KR20170014484A - Ultra Violet Light Source Module - Google Patents
Ultra Violet Light Source Module Download PDFInfo
- Publication number
- KR20170014484A KR20170014484A KR1020150107943A KR20150107943A KR20170014484A KR 20170014484 A KR20170014484 A KR 20170014484A KR 1020150107943 A KR1020150107943 A KR 1020150107943A KR 20150107943 A KR20150107943 A KR 20150107943A KR 20170014484 A KR20170014484 A KR 20170014484A
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- South Korea
- Prior art keywords
- substrate
- substrates
- leds
- light source
- led
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
- F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
- F21K9/20—Light sources comprising attachment means
- F21K9/23—Retrofit light sources for lighting devices with a single fitting for each light source, e.g. for substitution of incandescent lamps with bayonet or threaded fittings
- F21K9/233—Retrofit light sources for lighting devices with a single fitting for each light source, e.g. for substitution of incandescent lamps with bayonet or threaded fittings specially adapted for generating a spot light distribution, e.g. for substitution of reflector lamps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
- F21K9/90—Methods of manufacture
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V19/00—Fastening of light sources or lamp holders
- F21V19/001—Fastening of light sources or lamp holders the light sources being semiconductors devices, e.g. LEDs
- F21V19/003—Fastening of light source holders, e.g. of circuit boards or substrates holding light sources
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2101/00—Point-like light sources
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Led Device Packages (AREA)
- Planar Illumination Modules (AREA)
Abstract
The present invention relates to an ultraviolet light source module, and more particularly, to an ultraviolet light source module constituting a light source that emits uniform ultraviolet rays in a subject curing process using a UV LED.
The present invention relates to an ultraviolet light source module for a subject curing process, wherein the ultraviolet light source module includes at least two UV LEDs 20 mounted thereon, wherein the UV LEDs are mounted on a subject 30 relatively moving for a curing process, Is located in a position such that all of the points of the UV LED belong to the diffusing surface of one or two UV LEDs or fall within the diffusing surface of three or four UV LEDs.
Description
The present invention relates to an ultraviolet light source module, and more particularly, to an ultraviolet light source module constituting a light source that emits uniform ultraviolet rays in a subject curing process using a UV LED.
Ultraviolet (UV) process units are used to manufacture various process targets by irradiating ultraviolet light to induce photochemical reactions of the targets. As devices become more highly integrated, there is a growing demand for micro-wiring and multi-layer wiring designs, which further increases the need to reduce the volume of interlevel layers to further reduce power consumption and increase device speed. And a low dielectric constant thin film material is usually used to reduce the volume of the intervening layer.
However, the use of a low dielectric constant material lowers the mechanical strength and, as a result, the low dielectric constant film is difficult to maintain the strength accepted in subsequent processes such as chemical mechanical polishing (CMP), wire bonding, and packaging. As a method for improving the above-mentioned problems, there has been used a method of curing a low-dielectric constant material through ultraviolet irradiation, thereby increasing the mechanical strength. Low-k materials exposed to ultraviolet light are shrunk and cured, resulting in an increase in mechanical strength.
Meanwhile, with the recent development of UV LED technology, UV LEDs are being replaced by ultraviolet lamps used in conventional subject curing processes. However, since UV LED chips are a kind of point light source, unlike conventional ultraviolet lamps, ultraviolet light intensity reaching the surface of a subject may be different from each other.
1, which shows the shape of a UV LED module that irradiates ultraviolet rays in a subject curing process and thus the difference in ultraviolet intensity between the subject's surface, the subject subject S is arranged such that the
If there is a difference in the degree of curing of the subject due to the difference in the intensity of ultraviolet rays, there is a high possibility that a distorted phenomenon occurs in which a relatively weak portion is deformed earlier when an external force is applied to a microstructure, This adversely affects the subject yield.
In addition, since the conventional
SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a structure that can partially perform maintenance on UV LEDs while enhancing irradiation uniformity of ultraviolet rays, And an ultraviolet light source module which can increase the uniformity of irradiation with ultraviolet rays.
In order to solve the above problems, the present invention provides an ultraviolet light source module, wherein the ultraviolet light source module includes at least two
The
The position of the
The ultraviolet module may include a substrate assembly 10 having a plurality of
The present invention also relates to a subject ultraviolet light source module, wherein the ultraviolet light module includes a substrate assembly 10 having a plurality of
The plurality of
The peripheries of the
The
A
The
A
The
The projecting
The
The
The present invention also relates to a subject ultraviolet light source module, wherein the ultraviolet light module comprises a substrate (11, 12) on which two or more UV LEDs (20) are mounted; And a second frame body (52) for rotatably supporting the other ends of the substrates, a first frame body (51) rotatably supporting one ends of the substrates in a state where a plurality of the substrates are arranged apart from each other, The
The positions of the
Each of the substrates may be detachably coupled to the frame body.
A
According to the present invention, in using a UV LED ultraviolet module comprising a point light source, it is possible to uniformly control the intensity of ultraviolet rays reaching a surface of an object without using an optical device or a diffusion plate structure for diffusing ultraviolet rays emitted from the UV LED It is economical and very efficient. By omitting the optic or diffusion plate structure, the intensity of the ultraviolet rays irradiated to the object is not lowered, and the structure is simplified, so that the production cost can be reduced.
According to the present invention, since the plurality of substrates have the same shape, the number of parts required for maintenance can be minimized, and when the UV LED on any one of the plurality of substrates reaches the end of its useful life, And thus the maintenance cost is greatly reduced.
In addition, according to the present invention, since the structure can easily align the plurality of substrates when they are fastened together, it is very easy to manufacture and maintain the light source module.
Further, according to the present invention, since the projecting portion or the depression on the substrate is formed corresponding to the arrangement and position of the UV LED, the area of the substrate around the mounted UV LED can be secured, and the substrate design is easy.
The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG.
1 is a view showing the shape of a UV LED module for irradiating ultraviolet rays in a conventional subject curing process and the difference of ultraviolet intensity on the surface of the subject,
FIG. 2 is a view showing an embodiment of the ultraviolet light source module according to the present invention, the ultraviolet ray intensity on the surface of the subject, and FIG.
3 to 5 are views showing another embodiment of the ultraviolet light source module according to the present invention,
6 is a view showing various examples of the diffusing surface of the UV LED shown on the surface of the object, and
7 to 9 are views showing another embodiment of the ultraviolet light source module according to the present invention.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
It is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to inform.
2 is a view showing an embodiment of the ultraviolet light source module according to the present invention and ultraviolet light intensity on the surface of the subject.
Referring to FIG. 2, the substrate assembly 10 of the ultraviolet light source module according to the present invention has a plurality of
A plurality of
The
On the other hand, on the substrate on which the
The intensity of ultraviolet light measured at the surface of the subject passing through the ultraviolet light source module formed by such a substrate assembly 10 is different from that when passing the B1-B2 portion and when passing the C1-C2 portion, As shown in Fig. That is, since the position of the facing UV LED is continuously offset as the subject moves, the dose of the ultraviolet rays received by the subject is on average the same, meaning that the subject curing is uniform in all the areas of the subject do.
That is, the gap between the
Since the UV LEDs disposed on the substrate assembly 10 are appropriately distributed to the plurality of
In particular, the shape in which the protruding portion is provided on the edge of the UV LED which is mounted on the substrate in the offset direction and the depression is provided on the opposite side is sufficient to secure the substrate area around the UV LED.
As described above, according to the present invention, it is possible to uniformly distribute the UV LEDs used for curing UV by utilizing the shape of the substrate, and the protrusions are geometrically engaged with the depressed portions to precisely define the position of the substrate , Protrusions and depressions ensure the area of the substrate around the UV LEDs, which is easy to design, and the UV LEDs can be individually serviced.
Hereinafter, another embodiment of the present invention will be described with reference to FIG. Also in Fig. 3, the subject moving for the curing process moves from the left to the right or from the right to the left in the drawing. In the embodiment shown in FIG. 2, if the arrangement direction of the UV LEDs mounted on one substrate is in the same direction as the moving direction of the object, the embodiment of FIG. 3 includes the
Referring to FIG. 3A, the plurality of
In the present invention, in order to ensure that when one of the adjacent substrates is engaged with each other in such a state that one of the adjacent substrates is rotated at 180 degrees, a
As described above, the position of the
At this time, the projecting
FIG. 4 is an ultraviolet light source module according to another embodiment of the present invention. In contrast to FIG. 3, there are differences in the shape of the
5 is an ultraviolet light source module according to another embodiment of the present invention. FIG. 5 is a view showing that UV LEDs are arranged in the vertical direction in one of the
In the ultraviolet light source module shown in FIG. 5, the plurality of
The arrangement of the UV LEDs mounted on one substrate shows that the
It should be noted that the embodiment disclosed in Fig. 5 is different from the embodiments of Figs. 2 to 4 in that the periphery of the substrate is generally rectangular in shape, but the protrusions and depressions are formed in all four sides of the rectangular shape .
The principle in which protrusions and depressions are formed on the side of the upper side and the side of the lower side of the substrate in the figure is similar to the case of Fig. That is, the
In the drawing, positions where protrusions and depressions are formed on the left side and the right side of the substrate are as follows. In other words, a
That is, according to the embodiment illustrated in FIG. 5, each of the
Referring to FIGS. 2 to 5, it can be seen that the UV LEDs are disposed at the vertex of the hexagon and at the center of the hexagon. This corresponds to the vertex positions of equilateral triangles arranged so that sides and vertices of the neighboring equilateral triangles are mutually shared as indicated by a dotted line in FIG.
6 is a view showing various examples of the diffusing surface of the UV LED shown on the object surface. The diffusing surface is a line connecting a region having a luminous intensity of 50% at the peak of the light amount, and can be circular as shown in FIG. 6, but various shapes are possible depending on the shape of the light source. Also, it may be a line symmetric rather than a circular symmetry. In this case, the uniformity can be ensured by adjusting the spacing of the light sources in the horizontal axis and the vertical axis. As shown in FIG. 6, an example of the diffusion pattern of the UV LED is a shape in which the light source spreads from the point light source to one side, and the diffusing shape is substantially conical. This type of diffusion does not require orientation consideration when UV LEDs are mounted on a substrate of a flat plate.
In the present invention, it is exemplified that the diffusion angle is 120 degrees. The diffusion angle means the angle up to the portion where the intensity of the highest light is 50%. On the other hand, in the UV LED, the part with the highest light intensity is the central part. Of course, light can be detected even at a region outside the diffusing angle, but this is insignificant compared to the light irradiated within the diffusing angle.
6 (a) to (c), it can be understood that the distance between the ultraviolet light source module and the subject gradually increases.
Referring to FIG. 6A, all the points on the object substrate exist at a position where one diffusing surface exists, or two diffusing surfaces overlap each other. The
6 (b), all the points on the subject substrate may be present at a
6 (c), all the points on the object substrate are present at the
If the ultraviolet module is far away from the subject, the uniformity may be increased. However, this is not desirable in that the height of the equipment must be increased as much as this, and that the diffused light is farther away from the light source, the light intensity is greatly reduced, and the use of more UV LEDs is required. From this point of view, the arrangement of the diffusing surfaces as described above is significant.
7 to 9 are views showing another embodiment of the ultraviolet light source module according to the present invention. 7 to 9, the subject to be subjected to the curing process can be moved in the left and right direction in the figure, and the subject can be moved in the up and down direction in the drawing.
Referring to FIG. 7, the ultraviolet light source module according to the present invention includes
Next, as shown in FIG. 7 (a), a plurality of the
When the interval between the
Also, according to the structure shown in FIG. 7 (b), the interval of the
Although a structure in which a plurality of
Needless to say, it is also possible to replace or repair the above-described structure with only a substrate requiring maintenance.
The embodiment shown in FIG. 9 differs from the embodiment of FIG. 7 in that some of the substrates are turned by 180 degrees.
In other words, the plurality of
Even when the light sources are uniformly arranged, the light sources can not overlap each other and thus may not be uniform. In order to solve this problem, the area of the object may be smaller than the area of the light source after the diffusing surface.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the invention is not limited to the disclosed exemplary embodiments. It is obvious that a transformation can be made. Although the embodiments of the present invention have been described in detail above, the effects of the present invention are not explicitly described and described, but it is needless to say that the effects that can be predicted by the configurations should also be recognized.
10: substrate assembly
11: a first substrate
12: second substrate
20: UV LED
41:
42:
50: Frame
51: First frame
52:
53: Third frame
S: subject
Claims (19)
In the ultraviolet light source module, two or more UV LEDs 20 are mounted,
The mounted UV LED may be configured so that all points of the relatively moving subject 30 for curing process are within the diffusing surface of one or two UV LEDs or are within the diffusing surface of three or four UV LEDs The ultraviolet light source module comprising:
The UV LED (20) is a point light source having a circular diffusing surface.
Wherein the position of the UV LED (20) is disposed at a vertex position of equilateral triangles arranged such that sides and vertices of the UV light are adjacent to each other.
Wherein the ultraviolet module includes a substrate assembly (10) having a plurality of substrates (11, 12) on which at least two UV LEDs (20) are mounted.
The ultraviolet module includes a substrate assembly (10) having a plurality of substrates (11, 12) on which two or more UV LEDs (20) are mounted,
Wherein the position of the UV LED located on the substrate assembly is offset as the movement proceeds, when viewed in the direction of movement of the relatively moving subject (30).
Wherein the plurality of substrates (11, 12) have the same shape.
The peripheries of the substrates 11 and 12 are generally rectangular in shape and the periphery of the substrate 11 is in contact with the periphery of the adjacent substrate 12,
The protruding portion 41 is formed on one substrate 11 and the depressed portion 42 having a shape corresponding to the protruding portion 41 is formed on the other substrate 12.
Wherein the UV LEDs (20, 20) mounted on the substrates (11, 12) are offset from each other in the direction of movement of the subject.
A protrusion 41 is formed on the edge X of the substrate in the offset direction of the UV LED and a depression 42 is formed on the edge Y of the substrate in the direction opposite to the offset direction of the UV LED Ultraviolet light source module.
The protrusions 41 of the substrate 11 are sandwiched by the depressed portions 42 of the substrate against which the plurality of substrates 11 and 12 are aligned in the same direction, And the projecting portion (41) of the substrate abutted on the depression (42) is fitted.
A protrusion 41 is formed in a region A corresponding to the position where the UV LED 20 is mounted on the rim of the substrate which abuts against each other and a region B corresponding to the position where the UV LEDs 20 are mounted, And the shape of the protrusion (41) and the depression (42) can be fitted to each other.
The UV LED 20 disposed between neighboring substrates in a state in which the substrates 12 are rotated while being rotated by 180 degrees are brought into contact with the object 30 moving relatively for the curing process, And the positions of the ultraviolet light source modules are shifted from each other as the movement progresses.
The projecting portion 41 of the substrate 11 is fitted into the depression 42 of the substrate to which the substrate 11 is abutted and the projecting portion 41 of the substrate abutted on the depression 42 of the substrate 11 is fitted.
The protrusions 41 and the depressions 42 are formed at one end and the other end of a rim portion abutting the adjacent substrate, respectively. The protrusions 41 are relatively close to the UV LED 20 at both ends Is formed at the end portion (M), and the depression (42) is formed at the other end (N) relatively far from the UV LED (20) at both ends.
Wherein the substrates (11,12) are removably coupled to the substrate assembly (10).
The UV module comprises a substrate (11, 12) on which two or more UV LEDs (20) are mounted; And
And a second frame body (52) rotatably supporting the other ends of the substrates so as to rotatably support one ends of the substrates in a state where a plurality of the substrates are arranged apart from each other, (50)
When the first frame 51 and the second frame 52 are displaced relative to each other in the moving direction of the relatively moving object 30 for the curing process, Ultraviolet light source module with reduced spacing between LEDs.
The positions of the UV LEDs 20 mounted on the two different substrates 11 and 12 in a state where the plurality of substrates are arranged side by side are aligned in the moving direction of the subject 30 relatively moving for the curing process An ultraviolet light source module whose positions are shifted from each other.
And each of the substrates is detachably coupled to the frame body.
Further comprising a third frame body (53) in a direction opposite to a direction in which the first frame body (51) is positioned with respect to the second frame body (52)
12. The ultraviolet light source module according to claim 1, wherein a plurality of substrates (11, 12) are rotatably supported between the second frame body and the third frame body by the second frame body and the third frame body, respectively.
Priority Applications (1)
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KR1020150107943A KR20170014484A (en) | 2015-07-30 | 2015-07-30 | Ultra Violet Light Source Module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150107943A KR20170014484A (en) | 2015-07-30 | 2015-07-30 | Ultra Violet Light Source Module |
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KR20170014484A true KR20170014484A (en) | 2017-02-08 |
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KR1020150107943A KR20170014484A (en) | 2015-07-30 | 2015-07-30 | Ultra Violet Light Source Module |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107191794A (en) * | 2017-06-01 | 2017-09-22 | 深圳市华星光电技术有限公司 | A kind of light fixture |
KR20210012698A (en) * | 2019-07-26 | 2021-02-03 | (주)에스티아이 | Window holding module and laminating apparatus including the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6296909B1 (en) | 1998-12-22 | 2001-10-02 | General Electric Company | Method for thermally spraying crack-free mullite coatings on ceramic-based substrates |
US6759098B2 (en) | 2000-03-20 | 2004-07-06 | Axcelis Technologies, Inc. | Plasma curing of MSQ-based porous low-k film materials |
-
2015
- 2015-07-30 KR KR1020150107943A patent/KR20170014484A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6296909B1 (en) | 1998-12-22 | 2001-10-02 | General Electric Company | Method for thermally spraying crack-free mullite coatings on ceramic-based substrates |
US6759098B2 (en) | 2000-03-20 | 2004-07-06 | Axcelis Technologies, Inc. | Plasma curing of MSQ-based porous low-k film materials |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107191794A (en) * | 2017-06-01 | 2017-09-22 | 深圳市华星光电技术有限公司 | A kind of light fixture |
KR20210012698A (en) * | 2019-07-26 | 2021-02-03 | (주)에스티아이 | Window holding module and laminating apparatus including the same |
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