KR20150065454A - Bellows - Google Patents

Abstract

The present invention relates to a bellows for moving a caustic-harmful gas. The bellow for moving the caustic-harmful gas comprises: a bellows surface; an organic compound monomer deposited on the bellows surface in a vacuum through a CVD chamber; a polyimide coating layer in which polyimide is coated on the deposited bellows surface through CVD vacuum deposition; and a Nix coating layer in which Nix is coated on the polyimide coating layer through the CVD vacuum deposition. According to the present invention, the bellows is to prevent the attachment of caustic powder, a metal burr, etc. to a curved wrinkle part composed of a metal material by coating Nix and PI having an antistatic characteristic on the bellows and to control the progress of corrosion by caustic gas, etc.

Description

Bellows {BELLOWS}

The present invention relates to a bellows, and more particularly, to a bellows having high corrosion resistance against corrosive noxious gas.

Generally, a semiconductor device is manufactured by a film forming process, a photolithography process, an impurity implantation process, a metal process, etc., and the unit processes for manufacturing such a semiconductor device are mainly performed in a vacuum chamber.

The process atmosphere in the vacuum chamber must be maintained in a stable vacuum state and the driving devices operating in the chamber are externally powered and therefore sealing is required at the portions where these driving devices are inserted.

In addition, a sealed sealing is required in the connection structure with the vacuum pump as well as with the vacuum chamber.

Here, the bellows is the most frequently applied component to keep the vacuum chamber sealed in the piping by the vacuum pump as described above.

The bellows is most widely used because it can not only expand and contract but also keep the airtightness of the inside of the bellows secure even if a twist occurs.

Here, the bellows should be installed between the pipe-to-pipe or pipe-to-pipe where flow is required, and should be formed of a flexible material for flexibility.

Particularly, in the semiconductor, LCD process, LED process, etc., the airtightness is particularly important because noxious gas having high corrosiveness is used.

However, the conventional bellows formed of a metal material has a high strength, but has a problem in that corrosive noxious gas flowing causes corrosion.

Particularly, when the powder of the corrosive gas, the metal bur, or the like is permeated into the corrugated portion due to the morphological characteristics of the bellows, corrosion is rapidly progressed and the corrosive noxious gas is leaked.

Korean Patent Publication No. 10-2004-0003334

An object of the present invention is to provide a bellows having high corrosion resistance against corrosive noxious gas.

A bellows for flowing corrosive noxious gas according to one aspect of the present invention, comprising: a bellows surface; An organic compound monomer vapor-deposited on the bellows surface through a CVD chamber; A polyimide-coated polyimide coating layer on the deposited bellows surface by CVD vacuum deposition; And a knuckle coating layer knocked on the surface of the polyimide coating layer by CVD vacuum deposition.

A bellows for flowing corrosive noxious gas according to another aspect of the present invention, comprising: a bellows surface; An organic compound monomer vapor-deposited on the bellows surface through a CVD chamber; A nitric coating layer on the deposited bellows surface by CVD vacuum deposition; And a polyimide-coated polyimide coating layer on the surface of the nitric oxide coating layer by CVD vacuum deposition.

The organic compound monomer is characterized by using at least one compound selected from alkylsilane, alkyltrialkoxysilane, alkoxysilane, aminoalkyltrialkoxysilane and mercaptoalkylalkoxysilane.

The bellows according to the present invention is provided with a knuckle and PI coating having an uninterruptive characteristic on the surface to prevent a corrosive powder or a metal bur from adhering to a folded wrinkle portion of a metal material, There is an effect of suppressing.

1 is a flowchart of a knock and PI coating method according to an embodiment of the present invention
2 is a flow chart of a knock and PI coating method according to the second embodiment of the present invention
3 is a cross-sectional view of a conventional bellows
Figure 4 is a cross-sectional view of a bellows < RTI ID = 0.0 >

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. Even if the terms are the same, it is to be noted that when the portions to be displayed differ, the reference signs do not coincide.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

The terms first, second, etc. in this specification may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. And / or < / RTI > includes any combination of a plurality of related listed items or any of a plurality of related listed items.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the relevant art and are to be interpreted in an ideal or overly formal sense unless explicitly defined in the present application Do not.

Also, when a part is referred to as "including " an element, it does not exclude other elements unless specifically stated otherwise.

FIG. 1 is a flow chart of a knock and PI coating method according to an embodiment of the present invention, FIG. 2 is a flowchart of a knock and PI coating method according to a second embodiment of the present invention, FIG. 3 is a photograph showing a conventional bellows And Fig. 4 is a photograph showing a bellows according to an embodiment of the present invention.

As shown in the figure, the bellows according to the present embodiment is manufactured by stepping a thin metal thin plate formed to a thickness of 0.005 to 2.2 mm into a cylindrical shape, welding it continuously by welding it, It is a corrugated pipe.

In this case, when the powder of the corrosive gas or the metal bur is penetrated into the inside of the wrinkle part due to the morphological characteristics of the bellows, the corrosion rapidly proceeds. In this embodiment, the coating with the non- And improves durability due to corrosive gas.

First, a cleaning process (or a vacuum cleaning process) for removing contaminants from the bellows is performed. Here, the washing process may be performed through a detergent such as alcohol, or ultrasonic cleaning may be performed through isopropyl alcohol or the like.

At this time, the bellows may be formed of a metal material, and the metal material may be aluminum, stainless steel, or the like (S110).

Thereafter, the organic compound monomer is injected onto the bellows (or at least part of the surface of the bellows (not shown) by a pretreatment process / operation (or primer) through a CVD (Chemical Vapor Deposition) ) Or vacuum vapor deposition (or CVD vacuum deposition).

That is, in the CVD chamber in which the bellows is accommodated, at least one liquid organic compound monomer is injected into the CVD chamber in a gaseous state and is deposited on the surface of the bellows in the range of 10 mTorr to 100 mTorr.

The organic compound monomer may be at least one selected from the group consisting of alkylsilane, alkyltrialkoxysilane, alkoxysilane, aminoalkyltrialkoxysilane, and mercaptoalkylalkoxysilane. One compound can be used. At this time, the bellows surface may be the entire surface of the bellows, or at least one surface of the bellows.

In one embodiment, the organic compound monomer is vacuum deposited on the surface of the bellows by CVD vacuum deposition through the CVD chamber (S120).

Thereafter, the pretreated bellows is subjected to PI coating (polyimide coating) by CVD vacuum deposition through the CVD chamber. At this time, when the PI coating layer (or PI coating film / insulating coating film) is formed, the PI coating layer may be formed on the pretreated bellows through a spraying method or a wetting method as well as the CVD vacuum deposition method It is possible.

That is, polyimide (PI) is vacuum vapor deposited on the entire surface or at least one surface of the pretreated bellows through the CVD chamber.

For example, the PI coating layer is formed on the surface of the pretreated bellows (S130).

Then, the bellows on which the PI coating layer is formed is NIX coated (or dimerized) by CVD vacuum deposition. The dimers used in the nick coating include poly (para-xylene), poly (chloro-para-xylylene), poly (di-chloro-para-xylylene ) And poly (tetrafluoro- [2,2] para-Xylylene)), and the like. The thickness of the nickle coating layer (or the nickle coating layer) formed by the nick coating may be in the range of about 1 μm to 70 μm, and may be variously set according to the design of the designer in consideration of the use of the bellows. have.

That is, when the solid-state dimer is installed in a vaporizer (not shown) and the pressure is adjusted to a predetermined level (for example, about 1 Torr) and heated to a predetermined temperature (for example, 170 ° C to 200 ° C) , The solid-state dimer is vaporized and dimer gas is generated.

Then, the vaporized dimer gas is decomposed into monomers by passing through a pyrolysis (not shown) maintained at 650 ° C to 700 ° C and a pressure of 0.5 Torr.

Thereafter, the thermally decomposed monomer is deposited (or laminated / condensed) in a polymer state on the bellows surface on which the PI coating layer is formed (or deposited) in the CVD chamber controlled at a room temperature and 10 mTorr to 100 mTorr pressure, (Or a Knicks coating / Knicks polymer / Knicks coating film) is formed.

For example, the nick coating layer is formed on the PI coating layer.

As described above, since the coating of the nicks polymer (or the paraline polymer) is performed at room temperature or vacuum, it is possible to prevent the deformation of the base material due to thermal stress and uniformly coat not only the side surface of the base material but also the fine uneven portion .

In addition, by the nick coating, the chemical resistance, heat resistance and water resistance can be improved (S140).

Although the PI coating layer and the nitric oxide coating layer are sequentially formed on the bellows in the above embodiment, the nit coating layer may not be formed.

That is, the PI coating layer may be formed on the bellows surface, which is one example of the bellows.

Hereinafter, a knock and PI coating method according to the second embodiment of the present invention will be described.

First, a cleaning process (or a vacuum cleaning process) is performed to remove contaminants on the surface of the bellows. Here, the cleaning process may be performed through a cleaning agent such as alcohol, or ultrasonic cleaning may be performed through isopropyl alcohol or the like.

For example, the cleaning process is performed on the bellows. At this time, the bellows may be formed of a metal material, and the metal material may be aluminum, stainless steel, etc. (S210)

The organic compound monomer is then vacuum vapor deposited (or CVD vacuum evaporated) onto the bellows (or at least a part of the surface of the bellows) by a pretreatment process / operation (or primer) through a CVD chamber (not shown) do.

That is, in the CVD chamber in which the bellows is accommodated, at least one liquid organic compound monomer is injected into the CVD chamber in a gaseous state and is deposited on the surface of the bellows in the range of 10 mTorr to 100 mTorr.

The organic compound monomer may be at least one compound selected from among alkylsilane, alkyltrialkoxysilane, alkoxysilane, aminoalkyltrialkoxysilane, and mercaptoalkylalkoxysilane. At this time, the bellows surface may be the entire surface of the bellows, or at least one surface of the bellows.

In one embodiment, the organic compound monomer is vacuum deposited on the surface of the bellows by CVD vacuum deposition through the CVD chamber (S220).

Thereafter, the pretreated bellows is NIX coated (or diminished) by CVD vacuum deposition. At this time, at least one dimer may be used among the dimers used in the nick coating, such as paralin N, paralin C, paralin D, and paralin F. The thickness of the nickle coating layer (or the nickle coating layer) formed by the nick coating may range from about 1 μm to 70 μm, and may be variously set according to the design of the designer in consideration of the use of the bellows. .

That is, when the solid-state dimer is installed in an evaporator (not shown) and the pressure is adjusted to a predetermined level (for example, about 1 Torr) and heated to a predetermined temperature (for example, 170 ° C to 200 ° C) The solid-phase dimer is vaporized and dimer gas is generated.

Thereafter, the vaporized dimer gas is decomposed into monomers by passing through a pyrolyzer (not shown) maintained at 650 ° C to 700 ° C and a pressure of 0.5 Torr. Thereafter, the pyrolyzed monomer is deposited (or laminated / condensed) in a polymer state on the surface of the bellows on which the organic compound monomer is deposited in the CVD chamber controlled at a normal pressure of 10 mTorr to 100 mTorr, (Or Knicks coating / Knicks polymer / Knicks coating film).

For example, the nickle coating layer is formed on the surface of the pretreated bellows (S230).

Then, the bellows in which the nickle coating layer is formed is PI-coated by CVD vacuum deposition through the CVD chamber.

At this time, when the PI coating layer (or the PI coating layer) is formed, the PI coating layer may be formed on the bellows in which the nickle coating layer is formed, not only by the CVD vacuum deposition but also by a spraying method or a wetting method.

That is, polyimide (PI) is vacuum vapor deposited on the entire surface or at least one surface of the bellows on which the nickle coating layer is formed through the CVD chamber.

For example, the PI coating layer is formed on the Knicks coating layer (S240).

As described above, the embodiments of the present invention can improve the chemical resistance, heat resistance, and water resistance of the bellows and / or enhance the application temperature range by performing a NIX and / or PI coating process (or a dimer process) .

Also, as described above, the embodiments of the present invention can be achieved by forming a nick coating layer and / or a PI coating layer on an arbitrary part by CVD vacuum deposition to form a uniform coating layer, a low friction coefficient, an uninterruptible characteristic, (For example, characteristics that are not affected by physical changes such as shrinkage, swelling, and refraction), semi-permanent usage characteristics, and the like, and the reliability of the product can be improved.

Thus, as described above, the bellows in which the nickle coating layer or the PI coating layer is formed can be installed in a space where the corrosive fluid is used.

In particular, as in the present embodiment, since the bellows in which the nit coating layer or the PI coating layer is formed through the vapor deposition is uniformly coated even in a narrow space, the durability can be further improved.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims. It will be possible.

Claims (3)

In a bellows for flowing corrosive noxious gas,
Bellows surface;
An organic compound monomer vapor-deposited on the bellows surface through a CVD chamber;
A polyimide-coated polyimide coating layer on the deposited bellows surface by CVD vacuum deposition; And
A knuckle coating layer knocked on the surface of the polyimide coating layer by CVD vacuum deposition.
In a bellows for flowing corrosive noxious gas,
Bellows surface;
An organic compound monomer vapor-deposited on the bellows surface through a CVD chamber;
A nitric coating layer on the deposited bellows surface by CVD vacuum deposition; And
A polyimide coating layer formed on the surface of the nickle coating layer by CVD vacuum vapor deposition;
The method according to claim 1 or 2,
Wherein the organic compound monomer is at least one compound selected from alkylsilane, alkyltrialkoxysilane, alkoxysilane, aminoalkyltrialkoxysilane and mercaptoalkylalkoxysilane.

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