KR20170045500A - Apparatus to deposition substrate and method to fill crucible with deposition material thereof - Google Patents

Abstract

A substrate deposition apparatus according to an embodiment of the present invention includes: a deposition chamber having a deposition space in which a deposition process is performed; a deposition module provided in a lower space of the deposition space of the deposition chamber to provide a deposition material to a substrate, and provided with a crucible filled with the deposition material; and a crucible moving unit installed in a maintenance chamber having a space partitioned by the deposition chamber, the crucible moving unit detachably attached to the crucible to move or return the crucible from the deposition chamber to the maintenance chamber. According to an embodiment of the present invention, since the process of filling the crucible with the deposition material is not performed in the deposition chamber but is performed after moving to the outside of the deposition chamber by the crucible moving unit, the cleanliness in the deposition chamber may be maintained.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate deposition apparatus and a crucible-

A substrate deposition apparatus and a crucible charging method thereof are disclosed. More specifically, since the process of filling the crucible with the evaporation material is not performed in the deposition chamber but is performed after moving to the outside of the deposition chamber by the crucible moving unit, the cleanliness of the inside of the deposition chamber can be maintained A substrate deposition apparatus and a crucible charging method thereof are disclosed.

As a result of the rapid development of information and communication technology and the expansion of the market, a flat panel display is attracting attention as a display device.

Such flat panel display devices include liquid crystal display devices, plasma display panels, and organic light emitting diodes. Among these organic electroluminescent devices, for example, OLEDs have very good advantages such as high response speed, lower power consumption than conventional LCD, light weight, no need for a separate backlight device, And has been attracting attention as a next generation display device.

Such an organic electroluminescent device is a principle in which an anode film, an organic thin film, and a cathode film are sequentially formed on a substrate, and a voltage is applied between the anode and the cathode to form a proper energy difference in the organic thin film and emit light by itself. In other words, the injected electrons and holes are recombined, and the excitation energy generated is generated by light. At this time, since the wavelength of light generated according to the amount of the dopant of the organic material can be controlled, full color can be realized.

The organic electroluminescent device includes an anode, a hole injection layer, a hole transport layer, an emitting layer, a hole blocking layer, an electron transport layer a transfer layer, an electron injection layer, and a cathode are laminated in this order.

In order to make such an organic electroluminescent device, that is, to deposit the light emitting layer and the electrode layer, a deposition process must be performed. The deposition process may be classified into a deposition process of depositing a deposition material on a deposition source and a deposition process of depositing a deposition material provided from an evaporation source on a substrate of a flat panel display device.

Meanwhile, the crucible of the deposition source is filled with a metal deposition material such as aluminum. The material filled in the crucible may be deposited onto the substrate while being heated and melted and diffused by a heater located in the periphery of the crucible during the deposition process.

However, when the metal material in the crucible is evaporated, the crucible needs to be filled with the metal material. In the conventional case, after the deposition process is stopped to fill the crucible with the metal material, the chamber is vented The process of filling the crucible with a metallic material was done. In this case, foreign substances may be drawn into the chamber, thereby causing contamination inside the chamber.

An object of the present invention is to provide a method and apparatus for depositing a deposition material on a crucible, in which the deposition material is not deposited in the deposition chamber but moved to the outside of the deposition chamber by the crucible transfer section, A substrate deposition apparatus capable of maintaining cleanliness and a method of charging a crucible thereof.

A substrate deposition apparatus according to an embodiment of the present invention includes: a deposition chamber having a deposition space in which a deposition process is performed on a substrate; A deposition module provided in a lower space of the deposition space of the deposition chamber to provide a deposition material to the substrate, and a crucible to which the deposition material is filled; And a crucible moving part which is mounted in a maintenance chamber having a space partitioned by the deposition chamber and is detachably mountable to the cruise so as to move or return the crucible from the deposition chamber to the maintenance chamber, Since the process of filling the crucible with the evaporation material is not performed in the deposition chamber but is performed after moving to the outside of the deposition chamber by the crucible moving unit, The internal cleanliness can be maintained.

According to one aspect, the crucible moving unit includes: a detachable jig member detachably coupled to the crucible; And a driving member for rotating or lifting the detachable jig member, wherein a lower end portion of the crucible and the attaching / detaching jig member are screwed to each other by a rotation operation of the attaching / detaching jig member, Separation or coupling of the members can be achieved.

According to one aspect of the present invention, a gate that communicates between the deposition chamber and the maintenance chamber may be provided so that the crucible can be transferred from the deposition chamber to the maintenance chamber by the crucible moving unit.

According to one aspect of the present invention, the detachable jig member includes: a coupling portion detachably coupled to a lower end portion of the crucible; And a connecting portion having one end connected to the coupling portion and the other end exposed to the outside of the main chamber and rotated or elevated by a driving force of a driving member positioned outside the main chamber.

According to one aspect, the driving member includes: a magnetic fluid seal surrounding the connecting portion and rotating the connecting portion using magnetism; And a driving part mounted on an end of the connecting part to generate a linear moving force for elevating the connecting part in the height direction.

According to one aspect, the driving member may further include a shrinkable bellows which surrounds the connection portion, one end is coupled to the lower end surface of the main chamber, and the other end is connected to the upper surface of the magnetic fluid chamber.

In the meantime, the crucible charging method of the substrate depositing apparatus according to the embodiment of the present invention is characterized in that after the crucible moving unit is coupled to the crucible, the crucible is moved from the deposition chamber to the maintenance chamber , A crucible moving step; A deposition material filling step of separating the crucible in the maintenance chamber from the maintenance chamber and filling the deposition material with the crucible; And a clivable in-situ step of loading the crucible filled with the deposition material into the maintenance chamber and then returning the crucible to the deposition chamber.

According to one aspect of the present invention, the moving step includes disengaging the crucible from the deposition module by coupling a detachable jig member provided in the crucible moving unit to the crucible and rotating the crucible. Moving the separated crucible from the deposition chamber to the maintenance chamber by lowering the detachment jig member; And dividing the deposition chamber and the maintenance chamber by interrupting a gate that communicates between the deposition chamber and the maintenance chamber.

According to an aspect of the present invention, the deposition material filling step may include: opening an opening / closing gate provided in the main chamber, separating the crucible, and then filling the crucible with the deposition material; And coupling the crucible filled with the deposition material to the detachable jig member in the maintenance chamber.

According to one aspect, the cruciform in-situ step includes opening the gate and raising the detachable jig member to which the crucible is coupled; Placing the crucible in the deposition chamber; And blocking the gate.

According to the embodiment of the present invention, since the process of filling the crucible with the deposition material is not performed in the deposition chamber, but after the crucible is moved to the outside of the deposition chamber by the moving unit, .

FIG. 1 is an internal projection view schematically showing the configuration of a substrate deposition apparatus according to an embodiment of the present invention. FIG.
Figure 2 is an internal projected side view of Figure 1;
3 is a top plan view of the inner projection of FIG.
4 is an enlarged view of part IV of Fig.
5 is a schematic view showing each step of the crucible charging method of the substrate deposition apparatus according to the embodiment of the present invention.

Hereinafter, configurations and applications according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE INVENTION The following description is one of many aspects of the claimed invention and the following description forms part of a detailed description of the present invention.

In the following description, well-known functions or constructions are not described in detail for the sake of clarity and conciseness.

Prior to the description with reference to the drawings, the substrate to be deposited includes a liquid crystal display element, a plasma display element, an organic electroluminescent element and the like, but will be described as a substrate for an organic electroluminescent element in the following description.

2 is a side view of FIG. 1, FIG. 3 is a top view of FIG. 1, and FIG. 4 is a cross-sectional view of a substrate deposition apparatus according to an embodiment of the present invention, Fig.

Referring to FIGS. 1 and 2, a substrate deposition apparatus 100 according to an embodiment of the present invention includes a deposition space 110S in which an organic electroluminescence and a deposition process by a substrate (not shown) A deposition module 130 having a crucible 131 provided in a lower space of the deposition space 110S to provide a deposition material to a substrate and filled with a deposition material; When the deposition chamber 110 is installed in the deposition chamber 160 having the deposition space 110S of the chamber 110 and the partitioned space 160S and can be attached to and detached from the crucible 131, And a crucible moving unit 150 for moving the sieve 131 from the deposition chamber 110 to the maintenance chamber 160.

First, the deposition chamber 110 forms a place where the deposition process for the substrate proceeds. The solid metal deposition material may be filled in the deposition module 130 through the deposition process and then the deposition material provided from the deposition module 130 may be deposited on the substrate in such a manner that the process can be performed in the deposition chamber 110 .

For reference, in the present embodiment, after the substrate is horizontally disposed on the deposition space 110S of the deposition chamber 110, the deposition process for the substrate may be performed by the deposition material upwardly directed from the deposition module 130 have. The deposition space 110S of the deposition chamber 110 forms a vacuum atmosphere so that the deposition process for the substrate can proceed reliably.

1 and 2, the deposition module 130 of the present embodiment is disposed under the deposition space 110S of the deposition chamber 110 to provide a deposition material to the substrate, A filled crucible 131 and a heater member (not shown) for heating the evaporation material in the crucible 131 to direct the evaporation material toward the substrate.

With this arrangement, it is possible to heat the deposition material in the crucible 131 using the heat provided by the heater member, thereby allowing the deposition material to evaporate and be provided in the direction of the substrate to perform the deposition process on the substrate will be.

The crucible 131 may be a cup-shaped crucible that is filled with a deposition material deposited on the substrate. The crucible 131 can be opened upward and made of an insulating material.

The heater member heats the crucible 131 so that the evaporated material contained in the crucible 131 is evaporated as the vapor is phase-changed. Although not shown, a plurality of heater members may be arranged along the height direction of the crucible 131 at the periphery of the crucible 131 to uniformly provide heat to the entire region of the crucible 131. However, the configuration of the heater member is not limited thereto.

Referring to FIG. 3, a plurality of deposition modules 130 may be provided in the deposition chamber 110, so that even in the case of a substrate having a long side, the deposition process can be performed reliably. However, the arrangement and the number of the deposition modules 130 are not limited to those shown in Fig.

Meanwhile, the deposition module 130 having such a configuration must refill the deposition material when the deposition material is used up. As described above, in the conventional case, after the deposition process is stopped to fill the crucible 131 with the deposition material, the deposition chamber 110 is vented, and then the door formed in the deposition chamber 110 is opened A method of filling the crucible 131 in the deposition chamber 110 with a deposition material has been used. However, in this case, foreign substances may be drawn into the chamber, and the inside of the deposition chamber 110 may be contaminated.

Therefore, instead of filling the crucible 131 with the deposition material in the deposition chamber 110, the crucible 131 may be connected to the main chamber 160 through the crucible moving unit 150, It is possible to reliably perform the filling of the deposition material with respect to the crucible 131 by filling the crucible 131 with the deposition material while minimizing the contamination of the space in the deposition chamber 110 during the charging process .

1 and 2, the crucible moving unit 150 of the present embodiment is movable in the main chamber 160 having the deposition space 110S and the partitioned space 160S Respectively. The deposition space 110S of the deposition chamber 110 and the space 160S of the maintenance chamber 160 can be communicated by the gate 115 provided on the lower wall of the deposition chamber 110. [

1 and 2, the crucible moving unit 150 includes a detachable jig member 151 that is detachably coupled to the crucible 131, a detachable jig member 151 that rotates or removes the detachable jig member 151, And a driving member 155 for lifting and lowering.

The lower end portion 135 of the crucible 131 and the upper end of the attaching and detaching jig member 151 are screwed to each other by the rotation of the attaching and detaching jig member 151 by providing the rotational force of the driving member 155, The lower end 135 and the attaching / detaching jig member 151 can be engaged or separated.

Although not shown in detail in the drawing, the lower end portion 135 of the crucible 131 may have a cylindrical shape that opens downward, and a thread may be formed on the inner surface thereof. The upper end of the attachment / detachment jig member 151 may have a cylindrical shape having an outer diameter corresponding to the inner diameter of the lower end of the crevice 131, and a thread may be formed on the outer surface thereof. Therefore, the lower end 135 of the crucible 131 and the upper end of the attaching and detaching jig member 151 can be engaged or disengaged.

4, the attaching / detaching jig member 151 of the present embodiment includes a coupling portion 152 detachably coupled to the lower end of the cradle 131, And the other end may include a connection portion 153 which is exposed to the outside of the main chamber 160 and is rotated or lifted by the driving force of the driving member 155 positioned outside the main chamber 160 .

As described above, the engaging portion has a cylindrical shape corresponding to the lower end of the crucible 131, and is directly engaged with or separated from the crucible 131. The connecting portion 153 has a bar shape having a length so that one end is connected to the lower end surface of the coupling portion and the other end is protruded to the outside of the main chamber 160 and coupled to the driving member 155 . Therefore, the driving force of the driving member 155 can be transmitted to the engaging portion 153 by the connecting portion 152, whereby the rotation or lift of the crucible 131 can be achieved.

The driving member 155 of this embodiment includes a magnetic fluid chamber 156 that surrounds the connection portion 152 outside the main chamber 160 and provides rotational force to the connection portion 152, and a driving part 157 mounted on the other end of the connecting part 152 to generate a linear moving force for elevating the connecting part 152 in the height direction.

Here, the magnetic fluid chamber 156 may be a ferro seal that enables rotation of the connection portion according to the magnitude of the applied current while ensuring the sealing. However, the configuration for rotating the connecting portion 152 is not limited to the magnetic fluid chamber 156 such as a ferro-chamber, and it is of course possible to adopt a configuration having another driving method.

4, one end of the driving member 155 is coupled to the lower end surface of the main chamber 160 and the other end of the driving member 155 is connected to the upper surface of the magnetic fluid chamber 156 And a retractable bellows 158 coupled thereto. The linear movement force generated by the driving portion 157 of the driving member 155 can be transmitted to the connecting portion of the detachable jig member 151 without any deviation of the linear movement of the connecting portion 152 .

When the crucible 131 is required to be filled with the evaporation material, the crucible 131 provided in the evaporation module 130 is placed in the deposition chamber 110, And then the crucible 131 may be filled with the evaporation material, and then the crucible 131 may be moved to the original position.

Hereinafter, the crucible charging method of the substrate deposition apparatus 100 described above with reference to FIG. 5 will be described.

5 is a schematic view showing each step of the crucible charging method of the substrate deposition apparatus according to the embodiment of the present invention.

The crucible charging method of the substrate deposition apparatus 100 according to an embodiment of the present invention is characterized in that the crucible moving unit 150 is coupled to the crucible 131, Moving the crucible 131 from the maintenance chamber 160 to the crucible 131 after moving the crucible 131 in the maintenance chamber 160 from the maintenance chamber 160; A step of filling the deposition material into the deposition chamber 110 after the deposition of the deposition material filled cuvette 131 into the deposition chamber 160 and the deposition of the deposition material into the deposition chamber 110, Sible in situ step.

In each step, the cruising movement step of this embodiment is a step of moving the gate 115 provided in the deposition chamber 110 after the inside of the deposition chamber 110 is exhausted in the state of FIG. 5 (a) Separating the crucible 131 from the deposition module 130 by coupling the subsequent detachment jig member 151 to the crucible 131 and then rotating the detachable jig member 151; Moving the separated crucible 131 from the deposition chamber 110 to the maintenance chamber 160 by lowering the connecting portion 152 with the moving force and moving the deposition chamber 110 and the maintenance chamber 160 to the sub- (FIG. 5 (b)) partitioning the deposition chamber 110 and the maintenance chamber 160 by blocking the gate 115 which communicates the liver.

This crucial transfer step allows the crucible 131 to move from the deposition chamber 110 to the maintenance chamber 160. At this time, except for the time to move the crucible 131, the gate 115 It is possible to minimize the inflow of foreign matter into the deposition chamber 110 by maintaining the shutoff state and to maintain the cleanliness of the deposition chamber 110.

5 (c), the opening / closing gate 165 provided at one side of the main chamber 160 is opened to separate the crucible 131 The method includes the steps of filling the crucible 131 with an evaporation material 131a and recombining the crucible 131 filled with the evaporation material to the detachable jig member 151 in the make chamber 160 . However, the present invention is not limited to this, and the crucible 131 may be separated from the maintenance chamber 160 in a crucible (not shown) 131 may be accomplished.

5 (a), although not shown in the drawings, the deposition chamber 110 and the maintenance chamber 160 are first formed in a vacuum atmosphere, and then the gate The attaching / detaching jig member 151 coupled to the crucible 131 is lifted to return the crucible 131 to the deposition chamber 110 and then the detachable jig member 151, and then the crucible 131 is moved to the maintenance chamber 160, and then the gate 115 is shut off. Thus, the crucible 131 filled with the evaporation material is mounted again in the deposition module 130.

As described above, according to the embodiment of the present invention, the process of filling the crucible 131 with the deposition material is not performed in the deposition chamber 110, but is performed by the crucible transfer unit 150, The deposition chamber 110 can be maintained in a clean state.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: Substrate deposition apparatus
110: deposition chamber
130: Deposition module
131: Crucible
150: Crucible moving part
151: attachment / detachment jig member
155:
160: Main chamber

Claims (10)

A deposition chamber having a deposition space in which a deposition process is performed on a substrate;
A deposition module provided in a lower space of the deposition space of the deposition chamber to provide a deposition material to the substrate, and a crucible to which the deposition material is filled; And
A crucible moving unit mounted on a maintenance chamber having a space partitioned by the deposition chamber and being detachable to the crucible to move or return the crucible from the deposition chamber to the maintenance chamber;
And a substrate holder.
The method according to claim 1,
The crosbile moving unit includes:
A detachable jig member detachably coupled to the crucible; And
And a driving member which rotates or lifts the attachment / detachment jig member,
Wherein the lower end of the crucible and the attachment / detachment jig member are screwed together, and the lower end of the crucible and the attachment / detachment jig member are separated or combined by rotation of the attachment / detachment jig member.
3. The method of claim 2,
And a gate communicating between the deposition chamber and the maintenance chamber so that the crucible can be transferred from the deposition chamber to the maintenance chamber by the crucible moving unit.
3. The method of claim 2,
Wherein the detachable jig member
A coupling portion detachably coupled to a lower end of the crucible; And
And a connection portion that is connected to one end of the coupling portion and the other end is exposed to the outside of the main chamber to rotate or lift by a driving force of a driving member located outside the main chamber.
Under the fourth condition,
Wherein the driving member comprises:
A magnetic fluid seal surrounding the connection portion and rotating the connection portion using magnetism; And
And a driving portion mounted on an end of the connecting portion to generate a linear moving force for elevating the connecting portion in a height direction.
6. The method of claim 5,
Wherein the driving member comprises:
And a shrinkable bellows surrounding the connection portion, the shrinkable bellows having one end coupled to the lower end surface of the main chamber and the other end coupled to the upper surface of the magnetic fluid chamber.
A method for charging a substrate in a substrate deposition apparatus according to claim 1,
Moving the crucible moving part to the crucible and then moving the crucible from the deposition chamber to the maintenance chamber;
A deposition material filling step of separating the crucible in the maintenance chamber from the maintenance chamber and filling the deposition material with the crucible; And
A crucible in-situ step of loading the crucible filled with the deposition material into the maintenance chamber and then returning the crucible to the deposition chamber;
Wherein the substrate deposition apparatus further comprises:
8. The method of claim 7,
Wherein the moving step comprises:
Separating the crucible from the deposition module by coupling a detachable jig member provided in the crucible moving unit to the crucible and then rotating the detachable jig member;
Moving the separated crucible from the deposition chamber to the maintenance chamber by lowering the detachment jig member; And
And partitioning the deposition chamber and the maintenance chamber by blocking a gate that communicates between the deposition chamber and the maintenance chamber.
8. The method of claim 7,
The deposition material filling step may include:
Opening an opening and closing gate of the main chamber, separating the crucible, and filling the crucible with the deposition material; And
And coupling the crucible filled with the deposition material to the detachable jig member in the maintenance chamber.
9. The method of claim 8,
Wherein the step (c)
Opening the gate and raising the detachable jig member to which the crucible is coupled;
Placing the crucible in the deposition chamber; And
And blocking the gate. ≪ Desc / Clms Page number 24 >

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