JP6181808B2 - Holding unit and bonding method - Google Patents

Description

  The present invention relates to a panel bonding technique.

  In an apparatus for manufacturing a laminated body by bonding panels such as a liquid crystal panel and a cover glass, if bubbles are mixed into the bonded surface, the quality of the laminated body may be affected. In order to reduce the mixing of bubbles, Patent Documents 1 and 2 disclose devices that warp one panel and contact the other panel. In these apparatuses, bubbles between panels can be pushed out to the surroundings, and there is a certain effect in preventing bubbles from being mixed.

JP 2012-124444 A JP 2009-180911 A

  When the panel is warped, bending occurs around the holding portion of the panel, so that the panel may fall off the holding mechanism.

  An object of the present invention is to prevent air bubbles from being mixed while more reliably holding the panel.

According to the present invention, a holding unit that holds one of the panels to be bonded to each other, the supporting member having a plurality of air supply / exhaust passages, and the contact that is supported by the supporting member and contacts the panel The contact portion includes a plurality of openings, and an intermediate region capable of bulging to the panel side at a position corresponding to a center portion of the panel, and the plurality of supply and exhaust passages include the plurality of supply and exhaust passages. a first supply and exhaust passage communicating with the opening of the second supply and exhaust passage, wherein the said contact portion, said a first sheet member to adsorb the panel, said first sheet member support A second sheet member disposed between the first and second members, wherein the first sheet member communicates the plurality of openings, the plurality of openings, and the first air supply / exhaust passage. And the second sheet member is disposed in the intermediate region. Is has the expandable bulging portion to the panel side, the second intake and exhaust passages is open facing the bulging portion, the intermediate region, the second supply and exhaust passage A holding unit is provided that can bulge from the support member when the bulging portion bulges toward the panel side due to a differential pressure between the contact portion and the ambient atmosphere of the contact portion.

  Further, according to the present invention, there is provided a holding unit for holding one of the panels to be bonded to each other, the supporting member having a plurality of air supply / exhaust passages, and supported by the supporting member and in contact with the panel And a movable member disposed between the support member and the sheet member, and the sheet member swells toward the panel side at a position corresponding to a plurality of openings and a center portion of the panel. The movable member is disposed in the intermediate region, and the plurality of air supply / exhaust passages communicate with the first air supply / exhaust passage communicated with the plurality of openings, and the movable member. A second air supply / exhaust path that faces and opens, and the movable member is displaceable to the sheet member side by a differential pressure between the second air supply / exhaust path and the ambient atmosphere of the sheet member, The movable member is the sheet member By displacing to, the said intermediate region of the sheet member is bulged, the holding unit, wherein provided that.

Further, according to the present invention, the first panel is held by the holding unit, and is a bonding method to be bonded to the second panel, the holding unit including a plurality of supply and exhaust passages, A contact portion supported by the support member and in contact with the panel, wherein the contact portion includes a plurality of openings and an intermediate region capable of bulging toward the panel side at a position corresponding to the center portion of the panel. wherein the plurality of supply and exhaust passage includes a first supply and exhaust passage communicating with said plurality of openings, and the second supply and exhaust passage, wherein the said contact portion, a first sheet of adsorbing panel And a second sheet member disposed between the first sheet member and the support member, wherein the first sheet member includes the plurality of openings and the plurality of openings. And a communication passage that communicates the first air supply / exhaust passage with the second passage. DOO member is disposed in the intermediate region has the expandable bulging portion to the panel side, the second intake and exhaust passages is open facing the bulging portion, the bonding method The step of bringing the surface of the first panel opposite to the bonding surface into contact with the contact portion, and the first panel to the contact portion by exhausting the first air supply / exhaust passage The intermediate region is moved from the support member to the second side by causing the swollen portion to bulge to the panel side by a differential pressure between the adsorbing step and the atmosphere in the second air supply / exhaust passage and the ambient atmosphere of the contact portion. A step of bulging convexly toward the panel, a step of curving the central portion of the first panel into a convex shape by the intermediate region bulged in a convex shape, and a convex curve Contacting the second panel with the center of the first panel; and the first panel And at least one of the second panels is moved in a direction approaching each other, and a region in which the first panel and the second panel are in contact with each other is expanded toward the peripheral portions of these panels. And the cancellation | release process which cancel | releases adsorption | suction of said 1st panel is provided, The bonding method characterized by the above-mentioned is provided.

  Further, according to the present invention, the first panel is held by the holding unit, and is a bonding method to be bonded to the second panel, the holding unit including a plurality of supply and exhaust passages, A sheet member supported by the support member and in contact with the panel; and a movable member disposed between the support member and the sheet member. The sheet member includes a plurality of openings and a center of the panel. An intermediate region capable of bulging to the panel side at a position corresponding to the portion, wherein the plurality of air supply / exhaust passages face the first air supply / exhaust passage communicating with the plurality of openings and the movable member A second air supply / exhaust passage that opens, and the bonding method includes a step of bringing the surface opposite to the bonding surface of the first panel into contact with the sheet member, and the first The panel by the exhaust of the first air supply / exhaust passage The movable member is displaced by a differential pressure between the step of adsorbing to the material and the atmosphere in the second air supply / exhaust passage and the surroundings of the sheet member, and the intermediate region is directed from the support member to the second panel. And a step of bending the central portion of the first panel into a convex shape by the bulging step of bulging into a convex shape and the intermediate region bulged in a convex shape, and the first curved in a convex shape A step of bringing a central portion of the panel into contact with the second panel, and moving at least one of the first panel and the second panel in a direction approaching each other, and the first panel and the first panel A bonding method characterized by including a step of expanding a region in contact with the second panel toward each peripheral portion of these panels, and a releasing step of releasing adsorption of the first panel. Provided.

  According to the present invention, bubbles can be prevented from being mixed while holding the panel more reliably.

Explanatory drawing of the bonding apparatus which concerns on one Embodiment of this invention. (A) And (B) is explanatory drawing of a holding | maintenance unit. (A) is explanatory drawing of the contact surface of a contact part, (B) is explanatory drawing of the support surface of a supporting member, (C) is explanatory drawing of a sheet | seat member. (A) And (B) is explanatory drawing of a sheet | seat. The block diagram of a control unit. Operation | movement explanatory drawing of the bonding apparatus of FIG. Operation | movement explanatory drawing of the bonding apparatus of FIG. Operation | movement explanatory drawing of the bonding apparatus of FIG. Operation | movement explanatory drawing of the bonding apparatus of FIG. Operation | movement explanatory drawing of the bonding apparatus of FIG. Operation | movement explanatory drawing of the bonding apparatus of FIG. (A) And (B) is explanatory drawing of another example of a holding | maintenance unit. (A) is explanatory drawing of the contact surface of a contact part, (B) is explanatory drawing of the support surface of a supporting member. (A) And (B) is explanatory drawing of a sheet | seat.

<First embodiment>
<Outline of device>
Drawing 1 is an explanatory view of pasting device A concerning one embodiment of the present invention. The bonding apparatus A is an apparatus for manufacturing a laminate by bonding two panels. In the case of this embodiment, the laminated body which bonded the square panel and the square panel is manufactured. One panel is, for example, an image display panel, and the other panel is, for example, a cover panel, and the laminate constitutes an image display device. The image display panel is, for example, a liquid crystal display panel (for example, LCD), and a cover panel (for example, a cover glass) is bonded to the display surface side (the upper surface in the bonding process). The cover panel is a light transmissive panel, such as a glass plate or a resin plate.

  An adhesive layer is formed in advance on at least one of the two panels to be bonded together, and the two panels can be bonded together by this adhesive layer. The adhesive layer can be formed by a coating layer by applying an adhesive or the like, an adhesive sheet, an adhesive film, or the like.

  The bonding apparatus A includes a holding unit 1, an elevating table 2, a chamber unit 3, a base table 4, a chamber unit 5, a transfer unit 6, a plurality of elevating mechanisms 7, and air supply / exhaust units 8A to 8C. Including.

<Holding unit>
The holding unit 1 will be described with reference to FIGS. 1, 2 (A), 2 (B), 3 (A) to 3 (C), and 4 (A) to 4 (C). 2A and 2B are explanatory views of the holding unit 1 and show a cross-sectional view at the center thereof. FIG. 2A shows a state where the intermediate region RM of the contact portion 12 is not bulged, and FIG. 2B shows a state where the intermediate region RM is bulged. FIG. 3A is an explanatory view of the contact surface CS of the contact portion 12 and is a bottom view of the holding unit 1. FIG. 3B is an explanatory view of the support surface 111 of the support member 11, and FIG. 3C is an explanatory view of the sheet member 13. FIG. 4A is an explanatory view of the sheet 141 constituting the sheet member 14 and shows the lower surface (the surface bonded to the sheet 142). FIG. 4B is an explanatory view of the sheet 142 constituting the sheet member 14 and shows the lower surface (contact surface CS) thereof. FIG. 4C is an explanatory view of another example of the sheet 141 constituting the sheet member 14 and shows the upper surface (the surface on the sheet member 13 side).

  The holding unit 1 holds one of the panels that are bonded to each other. The holding unit 1 includes a support member 11 and a contact portion 12. The support member 11 constitutes the main body of the holding unit 1. The contact portion 12 is a portion that comes into contact with the held panel, and is supported by the support member 11.

  A plurality of air supply / exhaust paths PS <b> 1 to PS <b> 3 are formed in the support member 11. The plurality of air supply / exhaust paths PS <b> 1 to PS <b> 3 are all open to the support surface 111. The support surface 111 includes a pair of horizontal support surfaces 111a positioned at both ends in the longitudinal direction, and a support surface 111b positioned between the pair of support surfaces 111a. The pair of support surfaces 111a and 111b are formed in steps that are shifted in the height direction, and the support surface 111b is positioned in a position recessed above the pair of support surfaces 111a. That is, a recess (support surface 111b) is formed in the support surface 111, and a sheet member 13 to be described later is fixed to the recess.

  In the present embodiment, the support surface 111 is the lower surface of the support member 11. The outline shape (plan view shape) of the support surface 111 can be, for example, the same shape as the panel to be held or a similar shape. In the case of this embodiment, the support surface 111 is square.

  The air supply / exhaust passage PS1 is open on one side of the support surface 111 (here, one support surface 111a (left side in FIGS. 2A and 2B)). In this embodiment, one opening is provided in the supply / exhaust path PS1, but the supply / exhaust path PS1 may be branched into a plurality of locations. When a plurality of openings are provided, the openings may be opened along one side of the support surface 111.

  The supply / exhaust passage PS2 is open on the other side of the support surface 111 (here, the other support surface 111a (the right side in FIGS. 2A and 2B)). In this embodiment, one opening is provided in the supply / exhaust path PS2, but the supply / exhaust path PS2 may be branched into a plurality of locations. When there are a plurality of openings, the openings may be opened along the other side of the support surface 111.

  The air supply / exhaust path PS1 and the air supply / exhaust path PS2 communicate with each other and also with the air supply / exhaust unit 8A. The supply and exhaust passages PS1 and PS2 are mainly used for adsorbing and holding panels. The number and arrangement of the openings of the supply / exhaust passages PS1 and PS2 formed on the support surface 111 can be appropriately designed according to the shape of the panel to be held.

  The supply / exhaust passage PS3 is opened at a plurality of locations (here, four locations) on the support surface 111 (here, the support surface 111b). One opening may be provided for the supply / exhaust passage PS3 in the support surface 111. In the case of the present embodiment, the opening of the air supply / exhaust passage PS3 is formed at the center of the support surface 111 (the center of the support surface 111b). In the case of this embodiment, the center part of the support surface 111 is a position facing the center part of the panel hold | maintained. The air supply / exhaust path PS3 communicates with the air supply / exhaust unit 8B.

  In the present embodiment, an annular groove 112 is formed on the support surface 111b. In the present embodiment, a plurality of grooves 113 are formed on the support surface 111b. The plurality of grooves 113 are branched from the opening of the air supply / exhaust passage PS3. In this embodiment, the plurality of grooves 113 extend in a mesh shape and are continuous with the grooves 112. The functions of the groove 112 and the groove 113 will be described later.

  A plurality of attachment holes 114 are formed in the pair of support surfaces 111a. In the present embodiment, the plurality of mounting holes 114 are screw holes, and the sheet member 14 constituting the contact portion 12 is fixed to the pair of support surfaces 111a with screws 12b.

  In the case of this embodiment, when the contact part 12 is divided roughly, it will be provided with the sheet | seat member 13 and the sheet | seat member 14, and these sheet members are laminated | stacked and formed. The sheet member 13 is located between the sheet member 14 and the support member 11. In other words, the sheet member 13 is located on the support member 11 side, and the sheet member 14 is located on the opposite side (panel side). The sheet member 14 is further a laminated body of the sheet 141 and the sheet 142. The lower surface of the sheet member 14 constitutes a contact surface CS. The contact surface CS is a surface that contacts the held panel.

  As shown in FIG. 3A, the contact portion 12 includes end regions EA1 and EA2 and an intermediate region RM. The end areas EA1 and EA2 are located at both ends of the contact portion 12, and the intermediate area RM is located between the end area EA1 and the end area EA2. The intermediate region RM is a region that is not fixed to the support member 11 and can bulge to the panel side, and the end regions EA1 and EA2 are fixed regions that are fixed to the support member 11 with screws 12b and bulge to the panel side. It is an impossible area. In the present embodiment, the intermediate region RM is configured by the sheet member 13 and the sheet member 14, and the end regions EA1 and EA2 are configured by only the sheet member 14.

  Of the contact surface CS, the end regions EA1 and EA2 may have adhesiveness capable of holding the panel. Thereby, the holding power of the panel can be improved. When holding the panel, the positions of the end areas EA1 and EA2 may be designed so that the end area EA1 adheres to one end of the panel and the end area EA2 sticks to the other end of the panel. The intermediate region RM may have a non-adhesive property that does not allow the panel to be adhered, or may have an adhesive property that can hold the panel. The adhesiveness of the intermediate region RM may be the same as the adhesiveness of the end regions EA1 and EA2, or may be lower than the adhesiveness of the end regions EA1 and EA2.

  In terms of improving the holding power of the panel, it is preferable that the entire contact surface CS, that is, the end regions EA1 and EA2 and the intermediate region RM have adhesiveness. In the present embodiment, a configuration in which the entire contact surface CS has adhesiveness is assumed.

  Next, as shown in FIG. 3A, a plurality of openings 12a are formed in the contact surface CS. The plurality of openings 12a communicate with the air supply / exhaust path PS1 and the air supply / exhaust path PS2, and the operation of the air supply / exhaust unit 8A causes air below the contact portion 12 near the opening 12a to be supplied to the air supply / exhaust path PS1 and the air supply / exhaust path PS1. The air is sucked into the exhaust path PS2. In the present embodiment, the plurality of openings 12a are distributed in a matrix in the intermediate region RM, but the openings 12a may also be provided in the end regions EA1 and EA2.

  The sheet member 13 is formed of a flexible sheet. The sheet member 13 has the same area as the support surface 111b, and its peripheral portion excluding the central portion 131 is fixed to the support surface 111b as a whole. In the present embodiment, the thickness of the sheet member 13 is the same as the difference in height between the pair of support surfaces 111a and 111b, and the lower surface of the sheet member 13 (the surface on the sheet member 14 side) is a pair. It is flush with the support surface 111a.

  The central portion 131 is a virtual region whose outline overlaps with the annular groove 112, and is a circular region in the present embodiment. The central portion 131 constitutes a bulging portion that can bulge from the support surface 111b to the panel side. The central portion 131 may be referred to as a bulging portion 131.

  The opening portion of the air supply / exhaust passage PS3 on the support surface 111 is opened facing the intermediate region RM, in particular, the bulging portion 131 of the sheet member 13. The bulging portion 131 can bulge from the support member 11 due to a differential pressure between the inside of the air supply / exhaust passage PS3 and the ambient atmosphere of the contact portion 12. The groove 112 and the groove 113 formed on the support surface 111b facilitate the equalization of the air pressure in the bulging portion 131, and the bulging portion 131 can be bulged in a convex shape.

  The groove 112 is also a boundary groove that defines a fixing region and a non-fixing region between the sheet member 13 and the support surface 111b. When the sheet member 13 is fixed to the support surface 111b with an adhesive, if the adhesive protrudes into the region surrounded by the groove 112, the bulging portion 131 may be partially fixed to the support surface 111b and the bulging may be prevented. There is. Since the groove 112 is formed, the adhesive that tries to protrude into the region surrounded by the groove 112 enters the groove 112 and is prevented from protruding into the region.

  Next, the sheet member 14 will be described. The sheet member 14 is formed by laminating a sheet 141 and a sheet 142 having the same outer shape, and being fixed to each other with an adhesive or the like. Both the sheet 141 and the sheet 142 have flexibility.

  In the sheet 141, openings 141a and 141b penetrating the sheet 141 in the thickness direction are formed. The opening 141a is formed at a position overlapping the opening of the air supply / exhaust path PS1 opened on one support surface 111a of the support member 11, and communicates with the air supply / exhaust path PS1. The opening 141b is formed at a position overlapping the opening of the air supply / exhaust path PS2 opened on the other support surface 111a of the support member 11, and communicates with the air supply / exhaust path PS2.

  The sheet 141 is also formed with a plurality of grooves 141c. The plurality of grooves 141c are formed on the lower surface of the sheet 141 (the surface on the sheet 142 side). In the case of the present embodiment, the plurality of grooves 141c includes one groove extending in the longitudinal direction of the sheet 141 and a plurality of grooves intersecting with the groove, and communicates with the openings 141a and 141b. The configuration of the groove 141c is not limited to this, and it is only necessary to communicate with the opening 141a or the opening 141b.

  A plurality of mounting holes 141d are formed at both ends of the sheet 141 in the longitudinal direction. The plurality of attachment holes 141d are formed at positions overlapping the plurality of attachment holes 114 formed in the support surface 111a of the support member 11, and penetrate the sheet 141 in the thickness direction.

  In the sheet 142, a plurality of openings 12a penetrating the sheet 142 in the thickness direction are formed. The plurality of grooves 141c described above are arranged so as to overlap the plurality of openings 12a. By overlapping the sheet 142 on the lower surface of the sheet 141, the plurality of grooves 141c are closed on the lower surface side of the sheet 141, and a communication path is formed. This communication path connects the air supply / exhaust paths PS1 and PS2 and the plurality of openings 12a via the openings 141a and 141b.

  A plurality of attachment holes 142 a are formed at both ends in the longitudinal direction of the sheet 142. The plurality of attachment holes 142a are formed at positions overlapping the plurality of attachment holes 114 formed in the support surface 111a of the support member 11, and penetrate the sheet 142 in the thickness direction.

  As shown in FIG. 3A, the sheet member 14 is fixed to the support member 11 with a plurality of screws 12b in the end regions EA1 and EA2. The central region RM, which is the central portion of the sheet member 14, is not fixed to the support member 11 and can bulge to the panel side. Further, the contact surfaces of the sheet member 13 and the sheet member 14 are not fixed to each other but merely overlap.

  FIG. 2B shows an example of bulging of the intermediate region RM. In the example of the figure, air is supplied to the air supply / exhaust passage PS3. As a result, pressurized air is supplied to the gap between the bulging portion 131 and the support surface 111b, and the atmospheric pressure in the gap becomes higher than the ambient atmosphere (external atmosphere) of the contact portion 12. As a result, the bulging portion 131 bulges downward in a convex shape, the sheet member 14 is pressed downward by the bulging portion 131, and the intermediate region RM of the sheet member 14 bulges downward in a convex shape. By increasing the pressing force at the central portion of the intermediate region RM by the bulging portion 131, the intermediate region RM of the sheet member 14 can be relatively gently bulged from the peripheral portion to the central portion. The sheet members 13 and 14 can be made of a flexible or stretchable material and a sheet material having a film thickness within a range in which such swelling is possible.

  In the case where the contact surface CS has adhesiveness, the sheet 142 is, for example, a silicone rubber sheet whose surface is processed to have adhesiveness, and the adhesiveness may be restored repeatedly by washing. The sheet 141 is, for example, plastic.

  A plurality of grooves may be formed in the sheet 141 in order to bulge the intermediate region RM more smoothly. FIG. 4C shows an example. The example in the figure shows the upper surface of the sheet 141 (the surface on the support member 11 side), and a plurality of linear grooves 141e are formed. Each groove 141e extends in a direction intersecting with the longitudinal direction of the sheet 141 (here, the orthogonal direction) and is arranged in the longitudinal direction. When the bulging portion 131 is bulged, the sheet 141 is easily bent from each groove 141e, that is, bends easily. Even if the sheet 141 is made of a material having low flexibility, the sheet 141 It becomes easier to bulge the intermediate region RM.

<Other configuration of the bonding device>
With reference to FIG. 1, the other structure of the bonding apparatus A is demonstrated. The lifting table 2 is a plate-like member arranged in a horizontal posture, and is moved up and down by a plurality of lifting mechanisms 7. The elevating mechanism 7 includes a support 71 supported by the base table 4 and a drive mechanism 72. The elevating mechanism 7 is, for example, a ball screw mechanism, and the drive mechanism 72 moves on a ball screw formed on a part of the support 71. The drive mechanism 72 includes a ball nut, a drive source such as a motor that rotates the ball nut, and a power transmission mechanism such as a gear device. The drive mechanism 72 is mounted on the lift table 2, and the lift table 2 can be lifted and lowered in a horizontal posture by driving the plurality of lift mechanisms 7 in synchronization.

  The holding unit 1 is supported on the lifting table 2 via the lifting mechanism 21. The lifting mechanism 21 includes a lifting shaft 212 and a drive mechanism 211 that lifts and lowers the lifting shaft 212. The elevating mechanism 21 is, for example, a ball screw mechanism or a rack-pinion mechanism. The holding unit 1 is fixed to the lower end portion of the lifting shaft 212. Therefore, the holding unit 1 can be raised and lowered by driving the lifting mechanism 21.

  A chamber unit 3 is fixed to the lower surface of the lifting table 2. The chamber unit 3 is a box that opens downward, and the holding unit 1 is accommodated in the internal space 31 so as to be able to advance and retreat. A through hole 32 through which the elevating shaft 212 is inserted is formed at the top of the chamber unit 3, and a cylindrical bellows 33 is fixed so as to surround the elevating shaft 212 and the through hole 32. The bellows 33 has an upper end connected to the lower surface of the chamber unit 3 facing the internal space 31 and a lower end connected to the holding unit 1. The bellows 33 prevents the internal space 31 from communicating with the through hole 32, that is, the space above the chamber unit 3, so that the airtightness of the internal space 31 can be maintained. Accordingly, the holding unit 1 can be raised and lowered while maintaining the airtightness of the internal space 31. The internal space 31 of the chamber unit 3 communicates with the air supply / exhaust unit 8C.

  A chamber unit 5 is supported on the base table 4 via a plurality of support columns 41. On the upper surface of the chamber unit 5, a mounting table 51 on which a panel is mounted is fixed. The mounting table 51 is disposed so as to face the holding unit 1.

  A seal 52 is provided around the entire periphery of the upper surface of the chamber unit 5. When the lifting table 2 is lowered by the lifting mechanism 7, the chamber unit 3 is lowered, and the lower surface of the chamber unit 3 and the upper surface of the chamber unit 5 come into contact with each other. More precisely, the lower surface of the chamber unit 3 and the seal 52 come into contact with each other, and the seal 52 is compressed. As a result, the internal space 31 surrounded by the chamber unit 3 and the chamber unit 5 is airtight.

  A transfer unit 6 is mounted on the base table 4. The transfer unit 6 delivers a panel between the outside and the mounting table 51. The transfer unit 6 includes a plurality of pins 61, a support table 62 that supports the plurality of pins 61, and an elevating mechanism 63 that supports the support table 62. Each pin 61 is provided by being inserted through a pin hole 5 a formed through the chamber unit 5, and can protrude and retract on the mounting table 51 by raising and lowering the support table 62. FIG. 1 shows a state in which each pin 61 protrudes on the mounting table 51. The elevating mechanism 63 is, for example, an air cylinder or an electric cylinder, and elevates the support table 62 in a horizontal posture. A cylindrical bellows 53 is fixed between the support table 62 and the lower surface of the chamber unit 5. Specifically, the upper end of the bellows 53 is connected to the lower surface of the chamber unit 5, and the lower end of the bellows 53 is connected to the upper surface of the support table 62. The bellows 53 prevents the upper space of the chamber unit 5 from communicating with the lower space of the chamber unit 5 through the pin hole 5a. As a result, the pin 61 can be moved up and down while maintaining the airtightness of the space above the chamber unit 5.

  The air supply / exhaust units 8A to 8C are composed of, for example, a pump and an electromagnetic control valve. The air supply / exhaust unit 8A can supply, exhaust, close, and open the air supply and exhaust passages PS1 and PS2. The air supply / exhaust unit 8B can supply, exhaust, close, and open the air supply / exhaust path PS3. The air supply / exhaust unit 8A communicates with the air supply / exhaust paths PS1 and PS2 via the air supply / exhaust path formed in the elevating shaft 212 of the elevating mechanism 21. Similarly, the air supply / exhaust unit 8B communicates with the air supply / exhaust path PS3 through an air supply / exhaust path formed in the elevating shaft 212 of the elevating mechanism 21. The air supply / exhaust unit 8C can supply, exhaust, close, and open the internal space 31.

<Control unit>
FIG. 5 is a block diagram of the control unit 9 that controls the bonding apparatus A. The control unit 9 includes a processing unit 91 such as a CPU, a storage unit 92 such as a RAM and a ROM, and an interface unit 93 that interfaces an external device and the processing unit 91. The interface unit 93 includes a communication interface that performs communication with the host computer. The host computer is, for example, a computer that controls the entire manufacturing facility in which the bonding apparatus A is arranged.

  The processing unit 91 executes a program stored in the storage unit 92 and controls various actuators 94 based on detection results of various sensors 95 and instructions from a host computer or the like. The various sensors 95 include, for example, a sensor that detects the position of the holding unit 1 that is lifted and lowered by the lifting mechanism 21, a sensor that detects the position of the lifting table 2 that is lifted and lowered by the plurality of lifting mechanisms 7, and the transfer unit 6. Various sensors such as a sensor for detecting the position of the support table 62 to be moved up and down are included. The various actuators 94 include, for example, a drive source for the air supply / exhaust units 8A to 8C, an electromagnetic control valve, a drive source for the lift mechanism 21, a drive source for the lift mechanism 7, and a drive source for the drive mechanism 63.

<Control example>
A control example of the processing unit 91 will be described with reference to FIGS. Here, an example in which the internal space 31 is evacuated and the panels are bonded together in the internal space 31 will be described. Bonding the panels together in a vacuum makes it easier to prevent air bubbles from entering between the panels.

  The state ST1 in FIG. 6 shows a state where the panel P1 and the panel P2 to be bonded are carried into the bonding apparatus A. The panel P1 is, for example, a cover panel, and the panel P2 is, for example, an image display panel. An uncured adhesive layer is formed in advance on the upper surface of the panel P2 by a separate process.

  The chamber unit 3 and the chamber unit 5 are separated from each other in the vertical direction. The plurality of pins 61 are in a state of protruding from the mounting table 51, and the contact portion 12 of the holding unit 1 is located slightly below the lower surface of the chamber unit 3.

  The panel P2 is carried into the bonding apparatus A by a transfer robot (not shown) and placed on the plurality of pins 61. The panel P1 is carried directly under the contact portion 12 by a transfer robot (not shown), and is held by the holding unit 1 according to the procedure described later.

  In the state ST2, the plurality of pins 61 are lowered, and the panel P2 is transferred from the plurality of pins 61 onto the mounting table 51. The holding unit 1 holding the panel P <b> 1 is raised by the elevating mechanism 21 and is positioned in the internal space 31.

  In the state ST3 of FIG. 7, the chamber unit 3 is lowered and the lower surface of the chamber unit 3 is brought into contact with the upper surface of the chamber unit 5 to make the internal space 31 airtight. At this time, the panel P1 and the panel P2 are vertically separated. The air in the internal space 31 is exhausted by driving the air supply / exhaust unit 8C, and the internal space 31 is evacuated.

  While maintaining the internal space 31 in a vacuum state, the holding unit 1 holding the panel P1 in the state ST4 is lowered to the panel P2 side by the elevating mechanism 21, and the panels P1 and P2 are bonded together. Since the panels are bonded together under vacuum, air bubbles can be prevented from being mixed between the panels. Thereafter, the internal space 31 is opened to the atmosphere by the air supply / exhaust unit 8C.

  In state ST5 of FIG. 8, the holding unit 1 is raised by the elevating mechanism 21, and the holding unit 1 is separated from the panel P1. On the mounting table 51, the laminated body P3 of the panels P1 and P2 bonded together is placed. The chamber unit 3 is raised in the state ST6, and the internal space 31 is released from the sealed state. Also, the plurality of pins 61 are raised to lift the stacked body P3 from the mounting table 51. A transfer robot (not shown) carries the laminated body P3 out of the bonding apparatus A and ends one unit of processing.

  The operation of the holding unit 1 will be described with reference to FIGS. First, the operation in which the holding unit 1 holds the panel P1 in the state ST1 in FIG. 6 will be described. A state ST101 in FIG. 9 shows a state in which the panel P1 is carried directly under the holding unit 1. The panel P1 is placed on the hand H of the transfer robot.

  In state ST102, the holding unit 1 is lowered onto the panel P1 by the elevating mechanism 21. The bulging portion 131 is located at a position facing the central portion of the panel P1. The contact part 12 adheres to the panel P1 by making the contact part 12 contact the upper surface of the panel P1. Together with this adhesion, the air supply / exhaust unit 8A is driven to exhaust the air in the air supply / exhaust paths PS1 and PS2 and perform suction. Thus, air is sucked from the opening 12a, and the panel P1 is adsorbed to the contact portion 12. In state ST103, the holding unit 1 is raised by the elevating mechanism 21, and the state ST2 in FIG. 6 is obtained.

  Note that the panel P1 may be adhered by the contact portion 12 and the holding unit 1 may be lifted at the same time, and the panel P1 may be sucked and adsorbed by the air supply / exhaust unit 8A while being raised. As a result, it is possible to shorten the tact time associated with the adsorption and elevation of the panel P1.

  A state ST104 in FIG. 10 corresponds to the state ST3 in FIG. 7 and is a state in which the internal space 31 is in a vacuum state. The panel P1 continues to be attracted to the contact portion 12 of the holding unit 1. In the state ST105, a differential pressure is generated between the air supply / exhaust path PS3 and the atmosphere around the contact portion 12 (the atmosphere in the internal space 31; here, vacuum), and the bulging portion 131 bulges from the support member 11 in a convex shape. Let it come out. As a result, the intermediate region RM of the sheet member 14 bulges out from the support member 11 in a convex shape. The differential pressure is generated by opening the air supply / exhaust passage PS3 to the atmosphere by the air supply / exhaust unit 8B or supplying the pressurized air AUP to the air supply / exhaust passage PS3. In the example of FIG. 10, an arrow supplying air AUP pressurized to the air supply / exhaust path PS <b> 3 is shown for easy understanding. Here, before the state ST105 bulges, the air in the air supply / exhaust passage PS3 may be exhausted by the air supply / exhaust unit 8B, and the bulge portion 113 may be adsorbed to the support surface 111b of the support member 11. As a result, the intermediate region RM can be prevented from bulging unexpectedly.

  By the supply of the pressurized air AUP, the intermediate region RM of the sheet member 14 bulges toward the panel P2, and the panel P1 is elastically curved following the bulge of the intermediate region RM of the sheet member 14. Bulges in a convex shape toward the panel P2. The term “bulge in a convex shape” as used herein means that the intermediate region RM of the sheet member 14 is curved in a convex shape toward the panel P2.

  At this time, since the contact portion 12 is interposed between the support member 11 and the panel P1, the contact portion 12 serves as a buffer member, and the curve of the panel P1 becomes relatively gentle. That is, it is easier to prevent the extreme bending from occurring because the contact portion 12 is interposed than when the panel P1 is directly supplied with air and bent. In addition, since the pressure applied to the panel P1 uses a difference in atmospheric pressure, the applied pressure is not extremely concentrated on a specific portion of the panel P1, and the applied pressure can be dispersed over a wide range. Therefore, damage to the panel P1 can be suppressed and the panel P1 can be prevented from falling off. Furthermore, it becomes easy to control the curvature of the panel P1.

  Further, in the case of the present embodiment, the bulging portion 131 increases the pressing force at the center portion of the intermediate region RM of the sheet member 14, so that the intermediate region RM of the sheet member 14 is relatively gentle from the peripheral portion to the central portion. Can be inflated. For this reason, panel P1 can also be curved comparatively gently from the peripheral part to the center part, and can further prevent damage to panel P1 and prevent dropout of panel P1.

  Further, since the sheet member 14 has a two-layer structure of the sheet 141 and the sheet 142, and the flow path of the opening 12a by the groove 141c is formed therein, the opening 12a can be formed at an arbitrary position. During the expansion of the intermediate region RM, the adsorption at a plurality of positions including the central portion of the panel P1 can be maintained.

  Furthermore, since the entire surface of the contact surface CS is adhesive, the panel P1 is adhered to the entire surface of the contact surface CS. Therefore, it is easy to ensure the holding force even under vacuum, and the position of the panel P1 with respect to the holding unit 1 Misalignment is prevented. The prevention of misalignment contributes to improving the accuracy of the bonding position between the panel P1 and the panel P2.

  As the panel P1 bulges toward the panel P2 side, the central portion of the panel P1 first contacts the panel P2. In the subsequent state ST106, the holding unit 1 is lowered by the elevating mechanism 21, and the panel P1 and the panel P2 are brought into full contact with each other. Thereby, bonding is completed and the laminated body P3 is obtained. Here, when the holding unit 1 is lowered after the center portion of the panel P1 is brought into contact with the panel P2, the convex bulge in the center portion of the panel P1 is pushed back. As a result, the contact between the panel P1 and the panel P2 spreads radially from the surface contact only at the center to the surface contact over the entire surface. Thereby, even if air bubbles are mixed between the panels P1 and P2, the air bubbles are pushed out to the peripheral portions of the panels P1 and P2, and the panels P1 and P2 are bonded together. . In the case of the present embodiment, since the panels P1 and P2 are bonded together under vacuum, there is almost no air, but it is difficult to completely eliminate bubbles. However, even if air bubbles are mixed between the panel P1 and the panel P2, the air bubbles are completely adhered to the panels P1 and P2 by bonding the panels P1 and P2 so as to push out air to the peripheral portion. It is possible to obtain a laminated body P3 which is pushed out to the outside and does not contain bubbles.

  After the bonding of the panels P1 and P2 is completed, the internal space 31 is opened to the atmosphere as described above. As shown in a state ST107 in FIG. 11, the exhaust of the supply / exhaust passages PS1 and PS2 is terminated and the adsorption is released. The supply / exhaust passages PS1 and PS2 may be opened to the atmosphere. Further, the supply of the pressurized air AUP into the supply / exhaust passage PS3 is stopped. At this time, the air supply / exhaust path PS3 may be opened to the atmosphere, or the supply of pressurized air AUP into the air supply / exhaust path PS3 may be continued.

  Next, the operation moves to the operation of separating the holding unit 1 and the panel P1. In the state ST108, the air supply / exhaust unit 8A is driven to supply the pressurized air AUP to the air supply / exhaust paths PS1 and PS2. The pressurized air AUP is ejected from the opening 12a, and the panel P1 is positively separated from the contact surface CS. Thus, the air supply / exhaust passages PS1 and PS2 can be used not only for adsorption of the panel P1, but also for promoting separation. The air supply / exhaust path PS3 is opened to the atmosphere (or pressurized air AUP is supplied), and the holding unit 1 is further raised by the elevating mechanism 21, and the intermediate region RM is made convex by the bulging of the bulging portion 113. Inflate. This also promotes separation of the contact portion 12 and the panel P1, and the stacked body of the panels P1 and P2 can be held on the mounting table 51. The state ST109 shows a state in which the supply of the pressurized air AUP to the supply / exhaust passages PS1 and PS2 is stopped and the opening of the supply / exhaust passage PS3 to the atmosphere (or the supply of pressurized air AUP) is stopped.

  Thus, the bonding of the panels P1 and P2 is completed. In the present embodiment, the panel P1 and the panel P2 are bonded together in a vacuum, but may be performed in an air atmosphere. In this case, the formation of the internal space 31 and the configuration for evacuating the internal space 31 are unnecessary. When bonding is performed in an air atmosphere, the supply / exhaust of the supply / exhaust passages PS1 and PS2 is the same as that performed under vacuum, but when the bulging portion 113 is expanded, the supply / exhaust passage PS3 is opened to the atmosphere. It is not possible to bulge just by letting it. For this reason, at this time, it is necessary to supply the pressurized air AUP into the supply / exhaust passage PS3 and to make the inside of the supply / exhaust passage PS3 higher than the atmospheric pressure.

<Second embodiment>
In the first embodiment, the intermediate region RM is bulged by elastic deformation of the sheet member 13, but a configuration in which the intermediate region RM is bulged by displacement of the movable member can also be employed. Hereinafter, an example of the configuration will be described.

  FIG. 12A and FIG. 12B are explanatory diagrams of a holding unit 1A that replaces the holding unit 1 of the first embodiment. In the following description and drawings, among the configurations of the holding unit 1A, the same or similar configurations as those of the holding unit 1 are denoted by the same reference numerals. Therefore, in the following description, the difference between the holding unit 1 and the holding unit 1A will be mainly described. However, in outline, the holding unit 1A is provided with a movable member 15 instead of the sheet member 13.

  12 (A) and 12 (B) show a cross-sectional view of a section along a broken line passing through the center of the holding unit 1A and the movable member 15, and FIG. 12 (A) shows an intermediate region RM of the contact portion 12. FIG. 12B shows a state in which the intermediate region RM bulges. FIG. 13A is an explanatory view of the contact surface CS of the contact portion 12 and is a bottom view of the holding unit 1A. FIG. 13B is an explanatory diagram of the support surface 111 of the support member 11. 13C and 13D are perspective views of the movable member 15, FIG. 13C is a perspective view seen from the upper side (the lifting shaft 212 side), and FIG. 13D is the lower side ( It is the perspective view seen from the sheet | seat member 14 side. FIG. 14A is an explanatory diagram of the sheet 141 constituting the sheet member 14 and shows the lower surface (the surface bonded to the sheet 142). FIG. 14B is an explanatory diagram of the sheet 142 constituting the sheet member 14 and shows the lower surface (contact surface CS) thereof.

  The holding unit 1 </ b> A includes a support member 11 and a contact portion 12. A plurality of air supply / exhaust paths PS <b> 1 to PS <b> 3 are formed in the support member 11. The plurality of air supply / exhaust paths PS <b> 1 to PS <b> 3 are all open to the support surface 111. The support surface 111 includes a pair of horizontal support surfaces 111a positioned at both ends in the longitudinal direction, and a support surface 111b positioned between the pair of support surfaces 111a. In the case of this embodiment, the pair of support surfaces 111a and the support surfaces 111b are continuous without a step.

  The support surface 111b is formed with a recess 111c opened at a position corresponding to the intermediate region RM, and the movable member 15 is inserted into the recess 111c. Although one set of the recess 111c and the movable member 15 may be provided, a plurality of sets (here, 16 sets) are provided in the present embodiment. The 16 sets of concave portions 111c and the movable members 15 are arranged in a matrix in the intermediate region RM, and are arranged in, for example, four rows in the longitudinal direction of the support surface 111b and, for example, four rows in the lateral direction.

  The recess 111 c constitutes a guide hole that guides the displacement of the movable member 15. In the case of the present embodiment, the movable member 15 has a protruding position (FIG. 12B) protruding from the support surface 111b toward the sheet member 14 and a non-projecting position (FIG. A)). The shape of the recess 111c is formed in accordance with the shape of the movable member 15, and in the case of this embodiment, it is formed in a cylindrical shape with a circular cross section. The recess 111c communicates with the air supply / exhaust path PS3 through a recess 111d formed in the upper wall portion.

  The movable member 15 has a cylindrical shape as a whole, and is made of a metal material such as aluminum, for example. A concave portion 15 a is formed on the upper surface of the movable member 15, and a pressing surface 15 c is formed on the lower surface of the movable member 15. The pressing surface 15c is formed in a convex shape. A groove 15b is formed on the side circumferential surface of the movable member 15 over the entire circumference, and a seal member 16 such as an O-ring is fitted in the annular groove 15b. The seal member 16 is interposed between the inner peripheral surface of the recess 111c and the side peripheral surface of the movable member 15, and seals the space on the air supply / exhaust passage PS3 side and the space on the seat member 14 side to prevent air leakage. It is preventing.

  In the case of the present embodiment, the contact portion 12 includes the movable member 15 and the sheet member 14 described above. The movable member 15 is located between the sheet member 14 and the support member 11, and the sheet member 14 can be bulged when the movable member 15 is displaced (projects) toward the sheet member 14.

  As shown in FIG. 13A, the contact portion 12 includes end regions EA1 and EA2 and an intermediate region RM. The intermediate region RM is a region that is not fixed to the support member 11 and can bulge to the panel side, and the end regions EA1 and EA2 are fixed regions that are fixed to the support member 11 with screws 12b and bulge to the panel side. It is an impossible area. In the present embodiment, the movable member 15 is disposed in the intermediate region RM, and the end regions EA1 and EA2 are configured by only the sheet member 14.

  Of the contact surface CS, the end regions EA1 and EA2 may have adhesiveness capable of holding the panel. Thereby, the holding power of the panel can be improved. When holding the panel, the end areas EA1 and EA2 are configured so that the end area EA1 sticks to one end of the panel and the end area EA2 sticks to the other end of the panel, and is arranged at a predetermined position. Is done. The intermediate region RM may have a non-adhesive property that does not allow the panel to be adhered, or may have an adhesive property that can hold the panel. The adhesiveness of the intermediate region RM may be the same as the adhesiveness of the end regions EA1 and EA2, or may be lower than the adhesiveness of the end regions EA1 and EA2.

  In terms of improving the holding power of the panel, it is preferable that the entire contact surface CS, that is, the end regions EA1 and EA2 and the intermediate region RM have adhesiveness. In the present embodiment, a configuration in which the entire contact surface CS has adhesiveness is assumed.

  As shown in FIG. 13A, the contact surface CS has a plurality of openings 12a. The plurality of openings 12a communicate with the air supply / exhaust path PS1 and the air supply / exhaust path PS2 through communication paths (grooves 141c and openings 141a, 141b) described later. Therefore, by the operation of the air supply / exhaust unit 8A, the air below the contact portion 12 in the vicinity of the opening 12a is sucked into the air supply / exhaust passage PS1 and the air supply / exhaust passage PS2 through the opening 12a. In the present embodiment, the plurality of openings 12a are distributed in a matrix in the intermediate region RM, but the openings 12a may also be provided in the end regions EA1 and EA2.

  Next, the sheet member 14 will be described. The sheet member 14 is the same as that of the first embodiment, and is formed by laminating a sheet 141 and a sheet 142 having the same outer shape, and being fixed to each other with an adhesive or the like. Both the sheet 141 and the sheet 142 have flexibility.

  In the sheet 141, openings 141a and 141b penetrating the sheet 141 in the thickness direction are formed, and the opening 141a communicates with the air supply / exhaust path PS1. The opening 141b is formed at a position overlapping the opening of the air supply / exhaust path PS2 opened on the other support surface 111a of the support member 11, and communicates with the air supply / exhaust path PS2.

  In the sheet 141, a plurality of grooves 141c are formed on the lower surface of the sheet 141 (the surface on the sheet 142 side). In the case of the present embodiment, the plurality of grooves 141c are fishbone-shaped collective grooves constituted by one groove extending in the short direction of the sheet 141 and a plurality of grooves intersecting with the groove, and the opening 141a And 141b.

  A plurality of mounting holes 141d are formed at both ends in the longitudinal direction of the sheet 141 at positions overlapping with the plurality of mounting holes 114 formed in the support surface 111a.

  In the sheet 142, a plurality of openings 12a penetrating the sheet 142 in the thickness direction are formed, and the above-described plurality of grooves 141c and the plurality of openings 12a are arranged so as to overlap each other. That is, the above-mentioned “the plurality of openings 12a are distributed in a matrix in the intermediate region RM” means that the plurality of openings 12a are formed along the plurality of grooves 141c and facing the grooves 141c. That's what it means. Here, the plurality of openings 12a are formed "opening along the plurality of grooves 141c and facing the grooves 141c" because they are arranged linearly or in a staggered manner, or randomly. Includes both irregular placements. By overlapping the sheet 142 on the lower surface of the sheet 141, the plurality of grooves 141c are closed on the lower surface side of the sheet 141, and a communication path is formed. The openings 141a and 141b and the plurality of openings 12a communicate with each other through this communication path.

  A plurality of mounting holes 142a are formed at both ends in the longitudinal direction of the sheet 142 at positions overlapping with the plurality of mounting holes 114 formed in the support surface 111a.

  As shown in FIG. 13A, the sheet member 14 is fixed to the support member 11 with a plurality of screws 12b in the end regions EA1 and EA2. The central region RM, which is the central portion of the sheet member 14, is not fixed to the support member 11 and can bulge to the panel side.

  FIG. 12B shows an example of bulging of the intermediate region RM. In the example of the figure, pressurized air is supplied to the supply / exhaust passage PS3. As a result, pressurized air is supplied to the concave portion 111c, and the atmospheric pressure in the concave portion 111d and the concave portion 15a in the concave portion 111c becomes higher than the ambient atmosphere (external atmosphere) of the contact portion 12. As a result, the movable member 15 protrudes toward the sheet member 14 so as to be pushed out of the recess 111c. The sheet member 14 is pressed downward by the movable member 15, and the intermediate region RM of the sheet member 14 bulges downward in a convex shape. By providing a plurality of movable members 15, the intermediate region RM of the sheet member 14 can be relatively gently bulged from the peripheral portion to the central portion. The sheet member 14 can be made of a flexible or stretchable material and a sheet material having a film thickness within a range in which such swelling is possible. Since the pressing surface of the movable member 15 has a convex shape, even if the sheet member 14 is deformed due to bulging, at least a part of the pressing surface is always in contact with the sheet member 14, so that the contact state is maintained. Can do. Further, when the pressing surface of the movable member 15 and the sheet member 14 are in contact with each other, there is no possibility that the sheet member 14 is damaged due to excessive pressure being applied to a part thereof. As a result, the durable life of the sheet member 14 at the time of repeated stress application is improved. In addition, as illustrated in FIG. 4C, a plurality of grooves may be formed in the sheet 141 in order to bulge the intermediate region RM more smoothly.

  In the case of this embodiment, since each recessed part 111c is connected to the common air supply / exhaust path PS3, the atmospheric pressure is the same. However, the recesses 111c may communicate with different supply / exhaust paths PS3, and the recesses 111c may have different air pressures. In this case, for example, the air pressure difference between the different air supply / exhaust paths PS3 is set so that the air pressure in the recess 111c located on the center side of the intermediate region RM is higher than the air pressure in the recess 111c located on the peripheral side of the intermediate region RM. You may make it supply air.

  When the bulging of the intermediate region RM is terminated and returned to the state of FIG. 12A, the atmospheric pressure in the recess 111c may be the same as the ambient atmosphere (external atmosphere) of the contact portion 12. The movable member 15 is pressed by the elastic force that returns the sheet member 14 to its original shape, and retracts to the non-projecting position. The atmospheric pressure in the recess 111c may be reduced from the ambient atmosphere (external atmosphere) around the contact portion 12, and in that case, the movable member 15 can easily return to the non-projecting position.

  A control example (an example of bonding between panels) using the holding unit 1A is the same as the case of the holding unit 1 described with reference to FIGS. That is, the bulging of the bulging portion 113 in the first embodiment is merely replaced with the protrusion of the movable member 15 toward the sheet member 14 side. In the case of this embodiment, since the intermediate region RM bulges using the protrusion of the movable member 15, it may be more advantageous in terms of durability than the holding unit 1 using the deformation of the sheet member 13.

A bonding apparatus, P1 panel, P2 panel, 1 holding unit, 11 support member, 12 contact part, RM intermediate region, PS1 to PS3

Claims (17)

A holding unit for holding one of the panels to be bonded to each other,
A support member having a plurality of air supply and exhaust passages;
A contact portion supported by the support member and contacting the panel,
The contact portion is
A plurality of openings;
An intermediate region capable of bulging to the panel side at a position corresponding to the center of the panel,
The plurality of air supply / exhaust passages are:
A first air supply / exhaust passage communicating with the plurality of openings;
A second air supply and exhaust passage,
The contact portion is
A first sheet member that adsorbs the panel;
A second sheet member disposed between the first sheet member and the support member,
The first sheet member is
The plurality of openings;
A communication path for communicating the plurality of openings and the first air supply / exhaust path,
The second sheet member is disposed in the intermediate region, and has a bulging portion capable of bulging to the panel side,
The second air supply / exhaust passage is open facing the bulging portion,
The intermediate region can be swelled from the support member when the bulging portion bulges to the panel side due to a differential pressure between the second air supply / exhaust passage and the ambient atmosphere of the contact portion.
A holding unit characterized by that. The holding unit according to claim 1,
The support member includes a support surface that supports the contact portion;
The first air supply / exhaust passage and the second air supply / exhaust passage are open to the support surface,
A holding unit characterized by that. The holding unit according to claim 1 ,
The first sheet member includes a plurality of openings that are formed at positions corresponding to the center portion of the panel and communicate with the first air supply / exhaust passage through the communication passage.
A holding unit characterized by that. The holding unit according to claim 1 ,
The first sheet member is
A first sheet in which the plurality of openings are formed;
A second sheet laminated to the first sheet,
In the second sheet, a groove forming the communication path is formed on the surface on the first sheet side.
A holding unit characterized by that. The holding unit according to claim 1 ,
The first sheet member is
A first end;
A second end;
A center portion corresponding to a center portion of the panel between the first end portion and the second end portion;
The first sheet member is fixed to the support member at the first end and the second end.
A holding unit characterized by that. A holding unit for holding one of the panels to be bonded to each other,
A support member having a plurality of air supply and exhaust passages;
A sheet member supported by the support member and in contact with the panel;
A movable member disposed between the support member and the sheet member,
The sheet member is
A plurality of openings;
An intermediate region capable of bulging to the panel side at a position corresponding to the center of the panel,
The movable member is disposed in the intermediate region;
The plurality of air supply / exhaust passages are:
A first air supply / exhaust passage communicating with the plurality of openings;
A second air supply / exhaust passage that opens to face the movable member,
The movable member can be displaced toward the sheet member by a differential pressure between the second air supply / exhaust passage and the ambient atmosphere of the sheet member,
When the movable member is displaced toward the sheet member, the intermediate region of the sheet member swells.
A holding unit characterized by that. The holding unit according to claim 6 ,
The sheet member is
A first sheet in which the plurality of openings are formed;
A second sheet laminated to the first sheet,
In the second sheet, a groove is formed on the surface on the first sheet side to form a communication path for communicating the first air supply / exhaust passage and the plurality of openings.
A holding unit characterized by that. The holding unit according to claim 6 ,
The sheet member is
A first end;
A second end;
A center portion corresponding to a center portion of the panel between the first end portion and the second end portion;
The sheet member is fixed to the support member at the first end and the second end.
A holding unit characterized by that. The holding unit according to claim 6 ,
The support member includes a support surface that supports the sheet member;
The support surface is opened at a position corresponding to the intermediate region, and includes the second supply and exhaust air passage and communicating the recess through,
The movable member is inserted into the recess,
A holding unit characterized by that. The holding unit according to claim 9 , wherein
The movable member is provided in the recess so as to be displaceable in the depth direction of the recess between a protruding position protruding from the support surface and a non-projecting position.
A holding unit characterized by that. The holding unit according to claim 9 , wherein
A plurality of sets of the recess and the movable member are provided,
In the recess of each of the second supply and discharge air path is communicated,
A holding unit characterized by that. It is a bonding method in which the first panel is held by the holding unit and bonded to the second panel,
The holding unit is
A support member having a plurality of air supply and exhaust passages;
A contact portion supported by the support member and contacting the panel,
The contact portion is
A plurality of openings;
An intermediate region capable of bulging to the panel side at a position corresponding to the center of the panel,
The plurality of air supply / exhaust passages are:
A first air supply / exhaust passage communicating with the plurality of openings;
A second air supply and exhaust passage,
The contact portion is
A first sheet member that adsorbs the panel;
A second sheet member disposed between the first sheet member and the support member,
The first sheet member is
The plurality of openings;
A communication path for communicating the plurality of openings and the first air supply / exhaust path,
The second sheet member is disposed in the intermediate region, and has a bulging portion capable of bulging to the panel side,
The second air supply / exhaust passage is open facing the bulging portion,
The bonding method is
A step of bringing the surface opposite to the bonding surface in the first panel into contact with the contact portion;
Adsorbing the first panel to the contact portion by exhausting the first air supply / exhaust passage;
The bulging portion is bulged toward the panel side by the differential pressure between the inside of the second air supply / exhaust passage and the ambient atmosphere of the contact portion, so that the intermediate region is moved from the support member toward the second panel. A bulging step to bulge into a convex shape;
A step of curving the central portion of the first panel in a convex shape by the intermediate region bulged in a convex shape;
A step of abutting the central portion of the first panel curved in a convex shape with the second panel;
At least one of the first panel and the second panel is moved in a direction close to each other, and regions where the first panel and the second panel are in contact with each other are arranged on the peripheral portions of the panels. A process that expands toward
A release step of releasing the adsorption of the first panel,
A bonding method characterized by that. It is the bonding method of Claim 12 , Comprising:
After the release step, air is supplied to the first air supply / exhaust passage and the second air supply / exhaust passage,
A bonding method characterized by that. It is the bonding method of Claim 12 , Comprising:
After the releasing step, the intermediate region is pasted from the support member by causing the bulging portion to bulge to the panel side by a differential pressure between the inside of the second air supply / exhaust passage and the ambient atmosphere of the contact portion. And further including a step of projecting toward the first panel and the second panel after alignment,
A bonding method characterized by that. It is a bonding method in which the first panel is held by the holding unit and bonded to the second panel,
The holding unit is
A support member having a plurality of air supply and exhaust passages;
A sheet member supported by the support member and in contact with the panel;
A movable member disposed between the support member and the sheet member,
The sheet member is
A plurality of openings;
An intermediate region capable of bulging to the panel side at a position corresponding to the center of the panel,
The plurality of air supply / exhaust passages are:
A first air supply / exhaust passage communicating with the plurality of openings;
A second air supply / exhaust passage that opens to face the movable member,
The bonding method is
The step of contacting the sheet member with the surface opposite to the bonding surface in the first panel;
Adsorbing the first panel to the sheet member by exhausting the first air supply / exhaust passage;
The movable member is displaced by a pressure difference between the second air supply / exhaust passage and the ambient atmosphere of the sheet member, and the intermediate region is bulged in a convex shape from the support member toward the second panel. Bulge process;
A step of curving the central portion of the first panel in a convex shape by the intermediate region bulged in a convex shape;
A step of abutting the central portion of the first panel curved in a convex shape with the second panel;
At least one of the first panel and the second panel is moved in a direction close to each other, and regions where the first panel and the second panel are in contact with each other are arranged on the peripheral portions of the panels. A process that expands toward
A release step of releasing the adsorption of the first panel,
A bonding method characterized by that. The bonding method according to claim 15 ,
After the release step, air is supplied to the first air supply / exhaust passage and the second air supply / exhaust passage,
A bonding method characterized by that. The bonding method according to claim 15 ,
After the releasing step, the movable member is displaced by the differential pressure between the second air supply / exhaust passage and the ambient atmosphere of the sheet member, and the intermediate region is bonded to the first region after bonding. A step of bulging in a convex shape toward the panel and the second panel,
A bonding method characterized by that.

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