333 in which indirect liquid is received. The second housing 335 and the indirect liquid chamber 333 may be provided separately and combined or may be embodied as one body. The pressurizing chamber 305 and the indirect liquid chamber 333 are connected to each other by a connecting member 332 so as to be in fluid communication with each other.

Further, the piston 336 provided in the second housing 335 can pressurize the indirect liquid. One side of the bellows 334 is connected to the outside of the lower end of the piston 336 and the other side of the bellows 334 is connected to the inside of the second housing 335. A piston rod 338 is connected to the piston 336, and the piston rod 338 is also connected to the driving member 340. The piston 336 connected to the piston rod 338 and the piston rod 338 can be moved in the axial direction (forward direction and backward direction) in the second housing 335 by the driving force of the driving member 340. The bellows 334 can be moved along the axial direction of the piston 336 so as to be elastically deformable.

3C and 3D, the chemical liquid application device 301 of the chemical liquid supply device 300 according to the first embodiment of the present invention may include a first indirect liquid flow adjustment device 300 according to the first embodiment of the present invention, (350). To this end, the chemical liquid application device 301 includes an inner housing 335a provided between the outer surface of the piston 336 and the inner surface of the second housing 335. [ This inner housing 335a forms a second indirect liquid chamber 333a between the outer surface of the piston 336 and the second housing 335. [ An indirect liquid flow passage 333b is provided between the outer surface of the inner housing 335a and the inner surface of the second housing 335 so that the indirect liquid chamber 333 and the second indirect liquid chamber 333a are provided. The indirect liquid can be transferred between the two. The movement of the indirect liquid through the indirect liquid flow passage 333b is controlled by the first indirect liquid flow regulation device 350 provided in the indirect liquid flow passage 333b.

3A to 3C, in the chemical liquid pressure device 301 according to the first embodiment of the present invention, when the piston 336 moves forward (in the case of FIG. 3B), the piston 336 Pressurizes the indirect liquid in the indirect liquid chamber 333 and moves it into the pressurizing chamber 305 through the connecting member 332. [ Accordingly, the chemical liquid in the tube 306 is pressurized by the indirect liquid and supplied to the nozzle device (not shown) through the chemical liquid discharge port 319. Thereafter, when the piston 336 moves backward (in the case of FIG. 3C), the indirect liquid moves from the pressurizing chamber 305 to the indirect liquid chamber 333 through the connecting member 332, The chemical solution is introduced into the tube 306 through the chemical solution inlet 310 connected to the tube 306. Thereafter, the above-described operation is repeated according to the forward movement and the backward movement of the piston 336. [

The indirect liquid moves between the pressurizing chamber 305 and the indirect liquid chamber 333 in accordance with the operation of depressurizing and depressurizing the indirect liquid by using the piston 336 and the bellows 334 as described above, Thereby performing a pumping operation.

However, when the operation of depressurizing and depressurizing the indirect liquid using the piston 336 and the bellows 334 is continuously performed, the sealing member provided between the piston 336 and the second housing 335 / the inner housing 335a, (337) is worn. Thereby, when the piston 336 advances and presses the indirect liquid in the indirect liquid chamber 333, a part of the indirect liquid in the indirect liquid chamber 333 moves into the second indirect liquid chamber 333a. The indirect liquid moved into the second indirect liquid chamber 333a pressurizes the bellows 334 to cause compression and pressure rise and thus to the deformation of the pressure and velocity of the indirect liquid between the bellows 334 and the piston 336 And pressure. As shown in FIG. 3D, when the indirect liquid is pressurized due to the overpressure of the bellows 334, the first pressure P1 in the indirect liquid chamber 333 maintains the normal pressure, and a pressure drop occurs as the time elapses do. Accordingly, when the chemical-liquid pressurizing device 301 of the chemical-liquid supplying device 300 according to the embodiment of the present invention is continuously used, a fixed amount and a constant deviation during chemical liquid discharge occur, The service life of the component including the heater 334 can be shortened.

The above-mentioned problem can be solved or solved by the first indirect liquid flow regulating device 350 according to the first embodiment of the present invention as shown in Figs. 3C and 3D.

3A and 3C, the chemical liquid pressurizing apparatus 301 according to the first embodiment of the present invention also includes a seal member 337 (see FIG. 3B) Is worn, and a part of the indirect liquid in the indirect liquid chamber 333 is moved into the second indirect liquid chamber 333a (see FIG. 3B). However, in this case, the indirect liquid in the second indirect liquid chamber 333a is transferred to the indirect liquid chamber (not shown) by the first indirect liquid flow control device 350 used in the chemical liquid pressure device 301 according to the first embodiment of the present invention 333 so that the first pressure P1 in the indirect liquid chamber 333 maintains the normal pressure as shown in Fig. 3D.

The first indirect liquid flow regulating device 350 used in the chemical liquid pressurizing apparatus 301 according to the first embodiment of the present invention includes an elastic member 352 fixedly installed in the indirect liquid flow passage 333b, And a movable member 354 provided movably in contact with the elastic member 352. Here, it is preferable that the elastic member 352 is realized by a spring, and the movable member 354 is realized by a spherical body, but the present invention is not limited thereto. For example, it should be noted that the movable member 354 can be formed of various materials including a metal material having a shape of a rectangular parallelepiped, a cube, a cone, a polyhedron, or the like, a wood material, and a plastic material.

When the second pressure P2 in the second indirect liquid chamber 333a exceeds a predetermined pressure value (for example, 5Kpa), the first indirect liquid flow regulating device 350 described above, Exceeds the elastic force provided by the elastic member (352), thereby compressing the elastic member (352). As a result, the movable member 354 is moved so that the indirect liquid flow passage 333b is opened (in the case of FIG. 3C) so that the indirect liquid in the second indirect liquid chamber 333a flows indirectly through the indirect liquid flow passage 333b Liquid chamber 333, as shown in FIG. This movement of the indirect liquid continues until the second pressure P2 in the second indirect liquid chamber 333a becomes less than or equal to the elastic force provided by the elastic member 352. [ Thereafter, when the second pressure P2 in the second indirect liquid chamber 333a becomes less than or equal to the elastic force provided by the elastic member 352, the elastic force of the elastic member 352 is transmitted to the movable member 354 through the indirect liquid flow So that the passage 333b is closed. Therefore, even if the sealing member 337 is worn out due to continuous use of the piston 336 and the bellows 334 to cause a part of the indirect liquid in the indirect liquid chamber 333 to move into the second indirect liquid chamber 333a, The indirect liquid flow control device 350 moves the indirect liquid in the second indirect liquid chamber 333a to the indirect liquid chamber 333 so that the second pressure P2 in the second indirect liquid chamber 333a and the second pressure P2 in the second indirect liquid chamber 333a The first pressure P1 in the indirect liquid chamber 333 can maintain a constant pressure. The pressure of the indirect liquid between the bellows 334 and the piston 336 is prevented and the pressure in the first liquid chamber 333 in the indirect liquid chamber 333 is reduced by the pressurization of the bellows 334, It is possible to prevent the occurrence of a constant amount and a constant deviation at the time of chemical liquid ejection and to precisely discharge the chemical liquid and to prolong the life of parts including the bellows 334. [

FIG. 3E is a schematic view of a chemical liquid pressurizing apparatus according to an embodiment of the present invention shown in FIG. 3A, and a chemical liquid supply apparatus having the chemical liquid pressurizing apparatus according to the present invention, FIG. 3F is a cross-sectional view of the pressurizing device, and FIG. 3F is a partial cross-sectional view of the chemical liquid pressurizing device and the chemical liquid supply device having the chemical liquid pressurizing device according to an embodiment of the present invention shown in FIG. Sectional view of a chemical-liquid pressurizing apparatus having a second indirect liquid flow regulating device according to a second embodiment of the present invention, and a partial detail view of the second indirect liquid flow regulating device when the second indirect liquid flow regulating device is opened.

Referring to FIGS. 3E and 3F together with FIG. 3A, the chemical liquid pressurization apparatus 301 according to the second embodiment of the present invention includes a second housing 335 having an indirect liquid chamber 333 in which indirect liquid is accommodated; A piston (336) provided in the second housing (335) for pressurizing the indirect fluid; A bellows 334 connected to the outer side of the lower end of the piston 336 and to the second housing 335 and elastically deformable in the axial direction of the piston 336; Between the outer surface of the piston 336 and the inner surface of the second housing 335 so as to form a second indirect liquid chamber 333a between the outer surface of the piston 336 and the second housing 335, An inner housing 335a provided; Is provided between the outer surface of the inner housing 335a and the inner surface of the second housing 335 so that the indirect liquid moves between the indirect liquid chamber 333 and the second indirect liquid chamber 333a An indirect liquid flow passage 333b formed therein; A second indirect liquid flow control device (360) provided in the indirect liquid flow passage (333b) for controlling the movement of the indirect liquid; A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338.

In addition, the chemical liquid supply apparatus 300 according to the second embodiment of the present invention includes a first housing 304 having a pressurizing chamber 305 therein; A chemical liquid inlet 310 provided at one side of the first housing 304 and connected to a chemical liquid tank (not shown) for containing the chemical liquid; A chemical solution discharge port (319) provided on the other side of the first housing (304) and connected to a nozzle device (not shown) for discharging and applying the chemical solution; A tube (306) provided in the pressurization chamber (305) and supplied with the chemical liquid; A second housing (335) having an indirect liquid chamber (333) in which indirect liquid is accommodated; A piston (336) provided in the second housing (335) for pressurizing the indirect fluid; A bellows 334 connected to the outer side of the lower end of the piston 336 and to the second housing 335 and elastically deformable in the axial direction of the piston 336; Between the outer surface of the piston 336 and the inner surface of the second housing 335 so as to form a second indirect liquid chamber 333a between the outer surface of the piston 336 and the second housing 335, An inner housing 335a provided; Is provided between the outer surface of the inner housing 335a and the inner surface of the second housing 335 so that the indirect liquid moves between the indirect liquid chamber 333 and the second indirect liquid chamber 333a An indirect liquid flow passage 333b formed therein; A second indirect liquid flow control device (360) provided in the indirect liquid flow passage (333b) for controlling the movement of the indirect liquid; A piston rod (338) connected to the piston (336) for moving the piston (336) in the axial direction; And a driving member 340 connected to the piston rod 338 and driving the piston rod 338.

The chemical liquid pressurizing apparatus 301 and the chemical liquid supply apparatus 300 having the chemical liquid pressurizing apparatus 301 according to the second embodiment of the present invention described above are the same as the chemical liquid supplying apparatus 300 shown in FIGS. 3A to 3C except that the second indirect liquid flow adjusting device 360 is used. 3C are substantially the same as those of the chemical liquid pressurizing apparatus 301 according to the first embodiment of the present invention and the chemical liquid supply apparatus 300 having the chemical liquid pressurizing apparatus 301 shown in Figs. Therefore, in the following, only the chemical liquid pressurizing apparatus 301 according to the second embodiment of the present invention and the chemical liquid supply apparatus 300 having the chemical liquid pressurizing apparatus 301 describe only the specific configuration and operation of the second indirect liquid flow adjusting apparatus 360 .

Referring again to FIGS. 3E and 3F, the second indirect liquid flow regulating device 360 used in the chemical liquid pressurizing apparatus 301 according to the second embodiment of the present invention includes the indirect liquid flow passage 333b An on-off valve 364 provided in the internal combustion engine; And the first pressure P1 in the indirect liquid chamber 333 and the second pressure P2 in the second indirect liquid chamber 333a are provided on both end sides of the indirect liquid flow passage 333b, And first and second pressure sensors 362a and 362b for measuring the pressure. Here, it is preferable that the on-off valve 364 is implemented by an electromagnetic on-off valve, but it is not limited thereto.

The second indirect liquid flow control device 360 according to the second embodiment of the present invention is configured such that the second pressure P2 in the second indirect liquid chamber 333a is set to a predetermined maximum pressure value 40Kpa), the second pressure sensor 362b senses this and opens the on-off valve 364 (FIG. 3F). Thereby, the indirect liquid in the second indirect liquid chamber 333a is moved into the indirect liquid chamber 333 through the opened indirect liquid flow passage 333b. Thereafter, when the sealing member 337 is worn due to continuous use of the piston 336 and the bellows 334, a part of the indirect liquid in the indirect liquid chamber 333 is moved into the second indirect liquid chamber 333a The second pressure P2 in the second indirect liquid chamber 333a rises and the first pressure P1 in the indirect liquid chamber 333 lowers and the piston 336 and the bellows 334 continue to move under the same conditions, An unbalance in the chemical coating thickness due to the lowering of the first pressure P1 occurs. In this case, as described in detail with reference to FIG. 3G and FIG. 3H to be described later, in order to solve the problem caused by the decrease of the first pressure P1 in the indirect liquid chamber 333, The first pressure P1 and the second pressure P2 in the second indirect liquid chamber 333a are checked in real time to compensate for the pressure difference (that is, P1-P2) And adjusts the initial start position (home position) of the piston 336 to re-set.

Even if a part of the indirect liquid in the indirect liquid chamber 333 is moved into the second indirect liquid chamber 333a due to wear of the sealing member 337 due to continuous use of the piston 336 and the bellows 334, The indirect liquid in the second indirect liquid chamber 333a is again moved to the indirect liquid chamber 333 by the second indirect liquid flow control device 360 so that the second pressure P2 in the second indirect liquid chamber 333a, And the first pressure P1 in the indirect liquid chamber 333 can maintain a constant pressure. As a result, the bellows 334 pressurizes and pressurizes at a predetermined constant maximum pressure (for example, 40 Kpa), and the overpressure of the indirect liquid between the bellows 334 and the piston 336 is prevented, The first pressure P1 in the liquid chamber 333 can maintain the normal pressure so that the constant amount and constant speed deviation at the time of chemical liquid ejection can be prevented and the chemical liquid can be discharged precisely and the life of parts including the bellows 334 Can be extended.

Particularly, in the second indirect liquid flow control device 360 according to the second embodiment of the present invention, the opening and closing of the open / close valve 364 is performed using the first and second pressure sensors 362a and 362b So that it is advantageous in that the quantitative determination of the chemical liquid and the constant rate discharge can be controlled very precisely.

FIGS. 3G and 3H illustrate the adjustment of the origin position of the piston according to the pressure difference generated in the chemical liquid pressurizing apparatus having the second indirect liquid flow control apparatus according to the second embodiment of the present invention shown in FIGS. 3E and 3F Fig.

3G and 3H, the first and second pressure sensors 362a and 362b of the second indirect liquid flow control device 360 according to the second embodiment of the present invention are respectively disposed in the indirect liquid chamber 333 The first pressure P1 and the second pressure P2 in the second indirect liquid chamber 333a are measured in real time and the measured first pressure P1 and the second pressure P2 are measured in the second (Programmable Logic Controller) module (not shown) constituting the control unit provided in the chemical liquid supply apparatus 300 according to the embodiment. The PLC module calculates a difference value (i.e., P2 - P1), which is a pressure variation value between the first pressure P1 and the second pressure P2 measured in real time, and when the difference value exceeds a predetermined difference value (for example, The sealing member 337 is worn out by continuous use of the piston 336 and the bellows 334 so that a part of the indirect liquid in the indirect liquid chamber 333 is wasted in the second indirect liquid chamber 333a, And the pressure deviation is equal to or greater than a predetermined threshold value), the on-off valve 364 is opened. Thereafter, the piston 340 is moved forward by a predetermined distance (for example, 0.1 mm) by using the drive motor 340 while the open / close valve 364 is opened. Thereafter, the pressure values P1 and P2 (measured by the first pressure sensor 362a and the second pressure sensor 362b) measured by the first pressure sensor 362a and the second pressure sensor 362b while advancing and retracting the piston 340 with the open / close valve 364 opened Value) is checked. When the measured pressure difference (that is, P2-P1) is still equal to or larger than the predetermined threshold value, the piston 340 is forwardly moved forward by a drive motor 340 in a state in which the open / close valve 364 is opened For example, 0.1 mm). Then, the above-described operation is repeated until the measured pressure difference (i.e., P2-P1) is confirmed to be less than the predetermined threshold value. When the measured pressure difference (i.e., P2-P1) is less than the predetermined threshold value, the on-off valve 364 is closed and the corresponding position is re-set to the initial start position (origin position) (I.e., adjustment of the home position of the piston 336). Thereafter, the chemical liquid pressure device 301 and the chemical liquid supply device 300 having the chemical liquid pressure device 301 according to the second embodiment of the present invention as described above are driven at the initial start position (origin position) of the reset piston 336 The first pressure P1 in the indirect liquid chamber 333 and the second pressure P1 in the indirect liquid chamber 333 can be adjusted according to the degree of wear of the sealing member 337 due to continuous use of the piston 336 and the bellows 334. [ By constantly adjusting the position of the origin of the piston 336 so that these pressure deviations are eliminated when a pressure deviation occurs between the second pressure P2 in the second indirect liquid chamber 333a, The bellows 334 and the piston 336 can be precisely controlled while preventing the occurrence of excessive pressure of the indirect liquid between the bellows 334 and the piston 336, Number of There are extended such advantages can be achieved in addition.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

10a, 10b, 100, 300: chemical liquid supply device 11: drive pump
12: pump drive / chemical pump 13: flexible tube / housing member
13a, 13b: drive housing / chemical liquid housing 14: bellows / drive unit
15: adapter portion / accommodation hole 16: adapter portion / closed wall 17: supply flow path / opening
18: chemical liquid tank / driving rod 19: discharge passage 20: nozzle device
21: opening / closing valve / bellows 22: opening / closing valve / accordion portion
23: operation disc portion / end plate portion 24: small bellows portion
25: large bellows part / communication chamber 26: pump chamber 42: pump chamber
43: Indirect liquid 301: Chemical liquid pressurizing device 304: First housing
305: pressurizing chamber 306: tube 310: chemical liquid inlet
319: chemical liquid discharge port 321, 322: first / second open / close valve 332:
333: Indirect liquid chamber 333a: Second indirect liquid chamber 333b: Indirect liquid flow passage
334: Bellows 335: Second housing 335a: Inner housing
336: piston 337: sealing member 338: piston rod
340: driving member 350, 360: first / second indirect liquid flow adjusting device
352: elastic member 354: movable member 362a, 362b: first / second pressure sensor
364: opening and closing valve

Claims (16)

In the chemical liquid pressurizing apparatus,
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A piston provided in the second housing for pressurizing the indirect fluid;
A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston;
An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing;
An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber;
A first indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
And a chemical liquid pressurizing device. The method according to claim 1,
The first indirect liquid flow control device
An elastic member fixedly installed in the indirect liquid flow passage; And
A movable member provided movably in contact with the elastic member,
And the chemical liquid pressurizing device. 3. The method of claim 2,
The elastic member is embodied as a spring,
The movable member has a shape selected from the group consisting of a spherical body, a rectangular parallelepiped, a cube, a cone, and a polyhedron, and is formed of any one material selected from a metal material, a wood material, and a plastic material
Chemical liquid pressure device. The method according to claim 2 or 3,
Wherein the first indirect liquid flow control device moves the movable member to open the indirect liquid flow passage when the second pressure in the second indirect liquid chamber exceeds a predetermined pressure value, And moves the movable member to close the indirect liquid flow passage when the second pressure is equal to or less than a predetermined pressure value. In the chemical liquid pressurizing apparatus,
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A piston provided in the second housing for pressurizing the indirect fluid;
A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston;
An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing;
An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber;
A second indirect liquid flow regulating device provided in the indirect liquid flow passage for controlling the movement of the indirect liquid;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
And a chemical liquid pressurizing device. 6. The method of claim 5,
The second indirect liquid flow adjustment device
An on-off valve provided in the indirect liquid flow passage; And
First and second pressure sensors provided on both end sides of the indirect liquid flow passage for measuring a first pressure in the indirect liquid chamber and a second pressure in the second indirect liquid chamber,
And the chemical liquid pressurizing device. The method according to claim 6,
Wherein the second indirect fluid flow control device senses the second pressure sensor when the second pressure exceeds a predetermined pressure value to open the on-off valve, and when the first pressure exceeds a predetermined reference pressure value, And the first pressure sensor senses it and closes the on / off valve. 8. The method according to claim 6 or 7,
The chemical liquid pressurizing device
When the difference between the first pressure measured by the first pressure sensor and the second pressure measured by the second pressure sensor is equal to or greater than a predetermined difference, the opening / closing valve is opened and the piston is moved in the advancing direction Repeating the operation of shifting by a predetermined distance,
When the difference between the first pressure measured by the first pressure sensor and the second pressure measured by the second pressure sensor is less than a predetermined difference value, the opening / closing valve is closed, And the home position of the piston is adjusted
Chemical liquid pressure device. In the chemical liquid supply device,
A first housing having a pressurizing chamber therein;
A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid;
A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution;
A tube provided in the pressurizing chamber and supplied with the chemical liquid;
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston;
An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing;
An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber;
A first indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
And a chemical liquid supply device. 10. The method of claim 9,
The first indirect liquid flow control device
An elastic member fixedly installed in the indirect liquid flow passage; And
A movable member provided movably in contact with the elastic member,
Wherein the chemical liquid supply device comprises: 11. The method of claim 10,
The elastic member is embodied as a spring,
The movable member has a shape selected from the group consisting of a spherical body, a rectangular parallelepiped, a cube, a cone, and a polyhedron, and is formed of any one material selected from a metal material, a wood material, and a plastic material
A chemical liquid supply device. The method according to claim 10 or 11,
Wherein the first indirect liquid flow control device moves the movable member to open the indirect liquid flow passage when the second pressure in the second indirect liquid chamber exceeds a predetermined pressure value, And moves the movable member to close the indirect liquid flow passage when the second pressure is equal to or less than a predetermined pressure value. In the chemical liquid supply device,
A first housing having a pressurizing chamber therein;
A chemical liquid inlet provided at one side of the first housing and connected to a chemical liquid tank for containing the chemical liquid;
A chemical solution discharge port provided on the other side of the first housing and connected to a nozzle device for discharging and applying the chemical solution;
A tube provided in the pressurizing chamber and supplied with the chemical liquid;
A second housing having an indirect liquid chamber in which the indirect liquid is accommodated;
A bellows connected to the outer side of the lower end of the piston and to the second housing, the bellows being elastically deformable in the axial direction of the piston;
An inner housing provided between an outer surface of the piston and an inner surface of the second housing to form a second indirect liquid chamber between the outer surface of the piston and the second housing;
An indirect liquid flow passage provided between an outer surface of the inner housing and an inner surface of the second housing, the indirect liquid flow passage being formed so that the indirect liquid moves between the indirect liquid chamber and the second indirect liquid chamber;
A second indirect liquid flow regulator provided in the indirect liquid flow passage for controlling the movement of the indirect liquid through the indirect liquid flow passage;
A piston rod connected to the piston and axially moving the piston; And
And a driving member connected to the piston rod for driving the piston rod,
And a chemical liquid supply device. 14. The method of claim 13,
The second indirect liquid flow adjustment device
An on-off valve provided in the indirect liquid flow passage; And
First and second pressure sensors provided on both end sides of the indirect liquid flow passage for measuring a first pressure in the indirect liquid chamber and a second pressure in the second indirect liquid chamber,
Wherein the chemical liquid supply device comprises: 15. The method of claim 14,
Wherein the second indirect fluid flow control device senses the second pressure sensor when the second pressure exceeds a predetermined pressure value to open the on-off valve, and when the first pressure exceeds a predetermined reference pressure value, And the first pressure sensor senses it and closes the on / off valve. 16. The method according to claim 14 or 15,
The chemical liquid supply device
When the difference between the first pressure measured by the first pressure sensor and the second pressure measured by the second pressure sensor is equal to or greater than a predetermined difference, the opening / closing valve is opened and the piston is moved in the advancing direction Repeating the operation of shifting by a predetermined distance,
When the difference between the first pressure measured by the first pressure sensor and the second pressure measured by the second pressure sensor is less than a predetermined difference value, the opening / closing valve is closed, And the home position of the piston is adjusted
A chemical liquid supply device.
KR1020160024661A 2016-02-29 2016-02-29 An Improved Device for Pressing Chemical Liquids, and A Feeding Apparatus of Chemical Liquids Having the Same KR101763121B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210077428A (en) * 2019-12-17 2021-06-25 주식회사 휴비츠 Noncontact-type eye pressure measuring device
KR20210105524A (en) 2020-02-19 2021-08-27 주식회사 나래나노텍 Device for Pressing Chemical Liquids, and A Feeding Apparatus of Chemical Liquids Having the Same

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KR100294370B1 (en) 1992-07-13 2001-09-17 오카야마 노리오 Flow control valve and its control method
JP2009004168A (en) 2007-06-20 2009-01-08 Honda Motor Co Ltd Fuel cell system
JP5060766B2 (en) 2006-06-19 2012-10-31 株式会社コガネイ Chemical supply device
JP2015055225A (en) 2013-09-13 2015-03-23 タツモ株式会社 Constant delivery pump

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KR100294370B1 (en) 1992-07-13 2001-09-17 오카야마 노리오 Flow control valve and its control method
JP5060766B2 (en) 2006-06-19 2012-10-31 株式会社コガネイ Chemical supply device
JP2009004168A (en) 2007-06-20 2009-01-08 Honda Motor Co Ltd Fuel cell system
JP2015055225A (en) 2013-09-13 2015-03-23 タツモ株式会社 Constant delivery pump

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Publication number Priority date Publication date Assignee Title
KR20210077428A (en) * 2019-12-17 2021-06-25 주식회사 휴비츠 Noncontact-type eye pressure measuring device
KR102281970B1 (en) * 2019-12-17 2021-07-27 주식회사 휴비츠 Noncontact-type eye pressure measuring device
KR20210105524A (en) 2020-02-19 2021-08-27 주식회사 나래나노텍 Device for Pressing Chemical Liquids, and A Feeding Apparatus of Chemical Liquids Having the Same

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