KR20140034874A - Adsorption device and processing device - Google Patents

Adsorption device and processing device Download PDF

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Publication number
KR20140034874A
KR20140034874A KR1020137034905A KR20137034905A KR20140034874A KR 20140034874 A KR20140034874 A KR 20140034874A KR 1020137034905 A KR1020137034905 A KR 1020137034905A KR 20137034905 A KR20137034905 A KR 20137034905A KR 20140034874 A KR20140034874 A KR 20140034874A
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South Korea
Prior art keywords
adsorption
film material
gas supply
regions
adsorbed
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KR1020137034905A
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Korean (ko)
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타츠로 마츠시마
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가부시끼가이샤 니혼 세이꼬쇼
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Publication of KR20140034874A publication Critical patent/KR20140034874A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • B65H23/245—Suction retarders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/17—Nature of material
    • B65H2701/175—Plastic
    • B65H2701/1752—Polymer film

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

(EN) Provided are an adsorption apparatus capable of simply adsorbing and fixing an adsorbent having a different size at a high working efficiency, and a treatment apparatus provided with the adsorption apparatus.
The adsorption unit 61 is divided into a plurality of adsorption regions 62a to 62d capable of performing adsorption operations independently of each other Vacuum evacuation lines 13a to 13d and gas supply lines 16a to 16d are communicably connected to the respective adsorption regions 62a to 62d and vacuum evacuation lines 13a to 13d and gas supply lines 16a Closing valves 14a to 14d and 17a to 17d, respectively.

Figure P1020137034905

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an adsorption apparatus,

The present invention relates to an adsorption apparatus for adsorbing an adsorbent to be adsorbed and a treatment apparatus for performing a predetermined treatment on the adsorbent adsorbed on the adsorbent apparatus.

[0003] When a treatment such as a film material and a sheet paper is subjected to treatment such as laser machining, the object to be treated is adsorbed and fixed on the sample surface by differential pressure (see, for example, Patent Documents 1 to 4). When the object to be processed having a different size is to be adsorbed to the sample table, the sample table may be changed to a size suitable for the size of the object to be processed, or a sample bed of a size appropriate for the object to be processed And an unused adsorption region is covered with a sealing material or the like depending on the size of the object to be processed (see, for example, Patent Document 1).

Fig. 3 is a schematic view showing the adsorption area variable apparatus described in Patent Document 1. Fig.

A plurality of through holes (not shown) are formed in the painting table 101 on which the object 110 is placed. A roll screen 102 in the width direction (X-axis direction) in which a plurality of through holes formed in the drawing table 101 are covered is provided on the Y-axis direction side surface of the drawing table 101. The roll screen 102 is wound with a non-breathable seal material, and a fixing bar 103 for pulling out the seal material is attached to the exit screen. On both sides of the painting table 101, a fixing pin 104 for holding the fixing bar 103 is protruded to stop the sealing material drawn from the roll screen 102.

The lower portion of the painting table 101 is a box formed so as to prevent air leakage. The inside of the box is divided into two chambers by a seal plate 105 sliding in the X-axis direction. A transparent window 111 is formed on the side of the drawing table 101 so that the seal plate 105 in the box can be seen with the naked eye. The seal plate 105 is configured to be movable in the X-axis direction by rotating the handle 106 provided in the box.

An air outlet 107 for sucking in air inside the box is formed below the object 110 to be rendered on the drawing table 101. An adsorption device 108 is connected to the exhaust port 107 through a hose 109.

In the adsorption area variable apparatus shown in Fig. 3, the object 110 to be imaged is fixed on the imaging table 101 as follows.

First, the object to be rendered 110 is placed on the drawing table 101. The fixing bar 103 is fixed to the fixing pin 104 to cover the through hole with the roll screen 102 so that the through hole that can not be completely blocked by the object 110 to be imaged becomes the position where the roll screen 102 covers.

On the other hand, when the seal plate 105 is viewed from the transparent window 111 provided in the drawing table 101, the seal plate 105 is disposed with the handle 106 so that the seal plate 105 is disposed on the end face of the object 110 ).

Subsequently, air in the drawing table 101 on the opposite side of the handle 106 is exhausted through the adsorption apparatus 108 with the seal plate 105 interposed therebetween. In this way, the object 110 is fixed by the atmospheric pressure and the pressure difference between the negative pressure inside the painting table 101.

In the case of fixing the object 110 with a different size, the object 110 is fixed by covering the through hole which can not be completely covered with the object 110 in the above-described order.

Japanese Patent Application Laid-Open No. 11-26912 Japanese Patent Application Laid-Open No. 2001-199574 Japanese Patent Application Laid-Open No. 2005-189365 Japanese Patent Laid-Open No. 9-76088

However, there is a problem in that the working efficiency is lowered when the unused adsorption region is covered with a sealing material or the like every time the object to be processed having different sizes is adsorbed and fixed as described above. In addition, there is also a problem that the working efficiency is similarly lowered when the sample stand itself is changed in accordance with the size of the object to be processed.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide an adsorption apparatus capable of simply adsorbing and fixing an adsorbent having a different size at a high working efficiency and a processing apparatus equipped with the adsorption apparatus .

That is, the first invention among the adsorption apparatuses of the present invention is characterized in that the adsorber has an adsorption section for adsorbing an object to be adsorbed by differential pressure, and the adsorption section is divided into a plurality of adsorption regions independently capable of adsorption operation.

In the adsorption apparatus of the second aspect of the present invention, in the first aspect of the present invention, the vacuum exhaust line and the gas supply line are connected to each of the adsorption regions so that the vacuum exhaust line and the gas supply line are openable and closable Is installed.

In the adsorption device of the third aspect of the present invention, in the second aspect of the present invention, the adsorption section is characterized in that a plurality of ventilation holes for adsorption are formed in the respective adsorption regions.

The adsorption device of the fourth aspect of the present invention is the adsorber according to the third aspect of the present invention, wherein a plurality of compartment portions communicating with the plurality of ventilation holes are provided for each of the adsorption regions, and the vacuum exhaust line and the gas supply line are communicated with the plurality of ventilation holes And is communicably connected to the adsorption region through the compartment portion.

The adsorption device of a fifth aspect of the present invention is the adsorption device according to any one of the first to fourth aspects of the present invention, wherein the adsorption section is provided in an adsorbent table detachably mounted on the base.

The adsorption device of a sixth aspect of the present invention is the adsorption device according to the fifth aspect of the present invention, wherein the base comprises a suction-adsorption part for adsorbing and fixing the adsorption block by differential pressure.

A seventh aspect of the present invention is the adsorption device according to any one of the first to sixth aspects of the present invention, wherein the responder is a film material.

An adsorption device according to an eighth aspect of the present invention is the adsorption device according to the seventh aspect of the present invention, wherein the film material has a shape of an elongated band and is intermittently conveyed along the elongated direction, And the plurality of adsorption regions are arranged in a direction orthogonal to the transport direction and are arranged along the transport direction.

The treatment apparatus of the ninth aspect of the present invention comprises one of the adsorption apparatuses of the first to eighth inventions,

And a processing section for performing a predetermined process on the respiratory organs adsorbed on the adsorption section.

The processing apparatus of a tenth aspect of the present invention is the laser processing unit of the ninth aspect of the present invention, wherein the processing unit is a laser processing unit for performing laser processing on the respiratory member.

That is, according to the present invention, since the adsorbing portions for adsorbing the respiratory complex by the differential pressure are divided into a plurality of adsorbing regions capable of independently performing the adsorption operation, adsorption required for adsorbing the adsorbing complex among the plurality of adsorbing regions It is possible to perform only the adsorption operation.

Therefore, when the adsorbent to be adsorbed is changed to have a different size, the size of the adsorbent can be easily changed by appropriately changing the adsorbing region to be adsorbed according to the size of the adsorbent. Unlike the conventional adsorption apparatus, in the adsorption apparatus of the present invention, it is not necessary to cover an area unnecessary for adsorption of an object to be adsorbed by the adsorption section with another sealant or the like.

The number of adsorption regions for partitioning the adsorbing portion may be two or more, and the number of the adsorption regions is not limited in the present invention. In addition, the size and shape of the adsorption region are not particularly limited, and may be different in size or shape in each adsorption region. The one adsorption region where the adsorption operation is performed may be contiguous in the surface direction, and may exist apart from other adsorption regions.

In addition, when the adsorbent has a long shape as described later, the adsorption region is elongated in the longitudinal direction in which the adsorbate is disposed, and the adjacent adsorption regions are juxtaposed in a direction orthogonal to the longitudinal direction have. According to this arrangement, even when the width of an elongated shaped respiratory complex is different, it is possible to easily cope with the change by changing the number of suction regions for performing the suction operation.

As the constitution of adsorbing the respiratory complex by the adsorbing portion, it is possible to use a construction in which a vacuum exhaust line provided with an on-off valve is connected to each of the plurality of adsorption regions in a communicable manner. Since a plurality of vacuum exhaust lines are provided with respective opening / closing valves, they can be connected to a common vacuum pump. In this case, the opening / closing valve of the vacuum exhaust line connected to the suction region necessary for adsorbing the object to be adsorbed may be opened and the opening / closing valve of the other vacuum exhaust line may be closed. Further, the opening / closing valve of the gas supply line, which will be described later, connected to the adsorption region where at least adsorption is performed, is closed. As a result, only the adsorption region required for adsorption of the object to be adsorbed is evacuated through the vacuum exhaust line opened with the open / close valve, thereby generating the differential pressure and adsorbing the object to be adsorbed. It is also possible to release the gas for the atmosphere by opening the gas supply line opening / closing valve in the adsorption region where no adsorption is performed.

The degree of vacuum at the time of vacuum evacuation can be appropriately set in accordance with the attraction force required for adsorbing the adsorbent.

The opening and closing of the opening and closing valve of the vacuum exhaust line may be performed manually by the operator or automatically by the control section depending on the size of the respiratory complex.

As a configuration for releasing the adsorption of the respiratory receptacle adsorbed to the adsorption section, a configuration in which a gas supply line provided with an on-off valve is connected to each of the plurality of adsorption areas in a communicable manner can be used. Since a plurality of gas supply lines are each provided with an on-off valve, a common gas supply source can be connected. In this case, the opening / closing valve of the vacuum exhaust line is closed and the opening / closing valve of the gas supply line connected to the adsorption region adsorbed by the adsorbent is closed, and the opening / closing valve of the other gas supply line is closed. Thus, the gas can be supplied only to the adsorption region adsorbed by the adsorbed material through the gas supply line opened with the open / close valve, thereby canceling the differential pressure and releasing the adsorption of the adsorbed object.

It is preferable that the gas supplied to release the adsorption does not affect the respiratory complex, and for example, an inert gas such as nitrogen gas, argon gas, or air such as clean dry air may be used.

The opening and closing of the opening and closing valve of the gas supply line may be performed manually by the operator or automatically by the control unit depending on the size of the respiratory complex.

The adsorption portion may be formed with a plurality of ventilation holes for adsorption in each adsorption region. As the ventilation hole for adsorption, any type of ventilation hole may be used as long as it can generate a differential pressure for adsorbing the respiratory complex.

For example, the support itself on which the adsorbate is supported may be made of a porous material, and the pores of the porous material may be used as a ventilation hole for adsorption. It is not necessary to separately form a plurality of through holes or the like that penetrate the support portion as the ventilation holes for adsorption by using the pores of the porous material as the ventilation holes for adsorption. Therefore, even if the adsorbed material can be easily deformed as a film material or the like, it is possible to maintain the flatness of the adsorbed film material and easily maintain the shape of the target object.

Further, a plurality of through holes may be used as the air vent holes for adsorption, which pass through the support body on which the adsorbent is supported. The bore diameter of the through hole can be appropriately set in accordance with the size, rigidity, and the like of the respiratory complex.

The plurality of ventilation holes can be provided with a compartment communicating with the ventilation hole in each adsorption region and the vacuum exhaust line and the gas supply line can be connected to the adsorption region via the plurality of ventilation holes and the compartment portion. In this case, the evacuation of the adsorption region through the vacuum evacuation line is performed through the compartment and the plurality of vent holes. Further, supply of the gas to the adsorption region through the gas supply line is performed through the compartment portion and the plurality of vent holes.

The adsorption unit may be provided in an adsorbent table detachably mounted on the base. Since the adsorption unit provided with the adsorption unit is detachably provided on the base, the adsorption unit can be easily exchanged. Thus, a plurality of adsorbing beds having different sizes of the adsorbing portion are prepared, and in the case of an adsorbing body of a size that can not be coped with by a change in the adsorbing region to be operated for adsorption, the adsorbing portion having a size capable of coping with the size of the adsorbing body is adsorbed . Thus, it is possible to easily deal with an absorbing body of a size that can not cope with a change of the suction region to be operated by suction.

The base on which the adsorption bands are removably installed may be provided with a suction bands adsorption section for adsorbing and fixing the adsorption bands by differential pressure. Vacuum exhaust lines and gas supply lines can be connected to the adsorbing-adsorbing section so as to be able to communicate with each other, and on-off valves can be provided on each line.

In this case, when the adsorption column is installed and fixed to the base, the open / close valve of the gas supply line is closed, the valve of the vacuum exhaust line is opened, and the adsorption adsorption unit is evacuated through the vacuum exhaust line to generate the differential pressure And adsorbs the adsorbent. In addition, in the case of releasing the attachment / detachment of the adsorption band, the opening / closing valve of the vacuum exhaust line is closed, the opening / closing valve of the gas supply line is opened, and the gas is supplied to the adsorption / Release the installation of the adsorption band.

The object to be adsorbed in the adsorption device of the present invention is not particularly limited as long as it can be adsorbed by differential pressure. As the respiratory complex, for example, a film, a sheet, a plate, or the like can be mentioned, and a film material can be mentioned as a suitable respiratory complex.

The shape and other forms of the film material as the respiratory complex are not particularly limited. For example, the film material has a shape of a long band shape and is intermittently conveyed along the longitudinal direction. The film material that is intermittently conveyed can be adsorbed on the adsorption section and released therefrom. In this case, the plurality of adsorption regions are arranged in a direction orthogonal to the transport direction of the film material, and can be partitioned so as to be disposed along the transport direction.

The adsorption device of the present invention can constitute a treatment device in addition to a treatment section that performs a predetermined treatment on the respiratory organs adsorbed by the adsorption device.

The content of the treatment in the treatment section is not particularly limited to the present invention, but can be exemplified by, for example, laser treatment such as drawing, cutting, or puncturing by the laser light on the respiratory organs.

(Effects of the Invention)

Industrial Applicability As described above, according to the present invention, there is provided an adsorption section for adsorbing an object to be adsorbed by differential pressure, and the adsorption section is divided into a plurality of adsorption regions capable of independently performing adsorption, It can be simply adsorbed and fixed.

1 is a schematic plan view showing an adsorption apparatus according to an embodiment of the present invention.
2 is a schematic front view showing an adsorption apparatus according to an embodiment of the present invention.
3 is a schematic view showing a conventional adsorption area variable apparatus.

An adsorption apparatus according to an embodiment of the present invention will be described with reference to Figs. 1 and 2. Fig. Fig. 1 is a plan view showing the adsorption apparatus of the present embodiment, and Fig. 2 is a front view showing a laser processing apparatus including the adsorption apparatus of the present embodiment.

The adsorption apparatus 3 of the present embodiment is provided in the laser processing apparatus 1 for performing laser processing on the film material 2 and adsorbs and fixes a film material to be subjected to laser processing. The laser processing apparatus 1 is also an embodiment of the processing apparatus of the present invention.

2, the laser machining apparatus 1 is provided with an adsorption apparatus 3 for adsorbing and fixing the film material 2 and a film material 2 adsorbed and fixed on the adsorption apparatus 3, And a laser machining section 4.

The adsorption apparatus 3 has a flat base 5 and a rectangular parallelepiped adsorption table 6 detachably mounted on the base 5.

The base 5 has a hollow portion 51 on the inner side and one end of the vacuum exhaust line 7 penetrating from the outer side of the base 5 to the inside is connected to the cavity portion 51. The vacuum exhaust line 7 is provided with an on-off valve 8 and a vacuum pump 9 connected to the other end thereof.

One end of a gas supply line 10 penetrating from the other side of the base 5 to the inside is connected to the cavity portion 51. The gas supply line 10 is provided with an on-off valve 11 and a vacuum pump 12 connected to the other end thereof.

On the upper surface of the base 5, a suction pad suction portion 52 for suctioning the suction pad 6 by differential pressure is provided on the surface of the base 5 so as to be exposed. A plurality of ventilation holes (not shown) for adsorption are formed in the adsorption bag adsorption portion 52 and open on the upper surface of the adsorption bag adsorption portion 52 so as to communicate with the cavity portion 51.

The plurality of vent holes of the adsorbing-adsorbing portion 52 are preferably evenly arranged in the plane direction. It is also possible to constitute a region where the adsorbing-adsorbing portion 52 is provided on the upper surface portion of the base 5 as a porous material and a plurality of ventilation holes of the adsorbing-adsorbing portion 52 by the pores of the porous material You may.

A suction portion 61 for suctioning the film material 2 by differential pressure is provided on the upper surface of the adsorption table 6 so as to be exposed on the surface of the adsorption table 6 and the adsorption portion 61 independently performs a suction operation And is divided into four possible adsorption regions 62a, 62b, 62c, and 62d.

The adsorption portion 61 has a rectangular shape and its upper surface is flat. The adsorption regions 62a, 62b, 62c and 62d are divided into a plurality of sections in the short side direction of the adsorption section 61. The longitudinal direction of the adsorption section 61 is defined as So that it extends over the entire length of the adsorption section 61. [ In this embodiment, the adsorption regions 62a, 62b, 62c, and 62d have the same shape. However, the present invention does not require that each adsorption region has the same shape.

The adsorption column 6 has compartment portions 63a, 63b, 63c and 63d inside corresponding to the adsorption regions 62a, 62b, 62c and 62d. Each of the adsorption regions 62a to 62d is provided with a plurality of ventilation holes (not shown) for adsorption so as to open to the outside of the adsorption regions 62a to 62d and to communicate with the compartment portions 63a to 63d . The adsorption region 62a communicates only with the compartment 63a by the ventilation hole and the adsorption region 62b communicates with the compartment 63b only by the ventilation hole, And only the compartment 63c is communicated by the hole, and the suction area 62d is communicated only with the compartment 63d by the ventilation hole.

The adsorption portion 61 is made of a porous material, and the air holes are formed by the pores of the porous material. Since the adsorption portion 61 is made of a porous material, the film material 2 is adsorbed with a good flatness, and laser machining can be performed with higher precision. It is also possible to configure the plurality of through holes of the respective adsorption regions 62a to 62d to be uniformly arranged in the surface direction without forming the adsorption unit 61 as a porous material.

One ends of the vacuum exhaust lines 13a to 13d penetrating from the outside of the short side outer wall of the adsorption section 61 to the adsorption section 61 are connected to the compartment portions 63a to 63d, respectively.

That is, the vacuum exhaust line 13a is connected to the compartment 63a, the vacuum exhaust line 13b is connected to the compartment 63b, the vacuum exhaust line 13c is connected to the compartment 63c, And a vacuum exhaust line 13d is connected to the compartment 63d.

The vacuum exhaust lines 13a to 13d are provided with open / close valves 14a to 14d, respectively, and a common vacuum pump 15 is connected to the other end. A common vacuum pump may be used as the vacuum pump 15 and the vacuum pump 9.

One ends of the gas supply lines 16a to 16d penetrating from the outside of the short side outer side wall of the adsorption section 61 to the adsorption section 61 are connected to the compartment portions 63a to 63d, respectively. That is, the gas supply line 16a is connected to the compartment 63a, the gas supply line 16b is connected to the compartment 63b, the gas supply line 16c is connected to the compartment 63c, And the gas supply line 16d is connected to the compartment 63d.

The gas supply lines 16a to 16d are provided with open / close valves 17a to 17d, respectively, and a common gas supply source 18 is connected to the other end thereof. A common gas supply source may be used as the gas supply source 18 and the gas supply source 12.

A film conveying roller 19a and a conveying roller 19b for conveying the film material 2 intermittently along the longitudinal direction are provided on both sides of the adsorption column 6, Respectively. The conveying rollers 19a and 19b can convey the film material 2 so as to pass on the attracting portion 61 from the conveying roller 19a side toward the conveying roller 19b side.

On the upstream side of the conveying roller 19a, a winding machine (not shown) for winding the film material 2 to be subjected to laser processing is provided. On the downstream side of the conveying roller 19b, there is provided a winder (not shown) for winding the film material 2 subjected to the laser processing.

A laser processing unit 4 is disposed above the adsorption table 6. The laser processing unit 4 includes a laser light source 42 for outputting laser light 41 for processing and a laser light source 41 for outputting the laser light 41 output from the laser light source 42 to a film material 2 for irradiating the surface of the substrate W with a laser beam. For example, a CO 2 laser or the like can be used for the laser light source 42, but the type of the laser is not particularly limited in the present invention.

The optical system 43 has a mirror 43a that reflects and guides the laser beam 41 to the film material 2 on the attracting table 6 and the like. The optical system 43 may have a suitable optical member such as a homogenizer or a cylindrical lens. The optical system 43 can relatively change the irradiating position of the laser beam 41 on the film material 2 and can perform laser processing such as imaging on the film material 2 by the laser beam 41. [ Can be performed.

Next, the operation of the adsorption apparatus 3 shown in Figs. 1 and 2 and the laser machining apparatus 1 including the same will be described.

Hereinafter, the case where the film material 2 has a width corresponding to two regions of the adsorption regions 62a to 62d will be described.

Prior to the laser processing, a suction table 6 having a suction portion 61 is provided on the base 5. Then, the opening / closing valve 11 of the gas supply line 10 is closed and the opening / closing valve 8 of the vacuum exhaust line 7 is opened. In this state, the interior of the cavity 51 is vacuum-evacuated by the vacuum pump 9 connected to the other end of the vacuum evacuation line 7. As a result, the suction pad suction portion 52 is evacuated through the plurality of ventilation holes and the cavity portion 51 formed in the suction pad suction portion 52, And is installed and fixed.

Subsequently, the film material 2 is conveyed on the suction portion 61 by the conveying rollers 19a and 19b, and the portion of the film material 2 to be subjected to the laser processing is placed on the suction portion 61, (2) is stopped. At this time, the film material 2 having a width corresponding to two regions of the adsorption regions 62a to 62d is adhered to the film material 2 and the adsorption device 3 (for example, ) Is set in advance.

The opening and closing valves 14b and 14c of the vacuum exhaust lines 13b and 13c connected to the compartment portions 63b and 63c corresponding to the overlapping adsorption regions 62b and 62c of the film material 2 are opened, Closing valves 14a and 14d of the other vacuum exhaust lines 13a and 13d are closed. In addition, all of the opening and closing valves 17a to 17d of the gas supply lines 16a to 16d are closed.

Subsequently, the evacuation of the compartment portions 63b and 63c is performed by the vacuum pump 15 through the vacuum evacuation lines 13b and 13c. As a result, in the adsorption regions 62b and 62c where the film material 2 overlaps, a differential pressure is generated through a plurality of ventilation holes formed in the adsorption regions 62b and 62c, and the film material 2 is adsorbed to the adsorption regions 62b and 62c. 62c.

The film material 2 is adsorbed and fixed in the adsorption regions 62b and 62c and then the laser light 41 is outputted from the laser light source 42. [ The laser beam 41 is irradiated onto the film material 2 on the adsorption table 6 by the optical system 43 while drawing a predetermined trajectory in accordance with the contents of the laser processing. In this way, the film material 2 is subjected to laser processing with the laser beam 41.

The closing valves 14b and 14c of the vacuum exhaust lines 13b and 13c connected to the compartment portions 63b and 63c are closed and the gas supply lines 63b and 63c connected to the compartment portions 63b and 63c are closed 16b, 16c are opened by opening and closing valves 17b, 17c. Further, the open / close valves 17a and 17d of the other gas supply lines 16a and 16d are kept closed.

Subsequently, the gas supply source 18 supplies gas to the compartment portions 63b and 63c through the gas supply lines 16b and 16c. As the gas supplied by the gas supply source 18, an inert gas such as nitrogen gas, argon gas, or air such as clean dry air is used.

As a result, the gas is supplied through the plurality of ventilation holes formed in the adsorption regions 62b and 62c to the adsorption regions 62b and 62c to which the film material 2 is adsorbed, 2 is released. In addition, depending on the amount of gas supplied, the film material 2 can also be pulled out from the suction portion 61 and peeled off. After the adsorption of the film material 2 is released, the open / close valves 17b and 17c are closed.

Subsequently, the film material 2 to which the adsorption is released by the conveying rollers 19a, 19b is conveyed, and a portion to be subjected to the next treatment is placed on the adsorption section 61 and the same processing is performed.

Thereafter, by repeatedly repeating the adsorption of the film material 2, the laser processing, the release of the adsorption of the film material 2, and the conveyance of the film material 2 in the same manner as described above, Laser processing can be performed.

Next, a case where the film material 2 subjected to the laser processing is changed to the width of three regions in the attraction regions 62a to 62d will be described.

First, the film material 2 having a large width is conveyed by the conveying rollers 19a and 19b, and a portion of the film material 2 to be subjected to laser processing is placed on the attracting portion 61. [ Thereafter, the conveyance of the film material 2 is stopped. At this time, the film material 2 having the widths of three regions of the adsorption regions 62a to 62d is sandwiched between the film material 2 and the adsorption regions 62a, 62b, 62c so as to overlap, for example, (3) is set in advance.

Then, the opening / closing valves 14a, 14b, 14c of the vacuum exhaust lines 13a, 13b, 13c connected to the compartment portions 63a to 63c corresponding to the suction regions 62a, 62b, 62c, 14c are closed and the open / close valve 14d of the other vacuum exhaust line 13d is closed. In addition, all of the opening and closing valves 17a to 17d of the gas supply lines 16a to 16d are closed.

Subsequently, the vacuum pump 15 performs evacuation of the compartment portions 63a, 63b, and 63c through the vacuum exhaust lines 13a, 13b, and 13c. As a result, in the adsorption regions 62a, 62b and 62c in which the film material 2 overlaps, a differential pressure is generated through a plurality of ventilation holes formed in the adsorption regions 62a, 62b and 62c, (62a, 62b, 62c).

The film material 2 is adsorbed and fixed on the adsorption regions 62a, 62b and 62c, and then the laser light 41 is outputted from the laser light source 42. [ The laser beam 41 is irradiated onto the film material 2 on the adsorption table 6 by the optical system 43 while drawing a predetermined trajectory in accordance with the contents of the laser processing. In this way, the film material 2 is subjected to laser processing with the laser beam 41.

Closing valves 14a, 14b and 14c of the vacuum exhaust lines 13a, 13b and 13c connected to the compartment portions 63a, 63b and 63c are closed and the compartment portions 63a, 63b and 63c Closing valves 17a, 17b, and 17c of the gas supply lines 16a, 16b, and 16c connected to the gas supply lines 16a, 16b, and 16c. In addition, the open / close valve 17d of the other gas supply line 16d maintains the closed state.

Subsequently, gas is supplied to the compartment portions 63a, 63b, and 63c through the gas supply lines 16a, 16b, and 16c by the gas supply source 18.

Thus, the gas is supplied through the plurality of vent holes formed in the adsorption regions 62a, 62b, 62c to the adsorption regions 62a, 62b, 62c to which the film material 2 is adsorbed, The adsorption of the film material 2 is released. In addition, depending on the supply of the gas, the film material 2 can also be pulled out from the suction portion 61 and peeled off. After the adsorption of the film material 2 is released, the on-off valves 17a, 17b, 17c are closed.

Subsequently, the film material 2 to which the adsorption is released by the conveying rollers 19a, 19b is conveyed, and a portion to be subjected to the next treatment is placed on the adsorption section 61 and the same processing is performed.

Thereafter, by repeatedly repeating the adsorption of the film material 2, the laser processing, the release of the adsorption of the film material 2, and the conveyance of the film material 2 in the same manner as described above, Laser processing can be performed.

As described above, even if the film material 2 is changed to have a different width, the adsorption regions 62a to 62d to be adsorbed according to the width of the film material 2 can be easily changed by appropriately changing them. Therefore, it is possible to improve the working efficiency of adsorption and fixing of the film material 2, and further, the working efficiency of the laser processing can be improved.

When the width of the film material 2 does not correspond to the width of the adsorption regions 62a to 62d and the width direction end portion of the film material is positioned at the center of the adsorption region or the like, It is possible to cope with this by replacing the width of the region with the width of the film material 2.

In the case of exchanging the adsorption column 6, the adsorption column 6 fixed on the base 5 is detached as described below, and a new adsorption column is fixed on the base 5 in the following manner.

First, the opening / closing valve 8 of the vacuum exhaust line 7 is closed and the opening / closing valve 11 of the gas supply line 10 is opened. In this state, the gas is supplied from the gas supply source 12 connected to the other end of the gas supply line 10. The gas is supplied to the adsorbing adsorption unit 52 through a plurality of air holes formed in the gas supply line 10, the cavity 51, and the adsorption adsorption unit 52. As a result, the differential pressure for adsorbing the adsorption bands 6 is eliminated, and the adsorption of the adsorption bands 6 is released. Thereafter, the adsorption table 6 from which adsorption is released is separated from the base 5.

Next, a new adsorption table (not shown) having an adsorption area of a size corresponding to the size of the film material 2 to be subjected to laser processing is provided on the base 5. Next, the open / close valve (11) of the gas supply line (10) is closed and the open / close valve (80) of the vacuum exhaust line (7) is opened. In this state, the vacuum is evacuated by the vacuum pump 9 connected to the other end of the vacuum evacuation line 7. Thus, the adsorbing-adsorbing portion 52 is evacuated through the plurality of vent holes formed in the adsorbing-adsorbing portion 52 and the cavity portion 51. As a result, a new adsorbent is adsorbed on the base 5 by the differential pressure and is set and fixed.

As described above, since the adsorption bands can be easily exchanged, the film material 2 of a size that can not cope with the change of the adsorption regions 62a to 62d to be adsorbed can be easily dealt with. Further, in the modified adsorption band, if the width of the adsorption region matches the width of the adsorption region, the film material 2 having a different size can be further subjected to laser processing.

In the above embodiment, the film material 2 having the shape of a long-length band has been described. However, the film material 2 is not limited to a shape having a long-band shape, and may have any shape.

Although the film material 2 is adsorbed on the adsorption device 3 and the film material 2 is subjected to laser processing in the above embodiment, the adsorbed substance adsorbed on the adsorption device 2 is not limited to the film It is not limited to the material, but may be any material which can be adsorbed by differential pressure. In addition, the treatment to be performed on the respiratory complex is not limited to laser processing, and various treatments can be performed.

Although the adsorption section 61 is described as being divided into the four adsorption regions 62a to 62d in the above embodiment, the number of the adsorption regions and the form of the adsorption section are not limited to the above contents, The shape and the like of the respiratory complex to be inspected.

1: laser processing device 2: film material
3: Adsorption device 4: Laser machining part
5: anticipation 52: adsorption adsorption part
6: suction table 61: suction table
62a to 62d: Adsorption regions 63a to 63d:
7: vacuum exhaust line 8: opening / closing valve
10: gas supply line 11: opening / closing valve
13a to 13d: Vacuum exhaust lines 14a to 14d:
16a to 16d: gas supply lines 17a to 17d:
19a and 19b:

Claims (10)

Characterized in that the adsorbing section is divided into a plurality of adsorption regions capable of independently performing adsorption operations. The method according to claim 1,
Wherein a vacuum exhaust line and a gas supply line are connected to each of the adsorption regions in such a manner that the vacuum exhaust line and the gas supply line are communicable with each other, and an opening / closing valve is provided in the vacuum exhaust line and the gas supply line, respectively. 3. The method of claim 2,
Wherein a plurality of ventilation holes for adsorption are formed in the respective adsorption regions of the adsorption units. The method of claim 3,
Wherein a plurality of compartment portions communicating with the plurality of ventilation holes are provided for each of the suction regions,
Wherein the vacuum exhaust line and the gas supply line are communicably connected to the adsorption region through the plurality of ventilation holes and the compartment portion. 5. The method according to any one of claims 1 to 4,
Wherein the adsorption unit is provided on an adsorption table which is detachably installed on a base. 6. The method of claim 5,
Wherein the base includes an adsorption-adsorption section for adsorbing and fixing the adsorption column by differential pressure. 7. The method according to any one of claims 1 to 6,
Wherein the adsorbent to be adsorbed is a film material. 8. The method of claim 7,
The film material has a shape of a long band and is adsorbed and released on the adsorbing part while being intermittently conveyed along the long direction,
Wherein the plurality of adsorption regions are arranged in a direction orthogonal to the transport direction and are arranged along the transport direction. An adsorption apparatus according to any one of claims 1 to 8,
And a processing unit which performs a predetermined process on the respiratory organs adsorbed on the adsorption unit. 10. The method of claim 9,
Wherein the processing portion is a laser processing portion that performs laser processing on the respiratory complex.
KR1020137034905A 2011-07-19 2012-06-25 Adsorption device and processing device KR20140034874A (en)

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