KR20160108736A

KR20160108736A - Sheet Align-Transfer Apparatus with 2 Stage Vision Unit

Info

Publication number: KR20160108736A
Application number: KR1020150031391A
Authority: KR
Inventors: 이상태
Original assignee: (주)이노시엠
Priority date: 2015-03-06
Filing date: 2015-03-06
Publication date: 2016-09-20

Abstract

The present invention relates to a two-stage vision unit ceramic sheet alignment conveying system (100), and a two-stage vision unit ceramic sheet alignment conveying system for aligning and conveying a sheet in the XY-theta axis direction, A transfer base mounted on the X-axis transfer frame and driven by an X-axis alignment transfer drive unit, and a Y-axis guide installed on the transfer base, the transfer base being rotatable in the Y- Axis direction, a central support shaft installed to be rotatably supported by the central support shaft, one side being driven by the first Y-axis alignment drive means, And the other side of the second plate is driven by a second Y-axis alignment driving means, And a first vision unit installed at a predetermined interval on a vision unit installation frame connected to both ends of the X-axis transfer frame and installed to pass under the vacuum absorption plate installation frame, Unit and a second vision unit. [0002] The present invention relates to a two-stage vision unit ceramic sheet alignment conveying system.

Description

{Sheet Align-Transfer Apparatus with 2 Stage Vision Unit}

The present invention relates to a two-stage vision unit ceramic sheet sorting and conveying system (100), comprising: a ceramic sheet sorting and conveying system for measuring a seating state of a ceramic sheet (S) and aligning it in the X-

An X-axis transfer frame 210;

A transfer base 220 driven by the X-axis alignment transfer drive unit 230 on the X-axis transfer frame 100;

A center support shaft 260 installed to be movable in the Y axis direction on a Y axis guide 261 installed in the transfer base 220;

A center portion of which is rotatably supported by the center support shaft 260, one side of which is driven by the first Y-axis alignment driving means 240, and the other side of which is located in the diagonal direction with respect to the center portion An alignment plate 270 driven by a second Y-axis alignment driving means 250;

An adsorption plate 280 installed above the alignment plate 270 through a vacuum adsorption plate mounting frame 281 and spaced upward from the vacuum adsorption plate mounting frame 281 and having transparent windows 282 formed at corner portions of the ceramic sheet S;

The first and second vision units are installed at predetermined intervals on a vision unit installation frame 291 connected to both ends of the X axis transfer frame 210 and passing through the lower side of the vacuum absorption plate installation frame 281. [ (292) and a second vision unit (293).

The second vision unit 293 has a higher resolution than the first vision unit 292,

After performing the primary alignment to align the alignment plate 270 according to the seating state of the ceramic sheet S measured through the first vision unit 292,

After the transfer base 220 is driven onto the second vision unit 293, the alignment plate 270 is rotated in accordance with the seating state of the ceramic sheet S measured through the second vision unit 293 Aligning conveying system 200 according to the present invention.

Generally, in order to increase capacitance of a capacitor such as a multi-layer ceramic capacitor (MLCC) which is a very small capacitor, it is necessary to increase a counter electrode area, reduce a distance between electrodes, or apply a dielectric material having a large dielectric constant between electrodes However, in order to increase the capacity while keeping the size small, the thickness of the dielectric material film or thin film is mainly made thinner, and then several tens to several hundreds of layers are laminated and connected in parallel. A dedicated laminator is used.

Thin-film micro-MLCCs manufactured by these thin film MLCC-dedicated laminators can be used for special purposes such as memory modules, tuners, mobile devices, military devices, medical devices, aircraft, automobiles, etc. in addition to IT products (mobile phones, PCs, D- And is widely used in a wide variety of fields where small capacitors are required. Particularly, since the inductance is low, it is superior in noise elimination effect at high frequencies compared with other capacitors, and thus it is applied to mobile phones, satellites, etc., and plays a role as a capacitor having high capacity and high reliability. In general, MLCC is a versatile component that requires more than 250 mobile phones (smartphones are twice as large as ordinary mobile phones), about 300 in notebooks, and about 700 in LCD TVs.

On the other hand, as electronic devices such as smart phones, portable communication devices, tablet PCs, notebooks, and smart TVs have become more sophisticated, the size of thin-film micro-MLCCs used therefor is becoming smaller and smaller. Considering that it is necessary to use the MLCC as a basic element of a circuit structure, the technology for a thin film MLCC-dedicated laminator for manufacturing such a thin MLCC is inevitably an important issue not only now but also in the future.

In order to stack such a ceramic thin film, it is indispensable to arrange the ceramic sheets to be laminated, and an apparatus for aligning the ceramic sheets is disclosed in Japanese Patent Application Laid- 10A-100888 "), a detailed description of the invention and" Fig. 5 shows an example in which the XY &thetas; axis transfer table is installed to be raised / lowered by the head elevating mechanism and installed between the upper / lower plate and the upper / And a ball screw linear mechanism / rotary member for finely adjusting the lower plate in the X / Y / &thetas; axis direction ". 1 is a more detailed view of the configuration of the alignment apparatus. (Note that the vacuum adsorption plate is omitted in FIG. 1 for clarity of the operation part.)

However, the conventional aligning apparatus has a problem in that it requires only a separate component to transfer the sheet, which is merely capable of aligning the sheet.

Further, in order to align the plate 1 on which the sheet is seated in the XY-theta axis direction as shown in Fig. 1, the X-axis driving means 2 and the Y-axis driving means 3, (Bearings) 5 must be installed at four corners of the plate 1, and the cross roller stages (bearings) 5 are complicated and relatively expensive components, and are suitable for quick operation .

Further, there is a problem that the load of other components such as a vacuum adsorption plate mounted on the plate 1 is supported only by the cross roller stage (bearing) 5.

In addition, a vision device for measuring the alignment state of a ceramic sheet is usually used for alignment. In the above-mentioned conventional invention, since the vision device is not provided, the alignment of the sheets is checked through a vision device, However, when the vision device and the alignment device are separated from each other, there is a problem that the alignment process must be performed after moving the alignment device after measuring the alignment state.

In addition, although the resolution of the vision device must be increased for the sophisticated alignment, when the resolution of the vision device is increased, the measurement region becomes narrower. In order to ensure a high resolution while ensuring a wide measurement range, a very expensive vision device should be used .

Korea Patent Publication No. 10-2009-0100888

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems of the prior art, and it is an object of the present invention to quickly perform approximate tacking through a first vision unit having a relatively low resolution and then to perform fine alignment through a second vision unit having a high resolution It is an object of the present invention to provide a two-stage vision unit ceramic sheet alignment conveyance system capable of efficiently and quickly aligning ceramic sheets quickly and precisely.

Also, it is possible to align and feed the XY-theta axis by only five y-axis control drive means and one x-axis control drive means without a separate transfer device, The present invention has been made in view of the above problems,

An X-axis transfer frame 210;

After the transfer base 220 is driven onto the second vision unit 293, the alignment plate 270 is rotated in accordance with the seating state of the ceramic sheet S measured through the second vision unit 293 And further performs secondary sorting for sorting.

In addition, the first and second vision units 292 and 293 may be configured so that,

And four cameras capable of photographing respective corner portions of the ceramic sheet (S).

Further, first illumination means (not shown) and second illumination means (not shown) for supplying illumination to the first vision unit 292 and the second vision unit 293, respectively; And further comprising:

The apparatus further includes a rotation shaft support member 262 formed on the center support shaft 260 and coupled to the alignment plate 270 through a center rotation bearing 263 .

Further, the X-axis alignment feed drive unit 230 is configured to move the X-

An X-axis alignment feed servo motor 231 mounted on the X-axis feed frame 210;

A transfer ball screw 232 connected to the X-axis alignment transfer servomotor 231 to drive the transfer base 120 in the X-axis direction in accordance with the operation of the X-axis alignment transfer servomotor 231; Further comprising:

The first Y-axis alignment driving means 240 includes:

A first Y-axis alignment drive servomotor (241) installed in the transfer base (220) and driven according to a control signal;

A first ball screw 142 connected to the first Y axis alignment drive servomotor 141 to linearly drive the first alignment block 143 in the Y axis direction;

A first lower slide bearing (144) installed between the first aligning block (143) and the transfer base (120) and operating linearly in the Y axis direction;

A first upper slide bearing 144 coupled to the upper side of the first aligning block 143 and linearly operating in the X axis direction;

A first rotation bearing 146 installed between the upper slide bearing 144 and the alignment plate 170; Further comprising:

The second Y-axis alignment driving means (150)

A second Y-axis alignment drive servomotor (151) installed in the transfer base (120) and driven according to a control signal;

A second ball screw 152 connected to the second Y axis alignment drive servomotor 151 to linearly drive the second alignment block 143 in the Y axis direction;

A second lower slide bearing (154) installed between the second aligning block (153) and the transfer base (120) and linearly operating in the Y axis direction;

A second upper slide bearing 154 coupled to the upper side of the second aligning block 153 and linearly operating in the X-axis direction;

A second rotation bearing 146 installed between the second upper slide bearing 154 and the alignment plate 170; And further comprising:

According to the present invention, it is possible to rapidly perform approximate tacking through the first vision unit having a relatively low resolution, and then to perform fine alignment through the second vision unit having a high resolution, There is an advantage that it is possible to arrange precisely.

In addition, it is possible to align and feed the XY- &thetas; axis by only five y-axis control drive means and one x-axis control drive means without a separate transfer device, and even with a relatively simple configuration, There is an advantage that it is possible to align and transfer while stably supporting.

1 is a perspective view of a ceramic sheet aligning apparatus according to an embodiment of the present invention;
2 is a front view of the two-stage vision unit ceramic sheet alignment transfer system according to one embodiment of the present invention.
Figure 3 is a side view of a two-stage vision unit ceramic sheet alignment transport system in accordance with an embodiment of the present invention.
4 is a schematic diagram showing the configuration of a vacuum adsorption plate of a two-stage vision unit ceramic sheet alignment conveyance system according to an embodiment of the present invention.
5 is a top schematic view showing a configuration for alignment and conveyance of a two-stage vision unit ceramic sheet alignment conveyance system according to an embodiment of the present invention;
6 is a front schematic view showing a configuration for alignment and conveyance of a two-stage vision unit ceramic sheet alignment conveyance system according to an embodiment of the present invention;
7 is a side schematic view showing a configuration for alignment and conveyance of a two-stage vision unit ceramic sheet alignment conveyance system according to an embodiment of the present invention;
8 is a schematic diagram showing an XY-theta axis alignment operation and a conveyance operation of a two-stage vision unit ceramic sheet alignment conveyance system according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a two-stage vision unit ceramic sheet alignment conveying system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that, in the drawings, the same components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as to avoid obscuring the subject matter of the present invention.

2 and 3, the X-axis transporting frame 210, the transporting base 220, the X-axis aligning and conveying driving unit 230, the first Y-axis aligning driving unit 240, 2 Y-axis alignment driving means 250, a center support shaft 260, an alignment plate 270, a vacuum adsorption plate 280, a first vision unit 292 and a second vision unit 293 .

The X axis transfer frame 210, the transfer base 220, the X axis alignment transfer drive unit 230, the first Y axis alignment drive unit 240, the second Y axis alignment drive unit 250, The vacuum suction plate 280 and the first and second vision units 292 and 293 are excluded in order to simplify the explanation of the constitution of the central support shaft 260 and the alignment plate 270. [ And FIG. 7 is a schematic view showing a configuration for alignment and conveyance of a two-stage vision unit ceramic sheet alignment conveying system according to an embodiment of the present invention.

First, the X-axis transfer frame 210 will be described. 5 and 6, the X-axis transport frame 210 is installed between the sheet-adsorption mount position A and the sheet transport position B, and the two-stage vision unit ceramic sheet alignment transport system And a frame structure supporting the basic structure of the frame.

Next, the transfer base 220 will be described. As shown in FIGS. 5 and 6, the transfer base 220 is driven by the X-axis aligning and conveying driving means 230 on the X-axis conveying frame 100 so that alignment and conveyance in the X- Function. In this case, during the conveying operation, as shown in Figs. 5 and 6, the conveying base 220 is moved in the sheet conveying position A and the sheet conveying position B (positions indicated by dotted lines in Figs. 5 and 6) ). When the conveying base 220 performs the aligning function in the X-axis direction, the X-axis aligning and conveying driving unit 230 moves to the conveying position B, Function.

On the other hand, between the X-axis transfer frame 210 and the transfer base 220, the transfer base 220 can be smoothly operated with respect to the X- 6, it is preferable that the conveyance guide 211 is further installed. In this case, it is possible to select one of the extremely various embodiments as the embodiment constituting the conveyance guide 211, and in one embodiment, as shown in FIGS. 5 and 6, It is preferable that the guide portion 211 is made of an LM guide.

Also, it is also possible to select one of the embodiments which constitute the X-axis aligning and conveying driving means 230 as very various embodiments. In one embodiment of the present invention, as shown in FIGS. 5 and 6, The X-axis alignment feed drive unit 230 includes an X-axis alignment feed servomotor 231 mounted on the X-axis feed frame 210 and an X-axis alignment feed servo motor 231 connected to the X- And a transfer ball screw 232 for driving the transfer base 220 in the X axis direction in accordance with the operation of the transfer servomotor 231. [

In this case, it is also possible to connect one of the X-axis alignment feed servomotor 231 and the feed ball screw 232 to each other by selecting one of a very wide variety of embodiments. , A drive pulley 233 is provided on the drive shaft of the X axis alignment feed servomotor 231 and a follower pulley 234 is mounted on the feed ball screw 232. Then, The drive pulley 233 and the driven pulley 234 can be connected to each other.

5 and 6, the position of the conveying guide 211 and the conveying ball screw 232 can be more clearly indicated by the dotted line in the sheet conveying position B The shape and position of the conveyance guide 211 and the conveyance ball screw 232 are once again represented by a solid line after the shapes of the conveyance base 220 and the vacuum attraction plate 280 of the conveyance guide 211 and the conveyance ball screw 232 are schematically expressed It should be noted.

Next, the center support shaft 260 will be described. 5 and 6, the center support shaft 260 is installed to be movable in the Y-axis direction on a Y-axis guide 261 installed on the transfer base 220, To be rotatably supported and installed. 5, the entire alignment plate 270 supported by the center support shaft 260 is movable in the Y-axis direction on the Y-axis guide 261 so that alignment in the Y- And the entire alignment plate 270 is rotated with respect to the center support shaft 260, so that alignment operation in the direction of the? Axis can be performed. In addition, since most of the load applied to the alignment plate 270 by the center support shaft 260 is firmly supported at the central portion of the load, when the size of the sheet to be aligned and conveyed becomes large (for example, When the load of the vacuum adsorption plate 280 for adsorbing and fixing the sheet is extremely large (such as in the case of a light metal such as aluminum, depending on the material, It is possible to support the load with great stability.

Next, the alignment plate 270 will be described. 5 and 6, the alignment plate 270 is rotatably supported at its central portion by the center support shaft 260. One end of the alignment plate 270 is connected to the first Y-axis alignment driving means 240 And the other side of the one side positioned in the diagonal direction with respect to the central portion is driven by the second Y-axis alignment driving means 250 to perform an alignment operation in the Y- and? -Axis directions with respect to the transfer base 220 . That is, when the first Y-axis alignment driving means 240 and the second Y-axis alignment driving means 250 operate in the same direction in the Y-axis direction, alignment operation in the Y-axis direction is possible, When the Y-axis alignment driving means 240 and the second Y-axis alignment driving means 250 operate in the opposite directions in the Y-axis direction, alignment operation in the? -Axis direction is performed with the center support axis 260 as a rotation axis . When the operation direction and the operation range of the first Y-axis alignment drive means 240 and the second Y-axis alignment drive means 250 are combined, simultaneous alignment operations in the Y-axis direction and the &thetas; It is possible.

It is possible to select one of the various embodiments to implement the first Y-axis alignment driving means 240 and the second Y-axis alignment driving means 250 capable of operating as described above. 5 and 6, the first Y-axis alignment driving unit 240 includes a first Y-axis alignment driving unit 240 installed in the transfer base 220 and driven according to a control signal, A driving servo motor 241 and a first ball screw 242 connected to the first Y-axis alignment drive servo motor 241 to linearly drive the first alignment block 243 in the Y-axis direction It is possible. In this case, a first lower slide bearing 244, which linearly operates in the Y-axis direction, may be installed between the first aligning block 243 and the transfer base 220 so that the first aligning block 243 is moved It is preferable that the base 220 is operated only in the Y-axis direction and smooth operation is possible.

On the other hand, the operation of the alignment plate 270 for performing the alignment operation in the Y-axis direction and the &thetas; axis direction can be performed without interference from the first alignment block 243, 5 and 6, between the first aligning block 243 and the aligning plate 270 so as to be able to transmit an alignment driving force to the first aligning block 270, A first upper slide bearing 244 coupled to the upper slide bearing 244 and linearly operating in the X axis direction and a first rotation bearing 246 installed between the upper slide bearing 244 and the alignment plate 270 It is preferable to include and configure it.

The second Y-axis alignment driving means 250 is also provided in the transfer base 220 similar to the case of the first Y-axis alignment driving means 240. The second Y- A second ball screw 252 connected to the second Y axis alignment drive servo motor 251 to linearly drive the second alignment block 243 in the Y axis direction, A second lower slide bearing 254 installed between the second aligning block 253 and the transfer base 220 and linearly operating in the Y axis direction, A second upper slide bearing 254 linearly operating in the X axis direction and a second rotary bearing 246 installed between the second upper slide bearing 254 and the alignment plate 270, .

5 to 7, in order to make it possible to measure and feed back the position of the alignment plate 270 and the transfer base 220, the two-stage vision unit ceramic sheet sorting and conveying system 100 of the present invention is shown in FIGS. A transfer position sensor 212 for measuring a position of the transfer base 220 and a transfer position sensor 212 for detecting a position of the transfer plate 220 on the alignment plate 270, A second position sensor 247 further provided on the other side of the alignment plate 270 so as to measure a position of the other side of the alignment plate 270, It is preferable to further comprise a sensor 257.

2 and 3, the vacuum adsorption plate 280 is disposed above the alignment plate 270 via a vacuum adsorption plate mounting frame 281, 4, a transparent window 282 is formed at a corner of the ceramic sheet S so that the first vision unit 292 and the second vision unit 293 are separated from the ceramic sheet S, So that the alignment state of the substrate S can be measured. The vacuum adsorption plate 280 has a function of fixing the sheet by vacuum adsorption. The vacuum adsorption plate 280 is constructed and implemented according to a technique well known and practiced in the technical field of the present invention, and a detailed description thereof will be omitted.

Next, the first vision unit 292 and the second vision unit 293 will be described. As shown in FIG. 2, the first and second vision units 292 and 293 are connected to both ends of the X-axis transport frame 210, and the lower side of the vacuum adsorption plate mounting frame 281 Are installed at predetermined intervals on the vision unit installation frame 291 provided so as to pass therethrough. In this case, the second vision unit 293 has a higher resolution than the first vision unit 292. In this case, the first vision unit 292 and the second vision unit 293 preferably include four cameras capable of photographing respective corner portions of the ceramic sheet S, respectively. Further, it is preferable to further include first illumination means (not shown) and second illumination means (not shown) for respectively supplying illumination toward the first vision unit 292 and the second vision unit 293 Do.

Hereinafter, the operation of the two-stage vision unit ceramic sheet alignment transfer system according to one embodiment of the present invention will be described.

First, a primary alignment for aligning the alignment plate 270 according to the seating state of the ceramic sheet S measured through the first vision unit 292 is performed, After the second vision unit 293 is driven, secondary alignment is performed to align the alignment plate 270 according to the seating state of the ceramic sheet S measured through the second vision unit 293 do. In this case, measurement and alignment through the second vision unit 293 are performed after the ceramic sheet S is roughly aligned through measurement and alignment through the first vision unit 292, 2 vision unit 293 need only have a higher resolution than the first vision unit 292 and need not have a measurement area similar to the first vision unit 292. [ Therefore, it is possible to arrange quickly and precisely without having to have an expensive vision device having a high resolution and a wide measurement area.

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

200: 2 stage 4 vision ceramic sheet alignment conveying system
210: X-axis feed frame
211: feed guide 212: feed position sensor
220: Transfer base
230: X-axis alignment feed drive means
231: X axis alignment feed servo motor 232: Feed ball screw
233: Driving pulley 234:
235: drive belt
240: first Y-axis alignment driving means
241: first Y-axis alignment drive servo motor 242: first ball screw
243: first alignment block 244: lower slide bearing
245: upper slide bearing 246: first rotating bearing
247: first position sensor 248: first support unit
250: second Y-axis alignment driving means
251: second Y-axis alignment drive servomotor 252: second ball screw
253: second aligning block 254: lower slide bearing
255: upper slide bearing 256: second rotating bearing
257: second position sensor 258: second support unit
260: center support shaft
261: Y-axis guide 262:
263: Central rotating bearing
270: alignment plate 271: central aperture
280: Vacuum suction plate 281: Vacuum suction plate installation frame
282: Transparent window
290: vision unit 291: vision unit installation frame
292: first vision unit 293: second vision unit

Claims

A ceramic sheet sorting and conveying system for measuring a seating state of a ceramic sheet (S), aligning it in the XY-theta axis direction,
An X-axis transfer frame 210;
A transfer base 220 driven by the X-axis alignment transfer drive unit 230 on the X-axis transfer frame 100;
A center support shaft 260 installed to be movable in the Y axis direction on a Y axis guide 261 installed in the transfer base 220;
A center portion of which is rotatably supported by the center support shaft 260, one side of which is driven by the first Y-axis alignment driving means 240, and the other side of which is located in the diagonal direction with respect to the center portion An alignment plate 270 driven by a second Y-axis alignment driving means 250;
An adsorption plate 280 installed above the alignment plate 270 through a vacuum adsorption plate mounting frame 281 and spaced upward from the vacuum adsorption plate mounting frame 281 and having transparent windows 282 formed at corner portions of the ceramic sheet S;
The first and second vision units are installed at predetermined intervals on a vision unit installation frame 291 connected to both ends of the X axis transfer frame 210 and passing through the lower side of the vacuum absorption plate installation frame 281. [ (292) and a second vision unit (293).
The second vision unit 293 has a higher resolution than the first vision unit 292,
After performing the primary alignment to align the alignment plate 270 according to the seating state of the ceramic sheet S measured through the first vision unit 292,
After the transfer base 220 is driven onto the second vision unit 293, the alignment plate 270 is rotated in accordance with the seating state of the ceramic sheet S measured through the second vision unit 293 Aligning conveying system (200). &Lt; RTI ID = 0.0 > [0002] < / RTI >

The method according to claim 1,
The first vision unit 292 and the second vision unit 293,
And four cameras capable of photographing respective corner portions of the ceramic sheet (S). The two-stage vision unit ceramic sheet sorting and conveying system (200) according to claim 1,
Characterized in that the two-stage vision unit ceramic sheet alignment transfer system (200).

The method according to claim 2,
First illumination means (not shown) and second illumination means (not shown) for respectively supplying illumination toward the first vision unit 292 and the second vision unit 293; (200). &Lt; / RTI > The system of claim < RTI ID = 0.0 > 1, < / RTI >

The method of claim 3,
And a rotation shaft support member 262 further formed on the center support shaft 260 and coupled to the alignment plate 270 through a center rotation bearing 263. [ Only vision unit ceramic sheet alignment transfer system (200).

The method according to claim 4,
The X-axis alignment feed driving means 230,
An X-axis alignment feed servo motor 231 mounted on the X-axis feed frame 210;
A transfer ball screw 232 connected to the X-axis alignment transfer servomotor 231 to drive the transfer base 120 in the X-axis direction in accordance with the operation of the X-axis alignment transfer servomotor 231; Further comprising:

The first Y-axis alignment driving means 240 includes:
A first Y-axis alignment drive servomotor (241) installed in the transfer base (220) and driven according to a control signal;
A first ball screw 142 connected to the first Y axis alignment drive servomotor 141 to linearly drive the first alignment block 143 in the Y axis direction;
A first lower slide bearing (144) installed between the first aligning block (143) and the transfer base (120) and operating linearly in the Y axis direction;
A first upper slide bearing 144 coupled to the upper side of the first aligning block 143 and linearly operating in the X axis direction;
A first rotation bearing 146 installed between the upper slide bearing 144 and the alignment plate 170; Further comprising:

The second Y-axis alignment driving means (150)
A second Y-axis alignment drive servomotor (151) installed in the transfer base (120) and driven according to a control signal;
A second ball screw 152 connected to the second Y axis alignment drive servomotor 151 to linearly drive the second alignment block 143 in the Y axis direction;
A second lower slide bearing (154) installed between the second aligning block (153) and the transfer base (120) and linearly operating in the Y axis direction;
A second upper slide bearing 154 coupled to the upper side of the second aligning block 153 and linearly operating in the X-axis direction;
A second rotation bearing 146 installed between the second upper slide bearing 154 and the alignment plate 170; (200). &Lt; / RTI > The system of claim < RTI ID = 0.0 > 1, < / RTI >