KR20170025944A - Opening and closing apparatus of gate valve - Google Patents

Opening and closing apparatus of gate valve Download PDF

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Publication number
KR20170025944A
KR20170025944A KR1020150123088A KR20150123088A KR20170025944A KR 20170025944 A KR20170025944 A KR 20170025944A KR 1020150123088 A KR1020150123088 A KR 1020150123088A KR 20150123088 A KR20150123088 A KR 20150123088A KR 20170025944 A KR20170025944 A KR 20170025944A
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KR
South Korea
Prior art keywords
opening
closing
sliding
gate valve
sliding block
Prior art date
Application number
KR1020150123088A
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Korean (ko)
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KR101739557B1 (en
Inventor
송성태
Original Assignee
주식회사 마이크로텍
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Priority to KR1020150123088A priority Critical patent/KR101739557B1/en
Publication of KR20170025944A publication Critical patent/KR20170025944A/en
Application granted granted Critical
Publication of KR101739557B1 publication Critical patent/KR101739557B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Abstract

The present invention relates to an opening and closing device for a gate valve. The opening and closing device for a gate valve includes: a valve body unit having a fluid path; and an opening and closing unit installed in the valve body unit to slide to open and close the fluid path. The opening and closing unit (20) includes: an opening and closing plate sliding to open and close the fluid path; a sliding block guiding sliding of the opening and closing plate by being installed on the both sides of the opening and closing plate; and a sliding member individually fixed to the outer side and the lower surface of the sliding block and reducing sliding friction by being coming into contact with the valve body unit. Therefore, according to the present invention, the opening and closing device for a gate valve has the sliding member of the opening and closing unit, which is fixed to the sliding block. So, the opening and closing device for a gate valve can reduce corrosion due to powder of the sliding member and can reduce sliding failure of the opening and closing plate by preventing mass powder from being caught.

Description

[0001] OPENING AND CLOSING APPARATUS OF GATE VALVE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve opening / closing apparatus, and more particularly, to a gate valve opening / closing apparatus that smoothly performs opening and closing operations of a gate valve provided between a vacuum chamber and a vacuum pump.

Generally, when an operation such as a liquid crystal display (LCD) substrate or a semiconductor wafer is performed such as an etching process, a deposition process, a sputtering process, or a special coating process requiring a vacuum state such as a parallax coating process, To form a vacuum environment. In this case, it is important to set and maintain an appropriate degree of vacuum. What is absolutely necessary at this time is a vacuum gate valve.

The vacuum gate valve is located in the passage connecting the chamber and the pump and serves to maintain or release the vacuum state by opening and closing the passage. Such a vacuum gate valve normally keeps the airtightness of the chamber by sealing the passage connected to the chamber by the operation of one driving plate and one airtight plate.

Therefore, the sealing technique between the vacuum working area of the semiconductor manufacturing apparatus and the atmosphere also greatly affects the quality of the semiconductor product. Therefore, since a vacuum valve which is installed between the chamber in which the semiconductor device is integrated and the vacuum pump that sucks air in the chamber and which opens and closes the suction force of the vacuum pump to the chamber plays an important role, Is also becoming an important problem.

In particular, the fluid in the vacuum chamber discharged through the vacuum gate valve includes various by-products. Such by-products are continuously attached to the inner wall of the housing in which the opening and closing plate of the actuator for driving the opening / closing plate of the gate valve is slid when the fluid is discharged, thereby interfering with the forward / backward movement of the opening / closing plate. A sealing member was required.

However, in spite of the installation of the sealing member, the deposition material such as the powder is attached to the slider such as the bearing when the sliding plate of the opening and closing plate is slid smoothly so that the airtightness of the fluid passage is deteriorated There was a problem.

As a result, there has been a problem that the gate valve is frequently dismantled to be cleaned or cleaned, and there is a problem in that a processing failure in the processing process in the vacuum semiconductor equipment connected thereto is provided due to the opening and closing performance of the fluid passage and the sealing performance.

Korean Registered Patent No. 10-0717865 (May 14, 2007)

Disclosure of the Invention The present invention has been made in order to solve the problems of the related art as described above, and it is an object of the present invention to provide a gate valve opening / closing apparatus capable of preventing corrosion by powder of a sliding member and preventing sliding due to agglomerated powder, And the like.

Another object of the present invention is to provide a gate valve opening / closing device capable of adjusting the distance between the opening and closing plate and the sliding block.

It is still another object of the present invention to provide a gate valve opening / closing apparatus capable of reducing the frictional force between the sliding member and the valve body portion and improving the supporting force against the sliding member.

Another object of the present invention is to provide an apparatus for opening and closing a gate valve that can smoothly maintain sliding of an opening / closing plate by maintaining a contact force between a sliding member and a valve body portion uniformly when sliding a sliding block.

It is still another object of the present invention to provide a gate valve opening / closing device which can facilitate the opening and closing of the opening / closing plate during close driving.

According to an aspect of the present invention, there is provided a valve device including a valve body portion having a fluid passage formed therein, and an opening / closing portion provided to slide inside the valve body portion to open and close the fluid passage, An apparatus for opening and closing a gate valve, the opening and closing unit (20) comprising: an opening / closing plate slidably opening and closing the fluid passage; A sliding block installed on both sides of the open / close board to guide the sliding of the open / close board; And a sliding member fixedly installed on a lower surface and an outward side surface of the sliding block and reducing a sliding friction upon contact with the valve body portion 10. [

The opening and closing part 20 of the present invention is further characterized by a spacer provided between the opening and closing plate and the sliding block to adjust a distance between the opening and closing plate and the sliding block.

The sliding member of the present invention is characterized by being formed in a hemispherical shape so as to be in point contact with the valve body (10).

The sliding member of the present invention is characterized in that at least two or more of the sliding members are spaced apart from each other on the lower surface and the outward facing surface along the longitudinal direction of the sliding block.

The opening and closing unit 20 of the present invention is further characterized by an elastic means for elastically biasing the opening and closing plate in a direction perpendicular to the sliding direction and bringing the opening and closing plate into close contact with the fluid passage.

As described above, according to the present invention, since the sliding member of the opening and closing part is fixed to the sliding block, it is possible to prevent the sliding member from being corroded by the powder and prevent the sliding with the lump powder, Lt; / RTI >

Further, by providing a spacer between the opening / closing plate and the sliding block, the distance between the opening / closing plate and the sliding block can be adjusted.

Further, by providing the fixing pin formed as a semi-spherical shape in point contact with the valve body as the sliding member, the frictional force between the sliding member and the valve body can be reduced and the supporting force against the sliding member can be improved.

In addition, since at least two or more of the sliding members are spaced apart from each other in the longitudinal direction of the sliding block, the contact force between the sliding member and the valve body is uniformly maintained during sliding of the sliding block, Can be maintained smoothly.

Further, since the opening / closing plate as the opening / closing unit is further provided with the urging means for urging the opening / closing plate in the direction perpendicular to the sliding direction and bringing the opening / closing plate into close contact with the fluid passage, the effect of facilitating the checking / do.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a gate valve opening / closing device according to an embodiment of the present invention; FIG.
2 is an exploded view showing a gate valve opening / closing device according to an embodiment of the present invention;
3 is a top view showing an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention;
4 is a sectional view showing an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention;
5 is a front view showing an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention;
6 is a front view showing a sliding block of an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention;
7 is a bottom view showing a sliding block of an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention.
8 is a side view showing a sliding member of an opening and closing part of a gate valve opening / closing device according to an embodiment of the present invention.
9 is a front view showing a sliding member of an opening and closing part of a gate valve opening / closing device according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is an exploded view showing a gate valve opening / closing device according to an embodiment of the present invention, and Fig. 3 is a cross-sectional view of a gate valve according to an embodiment of the present invention. 4 is a cross-sectional view showing an opening / closing part of a gate valve opening / closing device according to an embodiment of the present invention, and Fig. 5 is a cross-sectional view of a gate valve according to an embodiment of the present invention. 6 is a front view showing a sliding block of an opening and closing part of a gate valve opening / closing device according to an embodiment of the present invention, and Fig. 7 is a front view of a gate valve according to an embodiment of the present invention 8 is a bottom view showing a sliding block of the opening and closing part of the gate valve opening and closing device, and Fig. 8 is a side view of the opening and closing part of the gate valve opening and closing device according to the embodiment of the present invention A side view showing a riding member, Figure 9 is a front view showing a sliding member of the opening and closing portion of the opening and closing of the gate valve apparatus according to one embodiment of the present invention.

1 and 2, the gate valve opening / closing device according to the present embodiment includes a valve body 10, an opening / closing portion 20, an opening / closing member 30, a sealing portion 40, And a vacuum gate valve opening / closing device for smoothly performing an opening and closing operation of a gate valve installed between the vacuum chamber and the vacuum pump.

The valve body 10 is a box-shaped body member constituting a vacuum gate valve provided between the vacuum chamber and the vacuum pump and having a fluid passage formed therein. The body 11 includes a body 11, a body cover 12, a drive unit 13, And a drive cover (14).

The body 11 is formed in a rectangular box shape and a fluid passage 11a having an upper portion and a lower portion opened is formed at one side of the body 11 and a sliding space is formed in the upper portion of the fluid passage 11a in a direction perpendicular thereto have. In addition, a hermetic member such as an O-ring is provided around the lower portion of the fluid passage 11a of the body portion 11 to maintain airtightness.

The body cover 12 is coupled to an upper portion of the body 11 to close the upper portion of the body 11 and a lock engagement hole 12a is formed at one side thereof in communication with the fluid passage 11a of the body 11 .

The driving unit 13 is coupled to one side of the body 11 and supplies the air pressure or the hydraulic pressure of the driving source to the opening and closing drive part 30 and the hermetic driving part 50 to drive the closure part 20 and the closing part 40 Respectively.

The drive cover 14 is a cover member that covers the opening and closing drive unit 30 installed on the body cover 12 so as to be detachably attached to one side of the upper surface of the body cover 12, It is of course possible to provide a ventilation hole for discharging generated heat to the outside.

The drive cover 14 is provided at an upper portion of the opening and closing guide portion 30 to prevent foreign matter such as dust and contaminants from entering the opening and closing guide portion 30, thereby preventing the risk of malfunction.

The opening and closing part 20 is an opening and closing means provided so as to slide inside the valve body 10 so as to open and close the fluid passage as shown in Figs. 2 to 5 and includes an opening / closing plate 21, a sliding block 22, (23a) and opens and closes the fluid passage (11a) as it moves back and forth into the sliding space of the valve body (10).

The opening and closing plate 21 is a flat plate member formed in a rectangular shape or a circular shape and is provided so as to cross perpendicularly to the fluid passage 11a so as to move back and forth so as to open and close the fluid passage 11a of the valve body portion 10.

The sliding block 22 is a guide member provided on both sides of the opening and closing plate 21 to guide the sliding of the opening and closing plate 21 as shown in Figs. And guide the sliding movement of the opening / closing plate 21 in the longitudinal direction.

As shown in Figs. 6 to 9, the sliding member 23 is a slider provided on the lower and outward side surfaces of the sliding block 22 to reduce sliding friction upon contact with the valve body 10, And a fixing pin 23a formed in a hemispherical shape so as to be in point contact with the base 10.

It is preferable that at least two or more of the sliding members 23 are provided on the lower surface and the outward facing surface of the sliding block 22, respectively.

The opening and closing part 20 may further include a spacer 24 provided between the opening and closing plate 21 and the sliding block 22 to adjust the distance between the opening and closing plate 21 and the sliding block 22.

It goes without saying that the opening and closing part 20 may further include an urging means 25 for urging the opening and closing plate 21 in the direction perpendicular to the sliding direction and bringing the opening and closing plate 21 into close contact with the fluid passage.

The elastic means 25 is made of a coil spring, and a plurality of elastic members are provided at the lower edge of the opening / closing plate 21 to give an upward biasing force against the upward pressing force.

The actuator 30 is provided at an upper portion of the body cover 12 of the valve body 10 to drive the actuator 30 in the forward and backward directions and includes an actuator 31 and a link mechanism 32, And the like.

As the actuator 31, various driving means such as a cylinder, a linear motor, and the like may be used as a driving source for providing a sliding driving force to the opening / closing portion 20 through the link mechanism 32. [

The link mechanism 32 is a power transmitting member that switches the linear driving force of the actuator 31 to a rotational driving force by mechanical connection and slidably feeds the opening / closing plate 20 in the forward and backward directions by the rotational force.

2 and 3, the sealing portion 40 is a sealing means provided movably upward or downward along the flow direction around the fluid passage so as to close the sliding space of the opening and closing portion 20, and the protector 41 ), A protection ring 42, an upstream flange 43 and a downstream flange 44.

The protector 41 is a passage member provided in the valve body 10 so as to form a fluid passage. The protector 41 is formed in a rectangular or circular shape and has a communicating passage 41a communicating with the fluid passage 11a at its inner periphery And a hermetic driving part 50 is mounted on the lower edge and a fixing plate 41c is coupled to both sides.

A fitting hole 41b is formed downward around the upper portion of the communication path 41a of the protector 41 and the fitting hole 41b is formed at an equal interval around the outer circumference of the communication path 41a. An airtight member such as an O-ring is provided around the upper portion of the communication path 41a of the protector 41 to maintain airtightness between the protector 41 and the upstream flange 43.

The protector 41 is formed as a fluid passage formed in the inner periphery of the communication passage 41a and narrowed toward the downstream side in the flow direction. The protection ring 42 is in contact with the outer peripheral surface of the fluid passage at the downstream of the fluid passage And a guide piece 41d for guiding to ascend and descend is formed to protrude in the downstream direction.

The protector 41 is provided with a hermetic member such as an O-ring on the outer circumferential surface of the protector 41 so as to maintain the airtightness between the protection rings 42 and the protector 41 and the protection ring 42, Thereby maintaining the airtightness.

The protection ring 42 is a ring member which is installed to close and ascend around the outer periphery of the protector 41. The protection ring 42 opens and closes the sliding space as it ascends and descends in a direction parallel to the fluid passage 11a.

The protection ring 42 is provided at an upper portion of the opening and closing part 20 and has a communication passage 42a formed therein to communicate with the fluid passage 11a of the valve body 10, And the outer peripheral portion thereof is inserted and raised on the outer peripheral surface of the protector 41.

An airtight member such as an O-ring is provided around the inner periphery of the protection ring 42 to maintain the airtightness between the protection ring 42 and the protector 41, An airtight member such as an O-ring is also provided at the lower end of the valve body 10 to maintain the airtightness between the protection ring 42 and the valve body 10 and between the protection ring 42 and the opening and closing plate 21 .

The upstream flange 43 is a flange provided upstream of the fluid passage of the protector 41 and connected to the upper portion of the protector 41 and communicating with the fluid passage 11a of the valve body 10 43a are formed to facilitate connection between the vacuum chamber and the gate valve.

The downstream flange 44 is a flange provided downstream of the fluid passage of the protector 41 and is connected to the lower portion of the protector 41 and communicates with the fluid passage 11a of the valve body 10 44a are formed to facilitate connection between the vacuum pump and the gate valve.

The hermetic driving part 50 is a driving part which is installed in the driving body part 10 and drives the hermetic sealing part 40. One end part of the hermetic driving part 50 is coupled to a supporting plate formed outwardly around the outer periphery of the protection ring 42, And four actuators provided at corner portions of the protection ring 42 so as to move up and down. Needless to say, various actuating means such as a cylinder, a linear motor, and the like, which provide a linear driving force, may be used as the actuator of the hermetically-

As described above, according to the present invention, since the sliding member of the opening and closing part is fixed to the sliding block, it is possible to prevent the sliding member from being corroded by the powder and prevent the sliding with the lump powder, Lt; / RTI >

Further, by providing a spacer between the opening / closing plate and the sliding block, the distance between the opening / closing plate and the sliding block can be adjusted.

Further, by providing the fixing pin formed as a semi-spherical shape in point contact with the valve body as the sliding member, the frictional force between the sliding member and the valve body can be reduced and the supporting force against the sliding member can be improved.

In addition, since at least two or more of the sliding members are spaced apart from each other in the longitudinal direction of the sliding block, the contact force between the sliding member and the valve body is uniformly maintained during sliding of the sliding block, Can be maintained smoothly.

Further, since the opening / closing plate as the opening / closing unit is further provided with the urging means for urging the opening / closing plate in the direction perpendicular to the sliding direction and bringing the opening / closing plate into close contact with the fluid passage, the effect of facilitating the checking / do.

The present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. Therefore, the above embodiments are merely illustrative in all respects and should not be construed as limiting.

10: valve body part 20: opening / closing part
30: opening and closing port portion 40: sealing portion
50:

Claims (5)

A gate valve opening and closing device including a valve body portion having a fluid passage formed therein and an opening and closing portion provided to slide inside the valve body portion to open and close the fluid passage,
The opening / closing part (20)
An opening / closing plate slidably opening and closing the fluid passage;
A sliding block installed on both sides of the open / close board to guide the sliding of the open / close board; And
And a sliding member fixedly installed on a lower surface and an outward side surface of the sliding block to reduce sliding friction upon contact with the valve body portion. The method according to claim 1,
Wherein the opening and closing part (20) further comprises a spacer (20) provided between the opening and closing plate and the sliding block, for adjusting a distance between the opening and closing plate and the sliding block. The method according to claim 1,
Wherein the sliding member comprises a fixing pin formed in a hemispherical shape so as to be in point contact with the valve body portion (10). The method according to claim 1,
Wherein at least two or more of the sliding members are spaced apart from each other on the lower surface and the outward facing surface along the longitudinal direction of the sliding block. The method according to claim 1,
Wherein the opening and closing part (20) further comprises an urging means for urging the opening / closing plate in a direction perpendicular to the sliding direction and bringing the opening / closing plate into close contact with the fluid passage.
KR1020150123088A 2015-08-31 2015-08-31 Opening and closing apparatus of gate valve KR101739557B1 (en)

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Application Number Priority Date Filing Date Title
KR1020150123088A KR101739557B1 (en) 2015-08-31 2015-08-31 Opening and closing apparatus of gate valve

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Application Number Priority Date Filing Date Title
KR1020150123088A KR101739557B1 (en) 2015-08-31 2015-08-31 Opening and closing apparatus of gate valve

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KR20170025944A true KR20170025944A (en) 2017-03-08
KR101739557B1 KR101739557B1 (en) 2017-05-24

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100717865B1 (en) 2006-02-01 2007-05-14 주식회사 에스티에스 Improved protection vacuum gate valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6902145B2 (en) * 2003-06-19 2005-06-07 Vat Holding Ag Regulating slide valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100717865B1 (en) 2006-02-01 2007-05-14 주식회사 에스티에스 Improved protection vacuum gate valve

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