KR20150105087A - Chip electronic component and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a chip electronic component and a manufacturing method thereof. More specifically, the present invention relates to a chip electronic component which has excellent dispersion characteristics of the magnetic powder to improve the filling factor and inductance and a manufacturing method thereof.

Description

Technical Field [0001] The present invention relates to a chip electronic component and a manufacturing method thereof,

The present invention relates to a chip electronic component and a manufacturing method thereof.

An inductor, which is one of chip electronic components, is a typical passive element that removes noise by forming an electronic circuit together with a resistor and a capacitor. The inductor amplifies a signal of a specific frequency band in combination with a capacitor using electromagnetic characteristics A resonance circuit, a filter circuit, and the like.

In recent years, miniaturization and thinning of IT devices such as various communication devices and display devices have been accelerated. Researches for miniaturization and thinning of various devices such as inductors, capacitors, and transistors employed in IT devices have been continuously carried out .

In addition, as electronic devices are required to be smaller and higher in performance, power consumption is increasing. As the power consumption increases, a power management integrated circuit (PMIC) or a DC-DC converter (DC-DC converter) used in a power circuit of an electronic device has a high switching frequency and an increased output current And the use of power inductors used for stabilizing the output current of a PMIC or a DC-DC converter is increasing.

The development direction of the power inductor is adapted to the miniaturization, high current and low direct current resistance. However, the conventional laminated type power inductor has a limitation in realizing it, and the magnetic powder is coated on the coil pattern formed by plating on the upper and lower surfaces of the insulating substrate A thin film type inductor is manufactured by stacking, pressing, and curing a magnetic sheet formed by mixing a magnetic material sheet with a magnetic material.

At this time, the slurry for forming the magnetic sheet is composed of a magnetic powder, a thermosetting polymer resin, a curing agent, a thickener, an organic solvent, and a dispersing agent capable of improving the dispersibility of the powder.

In addition to chemical dispersion through dispersants for more efficient dispersion of magnetic powders, mechanical forces are applied to specific equipment.

The magnetic powder is gradually reduced in size in order to realize a higher function, and is mixed with two or more powders having different sizes. Accordingly, the dispersion of the magnetic powder becomes more difficult, and accordingly, there is a need for methods capable of realizing more effective dispersibility.

Conventionally, a phosphate-based dispersant composed of a polymer having a weight average molecular weight of 700 to 2,500 was used. However, in order to maintain the sedimentation stability of the metal magnetic body powder having a high density and to prevent secondary agglomeration after primary dispersion, There were shortcomings.

Korean Patent Publication No. 2013-0072816 Japanese Patent Application Laid-Open No. 2008-166455

One embodiment of the present invention relates to a chip electronic component and a method of manufacturing the same, which improves the dispersibility and sedimentation stability of a magnetic powder by applying a new type of dispersant.

One embodiment of the present invention is a magnetic body comprising: a magnetic body body including an inner coil pattern formed on at least one surface of an insulating substrate; And an outer electrode formed on at least one end face of the magnetic body body and configured to be connected to an end of the inner coil pattern, wherein the magnetic body body includes an unsaturated carboxylic acid-based polymer.

The magnetic substance body may further include a siloxane-based copolymer.

The magnetic body body may include a metal-based soft magnetic material.

The metal-based soft magnetic material may have a particle diameter of 0.1 mu m to 30 mu m.

The unsaturated carboxylic acid polymer may have a weight average molecular weight of 500 to 2,300.

The siloxane-based copolymer may have a weight average molecular weight of 500 to 2,300.

The unsaturated carboxylic acid polymer may be contained in an amount of 0.5 to 2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body.

The siloxane-based copolymer may be contained in an amount of 0.05 to 0.2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body.

The filling rate of the magnetic body body may be 80% or more.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: forming an inner coil pattern on at least one surface of an insulating substrate; Forming a magnetic substance body by laminating a magnetic substance sheet on the upper and lower portions of the insulating substrate on which the inner coil pattern is formed; And forming an external electrode on at least one end face of the magnetic body body so as to be connected to an end of the internal coil pattern, wherein the magnetic body sheet includes an unsaturated carboxylic acid polymer, to provide.

The magnetic sheet may further include a siloxane-based copolymer.

The magnetic sheet may include a metal-based soft magnetic material.

The metal-based soft magnetic material may have a particle diameter of 0.1 mu m to 30 mu m.

The unsaturated carboxylic acid polymer may have a weight average molecular weight of 500 to 2,300.

The siloxane-based copolymer may have a weight average molecular weight of 500 to 2,300.

The magnetic sheet may include 0.5 to 2 parts by weight of the unsaturated carboxylic acid polymer based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic sheet.

The magnetic sheet may include 0.05 to 0.2 parts by weight of the siloxane-based copolymer with respect to 100 parts by weight of the metal-based soft magnetic material contained in the magnetic sheet.

The filling rate of the magnetic body body may be 80% or more.

According to one embodiment of the present invention, it is possible to obtain excellent dispersion characteristics and sedimentation preventing effect of the magnetic powder at the same time.

 In addition, the surface roughness of the magnetic sheet can be reduced by realizing slip and leveling characteristics of the magnetic powder and preventing the Bernard cell phenomenon.

Further, as the dispersibility of the magnetic powder is improved, the filling factor is improved and the inductance capacity is improved.

1 is a schematic perspective view showing an inner coil pattern of a chip electronic component according to an embodiment of the present invention.
2 is a sectional view taken along a line I-I 'in Fig.
3 is a scanning electron microscope (SEM) to compare the filling rates of the magnetic sheet (a) manufactured using a conventional dispersant and the magnetic sheet (b) used in manufacturing a chip electronic component according to an embodiment of the present invention, Scanning Electron Microscope) to observe the cross section of the magnetic sheet.
4 is a graph showing the inductance of a chip electronic component (c) manufactured using a conventional dispersant and a chip electronic component (d) according to an embodiment of the present invention.
5 is a process diagram showing a method of manufacturing a chip electronic component according to an embodiment of the present invention.
6 is a graph comparing the sedimentation stability of a slurry (e) using a conventional dispersant and a slurry (f) forming a magnetic sheet used in the production of a chip electronic component according to an embodiment of the present invention Graph.
7 is a scanning electron microscope (SEM) chart for comparing the surface roughness of a magnetic sheet (g) produced using a conventional dispersant and a magnetic sheet (h) used in manufacturing a chip electronic component according to an embodiment of the present invention. , Scanning Electron Microscope).

Hereinafter, embodiments of the present invention will be described with reference to specific embodiments and the accompanying drawings. However, the embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. Furthermore, embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art. Accordingly, the shapes and sizes of the elements in the drawings may be exaggerated for clarity of description, and the elements denoted by the same reference numerals in the drawings are the same elements.

It is to be understood that, although the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Will be described using the symbols.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

Chip electronic components

Hereinafter, a chip electronic component according to an embodiment of the present invention will be described, but the present invention is not limited thereto.

Fig. 1 is a schematic perspective view showing an inner coil pattern of a chip electronic component according to an embodiment of the present invention, and Fig. 2 is a sectional view taken along a line I-I 'in Fig.

Referring to FIGS. 1 and 2, a thin film type inductor 100 used in a power supply line of a power supply circuit as an example of a chip electronic component is disclosed. The chip electronic component may be suitably applied to chip inductors, chip beads, chip filters, and the like.

The thin film type inductor 100 includes a magnetic body 50, an insulating substrate 20, an inner coil pattern 40, and an outer electrode 80.

The magnetic substance body 50 forms the appearance of the thin film type inductor 100, and may be in the form of a hexahedron. In order to clearly explain the embodiment of the present invention, when the directions of the hexahedron are defined, L, W and T shown in Fig. 1 indicate the longitudinal direction, the width direction and the thickness direction, respectively. The magnetic body 50 may have a rectangular parallelepiped shape whose length in the longitudinal direction is greater than the length in the width direction.

The magnetic body 50 may be formed by laminating and pressing and curing a magnetic sheet including a magnetic powder and produced in the form of a sheet.

The magnetic powder constituting the magnetic body 50 may be filled with a metal-based soft magnetic material.

 The metal-based soft magnetic material may be an alloy containing at least one selected from the group consisting of Fe, Si, Cr, Al and Ni, and may include, for example, Fe-Si- But is not limited thereto.

The metal-based soft magnetic material may have a particle diameter of 0.1 to 30 μm and may be dispersed on a polymer such as an epoxy resin or polyimide.

The magnetic body 50 may include an unsaturated carboxylic acid-based polymer as a dispersant for improving the dispersibility of the magnetic powder.

Conventionally, a phosphate-based polymer dispersant having a weight average molecular weight of 700 to 2,500 was mainly used for dispersion of magnetic powder constituting the magnetic body of the thin film type inductor, but there was a limit to improvement in dispersibility. Particularly, in the case of a thin film type inductor using a metal magnetic powder having a high density, it is difficult to maintain the sedimentation stability and to realize excellent dispersibility.

Accordingly, in one embodiment of the present invention, the unsaturated carboxylic acid polymer is newly applied as a fatty acid-based dispersant, and the dispersibility of the metal magnetic powder constituting the magnetic body of the thin film type inductor is remarkably improved.

The magnetic body may further include a siloxane-based copolymer.

Siloxane-based copolymer, it is possible to realize the slip and leveling characteristics of the magnetic powder and the effect of preventing the Bernard cell phenomenon at the same time.

The unsaturated carboxyl-based polymer may have a weight average molecular weight of 500 to 2,300.

The unsaturated carboxylic acid polymer may be contained in an amount of 0.5 to 2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body 50.

When the amount of the unsaturated carboxylic acid polymer is less than 0.5 parts by weight, the dispersibility and the settling stability are lowered and the magnetic powder is agglomerated, so that the filling rate is decreased and the surface roughness of the magnetic sheet is increased. The volatilization passage of the solvent is not ensured at the time of drying or curing the solvent, so that the solvent may be trapped inside and the physical properties may be deteriorated.

The siloxane-based copolymer may have a weight average molecular weight of 500 to 2,300.

The siloxane-based copolymer may be contained in an amount of 0.05 part by weight to 0.2 part by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body 50.

When the amount of the siloxane-based copolymer is less than 0.05 part by weight, the slurry and leveling properties of the magnetic powder are improved, and the effect of preventing the Bernard Cell phenomenon is insufficient, thereby causing a problem of increasing the surface roughness of the magnetic sheet If it exceeds 0.2 parts by weight, a volatilization passage of the solvent may not be secured during drying or curing of the magnetic sheet, and the solvent may be trapped inside, thereby deteriorating the physical properties.

As described above, the magnetic body 50 of the chip electronic component according to the embodiment of the present invention includes the unsaturated carboxylic acid polymer and further includes the siloxane copolymer, whereby the dispersibility of the magnetic powder can be improved, The filling rate can be improved, and the inductance capacity characteristics can be improved.

The filling rate of the magnetic body 50 may be 80% or more.

Fig. 3 is a graph showing the relationship between the magnetic sheet (a) prepared by using ethoxylated nonylphenol phosphate, which is a conventional phosphate polymer dispersant, and the unsaturated carboxylic acid polymer and the siloxane copolymer according to one embodiment of the present invention And a section of the magnetic sheet (b) prepared by adding it as a dispersant was observed with a scanning electron microscope (SEM).

As shown in FIG. 4, when the magnetic sheet was produced by adding the unsaturated carboxylic acid polymer and the siloxane-based copolymer in one embodiment of the present invention, the dispersibility of the magnetic powder was improved and the filling rate was improved. In the conventional case (a), the filling rate was 77.09%, but in the case of the embodiment of the present invention (b), the filling rate was improved to 87.40%.

Fig. 4 shows a chip electronic component (c) containing a conventional phosphate-based polymer dispersant, Ethoxylated Nonylphenol phosphate, and an unsaturated carboxylic acid-based polymer and a siloxane-based copolymer according to an embodiment of the present invention (D) of the chip electronic component (d).

Referring to FIG. 4, when the unsaturated carboxylic acid-based polymer and the siloxane-based copolymer are included according to one embodiment of the present invention, the inductance is improved as the dispersibility and packing ratio of the magnetic powder are improved.

The insulating substrate 20 formed inside the magnetic body 50 may be formed of, for example, a polypropylene glycol (PPG) substrate, a ferrite substrate, or a metal-based soft magnetic substrate.

The central portion of the insulating substrate 20 penetrates to form a hole, and the through hole is filled with a magnetic material such as a metal-based soft magnetic material to form the core portion 55. The inductance (L) can be improved by forming the core part 55 filled with the magnetic material.

An inner coil pattern 40 having a coil-shaped pattern may be formed on one surface of the insulating substrate 20 and an inner coil pattern 40 having a coil-shaped pattern may be formed on an opposite surface of the insulating substrate 20 .

The inner coil pattern 40 may have a coil pattern formed in a spiral shape and an inner coil pattern 40 formed on a surface opposite to the one surface of the insulating substrate 20 may be formed on the insulating substrate 20 (Not shown).

The inner coil pattern 40 and the via electrode 45 may be formed of a metal having excellent electrical conductivity and may be formed of a metal such as silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni) And may be formed of titanium (Ti), gold (Au), copper (Cu), platinum (Pt), or an alloy thereof.

An insulating film 30 covering the inner coil pattern 40 may be formed on the surface of the inner coil pattern 40.

The insulating film 30 can be formed by a known method such as a screen printing method, a process of exposure through a photoresist (PR), a developing process, a spray coating process, and the like, but is not limited thereto.

One end of the inner coil pattern 40 formed on one surface of the insulating substrate 20 may be exposed at one end in the longitudinal direction of the magnetic body 50, The other end of the pattern 40 may be exposed in the other longitudinal cross-section of the magnet body 50.

Outer electrodes 80 may be formed on both end faces of the magnetic body 50 so as to be connected to the lead portions of the inner coil pattern 40 exposed at both end faces of the magnetic body 50.

The external electrode 80 may be formed on both end surfaces in the longitudinal direction of the magnetic body 50 and may extend to both end faces in the thickness direction of the magnetic body 50 and / or both end faces in the width direction.

The outer electrode 80 may be formed of a metal having excellent electrical conductivity. For example, the outer electrode 80 may be formed of a metal such as Ni, Cu, Sn, or Ag, As shown in FIG.

Method of manufacturing chip electronic components

5 is a process diagram showing a method of manufacturing a chip electronic component according to an embodiment of the present invention.

Referring to FIG. 5, the inner coil pattern 40 may be formed on at least one surface of the insulating substrate 20.

The insulating substrate 20 is not particularly limited and may be, for example, a polypropylene glycol (PPG) substrate, a ferrite substrate, a metal-based soft magnetic substrate, or the like, and may have a thickness of 40 to 100 μm.

The inner coil pattern 40 may be formed by, for example, an electroplating method, but not limited thereto. The inner coil pattern 40 may include a metal having excellent electrical conductivity. For example, , Ag, Pd, Al, Ni, Ti, Au, Cu, Pt, or an alloy thereof may be used.

A hole is formed in a part of the insulating substrate 20 and a conductive material is filled to form a via electrode 45. The insulating substrate 20 is formed on the opposite surface of the insulating substrate 20 through the via electrode 45 The inner coil pattern 40 can be electrically connected.

A drill, a laser, a sandblast, a punching process, or the like may be performed on the central portion of the insulating substrate 20 to form a through hole penetrating the insulating substrate 20.

Next, the insulating film 30 covering the inner coil pattern 40 can be formed.

The insulating layer 30 may be formed by a known method such as a screen printing method, a photoresist (PR) exposure process, a developing process, a spray coating process, and the like, but is not limited thereto.

Next, the magnetic substance body 50 is formed by laminating the magnetic substance sheets on the upper and lower portions of the insulating substrate 20 on which the inner coil pattern 40 is formed.

The magnetic powder used for manufacturing the magnetic sheet may be a metal-based soft magnetic material.

 The metal-based soft magnetic material may be an alloy containing at least one selected from the group consisting of Fe, Si, Cr, Al and Ni, and may include, for example, Fe-Si- But is not limited thereto.

The metal-based soft magnetic material may have a particle diameter of 0.1 mu m to 30 mu m.

The slurry formed by mixing the metal soft magnetic material and the polymer such as epoxy resin or polyimide may be coated on a carrier film and dried to prepare a magnetic sheet.

At this time, it may include an unsaturated carboxylic acid-based polymer as a dispersing agent for effectively dispersing the magnetic powder on the polymer.

The magnetic sheet may further include a siloxane-based copolymer.

Siloxane-based copolymer, it is possible to realize the slip and leveling characteristics of the magnetic powder and the effect of preventing the Bernard cell phenomenon at the same time.

The unsaturated carboxyl-based polymer may have a weight average molecular weight of 500 to 2,300.

The unsaturated carboxylic acid polymer may be contained in an amount of 0.5 to 2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic sheet.

When the amount of the unsaturated carboxylic acid polymer is less than 0.5 parts by weight, the dispersibility and the settling stability are lowered and the magnetic powder is agglomerated, so that the filling rate is decreased and the surface roughness of the magnetic sheet is increased. The volatilization passage of the solvent is not ensured at the time of drying or curing the solvent, so that the solvent may be trapped inside and the physical properties may be deteriorated.

The siloxane-based copolymer may have a weight average molecular weight of 500 to 2,300.

The siloxane-based copolymer may be contained in an amount of 0.05 to 0.2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic sheet.

When the amount of the siloxane-based copolymer is less than 0.05 part by weight, the slurry and leveling properties of the magnetic powder are improved, and the effect of preventing the Bernard Cell phenomenon is insufficient, thereby causing a problem of increasing the surface roughness of the magnetic sheet If it exceeds 0.2 parts by weight, a volatilization passage of the solvent may not be secured during drying or curing of the magnetic sheet, and the solvent may be trapped inside, thereby deteriorating the physical properties.

FIG. 6 is a graph showing the results of a comparison between a metal magnetic powder slurry (e) prepared by adding ethoxylated nonylphenol phosphate, which is a conventional phosphoric acid polymer dispersant, and an unsaturated carboxylic acid polymer, according to one embodiment of the present invention. (F) prepared by adding a siloxane-based copolymer as a dispersant to the metal magnetic powder slurry (f).

As shown in FIG. 6, when the unsaturated carboxylic acid polymer and the siloxane-based copolymer are included in one embodiment of the present invention, the rate of decrease of the height of the sedimentation layer with time is remarkably reduced, and the sedimentation stability is improved.

FIG. 7 is a graph showing the relationship between the magnetic sheet (g) prepared by using ethoxylated nonylphenol phosphate, which is a conventional phosphate polymer dispersant, and the unsaturated carboxylic acid polymer and siloxane copolymer according to one embodiment of the present invention And the surface of the magnetic substance sheet (h) prepared by adding it as a dispersant was observed with a scanning electron microscope (SEM).

As can be seen from Fig. 7, in the case of the magnetic sheet (g) prepared by adding the unsaturated carboxylic acid polymer and the siloxane copolymer to the magnetic sheet (h) prepared by adding the conventional dispersant, And the surface roughness was decreased due to the leveling effect and the effect of preventing the Bernard Cell phenomenon.

As described above, the magnetic sheet produced according to one embodiment of the present invention includes the unsaturated carboxylic acid polymer and further includes the siloxane copolymer, whereby the dispersibility of the magnetic powder can be improved, The inductance capacity characteristic can be improved.

The filling rate of the magnetic body 50 made of the magnetic sheet according to an embodiment of the present invention may be 80% or more.

The magnetic substance sheet 50 may be formed by laminating the magnetic sheet on both sides of the insulating substrate 20 and pressing the laminate by a laminating method or a hydrostatic pressing method. At this time, the core portion 55 can be formed by allowing the through hole to be filled with the magnetic material.

Next, the external electrode 80 may be formed on at least one end face of the magnetic body 50 so as to be connected to the lead portion of the inner coil pattern 40 exposed on at least one end face of the magnetic body 50.

The external electrode 80 may be formed using a paste containing a metal having excellent electrical conductivity. For example, the external electrode 80 may be formed of a metal such as nickel (Ni), copper (Cu), tin (Sn) An alloy thereof, or the like.

The method of forming the external electrode 80 may be performed by not only printing but also dipping according to the shape of the external electrode 80.

In addition, the same parts as those of the above-described chip electronic component according to the embodiment of the present invention will be omitted here.

The present invention is not limited to the above-described embodiment and the accompanying drawings, but is intended to be limited by the appended claims.

It will be apparent to those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. something to do.

100: thin film type inductor 45: via electrode
20: insulating substrate 50: magnetic substance body
30: insulating layer 55: core part
40: inner coil pattern 80: outer electrode

Claims (18)

A magnetic body body including an inner coil pattern formed on at least one surface of an insulating substrate; And
And an outer electrode formed on at least one end surface of the magnetic body body and connected to an end of the inner coil pattern,
Wherein the magnetic body body comprises an unsaturated carboxylic acid-based polymer.
The method according to claim 1,
Wherein the magnetic body body further comprises a siloxane-based copolymer.
The method according to claim 1,
Wherein the magnetic body body comprises a metal-based soft magnetic material.
The method of claim 3,
Wherein the metal-based soft magnetic material has a particle diameter of 0.1 占 퐉 to 30 占 퐉.
The method according to claim 1,
Wherein the unsaturated carboxylic acid polymer has a weight average molecular weight of 500 to 2,300.
3. The method of claim 2,
Wherein the siloxane-based copolymer has a weight average molecular weight of 500 to 2,300.
The method according to claim 1,
Wherein the unsaturated carboxylic acid polymer is contained in an amount of 0.5 to 2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body.
3. The method of claim 2,
Wherein the siloxane-based copolymer is contained in an amount of 0.05 to 0.2 parts by weight based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic body.
The method according to claim 1,
Wherein a filling rate of said magnetic body body is 80% or more.
Forming an inner coil pattern on at least one surface of the insulating substrate;
Forming a magnetic substance body by laminating a magnetic substance sheet on the upper and lower portions of the insulating substrate on which the inner coil pattern is formed; And
Forming an outer electrode on at least one end face of the magnetic body body so as to be connected to an end of the inner coil pattern,
Wherein said magnetic substance sheet comprises an unsaturated carboxylic acid-based polymer.
11. The method of claim 10,
Wherein the magnetic sheet further comprises a siloxane-based copolymer.
11. The method of claim 10,
Wherein the magnetic substance sheet includes a metal-based soft magnetic material.
13. The method of claim 12,
Wherein the metal-based soft magnetic material has a particle diameter of 0.1 占 퐉 to 30 占 퐉.
11. The method of claim 10,
Wherein the unsaturated carboxylic acid polymer has a weight average molecular weight of 500 to 2,300.
12. The method of claim 11,
Wherein the siloxane-based copolymer has a weight average molecular weight of 500 to 2,300.
11. The method of claim 10,
Wherein the magnetic substance sheet comprises 0.5 to 2 parts by weight of the unsaturated carboxylic acid polymer based on 100 parts by weight of the metal-based soft magnetic material contained in the magnetic substance sheet.
12. The method of claim 11,
Wherein the magnetic substance sheet contains 0.05 to 0.2 parts by weight of the siloxane-based copolymer with respect to 100 parts by weight of the metal-based soft magnetic material contained in the magnetic substance sheet.
11. The method of claim 10,
Wherein a filling rate of the magnetic body body is 80% or more.

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