KR20170008019A - Chemical Supplying Apparatus and Method for Controlling Coupler Module thereof - Google Patents

Chemical Supplying Apparatus and Method for Controlling Coupler Module thereof Download PDF

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Publication number
KR20170008019A
KR20170008019A KR1020150099211A KR20150099211A KR20170008019A KR 20170008019 A KR20170008019 A KR 20170008019A KR 1020150099211 A KR1020150099211 A KR 1020150099211A KR 20150099211 A KR20150099211 A KR 20150099211A KR 20170008019 A KR20170008019 A KR 20170008019A
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South Korea
Prior art keywords
chemical
coupler module
automatic
coupler
tanker
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KR1020150099211A
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Korean (ko)
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KR101710563B1 (en
Inventor
남영우
봉은상
이종훈
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주식회사 케이씨텍
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pipeline Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

Disclosed are a chemical supply device for manufacturing a semiconductor and a method for controlling a coupler module thereof. The chemical supply device according to the present invention comprises: a plurality of automatic coupler modules which is prepared for each type of chemical to receive chemical from an external tank lorry; and a manual coupler module which operates in pair with one of the automatic coupler modules and supplies inert carrier gas to the external tank lorry. The chemical supply device of the present invention uses the manual coupler module in common, thereby simplifying the entire system structure and reducing costs compared to using a plurality of passive coupler modules.

Description

Technical Field [0001] The present invention relates to a chemical feeder for semiconductor manufacturing, and a method of controlling the coupler module,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical supply device for semiconductor manufacturing, and more particularly, to a chemical supply device for use in a common use of a nitrogen gas supply coupler module for transferring a chemical stored in a tank, And To a coupler module control method.

In general, a variety of chemicals are used in manufacturing equipment for manufacturing semiconductor or flat panel display devices, and a chemical supply device for supplying chemicals to the process.

In order to supply the chemical at a constant pressure in the manufacturing process, a general chemical feeder is used to store liquid chemicals in the tank, mix them at a constant concentration as required, and supply carrier gas or push gas to the tank The stored liquid chemical is pressurized and supplied to the process.

The chemical supply device has a chemical storage tank connected to the manufacturing process through piping and supplies the chemical of the storage tank to the manufacturing facility by opening the pipe through valve control and supplies the chemical from the outside to the chemical storage tank And then performs the operation of storing again.

FIG. 1 is a view schematically showing a conventional chemical supply device, and exemplarily shows a case where a chemical used in a semiconductor or display device manufacturing facility is hydrochloric acid (HCl) and hydrogen peroxide (H 2 O 2). Since the system inside the chemical feeder is completely divided according to the type of the chemical to be treated, the system 10 for treating hydrochloric acid and the system for treating hydrogen peroxide 30 are separated.

The external chemical supplied to the storage tank is transferred from the outside by a tank roller 50. In order to transfer the chemical stored in the tank 50 to the storage tank 11 of the hydrochloric acid treatment system 10 in the chemical feed system, the following steps are required: (1) first, to inject the nitrogen (N2) gas of the chemical feeder into the tank 50 A hose 53a is connected between the passive coupler module 53 called a manual quick coupler (MQC) of the tank 50 and the passive coupler module MQC1 of the chemical feeder. (2) When the hose 53a is connected to the passive coupler module MQC1, an automatic coupler module 51 called an Auto Clean Quick Coupler (ACQC) of the tank 50 is connected to the automatic coupler module 51 of the hydrochloric acid processing system 10, (ACQC1) to a hose (51a) for chemical transport.

When the nitrogen discharged from the nitrogen pressurizing device 20 of the chemical feeder is introduced into the tank 50 through the piping interconnected with the passive coupler modules MQC1 and 53, Of the chemical is transferred to the storage tank 11 of the chemical feeder through piping interconnected with the automatic coupler module 51 (ACQC1).

In this way, an automatic coupler module (ACQC) and a manual coupler module (MQC) must be connected in pairs to transfer the chemical of the tank to the chemical feeder. As described above, since the system in the chemical feeder is completely classified according to the type of the chemical to be treated, the conventional chemical feeder includes the automatic coupler modules ACQC1 and ACQC2 as many as the types of chemicals to be processed, (MQC1, MQC2). Therefore, in order to transfer the hydrogen peroxide H2O2 to the storage tank 31 of the hydrogen peroxide processing system 30, the separately provided automatic coupler module ACQC2 and the passive coupler module MQC2 are connected to the tanker 50. [

Naturally, in the conventional chemical feeding device, the nitrogen pressurizing devices 20 and 40 must be provided for each of the plurality of manual coupler modules MQC1 and MQC2, and a plurality of supply systems such as pipes and valves for supplying nitrogen gas are required .

[Related Technical Literature]

1. Supply system of chemical for semiconductor fabrication and control method thereof (Patent Publication No. 10-1999-0053811)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a chemical feeder which can commonly use a coupler module for supplying nitrogen gas to interconnect the chemical stored in a tank or the like to a chemical storage tank And And a coupler module control method.

According to an aspect of the present invention, there is provided a chemical supply apparatus for supplying a chemical to a semiconductor or display device manufacturing facility having a plurality of storage tanks for individually storing a plurality of chemicals, A common passive coupler module that operates as a pair with one of the plurality of automatic coupler modules and supplies the inert carrier gas to the external tanker, and an automatic coupler module and a passive coupler module, And a control unit for controlling the control unit.

When chemical is supplied from an external tanker, the control unit checks whether a pipe extending from the tank is connected to the passive coupler module, and then selects one of the plurality of automatic coupler modules, The chemical supply can be controlled by releasing the lock.

The chemical feeder of the present invention is not limited to a plurality of automatic coupler modules (ACQC) classified for each chemical in order to supply different kinds of chemicals from a tank, a storage tank, etc., Only one coupler module (MQC) is commonly used. Therefore, as the chemical feeder has only one passive coupler module (MQC), it is not necessary to have a plurality of nitrogen pressurizing devices and it is not necessary to have a plurality of nitrogen systems.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view schematically illustrating a state in which an automatic coupler module and a manual coupler module of a conventional chemical feeding device are installed,
2 is a view showing a connecting portion of a conventional coupler,
3 is a view schematically illustrating the automatic coupler module and the manual coupler module installed state of the chemical feeding device of the present invention,
FIG. 4 is a view showing a connection portion of the coupler module in the example of FIG. 3, and
5 is a flowchart provided in the explanation of the coupler module control method of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in more detail with reference to the drawings.

Referring to FIG. 3, the chemical feeder of the present invention is designed as a separate system for each kind of chemical (chemical) to be processed for supplying to a manufacturing facility. For example, as shown in FIG. 3, if the chemical feeder is supplied with hydrochloric acid (HCl) and hydrogen peroxide (H2O2) from the external tank 50 or the like, the first system 210 for hydrochloric acid and the second system for hydrogen peroxide (230) are arranged separately.

Since the structure of each system is not a feature of the present invention, it can have any number of different configurations. In the following, the example of FIG. 3 will be briefly described. In FIG. 3, the first system 210 for the first chemical solution (hydrochloric acid) includes at least one first storage tank 11 for storing the chemical, and a second storage tank 11 for supplying the chemical stored in the first storage tank 11 to the manufacturing facility. A first chemical supply pipe 15 for supplying a chemical to the first storage tank 11 from the external tanker 50 and a second chemical supply pipe 15 for supplying chemical to the first storage tank 11, And a first carrier gas supply pipe 17 for supplying a carrier gas and supplying the chemical stored in the first storage tank 11 to the manufacturing facility through the first main supply pipe 13. [ A first automatic coupler module (ACQC1) is provided on the opposite side of the first chemical supply pipe (15) connected to the first storage tank (11) to receive the chemical from the external tanker (50).

The second system 230 for the second chemical solution (hydrogen peroxide) includes at least one second storage tank 31 for storing the chemical and a second main supply pipe 31 for supplying the chemical stored in the second storage tank 31 to the manufacturing facility. A second chemical supply pipe 35 for supplying a chemical to the second storage tank 31 from the outer tank 50 and a second chemical supply pipe 35 for supplying an inert carrier gas to the second storage tank 31, And a second carrier gas supply pipe 37 for supplying the chemical stored in the second main gas supply pipe 31 to the manufacturing facility through the second main supply pipe 33. A second automatic coupler module (ACQC2) is provided on the opposite side of the second chemical supply pipe (35) connected to the second storage tank (31) to receive the chemical from the external tanker (50).

However, unlike the prior art, the chemical supply device of the present invention forms a pair with the first automatic coupler module ACQC1 or the second automatic coupler module ACQC2 to provide the tank carrier 50 with an inert carrier gas such as nitrogen A single 'common' passive coupler module (MQC) for supplying the common passive coupler module (MQC), and a single nitrogen pressurizing device 250 for supplying nitrogen to the common passive coupler module (MQC).

4, instead of having a plurality of automatic coupler modules ACQC1 and ACQC2 as many as chemical types, the chemical feeder of the present invention can use the passive coupler module MQC in common, (50). ≪ / RTI > Therefore, it is sufficient to provide one nitrogen pressurizing device 250 for supplying nitrogen gas to the common passive coupler module MQC. The system, form or system of the nitrogen pressurizing apparatus 250 can take any form, but a plurality of sets, as in the prior art, is sufficient.

Since the first automatic coupler module ACQC1 and the second automatic coupler module ACQC2 are the same devices as the conventional automatic coupler module and the common passive coupler module MQC is the same device as the conventional manual coupler module, The manner in which the tank 50 is connected to the chemical feeder of the present invention is the same as in the past. Therefore, each of the first automatic coupler module ACQC1, the second automatic coupler module ACQC2 and the passive coupler module MQC has the respective connection portions 21, 23 and 25 shown in FIG. 4, and the connection portions 21 , 23, 25).

In order to transfer the chemical from the tanker 50 to the chemical feeder, the automatic coupler module 51 of the tank 50 and the first automatic coupler module ACQC1 or the second automatic coupler module ACQC2 of the chemical feeder It must be connected by the chemical transfer hose 51a and the passive coupler module 53 of the tanker 50 and the passive coupler module MQC of the chemical supply device should be connected by the inert carrier gas transfer hose 53a.

The chemical feeder includes a first automatic coupler module (ACQC1), a second automatic coupler module (ACQC2), and a control device (270) for controlling the common passive coupler module (MQC). Naturally, the control device 270 may be a component of a comprehensive control device that integrally performs various sensor and valve control operations in the chemical feeder in addition to the control of the coupler module. Since such a comprehensive control is not a core configuration of the present invention .

The control unit 270 is connected to a control panel 271 for receiving a user control command and receives a request for charging the first liquid chemical (hydrochloric acid) or the second chemical liquid (hydrogen peroxide) from the user, And an automatic coupler module dedicated to the chemical solution to control connection to the tank lorry 50, as well as to perform various processes required in the connection process. When the connection is established, the control device 270 controls the nitrogen pressurizing device 250 to pressurize the nitrogen to supply nitrogen for chemical liquid transfer to the tank lorry 50.

Hereinafter, the method of controlling the coupler module according to the present invention will be described with reference to FIG. 5, and the following process will be described assuming that the user wishes to transfer the chemical solution 1 (hydrochloric acid).

≪ Common passive coupler opening according to acceptance of chemical liquid transfer request: S501, S503 >

When the control unit 270 receives the chemical liquid transfer request using the control panel 271, the control unit 270 first releases the lock unit LOCK of the common passive coupler module MQC, Information message 'to the control panel 271. In order to open the lock device LOCK of the passive coupler module MQC, the control device 270 provides a key code for the passive coupler module MQC to the passive coupler module MQC, It can be released.

<Connection of common manual coupler module: S505, S507>

The control device 270 waits for information that the hose 53a of the tanker 50 is connected from the sensor provided at the connecting portion 25 of the common passive coupler module MQC. When the hose 53a is connected to the connecting portion 25 of the common passive coupler module MQC in the tank 50 (S505), the connection process of the hose 53a and the common passive coupler module MQC is automatically performed S507).

The connecting process of the hose 53a and the common passive coupler module MQC includes the steps of (1) cleaning the contact portion of the hose with the deionized water, and (2) using the nitrogen gas (N2) And drying the cleaning portion. The coupling between the hose 53a and the coupler (not shown) inside the connection portion 25 is completed after the drying by the nitrogen gas, so that the connection between the hose 53a and the common passive coupler module MQC is completed. The tightening information is sent to the control device 270 by a sensor (not shown) provided in the hose 53a and a coupler (not shown).

&Lt; Automatic coupler module opening and connection: S509 to S513 >

Upon receipt of the locking information from the common passive coupler module MQC, the control device 270 releases the locking device LOCK of the automatic coupler module (herein, the first automatic coupler module) Sends a connection announcement message to the control panel. In order to open the locking device of the first automatic coupler module ACQC1, the control device 270 provides a key code dedicated to the first automatic coupler module ACQC1 to the first automatic coupler module ACQC1 to release the lock (S509).

The control device 270 waits for information that the hose 51a of the tank lorry 50 is connected from the first automatic coupler module ACQC1. When the hose 51a is connected to the connecting portion 21 of the first automatic coupler module ACQC1 in step S511, the connecting process between the hose 51a and the first automatic coupler module ACQC1 is automatically performed (S513).

The connecting process of the hose 51a and the first automatic coupler module ACQC1 is the same as the connecting process of the common coupler module. Therefore, the contact portion between the coupler and the hose is cleaned with a DI water, dried with nitrogen gas (N 2), and the fastening is completed. The tightening information is sent to the controller 270 by a sensor (not shown) provided in the hose 51a and a coupler (not shown).

After the passive coupler module and the automatic coupler module are connected through the process of FIG. 5, nitrogen gas is supplied to the tanker 50 to transfer the chemical solution.

The separation process between the automatic coupler module and the passive coupler module after the chemical liquid transfer is the same as the conventional method.

The control device 270 causes the nitrogen pressurizing device 250 to stop the nitrogen supply, and the passive coupler module (MQC) and the hose 53a are released. Before the separation of the hose 53a, the process of venting the nitrogen in the pipeline is performed first, and then the coupling between the coupler (not shown) and the hose 53a in the passive coupler module MQC is released. As with the connection, the connection surface between the coupler and the hose 53a is cleaned with DI water, and the connection surface is dried with nitrogen gas. The engagement between the connecting portion 25 of the passive coupler module MQC and the hose 53a is released.

Disengagement of the first coupler module ACQC1 and the hose 51a is also performed in the same manner. The connection surface of the coupler and the hose 51a is cleaned with the DI water, and the connection surface is dried with nitrogen gas. The engagement between the connecting portion 21 of the first coupler module ACQC1 and the hose 51a is released. When the second chemical liquid transfer is performed thereafter, the process of FIG. 5 is performed again. At this time, the common passive coupler module MQC is used again.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

Claims (5)

1. A chemical feeder having a plurality of storage tanks for individually storing a plurality of chemicals to supply the chemical to a semiconductor or display device manufacturing facility,
A plurality of automatic coupler modules provided for each chemical type to receive chemical from an external tanker; And
And a common passive coupler module that operates as a pair with one of the plurality of automatic coupler modules and supplies an inert carrier gas to the external tanker, wherein the passive coupler module is commonly used.
The method according to claim 1,
Wherein when the chemical is supplied from the outer tank, the locking device of the passive coupler module is first unlocked and opened to check whether the hose for supplying the inert carrier gas to the tank is connected to the passive coupler module, Further comprising a controller for releasing the locking device of the automatic coupler module corresponding to the chemical stored in the tanker among the coupler modules so that the hose to be supplied with the chemical from the tanker is fastened.
3. The method of claim 2,
Wherein the control device releases the locking device by providing a unique key code to the passive coupler module or the automatic coupler module.
A method of controlling a coupler module in a chemical feeder for supplying a chemical to a semiconductor or display device manufacturing facility having a plurality of storage tanks for individually storing a plurality of chemicals,
An automatic coupling device for supplying chemical from an external tanker and a manual coupling device for supplying an inert carrier gas to the tank are provided, wherein the automatic coupling device is provided with a plurality of automatic coupling devices for each chemical type, Commonly arranging to operate as a pair with one of the plurality of automatic coupler modules; And
When the chemical is supplied from the external tanker, the control device first releases the locking device of the manual coupler module, opens the hose to supply the inert carrier gas to the tanker, checks whether the hose is connected to the passive coupler module, And releasing the locking device of the automatic coupler module corresponding to the chemical stored in the tanker among the plurality of automatic coupler modules so that the hose to be supplied with the chemical from the tanker is fastened to the chemical coupler module, A method of controlling a coupler module of a feeder.
5. The method of claim 4,
Wherein the control device releases the locking device by providing a unique key code to the passive coupler module or the automatic coupler module.







KR1020150099211A 2015-07-13 2015-07-13 Chemical Supplying Apparatus and Method for Controlling Coupler Module thereof KR101710563B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220155627A (en) * 2021-05-17 2022-11-24 김상호 Automatic clean quick coupler remote operation system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111853545A (en) * 2017-08-24 2020-10-30 系统科技公司 Automatic chemical supply device
CN109422226A (en) * 2017-08-25 2019-03-05 系统科技公司 Automatic chemical diluting and mixing equipment
CN109422229B (en) * 2017-08-25 2020-09-22 系统科技公司 Hose laying structure of automatic chemical supply device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281100A (en) * 1993-03-23 1994-10-07 Asahi Eng Co Ltd Selective connecting device for pipeline
KR19990053811A (en) * 1997-12-24 1999-07-15 윤종용 Supply device of chemical manufacturing device for semiconductor and its control method
KR19990075353A (en) * 1998-03-19 1999-10-15 윤종용 Coupler of chemical supply line

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06281100A (en) * 1993-03-23 1994-10-07 Asahi Eng Co Ltd Selective connecting device for pipeline
KR19990053811A (en) * 1997-12-24 1999-07-15 윤종용 Supply device of chemical manufacturing device for semiconductor and its control method
KR19990075353A (en) * 1998-03-19 1999-10-15 윤종용 Coupler of chemical supply line

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220155627A (en) * 2021-05-17 2022-11-24 김상호 Automatic clean quick coupler remote operation system

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