KR20170050494A - Measuring apparatus having cleaning function of material's surface and Measuring method using this - Google Patents

Measuring apparatus having cleaning function of material's surface and Measuring method using this Download PDF

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Publication number
KR20170050494A
KR20170050494A KR1020150152094A KR20150152094A KR20170050494A KR 20170050494 A KR20170050494 A KR 20170050494A KR 1020150152094 A KR1020150152094 A KR 1020150152094A KR 20150152094 A KR20150152094 A KR 20150152094A KR 20170050494 A KR20170050494 A KR 20170050494A
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KR
South Korea
Prior art keywords
measuring
disposed
workpiece
unit
material surface
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Application number
KR1020150152094A
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Korean (ko)
Inventor
이학철
Original Assignee
현대위아 주식회사
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Priority to KR1020150152094A priority Critical patent/KR20170050494A/en
Publication of KR20170050494A publication Critical patent/KR20170050494A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention relates to a measuring apparatus and a measuring method having a function of cleaning a surface of a workpiece, the measuring apparatus comprising: a base having a workpiece seating portion; a moving member disposed on the base; The measuring method may include a step of cleaning the surface of the workpiece to remove foreign matter on the surface of the workpiece and a step of measuring the surface of the workpiece to measure the surface condition of the workpiece. According to the present invention, not only the surface of the material to be measured but also the photographing apparatus can be cleaned together to enable more accurate and precise measurement.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring apparatus having a surface cleaning function,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring apparatus and a measuring method having a function of cleaning a surface of a workpiece and more particularly to a workpiece surface cleaning function capable of cleaning a surface of a workpiece as well as a photographing apparatus, And to a measuring method and a measuring method.

The surface of a workpiece used for cutting or machining of a machine tool is contaminated by foreign matter, cutting oil, and fine cutting chips. In order to measure such a workpiece surface, it is necessary to remove foreign matter or the like.

If the surface of the workpiece is measured without removing it, precise and accurate results of the workpiece surface state can not be obtained. Therefore, there is a need in the art for a device capable of improving the simultaneous photographing performance while removing foreign substances or the like on the surface of the material before measurement.

As a prior art document, there is Korean Patent Laid-Open No. 10-2005-0028353.

SUMMARY OF THE INVENTION The present invention has been made to solve the problems of the prior art as described above, and it is an object of the present invention to provide an apparatus which can clean a surface of a workpiece as well as a photographing apparatus together to enable more accurate and precise measurement have.

In order to accomplish the above objects, the present invention provides a measuring apparatus and a measuring method having a material surface cleaning function. The measuring apparatus includes a base having a material seating portion, a moving member disposed on the base, And a measuring member provided to measure and clean the surface of the workpiece.

The measuring member may include a body part connected to the moving member by a supporting beam, a photographing unit that is seated on a mounting part disposed on the body part, and an imaging unit disposed on the body part, And a second injection unit that is connected to the first injection unit.

Further, the first ejection unit may be disposed at a lower portion of the stationary portion and may be configured to clean air by spraying air on the surface of the material.

In addition, the first injection unit may be configured to taper from one side to the other so that foreign matter on the surface of the workpiece is discharged in one direction.

The measurement unit may further include a second injection unit disposed at a lower portion of the photographing unit on the body and having an injection slot upwardly to clean the photographing unit.

The measuring member may further include a distance measuring sensor mounted on the sensor mounting portion disposed on the body and provided to measure a distance between the surface of the work and the imaging unit.

The moving member may include x-axis moving means disposed on both sides of the work on the base, and z-axis moving means disposed on the x-axis moving means so as to raise and lower the measuring member.

The x-axis moving means may include a first LM guide disposed on both sides of the base on the base and a pair of first and second LM guides moving along the x-axis along the ball screw member disposed on the first LM guide, And a first driver for driving the saddle and the ball screw member.

The z-axis moving means may comprise a second LM guide arranged vertically in pairs on the first saddle, a second saddle moving along the z axis along a ball screw member disposed on the second LM guide, And a second driving unit for driving the ball screw member.

The moving member may further include a y-axis moving unit disposed on the z-axis moving unit and provided to move the measuring member in the y-axis direction.

The y-axis moving means may include a third LM guide disposed horizontally on the second saddle and a ball screw member disposed on the third LM guide and moving along the y- 3 saddles, and a third driving unit for driving the ball screw members.

The measuring method of the present invention may include a step of cleaning the surface of the workpiece to remove foreign matter on the surface of the workpiece, and a step of measuring the surface of the workpiece.

The step of cleaning the work surface includes a first distance measurement step of measuring a distance to the work and determining an up and down range, a cleaning position determination step of determining a cleaning position of the work surface, And an air injection step.

The step of measuring the surface of the workpiece includes a measurement and positioning step of determining the measurement position of the workpiece surface, a second distance measurement step of measuring the distance between the workpiece and the workpiece, As shown in FIG.

According to the present invention, it is possible to precisely measure the material surface by cleaning the surface of the material to be measured before shooting. In addition, when necessary, the photographing device can be cleaned together, and the state of the material surface can be more accurately analyzed.

In addition, by measuring the distance to the material to be measured, the cleaning position and the shooting distance of the material surface can be controlled, so that the material and the imaging equipment can be prevented from being damaged by the surface contact.

And it is possible to move the x, y and z axes, so that the surface of the workpiece can be inspected in the three-dimensional region, so that the measuring ability is improved and more accurate experimental results can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A and FIG. 1B show the measuring member of the present invention. FIG.
2 is a view showing a measuring apparatus according to the present invention.
3 is a view showing a measuring method according to the present invention.

Best Mode for Carrying Out the Invention Hereinafter, preferred embodiments of a measuring apparatus and a measuring method having a material surface cleaning function according to the present invention will be described in detail with reference to the accompanying drawings.

FIGS. 1A and 1B are views showing a measuring member according to the present invention, and FIG. 2 is a view showing a measuring apparatus according to the present invention.

Referring to Figs. 1A, 1B and 2, the measurement apparatus of the present invention can be configured to include a base 10, a moving member 40, and a measuring member 30. First, the base 10 may be formed of a steel structure, and a material placing part 11 on which a work is placed may be formed on the upper part.

The moving member 40 may be disposed on the base 10 and may be provided to enable the measurement member 30 to move in three dimensions. The moving member 40 may include an x-axis moving unit 40a, a y-axis moving unit 40c, and a z-axis moving unit 40b.

2, the x-axis moving means 40a is disposed on both sides of the material placing portion 11 on the base 10 in the longitudinal direction and is movable in the x-axis direction of the measuring member 30 . More specifically, the x-axis moving unit 40a may include a first LM guide 42, first saddles 43, and a first driving unit 41. The x-

First, the first LM guide 42 may be disposed on both sides of the workpiece mounting part 11 in the base 10. A ball screw member (not shown) may be disposed in the first LM guide 42. The first saddle 43 may be seated on the first LM guide 42 and the lower saddle 43 may be connected to the first driver 41 via a ball screw member. The first driving unit 41 may be disposed on one side of the first LM guide 42 on the base 10 and the driving shaft of the first driving unit 41 may be connected to the ball screw member.

When the operator drives the first driving unit 41, the ball screw member rotates and the first saddle 43 connected to the ball screw member is guided in the x-axis direction by the first LM guide 42 do. This enables movement of the z-axis moving means 40b, the y-axis moving means 40c and the measuring member 30 in the x-axis direction associated with the x-axis moving means 40a.

2, the following z-axis moving means 40b can be disposed on the x-axis moving means 40a such that the measuring member 30 can move up and down in the z-axis direction. Specifically, the z-axis moving unit 40b may include a second LM guide 45, second saddles 46, and a second driving unit 44.

The second LM guides 45 may be vertically arranged on the first saddles 43 in a pair. A ball screw member may be disposed in the second LM guide 45. The second saddle 46 may be disposed on the second LM guide 45 to be movable in the z-axis direction along the ball screw member disposed on the second LM guide 45.

The ball screw member is connected to the driving shaft of the second driving unit 44 so that the second saddle 46 can move up and down in the z direction according to the rotation of the ball screw member when the second driving unit 44 is operated do. The second driving unit 44 may be mounted on one side of the second saddle 46 and connected to the ball screw member in a straight bevel gear manner so that power can be transmitted in a perpendicular direction.

When the operator drives the second driving unit 44, the second saddle 46 moves on the second LM guide 45 while the ball screw member rotates. Axis movement unit 40c and the measurement member 30 mounted on the second saddle 46 can be moved in the z-axis direction.

2, the y-axis moving means 40c is disposed on the z-axis moving means 40b and can be provided to move the measuring member 30 in the y-axis direction. Specifically, the y-axis moving unit 40c may include a third LM guide 48, a third saddle 49, and a third driving unit 47.

The third LM guide 48 may be disposed horizontally on the second saddle 46. A ball screw member may be disposed inside the third LM guide 48, and the ball screw member may be connected to the driving shaft of the third driving unit 47. The third saddle 49 is disposed on the third LM guide 48 and the upper portion of the third saddle 49 is connected to the ball screw member to move on the third LM guide 48 .

When the operator drives the third drive unit 47, the third saddle 49 connected to the ball screw member rotates on the third LM guide 48. The y-axis movement of the measuring member 30 mounted on the third saddle 49 is enabled.

Next, the measuring member 30 is disposed on the moving member 40 and can be provided for measuring and cleaning the work surface. Referring to FIG. 2, the measuring member 30 may be mounted on the third saddle 49. The measuring member 30 may include a body part 37, a photographing unit 32, a first injecting unit 34a, a second injecting unit 34b, and a distance measuring sensor 36.

The upper body of the body part 37 may be connected to the third saddle 49 by a support beam 31. In this case, At this time, a shaft member 31a whose angle is controlled by a driving motor (not shown) may be disposed on the support beam 31. [ The photographing unit 32 can be arranged so as to face the work direction by the rotation of the shaft member 31a. A mounting portion 33 on which the photographing unit 32 is mounted may be formed on one side of the side surface of the body portion 37.

The photographing unit 32 is mounted on the mounting portion 33 and can be provided to measure the work surface. At this time, adjusting bars 33b and 33f and fixing plates 33c and 33d are disposed on the upper and side surfaces of the mounting portion 33. The operator places the imaging unit 32 on the mounting portion 33 The fixing plates 33c and 33d press the top and sides of the photographing unit 32 to fix the top and side faces of the photographing unit 32, respectively.

Next, the first injection unit 34a may be provided on the body part 37 at a lower portion of the mounting part 33, and may be provided with a jetting slot formed therein so as to clean air by spraying air on the surface of the material. Referring to FIG. 1A, the position of the first injection unit 34a can be identified. At this time, when the air is injected into the first injection unit 34a, It can be implemented in a tapered shape toward the other side.

The second injection unit 34b may be disposed at a lower portion of the photographing unit 32 in the body portion 37 and an injection slot may be formed upward to clean the photographing unit 32 . If there is foreign matter on the lens of the photographing unit 32, the operator operates the second injection unit 34b and blows air upward to remove foreign matter.

Although not shown in the drawing, the first injection unit 34a and the second injection unit 34b may be hose-connected to the air supply unit, respectively.

Next, the distance measuring sensor 36 may be mounted on the sensor mounting portion 35 disposed on the body portion 37. 1A, a pair of upper and lower fixing brackets are formed on an outer surface of one side of the body portion 37, and the distance measuring sensor 36 is fitted and fixed to the sensor mounting portion 35.

The distance measuring sensor 36 measures the distance between the work surface and the photographing unit 32, and transmits a signal to the worker when the predetermined proper distance, that is, the focal distance, is reached. The worker stops the operation of the moving member 40 through the signal sent from the distance measuring sensor 36 and determines the work surface measurement position of the measuring member 30. [

As described above, the measuring apparatus according to the present invention can move to a position of a surface of a material which is desired to be measured by three-dimensional movement, and the accuracy of measuring the surface of the workpiece can be improved by determining the proper distance by measuring the distance. Further, foreign matter present on the surface of the material or the surface of the photographing unit 32 is removed through air jetting, thereby enabling more accurate measurement.

3 is a view showing a measuring method according to the present invention. Referring to FIG. 3, the measuring method of the present invention can be configured to include a material surface cleaning step and a material surface measuring step.

First, the material surface cleaning step includes a first distance measurement step of measuring a distance to the material and determining an up / down range, a cleaning position determination step of determining a cleaning position of the material surface, an air injection Step < / RTI >

More specifically, referring to FIG. 3, in the first distance measurement step, the operator first operates the first injection unit 34a to clean the work surface prior to the work surface measurement. At this time, the second injection unit 34b is also operated to remove foreign matter on the lens surface of the photographing unit 32 (S1).

The next operator operates the z-axis moving means 40b of the moving member 40 to lower the photographing unit 32 (camera) (S2). At this time, it is checked whether the distance measuring sensor 36 is in operation. If the distance measuring sensor 36 is not in operation, the photographing unit 32 is raised again, the distance measuring sensor 36 is operated, .

If the distance measuring sensor 36 is operating, the photographing unit 32 is continuously lowered until the distance measuring sensor 36 signals that the predetermined distance has been reached. When the appropriate distance has been reached, the operator operates the x-axis moving means 40a and the y-axis moving means 40c of the moving member 40 in relation to the cleaning position determining step to set the cleaning position . The photographing unit 32 moves on the x- and y-axis planes in accordance with the cleaning range set by the operator.

In the next air injection step, the first injection unit 34a horizontally moves on the x- and y-axis planes in accordance with the work surface cleaning range set by the operator (step S4).

When cleaning is completed, the operator stops the operation of the first injection unit 34a (S5) and raises the photographing unit 32 again (S6). Thereby completing the material surface cleaning step.

Next, the material surface measuring step may include a measuring and positioning step of determining a measuring position of the material surface, a second distance measuring step of measuring a distance between the material and the object, and a photographing mode changing step of measuring a surface of the material And the like.

Specifically, referring to FIG. 3, in the measurement and positioning step, when the operator inputs a position value of the material surface to be measured to the moving member 40, the photographing unit 32 (camera) (X, y, z) on the x, y, and z axes by three-dimensional movement (step S7).

The photographing unit 32 is lowered by the z-axis moving means 40b (S8) with respect to the second distance measuring step, and when the distance measuring sensor 36 is in an inoperative state, After the operation of the distance measuring sensor 36, the operation is again performed (S9).

When the distance measuring sensor 36 is in operation, the photographing unit 32 is continuously lowered until the distance measuring sensor 36 transmits a signal indicating that the predetermined proper distance, that is, the focal distance, has been reached.

When the appropriate separation distance is reached, the photographing mode changing step determines whether the photographing mode is the monitoring mode (S10). If it is not the monitoring mode, the mode of the photographing unit 32 is changed to enable monitoring (S11).

Thereafter, when the photographing unit 32 photographs the surface of the workpiece and acquires an image desired by the operator (S12), the operator stops the operation of the second injection unit 34b (S13) and completes the operation.

The present invention enables more accurate and precise measurement through the above-described structure and operation method. The above items are only specific examples of the measuring apparatus and the measuring method having the material surface cleaning function.

Therefore, it should be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims. do.

10: Base 11: Material seating part
30: measuring member 31: supporting beam
32: photographing unit 33:
33c, 33d: fixing plate 33b, 33f: adjusting bar
34a: first injection unit 34b: second injection unit
35: sensor mounting part 36: distance measuring sensor
37: body part 40: moving member
40a: x-axis moving means 40b: z-axis moving means
40c: y-axis moving means 41:
42: first LM guide 43: first saddle
44: second driving part 45: second LM guide
46: second saddle 47: third driving part
48: Third LM Guide 49: Third Saddle

Claims (14)

A base having a material receiving portion;
A moving member disposed on the base; And
A measuring member disposed on the moving member, the measuring member being provided for cleaning and measuring the work surface;
A measuring device with a material surface cleaning function.
The method according to claim 1,
Wherein the measuring member comprises:
A body connected to the moving member by a supporting beam;
A photographing unit that is seated on a mount portion disposed on the body portion; And
A first ejection unit disposed on the body and provided with an ejection slot so as to clean the surface of the workpiece;
Wherein the measuring device has a material surface cleaning function.
3. The method of claim 2,
Wherein the first ejection unit is disposed at a lower portion of the mounting portion and is cleaned by spraying air onto the surface of the workpiece.
The method of claim 3,
Wherein the first ejection unit is tapered from one side to the other so that foreign matters on the surface of the workpiece are discharged in one direction.
5. The method of claim 4,
Wherein the measuring unit further comprises a second ejecting unit disposed at a lower portion of the photographing unit on the body and having an injection slot upwardly to clean the photographing unit, .
3. The method of claim 2,
Wherein the measuring member further comprises a distance measuring sensor mounted on the sensor mounting portion disposed on the body and provided so as to measure a distance between the surface of the work and the imaging unit.
The method according to claim 1,
The moving member includes:
X-axis moving means disposed on both sides of the work on the base; And
A z-axis moving means disposed on the x-axis moving means to move the measuring member up and down;
Wherein the measuring device has a material surface cleaning function.
8. The method of claim 7,
Wherein the x-
A first LM guide disposed on both sides of the base on the base in a pair;
A pair of first saddles moving along the x-axis along a ball screw member disposed on the first LM guide; And
A first driving unit for driving the ball screw member;
Wherein the measuring device has a material surface cleaning function.
9. The method of claim 8,
The z-axis moving means includes:
A second LM guide disposed in a pair in a vertical direction on the first saddle;
Second saddles moving along a z-axis along a ball screw member disposed on the second LM guide; And
A second driving unit for driving the ball screw member;
Wherein the measuring device has a material surface cleaning function.
10. The method according to any one of claims 7 to 9,
The moving member includes:
And a y-axis moving means disposed on the z-axis moving means and provided to move the measuring member in the y-axis direction.
11. The method of claim 10,
The y-
A third LM guide disposed horizontally on the second saddle;
A third saddle moving along the y-axis along a ball screw member disposed on the third LM guide and connected to the measuring member; And
A third driving unit for driving the ball screw member;
Wherein the measuring device has a material surface cleaning function.
In the material surface measuring method,
A material surface cleaning step for removing foreign matter on the surface of the material; And
A material surface measuring step of measuring a material surface state;
And measuring the surface of the workpiece.
13. The method of claim 12,
In the material surface cleaning step,
A first distance measuring step of measuring a distance to the workpiece and determining an ascending / descending range;
A cleaning position determining step of determining a cleaning position of the material surface; And
An air spraying step of spraying air to a cleaning position of a work surface;
And measuring the surface of the workpiece.
13. The method of claim 12,
The material surface measuring step may include:
A measurement position determining step of determining a measurement position of the workpiece surface;
A second distance measuring step of measuring a distance to the workpiece and determining an ascending / descending range; And
A photographing mode changing step of measuring the surface of the material;
And measuring the surface of the workpiece.




KR1020150152094A 2015-10-30 2015-10-30 Measuring apparatus having cleaning function of material's surface and Measuring method using this KR20170050494A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102222655B1 (en) * 2019-09-10 2021-03-03 주식회사 포스코아이씨티 System for Automatically Inspecting Surface Defect of Coil
KR102308875B1 (en) * 2021-06-02 2021-10-01 선계은 Probe for Particle Measurement
KR102310630B1 (en) * 2020-12-08 2021-10-08 주식회사 엔시스 Plate coating layer distance measuring equipment for secondary cell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102222655B1 (en) * 2019-09-10 2021-03-03 주식회사 포스코아이씨티 System for Automatically Inspecting Surface Defect of Coil
KR102310630B1 (en) * 2020-12-08 2021-10-08 주식회사 엔시스 Plate coating layer distance measuring equipment for secondary cell
KR102308875B1 (en) * 2021-06-02 2021-10-01 선계은 Probe for Particle Measurement

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