KR20170053936A

KR20170053936A - Hardening apparatus for manufacturing display panel

Info

Publication number: KR20170053936A
Application number: KR1020150156498A
Authority: KR
Inventors: 리경봉
Original assignee: (주)제이피엘
Priority date: 2015-11-09
Filing date: 2015-11-09
Publication date: 2017-05-17

Abstract

A curing device for manufacturing a display substrate according to an exemplary embodiment of the present invention includes: a first pressing plate, in which the first substrate is carried in and supported; a first cure chamber located below the first pressing plate and having a first elevating member for ascending the first pressing plate; a second pressing plate, which is mounted on an upper part of the first cure chamber and has a second substrate being carried in and supported; a second cure chamber positioned below the second pressing plate and having a second elevating member for moving up the second pressing plate; and a heater provided on each of the first and the second pressing plate. The curing apparatus for manufacturing a display substrate according to this embodiment of the present invention may be configured such that a plurality of curing chambers are stacked in a multilayer structure and the seal of a plurality of substrates are hardened simultaneously or individually in each cure chamber by heat pressing, thereby efficiently performing a large-scale substrate hardening operation. The invention can also prevent the elevating member from being damaged by the operation of the pressing plate for curing the substrate and keep the atmosphere inside the cure chamber at a high temperature so the curing process of the substrate can be more effectively and quickly performed.

Description

Technical Field [0001] The present invention relates to a hardening apparatus for manufacturing a display substrate,

The present invention relates to a curing apparatus for manufacturing a display substrate, and more particularly, to a curing apparatus for manufacturing a display substrate for curing a seal applied between two substrates for cementing two substrates.

In general, a display substrate refers to a flat display substrate such as an LCD, an OLED, and a PDP. Such a display substrate is typically completed by attaching two substrates made by a pre-process to each other. For example, in the case of an LCD substrate, one substrate may be a color filter substrate and the other substrate may be an array substrate.

Therefore, there is a need for a laminating process for laminating two substrates at the time of manufacturing the display substrate. In the laminating process, a seal is applied to the surface of one of the two substrates, and another substrate is aligned thereon, followed by laminating. After the laminating process, a curing process for curing the yarn proceeds.

The curing process is a process of applying heat and pressure to the substrate to cure the seal. A conventional curing apparatus used in this curing process is Korean Patent Publication No. 1994-0011986. Conventional curing apparatuses cure a plurality of bonded substrates at one time.

Korean Laid-open Patent Publication No. 1994-0011986, "pressure hardening device of liquid crystal display element"

The present invention is intended to provide a curing apparatus for manufacturing a display substrate capable of simultaneously pressure-curing a plurality of substrates.

The present invention is to provide a curing apparatus for manufacturing a display substrate, which allows the curing process for a plurality of substrates to be pressure-cured while being individually controlled.

Another object of the present invention is to provide a curing apparatus for manufacturing a display substrate, which cures a substrate in a state in which a temperature atmosphere is maintained by hot air supplied from the outside during curing of the substrate.

The curing apparatus for manufacturing a display substrate according to the present invention comprises a first compression plate on which a first substrate is carried and supported, and a first lifting member located on one side of the first compression plate and lifting the first compression plate A second cushioning chamber, a second cushioning plate mounted on the first curing chamber and having a second substrate carried in and supported therein, and a second cushioning plate disposed on one side of the second squeezing plate, A second curing chamber having an elevating member and a heater provided on each of the first pressing plate and the second pressing plate,

The first elevating member may include at least one diaphragm or bellows cylinder disposed at one side of the first pressing plate and expanding from an externally supplied pressure to operate the first pressing plate

The second elevating member may include at least one diaphragm or bellows cylinder that is provided at one side of the first pressing plate and expands at an externally supplied pressure to operate the second pressing plate.

The first curing chamber may include a guide portion for guiding the first pressing plate to move up and down within the first curing chamber, and a stopper for restricting a lowering position of the first pressing plate.

The second curing chamber may include a guide portion for guiding the second pressing plate to move up and down within the second curing chamber, and a stopper for limiting a lowering position of the second pressing plate.

A heater may be provided on the upper wall of the first curing chamber and the upper wall of the second curing chamber.

The inner bottom of the first curing chamber may be provided with a plurality of support pins passing through the first compression plate.

The inner bottom of the second curing chamber may be provided with a plurality of support pins passing through the second compression plate.

And a hot air supply unit for supplying heated air to the inside of the first curing chamber and the second curing chamber.

And a substrate transfer device for transferring the substrate back and forth and up and down in order to transfer the substrate into and out of the first curing chamber and the second curing chamber.

An elastic pad may be provided on the upper surface of the first compression plate and the second compression plate.

An elastic pad may be provided on the top surface of the first curing chamber and the second curing chamber.

The heater may be disposed on a lower surface of each of the first compression plate and the second compression plate and a heat insulating plate may be provided between the first compression plate and the heater and between the second compression plate and the heater .

The heat insulating plate may be embedded in the lower surface of each of the first compression plate and the second compression plate.

The rims of the first compression plate, the heater, the second compression plate, and the heater may be coupled to each other.

And an elastic member for buffering may be provided on the rim of the first compression plate, the heater, the second compression plate, and the heater.

A curing apparatus for manufacturing a display substrate according to the present invention includes: a curing chamber in which a substrate is transferred into and out of the curing chamber; A compression plate installed inside the curing chamber to receive a substrate supplied from the outside and to be supported therein; A heater disposed on a lower surface of the compression plate; A lifting member located at one side of the pressing plate and lifting the pressing plate; And a hot air supply unit for supplying heat into the curing chamber.

The hardening chamber may include a guide portion for guiding the pressing plate to move up and down within the hardening chamber, and a stopper for restricting the lowering position of the pressing plate.

A heater may be provided on the upper wall of the curing chamber.

The inner bottom of the curing chamber may be provided with a plurality of support pins each penetrating the compression plate.

The elevating member may include at least one diaphragm or a bellows sealer.

And a substrate transfer device for moving the substrate back and forth and up and down to and from the curing chamber to the inside of the curing chamber may be provided at one side of the curing chamber.

An elastic pad may be provided on the upper surface of the compression plate and the inner ceiling surface of the hardening chamber.

A heat insulating plate may be provided between the pressing plate and the heater.

The heat insulating plate may be embedded in the lower surface of the compression plate.

And the edge portions of the pressing plate and the heater may be coupled to each other.

The rim of the pressing plate and the heater may include an elastic member for buffering.

The curing apparatus for manufacturing a display substrate according to the embodiment of the present invention may be configured such that a plurality of curing chambers are stacked in a multilayer structure and the chambers of a plurality of substrates are hardened simultaneously or separately in each curing chamber by heat- It is possible to prevent the elevating member from being damaged by the operation of the pressing plate for curing the substrate and to keep the temperature atmosphere inside the hardening chamber appropriately so that the curing process of the substrate is more effectively and quickly There is an effect to be achieved.

1 is a view illustrating a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
2 is a view illustrating a state in which a first curing chamber and a second curing chamber of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention are laminated.
3 is a view showing one embodiment of a stopper of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
4 is an enlarged view of an end portion of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
5 is a plan view of a compression plate of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
6 is a view showing a state of engagement of a compression plate of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
7 is a plan view showing the inside of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.
8 is a view for explaining a state of the curing apparatus for manufacturing a display substrate according to the embodiment of the present invention before the substrate is compressed.
9 is a view for explaining a substrate pressing state of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.

Hereinafter, embodiments of a curing apparatus for manufacturing a display substrate according to the present invention will be described with reference to the drawings. It is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in various forms and should not be construed as limited to the embodiments set forth herein, It is to inform.

1 is a view illustrating a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.

As shown in FIG. 1, a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention includes a plurality of curing chambers 100 and 200 stacked one above the other. The number of lamination of the curing chambers 100 and 200 can be variously modified. If necessary, one to several tens of curing chambers 100 and 200 can be stacked vertically, or a plurality of stacked curing chambers 100 and 200 can be arranged right and left.

And each of the curing chambers 100 and 200 has a gate valve 120 and 220 individually operated in the respective curing chambers 100 and 200. A substrate transfer device 800 is provided in front of the gate valves 120 and 220 of each of the curing chambers 100 and 200 to transfer substrates 10 into and out of the respective curing chambers 100 and 200 .

The substrate transfer device 800 includes a lifting belt 820 that provides power to the upper and lower portions and is connected to the lifting shaft 830 by a lifting belt 820, (810).

The substrate 10 transferred by the robot arm 810 is a display panel in which two substrates are cemented to form a hardened state. For example, in the case of an LCD substrate, one substrate may be a color filter substrate and the other substrate may be an array substrate. Or one substrate may be a touch panel and the other substrate may be a display panel or one substrate may be an OLED TFT substrate and the other substrate may be a polarizing substrate or an encapsulating substrate or an encapsulating film.

That is, the curing apparatus according to the embodiment of the present invention can be used to cure after bonding two substrates or films in all flat panel display devices.

A hot air supply unit 400 for supplying hot air to each of the hardening chambers 100 and 200 and hot air provided from the hot air supply unit 400 are provided in the vicinity of the hardening chambers 100 and 200, And a hot air supply pipe (410) for guiding the hot air supply pipe (200). The hot air supply unit 400 may provide temperature controlled hot air to each of the curing chambers 100 and 200 according to the internal temperature of the curing chambers 100 and 200, The operation can be controlled by the controller 600 so as to supply hot air of a uniform temperature to the heat exchanger 600.

The hot air supply unit 400 supplies air previously heated to a temperature equal to or higher than room temperature into each of the hardening chambers 100 and 200 so that the inside of the hardening chambers 100 and 200 is filled with external air Or the temperature inside the curing chamber 100, 200 through the walls of the curing chamber 100, 200 is minimized. That is, the hot air supply unit 400 has the effect of keeping the process temperature at the optimum state and shortening the time (TACT TIME) of the hardening process of the substrate 10 as much as possible. The hot air supply unit 400 may include an electrically operated device such as a heater and a blower blowing air heated by a heater or the like.

A pressure supply part 500 for providing pressure to the inside of the hardening chambers 100 and 200 is provided near the hardening chambers 100 and 200. The pressure supply unit 500 may be a device that provides pneumatic or hydraulic pressure. The pressure supplied from the pressure supply unit 500 through the pressure supply pipe 510 is supplied to the plurality of lifting members 180 (shown in FIG. 2) arranged in a matrix on a plane in each of the hardening chambers 100 280 are operated. The pressure supply unit 500 may be controlled by the control unit 600 to provide the pressure to the elevating members 180 and 280 individually or in the respective curing chambers 100 and 200.

The control unit 600 of the curing apparatus for manufacturing a display substrate according to an embodiment of the present invention includes a substrate transfer apparatus 800, a hot air supply unit 400, a pressure supply unit 500, The operations of the valves 120 and 220, the lifting members 180 and 280 shown in FIG. 2, and the heaters 110 and 210 can be individually controlled.

Hereinafter, the construction of the curing chamber 100 (200) will be described in more detail. 2 is a view illustrating a state in which a first curing chamber and a second curing chamber of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention are laminated.

In FIG. 2, two curing chambers are illustrated as being laminated. In order to facilitate understanding of the embodiment, the curing chamber located at the bottom in FIG. 2 is referred to as a first curing chamber 100, The curing chamber stacked on the upper side of the substrate 100 will be referred to as a second curing chamber 200.

The first curing chamber 100 has a first compression plate 140 located inside the first curing chamber 100. The corner portion of the first compression plate 140 is supported by the guide portion 150 installed in the first curing chamber 100 in the vertical direction so that the first compression plate 140 can move up and down. A stopper 160 for restricting the lowering position of the first pressing plate 140 is disposed under the first pressing plate 140, which is a lower portion of the guide unit 150.

3 is a view illustrating one embodiment of a guide unit and a stopper of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.

As shown in FIG. 3, the guide portion 150 is formed in a cylindrical shape. However, in another embodiment, the guide unit 150 may be formed as a polygonal column. When the guide portion 150 is formed of a polygonal column, it is possible to minimize the twisting of the first compression plate 140 finely during the lifting and lowering operation of the first compression plate 140.

The stopper 160 prevents the first presser plate 140 from being excessively lowered to unnecessarily press the first lift member 180 to be damaged by the first presser plate 140, The lifting operation of the lifting unit 140 is minimized and the lifting operation is more efficiently performed.

4 is an enlarged view showing a state where an elastic pad is installed at an end concave portion of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention.

A plurality of support pins 170 extending upward from the bottom of the first curing chamber 100 and passing through the first compression plate 140 are installed. A plurality of first elevating members 180 are provided between the support pins 170. The first elevating member 180 includes a body 181 to which the pressure of the pressure supplying part 500 is ultimately transmitted and a diaphragm that is coupled to the body 181 and expands to the supplied pressure. In addition, the first elevating member 180 may include a bellow cylinder. Also, the first elevating member 180 may be implemented as a mechanical structure such as a piston.

The plurality of first elevating members 180 are provided in a plurality of layers, and the elevating members of the lower layer function to elevate the first pressing plates 140, and the elevating members of the upper layer perform the function of providing the pressing force . The numbers and arrangement of the first elevating members 180 can be variously implemented.

Next, the gate valve 120 is provided in front of the first curing chamber 100 and the hot air inlet 130 connected to the hot air supply pipe 410 is formed at the rear side. An upper heater 110 is embedded in the upper wall of the upper ceiling of the first curing chamber 100 and a lower heater 141 is disposed in the first compression plate 140.

A first heat insulating plate 143 is provided between the first pressing plate 140 and the lower heater 141. The first heat insulating plate (143) is embedded in the lower surface of the first compression plate (140). The first heat insulating plate 143 may be installed in one or a plurality of divided types. The first heat insulating plate 143 prevents the heat of the lower heater 141 from being transmitted to the first pressing plate 140, thereby minimizing thermal damage to the substrate 10. A first base plate 142 is disposed on the lower surface of the lower heater 141.

The elastic pad 300 may be provided on each of the top surface of the first curing chamber 100 and the top surface of the first compression plate 140 to enable stable pressing of the second substrate 12.

As shown in FIG. 4, the elastic pad 300 functions to minimize damage to the surface of the first substrate 11 by pressurization, and may be formed of a material that can withstand high temperatures of a polymer series. Or the elastic pad 300 is applied to the first pressing plate 140 by Teflon coating to minimize the fusion of the substrate to the first pressing plate 140 due to heat.

Next, the second curing chamber 200 is provided with a second compression plate 240. The corner portion of the second compression plate 240 is vertically movably supported by the guide portion 250 installed in the second curing chamber 200 in the vertical direction. A stopper 260 for restricting the lowering position of the second pressing plate 240 is installed on the lower portion of the second pressing plate 240 which is the lower side of the guide unit 250. Embodiments of the guide part 250 and the stopper 260 can be implemented in the same manner as the guide part 150 and the stopper 160 provided in the first curing chamber 100. [

And a plurality of support pins 270 extending upward from the bottom of the second curing chamber 200 and passing through the second compression plate 240 are provided and between the support pins 270, Member 280 is provided. The second lifting member 280 includes a body 281 to which the pressure of the pressure supply unit 500 is ultimately transmitted and a diaphragm 282 that is coupled to the body 281 and expands to the supplied pressure. The second elevating member 280 may be implemented in the same manner as the first elevating member 180. The gate valve 120 is provided in front of the second curing chamber 200 and a hot air inlet 230 connected to the hot air inlet pipe 410 is formed at the rear side.

The upper heater 210 is embedded in the ceiling upper wall of the second curing chamber 200 and the lower heater 241 is disposed in the second compression plate 240.

A second heat insulating plate 243 is provided between the second pressing plate 240 and the lower heater 241. The second heat insulating plate 243 is embedded in the lower surface of the second pressing plate 240. The second heat insulating plate 243 may be installed in a single or divided plural form. The second heat insulating plate 243 prevents the heat of the lower heater 241 from being transmitted to the second pressing plate 240, thereby minimizing thermal damage to the substrate 10. A second base plate 242 is disposed on the lower surface of the lower heater 241.

An elastic pad 300 may be provided on each of the top surface of the second curing chamber 200 and the top surface of the second squeezing plate 240 to enable stable pressing of the second substrate 12. This elastic pad 300 can refer to the configuration shown in Fig.

Meanwhile, the elevating members 180 and 280 may transmit power to the diaphragms 182 and 282 as shown in the drawing. Alternatively, the elevating members 180 and 280 may be a bellows cylinder, a piston device, And may be implemented by an apparatus that provides up-and-down motive power by the mechanical devices connected to the motor. In addition, one of the elevating members 180 and 280 may be installed in one curing chamber 100 or 200, but a plurality of the elevating members 180 and 280 may be installed adjacent to each other.

5 is a plan view of a compression plate of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention. As shown in FIG. 5, at least one first heat insulating plate 143 is embedded in the lower surface of the first compression plate 140. The reason why the first heat insulating plate 143 is embedded in the first pressing plate 140 is that the first heat insulating plate 143 may be damaged by the lower heater 141 located below. The first heat insulating plate 143 may be in the form of a graphite. At least one protrusion 140a is formed on the rim of the first compression plate 140 and the first compression plate 140 and the lower heater 141 are coupled through the protrusion 140a.

6 is a view showing a state of engagement of a compression plate of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention. As shown in FIG. 6, the first compression plate 140, the first heat insulation plate 143, the lower heater 141, and the first base plate 142 are sequentially positioned from the top. The first heat insulating plate 143 is embedded in the first pressing plate 140. The first pressing plate 140, the lower heater 141, and the first base plate 142 have protrusions 140a And joined through this portion. When the first pressing plate 140 and the lower heater 141 are coupled by the protrusion 140a formed on the rim, the heat of the lower heater 141 is transmitted to the first pressing plate 140, It can be stably used without being deformed due to thermal deformation.

The coupling shaft 140b is inserted into the protrusion 140a formed at the rim of the first compression plate 140 and the lower heater 140 to couple the first compression plate 140 and the lower heater 141, An elastic member 140c is provided on the coupling shaft 140b of the base plate 142 to buffer the pressing force of the first lifting member 180.

7 is a plan view showing the inside of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention. 7, the elevating members 180 and 280 are disposed adjacent to each other, and the elevating members 180 (280) and 280 The pressing plate is moved up or down.

Hereinafter, the functions and effects of the curing apparatus for manufacturing a display substrate according to an embodiment of the present invention constructed as described above will be described.

FIG. 8 is a view for explaining a state of the curing apparatus for manufacturing a display substrate according to an embodiment of the present invention before sintering the substrate, and FIG. 9 is a view for explaining a squeezed state of a curing apparatus for manufacturing a display substrate according to an embodiment of the present invention FIG. In Figs. 8 and 9, the hardening chamber describes the operation by taking the second hardening chamber as an example.

When the gate valve 220 of the curing chamber 200 is opened as shown in FIG. 8, the substrate 12 is carried into the curing chamber 200 by the substrate transfer device 800. At this time, the inside of the hardening chamber 200 is maintained at a temperature of about 30 to 150 ° C. at a room temperature or higher by the hot air supplied by the hot air supply unit 400.

Then, when the substrate transfer apparatus 800 places the substrate 12 on the support pin 270, the substrate transfer apparatus 800 then goes out of the hardening chamber 200, and the gate valve 120 is closed. Thereafter, curing for the substrate 12 is started. However, the actual curing of the substrate 12 is carried out from the moment the substrate 12 is brought into the curing chamber 200. That is, the curing is already progressed by the atmosphere temperature inside the curing chamber 200.

Next, as shown in FIG. 9, when the substrate 12 is supported by the support pins 270, the compression plate 240 is lifted. The compression plate 240 is already heated to a considerable temperature by the lower heater 141. The compression plate 240 can be heated to a temperature of approximately 60 to 200 ° C.

The raised compression plate 240 lifts the substrate 10 to push the substrate 12 to the ceiling surface inside the hardening chamber 200 and finally the substrate 12 is moved between the compression plate 240 and the ceiling surface Lt; / RTI > At this time, the temperature of the ceiling surface can also be heated to 60 to 200 ° C. The pressing force may be about 0.01 to 0.6 MPa.

By this operation, the yarn applied to the substrate 12 is cured, and the two substrates 12 are completely bonded together. When the substrates 12 are attached together, the compression plate 240 is lowered again, and the substrate 12 is seated on the support pins 270. At this time, the lowering stroke of the compression plate 240 is limited by the stopper 160. Therefore, it is possible to prevent the heated compression plate 240 from overpressing the diaphragm 282 of the elevation member 280, thereby minimizing damage to the elevation member 280.

The gate valve 220 is opened to transfer the substrate transfer apparatus 800 into the hardening chamber 200 to lift the substrate 12 from the support pins 270 and transfer the substrate 12 out of the hardening chamber 200.

Meanwhile, a plurality of the curing chambers 200 of the curing apparatus for manufacturing a display substrate may be provided. Thus, for several to several tens of substrates at the same time, each individual curing chamber can be individually controlled to perform curing on the substrate.

As described above, the curing apparatus for manufacturing a display substrate according to an embodiment of the present invention includes a plurality of curing chambers stacked in a multilayer structure, and a plurality of chambers of a substrate are cured by heat pressing simultaneously or individually in the respective curing chambers It is possible to efficiently perform a large scale substrate hardening operation and to prevent the elevating member from being damaged by the operation of the pressing plate for hardening the substrate and to keep the atmosphere inside the hardening chamber at a high temperature, It is effective to make it quick and easy.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

10, 11, 12 ... substrate
100 ... first hardening chamber
200 ... second hardening chamber
300 ... elastic pad
400 ... hot wind supply part
500 ... pressure supply unit
600 ... controller
800 ... substrate transfer device

Claims

A first curing chamber having a first compression plate on which the first substrate is carried and supported and a first lifting member located on one side of the first compression plate and lifting the first compression plate;
A second clamping plate mounted on the first curing chamber and having a second clamping plate on which a second substrate is carried and supported, and a second clamping member located on one side of the second clamping plate and moving up and down the second clamping plate; 2 curing chamber;
And a heater provided on each of the first compression plate and the second compression plate.

[2] The apparatus according to claim 1, wherein the first elevating member includes at least one diaphragm or bellows cylinder provided at one side of the first pressing plate and expanding from an externally supplied pressure for operating the first pressing plate Curing device for manufacturing display substrate.

[2] The apparatus according to claim 1, wherein the second lifting member includes at least one diaphragm or bellows cylinder provided at one side of the first pressing plate and expanding from an externally supplied pressure for operating the second pressing plate Curing device for manufacturing display substrate.

The display device according to claim 1, wherein the first curing chamber is provided with a guide portion for guiding the first pressing plate up and down in the first curing chamber, and a stopper for limiting a lowering position of the first pressing plate Curing device for manufacturing a substrate.

The display device according to claim 1, wherein the second curing chamber is provided with a guide portion for guiding the second pressing plate to move up and down within the second curing chamber, and a stopper for limiting a lowering position of the second pressing plate Curing device for manufacturing a substrate.

The curing apparatus for a display substrate according to claim 1, wherein a heater is provided on an upper wall of the first curing chamber and an upper wall of the second curing chamber.

The curing apparatus for a display substrate according to claim 1, wherein a plurality of support pins penetrating the first compression plate are provided on an inner bottom of the first curing chamber.

The curing apparatus for a display substrate according to claim 1, wherein a plurality of support pins penetrating the second compression plate are provided on the inner bottom of the second curing chamber.

The curing apparatus for a display substrate according to claim 1, further comprising a hot air supply unit for supplying air heated into the first curing chamber and the second curing chamber.

The curing apparatus for a display substrate according to claim 1, further comprising a substrate transfer device for transferring the substrate back and forth and up and down so as to move the substrate into and out of the first curing chamber and the second curing chamber.

The curing apparatus for a display substrate according to claim 1, wherein elastic pads are provided on upper surfaces of the first and second compression plates.

The curing apparatus for a display substrate according to claim 1, wherein elastic cushions are provided on the ceiling surfaces of the first curing chamber and the second curing chamber.

The apparatus of claim 1, wherein the heater is disposed on a lower surface of each of the first compression plate and the second compression plate, and between the first compression plate and the heater and between the second compression plate and the heater, And a curing agent for a display substrate.

14. The curing apparatus for a display substrate according to claim 13, wherein the heat insulating plate is embedded in the lower surface of each of the first compression plate and the second compression plate.

The curing apparatus for a display substrate according to any one of claims 1 to 13, wherein the first compression plate, the heater, the second compression plate, and the heater are respectively coupled to rim portions.

16. The curing apparatus for a display substrate according to claim 15, wherein an elastic member for buffering is provided at a rim portion of the first compression plate, the heater, the second compression plate and the heater.

A curing chamber through which the substrate is transferred into and out of the curing chamber;
A compression plate installed inside the curing chamber to receive a substrate supplied from the outside and to be supported therein;
A heater disposed on a lower surface of the compression plate;
A lifting member located at one side of the pressing plate and lifting the pressing plate;
And a hot air supply unit for supplying heat into the curing chamber.

The curing apparatus for a display substrate according to claim 17, wherein the curing chamber includes a guide portion for guiding the pressing plate to move up and down within the curing chamber, and a stopper for limiting a lowering position of the pressing plate.

18. The curing apparatus for a display substrate according to claim 17, wherein a heater is provided on an upper wall of the curing chamber.

18. The curing apparatus for a display substrate according to claim 17, wherein a plurality of support pins penetrating the compression plates are provided on an inner bottom of the curing chamber.

18. The curing apparatus for a display substrate according to claim 17, wherein the elevating member includes at least one diaphragm or a bellows cylinder.

18. The curing apparatus for a display substrate according to claim 17, wherein the curing chamber is provided with a substrate transfer device which moves back and forth and up and down in order to move the substrate into and out of the curing chamber.

The curing apparatus for a display substrate according to claim 17, wherein an elastic pad is provided on an upper surface of the compression plate and an inner ceiling surface of the curing chamber.

18. The curing apparatus for a display substrate according to claim 17, wherein a heat insulating plate is provided between the compression plate and the heater.

The curing apparatus according to claim 24, wherein the heat insulating plate is embedded in a lower surface of the compression plate.

The curing apparatus for a display substrate according to claim 17 or claim 24, wherein the compression plate and the heater are respectively coupled to rim portions.

27. The curing apparatus for a display substrate according to claim 26, wherein an elastic member for buffering is provided at a rim portion of the pressing plate and the heater.