KR20160053615A - 코팅 두께 측정 장치 및 방법 - Google Patents
코팅 두께 측정 장치 및 방법 Download PDFInfo
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- KR20160053615A KR20160053615A KR1020140152909A KR20140152909A KR20160053615A KR 20160053615 A KR20160053615 A KR 20160053615A KR 1020140152909 A KR1020140152909 A KR 1020140152909A KR 20140152909 A KR20140152909 A KR 20140152909A KR 20160053615 A KR20160053615 A KR 20160053615A
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- South Korea
- Prior art keywords
- electrode
- coating layer
- thickness
- coating
- current value
- Prior art date
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- 238000000576 coating method Methods 0.000 title claims abstract description 30
- 239000011248 coating agent Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000005259 measurement Methods 0.000 title description 3
- 239000011247 coating layer Substances 0.000 claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000009675 coating thickness measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
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- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
도2는 본 발명의 일실시예에 따른 코팅 두께 측정 장치의 배치 평면도,
도3은 본 발명의 일실시예에 따라 측정된 전류값과 코팅층의 두께간의 관계를 설명하기 위한 그래프, 및
도4는 본 발명의 일실시예에 따른 코팅 두께 측정 방법의 순서도이다.
20: 제2전극
30: 전류센서
40: MCU
50: 데이터베이스
60: 외부전원
100: 코팅층
200: 금속체
Claims (5)
- 금속체의 코팅층 상부와 접촉하며 외부로부터 전력을 공급받는 제1전극과, 상기 제1전극과 일정 간격 이격되어 상기 코팅층 상부와 접촉하는 제2전극을 포함하는 센서 전극; 및
상기 제2전극에 흐르는 전류를 측정하는 전류센서; 및
상기 전류센서에서 측정한 전류값을 이용하여 상기 코팅층의 두께를 산출하는 MCU를 포함하는 코팅 두께 측정 장치.
- 제1항에 있어서,
전류값에 대응되는 코팅층의 두께 정보가 포함된 룩업 테이블을 저장하고 있는 데이터베이스를 더 포함하며,
상기 MCU는 상기 룩업 테이블을 이용하여 상기 코팅층의 두께를 산출하는 코팅 두께 측정 장치.
- 제1항에 있어서,
상기 제2 전극은 판(plate)형상이며, 상기 제1전극은 상기 제2전극을 둘러싸는 링(ring)형상으로 형성되는 코팅 두께 측정 장치.
- 금속체의 코팅층 상부에 접촉하는 제1전극에 교류전력을 인가하는 단계;
상기 제1전극과 일정 간격 이격되어 상기 코팅층 상부에 접촉하는 제2전극에 흐르는 전류를 측정하는 단계; 및
상기 제2전극에 흐르는 전류값을 이용하여 상기 코팅층의 두께를 산출하는 단계를 포함하는 코팅 두께 측정 방법.
- 제4항에 있어서,
상기 코팅층의 두께를 산출하는 단계는,
전류값에 대응되는 코팅층의 두께 정보가 포함된 룩업 테이블을 참조하여 산출하는 코팅 두께 측정 방법.
Priority Applications (1)
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---|---|---|---|
KR1020140152909A KR101630798B1 (ko) | 2014-11-05 | 2014-11-05 | 코팅 두께 측정 장치 및 방법 |
Applications Claiming Priority (1)
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KR1020140152909A KR101630798B1 (ko) | 2014-11-05 | 2014-11-05 | 코팅 두께 측정 장치 및 방법 |
Publications (2)
Publication Number | Publication Date |
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KR20160053615A true KR20160053615A (ko) | 2016-05-13 |
KR101630798B1 KR101630798B1 (ko) | 2016-06-15 |
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KR1020140152909A Active KR101630798B1 (ko) | 2014-11-05 | 2014-11-05 | 코팅 두께 측정 장치 및 방법 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0719806A (ja) * | 1993-07-02 | 1995-01-20 | Tetsuo Shoji | コーティングの厚さまたは材質変化測定方法及び装置 |
JP2000180143A (ja) * | 1998-12-10 | 2000-06-30 | Nec Corp | 膜厚測定装置および膜厚測定方法 |
KR20030063129A (ko) * | 2002-01-17 | 2003-07-28 | 엔이씨 일렉트로닉스 코포레이션 | 박막두께측정방법 및 장치 |
KR100416900B1 (ko) * | 2000-03-28 | 2004-02-05 | 가부시끼가이샤 도시바 | 와전류 손실 측정 센서, 막 두께 측정 장치, 막 두께 측정방법 및 기록 매체 |
-
2014
- 2014-11-05 KR KR1020140152909A patent/KR101630798B1/ko active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0719806A (ja) * | 1993-07-02 | 1995-01-20 | Tetsuo Shoji | コーティングの厚さまたは材質変化測定方法及び装置 |
JP2000180143A (ja) * | 1998-12-10 | 2000-06-30 | Nec Corp | 膜厚測定装置および膜厚測定方法 |
KR100416900B1 (ko) * | 2000-03-28 | 2004-02-05 | 가부시끼가이샤 도시바 | 와전류 손실 측정 센서, 막 두께 측정 장치, 막 두께 측정방법 및 기록 매체 |
KR20030063129A (ko) * | 2002-01-17 | 2003-07-28 | 엔이씨 일렉트로닉스 코포레이션 | 박막두께측정방법 및 장치 |
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