KR20150086781A - Large capacity evaporation source and Deposition apparatus including the same - Google Patents

Abstract

The present invention relates to a large capacity evaporation source and a deposition apparatus having the same. According to the present invention, a large capacity evaporation source may comprise: a housing; a lower crucible installed inside the housing, wherein a evaporation material is accommodated, and formed to be lengthened to the front and the rear; an upper crucible coupled to an upper portion of the lower crucible, wherein an injection nozzle injecting the evaporation material is formed in an upper end; and a guide plate installed inside the upper crucible and guiding the evaporation material which is concentrated to a central portion to be evaporated to be moved to the front and the rear.

Description

TECHNICAL FIELD [0001] The present invention relates to a large capacity evaporation source and a deposition apparatus including the evaporation source,

The present invention relates to a large capacity evaporation source and a deposition apparatus including the evaporation source, and more particularly, to a large capacity evaporation source capable of uniformly evaporating a large amount of evaporation material in a crucible to ensure uniformity, and a deposition apparatus including the evaporation source .

BACKGROUND ART Organic light emitting diodes (OLEDs) are self-light emitting devices that emit light by using an electroluminescent phenomenon that emits light when a current flows through a fluorescent organic compound. A backlight for applying light to a non- Therefore, a lightweight thin flat panel display device can be manufactured.

A flat panel display device using such an organic electroluminescent device has a fast response speed and a wide viewing angle, and is emerging as a next generation display device. Particularly, since the manufacturing process is simple, it is advantageous in that the production cost can be saved more than the conventional liquid crystal display device.

The organic electroluminescent device comprises an organic thin film such as a hole injecting layer, a hole transporting layer, a light emitting layer, an electron transporting layer, and an electron injecting layer which are the remaining constituent layers except for the anode and the cathode. / RTI >

In the vacuum thermal deposition method, a substrate is disposed in a vacuum chamber, a shadow mask having a predetermined pattern is aligned on a substrate, heat is applied to an evaporation source containing the evaporation material, Evaporation.

In the case of the linear thermal evaporation method in the vacuum thermal deposition method, the evaporation material is generally deposited in a T-shaped evaporation source. However, the T-shaped evaporation source has a problem that the efficiency of space utilization is low due to a long moving path of the evaporation material, and recently, the capacity of the evaporation material increases due to the large-sized substrate, thereby increasing the length of the crucible and the vacuum chamber .

Korean Registered Patent No. 10-1057552 (issued on August 17, 2011)

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a large-capacity evaporation source capable of uniformly evaporating a large amount of evaporation material in a crucible, .

According to an aspect of the present invention, there is provided a large capacity evaporation source comprising: a housing; A lower crucible which is installed inside the housing and accommodates evaporated material therein and is formed to be long in the front and rear direction; An upper crucible coupled to an upper portion of the lower crucible and having an injection nozzle for spraying the evaporation material at an upper end thereof; And a guide plate installed inside the upper crucible and guiding the evaporation material concentrated to the center of the evaporation material to be moved forward and backward.

A plurality of partition walls may be partitioned inside the lower crucible.

The partition may be made of a fin that is heat-conductive.

A reflector may be installed outside the upper crucible and the lower crucible.

The upper portion of the upper crucible may be formed in a semicircular shape.

The central portion of the guide plate may be formed to be convex upward.

The guide plate may have at least a part of the shape.

Wherein the guide plate has a first guide portion having a height increasing toward a front side; And a second guide portion formed to be symmetrical with respect to the first guide portion and having a height increasing toward the rear.

A guide surface for guiding a part of the evaporation material to the front and the back may be formed on a lower surface of the guide plate.

The guide surface may be inclined upwards and downward in a central portion of the guide plate.

The front and rear ends of the guide plate may be spaced apart from the inner wall of the upper crucible.

And a pair of support plates for supporting the guide plate may be spaced apart from each other between the guide plate and the lower crucible.

The guide plate may be supported by a plurality of support legs provided on the support plate.

According to another aspect of the present invention, there is provided a deposition apparatus for forming an organic thin film on a substrate, the deposition apparatus comprising: a vacuum chamber in which the substrate is placed; And a large-volume evaporation source disposed inside the vacuum chamber so as to face the substrate, the evaporation source supplying evaporation material for forming the organic thin film.

According to the present invention, the evaporation material can be uniformly evaporated in the crucible, thereby ensuring a sufficient uniformity in the deposition process of the substrate. Therefore, the uniformity of the deposition can be increased even for a large area substrate, and the quality of the product can be improved.

1 is a front sectional view of a large capacity evaporation source according to an embodiment of the present invention;
2 is a perspective view of a lower crucible according to the present invention;
3 is a perspective view of a guide plate according to the present invention;
4 is a side view of the guide plate according to the present invention.
5 is a front view of the guide plate according to the present invention.

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that the invention is not intended to be limited to the particular embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of a large-capacity evaporation source and a deposition apparatus including the same according to the present invention will be described in detail with reference to the accompanying drawings.

2 is a perspective view of a lower crucible according to the present invention, FIG. 3 is a perspective view of a guide plate according to the present invention, and FIG. 4 is a cross- FIG. 5 is a front view of the guide plate according to the present invention. FIG.

According to the present invention, a large capacity evaporation source according to the present invention comprises a housing 10; A lower crucible 20 installed inside the housing 10 and containing evaporation material therein and formed to be long in the fore and aft direction; An upper crucible 30 coupled to an upper portion of the lower crucible 20 and having an upper end formed with an injection nozzle 34 through which the evaporation material is injected; And a guide plate 40 installed in the upper crucible 30 and guiding the evaporated material concentrated at the center of the evaporated material to be moved forward and backward.

The housing 10 may be formed in a rectangular parallelepiped shape having a size corresponding to the outer appearance of the upper crucible 30 and the lower crucible 20. [ A cooling jacket for cooling the upper crucible 30 and the lower crucible 20 may be provided inside the outer wall of the housing 10, though not specifically shown.

In this embodiment, the crucible is formed by joining the lower crucible 20 and the upper crucible 30. The shape of the lower crucible 20 is well shown in Fig. Referring to this, the lower crucible 20 is formed in a substantially rectangular parallelepiped shape, and a predetermined space is formed therein. A plurality of reflection plates 22 may be stacked so as to surround the outside of the lower crucible 20.

The lower crucible 20 is elongated in the fore and aft direction, and a plurality of partitions 24 are partitioned. The barrier ribs 24 may be spaced apart from the lower crucible 20 by a predetermined distance in front of and behind the barrier ribs 24, and the barrier ribs 24 may be made of heat conductive fins. When the barrier ribs 24 are made of heat-conductive fins, the radiant heat in the lower crucible 20 can be more easily transmitted. Further, the partition wall 24 can be welded to the inner wall of the lower crucible 20 to increase the thermal conductivity.

Since the lower crucible 20 has a box shape of a rectangular parallelepiped that is not a T shape, the evaporation material can be evaporated upwardly in a large area without a long moving path of the evaporation material. Therefore, there is an advantage that sufficient deposition can be performed even in the manufacture of a large-area substrate.

Referring again to FIG. 1, crucible engaging portions 26 are provided on both sides of the lower crucible 20 and the upper crucible 30, respectively. The crucible engaging portion 26 is a portion extending from both ends of the lower crucible 20 and the upper crucible 30 so as to be in close contact with each other, and both can be joined by bolts or the like.

Next, the upper crucible 30 is coupled to the lower crucible 20 at an upper portion, and forms an area through which the evaporated vapor material passes. In the present embodiment, the upper crucible 30 may have a semicircular upper portion so that the material evaporated in the lower crucible 20 can be moved toward the injection nozzle 34. Of course, the shape of the upper crucible 30 is not limited to the above-described shape, but it is natural that it can have various shapes such as a rectangular shape.

Also, the upper crucible 30 may be laminated with a plurality of reflectors 32 on the outer side in the same manner as the lower crucible 20. [ An upper end of the upper crucible 30 is provided with a spray nozzle 34 for spraying the evaporation material toward the substrate.

Generally, in the box-shaped lower crucible 20 as in the present embodiment, the evaporation material is concentrated mainly in the central portion. In other words, since the radiant heat transferred to the evaporated material disposed at the center portion is larger than the vaporized material disposed on the left or right side based on FIG. 2, evaporation is more easily performed in the central portion. As described above, since the lower crucible 20 is not uniformly evaporated at all portions when viewed from the whole, the evaporation is performed in the form of a parabola around the central portion. Thus, the deposition is substantially unevenly performed on the substrate.

Therefore, in this embodiment, the guide plate 40 is disposed in order to disperse the evaporation material evaporated in the central part of the evaporation material in the forward and backward directions, thereby increasing the uniformity of the deposition. The guide plate 40 is positioned substantially inside the upper crucible 30. [

The specific shape of the guide plate 40 is well shown in Fig. Referring to this, the guide plate 40 may have a generally â-â'shaped shape. It goes without saying that this is merely an example of the shape of the guide plate 40 and may have various other shapes. In other words, the guide plate 40 can be of any shape as long as it is capable of guiding the evaporation material evaporated to the center portion in the forward, middle, and rear directions forward and backward. For example, when the center portion of the guide plate 40 is formed to be convex upward, the evaporation material may be guided forward and backward along a relatively concave bottom surface. At this time, the convex shape may be in the form of the above-mentioned bullet or semicircular shape.

Further, the guide plate 40 has a first guide portion 42 having a height higher toward the front side; And a second guide part 44 formed symmetrically with respect to the first guide part 42 and having a height increasing toward the rear side. The flat portion 45 may be formed flat at a portion where the first guide portion 42 and the second guide portion 44 are connected. The planar portion 45 is formed between the first guide portion 42 and the second guide portion 44 formed to be inclined and collides with a wider surface area so as to be guided forward and backward.

The guide plate 40 is divided into the first guide portion 42 and the second guide portion 44. The guide plate 40 has a guide surface 40 for guiding a part of the evaporation material to the front 48 may be formed. The guide surface 48 may serve as a lower surface of the guide plate 40 whose center portion is convex upward and guide the evaporated material flowing into the evaporation space 46 formed in the lower portion of the guide plate 40. The guide surface (48) may be formed to be inclined upwards and downward from the center of the guide plate (40).

The front and rear ends of the guide plate 40 are spaced apart from the inner wall of the upper crucible 30 at regular intervals. The evaporated material evaporated in the lower crucible 20 passes through the thus separated portion.

Between the guide plate 40 and the lower crucible 20, a pair of support plates 50 for supporting the guide plate 40 are installed apart from each other. The support plate 50 is provided to extend inward from the crucible engaging portion 26 and may be formed long along the front and rear sides of the crucibles 20 and 30.

The guide plate 40 is supported by a plurality of support legs 52 provided on the support plate 50. The support legs 52 are installed at the inner ends of the pair of support plates 50, and a plurality of the support legs 52 are spaced apart from each other along the front and rear sides of the guide plate 40 at predetermined intervals.

Although not shown in detail in the drawings, the deposition apparatus according to the present invention is a deposition apparatus for forming an organic thin film on a substrate, the deposition apparatus comprising: a vacuum chamber in which the substrate is placed; And a large-volume evaporation source disposed inside the vacuum chamber so as to face the substrate, the evaporation source supplying evaporation material for forming the organic thin film.

Hereinafter, a process of evaporating a vaporized material by a large capacity evaporation source according to an embodiment of the present invention will be described.

5, the evaporated material evaporated in the lower crucible 20 can basically be evaporated into spaces spaced between both ends of the guide plate 40 and the upper crucible 30.

4, when the evaporation material is evaporated, the evaporation material is not evaporated uniformly over the entire front and rear sides of the guide plate 40, and evaporation is actively performed around the center of the guide plate 40 Lt; / RTI > In this embodiment, the guide plate 40 is provided so that the evaporation material is guided forward and backward without concentrating only on the central portion so that the evaporation material is separated from the front and rear ends of the guide plate 40 and the upper crucible 30 To be evaporated into space.

When the evaporation material is guided to the front and rear sides of the guide plate 40 as described above, the evaporation material is concentrated at the center portion, and the unevenness can be solved during the deposition of the substrate. Particularly, in the case of a large-area substrate, the deposition irregularity becomes serious, and therefore, according to the constitution of the present invention, deposition irregularity can be sufficiently solved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It belongs to the scope of right.

10: housing 20: lower crucible
22: reflector 24:
26: crucible engaging portion 30: upper crucible
32: reflector 34: jet nozzle
40: guide plate 42: first guide portion
44: second guide part 45: flat part
46: evaporation space 48: guide surface
50: support plate 52: support leg

Claims (14)

housing;
A lower crucible which is installed inside the housing and accommodates evaporated material therein and is formed to be long in the front and rear direction;
An upper crucible coupled to an upper portion of the lower crucible and having an injection nozzle for spraying the evaporation material at an upper end thereof; And
And a guide plate installed inside the upper crucible and guiding the evaporated material concentrated at the center of the evaporated material to be moved forward and backward. The method according to claim 1,
Wherein a plurality of partition walls are partitioned inside the lower crucible. 3. The method of claim 2,
Wherein the partition wall is made of a fin that is heat-conductive. The method according to claim 1,
And a reflector is installed on the outer side of the upper crucible and the lower crucible. The method according to claim 1,
And an upper portion of the upper crucible is formed in a semicircular shape. The method according to claim 1,
And the central portion of the guide plate is formed to be convex upward. The method according to claim 1,
Wherein the guide plate has at least a part of an 'shape. The method according to claim 1,
Wherein the guide plate has a first guide portion having a height increasing toward a front side; And
And a second guide portion formed symmetrically with respect to the first guide portion and having a height increasing toward the rear side. The method according to claim 1,
And a guide surface for guiding a part of the evaporation material to the front and the back is formed on a lower surface of the guide plate. 10. The method of claim 9,
Wherein the guide surface is inclined upwards and downward at a central portion of the guide plate. The method according to claim 1,
Wherein the front and rear ends of the guide plate are spaced apart from the inner wall of the upper crucible. The method according to claim 1,
And a pair of support plates for supporting the guide plate are spaced apart from each other between the guide plate and the lower crucible. 13. The method of claim 12,
Wherein the guide plate is supported by a plurality of support legs provided on the support plate. A deposition apparatus for forming an organic thin film on a substrate,
A vacuum chamber in which the substrate is seated; And
The evaporation apparatus according to any one of claims 1 to 13, which is disposed inside the vacuum chamber so as to face the substrate, and supplies evaporation material for forming the organic thin film.

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