KR20160063092A - A gas sensing module and that of detection method for gases - Google Patents
A gas sensing module and that of detection method for gases Download PDFInfo
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- KR20160063092A KR20160063092A KR1020140166652A KR20140166652A KR20160063092A KR 20160063092 A KR20160063092 A KR 20160063092A KR 1020140166652 A KR1020140166652 A KR 1020140166652A KR 20140166652 A KR20140166652 A KR 20140166652A KR 20160063092 A KR20160063092 A KR 20160063092A
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- G—PHYSICS
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/02—Alarms for ensuring the safety of persons
- G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
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Abstract
Description
The present invention relates to a coexisting gas detection sensor module and a coexisting gas detection method, and more particularly, to a coexisting gas detection sensor module and a coexisting gas detection method for detecting coexisting gas in a limited space such as a building, Sensor module and a coexisting gas detecting method.
There are many kinds of dangerous gas in our living environment, and gas accidents in general homes, shops and construction sites, explosion accidents in petroleum combinets, coal mines, chemical plants, and pollution pollution are continuing. Human sensory organs can not quantify the concentration of the hazardous gas or can hardly distinguish the type. In order to cope with this problem, a gas sensor using physical and chemical properties of a material has been developed and used for gas leakage detection, concentration measurement record, and alarm.
Generally, the gas detection sensor measures the amount of noxious gas by using the characteristic that electric conductivity or electric resistance changes according to adsorption of gas molecules. In the case of a gas detection sensor using a conventionally used metal oxide semiconductor or a solid electrolyte (electrochemical), the operation of the sensor is performed by heating to a temperature of 110 ° C to 260 ° C or higher, There is a problem that the sensitivity is very low due to the low conductivity.
In other words, the semiconductor type gas detection sensor utilizes a change in electrical conductivity that occurs when a gas is brought into contact with the surface of a ceramic semiconductor, and is mostly used in the atmosphere, so that a metal oxide stable at high temperature is mainly used. The metal oxide often exhibits the properties of a semiconductor, and when the metal atom is excessive (oxygen deficiency), it is an n-type semiconductor, and when the metal atom is deficient, it is a p-type semiconductor. Semiconductors with thermally stable properties in the temperature range are being used in sensors.
Semiconductor gas detection sensors are characterized by 1) a large number of gases that can be detected due to the response of most toxic gas and combustible gas, 2) the sensor is easy to manufacture, and the configuration of the detection circuit is simple. However, there are few gas detection sensors with excellent selectivity that can detect only the gas to be detected, and they are still under research and development.
The electrochemical gas detection sensor uses an electrochemical oxidation and reduction reaction. The electric interface detects the electrical signal while the electric charge is exchanged with the measurement gas reaction. In this gas detection sensor, oxygen, nitrogen oxide, and chlorine gases, which are electrochemically reductive gases, are detected at the cathode, and oxidizing gases such as nitrogen monoxide and hydrogen sulfide are detected at the anode. The electrochemical gas sensor measures the generation or current of electromotive force by the flow of positive and negative ions in the ion electrolyte membrane between two electrodes.
Electrochemical sensors are classified largely into a method of measuring an electromotive force between two electrodes or a method of directly measuring a current. Electrolytic gas sensors can detect gases at room temperature when liquid or polymer electrolyte membrane is used. They are mainly used in medical field. When solid electrolyte is used, it operates at high temperature. Therefore, it can be used in automobile exhaust gas and combustion gas monitoring It is mainly used.
The characteristics required for the harmful gas sensor are as follows: first, the ratio of the electrical resistance in the air and the electrical resistance when the gas is introduced, that is, the gas sensitivity, and secondly, there should be no humidity dependency. Finally, selectivity for other coexisting gases should be good.
Conventional noxious gas measuring sensors have problems in that they operate at room temperature and it is difficult to measure low concentration of noxious gas and can not recover and reproduce later. The high-temperature operation noxious gas measurement sensor had a problem that the heater of the sensor should be non-periodically heated to prevent the initial malfunction due to abrupt change of the internal resistance.
Also, in the prior art, a method of sensing a gas while maintaining a heated state at about 300 ° C by operating a heater on a gas sensor has been introduced. However, due to a large power consumption and a change in characteristics of a sensing material by a heating means, It should be checked whether it operates normally.
In order to detect carbon monoxide and nitrogen monoxide, which are mainly generated from harmful gases emitted from automobiles, two gas sensors should be used to implement alarm devices.
[Related Technical Literature]
1. Sensing materials of plate type catalytic combustion sensor and its synthesis method for hydrogen detector (Patent Application No. 10-2008-00000792)
SUMMARY OF THE INVENTION The present invention is directed to a coexisting gas detection sensor module and a coexisting gas detection method, and more particularly, to a sensor for selectively detecting only a specific gas and monitoring and measuring the gas concentration in real time, The present invention provides a coexisting gas detection sensor module and a coexisting gas detection method capable of selectively sensing at least one gas to be detected.
In addition, the present invention provides a coexistence gas detection sensor module and a coexisting gas detection module which can maintain the winding performance for a long time by reducing detection errors caused by long-time use and can notify the user promptly and accurately when the detected concentration of the harmful gas is high. Method.
However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.
In order to achieve the above object, a coexisting gas sensor module according to an embodiment of the present invention includes a gas sensing material including a metal oxide such as tin oxide, titanium dioxide, and a composite thereof, and a supported metal material, A gas sensor unit including the gas sensing material, and a gas sensing unit, which is adsorbed to the gas sensing material using a characteristic that the electrical conductivity is changed when the gas sensing unit reacts with harmful gas such as carbon monoxide and nitrogen monoxide The control unit controls each of the components constituting the gas detection sensor module. The control unit compares the concentration of the noxious gas delivered from the detection unit with the set concentration to determine whether to generate a warning sound, The concentration of the noxious gas delivered from the detection unit is numerically displayed and displayed on the display unit And an output unit for outputting a numerical value indicating the concentration of the noxious gas detected by the detection unit or a reaction characteristic according to the concentration of noxious gas containing carbon monoxide or methane, A circuit test section for testing the abnormality of each constituent constituting the gas sensor module in response to the control signal of the control section, a circuit test section for testing whether the concentration of the noxious gas detected by the detection section exceeds the set concentration, An alarm unit for outputting a warning sound according to a control signal of the control unit, and a power supply unit for supplying power to the respective components constituting the gas sensor module through a heat generating unit.
In the coexistent gas sensor module according to the present invention, the gas sensing material may be at least one selected from the group consisting of tin oxide, titanium dioxide, alumina, indium oxide, tungsten oxide, and a metal oxide composed of one or more complexes of platinum, palladium, rhodium, Cobalt, iridium, and molybdenum, a metal oxide comprising the metal oxide and a metal oxide, and a metal oxide comprising at least one of cobalt, iridium and molybdenum.
In the coexistence gas sensor module according to the present invention, the gas sensor unit may include at least one or more gases of carbon monoxide, methane, propane, isobutane, ammonia, carbon monoxide, benzene, toluene, xylene, formaldehyde, In order to realize an optimized operating temperature capable of detecting gas to be detected, a voltage is applied to a micro heater built in a sensor element by setting a time interval and a voltage magnitude and applying the voltage in a pulse form.
In the coexisting gas sensor module according to the present invention, when power is supplied to the heating unit, a predetermined number of power sources are sequentially supplied to the micro-heater at predetermined time intervals, and when two or more gas coexist, And the gas type is classified by applying a pulse type voltage optimized for the gas type for which the time and voltage magnitude of the power supply are to be detected.
The coexisting gas detection sensor module and the coexisting gas detection method according to the embodiment of the present invention can be applied to a coexisting gas detection sensor module and a coexisting gas detection method using metal having excellent gas selectivity and tin oxide having a wide surface area and excellent in electron emission and chemical reactivity, It has high detection speed, fast response speed and recovery speed even at low concentration of gas, which can provide promptness and stability of gas detection.
According to another aspect of the present invention, there is provided a coexistence gas detection sensor module and a coexisting gas detection method, wherein the gas detection sensor generates a warning signal when an electrical resistance value increases to a specific value or more, And notifies the user who manages the sensor, thereby providing an effect of being able to call attention.
In the coexisting gas detection sensor module and the coexisting gas detection method according to another embodiment of the present invention, a separate heating unit is added to the gas detection sensor so that gas is normally detected at room temperature and a periodically high voltage is applied to the detection unit There is an advantage that erroneous operation of the gas detection sensor can be prevented by removing the attached moisture and gas.
The coexisting gas detecting sensor module and the coexisting gas detecting method according to another embodiment of the present invention may further include a step of detecting an operating temperature of gases to be detected in order to impart selectivity to the gas detecting sensor using tin oxide, By sequentially applying the voltage through the applied voltage, detection signals for various gases can be obtained by one sensor.
1 is a view showing a gas detection sensor according to an embodiment of the present invention;
2 is a block diagram illustrating the configuration of a gas sensor module according to an embodiment of the present invention.
3 is a circuit diagram showing a circuit of a gas detection sensor according to an embodiment of the present invention.
4 is a flowchart showing the operation of the gas sensor module according to the embodiment of the present invention.
5 is a graph showing response and recovery characteristics of nitrogen monoxide according to an embodiment of the present invention
6 is a graph showing response and recovery characteristics of carbon monoxide according to an embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description of preferred embodiments of the present invention will be given with reference to the accompanying drawings. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.
The present invention proposes a gas detection sensor which is excellent in adsorption selectivity and reproducibility by supporting a metal having excellent selectivity in tin oxide, titanium dioxide and a complex thereof.
The metal oxide has an attractive characteristic as a sensing material of a gas sensor because it has a large surface area relative to the volume, high sensitivity to harmful gas, fast response speed, and easy operation of giving selectivity because of a difference in operating temperature in response to gas.
FIG. 1 illustrates a gas detection sensor according to an embodiment of the present invention. The metal oxide such as tin oxide and titanium dioxide is excellent in chemical reactivity with harmful gas, and has high surface reactivity, .
A gas detection sensor using a metal oxide senses a noxious gas by measuring an electrical signal and a resistance which are emitted differently depending on the electronic property of the gas adsorbed on the material.
Such a gas detection sensor is different in chemical reaction with the target gas depending on the temperature, thereby controlling the operating temperature of the target gas to be detected, thereby providing gas detection selectivity. The gas detection sensor has a high electric conductivity during gas reaction, Has the advantage of being fast.
The gas detection sensor of the present invention has a heater 10 and a sensing electrode 20 and an insulating layer 30 is formed between the heater 10 and the sensing electrode 20. The back surface of the wafer 40 is etched to form a nitride film (50), and a membrane (60) are formed.
Tin oxide, titanium dioxide, and their complexes have non-chemical stoichiometry of oxygen deficiency and exhibit n-type semiconductor properties. When tin oxide, titanium dioxide and its complex (S) are heated to 110 ~ 400 ℃, oxygen is adsorbed, atomized, and ionized on the surface in order to cancel the non - chemical stoichiometry of oxygen deficiency so that negatively charged adsorption oxygen O2 - or O - Is generated.
In this process, tin oxide, titanium dioxide, and electrons near the surface of the composite particle are absorbed, and an electron depletion layer with high resistance is generated on the surface. Thus, the oxide semiconductor forms an electrical structure having a surface layer of high resistance and a semiconductive inner layer.
If the sensor is exposed to containing a reducing gas in a very small amount (CO, H 2, C 3 H 8, C 2 H 5 OH, CH 4, H 2 S , etc.) air reducing gas is charged surface adsorbed oxygen O2 - or O -, and the remaining electrons are injected back into the semiconductor.
Since the concentration of the injected electrons increases in proportion to the concentration of the reducing gas, the increase of the electrical conductivity or the decrease of the resistance proportional to the concentration of the reducing gas can be utilized as the signal of the sensor. On the other hand, when the oxidizing gas (NO, NO 2 , O 3, etc.) is exposed to the sensor, the adsorbed oxygen O 2 - or O - is generated on the surface or the gas itself is adsorbed negatively, And the resistance of the sensor is increased. Therefore, in this case, an increase in resistance proportional to the concentration of the oxidizing gas can be obtained as a signal.
The present invention proposes a method for supporting a metal to increase the sensitivity of a gas detection sensor using tin oxide, titanium dioxide and a composite thereof.
Metals that are superior in sensitivity enhancement include palladium, platinum, rhodium, nickel and the like. That is, the gas detection sensor supports a metal having excellent selectivity on tin oxide, titanium dioxide, and a composite thereof depending on the type of gas to be detected.
The present invention supports palladium (Pd) to detect carbon monoxide or nitrogen monoxide, and silver (Ag) to detect propane gas. In order to detect ethylene, iridium (Ir), palladium (Pd), platinum (Pt), rhodium (Rh), molybdenum (Mo) In order to detect ammonia, platinum (Pt) is supported, and sensitivity enhancement characteristics depend on the amount of metal supported.
In order to impart selectivity to a gas detection sensor using tin oxide, titanium dioxide, and a complex thereof, an operating temperature of gases to be detected is sequentially implemented through a voltage applied to the heater, A detection signal can be obtained.
FIG. 2 is a block diagram showing the configuration of a gas sensor module according to an embodiment of the present invention. The
The gas sensor module includes a gas sensing material including the metal oxide such as tin oxide, titanium dioxide, and a complex thereof, and a metal material supported in the above-described FIG. 1, and includes a sensor element including a micro heater and an electrode, And performs the gas detection operation according to the driving of the
The
The
On the other hand, the
In addition, the
The control unit 110 controls each configuration of the gas detection sensor module. The control unit 110 compares the concentration of the noxious gas delivered from the
The control unit 110 displays the concentration of the noxious gas received from the
The
In the present invention, the gas detection sensor may include a heater. Normally, a gas corresponding to about 300 degrees is supplied to the heater periodically sensing gas at room temperature, and the moisture and harmful Thereby inducing gas desorption.
3 shows a circuit diagram of a gas detection sensor according to an embodiment of the present invention. 3, Vc denotes a voltage supplied to the circuit of the gas detection sensor, and VH denotes a voltage supplied to the heating unit. RH denotes a resistor constituting the heating section, and Rs denotes a sensor resistor constituting a detection section of the gas detection sensor.
The resistance value of Rs varies depending on the concentration of the noxious gas adsorbed on the detection portion. RL denotes a load resistance, and Vout denotes an output voltage. Q denotes a switch, which supplies power to the RH at a predetermined time interval to induce detachment of water or gas attached to the detection unit of the gas detection sensor.
Set the temperature and time at RH to be in inverse proportion. That is, in order to efficiently perform the desorption of water or gas, the heating time is reduced when the heating temperature is high, and the heating time is increased when the heating temperature is low. Generally, the heat generation temperature is set to be about 300 degrees, and the heat generation period is set to be different depending on the position of the gas detection sensor. That is, if the region where the gas detection sensor is normally located is located at a high humidity or a high concentration of noxious gas, the heat generation period is set short. If the concentration of moisture or noxious gas is low, the heat generation period is set long.
FIG. 4 is a flowchart illustrating the operation of the gas detection sensor according to an embodiment of the present invention. Referring to FIG. 4, the operation of the gas detection sensor will be described in detail.
First, the gas detection sensor module is initialized (refer to step S100). The gas detection sensor module sets an output value for outputting an alarm signal for each harmful gas.
The gas detection sensor module applies power to the sensor driving circuit (refer to step S110)
Thereafter, the gas detection sensor module detects an output value output from the detection unit (refer to step S120)
At this time, the gas detection sensor module outputs a voltage corresponding to the detected gas concentration, and the gas detection sensor module compares the output voltage with the set voltage (refer to step S130)
If the voltage output according to the compared output voltage and the set voltage is greater than or equal to the set voltage, the gas detection sensor module transmits an alarm sound through the alarm unit (refer to step S140). If the output voltage is smaller than the set voltage, Return to step.
Thereafter, the gas detection sensor module outputs an alarm signal through the alarm section, and calls attention to the concentration of the harmful gas to people located nearby.
In step S150, the gas detection sensor supplies power for driving the heat generating unit. In step S160, the gas detection sensor supplies power to the resistor constituting the heating unit when the set heating cycle comes. The resistor constituting the heat generating portion generates heat by using the supplied power source. The heat generating unit removes moisture and noxious gas adsorbed to the detecting unit by using heat.
FIG. 5 is a graph showing the response and recovery characteristics of nitrogen monoxide according to an embodiment of the present invention. As shown in FIG. 5, the gas detection sensor of the present invention includes 3 ppm of nitrogen monoxide ) Shows fast response characteristics, and it shows fast recovery characteristics when nitrogen monoxide is vented.
FIG. 6 is a graph showing response and recovery characteristics of carbon monoxide according to an embodiment of the present invention. As shown in FIG. 6, the gas detection sensor of the present invention includes 80 ppm of carbon monoxide gas in a closed space, , It exhibits fast response characteristics and shows rapid recovery characteristics when venting carbon monoxide.
As described above, preferred embodiments of the present invention have been disclosed in the present specification and drawings, and although specific terms have been used, they have been used only in a general sense to easily describe the technical contents of the present invention and to facilitate understanding of the invention , And are not intended to limit the scope of the present invention. It is to be understood by those skilled in the art that other modifications based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.
110: control unit 120: gas sensor unit
130: Detecting unit 140:
150: circuit test section 160: alarm section
170: Power supply unit 180: Storage unit
Claims (5)
A sensor element including a micro heater and an electrode, a gas sensor part including the gas sensing material,
A detector for measuring the concentration of the noxious gas adsorbed on the gas sensing material by using the characteristic that the electric conductivity changes when the gas sensor unit is operated while reacting with noxious gas such as carbon monoxide and nitrogen monoxide,
The control unit controls each of the components constituting the gas detection sensor module. The control unit compares the concentration of the noxious gas delivered from the detection unit with the set concentration to determine whether to generate a warning sound, or determines the concentration of the noxious gas delivered from the detection unit A control unit for digitizing and displaying on the display unit,
An output unit for digitizing and outputting the noxious gas concentration detected by the detection unit, for digitizing the reaction characteristic according to the concentration of the noxious gas including carbon monoxide or methane, and for displaying an output voltage or an output current corresponding to the data conversion reaction characteristic,
A circuit testing unit for testing the abnormality of each component constituting the gas sensor module in response to the control signal of the control unit,
An alarm unit for sending a warning sound in accordance with a control signal of the control unit when the concentration of the noxious gas detected by the detection unit exceeds a predetermined concentration or the concentration of the noxious gas is abruptly changed,
And a power supply unit for supplying power to the respective components constituting the gas sensor unit through the heat generating unit.
The gas sensing material
Tin oxide, titanium dioxide, alumina, indium oxide, tungsten oxide, and metal oxides composed of one or more complexes,
A metal material composed of at least one or more of platinum, palladium, rhodium, nickel, cobalt, iridium, molybdenum,
And a metal oxide on which the metal oxide and the metal substance are supported.
Wherein the gas sensor unit comprises at least one or more gases of carbon monoxide, methane, propane, isobutane, ammonia, carbon monoxide, benzene, toluene, xylene, formaldehyde,
Wherein a voltage is applied to the micro heater built in the sensor element in a pulse shape by setting a time interval and a voltage magnitude in order to realize an optimized operating temperature capable of detecting a detection target gas.
In order to supply power to the heating unit, a plurality of preset power supplies are sequentially supplied at a time interval set in the micro-heater, and when two or more kinds of gas coexist, And the gas type is classified by applying a pulse-shaped voltage optimized for the gas type.
Calculating a voltage corresponding to a variable resistance according to the detected gas, and comparing the calculated voltage with a set voltage;
And outputting an alarm signal when the calculated voltage becomes higher than a set voltage.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180024139A (en) * | 2016-08-29 | 2018-03-08 | 전자부품연구원 | Micro gas sensor and micro gas sensor module |
| KR20180032401A (en) * | 2016-09-22 | 2018-03-30 | 엘지전자 주식회사 | Gas sensor |
| KR102223882B1 (en) * | 2019-09-24 | 2021-03-04 | 김현명 | An apparatus for detecting low amount of gas leak |
| KR102311973B1 (en) * | 2021-01-12 | 2021-10-13 | (주) 에코베이스 | System for monitoring density of the gas by driving remote control |
| KR20210154646A (en) * | 2020-06-12 | 2021-12-21 | 문영실 | Mobile combined gas detector |
-
2014
- 2014-11-26 KR KR1020140166652A patent/KR20160063092A/en not_active Application Discontinuation
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180024139A (en) * | 2016-08-29 | 2018-03-08 | 전자부품연구원 | Micro gas sensor and micro gas sensor module |
| WO2018043792A1 (en) * | 2016-08-29 | 2018-03-08 | 전자부품연구원 | Micro gas sensor and micro gas sensor module |
| KR20180032401A (en) * | 2016-09-22 | 2018-03-30 | 엘지전자 주식회사 | Gas sensor |
| KR102223882B1 (en) * | 2019-09-24 | 2021-03-04 | 김현명 | An apparatus for detecting low amount of gas leak |
| KR20210154646A (en) * | 2020-06-12 | 2021-12-21 | 문영실 | Mobile combined gas detector |
| KR102311973B1 (en) * | 2021-01-12 | 2021-10-13 | (주) 에코베이스 | System for monitoring density of the gas by driving remote control |
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