KR20160110854A - Apparatus for laser direct image process of fiber array block - Google Patents

Abstract

The present invention relates to a fiber array block of an LDI exposure device, and a method of arranging fiber array blocks. First and second grooves in which optical fibers are placed are formed on an upper end and a lower end of a base substrate respectively, and provided is a fiber array structure in which an optical fiber is placed between adjacent array blocks when the array blocks in which the first and second grooves are formed in a reverse trapezoid shape are multi-layered. Accordingly, it is possible to easily correct a processing error or an interval error of optical fibers, thus being able to possibly obtain a quality of uniform exposure. According to the present invention, the fiber array block of the LDI exposure device used to fixate a plurality of optical fibers and to maintain an arrangement state comprises: a base substrate (12); first grooves (14) formed at predetermined intervals with a predetermined depth on the upper end of the base substrate (12); and second grooves (16) formed at predetermined intervals with a predetermined depth at a lower end of the base substrate (12), and formed on alternate positions so as not to overlap with a center of the first grooves to maintain a state where an optical fiber (2) is stably fixated between adjacent array blocks (1).

Description

TECHNICAL FIELD [0001] The present invention relates to a fiber array block for an LDI exposure apparatus, and a method for aligning a fiber array block of the LDI exposure apparatus.

The present invention relates to a fiber array block and a method of aligning a fiber array block in an LDI exposure apparatus, and more particularly, to a method of aligning a fiber array block and a fiber array block by forming first and second grooves on which optical fibers are seated, It is possible to easily correct the machining error or the interval error of the optical fiber by providing the fiber array structure in which the optical fibers are seated between the neighboring array blocks when the multi-layered array blocks in which the first and second grooves are formed in an inverted trapezoidal shape And a method of aligning a fiber array block and a fiber array block of an LDI exposure apparatus capable of obtaining a uniform exposure quality.

In general, a printed circuit board (PCB) is a device that easily connects various electronic devices according to a certain frame, and is used for all electronic products, such as digital TVs, wired and wireless telephones, Is a widely used component. Also, it can be divided into general purpose PCB, module PCB, and package PCB depending on the application.

That is, the circuit board is formed by attaching a thin plate of copper or the like to one side of a phenol resin insulating plate or an epoxy resin insulating plate or the like and then etching (a step of etching and leaving only a circuit on the line) , Double-sided boards, multi-layer boards and the like depending on the number of wiring circuit surfaces. The higher the number of layers, the better the mounting force of components and the higher the precision of the products. In recent years, ultra-thin printed circuit boards (0.04 to 0.2 mm) have been widely used in the electronics industry. There has been an increase in the use of a double-sided substrate in which circuits are formed on both sides and interconnected through holes, or a multi-layer substrate on which both sides thereof are expanded as well as a plurality of layers.

Currently, photo lithography, which forms a pattern by photographic transfer, has been widely used for manufacturing a printed circuit board. Particularly, a semi-analytical method capable of coping with high density of wiring density is widely used. The method for manufacturing a printed circuit board using the semimaritive method includes a seed layer forming step, a pre-treatment step, a dry film laminating step, an exposure step, a development step, an electrolytic copper plating step, a dry film peeling step, (flash etching) process. Among them, since the circuit pattern is formed by using the artwork film, the artwork film is liable to be damaged and its correction is difficult. Accordingly, there is provided a laser direct imaging (LDI) exposure apparatus for directly exposing a layer to be exposed on a substrate using a laser diode as a light source without using a photomask.

That is, in order to print the PCB, Rigid, and FPCB patterns, UV light is passed through a film mask to form a desired pattern. Recently, by replacing UV light with a UV laser and irradiating the laser directly onto the film, And an LDI exposure apparatus which makes it possible to quickly form a more precise pattern than a film is used.

In addition, the LDI exposure apparatus adopts a method of forming an image by scanning a laser light source through a polygon mirror or using a DMD (Digital Micro Device) chip.

On the other hand, an array block for fixing a bundle of optical fibers to irradiate the laser light source to the pattern is used.

The array block is made of silicon and is manufactured through an intrinsic wet etching process and is widely used for PLC (planar lightwave circuit) device packaging, optical switch, splitter, and multiplexer as an optical component for optical coupling between an optical fiber and an optical device.

The array block is used for stably connecting an optical fiber to an input end and an output end, and each optical fiber from which the end shell of the single-core optical fiber or the multi-core optical fiber ribbon is removed is aligned in a V- groove, .

The array block is fabricated by: 1. forming an optical fiber fixing part 130, which is formed on the upper surface of the optical fiber fixing board 110 made of a material such as silicon, quartz, glass or the like and has a constant width, , And seats the optical fiber heat in a plurality of V-grooves. At this time, the optical fiber heat is generally obtained by removing the coating of a part of the ribbon optical fiber.

2. The glass 120 is covered on the upper surface of a plurality of V-grooves having a constant width, thickness and spacing. The glass fixes the optical fiber heat and protects the optical fiber heat from the external environment.

3. Block, fiber optic heat and glass are fixed with adhesive such as epoxy resin.

4. Polishing the cross section of the array block.

However, in the conventional array block, since the V-groove for seating the optical fiber is formed in the V shape, the distance between the vertex of the V shape, that is, the interval between the inner lower end and the lower end of the array block, There is a problem that it is easily broken by impact or vibration.

In addition, as shown in FIG. 2, when the fiber array blocks are constructed in multiple layers, separate positioning means are provided in the array block in order to maintain the spacing of the optical fibers between the multiple layers.

However, there is a problem that a precision exposure process is not performed due to an error in the spacing of the optical fibers due to an accumulated error such as a machining error or a shape error of the positioning means formed in the array block.

Korean Patent Publication No. 2002-95866 (published on December 28, 2002) Korean Patent Publication No. 2004-48581 (published on Jun. 10, 2004)

SUMMARY OF THE INVENTION It is an object of the present invention to solve the problems described above and it is an object of the present invention to provide a method of manufacturing an optical pickup device in which first and second grooves on which an optical fiber is seated are formed on upper and lower ends of a base substrate, It is possible to easily correct a machining error or an interval error of an optical fiber by providing a fiber array structure in which an optical fiber is seated between neighboring array blocks when array blocks formed in the shape of a plurality of layers are stacked, Which is obtained by the LDI exposure apparatus.

According to an aspect of the present invention, there is provided a fiber array block of an LDI exposure apparatus, which is used to maintain a plurality of optical fibers in a fixed and aligned state, comprising: a base substrate; A first groove formed at an upper end of the base substrate and having a predetermined depth and formed at regular intervals; And a plurality of optical fibers formed at regular intervals on the lower end of the base substrate at regular intervals and alternately formed at positions alternating with the center of the first groove so that the optical fibers can be stably fixed between neighboring array blocks And a second groove.

In the present invention, it is preferable that the first and second grooves are formed in an inverted trapezoidal shape so as to compensate for the stable seating of the optical fiber and the strength of the base substrate.

In the present invention, in the array block, when the interval (Y) between the optical fibers constituted by the multilayer and the interval (X) between the optical fibers at the lower end constituted in the next column of the uppermost optical fiber deviate from the tolerance range, It is preferable that the distance between the 'Y' and the 'X' is adjusted so as to be equal to each other at an angle.

In the present invention, it is preferable that the rotation of the array block further includes an adjustment unit that rotates a lens fixed to one side of the array block by a predetermined angle.

According to the present invention, when the first and second grooves on which optical fibers are seated are formed on the upper and lower ends of the base substrate, respectively, and the array blocks in which the first and second grooves are formed in an inverted trapezoidal shape are laminated in layers, It is possible to easily correct a machining error or an interval error of the optical fiber, thereby obtaining a uniform exposure quality.

In addition, by forming the first and second grooves in an inverted trapezoidal shape, the strength of the base substrate can be maintained.

In addition, the first and second grooves are formed at the upper and lower ends, respectively, and the optical fiber is seated between the first and second grooves of the neighboring array block, thereby providing a stable fixing force of the optical fiber.

1 is a view showing an example of a conventional fiber array block.
2 is a view showing an example of a conventional fiber array block having a multilayer structure.
3 is a schematic perspective view of an LDI exposure apparatus according to the present invention.
4 is a perspective view of a fiber array block of an LDI exposure apparatus according to the present invention.
5 is a sectional view of a fiber array block of an LDI exposure apparatus according to the present invention.
6 is a partially enlarged view of a fiber array block of an LDI exposure apparatus according to the present invention.
7 is a cross-sectional view showing a laminated state of a fiber array block of an LDI exposure apparatus according to the present invention.
8 is a schematic view showing a method of compensating an optical fiber interval error through a fiber array of an LDI exposure apparatus according to the present invention,
8a is a state in which Y <X, and 8b is a state in which Y> X.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 3, the LDI exposure apparatus of the present invention includes a laser generating means 110 for generating a laser beam of a plurality of channels, a laser beam generating means 110 for receiving laser beams of multiple channels from the laser generating means 110, A lens 130 for irradiating the photosensitive resin, which is a multi-channel laser beam received from the optical fiber unit 120, to the photosensitive resin layer, and an X-axis or Z- A driving unit 140 for driving the photosensitive resin so as to form a circuit pattern, and a control unit 150 for controlling the above-described components.

The optical fiber unit 120 includes a fiber array block 1 for receiving wavelengths of the multi-channel laser beams emitted through the laser generation unit 110 and guiding the wavelengths of the laser beams to be integrated on the lens 130 .

The fiber array block 1 is formed at one end of the lens 130.

In addition, the lens 130 includes an adjusting unit 160 for aligning the horizontal line of the laser beam irradiated through the plurality of optical fibers 2 fixed to the fiber array block 1.

The controller 160 moves the lens 130 along the X axis and the Z axis to rotate the fiber array block 1 formed on the lens 130 by a predetermined angle so that the horizontal line of the laser is aligned .

4 and 5, the fiber array block 1 includes a base substrate 12, a first groove (not shown) formed to receive the lower portion of the optical fiber 2 from the upper end of the base substrate 12 And a second groove 16 formed to receive the upper portion of the optical fiber 2 from the lower end of the base substrate 12.

The base substrate 12 is a means for stably supporting the optical fiber 2.

The first groove 14 is formed at the upper end of the base substrate 12 and supports the lower portion of the optical fiber 2.

The second groove 16 is formed at the lower end of the base substrate 12 and supports the upper portion of the optical fiber 2.

The first and second grooves 14 and 16 are formed at regular intervals along the longitudinal direction of the base substrate 12. In this case, the first and second grooves 14 and 16 are formed such that the centers of the optical fibers 2 accommodated in the upper and lower ends of the base substrate 12 are kept in a state of being spaced apart from each other So that they are interchanged at regular intervals.

In addition, the first and second grooves 14 and 16 are preferably formed in an inverted trapezoidal shape.

As shown in FIG. 6, since the conventional groove (or the optical fiber receiving groove, see FIG. 2) is formed in the "V" shape, when the optical fiber 2 is seated in the conventional groove, And the thickness of the base substrate 12 is shortened by the excess space S1. In addition, the strength of the base substrate 12 shortened by the redundant space S1 is lowered, and the thickness of the base substrate 12 is increased by an unnecessary excess space S1 in order to compensate for the decrease. There is a problem that the manufacturing cost of the battery 12 is increased.

On the other hand, as shown in FIG. 6, when the first and second grooves 14 and 16 are formed in an inverted trapezoidal shape, the lower ends of the first and second grooves 14 and 16 And the unexpanded space S2 to the "V" -shaped vertex are removed, the thickness of the base substrate 12 can be reduced compared with the conventional one. Accordingly, the thickness of the base substrate 12 is reduced by the short axis excess space S2, so that the manufacturing cost of the base substrate 12 can be reduced.

Further, as shown in Fig. 6, when a conventional "V" type groove having a predetermined depth is formed at the upper and lower ends of the base substrate 12, there arises a problem that the vertexes of the "V " In order to solve this problem, the thickness of the base substrate has to be increased. Therefore, as shown in FIG. 2, it has been conventionally possible to form the base substrate only on one surface of the base substrate.

It is preferable that the lower ends of the first and second grooves 14 and 16 are spaced a predetermined distance from the lowermost end of the optical fiber 2 when the optical fiber 2 is seated.

For example, when the lower end of the first and second grooves 14 and 16 and the lower end of the optical fiber 2 are in contact with each other, the first and second grooves 14 and 16 The optical fiber 2 may not be stably stuck to the first and second grooves 14 and 16 due to a processing error occurring when the optical fiber 2 is formed.

The assembled state of the fiber array block of the LDI exposure apparatus configured as described above will be described below.

First, as shown in Fig. 7, the lower cover 3 is positioned at the lowermost end, and a plurality of optical fibers 2 are arranged at the lower cover 3. Fig. Of course, the aligned optical fibers 2 are arranged side by side at regular intervals.

Then, the first array block 1a is placed on the top of the arrayed optical fiber 2.

At this time, the optical fibers 2 are seated on each of the plurality of second grooves 16 formed at the lower end of the base substrate 12 of the first array block 1a.

In addition, the optical fibers 2 are mounted on the first grooves 14 formed on the upper end of the first array block 1a.

In this case, since the first and second grooves 14 and 16 are formed so as to be spaced apart from each other at a predetermined distance, the optical fiber 2, which naturally seats up and down without constructing the optical fiber alignment means, Are aligned so that the centers of the centers are not overlapped.

In addition, the second array block 1b is seated above the first array block 1a. Of course, as described above, in each of the plurality of second grooves 16 formed at the lower end of the second array block 1b, an optical fiber (not shown) mounted on each of the first grooves 14 of the first array block 1a 2) are accommodated and seated.

After the optical fibers 2 are mounted on the first grooves 14 of the second array block 1b and the optical fibers 2 are mounted on the second grooves 16 of the third array block 1c, Accommodate, and seated.

In this case, the ends of the first and second array blocks 1a and 1b are configured to coincide with each other, and the third array block 1c positioned above the second array block 1b includes first and second The ends of the grooves 14 and 16 are spaced apart from each other by an interval.

A plurality of array blocks 1n are stacked in this manner and the upper cover 4 is placed above the uppermost array block 1n to complete the fiber array of the LDI exposure apparatus.

In some cases, the array block 1 may be used instead of the upper and lower covers 3 and 4 separately.

An adhesive is applied to the optical fibers 2 formed between the upper and lower covers 3 and 4 and the plurality of array blocks 1 in order to strengthen the fixing force.

The fiber array of the LDI exposure apparatus configured as described above can be used for the first and second grooves 14 (see FIG. 1) formed at the upper and lower ends of the base substrate 12 The optical fibers 2 can be aligned naturally.

In addition, by forming the first and second grooves 14 and 16 in an inverted trapezoidal shape, the thickness can be maintained without lowering the strength of the base substrate 12, and the manufacturing cost can be reduced.

Further, since the optical fiber 2 is received and placed between the first and second grooves 14 and 16 of the neighboring array block 1, even if external vibrations or shocks are applied to the optical fiber 2 In order to stably maintain the alignment state.

The method of aligning the fiber array block through the lens in which the fiber array block of the LDI exposure apparatus configured as described above is fixed is performed by the adjustment unit 160 formed at one side of the lens 130.

Although the array block 1 of the present invention is mainly composed of multiple layers such as 64 to 128 channels in the related art, more than 1000 channels are used in the present invention in order to improve the exposure accuracy. That is, when one layer has 170 channels and nine layers (170 * 9), 1,530 channels are used. In this case, the processing error and the cumulative error deviate from the tolerance range of the optical fiber 2 located in the lowermost layer and the uppermost layer. This causes a problem that an accurate horizontal line can not be obtained by the multi-channel optical fiber 2.

In order to overcome this problem, as shown in FIG. 8A, when the interval X between the first and the second lower ends of the uppermost optical fibers 2 is greater than the first interval Y of the optical fibers 2, Adjusts the portion 160 so that the rear of the array block 1 is raised so that the interval between 'Y' and 'X' coincides with each other.

On the other hand, if 'Y' is larger than 'X', the rear of the array block 1 is lowered to adjust the intervals of 'Y' and 'X' to coincide with each other.

This improves the exposure quality by accurately and precisely adjusting the interval between the optical fibers 2 of the multiple channels constituted in the array block 1.

The above description is only one embodiment for carrying out the alignment method of the fiber array block and the fiber array block of the LDI exposure apparatus, and the present invention is not limited to the above embodiment. It will be understood by those skilled in the art that various changes may be made without departing from the spirit of the invention.

1: array block 12: base substrate
14: first groove 16: second groove

Claims (6)

1. A fiber array block of an LDI exposure apparatus used to maintain a plurality of optical fibers in a fixed and aligned state,
A base substrate (12);
A first groove 14 formed at an upper end of the base substrate 12 and having a predetermined depth and formed at regular intervals; And
The optical fibers (2) are formed at regular intervals on the lower end of the base substrate (12) and formed at regular intervals so as not to overlap with the center of the first grooves (14) A second groove (16) for maintaining a stably fixed state;
And a light source for irradiating the laser beam.
[2] The optical recording medium according to claim 1, wherein the first and second grooves (14) and (16)
An inverted trapezoidal shape so as to compensate for the stable seating of the optical fiber 2 and the strength of the base substrate 12;
Wherein the first and second laser diodes are formed on the substrate.
The method according to claim 1 or 2,
The array block 1 is arranged such that the interval Y between the optical fibers 2 constituted by the multilayer and the interval X between the optical fiber 2 at the lowermost stage constituted in the next column of the uppermost optical fiber 2 are within an allowable error range The array block 1 is tilted by a certain angle to correct the gap between 'Y' and 'X' to match each other.
Wherein the LDI exposure apparatus further comprises:
The method of claim 3,
The array block 1 is rotated by a control unit 160 that rotates the lens 130 fixed at one side of the array block 1 by a predetermined angle.
Further comprising: a light source for emitting a laser beam;
A method of aligning a fiber array block of an LDI exposure apparatus that corrects a plurality of optical fiber intervals formed in a fiber array block of an LDI exposure apparatus used to maintain a plurality of optical fibers in a fixed and aligned state,
The array block may be arranged such that when the interval (Y) between the optical fibers constituted by the multilayer and the interval (X) between the optical fibers at the lower end constituted in the next column of the uppermost optical fiber deviate from the tolerance range, Correct the gap between 'Y' and 'X' to match;
Wherein the alignment of the fiber array block of the LDI exposure apparatus is performed by using a laser beam.
The method of claim 5,
A controller for rotating the array block by rotating a lens fixed at one side of the array block by a predetermined angle;
And aligning the fiber array block of the LDI exposure apparatus.

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