KR20140103321A - 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법 - Google Patents

경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법 Download PDF

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Publication number
KR20140103321A
KR20140103321A KR1020147019195A KR20147019195A KR20140103321A KR 20140103321 A KR20140103321 A KR 20140103321A KR 1020147019195 A KR1020147019195 A KR 1020147019195A KR 20147019195 A KR20147019195 A KR 20147019195A KR 20140103321 A KR20140103321 A KR 20140103321A
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KR
South Korea
Prior art keywords
passes
laser
pattern
diameter
elastomeric material
Prior art date
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Ceased
Application number
KR1020147019195A
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English (en)
Korean (ko)
Inventor
엠 셰인 노엘
토드 씨 세코이
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
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Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20140103321A publication Critical patent/KR20140103321A/ko
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/388—Trepanning, i.e. boring by moving the beam spot about an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Laser Beam Processing (AREA)
KR1020147019195A 2011-12-20 2012-12-19 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법 Ceased KR20140103321A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/331,472 US9289858B2 (en) 2011-12-20 2011-12-20 Drilling holes with minimal taper in cured silicone
US13/331,472 2011-12-20
PCT/US2012/070470 WO2013096372A1 (en) 2011-12-20 2012-12-19 Drilling holes with minimal taper in cured silicone

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020207015428A Division KR102240327B1 (ko) 2011-12-20 2012-12-19 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법

Publications (1)

Publication Number Publication Date
KR20140103321A true KR20140103321A (ko) 2014-08-26

Family

ID=48609323

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020147019195A Ceased KR20140103321A (ko) 2011-12-20 2012-12-19 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법
KR1020207015428A Expired - Fee Related KR102240327B1 (ko) 2011-12-20 2012-12-19 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020207015428A Expired - Fee Related KR102240327B1 (ko) 2011-12-20 2012-12-19 경화된 실리콘에 테이퍼를 최소화한 구멍을 천공하는 방법

Country Status (6)

Country Link
US (1) US9289858B2 (cg-RX-API-DMAC7.html)
JP (1) JP6433295B2 (cg-RX-API-DMAC7.html)
KR (2) KR20140103321A (cg-RX-API-DMAC7.html)
CN (1) CN104010760B (cg-RX-API-DMAC7.html)
TW (1) TWI623368B (cg-RX-API-DMAC7.html)
WO (1) WO2013096372A1 (cg-RX-API-DMAC7.html)

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JP2014130962A (ja) * 2012-12-28 2014-07-10 Ibiden Co Ltd キャビティの形成方法、キャビティの形成装置、プログラム、配線板の製造方法、及び配線板
US9414498B2 (en) * 2013-09-20 2016-08-09 Coherent, Inc. Via-hole drilling in a printed circuit board using a carbon monoxide laser
US9950392B2 (en) 2014-03-04 2018-04-24 Rohr, Inc. Forming one or more apertures in a fiber-reinforced composite object with a laser
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US10274806B2 (en) 2015-11-06 2019-04-30 Coherent, Inc. Pulse-dividing method and apparatus for a pulsed carbon monoxide laser
US10423047B2 (en) 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
US10592006B2 (en) 2017-01-13 2020-03-17 Microsoft Technology Licensing, Llc Pattern for increased coefficient of friction of input devices
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CN113523613B (zh) * 2020-04-29 2023-10-24 中国科学院宁波材料技术与工程研究所 激光加工锥孔的装置和方法
JP7427248B2 (ja) * 2020-07-21 2024-02-05 Uht株式会社 レーザー加工方法及びレーザー加工装置
CN113441852B (zh) * 2021-06-24 2022-07-19 中国科学院西安光学精密机械研究所 一种激光螺旋扫描盲孔制造方法
DE102021005297A1 (de) 2021-10-25 2023-04-27 TRUMPF Werkzeugmaschinen SE + Co. KG Verfahren zur Erzeugung angesenkter Löcher
CN114833472A (zh) * 2022-05-26 2022-08-02 苏州思萃声光微纳技术研究所有限公司 用于航空发动机火焰筒的无锥度冷却气膜孔激光加工方法
DE102022124202A1 (de) * 2022-09-21 2024-03-21 TRUMPF Werkzeugmaschinen SE + Co. KG Stanz-Laser-Kombinationsverfahren und Stanz-Laser-Kombinationsmaschine zum Bearbeiten eines Werkstücks sowie Computerprogramm und computerlesbares Speichermedium
CN116833594A (zh) * 2023-08-01 2023-10-03 泰州职业技术学院 雾化器金属基片的微锥孔激光加工方法
CN117444429A (zh) * 2023-12-25 2024-01-26 西安晟光硅研半导体科技有限公司 一种基于微射流技术螺旋加工孔的工艺方法

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Also Published As

Publication number Publication date
US20130154159A1 (en) 2013-06-20
JP6433295B2 (ja) 2018-12-05
WO2013096372A1 (en) 2013-06-27
TW201334905A (zh) 2013-09-01
CN104010760A (zh) 2014-08-27
TWI623368B (zh) 2018-05-11
JP2015506276A (ja) 2015-03-02
US9289858B2 (en) 2016-03-22
KR102240327B1 (ko) 2021-04-14
KR20200065097A (ko) 2020-06-08
CN104010760B (zh) 2016-10-05

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