KR20160029501A - Solar cell - Google Patents

Abstract

The present invention relates to a solar cell. According to an embodiment of the present invention, the solar cell comprises: a semiconductor substrate containing an impurity of a first conductive type; an emitter part located on a front surface of the semiconductor substrate and containing an impurity of a second conductive type opposite to the first conductive type; a tunnel layer located on a rear surface of the semiconductor substrate and including a dielectric material; a rear electric field part located on the rear surface of the semiconductor substrate and including a polycrystalline silicon material in which the impurity of the first conductive type is doped with a higher concentration than the semiconductor substrate; a first electrode connected to the emitter part; and a second electrode connected to the rear electric field part. A diffusion-resistant partition wall of a thickness thicker than a thickness of the tunnel layer is included between the second electrode and the semiconductor substrate.

Description

Solar cell {SOLAR CELL}

The present invention relates to a solar cell.

With the recent depletion of existing energy resources such as oil and coal, interest in alternative energy to replace them is increasing. Among them, solar cells produce electric energy from solar energy, and they are attracting attention because they have abundant energy resources and there is no problem about environmental pollution.

Typical solar cells have a substrate made of different conductivity type semiconductors, such as p-type and n-type, an emitter layer, and electrodes connected to the substrate and the emitter, respectively. At this time, a p-n junction is formed at the interface between the substrate and the emitter.

When light is incident on such a solar cell, a plurality of electron-hole pairs are generated in the semiconductor, and the generated electron-hole pairs are separated into electrons and holes, so that electrons and holes are directed toward the n-type semiconductor and the p- And is collected by an electrode electrically connected to the substrate and the emitter portion, and these electrodes are connected to each other by electric wires to obtain electric power.

An object of the present invention is to provide a solar cell with improved efficiency.

A solar cell according to an example of the present invention includes: a semiconductor substrate containing an impurity of a first conductivity type; An emitter section located on the front surface of the semiconductor substrate and containing an impurity of a second conductivity type opposite to the first conductivity type; A tunnel layer located on a rear surface of the semiconductor substrate and including a dielectric material; A back electroluminescent element located on a rear surface of the semiconductor substrate and including a polycrystalline silicon material doped with impurities of the first conductivity type at a higher concentration than the semiconductor substrate; A first electrode connected to the emitter portion; And a second electrode connected to the back electroluminescent layer, wherein the diffusion barrier is thicker than the tunnel layer between the second electrode and the semiconductor substrate.

Here, the thickness of the diffusion barrier rib may be between 1/10 and 2/3 of the thickness of the rear surface electric field portion.

Here, for example, the thickness of the rear electric field portion may be between 50 nm and 500 nm, and the thickness of the tunnel layer may be between 1 nm and 1.5 nm.

The diffusion barrier may be formed on a region of the back surface region of the semiconductor substrate that overlaps with the second electrode, and the tunnel layer may be formed on a region of the back surface region of the semiconductor substrate that is not overlapped with the second electrode.

Alternatively, however, it is also possible that the tunnel layer is formed in the entire rear region of the semiconductor substrate, and the diffusion barrier is formed on the rear surface of the tunnel layer.

Here, the tunnel layer may be formed of SiOx or SiCx material, and the diffusion barrier may include an insulating material or a dielectric material.

In one example, the diffusion barrier may include at least one of a-Si, SiCx, SiOx, SiNx, SiOxNy, or AlOx.

In addition, the materials of the diffusion barrier and the tunnel layer may be the same.

The width of the diffusion barrier may be equal to or wider than the width of the second electrode.

More specifically, when the second electrode includes the second finger electrode positioned in the first direction on the plane of the semiconductor substrate and the second bus bar positioned in the second direction intersecting the first direction, A finger portion partition wall positioned between the semiconductor substrate and the second finger electrode in a rear surface of the substrate and a bus bar partial barrier located between the semiconductor substrate and the second bus bar, The width of the bus bar partial barrier may be equal to or wider than the width of the second bus bar.

The solar cell according to the present invention can improve the open-circuit voltage and the fill factor of the solar cell by forming the rear surface electric field portion on the rear surface of the semiconductor substrate and forming the tunnel layer between the rear electric field portion and the semiconductor substrate.

In addition, the solar cell according to the present invention can prevent the metal paste for forming the second electrode from diffusing toward the semiconductor substrate during the manufacturing process by forming the diffusion barrier between the second electrode and the semiconductor substrate .

1 is a partial perspective view of a solar cell according to a first embodiment of the present invention.
FIG. 2 is a cross-sectional view of the solar cell shown in FIG. 1 cut along the line II-II.
FIG. 3 is a cross-sectional view of a solar cell according to a second embodiment of the present invention, which is different from FIG. 1 and FIG.
FIG. 4 is a view for explaining the function of the diffusion barrier ribs 180 shown in FIG. 1 to FIG.
Fig. 5 is a flowchart for explaining an example of a method of manufacturing the solar cell shown in Figs. 1 and 2. Fig.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

In the drawings, the thickness is enlarged to clearly represent the layers and regions. When a layer, film, region, plate, or the like is referred to as being "on" another portion, it includes not only the case directly above another portion but also the case where there is another portion in between. Conversely, when a part is "directly over" another part, it means that there is no other part in the middle. Also, when a part is formed as "whole" on the other part, it means not only that it is formed on the entire surface (or the front surface) of the other part but also not on the edge part.

Hereinafter, a solar cell according to an embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a partial perspective view of a solar cell according to a first embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along a line II-II of the solar cell shown in FIG. FIG. 3 is a cross-sectional view of a solar cell according to a second embodiment of the present invention, which is different from FIG. 1 and FIG.

1, an example of a solar cell according to the present invention includes a semiconductor substrate 110, an emitter section 120, an antireflection film 130, a tunnel layer 160, a diffusion barrier rib 180, A counter electrode 170, a rear protective layer 190, a first electrode 140, and a second electrode 150.

Although the solar cell according to the present invention includes the antireflection film 130 in FIG. 1, the antireflection film 130 may be omitted in the present invention. However, in consideration of the efficiency of the solar cell, since it is more efficient to include the antireflection film 130, it will be explained that the antireflection film 130 is included as an example.

The semiconductor substrate 110 is a semiconductor semiconductor substrate 110 made of silicon containing an impurity of a first conductivity type, for example, a p-type conductivity type. As an example, the semiconductor substrate 110 may be a semiconductor wafer made of monocrystalline silicon or polycrystalline silicon. When the semiconductor substrate 110 has a p-type conductivity type, it contains an impurity of a trivalent element such as boron (B), gallium, indium, or the like. Alternatively, however, the semiconductor substrate 110 may be of the n-type conductivity type and may be made of a semiconductor material other than silicon. When the semiconductor substrate 110 has an n-type conductivity type, the semiconductor substrate 110 may contain impurities of pentavalent elements such as phosphorus (P), arsenic (As), antimony (Sb) Hereinafter, a case where the semiconductor substrate 110 has an n-type conductivity type will be described as an example.

As shown in FIGS. 1 and 2, the surface of the semiconductor substrate 110 may have a texturing surface, which is a textured surface.

The emitter section 120 is disposed on the front surface of the semiconductor substrate 110 on which light is incident and includes a second conductive type opposite to the conductive type of the semiconductor substrate 110, for example, an n-type conductive type impurity So as to form a pn junction with the semiconductor semiconductor substrate 110.

The electron-hole pairs generated as light is generated by light incident on the semiconductor substrate 110 from the outside by the p-n junction are separated into electrons and holes, so that the electrons move toward the n-type and the holes move toward the p-type. Therefore, when the semiconductor substrate 110 is p-type and the emitter section 120 is n-type, the separated holes move toward the semiconductor substrate 110 and the separated electrons can move toward the emitter section 120.

Alternatively, when the semiconductor substrate 110 has an n-type conductivity type, the emitter portion 120 has a p-type conductivity type. In this case, the separated electrons may move toward the semiconductor substrate 110 and the separated holes may move toward the emitter section 120.

When the emitter section 120 has an n-type conductivity type, the emitter section 120 dopes impurities of pentavalent elements such as phosphorus (P), arsenic (As), antimony (Sb) Or may be formed by doping an impurity of a trivalent element such as boron (B), gallium, indium or the like into the semiconductor substrate 110 when the p-type conductive type is employed.

The antireflection film 130 may be formed on at least one of an aluminum oxide film (AlOx), a silicon nitride film (SiNx), a silicon oxide film (SiOx), and a silicon oxynitride film (SiOxNy) But it is also possible to form a plurality of films as shown in Figs.

1 and 2 illustrate a case where the antireflection film 130 is formed of two films. In this case, the antireflection film 130 includes a first antireflection film 130a formed directly in contact with the emitter layer 120, And a second antireflection film 130b formed on and in contact with the first antireflection film 130a.

Here, the first antireflection film 130a may be formed of an aluminum oxide (AlOx) film. The first antireflection film 130a may perform a passivation function as well as an antireflection function.

In addition, the second antireflection film 130b may be formed of a silicon nitride film (SiNx). Alternatively, however, it may also be formed of a silicon oxide film (SiOx) or a silicon oxynitride film (SiOxNy).

The antireflection film 130 reduces the reflectivity of light incident on the solar cell and increases the selectivity of a specific wavelength region, thereby enhancing the efficiency of the solar cell.

The first electrode 140 is disposed in direct contact with the emitter section 120 and is electrically connected to the emitter section 120. The first electrode 140 may include a plurality of first finger electrodes 141 and a plurality of first bus bars 143, as shown in FIG.

The plurality of first finger electrodes 141 may be located on the emitter section 120 and electrically connected to the emitter section 120 and may extend in a first direction x away from each other.

As shown in FIGS. 1 and 2, when the semiconductor substrate 110 is n-type, the plurality of first finger electrodes 141 are electrically connected to the p-type emitter section 120, for example, , Holes can be collected.

The plurality of first bus bars 143 are located on the same layer as the plurality of first finger electrodes 141 on the emitter section 120 and electrically connect the plurality of first finger electrodes 141 to each other, May extend in a second direction (y) intersecting the first finger electrode (141)

The plurality of first bus bars 143 are connected to an interconnecting connector (not shown) for connecting the solar cells to each other. The plurality of first bus bars 143 collect the electric charges collected by the plurality of first finger electrodes 141, Output.

The plurality of first finger electrodes 141 and the first bus bar 143 are made of at least one conductive material. Examples of the conductive materials include nickel (Ni), copper (Cu), silver (Ag), aluminum And may be at least one selected from the group consisting of Al, Sn, Zn, In, Ti, Au, and combinations thereof. .

The tunnel layer 160 is disposed on the rear surface of the semiconductor substrate 110 and may include a dielectric material.

For example, the tunnel layer 160 may be formed in a region of the back surface region of the semiconductor substrate 110 except the region overlapping the diffusion barrier ribs 180, as shown in FIGS.

Accordingly, the tunnel layer 160 can be formed between the diffusion barrier ribs 180 in the rear surface region of the semiconductor substrate 110, and the diffusion barrier ribs 180 and the tunnel layer 160 can be formed on the rear surface of the semiconductor substrate 110, May not overlap each other.

The tunnel layer 160 passes carriers generated in the semiconductor substrate 110 in the direction of the rear electric section 170 and may perform a passivation function with respect to the rear surface of the semiconductor substrate 110. In addition, the tunnel layer 160 may serve to increase the open-circuit voltage Voc of the solar cell.

The tunnel layer 160 may be formed of a dielectric material formed of SiCx or SiOx having high durability even at a high temperature process of 600 ° C or more. However, it is also possible to form silicon nitride (SiNx), hydrogenerated SiNx, aluminum oxide (AlOx), silicon oxynitride (SiON), or hydrogenerated SiON.

In addition, the thickness T160 (T120) of the tunnel layer 160 may be between 1 nm and 1.5 nm. The tunnel layer 160 may be formed by an oxidation process, an LPCVP process, or a PECVD deposition process.

In order to realize the tunneling effect, it is possible to limit the thickness (T160) of the tunnel layer 160 to 1 nm to 1.5 nm, and the limited range may be slightly more than 0.5 nm, but the effect of tunneling . In addition, the tunnel layer 160 may partially perform a passivation function with respect to the rear surface of the semiconductor substrate 110.

Next, the rear electric field portion 170 is located on the rear surface of the semiconductor substrate 110, impurities of the first conductive type are contained at a higher concentration than the semiconductor substrate 110, and may include a polycrystalline silicon material.

1 and 2, the rear electric field portion 170 is formed on the rear surface of the tunnel barrier layer 160 and the diffusion barrier ribs 180 on the rear surface of the semiconductor substrate 110, (Not shown).

1 and 2, the rear electric section 170 is formed on the rear surface of the semiconductor substrate 110, and the rear electric section 170 is formed on the semiconductor substrate 110 The open-circuit voltage (Voc) of the solar cell can be further improved if it is formed on the rear surface of the tunnel layer 160. [

In addition, since the rear electric part 170 is formed outside the semiconductor substrate 110 without forming the rear electric part 170 in the semiconductor substrate 110, in the process of forming the rear electric part 170 in the manufacturing process, , The heat treatment for the semiconductor substrate 110 can be minimized, and the characteristics of the semiconductor substrate 110 can be prevented from deteriorating. Therefore, the solar cell as shown in Figs. 1 and 2 can further improve the efficiency.

The thickness T170 of the rear electric section 170 may be between 50 nm and 500 nm.

The second electrode 150 is disposed in direct contact with the rear electric section 170 and is electrically connected to the rear electric section 170. The second electrode 150 may include a plurality of second finger electrodes 151 and a plurality of second bus bars 153, as shown in FIGS.

Here, the plurality of second finger electrodes 151 may extend in a first direction (x) away from each other on the rear surface of the rear electric part 170, and may be electrically connected to the rear electric part 170, , Holes can be collected.

The plurality of second bus bars 153 are located on the same layer as the plurality of second finger electrodes 151 on the rear electric unit 170 and electrically connect the plurality of second finger electrodes 151 to each other, May extend in a second direction (y) intersecting the plurality of second finger electrodes (151).

The plurality of second bus bars 153 are connected to an interconnecting connector (not shown) for connecting the solar cells to each other. The second bus bars 153 collect the charges collected by the second finger electrodes 151 and output the collected charges to an external device .

Here, the longitudinal direction of the second bus bar 153 is the same as the longitudinal direction of the first bus bar 143, and the longitudinal direction of the second finger electrode 151 is the same as the longitudinal direction of the first finger electrode 141 And the material of the second electrode 150 may be the same as that of the first electrode 140.

The second electrode 150 may be formed by patterning a metal paste for forming the second electrode 150 on the rear passivation layer 190 in a state where a rear passivation layer 190 to be described later is formed on the rear electric field portion 170 The metal paste may be formed through a heat treatment process in a state where the metal paste is penetrated through the rear protective layer 190 and connected to the rear electric part 170.

1 and 2, the rear protective layer 190 may be located on the entire surface of the back surface of the rear electric part 170 except the area where the second electrode 150 is formed.

The rear passivation layer 190 may be formed of a dielectric material and may be formed of a single layer or a plurality of layers and may have a specific fixed charge in consideration of the polarity of the rear electric section 170.

The material of the rear passivation layer 190 may be at least one of SiCx, SiOx, silicon nitride (SiNx), hydrogenerated SiNx, aluminum oxide (AlOx), silicon oxynitride (SiON), or hydrogenated SiON.

The thickness of the rear protective layer 190 may be, for example, between 10 nm and 100 nm.

The rear protective layer 190 may function to passivate the rear surface of the rear electric part 170.

In FIGS. 1 and 2, the operation of the solar cell according to this embodiment having such a structure is as follows.

When light is irradiated by the solar cell and is incident on the semiconductor substrate 110 through the antireflection film 130 and the emitter section 120, electron-hole pairs are generated in the semiconductor substrate 110 by the light energy. At this time, the reflection loss of light incident on the semiconductor substrate 110 is reduced by the anti-reflection film 130, and the amount of light incident on the semiconductor substrate 110 is increased.

These electron-hole pairs are separated from each other by the pn junction of the semiconductor substrate 110 and the emitter section 120, and the holes and electrons are separated from each other by, for example, an emitter section 120 having a p- To the semiconductor substrate 110 having the conductive type. The holes transferred to the emitter section 120 are collected by the first finger electrodes 141 and transferred to the first bus bar 143 and are electrically connected to the rear electric section 170 located on the rear side of the semiconductor substrate 110 The moved electrons may be collected by the second finger electrode 151 and transmitted to the second bus bar 153.

When the first and second bus bars 143 and 153 of the solar cells adjacent to each other are connected to each other by an interconnecting connector (not shown), a current flows and it can be used as electric power from the outside.

1 and 2, a diffusion barrier rib 180 may be further formed between the second electrode 150 and the semiconductor substrate 110. The diffusion barrier rib 180 may be formed between the second electrode 150 and the semiconductor substrate 110. Referring to FIG. That is, the diffusion barrier ribs 180 may be formed in a region overlapping the second electrode 150 in the rear surface region of the semiconductor substrate 110.

More specifically, the diffusion barrier ribs 180 are formed on a region of the back surface region of the semiconductor substrate 110 that overlaps with the second electrode 150, and the tunnel layer 160 is formed on the rear surface region of the semiconductor substrate 110 Electrode 150 may be formed on a region that does not overlap with the two-electrode 150.

Therefore, the tunnel layer 160 and the diffusion barrier rib 180 may directly contact the rear surface of the semiconductor substrate 110, and the diffusion barrier rib 180 and the tunnel layer 160 may be formed on the rear surface of the semiconductor substrate 110, May not overlap each other.

3, the tunnel layer 160 is formed on the entire rear surface area of the semiconductor substrate 110, and the diffusion barrier ribs 180 are formed in the tunnel layer (not shown) 160 on the rear surface. In this case, the diffusion barrier ribs 180 may completely overlap the tunnel layer 160 on the rear surface of the semiconductor substrate 110.

The diffusion barrier ribs 180 may include an insulating material or a dielectric material. For example, the diffusion barrier ribs 180 may be formed of a material selected from the group consisting of a-Si, SiCx, SiOx, silicon nitride (SiNx), hydrogenerated SiNx, (SiON) or hydrogenated SiON.

In addition, the material of the diffusion barrier ribs 180 may be the same as or different from the material of the tunnel layer 160. When the materials are the same, for example, the diffusion barrier rib 180 and the tunnel layer 160 may be formed of SiCx or SiOx. When the diffusion barrier ribs 180 are formed of the same material as the tunnel barrier layer 160, the fabrication process may be simplified or the same materials may be used.

In addition, the thickness T180 of the diffusion barrier ribs 180 may be greater than the thickness T160 of the tunnel layer 160.

The formation of the diffusion barrier ribs 180 thicker than the thickness T160 of the tunnel layer 160 between the second electrode 150 and the semiconductor substrate 110 may be performed on the rear surface of the rear electric portion 170 A metal paste for forming the second electrode 150 is formed on the surface of the first electrode 150 through a grain boundary formed between the respective crystals of the polycrystalline silicon included in the rear electric part 170 So that it is prevented from diffusing toward the semiconductor substrate 110. This will be described in more detail in Fig.

Although the thickness T180 of the diffusion barrier ribs 180 is thicker than the tunnel barrier layer 160, the thickness T180 of the diffusion barrier ribs 180 may be less than the thickness T170 of the rear electric conductor 170, 10 to 2/3. Here, the thickness T170 of the rear electric section 170 may mean the thickness of a portion of the rear electric section 170 located between the diffusion barrier ribs 180.

For example, as described above, when the thickness T160 of the tunnel layer 160 is between 1 nm and 1.5 nm and the thickness T170 of the rear electric section 170 is between 50 nm and 500 nm, The thickness T180 of the conductive layer 180 is between 1/10 and 2/3 of the thickness of the rear electric section 170, and therefore, it may be between 5 nm and 333 nm.

The reason why the thickness T180 of the diffusion barrier ribs 180 is 1/10 or more of the thickness of the rear electric portion 170 is that the second electrode 150 is formed of the diffusion barrier ribs 180 during the solar cell manufacturing process To prevent diffusion of the metal paste to the semiconductor substrate 110 through the grain boundary.

The reason why the thickness T180 of the diffusion barrier rib 180 is set to be 2/3 or less of the thickness of the rear electric section 170 is that when the thickness T180 of the diffusion barrier rib 180 is excessively thick, The movement path of the carrier moving from the first electrode 110 to the second electrode 150 through the rear electric section 170 may be excessively narrowed to prevent the reduction of the fill factor FF.

1 to 3, the thickness T180 of the diffusion barrier ribs 180 may be adjusted to be spaced apart from the second electrode 150 by a distance D1 in the rear electric field portion 170, have. Accordingly, the second electrode 150 can sufficiently collect the carrier not only on the side surface of the second electrode 150 but also on a surface facing the rear surface of the diffusion barrier ribs 180.

1 and 2, the diffusion barrier ribs 180 may be formed on the rear surface of the semiconductor substrate 110 such that the first and second finger electrodes 151, And a bus bar partial barrier 180B positioned between the semiconductor substrate 110 and the second bus bar 153.

The finger barrier ribs 180B may be extended in the first direction x on the rear surface of the semiconductor substrate 110 and the bus bar barrier ribs 180B may extend in the second direction y in the second direction y, As shown in FIG.

1 to 3, the diffusion barrier rib 180 includes the finger barrier rib 180F and the bus bar partial barrier rib 180B. However, this is not essential, The partial barrier rib 180B may be omitted.

Here, the width of the diffusion barrier ribs 180 may be equal to or wider than the width of the second electrode 150.

For example, when the diffusion barrier rib 180 includes the finger partial barrier 180F and the bus bar partial barrier 180B, the width W180F of the finger partial barrier 180F is greater than the width W180F of the second finger electrode 151 And the width W180B of the bus bar partial barrier rib 180B may be equal to or wider than the width of the second bus bar 153. [

The width W180F of the finger partition wall 180F may be 1.5 times or more the width of the second finger electrode 151 even if the width W180F is larger than the width of the second finger electrode 151, Even if the width W180B of the second bus bar 153 is larger than the width of the second bus bar 153,

This is because the carrier generated in the semiconductor substrate 110 can not move through the diffusion barrier ribs 180 and thus the carrier movement path becomes excessively narrow and the fill factor FF is prevented from being excessively reduced.

Although the structure of the diffusion barrier rib 180 according to the present invention has been described above, the function of the diffusion barrier rib 180 will be described in more detail with reference to FIG.

FIG. 4 is a view for explaining the function of the diffusion barrier ribs 180 shown in FIGS. 1 to 3. FIG. 4 (a) is a cross-sectional view of a polycrystalline silicon layer 4 (b) shows an example in which the second electrode 150 is formed on the rear electric field portion 170. As shown in FIG.

4 (a), when the rear electric section 170 including the polycrystalline silicon material is formed on the rear surface of the semiconductor substrate 110, the rear electric section 170 may have different directionality Shaped silicon crystal 170PC.

Here, each of the plurality of silicon crystals 170PC is different in shape and direction, and a grain boundary (170GB) may be formed between each of the silicon crystals 170PC.

Here, the crystal boundary (170 GB) refers to a gap in which chemical bonding is weakly formed between each silicon crystal (170PC) of the polycrystalline silicon material included in the rear electric section (170).

4B, each of the silicon crystals 170PC may be elongated from the rear surface of the semiconductor substrate 110 toward the second electrode 150 or the back surface protective film 190, A crystal boundary 170GB formed between each silicon crystal 170PC may also be formed long from the rear surface of the semiconductor substrate 110 toward the second electrode 150 or the rear protective film 190. [

When the second electrode 150 is formed on the rear electric field portion 170, a metal paste for forming the second electrode 150 through the crystal boundary 170GB, for example, Ag paste A portion thereof may be diffused toward the semiconductor substrate 110.

In this case, when the diffusion barrier rib 180 is not provided, the metal paste for forming the second electrode 150 is diffused toward the semiconductor substrate 110 to damage the tunnel layer 160, And can be in direct contact with the semiconductor substrate 110 in severe cases.

In such a case, the characteristics of the semiconductor substrate 110 may be deteriorated, and the tunnel layer 160 may be damaged to deteriorate the fill factor F.

However, when the diffusion barrier rib 180 is provided as in the present invention, the metal paste 150P for forming the second electrode 150 is formed on the semiconductor substrate 110 Diffusion is prevented by the diffusion barrier ribs 180 so that the metal pads 150P for forming the second electrode 150 may damage the tunnel layer 160 or may be damaged It is possible to prevent direct contact.

Although only the structure of the solar cell according to the present invention has been described so far, an example of a method for manufacturing such a solar cell will be briefly described below.

Fig. 5 is a flowchart for explaining an example of a method of manufacturing the solar cell shown in Figs. 1 and 2. Fig.

5, a method of manufacturing a solar cell according to an exemplary embodiment of the present invention includes forming a diffusion barrier rib S1, a tunnel layer forming S2, a rear electric conductor forming S3, ), A second electrode paste patterning step (S5), and a heat treatment step (S6).

In the diffusion barrier rib forming step S1, a diffusion barrier layer (not shown) for forming the diffusion barrier ribs 180 is formed on the rear surface of the semiconductor substrate 110 shown in FIGS. 1 and 2, Can be formed as a whole.

For example, when the diffusion barrier ribs 180 are formed of SiOx, an anti-diffusion layer (not shown) formed of SiOx may be formed on the entire rear surface of the semiconductor substrate 110 by using an oxidation process or a PECVD process.

Thereafter, a portion of the diffusion barrier layer (not shown) may be patterned to form the diffusion barrier rib 180 as shown in FIGS. 1 and 2.

As an example of a method of patterning the diffusion preventing layer (not shown), an etching prevention mask (not shown) may be applied on a part of the diffusion preventing layer (not shown) by screen printing or printing method, and then an etching solution such as KOH The diffusion barrier ribs 180 may be formed by etching the remaining portion of the diffusion barrier layer (not shown) except for the portion to which the etch barrier (not shown) is applied. However, it is also possible to use a laser beam differently.

The tunnel layer 160 is formed in the region exposed between the diffusion barrier ribs 180 in the back surface of the semiconductor substrate 110 by using an oxidation process or a PECVD process. Can be formed.

In the rear electric field forming step S3, a rear electric part 170 formed of a polycrystalline silicon material may be deposited on the rear surface of the diffusion barrier ribs 180 and the rear surface of the tunnel layer 160. [ The polycrystalline silicon material of the rear electric section 170 may be formed using atmospheric pressure chemical vapor deposition (APCVD) or low pressure chemical vapor deposition (LPCVD). After the polycrystalline silicon material layer is deposited, Impurities may be implanted to form the backside electrical section 170.

In the rear protective layer forming step S4, the rear protective layer 190 may be formed on the rear electric part 170 using a PECVD deposition apparatus.

Next, in the second electrode paste patterning step S5, a metal paste for forming the second electrode 150 may be formed on the rear protective layer 190 by screen printing or printing.

Thereafter, in the heat treatment step S6, the metal paste for forming the second electrode 150 is heat-treated to connect the metal paste to the rear electric part 170 through the rear surface protective film 190, And the second electrode 150 as shown in FIG.

During the heat treatment step S6, as shown in FIG. 4B, the metal paste 150P is transferred through the crystal boundary 170GB of the rear electric section 170 formed of the polycrystalline silicon material Diffusion of the metal paste 150P may be blocked by the diffusion barrier ribs 180. [0064]

As described above, the solar cell according to the present invention is formed by forming the tunnel layer 160 and the rear electric field portion 170 made of polycrystalline silicon on the rear surface of the semiconductor substrate 110 so that the open voltage Voc of the solar cell and the fill factor ) Can be further improved.

In addition, this is applied to a double-sided solar cell, and as described above, by providing the diffusion barrier ribs 180, the efficiency of the solar cell can be further improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It belongs to the scope of right.

Claims (14)

A semiconductor substrate containing an impurity of a first conductivity type;
An emitter section located on the front surface of the semiconductor substrate and containing an impurity of a second conductivity type opposite to the first conductivity type;
A tunnel layer located on a rear surface of the semiconductor substrate and including a dielectric material;
A rear electrical portion located on a rear surface of the semiconductor substrate, the rear electrical portion including a polycrystalline silicon material doped with impurities of the first conductivity type at a higher concentration than the semiconductor substrate;
A first electrode connected to the emitter; And
And a second electrode connected to the rear electric field portion,
And a diffusion barrier wall thicker than the tunnel layer between the second electrode and the semiconductor substrate. The method according to claim 1,
Wherein the thickness of the diffusion barrier is between 1/10 and 2/3 of the thickness of the rear electric field portion. The method according to claim 1,
And the thickness of the rear electric field portion is between 50 nm and 500 nm. The method according to claim 1,
And the thickness of the tunnel layer is between 1 nm and 1.5 nm. The method according to claim 1,
Wherein the diffusion barrier is formed on a region of the rear surface region of the semiconductor substrate that overlaps with the second electrode and the tunnel layer is formed on a region of the rear surface region of the semiconductor substrate that is not overlapped with the second electrode. The method according to claim 1,
Wherein the tunnel layer is formed on the entire rear surface of the semiconductor substrate, and the diffusion barrier is formed on the rear surface of the tunnel layer. The method according to claim 1,
Wherein the tunnel layer is formed of SiOx or SiCx. The method according to claim 1,
Wherein the diffusion barrier rib comprises an insulating material or a dielectric material. 9. The method of claim 8,
Wherein the diffusion barrier includes at least one of a-Si, SiCx, SiOx, SiNx, SiOxNy or AlOx. The method according to claim 1,
Wherein the material of the diffusion barrier and the tunnel layer are the same. The method according to claim 1,
And the width of the diffusion barrier is equal to or wider than the width of the second electrode. 12. The method of claim 11,
Wherein the second electrode includes a second finger electrode positioned in a first direction on a plane of the semiconductor substrate and a second bus bar positioned in a second direction intersecting the first direction. 13. The method of claim 12,
The diffusion barrier rib
A finger partition wall positioned between the semiconductor substrate and the second finger electrode in a rear surface of the semiconductor substrate;
And a bus bar partial barrier positioned between the semiconductor substrate and the second bus bar. 14. The method of claim 13,
The width of the finger partial barrier is equal to or wider than the width of the second finger electrode,
And the width of the bus bar partial barrier is equal to or wider than the width of the second bus bar.

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