KR20160145245A - Particular matter sensor and exhaust gas purification system using the same - Google Patents

Abstract

A particulate matter sensor and an exhaust gas purification system using the same are provided. A particulate matter sensor according to an embodiment of the present invention includes an insulating substrate; A sensing part formed as a part of an upper surface exposed on an upper portion of the insulating substrate and having a first area A1; A first ground electrode disposed to be exposed on the sensing unit and connected to the first electrical connection terminal; and a plurality of second ground electrodes spaced apart from the first ground electrode and electrically connected to the first ground electrode, A first electrode comprising a plurality of spaced apart electrodes; A second electrode disposed inside the insulating substrate so as to correspond to the first ground electrode and the plurality of spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And a heater disposed inside the insulating substrate and heating the first electrode and the second electrode, wherein a third area (A3) including an area of the first ground electrode and the entirety of the plurality of spacing electrodes May be formed to be wider than a second area (A2) excluding the third area (A3) in the first area (A1) of the sensing part.

Description

TECHNICAL FIELD [0001] The present invention relates to a particulate matter sensor and an exhaust gas purification system using the particulate matter sensor,

The present invention relates to a particulate matter sensor and an exhaust gas purification system using the same.

Generally, there is a growing interest in a post-treatment apparatus for purifying exhaust gas as the exhaust regulation is further strengthened. Particularly, regulations on Particulate Matter (PM) for diesel vehicles are becoming more stringent.

Specifically, regulations on exhaust pollutants contained in exhaust gas are gradually increasing due to demands of comfortable environment of human beings due to air pollutants and environmental regulations of each country, and various exhaust gas filtration methods have been studied as countermeasures thereto have.

Accordingly, a post-treatment technique for treating the exhaust gas has been proposed, and the above-described post-treatment technique includes an oxidation catalyst, a nitrogen oxide catalyst, and an exhaust gas reduction device through a smoke filtering device.

The most efficient and practical approach to reduce the particulate matter among the oxidation catalyst, the nitrogen oxide catalyst, and the soot filter apparatus as described above is an exhaust gas reduction apparatus using a soot filter apparatus.

A particulate matter sensor (PM sensor) is mounted at the downstream end of the DPF filter in order to diagnose whether the exhaust gas abatement apparatus is malfunctioning. The particulate matter sensor PM has a resistance method and a capacitance method.

Here, the resistance type particulate matter sensor (PM sensor) includes a plurality of external electrodes disposed on the surface in parallel, particulate matter is deposited between the external electrodes, and the particulate matter PM It is possible to easily detect the particulate matter passing through the exhaust gas particulate filter and escaping to the downstream side by measuring the change in the electrical conductivity of the sensor after the current is formed.

In addition, the electrostatic capacity type is composed of a plurality of external electrodes arranged in parallel on the surface, a plurality of internal electrodes arranged in the up / down direction with a plurality of external electrodes, and an area of the particulate matter deposited between the external electrodes And the capacitance between the external electrode and the internal electrode is measured by using the distance between the external electrode and the internal electrode, it is possible to easily detect the particulate matter passing through the exhaust gas particulate filter and escaping to the downstream side.

In the resistance type and capacitive type particulate matter sensors, the response time of the initial current formed between the external electrodes can be determined according to the speed at which the particulate phase is settled between the external electrodes.

However, since the resistance method and the volumetric capacitance type particulate matter sensor according to the related art are formed with a width larger than the width of the external electrode between the external electrodes, the response time of the initial current due to the deposition of particles is very slow .

Further, since the area of the external electrode is limited, there is a problem that the limit value for the amount of change in capacitance between the external electrode and the internal electrode is determined.

Further, since the width of the external electrode is formed to be narrower than the width between the external electrodes, there is a problem that the detection sensitivity of capacitance between the external electrode and the internal electrode is low.

Japanese Patent Laid-Open No. 2009-85959 (published on April 23, 2009)

An object of the present invention is to provide a particulate matter sensor capable of shortening a response time of an electrostatic capacity and an exhaust gas purification system using the particulate matter sensor.

According to an aspect of the present invention, there is provided a particulate matter sensor comprising: an insulating substrate; A sensing part formed as a part of an upper surface exposed on an upper portion of the insulating substrate and having a first area A1; A first ground electrode disposed to be exposed on the sensing unit and connected to the first electrical connection terminal; and a plurality of second ground electrodes spaced apart from the first ground electrode and electrically connected to the first ground electrode, A first electrode comprising a plurality of spaced apart electrodes; A second electrode disposed inside the insulating substrate so as to correspond to the first ground electrode and the plurality of first spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode, wherein a third area (A3) including an area of the first ground electrode and the entirety of the plurality of spacing electrodes May be formed to be wider than a second area (A2) excluding the third area (A3) in the first area (A1) of the sensing part.

At this time, the plurality of spacing electrodes may be arranged parallel to and spaced from each other in parallel with the first ground electrode in the width direction of the insulating substrate.

At this time, the first ground electrode is formed in two, and the two first ground electrodes are arranged in two spaced-apart electrode portions located on both ends of the plurality of spacing electrodes in the width direction of the insulating substrate .

At this time, the second grounding electrode may include a second electrical connection terminal electrically connected to any one of the second grounding electrodes.

In this case, the third area A3 may be at least twice the second area A2.

In this case, the first ground electrode and the plurality of spacing electrodes are each formed in a rectangular shape having a predetermined width (W1) and a length (L1), wherein a width of each of the first ground electrode and the plurality of spacing electrodes W1 may be at least twice the widthwise distance W2 between adjacent ones of the first ground electrode and the plurality of spacing electrodes.

Meanwhile, the first electrode and the second electrode may be arranged in parallel to each other, and the area of the second electrode may correspond to the area of the first electrode.

The first electrode and the second electrode may be arranged in parallel to each other in the longitudinal direction of the insulating substrate, and the first electrode and the second electrode may be arranged to correspond to each other in the width direction of the insulating substrate.

The first electrode and the second electrode may further include a dielectric layer disposed between the first electrode and the second electrode.

At this time, the first electrical connection terminal and the second electrical connection terminal may be formed on the other side of the upper surface of the insulating substrate.

At this time, a via hole for electrically connecting the second electrode to the second electrical connection terminal may be formed inside the insulating substrate.

According to another aspect of the present invention, there is provided an exhaust manifold comprising: an exhaust manifold; An exhaust gas particulate filter for removing particulates contained in the exhaust gas discharged from the exhaust manifold; And a particulate matter sensor disposed on an outlet side exhaust pipe connected to the exhaust gas particulate filter and detecting particulate matter passing through the exhaust gas particulate filter and escaping to the downstream side, wherein the particulate matter sensor comprises: an insulating substrate; A sensing part formed as a part of an upper surface exposed on an upper portion of the insulating substrate and having a first area A1; A first ground electrode disposed to be exposed on the sensing unit and connected to the first electrical connection terminal; and a plurality of second ground electrodes spaced apart from the first ground electrode and electrically connected to the first ground electrode, A first electrode comprising a plurality of spaced apart electrodes; A second electrode disposed inside the insulating substrate so as to correspond to the first ground electrode and the plurality of second ground electrodes and including a plurality of second ground electrodes electrically connected to each other; And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode, wherein a third area (A3) including an area of the first ground electrode and the entirety of the plurality of spacing electrodes Is formed to be wider than a second area (A2) excluding the third area (A3) in the first area (A1) of the sensitive part.

The particulate matter sensor used in the exhaust gas purifying system according to an embodiment of the present invention includes a first ground electrode and a second ground electrode that form an area of a first electrode disposed in a sensitive portion of an insulating substrate surface, By narrowing the width between the spacing electrodes and narrowing the width of the space in which the particles between the ground electrodes constituting the first electrode are deposited, the particles can be deposited in a short period of time, The response time required for changing the capacitance can be shortened.

In addition, since the width of the space between the adjacent ground electrodes of the first electrode is narrower than the width of the ground electrodes, the particles can be deposited in a short time, and the detection sensitivity of the capacitance between the first electrode and the second electrode Can be increased.

Also, since the area of the first electrode is wide, the threshold value of the capacitance that changes between the first electrode and the second electrode can be increased.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the overall configuration of an exhaust gas purifying system for a diesel engine for a vehicle. FIG.
2 is a perspective view schematically showing a particulate matter sensor according to an embodiment of the present invention.
3 is an exploded perspective view of the particulate matter sensor of Fig.
4 is an enlarged plan view of a part of the sensitive part of Fig.
5A and 5B are plan views showing first and second electrode portions according to FIGS. 2 and 3, respectively.
6 is an enlarged cross-sectional view taken along the line A-A 'in FIG.
7 is a cross-sectional view illustrating an operating state of a particulate matter sensor according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1, a turbine 130 may be installed in the exhaust manifold 120 of the engine 110, and a turbocharger 140 interlocked with the turbine 130 may be installed in the exhaust manifold 120 of the engine 110 The compressed air can be passed through the cooler 150 and sent to an intake manifold (not shown), and a part of the combustion exhaust discharged from the exhaust manifold 120 flows through the valve 160 and the cooler, (Not shown).

A diesel oxidation catalyst (not shown) and an exhaust gas particulate filter 170 are installed in the exhaust pipe 180 connected to the exhaust manifold 120 to treat the combustion exhaust gas. That is, while the combustion exhaust gas discharged to the exhaust pipe 180 passes through the diesel oxidation catalyst (not shown) on the upstream side, hydrocarbon (HC), carbon monoxide (CO) and nitrogen monoxide NO of unburned fuel can be oxidized Particulate matter (PM) composed of soot, soluble organic component (SOF) and inorganic component can be collected while passing through the exhaust gas particulate filter 170 on the downstream side.

The diesel oxidation catalyst (not shown) can raise the exhaust temperature by oxidation combustion of the supplied fuel or oxidize and remove the SOF component in the particulate matter when the exhaust gas particulate filter 170 is forcibly regenerated. In addition, NO 2 produced by the oxidation of NO can be used as an oxidizing agent for the particulate matter deposited in the downstream exhaust gas particulate filter 170, thereby enabling continuous oxidation.

The exhaust gas particulate filter 170 may be formed with a plurality of fine holes passing through a cell wall for partitioning the gas flow path and can capture particulate matter in the exhaust gas introduced into the exhaust gas particulate filter 170. It may be configured as a continuous regenerative diesel particulate filter in which the diesel oxidation catalyst and the exhaust gas particulate filter 170 are integrated.

A differential pressure sensor 190 may be installed in the exhaust pipe 180 to monitor the amount of particulate matter deposited in the diesel particulate filter 170. The differential pressure sensor 190 is connected to the upstream side and the downstream side of the exhaust gas particulate filter 170 and can output a signal corresponding to the differential pressure between the upstream and downstream sides thereof.

In addition, a temperature sensor (not shown) is provided upstream of the diesel oxidation catalyst and upstream and downstream of the exhaust gas particulate filter 170, and the respective exhaust temperatures can be monitored.

Based on these outputs, the control circuit (not shown) monitors the catalytic active state of the diesel oxidation catalyst and the particulate matter trapping state of the diesel particulate filter 170. When the particulate matter trapping amount exceeds the allowable amount, The regeneration control for burning and removing can be performed.

The particulate matter sensor 200 is installed on an outlet side exhaust pipe 182 connected to the other side of the exhaust gas particulate filter 170 and can detect particulate matter passing through the exhaust gas particulate filter 170 and escaping to the downstream side .

2 and 3, the particulate matter sensor 200 of the present invention includes an insulating substrate 210, a sensing unit 220, a first electrode unit 230, a second electrode unit 240, (250).

3, the insulating substrate 210 may be formed by laminating the first to fourth insulating layers 212, 214, 216, and 218 in parallel with each other, and may be formed of a glass material, a ceramic material, , Or a heat-resistant insulator such as titanium dioxide.

The sensitive part 220 may be exposed on the insulating substrate 210.

The sensing part 220 may have a first area A1 and may be formed as a part of the upper surface of the insulating substrate 210. [

As shown in FIGS. 2 and 3, the first electrode unit 230 may be disposed on the upper surface of the insulating substrate 210 so as to be exposed.

Specifically, the first electrode unit 230 may include a first electrode 232, a first electrode lead 234, and a first electrical connection terminal 236.

The first electrode 232 may be arranged to be exposed on the sensing part 220, which is composed of a plurality of ground electrodes.

Referring to FIG. 4, the first electrode 232 may include a first ground electrode 232a and a plurality of spacing electrodes 232b spaced apart from the first ground electrode 232a.

3 and 4, the first ground electrode 232a may have a rectangular shape extending in the longitudinal direction of the insulating substrate, and one end of the first ground electrode 232a may be connected to the first electrical connection terminal 236 ).

4, the plurality of spacing electrodes 232b are not electrically connected to the first ground electrode 232a but are spaced apart in parallel to each other in the width direction of the insulating substrate 210. [ At this time, the plurality of spacing electrodes 232b are also not electrically connected to each other. In FIGS. 3 and 4, six spacing electrodes are illustrated, but this is exemplary and the number of spacing electrodes may vary depending on the width of the spacing electrode, the area of the sensing area, and the total area of the first electrode.

Referring to FIG. 4, the first ground electrode 232a is formed of two electrodes, and the two first ground electrodes 232a are disposed at both ends of the plurality of spacing electrodes 232b in the width direction of the insulating substrate 210 The two spacing electrodes 232b may be disposed on the outer side of the two spacing electrodes 232b.

Particulate matter may be trapped between the first ground electrode 232a and the first ground electrode 232a, the spacing electrode 232b adjacent to the first ground electrode 232a, and the adjacent spacing electrode 232b among the plurality of spacing electrodes 232b. A space 222 to be deposited is formed.

At this time, each of the first ground electrode 232a and the spacing electrode 232b may have a rectangular shape having a predetermined width W1 and length L1 as shown in FIG.

The width W1 of the first ground electrode 232a and the second spacing electrode 232b is equal to a distance between the first ground electrode 232a and the second spacing electrode 232b adjacent to each other and between the adjacent spacing electrodes 232b Can be formed wider than the distance.

4, the width W1 of the first grounding electrode 232a and the spacing electrode 232b is substantially equal to the width W1 between the neighboring first grounding electrode 232a and the spacing electrode 232b, And the width W2 of the space 222 formed between the spacing electrodes 232b.

The total area of the first electrode 232 including the two first ground electrodes 232a and the plurality of spacing electrodes 232b is set to be the first area A1, The third area A3 occupied by the first electrode is larger than the second area A2 excluding the third area A3 in the first area A1 of the sensing part, .

The third area A3 that is the total area of the first electrode 232 is greater than the third area A1 that is the total area of the first electrode 232, May be twice or more than the second area A2 of the sensitive part 220 excluding the area A3.

5A, a pair of first ground electrodes 232a formed outside the plurality of spacing electrodes 232b are electrically connected to the first electrical connection terminal 236 through the first electrode lead 234 Can be connected.

At this time, as shown in FIG. 5A, one of the pair of first ground electrodes 232a may be formed to be straight and the other may be bent at least twice to be connected to the first electrode lead.

According to an embodiment of the present invention, particles 222 are formed in the space 222 formed between the neighboring first ground electrode 232a and the spacing electrode 232b and between the neighboring spacing electrodes 232b, The adjacent first ground electrode 232a and the spacing electrode 232b and neighboring spacing electrodes 232b may be electrically connected to each other.

Referring to FIGS. 2 and 3, the second electrode unit 240 may be spaced apart from the first electrode unit 232 in the insulating substrate 210.

Specifically, the second electrode portion 240 may include a second electrode 242, a second electrode lead 244, and a second electrical connection terminal 246.

The second electrode 242 may include a plurality of second ground electrodes 242a. At this time, the plurality of second ground electrodes 242a may be spaced apart in a rectangular shape in the insulating substrate 210.

Further, the plurality of second ground electrodes 242a may be electrically connected to each other and may include one of the plurality of second ground electrodes 242a, for example, the second ground electrode 242a located on the first right side as viewed in FIG. 5b, Can be electrically connected to the second electrical connection terminal (246) through the second electrode lead (244).

3, the first electrical connection terminal 236 and the second electrical connection terminal 246 may be formed on the other side of the upper portion of the insulating substrate 210.

The second electrical connection terminal 246 and the second electrode lead 244 are electrically connected to each other to electrically connect the second electrical connection terminal 246 formed on the other side of the upper surface of the insulating substrate 210 with the second electrode lead 244, A first via hole 212a and a second via hole 214a are formed in the first insulating layer 212 and the second insulating layer 214 between the first insulating layer 212 and the second insulating layer 214, respectively.

A dielectric layer 219 having a dielectric constant may be disposed between the first electrode 232 and the second electrode 242.

The dielectric layer 219 may be formed between the first electrode 232 and the second electrode 242 so as to realize a smooth electrostatic capacitance characteristic between the first electrode 232 and the second electrode 242. [ And may be made of a ceramic material.

The first electrode 232 and the second electrode 242 are arranged to be spaced apart from the insulating substrate 210 by a predetermined distance. The first electrode 232 and the second electrode 242 are parallel to each other in the vertical direction of the insulating substrate 210 Lt; / RTI >

The first electrode 232 and the second electrode 242 may be arranged in parallel to each other in the longitudinal direction of the insulating substrate 210 and may be arranged to correspond to each other in the width direction of the insulating substrate 210 .

Here, the area of the second electrode 242 may be a size corresponding to the area of the first electrode 232.

That is, the width of the second ground electrode 242a constituting the second electrode 242 may be greater than the width of the space 222 formed between the adjacent second ground electrodes 242a, And may be formed to have more than twice the width of the space 222.

According to the above-described configuration, particulate matter can be deposited in the space 222 between the neighboring first ground electrode 232a and the spacing electrode 232b.

6, particulate matter is sequentially deposited from the first space 222a of the entire space 222 formed in the first electrode unit 230, and then the entire spaces 222 The particulate matter may be deposited on the surface of the substrate.

Accordingly, the first ground electrode 232a and the spacing electrode 232b are connected to each other by the deposited particulate matter so that the conductive area of the first electrode 232 can be sequentially widened, 230 and the second electrode unit 240 can be measured.

4, since the first electrode 232 has a short distance W2 between the neighboring first ground electrode 232a and the spacing electrode 232b and the neighboring spacing electrode 232b, The response time required for the capacity to start changing can be shortened.

A specific capacitance measurement method will be described later with reference to Fig.

The heater unit 250 is for heating the first electrode 232, the second electrode 242 and the dielectric layer 219 and is disposed inside the insulating substrate 210, for example, 216 and the fourth insulating layer 218. In this case,

More specifically, the heater unit 250 may be positioned at an inner lower portion of the insulating substrate 210 so as to be spaced apart from the first electrode unit 230 and the second electrode unit 240 in parallel.

At this time, both ends of the heater unit 250 may be electrically connected to the third electrical connection terminal 252 and the fourth connection terminal 254 on the fourth insulation layer 218 of the insulating substrate 210.

Further, when the heater unit 250 heats the first electrode 232, the particulate matter deposited on the first electrode 232 can be removed.

In addition, since the exhaust gas downstream of the exhaust gas particulate filter (170 in FIG. 1) is at a high temperature of about 300 ° C or higher and about 650 ° C or higher in heating the heater, the general metal is likely to be oxidized when used as a heater, (250) may be formed of a material which is not easily oxidized at a high temperature.

7, the particulate matter P1 flowing into the outlet-side exhaust pipe 182 through the exhaust gas particulate filter 170 (Fig. 1) The particulate matter P1 passes through the spaces 222 formed between the first ground electrode 232a and the spacing electrode 232b so that the particulate matter P1 passes through the space 222 between the first ground electrode 232a and the spacing electrode 232b ). ≪ / RTI >

Specifically, a first ground electrode 232a constituting the first electrode 232 and a second electrode 232b adjacent to the first ground electrode 232a are deposited between the adjacent spacing electrodes 232b. The first ground electrode 232a and the second spacing electrode 232b adjacent to the first ground electrode 232a and the adjacent spacing electrode 232b are electrically connected by the particulate matter to the first electrode 232 The capacitance between the first electrode 232 and the second electrode 242 is changed.

Here, the capacitance between the first electrode 232 and the second electrode 242 can be measured by the following equation (1).

C =? A / t (Equation 1)

In Equation 1, A represents a distance between the first ground electrode 232a adjacent to the space 222 in which the particulate matter P1 in the sensitive portion is deposited and the distance between the first ground electrode 232a and the second ground electrode 232a, T is the distance between the first electrode 232 and the second electrode 242 on which the particulate matter P1 is deposited and therefore the capacitance between the first electrode unit 230 and the second electrode unit 240 Can be measured.

The first ground electrode 232a and the first ground electrode 232a are connected to each other when the particulate matter P1 is sequentially deposited from the first space among the spaces 222 formed in the first electrode unit 230. [ And the adjacent spacing electrode 232b are connected to each other by the particulate matter P1 so that the electrically connected areas of the first electrodes 232 are sequentially .

As described above, the electrostatic capacity between the first electrode unit 230 and the second electrode unit 240 can be increased as the area of the electrode electrically connected to the first electrode 232 increases.

In the equation (1), the area A is the sum of the area of the first ground electrode 232a and the area of the second electrode 232b adjacent to the first ground electrode 232a and electrically connected to each other. Therefore, if the area of the total area A3 of the first electrode 232 increases, the area A of the formula 1 becomes large. Therefore, the number of the spacing electrodes 232b electrically connected to the first ground electrode 232 The amount of change in capacitance between the first electrode 232 and the second electrode 242 can be increased.

Meanwhile, in an embodiment of the present invention, the area A3 of the first electrode 232 is between the neighboring first ground electrode 232a and the spacing electrode 232b, and between the neighboring spacing electrodes 232b The limit value of the capacitance change amount between the first electrode 232 and the second electrode 242 can be increased because the remaining area A2 of the sensitive part including the space of the first electrode 232 and the second electrode 242 is wider than the remaining area A2.

It is also preferable that the area A3 of the first electrode 232 is smaller than that of the first electrode 232a and the second electrode 232b between adjacent ones of the first ground electrode 232a and the one spacing electrode 232b, The detection sensitivity of the electrostatic capacity between the first electrode 232 and the second electrode 242 can be increased because it is wider than the remaining area A2.

The distance between the neighboring first ground electrode 232a and the spacing electrode 232b and the distance between adjacent spacing electrodes 232b or the width W2 of the space constitutes the first electrode 232 The particles can be deposited in space in a short period of time because the width is smaller than the width W1 of the first ground electrode 232a and the spacing electrode 232b so that the capacitance between the first electrode 232 and the second electrode 242 The response time required for this change can be shortened.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: exhaust gas purification system 110: engine
120: exhaust manifold 130: turbine
140: Turbocharger 150: Cooler
160: valve (160) 170: exhaust gas particulate filter
180: Exhaust pipe 182: Exhaust pipe
190: differential pressure sensor 200: particulate matter sensor
210: insulating substrate 220:
230: first electrode part 232: first electrode
234: first electrode lead 236: first electrical connection terminal
240: second electrode portion 242: second electrode
244: second electrode lead 246: second electrical connection terminal
250: heater part

Claims (12)

An insulating substrate;
A sensing part formed as a part of an upper surface exposed on an upper portion of the insulating substrate and having a first area A1;
A first ground electrode disposed to be exposed on the sensing unit and connected to the first electrical connection terminal; and a plurality of second ground electrodes spaced apart from the first ground electrode and electrically connected to the first ground electrode, A first electrode comprising a plurality of spaced apart electrodes;
A second electrode disposed inside the insulating substrate so as to correspond to the first ground electrode and the plurality of spacing electrodes and including a plurality of second ground electrodes electrically connected to each other; And
And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode,
The third area A3 including the area of the first ground electrode and the entirety of the plurality of spacing electrodes is larger than the second area A2 excluding the third area A3 in the first area A1 of the sensing part Wide, particulate matter sensor. The method according to claim 1,
Wherein the plurality of spacing electrodes are arranged parallel to and spaced from each other in parallel with the first ground electrode in the width direction of the insulating substrate. 3. The method of claim 2,
The first ground electrode is formed in two,
Wherein the two first grounding electrodes are disposed at two spacing electrode lateral portions located at both ends of the plurality of spacing electrodes in the width direction of the insulating substrate. The method of claim 3,
And a second electrical connection terminal electrically connected to any one of the second ground electrodes of the plurality of second ground electrodes. The method according to claim 1,
Wherein the third area (A3) is at least twice the second area (A2). 3. The method of claim 2,
Wherein each of the first ground electrode and the plurality of spacing electrodes has a rectangular shape having a predetermined width W1 and a length L1, wherein a width W1 of each of the first ground electrode and the plurality of spacing electrodes is And a width (W2) in the width direction between adjacent ones of the first ground electrode and the plurality of spacing electrodes. The method according to claim 1,
Wherein the first electrode and the second electrode are arranged in parallel to each other, and the area of the second electrode is formed to correspond to the area of the first electrode. The method according to claim 1,
Wherein the first electrode and the second electrode are arranged in the longitudinal direction of the insulating substrate,
Wherein the first electrode and the second electrode are arranged to correspond to each other in the width direction of the insulating substrate. 5. The method of claim 4,
And a dielectric layer positioned between the first electrode and the second electrode. 5. The method of claim 4,
Wherein the first electrical connection terminal and the second electrical connection terminal are formed on the other side of the upper surface of the insulating substrate. 10. The method of claim 9,
And a via hole for electrically connecting the second electrode to the second electrical connection terminal is formed inside the insulating substrate. An exhaust manifold;
An exhaust gas particulate filter for removing particulates contained in the exhaust gas discharged from the exhaust manifold;
And a particulate matter sensor disposed on an exhaust pipe connected to the exhaust gas particulate filter and detecting particulate matter passing through the exhaust gas particulate filter and flowing downstream,
The particulate matter sensor
An insulating substrate;
A sensing part formed as a part of an upper surface exposed on an upper portion of the insulating substrate and having a first area A1;
A first ground electrode disposed to be exposed on the sensing unit and connected to the first electrical connection terminal; and a plurality of second ground electrodes spaced apart from the first ground electrode and electrically connected to the first ground electrode, A first electrode comprising a plurality of spaced apart electrodes;
A plurality of second electrodes disposed inside the insulating substrate so as to correspond to the first ground electrode and the plurality of second ground electrodes and electrically connected to each other; And
And a heater unit disposed inside the insulating substrate and heating the first electrode and the second electrode,
The third area A3 including the area of the first grounding electrode and the entirety of the plurality of spacing electrodes is smaller than the second area A2 excluding the third area A3 in the first area A1 of the sensing part The exhaust gas purification system is widely formed.

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